Gas distribution equipment and semiconductor equipment

Abstract

The present invention discloses a gas distribution device and semiconductor equipment. The gas distribution device includes a cover body provided with an air inlet; a spray member movably mounted on the cover body, with a diffusion chamber in communication with the air inlet formed between the spray member and the cover body; a lifting and isolating device including a partition portion and a lifting portion. The lifting portion is movably mounted on the partition portion, with the top portion being in contact with the cover body so as to generate interaction forces between the lifting portion and the partition portion and the cover body respectively. The partition portion is mounted on the spray member to enclose the diffusion chamber with the lifting portion into different air chambers; a driving device is mounted on the bottom of the spray member and extends outside the cover body. By controlling the driving device, the spray member and the partition portion are driven to move away from or toward the cover body, and the top portion of the lifting portion is driven to move toward or away from the cover body, so as to adjust the volume of the area enclosed by the lifting and isolating device. The semiconductor equipment includes a gas distribution device and a base arranged opposite to the gas distribution device and used to support a substrate. The present invention can improve the flexibility of airflow adjustment and enhance the compatibility of the equipment.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor equipment, and in particular to a gas distribution device and a semiconductor equipment. Background Art

[0002] The gas distribution system in semiconductor device processing equipment is a key component, providing the substrate with the source gases that form compound semiconductors. These gases then grow on the substrate, for example, by epitaxial growth to form a compound semiconductor thin film. The structure of the gas distribution system largely determines the flow and distribution of the source gases. Structural design, such as the size and arrangement of the spray holes, is crucial for matching chamber pressure with gas flow rate, achieving precise gas transport and fluid dynamics, thereby achieving high-quality thin film growth on the substrate.

[0003] In the prior art, the epitaxial growth of thin films on substrates of different sizes requires the adjustment of the gas flow through the partition coupling adjustment of the gas distribution device to improve the growth uniformity and film quality. However, since the existing technology uses fixed partitions to achieve partition coupling, the partitions and corresponding spray areas are fixed, and the flexibility of the airflow adjustment is limited. The use of fixed partitions also limits the compatibility of the gas distribution device. For example, the spray surface of a 250 mm gas distribution device is suitable for epitaxial growth on a substrate with a diameter of 12 inches. If it is replaced with a substrate with a diameter of 6 inches or smaller, it will cause a waste of reaction source gas and is not conducive to film uniformity. When the same gas injection device is adapted to the growth of substrates of different sizes, different gas distribution devices need to be replaced, and the process debugging needs to be repeated, resulting in poor equipment compatibility and high costs.

[0004] Therefore, it is necessary to provide a new gas distribution device and semiconductor equipment to solve the above problems existing in the prior art. Summary of the Invention

[0005] An object of the present invention is to provide a gas distribution device and a semiconductor device including the gas distribution device, so as to improve the flexibility of gas flow adjustment and enhance the compatibility of the device.

[0006] To achieve the above object, the technical solution of the present invention is as follows:

[0007] A gas distribution device, comprising:

[0008] The cover body is provided with an air inlet portion;

[0009] a spraying element, movably provided on the cover body, and forming a diffusion cavity communicated with the air inlet portion between the spraying element and the cover body;

[0010] A lifting isolation device includes a partition portion and a lifting portion, wherein the lifting portion is movably sleeved on the partition portion, and the top portion is in contact with the cover body so that the lifting portion generates interaction forces with the partition portion and the cover body respectively, and the partition portion is provided on the spray element to enclose the diffusion cavity into different air chambers together with the lifting portion;

[0011] A driving device is provided at the bottom of the spray element and extends outside the cover body. By controlling the driving device, the spray element and the partition part move away from or toward the cover body, and the top of the lifting part moves toward or away from the cover body, so as to adjust the volume of the area enclosed by the lifting isolation device.

[0012] A semiconductor device comprises the above-mentioned gas distribution device and a base arranged opposite to the gas distribution device and used for carrying a substrate.

[0013] By adopting the above technical solution, the lifting isolation device is arranged in the diffusion cavity formed between the spray part and the cover body, including a partition part and a lifting part that are movably mounted on each other, and the driving device is arranged at the bottom of the spray part and extends outside the cover body. Since the partition part is provided on the spray part, the spray part is movably provided on the cover body, and the top of the lifting part is fitted with the cover body, interaction forces are generated between the lifting part and the partition part and the cover body respectively. When the spray part and the partition part are driven away from or toward the cover body by controlling the driving device, the top of the lifting part can move toward or away from the cover body accordingly, so that the volume of the area enclosed by the lifting isolation device can be adjusted, that is, when the top of the lifting part moves toward the cover body until it is fitted with the cover body, an air chamber is formed between the lifting isolation device, the spray part and the cover body. When the top of the lifting part moves away from the cover body until the fitting relationship with the cover body is released, the air chamber originally enclosed by the lifting isolation device can be communicated with other air chambers in the diffusion cavity, so that the same gas distribution device can be used to achieve epitaxial growth of substrates of different sizes, and the spray area can also be flexibly adjusted in the gas distribution device to improve the flexibility of airflow adjustment and enhance equipment compatibility.

[0014] Optionally, the partition portion includes a plurality of partition members, each of which is detachably connected end to end to form a closed structure, and each of the partition members is detachably mounted on the spray member.

[0015] Optionally, one side wall of the partition member includes a first connecting member with a convex structure, and the other side wall includes a first connecting groove, and two adjacent partition members are detachably connected through the concave-convex fit between the first connecting member and the first connecting groove;

[0016] The first direction is defined as the protruding extension direction of the first connecting member toward the adjacent partition member; the size of the first connecting member in the second direction increases along the first direction and then decreases, and the second direction is perpendicular to the first direction.

[0017] Optionally, the lifting portion includes a plurality of lifting members that are detachably connected end to end, and the lifting members are movably sleeved on the partition member in a one-to-one correspondence.

[0018] Optionally, the gap between adjacent lifting members, the gap between adjacent partition members, and the gap between the outer side wall of the lifting member and the inner side wall of the corresponding partition member are all 0.01 to 0.05 mm.

[0019] Optionally, the lifting part includes a lifting member and an elastic member, the partition member is provided with a lifting groove from the top to accommodate the lifting member, the elastic member is arranged between the bottom surface of the lifting member and the bottom surface of the lifting groove, and when the top of the lifting member is in contact with the cover body, the elastic member is in a compressed state.

[0020] Optionally, the elastic member includes a temperature-resistant elastic member, and a component material of the temperature-resistant elastic member includes stainless steel, graphite or aluminum nitride.

