Horizontal motion workbench for wafer level chip test

Abstract

The invention relates to the technical field of chip testing, in particular to a horizontal movement workbench for wafer-level chip testing. Comprising a Y-direction movement module, an X-direction movement module, a bearing base and a feedback measurement module, the Y-direction movement module can drive the X-direction movement module to do Y-direction linear reciprocating motion within a set range; the X-direction motion module can drive the bearing base to do X-direction linear reciprocating motion within a set range; the feedback measurement module comprises a Y-direction grating ruler and an X-direction grating ruler which are respectively used for measuring the displacement distance of the X-direction movement module and the bearing base; and the feedback measuring device is electrically connected with the controller, and controls the actions of the Y-direction movement module and the X-direction movement module through the controller. Through reasonable layout of the workpiece table, the X-direction movement module and the Y-direction movement module are more concise in structure, good in stability and higher in movement precision and speed.

Description

Technical Field

[0001] This application relates to the technical field of chip testing, and particularly to a horizontal movement workbench for wafer-level chip testing. Background Art

[0002] In process treatments such as wafer-level chip testing, horizontal movements in the X direction and the Y direction need to be completed. Through the sequential movements in the X direction and the Y direction, high-speed and precise scanning between the chip probe and different measuring points of the wafer-level chip is achieved, meeting the requirements for accuracy and efficiency in its detection process.

[0003] The workbench structures in the prior art are generally complex, with low movement accuracy and poor stability, making it difficult to meet the test process requirements of wafer-level chips. Summary of the Invention

[0004] This application provides a horizontal movement workbench for wafer-level chip testing. The platform has a compact structure, good stability and positioning accuracy, and can meet the needs of process treatments such as wafer-level chip testing.

[0005] The horizontal movement workbench for wafer-level chip testing provided by this application includes a Y-direction movement module, an X-direction movement module, a bearing base, and a feedback measurement module;

[0006] The Y-direction movement module includes a Y-direction bottom plate, a Y-direction driving mechanism, and a Y-direction limiting mechanism;

[0007] The X-direction movement module includes an X-direction bottom plate, an X-direction driving mechanism, and an X-direction limiting mechanism; the X-direction bottom plate is installed on the Y-direction driving mechanism, and the Y-direction driving mechanism drives the X-direction bottom plate to perform a linear reciprocating movement in the Y direction within the range defined by the Y-direction limiting mechanism;

[0008] The bearing base is installed on the X-direction driving mechanism, and the X-direction driving mechanism drives the bearing base to perform a linear reciprocating movement in the X direction within the range defined by the X-direction limiting mechanism;

[0009] The feedback measurement module includes a Y-direction grating scale and an X-direction grating scale; the Y-direction grating scale is used to measure the displacement distance of the X-direction bottom plate; the X-direction grating scale is used to measure the displacement distance of the bearing base;

[0010] The feedback measurement module is electrically connected to a controller, and the controller is electrically connected to the Y-direction driving mechanism and the X-direction driving mechanism respectively.

[0011] In a preferred embodiment, the Y-direction driving mechanism includes a Y-direction lead screw arranged along the Y direction. Both ends of the Y-direction lead screw are respectively mounted on the Y-direction bottom plate through bearing seats. One end of the Y-direction lead screw is connected to a Y-direction servo motor, and a Y-direction lead screw nut bracket is arranged on the Y-direction lead screw.

[0012] On both sides of the Y-direction lead screw, at least one Y-direction linear guide parallel to the Y-direction lead screw is respectively arranged, and at least one Y-direction slider is respectively arranged on the Y-direction linear guide.

[0013] Both the Y-direction lead screw nut bracket and the Y-direction slider are fixedly connected to the bottom surface of the X-direction bottom plate.

[0014] In a preferred embodiment, two Y-direction mechanical limit devices are arranged on the Y-direction bottom plate. The two Y-direction mechanical limit devices are respectively located on both sides of the Y-direction lead screw, one is close to the front end of the Y-direction lead screw, and the other is close to the rear end of the Y-direction lead screw. Corresponding positions on the bottom surface of the X-direction bottom plate are respectively provided with two contacts for cooperating with the Y-direction mechanical limit devices to limit the maximum displacement of the X-direction bottom plate in the Y direction.

