Vertical nano-imprinting equipment

Abstract

The invention discloses a vertical nanoimprint device which comprises a rack, and the rack is provided with a curing lamp assembly used for curing in the vertical direction; the impressing roller assembly comprises a movable roller and is used for impressing; the rubber frame storing and feeding device is used for storing and feeding rubber frames; and the alignment platform assembly is used for bearing the wafer. The transfer mechanism has the beneficial effects that the overall structure is compact, all the mechanisms are integrated in a three-dimensional space, occupied space is reduced, meanwhile, no long-span transfer distance exists, and efficiency is improved.

Description

Technical Field

[0001] The present invention relates to the field of nanoimprint technology, and specifically relates to a vertical nanoimprint device. Background Art

[0002] With the development of semiconductor manufacturing technology, the size requirements of integrated circuits are getting smaller and smaller, and the requirements for lithography technology are getting higher and higher, resulting in higher and higher costs for lithography manufacturing. To solve this technical problem, nanoimprint technology has been proposed in this field.

[0003] Nanoimprint technology refers to imprinting micro / nano structure patterns onto corresponding substrates by means of a mold under pressure. At present, nanoimprint technology has the characteristics of high resolution, high yield, and low cost, and is widely used in the manufacture of micro and nano structures.

[0004] Nanoimprint technology is usually divided into two methods: hot embossing and ultraviolet (UV) imprinting. Since UV imprinting has characteristics such as high structural fidelity and high aspect ratio of micro-structure transfer, it is widely used. The imprinting device in the prior art has a complex structure. In traditional imprinting devices, each component is placed on the same plane, and through different height differences, the alternating actions of each component are completed by relying on a high-precision module to complete imprinting. For example, the invention patent with the application number 201810521566.7 discloses a soft film replacement and nanoimprint integrated device, which occupies a large space, requires a long-stroke module while occupying a large space, and reduces efficiency. Summary of the Invention

[0005] To solve the above technical problems, the present invention provides a vertical nanoimprint device, in which each mechanism is integrated in a three-dimensional space, reducing space occupation. At the same time, there is no long-span transfer distance, improving efficiency.

[0006] Specifically, the present invention discloses a vertical nanoimprint device, including:

[0007] A frame, along the vertical direction, the frame is provided with:

[0008] A curing lamp assembly for curing;

[0009] An imprinting roller assembly, including a movable roller for imprinting;

[0010] A glue frame storage and feeding device for storing and feeding glue frames;

[0011] An alignment platform assembly for receiving wafers.

[0012] The advantage of adopting the above technical solution is that the overall structure is compact, each mechanism is integrated in a three-dimensional space, reducing space occupation. At the same time, there is no long-span transfer distance, improving efficiency.

[0013] Further, the glue frame storage and feeding device includes a glue frame storage component, a glue frame feeding component, and a glue frame fixing component. The glue frame storage component includes a storage frame, the storage frame has a plurality of storage positions for storing glue frames, the storage frame is equipped with a vertical movement module, and the vertical movement module drives the storage frame to move up and down.

[0014] The advantage of adopting the above technical solution is that by setting the glue frame storage and feeding components, the storage, movement, and fixing of the glue frame are realized, the automatic loading and unloading of the glue frame are realized, and the glue frame is automatically fixed to ensure that the glue frame does not move during the embossing process.

[0015] Further, the glue frame feeding component is used to drive the glue frame to move between the glue frame storage component and the glue frame fixing component, and includes: a moving plate, a first moving module, a connecting plate, and a fixing head. The moving plate moves along the first moving module, the connecting plate is connected to the moving plate, the fixing head is telescopically installed on the connecting plate, and the glue frame is provided with a fixing hole cooperating with the fixing head.

[0016] The advantage of adopting the above technical solution is that the fixing head is set to fix the glue frame, and then the glue frame is driven to move by the first moving module, and is moved to the glue frame fixing position for fixing. At the same time, the embossed glue frame can be moved into the glue frame storage box for storage, realizing the automatic loading and unloading of the glue frame.

[0017] Further, the glue frame fixing component includes: a fixing frame, one end of which is rotatably fixed on the frame, and the other end is connected with a lifting and rotating component, including a fixing plate and a rotating joint. A first slider that can move up and down is arranged on the fixing plate. The rotating joint connects the first slider and the fixing frame. When the first slider is at the bottom, the bottom of the fixing frame remains horizontal.

