Single crystal furnace exhaust pipeline cleaning device and single crystal furnace

Abstract

The invention provides a single crystal furnace exhaust pipeline cleaning device and a single crystal furnace, and belongs to the technical field of pipeline cleaning. Comprising a knocking cleaning part and a driving mechanism, and a driving rod is arranged on the driving mechanism in the axial direction of the exhaust pipeline; the driving mechanism is mounted at one end far away from the inlet of the exhaust pipeline of the single crystal furnace, the knocking cleaning part is mounted at one end far away from the driving mechanism, of the driving rod, so that the knocking cleaning part is positioned at the inlet of the exhaust pipeline of the single crystal furnace, and the knocking cleaning part naturally droops in a non-working state; the driving mechanism is used for driving the driving rod to drive the knocking and cleaning part to rotate, so that the knocking and cleaning part is in contact with oxides on the inner wall of the exhaust pipeline under the action of centrifugal force, and the oxides at the inlet of the exhaust pipeline of the single crystal furnace are cleaned. The knocking cleaning part is used for cleaning oxides under the action of centrifugal force in a working state and naturally droops in a non-working state, and normal work of the vacuum pump cannot be affected.

Description

Technical Field

[0001] The present invention relates to the technical field of pipeline cleaning, and particularly relates to a cleaning device for a single crystal furnace exhaust pipeline and a single crystal furnace. Background Art

[0002] The single crystal furnace exhaust pipeline is an exhaust passage for discharging waste gas and soot in the single crystal furnace. During the process of single crystal pulling, oxides are generated in the furnace. The oxides are transported through the exhaust duct inside the furnace body to the exhaust pipeline outside the furnace body and finally discharged from the furnace body. At the inlet of the exhaust pipeline at the bottom of the furnace, that is, the connection between the exhaust duct inside the furnace and the exhaust pipeline outside the furnace, which is at the position of the cold and heat transfer, oxides will deposit and adsorb here when flowing through. After a long operation time, more and more oxides will accumulate and finally block the exhaust port, resulting in the paralysis of the exhaust system and ultimately affecting the crystal growth effect and quality.

[0003] In the prior art, for example, the Chinese invention creation with the application number CN202122257345.3 specifically discloses a pipeline automatic cleaning device and the exhaust pipeline of a single crystal furnace, and specifically discloses including a cleaning mechanism and a driving mechanism. The cleaning mechanism is arranged inside the pipeline, the outer edge of the cleaning mechanism is in full contact with the inner side wall of the pipeline, ventilation holes are arranged on the cleaning mechanism, the driving mechanism is fixedly connected with the cleaning mechanism, and the driving mechanism drives the cleaning mechanism to slide axially along the pipeline. By driving the cleaning mechanism to slide inside the pipeline, the cleaning mechanism can clean the volatiles on the inner side wall of the pipeline. However, since the exhaust pipeline is generally connected to a vacuum pump, the air in the single crystal furnace is pumped out from the exhaust pipeline through the vacuum pump to make the inside of the single crystal furnace in a vacuum state. And the cleaning mechanism of this patent is arranged inside the exhaust pipeline, and the outer edge of the cleaning mechanism is in full contact with the inner side wall of the pipeline, which makes the air pumped out blocked by the cleaning mechanism when the vacuum pump is working, so that the air cannot be discharged smoothly, thus affecting the working efficiency and working effect of the vacuum pump. Summary of the Invention

[0004] In view of this, the present invention provides a cleaning device for a single crystal furnace exhaust pipeline and a single crystal furnace to solve the technical problem that the existing cleaning device arranged inside affects the working efficiency and working effect of the vacuum pump.

