Leveling and focusing sensor and adjustment method and adjustment tool thereof

Abstract

The invention provides a leveling and focusing sensor and an adjusting method and an adjusting tool thereof, and relates to the field of semiconductor manufacturing. The installation and adjustment method comprises the steps that a reflector tool with a first mark is installed at the position where a silicon wafer should be located, a projection grating of the projection module is provided with a second mark, and a detection grating of the detection module is provided with a third mark corresponding to the first mark, a fourth mark corresponding to the second mark and a fifth mark corresponding to a sixth mark of the light splitting module; enabling the light source module to pass light, installing a first camera tool at an input interface of the light splitting module, and sequentially adjusting the poses of the detection grating and the projection grating through the visual field of a first camera; dismounting the first camera tool; a second camera tool is installed at an output interface of the light splitting module, and the pose of the light splitting module is adjusted through the view field of a second camera; all tools are dismounted, and a data processing module is installed and connected. According to the installation and adjustment method, the installation and adjustment precision of the sensor is improved by utilizing the view field of the camera and different alignment marks.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor manufacturing, and in particular to a leveling and focusing sensor, an assembly method thereof, and an assembly tool. Background Art

[0002] In projection lithography technology for very large integrated circuit manufacturing, leveling and focusing sensors are typically used to detect the position of the silicon wafer in the exposure field, determine whether the silicon wafer is defocused or tilted relative to the focal plane of the objective lens, and based on the detection information, precisely control the workpiece stage to place the silicon wafer in the optimal lithography area.

[0003] The optical principles of the leveling and focusing sensor involve optical triangulation, Moiré fringe method, and optical differential technology based on spatial spectroscopy. A photoelectric detection scheme based on a CCD image sensor is applied at the optical path terminal of the system. According to the positional relationship of the image of the measured light spot projected on the photodetector, the defocus amount of the silicon wafer relative to the system zero position is detected to achieve focal plane control. Therefore, the optical path adjustment and calibration of the leveling and focusing sensor are relatively difficult and the accuracy is relatively low.

[0004] However, with the continuous improvement of semiconductor manufacturing precision, the optical path adjustment and calibration of the leveling and focusing sensor need to be more precise. Therefore, a leveling and focusing sensor installation and adjustment method is urgently needed to solve the above problems. Summary of the Invention

[0005] The first object of the present invention is to provide a method for assembling and adjusting a leveling and focusing sensor, so as to solve the technical problem of relatively low assembly and adjustment accuracy of the leveling and focusing sensor existing in the prior art.

[0006] The method for assembling and adjusting a leveling and focusing sensor provided by the present invention comprises the following steps:

[0007] Install the light source module, optical fiber, lighting module, projection module, detection module, and spectrometer module of the leveling and focusing sensor to the measurement frame, and install the calibrated reflector tooling to the silicon wafer in the required position; the reflective surface of the reflector tooling has a first mark; the projection module includes a projection grating, and the projection grating has a second mark; the detection module includes a detection grating, and the detection grating has a third mark, a fourth mark, and a fifth mark. When the third mark coincides with the first mark, the detection module is adjusted into position; when the second mark coincides with the fourth mark, the projection grating is adjusted into position;

[0008] Allow light to pass through the light source module, install a first camera fixture at the input interface of the spectroscopic module, the first camera fixture including a first camera, and adjust the posture of the detection grating through the field of view of the first camera so that the third mark coincides with the first mark, and adjust the posture of the projection grating so that the second mark coincides with the fourth mark;

[0009] Remove the first camera fixture; before adjusting the position of the spectroscopic module, install a second camera fixture on the output interface of the spectroscopic module; the second camera fixture includes a second camera and an aperture, the aperture having a sixth mark, and the spectroscopic module is adjusted into position when the sixth mark coincides with the fifth mark; adjust the position of the spectroscopic module through the field of view of the second camera so that the sixth mark coincides with the fifth mark;

[0010] The second camera tooling and the reflector tooling are removed, and a data processing module of the leveling and focusing sensor is connected to the output interface of the spectroscopic module. The data processing module is used to process the information transmitted by the spectroscopic module to determine the position of the silicon wafer.