[0021] Optionally, the lifting slot is connected to the first connecting slot, and opposite side walls of the lifting member respectively include a lifting protrusion and a lifting recess, and adjacent lifting members are detachably connected by the concave-convex fit between the lifting protrusion and the lifting recess;

[0022] The lifting recess is opposite to the first connecting groove, and is provided with a second connecting protrusion extending toward the bottom surface of the lifting groove, and the first connecting groove surrounds the second connecting protrusion;

[0023] The lifting protrusion is opposite to the first connecting member, and a second connecting groove is formed on the side wall thereof, and the second connecting groove also penetrates at least a portion of the side wall of the first connecting member;

[0024] The air tightness between adjacent lifting members and between adjacent partition members is enhanced by the concave-convex fit between the second connecting protrusion and the second connecting groove.

[0025] Optionally, the lifting tank includes:

[0026] A middle groove and an edge groove are formed on the top surface of the partition member and are connected to each other, wherein the middle groove further extends along the first direction until it passes through the first connecting member to accommodate the lifting member;

[0027] The edge groove is communicated with the middle groove and is movably sleeved with the second connecting protrusion. The second connecting protrusion extends from the side wall of the edge groove into the first connecting groove.

[0028] Optionally, the driving device includes:

[0029] A lifting ring is located below the spray element and surrounds the inner wall of the cover to support the spray element;

[0030] A base is provided on the inner wall of the cover body, and forms an air storage cavity with the lifting ring and the cover body, and the lifting ring, the base and the cover body are movably fitted together;

[0031] An air passage passes through the side wall of the cover body and is in communication with the air storage cavity, so that gas enters the air storage cavity through the air passage and pushes the lifting ring to drive the spraying element to move closer to or away from the cover body.

[0032] Optionally, the base includes:

[0033] An air-floating guide ring is provided on the inner wall of the cover body to form an annular groove with the lifting ring and the cover body, the annular groove is used to accommodate the lifting ring so that the lifting ring, the air-floating guide ring and the cover body can be movably fitted together;

[0034] An air flotation air chamber is provided at the bottom of the annular groove and communicates with the annular groove;

[0035] The air passage passes through the side wall of the cover body and is communicated with the air flotation air chamber, so that the gas enters the air flotation air chamber through the air passage to push the lifting ring to move in the annular groove.

[0036] Optionally, the spray member includes a plurality of spray holes, and the plurality of spray holes form a plurality of spray rings sequentially surrounded from the inside to the outside on the spray member, and each of the partition members is arranged between adjacent spray rings.

[0037] Optionally, the spray part includes a plurality of spray holes, and the plurality of spray holes form a plurality of spray circles on the spray part that are surrounded sequentially from the inside to the outside; some of the partition parts of the partition part are detachable positioning connectors corresponding to the spray holes, and the other partition parts are detachable extension connectors that are sequentially detachable between adjacent positioning connectors, and the extension connectors are located between adjacent spray circles.

[0038] Optionally, the spray element is further provided with a fixed isolation device, and the lifting isolation device is arranged outside the fixed isolation device. When the top of the lifting part is in contact with the cover body, an independent air chamber is formed between the fixed isolation device and the lifting isolation device.

[0039] Optionally, the spray part includes a plurality of spray holes, and the plurality of spray holes form a plurality of spray circles on the spray part that are surrounded sequentially from the inside to the outside; the fixed isolation device includes a plurality of fixed isolation plates that are detachably connected end to end, and each of the fixed isolation plates is arranged between adjacent spray circles.

[0040] Optionally, the spray part includes a plurality of spray holes, and the plurality of spray holes form a plurality of spray circles on the spray part that are surrounded sequentially from the inside to the outside; the fixed isolation device includes a plurality of fixed isolation plates that are detachably connected end to end, some of the fixed isolation plates are detachable positioning connectors corresponding to the spray holes, and other fixed isolation plates are extension connectors that are detachably arranged sequentially between adjacent positioning connectors, and the extension connectors are located between adjacent spray circles. BRIEF DESCRIPTION OF THE DRAWINGS

[0041] Figure 1 A cross-sectional view of the internal structure of a gas distribution device according to an embodiment of the present invention;

[0042] Figure 2 This is a schematic diagram of the assembly structure of a spray component, a lifting isolation device, and a fixed isolation device according to an embodiment of the present invention;

[0043] Figure 3 This is a schematic diagram of the assembly structure of another spray component, a lifting isolation device, and a fixed isolation device according to an embodiment of the present invention;

[0044] Figure 4 This is a schematic diagram of the assembly structure of a partition member and a lifting member according to an embodiment of the present invention;

[0045] Figure 5 A top view of the structure of a partition member according to an embodiment of the present invention;

[0046] Figure 6 This is a schematic diagram of the assembly structure between two adjacent partition members and two adjacent lifting members according to an embodiment of the present invention;

[0047] Figure 7 A cross-sectional view of an assembly structure of a lifting member and a partition member according to an embodiment of the present invention;

[0048] Figure 8 This is a structural diagram of a positioning connector with a positioning post provided at the bottom according to an embodiment of the present invention;

[0049] Figure 9 for Figure 1 Enlarged view of part A.

[0050] Reference numerals:

[0051] 100, cover; 200, spray element; 210, spray hole; 220, spray ring; 300, diffusion chamber; 310, central air chamber; 320, middle air chamber; 330, edge air chamber; 400, lifting isolation device; 410, partition; 420, lifting portion; 421, lifting element; 422, second connecting protrusion; 423, second connecting groove; 424, lifting protrusion; 425, lifting recess; 430, partition; 431. First connecting member; 432. First connecting groove; 433. Lifting groove; 434. Middle groove; 435. Edge groove; 436. Positioning column; 437. Positioning connector; 438. Extension connector; 520. Elastic member; 610. Lifting ring; 620. Base; 621. Air flotation guide ring; 622. Annular groove; 623. Air flotation air chamber; 624. Air duct; 700. Fixed isolation device; 710. Fixed isolation plate. DETAILED DESCRIPTION

[0052] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention. Unless otherwise defined, the technical terms or scientific terms used herein should be the common meanings understood by people with ordinary skills in the field to which the invention belongs. The words "including" and similar words used in this article mean that the elements or objects appearing before the word cover the elements or objects listed after the word and their equivalents, without excluding other elements or objects.

[0053] The following is combined with Figure 1-9 , the specific implementation methods of the present invention are further described in detail.

[0054] An embodiment of the present invention provides a gas distribution device for semiconductor equipment, including but not limited to chemical vapor deposition (CVD) equipment, and physical vapor deposition (PVD) equipment. The chemical vapor deposition equipment may be plasma-enhanced chemical vapor deposition (PECVD) equipment, metal-organic chemical vapor deposition (MOCVD) equipment, etc. This embodiment is described using MOCVD equipment as an example. It should be understood that this equipment is merely exemplary and the present invention is not limited to this type of equipment.