[0018] The advantage of adopting the above technical solution is that one end of the entire fixing frame can be rotatably fixed, and the other end can move slightly up and down and can also rotate. After fixing the glue frame, through up and down movement and rotation, it can be ensured that the glue frame is in a horizontal state, ensuring complete graphic transfer during the embossing process.

[0019] Further, a limiting block and a pressing block are arranged at the bottom of the fixing frame, the pressing block is connected with a pressing driving part, and the pressing driving part drives the pressing block to press the glue frame.

[0020] The advantage of adopting the above technical solution is that the setting of the pressing block plays a role in fixing, and at the same time, the pressing driving part is set to drive the pressing block to act, realizing up and down movement.

[0021] Further, the alignment platform assembly includes: a mounting frame, a receiving platform, a lifting drive assembly, a rotation drive assembly, and a translation drive assembly. The receiving platform is mounted on the mounting frame. The lifting drive assembly drives the mounting frame to move up and down. The rotation drive assembly is located below the receiving platform and is used to drive the receiving platform to rotate. The translation drive assembly drives the receiving platform to move horizontally.

[0022] The advantage of adopting the above technical solution is that the setting of the movable alignment platform realizes the automatic movement of the wafer and the positioning of the glue frame, and ensures the pattern imprinting position.

[0023] Further, the receiving platform is provided with receiving columns. The receiving columns pass through the receiving platform and are connected with a lifting plate at the bottom. The lifting plate is connected with a receiving column drive member to drive the receiving columns to move up and down.

[0024] The advantage of adopting the above technical solution is that the setting of the receiving columns plays a role in receiving and lifting, ensuring that the wafer will not be damaged during transfer and ensuring the product quality.

[0025] Further, the machine frame is also provided with a vision alignment component, including: a camera, a camera mounting plate, and a second moving module. The camera is fixed to the camera mounting plate, and the second moving module drives the camera mounting plate to move in multiple directions.

[0026] The advantage of adopting the above technical solution is that the wafer and the glue frame are positioned through the camera, ensuring the accuracy of the pattern imprinting position.

[0027] Further, a vertical cylinder and a vertical guide rail are arranged on the side surface of the moving plate. A slider is arranged on the vertical guide rail, and the slider is connected with the connecting plate. The vertical cylinder drives the connecting plate to move up and down.

[0028] The advantage of adopting the above technical solution is that the moving plate can be set to be liftable, which is convenient for docking with the glue frame storage component and the glue frame fixing component, and is applicable to various usage situations.

[0029] Further, the alignment platform assembly further includes a mounting platform, and the mounting platform and the machine frame are connected by a plurality of air floating shock absorbers.

[0030] The advantage of adopting the above technical solution is that the setting of the air floating shock absorbers effectively reduces vibration, prevents pattern displacement caused by equipment vibration during the imprinting process, and ensures the imprinting quality. Description of the Drawings

[0031] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following will briefly introduce the drawings required for use in the embodiments or the description of the prior art.

[0032] Figure 1 is a schematic diagram of the overall structure of the vertical nanoimprinting device of the present invention

[0033] Figure 2 is a schematic diagram of the glue frame storage and feeding device of the present invention

[0034] Figure 3 is a schematic diagram of the structure of the glue frame feeding assembly of the present invention Figure 1

[0035] Figure 4 is a schematic diagram of the structure of the glue frame feeding assembly of the present invention Figure 2

[0036] Figure 5 is a structural diagram of the glue frame of the present invention

[0037] Figure 6 is the structure of the glue frame fixing component of the present invention Figure 1

[0038] Figure 7 is the structure of the glue frame fixing component of the present invention Figure 2

[0039] Figure 8 is a bottom view of the glue frame fixing component of the present invention

[0040] Figure 9 is an isometric view of the alignment platform component of the present invention

[0041] Figure 10 is a bottom view of the isometric view of the alignment platform component of the present invention

[0042] Figure 11 is a structural diagram of the vision alignment component of the present invention

[0043] Figure 12 is a structural diagram of the imprinting roller component of the present invention

[0044] Figure 13 is an installation diagram of the imprinting roller component and the glue frame fixing component of the present invention

[0045] The reference numerals involved in the accompanying drawings are as follows:

[0046] Frame 1; curing lamp assembly 2; lamp frame 21; lamp mounting board 22; embossing roller assembly 3; embossing roller 31; roller plate 32; roller plate 33; seat plate 34; servo motor 35; plastic frame storage assembly 4; storage frame 41; vertical moving module 42; plastic frame 43; fixing hole 431; alignment platform assembly 5; mounting frame 51; receiving platform 52; receiving column 521; air hole 522; lifting drive assembly 53; translation drive assembly 54; lifting plate 55; guide shaft 56; rotating plate 57; plastic frame feeding assembly 6; moving plate 61; first moving module 62; connecting plate 63; fixed head 64; vertical cylinder 65; vertical guide rail 66; rubber frame fixing assembly 7; fixed frame 71; fixed plate 72; rotating joint 73; rotating part 731; slider 1 74; limit block 75; clamping block 76; clamping drive member 761; fixed block 77; limit plate 771; rotating shaft 78; rotating block 79; visual alignment assembly 8; camera 81; camera mounting plate 82; second moving module 83; mounting platform 9; air floating shock absorber 91. DETAILED DESCRIPTION

[0047] The present invention will be further described in detail below in conjunction with the accompanying drawings.

[0048] like Figure 1 As shown, the present invention discloses a vertical nanoimprinting device, comprising:

[0049] The frame 1 is provided with:

[0050] A curing light assembly 2, for curing;

[0051] The embossing roller assembly 3 includes a movable roller for embossing;

[0052] A plastic frame storage and loading device, used for storing and loading plastic frames 43;

[0053] The alignment platform assembly 5 is used to receive the wafer.

[0054] The advantage of adopting the above technical solution is that the overall structure is compact and each mechanism is integrated in a three-dimensional space, which reduces space occupation and eliminates long-span transfer distances, thereby improving efficiency.

[0055] Among them, the glue frame storage and feeding device includes a glue frame storage component 4, a glue frame feeding component 6, and a glue frame fixing component 7. The glue frame storage component 4 includes a storage frame 41 which has a plurality of storage positions for storing glue frames. The storage frame 41 is equipped with a vertical movement module 42 which drives the storage frame 41 to move up and down. The vertical movement module 42 adopts a ball screw module or a motor synchronous belt module, is vertically installed, and the number is two, synchronously driving the storage frame 41 to move up and down. Each storage position has a plurality of storage bottom plates which are horizontally arranged for storing a plurality of glue frames 43. A soft film is fixed inside the glue frame 43, and a to-be-transferred pattern is printed on the soft film.

[0056] Further, as Figures 2 - 5 shown, the glue frame feeding component 6 is used to drive the glue frame 43 to move between the glue frame storage component 4 and the glue frame fixing component 7, and includes: a moving plate 61, a first moving module 62, a connecting plate 63, and a fixing head 64. The moving plate 61 moves along the first moving module 62. The connecting plate 63 is fixedly connected to the moving plate 61. The moving plate 61 is vertically installed. The fixing head 64 is telescopically installed on the connecting plate 63. The glue frame 43 is provided with a fixing hole 431 that cooperates with the fixing head 64. The first moving module 62 adopts a screw motor module, is horizontally and symmetrically installed on the machine frame. The moving plate 61 moves along the first moving module 62. The whole of the fixing head 64 is cylindrical, and the number can be 4 to 8. Each fixing head 64 is horizontally installed and fixedly connected with a cylinder, which can be a slide table cylinder. The cylinder is fixedly installed on the connecting plate 63. A plurality of fixing heads 64 are symmetrically arranged and relatively extended. When it is necessary to transfer the glue frame 43, the cylinder connected to the fixing head 64 extends, the fixing head extends into the fixing holes 431 on both sides of the glue frame 43, and then the moving plate 61 moves, driving the moved glue frame 43 to be located under the glue frame fixing component 7 and being fixed by the glue frame fixing component 7, realizing the automatic loading and unloading of the glue frame 43.

[0057] In addition, a vertical cylinder 65 and a vertical guide rail 66 are fixedly installed on the side of the moving plate 61. A slidable slider is installed on the vertical guide rail 66, and the slider is connected to the connecting plate 63. The vertical cylinder 65 drives the connecting plate 63 to move up and down, and the vertical cylinder 65 drives the glue frame 43 to lift, facilitating the glue frame fixing component 7 to fix the glue frame 43.