[0005] The technical solution adopted by the present invention to solve its technical problems is as follows: A cleaning device for a single crystal furnace exhaust pipeline, characterized in that it includes a knocking cleaning part and a driving mechanism, and a driving rod is arranged along the axial direction of the exhaust pipeline on the driving mechanism; The driving mechanism is installed at one end far away from the inlet of the single crystal furnace exhaust pipeline, and the knocking cleaning part is installed at the end of the driving rod far away from the driving mechanism, so that the knocking cleaning part is located at the inlet of the single crystal furnace exhaust pipeline, wherein the knocking cleaning part hangs down naturally in the non-working state; The driving mechanism is used to drive the driving rod to drive the knocking and cleaning part to rotate, so that the knocking and cleaning part contacts the oxides on the inner wall of the exhaust pipe under the action of centrifugal force, so as to clean the oxides at the inlet of the single crystal furnace exhaust pipe.

[0006] Preferably, the knocking and cleaning part includes a head, a middle part and a root; the head is hemispherical; the middle part is conical, and the diameter of the cone gradually decreases from the head to the root; the root is fixedly connected to the end of the driving rod away from the driving mechanism.

[0007] Preferably, a ring is arranged at the root of the knocking and cleaning part, and a connecting piece is arranged at the end of the driving rod away from the driving mechanism, so as to realize the installation of the knocking and cleaning part and the driving rod by passing the ring into the connecting piece.

[0008] Preferably, the connecting piece includes an arc part and a fixing part, the fixing part is vertically fixed on the driving rod, one end of the arc part is hinged to one end of the fixing part, and the other end of the arc part is bolted to the other end of the fixing part.

[0009] Preferably, the number of the connecting pieces is multiple, and the multiple connecting pieces are arranged on the driving rod along a spiral path.

[0010] Preferably, a spring is arranged between the middle part and the root, so as to generate a radial force on the knocking and cleaning part towards the inner wall of the exhaust pipe when the knocking and cleaning part rotates, and increase the knocking force on the oxides.

[0011] Preferably, the single crystal furnace exhaust pipe cleaning device further includes a dust collecting mechanism, and the dust collecting mechanism is arranged between the exhaust pipe and the vacuum pump to collect the oxides cleaned by the knocking and cleaning part.

[0012] Preferably, the single crystal furnace exhaust pipe cleaning device further includes a ranging sensor, and the ranging sensor is arranged in the area of the driving rod close to the inlet of the single crystal furnace exhaust pipe to detect whether oxides are attached to the inner wall of the single crystal furnace exhaust pipe.

[0013] Preferably, the single crystal furnace exhaust pipe cleaning device further includes a pressure sensor, and the pressure sensor is arranged on the side of the head of the knocking and cleaning part to detect whether the oxides on the inner wall of the single crystal furnace exhaust pipe are cleaned up.

[0014] The present invention also provides a single crystal furnace, including a single crystal furnace exhaust pipe, and the single crystal furnace exhaust pipe cleaning device as described above is installed at the inlet of the single crystal furnace exhaust pipe.

[0015] Compared with the prior art, the beneficial effects of the present invention are as follows: When it is necessary to clean the oxides in the exhaust pipe of the single crystal furnace, the driving mechanism is started, so that the driving rod begins to rotate, driving the knocking and cleaning part installed on the driving rod to start rotating. During the rotation process, the knocking and cleaning part is gradually opened under the action of centrifugal force, and forms a certain angle with the driving rod gradually, so that the head of the knocking and cleaning part approaches the oxides on the inner wall of the exhaust pipe of the single crystal furnace. First, the oxides are knocked by the impact force generated when the knocking and cleaning part rotates, so that the oxides are broken. Then, when the head of the knocking and cleaning part rotates to the same position again, the broken oxides are scraped off, so that the oxides attached to the inner wall of the exhaust pipe of the single crystal furnace fall off, realizing the cleaning of the exhaust pipe of the single crystal furnace. At the same time, since the knocking and cleaning part of the present application naturally hangs down under the action of gravity in the non-working state, it will not affect the normal operation of the vacuum pump in the non-working state, ensuring the working efficiency and working effect of the vacuum pump. Description of the Drawings

[0016] Figure 1 It is a schematic structural diagram of the exhaust pipe of the single crystal furnace of the present invention.

[0017] Figure 2 It is a cross-sectional view of the exhaust pipe of the single crystal furnace of the present invention.

