Reflector bonding and surface shape in-situ real-time detection device and detection method thereof

Abstract

The invention relates to the technical field of reflecting mirror bonding surface detection, in particular to a reflecting mirror bonding and surface shape in-situ real-time detection device and a detection method thereof, and the detection device comprises a base, a centering device, an optical precision adjusting device and a mirror pad. And the centering device is used for clamping the reflecting mirror. The optical precision adjusting device can move along the X axis, the Y axis and the Z axis and can rotate around the X axis and the Y axis. The optical precision adjusting device is used for adjusting the position and posture of the mirror pad and pasting the mirror pad on the reflector. Wherein any two of the X axis, the Y axis and the Z axis are perpendicular to each other, the Z axis is perpendicular to the top face of the base, and the X axis and the Y axis are both parallel to the top face of the base. The device has the advantages that the displacement of the mirror pad on the X axis and the Y axis and the inclination angle around the X axis and the Y axis are adjusted through the optical precision adjusting device, so that the axis of the mirror pad is coaxial with the geometric axis of the reflecting mirror, and the mirror pad is bonded to the reflecting mirror through the Z-axis displacement sliding table.

Description

Technical Field

[0001] The present invention relates to the technical field of reflector bonding surface detection, and particularly to a device and a detection method for in-situ real-time detection of reflector bonding and surface shape. Background Art

[0002] With the increasingly wide application of space remote sensors, the precision of optical instruments is getting higher and higher. The bonding precision between the reflector and the mirror pad is a key factor affecting the imaging quality. However, the existing bonding technologies have the following problems: During the bonding process, the shrinkage stress during the curing of the adhesive will have an irreversible impact on the surface shape of the reflector, and the existing means cannot monitor in real time the change of the adhesive layer on the surface shape of the reflector during the curing process. On the other hand, during the bonding process of the reflector, there is a matching error between the bonding surfaces of the reflector and the mirror pad, resulting in uneven distribution of the bonding stress, which in turn causes deflection of the reflected light and reduces the imaging quality. Currently, manual bonding is mainly relied on, making it difficult to ensure the consistency and precision of bonding. Summary of the Invention

[0003] In view of this, the present invention aims to provide a device and a detection method for in-situ real-time detection of reflector bonding and surface shape, which achieve precise bonding of the mirror pad and the reflector through a centering device and an optical precision adjustment device, and cooperate with an in-situ real-time surface shape detection component to monitor the surface shape of the bonding surface.

[0004] To achieve the above object, the technical solution of the present invention is realized as follows: A device for in-situ real-time detection of reflector bonding and surface shape, comprising: a base, on which a light passing hole is provided; a centering device, which is arranged on the base and is used for clamping the reflector; an optical precision adjustment device, which is arranged on the base and can move along the X-axis, Y-axis and Z-axis, and can rotate around the X-axis and Y-axis; the optical precision adjustment device is used for adjusting the position and posture of the mirror pad and pasting the mirror pad on the reflector; an in-situ real-time surface shape detection component, which is used for in-situ real-time detection of the change of the surface shape of the reflector after bonding and the uniformity of the bonding adhesive layer; the light emitted by the in-situ real-time surface shape detection component irradiates the reflector through the light passing hole; wherein, any two of the X-axis, Y-axis and Z-axis are perpendicular to each other; the Z-axis is perpendicular to the top surface of the base, and the X-axis and Y-axis are both parallel to the top surface of the base.

[0005] Further, the in-situ real-time surface shape detection component includes an interferometer and a folding mirror. After the optical path emitted by the interferometer is turned by the folding mirror, it vertically enters the surface of the bonded reflector through the light passing hole; the light reflected back by the reflector interferes with the standard light inside the interferometer to form interference fringes; the interference fringes are used for realizing in-situ real-time measurement of the deformation amount of the bonding surface of the reflector; the measurement precision of the bonding surface of the reflector is better than RMS0.01λ, where RMS is the root mean square value and λ is the working wavelength of the interferometer.

[0006] Further, the base includes a mounting plate and three leveling legs. The mounting plate is connected to the three leveling legs, and the three leveling legs are distributed in a triangular pattern to adjust the horizontal height of the mounting plate. The light passing hole is provided on the mounting plate.

