Laser interferometer auxiliary calibration device and auxiliary calibration method

Abstract

The present invention belongs to the field of laser interferometer calibration, and discloses a laser interferometer auxiliary calibration device and an auxiliary calibration method, comprising an X / Y axis auxiliary device and a Z axis auxiliary device; the X / Y axis auxiliary device comprises a limiting base and a supporting frame, a lifting drive device is arranged on the top of the limiting base, a first slide plate and a second slide plate are arranged on the first slide rail, the first slide plate is connected to a first receiver, and the first receiver is adsorbed to an X / Y adsorption surface through a third magnetic block; the second slide plate is connected to a first transmitter through a fourth magnetic block; the supporting frame fixes the first transmitter through the first magnetic block; the Z axis auxiliary device comprises a second slideway; a first motor fixing plate and a second motor fixing plate are arranged on the second slideway, the first motor fixing plate is connected to the second receiver through an eighth magnetic block, and the second receiver is connected to the Z adsorption surface through a sixth magnetic block; the second motor fixing plate is connected to the second transmitter through a seventh magnetic block, and the second transmitter is connected to a workbench through a fifth magnetic block.

Description

Technical Field

[0001] The present invention belongs to the field of laser interferometer calibration, and in particular relates to a laser interferometer auxiliary calibration device and an auxiliary calibration method. Background Art

[0002] Laser interferometry, a core technology for micro- and nanoscale linear displacement measurement, has been deeply integrated into high-end fields such as precision machining, semiconductor manufacturing equipment, and national defense science and technology. Its measurement accuracy is directly linked to equipment performance, making instrument calibration a critical step in quality assurance. Precise optical alignment of the laser transmitter and receiver is required before measurement. This process relies on operator experience and repeated adjustments, and is particularly prone to introducing systematic error sources such as beam deflection and interference fringe misalignment under complex working conditions.

[0003] Existing calibration systems primarily focus on error compensation during the measurement process, but overlook the challenge of pre-calibrating the optical path during the equipment installation phase. In traditional installation processes, insufficient mechanical positioning accuracy between the transmitter and receiver leads to milliradian-level angular deviations in the initial optical path. This necessitates the addition of dynamic adjustment modules for subsequent calibration, increasing system complexity and reducing calibration efficiency. Rapid and accurate pre-alignment of interferometer components has become a key technical bottleneck for shortening equipment commissioning cycles and improving calibration reliability. Summary of the Invention

[0004] In order to solve the technical problems existing in the prior art, the present invention discloses a laser interferometer auxiliary calibration device and an auxiliary calibration method.

[0005] In order to achieve the above object, the technical solution adopted by the present invention is as follows:

[0006] In a first aspect, the present invention provides a laser interferometer auxiliary calibration device, including an X / Y axis auxiliary device and a Z axis auxiliary device;

[0007] The X / Y axis auxiliary equipment includes a limit base and a support frame for connecting to the workbench. A lifting drive device is provided on the top of the limit base. The lifting drive device adjusts the height of the first slide rail. A first slide and a second slide are provided on the first slide rail. The first slide is connected to the first receiver through the second magnetic block, and the first receiver is adsorbed to the X / Y adsorption surface through the third magnetic block; the second slide is connected to the first transmitter through the fourth magnetic block; and the support frame fixes the first transmitter through the first magnetic block.

[0008] The Z-axis auxiliary equipment includes a second slide; the second slide is vertically arranged, and a first motor fixing plate and a second motor fixing plate are arranged on the second slide, a first drive motor is arranged on the first motor fixing plate, and a second drive motor is arranged on the second motor fixing plate; the first drive motor and the second drive motor each realize the movement of the first motor fixing plate and the second motor fixing plate through a transmission member, the first motor fixing plate is connected to the second receiver through the eighth magnetic block, and the second receiver is connected to the Z adsorption surface through the sixth magnetic block; the second motor fixing plate is connected to the second transmitter through the seventh magnetic block, and the second transmitter is connected to the workbench through the fifth magnetic block.