[0058] Further, as Figures 6 - 8As shown in the figure, the rubber frame fixing assembly 7 includes: a fixing frame 71, one end of which is rotatably and fixedly installed on the frame 1, and the other end is connected with a lifting and rotating assembly, including a fixing plate 72 and a rotating joint 73. A first slider 74 that can move up and down is arranged on the fixing plate 72. The rotating joint 73 is connected to the first slider 74 and the fixing frame 71 by screwing. When the first slider 74 is at the bottom, the bottom of the fixing frame 71 remains horizontal. Two symmetrical fixing blocks 77 are arranged at the rotatably fixed end of the fixing frame 71. A rotating shaft 78 is rotatably installed in the fixing block 77. The fixing block 77 is fixedly installed with the frame. A rotating block 79 is fixedly installed at both ends of the fixing frame 71. The rotating shaft 78 is rotatably installed in the rotating block 79, so that the fixing block 77 and the rotating block 79 can rotate relative to each other. At the same time, a limiting plate 771 is fixedly installed on the upper side of the fixing block 77, and it is installed on the upper surface of the fixing frame 71 to limit the rotation angle of the entire fixing frame 71. When the rotation angle is too large, the limiting plate 771 contacts the fixing block 77 to prevent the fixing block 77 from continuing to rotate.

[0059] At the same time, the fixing plate 72 is vertically arranged and fixedly installed with the frame 1. The rotating joint 73 includes two rotating parts 731 arranged up and down. Each rotating part 731 is provided with a rotating shaft, and the rotating part 731 is rotatably arranged. The first slider 74 can make a slight up and down sliding of 2-3 mm. When pressed to the bottom position, the fixing frame 71 is horizontal. After the rubber frame 43 is clamped, the overall weight increases and it naturally presses down due to gravity. At the same time, when the roller performs the embossing action, it is necessary to press the film inside the rubber frame 43. After the overall mechanism is pressed, due to gravity and pressure, the entire fixing frame 71 is finally horizontal and parallel to the alignment platform, ensuring the flatness of the rubber frame 43 and guaranteeing the complete embossing of the pattern.

[0060] Furthermore, a limiting block 75 and a pressing block 76 are arranged at the bottom of the fixing frame 71. The pressing block 76 is connected with a pressing driving part 761. The pressing driving part 761 drives the pressing block 76 to press the rubber frame 43 tightly. The pressing driving part 761 is fixedly installed at the four corners of the bottom of the fixing frame 71, and it can be a planar rotating clamping cylinder. The output end is fixedly connected with the pressing block 76. When it extends, it drives the pressing block 76 to rotate to the side, which will not affect the lifting of the rubber frame 43. When it retracts, it rotates inward to press the rubber frame 43 tightly against the bottom of the fixing frame 71.

[0061] In some embodiments, such as Figures 9 - 10, the alignment platform component 5 includes: a mounting frame 51, a receiving platform 52, a lifting drive component 53, a rotation drive component, and a translation drive component 54. The receiving platform 52 is mounted on the mounting frame 51. A rotating plate 57 is fixedly installed on the lower side of the receiving platform 52. The rotating plate 57 is connected to the rotation drive component. The rotation drive component can be a motor to control the rotation of the rotating plate 57; the lifting drive component 53 drives the mounting frame 51 to lift and lower. The lifting drive component 53 can use a linear motor installed at the bottom of the mounting frame 51 to drive the entire mounting frame 51 to lift and lower. At the same time, the mounting frame 51 is provided with a guiding shaft 56 passing through it. Both ends of the guiding shaft 56 are connected to the machine frame 1 and the mounting platform 9. The mounting frame 51 moves along the guiding shaft 56; the translation drive component 54 drives the receiving platform 52 to move horizontally. The translation drive component 54 is a linear motor installed on the mounting frame 51, enabling the receiving platform 52 to have degrees of freedom of movement in two directions of x and y. The translation, lifting, and rotation actions of the receiving platform 52 are all prior arts and will not be described repeatedly here.

[0062] In addition, a plurality of air holes 522 are provided on the upper surface of the receiving platform 52. The air holes 522 are communicated with a vacuum generator. The air holes 522 are arranged in an array on the receiving platform 52 and are used to adsorb the wafer to fix the wafer.

