Vacuum and atmosphere hot-pressing suite

Abstract

The invention belongs to the technical field of pressure testing machines, and provides a vacuum and atmosphere hot-pressing suite which comprises a load system, a heating system and a vacuum and atmosphere system, a connecting rod of the load system is connected with an external pressure device, pressure is applied to a sample through a pressure rod and a pressure plate in the load system, and the heating system adopts a furnace heating mode. A cover type heat preservation sleeve is adopted to ensure temperature uniformity, a vacuum and atmosphere system adopts a sealing ring to achieve static sealing between a sealing disc and a furnace body, and a connecting rod sealing device is adopted to achieve dynamic sealing between a connecting rod and the sealing disc. The suite does not need additional heat preservation and cooling devices, the complexity of the suite can be greatly reduced, the temperature rise response is fast, and the energy consumption is low; the device can be adapted to pressure devices such as a universal mechanical experiment machine, vacuum and atmosphere hot pressing effects are achieved, and the device has good compatibility when used as an assembly.

Description

Technical Field

[0001] The present invention belongs to the technical field of pressure testing machines, and particularly relates to a vacuum and atmosphere hot pressing kit. Background Art

[0002] Vacuum hot pressing technology is mainly used in fields such as powder metallurgy, material processing, brazing, and electronic device interconnection. The working temperature can be as high as 2000°C, the pressure range is generally from 0 to 500t, and the ultimate vacuum degree is generally on the order of 10-2Pa. Current commercial vacuum hot presses bind the three major functions of vacuum environment control, high-temperature heating, and pressure loading into an inseparable whole through a highly integrated system architecture, reducing the flexibility of use. Most scientific research scenarios such as material processing and electronic device interconnection have relatively low temperature requirements (temperature < 600°C) and force requirements (force < 2t) for vacuum hot presses. In particular, the slurry sintering research in the field of electronic device interconnection requires an ultimate load generally < 10000N, but the precision requirement < 1N; the ultimate temperature < 350°C, the temperature control precision < 0.2°C; the ultimate vacuum degree requirement is better than 1×10 -2 Pa, and different atmospheres can be provided at the same time. However, the current vacuum hot presses have relatively high design limit values for vacuum, temperature, and force, but poor control precision, and cannot meet the requirements of scientific research for high-precision vacuum hot pressing. In addition, large commercial vacuum hot presses also have problems such as high price and large volume. For teams that have already equipped pressure equipment such as universal mechanical testing machines, purchasing a vacuum hot press requires additional procurement costs and storage space. Therefore, if the functions of vacuum and atmosphere, heating, and load can be modularly designed and used as components of existing pressure devices, it has good functions and economic benefits. Summary of the Invention

[0003] To solve the above technical problems, the present invention provides a vacuum and atmosphere hot pressing kit to solve the problems in the prior art. The technical solution adopted by the present invention is:

[0004] A vacuum and atmosphere hot pressing kit includes a load system, a heating system, and a vacuum and atmosphere system;

[0005] The vacuum and atmosphere system includes a vacuum pump, a furnace body, an upper sealing disc, a lower sealing disc, a connecting rod sealing device, and a vacuum pump; the furnace body is a hollow structure, and the upper and lower ends thereof are respectively provided with the upper sealing disc and the lower sealing disc; the furnace body is communicated with the vacuum pump;

[0006] The load system includes an upper connecting rod, a lower connecting rod, an upper pressing rod, a lower pressing rod, a pressing plate and an external pressure device; the upper pressing rod and the lower pressing rod are both arranged inside the furnace body, the lower pressing rod is located below the upper pressing rod, the top of the lower pressing rod is connected to the pressing plate, and the sample is placed on the pressing plate; the top of the upper pressing rod is fixedly connected to the upper connecting rod, the bottom of the lower pressing rod is fixedly connected to the lower connecting rod, the upper connecting rod passes through the upper sealing plate, the lower connecting rod is fixedly connected to the lower sealing plate, and the upper connecting rod and the lower connecting rod are respectively connected to the external pressure device, which is used to push the upper pressing rod and the pressing plate to move relative to each other to squeeze the sample;

[0007] The heating system includes a heating wire, a thermocouple, a vacuum aviation plug, a temperature controller and a hood-type heat preservation sleeve; a receiving groove is arranged at the bottom of the pressing plate, the heating wire is arranged in the receiving groove and contacts the pressing plate, which is used to heat the pressing plate and the sample, a central hole is arranged on the pressing plate, the thermocouple is arranged in the central hole, the thermocouple contacts the sample, which is used to monitor the sample temperature, and the thermocouple and the heating wire are connected to the temperature controller located outside the furnace body through the vacuum aviation plug; the pressing plate is located inside the hood-type heat preservation sleeve, and the hood-type heat preservation sleeve is fixedly connected to the upper pressing rod.