[0009] As a further technical solution, a first magnetic fixing block is provided at the bottom of the connecting frame; the first magnetic fixing block realizes the connection between the connecting frame and the workbench.

[0010] As a further technical solution, a magnetic connector is provided at the bottom of the second slide, and the magnetic connector realizes the connection between the second slide and the workbench.

[0011] As a further technical solution, the support frame includes a first profile connector, a second profile connector, and a third profile connector. A magnetic fixing block is provided at the bottom of the third profile connector. The third profile connector is connected to the vertically arranged second profile connector, and the top of the second profile connector is connected to the horizontally arranged first profile connector.

[0012] As a further technical solution, the first motor fixing plate is provided with a plurality of mounting slots for mounting the second receiver.

[0013] As a further technical solution, the second motor fixing plate is provided with a plurality of mounting slots for mounting the second transmitter.

[0014] As a further technical solution, a first magnetic block is fixed to each of two opposite sides of the first transmitter.

[0015] As a further technical solution, a second magnetic fixing block is provided on the side of the limiting base to achieve the connection between the limiting base and the workbench.

[0016] As a further technical solution, the lifting drive device is a cylinder.

[0017] In a second aspect, the present invention provides an auxiliary calibration method based on the above-mentioned laser interferometer auxiliary calibration device, which is specifically as follows:

[0018] During the X-axis auxiliary calibration, the X / Y-axis auxiliary equipment is clamped to the edge of the workbench through the limit base, the position of the workbench is adjusted, the first receiver and the third magnetic block are moved to a position where they coincide with the X adsorption surface in the X-axis direction, and the first receiver and the third magnetic block are lifted to the set position by the lifting action of the lifting drive device to ensure that the third magnetic block is completely in contact with the X adsorption surface, the third magnetic block is opened and adsorbed to the X adsorption surface, and then the second magnetic block is closed and released to complete the installation of the first receiver; then the support frame is installed so that the first magnetic block is adsorbed on the support frame; the fourth magnetic block is closed, and the installation of the first transmitter is completed; then the lifting drive device is retracted, the second magnetic block and the fourth magnetic block are separated from the first receiver and the first transmitter respectively, the second magnetic fixing block is closed, the limit base is separated from the workbench, the auxiliary calibration of the X-axis laser interferometer is completed, and then the optical calibration is started;

[0019] During the Y-axis auxiliary calibration, the X / Y-axis auxiliary equipment is clamped to the edge of the workbench through the limit base, the position of the workbench is adjusted, the first receiver and the third magnetic block are moved to a position that coincides with the Y adsorption surface in the Y-axis direction, and the first receiver and the third magnetic block are lifted to the set position by the lifting action of the lifting drive device, ensuring that the third magnetic block is completely in contact with the Y adsorption surface, the third magnetic block is opened and adsorbed to the Y adsorption surface, and then the second magnetic block is closed and released to complete the installation of the first receiver; then the support frame is installed so that the first magnetic block is adsorbed on the support frame; the fourth magnetic block is closed, and the first transmitter is installed; then, the lifting drive device is retracted, the second magnetic block and the fourth magnetic block are separated from the first receiver and the first transmitter respectively, the second magnetic fixing block is closed, the limit base is separated from the workbench, the auxiliary calibration of the Y-axis laser interferometer is completed, and then the light calibration is started;

[0020] During Z-axis assisted calibration, the Z-axis auxiliary equipment is fixed to the workbench through a magnetic connector, and then the first drive motor and the second drive motor drive the first motor fixing plate and the second motor fixing plate to move up and down, and the fifth magnetic block is fitted with the workbench, and then the fifth magnetic block is opened to fix the second launcher on the workbench; the seventh magnetic block is closed to install the second launcher; then the first drive motor is used to fit the sixth magnetic block with the Z adsorption surface, the eighth magnetic block and the magnetic connector are closed, and the second slide is separated from the workbench to complete the Z-axis laser interferometer assisted calibration.

