A double L-type gate valve for semiconductor equipment

Abstract

The present invention discloses a double L-shaped gate valve for semiconductor equipment, which relates to the field of gate valves and includes a valve body, a valve seat fixedly mounted on the valve body, a drive assembly symmetrically fixed to the valve body for adjusting the position of a first adjustment mechanism, and a first adjustment mechanism for controlling the movement of a valve plate along an "L"-shaped path. The first adjustment mechanism is interconnected with the drive assembly, and the first adjustment mechanism is interconnected with the valve plate, and the first adjustment mechanism is symmetrically distributed about the central axis of the valve body. The double L-shaped gate valve for semiconductor equipment adopts a double "L"-shaped movable valve plate structure, which allows the sealing ring on the valve plate to move up and down without contacting the valve seat, thereby preventing friction damage between the sealing ring and the valve seat, thereby increasing the service life of the sealing ring. It also prevents the sealing ring from wearing and generating debris that affects subsequent semiconductor processing, thereby ensuring cleanliness during semiconductor processing.

Description

Technical Field

[0001] The present invention relates to the technical field of gate valves, in particular to a double L-shaped gate valve for semiconductor equipment. Background Art

[0002] Semiconductor equipment plays a vital role in the semiconductor industry, running through the entire chip manufacturing process, including wafer processing (front-end) and packaging and testing (back-end). In the front-end process, equipment such as photolithography machines, etchers, and thin film deposition equipment are used to write wafer circuit patterns, deposit and remove materials; in the back-end process, saws, probe stations, testers, etc. complete the physical packaging and performance verification of chips. In order to ensure the sealing of semiconductor equipment, the channels within the semiconductor diffusion equipment need to be opened and closed by gate valves to ensure the normal operation of the semiconductor equipment.

[0003] Existing gate valve devices, such as a gate valve for sealing a vacuum chamber and a vacuum chamber using the gate valve, are disclosed in publication number CN209511158U. The gate valve includes a gate valve assembly and a drive assembly for driving the gate valve assembly. The gate valve assembly includes a guide rail, a push plate slidingly arranged on the guide rail, and a sealing plate movably connected to one side of the push plate via a connecting rod. One end of the connecting rod is hinged to the push plate, and the other end is hinged to the sealing plate. The drive assembly drives the push plate to move along the guide rail. The gate valve assembly also includes a fixed limit structure for limiting the maximum stroke of the sealing plate. The gate valve can be used for sealing a vacuum chamber. The gate valve of the utility model has a novel structure. When used in adjacent vacuum chambers, it shortens the distance between the two vacuum chambers, avoids the use of a transition chamber, shortens the length of the manipulator, saves production costs, and improves production efficiency.

[0004] During actual use of the above-mentioned existing gate valve, the movement of the valve plate is a linear reciprocating motion up and down, which leads to a large friction between the seal and the valve seat during the opening and closing process of the valve, which not only affects the service life and sealing effect of the valve seal, but also causes debris generated by the friction of the seal to enter the semiconductor equipment, affecting the cleanliness during semiconductor processing. Summary of the Invention

[0005] The object of the present invention is to provide a double L-shaped gate valve for semiconductor equipment to solve the problems raised in the above background technology.

[0006] To achieve the above-mentioned object, the present invention provides the following technical solution: a double L-shaped gate valve for semiconductor equipment, comprising a valve body, a valve seat fixedly mounted on the valve body, and a drive assembly symmetrically fixed on the valve body for adjusting the position of a first adjustment mechanism;

[0007] a first regulating mechanism, for controlling the movement of the valve plate along an "L"-shaped path, the first regulating mechanism being interconnected with the drive assembly, the first regulating mechanism being interconnected with the valve plate, and the first regulating mechanism being symmetrically distributed vertically about the central axis of the valve body;

[0008] The second regulating assembly is used to control the extension and retraction of the valve plate. The second regulating assembly is connected to the valve plate and is symmetrically arranged in the first regulating mechanism.

[0009] Preferably, a boss is fixedly mounted on the valve body, and a receiving groove for receiving the first adjusting mechanism is symmetrically arranged in the upper and lower parts of the boss, and an L-shaped guide groove for guiding and limiting is also symmetrically provided on the valve body. The first adjusting mechanism can be accommodated through the receiving groove, thereby realizing the accommodation of the valve plate, providing a basic guarantee for the normal operation of the valve, and cooperating with the function of the L-shaped guide groove, it can provide a basic guarantee for realizing the guiding and limiting of the first adjusting mechanism.