[0008] Further, a connecting rod sealing device is arranged at the position where the upper connecting rod passes through the upper sealing plate. The connecting rod sealing device includes a base and a T-shaped head. The base is fixedly connected to the upper sealing plate. A groove is arranged at the top of the base. The upper connecting rod passes through the base and forms an annular interval with the groove. The T-shaped head is inserted into the annular interval, and a seal is arranged between the T-shaped head and the base.

[0009] Further, the vacuum and atmosphere system also includes a vacuum four-way joint, a vacuum pressure gauge, a vacuum ionization gauge, a vacuum bellows and a vacuum baffle valve;

[0010] The four ports of the vacuum four-way joint are respectively communicated with the bottom of the furnace body, the vacuum pressure gauge, the vacuum ionization gauge and the vacuum baffle valve; the vacuum baffle valve is communicated with the vacuum pump through the vacuum bellows.

[0011] Further, the vacuum and atmosphere system also includes a vacuum three-way joint, an exhaust gas pipeline, a working gas container, a charging pipeline and a vacuum ball valve;

[0012] The three ports of the vacuum three-way joint are respectively communicated with the top of the furnace body, the exhaust gas pipeline and the charging pipeline; vacuum ball valves are arranged on the exhaust gas pipeline and the charging pipeline, and the working gas container is arranged on the charging pipeline.

[0013] Further, the upper pressing rod and the lower pressing rod are made of quartz glass or zirconia ceramics.

[0014] Furthermore, the pressure plate is made of one of the materials of silicon carbide, cemented carbide, hot work die steel, heat-resistant steel and high-speed tool steel;

[0015] Furthermore, the seal between the T-shaped head and the base adopts one of the sealing methods of O-ring rubber seal, skeleton oil seal ring seal, shaft sleeve seal or magnetic fluid seal.

[0016] Furthermore, the material of the hood-type heat preservation sleeve is silver, aluminum, gold, or a material with silver, aluminum or gold plated on the surface.

[0017] The present invention has the following beneficial effects:

[0018] (1) The present invention can simultaneously achieve a vacuum, an atmosphere and a heating environment, can be adapted to most existing pressure devices such as universal mechanical testing machines, and achieve the vacuum and atmosphere hot pressing effects. It has good compatibility when used as a component;

[0019] (2) The present invention adopts an in-furnace heating method and is equipped with a hood-type heat preservation sleeve, which can ensure the temperature uniformity in the heat preservation sleeve, and has a small heating area, a fast heat response, less heat dissipation and low energy consumption;

[0020] (3) The present invention uses a material with a high reflectivity and a low emissivity as the hood-type heat preservation sleeve, which has a good heat preservation effect below 600 °C. There is no need to adopt an additional heat preservation layer, and the size of the kit can be greatly reduced;

[0021] (4) The upper and lower pressure rods of the present invention adopt materials with low thermal conductivity, which reduces the heat loss at high temperatures, and at the same time prevents the upper and lower connecting rods and external pressure devices from overheating. There is no need for an additional cooling device, reducing the complexity of the kit. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Attached Figure 1 is a schematic diagram of the overall structure of the present invention;

[0023] Attached Figure 2 is a perspective view of the present invention;

[0024] Attached Figure 3 is a schematic sectional view of the local structure at the pressure plate;

[0025] Attached Figure 4 is a schematic sectional view of the local structure at the connecting rod sealing device Figure 1 ;

[0026] Attached Figure 5 is a schematic sectional view of the local structure at the connecting rod sealing device Figure 2 ;

[0027] In the figure: 1, furnace body; 2, upper sealing disc; 3, lower sealing disc; 4, furnace body sealing ring; 5, lower connecting rod; 6, lower pressing rod; 7, upper connecting rod; 8, upper pressing rod; 9, vacuum four-way joint; 10, vacuum pressure gauge; 11, vacuum ionization gauge; 12, vacuum bellows; 13, vacuum pump; 14, vacuum baffle valve; 15, vacuum aviation plug; 16, vacuum three-way joint; 17, gas discharge pipeline; 18, working gas container; 19, gas filling pipeline; 20, vacuum ball valve; 21, pressing disc; 22, heating wire; 23, thermocouple; 24, temperature controller; 25, hood-type heat insulation sleeve; 26, sample; 27, connecting rod sealing device; 28, O-ring fluororubber seal; 29, polytetrafluoroethylene bushing. Specific embodiments

[0028] The following will combine the Figures 1 - 5 in the embodiments of the present invention, and clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all of the embodiments. If not specifically specified, the technical means used in the embodiments are conventional means well known to those skilled in the art.