[0021] The beneficial effects of the present invention are as follows:

[0022] The present invention can eliminate subjective judgment errors, achieve initial positioning standardization, and fundamentally avoid pitch / yaw deviations caused by visual errors or operating habits during manual adjustment. The present invention cuts off the error transmission chain and improves calibration reliability. The X / Y axis auxiliary equipment of the present invention can be used for calibration in the X-axis direction as well as for calibration in the Y-axis direction, that is, the calibration of the X / Y axis is multiplexed through the adjustment of the X / Y axis auxiliary equipment (only the installation direction is changed), and the Z axis is unified through the independent modular design of the Z axis auxiliary equipment, which unifies the reference logic of the three-axis calibration and avoids the tediousness of the traditional method of re-formulating the adjustment strategy due to the difference in the axis system. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] The accompanying drawings, which constitute a part of the present invention, are used to provide a further understanding of the present invention. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute improper limitations on the present invention.

[0024] Figure 1 Schematic diagram of X-assisted calibration proposed in the present invention;

[0025] Figure 2 Schematic diagram of Y-assisted calibration proposed by the present invention;

[0026] Figure 3 This is a schematic diagram of Z-assisted calibration;

[0027] Figure 4 This is a diagram of X / Y axis auxiliary equipment Figure 1 ;

[0028] Figure 5 This is a diagram of X / Y axis auxiliary equipment Figure 2 ;

[0029] Figure 6 This is a schematic diagram of some of the X / Y axis auxiliary equipment;

[0030] Figure 7 This is a diagram of the Z-axis auxiliary equipment Figure 1 ;

[0031] Figure 8 This is a diagram of the Z-axis auxiliary equipment Figure 2 ;

[0032] In the figure: the distances or sizes between parts are exaggerated to show the positions of various parts, and the schematic diagram is for reference only.

[0033] 1. X / Y axis auxiliary equipment, 2. Z axis auxiliary equipment, 3. X adsorption surface, 4. Workbench, 5. Y adsorption surface, 6. Z adsorption surface, 11. First transmitter, 12. First magnetic block, 13. First profile connector, 14. Second slide, 15. First slide, 16. Second magnetic block, 17. First receiver, 18. Third magnetic block, 19. Lifting drive device, 110. First limit plate, 111. Second magnetic fixing block, 113. Third profile connector, 112. Second profile connector, 114. First magnetic fixing block, 115. Fourth magnetic block, 116. Second limit plate, 117. First connecting plate, 118. First slide, 119. First slider, 120. Second connecting plate, 121. Second slider, 122. Second mounting slot, 123. First mounting slot, 21. Sixth magnetic block, 22. Second receiver, 23. Third mounting slot, 24. First drive motor, 25. Fourth mounting slot, 26. Second drive motor, 27. Second transmitter, 28. Fifth magnetic block, 29. Magnetic connector, 210. Seventh magnetic block, 211. Eighth magnetic block, 212. Second slide, 213. Rack, 214. First gear, 215. Third slider, 216. Second gear, 217. Second motor fixing plate, 218. First motor fixing plate, 219. Fourth slider; DETAILED DESCRIPTION

[0034] It should be noted that the following detailed description is illustrative and is intended to provide further explanation of the present invention. Unless otherwise specified, all technical and scientific terms used in the present invention have the same meaning as commonly understood by those skilled in the art to which the present invention belongs.

[0035] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present invention. As used herein, unless otherwise clearly indicated in the present invention, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "include" and / or "comprising" are used in this specification, they indicate the presence of features, steps, operations, devices, components and / or their combinations;

[0036] For the convenience of description, if the words "up", "down", "left" and "right" appear in the present invention, they only indicate that they are consistent with the up, down, left and right directions of the drawings themselves, and do not limit the structure. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or component referred to must have a specific orientation, be constructed and operate in a specific orientation. Therefore, they cannot be understood as limiting the present invention.

