Real-time dispatching guidance method, system and equipment for manual delivery, and medium

Abstract

The invention provides a real-time dispatching guidance method, system and equipment for manual delivery and a medium, and the method comprises the steps: screening out N in-process product batches of which goods can run from M in-process product batches of a station corresponding to a machine according to the card control condition of the machine, the state of the machine and the limited condition of a process formula; the dispatching priorities of the N in-process batches are judged, the N in-process batches are ranked from high to low according to the dispatching priorities on the basis of the judgment result of the dispatching priorities, and when the in-process batches with the same dispatching priorities exist in the N in-process batches, the N in-process batches are ranked from high to low according to the dispatching priorities of the N in-process batches. And further sequencing the batches of the work-in-process products with the same dispatching priority according to a first-in first-out rule. And obtaining dispatching guidance information of the current machine based on the sequencing result of the N in-process batches, wherein the more the in-process batches sequenced in the front are, the more priority is to dispatch. Through automatic card control screening and dispatching decision making, the dispatching efficiency and the dispatching accuracy are improved, and the goods running efficiency is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor manufacturing, and in particular, to a real-time dispatching guidance method, system, device and medium for manual goods sorting. Background Art

[0002] In the entire preparation process of integrated circuits, many stations in the wafer manufacturing process have requirements for "Queue Time (Q-Time)", that is, after the wafer comes out of the previous process, it must enter the next process within the limited waiting time. Otherwise, it will exceed the limited waiting time (Over Q-Time), resulting in product quality problems or even scrapping.

[0003] In the prior art, generally, a Manufacturing Execution System (MES) collects the status of all equipment used in the preparation of integrated circuits, the status of the process to which the wafer belongs, etc., and then the staff performs manual regulation of wafer preparation. Specifically, during manual regulation, it mainly relies on human judgment. First, the products at the current station are viewed in the production report, usually by manually outputting reports and obtaining information through multiple reports and the MES interface. Then, it is manually judged which goods are most suitable to run at the current station. Finally, a judgment is given for the operator to pick up and transport the goods. Among them, the step of manually judging which goods to run is often limited by factors such as human energy, ability, and production experience, and it is impossible to ensure the accuracy of dispatching and achieve efficient and continuous dispatching.

[0004] Therefore, it is necessary to propose a real-time dispatching guidance method, system, device and medium for manual goods sorting to solve the above problems. Summary of the Invention

[0005] The purpose of the present invention is to provide a real-time dispatching guidance method, system, device and medium for manual goods sorting, so as to improve the problem that the existing manual dispatching cannot ensure the accuracy of dispatching and cannot achieve efficient and continuous dispatching.

[0006] The present invention provides a real-time dispatching guidance method for manual goods sorting, and the method includes:

[0007] According to the control conditions of the machine tool, the machine tool status, and the process recipe limitation, N in-process batches that the machine tool can run are selected from M in-process batches at the corresponding station of the machine tool, where M is a positive integer greater than or equal to N;

[0008] Determine the dispatching priorities of the N in-process batches, and sort the N in-process batches in descending order of dispatching priority based on the determination results of the dispatching priorities. When there are in-process batches with the same dispatching priority among the N in-process batches, the in-process batches with the same dispatching priority are further sorted in the front-to-back order according to the first-in, first-out rule.

[0009] Based on the sorting results of the N in-process batches, obtain the dispatching guidance information of the current machine tool, where the in-process batches ranked higher are given priority in dispatching.

[0010] In a possible embodiment, determining the dispatching priorities of the N in-process batches includes:

[0011] Determine the dispatching priorities of the N in-process batches according to the basic dispatching rules of the manufacturing department and the user's configuration of the dispatching priorities.

[0012] In a possible embodiment, the order of dispatching priorities from high to low in the basic dispatching rules of the manufacturing department is: batches with approaching waiting time, batches with approaching shipment, important batches, batches in waiting time, and ordinary batches.

