Impurity removal device for indium phosphide crystal growth

Abstract

The invention discloses an indium phosphide crystal growth impurity removal device, and relates to the technical field of indium phosphide crystal impurity removal, the indium phosphide crystal growth impurity removal device comprises a box body, the top end of the box body is fixedly provided with a feeding port, and a filtering mechanism is arranged between the box body and a sealing box; a storage cylinder is fixedly installed at the top end of the box body, and a cleaning mechanism is arranged on the inner side face of the box body. And an impurity removal mechanism is arranged between the box body and the filter cartridge. According to the impurity removal device for indium phosphide crystal growth, the collection plate adopts a three-layer isolation type design, the middle part is an indium phosphide crystal storage cavity after impurity removal, baffles on the two sides are of a sealing structure, it is avoided that indium phosphide crystals are mixed with cleaning liquid to affect the separation efficiency, after a scraper is matched with a groove of a discharging plate, the interior is sealed, the cleaning liquid is prevented from leaking, and the cleaning efficiency is improved. The cleaned indium phosphide crystals can be conveniently taken out through a handle of a collecting plate, impurities in the fallen cleaning liquid are filtered through a filter plate, and the cleaning liquid is recycled through a circulating pipe by starting a circulating pump.

Description

Technical Field

[0001] The invention relates to the technical field of indium phosphide crystal impurity removal, in particular to an indium phosphide crystal growth impurity removal device. Background Art

[0002] Semiconductor wafer materials are important materials in the optoelectronics field, and their production process is also relatively rigorous. Among them, indium phosphide crystals are one of the semiconductor material wafers and are used in fiber optic communication technology. Indium phosphide single crystals have good thermal conductivity and photoelectric conversion efficiency. In the process of synthesizing crystals using indium phosphide crystal growth furnaces, the crystals often contain some flocculent impurities. Whether determining the structure or characterizing the properties, the crystals need to be separated from other impurities.

[0003] However, the existing impurity removal device cannot separate the indium phosphide crystals from other impurities during use, resulting in the operator having to repeatedly handle the indium phosphide crystals later, which greatly reduces the practicality of the indium phosphide crystal growth and impurity removal device.

[0004] In order to solve the above-mentioned defects, in the prior art, Chinese patent publication number CN115896956A discloses an indium phosphide crystal growth impurity removal device, comprising a processing box and a feed port; the processing box is fixedly connected to the feed port; the processing box is provided with an impurity removal unit, which removes impurities on the surface of the indium phosphide crystal through a stirring component, collects the cleaned indium phosphide crystals through a collecting component, and facilitates the operator to remove the filter box through a fixing component, thereby realizing the impurity removal function and improving the impurity removal efficiency of the processing box; the descaling component enables the dirt remaining at the bottom end of the processing box to be removed; the circulating pump allows the cleaning liquid to be filtered through the filter screen and is put into the processing box again under the action of the circulating pump for use; the locking component enables the operator to quickly remove the filter screen for cleaning, thereby realizing the function of recycling the cleaning liquid, solving the problem that the cleaning liquid cannot be recycled, and improving the practicality of the processing box.

[0005] In the prior art, a Chinese patent with publication number CN219886240U discloses an indium phosphide crystal growth and impurity removal device. The device has a simple and convenient pick-and-place performance through the combination of a hopper and a partition frame. The staff only needs to put the indium phosphide crystal into the hopper and then into the partition frame to carry out the loading, impurity removal and cleaning work. After the impurity removal and cleaning are completed, the hopper only needs to be raised to take the indium phosphide crystal. The operation is convenient and the efficiency is more efficient. The transmission mechanism drives the synchronous operation of the two groups of stirring blades of the impurity removal and cleaning mechanism. The synchronous operation of the two groups of stirring blades can drive the water flow in a convection manner to perform convection flushing and impurity removal cleaning work on the indium phosphide crystals in the hopper. On the one hand, it can improve the cleaning and impurity removal efficiency and save the cleaning and impurity removal time. On the other hand, it can ensure the comprehensiveness of the cleaning and impurity removal of the indium phosphide crystals.

[0006] During use, the above-mentioned device uses the stirring fan blades to operate synchronously to remove impurities from the indium phosphide single crystal. However, the scraper in the above-mentioned device is in contact with the inner wall of the box for a long time, which makes the scraper easily damaged, thereby affecting the cleaning efficiency and affecting the removal of impurities. Summary of the Invention

[0007] The object of the present invention is to provide an indium phosphide crystal growth and impurity removal device to solve the problem in the above background technology that the scraper is easily damaged due to long-term contact with the inner wall of the box.