[0055] Reference Figure 1 , the gas distribution device comprises:

[0056] The cover 100 is provided with an air inlet portion;

[0057] The spraying element 200 is movably mounted on the cover 100 and a diffusion chamber 300 communicating with the air inlet is formed between the spraying element 200 and the cover 100;

[0058] The lifting and isolating device 400 includes a partition portion 410 and a lifting portion 420. The lifting and isolating device 400 is provided on the spray element 200 to separate the diffusion chamber 300 into different air chambers. The lifting portion 420 is sleeved within the partition portion 410. The top of the lifting portion 420 is in contact with the cover 100 so that the lifting portion 420 generates interaction forces with the partition portion 410 and the cover 100 respectively. The partition portion 410 is provided on the spray element 200 to enclose the diffusion chamber 300 into different air chambers together with the lifting portion 420.

[0059] The driving device is provided at the bottom of the spray part 200 and extends outside the cover body 100. By controlling the driving device, the spray part 200 and the partition part 410 move away from or toward the cover body 100, and the top of the lifting part 420 moves toward or away from the cover body 100, so as to adjust the volume of the area enclosed by the lifting isolation device 400.

[0060] In the embodiment of the present invention, since the partition part 410 is provided on the spraying part 200, the spraying part 200 is movably provided on the cover body 100, and the top of the lifting part 420 is in contact with the cover body 100, the lifting part 420 generates interaction forces with the partition part 410 and the cover body 100 respectively. When the spraying part 200 and the partition part 410 are driven away from or toward the cover body 100 by controlling the driving device, the top of the lifting part 420 can move toward or away from the cover body 100 accordingly, thereby adjusting the volume of the area enclosed by the lifting isolation device 400, that is, when the top of the lifting part 420 is moved, the lifting part 420 can move away from or away from the cover body 100. It moves toward the cover body 100 until it is in contact with the cover body 100, and an air chamber is formed between the lifting isolation device 400, the spray part 200 and the cover body 100. When the top of the lifting part 420 moves away from the cover body 100 until it is released from contact with the cover body 100, the air chamber originally surrounded by the lifting isolation device 400 can communicate with other air chambers of the diffusion chamber 300, so that the epitaxial growth of substrates of different sizes can be achieved using the same gas distribution device, and the spray area can also be flexibly adjusted in the gas distribution device to increase the flexibility of airflow adjustment and enhance equipment compatibility.

[0061] In some embodiments, the cover 100 is provided with multiple air inlets evenly distributed throughout the cover 100. These air inlets are connected to an external air supply device, which provides process gas. The process gas then enters the diffusion chamber 300 through the various air inlets. To evenly disperse the process gas, the cover 100 is also provided with a spray element 200. The spray element 200 is plate-shaped and has multiple spray holes 210 formed therein. The spray holes 210 extend through the thickness of the spray element 200. A gap exists between the end surface of the spray element 200 and the cover 100, forming a diffusion chamber 300 between the spray element 200 and the cover 100. The spray holes 210 communicate with the diffusion chamber 300. Process gas from the air inlets enters the diffusion chamber 300, then flows through the spray holes 210 and into the process chamber.

[0062] The spray element 200 is movably mounted on the cover 100 so as to move toward or away from the cover 100 under the drive mechanism. The cooperation between the two is necessary to ensure the airtightness of the joints, and the specific implementation method is a conventional technical means in this field. Specifically, the side walls of the spray element 200 are in contact with the inner wall of the side plate 120, and can be moved toward or away from the cover 100 under the drive mechanism to adjust the gap between the spray element 200 and the cover, so as to change the volume of the diffusion chamber 300 formed between the spray element 200 and the top wall of the cover 100, and ensure the airtightness of the joints between the side walls of the spray element 200 and the inner wall of the side plate. The process gas enters the diffusion chamber 300 through the air inlet, is mixed in the diffusion chamber 300, and enters the process chamber through the spray hole 210 to diffuse to the wafer surface.

[0063] In some embodiments, reference Figure 1 and Figure 2 The lifting portion 420 is sleeved in the partition portion 410 in a dynamic sealing manner. The lifting portion 420 cooperates with the partition portion 410 to jointly separate the diffusion chamber 300 into different air chambers.

[0064] In some embodiments, the partition portion 410 is integrally provided, the lifting portion 420 is integrally provided, and the lifting portion 420 is dynamically sealed and sleeved within the partition portion 410 .

[0065] In some embodiments, the partition portion 410 is an integrated arrangement, the lifting portion 420 is a split arrangement, and the lifting portion 420 is dynamically sealed and sleeved inside the partition portion 410. Adjacent lifting portions 420 are detachably connected and can ensure airtightness between each other.

[0066] In some embodiments, the partition portion 410 is a split configuration, the lifting portion 420 is a split configuration, and each lifting portion 420 is movably sleeved (eg, sleeved in a dynamic sealing manner) within the corresponding partition portion 410 .

[0067] In some specific embodiments, referring to Figure 1 and Figure 2 The partition portion 410 includes a plurality of partition members 430, each of which is detachably connected end to end to form a closed structure. Each partition member 430 is detachably mounted on the spraying member 200. The lifting portion 420 includes a plurality of lifting members 421 detachably connected end to end. The lifting members 421 are mounted one by one in the corresponding partition member 430 in a dynamic sealing manner.

[0068] In order to form a closed structure, each partition member 430 can be detachably connected end to end. Figure 4 A first connecting member 431 with a raised structure is provided on one side wall of the partition member 430, and a first connecting groove 432 is provided on the other side wall. Two adjacent partition members 430 are detachably connected by the concave-convex fit between the first connecting member 431 and the first connecting groove 432;

[0069] The first direction is defined as the protruding extension direction of the first connecting member 431 toward the adjacent partition member 430;

[0070] The size of the first connecting member 431 in the second direction increases along the first direction and then decreases, and the second direction is perpendicular to the first direction.

[0071] In some embodiments, the direction in which the first connector 431 extends toward the adjacent partition member 430 (i.e., the direction in which the sidewall of one partition member 430 points toward the direction in which the first connector 431 is provided on the other adjacent partition member 430, more specifically, the direction in which the protruding first connector 431 extends from the sidewall of the partition member 430 on which it is located toward the adjacent, detachably adaptable partition member 430) is defined as a first direction, and the direction perpendicular to the first direction is defined as a second direction. The dimension of the first connector 431 in the second direction (specifically, the cross-sectional dimension in the second direction) increases along the first direction and then decreases. When a large flow of gas is introduced into the air chamber, the partition portion 410 generates a tensile force under the impact of the large flow, making it easy for the two adjacent partition members 430 to be pulled apart, thereby losing their isolation function. The size of the first connecting member 431 in the second direction is set to increase along the first direction and then decrease, so that after the two adjacent partition members 430 are connected, when the two adjacent partition members 430 are pulled in opposite directions, the first connecting member 431 is difficult to easily detach from the first connecting groove 432, so that the two adjacent partition members 430 can still maintain the assembly stability of the partition part 410 when they are subjected to the tensile force generated by the impact of large airflow.