[0007] Further, the centering device includes a lead screw assembly, a linear guide rail assembly, a first dovetail clamp block, and a second dovetail clamp block. The lead screw assembly and the linear guide rail assembly are arranged on the base at intervals. Both ends of the first dovetail clamp block are respectively connected to the lead screw assembly and the linear guide rail assembly. Both ends of the second dovetail clamp block are respectively connected to the lead screw assembly and the linear guide rail assembly. The first dovetail clamp block and the second dovetail clamp block are arranged oppositely, and the lead screw assembly drives the first dovetail clamp block and the second dovetail clamp block to move towards or away from each other along the lead screw assembly.

[0008] Further, the linear guide rail assembly includes a linear guide rail and a support seat. The support seat is connected to the base, and the linear guide rail is arranged on the support seat. The lead screw assembly includes a lead screw, two fixed seats, and two adjustment blocks. Both ends of the lead screw are rotatably connected to the two fixed seats through bearings respectively. The two fixed seats are connected to the base through the adjustment blocks. Opposite threads in opposite directions are provided at both ends of the lead screw.

[0009] Further, the first dovetail clamp block includes a first dovetail plate and a first nut. One end of the first dovetail plate is screwed to one of the positive thread or the reverse thread of the lead screw through the first nut, and the other end of the first dovetail plate is connected to the linear guide rail assembly. The second dovetail clamp block includes a second dovetail plate and a second nut. One end of the second dovetail plate is screwed to the other of the positive thread or the reverse thread of the lead screw through the second nut, and the other end of the second dovetail plate is connected to the linear guide rail assembly.

[0010] Further, the optical precision adjustment device includes an optical displacement platform, an angle adjustment slide, and a Z-axis displacement slide. The optical displacement platform is connected to the base, the angle adjustment slide is connected to the optical displacement platform, and the Z-axis displacement slide is connected to the angle adjustment slide. The optical displacement platform drives the Z-axis displacement slide to move along the X-axis and the Y-axis through the angle adjustment slide. The angle adjustment slide drives the Z-axis displacement slide to rotate around the X-axis and the Y-axis.

[0011] Further, the Z-axis displacement slide includes a mounting frame, a guide rail, a slider, a cantilever, and a locking member. The mounting frame is connected to the angle adjustment slide, the guide rail is arranged on the mounting frame, the slider is connected to the guide rail, and the slider can move along the length direction of the guide rail. The cantilever is connected to the slider. The locking member is connected to the slider and is used to fix the slider on the guide rail.

[0012] Further, a clamping portion is provided at the front end of the cantilever, and a lens pad is arranged inside the clamping portion.

[0013] A method for in-situ real-time detection of the surface shape of the bonding surface of a reflector is realized by using the above-mentioned reflector bonding and surface shape in-situ real-time detection device and cooperating with a laser tracker; it includes the following steps: S1: Clamp the reflector using a centering device, and obtain the center coordinates of the reflector through the laser tracker.

[0014] S2: Clamp the mirror pad using the clamping part of the optical precision adjustment device; obtain the center coordinates of the mirror pad through the laser tracker.

[0015] S3: Use the optical precision adjustment device to adjust the position and attitude of the mirror pad to make it adapt to the position and attitude of the reflector, and then paste the mirror pad onto the reflector.

[0016] S4: The light emitted by the in-situ real-time surface shape detection component irradiates the surface of the reflector through the light passing hole, and in-situ real-time detects the change in the surface shape of the reflector after bonding and the uniformity of the adhesive layer.

[0017] Compared with the prior art, the present invention can achieve the following beneficial effects: 1) Adjust the displacement of the mirror pad on the X-axis and Y-axis, and the tilt angles around the X-axis and Y-axis through the optical precision adjustment device, so that the axis of the mirror pad is coaxial with the geometric axis of the reflector, and bond the mirror pad to the reflector through the Z-axis displacement slide.

[0018] 2) Real-time monitor the change in the surface shape of the bonding surface of the reflector through the in-situ real-time detection optical path formed by the interferometer and the folding mirror.

[0019] 3) By providing a circular light passing hole on the mounting plate, the in-situ real-time detection optical path formed by the interferometer and the folding mirror can irradiate the reflector, realizing the monitoring of the bonding surface of the reflector.