[0011] Furthermore, the first camera is a CCD camera, and / or the second camera is a CCD camera.

[0012] Furthermore, the step of adjusting the position of the detection grating and making the third mark coincide with the first mark includes: firstly coarsely adjusting the position of the detection grating and making the third mark coincide with the first mark, then increasing the magnification of the first camera, and finely adjusting the position of the detection grating and making the third mark coincide with the first mark;

[0013] And / or, the step of adjusting the posture of the projection grating and making the second mark coincide with the fourth mark includes: first coarsely adjusting the posture of the projection grating and making the second mark coincide with the fourth mark, then increasing the magnification of the first camera, and finely adjusting the posture of the projection grating and making the second mark coincide with the fourth mark.

[0014] Furthermore, the step of adjusting the posture of the detection grating and making the third mark coincide with the first mark, and adjusting the posture of the projection grating and making the second mark coincide with the fourth mark through the field of view of the first camera includes:

[0015] First, roughly adjusting the position of the detection grating so that the third mark coincides with the first mark, and roughly adjusting the position of the projection grating so that the second mark coincides with the fourth mark;

[0016] Then, the magnification of the first camera is increased, the position of the detection grating is fine-tuned and the third mark is made to coincide with the first mark, and the position of the projection grating is fine-tuned and the second mark is made to coincide with the fourth mark.

[0017] Furthermore, the step of adjusting the posture of the spectroscopic module and making the sixth mark coincide with the fifth mark includes: first coarsely adjusting the posture of the spectroscopic module and making the sixth mark coincide with the fifth mark, then increasing the magnification of the second camera, and finely adjusting the posture of the spectroscopic module and making the sixth mark coincide with the fifth mark.

[0018] The method for assembling and adjusting a leveling and focusing sensor provided by the present invention can produce the following beneficial effects:

[0019] The method for assembling and adjusting a leveling and focusing sensor provided by the present invention first installs the optical-mechanical module of the applicable leveling and focusing sensor except the data processing module to the measuring frame, and also installs the reflector tooling to the position where the silicon wafer should be, so as to replace the silicon wafer in the assembly stage; then, the input interface and output interface of the spectrometer module are fully utilized, and a first camera tooling is installed at the input interface, and a second camera tooling is installed at the output interface. First, the field of view of the first camera is used to adjust the position of the detection grating with the first mark of the reflector tooling as a reference; then, the position of the projection grating is adjusted with the fourth mark of the detection module as a reference, and after removing the first camera tooling, the position of the spectrometer module is adjusted with the fifth mark of the detection module as a reference; finally, the second camera tooling and the reflector tooling are removed, and the data processing module is installed in place. Among them, the first camera tooling and the second camera tooling introduced in the method for assembling and adjusting a leveling and focusing sensor provided by the present invention fully utilize the input interface and output interface of the spectrometer module, and provide a clear and accurate field of view for the adjustment of each module through the first camera and the second camera, so that the assembly and adjustment accuracy of each module is higher. Furthermore, the detection module's detection grating uses different markings for different alignment steps, significantly reducing the operator's misjudgment of non-essential markings within the camera's field of view, further ensuring alignment accuracy. Furthermore, the alignment tooling used in the alignment method provided by the present invention is installed only near the silicon wafer and the spectrometer module, requiring minimal space and therefore suitable for a wide range of applications.

[0020] A second object of the present invention is to provide a leveling and focusing sensor to solve the technical problem of relatively low installation and adjustment accuracy of leveling and focusing sensors in the prior art.

[0021] The leveling and focusing sensor provided by the present invention can be installed and adjusted using the above-mentioned leveling and focusing sensor installation method. The leveling and focusing sensor includes the light source module, the optical fiber, the lighting module, the projection module, the detection module, the spectroscopic module and the data processing module. The projection module includes the projection grating, and the projection grating has the second mark; the detection module includes the detection grating, and the detection grating has the third mark, the fourth mark and the fifth mark. The third mark is set to correspond to the first mark of the reflector tooling, and the two are used together to adjust the posture of the detection grating; the fourth mark is set to correspond to the second mark, and the two are used together to adjust the posture of the projection grating; the fifth mark is set to correspond to the sixth mark of the aperture of the second camera tooling, and the two are used together to adjust the posture of the spectroscopic module.