[0072] In some embodiments, reference Figure 4 、 Figure 5 and Figure 6 The partition member 430 is plate-shaped, with a first connecting groove 432 extending through the partition member 430 along its height. The sidewall of the first connecting groove 432 is connected to the exterior of the partition member 430. A first connecting member 431 is fixed to the other side of the partition member 430. The fixing method may be bolted or integrally formed, without limitation, as long as the first connecting member 431 and the partition member 430 do not move relative to each other. The first connecting member 431 fits into the first connecting groove 432 in a concave-convex fit, thereby detachably connecting two adjacent partition members 430.

[0073] In some embodiments, the cross-sectional shape of the first connecting groove 432 is the same as the cross-sectional shape of the first connecting member 431 .

[0074] In some embodiments, the cross-sectional shape of the first connecting member 431 in the second direction is circular, and the protrusion structure is a spherical protrusion.

[0075] In some specific embodiments, the cross-section is circular. More specifically, the sidewalls of the first connecting member 431 are curved, forming a circular cross-section. The circular cross-section's size in the second direction first increases and then decreases along the first direction. The length of the portion where the first connecting member 431 connects to the partition member 430 is smaller than the diameter of the circular cross-section formed by the first connecting member 431, causing the size in the second direction to first increase and then decrease along the first direction. This prevents adjacent partition members 430 from separating when subjected to tensile forces generated by airflow, thereby enhancing the stability of the partition portion 410.

[0076] In some embodiments, referring to Figure 5 and Figure 7 The lifting portion 420 further includes an elastic member 520. The elastic member 520 is disposed between the bottom surface of the lifting member 421 and the inner bottom surface of the lifting groove 433. In some specific embodiments, one end of the elastic member 520 is disposed at the bottom of the lifting member 421, and the other end is disposed at the bottom wall of the lifting groove 433.

[0077] In some embodiments, a lifting slot 433 is defined on the top of the partition member 430 to accommodate the lifting member 421 . One side of the lifting slot 433 passes through the first connecting member 431 , and the other side is connected to the first connecting slot 432 .

[0078] In some embodiments, when the top of the lifter 420 is in contact with the lid 100, the elastic member 520 is compressed, generating interaction forces between the lifter 420, the partition 410, and the lid 100. In this case, the area enclosed by the lifter 420 and the partition 410 can be used as a gas chamber for process gas flow, allowing epitaxial film growth on substrates of a certain size. When the drive device moves the spray element 200 away from the lid 100, the elastic action of the elastic member 520 pushes the lifter 420 within the lift groove toward the lid 100 until it reaches the maximum extension position achievable by the lifter 421 toward the lid 100. In this case, even if the top of the lifting portion 420 is still in contact with the cover 100, the volume of the area enclosed by the partition portion 410 and the lifting portion 420 has been expanded and adjusted, and the diffusion of the process gas into the expanded enclosed area has changed. The gas flow rate entering the process chamber has been adjusted to a certain extent, achieving the function of fine-tuning the process gas flow field according to process requirements or the real-time growth of the epitaxially grown film. Furthermore, after the lifting portion 420 reaches the above-mentioned extreme extension position, the drive device continues to control the spray element 200 to move away from the cover 100. At this time, the closed gas chamber originally enclosed by the partition portion 410 and the lifting portion 420 is connected to other peripheral gas chambers, thereby expanding the spray area, which is suitable for the next batch process to grow epitaxial films on larger substrates.

[0079] In some specific embodiments, the elastic member 520 is disposed at the bottom of the lifting member 421 and contacts the bottom wall of the lifting slot 433 to push the lifting member 421 away from the partition member 430 .

[0080] In some specific embodiments, referring to Figure 3 and Figure 6 Each partition member 430 is provided with a lifting member 421, and adjacent lifting members 421 are interconnected to adjust the overall height of the lifting isolation device 400. More specifically, a lifting slot 433 is defined at the top of the partition member 430. One side of the lifting slot 433 passes through the first connecting member 431, and the other side is connected to the connecting slot. In other words, the lifting slot 433 extends through the partition member 430 along its length. The lifting member 421 is inserted into the lifting slot 433 and can slide vertically within the slot 433 to adjust the overall height of the lifting isolation device 400. Furthermore, because the lifting slot 433 extends through the partition member 430 along its length, adjacent lifting members 421 can be connected.

[0081] In some more specific embodiments, reference Figure 7 One end of the elastic member 520 contacts the bottom wall of the lifting member 421, and the other end contacts the bottom of the lifting groove 433. In some specific embodiments, the elastic member 520 is a spring; a connecting rod is fixedly provided at the bottom of the lifting member 421, and a connecting hole is defined in the bottom wall of the lifting groove 433. One end of the elastic member 520 is sleeved on the connecting rod and fixed to the side wall of the connecting rod, while the other end of the elastic member 520 is inserted into the connecting hole to facilitate the vertical movement of the lifting member 421.

[0082] In some specific embodiments, the elastic member 520 includes a temperature-resistant elastic member, and the component material of the temperature-resistant elastic member includes stainless steel, graphite, or aluminum nitride.

[0083] In some more specific embodiments, the elastic member 520 is a stainless steel spring.

[0084] In some more specific embodiments, to accommodate higher temperatures, such as thousands of degrees Celsius, the elastic member 520 may be a graphite elastic felt or an aluminum nitride elastic felt, both of which have porous structures and are elastically expandable. In some more specific embodiments, the graphite or aluminum nitride elastic member 520 fills the space between the bottom of the lifting member 421 and the inner bottom surface of the lifting groove 433.

[0085] Reference Figure 4 and Figure 5 A lifting protrusion 424 is provided on one side wall of the lifting member 421 , and a lifting recess 425 is provided on the other opposite side wall; adjacent lifting members 421 are detachably connected by the concave-convex fit between the lifting protrusion 424 and the lifting recess 425 .