[0020] 4) The first dovetail plate and the second dovetail plate are made of Teflon plate or acrylic plate, avoiding damage to the outer contour of the reflector when the first dovetail plate and the second dovetail plate clamp the reflector. Description of the Drawings

[0021] The drawings constituting a part of the present invention are used to provide a further understanding of the present invention. The schematic embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation to the present invention. In the drawings: Figure 1 is a schematic structural diagram of a reflector bonding and surface shape in-situ real-time detection device provided according to an embodiment of the present invention; Figure 2 is a schematic structural diagram of a reflector bonding and surface shape in-situ real-time detection device provided according to an embodiment of the present invention without the in-situ real-time surface shape detection component; Figure 3It is a schematic structural diagram of a centering device provided according to an embodiment of the present invention; Figure 4 It is a schematic structural diagram of an optical displacement platform and an angle adjustment slide provided according to an embodiment of the present invention; Figure 5 It is a schematic structural diagram of a Z-axis displacement slide provided according to an embodiment of the present invention.

[0022] Reference numerals include: 1, base; 11, mounting plate; 12, leveling leg; 13, light through hole; 2, centering device; 21, lead screw assembly; 211, lead screw; 212, fixed seat; 213, adjustment block; 22, linear guide assembly; 221, linear guide; 222, support seat; 23, first dovetail clamp block; 231, first dovetail plate; 232, first lead nut; 24, second dovetail clamp block; 241, second dovetail plate; 242, second lead nut; 3, optical precision adjustment device; 31, optical displacement platform; 311, translation fixed seat; 312, knob; 313, reset rod; 314, crossed roller guide; 32, angle adjustment slide; 321, connecting seat; 322, worm and worm gear; 323, dovetail guide; 324, handwheel; 325, locking screw; 33, Z-axis displacement slide; 331, mounting frame; 332, guide rail; 333, slider; 334, cantilever; 335, locking member; 336, clamping portion; 337, rotating screw; 4, mirror pad; 5, reflector; 6, interferometer; 7, folding mirror. Detailed implementation manners

[0023] In order to make the purpose, technical solutions and advantages of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and do not constitute a limitation to the present invention.

[0024] It should be noted that, without conflict, the embodiments in the present invention and the features in the embodiments can be combined with each other.

[0025] In the description of the present invention, it should be understood that the orientation or positional relationship indicated by terms such as "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation to the present invention. In addition, terms such as "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, features defined with "first", "second", etc. may explicitly or implicitly include one or more of such features. In the description of the present invention, unless otherwise specified, the meaning of "a plurality" is two or more.

[0026] In the description of the present invention, it should be noted that unless otherwise clearly specified and limited, the terms "installation", "connection", "coupling" should be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or an integral connection; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood through specific situations.

[0027] The present invention will be described in detail below with reference to the drawings and in combination with embodiments.

[0028] As Figures 1 to 5 shown, a device for bonding a mirror and in-situ real-time detection of the surface shape provided by an embodiment of the present invention includes: a base 1, a centering device 2, an optical precision adjustment device 3, and an in-situ real-time detection component for the surface shape. The centering device 2 is arranged on the base 1 and is used for clamping the mirror 5 so that the mirror 5 is located directly above the light passing hole 13. The optical precision adjustment device 3 is arranged on the base 1. The optical precision adjustment device 3 can move along the X-axis, Y-axis, and Z-axis and can rotate around the X-axis and Y-axis. The optical precision adjustment device 3 is used for adjusting the position and attitude of the mirror pad 4 and pasting the mirror pad 4 onto the mirror 5. The in-situ real-time detection component for the surface shape is used for monitoring the change in the surface shape of the mirror 5 after bonding and the uniformity of the adhesive layer.

[0029] Among them, any two of the X-axis, Y-axis, and Z-axis are perpendicular to each other. The Z-axis is perpendicular to the top surface of the base 1, and both the X-axis and Y-axis are parallel to the top surface of the base 1. The in-situ real-time detection component for the surface shape is used for monitoring the change in the surface shape of the mirror 5 after bonding and the uniformity of the adhesive layer.