[0008] To achieve the above-mentioned objectives, the present invention provides the following technical solutions: an indium phosphide crystal growth and impurity removal device, comprising a box body, a feed port fixedly installed on the top of the box body, a circulation pump fixedly installed on the outer surface of the box body, a circulation pipe fixedly installed on the outer surface of the circulation pump, a sealing box fixedly installed on the outer surface of the circulation pipe, and a recycling filtering mechanism is provided between the box body and the sealing box; a storage cylinder fixedly installed on the top of the box body, a sealing box fixedly installed on the inner end surface of the box body, a second cleaning brush movably abutted on the inner side surface of the sealing box, and a cleaning mechanism to prevent clogging is provided on the inner side surface of the box body; a sealing disk fixedly installed on the inner side surface of the box body, the sealing disk fixedly installed on the top of the filter cartridge, an auger movably installed on the inner side surface of the filter cartridge, and an impurity removal mechanism is provided between the box body and the filter cartridge.

[0009] Furthermore, a stepper motor is fixedly mounted on the top of the box body, an output shaft is rotatably mounted on the output end of the stepper motor, the output shaft is movably mounted on the inner side of the sealing disk, and a driving rod is fixedly mounted on the outer surface of the output shaft.

[0010] Furthermore, the debris removal mechanism includes an auger, which is fixedly mounted on the outer surface of the driving rod, a connecting disk is fixedly mounted on the outer surface of the driving rod, and the driving rod and the auger form a rotating structure.

[0011] Furthermore, connecting rods are fixedly installed on both sides of the connecting plate, a buffer block is fixedly installed on the top of the connecting rod, a buffer spring is fixedly installed on the inner side of the buffer block, a buffer rod is fixedly installed on the outer surface of the buffer spring, and the buffer spring and the buffer rod form a telescopic structure.

[0012] Furthermore, the cleaning mechanism includes a first cleaning brush, which is fixedly mounted on the outer surface of the buffer rod, and the outer surface of the first cleaning brush is movably in contact with the filter cartridge.

[0013] Furthermore, a fixing rod is fixedly mounted on the outer surface of the buffer block, a limiting block is fixedly mounted on the outer surface of the fixing rod, a telescopic rod is movably mounted on the outer surface of the limiting block, and a second cleaning brush is fixedly mounted on the outer surface of the telescopic rod.

[0014] Furthermore, the filtering mechanism includes a circulation pipe, which is fixedly installed on the inner side of the box body. An observation window is fixedly installed on the outer surface of the box body, and a collecting plate is movably installed on the inner side of the box body.

[0015] Furthermore, a rotating rod is fixedly mounted on the bottom surface of the driving rod, two sets of stirring rollers are fixedly mounted on the outer surface of the rotating rod, and the rotating rod and the stirring rollers form a rotating structure.

[0016] Furthermore, a scraper is fixedly mounted on the outer surface of the rotating rod, the scraper is movably abutted against the top end of the blanking plate, and the rotating rod and the scraper form a rotating structure.

[0017] Furthermore, the blanking plate is fixedly mounted on the inner side of the box body, and a filter plate is movably mounted on the inner side of the box body.