[0022] Furthermore, along the first straight line direction, the third mark, the fourth mark and the fifth mark are arranged at intervals, and the third mark and the fifth mark are respectively arranged on two opposite sides of the fourth mark.

[0023] Furthermore, the first mark, the second mark, the third mark, the fourth mark, the fifth mark and the sixth mark each include two "cross" marks, and the two "cross" marks are spaced apart along a second straight line direction, and the second straight line direction is perpendicular to the first straight line direction.

[0024] Furthermore, one of the third mark and the first mark has a hollow structure along the second straight line, and the other has a hollow structure along the first straight line.

[0025] And / or, one of the fourth mark and the second mark is a solid cross, and the other is a hollow cross;

[0026] And / or, one of the fifth mark and the sixth mark is a solid cross, and the other is a hollow cross.

[0027] The leveling and focusing sensor provided by the present invention can be installed and adjusted using the above-mentioned leveling and focusing sensor installation and adjustment method, so the installation and adjustment accuracy is relatively high.

[0028] The third object of the present invention is to provide a leveling and focusing sensor installation and adjustment tool to solve the technical problem of relatively low installation and adjustment accuracy of the leveling and focusing sensor in the prior art.

[0029] The leveling and focusing sensor assembly tool provided by the present invention can use the above-mentioned leveling and focusing sensor assembly method to assemble the above-mentioned leveling and focusing sensor. The leveling and focusing sensor assembly tool includes the reflector tool, the first camera tool and the second camera tool. The reflective surface of the reflector tool has the first mark and is used to replace the silicon wafer during assembly; the first camera tool includes the first camera, and the first camera tool is used to adjust the position of the detection grating and the projection grating; the second camera includes the second camera and the diaphragm, and the diaphragm has the sixth mark. The second camera tool is used to adjust the position of the spectroscopic module.

[0030] The leveling and focusing sensor assembly tool provided by the present invention can use the above-mentioned leveling and focusing sensor assembly method to assemble the above-mentioned leveling and focusing sensor, so it has all the advantages of the above-mentioned assembly method. Moreover, the assembly tool provided by the present invention is only installed at the position of the silicon wafer and near the spectrometer module, and has relatively small space requirements, so it is applicable to more occasions. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are merely embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying any creative work.

[0032] Figure 1 A schematic block diagram of the structure of a leveling and focusing sensor provided by an embodiment of the present invention;

[0033] Figure 2 A schematic block diagram of the structure of a leveling and focusing sensor mounting fixture provided by an embodiment of the present invention installed on a leveling and focusing sensor provided by an embodiment of the present invention;

[0034] Figure 3 A flowchart of a method for assembling and adjusting a leveling and focusing sensor according to an embodiment of the present invention;

[0035] Figure 4 A schematic diagram of a second mark on a projection grating in a leveling and focusing sensor provided in an embodiment of the present invention;

[0036] Figure 5 A schematic diagram of various marks on a detection grating in a leveling and focusing sensor provided in an embodiment of the present invention;

[0037] Figure 6 A schematic diagram of markings on the reflective surface of a reflector fixture in a leveling and focusing sensor assembly fixture provided by an embodiment of the present invention;

[0038] Figure 7 A schematic diagram of a mark on the aperture of a second camera tool in a leveling and focusing sensor assembly tool provided by an embodiment of the present invention;

[0039] Figure 8 This is a schematic diagram corresponding to various marks in the leveling and focusing sensor installation method provided by an embodiment of the present invention.

[0040] Description of reference numerals:

[0041] 110 - light source module; 120 - optical fiber; 130 - illumination module; 140 - projection module; 141 - projection grating; 142 - projection bi-telecentric lens; 143 - second marker; 150 - detection module; 151 - detection grating; 152 - detection bi-telecentric lens; 153 - third marker; 154 - fourth marker; 155 - fifth marker; 160 - spectrometer module; 170 - data processing module; 171 - photodetector;

[0042] 210 - reflector tooling; 211 - first marker; 220 - first camera tooling; 230 - second camera tooling; 231 - sixth marker;

[0043] 300-silicon wafer;