[0015] It further includes at least one Y-direction electrical limit device. The Y-direction electrical limit device is arranged between the Y-direction lead screw and the Y-direction linear guide. A convex block is arranged at the corresponding position on the bottom surface of the X-direction bottom plate for cooperating with the Y-direction electrical limit device to define the initial position of the X-direction bottom plate.

[0016] In a preferred embodiment, the Y-direction grating scale is an integral closed grating scale, including a Y-direction grating scale reading head and a Y-direction grating scale body.

[0017] The Y-direction grating scale reading head is arranged on the Y-direction bottom plate and is located on one side of one of the Y-direction linear guides. The Y-direction grating scale body is arranged on the X-direction bottom plate and can move along with the X-direction bottom plate.

[0018] In a preferred embodiment, a strip-shaped guide rail clamping plate is arranged on at least one side surface of the Y-direction linear guide, and the guide rail clamping plate is made of a hard material.

[0019] In a preferred embodiment, the X-direction driving mechanism includes an X-direction lead screw arranged along the X direction. Both ends of the X-direction lead screw are respectively mounted on the X-direction bottom plate through bearing seats. One end of the X-direction lead screw is connected to an X-direction servo motor, and a Y-direction lead screw nut bracket is arranged on the X-direction lead screw.

[0020] On both sides of the X-direction lead screw, at least one X-direction linear guide parallel to the X-direction lead screw is respectively arranged, and at least one X-direction slider is respectively arranged on the X-direction linear guide.

[0021] Both the X-direction lead screw nut bracket and the X-direction slider are fixedly connected to the bottom surface of the load-bearing base.

[0022] In a preferred embodiment, two X-direction mechanical limit devices are provided on the X-direction bottom plate. The two X-direction mechanical limit devices are respectively located on both sides of the X-direction lead screw, one close to the front end of the X-direction lead screw and the other close to the rear end of the X-direction lead screw; corresponding positions on the bottom surface of the load-bearing base are respectively provided with two contacts for cooperating with the X-direction mechanical limit devices to limit the maximum displacement of the load-bearing base in the X direction.

[0023] It further includes at least one X-direction electrical limit device. The X-direction electrical limit device is arranged between the X-direction lead screw and the X-direction linear guide rail. A convex block is provided at the corresponding position on the bottom surface of the load-bearing base for cooperating with the X-direction electrical limit device to define the initial position of the load-bearing base.

[0024] In a preferred embodiment, the X-direction grating scale is an integrated closed grating scale, including an X-direction grating scale reading head and an X-direction grating scale body.

[0025] The X-direction grating scale reading head is arranged on the X-direction bottom plate and is located on one side of one of the X-direction linear guide rails; the X-direction grating scale body is arranged on the load-bearing base and can move along with the load-bearing base.

[0026] In a preferred embodiment, strip-shaped guide rail clamping plates are arranged on at least one side surface of the X-direction linear guide rail, and the guide rail clamping plates are made of hard materials.

[0027] In a preferred embodiment, the load-bearing base is a U-shaped plate, and is connected to the X-direction motion module in a detachable connection manner for installing the Z-Theta motion module in the test equipment.

[0028] The present application has the following beneficial effects:

[0029] In the present application, the X-direction motion module is vertically stacked on the Y-direction motion module, having good stability. The motion ranges of the X-direction motion module and the Y-direction motion module are defined by the limit mechanism, and the motion precision of the X-direction motion module and the Y-direction motion module is controlled by the feedback measurement module. Through the reasonable layout of the workbench, the X-direction motion module and the Y-direction motion module of the present application have a more concise structure, good stability, and higher motion precision and speed. Description of the Drawings

[0030] To more clearly illustrate the technical solutions of the embodiments of the present invention, the following will briefly introduce the accompanying drawings required for the embodiments. It should be understood that the following drawings only show some embodiments of the present invention and should not be regarded as limiting the scope. For those of ordinary skill in the art, without creative efforts, other relevant drawings can also be obtained based on these drawings.

[0031] Figure 1 It is a schematic diagram of the overall structure of the horizontal movement workbench provided by the embodiment of the present application;

[0032] Figure 2 It is a schematic diagram of the structure of the Y-direction movement module of the horizontal movement workbench provided by the embodiment of the present application;

[0033] Figure 3 It is a schematic diagram of the structure of the X-direction movement module of the horizontal movement workbench provided by the embodiment of the present application.

