Miniaturized controllable gas generation device for laser processing

Abstract

According to the miniaturized controllable gas generation device for laser processing, the vacuum cavity is made of quartz materials, the device is small, exquisite, light, good in light transmission and suitable for laser processing, rapid switching and flexible disassembling are supported, the space of an existing laboratory is hardly occupied, different components can be disassembled to be placed at proper positions for storage, and the production efficiency is improved. The defects of traditional equipment can be obviously improved; meanwhile, the device can meet the use requirements of different spaces, can quickly complete the switching between a vacuum environment and an inert gas environment, improves the experiment efficiency, and provides a new solution for the development of laboratory environment control equipment.

Description

Technical Field

[0001] The present invention belongs to the technical field of laser processing, and particularly relates to a miniaturized controllable gas generation device for laser processing. Background Art

[0002] Due to its characteristics of high precision, high efficiency and non-contact processing, laser processing technology has been widely used in modern manufacturing, micro-nano processing, precision cutting and welding and other fields. The research on material phase transformation is of great significance in the fields of physics, chemistry and materials science, involving the performance and structural changes of materials under different temperatures, pressures and gas environments. Laser processing and material phase transformation are often inseparable. In recent years, with the increasing demand for advanced material processing, the environmental control requirements of laser processing equipment have gradually increased. For example, a vacuum environment is required to avoid the interference of gas on the laser beam, or an inert gas environment is required to reduce oxidation and other chemical reactions.

[0003] Existing solutions almost rely on large vacuum chamber equipment to create a vacuum environment, which means that a vacuum chamber, an air extraction path and a supporting laser path need to be specially placed in a limited laboratory space. The middle part of the upper cover of the vacuum chamber is replaced by glass so that the laser can be introduced from there. A plano-convex lens, an objective lens and a processing sample need to be placed in the vacuum chamber in advance, and then vacuum pumping is carried out.

[0004] Existing laser processing equipment usually relies on large vacuum chambers or fixed gas environment devices, which are complex in structure, large in volume and heavy in weight, making them difficult to carry and modularly disassemble or expand. This design not only limits the flexibility of the equipment, but also increases the difficulty of laboratory space layout, and is often only applicable to specific laser wavelengths. Summary of the Invention

[0005] To solve the above problems, the present invention provides a miniaturized controllable gas generation device for laser processing, which can quickly and flexibly create the required vacuum environment or specific gas environment, and can be quickly modularly embedded into different optical paths according to actual needs.

[0006] A miniaturized controllable gas generation device for laser processing includes a support base, a support assembly, a transparent special-shaped quartz tube, a corrugated pipe, a transfer pipe with a tee structure, a first transfer assembly, a second transfer assembly, a vacuum pump, a laser assembly, a gas supply assembly, an imaging assembly, and a plurality of pads;

[0007] The support base includes two bottom plates with adjustable spacing and a connecting plate. The special-shaped quartz tube is fixed on the bottom plate through the support assembly; at the same time, the sample to be processed is placed in the cavity of the special-shaped quartz tube, and the distance between the sample and the imaging assembly is adjusted by placing different numbers of pads below the sample, so that the image quality of the sample in the imaging assembly meets the set requirements;

[0008] The laser assembly is used to provide a laser for processing a sample, and the laser is transmitted through the special-shaped quartz tube and incident on the sample surface;

[0009] The first adapter assembly is used to connect the open end of the special-shaped quartz tube and one end of the corrugated pipe. The other end of the corrugated pipe is connected to one of the interfaces of the adapter pipe through the second adapter assembly. The other two interfaces of the adapter pipe are respectively connected to a vacuum pump and a gas supply assembly that do not work simultaneously. The vacuum pump is used to extract the gas in the special-shaped quartz tube to obtain a vacuum cavity. The gas supply assembly is used to introduce a set gas into the special-shaped quartz tube to obtain a set gas environment.

[0010] Furthermore, the bottom plate 1 and the connecting plate 2 are connected by connecting screws 3 with adjustable spacing. At the same time, the connecting screws 3 are threadedly connected to the adjusting screws 4, and the adjusting screws 4 are threadedly connected to the holes at the edge of the bottom plate 1. By continuously rotating the adjusting screws 4, the plane of the bottom plate 1 can be leveled. The threaded hole in the middle of the connecting plate 2 is fixed to the external Z-axis displacement table driven by a motor through fastening screws.