[0018] Compared with the prior art, the present invention has the following beneficial effects: (1) The buffer spring is extended and retracted, and the buffer spring drives the buffer rod to move, and the buffer rod drives the first cleaning brush to move, thereby preventing the first cleaning brush from contacting the surface of the filter cartridge for a long time and causing damage to the first cleaning brush, thereby extending the service life of the first cleaning brush, and the sealing disk increases the sealing effect on the filter cartridge, thereby preventing leakage of the cleaning liquid; (2) By starting the stepper motor, the stepper motor drives the output shaft to rotate, and the output shaft drives the drive rod to drive the auger to rotate synchronously, and the auger is used to stably transmit the indium phosphide crystals in the filter cartridge, and the filter cartridge adopts a double-layer design, with a filter groove in the upper area and a closed design in the lower area, thereby achieving efficient impurity removal and separation of the indium phosphide crystals, and the cleaning liquid reacts with the indium phosphide crystals through the grooves opened in the filter cartridge, so that under the rotation of the special structure of the auger, the two are fully mixed, increasing the contact area between the indium phosphide crystals and the cleaning liquid, achieving the removal of impurities on the surface of the indium phosphide crystals, and improving the cleaning efficiency; (3) The connecting disc is driven to rotate by the driving rod, and the connecting disc drives the connecting rods on both sides to rotate synchronously. The connecting rod drives the buffer block to make the first cleaning brush clean the surface of the filter cartridge to prevent the removed impurities from accumulating on the surface of the filter cartridge and causing the filter cartridge to be blocked; (4) The fixed rod is driven to move by the rotation of the buffer block, and the fixed rod is fixedly connected to the limit block. The limit block drives the telescopic rod carrying the second cleaning brush to move, and the second cleaning brush is used to clean the impurities on the inner wall of the sealed box. The length of the second cleaning brush can be adjusted by the telescopic rod to avoid the second cleaning brush from generating friction on the inside of the sealed box for a long time, thereby preventing the second cleaning brush from being damaged; (5) Under the rotation of the auger, the indium phosphide crystals then flow into the closed area below the filter cartridge. A stirring roller is provided inside the closed area below the filter cartridge. The driving rod drives the rotating rod to rotate, and the rotating rod drives the stirring roller to rotate. The stirring roller rotates synchronously with the first cleaning brush and the second cleaning brush. The connection part between the stirring roller and the first cleaning brush and the filter cartridge adopts a rotary sealing design. The internal stirring roller is linked by the driving rod body and the disc that matches the filter cartridge. The internal cleaning liquid is stirred during the rotation, so that the cleaning liquid flushes the indium phosphide crystals through the slots of the filter cartridge, thereby improving the efficiency of impurity removal. The cleaned indium phosphide crystals fall onto the collecting plate along the circular grooves opened on the blanking plate. The scraper is driven by the driving rod to discharge the fallen indium phosphide crystals from the grooves, and the scraper is used to scrape off impurities on the surface of the blanking plate. (6) The collecting plate adopts a three-layer isolation design. The middle part is the storage chamber for the indium phosphide crystals after impurities are removed, and the baffles on both sides are sealed structures to prevent the indium phosphide crystals from mixing with the cleaning liquid and affecting the separation efficiency. The left and right sides are the impurity storage chambers that need to be filtered. The bottoms of both sides are provided with filter grooves, and when the scraper is matched with the groove of the discharge plate, the interior is sealed to prevent leakage of the cleaning liquid. The cleaned indium phosphide crystals can then be easily taken out through the handle of the collecting plate. The fallen cleaning liquid passes through the filter plate to filter the impurities in the cleaning liquid. Then, by starting the circulation pump, the cleaning liquid is recycled through the circulation pipe, saving resources. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1It is a schematic diagram of the overall structure of the present invention; Figure 2 This is a schematic diagram of the cross-sectional structure of the box body of the present invention; Figure 3 This is a schematic diagram of the cross-sectional structure of the sealing box of the present invention; Figure 4 This is a schematic diagram of the three-dimensional structure of the filter cartridge of the present invention; Figure 5 This is a schematic diagram of the three-dimensional structure of the auger of the present invention; Figure 6 This is a schematic diagram of the three-dimensional structure of the stirring roller of the present invention; Figure 7 This is a schematic diagram of the three-dimensional structure of the second cleaning brush of the present invention; Figure 8 This is a schematic diagram of the three-dimensional structure of the fixing rod of the present invention; Figure 9 Schematic diagram of the cross-sectional structure of the first cleaning brush of the present invention; Figure 10 It is a schematic diagram of the three-dimensional structure of the scraper of the present invention.

[0020] In the figure: 1. Box body; 2. Feed inlet; 3. Observation window; 4. Circulation pump; 5. Circulation pipe; 6. Sealing box; 7. Stepper motor; 8. Output shaft; 9. Drive rod; 10. Auger; 11. Filter cartridge; 12. Sealing disk; 13. Connecting disk; 14. Connecting rod; 15. Buffer block; 16. Buffer spring; 17. Buffer rod; 18. First cleaning brush; 19. Fixed rod; 20. Limit block; 21. Telescopic rod; 22. Second cleaning brush; 23. Rotating rod; 24. Stirring roller; 25. Scraper; 26. Unloading plate; 27. Collecting plate; 28. Filter plate; 29. Storage cylinder. DETAILED DESCRIPTION