[0044] 400-Measurement Frame. DETAILED DESCRIPTION

[0045] In order to make the above-mentioned objects, features and advantages of the present invention more clearly understood, the following detailed description of the specific embodiments of the present invention is given in conjunction with the accompanying drawings. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0046] This embodiment provides a method for assembling a leveling and focusing sensor, a leveling and focusing sensor capable of being assembled and adjusted using the aforementioned method, and a leveling and focusing sensor assembly tool capable of assembling and adjusting the aforementioned leveling and focusing sensor using the aforementioned method. The following first describes the leveling and focusing sensor and its assembly tool provided by this embodiment, followed by an introduction to the assembly method for assembling the sensor using the assembly tool.

[0047] Figure 1 FIG. 1 shows a schematic structural block diagram of the leveling and focusing sensor provided in this embodiment. Figure 1 As shown, combined with Figures 4 to 8The leveling and focusing sensor provided in this embodiment includes, along the optical path direction, a light source module 110, an optical fiber 120, an illumination module 130, a projection module 140, a detection module 150, a spectrometer module 160, and a data processing module 170. The projection module 140 includes a projection grating 141, and the projection grating 141 has a second mark 143; the detection module 150 includes a detection grating 151, and the detection grating 151 has a third mark 153, a fourth mark 154, and a fifth mark 155. The third mark 153 is set corresponding to the first mark 211 of the reflector tooling 210, and the two are used together to adjust the posture of the detection grating 151. The third mark 153 and the first mark 211 are respectively used to adjust the posture of the detection grating 151. 11 coincides, the detection grating 151 is adjusted into place; the fourth mark 154 is set corresponding to the second mark 143, and the two are used together to adjust the posture of the projection grating 141. When the second mark 143 coincides with the fourth mark 154, the projection grating 141 is adjusted into place; the fifth mark 155 is set corresponding to the sixth mark 231 of the aperture of the second camera tooling 230, and the two are used together to adjust the posture of the spectrometer module 160. When the sixth mark 231 coincides with the fifth mark 155, the spectrometer module 160 is adjusted into place; the data processing module 170 includes a photodetector 171, and the data processing module 170 is used to process the information transmitted by the spectrometer module 160 to determine the posture of the silicon wafer 300.

[0048] In the leveling and focusing sensor provided in this embodiment, the projection module 140, the detection module 150, and the spectrometer module 160 all have alignment marks, and the detection module 150 has three marks. During assembly and adjustment, the position of the detection grating 151 can be adjusted based on the first mark 211 of the reflector tooling 210, and the third mark 153 of the detection grating 151 can be made to coincide with the first mark 211; then, the position of the projection grating 141 can be adjusted based on the fourth mark 154 of the detection grating 151, and the second mark 143 of the projection module 140 can be made to coincide with the fourth mark 154 of the detection grating 151; finally, the position of the spectrometer module 160 can be adjusted based on the fifth mark 155 of the detection grating 151, and the sixth mark 231 of the spectrometer module 160 can be made to coincide with the fifth mark 155 of the detection grating 151. That is, the leveling and focusing sensor provided in this embodiment uses different marks on the detection grating 151 of the detection module 150 for different alignment steps, which greatly reduces the operator's misjudgment of unnecessary marks in the step in the camera's field of view, thereby ensuring the installation accuracy.

[0049] Of course, in this embodiment, the optical splitting module 160 has an input interface and an output interface, which are the same as those in the prior art, so they will not be described in detail here.

[0050] In addition, in this embodiment, Figure 1As shown, the projection module 140 includes a projection bi-telecentric lens 142, and the detection module 150 includes a detection bi-telecentric lens 152, which are used to ensure that the image is clear and large during long-distance transmission.

[0051] Specifically, in this embodiment, Figure 5 As shown, along the first straight line direction (the direction indicated by arrows ab), the third mark 153, the fourth mark 154, and the fifth mark 155 are spaced apart, and the third mark 153 and the fifth mark 155 are respectively located on opposite sides of the fourth mark 154. In this arrangement, during alignment, the mark located in the middle along the first straight line direction is first aligned with the first mark 211 of the reflector fixture 210. Of course, in other embodiments of the present application, the placement of the above marks is not limited to the above-mentioned orientation, as long as it is easy to remember and not confusing.