[0011] Furthermore, the first adapter assembly includes a clamp 9, a quartz tube flange 13, a flange adapter pipe 15, a stud 16, a fork-shaped knob 17, and a ring seal 21;

[0012] The special-shaped quartz tube 12 is divided into a square tube and a round tube. A square cavity is provided inside the square tube, and the inside of the square cavity is used to place a sample or a spacer 22. The flange adapter pipe 15 is designed as a three-way structure. In addition to the left end being inserted into the quartz tube flange 13, a KF joint reserved for loading different external accessories is in the middle. The right end is connected to the corrugated pipe 8 through a ring seal 21, a clamp 9, a stud 16, and a fork-shaped knob 17. When the fork-shaped knob 17 threadedly connected to the stud 16 is continuously rotated, the clamp 9 will tighten, so that both sides of the ring seal 21 are respectively in contact with the right end of the flange adapter pipe 15 and the corrugated pipe 8, realizing the seal between the right end of the flange adapter pipe 15 and the corrugated pipe 8.

[0013] Furthermore, the first adapter assembly also includes an Allen screw 14, a seal ring 29, and a sealing ring 30;

[0014] Sealing is achieved between the quartz tube flange 13 and the round tube part of the special-shaped quartz tube 12 through the seal ring 29 and the sealing ring 30. A limit disk is provided on the left side of the quartz tube flange 13 to limit the seal ring 29. The right side is axially fixed to the flange adapter pipe 15 through three Allen screws 14. At the same time, the left end of the flange adapter pipe 15 is inserted into the inner cavity of the quartz tube flange 13, and together with the limit disk on the left side of the quartz tube flange 13, the seal ring 29 is tightly pressed to achieve sealing.

[0015] Furthermore, the support assembly includes a bottom support 18 and a fixing block 19;

[0016] Multiple through-holes are provided in the middle of the bottom plate 1, and fixing blocks 19 are placed in each through-hole, thereby limiting the bottom support 18 fixed in the center of the bottom plate 1 in one direction. The bottom support 18 is provided with three steps distributed with higher sides and lower middle. The left-end step is used to support the special-shaped quartz tube 12 and ensure the horizontal placement of the special-shaped quartz tube 12. The middle step is used to support the quartz tube flange 13 and the flange adapter tube 15. The right-end step is used to cooperate with the outer circular part of the flange adapter tube 15, so that the special-shaped quartz tube 12 and the gas path composed of the first adapter assembly and the corrugated pipe 8 are on the same horizontal plane.

[0017] Further, the second adapter assembly includes a clamp 9, a ring gasket 21, a stud 16, and a fork-type knob 17;

[0018] The corrugated pipe 8 is connected to one of the interfaces of the adapter pipe 10 through the ring gasket 21, the clamp 9, the stud 16, and the fork-type knob 17. When the fork-type knob 17 connected to the stud 16 by threads is continuously rotated, the clamp 9 will tighten, so that both sides of the ring gasket 21 are respectively in contact with the interface of the adapter pipe 10 and the corrugated pipe 8, realizing the seal between the adapter pipe 10 and the corrugated pipe 8.

[0019] Further, the imaging assembly includes a processing objective lens 23, a CCD 24, a lighting device 25, and two dichroic mirrors 26; the special-shaped quartz tube 12 is divided into a square tube and a round tube, and a square cavity is provided inside the square tube;

[0020] The laser 27 is reflected by one of the dichroic mirrors 26 to the processing objective lens 23, and a focused laser is formed through the processing objective lens 23. The focused laser is transmitted through the upper wall of the square cavity and incident on the sample surface;

[0021] The illumination light 28 emitted by the lighting device 25 is incident on the sample surface in sequence through the two dichroic mirrors 26, the processing objective lens 23, and the upper wall of the square cavity;

[0022] The illumination light reflected by the sample surface is incident on the CCD 24 through the upper wall of the square cavity, the processing objective lens 23, and the two dichroic mirrors 26 in sequence for imaging.

[0023] Further, the whole of the special-shaped quartz tube 12 is transparent and is divided into a square tube and a round tube. A square cavity is provided inside the square tube, and the thickness of the upper wall of the square cavity is less than the thickness of the side wall and the bottom surface.

[0024] Further, after the sample is fixed and adhered to the spacer 22 in advance by paper tape or double-sided tape, it is then placed into the cavity of the special-shaped quartz tube.