[0030] The base 1 includes a mounting plate 11 and at least three leveling legs 12. The mounting plate 11 is connected to the three leveling legs 12, and the three leveling legs 12 are distributed in a triangular pattern to adjust the horizontal height of the mounting plate 11. In this embodiment, the diameter of the circular light passing hole 13 is 10 mm smaller than the diameter of the mirror 5. The leveling leg 12 includes a nut, a screw rod, and a leg base. The leveling leg 12 can move the mounting plate 11 along the Z-axis direction of the screw rod through the nut, thereby adjusting the horizontal height of the mounting plate 11.

[0031] The centering device 2 includes a lead screw assembly 21, a linear guide rail assembly 22, a first dovetail clamp block 23, and a second dovetail clamp block 24. The lead screw assembly 21 and the linear guide rail assembly 22 are arranged at intervals on the mounting plate 11. Both ends of the first dovetail clamp block 23 are respectively connected to the lead screw assembly 21 and the linear guide rail assembly 22. Both ends of the second dovetail clamp block 24 are respectively connected to the lead screw assembly 21 and the linear guide rail assembly 22. The first dovetail clamp block 23 and the second dovetail clamp block 24 are arranged opposite to each other. The lead screw assembly 21 drives the first dovetail clamp block 23 and the second dovetail clamp block 24 to move towards or away from each other along the lead screw assembly 21.

[0032] The lead screw assembly 21 includes a lead screw 211, two fixed seats 212, and two adjustment blocks 213. Both ends of the lead screw 211 are rotatably connected to the two fixed seats 212 through bearings respectively. The two fixed seats 212 are connected to the mounting plate 11 through the adjustment blocks 213. Opposite threads are provided at both ends of the lead screw 211.

[0033] The linear guide rail assembly 22 includes a linear guide rail 221 and a support seat 222. The support seat 222 is connected to the mounting plate 11, and the linear guide rail 221 is arranged on the support seat 222.

[0034] The first dovetail clamp block 23 includes a first dovetail plate 231 and a first nut 232. One end of the first dovetail plate 231 is screwed to one of the positive thread or the reverse thread of the lead screw 211 through the first nut 232, and the other end of the first dovetail plate 231 is connected to the slider of the linear guide rail assembly 22. The second dovetail clamp block 24 includes a second dovetail plate 241 and a second nut 242. One end of the second dovetail plate 241 is screwed to the other of the positive thread or the reverse thread of the lead screw 211 through the second nut 242, and the other end of the second dovetail plate 241 is connected to the slider of the linear guide rail assembly 22.

[0035] The materials of the first dovetail plate 231 and the second dovetail plate 241 are Teflon plates or acrylic plates to avoid damaging the outer contour of the mirror 5 when the first dovetail plate 231 and the second dovetail plate 241 clamp the mirror 5.

[0036] When the lead screw 211 is rotated clockwise, the first dovetail clamp block 23 and the second dovetail clamp block 24 move towards each other along the length direction of the lead screw 211, and at this time, the mirror 5 is clamped. When the lead screw 211 is rotated counterclockwise, the first dovetail clamp block 23 and the second dovetail clamp block 24 move away from each other along the length direction of the lead screw 211, and at this time, the clamping of the mirror 5 is released.

[0037] In this embodiment, the lead screw 211 is rotated manually. In other embodiments, the rotation of the lead screw 211 is achieved by a motor.

[0038] The optical precision adjustment device 3 includes an optical displacement platform 31, an angle adjustment slide 32, and a Z-axis displacement slide 33. The optical displacement platform 31 is connected to the mounting plate 11, the angle adjustment slide 32 is connected to the optical displacement platform 31, and the Z-axis displacement slide 33 is connected to the angle adjustment slide 32. The optical displacement platform 31 drives the Z-axis displacement slide 33 to move along the X-axis and Y-axis through the angle adjustment slide 32. The angle adjustment slide 32 drives the Z-axis displacement slide 33 to rotate around the X-axis and Y-axis.

[0039] The optical displacement platform 31 includes a translation fixed seat 311, a knob 312, a reset rod 313, and a crossed roller guide 314; the translation fixed seat 311 is connected to the mounting plate 11, the crossed roller guide 314 is connected to the translation fixed seat 311, and the knob 312 and the reset rod 313 are respectively arranged at both ends of the crossed roller guide 314. By rotating the knob 312, the positions of the crossed roller guide 314 in the X-axis and Y-axis are adjusted, and thus the positions of the mirror pad 4 in the X-axis and Y-axis are adjusted. The reset rod 313 is used for resetting the crossed roller guide 314.