[0034] Reference numerals in the figure:

[0035] 1 - Y-direction movement module; 101 - Y-direction bottom plate; 102 - Y-direction mechanical limit device; 103 - Y-direction transportation locking tooling; 104 - Y-direction linear guide rail; 105 - Y-direction slider; 106 - Y-direction motor side bearing seat; 107 - Y-direction coupling; 108 - Y-direction servo motor; 109 - Y-direction motor connection seat; 110 - Y-direction guide rail clamp; 111 - Y-direction electrical limit device; 112 - Y-direction lead screw nut bracket; 113 - Y-direction lead screw nut; 114 - Y-direction lead screw; 115 - free side bearing seat;

[0036] 2 - X-direction movement module; 201 - X-direction bottom plate; 202 - X-direction electrical limit device; 203 - Z - Theta base; 204 - X-direction free side bearing seat; 205 - X-direction lead screw nut bracket; 206 - X-direction lead screw nut; 207 - X-direction slider; 208 - X-direction linear guide rail; 209 - X-direction lead screw; 210 - X-direction motor side bearing seat; 211 - X-direction servo motor; 212 - X-direction coupling; 213 - X-direction motor connection seat; 214 - X-direction mechanical limit device; 215 - X-direction transportation locking tooling; 216 - X-direction guide rail clamp;

[0037] 3 - Feedback measurement module; 301 - Y-direction grating scale reading head; 302 - Y-direction reading head seat;

[0038] 303 - X-direction reading head seat; 304 - X-direction grating scale reading head; 305 - X-direction grating scale body; 306 - X-direction grating scale mounting seat; 307 - Y-direction grating scale body;

[0039] 4 - Auxiliary module; 401 - Lifting eye screw; 402 - Y - direction drag chain groove; 403 - Y - direction drag chain; 404 - Y - direction drag chain fixing plate; 405 - X - direction drag chain; 406 - X - direction drag chain groove; 407 - X - direction drag chain fixing plate. Detailed implementation manners

[0040] To make the objectives, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are some but not all of the embodiments of the present invention. The components of the embodiments of the present invention described and labeled in the accompanying drawings can be arranged and designed in various different configurations.

[0041] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed present invention, but merely represents selected embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts fall within the scope of protection of the present invention.

[0042] It should be noted that: Similar reference numerals and letters denote similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0043] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the inventive product is customarily placed during use. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus cannot be construed as a limitation of the present invention. In addition, the terms "first", "second", "third", etc. are only used for descriptive distinction and cannot be understood as indicating or implying relative importance.

[0044] In addition, the terms "horizontal", "vertical", "hanging", etc. do not mean that the components are required to be absolutely horizontal or hanging, but can be slightly inclined. For example, "horizontal" only means that its direction is more horizontal relative to "vertical", and does not mean that the structure must be completely horizontal, but can be slightly inclined.

[0045] In the description of the present invention, it should also be noted that unless otherwise clearly defined and limited, the terms "set", "installed", "connected", and "coupled" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

[0046] The following will describe in detail some embodiments of the present invention with reference to the accompanying drawings. Without conflict, the embodiments described below and the features in the embodiments can be combined with each other.

[0047] As Figure 1 shown, an embodiment of the present application provides a horizontal movement workbench for wafer-level chip testing, which includes a Y-direction movement module 1, an X-direction movement module 2, a carrying base, and a feedback measurement module 3.

[0048] The Y-direction movement module 1 includes a Y-direction bottom plate 101, a Y-direction driving mechanism, and a Y-direction limiting mechanism;

[0049] The X-direction movement module 2 includes an X-direction bottom plate 201, an X-direction driving mechanism, and an X-direction limiting mechanism; the X-direction bottom plate 201 is installed on the Y-direction driving mechanism, and the Y-direction driving mechanism drives the X-direction bottom plate 201 to perform a linear reciprocating movement in the Y direction within the range defined by the Y-direction limiting mechanism;

[0050] The carrying base is installed on the X-direction driving mechanism, and the X-direction driving mechanism drives the carrying base to perform a linear reciprocating movement in the X direction within the range defined by the X-direction limiting mechanism;

[0051] The feedback measurement module 3 includes a Y-direction grating scale and an X-direction grating scale; the Y-direction grating scale is used to measure the displacement distance of the X-direction bottom plate 201; the X-direction grating scale is used to measure the displacement distance of the carrying base. The feedback measurement module is electrically connected to the controller, and the controller is electrically connected to the Y-direction driving mechanism and the X-direction driving mechanism respectively, and controls the movement of the workbench in the Y direction and the X direction according to the detection results of the feedback measurement module.