[0013] In a possible embodiment, further sorting the in-process batches with the same dispatching priority in the front-to-back order according to the first-in, first-out rule includes:

[0014] Sort the in-process batches with the same dispatching priority among the N in-process batches in descending order according to the first sorting value;

[0015] When there are in-process batches with the same priority and the same first sorting value, sort them in descending order according to the second sorting value;

[0016] The first sorting value satisfies the following formula: FIFO1 = Now – Wafer Start Time;

[0017] The second sorting value satisfies the following formula: FIFO2 = Now – Lot Oper In Time;

[0018] Where FIFO1 is the first sorting value, Now is the current time, Wafer Start Time is the time when the in-process batch enters the production line, FIFO2 is the second sorting value, and Lot Oper In Time is the time when the in-process batch enters the station.

[0019] In a possible embodiment, for a furnace tube machine tool, the order of dispatching priorities from high to low in the basic dispatching rules of the manufacturing department is: batches with approaching waiting time, approaching shipping batches, pre-grouped batches, important batches, batches in waiting time, and ordinary batches; wherein, the pre-grouped batches refer to batches obtained by pre-grouping and binding in-process batches with the same machine tool process characteristics, the same process recipe, and the same stage of the in-process batch in the process.

[0020] In a possible embodiment, at the first K stations of the furnace tube machine tool, in-process batches with the same machine tool process characteristics, the same process recipe, and the same stage of the in-process batch in the process are pre-grouped and bound to obtain pre-grouped batches, where the range of K is greater than or equal to 1 and less than or equal to 5.

[0021] The present invention also provides a real-time dispatching guidance system for manual order arrangement. The system includes: a screening module for screening out N in-process batches that the machine tool can process from M in-process batches at the corresponding station of the machine tool according to the control conditions of the machine tool, the machine tool status, and the process recipe restriction situation, where M is a positive integer greater than or equal to N; a sorting module for determining the dispatching priorities of the N in-process batches and sorting the N in-process batches in descending order of dispatching priority based on the determination result of the dispatching priority. When there are in-process batches with the same dispatching priority among the N in-process batches, the in-process batches with the same dispatching priority are further sorted in the front-to-back order according to the first-in-first-out rule; a dispatching module for obtaining the dispatching guidance information of the current machine tool based on the sorting result of the N in-process batches, where the in-process batch with a more forward sorting is given priority for dispatching. All relevant contents of each step involved in the above method embodiment can be cited in the function description of the corresponding functional module and will not be repeated here.

[0022] To achieve the above object, the present invention also provides a computer device, including a memory, a processor, and a computer program stored on the memory and executable on the processor. When the processor executes the computer program, the steps of the above method are implemented.

[0023] To achieve the above object, the present invention also provides a computer-readable storage medium, on which a computer program is stored. When the computer program is executed by a processor, the steps of the above method are implemented.

[0024] The beneficial effects of the present invention are as follows: The present invention is applied to an existing manufacturing execution system (MES). Based on the control conditions of the machine, the machine status, and the limitations of the process recipe, the in - process batches that can be processed by the machine are automatically screened out. Based on the determination result of the dispatching priority, the in - process batches that can be processed by the machine are automatically sorted, and the dispatching guidance information for the current machine is obtained based on the sorting result to guide the real - time dispatching in the scenario of manual order arrangement. Compared with manual judgment, the accuracy of dispatching is improved, and efficient and continuous dispatching can be achieved. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a schematic flowchart of the real - time dispatching guidance method for manual order arrangement of the present invention.

[0026] Figure 2 It is a schematic diagram of the real - time dispatching guidance system for manual order arrangement of the present invention.

[0027] Figure 3 It is a schematic diagram of the computer device of the present invention. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0028] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below. Apparently, the described embodiments are some, but not all, of the embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0029] An embodiment of the present invention also provides a real - time dispatching guidance method for manual order arrangement, which is applied to a production information management system. Refer to Figure 1 , and the method includes:

[0030] S101: According to the control conditions of the machine, the machine status, and the limitations of the process recipe, N in - process batches that can be processed by the machine are screened out from M in - process batches at the corresponding station of the machine, where M is a positive integer greater than or equal to N.