[0040] The angle adjustment slide 32 includes two angle inclination adjustment mechanisms, and the two angle inclination adjustment mechanisms are arranged perpendicular to each other. One of the angle inclination adjustment mechanisms is used to adjust the inclination angle around the X-axis, and the other angle inclination adjustment mechanism is used to adjust the inclination angle around the Y-axis. Each angle inclination adjustment mechanism includes a connecting seat 321, a worm and gear 322, a dovetail guide 323, a handwheel 324, and a locking screw 325.

[0041] The connecting seat 321 is fixedly connected to the crossed roller guide 314 by bolts. The worm and gear 322 is located inside the connecting seat 321 and is connected to the handwheel 324. The dovetail guide 323 is connected to the worm and gear 322. By rotating one of the handwheels 324, the corresponding worm and gear 322 can be driven to drive the corresponding dovetail guide 323 to perform angle adjustment around the X-axis or Y-axis, and thus the angle of the mirror pad 4 around the X-axis or Y-axis is adjusted. The locking screw 325 is used to fix the dovetail guide 323 at the adjusted angle position.

[0042] The Z-axis displacement stage 33 includes a mounting frame 331, a guide rail 332, a slider 333, a cantilever 334, a locking member 335, and a rotating screw 337. The mounting frame 331 is connected to the angle adjustment stage 32. The guide rail 332 is vertically arranged on the mounting frame 331 along the Z-axis direction. The slider 333 is connected to the guide rail 332 and can move along the length direction of the guide rail 332. The cantilever 334 is connected to the slider 333. The locking member 335 and the rotating screw 337 are respectively connected to both sides of the slider 333 and are connected to the slider 333. The locking member 335 is used to fix the slider 333 on the guide rail 332. An external force moves the rotating screw 337 to make the slider 333 move along the guide rail 332. A clamping portion 336 is provided at the front end of the cantilever 334, and the mirror pad 4 is arranged inside the clamping portion 336.

[0043] In this embodiment, threaded holes are provided at the positions where the slider 333 is connected to the locking member 335 and the rotating screw 337. The locking member 335 and the rotating screw 337 have threads adapted to the threaded holes, and the locking member 335 and the rotating screw 337 are screwed to the slider 333.

[0044] Specifically, the clamping portion 336 is of an annular structure. The inner wall of the clamping portion 336 has a positioning portion, and a notch is provided in the circumferential direction of the clamping portion 336. One side of the notch of the clamping portion 336 is connected to the cantilever 334, and a connecting portion extends outward on the other side of the notch. A connecting hole is provided in the connecting portion. The mirror pad 4 is arranged inside the clamping portion 336 through the positioning portion, and the bolt fastens the connecting portion to the cantilever 334, thereby realizing the fixation of the mirror pad 4. The notch makes the clamping portion 336 have radial elasticity and can be expanded or contracted by an external force to adapt to mirror pads 4 of different diameters.

[0045] The in-situ real-time surface shape detection assembly includes an interferometer 6 and a folding mirror 7. The interferometer 6 and the folding mirror 7 are arranged below the mirror bonding and in-situ real-time surface shape detection device. After the optical path emitted by the interferometer 6 is turned by the folding mirror 7, it perpendicularly enters the bonding surface of the mirror 5 through the light passing hole 13. The light reflected back by the mirror 5 interferes with the reference light inside the interferometer 6 to form interference fringes. The interference fringes can realize the in-situ real-time precise measurement of the deformation amount of the mirror surface of the mirror 5. The measurement accuracy of the mirror bonding surface is better than RMS0.01λ, where RMS is the root mean square value and λ is the working wavelength of the interferometer. In this embodiment, the working wavelength λ of the interferometer is 632.8 nm. The folding mirror 7 is arranged at an angle. In this embodiment, the folding mirror 7 is arranged at a 45-degree angle.

[0046] An in-situ real-time surface shape detection method for the mirror bonding surface is realized by using the above-mentioned mirror bonding and in-situ real-time surface shape detection device and cooperating with a laser tracker. It includes the following steps: S1: Use the centering device 2 to clamp the mirror 5, and obtain the central coordinates of the mirror through the measuring ball of the laser tracker.