[0025] Further, a valve structure is provided at each joint of the adapter pipe 10, and the valves opened at the gas supply component end, the corrugated pipe end, and the vacuum pump end on the adapter pipe 10 are named the gas path valve, the corrugated pipe valve, and the molecular pump valve in sequence;

[0026] When laser processing of a sample is required in a set gas environment, close the gas path valve, open the vacuum pump valve and the bellows valve, evacuate the entire gas path to a vacuum state through the vacuum pump, then close the vacuum pump valve, open the gas path valve and the bellows valve, and use the gas supply component to introduce the set gas into the special-shaped quartz tube;

[0027] After obtaining a gas environment with a set gas pressure, turn on the laser component and the imaging component to perform visual laser processing on the sample.

[0028] Beneficial effects:

[0029] 1. The present invention provides a miniaturized controllable gas generation device for laser processing. A vacuum chamber is constructed using quartz material, which is not only small, light, and has good light transmittance, suitable for laser processing, but also supports quick switching and flexible disassembly, hardly occupying the existing laboratory space. Different components can be disassembled and placed in appropriate positions for storage, which can significantly improve the deficiencies of traditional equipment. At the same time, the present invention can adapt to the usage requirements of different spaces and can quickly complete the switching between a vacuum environment and an inert gas environment, improving the experimental efficiency and providing a new solution for the development of laboratory environment control equipment.

[0030] 2. The present invention provides a miniaturized controllable gas generation device for laser processing, which can be arranged on the displacement stage of different laser wavelength processing optical paths based on the existing conditions in the laboratory, flexibly meeting the actual needs and can be quickly applied to different optical paths.

[0031] 3. The present invention provides a miniaturized controllable gas generation device for laser processing. For the experiment, the sample only needs to be placed in the square cavity of the quartz tube using tweezers and then the pipeline is connected to evacuate the vacuum. The variables to be considered are reduced, and the chamber volume is very small, so the vacuum degree can be quickly achieved.

[0032] 4. The present invention provides a miniaturized controllable gas generation device for laser processing. The bottom support is designed with different heights to match the longitudinal heights of the quartz tube and the gas path for support, and at the same time, it plays a limiting role for the flange adapter tube. At the same time, according to different actual experimental requirements, the present invention can flexibly change the required gas environment through the adapter, and three valves can be installed at each of the three opening positions on the adapter for flexible adjustment. Description of the drawings

[0033] Figure 1 It is a schematic structural diagram of the controllable gas generation device for laser processing provided by the present invention;

[0034] Figure 2 It is a schematic internal structural diagram after removing the protective cover provided by the present invention;

[0035] Figure 3 A cross-sectional view of the special-shaped quartz tube provided by the present invention;

[0036] Figure 4 An exploded view of the present invention after removing the protective cover;

[0037] Figure 5 A cross-sectional view of a quartz tube flange and a flange adapter provided by the present invention;

[0038] 1-base plate; 2-connecting plate; 3-connecting screw; 4-adjusting screw; 5-protective cover; 6-upper plug-in plate; 7-right plug-in plate; 8-bellows; 9-clamp; 10-adapter tube; 11-pagoda joint; 12-special-shaped quartz tube; 13-quartz tube flange; 14-hexagon socket screw; 15-flange adaptor tube; 16-stud; 17-fork knob; 18-bottom support; 19-fixing block; 20-special-shaped quartz tube square cavity; 21-sealing ring with ring; 22-pad; 23-processing objective lens; 24-CCD; 25-illumination equipment; 26-dichroic mirror; 27-laser; 28-illumination light; 29-sealing ring; 30-sealing ring. DETAILED DESCRIPTION

[0039] In order to enable those skilled in the art to better understand the solution of the present application, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application.

[0040] like Figures 1 to 3 As shown, a miniaturized controllable gas generating device for laser processing includes a supporting base, a supporting assembly, a transparent special-shaped quartz tube, a bellows, a three-way structure adapter tube, a first adapter assembly, a second adapter assembly, a vacuum pump, a laser assembly, a gas supply assembly, an imaging assembly, and a plurality of pads;

[0041] The support base includes two bottom plates and a connecting plate with adjustable spacing, and the special-shaped quartz tube is fixed on the bottom plate through the support assembly; at the same time, the sample to be processed is placed in the cavity of the special-shaped quartz tube, and different numbers of pads are placed under the sample to adjust the distance between the sample and the imaging assembly, so that the image quality of the sample in the imaging assembly meets the set requirements;

[0042] The laser assembly is used to provide laser for processing the sample, and the laser is transmitted from the special-shaped quartz tube and incident on the surface of the sample;

[0043] The first adapter assembly is used to connect the open end of the special-shaped quartz tube and one end of the corrugated pipe. The other end of the corrugated pipe is connected to one of the interfaces of the adapter pipe through the second adapter assembly. The other two interfaces of the adapter pipe are respectively connected to a vacuum pump and a gas supply assembly that do not work simultaneously. The vacuum pump is used to extract the gas in the special-shaped quartz tube to obtain a vacuum cavity. The gas supply assembly is used to introduce a set gas into the special-shaped quartz tube to obtain a set gas environment.