[0029] As Figure 1 , a vacuum and atmosphere hot pressing kit, including a load system, a heating system, and a vacuum and atmosphere system;

[0030] The vacuum and atmosphere system includes a vacuum pump 13, a furnace body 1, an upper sealing disc 2, a lower sealing disc 3, a connecting rod sealing device 27, and a vacuum pump 13; the furnace body 1 is a hollow structure, and the upper and lower ends thereof are respectively provided with the upper sealing disc 2 and the lower sealing disc 3; the furnace body 1 is connected to the vacuum pump 13;

[0031] The load system includes an upper connecting rod 7, a lower connecting rod 5, an upper pressing rod 8, a lower pressing rod 6, a pressing disc 21, and an external pressure device; the upper pressing rod 8 and the lower pressing rod 6 are both arranged in the furnace body 1, the lower pressing rod 6 is located below the upper pressing rod 8, the top of the lower pressing rod 6 is connected to the pressing disc 21, and the sample 26 is placed on the pressing disc 21; the top of the upper pressing rod 8 is fixedly connected to the upper connecting rod 7, the bottom of the lower pressing rod 6 is fixedly connected to the lower connecting rod 5, the upper connecting rod 7 passes through the upper sealing disc 2, the lower connecting rod 5 is fixedly connected to the lower sealing disc 3, and the upper connecting rod 7 and the lower connecting rod 5 are respectively connected to the external pressure device for pushing the upper pressing rod 8 and the pressing disc 21 to move relatively to extrude the sample 26;

[0032] The vacuum pump 13 of the present invention constructs a vacuum environment in the furnace body 1. After starting, it extracts the air in the furnace body to form a negative pressure vacuum environment, preventing the infiltration of external air, and can effectively avoid the oxidation of the sample 26 at high temperatures or the reaction with impurities in the air. Then, an inert gas (such as argon, nitrogen) or a specific process atmosphere (such as hydrogen, a mixed gas of nitrogen and hydrogen) can be filled through the gas filling pipeline 19 to maintain the stability of the atmosphere composition in the furnace and meet the special requirements of different processes such as material sintering and diffusion bonding for the atmosphere environment (such as reducing and protective atmospheres).

[0033] The external pressure device of the present invention can be a hydraulic cylinder or a servo motor drive mechanism; they act on the upper connecting rod 7 and the lower connecting rod 5 respectively, and through rigid conduction, push the upper pressure rod 8 and the lower pressure rod 6 to move relatively. Ensure that the pressure is evenly transmitted to the surface of the sample 26.

[0034] The present invention can simultaneously achieve a vacuum, an atmosphere, and a heating environment, can be adapted to most existing pressure devices such as universal mechanical testing machines, and achieve the vacuum and atmosphere hot pressing effects. It has good compatibility when used as a component.

[0035] See the appendix Figure 1 and the appendix Figure 3 The heating system includes a heating wire 22, a thermocouple 23, a vacuum aviation plug 15, a temperature controller 24, and a cover-type heat preservation sleeve 25;

[0036] A receiving groove is provided at the bottom of the pressure plate 21, and the heating wire 22 is arranged in the receiving groove and contacts the pressure plate 21 for heating the pressure plate 21 and the sample 26. A central hole is provided in the pressure plate 21, and the thermocouple 23 is arranged in the central hole. The thermocouple 23 contacts the sample 26 for monitoring the temperature of the sample 26. The thermocouple 23 and the heating wire 22 are connected to the temperature controller 24 located outside the furnace body 1;

[0037] The pressure plate 21 is located inside the cover-type heat preservation sleeve 25, and the cover-type heat preservation sleeve 25 is fixedly connected to the upper pressure rod 8.

[0038] The pressure plate 21 is made of silicon carbide or YG8 hard alloy. It is placed above the lower pressure rod 6 and is in close contact with the heating wire 22. A central hole is opened in the pressure plate 21 for inserting the thermocouple 23. The heating wire 22 and the thermocouple 23 are both connected to the temperature controller 24 outside the furnace body 1 through the aviation plug 15 on one side of the lower sealing plate 3. The cover-type heat preservation sleeve 25 is made of mirror-polished silver with a purity of 99.99%, and covers the sample 26 and the pressure plate 21 downward in the working state. The upper pressure rod 8 passes through the cover-type heat preservation sleeve 25 and is coaxially fixed with it.