[0010] Preferably, valve holes are symmetrically opened on the valve seat, and the valve holes and the valve plates are distributed in a one-to-one correspondence. The one-to-one correspondence between the valve holes and the valve plates can provide a basic guarantee for the opening and closing of the valve holes.

[0011] Preferably, the driving assembly includes a cylinder symmetrically fixed on the valve body, and an output shaft that can move up and down is connected to the cylinder. The cylinder is also fixed with an electromagnetic valve. The output shaft is driven to move by the cylinder, which can provide a basic force for the movement of the first adjusting mechanism, thereby ensuring the normal operation of the device.

[0012] Preferably, the first adjusting mechanism includes a movable plate that is slidably connected to the valve body, and sliding rods are fixed symmetrically on the left and right of the movable plate, and the sliding rods are nested in the L-shaped guide groove for sliding. When the movable plate is subjected to force to move, the sliding action between the sliding rod and the L-shaped guide groove can not only ensure the stability of the movement of the movable plate, but also provide basic guarantee for the "L"-shaped displacement of the movable plate.

[0013] Preferably, a vertical plate is fixed on the side of the movable plate close to the output shaft, and a slide groove is opened on the vertical plate, and the slide groove consists of an inclined groove and a vertical groove. At the same time, there is a sliding connection between the slide groove and the convex shaft. The convex shaft is fixed on the mounting plate symmetrically on the left and right, and the mounting plate is fixed to the end of the output shaft. The mounting plate is driven to move by the output shaft, thereby providing a basic force for the movement of the convex shaft. Combined with the sliding action between the convex shaft and the slide groove, it can provide a basic guarantee for the movement of the movable plate.

[0014] Preferably, the valve plate and the movable plate are slidably connected, and a sealing ring with an annular structure is fixed on the side of the valve plate close to the valve seat, and the sealing ring cooperates with the valve seat to achieve sealing. At the same time, the sealing ring is made of fluororubber, and the size of the sealing ring is larger than the size of the valve hole. The valve can be closed through the sealing effect between the sealing ring and the valve seat, thereby ensuring the normal operation of the device.

[0015] Preferably, the second adjustment assembly includes a fixed plate symmetrically fixed in the movable plate front and back, and a guide rod is slidably connected to the fixed plate, and the guide rod and the valve plate are fixedly connected. Through the sliding guiding action between the guide rod and the fixed plate, the valve plate can be guaranteed to make stable linear movement.

[0016] Preferably, the end of the guide rod is rotatably connected to one end of the connecting rod, and the other end of the connecting rod is rotatably connected to the top rod, and a rollable ball is installed at the lower end of the top rod, and the ball is in contact with the boss and can roll. The top rod and the movable plate are slidably connected. When the movable plate moves down until the ball contacts the boss, it can provide a basic force for the movement of the top rod. Combined with the rolling action between the ball and the boss, it can ensure that the movable plate can move back and forth normally.

[0017] Preferably, the push rod and the ear plate are slidably connected, and the ear plate is fixed in the movable plate symmetrically front and back. A circular plate is also fixed on the push rod, and the circular plate and one end of the spring are fixed to each other, and the other end of the spring is fixed to the ear plate. The sliding guiding action between the push rod and the ear plate can ensure the stability of the push rod movement, and the elastic action of the spring can provide a basic force for the reset of the push rod, thereby providing a basic guarantee for the storage of the valve plate and the sealing ring.

[0018] Compared with the prior art, the present invention has the following beneficial effects:

[0019] 1. The double L-shaped gate valve used in this semiconductor equipment adopts a double "L"-shaped movable valve plate structure. This allows the sealing ring on the valve plate to move up and down without contacting the valve seat, thereby avoiding friction damage between the sealing ring and the valve seat, thereby increasing the service life of the sealing ring. It also prevents the sealing ring from wearing out and generating debris that affects the subsequent semiconductor processing, ensuring the cleanliness during semiconductor processing;

[0020] 2. The double L-shaped gate valve used in this semiconductor equipment adopts a linked second adjustment component. When the valve is closed, it can automatically move the valve plate and sealing ring outward by one end to ensure the normal sealing effect between the sealing ring and the valve seat. When the valve plate and sealing ring are stored, the valve plate and sealing ring can be stored in the movable plate, thereby avoiding friction between the sealing ring and the storage groove, further ensuring the service life of the sealing ring. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 This is a schematic diagram of the overall three-dimensional structure of the valve of the present invention;