[0052] By stacking the Y-direction movement module 1 and the X-direction movement module 2 from bottom to top, the horizontal movement in the X-Y two directions is realized.

[0053] The specific structure of the Y-direction movement module 1 is as Figure 2As shown in the figure, in the Y-direction motion module 1, the Y-direction servo motor 108 is fixedly installed on the Y-direction bottom plate 101 through the Y-direction motor connecting seat 109 and screws, providing rotational driving force for the Y-direction motion; the Y-direction lead screw 114 is fixedly installed on the Y-direction bottom plate 101 through the Y-direction motor side bearing seat 106, the Y-direction free side bearing seat 115 and screws. The rotational motion of the Y-direction servo motor 108 is transmitted to the Y-direction lead screw nut 113 through the Y-direction coupling 107. The Y-direction lead screw nut 113 is connected to the Y-direction lead screw nut bracket 112 by screws, converting the rotational motion of the Y-direction lead screw 113 into the linear motion of the Y-direction lead screw nut bracket 112.

[0054] Two Y-direction linear guide rails 104 are fixedly installed on the guide rail installation surface of the Y-direction bottom plate 101 through screws. The Y-direction linear guide rails 104 are arranged in parallel with the Y-direction lead screw 114. Two Y-direction sliders 105 are respectively arranged on the two Y-direction linear guide rails 104, forming two sliding pairs. The Y-direction servo motor 108 and the Y-direction lead screw 114 are arranged in the middle of the two Y-direction linear guide rails 104. The four Y-direction sliders 105 are symmetrically arranged relative to the Y-direction lead screw 114 to avoid generating an eccentric load torque and affecting the accuracy of the Y-direction motion of the X-direction bottom plate 201.

[0055] In the preferred embodiment, local finishing measures are taken on the guide rail installation surface to ensure its straightness and the relative height between the two Y-direction linear guide rails 104. Two long strip-shaped Y-direction guide rail clamping plates 110 are respectively arranged on the outer sides of each Y-direction linear guide rail 104 to adjust the straightness of the Y-direction linear guide rail 104. The Y-direction guide rail clamping plates 110 are made of a hard material that is not easily bent.

[0056] Two Y-direction mechanical limit devices 102 are arranged on the Y-direction bottom plate 101. The two Y-direction mechanical limit devices 102 are respectively located on both sides of the Y-direction lead screw 114, one close to the front end of the Y-direction lead screw 114 and the other close to the rear end of the Y-direction lead screw 114. Corresponding positions on the bottom surface of the X-direction bottom plate 201 are respectively provided with two contacts for cooperating with the Y-direction mechanical limit devices 102 to limit the maximum displacement of the X-direction bottom plate 201 in the Y-direction.

[0057] Preferably, the Y-direction mechanical limit device 102 is a hydraulic buffer device, which can provide a certain buffer for the X-direction bottom plate 201 while limiting the position.

[0058] The Y-direction electrical limit device 111 is fixed to the Y-direction bottom plate 101 through screws, located between the Y-direction lead screw 114 and the Y-direction linear guide rail 104, corresponding to the middle position of the Y-direction lead screw 114. A convex block is arranged at the corresponding position on the bottom surface of the X-direction bottom plate 201 for cooperating with the Y-direction electrical limit device 111. The Y-direction electrical limit device 111 is three photoelectric sensors, realizing the electrical limit of the X-direction bottom plate 201 in the Y-direction motion and the limit of the initial position.

[0059] In a preferred embodiment, a detachable L-shaped Y-direction transportation locking tooling 103 is further provided on the Y-direction bottom plate 101, and its vertical surface can abut against the edge of the X-direction bottom plate 201 to limit the movement of the X-direction bottom plate 201 in the Y-direction during the assembly and transportation processes.

[0060] The specific structure of the X-direction movement module 2 is as Figure 3 shown. The X-direction bottom plate 201 is fixed to four Y-direction sliders 105 by screws and is connected to the Y-direction lead screw nut bracket 112 by screws. The entire X-direction movement module 2 is driven by the Y-direction driving mechanism to reciprocate linearly between the Y-direction mechanical limit devices 102 along the Y-direction linear guide 104.

