Two-stage vacuum system of eutectic furnace and vacuumizing method

Abstract

The invention relates to the field of vacuum engineering, in particular to a two-stage vacuum system of a eutectic furnace and a vacuumizing method. Comprising a vacuum cavity, a backing pump, a main suction pump and a valve assembly, the backing pump is communicated with the vacuum cavity through a first pipeline; the exhaust end of the main suction pump is connected with the backing pump through a second pipeline, and the suction end of the main suction pump is communicated with the vacuum cavity; the valve assembly comprises a pre-pumping baffle valve arranged on the first pipeline, a preceding-stage baffle valve arranged on the second pipeline and a gate valve arranged between the pumping end of the main pump and the vacuum cavity. The problems that in the prior art, the vacuum degree is low, the leakage rate is high, and the vacuumizing efficiency is low are effectively solved.

Description

Technical Field

[0001] The present invention relates to the field of vacuum engineering, and more particularly to a double-stage vacuum system and a vacuum pumping method for a eutectic furnace. Background Art

[0002] In industrial production, vacuum technology is widely used in many fields, such as electronics, semiconductors, materials science, and eutectic welding. Among them, the eutectic furnace is an important industrial equipment, and the performance of its vacuum system directly affects the quality of the product and production efficiency. The traditional single-pump vacuum system can usually only achieve a vacuum degree of about 1×10^-2Pa. Although the ordinary two-stage vacuum pump system has improved the vacuum degree to a certain extent, due to its unreasonable structural design, sealing method and welding process, it can usually only achieve a vacuum degree of about 1×10^-5Pa. In addition, the vacuum system in the existing technology has problems such as low efficiency, high energy consumption and complex operation during the vacuuming process. These problems not only limit the performance improvement of the vacuum system, but also increase production costs and the difficulty of equipment maintenance. Summary of the Invention

[0003] The object of the present invention is to provide a two-stage vacuum system and a vacuum pumping method for a eutectic furnace to solve the problems raised in the above background technology.

[0004] To achieve the above objectives, the following technical solutions are adopted.

[0005] A two-stage vacuum system for a eutectic furnace comprises: a vacuum chamber, a front-stage pump, a main pump, a valve assembly, a sealing assembly and a leak detection assembly; the front-stage pump is connected to the vacuum chamber via a first pipeline; the exhaust end of the main pump is connected to the front-stage pump via a second pipeline, and the main pump suction end is connected to the vacuum chamber; the valve assembly comprises a pre-suction baffle valve arranged on the first pipeline, a front-stage baffle valve arranged on the second pipeline, and a gate valve arranged between the suction end of the main pump and the vacuum chamber.

[0006] Optionally, the valve assembly further comprises a tee, a first port of the tee being connected to the front pump, a second port being connected to the main pump, and a third port being connected to the vacuum chamber, the pre-pumping baffle valve being arranged on the first pipeline between the third port and the vacuum chamber, and the front-stage baffle valve being arranged between the first port and the main pump.

[0007] Optionally, the vacuum chamber includes an exhaust chamber and an operating chamber connected to the exhaust chamber, the exhaust chamber is connected to the first pipeline and the exhaust end of the main pump, and an air release valve is further provided on the exhaust chamber.

[0008] Optionally, the vacuum chamber further includes an upper cover which is connected to the side wall of the vacuum chamber through a telescopic rod. When the upper cover needs to be opened, the telescopic rod extends, and the upper cover is opened in a flip - top form. A compression lock is also provided on the upper cover to pre - press the sealing component to ensure the sealing performance.

[0009] Optionally, a vacuum gauge assembly is further provided on the vacuum chamber. The vacuum gauge assembly includes a resistance gauge and an ionization gauge, and the resistance gauge and the ionization gauge are connected to a vacuum gauge chassis for real - time monitoring of the vacuum degree of the vacuum chamber.

[0010] Optionally, the fore - pump is a rotary vane oil pump, and the main pumping pump is a magnetic levitation molecular pump.

[0011] Optionally, an observation window is opened on the side of the vacuum chamber for observing the workpiece condition.

[0012] Optionally, the vacuum chamber is provided with a connecting flange which is used for accessing power supply cables or supplying coolant.