[0022] Figure 2 This is a schematic diagram of the overall front view cross-sectional three-dimensional structure of the valve of the present invention;

[0023] Figure 3 This is a schematic diagram of the front cross-sectional three-dimensional structure of the valve body of the present invention;

[0024] Figure 4 This is a schematic diagram of the rear perspective structure of the valve plate and valve seat of the present invention;

[0025] Figure 5 For the present invention Figure 4 A in the middle is an enlarged structural diagram;

[0026] Figure 6 This is a structural schematic diagram of the valve plate of the present invention in an extended state;

[0027] Figure 7 This is a schematic structural diagram of the valve plate in the retracted state of the present invention;

[0028] Figure 8 This is a schematic diagram of the structure of the valve plate and the fixed plate of the present invention;

[0029] Figure 9 For the present invention Figure 8 Enlarged structural diagram at point B in the middle.

[0030] In the figure: 1. valve body; 101. boss; 102. receiving groove; 103. L-shaped guide groove; 2. valve seat; 201. valve hole; 3. drive assembly; 301. cylinder; 302. output shaft; 303. solenoid valve; 4. first adjusting mechanism; 401. movable plate; 402. slide rod; 403. vertical plate; 404. slide groove; 405. cam; 406. mounting plate; 5. valve plate; 501. sealing ring; 6. second adjusting assembly; 601. fixed plate; 602. guide rod; 603. connecting rod; 604. push rod; 605. ball; 606. ear plate; 607. round plate; 608. spring. DETAILED DESCRIPTION

[0031] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0032] See also Figures 1-9The present invention provides a technical solution: a double L-shaped gate valve for semiconductor equipment, comprising a valve body 1, a valve seat 2 fixedly mounted on the valve body 1, and a drive assembly 3 symmetrically fixed on the valve body 1 for adjusting the position of a first adjustment mechanism 4;

[0033] The first regulating mechanism 4 is used to control the movement of the valve plate 5 along an "L"-shaped path. The first regulating mechanism 4 is interconnected with the driving assembly 3 and the valve plate 5. The first regulating mechanism 4 is symmetrically distributed about the central axis of the valve body 1.

[0034] The second adjusting assembly 6 is used to control the extension and retraction of the valve plate 5 . The second adjusting assembly 6 is connected to the valve plate 5 . The second adjusting assembly 6 is symmetrically arranged in the first adjusting mechanism 4 .

[0035] A boss 101 is fixedly mounted on the valve body 1, and a receiving groove 102 for receiving the first adjusting mechanism 4 is symmetrically arranged in the boss 101, and an L-shaped guide groove 103 for guiding and limiting is also symmetrically provided on the valve body 1; a valve hole 201 is also symmetrically provided on the valve seat 2, and the valve hole 201 is distributed one-to-one with the valve plate 5; the drive assembly 3 includes a cylinder 301 symmetrically fixed on the valve body 1, and an output shaft 302 that can move up and down is connected to the cylinder 301, and an electromagnetic valve 303 is also fixed to the cylinder 301; the first adjusting mechanism 4 includes a movable plate 401 that is slidably connected to the valve body 1, and a slide rod 402 is symmetrically fixed on the movable plate 401, and the slide rod 40 2 is nested in the L-shaped guide groove 103 for sliding; a vertical plate 403 is fixed on the side of the movable plate 401 close to the output shaft 302, and a slide groove 404 is opened on the vertical plate 403, and the slide groove 404 is composed of an inclined groove and a vertical groove. At the same time, the slide groove 404 is slidably connected to the protruding shaft 405, and the protruding shaft 405 is fixed to the mounting plate 406 symmetrically on the left and right, and the mounting plate 406 is fixed to the end of the output shaft 302; the valve plate 5 and the movable plate 401 are slidably connected, and a ring-shaped sealing ring 501 is fixed on the side of the valve plate 5 close to the valve seat 2, and the sealing ring 501 cooperates with the valve seat 2 to achieve sealing. At the same time, the material of the sealing ring 501 is fluororubber, and the size of the sealing ring 501 is larger than the size of the valve hole 201;