[0086] A second connecting protrusion 422 is disposed within the lifting recess 425, and a second connecting groove 423 is defined on the lifting protrusion 424. Adjacent lifting members 421 achieve detachable connection and airtightness through the concave-convex fit between the second connecting protrusion 422 and the second connecting groove 423. Specifically, in some embodiments, the lifting recess 425, which opposes the first connecting groove 432, includes a second connecting protrusion 422 extending toward the bottom surface of the lifting groove 433, with the first connecting groove 432 surrounding the second connecting protrusion 422. The lifting protrusion 424, which opposes the first connecting member 431, has a second connecting groove 423 defined on its sidewall, which also extends through at least a portion of the sidewall of the first connecting member 431. The concave-convex fit between the second connecting protrusion 422 and the second connecting groove 423 enhances airtightness between adjacent lifting members 421, as well as between adjacent partition members 430.

[0087] In some specific embodiments, the lifting protrusion 424 and the lifting recess 425 are both adapted to the shape of the lifting groove 433, so that after the lifting member 421 is inserted into the lifting groove 433, the side walls of the lifting protrusion 424 and the side walls of the lifting recess 425 are both in contact with the inner wall of the lifting groove 433.

[0088] In some more specific embodiments, the second connecting protrusion 422 is disposed within the second connecting groove 423, so that the second connecting protrusion 422 and the second connecting groove 423 are connected in a concave-convex manner, thereby achieving a detachable connection between adjacent lifting members 421. In addition, the structure formed by the lifting member 421, the lifting protrusion 424, the lifting recess 425, the second connecting protrusion 422, and the second connecting groove 423 adapts to the lifting groove 433 in a dynamic sealing manner.

[0089] Since the second connecting protrusion 422 is inserted into the second connecting groove 423 and the two are matched with each other, the lifting groove 433 is provided including:

[0090] A middle groove 434 extending from the top surface to the bottom surface of the partition member 430, and the middle groove 434 further extends along the first direction until it passes through the first connecting member 431 to adapt to the structure formed by the lifting recess 425 and the lifting protrusion 424;

[0091] An edge groove 435 extends from the top surface to the bottom surface of the partition member 430 and is connected to the middle groove 434 . The edge groove 435 is connected to the middle groove 434 to adapt to the structure formed by the lifting recess 425 and the second connecting protrusion 422 .

[0092] The lifting groove 433 includes a middle groove 434 extending from the top surface to the bottom surface of the partition member 430. The middle groove 434 also extends along the first direction until it passes through the first connecting member 431 to adapt to the structure formed by the second connecting protrusion 422 and the second connecting groove 423.

[0093] An edge groove 435 extends from the top surface to the bottom surface of the partition member 430 and is connected to the middle groove 434 . The edge groove 435 is connected to the middle groove 434 to adapt to the structure formed by the second connecting protrusion 422 and the second connecting groove 423 .

[0094] In some embodiments, the structure formed by the second connecting protrusion 422 and the second connecting groove 423 is adapted to ensure that adjacent lifting members 421 can be connected and can move synchronously in the lifting groove 433.

[0095] Specifically, to prevent the lifting member 421 from shifting along the length of the partition member 430 within the lifting slot 433 after being inserted into the lifting slot 433, the width of the edge slot 435 is configured to be smaller than the width of the middle slot 434. Furthermore, one side of the edge slot 435 communicates with the first connecting slot 432, and the other side communicates with the middle slot 434, thereby connecting the middle slot 434 and the first connecting slot 432 via the edge slot 435. Furthermore, the width of the portion of the middle slot 434 located on the first connecting member 431 is smaller than the width of the portion of the middle slot 434 located on the partition member 430, thereby preventing the lifting member 421 from shifting after being inserted into the lifting slot 433.

[0096] In some embodiments, after the lifting member 421 is inserted into the lifting slot 433, the sidewalls of the lifting protrusion and the lifting recess both conform to the inner wall of the lifting slot 433, and the second connecting protrusion 422 passes through the edge slot 435 and is inserted into the second connecting slot 423 of the adjacent lifting member 421. That is, after the lifting member 421 is inserted into the lifting slot 433, the second connecting protrusion 422 passes through the edge slot 435 and extends from the edge slot 435 into the first connecting slot 432. In the lifting slot 433, the second connecting protrusion 422 of one lifting member 421 passes through the edge slot 435 and the first connecting slot 432 in sequence, and then passes into the second connecting slot 423 of the adjacent lifting member 421, thereby connecting the two adjacent lifting members 421.

[0097] In some embodiments, a boss is formed on the top of the lifting member 421 along the side wall of the lifting member 421. When the lifting member 421 is inserted into the lifting slot 433, the bottom of the boss abuts against the top of the partition member 430, thereby limiting the lifting member 421.

[0098] Reference Figure 2 and Figure 3The spraying member 200 includes a plurality of spraying holes 210 , which form a plurality of spraying circles 220 sequentially surrounded from the inside to the outside on the spraying member 200 , and each partition member 430 is provided between adjacent spraying circles 220 .

[0099] In some specific embodiments, the spray part 200 is also provided with a fixed isolation device 700, and the lifting isolation device 400 and the fixed isolation device 700 are nested with each other. When the top of the lifting part 420 is attached to the cover body 100, an independent air chamber is formed between the fixed isolation device 700 and the lifting isolation device 400.

[0100] In some embodiments, the lifting isolation device 400 is sleeved outside the fixed isolation device 700 .

[0101] The fixed isolation device 700 includes a plurality of fixed isolation plates 710 , each of which is disposed between adjacent spray rings 220 .

[0102] In some embodiments, when the top of the lifting portion 420 is in contact with the cover body 100, the total height of the partition member 430 and the lifting member 421 is the same as the height of the fixed isolation plate 710. Specifically, in the process of the driving device driving the spray member 200 away from the cover body 100, taking the lifting isolation device 400 being sleeved outside the fixed isolation device 700 as an example, in the initial state, the fixed isolation device 700 and the lifting isolation device 400 are both in contact with the cover body 100, so that the diffusion cavity 300 is divided into three air chambers, namely the central air chamber 310, the middle air chamber 320 and the edge air chamber 330, and the three air chambers are not connected to each other. The central air chamber 310 can be used to introduce process gas, which is suitable for thin film epitaxial growth on the surface of a 4-inch substrate. During this movement, the spray element 200 descends, and the fixed isolation device 700 and the lifting isolation device 400 also descend. At this point, the elastic member 520 transitions from a compressed state to an extended state, pushing the lifting member 421 to move until the top of the lifting member 421 is in contact with the cover 100. However, the elastic member 520 has reached its extended limit. At this point, the central air chamber 310 and the middle air chamber 320 are connected to form a single air chamber, thereby forming an inner and outer ring of air chambers. This inner ring of air chambers can be used to introduce process gases for epitaxial thin film growth on larger substrates, such as 8-inch substrates. The spray element 200 continues to descend, releasing the contact between the lifting member 421 and the cover 100. A gap is created between the top surface of the lifting member 421 and the cover 100. At this point, the central air chamber 310, the middle air chamber 320, and the edge air chamber 330 are all connected to form a single air chamber. The introduction of process gases is suitable for epitaxial thin film growth on larger substrates, such as 12-inch substrates. This allows for flexible adjustment of the spray area and improves the compatibility of the equipment.