[0044] Furthermore, the bottom plate 1 is used to create platform conditions and is connected to the bottom connecting plate 2 at the same time. The bottom plate 1 and the connecting plate 2 are connected by connecting screws 3 with adjustable spacing. At the same time, the connecting screw 3 is threadedly connected to the adjusting screw 4, and the adjusting screw 4 is threadedly connected to the hole at the edge of the bottom plate 1. By continuously rotating the adjusting screw 4, the plane of the bottom plate 1 can be accurately leveled. The threaded hole in the middle of the connecting plate 2 is fixed on the external Z-axis displacement table driven by a motor by a fastening screw and is driven by the motor. Specifically, there are threaded connection holes at the four corners of the bottom plate 1 for connecting the following connecting plate 2, and there are corresponding threaded connection holes on the connecting plate 2 for the bottom plate 1; the middle of the adjusting screw 4 is penetrated for placing the connecting screw 3. In addition, a protective cover 5 is placed on the bottom plate 1. The right plug board 7 is inserted into the protective cover 5 through the slots at both ends, and at the same time, a U-shaped side through hole is opened at the bottom end so that the corrugated pipe 8 can be smoothly placed. The upper plug board 6 is inserted into the right plug board 7 and the protective cover 5 through the slots at both ends, and a U-shaped upper through hole is opened at the left end so that the objective lens can smoothly enter the interior.

[0045] It should be noted that the protective cover can be disassembled and assembled separately. The U-shaped through holes of the upper plug board and the right plug board allow the processing objective lens and the corrugated pipe to enter, which not only ensures flexibility and easy operation but also makes the actual operation safer.

[0046] It should be noted that the support assembly includes a bottom support 18 and a fixing block 19. Six through holes are provided in the middle of the bottom plate 1, and the fixing blocks 19 are placed in each through hole, so as to limit the bottom support 18 fixed in the center of the bottom plate 1 in one direction. The bottom support 18 is provided with three steps distributed with higher sides and lower middle. The leftmost step is used to support the special-shaped quartz tube 12 and ensure the horizontal placement of the special-shaped quartz tube 12. Since the diameters of the quartz tube flange 13 and the flange adapter 15 at the connection part of the internal hexagonal screw 14 are relatively large, the lowest middle step is used to support the quartz tube flange 13 and the flange adapter 15, effectively preventing the quartz tube flange 13 and the flange adapter 15 from interfering with other components. The rightmost step is used to cooperate with the outer circular part of the flange adapter 15. Through such a design, the special-shaped quartz tube 12 and the gas path composed of the first adapter assembly and the bellows 8 are on the same horizontal plane. In actual laser processing, the sample placed in the square cavity of the special-shaped quartz tube 12 needs to be horizontal, which can effectively ensure the consistency of the processing results. The design method of the bottom support 18 is exactly to meet such actual needs.

[0047] It should be noted that the gas path is used for pumping air or filling specific gases. One side of the bellows is connected to the adapter tube, and the required processing environment can be flexibly adjusted according to actual needs.

[0048] Furthermore, the first adapter assembly includes a clamp 9, a quartz tube flange 13, a flange adapter 15, a stud 16, a fork-type knob 17, and a ring gasket 21. The special-shaped quartz tube 12 is divided into a square tube and a round tube. The square tube is internally provided with a square cavity, which is the main area of the device and the position where the laser 27 actually acts on the sample. The sample or the spacer 22 is placed inside the square cavity. The flange adapter 15 is designed as a tee structure. In addition to the left end inserted into the quartz tube flange 13, the middle part is a KF joint reserved for loading different external accessories, such as a vacuum gauge or a pressure gauge. The right end is connected to the bellows 8 through a ring gasket 21, a clamp 9, a stud 16, and a fork-type knob 17. When the fork-type knob 17 connected to the stud 16 by threads is continuously rotated, the clamp 9 will tighten, so that both sides of the ring gasket 21 are respectively in contact with the right end of the flange adapter 15 and the bellows 8, realizing a good seal between the right end of the flange adapter 15 and the bellows 8.