[0063] Further, the receiving platform 52 is provided with receiving columns 521. The receiving columns 521 pass through the receiving platform 52, and a lifting plate 55 is fixedly connected to the bottom. The lifting plate 55 is connected to a driving member of the receiving column 521 to drive the receiving column 521 to move up and down. The driving member of the receiving column 521 can be a cylinder, which is controlled by the cylinder to lift. When the cylinder extends, the receiving column 521 extends to receive the wafer. Then the cylinder retracts, and the receiving column 521 retracts into the receiving platform 52. The wafer falls on the receiving platform 52. Then, the air holes 522 suck air to form a vacuum environment between the wafer and the receiving platform 52, and the wafer is adsorbed and fixed. After the imprinting is completed, the air holes 522 discharge air, and the wafer is separated from the receiving platform 52. Then the receiving column 521 ejects, and the wafer is taken away to complete the imprinting.

[0064] In some embodiments, as Figure 11 shown, the machine frame 1 is further provided with a vision alignment component 8, including: a camera 81, a camera mounting plate 82, and a second moving module 83. The camera 81 is fixed to the camera mounting plate 82. The second moving module 83 drives the camera mounting plate 82 to move in multiple directions. The driving method of the second moving module 83 can be realized by a lead screw motor module, a motor synchronous belt module, or a linear motor, enabling the camera mounting plate 82 to have degrees of freedom of movement in three directions of x, y, and z.

[0065] The camera senses, and the vision alignment component senses the alignment points on the glue frame 43 and transmits its position information to the control system to align the positions of the glue frame and the wafer in cooperation with the alignment platform 5.

[0066] In some embodiments, such as Figures 12 - 13 shown, the counterpoint platform assembly 5 further includes a mounting platform 9. Between the mounting platform 9 and the frame 1, there are multiple air-floating shock absorbers 91. At the same time, support blocks are provided at the bottom of the mounting platform 9 to play a supporting role. The mounting frame 51 is located above the mounting platform 9, and the first moving module 62 is fixedly installed on the mounting platform 9.

[0067] In some embodiments, the curing lamp assembly 2 includes a lamp holder 21, a mounting lamp board 22 and a curing lamp. The lamp holder 21 is fixed to the frame 1 and is located at the top of the entire device. The lamp holder 21 is equipped with a vertically fixed moving module, which can be a lead screw motor module or a linear motor module. The moving module drives the mounting lamp board 22 to move up and down, and the curing lamp is fixedly installed on the lower side of the mounting lamp board 22.

[0068] In some embodiments, the imprinting roller assembly 3 includes an imprinting roller 31, roller plates 32 located on both sides of the imprinting roller 31. The roller plates 32 are symmetrically installed. The imprinting roller 31 is rotatably installed with the roller plates 32. Symmetrically fixed linear motors are installed on the frame 1 and are arranged along the imprinting direction. The linear motors drive the roller pressing plate 33 to move, and the imprinting roller 31 moves for imprinting. A seat plate 34 is installed at the bottom of the roller pressing plate 33. The roller pressing plate 33 is also equipped with a servo motor 35, and the output end is connected to the roller plate 32 through a coupling. The coupling is fixed to the roller plate with screws. When the motor rotates, it drives the roller plate 32 to rotate, realizing the lifting and lowering of the imprinting roller 31. The imprinting roller 31 is lowered to start imprinting and is lifted after the imprinting is completed.

[0069] In addition, the frame also has a control system, and multiple position sensors are installed to monitor the positions of each mechanism.

[0070] During the working process, in the first step, the wafer is placed on the receiving post 521 manually or by a manipulator, and the receiving post 521 descends, and the wafer is adsorbed on the receiving platform 52;

[0071] In the second step, the glue frame feeding assembly 6 transfers the glue frame 43 from the glue frame storage assembly 4 to the glue frame fixing assembly 7 for fixing;

[0072] In the third step, the vision alignment component 8 operates to find the alignment point, and at the same time, the bottom counterpoint platform assembly 5 completes the wafer alignment according to the vision information;

[0073] In the fourth step, after the wafer alignment is completed, the imprinting roller assembly 3 operates to complete the imprinting;

[0074] In the fifth step, after the imprinting is completed, the imprinting roller 31 remains stationary, and the curing lamp assembly 2 descends to complete the curing of the wafer glue

[0075] Step 6: After the curing is completed, the curing lamp rises and resets. Meanwhile, the alignment platform assembly 5 ejects the wafer, and the wafer is taken out manually or by a robot; the glue frame loading assembly 6 moves the glue frame 43 to the glue frame storage assembly 4;

[0076] Step 7: Repeat Steps 1 to 6 above.