[0047] Specifically, place the mirror 5 between the first dovetail clamping block 23 and the second dovetail clamping block 24, rotate the lead screw 211 to drive the first dovetail clamping block 23 and the second dovetail clamping block 24 to slide towards each other along the lead screw 211, and clamp the mirror 5. Establish a coordinate system in the laser tracker mode with the back of the mirror 5 as the reference, and obtain the center coordinates of the mirror 5.

[0048] S2: Use the clamping part 336 of the optical precision adjustment device 3 to clamp the mirror pad 4, and obtain the center coordinates of the mirror pad 4 through the measuring target ball of the laser tracker.

[0049] Specifically, place the mirror pad 4 in the clamping part 336 and lock the clamping part 336 with bolts. Place the measuring target ball of the laser tracker on the mirror pad 4 to obtain the center coordinates of the mirror pad 4.

[0050] S3: Use the optical precision adjustment device 3 to adjust the position and attitude of the mirror pad 4 so that the position and attitude of the mirror pad 4 are adapted to the position and attitude of the mirror 5, and then paste the mirror pad 4 onto the mirror.

[0051] Specifically, according to the center coordinates of the mirror pad 4, adjust the displacement of the mirror pad 4 in the X-axis and Y-axis directions through the optical displacement platform 31 so that the axis of the mirror pad 4 coincides with the geometric axis of the mirror 5. Then, adjust the tilt angles of the mirror pad 4 around the X-axis and Y-axis through the angle adjustment slide 32 so that the bonding surface of the mirror pad 4 is parallel to the bonding surface of the mirror 5. Then, adjust the distance between the mirror pad 4 and the mirror 5 through the Z-axis displacement slide 33 to a position where structural adhesive can be applied to the bottom of the mirror pad 4. Finally, continue to adjust the Z-axis displacement slide 33 to bond the mirror pad 4 to the mirror 5.

[0052] S4: After the optical path emitted by the interferometer 6 is deflected by the folding mirror 7, it is perpendicularly incident on the surface of the mirror 5 through the light passing hole 13, and the surface shape change of the mirror 5 after bonding and the uniformity of the adhesive layer are monitored in real time.

[0053] The above specific embodiments do not constitute a limitation to the protection scope of the present invention. Those skilled in the art should understand that various modifications, combinations, sub-combinations, and substitutions can be made according to design requirements and other factors. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention shall be included within the protection scope of the present invention.

Claims

1. A device for bonding a mirror and in-situ real-time detection of the surface shape, characterized in that Comprising: A base, on which a light passing hole is formed; A centering device, which is arranged on the base and is used for clamping a reflecting mirror; An optical precision adjusting device, which is arranged on the base. The optical precision adjusting device can move along the X-axis, Y-axis and Z-axis and can rotate around the X-axis and Y-axis. The optical precision adjusting device is used for adjusting the position and posture of a mirror pad and pasting the mirror pad on the reflecting mirror; A surface shape in-situ real-time detection component, which is used for in-situ real-time detecting the change of the surface shape of the reflecting mirror after bonding and the uniformity of the bonding glue layer. The light emitted by the surface shape in-situ real-time detection component irradiates the reflecting mirror through the light passing hole; Wherein, any two of the X-axis, Y-axis and Z-axis are perpendicular to each other; the Z-axis is perpendicular to the top surface of the base, and both the X-axis and Y-axis are parallel to the top surface of the base.

2. The mirror bonding and surface shape in-situ real-time detection device according to claim 1, characterized in that The surface shape in-situ real-time detection component includes an interferometer and a folding mirror. After the optical path emitted by the interferometer is turned by the folding mirror, it perpendicularly enters the surface of the reflecting mirror to be bonded through the light passing hole. The light reflected back by the reflecting mirror interferes with the standard light inside the interferometer to form interference fringes. The interference fringes are used for realizing the in-situ real-time measurement of the deformation amount of the bonding surface of the reflecting mirror. The measurement accuracy of the bonding surface of the reflecting mirror is better than RMS0.01λ, wherein RMS is the root mean square value and λ is the working wavelength of the interferometer.