[0061] The X-direction servo motor 211 is installed and fixed to the X-direction bottom plate 201 through the X-direction motor connection seat 213 and screws, providing rotational driving force for the X-direction movement; the X-direction lead screw 209 is installed and fixed to the X-direction bottom plate 201 through the X-direction motor side bearing seat 210, the X-direction free side bearing seat 204 and screws. The rotational movement of the X-direction servo motor 211 is transmitted to the X-direction lead screw nut 206 through the X-direction coupling 212. The X-direction lead screw nut 206 is connected to the X-direction lead screw nut bracket 205 by screws, converting the rotational movement of the X-direction lead screw 209 into the linear movement of the X-direction lead screw nut bracket 205.

[0062] Two X-direction linear guides 208 are installed and fixed to the guide rail installation surface of the X-direction bottom plate 201 by screws. The X-direction linear guides 208 are arranged in parallel with the X-direction lead screw 209. Two X-direction sliders 207 are respectively arranged on the two X-direction linear guides 208 to form two sliding pairs. The X-direction servo motor 211 and the X-direction lead screw 209 are arranged in the middle of the two X-direction linear guides 208. The four X-direction sliders 207 are symmetrically arranged with respect to the X-direction lead screw 209 to avoid generating an eccentric load moment and affecting the accuracy of the X-direction movement of the bearing base.

[0063] In a preferred embodiment, local finishing measures are taken on the guide rail installation surface to ensure its straightness and the relative height between the two X-direction linear guides 208. Two long strip-shaped X-direction guide rail clamping plates 216 are respectively arranged on the outer sides of each X-direction linear guide 208 to adjust the straightness of the X-direction linear guides 208. The X-direction guide rail clamping plates 216 are made of a hard material that is not easily bent.

[0064] Two X-direction mechanical limit devices 214 are provided on the X-direction bottom plate 201. The two X-direction mechanical limit devices 214 are respectively located on both sides of the X-direction lead screw 209, one is close to the front end of the X-direction lead screw 209, and the other is close to the rear end of the X-direction lead screw 209. Two contacts are respectively arranged at the corresponding positions on the bottom surface of the bearing base for cooperating with the X-direction mechanical limit devices 214 to limit the maximum displacement of the bearing base in the X-direction.

[0065] Preferably, the X-direction mechanical limit device 214 is a hydraulic buffer device, which can provide a certain buffer to the bearing base while limiting.

[0066] The X-direction electrical limit device 202 is fixed to the X-direction bottom plate 201 by screws, located between the X-direction lead screw 209 and the X-direction linear guide 208, corresponding to the middle position of the X-direction lead screw 209. A convex block is provided at the corresponding position on the bottom surface of the bearing base for cooperating with the X-direction electrical limit device 202. The X-direction electrical limit device 202 is three photoelectric sensors, realizing the electrical limit of the bearing base in the X-direction and the limit of the initial position.

[0067] In a preferred manner, a detachable L-shaped X-direction transportation locking tooling 215 is further provided on the X-direction bottom plate 201, and its vertical surface can abut against the edge of the bearing base, realizing the limitation of the movement of the bearing base in the X-direction during the assembly and transportation process.

[0068] The bearing base adopts a U-shaped Z-Theta base 203 for installing the Z-Theta motion module in the test equipment. When installing and adjusting or replacing the Z-Theta module, it only needs to be detached from the Z-Theta base as a whole and then replaced, without disassembling the already installed and adjusted X-Y workpiece table, and the assembly and debugging performance is better.

[0069] The feedback measurement module 3 is as Figure 2 and Figure 3 shown. In this embodiment, the full closed-loop control of two servo motors is completed through grating scales and a controller.

[0070] Specifically, the Y-direction grating scale is an integrated closed-type grating scale, including a Y-direction grating scale reading head 301 and a Y-direction grating scale body 307; the Y-direction grating scale reading head 301 is installed and fixed on the convex platform of the Y-direction bottom plate 101 through a Y-direction reading head seat 302 and screws, and is located on one side of a Y-direction linear guide 104; the Y-direction grating scale body 307 is arranged on the grating scale installation surface of the X-direction bottom plate 201 and can move with the X-direction bottom plate 201.

[0071] The X-direction grating scale is an integrated closed-type grating scale, including an X-direction grating scale reading head 304 and an X-direction grating scale body 305; the X-direction grating scale reading head 304 is installed and fixed on the convex platform of the X-direction bottom plate 201 through an X-direction reading head seat 303 and screws, and is located on one side of an X-direction linear guide 208; the X-direction grating scale body 305 is arranged on the grating scale installation surface of the Z-Theta base 203 and can move with the Z-Theta base 203.