[0103] In some embodiments, the fixed isolation device 700 and the lifting isolation device 400 are both ring-shaped.

[0104] In some embodiments, the fixed isolation device 700 and the lifting isolation device 400 are both ring-shaped.

[0105] In some embodiments, the fixed isolation device 700 and the lifting isolation device 400 are both polygonal ring-shaped.

[0106] In some embodiments, the fixed isolation device 700 and the lifting isolation device 400 are both irregular ring-shaped.

[0107] In some embodiments, the fixed isolation device 700 is in the shape of a circular ring, a polygonal ring, or an irregular ring, and the lifting isolation device 400 is in the shape of a circular ring, a polygonal ring, or an irregular ring.

[0108] In some embodiments, a snap-fit ​​groove may be further provided on the spraying member 200 .

[0109] In some specific embodiments, the snap-fit ​​groove corresponds to the lifting isolation device 400 and the shapes of the two are adapted. The lifting isolation device 400 is disposed in the snap-fit ​​groove so that the lifting isolation device 400 and the spray element 200 are detachably connected.

[0110] In some specific embodiments, the snap-fitting groove corresponds to the fixed isolation device 700 and the shapes of the two are adapted. The fixed isolation device 700 is disposed in the snap-fitting groove so that the fixed isolation device 700 and the spray element 200 are detachably connected.

[0111] In some specific embodiments, the snap-fitting groove is a semi-through groove, that is, the snap-fitting groove does not pass through the spraying member 200 .

[0112] Reference Figure 3 Some of the partition members 430 of the partition portion 410 are detachable positioning connectors 437 corresponding to the spray holes 210, and other partition members 430 are detachable extension connectors 438 sequentially arranged between adjacent positioning connectors 437, and the extension connectors 438 are located between adjacent spray rings 220.

[0113] In some embodiments, reference Figure 3 and Figure 8 In order to facilitate the fixation of the positioning connector 437, a positioning column 436 is provided at the bottom of the positioning connector 437. The positioning column 436 is used to be detachably arranged in the spray hole 210 so that the positioning connector 437 can be detachably arranged on the spray part 200.

[0114] In some embodiments, positioning post 436 is disposed at the bottom of positioning connector 437. After positioning post 436 is removably mounted on spray hole 210, the exposed surface of positioning connector 437, excluding positioning post 436, facing spray element 200 is aligned with the area between adjacent spray rings 220 of spray element 200 to ensure airtightness. The removable arrangement between positioning post 436 and spray hole 210 needs to ensure airtightness between positioning post 436 and spray hole 210, for example, the outer diameter of positioning post 436 must match the diameter of spray hole 210.

[0115] In some specific embodiments, the positioning post 436 is detachably mounted on the corresponding spray hole 210 and its bottom is received in the spray hole 210 , that is, the positioning post 436 does not extend into the process chamber to reduce interference with the airflow passing through the spray hole 210 .

[0116] In some embodiments, some of the fixed isolation panels 710 in the fixed isolation device 700 are removably positioned corresponding to the positioning connectors 437 disposed on the spray holes 210, while other fixed isolation panels 710 are removably extended connectors 438 disposed sequentially between adjacent positioning connectors 437. The extended connectors 438 are located between adjacent spray rings 220. In more specific embodiments, the fixed isolation device 700 is secured via positioning posts 436 disposed on the positioning connectors 437. The specific configuration thereof is similar to the configuration of the positioning posts 436 on the corresponding positioning connectors 437 of the partition member 430 and is not further described herein.

[0117] In some specific embodiments, the extension connector 438 is fitted to the spray element 200. Specifically, the positioning connector 437 is detachably mounted on the spray element 200, and the extension connector 438 is detachably mounted on the positioning connector 437 or an adjacent extension connector 438. This allows the extension connector 438 to be detachably mounted on the spray element 200, maximizing the original structure of the spray element 200 and avoiding the need for slotting or other secondary processing on the spray element 200. Furthermore, the number of connection points between the partition portion 410 and the spray element 200 is reduced, thereby reducing stress caused by thermal expansion between the two.

[0118] In some embodiments, the positioning connector 437 includes two connected corner portions with an angle between the two corner portions. One or more extension connectors 438 are provided between two adjacent positioning connectors 437 to form the partition portion 410 into a polygonal ring shape.

[0119] In some embodiments, the two corner portions are angled. For example, when the fixed isolation device 700 or the lifting isolation device 400 forms a regular hexagon, the angle between the two corner portions is 120°. In actual use, the angle between the two corner portions can be set as needed, and the number of extension connectors 438 between two adjacent positioning connectors 437 can be adjusted to accommodate regular polygons of different shapes.

[0120] In some embodiments, both corner portions are in the shape of straight plates, and the two corner portions have the same shape and have a first side wall and a second side wall. The first side walls of the two corner portions are connected to each other and have a certain angle.

[0121] In some specific embodiments, the number of the extending connectors 438 between two adjacent positioning connectors 437 is the same, so that the fixed isolation device 700 or the lifting isolation device 400 forms a circular ring or a regular polygonal ring.

[0122] In some specific embodiments, when the positioning connectors 437 and the extension connectors 438 form a polygonal ring, the number of extension connectors 438 between two adjacent positioning connectors 437 is different to form an irregular polygonal ring.

[0123] In some embodiments, the positioning connector 437 is a folded structure, which includes at least one of a U-shaped structure, a V-shaped structure, a wave-shaped structure, or an arc-shaped structure.

[0124] In some specific embodiments, the positioning connector 437 can also be of other shapes, which are not limited here, and the main purpose is to achieve positioning connection. There is no limitation on the shape of the extension connector 438, as long as it can separate the two air chambers, that is, the shape of the air chamber can be irregular. Such a setting can further refine the air chamber to adjust the air flow according to process requirements. During use, the shape of the partition part 410 can be adjusted according to process requirements. It is worth noting that as long as each fixed isolation plate 710 is located between adjacent spray rings 220; each partition member 430 is located between adjacent spray rings 220. More specifically, it is satisfied that the extension connector 438 is located between adjacent spray rings 220.