[0037] As introduced in the background technology, traditional preliminary calibration relies on manual experience to adjust the transmitter and receiver, which has a multi-level error generation mechanism. Different operators have different perception thresholds for the "optimal alignment state". If the initial position of the receiver or transmitter is not horizontal or vertical, the pitch and yaw of the light beam will have large deviations during the stroke during the subsequent precise calibration, which can easily lose the optical path and make the test impossible. However, it is impossible to manually guarantee whether the position of the transmitter and receiver is completely perpendicular to the axis under three axes, and the human eye has physiological limits in judging position. Errors are easily unrecognizable and difficult to trace. Therefore, the position of the two can only be continuously adjusted to find the right angle, which is time-consuming, labor-intensive and has low accuracy. In response to the shortcomings of the existing technology, this embodiment proposes a laser interferometer-assisted calibration device and method based on a three-axis machine tool;

[0038] In a typical embodiment of the present invention, Figure 1 、 Figure 2 、 Figure 3 As shown, this embodiment provides a laser interferometer auxiliary calibration device based on a three-axis machine tool, which mainly includes a workbench 4, an X / Y axis auxiliary device 1, and a Z axis auxiliary device 2; the X / Y axis auxiliary device 1 and the Z axis auxiliary device 2 are arranged on the workbench 4; wherein, Figure 1 This is a schematic diagram of auxiliary calibration of the X / Y axis auxiliary device 1 in the X direction; Figure 2 This is a schematic diagram of auxiliary calibration of the X / Y axis auxiliary device 1 in the Y direction; Figure 3 Schematic diagram of Z-axis auxiliary device 2 assisting calibration in the Z direction; in this embodiment, the X / Y-axis auxiliary device 1 and the Z-axis auxiliary device 2 are independently provided to implement calibration of the laser interferometer, wherein the laser interferometer includes a transmitter and a receiver, and the X / Y-axis auxiliary device 1 implements calibration of the transmitter and receiver in the X / Y directions; the Z-axis auxiliary device 2 implements calibration of the transmitter and receiver in the Z direction. The X / Y-axis auxiliary device 1 and the Z-axis auxiliary device 2 are described in detail below;

[0039] The X / Y axis auxiliary device 1 includes a first transmitter 11, a first magnetic block 12, a first profile connector 13, a first slide 15, a second slide 14, a second magnetic block 16, a first receiver 17, a third magnetic block 18, a lifting drive device 19, a second profile connector 112, a third profile connector 113, a second magnetic fixing block 111, a fourth magnetic block 115, a first limiting plate 110, a second limiting plate 116, a first slider 119, a second slider 121, a first slide 118, etc.

[0040] A magnetic fixing block is provided at the bottom of the third profile connector 113, the third profile connector 113 is connected to the vertically arranged second profile connector 112, the top of the second profile connector 112 is connected to the horizontally arranged first profile connector 13, the first profile connector 13, the second profile connector 112, and the third profile connector 113 together constitute a support frame of the first launcher 11; the first limiting plate 110 and the second limiting plate 116 constitute a limiting base, and a lifting drive device 19 is provided on the top of the limiting base. In this embodiment, the lifting drive device 19 is a cylinder; the cylinder is connected to the second connecting plate 120, and the second connecting plate 120 is connected to the first slide 118. The cylinder drives the first slide 118 to move up and down to achieve height adjustment of the first slide 118. The first slide 118 is connected to the first slider 119 and the first connecting plate 117 The first slide 15, the first slide 118 is connected to the second slide 14 through the second slider 121 and the other first connecting plate 117; a first mounting groove 123 is provided on the first slide 15, and a second mounting groove 122 is installed on the second slide 14; the first mounting groove 123 is used to install the first receiver 17, and the second mounting groove 122 is used to install the first transmitter 11; the first magnetic block 12 and the fourth magnetic block 115 are fixed to the first transmitter 11; the first magnetic block 12 realizes the connection between the support frame and the first transmitter 11, and the fourth magnetic block 115 realizes the connection between the first transmitter 11 and the second slide 14; a second magnetic block 16 is provided on the first receiver 17, and the second magnetic block 16 realizes the connection between the first slide 15 and the first receiver 17; the first receiver 17 is connected to the third magnetic block 18, and the third magnetic block 18 is used to adsorb with the X adsorption surface 3;

[0041] The X / Y axis auxiliary device 1 can be used for calibration in both the X-axis and Y-axis directions, that is, the X / Y axis calibration is multiplexed by adjusting the direction of the X / Y axis auxiliary device 1 (only the installation direction is changed).