[0049] It should be noted that the special-shaped quartz tube 12 is transparent as a whole. The laser penetrates the upper wall of the square cavity and the gas environment inside the square cavity, and finally acts on the surface of the sample to produce a processing effect. The upper plane of the square cavity is designed to be thinned, mainly to minimize the influence of optical refraction on laser processing and CCD optical imaging while ensuring safety, so that technicians can clearly see and control the progress of laser processing on the software. The side and bottom surfaces of the square cavity are thick-walled and the joint between the upper part and the round tube is designed as a protrusion, all of which are to ensure the actual connection with the round tube, while also ensuring the reliability of the connection and the effect of laser processing.

[0050] Furthermore, if Figure 4 As shown, the first adapter assembly also includes a hexagon socket screw 14, a sealing ring 29, and a sealing ring 30; the quartz tube flange 13 and the round tube portion of the special-shaped quartz tube 12 are sealed by the sealing ring 29 and the sealing ring 30, and a limit plate is provided on the left side of the quartz tube flange 13 to limit the sealing ring 29, and the right side is axially fixed with the flange adapter tube 15 by three hexagon socket screws 14, and the left end of the flange adapter tube 15 is inserted into the inner cavity of the quartz tube flange 13, and the sealing ring 29 is pressed together with the left limit plate of the quartz tube flange 13 to achieve a good sealing effect. In other words, the outer part of the round tube of the special-shaped quartz tube is tightly connected to the quartz tube flange (13) through the sealing ring, and the quartz tube flange (13) is tightly connected to the flange adapter tube (15) through the hexagon socket screw (14).

[0051] Furthermore, the second adapter assembly includes a clamp 9, a ring seal 21, a stud 16, and a fork knob 17; the bellows 8 is connected to one of the interfaces of the adapter tube 10 through the ring seal 21, the clamp 9, the stud 16, and the fork knob 17. When the fork knob 17 threadedly connected to the stud 16 is continuously rotated, the clamp 9 will be tightened, so that the two sides of the ring seal 21 are respectively fitted with the interface of the adapter tube 10 and the bellows 8, thereby achieving sealing between the adapter tube 10 and the bellows 8.

[0052] It should be noted that the bellows 8 can be bent arbitrarily to meet the actual needs of different scenarios. The other end of the bellows 8 is connected to the adapter tube 10, and the sealing effect is still ensured by the ring seal 21 and the clamp 9. The upper end of the adapter tube 10 is provided with a threaded part, and the middle part is opened to facilitate threaded connection with the pagoda connector 11, and the lower end is a KF connector, which is matched with the molecular pump exhaust port through the KF to ISO adapter.

[0053] Furthermore, if Figure 5As shown, the imaging assembly includes a processing objective lens 23, a CCD 24, an illumination device 25, and two dichroic mirrors 26; the special-shaped quartz tube 12 is divided into a square tube and a circular tube, and a square cavity is provided inside the square tube; the laser 27 is reflected by one of the dichroic mirrors 26 to the processing objective lens 23, and a focused laser is formed through the processing objective lens 23. The focused laser is transmitted through the upper wall of the square cavity and incident on the surface of the sample; the illumination light 28 emitted by the illumination device 25 is incident on the surface of the sample successively through the two dichroic mirrors 26, the processing objective lens 23, and the upper wall of the square cavity; the illumination light reflected from the surface of the sample is incident on the CCD 24 through the upper wall of the square cavity, the processing objective lens 23, and the two dichroic mirrors 26 for imaging.

[0054] It should be noted that before laser processing the sample, the sample needs to be pasted on the surface of the spacer with double-sided tape, and then the spacer is picked up with long forceps and placed into the square cavity for focusing, that is, adjusting the height of the translation stage and the objective lens. Two points need to be noted during the focusing process: (1) The processing objective lens does not touch the quartz tube in the vertical direction; (2) Other parts of the device do not interfere with each other during the relative movement. After focusing, there should be a clear image in the laser processing software. The structure of the square cavity enables the refractive index to be uniformly changed at different positions during the process of the laser entering the quartz tube and focusing on the surface of the sample, which is suitable for specific laser processing requirements.

[0055] The controllable gas generation device of the present invention will be described in detail below in combination with different types of vacuum pumps.