[0018] Figure 3 It is a schematic structural diagram of the cleaning device for the exhaust pipe of the single crystal furnace of the present invention.

[0019] Figure 4 It is Figure 3 The partial enlarged view of part A of

[0020] Figure 5 It is a schematic diagram of the installation positions of the ranging sensor and the pressure sensor of the present invention.

[0021] In the figure: single crystal furnace 1, exhaust pipe of single crystal furnace 10, knocking and cleaning part 20, head 21, middle part 22, root part 23, ring 24, driving mechanism 30, driving rod 40, connecting part 41, arc part 411, fixing part 412, ranging sensor 50, pressure sensor 60. Detailed Embodiments

[0022] The technical solutions and technical effects of the embodiments of the present invention are further elaborated in detail below in conjunction with the drawings of the present invention.

[0023] Please refer to Figures 1 to 3 at the same time. A cleaning device for the exhaust pipe of a single crystal furnace includes a knocking and cleaning part 20 and a driving mechanism 30. A driving rod 40 is arranged on the driving mechanism 30 along the axial direction of the exhaust pipe; The driving mechanism 30 is installed at one end far away from the inlet of the single crystal furnace exhaust pipe, and the knocking and cleaning part 20 is installed at one end of the driving rod 40 far away from the driving mechanism 30, so that the knocking and cleaning part 20 is located at the inlet of the single crystal furnace exhaust pipe. Wherein, the knocking and cleaning part 20 hangs down naturally in the non-working state; The driving mechanism 30 is used to drive the driving rod 40 to drive the knocking and cleaning part 20 to rotate, so that the knocking and cleaning part 20 contacts the oxides on the inner wall of the exhaust pipe under the action of centrifugal force, so as to clean the oxides at the inlet of the single crystal furnace exhaust pipe.

[0024] Since the oxides generated by the single crystal furnace mainly accumulate at the inlet of the single crystal furnace exhaust pipe, that is, the connection between the exhaust duct inside the furnace and the exhaust pipe outside the furnace body, therefore, the present invention sets a knocking and cleaning part at the inlet of the single crystal furnace exhaust pipe to clean the oxides attached to the inner wall of the single crystal furnace exhaust pipe. When it is necessary to clean the oxides in the single crystal furnace exhaust pipe, start the driving mechanism 30, so that the driving rod 40 starts to rotate, driving the knocking and cleaning part 20 installed on the driving rod 40 to start rotating. During the rotation process, the knocking and cleaning part 20 gradually opens under the action of centrifugal force and forms a certain angle with the driving rod, so that the head of the knocking and cleaning part 20 approaches the oxides on the inner wall of the single crystal furnace exhaust pipe. First, use the impact force generated when the knocking and cleaning part rotates to knock the oxides, making the oxides fragment, and then when the knocking and cleaning part rotates to the same position again, its head will scrape off the fragmented oxides, so that the oxides attached to the inner wall of the single crystal furnace exhaust pipe fall off, realizing the cleaning of the single crystal furnace exhaust pipe. At the same time, since the knocking and cleaning part 20 of the present application hangs down naturally under the action of gravity in the non-working state, it will not affect the normal operation of the vacuum pump in the non-working state.

[0025] Further, please refer to Figure 4, the knocking and cleaning part 20 includes a head 21, a middle part 22 and a root part 23; the head 21 is hemispherical; the middle part 22 is conical, and the diameter of the cone gradually decreases from the head to the root; the root part 22 is fixedly connected to one end of the driving rod 40 away from the driving mechanism 30. The knocking and cleaning part is designed with a structure that is thick at the head and thin at the root. When the driving rod rotates, the knocking and cleaning part will be subject to centrifugal force. The thick head can increase the mass of the head of the knocking and cleaning part, thereby generating a greater centrifugal force during rotation. On the one hand, it makes the knocking and cleaning part easier to open, reducing the power consumption of the driving mechanism. On the other hand, it can generate a greater impact force to break the oxides, improving the cleaning effect. At the same time, the thin root helps to reduce resistance during rotation, making the knocking and cleaning part more flexible during rotation, thus ensuring the rotation speed of the knocking and cleaning part, enabling it to have a stronger impact force to knock and knock off the oxides. In addition, the thick head can balance the inertial force during rotation, reducing the vibration generated by high-speed rotation and enhancing the stability of the driving mechanism and the driving rod. Moreover, during the process of cleaning the oxides by the knocking and cleaning part, a small part of the oxides will adhere to the head of the knocking and cleaning part. Due to the arc design of the head of the knocking and cleaning part, as the knocking and cleaning part rotates at high speed, part of the oxides on the head can be thrown off, and at the same time, the oxides adhering to the head will also fall off due to the mutual knocking with the oxides on the inner wall, thus realizing the self-cleaning of the knocking and cleaning part.