[0031] For example: The BCD product batch A000001 is currently at station 0001. This station corresponds to the AM - THK machine group in the process, and there are three available machines: AMTHK01 / 02 / 03. Since the BCD product cannot be loaded on the AMTHK03 machine, there is no available process recipe on the AMTHK01 machine, and AMTHK02 meets the control conditions of the machine and the process recipe, it is obtained that batch A000001 should be loaded on the AMTHK02 machine.

[0032] S102: Determine the dispatching priorities of N in-process batches, and sort the N in-process batches in descending order of dispatching priority based on the determination result of the dispatching priority. When there are in-process batches with the same dispatching priority among the N in-process batches, the in-process batches with the same dispatching priority are further sorted in the front-to-back order according to the first-in-first-out rule.

[0033] S103: Obtain the dispatching guidance information of the current machine based on the sorting result of the N in-process batches. Among them, the in-process batches with a higher sorting position are given priority for dispatching.

[0034] In this embodiment, each station corresponds to several machines in the process, and there are several in-process batches waiting for dispatching at each station. When giving dispatching guidance to a machine, according to the control conditions of the machine, the status of the machine, and the process recipe limitations, N in-process batches that the machine can run are screened out from the M in-process batches of the corresponding station of the machine, that is, the in-process batches that cannot run are filtered out first, and then the dispatching priority is sorted. The front-to-back order of the sorting of the N in-process batches is the order of dispatching of the in-process batches. The in-process batches with a higher priority are dispatched first, and the in-process batches with a lower priority are dispatched later. The dispatching guidance method of the present invention ensures the consistency of dispatching decisions and avoids the risk of misjudgment caused by human judgment. Through automated control screening and dispatching decisions, the dispatching efficiency and accuracy are improved, real-time dispatching decisions and real-time dispatching guidance can be realized, thereby improving the running efficiency of goods, and the human-machine ratio of the production line can be increased from 1:3 to 1:5.

[0035] In a preferred embodiment, determining the dispatching priority of N in-process batches includes: determining the dispatching priority of N in-process batches according to the basic dispatching rules of the manufacturing department and the user's configuration of the dispatching priority. In this embodiment, based on the basic dispatching rules of the manufacturing department, the user can flexibly adjust the sorting rules of the dispatching priority, that is, raise or lower the order of a certain dispatching priority, so as to allow the user to customize the dispatching priority sorting logic according to different production requirements, and it can take effect quickly without waiting for software upgrade or recompiling the program, so as to support the constantly changing production requirements in a timely manner, with strong flexibility and configurability, timely update of the priority sorting rules, and reduced development and maintenance costs.

[0036] In a preferred embodiment, the order of dispatching priority from high to low in the basic dispatching rules of the manufacturing department is: batches with approaching waiting time, batches with approaching shipment, important batches, batches in waiting time, and ordinary batches.

[0037] In a preferred embodiment, the in - process batches with the same dispatching priority are further sorted in the front - to - back order according to the first - in - first - out rule, including: the in - process batches with the same dispatching priority among N in - process batches are sorted in the front - to - back order from the largest to the smallest according to the first sorting value. When there are in - process batches with the same priority and the same first sorting value, they are sorted in the front - to - back order from the largest to the smallest according to the second sorting value. The first sorting value satisfies the following formula: FIFO1 = Now – Wafer Start Time; the second sorting value satisfies the following formula: FIFO2 = Now – Lot Oper In Time; where FIFO1 is the first sorting value, Now is the current time, Wafer Start Time is the time when the in - process batch enters the production line, FIFO2 is the second sorting value, and LotOper In Time is the time when the in - process batch enters the station.