[0039] Such as Figure 4 、 Figure 5, a connecting rod sealing device 27 is provided at the position where the upper connecting rod 7 passes through the upper sealing disc 2. The connecting rod sealing device 27 includes a base and a T-shaped head. The base is fixedly connected to the upper sealing disc 2. A groove is provided at the top of the base. The upper connecting rod 7 passes through the base and forms an annular interval with the groove. The T-shaped head is inserted into the annular interval. An O-shaped fluororubber ring 28 or a polytetrafluoroethylene bushing 29 is provided between the T-shaped head and the base. The dynamic seal between the upper connecting rod 7 and the upper sealing disc 2 is realized through the connecting rod sealing device 27, and the up and down movement can be realized.

[0040] Further, the vacuum and atmosphere system further includes a vacuum four-way joint 9, a vacuum pressure gauge 10, a vacuum ionization gauge 11, a vacuum bellows 12 and a vacuum baffle valve 14;

[0041] The four ports of the vacuum four-way joint 9 are respectively connected to the bottom of the furnace body 1, the vacuum pressure gauge 10, the vacuum ionization gauge 11 and the vacuum baffle valve 14; the vacuum baffle valve 14 is connected to the vacuum pump 13 through the vacuum bellows 12.

[0042] Further, the vacuum and atmosphere system further includes a vacuum three-way joint 16, an exhaust gas pipeline 17, a working gas container 18, a charging pipeline 19 and a vacuum ball valve 20;

[0043] The three ports of the vacuum three-way joint 16 are respectively connected to the top of the furnace body 1, the exhaust gas pipeline 17 and the charging pipeline 19; the vacuum ball valve 20 is provided on the exhaust gas pipeline 17 and the charging pipeline 19, and the working gas container 18 is provided on the charging pipeline 19.

[0044] The present invention can be applied to a single-arm universal mechanical testing machine, and the realized technical parameters are as follows:

[0045] Diameter of the sample stage: 48 mm;

[0046] Working distance between the pressure bars: 0 - 240 mm;

[0047] Maximum pressure value: 5000 N;

[0048] Force sensitivity: 0.5 level;

[0049] Operating temperature < 600 °C;

[0050] Temperature accuracy: ±0.2 °C;

[0051] Temperature of the outer end face of the furnace body < 50 °C (working temperature 600 °C);

[0052] Heating rate > 20 °C / min;

[0053] Temperature control: 20-segment program control;

[0054] Ultimate vacuum degree: <3×10 -3 Pa;

[0055] Working atmosphere: vacuum, air, oxygen, argon, etc.

[0056] In addition, in the present invention:

[0057] The upper pressure rod 8 and the lower pressure rod 6 are made of materials with low thermal conductivity (<5 W / m·K at 600 °C) and high compressive strength (>500 MPa at 600 °C), and can be one of quartz glass and zirconia ceramics;

[0058] The pressure plate 21 is made of materials with high thermal conductivity (>20 W / m·K at room temperature) and high compressive strength (>500 MPa at 600 °C), and can be one of silicon carbide, cemented carbide, hot work die steel, heat-resistant steel and high-speed tool steel;

[0059] The sealing method of the connecting rod sealing device 27 can be one of O-ring rubber seal, skeleton oil seal, shaft sleeve seal or magnetic fluid seal;

[0060] The material of the hood-type heat preservation sleeve 25 can be silver, aluminum, gold, or other materials with silver, aluminum, or gold plated on the surface.

[0061] The above-described embodiments are only descriptions of the preferred embodiments of the present invention, and do not limit the scope of the present invention. Without departing from the design spirit of the present invention, various deformations, variations, modifications, and substitutions made by those of ordinary skill in the art to the technical solutions of the present invention shall fall within the protection scope determined by the claims of the present invention.