[0077] For those of ordinary skill in the art, without departing from the inventive concept of the present invention, several variations and improvements can still be made, and these all fall within the protection scope of the present invention.

Claims

1. A vertical nanoimprinting device, characterized in that, Including: A frame (1), the frame (1) is provided with along the vertical direction: A curing lamp assembly (2) for curing; An imprinting roller assembly (3), including a movable roller, for imprinting; A glue frame storage and feeding device for storing and feeding a glue frame (43); An alignment platform assembly (5) for receiving a wafer.

2. The vertical nanoimprinting device according to claim 1, wherein The glue frame storage and feeding device includes a glue frame storage component (4), a glue frame feeding component (6) and a glue frame fixing component (7). The glue frame storage component (4) includes a storage frame (41), the storage frame (41) has a plurality of storage positions for storing glue frames (43), the storage frame (41) is installed with a vertical movement module (42), and the vertical movement module (42) drives the storage frame (41) to move up and down.

3. The vertical nanoimprinting device according to claim 2, characterized in that, The glue frame feeding component (6) is used to drive the glue frame (43) to move between the glue frame storage component (4) and the glue frame fixing component (7), and includes: a moving plate (61), a first moving module (62), a connecting plate (63) and a fixing head (64). The moving plate (61) moves along the first moving module (62), the connecting plate (63) is connected to the moving plate (61), the fixing head (64) is telescopically installed on the connecting plate (63), and the glue frame (43) is provided with a fixing hole (431) that cooperates with the fixing head (64).

4. The vertical nanoimprinting device according to claim 1, characterized in that The glue frame fixing component (7) includes: a fixing frame (71), one end of which is rotatably fixed on the frame (1), and the other end is connected with a lifting and rotating component, including a fixing plate (72) and a rotating joint (73). The fixing plate (72) is provided with a slidable block one (74) that can move up and down. The rotating joint (73) connects the slidable block one (74) and the fixing frame (71). When the slidable block one (74) is at the bottom, the fixing frame (71) remains horizontal.

5. The vertical nanoimprinting device according to claim 4, wherein, The bottom of the fixing frame (71) is provided with a limiting block (75) and a pressing block (76). The pressing block (76) is connected with a pressing driving part (761), and the pressing driving part (761) drives the pressing block (76) to press the glue frame (43).

6. The vertical nanoimprinting device according to claim 1, characterized in that, The alignment platform assembly (5) includes: a mounting frame (51), a receiving platform (52), a lifting driving component (53), a rotating driving component and a translation driving component (54). The receiving platform (52) is installed on the mounting frame (51), the lifting driving component (53) drives the mounting frame (51) to lift, the rotating driving component is located under the receiving platform (52) and is used to drive the receiving platform (52) to rotate, and the translation driving component (54) drives the receiving platform (52) to move horizontally.

7. The vertical nanoimprinting device according to claim 6, characterized in that, The receiving platform (52) is provided with receiving columns (521). The receiving columns (521) pass through the receiving platform (52), and the bottom is connected with a lifting plate (55). The lifting plate (55) is connected with a receiving column (521) driving part to drive the receiving columns (521) to move up and down.

8. The vertical nanoimprinting device according to claim 1, wherein, The frame (1) is further provided with a vision alignment component (8), including: a camera (81), a camera mounting plate (82), and a second moving module (83). The camera (81) is fixed to the camera mounting plate (82), and the second moving module (83) drives the camera mounting plate (82) to move in multiple directions.

9. The vertical nanoimprinting device according to claim 3, characterized in that, A vertical cylinder (65) and a vertical guide rail (66) are arranged on the side of the moving plate (61). A slider is arranged on the vertical guide rail (66), and the slider is connected to the connecting plate (63). The vertical cylinder (65) drives the connecting plate (63) to move up and down.

10. The vertical nanoimprinting device according to claim 1, characterized in that The alignment platform component (5) further includes a mounting platform (9). A plurality of air floating vibration dampers (91) are provided between the mounting platform (9) and the frame (1).

Images