[0013] Optionally, a leak detection assembly is further included, which includes a helium mass spectrometer leak detector for detecting the leak rate of the vacuum chamber. When detecting, the leak detection assembly closes the flange opening of the vacuum chamber through a flange blind plate and is connected to the helium mass spectrometer leak detector, and helium gas is sprayed at the welding parts and sealing places through a helium gas spray gun to detect the leak rate.

[0014] A method for evacuating a two - stage vacuum system of an eutectic furnace includes the following steps:

[0015] Close and seal the vacuum chamber, and close the air release valve, the fore - stage baffle valve, the pre - evacuation baffle valve and the gate valve;

[0016] Start the fore - pump and open the pre - evacuation baffle valve for preliminary pumping;

[0017] Open the vacuum gauge assembly to record the vacuum degree of the vacuum chamber

[0018] When the vacuum degree reaches the first threshold, open the fore - stage baffle valve. When the vacuum degree is stable, start the main pumping pump. After the main pumping pump runs stably, close the pre - evacuation baffle valve and open the gate valve to continuously pump to the target vacuum degree.

[0019] Compared with the prior art, the present invention has the following beneficial effects:

[0020] The present invention provides a two-stage vacuum system for an eutectic furnace. By using a rotary vane oil pump as the backing pump and a magnetic levitation molecular pump as the main pumping pump, and combining with an optimized valve assembly and a sealing assembly, the problems of low vacuum degree, high leakage rate and low vacuum pumping efficiency in the prior art are effectively solved. Compared with the prior art, the system of the present invention can stably reach an ultra-high vacuum degree of 1×10^-7 Pa level, significantly reducing the void rate of eutectic welding and improving the yield and quality of products. In addition, the present invention further optimizes the structure and process of the system. By setting a tee pipe, the pipeline connection is optimized, improving the flexibility and reliability of the system; the vacuum chamber adopts a groove argon arc welding process, enhancing the structural strength and sealing performance; the introduction of a compression lock further ensures the sealing performance of the sealing assembly; the setting of the vacuum gauge assembly realizes the real-time monitoring of the vacuum degree, improving the intelligent level of the system; and the optimized vacuum pumping method further improves the vacuum pumping efficiency and reduces the energy consumption. In summary, the two-stage vacuum system of the present invention has significant beneficial effects in terms of improving the vacuum degree, reducing the leakage rate, optimizing the vacuum pumping efficiency and reducing the energy consumption, providing reliable technical support for the high-performance vacuum environment of industrial equipment such as eutectic furnaces. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 FIG. is a schematic structural diagram of an embodiment of a two-stage vacuum system of an eutectic furnace of the present invention.

[0022] Description of the reference numerals: 1, backing pump; 2, main pumping pump; 3, vacuum chamber; 4, compression lock; 5, gas release valve; 6, vacuum gauge chassis; 7, tee pipe; 8, backing baffle valve; 9, first pipeline; 10, roughing baffle valve; 11, gate valve; 12, vacuum gauge assembly; 13, connecting flange. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0023] The present invention will be described in detail below with reference to the drawings and in combination with embodiments. It should be noted that, without conflict, the embodiments in the present application and the features in the embodiments may be combined with each other.

[0024] The following detailed descriptions are all exemplary descriptions, aiming to provide further detailed descriptions of the present invention. Unless otherwise specified, all technical terms adopted by the present invention have the same meaning as commonly understood by those of ordinary skill in the art to which the present application belongs. The terms used in the present invention are only for the purpose of describing specific embodiments, and are not intended to limit the exemplary embodiments according to the present invention.

[0025] Embodiment 1

[0026] As Figure 1As shown in the figure, the eutectic furnace dual-stage vacuum system of the present invention mainly includes a vacuum chamber 3, a fore pump 1, a main pump 2, a valve assembly, a sealing assembly, and a leak detection assembly. The vacuum chamber 3 is the core component of the entire system, which is used to accommodate the workpiece to be processed and provide a vacuum environment. The vacuum chamber 3 is composed of an evacuation chamber and an operation chamber. The evacuation chamber is connected to the first pipeline 9 and the suction end of the main pump 2, and the operation chamber is used to place the workpiece and perform related operations. The connection parts of the vacuum chamber 3 are connected by the groove argon arc welding process, which specifically includes groove machining, cleaning treatment, argon arc welding filling, and post-weld heat treatment of the welding parts. This welding process can effectively reduce welding defects, improve the sealing performance and structural strength of the chamber, and ensure reliability under ultra-high vacuum conditions.