[0026] Further, please refer to Figure 3 and Figure 4 , a ring 24 is provided at the root of the knocking and cleaning part 20, and a connecting piece 41 is provided at one end of the driving rod 40 away from the driving mechanism 30, so as to realize the installation of the knocking and cleaning part 20 and the driving rod 40 by passing the ring 24 into the connecting piece 41. Specifically, the ring 24 of the knocking and cleaning part 20 is passed into the connecting piece 41, so that the knocking and cleaning part 20 is movably connected to the connecting piece 41. Among them, as Figure 4 shown, the head of the connecting piece 41 is arc-shaped, so that the ring of the knocking and cleaning part 20 can rotate along the arc part of the connecting piece 41, ensuring that the head of the knocking and cleaning part can gradually contact the oxides on the inner wall of the exhaust pipe under the action of centrifugal force during the rotation process of the knocking and cleaning part, so as to ensure that the knocking and cleaning part can approach the inner wall of the single crystal furnace exhaust pipe after rotating, so as to clean the oxides on the inner wall.

[0027] In some embodiments, the length of the knocking cleaning part is less than or equal to the distance between the inner wall of the exhaust pipe of the single crystal furnace and the driving rod. Among them, the knocking cleaning part gradually opens under the action of centrifugal force. When oxides adhere to the inner wall of the exhaust pipe of the single crystal furnace, the distance between the oxides and the driving rod is less than that of the knocking cleaning part. Therefore, the knocking cleaning part will gradually contact the oxides during rotation and knock and clean the oxides. At this time, a certain angle is formed between the knocking cleaning part and the driving rod. In some embodiments, the difference between the distance between the inner wall of the exhaust pipe of the single crystal furnace and the driving rod and the length of the knocking cleaning part is 0 - 5 mm. Among them, the setting range of the difference is determined according to the influence degree of the thickness of the oxides on the exhaust pipe. As an example, if the difference is 5 mm, it indicates that when the thickness of the oxides is less than 5 mm, even if the knocking cleaning part is in a horizontal state, it cannot contact the oxides and cannot clean the oxides. However, when the thickness of the oxides is less than 5 mm, its influence on the exhaust pipe is relatively weak and will not block the exhaust port at the bottom of the single crystal furnace. Therefore, the difference can be set to 5 mm.

[0028] In some embodiments, the connecting piece 41 is integrally formed and installed on the driving rod by welding. Specifically, first, the ring of the knocking cleaning part 20 is inserted into the connecting piece 41, and then both ends of the connecting piece 41 are welded to the driving rod, thereby realizing the installation of the knocking cleaning part 20 and the driving rod 40. When the driving rod drives the knocking cleaning part to rotate, the head of the knocking cleaning part will gradually approach the inner wall of the exhaust pipe under the action of centrifugal force, and the ring will also exert a radial force on the connecting piece towards the inner wall of the pipe. That is, the connecting piece will continuously receive a radial force towards the inner wall of the pipe during the entire cleaning process. Therefore, the connecting piece is integrally formed and welded to the driving rod to be firmly installed on the driving rod, thereby preventing the connecting piece from loosening during the entire cleaning process, further affecting the cleaning effect, and even preventing the knocking cleaning part from falling into the exhaust pipe and damaging the exhaust pipe.