[0038] In this embodiment, for the in - process batches with the same dispatching priority, the first sorting value is calculated according to the time when the in - process batch enters the production line, and the in - process batches with the same dispatching priority are sorted in the front - to - back order from the largest to the smallest according to the first sorting value. If there are cases where the first sorting values are equal, the second sorting value is calculated according to the time when the in - process batches with equal first sorting values enter the station, and the in - process batches with equal first sorting values are sorted in the front - to - back order from the largest to the smallest according to the second sorting value.

[0039] In a preferred embodiment, for the furnace tube machine, the order of dispatching priority from high to low in the basic dispatching rules of the manufacturing department is: batches with approaching waiting time, approaching shipping batches, pre - grouped batches, important batches, batches in waiting time, ordinary batches; where the pre - grouped batch refers to a batch obtained by pre - grouping and binding in - process batches with the same machine process characteristics, the same process recipe, and the same stage of the in - process batch in the process.

[0040] Preferably, at the first K stations of the furnace tube machine, in - process batches with the same machine process characteristics, the same process recipe, and the same stage of the in - process batch in the process are pre - grouped and bound to obtain pre - grouped batches, where K is a positive integer greater than or equal to 1 and less than or equal to 5.

[0041] In this embodiment, since the process time of the furnace tube machine is long and the restricted waiting time is short, the in - process batches to be pre - grouped are pre - combined and bound in advance, so that multiple in - process batches meeting the pre - grouping and binding requirements are combined into a pre - grouped batch for simultaneous processing. The priority of this pre - grouped batch is after the approaching shipping batches for priority dispatching, thus improving the production efficiency and meeting the special dispatching requirements of the furnace tube diffusion area.

[0042] In a specific embodiment, the batches with approaching waiting time refer to the in - process batches whose remaining waiting time is less than the first set value. The batches with approaching waiting time are set as the first priority to preferentially process the in - process batches approaching the waiting deadline, so as to avoid the in - process products exceeding the limited waiting time (Queue Time, Q - Time), which may cause product quality problems or even scrapping. Preferably, the first set value is 1 hour. For example: Batch AE00993.06 is determined as a batch with approaching waiting time because its remaining waiting time is less than 1 hour, and it is ranked first in priority for the most preferential processing. Batch AE00978 is an approaching shipment batch and is ranked second in priority.

[0043] In a specific embodiment, the approaching shipment batches refer to the in - process batches whose remaining shipment time is less than the second set value, and the first set value is less than the second set value. The in - process batches approaching the delivery deadline are set as the second priority to increase the priority of dispatching for the in - process batches in urgent need of shipment, so as to ensure the normal delivery and shipment quality of products. Preferably, the second set value is 5 days. For example: When the shipment time of Batch AE01071 was not set, its priority level was very low. After setting the shipment time, the priority level of Batch AE01071 was increased, and the priority of dispatching was improved to ensure the shipment quality. It should be understood that the important batches refer to the in - process batches for important purposes. For example, important purposes include memory, flash memory, etc. In addition, the batches in the waiting time refer to the in - process batches among N in - process batches that are not the batches with approaching waiting time, approaching shipment batches, or important batches and are in the waiting time. The ordinary batches refer to the in - process batches among N in - process batches that are not the batches with approaching waiting time, approaching shipment batches, important batches, or batches in the waiting time.

[0044] In addition, the present invention also provides a real - time dispatching guidance system for manual order picking, which is applied to the production information management system. Refer to Figure 2, the system includes: a screening module 201, configured to screen out N in-process batches that the machine can process from M in-process batches at the corresponding station of the machine according to the control conditions of the machine, the machine status, and the limitations of the process recipe, where M is a positive integer greater than or equal to N; a sorting module 202, configured to determine the dispatching priorities of the N in-process batches, and sort the N in-process batches in descending order of dispatching priority based on the determination result of the dispatching priorities. When there are in-process batches with the same dispatching priority among the N in-process batches, the in-process batches with the same dispatching priority are further sorted in the order of first-in, first-out; a dispatching module 203, configured to obtain the dispatching guidance information of the current machine based on the sorting result of the N in-process batches, where the in-process batches sorted earlier are given priority for dispatching. All relevant contents of each step involved in the above method embodiment can be cited in the function description of the corresponding functional module, and will not be elaborated here.