[0056] Example 1:

[0057] The device can be evacuated to a vacuum state only by a vacuum oil pump. The specific implementation method is as follows: Remove the adapter tube 10 and the upper plug board 6. Before actually using the device, the sample needs to be placed into the square cavity of the special-shaped quartz tube 12 first. The ring-shaped sealing ring 21 and the clamp 9 at the flange adapter tube 15 need to be removed. Use long forceps to clamp the sample or the spacer and slowly move it from the Figure 5 KF joint at the right end of the middle flange adapter tube 15 towards the Figure 4The square cavity 20 of the special-shaped quartz tube extends into and is stably placed at the bottom of the square cavity. It should be noted that the sample needs to be fixed in advance with paper tape or adhered to the spacer block 22 with double-sided tape and then put in together to ensure that the sample will not have significant displacement due to vibration during the air extraction process. Subsequently, the vacuum gauge is hermetically connected to the KF joint in the middle of the flange adapter 15 using the clamp 9 and the ring gasket 21. The other end of the vacuum gauge is connected to the ADC display to monitor the internal vacuum degree of the passage in real time. Then, turn on the lighting device 25 necessary for laser processing, so that the illumination light 28 can pass through the dichroic mirror 26 and the processing objective lens 23, and the CCD imaging of the sample surface can be seen on the software. Subsequently, adjust the four adjusting screws 4 until the sample is in a horizontal state. After removing the adapter 10, the other end of the bellows 8 is directly connected to the valve through the ring gasket 21 and the clamp 9. At the same time, the other end of the valve is connected to the air extraction port of the vacuum oil pump through the ring gasket 21 and the clamp 9. Thus, the preparatory work before air extraction is completed. Subsequently, turn on the vacuum oil pump switch to extract air to a vacuum state, and then laser processing can be started. When the processing is completed, turn off the vacuum oil pump switch and remove the clamp 9 in the middle of the flange adapter 15. At this time, due to the pressure difference, the KF joints at both ends of the gasket still remain sealed. Then, bend the vacuum gauge to one side, and the inside of the gas passage will gradually fill with air. Finally, gradually disassemble other components.

[0058] It should be noted that the device has been tested for air extraction by a vacuum oil pump. Except for slight vibration, it can ensure that the vacuum degree reaches the limit of the vacuum oil pump. The vibration can be weakened or eliminated by different physical vibration isolation methods. On the premise that the experimental effect is not affected, to further ensure safety, a protective cover 5 needs to be placed in the middle of the bottom plate 1 and the right plug board 7 needs to be inserted before turning on the vacuum oil pump switch. Since the vacuum gauge is relatively high, the upper plug board 6 is cancelled in this embodiment. This embodiment is used to create a low vacuum environment.

[0059] Embodiment 2:

[0060] The device can also be pumped to a high vacuum state by a molecular pump set. The specific implementation method is similar to that of Embodiment 1. Compared with Embodiment 1, the upper plug board 6 and the adapter 10 can be added. The difference is that a vacuum gauge capable of measuring high vacuum has been integrated on the molecular pump set. Therefore, compared with Embodiment 1, the vacuum gauge connected to the middle of the flange adapter 15 needs to be removed, and instead, a blind plate is connected using the ring gasket 21 and the clamp 9 to block this KF joint. At the same time, after placing the protective cover 5, the right plug board 7 and the upper plug board 6 are inserted in sequence according to the positions.

[0061] Further, the adapter tube 10 is a tee structure, and valve structures need to be added at each joint. The valves opened at the threaded end, bellows end, and molecular pump end of the adapter tube 10 are named the gas path valve, bellows valve, and molecular pump valve in sequence. In Example 2, the gas path valve needs to be closed, and the molecular pump valve and bellows valve need to be opened. Relying on the established strategy within the molecular pump group, the entire gas path is evacuated to a high vacuum state, and then laser processing is carried out. After the processing is completed, the molecular pump is turned off to stop pumping, and then the blind plate is opened to make the gas path pressure return to atmospheric pressure, and other components are gradually disassembled.

[0062] Example 3:

[0063] This device can create various gas environments required during the processing. The specific implementation method depends on Example 2. Before the evacuation in Example 2 starts, a step-down adapter 11 needs to be connected to the threaded end of the adapter tube. The step-down adapter 11 is connected to a rubber hose and further connected to a flow meter and a gas cylinder filled with a specific gas. Subsequently, after the gas path is evacuated to a high vacuum state by the molecular pump, the molecular pump valve and the molecular pump switch are closed, and the gas path valve is opened. At the same time, the gas cylinder is unscrewed, and the flow is controlled by the flow meter.

[0064] It should be noted that compared with Example 2, the upper plug plate 6 still needs to be removed, and the blind plate in Example 2 needs to be replaced with the vacuum gauge or pressure gauge in Example 1. Through the real-time indication of the vacuum gauge or pressure gauge, it is ensured that the required gas pressure is reached. Subsequently, the gas path valve is closed for laser processing. After the laser processing is completed, the vacuum gauge tube or pressure gauge is bent in the manner of Example 1 to make the gas path return to atmospheric pressure, and then other components are disassembled.