[0029] In some embodiments, the connecting piece 41 has an openable structure. Please refer to Figure 4 , the connecting piece 41 includes an arc part 411 and a fixing part 412. The fixing part 412 is vertically fixed on the driving rod 40. One end of the arc part 411 is hinged to one end of the fixing part 412, and the other end of the arc part 411 is bolted to the other end of the fixing part 412. When installing the knocking cleaning part 20, the bolt is removed, the arc part 411 is opened, the ring 24 of the knocking cleaning part 20 is inserted into the arc part 411, and then the arc part and the fixing part are fixed by bolts, thereby realizing the installation of the knocking cleaning part and the driving rod. The knocking cleaning part will be worn during use. Designing the connecting piece as an openable structure can facilitate the replacement of the knocking cleaning part.

[0030] Furthermore, please refer toFigure 4 There are multiple connecting members 41, and the multiple connecting members 41 are arranged on the driving rod 40 along a spiral path. Existing cleaning devices for exhaust pipes usually also use a rotating method to scrape off the oxides on the inner wall of the exhaust pipe, but these cleaning devices can only clean one area of the exhaust pipe, and the cleaning effect is not good. However, in the present invention, the number of the connecting members 41 is multiple, so that multiple knocking cleaning parts 20 can be installed, and the multiple connecting members 41 are arranged on the driving rod 40 along a spiral path, so that the multiple knocking cleaning parts 20 are also arranged along a spiral path. When cleaning the oxides on the inner wall of the exhaust pipe of the single crystal furnace, by starting the driving mechanism, the driving rod is rotated to drive the multiple knocking cleaning parts to rotate simultaneously. Since the multiple knocking cleaning parts are arranged along a spiral path, they do not interfere with each other during the rotation process, and each knocking cleaning part can clean the oxides in the area corresponding to its rotation path, realizing the simultaneous cleaning of the oxides in multiple areas of the inner wall of the exhaust pipe and improving the cleaning efficiency of the cleaning device for the exhaust pipe of the single crystal furnace. At the same time, the multiple knocking cleaning parts are arranged along a spiral path, so that when the multiple knocking cleaning parts are vertically downward under the action of gravity in a stationary state, they can also not interfere with each other, keeping the exhaust pipe unobstructed, so as not to affect the working efficiency and working effect of the vacuum pump.

[0031] Furthermore, the thickness of the ring 24 is less than the length of the fixing part 412, which can ensure that when the knocking cleaning part rotates, the ring 24 can rotate along the arc part 411 in the connecting member 41, so that the head of the knocking cleaning part gradually contacts the inner wall of the exhaust pipe, thereby cleaning the oxides on the inner wall of the exhaust pipe.

[0032] Furthermore, please refer to Figure 1 and Figure 2 simultaneously. The driving mechanism 30 is arranged outside the exhaust pipe of the single crystal furnace, and the driving mechanism 30 and the exhaust pipe 10 of the single crystal furnace are hermetically connected through a magneto - fluid sealing technology, and the driving mechanism 30 is sealed outside the exhaust pipe of the single crystal furnace through a magneto - fluid sealing ring.

[0033] In some embodiments, a spring is provided between the middle portion 22 and the root portion 23, so that when the knocking cleaning portion 20 rotates, the knocking cleaning portion 20 generates a radial force toward the inner wall of the exhaust pipe, thereby increasing the knocking force on the oxide. Specifically, when the knocking cleaning portion rotates, it is gradually opened by the centrifugal force and contacts the oxide on the inner wall of the exhaust pipe. At the same time, the spring on the knocking cleaning portion is stretched by the centrifugal force, so that the knocking cleaning portion applies a radial force to the inner wall of the exhaust pipe, and the oxide on the inner wall of the exhaust pipe is better knocked. In addition, the spring is elastic, which can prevent the knocking cleaning portion from hard scraping the oxide. When the knocking cleaning portion knocks the oxide, the spring will be stretched by the relative force, so that when the knocking cleaning portion rotates to the same position next time, the knocking cleaning portion becomes shorter, and the broken oxide can be cleaned more effectively.