[0052] Specifically, in this embodiment, Figures 4 to 8 As shown, the first mark 211, the second mark 143, the third mark 153, the fourth mark 154, the fifth mark 155 and the sixth mark 231 all include two "cross" marks, and the two "cross" marks are spaced apart along the second straight line direction (the direction indicated by the arrow cd), and the second straight line direction is perpendicular to the first straight line direction.

[0053] Specifically, in this embodiment, Figure 5 、 Figure 6 and Figure 8 As shown, the third mark 153 is a hollow structure along the second straight line direction, and the first mark 211 is a hollow structure along the first straight line direction. Of course, in other embodiments of the present application, the shapes of the first mark 211 and the third mark 153 can be swapped.

[0054] Specifically, in this embodiment, Figure 4 、 Figure 5 and Figure 8 As shown, the fourth mark 154 is a solid cross and the second mark 143 is a hollow cross. Of course, in other embodiments of the present application, the shapes of the fourth mark 154 and the second mark 143 can also be swapped.

[0055] Specifically, in this embodiment, Figure 5 、 Figure 7 and Figure 8 As shown, the fifth mark 155 is a solid cross, and the sixth mark 231 is a hollow cross. Of course, in other embodiments of the present application, the shapes of the fifth mark 155 and the sixth mark 231 can also be reversed.

[0056] Next, the leveling and focusing sensor installation and adjustment tool provided by this embodiment is introduced for use in installing and adjusting the leveling and focusing sensor.

[0057] Figure 2 A structural schematic block diagram showing the installation tooling for the leveling and focusing sensor provided in this embodiment is installed on the leveling and focusing sensor provided in this embodiment.

[0058] like Figure 2 As shown, combined with Figure 6 、 Figure 7 and Figure 8 The leveling and focusing sensor assembly tool provided in this embodiment includes a reflector tool 210, a first camera tool 220, and a second camera tool 230. The reflective surface of the reflector tool 210 has a first mark 211, which is used to replace the silicon wafer 300 during assembly. The first camera tool 220 includes a first camera, which is used to adjust the position of the detection grating 151 and the projection grating 141. The second camera tool includes a second camera and an aperture, which has a sixth mark 231. The second camera tool 230 is used to adjust the position of the spectrometer module 160. The leveling and focusing sensor assembly tool provided in this embodiment can be used to assemble the leveling and focusing sensor using the above-mentioned leveling and focusing sensor assembly method, thereby possessing all the advantages of the above-mentioned assembly method. Furthermore, the assembly tool provided in this embodiment is installed only at the position of the silicon wafer 300 and near the spectrometer module 160, requiring relatively little space and therefore being applicable in a wide range of situations.

[0059] It should be noted that in this embodiment, the reflector assembly 210 is identical to the existing assembly used to replace the silicon wafer 300 and is therefore not described in detail here. The first camera assembly 220, in addition to the first camera, also includes a connector capable of connecting to the input interface of the spectrometer module 160 and an image acquisition and processing module. The second camera assembly 230, in addition to the second camera and the aperture, also includes a connector capable of connecting to the output interface of the spectrometer module 160 and an image acquisition and processing module. These connectors and image acquisition and processing modules are also well-established technologies and are not described here in detail here.

[0060] Next, an online adjustment method for adjusting the leveling and focusing sensor using the above-mentioned adjustment tooling is introduced.

[0061] Figure 3 FIG. 1 shows a flow chart of the method for assembling and adjusting the leveling and focusing sensor provided in this embodiment. Figure 3 As shown, combined with Figure 2 as well as Figures 4 to 8 The leveling and focusing sensor installation method provided in this embodiment includes the following steps:

[0062] At step S100 , the light source module 110, optical fiber 120, illumination module 130, projection module 140, detection module 150, and spectrometer module 160 of the leveling and focusing sensor are installed on the measurement frame 400 . The calibrated reflector fixture 210 is then installed in the desired position on the silicon wafer 300 . The measurement frame 400 is the actual mounting frame for the leveling and focusing sensor.