[0042] Furthermore, the Z-axis auxiliary device 2 in this embodiment includes a first motor fixing plate 218, a first drive motor 24, a second motor fixing plate 217, a second drive motor 26, a fifth magnetic block 28, a magnetic connector 29, a sixth magnetic block 21, a second slide 212, a third slider 215, a fourth slider 219, a seventh magnetic block 210, and an eighth magnetic block 211;

[0043] The second slide 212 is arranged vertically, and a third slider 215 and a fourth slider 219 are provided on the second slide 212. A rack 213 is provided on the side of the second slide 212, and a magnetic connection member 29 is provided at the bottom of the second slide 212. The third slider 215 is connected to the first motor fixing plate 218, and the fourth slider 219 is connected to the second motor fixing plate 217. A first drive motor 24 is provided on the first motor fixing plate 218, and a second drive motor 26 is provided on the second motor fixing plate 217; the first drive motor 24 and the second drive motor 26 are respectively engaged with the rack 213 through the first gear 214 and the second gear 216 to realize the movement of the first motor fixing plate 218 and the second motor fixing plate 217, a second transmitter 27 is provided on the second motor fixing plate 217, and the second transmitter 27 is installed through the fourth mounting slot 25, and a second receiver 22 is provided on the first motor fixing plate 218; the second receiver 22 is installed through the third mounting slot 23;

[0044] The second launcher 27 is connected to the workbench 4 via the fifth magnetic block 28, and the second launcher 27 is connected to the second motor fixing plate 217 via the seventh magnetic block 210; the fifth magnetic block 28 and the seventh magnetic block 210 are fixed to the second motor fixing plate 217;

[0045] The second receiver 22 is connected to the first motor fixing plate 218 via the eighth magnetic block 211; and the second receiver 22 is connected to the Z adsorption surface 6 via the sixth magnetic block 21; the eighth magnetic block 211 and the sixth magnetic block 21 are fixed to the second receiver 22;

[0046] In this embodiment, the Z-axis auxiliary device 2 is an independent module, which can realize calibration in the Z-axis direction.

[0047] Based on the above device, this embodiment also provides a calibration method, which is as follows:

[0048] During X-axis auxiliary calibration, the X / Y-axis auxiliary device 1 is clamped to the edge of the workbench 4 via a limit base and placed on the workbench 4. The initial positions of the first transmitter 11 and the first receiver 17 are both located within the limit slots of the slide constrained by the slideway. The depth and position of the two limit slots are corresponding, thus ensuring that the initial positions of the first transmitter 11 and the first receiver 17 coincide with each other on the Y-axis. Then, by moving the machine tool's X-axis and Y-axis, the first receiver 17 and the third magnetic block 18 are moved to a suitable position, i.e., a position that coincides with the X-attraction surface 3 in the X-axis direction. The first receiver 17 and the third magnetic block 18 are lifted to the appropriate position by the lifting action of the cylinder, ensuring that the third magnetic block 18 is now fully aligned with the X-attraction surface 3. At this point, the third magnetic block 18 is opened and attached to the X-attraction surface 3. The second magnetic block 16 is then closed and released, completing the installation of the first receiver 17.