[0027] The upper cover of the vacuum chamber 3 is connected to the side wall of the vacuum chamber 3 through a telescopic rod. When the upper cover needs to be opened, the telescopic rod extends, and the upper cover is opened in a flip form. A pressing lock 4 is also provided on the upper cover, which is used to pre-press the sealing assembly to ensure the sealing performance. This design is not only convenient for operation but also provides reliable sealing performance during the working process. In addition, an observation window is opened on the side of the vacuum chamber 3 for observing the workpiece situation, which is convenient for the operator to monitor the processing state of the workpiece in real time.

[0028] The vacuum chamber 3 is also provided with connection flanges 13, which are used to access power cables or supply coolants. The design of these connection flanges 13 enables the vacuum chamber 3 to be effectively connected to external devices to meet different process requirements.

[0029] The fore pump 1 is a rotary vane oil pump, which is connected to the vacuum chamber 3 through the first pipeline 9 and is responsible for preliminary evacuation, quickly reducing the pressure in the vacuum chamber 3 to a certain level. The main pump 2 is a magnetic levitation molecular pump, whose exhaust end is connected to the fore pump 1 through the second pipeline, and the suction end is connected to the vacuum chamber 3, which is used to further increase the vacuum degree to meet the requirements of ultra-high vacuum. This combination of pumps gives full play to the advantages of the two pumps: the rotary vane oil pump can quickly evacuate at a lower vacuum degree, while the magnetic levitation molecular pump can provide efficient pumping ability in the high-vacuum region. The coordinated work of the two enables the system to reach the required ultra-high vacuum degree in a short time.

[0030] The valve assembly plays a key control role in the vacuum system. The valve assembly of the present invention includes a roughing baffle valve 10, a fore baffle valve 8, and a gate valve 11. The roughing baffle valve 10 is arranged on the first pipeline 9 to control the gas flow channel between the rotary vane oil pump and the vacuum chamber 3; the fore baffle valve 8 is arranged on the second pipeline to coordinate the working states of the two pumps; the gate valve 11 is arranged at the position between the suction end of the main pump 2 and the vacuum chamber 3 to control the gas flow channel between the main pump 2 and the vacuum chamber 3.

[0031] In addition, the valve assembly further includes a tee pipe 7, whose first port is connected to the fore pump 1, the second port is connected to the main pumping pump 2, and the third port is connected to the vacuum chamber 3. A roughing baffle valve 10 is disposed on the first pipeline 9 between the third port and the vacuum chamber 3, while a foreline baffle valve 8 is disposed between the first port and the main pumping pump 2. This design of the tee pipe 7 further optimizes the pipeline layout, reduces the complexity of pipeline connections, and improves the reliability and maintenance convenience of the system.

[0032] The sealing assembly is a key part to ensure the performance of the vacuum system. The present invention adopts a metal sealing gasket, which is disposed at each connecting flange 13 of the vacuum chamber 3. The metal sealing gasket has good sealing performance and high-temperature resistance characteristics, and can effectively prevent gas leakage, ensuring the sealing performance of the vacuum system. Each connecting flange 13 of the vacuum chamber 3 adopts a CF knife-edge flange structure, and the metal sealing gasket is adapted to the sealing surface of the CF knife-edge flange. The CF knife-edge flange structure has the characteristics of high precision and high sealing performance, and can closely cooperate with the metal sealing gasket to further improve the sealing performance of the system.

[0033] To ensure the reliability and safety of the vacuum system, the present invention is also equipped with a leak detection assembly. The leak detection assembly includes a helium mass spectrometer leak detector for detecting the leak rate of the vacuum chamber 3. During the detection process, the flange opening of the vacuum chamber 3 is closed by a flange blind plate and connected to the helium mass spectrometer leak detector. Then, a helium gas spray gun is used to spray helium gas at the welding parts and seals, and the helium mass spectrometer leak detector can sensitively detect the helium gas leakage situation, so as to accurately judge the sealing performance of the vacuum chamber 3. This leak detection method has the characteristics of high sensitivity and high precision, can timely detect tiny leak points, and ensures the stable operation of the vacuum system under ultra-high vacuum conditions.