[0021] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0022] Example 1: Please refer to Figures 1-10The present invention provides the following technical solution: an indium phosphide crystal growth and impurity removal device, comprising a box body 1, a feed port 2 is fixedly installed on the top of the box body 1, a circulation pump 4 is fixedly installed on the outer surface of the box body 1, a circulation pipe 5 is fixedly installed on the outer surface of the circulation pump 4, a sealing box 6 is fixedly installed on the outer surface of the circulation pipe 5, and a recycling filtering mechanism is provided between the box body 1 and the sealing box 6; a storage cylinder 29 is fixedly installed on the top of the box body 1, a sealing box 6 is fixedly installed on the inner end surface of the box body 1, a second cleaning brush 22 is movably abutted on the inner side surface of the sealing box 6, and a cleaning mechanism for preventing blockage is provided on the inner side surface of the box body 1; a sealing disk 12 is fixedly installed on the inner side surface of the box body 1, the sealing disk 12 is fixedly installed on the top of the filter cartridge 11, an auger 10 is movably installed on the inner side surface of the filter cartridge 11, and a impurity removal mechanism is provided between the box body 1 and the filter cartridge 11.

[0023] Indium phosphide crystals are injected into the sealed box 6 through the feed port 2, and the interior of the box 1 can be observed through the observation window 3, which makes it convenient for personnel to understand the status of impurities removal and facilitates personnel operation. The cleaning liquid is reused by the recycling filtering mechanism set between the box 1 and the sealed box 6. The filtered cleaning liquid is re-injected into the sealed box 6 through the circulation pipe 5 under the operation of the circulation pump 4, which reduces the loss of equipment. The second cleaning brush 22 is driven by the anti-clogging cleaning mechanism set between the second cleaning brush 22 and the storage cylinder 29 to clean the impurities on the inner wall of the sealed box 6 to avoid the accumulation of impurities affecting the efficiency of impurities removal. The length of the second cleaning brush 22 is easily adjusted by the telescopic rod 21 to avoid the second cleaning brush 22 from rubbing against the inside of the sealed box 6 for a long time, thereby extending the service life of the second cleaning brush 22.

[0024] Example 2: Based on Example 1, please refer to Figure 1-Figure 7 , a first cleaning brush 18 is also disclosed, and its specific structure is as follows: a stepper motor 7 is fixedly mounted on the top of the box body 1, and an output shaft 8 is rotatably mounted on the output end of the stepper motor 7, the output shaft 8 is movably mounted on the inner side of the sealing disk 12, and a driving rod 9 is fixedly mounted on the outer surface of the output shaft 8, and the impurity removal mechanism includes an auger 10, the auger 10 is fixedly mounted on the outer surface of the driving rod 9, a connecting disk 13 is fixedly mounted on the outer surface of the driving rod 9, and the driving rod 9 and the auger 10 form a rotating structure, connecting rods 14 are fixedly mounted on both sides of the connecting disk 13, a buffer block 15 is fixedly mounted on the top of the connecting rod 14, a buffer spring 16 is fixedly mounted on the inner side of the buffer block 15, a buffer rod 17 is fixedly mounted on the outer surface of the buffer spring 16, and the buffer spring 16 and the buffer rod 17 form a telescopic structure, the cleaning mechanism includes a first cleaning brush 18, the first cleaning brush 18 is fixedly mounted on the outer surface of the buffer rod 17, and the outer surface of the first cleaning brush 18 is movably abutted against the filter cartridge 11.

[0025] By starting the stepper motor 7, the stepper motor 7 drives the output shaft 8 to rotate, and the output shaft 8 drives the driving rod 9 to drive the auger 10 to rotate synchronously, and the auger 10 is used to stably transmit the indium phosphide crystals in the filter cartridge 11, and the filter cartridge 11 adopts a double-layer design, with a filter groove in the upper area and a closed design in the lower area, thereby achieving efficient impurity removal and separation of the indium phosphide crystals, and the cleaning liquid reacts with the indium phosphide crystals through the slots opened in the filter cartridge 11, so that under the rotation of the special structure of the auger 10, the two are fully mixed, increasing the contact area between the indium phosphide crystals and the cleaning liquid, achieving the removal of impurities on the surface of the indium phosphide crystals, and improving the cleaning efficiency, and through The driving rod 9 drives the connecting disk 13 to rotate, and the connecting disk 13 drives the connecting rods 14 on both sides to rotate synchronously. The connecting rod 14 drives the buffer block 15 to make the first cleaning brush 18 clean the surface of the filter cartridge 11 to prevent the removed impurities from accumulating on the surface of the filter cartridge 11 and causing the filter cartridge 11 to be blocked. The buffer spring 16 is extended and retracted, and the buffer spring 16 drives the buffer rod 17 to move, and the buffer rod 17 drives the first cleaning brush 18 to move, to prevent the first cleaning brush 18 from contacting the surface of the filter cartridge 11 for a long time and causing the first cleaning brush 18 to be damaged, thereby extending the service life of the first cleaning brush 18, and the sealing disk 12 increases the sealing effect of the filter cartridge 11 to prevent the cleaning fluid from leaking.