[0049] For the first transmitter 11, according to the height position at this moment, the second profile connector 112, the third profile connector 113, and the magnetic fixing block are assembled. The first profile connector 13 and the first magnetic block 12 are always adsorbed as one, and the various components are installed by the corner pieces. Then the integrated support equipment is fixed to the first magnetic block 12, and the fourth magnetic block 115 is closed. At this moment, the first transmitter 11 is installed. Then, the cylinder is retracted, so that the second magnetic block 16 and the fourth magnetic block 115 are separated from the first receiver 17 and the first transmitter 11 respectively, and the first magnetic fixing block 114 and the second magnetic fixing block 111 are closed, leaving only the first transmitter 11, the first receiver 17, the first magnetic block 12, the support frame, and the third magnetic block 18. The remaining equipment is separated from the workbench 4, the auxiliary calibration of the X-axis laser interferometer is completed, and then the light calibration is started;

[0050] For the Y-axis auxiliary calibration, the method is the same as that for the X-axis. Only the direction of the X / Y-axis auxiliary device 1 is reversed. Specifically, the X / Y-axis auxiliary device 1 is clamped to the edge of the workbench 4 through the limit base. By moving the X-axis and Y-axis of the machine tool, the first receiver 17 and the third magnetic block 18 are moved to a position where they coincide with the Y adsorption surface 5 in the Y-axis direction. By the lifting action of the supporting cylinder, the first receiver 17 and the third magnetic block 18 are lifted to the set position to ensure that the third magnetic block 18 is completely in contact with the X adsorption surface 3. The third magnetic block 18 is opened and adsorbed to the X adsorption surface 3, and then the second magnetic block 16 is closed to release the adsorption. The first receiver 17 is installed; then the support frame is installed so that the first magnetic block 12 is adsorbed on the support frame; the fourth magnetic block 115 is closed, and the first transmitter 11 is installed; then, the cylinder is retracted, and the second magnetic block 16 and the fourth magnetic block 115 are separated from the first receiver 17 and the first transmitter 11 respectively, and the first magnetic fixing block 114 and the second magnetic fixing block 111 are closed, leaving only the first transmitter 11, the first receiver 17, the first magnetic block 12, the support frame, and the third magnetic block 18, and the remaining equipment is separated from the workbench 4, completing the auxiliary calibration of the Y-axis laser interferometer, and then starting the light calibration;

[0051] For Z-axis auxiliary calibration, the Z-axis auxiliary device 2 is first fixed to a suitable position on the workbench 4 through the magnetic connector 29, and then the first drive motor 24 and the second drive motor 26 fixed by the first motor fixing plate 218 and the second motor fixing plate 217 drive the first gear 214, the second gear 216 and the rack 213 to engage with each other to achieve up and down movement, and the fifth magnetic block 28 is fitted with the workbench 4, and then the fifth magnetic block 28 is opened and the seventh magnetic block 210 used to fix the second launcher 27 and the fourth slider 219 is closed to achieve the installation of the second launcher 27.

[0052] Then, through the operation of the first drive motor 24, the sixth magnetic block 21 is fitted with the Z adsorption surface 6, and the second receiver 22 is fixed in the same way. Then, the magnetic connector 29 is closed, and the remaining devices (except the second transmitter 27, the second receiver 22, the fifth magnetic block 28 and the sixth magnetic block 21) are separated from the workbench 4, completing the Z-axis laser interferometer auxiliary calibration, and then start the light calibration.

[0053] Note that the magnetic blocks connected to the laser interferometer are all detachable. Therefore, after installation, the magnetic blocks that are no longer adsorbed should be removed to reduce weight and improve test accuracy.

[0054] The present invention can eliminate subjective judgment errors, achieve initial positioning standardization, and fundamentally avoid pitch / yaw deviations caused by visual errors or operating habits during manual adjustment.

[0055] The present invention cuts off the error transmission chain and improves calibration reliability.

[0056] The X / Y-axis auxiliary device 1 of the present invention can be used for calibration in the X-axis direction as well as for calibration in the Y-axis direction. That is, the calibration of the X / Y-axis is multiplexed through the adjustment of the X / Y-axis auxiliary device 1 (only the installation direction is changed), and the Z-axis is unified through the independent modular design of the Z-axis auxiliary device 2, thereby unifying the reference logic of the three-axis calibration and avoiding the tediousness of re-formulating the adjustment strategy due to the difference in the axis system in the traditional method.