[0034] In some embodiments, the single crystal furnace exhaust pipe cleaning device also includes a dust collecting mechanism, which is arranged between the exhaust pipe and the vacuum pump to collect the oxides cleaned by the knocking cleaning part 20. Specifically, the single crystal furnace exhaust pipe of the present application is to clean the oxides on the inner wall of the exhaust pipe during the operation of the single crystal furnace, and the exhaust pipe of the single crystal furnace is generally connected to the vacuum pump. In the process of pulling a single crystal, the air in the furnace is usually extracted and discharged from the exhaust pipe of the single crystal furnace by a vacuum pump, so that the furnace is in a vacuum state. Therefore, after the oxides on the inner wall of the exhaust pipe are cleaned by knocking the cleaning part, the present application can use the original vacuum pump to suck out the exhaust pipe, and there is no need to set up an additional dust suction device, thereby reducing costs. At the same time, a dust collecting mechanism is arranged between the exhaust pipe and the vacuum pump to collect the oxides sucked out by the vacuum pump to prevent the oxides from entering the vacuum pump. The vacuum pump and the dust collecting mechanism are linked to each other to speed up the cleaning efficiency of the oxides in the exhaust pipe of the single crystal furnace, and on the other hand, the broken oxides can be collected to prevent the broken oxides from falling out of the exhaust pipe and scattering at will.

[0035] In some embodiments, the dust collecting mechanism includes a detachable filter screen, and after the vacuum pump sucks the cleaned oxides out of the exhaust pipe, the oxides are filtered and intercepted by the filter screen and do not fall into the vacuum pump. After the single crystal furnace exhaust pipe cleaning device stops working, the filter screen can be removed for cleaning.

[0036] In some embodiments, the single crystal furnace exhaust duct cleaning device of the present application can be manually controlled, that is, when the staff believes that the oxides on the inner wall of the single crystal furnace exhaust duct need to be cleaned, the driving mechanism is manually started to make the driving rod start to rotate and then drive the knocking cleaning part to rotate, and the knocking cleaning part is used to clean the oxides. In some embodiments, the single crystal furnace exhaust duct cleaning device can also be started at a fixed time, so as to automatically clean the oxides on the inner wall of the single crystal furnace exhaust duct at a fixed time.

[0037] In some embodiments, a servo motor may be adopted as the driving mechanism. The input end of the servo motor is connected to the controller, and the output end of the servo motor is connected to the driving rod. Among them, the original single crystal furnace PLC control system is used as the controller, and the servo motor is electrically connected to the single crystal furnace PLC control system. The speed and direction of the servo motor are controlled through the single crystal furnace PLC control system, so that the percussion cleaning part can realize various rotation schemes such as forward rotation, reverse rotation, intermittent rotation, and swinging, effectively removing oxides.

[0038] Further, please refer to Figure 5 , the single crystal furnace exhaust pipe cleaning device further includes a ranging sensor 50. The ranging sensor 50 is arranged in the area of the driving rod 40 close to the inlet of the single crystal furnace exhaust pipe to detect the thickness of the oxides attached to the inner wall of the single crystal furnace exhaust pipe. Among them, the distance between the driving rod and the inner wall of the exhaust pipe is pre-stored in the ranging sensor 50. The ranging sensor 50 detects in real time. When the detected data is less than the pre-stored distance between the driving rod and the inner wall of the exhaust pipe, it indicates that there are oxides attached to the inner wall of the exhaust pipe. Taking the difference between the detected data and the pre-stored distance between the driving rod and the inner wall of the exhaust pipe can obtain the thickness of the oxides attached to the inner wall of the single crystal furnace exhaust pipe.