[0036] When using the double L-type gate valve for semiconductor equipment, Figures 1-9As shown, when the valve is closed, it is only necessary to control the operation of the cylinder 301 so that the output shaft 302 extends outward, thereby driving the mounting plate 406 and the convex shaft 405 to move downward. Since the slide rod 402 is nested in the vertical groove on the L-shaped guide groove 103 and slides, the convex shaft 405 and the slide groove 404 cannot slide, thereby ensuring that the movable plate 401, the valve plate 5 and the sealing ring 501 move stably toward the boss 101. When the slide rod 402 slides to the end of the vertical groove on the L-shaped guide groove 103, the movable plate 401 is in contact with the boss 101. By controlling the output shaft 302 to continue to extend, As a result, the mounting plate 406 and the convex shaft 405 continue to move downward. At this time, since the slide rod 402 slides to the end of the vertical groove on the L-shaped guide groove 103, the movable plate 401, the valve plate 5 and the sealing ring 501 cannot move further downward, so that the convex shaft 405 slides in the inclined groove of the slide groove 404. Through the sliding action between the convex shaft 405 and the inclined groove on the slide groove 404, the vertical plate 403, the movable plate 401, the valve plate 5 and the sealing ring 501 move horizontally toward the side of the valve seat 2, so that the valve plate 5 and the sealing ring 501 move along the "L"-shaped route. When the convex shaft 405 slides to the end of the inclined groove on the slide groove 404, the sealing ring 501 is When the ring 501 contacts the valve seat 2 to achieve sealing, and the output shaft 302 continues to extend, so that the convex shaft 405 can continue to slide in the vertical groove on the slide groove 404, until the convex shaft 405 slides to the end of the vertical groove on the slide groove 404, thereby achieving the locking effect of the position of the valve plate 5 and the sealing ring 501, ensuring the sealing effect of the valve closing. According to the above principle, when the valve is opened, the output shaft 302 shrinks into the cylinder 301, and when the convex shaft 405 slides along the vertical groove on the slide groove 404, the sealing ring 501 and the valve seat 2 are in a sealed state. When the convex shaft 405 slides along the inclined groove on the slide groove 404 When sliding, the sliding action of the slide rod 402 along the horizontal grooves on the L-shaped guide groove 103 is coordinated to make the valve plate 5 and the sealing ring 501 move away from the valve seat 2. When the slide rod 402 slides along the vertical grooves on the L-shaped guide groove 103, the valve plate 5 and the sealing ring 501 move upward. Therefore, when the valve is opened and closed, the up and down movement of the sealing ring 501 does not contact the valve seat 2 to generate friction, which can avoid wear of the sealing ring 501 and effectively ensure the service life of the sealing ring 501. It can also avoid the sealing ring 501 from generating debris due to friction and affecting the semiconductor processing environment, thereby better meeting actual use requirements.

[0037] The second adjustment assembly 6 includes a fixed plate 601 that is symmetrically fixed in the movable plate 401 front to back, and a guide rod 602 is slidably connected to the fixed plate 601, and the guide rod 602 and the valve plate 5 are fixedly connected; the end of the guide rod 602 is rotatably connected to one end of the connecting rod 603, and the other end of the connecting rod 603 is rotatably connected to the top rod 604, and a rollable ball 605 is installed at the lower end of the top rod 604, and the ball 605 is in contact with the boss 101 and can roll, and the top rod 604 and the movable plate 401 are slidably connected; the top rod 604 and the ear plate 606 are slidably connected, and the ear plate 606 is symmetrically fixed in the movable plate 401 front to back, and a circular plate 607 is also fixed on the top rod 604, and the circular plate 607 and one end of the spring 608 are fixed to each other, and the other end of the spring 608 is fixed to the ear plate 606;

[0038] During the valve closing process, when the movable plate 401 moves toward the boss 101, Figures 1-9 As shown, the movement of the movable plate 401 synchronously drives the second adjustment component 6 to move. When the ball 605 contacts the boss 101, the movable plate 401 continues to move downward, causing the push rod 604 to be forced to move upward relative to the movable plate 401. At this time, the spring 608 is forced to contract, and the sliding guide effect between the push rod 604, the movable plate 401 and the ear plate 606 can ensure the stability of the movement of the push rod 604. During the movement of the push rod 604, the transmission effect of the connecting rod 603 is used to make the guide rod 602 slide toward the outside of the movable plate 401, thereby driving the valve plate 5 and the sealing ring 501 to move toward the outside of the movable plate 401. The sliding guide effect between the guide rod 602 and the fixed plate 601 can ensure the stability of the movement of the valve plate 5 and the sealing ring 501, thereby realizing the adjustment of the position of the valve plate 5 and the sealing ring 501 relative to the movable plate 401. When the movable plate 401 contacts the boss 101, the valve plate 5 and the sealing ring 501 are unfolded, ensuring the normal sealing of the subsequent sealing ring 501 and the valve seat 2. When the movable plate 401 moves upward, according to the above principle, when the ball 605 separates from the boss 101, the spring 608 resets the push rod 604, thereby moving the valve plate 5 and the sealing ring 501 toward the inside of the movable plate 401. When the push rod 604 is reset, the valve plate 5 and the sealing ring 501 completely enter the movable plate 401, thereby ensuring that when the movable plate 401 is subsequently stored in the receiving groove 102, the sealing ring 501 will not rub against the inner wall of the receiving groove 102, further avoiding damage to the sealing ring 501 due to friction, thereby further ensuring the service life of the sealing ring 501. This is the working principle of the double L-type gate valve for semiconductor equipment.