[0072] The grating scale reading head mounting bosses on the Y-direction bottom plate 101, the grating scale mounting surfaces on the X-direction bottom plate 201, the grating scale reading head mounting bosses on the X-direction bottom plate 201, and the grating scale mounting surfaces on the Z-Theta bottom plate 203 adopt local precision machining measures to ensure that the flatness and straightness of the mounting planes meet the standards, thereby ensuring the feedback control accuracy.

[0073] Both the Y-direction grating scale and the X-direction grating scale use enclosed grating scales with an integrated reading head and grating scale body, which can reduce the accuracy error caused by the assembly error between the reading head and the grating scale body, and the enclosed grating scale can reduce the particle leakage generated during the relative movement of the grating scale body and the reading head, thereby avoiding contaminating the chip during the wafer-level chip testing process.

[0074] In the auxiliary module 4, four lifting ring screws 401 are installed at the four corners of the Y-direction bottom plate 101 to facilitate hoisting during the assembly and debugging of the horizontal moving stage; the Y-direction drag chain groove 402 is fixed to one side of the Y-direction bottom plate 101 by screws, the fixed end of the Y-direction drag chain 403 is fixed to the Y-direction drag chain groove 402 by screws, the moving end of the Y-direction drag chain 403 is fixed to the Y-direction drag chain fixing plate 404 by screws, and the Y-direction drag chain fixing plate 404 is fixed to the X-direction bottom plate 201 by screws; the X-direction drag chain groove 406 is fixed to the side of the X-direction bottom plate 201 by screws, the fixed end of the X-direction drag chain 408 is fixed to the X-direction drag chain groove 406 by screws, the moving end of the X-direction drag chain 408 is fixed to the X-direction drag chain fixing plate 407 by screws, and the X-direction drag chain fixing plate 407 is fixed to the Z-Theta bottom plate 203 by screws. When the workpiece stage moves, the Y-direction drag chain 403 and the X-direction drag chain 408 reciprocate in the drag chain grooves, avoiding friction, collision, and entanglement of the motor wires, electrical limit wires, and grating scale wires, extending the service life of the cables, ensuring the orderly arrangement of the cables, and facilitating maintenance.

[0075] In this application, the X-direction motion module is vertically stacked on the Y-direction motion module, which has good stability. The motion ranges of the X-direction motion module and the Y-direction motion module are limited by the limiting mechanism, and the motion accuracy of the X-direction motion module and the Y-direction motion module is controlled by the feedback measurement module. Through the reasonable layout of the workpiece stage, the X-direction motion module and the Y-direction motion module of this application have a more concise structure, good stability, higher motion accuracy and speed, and can meet the requirements of the X-Y horizontal motion in the wafer-level chip testing process.

[0076] The above are only the preferred embodiments of the present invention and are not used to limit the present invention. For those skilled in the art, the present invention can have various changes and modifications. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A horizontal movement workbench for wafer-level chip testing, characterized in that, It includes a Y-direction movement module, an X-direction movement module, a bearing base, and a feedback measurement module; The Y-direction movement module includes a Y-direction bottom plate, a Y-direction drive mechanism, and a Y-direction limit mechanism; The X-direction movement module includes an X-direction bottom plate, an X-direction drive mechanism, and an X-direction limit mechanism; the X-direction bottom plate is installed on the Y-direction drive mechanism, and the Y-direction drive mechanism drives the X-direction bottom plate to perform a linear reciprocating movement in the Y direction within the range defined by the Y-direction limit mechanism; The bearing base is installed on the X-direction drive mechanism, and the X-direction drive mechanism drives the bearing base to perform a linear reciprocating movement in the X direction within the range defined by the X-direction limit mechanism; The feedback measurement module includes a Y-direction grating scale and an X-direction grating scale; the Y-direction grating scale is used to measure the displacement distance of the X-direction bottom plate; the X-direction grating scale is used to measure the displacement distance of the bearing base; The feedback measurement module is electrically connected to a controller, and the controller is electrically connected to the Y-direction drive mechanism and the X-direction drive mechanism respectively.