[0063] S200, make the light source module 110 pass light, install the first camera tooling 220 at the input interface of the spectrometer module 160, adjust the posture of the detection grating 151 through the field of view of the first camera and make the third mark 153 coincide with the first mark 211, adjust the posture of the projection grating 141 and make the second mark 143 coincide with the fourth mark 154.

[0064] Specifically, in this embodiment, the steps of adjusting the posture of the detection grating 151 so that the third marker 153 coincides with the first marker 211 and adjusting the posture of the projection grating 141 so that the second marker 143 coincides with the fourth marker 154 through the field of view of the first camera include:

[0065] S210 , roughly adjusting the position of the detection grating 151 so that the third marker 153 coincides with the first marker 211 ;

[0066] S220 , roughly adjusting the position of the projection grating 141 so that the second mark 143 and the fourth mark 154 coincide with each other;

[0067] S230, increasing the magnification of the first camera;

[0068] S240 , fine-tuning the position of the detection grating 151 so that the third mark 153 coincides with the first mark 211 ;

[0069] S250 , fine-tuning the position of the projection grating 141 and making the second mark 143 coincide with the fourth mark 154 .

[0070] In the case of coarse adjustment, the magnification of the first camera can be selected as 1, and in the case of fine adjustment, the magnification of the first camera can be adjusted to 6. Of course, other magnifications can be selected according to needs during both coarse adjustment and fine adjustment.

[0071] S300, remove the first camera tooling 220; before adjusting the posture of the spectroscopic module 160, install the second camera tooling 230 on the output interface of the spectroscopic module 160; adjust the posture of the spectroscopic module 160 through the field of view of the second camera and make the sixth mark 231 coincide with the fifth mark 155.

[0072] Specifically, in this embodiment, the step of adjusting the position of the spectroscopic module 160 so that the sixth marker 231 coincides with the fifth marker 155 includes: first, coarsely adjusting the position of the spectroscopic module 160 so that the sixth marker 231 coincides with the fifth marker 155; then, increasing the magnification of the second camera; and finally, finely adjusting the position of the spectroscopic module 160 so that the sixth marker 231 coincides with the fifth marker 155. During coarse adjustment, the magnification of the second camera can be set to 1x, while during fine adjustment, the magnification of the second camera can be adjusted to 6x. Of course, other magnifications can be selected for both coarse and fine adjustment as needed.

[0073] S400 , dismantling the second camera fixture 230 and the reflector fixture 210 , and connecting the data processing module 170 of the leveling and focusing sensor to the output interface of the light splitting module 160 .

[0074] The method for assembling and adjusting a leveling and focusing sensor provided in this embodiment first installs the optical-mechanical module of the applicable leveling and focusing sensor except the data processing module 170 onto the measuring frame 400, and also installs the reflector fixture 210 onto the position where the silicon wafer 300 should be located, so as to replace the silicon wafer 300 during the assembly and adjustment stage; then, the input interface and output interface of the spectrometer module 160 are fully utilized, and the first camera fixture 220 is installed at the input interface, and the second camera fixture 230 is installed at the output interface; first, the field of view of the first camera is used to adjust the position of the detection grating 151 with the first mark 211 of the reflector fixture 210 as a reference; then, the position of the projection grating 141 is adjusted with the fourth mark 154 of the detection module 150 as a reference, and after removing the first camera fixture 220, the position of the spectrometer module 160 is adjusted with the fifth mark 155 of the detection module 150 as a reference; finally, the second camera fixture 230 and the reflector fixture 210 are removed, and the data processing module 170 is installed in place.

[0075] The leveling and focusing sensor assembly method provided in this embodiment fully utilizes the input and output interfaces of the spectrometer module 160, introduces a first camera fixture 220 and a second camera fixture 230, and provides a clear and accurate field of view for the adjustment of each module through the first and second cameras. This allows the operator to intuitively and conveniently obtain the error between the markings within the camera's field of view and accurately align the corresponding markings within the camera's field of view, thereby achieving higher assembly accuracy for each module. Furthermore, the detection grating 151 of the detection module 150 utilizes different markings for different alignment steps, greatly reducing the operator's misjudgment of non-required markings within the camera's field of view for the step in question, further ensuring assembly accuracy. Furthermore, the assembly fixture used in the assembly method provided in this embodiment is installed only at the location of the silicon wafer 300 and near the spectrometer module 160, requiring relatively little space and therefore being applicable in a wide range of applications.