[0045] In a preferred embodiment, the sorting module 202 determines the dispatching priorities of the N in-process batches, specifically configured to: determine the dispatching priorities of the N in-process batches according to the basic dispatching rules of the manufacturing department and the user's configuration of the dispatching priorities.

[0046] In a specific embodiment, the order of dispatching priorities from high to low in the basic dispatching rules of the manufacturing department is: batches with approaching waiting time, batches with approaching shipment, important batches, batches in waiting time, and ordinary batches.

[0047] In a preferred embodiment, the sorting module 202 further sorts the in-process batches with the same dispatching priority in the order of first-in, first-out, specifically configured to: sort the in-process batches with the same dispatching priority among the N in-process batches in descending order of the first sorting value; when there are in-process batches with the same priority and the same first sorting value, sort them in descending order of the second sorting value; the first sorting value satisfies the following formula: FIFO1 = Now – Wafer Start Time; the second sorting value satisfies the following formula: FIFO2 = Now – Lot Oper In Time; where FIFO1 is the first sorting value, Now is the current time, Wafer Start Time is the time when the in-process batch enters the production line, FIFO2 is the second sorting value, and Lot Oper In Time is the time when the in-process batch enters the station.

[0048] In a preferred embodiment, the sorting module 202 is further configured to, for a furnace tube machine tool, the order of dispatching priorities in the basic dispatching rules of the manufacturing department from high to low is: batches with approaching waiting time, batches with approaching shipment, pre-grouped batches, important batches, batches in waiting time, and ordinary batches; wherein, the pre-grouped batches refer to batches obtained by pre-grouping and binding in-process batches with the same machine tool process characteristics, the same process recipe, and the same stage of the in-process batch.

[0049] In a specific embodiment, the sorting module 202 is further configured to, at the first K stations of the furnace tube machine tool, pre-group and bind in-process batches with the same machine tool process characteristics, the same process recipe, and the same stage of the in-process batch to obtain pre-grouped batches, where the range of K is greater than or equal to 1 and less than or equal to 5.

[0050] This embodiment further provides a computer device 30, such as a smart phone, a tablet computer, a notebook computer, a desktop computer, a rack server, a blade server, a tower server, or a cabinet server (including an independent server, or a server cluster composed of multiple servers) that can execute programs. The computer device 30 of this embodiment at least includes, but is not limited to: a memory 301 and a processor 302 that can communicate with each other through a system bus 303, as Figure 3 shown. It should be noted that Figure 3 only the computer device 30 with components is shown, but it should be understood that it is not required to implement all the shown components, and more or fewer components can be alternatively implemented.

[0051] In this embodiment, the memory 301 (i.e., the readable storage medium) includes flash memory, hard disks, multimedia cards, card-type memories (e.g., SD or DX memories, etc.), random access memory (RAM), static random access memory (SRAM), read-only memory (ROM), electrically erasable programmable read-only memory (EEPROM), programmable read-only memory (PROM), magnetic memories, magnetic disks, optical disks, etc. In some embodiments, the memory 301 may be an internal storage unit of the computer device 30, such as the hard disk or memory of the computer device 30. In other embodiments, the memory 301 may also be an external storage device of the computer device 30, such as a plug-in hard disk, a Smart Media Card (SMC), a Secure Digital (SD) card, a Flash Card, etc., equipped on the computer device 30. Of course, the memory 301 may also include both the internal storage unit and the external storage device of the computer device 30. In this embodiment, the memory 301 is generally used to store the operating system installed in the computer device 30 and various application software, such as the program code of the above dispatching guidance system 20. In addition, the memory 301 may also be used to temporarily store various types of data that have been output or will be output.