[0125] In some embodiments, the gap between two adjacent partition members 430 is between 0.01 and 0.05 mm. This distance is controlled to ensure airtightness between adjacent partition members 430 after thermal expansion, taking into account the thermal expansion of the partition members 430 at high temperatures. A gap that is too large cannot ensure airtightness, while a gap that is too small can easily cause plastic deformation between adjacent partition members 430 after thermal expansion. Similarly, the gap between adjacent lift members 421, as well as the gap between the outer wall of a lift member 421 and the inner wall of the corresponding partition member 430, is between 0.01 and 0.05 mm.

[0126] In some embodiments, the driving device may be a cylinder or other device capable of driving the spraying element 200 to move.

[0127] In some embodiments, reference Figure 1 and Figure 9 In order for the driving device to drive the spraying element 200 to move, the driving device includes:

[0128] A lifting ring 610 is located below the spray element 200 and surrounds the inner wall of the cover 100 to support the spray element 200;

[0129] The base 620 is provided on the inner wall of the cover 100 and forms an air storage cavity with the lifting ring 610 and the cover 100. The lifting ring 610, the base 620 and the cover 100 are adapted to be dynamically sealed.

[0130] The air channel 624 passes through the side wall of the cover body 100 and communicates with the air storage cavity, so that the gas enters the air storage cavity through the air channel 624 and pushes the lifting ring 610 to drive the spraying element 200 to move closer to or away from the cover body 100.

[0131] The outer wall of the lifting ring 610 can be in contact with the side wall of the cover 100, or can be spaced apart from the side wall of the cover 100. This is not limited to the above, as long as the lifting ring 610 can drive the spray element 200 to move. In addition, the lifting ring 610 also supports the spray element 200.

[0132] More specifically, the base 620 supports the lifting ring 610 and drives its movement. A gas storage cavity is formed between the base 620, the lifting ring 610, and the cover 100. The gas storage cavity is capable of containing gas. A dynamic seal is provided between the lifting ring 610, the base 620, and the cover 100 to prevent gas leakage from the gas storage cavity and affect the machining process. The dynamic seal is conventional and will not be described in detail here.

[0133] In the process of controlling the movement of the lifting ring 610, gas is first introduced into the air channel 624 through an external air supply device. Since the air channel 624 passes through the side wall of the cover body 100 and is connected to the air storage cavity, the gas can enter the air storage cavity through the air channel 624. At the same time, since the lifting ring 610 and the base 620 and the cover body 100 are adapted with dynamic seals, when the volume of the gas in the air storage cavity increases, it will push the lifting ring 610 to move, thereby driving the spray part 200 to move.

[0134] In some embodiments, the base 620 includes:

[0135] The air-floating guide ring 621 is provided on the inner wall of the cover 100 to form an annular groove 622 with the lifting ring 610 and the cover 100. The annular groove 622 is used to accommodate the lifting ring 610, so that the lifting ring 610, the air-floating guide ring 621 and the cover 100 are adapted to form a dynamic seal.

[0136] The air flotation air chamber 623 is provided at the bottom of the annular groove 622;

[0137] The air passage 624 penetrates the side wall of the cover 100 and communicates with the air flotation chamber 623 , so that the gas enters the air flotation chamber 623 through the air passage 624 to push the lifting ring 610 to move in the annular groove 622 .

[0138] In some specific embodiments, the annular groove 622 can be formed on the upper end surface of the air-floating guide ring 621, or it can be formed around the lifting ring 610 and the side wall of the cover body 100; the lifting ring 610 is inserted into the annular groove 622 and can move vertically within the annular groove 622 to drive the movement of the spraying member 200. An air-floating air chamber 623 is also provided at the bottom of the annular groove 622. The air-floating air chamber 623 is used to pass gas. After the gas enters the base 620, it is pressurized in the air-floating air chamber 623, which then pushes the lifting ring 610 up and down to drive the movement of the spraying member 200.

[0139] In some more specific embodiments, an air channel 624 is opened through the side wall of the cover body 100, and the air channel 624 is connected to the flotation air tank 623, so that external gas can enter the flotation air tank 623 through the air channel 624, so as to push the lifting ring 610 to move through the gas, thereby driving the spray part 200 closer to or away from the cover body 100.

[0140] In some embodiments, a pipe is provided in the air channel 624 , and the pipe is connected to the flotation air chamber 623 so that external gas can enter the flotation air chamber 623 .

[0141] In some embodiments, a plurality of through holes are evenly provided on the top of the flotation air chamber 623 so that the interior of the flotation air chamber 623 is connected with the annular groove 622. After gas is introduced into the flotation air chamber 623, the gas enters the annular groove 622 through the through holes and forms an air cushion at the bottom of the lifting ring 610 to drive the lifting ring 610 to approach or move away from the spray part 200 in the vertical direction.

[0142] The present application also discloses a semiconductor device comprising the aforementioned gas distribution device and a susceptor disposed opposite the gas distribution device and configured to support a substrate. In some embodiments, a cover 100 is connected to a process chamber of the semiconductor device, and the susceptor is disposed within the process chamber. After the cover 100 is connected to the process chamber, the gas distribution device and the susceptor are disposed opposite each other to facilitate wafer processing.

[0143] While embodiments of the present invention have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations of these embodiments are possible. However, it should be understood that such modifications and variations are within the scope and spirit of the invention as defined in the appended claims. Furthermore, the invention described herein is susceptible to other embodiments and may be practiced or implemented in a variety of ways.

Claims

1. A gas distribution device, characterized in that: include: The cover (100) is provided with an air inlet portion; A spraying element (200) is movably provided on the cover body (100), and a diffusion cavity (300) communicating with the air inlet portion is formed between the spraying element and the cover body (100); A lifting isolation device (400) comprises a partition portion (410) and a lifting portion (420); the lifting portion (420) is movably sleeved on the partition portion (410); a top portion of the lifting portion (420) is in contact with the cover (100) so that interaction forces are generated between the lifting portion (420) and the partition portion (410) and the cover (100); the partition portion (410) is provided on the spray element (200) to enclose the diffusion cavity (300) into different air chambers together with the lifting portion (420); A driving device is provided at the bottom of the spraying member (200) and extends outside the cover body (100). By controlling the driving device, the spraying member (200) and the partition portion (410) are driven to move away from or toward the cover body (100), and the top of the lifting portion (420) is moved toward or away from the cover body (100), so as to adjust the volume of the area enclosed by the lifting isolation device (400).

2. The gas distribution device according to claim 1, characterized in that The partition part (410) includes a plurality of partition members (430), each of the partition members (430) being detachably connected end to end to form a closed structure, and each of the partition members (430) is detachably arranged on the spray member (200).