[0039] In some embodiments, the single crystal furnace exhaust pipe cleaning device can be started according to the detection result of the ranging sensor, so as to realize the self-cleaning of the single crystal furnace exhaust pipe. Specifically, when the detected data of the ranging sensor is less than the pre-stored distance between the driving rod and the inner wall of the exhaust pipe, or the thickness of the oxides detected by the ranging sensor is greater than a certain threshold, the signal can be sent to the controller through the ranging sensor, and then the driving mechanism is started through the controller, so that the driving rod drives the percussion cleaning part to clean the oxides on the inner wall, so that the automatic cleaning function of the single crystal furnace exhaust pipe cleaning device can be accurately realized according to whether there are oxides or the degree of oxide attachment.

[0040] In some embodiments, the set distance can be stored in the single crystal furnace PLC control system. The ranging sensor sends the distance detected in real time to the single crystal furnace PLC control system. The signal processing module of the single crystal furnace PLC control system compares the detected distance with the set distance, so as to determine whether there are oxides attached to the inner wall of the detected single crystal furnace exhaust pipe. When it is determined that there are oxides attached to the inner wall of the detected single crystal furnace exhaust pipe, the single crystal furnace PLC control system sends a control instruction to the driving mechanism to control the driving mechanism to start, so that the driving rod rotates to drive the percussion cleaning part to rotate to clean the oxides.

[0041] In some embodiments, the distance measuring sensor 50 may be an ultrasonic sensor, a device that uses ultrasonic waves to measure the distance between an object and the sensor. By emitting high-frequency sound waves and measuring the time difference between the emission and reflection of the sound waves, the distance between the driving rod and the inner wall of the exhaust duct can be calculated.

[0042] In some embodiments, the number of distance measuring sensors is multiple. The multiple distance measuring sensors are also arranged along a spiral path, and the positions of the multiple distance measuring sensors are respectively parallel to the positions of the multiple connecting pieces, so that multiple regions of the inner wall of the single crystal furnace exhaust duct can be detected to ensure accurate detection of whether oxides are attached to the inner wall of the single crystal furnace exhaust duct.

[0043] Further, please refer to Figure 5 , the single crystal furnace exhaust duct cleaning device further includes a pressure sensor 60. The pressure sensor 60 is arranged on the side of the head of the percussion cleaning part 20 to detect whether the oxides on the inner wall of the single crystal furnace exhaust duct are cleaned. Since the inner wall of the exhaust duct is invisible and the staff cannot perceive whether the oxides on the inner wall of the single crystal furnace exhaust duct are cleaned outside, generally, it is based on experience or continuous cleaning of the inner wall of the exhaust duct. Therefore, the single crystal furnace exhaust duct cleaning device of the present invention is designed with a pressure sensor on the percussion cleaning part to detect whether the exhaust duct is cleaned. Specifically, when the percussion cleaning part cleans the oxides, a force is applied to the oxides due to the centrifugal force, causing the oxides to fall off from the inner wall of the exhaust duct. Since the force is mutual, the percussion cleaning part will also receive the force applied by the oxides. When the oxides are cleaned, the percussion cleaning part will not receive the force applied by the oxides. Therefore, by arranging a pressure sensor on the side of the head of the percussion cleaning part, when the percussion cleaning part cleans the oxides, the pressure sensor can receive the force applied by the oxides, and by detecting whether the force received by the side of the head of the percussion cleaning part changes or whether the side of the head of the percussion cleaning part receives a force, it can be judged whether the oxides on the inner wall of the exhaust duct are cleaned. Among them, the head of the percussion cleaning part is hemispherical, and the side of the head is the curved surface area except the vertex of the head.

[0044] In some embodiments, since the percussion cleaning part can clean the oxides more effectively by switching between forward and reverse rotations, a pressure sensor can be arranged on each of the two sides of the head. The two pressure sensors are symmetrically arranged to ensure that whether the percussion cleaning part rotates forward or backward, there is a pressure sensor for detection, ensuring accurate judgment of whether the oxides are cleaned.

[0045] In some embodiments, the ranging sensor, the pressure sensor communicate with the controller wirelessly. The signals detected by the sensors are sent to the controller via wireless communication. The controller sends the signals to the processor, and the processor processes the signals to obtain corresponding control information and returns it to the controller. The controller sends the control signals to the servo motor to control the start or stop of the servo motor.