[0052] In some embodiments, the processor 302 may be a central processing unit (CPU), a controller, a microcontroller, a microprocessor, or other data processing chips. The processor 302 is generally used to control the overall operation of the computer device 30. In this embodiment, the processor 302 is used to run the program code stored in the memory 301 or process data to implement the real-time dispatching guidance method for manual goods arrangement in Embodiment 1.

[0053] This embodiment also provides a computer-readable storage medium, such as flash memory, hard disks, multimedia cards, card-type memories (e.g., SD or DX memories, etc.), random access memory (RAM), static random access memory (SRAM), read-only memory (ROM), electrically erasable programmable read-only memory (EEPROM), programmable read-only memory (PROM), magnetic memories, magnetic disks, optical disks, servers, App application marketplaces, etc., on which a computer program is stored, and when the program is executed by a processor, corresponding functions are implemented. The computer-readable storage medium of this embodiment is used to store a computer program, and when executed by a processor, it implements the automatic trial production method for semiconductor products in Embodiment 1.

[0054] The serial numbers of the above embodiments of the present invention are only for description and do not represent the superiority or inferiority of the embodiments.

[0055] Through the description of the above embodiments, those skilled in the art can clearly understand that the above-described example methods can be implemented by means of software plus a necessary general hardware platform. Of course, they can also be implemented by hardware, but in many cases the former is a better implementation method.

[0056] Although the embodiments of the present invention have been described in detail above, it is obvious to those skilled in the art that various modifications and changes can be made to these embodiments. However, it should be understood that such modifications and changes are all within the scope and spirit of the present invention as described in the claims. Moreover, the present invention described herein may have other embodiments and can be implemented or realized in various ways. Unless otherwise defined, the technical terms or scientific terms used herein should have the ordinary meaning understood by those of ordinary skill in the art to which the present invention belongs. The words such as "including" used herein mean that the elements or items appearing before the word cover the elements or items listed after the word and their equivalents, without excluding other elements or items.

Claims

1. A real-time dispatching guidance method for manual goods sorting, characterized in that The method includes: According to the control conditions of the machine, the machine status, and the limitations of the process recipe, screen out N in-process batches that the machine can process from M in-process batches at the corresponding station of the machine, where M is a positive integer greater than or equal to N; Determine the dispatching priorities of the N in-process batches, and sort the N in-process batches in descending order of dispatching priority based on the determination results of the dispatching priorities. When there are in-process batches with the same dispatching priority among the N in-process batches, the in-process batches with the same dispatching priority are further sorted in the order of first-in, first-out; Based on the sorting results of the N in-process batches, obtain the dispatching guidance information for the machine, where the in-process batches with a more forward sorting are given priority for dispatching.

2. The method according to claim 1, wherein Determining the dispatching priorities of the N in-process batches includes: Determine the dispatching priorities of the N in-process batches according to the basic dispatching rules of the manufacturing department and the user's configuration of the dispatching priorities.

3. The method according to claim 2, wherein In the basic dispatching rules of the manufacturing department, the order of dispatching priorities from high to low is: batches with approaching waiting time, approaching shipment batches, important batches, batches in waiting time, and ordinary batches.

4. The method according to any one of claims 1 to 3, characterized in that, The in-process batches with the same dispatching priority are further sorted in the order of first-in, first-out, including: The in-process batches with the same dispatching priority among the N in-process batches are sorted in descending order according to the first sorting value; When there are in-process batches with the same priority and the same first sorting value, they are sorted in descending order according to the second sorting value; The first sorting value satisfies the following formula: FIFO1 = Now – Wafer Start Time; The second sorting value satisfies the following formula: FIFO2 = Now – Lot OperIn Time; Wherein, FIFO1 is the first sorting value, Now is the current time, Wafer Start Time is the time when the in-process batch enters the production line, FIFO2 is the second sorting value, and Lot Oper In Time is the time when the in-process batch enters the station.