[0026] Example 3: Based on Example 1, please refer to Figure 2-Figure 10 , a scraper 25 is also disclosed, and its specific structure is as follows: a fixed rod 19 is fixedly installed on the outer surface of the buffer block 15, a limit block 20 is fixedly installed on the outer surface of the fixed rod 19, a telescopic rod 21 is movably installed on the outer surface of the limit block 20, and a second cleaning brush 22 is fixedly installed on the outer surface of the telescopic rod 21. The filtering mechanism includes a circulation pipe 5, the circulation pipe 5 is fixedly installed on the inner side surface of the box body 1, an observation window 3 is fixedly installed on the outer surface of the box body 1, and a collecting plate 27 is movably installed on the inner side surface of the box body 1, a rotating rod 23 is fixedly installed on the bottom surface of the driving rod 9, two sets of stirring rollers 24 are fixedly installed on the outer surface of the rotating rod 23, and the rotating rod 23 and the stirring roller 24 form a rotating structure, a scraper 25 is fixedly installed on the outer surface of the rotating rod 23, the scraper 25 movably abuts against the top end of the blanking plate 26, and the rotating rod 23 and the scraper 25 form a rotating structure, the blanking plate 26 is fixedly installed on the inner side surface of the box body 1, and a filter plate 28 is movably installed on the inner side surface of the box body 1.

[0027] The buffer block 15 is rotated to drive the fixed rod 19 to move, and the fixed rod 19 and the limit block 20 are fixedly connected. The limit block 20 drives the telescopic rod 21 carrying the second cleaning brush 22 to move, and the second cleaning brush 22 is used to clean the impurities on the inner wall of the sealing box 6. The telescopic rod 21 can adjust the length of the second cleaning brush 22 to prevent the second cleaning brush 22 from generating friction on the inside of the sealing box 6 for a long time, thereby causing damage to the second cleaning brush 22. Under the rotation of the auger 10, the indium phosphide crystals then flow into the closed area below the filter cartridge 11. A stirring roller 24 is provided inside the closed area below the filter cartridge 11, and the rotating rod 23 is driven to rotate by the driving rod 9. The rotating rod 23 drives the stirring roller 24 to rotate. The stirring roller 24 rotates synchronously with the first cleaning brush 18 and the second cleaning brush 22, and the connection part between the stirring roller 24 and the first cleaning brush 18 and the filter cartridge 11 adopts a rotary sealing design, and the internal stirring roller 24 is linked by the driven rod body and the disc that matches the filter cartridge 11, and the internal cleaning liquid is cleaned during rotation. Stirring is performed to achieve the cleaning liquid to flush the indium phosphide crystals through the slots of the filter cartridge 11, thereby improving the efficiency of impurity removal, and the cleaned indium phosphide crystals fall onto the collecting plate 27 along the circular grooves opened on the blanking plate 26, and the scraper 25 is driven by the driving rod 9 to discharge the fallen cleaning liquid from the groove, and the scraper 25 is used to scrape the impurities on the surface of the blanking plate 26, and the collecting plate 27 adopts a three-layer isolation design, the middle part of which is the storage chamber for the indium phosphide crystals after impurity removal, and the baffles on both sides are sealed structures to avoid In order to prevent the indium phosphide crystals from mixing with the cleaning liquid and affecting the separation efficiency, the left and right sides are storage cavities for impurities that need to be filtered, and filter grooves are set at the bottom of both sides. When the scraper 25 is matched with the groove of the blanking plate 26, the interior is sealed to prevent leakage of the cleaning liquid. Then, the cleaned indium phosphide crystals can be conveniently taken out through the handle of the collecting plate 27. The fallen cleaning liquid passes through the filter plate 28 to filter the impurities in the cleaning liquid. Then, by starting the circulation pump 4, the cleaning liquid is recycled through the circulation pipe 5, saving resources.

[0028] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "connected" and "connection" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; and direct connections or indirect connections through an intermediary. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on the specific circumstances.