Claims

1. A vacuum and atmosphere hot pressing kit, characterized in that, It includes a load system, a heating system, and a vacuum and atmosphere system; The vacuum and atmosphere system includes a vacuum pump (13), a furnace body (1), an upper sealing disc (2), a lower sealing disc (3), a connecting rod sealing device (27), and a vacuum pump (13); the furnace body (1) is of a hollow structure, and the upper sealing disc (2) and the lower sealing disc (3) are respectively arranged at its upper and lower ends; the furnace body (1) is connected to the vacuum pump (13); The load system includes an upper connecting rod (7), a lower connecting rod (5), an upper pressure rod (8), a lower pressure rod (6), a pressure disc (21), and an external pressure device; the upper pressure rod (8) and the lower pressure rod (6) are both arranged inside the furnace body (1), the lower pressure rod (6) is located below the upper pressure rod (8), the top of the lower pressure rod (6) is connected to the pressure disc (21), and a sample (26) is placed on the pressure disc (21); the top of the upper pressure rod (8) is fixedly connected to the upper connecting rod (7), the bottom of the lower pressure rod (6) is fixedly connected to the lower connecting rod (5), the upper connecting rod (7) passes through the upper sealing disc (2), the lower connecting rod (5) is fixedly connected to the lower sealing disc (3), and the upper connecting rod (7) and the lower connecting rod (5) are respectively connected to the external pressure device for pushing the upper pressure rod (8) and the pressure disc (21) to move relatively to extrude the sample (26); The heating system includes a heating wire (22), a thermocouple (23), a vacuum aviation plug (15), a temperature controller (24), and a cover-type heat insulation sleeve (25); a receiving groove is arranged at the bottom of the pressure disc (21), the heating wire (22) is arranged in the receiving groove and contacts the pressure disc (21) for heating the pressure disc (21) and the sample (26), a central hole is arranged in the pressure disc (21), the thermocouple (23) is arranged in the central hole, the thermocouple (23) contacts the sample (26) for monitoring the temperature of the sample (26), and the thermocouple (23) and the heating wire (22) are connected to the temperature controller (24) located outside the furnace body (1) through the vacuum aviation plug (15); the pressure disc (21) is located inside the cover-type heat insulation sleeve (25), and the cover-type heat insulation sleeve (25) is fixedly connected to the upper pressure rod (8).

2. The vacuum and atmosphere hot pressing kit according to claim 1, characterized in that A connecting rod sealing device (27) is arranged at the position where the upper connecting rod (7) passes through the upper sealing disc (2). The connecting rod sealing device (27) includes a base and a T-shaped head. The base is fixedly connected to the upper sealing disc (2), a groove is arranged at the top of the base, the upper connecting rod (7) passes through the base and forms an annular space with the groove, the T-shaped head is inserted into the annular space, and a seal is arranged between the T-shaped head and the base.

3. A vacuum and atmosphere hot pressing kit according to claim 1, wherein, The vacuum and atmosphere system further includes a vacuum four-way joint (9), a vacuum pressure gauge (10), a vacuum ionization gauge (11), a vacuum bellows (12), and a vacuum baffle valve (14); The four ports of the vacuum four-way joint (9) are respectively connected to the bottom of the furnace body (1), the vacuum pressure gauge (10), the vacuum ionization gauge (11) and the vacuum baffle valve (14); the vacuum baffle valve (14) is connected to the vacuum pump (13) through the vacuum bellows (12).

4. A vacuum and atmosphere hot pressing kit according to claim 1, characterized in that, The vacuum and atmosphere system further includes a vacuum three-way joint (16), an exhaust gas pipeline (17), a working gas container (18), a gas charging pipeline (19) and a vacuum ball valve (20); The three ports of the vacuum three-way joint (16) are respectively connected to the top of the furnace body (1), the exhaust gas pipeline (17) and the gas charging pipeline (19); the vacuum ball valve (20) is arranged on the exhaust gas pipeline (17) and the gas charging pipeline (19), and the working gas container (18) is arranged on the gas charging pipeline (19).

5. A vacuum and atmosphere hot pressing kit according to claim 1, characterized in that The upper pressure rod (8) and the lower pressure rod (6) are made of quartz glass or zirconia ceramics.

6. The vacuum and atmosphere hot pressing kit according to claim 1, wherein The pressing plate (21) is made of one of the materials of silicon carbide, cemented carbide, hot work die steel, heat-resistant steel and high-speed tool steel.

7. The vacuum and atmosphere hot pressing kit according to claim 2, wherein, The seal between the T-shaped head and the base is one of the sealing methods of O-ring rubber seal, skeleton oil seal ring seal, shaft sleeve seal or magnetic fluid seal.

8. The vacuum and atmosphere hot pressing kit according to claim 1, wherein, The material of the hood-type heat preservation sleeve (25) is silver, aluminum, gold, or a material with silver, aluminum, or gold plated on the surface.

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