5. The method according to any one of claims 2 to 3, characterized in that For the furnace tube machine, in the basic dispatching rules of the manufacturing department, the order of dispatching priorities from high to low is: batches with approaching waiting time, approaching shipment batches, pre-grouped batches, important batches, batches in waiting time, and ordinary batches; wherein, the pre-grouped batches refer to batches obtained by pre-grouping and binding in-process batches with the same machine process characteristics, the same process recipe, and the same stage of the in-process batches in the process.

6. The method according to claim 5, wherein It further includes: At the first K stations before the furnace tube machine, pre-group and bind in-process batches with the same machine process characteristics, the same process recipe, and the same stage of the in-process batches in the process to obtain pre-grouped batches, where the range of K is greater than or equal to 1 and less than or equal to 5.

7. A real-time dispatching guidance system for manual goods sorting, characterized in that, The system includes: A screening module, configured to screen out N in-process batches that can be processed by the machine from M in-process batches at the corresponding station of the machine according to the control conditions of the machine, the machine status, and the restrictions of the process recipe, where M is a positive integer greater than or equal to N; A sorting module, configured to determine the dispatching priorities of the N in-process batches, and sort the N in-process batches in descending order of the dispatching priorities based on the determination results of the dispatching priorities. When there are in-process batches with the same dispatching priority among the N in-process batches, the in-process batches with the same dispatching priority are further sorted in the front-to-back order according to the first-in, first-out rule; A dispatching module, configured to obtain the dispatching guidance information of the machine based on the sorting results of the N in-process batches, where the in-process batches with a higher sorting position are given priority for dispatching.

8. The system according to claim 7, wherein The sorting module determines the dispatching priorities of the N in-process batches, specifically: Determine the dispatching priorities of the N in-process batches according to the basic dispatching rules of the manufacturing department and the user's configuration of the dispatching priorities.

9. The system according to claim 8, wherein In the basic dispatching rules of the manufacturing department, the order of the dispatching priorities from high to low is: batches with approaching waiting time, approaching shipment batches, important batches, batches in waiting time, and ordinary batches.

10. The system according to any one of claims 7 to 9, characterized in that, The sorting module further sorts the in-process batches with the same dispatching priority in the front-to-back order according to the first-in, first-out rule, specifically: The in-process batches with the same dispatching priority among the N in-process batches are sorted in descending order according to the first sorting value; When there are in-process batches with the same priority and the same first sorting value, they are sorted in descending order according to the second sorting value; The first sorting value satisfies the following formula: FIFO1 = Now – Wafer Start Time; The second sorting value satisfies the following formula: FIFO2 = Now – Lot Oper In Time; Wherein, FIFO1 is the first sorting value, Now is the current time, Wafer Start Time is the time when the in-process batch enters the production line, FIFO2 is the second sorting value, and Lot Oper In Time is the time when the in-process batch enters the station.

11. The system according to any one of claims 8-9, characterized in that, The sorting module is further configured to, for a furnace tube machine, the order of the dispatching priorities from high to low in the basic dispatching rules of the manufacturing department is: batches with approaching waiting time, approaching shipment batches, pre-grouped batches, important batches, batches in waiting time, and ordinary batches; wherein, the pre-grouped batches refer to batches obtained by pre-grouping and binding in-process batches with the same machine process characteristics, the same process recipe, and the same stage where the in-process batches are located in the process.

12. The system according to claim 11, characterized in that, The sorting module is further configured to, at the first K stations of the furnace tube machine, pre-group and bind in-process batches with the same machine process characteristics, the same process recipe, and the same stage where the in-process batches are located in the process to obtain pre-grouped batches, where the range of K is greater than or equal to 1 and less than or equal to 5.

13. A computer device, characterized in that, Comprising a memory, a processor, and a computer program stored in the memory and executable on the processor, the processor, when executing the computer program, implements the steps of the method according to any one of claims 1 to 6.

14. A computer-readable storage medium having a computer program stored thereon, characterized in that, When the computer program is executed by the processor, the steps of the method according to any one of claims 1 to 6 are implemented.

Images