2. The horizontal movement workbench for wafer-level chip testing according to claim 1, wherein, The Y-direction drive mechanism includes a Y-direction lead screw arranged along the Y direction. The two ends of the Y-direction lead screw are respectively installed on the Y-direction bottom plate through bearing seats. One end of the Y-direction lead screw is connected to a Y-direction servo motor, and a Y-direction lead screw nut bracket is arranged on the Y-direction lead screw; At least one Y-direction linear guide parallel to the Y-direction lead screw is arranged on each side of the Y-direction lead screw, and at least one Y-direction slider is arranged on each Y-direction linear guide; Both the Y-direction lead screw nut bracket and the Y-direction slider are fixedly connected to the bottom surface of the X-direction bottom plate.

3. The horizontal movement workbench for wafer-level chip testing according to claim 2, characterized in that, Two Y-direction mechanical limit devices are arranged on the Y-direction bottom plate. The two Y-direction mechanical limit devices are respectively located on both sides of the Y-direction lead screw. One is close to the front end of the Y-direction lead screw, and the other is close to the rear end of the Y-direction lead screw; corresponding positions on the bottom surface of the X-direction bottom plate are respectively provided with two contacts for cooperating with the Y-direction mechanical limit devices to limit the maximum displacement of the X-direction bottom plate in the Y direction; It further includes at least one Y-direction electrical limit device. The Y-direction electrical limit device is arranged between the Y-direction lead screw and the Y-direction linear guide. A convex block is arranged at the corresponding position on the bottom surface of the X-direction bottom plate for cooperating with the Y-direction electrical limit device to define the initial position of the X-direction bottom plate.

4. The horizontal movement workbench for wafer-level chip testing according to claim 2, characterized in that The Y-direction grating scale is an integrated closed grating scale, including a Y-direction grating scale reading head and a Y-direction grating scale body; The Y-direction grating scale reading head is arranged on the Y-direction bottom plate and is located on one side of one of the Y-direction linear guides; the Y-direction grating scale body is arranged on the X-direction bottom plate and can move along with the X-direction bottom plate.

5. The horizontal movement workbench for wafer-level chip testing according to claim 2, wherein, A strip-shaped guide rail clamp is arranged on at least one side surface of the Y-direction linear guide, and the guide rail clamp is made of a hard material.

6. The horizontal movement workbench for wafer-level chip testing according to claim 1, wherein, The X-direction drive mechanism includes an X-direction lead screw arranged along the X direction. The two ends of the X-direction lead screw are respectively installed on the X-direction bottom plate through bearing seats. One end of the X-direction lead screw is connected to an X-direction servo motor, and a Y-direction lead screw nut bracket is arranged on the X-direction lead screw; At least one X-direction linear guide parallel to the X-direction lead screw is respectively arranged on both sides of the X-direction lead screw, and at least one X-direction slider is respectively arranged on the X-direction linear guides; Both the X-direction lead screw nut bracket and the X-direction slider are fixedly connected to the bottom surface of the bearing base.

7. The horizontal movement workbench for wafer-level chip testing according to claim 6, wherein Two X-direction mechanical limit devices are arranged on the X-direction bottom plate, and the two X-direction mechanical limit devices are respectively located on both sides of the X-direction lead screw, one is close to the front end of the X-direction lead screw, and the other is close to the rear end of the X-direction lead screw; corresponding positions on the bottom surface of the bearing base are respectively provided with two contacts for cooperating with the X-direction mechanical limit devices to limit the maximum displacement of the bearing base in the X direction; It further includes at least one X-direction electrical limit device, the X-direction electrical limit device is arranged between the X-direction lead screw and the X-direction linear guide, and a convex block is arranged at the corresponding position on the bottom surface of the bearing base for cooperating with the X-direction electrical limit device to define the initial position of the bearing base.

8. The horizontal movement workbench for wafer-level chip testing according to claim 6, characterized in that, The X-direction grating scale is an integrated closed grating scale, including an X-direction grating scale reading head and an X-direction grating scale body; The X-direction grating scale reading head is arranged on the X-direction bottom plate and is located on one side of one of the X-direction linear guides; the X-direction grating scale body is arranged on the bearing base and can move along with the bearing base.

9. The horizontal moving workbench for wafer-level chip testing according to claim 6, wherein, A strip-shaped guide rail clamping plate is arranged on at least one side surface of the X-direction linear guide, and the guide rail clamping plate is made of a hard material.

10. The horizontal movement workbench for wafer-level chip testing according to claim 1, wherein, The bearing base is a U-shaped plate, and is connected to the X-direction movement module in a detachable connection manner for installing the Z-Theta movement module in the test equipment.

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