[0034] The vacuum gauge assembly 12 includes a resistance gauge and an ionization gauge. The resistance gauge and the ionization gauge are connected to the vacuum gauge chassis 6 and are used to monitor the vacuum degree of the vacuum chamber 3 in real time. The resistance gauge can provide accurate measurement data in the lower vacuum degree range, while the ionization gauge can provide high-precision measurement data in the high vacuum region. Through the real-time monitoring of the vacuum gauge assembly 12, the operator can timely understand the change of the vacuum degree in the vacuum chamber 3, so as to precisely control the vacuum pumping process.

[0035] Embodiment 2

[0036] The present invention also provides a vacuum pumping method based on the above-mentioned two-stage vacuum system. This method realizes the efficient and stable acquisition of ultra-high vacuum by optimizing the vacuum pumping process. The specific steps are as follows:

[0037] 1. Close and seal the vacuum chamber 3

[0038] Before evacuating the air, it is first necessary to close and seal the vacuum chamber 3. The specific operations include closing the bleed valve 5, the foreline baffle valve 8, the roughing baffle valve 10, and the gate valve 11. Ensure that the initial state inside the vacuum chamber 3 is atmospheric pressure, and at this time the system is in a state ready for evacuation. Pre-pressing the sealing assembly through the clamping lock 4 can effectively prevent leakage caused by pressure changes during the evacuation process.

[0039] 2. Start the forepump 1 and open the roughing baffle valve 10 for initial pumping

[0040] Start the forepump 1, which is a rotary vane oil pump, and extract the gas inside the vacuum chamber 3 through the first pipeline 9, gradually reducing the pressure inside the chamber. During this stage, open the roughing baffle valve 10 to ensure that the gas flow channel between the rotary vane oil pump and the vacuum chamber 3 is unobstructed, enabling the rotary vane oil pump to perform initial pumping quickly and effectively. At this time, the resistance gauge in the vacuum gauge assembly 12 starts to work, monitoring the change in the vacuum degree inside the vacuum chamber 3 in real time.

[0041] 3. Turn on the vacuum gauge assembly 12 to record the vacuum degree of the vacuum chamber 3

[0042] During the evacuation process, the vacuum gauge assembly 12 monitors the change in the vacuum degree inside the vacuum chamber 3 in real time. The resistance gauge provides accurate measurement data in the lower vacuum degree range, providing a reference for subsequent operations. When the vacuum degree reaches a certain level, the ionization gauge starts to work, used to measure the change in the vacuum degree in the higher vacuum degree range.

[0043] 4. When the vacuum degree reaches the first threshold, open the foreline baffle valve 8. When the vacuum degree stabilizes, start the main pump 2. After the main pump 2 runs stably, close the roughing baffle valve 10 and open the gate valve 11 to continue pumping to the target vacuum degree

[0044] When the vacuum gauge assembly 12 shows that the vacuum degree reaches the first threshold, open the foreline baffle valve 8. The specific value of the first threshold can be adjusted according to actual requirements and system design, usually between 10^-2 Pa and 10^-3 Pa. At this time, the main pump 2, which is a magnetic levitation molecular pump, starts to work, further extracting the gas inside the vacuum chamber 3 through the second pipeline, rapidly increasing the vacuum degree. The opening of the foreline baffle valve 8 enables a collaborative working state to be formed between the rotary vane oil pump and the magnetic levitation molecular pump, improving the efficiency of evacuation.

[0045] After the main extraction pump 2 operates stably, close the pre-extraction baffle valve 10 and open the gate valve 11 to ensure that the magnetic levitation molecular pump can continuously and efficiently extract the gas in the vacuum chamber 3 until the target vacuum degree is reached. The target vacuum degree is usually determined according to the process requirements of the eutectic furnace, generally at the level of 10^-7 Pa. During the entire vacuum pumping process, the vacuum gauge assembly 12 monitors the change of the vacuum degree in real time, and the operator can adjust the opening and closing states of the valves and the operating parameters of the pump in a timely manner according to the monitoring data to ensure the smooth progress of the vacuum pumping process.

[0046] Through the above vacuum pumping method, the dual-stage vacuum system of the present invention can stably reach an ultra-high vacuum degree in a short time, significantly improving the production efficiency and product quality of the eutectic furnace. At the same time, the optimized valve control logic and vacuum pumping process reduce energy consumption and equipment maintenance costs, providing an efficient and reliable vacuum solution for industrial production.