[0076] It should be noted that, although in the present embodiment, the detection grating 151 and the projection grating 141 are first coarsely adjusted in sequence, and then the detection grating 151 and the projection grating 141 are finely adjusted in sequence, in other embodiments of the present application, the above-mentioned step of adjusting the posture of the detection grating 151 and making the third mark 153 coincide with the first mark 211 may also include: first coarsely adjusting the posture of the detection grating 151 and making the third mark 153 coincide with the first mark 211, and then increasing the magnification of the first camera, and fine-tuning the posture of the detection grating 151 and making the third mark 153 coincide with the first mark 211; the step of adjusting the posture of the projection grating 141 and making the second mark 143 coincide with the fourth mark 154 may also include: first coarsely adjusting the posture of the projection grating 141 and making the second mark 143 coincide with the fourth mark 154, and then increasing the magnification of the first camera, and fine-tuning the posture of the projection grating 141 and making the second mark 143 coincide with the fourth mark 154. In other words, in other embodiments of the present application, the detection grating 151 can be coarsely adjusted first, the detection grating 151 can be finely adjusted, and then the projection grating 141 can be coarsely adjusted, and then the projection grating 141 can be finely adjusted. That is, after adjusting the detection grating 151 to be accurately in place, the projection grating 141 can be adjusted to be accurately in place.

[0077] Specifically, in this embodiment, both the first camera and the second camera are CCD cameras. Of course, in other embodiments of the present application, the first camera and the second camera may also be other types of cameras, and the types of the two cameras may be different. For example, the first camera is a CCD camera, while the second camera is another type of camera. That is, as long as the first camera and the second camera can provide a clear field of view and meet the alignment accuracy requirements, the present application does not impose any restrictions on the specific camera types.

[0078] It should also be noted that the first camera and the second camera are not limited to ordinary cameras, but also include software with imaging functions, as long as they can provide a clear field of view that meets the accuracy requirements.

[0079] Finally, it should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "include," "comprise," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that includes a list of elements includes not only those elements but also other elements not explicitly listed, or elements inherent to such process, method, article, or apparatus.

[0080] The above description of the disclosed embodiments is intended to enable one skilled in the art to implement or use the present invention. Various modifications to the embodiments will be readily apparent to one skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not limited to the embodiments shown herein but is to be construed in the widest manner consistent with the principles and novel features disclosed herein.

Claims

1. A method for assembling and adjusting a leveling and focusing sensor, characterized in that: The steps include: The light source module (110), optical fiber (120), lighting module (130), projection module (140), detection module (150), and spectrometer module (160) of the leveling and focusing sensor are mounted on a measurement frame (400), and a reflector fixture (210) having a first mark (211) is mounted on a silicon wafer (300) at a desired position; the projection module (140) includes a projection grating (141) having a second mark (143); the detection module (150) includes a detection grating (151), and the detection grating (151) has a third mark (153), a fourth mark (154), and a fifth mark (155); The light source module (110) is allowed to pass light, and a first camera tool (220) is installed at the input interface of the spectroscopic module (160), wherein the first camera tool (220) includes a first camera. Through the field of view of the first camera, the position of the detection grating (151) is adjusted so that the third mark (153) and the first mark (211) coincide with each other, and the position of the projection grating (141) is adjusted so that the second mark (143) and the fourth mark (154) coincide with each other; The first camera tooling (220) is removed; a second camera tooling (230) is installed at the output interface of the spectroscopic module (160); the second camera tooling (230) includes a second camera and an aperture having a sixth mark (231); and the posture of the spectroscopic module (160) is adjusted through the field of view of the second camera so that the sixth mark (231) and the fifth mark (155) coincide with each other; The second camera tooling (230) and the reflector tooling (210) are removed, and the data processing module (170) of the leveling and focusing sensor is connected to the output interface of the light splitting module (160).