3. The gas distribution device according to claim 2, characterized in that One side wall of the partition member (430) includes a first connecting member (431) in a convex structure, and the other side wall includes a first connecting groove (432), and two adjacent partition members (430) are detachably connected through the concave-convex fit between the first connecting member (431) and the first connecting groove (432); The first direction is defined as the protruding extension direction of the first connecting member (431) toward the adjacent partition member (430); the size of the first connecting member (431) in the second direction increases along the first direction and then decreases, and the second direction is perpendicular to the first direction.

4. The gas distribution device according to claim 2, characterized in that The lifting portion (420) includes a plurality of lifting members (421) that are detachably connected end to end, and the lifting members (421) are movably sleeved on the partition member (430) in a one-to-one corresponding manner.

5. The gas distribution device according to claim 4, characterized in that The gaps between adjacent lifting members (421), the gaps between adjacent partition members (430), and the gaps between the outer side walls of the lifting members (421) and the inner side walls of the corresponding partition members (430) are all 0.01 to 0.05 mm.

6. The gas distribution device according to claim 3, characterized in that The lifting portion (420) includes a lifting member (421) and an elastic member (520). The partition member (430) is provided with a lifting groove (433) from the top to accommodate the lifting member (421). The elastic member (520) is arranged between the bottom surface of the lifting member (421) and the inner bottom surface of the lifting groove (433). When the top of the lifting member (421) is in contact with the cover body (100), the elastic member (520) is in a compressed state.

7. The gas distribution device according to claim 6, characterized in that: The elastic member (520) comprises a temperature-resistant elastic member, and the constituent material of the temperature-resistant elastic member comprises stainless steel, graphite or aluminum nitride.

8. The gas distribution device according to claim 6, characterized in that The lifting groove (433) is communicated with the first connecting groove (432), and the opposite side walls of the lifting member (421) respectively include a lifting protrusion (424) and a lifting recess (425), and adjacent lifting members (421) are detachably connected through the concave-convex fit between the lifting protrusion (424) and the lifting recess (425); The lifting recess (425) is opposite to the first connecting groove (432), and is provided with a second connecting protrusion (422) extending toward the bottom surface of the lifting groove (433), and the first connecting groove (432) surrounds the second connecting protrusion (422); The lifting protrusion (424) is opposite to the first connecting member (431), and a second connecting groove (423) is formed on the side wall. The second connecting groove (423) also penetrates at least a portion of the side wall of the first connecting member (431); The airtightness between adjacent lifting members (421) and between adjacent partition members (430) is enhanced by the concave-convex fit between the second connecting protrusion (422) and the second connecting groove (423).

9. The gas distribution device according to claim 8, characterized in that The lifting tank (433) includes: A middle groove (434) and an edge groove (435) are formed on the top surface of the partition member (430) and are connected to each other. The middle groove (434) further extends along the first direction until it passes through the first connecting member (431) to adapt to the lifting member (421); The edge groove (435) is communicated with the middle groove (434) and is movably sleeved with the second connecting protrusion (422). The second connecting protrusion (422) extends from the side wall of the edge groove (435) into the first connecting groove (432).

10. The gas distribution device according to claim 1, characterized in that The driving device comprises: A lifting ring (610) is located below the spraying member (200) and surrounds the inner wall of the cover (100) to support the spraying member (200); The base (620) is provided on the inner wall of the cover (100), and forms an air storage cavity with the lifting ring (610) and the cover (100), and the lifting ring (610), the base (620) and the cover (100) are movably fitted together; The air passage (624) passes through the side wall of the cover body (100) and is connected to the air storage cavity, so that the gas enters the air storage cavity through the air passage (624) and pushes the lifting ring (610) to drive the spraying element (200) closer to or away from the cover body (100).

11. The gas distribution device according to claim 10, characterized in that The base (620) comprises: An air-floating guide ring (621) is provided on the inner wall of the cover body (100) to form an annular groove (622) with the lifting ring (610) and the cover body (100); the annular groove (622) is used to accommodate the lifting ring (610) so that the lifting ring (610), the air-floating guide ring (621) and the cover body (100) can be movably fitted together; An air flotation air chamber (623) is provided at the bottom of the annular groove (622) and communicates with the annular groove (622); The air passage (624) passes through the side wall of the cover body (100) and is connected to the air flotation air chamber (623), so that the gas enters the air flotation air chamber (623) through the air passage (624) to push the lifting ring (610) to move in the annular groove (622).

12. The gas distribution device according to claim 2, characterized in that: The spraying part (200) comprises a plurality of spraying holes (210), and the plurality of spraying holes (210) form a plurality of spraying rings (220) sequentially surrounding the spraying part (200) from the inside out, and each of the partition members (430) is arranged between adjacent spraying rings (220).

13. The gas distribution device according to claim 2, characterized in that The spraying part (200) comprises a plurality of spraying holes (210), and the plurality of spraying holes (210) form a plurality of spraying rings (220) on the spraying part (200) that are sequentially surrounded from the inside out; some of the partition parts (430) of the partition part (410) are detachable positioning plug-in parts (437) corresponding to the spraying holes (210), and the other partition parts (430) are detachable extension plug-in parts (438) sequentially detachably arranged between adjacent positioning plug-in parts (437), and the extension plug-in parts (438) are located between adjacent spraying rings (220).

14. The gas distribution device according to claim 1, characterized in that The spraying element (200) is further provided with a fixed isolation device (700), and the lifting isolation device (400) is arranged outside the fixed isolation device (700). When the top of the lifting portion (420) is in contact with the cover body (100), an independent air chamber is formed between the fixed isolation device (700) and the lifting isolation device (400).

15. The gas distribution device according to claim 14, characterized in that The spraying part (200) comprises a plurality of spraying holes (210), and the plurality of spraying holes (210) form a plurality of spraying rings (220) sequentially surrounding the spraying part (200) from the inside out; the fixed isolation device (700) comprises a plurality of fixed isolation plates (710) sequentially connected end to end in a detachable manner, and each of the fixed isolation plates (710) is arranged between adjacent spraying rings (220).

16. The gas distribution device according to claim 14, characterized in that The spraying part (200) includes a plurality of spraying holes (210), and the plurality of spraying holes (210) form a plurality of spraying rings (220) on the spraying part (200) that are sequentially surrounded from the inside out; the fixed isolation device (700) includes a plurality of fixed isolation plates (710) that are sequentially detachably connected end to end, some of the fixed isolation plates (710) are detachable positioning connectors (437) corresponding to the spraying holes (210), and other fixed isolation plates (710) are sequentially detachable extension connectors (438) that are sequentially detachable between adjacent positioning connectors (437), and the extension connectors (438) are located between adjacent spraying rings (220).

17. A semiconductor device, characterized in that: It comprises the gas distribution device according to any one of claims 1 to 16, and a base arranged opposite to the gas distribution device and used for supporting a substrate.

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