[0039] It should be noted that, in this article, the terms "comprises", "includes" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article or apparatus that includes a series of elements includes not only those elements, but also includes other elements not explicitly listed, or also includes elements that are inherent to such process, method, article or apparatus.

[0040] This article uses specific examples to illustrate the principles and implementation methods of the present invention. The above examples are only used to help understand the method of the present invention and its core ideas. The above is only a preferred implementation method of the present invention. It should be pointed out that due to the limitations of textual expression, there are objectively infinite specific structures. For ordinary technicians in this technical field, without departing from the principles of the present invention, they can make several improvements, modifications or changes, and can also combine the above technical features in an appropriate manner; these improvements, modifications, changes or combinations, or the direct application of the inventive concept and technical solution to other occasions without improvement, should be regarded as the scope of protection of the present invention.

Claims

1. A double L-shaped gate valve for semiconductor equipment, comprising a valve body, on which a valve seat is fixedly mounted, characterized in that: A driving assembly for adjusting the position of the first adjusting mechanism is fixed symmetrically on the valve body. a first regulating mechanism, for controlling the valve plate to move along an L-shaped path, wherein the first regulating mechanism is interconnected with the driving assembly, and the first regulating mechanism is interconnected with the valve plate; a second adjusting assembly for controlling the extension and retraction of the valve plate, the second adjusting assembly being interconnected with the valve plate and being symmetrically arranged front-to-back within the first adjusting mechanism; The valve body is fixedly mounted with a boss, and a receiving groove for accommodating the first adjusting mechanism is symmetrically arranged in the boss up and down, and the valve body is also symmetrically provided with an L-shaped guide groove for guiding and limiting; the first adjusting mechanism includes a movable plate that is slidably connected to the valve body, and sliding rods are symmetrically fixed on the movable plate, and the sliding rods are nested in the L-shaped guide groove for sliding, a vertical plate is fixed on the side of the movable plate close to the output shaft, and a sliding groove is provided on the vertical plate, and the sliding groove consists of an inclined groove and a vertical groove, and at the same time, the sliding groove and the convex shaft are slidably connected, the convex shaft is symmetrically fixed on the mounting plate, and the mounting plate is fixed to the end of the output shaft, and the valve seat is also symmetrically provided with a valve hole up and down, and the valve hole and the valve The plates are distributed one-to-one, the valve plate and the movable plate are slidingly connected, and a sealing ring of an annular structure is fixed on the side of the valve plate close to the valve seat, and the sealing ring cooperates with the valve seat to achieve sealing. At the same time, the sealing ring is made of fluororubber, and the size of the sealing ring is larger than the size of the valve hole. The second adjusting assembly includes a fixed plate fixed in the movable plate symmetrically front and back, and a guide rod is slidingly connected to the fixed plate, and the guide rod and the valve plate are fixedly connected, the end of the guide rod is rotatably connected to one end of the connecting rod, and the other end of the connecting rod is rotatably connected to the push rod, and a rollable ball is installed at the lower end of the push rod, and the ball contacts and rolls in contact with the boss, and the push rod and the movable plate are slidingly connected.

2. The double L-shaped gate valve for semiconductor equipment according to claim 1, characterized in that: The driving assembly includes a cylinder which is symmetrically fixed on the valve body in an upper and lower direction, and an output shaft which can move up and down is connected to the cylinder, and a solenoid valve is also fixed on the cylinder.

3. The double L-shaped gate valve for semiconductor equipment according to claim 2, characterized in that: The push rod is slidably connected to the ear plate, and the ear plate is fixed in the movable plate symmetrically front and back. A circular plate is also fixed on the push rod, and the circular plate and one end of the spring are fixed to each other, and the other end of the spring is fixed to the ear plate.

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