[0029] Although the present invention has been described in detail with reference to the aforementioned embodiments, it is still possible for those skilled in the art to modify the technical solutions described in the aforementioned embodiments, or to make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. An indium phosphide crystal growth and impurity removal device, comprising a box (1), a feed port (2) fixedly mounted on the top of the box (1), characterized in that: A circulation pump (4) is fixedly mounted on the outer surface of the box (1), a circulation pipe (5) is fixedly mounted on the outer surface of the circulation pump (4), a sealing box (6) is fixedly mounted on the outer surface of the circulation pipe (5), and a recycling filter mechanism is provided between the box (1) and the sealing box (6); A storage cylinder (29) is fixedly mounted on the top end of the box body (1), a sealing box (6) is fixedly mounted on the inner end surface of the box body (1), a second cleaning brush (22) is movably abutted against the inner side surface of the sealing box (6), and a cleaning mechanism for preventing clogging is provided on the inner side surface of the box body (1); A sealing disc (12) is fixedly mounted on the inner side of the box (1), the sealing disc (12) is fixedly mounted on the top of the filter cartridge (11), an auger (10) is movably mounted on the inner side of the filter cartridge (11), and a debris removal mechanism is provided between the box (1) and the filter cartridge (11).

2. The device for removing impurities from indium phosphide crystal growth according to claim 1, characterized in that: A stepper motor (7) is fixedly mounted on the top of the box body (1), an output shaft (8) is rotatably mounted on the output end of the stepper motor (7), the output shaft (8) is movably mounted on the inner side of the sealing disk (12), and a driving rod (9) is fixedly mounted on the outer surface of the output shaft (8).

3. The indium phosphide crystal growth and impurity removal device according to claim 1, characterized in that: The impurity removal mechanism comprises an auger (10), wherein the auger (10) is fixedly mounted on the outer surface of a driving rod (9), a connecting disc (13) is fixedly mounted on the outer surface of the driving rod (9), and the driving rod (9) and the auger (10) form a rotating structure.

4. The device for removing impurities from indium phosphide crystal growth according to claim 3, characterized in that: Connecting rods (14) are fixedly mounted on both sides of the connecting disk (13), a buffer block (15) is fixedly mounted on the top of the connecting rod (14), a buffer spring (16) is fixedly mounted on the inner side of the buffer block (15), a buffer rod (17) is fixedly mounted on the outer surface of the buffer spring (16), and the buffer spring (16) and the buffer rod (17) form a telescopic structure.

5. The device for removing impurities from indium phosphide crystal growth according to claim 1, characterized in that: The cleaning mechanism comprises a first cleaning brush (18), the first cleaning brush (18) being fixedly mounted on the outer surface of the buffer rod (17), and the outer surface of the first cleaning brush (18) being movably in contact with the filter cartridge (11).

6. The device for removing impurities from indium phosphide crystal growth according to claim 4, characterized in that: A fixing rod (19) is fixedly mounted on the outer surface of the buffer block (15), a limit block (20) is fixedly mounted on the outer surface of the fixing rod (19), a telescopic rod (21) is movably mounted on the outer surface of the limit block (20), and a second cleaning brush (22) is fixedly mounted on the outer surface of the telescopic rod (21).

7. The device for removing impurities from indium phosphide crystal growth according to claim 1, characterized in that: The filtering mechanism comprises a circulation pipe (5), the circulation pipe (5) being fixedly mounted on the inner side of the box body (1), an observation window (3) being fixedly mounted on the outer surface of the box body (1), and a collecting plate (27) being movably mounted on the inner side of the box body (1).

8. The device for removing impurities from indium phosphide crystal growth according to claim 3, characterized in that: A rotating rod (23) is fixedly mounted on the bottom surface of the driving rod (9), two sets of stirring rollers (24) are fixedly mounted on the outer surface of the rotating rod (23), and the rotating rod (23) and the stirring rollers (24) form a rotating structure.

9. The device for removing impurities from indium phosphide crystal growth according to claim 8, characterized in that: A scraper (25) is fixedly mounted on the outer surface of the rotating rod (23), and the scraper (25) is movably abutted against the top end of the blanking plate (26), and the rotating rod (23) and the scraper (25) form a rotating structure.

10. The device for removing impurities from indium phosphide crystal growth according to claim 9, characterized in that: The blanking plate (26) is fixedly mounted on the inner side of the box body (1), and a filter plate (28) is movably mounted on the inner side of the box body (1).

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