[0065] Among them, if the timing of closing the gas path valve is too late, resulting in the gas pressure in the gas path exceeding the experimental set value, the operation of Example 3 needs to be repeated to re-evacuate the vacuum and introduce a specific gas. It should be pointed out that the gas in the gas path will be directly discharged into the atmospheric environment after the experiment is completed. Therefore, the gas introduced in the experiment must be harmless and does not react in the air, such as oxygen and inert gases, etc. This needs to be particularly noted.

[0066] It should be noted that after the experiment is completed and different components are disassembled, they need to be properly placed. Among them, the special-shaped quartz tube 12, quartz tube flange 13, and flange adapter tube 15 do not need to be disassembled separately. They can be wrapped as a whole with a bubble bag and placed in a cardboard box to prevent the special-shaped quartz tube 12 from being broken.

[0067] It can be seen that compared with the prior art, the present invention can be flexibly disassembled and has a very small volume, which means that this device hardly occupies the existing laboratory space, and different components can be disassembled and placed in appropriate positions for storage. In the present invention, for the square cavity of the quartz tube, the sample only needs to be placed with tweezers and then the pipeline is connected to evacuate the vacuum to conduct the experiment. There are fewer variables to consider, and the chamber volume is very small, so the vacuum degree can be quickly reached.

[0068] Of course, the present invention may have many other embodiments. Without departing from the spirit and essence of the present invention, those skilled in the art can certainly make various corresponding changes and modifications according to the present invention. However, these corresponding changes and modifications should all fall within the protection scope of the appended claims of the present invention.

Claims

1. A miniaturized controllable gas generation device for laser processing, characterized in that, It includes a support base, a support assembly, a transparent special-shaped quartz tube, a corrugated pipe, a swivel joint with a tee structure, a first adapter assembly, a second adapter assembly, a vacuum pump, a laser assembly, a gas supply assembly, an imaging assembly, and multiple cushion blocks; The support base includes two bottom plates with adjustable spacing and a connecting plate. The special-shaped quartz tube is fixed on the bottom plates through the support assembly. At the same time, the sample to be processed is placed in the cavity of the special-shaped quartz tube, and the distance between the sample and the imaging assembly is adjusted by placing different numbers of cushion blocks below the sample, so that the image quality of the sample in the imaging assembly meets the set requirements; The laser assembly is used to provide the laser for processing the sample, and the laser transmits through the special-shaped quartz tube and is incident on the surface of the sample; The first adapter assembly is used to connect the open end of the special-shaped quartz tube and one end of the corrugated pipe. The other end of the corrugated pipe is connected to one of the interfaces of the swivel joint through the second adapter assembly; The other two interfaces of the swivel joint are respectively connected to the vacuum pump and the gas supply assembly that do not work simultaneously. The vacuum pump is used to extract the gas in the special-shaped quartz tube to obtain a vacuum cavity. The gas supply assembly is used to introduce the set gas into the special-shaped quartz tube to obtain a set gas environment.

2. The miniaturized controllable gas generation device for laser processing according to claim 1, characterized in that, The bottom plate (1) and the connecting plate (2) are connected by connecting screws (3) with adjustable spacing. At the same time, the connecting screws (3) are threadedly connected to the adjusting screws (4), and the adjusting screws (4) are threadedly connected to the holes at the edge of the bottom plate (1). By continuously rotating the adjusting screws (4), the plane of the bottom plate (1) is leveled. The threaded hole in the middle of the connecting plate (2) is fixed on the external Z-axis displacement table driven by a motor through a fastening screw.

3. The miniaturized controllable gas generation device for laser processing according to claim 2, characterized in that, The first adapter assembly includes a clamp (9), a quartz tube flange (13), a flange swivel joint (15), a stud (16), a fork-shaped knob (17), and a ring-shaped sealing gasket (21); The special-shaped quartz tube (12) is divided into a square tube and a round tube. There is a square cavity inside the square tube, and the square cavity is used to place the sample or the cushion block (22). The flange swivel joint (15) is designed as a tee structure. In addition to the left end being inserted into the quartz tube flange (13), the middle part is a KF joint reserved for loading different external accessories. The right end is connected to the corrugated pipe (8) through a ring-shaped sealing gasket (21), a clamp (9), a stud (16), and a fork-shaped knob (17). When the fork-shaped knob (17) threadedly connected to the stud (16) is continuously rotated, the clamp (9) will tighten, so that both sides of the ring-shaped sealing gasket (21) are respectively in contact with the right end of the flange swivel joint (15) and the corrugated pipe (8), realizing the seal between the right end of the flange swivel joint (15) and the corrugated pipe (8).