2. The method for assembling and adjusting a leveling and focusing sensor according to claim 1, wherein: The step of adjusting the position of the detection grating (151) and making the third mark (153) coincide with the first mark (211) comprises: firstly roughly adjusting the position of the detection grating (151) and making the third mark (153) coincide with the first mark (211), then increasing the magnification of the first camera, and finely adjusting the position of the detection grating (151) and making the third mark (153) coincide with the first mark (211); And / or, the step of adjusting the position of the projection grating (141) and making the second mark (143) coincide with the fourth mark (154) comprises: firstly coarsely adjusting the position of the projection grating (141) and making the second mark (143) coincide with the fourth mark (154), then increasing the magnification of the first camera, finely adjusting the position of the projection grating (141) and making the second mark (143) coincide with the fourth mark (154).

3. The method for assembling and adjusting a leveling and focusing sensor according to claim 1, wherein: The steps of adjusting the position of the detection grating (151) and making the third mark (153) coincide with the first mark (211) through the field of view of the first camera, and adjusting the position of the projection grating (141) and making the second mark (143) coincide with the fourth mark (154) include: First, the position of the detection grating (151) is roughly adjusted to make the third mark (153) coincide with the first mark (211), and the position of the projection grating (141) is roughly adjusted to make the second mark (143) coincide with the fourth mark (154); The magnification of the first camera is then increased, the position of the detection grating (151) is finely adjusted so that the third mark (153) and the first mark (211) coincide with each other, and the position of the projection grating (141) is finely adjusted so that the second mark (143) and the fourth mark (154) coincide with each other.

4. The method for assembling and adjusting a leveling and focusing sensor according to claim 1, wherein: The step of adjusting the position of the spectroscopic module (160) and making the sixth mark (231) coincide with the fifth mark (155) comprises: firstly coarsely adjusting the position of the spectroscopic module (160) and making the sixth mark (231) coincide with the fifth mark (155), then increasing the magnification of the second camera, and finely adjusting the position of the spectroscopic module (160) and making the sixth mark (231) coincide with the fifth mark (155).

5. A leveling and focusing sensor, characterized in that: The leveling and focusing sensor can be adjusted using the leveling and focusing sensor adjustment method described in any one of claims 1 to 4, wherein the leveling and focusing sensor comprises the light source module (110), the optical fiber (120), the lighting module (130), the projection module (140), the detection module (150), the spectroscopic module (160) and the data processing module (170), wherein the projection module (140) comprises the projection grating (141), and the projection grating (141) has the second mark (143); and the detection module (150) comprises the detection grating (151), and the detection grating (151) has the third mark (153), the fourth mark (154) and the fifth mark (155).

6. The leveling and focusing sensor according to claim 5, characterized in that: Along the first straight line direction, the third mark (153), the fourth mark (154) and the fifth mark (155) are arranged at intervals, and the third mark (153) and the fifth mark (155) are respectively arranged on opposite sides of the fourth mark (154).

7. The leveling and focusing sensor according to claim 6, characterized in that: The first mark (211), the second mark (143), the third mark (153), the fourth mark (154), the fifth mark (155) and the sixth mark (231) each include two cross marks, and the two cross marks are spaced apart along a second straight line direction, and the second straight line direction is perpendicular to the first straight line direction.

8. The leveling and focusing sensor according to claim 7, characterized in that: The stroke of one of the third mark (153) and the first mark (211) along the second straight line is a hollow structure, and the stroke of the other mark along the first straight line is a hollow structure; And / or, one of the fourth mark (154) and the second mark (143) is a solid cross, and the other is a hollow cross; And / or, one of the fifth mark (155) and the sixth mark (231) is a solid cross, and the other is a hollow cross.

9. A leveling and focusing sensor installation tool, characterized in that: The leveling and focusing sensor assembly method according to any one of claims 1 to 5 can be used to assemble the leveling and focusing sensor according to any one of claims 5 to 8, wherein the leveling and focusing sensor assembly tool comprises the reflector tool (210), the first camera tool (220) and the second camera tool (230), wherein the reflector tool (210) has the first mark (211) and is used to replace the silicon wafer (300) during assembly; the first camera tool (220) comprises the first camera, and the first camera tool (220) is used to adjust the posture of the detection grating (151) and the projection grating (141); the second camera comprises the second camera and the diaphragm, wherein the diaphragm has the sixth mark (231), and the second camera tool (230) is used to adjust the posture of the spectrometer module (160).

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