[0047] As is known by technical common sense, the present invention can be implemented by other embodiments that do not depart from its spiritual essence or essential features. Therefore, the above-disclosed embodiments are illustrative in all respects and not exclusive. All changes within the scope of the present invention or within the scope equivalent to the present invention are encompassed by the present invention.

Claims

1. A two-stage vacuum system for an eutectic furnace, characterized in that, Including: A vacuum chamber (3), a backing pump (1), a main pumping pump (2) and a valve assembly; the backing pump (1) is communicated with the vacuum chamber (3) through a first pipeline (9); the exhaust end of the main pumping pump (2) is connected to the backing pump (1) through a second pipeline, and the pumping end of the main pumping pump (2) is communicated with the vacuum chamber (3); the valve assembly includes a pre-pumping baffle valve (10) arranged on the first pipeline (9), a backing baffle valve (8) arranged on the second pipeline, and a gate valve (11) arranged between the pumping end of the main pumping pump (2) and the vacuum chamber (3).

2. The dual-stage vacuum system of an eutectic furnace according to claim 1, characterized in that, The valve assembly further includes a tee pipe (7), the first port of the tee pipe (7) is connected to the backing pump (1), the second port is connected to the main pumping pump (2), and the third port is connected to the vacuum chamber (3). The pre-pumping baffle valve (10) is arranged on the first pipeline (9) between the third port and the vacuum chamber (3), and the backing baffle valve (8) is arranged between the first port and the main pumping pump (2).

3. The dual-stage vacuum system of an eutectic furnace according to claim 1, characterized in that, The vacuum chamber (3) includes a pumping chamber and an operation chamber communicated with the pumping chamber. The pumping chamber is connected to the first pipeline and the pumping end of the main pumping pump (2), and a vent valve (5) is further arranged on the pumping chamber.

4. The dual-stage vacuum system of an eutectic furnace according to claim 1, wherein The vacuum chamber further includes an upper cover, and the upper cover is connected to the side wall of the vacuum chamber through a telescopic rod. When the upper cover needs to be opened, the telescopic rod extends, and the upper cover is opened in a flip form. A compression lock (4) is further arranged on the upper cover for pre-pressing the sealing component to ensure the sealing performance.

5. The dual-stage vacuum system of an eutectic furnace according to claim 1, wherein It further includes a vacuum gauge assembly (12) arranged on the vacuum chamber. The vacuum gauge assembly (12) includes a resistance gauge and an ionization gauge, and the resistance gauge and the ionization gauge are connected to a vacuum gauge chassis (6) for real-time monitoring of the vacuum degree of the vacuum chamber (3).

6. The two-stage vacuum system of an eutectic furnace according to claim 1, characterized in that, The backing pump (1) is a rotary vane oil pump, and the main pumping pump (2) is a magnetic levitation molecular pump.

7. The two-stage vacuum system of an eutectic furnace according to claim 1, wherein An observation window is opened on the side of the vacuum chamber (3) for observing the situation of the workpiece.

8. The dual-stage vacuum system of an eutectic furnace according to claim 1, wherein The vacuum chamber (3) is provided with a connecting flange, and the connecting flange is used for accessing power supply cables or supplying coolant.

9. The double-stage vacuum system of a eutectic furnace according to claim 1, characterized in that: It further includes a leak detection assembly, including a helium mass spectrometer leak detector, for detecting the leak rate of the vacuum chamber (3). When detecting, the leak detection assembly closes the flange opening of the vacuum chamber (3) through a flange blind plate and connects it to the helium mass spectrometer leak detector, and sprays helium gas at the welding parts and sealing places through a helium gas spray gun to detect the leak rate.

10. A vacuuming method for a two-stage vacuum system of a eutectic furnace, based on the two-stage vacuum system of a eutectic furnace according to any one of claims 1 to 9, characterized in that: Including the following steps: Close and seal the vacuum chamber (3), and close the vent valve (5), the backing baffle valve (8), the pre-pumping baffle valve (10) and the gate valve (11); Start the backing pump (1) and open the pre-pumping baffle valve (10) for preliminary pumping; Open the vacuum gauge assembly (12) to record the vacuum degree of the vacuum chamber (3) When the vacuum degree reaches the first threshold, open the backing baffle valve (8). When the vacuum degree is stable, start the main pumping pump (2). After the main pumping pump (2) runs stably, close the pre-pumping baffle valve (10) and open the gate valve (11) to continuously pump to the target vacuum degree.

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