4. A miniaturized controllable gas generation device for laser processing according to claim 3, characterized in that, The first adapter assembly also includes an Allen screw (14), a sealing gasket (29), and a sealing ring (30); A quartz tube flange (13) and the circular tube part of the special-shaped quartz tube (12) are sealed through a sealing ring (29) and a sealing ring (30). A limiting disc is provided on the left side of the quartz tube flange (13) to limit the sealing ring (29). On the right side, it is axially fixed to the flange adapter tube (15) through three socket head cap screws (14). At the same time, the left end of the flange adapter tube (15) is inserted into the inner cavity of the quartz tube flange (13), and together with the limiting disc on the left side of the quartz tube flange (13), the sealing ring (29) is pressed tightly to achieve sealing.

5. The miniaturized controllable gas generation device for laser processing according to claim 3, wherein The support assembly includes a bottom support (18) and a fixing block (19); Multiple through holes are provided in the middle of the bottom plate (1), and fixing blocks (19) are placed in each through hole to limit the bottom support (18) fixed in the center of the bottom plate (1) in one direction. The bottom support (18) is provided with three steps distributed with higher sides and lower middle. The left step is used to support the special-shaped quartz tube (12) and ensure the horizontal placement of the special-shaped quartz tube (12). The middle step is used to support the quartz tube flange (13) and the flange adapter tube (15). The right step is used to cooperate with the outer circular part of the flange adapter tube (15) so that the special-shaped quartz tube (12) and the gas path composed of the first adapter assembly and the bellows (8) are on the same horizontal plane.

6. The miniaturized controllable gas generating device for laser processing according to claim 1, characterized in that, The second adapter assembly includes a clamp (9), a ring-shaped sealing gasket (21), a stud (16), and a fork-shaped knob (17); The bellows (8) is connected to one of the interfaces of the adapter tube (10) through a ring-shaped sealing gasket (21), a clamp (9), a stud (16), and a fork-shaped knob (17). When the fork-shaped knob (17) connected to the stud (16) by threads is continuously rotated, the clamp (9) will tighten, so that both sides of the ring-shaped sealing gasket (21) are respectively attached to the interface of the adapter tube (10) and the bellows (8), realizing the sealing between the adapter tube (10) and the bellows (8).

7. A miniaturized controllable gas generating device for laser processing according to claim 1, characterized in that The imaging assembly includes a processing objective lens (23), a CCD (24), a lighting device (25), and two dichroic mirrors (26); the special-shaped quartz tube (12) is divided into a square tube and a circular tube, and a square cavity is provided inside the square tube; The laser (27) is reflected by one of the dichroic mirrors (26) to the processing objective lens (23), and a focused laser is formed through the processing objective lens (23). The focused laser is transmitted from the upper wall of the square cavity and incident on the sample surface; The illumination light (28) emitted by the lighting device (25) sequentially passes through two dichroic mirrors (26), the processing objective lens (23), and the upper wall of the square cavity and is incident on the sample surface; The illumination light reflected from the sample surface sequentially passes through the upper wall of the square cavity, the processing objective lens (23), and two dichroic mirrors (26) and is incident on the CCD (24) for imaging.

8. The miniaturized controllable gas generation device for laser processing according to claim 1, wherein The whole of the special-shaped quartz tube (12) is transparent and is divided into a square tube and a circular tube. A square cavity is provided inside the square tube, and the thickness of the upper wall of the square cavity is less than the thickness of the side wall and the bottom surface.

9. The miniaturized controllable gas generation device for laser processing according to claim 1, characterized in that, The sample is fixed and adhered to the cushion block (22) in advance through paper tape or double-sided tape, and then placed into the cavity of the special-shaped quartz tube.

10. A miniaturized controllable gas generation device for laser processing according to claim 1, characterized in that, Each joint of the adapter tube (10) is provided with a valve structure, and the valves opened at the gas supply component end, bellows end, and vacuum pump end on the adapter tube (10) are named the gas path valve, bellows valve, and molecular pump valve in sequence; When the sample needs to be laser processed in a set gas environment, close the gas path valve, open the vacuum pump valve and the bellows valve, evacuate the entire gas path to a vacuum state through the vacuum pump, then close the vacuum pump valve, open the gas path valve and the bellows valve, and use the gas supply component to introduce the set gas into the special-shaped quartz tube; After obtaining the gas environment with the set gas pressure, turn on the laser component and the imaging component to perform visual laser processing on the sample.

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