3. The mirror bonding and surface shape in-situ real-time detection device according to claim 1, characterized in that, The base includes a mounting plate and three leveling legs. The mounting plate is connected to the three leveling legs, and the three leveling legs are distributed in a triangular shape and are used for adjusting the horizontal height of the mounting plate. The light passing hole is arranged on the mounting plate.

4. The mirror bonding and surface shape in-situ real-time detection device according to claim 1, characterized in that The centering device includes a lead screw assembly, a linear guide rail assembly, a first dovetail clamp block and a second dovetail clamp block. The lead screw assembly and the linear guide rail assembly are arranged on the base at intervals. Both ends of the first dovetail clamp block are respectively connected to the lead screw assembly and the linear guide rail assembly. Both ends of the second dovetail clamp block are respectively connected to the lead screw assembly and the linear guide rail assembly. The first dovetail clamp block and the second dovetail clamp block are arranged oppositely, and the lead screw assembly drives the first dovetail clamp block and the second dovetail clamp block to move towards or away from each other along the lead screw assembly.

5. The mirror bonding and surface shape in-situ real-time detection device according to claim 4, characterized in that, The linear guide rail assembly includes a linear guide rail and a support seat. The support seat is connected to the base, and the linear guide rail is arranged on the support seat; The lead screw assembly includes a lead screw, two fixed seats and two adjusting blocks. Both ends of the lead screw are rotatably connected to the two fixed seats through bearings respectively. The two fixed seats are connected to the base through the adjusting blocks. Positive threads and reverse threads with opposite directions are respectively arranged at both ends of the lead screw.

6. The mirror bonding and surface shape in-situ real-time detection device according to claim 5, characterized in that The first dovetail clamping block includes a first dovetail plate and a first nut. One end of the first dovetail plate is screwed to one of the right-handed thread or left-handed thread of the lead screw through the first nut, and the other end of the first dovetail plate is connected to the linear guide assembly; the second dovetail clamping block includes a second dovetail plate and a second nut. One end of the second dovetail plate is screwed to the other of the right-handed thread or left-handed thread of the lead screw through the second nut, and the other end of the second dovetail plate is connected to the linear guide assembly.

7. The mirror bonding and surface shape in-situ real-time detection device according to claim 1, characterized in that, The optical precision adjustment device includes an optical displacement platform, an angle adjustment slide and a Z-axis displacement slide; the optical displacement platform is connected to the base, the angle adjustment slide is connected to the optical displacement platform, and the Z-axis displacement slide is connected to the angle adjustment slide; the optical displacement platform drives the Z-axis displacement slide to move along the X-axis and Y-axis through the angle adjustment slide; the angle adjustment slide drives the Z-axis displacement slide to rotate around the X-axis and Y-axis.

8. The mirror bonding and surface shape in-situ real-time detection device according to claim 7, characterized in that, The Z-axis displacement slide includes a mounting frame, a guide rail, a slider, a cantilever and a locking member; the mounting frame is connected to the angle adjustment slide, the guide rail is arranged on the mounting frame, the slider is connected to the guide rail, and the slider can move along the length direction of the guide rail; the cantilever is connected to the slider; the locking member is connected to the slider and is used to fix the slider on the guide rail.

9. The mirror bonding and in-situ real-time surface shape detection device according to claim 8, characterized in that A clamping portion is provided at the front end of the cantilever, and the mirror pad is arranged in the clamping portion.

10. A method for in-situ real-time detection of the surface shape of a mirror bonding surface, which is realized by using the mirror bonding and surface shape in-situ real-time detection device according to any one of claims 1-9 and cooperating with a laser tracker; characterized in that, It includes the following steps: S1: Clamp the reflector using the centering device, and obtain the center coordinates of the reflector through the laser tracker; S2: Clamp the mirror pad using the clamping portion of the optical precision adjustment device; obtain the center coordinates of the mirror pad through the laser tracker; S3: Use the optical precision adjustment device to adjust the position and attitude of the mirror pad to make it adapt to the position and attitude of the reflector, and then paste the mirror pad onto the reflector; S4: The light emitted by the in-situ real-time surface shape detection component irradiates the surface of the reflector through the light passing hole, and in-situ real-time detects the surface shape change of the reflector after bonding and the uniformity of the adhesive layer.

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