[0046] Please refer to Figure 1 , the present invention also provides a single crystal furnace 1, including a single crystal furnace exhaust duct 10, and the above-mentioned single crystal furnace exhaust duct cleaning device is installed at the inlet of the single crystal furnace exhaust duct 10.

[0047] The above-disclosed are only the preferred embodiments of the present invention. Of course, the scope of the rights of the present invention cannot be limited thereby. Those of ordinary skill in the art can understand all or part of the processes of implementing the above embodiments, and the equivalent changes made according to the claims of the present invention still fall within the scope covered by the present invention.

Claims

1. A cleaning device for the exhaust pipeline of a single crystal furnace, characterized in that, It includes a knocking and cleaning part and a driving mechanism. A driving rod is arranged on the driving mechanism along the axial direction of the exhaust pipe. The driving mechanism is installed at one end far from the inlet of the single crystal furnace exhaust pipe, and the knocking and cleaning part is installed at one end of the driving rod far from the driving mechanism, so that the knocking and cleaning part is located at the inlet of the single crystal furnace exhaust pipe. Among them, the knocking and cleaning part hangs down naturally in the non-working state. The driving mechanism is used to drive the driving rod to drive the knocking and cleaning part to rotate, so that the knocking and cleaning part contacts the oxides on the inner wall of the exhaust pipe under the action of centrifugal force, so as to clean the oxides at the inlet of the single crystal furnace exhaust pipe.

2. The single crystal furnace exhaust pipe cleaning device according to claim 1, characterized in that The knocking and cleaning part includes a head, a middle part and a root; the head is hemispherical; the middle part is conical, and the diameter of the cone gradually decreases from the head to the root; the root is fixedly connected to one end of the driving rod far from the driving mechanism.

3. The single crystal furnace exhaust pipe cleaning device according to claim 2, characterized in that, A ring is arranged at the root of the knocking and cleaning part, and a connecting piece is arranged at one end of the driving rod far from the driving mechanism, so as to install the knocking and cleaning part on the driving rod by passing the ring through the connecting piece.

4. The single crystal furnace exhaust pipe cleaning device according to claim 3, wherein The connecting piece includes an arc part and a fixing part. The fixing part is vertically fixed on the driving rod. One end of the arc part is hinged to one end of the fixing part, and the other end of the arc part is bolted to the other end of the fixing part.

5. The single crystal furnace exhaust pipe cleaning device according to claim 4, characterized in that, The number of the connecting pieces is multiple, and the multiple connecting pieces are arranged on the driving rod along a spiral path.

6. The single crystal furnace exhaust duct cleaning device according to claim 2, characterized in that, A spring is arranged between the middle part and the root, so as to generate a force in the radial direction of the exhaust pipe inner wall when the knocking and cleaning part rotates, and increase the knocking force on the oxides.

7. The single crystal furnace exhaust duct cleaning device according to claim 1, characterized in that, The single crystal furnace exhaust pipe cleaning device further includes a dust collecting mechanism, and the dust collecting mechanism is arranged between the exhaust pipe and the vacuum pump to collect the oxides cleaned by the knocking and cleaning part.

8. The single crystal furnace exhaust duct cleaning device according to claim 1, wherein The single crystal furnace exhaust pipe cleaning device further includes a distance measuring sensor, and the distance measuring sensor is arranged in the area of the driving rod close to the inlet of the single crystal furnace exhaust pipe to detect the thickness of the oxides attached to the inner wall of the single crystal furnace exhaust pipe.

9. The single crystal furnace exhaust duct cleaning device according to claim 1, characterized in that, The single crystal furnace exhaust pipe cleaning device further includes a pressure sensor, and the pressure sensor is arranged on the side of the head of the knocking and cleaning part to detect whether the oxides on the inner wall of the single crystal furnace exhaust pipe are cleaned.

10. A single crystal furnace, characterized in that, It includes a single crystal furnace exhaust pipe, and the single crystal furnace exhaust pipe cleaning device according to any one of claims 1-9 is installed at the inlet of the single crystal furnace exhaust pipe.

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