[0057] Finally, it should be noted that relational terms such as first and second are merely used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations.

[0058] The foregoing description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Those skilled in the art will readily appreciate that various modifications and variations of the present invention are possible. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present invention are intended to be within the scope of protection of the present invention.

Claims

1. A laser interferometer assisted calibration device, characterized in that: Including X / Y axis auxiliary equipment and Z axis auxiliary equipment; The X / Y axis auxiliary equipment includes a limit base and a support frame for connecting to the workbench. A lifting drive device is provided on the top of the limit base. The lifting drive device adjusts the height of the first slide rail. A first slide and a second slide are provided on the first slide rail. The first slide is connected to the first receiver through the second magnetic block, and the first receiver is adsorbed to the X / Y adsorption surface through the third magnetic block; the second slide is connected to the first transmitter through the fourth magnetic block; and the support frame fixes the first transmitter through the first magnetic block. The Z-axis auxiliary equipment includes a second slide; the second slide is vertically arranged, and a first motor fixing plate and a second motor fixing plate are arranged on the second slide, a first drive motor is arranged on the first motor fixing plate, and a second drive motor is arranged on the second motor fixing plate; the first drive motor and the second drive motor each realize the movement of the first motor fixing plate and the second motor fixing plate through a transmission member, the first motor fixing plate is connected to the second receiver through the eighth magnetic block, and the second receiver is connected to the Z adsorption surface through the sixth magnetic block; the second motor fixing plate is connected to the second transmitter through the seventh magnetic block, and the second transmitter is connected to the workbench through the fifth magnetic block.

2. The laser interferometer-assisted calibration device according to claim 1, wherein: A first magnetic fixing block is provided at the bottom of the connecting frame; the first magnetic fixing block realizes the connection between the connecting frame and the workbench.

3. The laser interferometer-assisted calibration device according to claim 1, wherein: A magnetic connector is provided at the bottom of the second slide, and the magnetic connector realizes the connection between the second slide and the workbench.

4. The laser interferometer-assisted calibration device according to claim 1, wherein: The support frame includes a first profile connector, a second profile connector, and a third profile connector. A first magnetic fixing block is provided at the bottom of the third profile connector. The third profile connector is connected to the vertically arranged second profile connector. The top of the second profile connector is connected to the horizontally arranged first profile connector.

5. The laser interferometer-assisted calibration device according to claim 1, wherein: The first motor fixing plate is provided with a plurality of mounting slots for mounting the second receiver.

6. The laser interferometer-assisted calibration device according to claim 1, wherein: The second motor fixing plate is provided with a plurality of mounting slots for mounting the second transmitter.

7. The laser interferometer-assisted calibration device according to claim 1, wherein: A first magnetic block is fixed on each of two opposite sides of the first transmitter.

8. The laser interferometer-assisted calibration device according to claim 1, wherein: A second magnetic fixing block is provided on the side of the limiting base to achieve the connection between the limiting base and the workbench.

9. The laser interferometer-assisted calibration device according to claim 1, wherein: The lifting drive device is a cylinder.

10. A laser interferometer assisted calibration method, characterized in that: Calibration is performed using the laser interferometer-assisted calibration device described in any one of claims 1 to 9, specifically as follows: During the X-axis auxiliary calibration, the X / Y-axis auxiliary equipment is clamped to the edge of the workbench through the limit base, the position of the workbench is adjusted, the first receiver and the third magnetic block are moved to a position where they coincide with the X adsorption surface in the X-axis direction, and the first receiver and the third magnetic block are lifted to the set position by the lifting action of the lifting drive device to ensure that the third magnetic block is completely in contact with the X adsorption surface, the third magnetic block is opened and adsorbed to the X adsorption surface, and then the second magnetic block is closed and released to complete the installation of the first receiver; then the support frame is installed so that the first magnetic block is adsorbed on the support frame; the fourth magnetic block is closed, and the installation of the first transmitter is completed; then the lifting drive device is retracted, the second magnetic block and the fourth magnetic block are separated from the first receiver and the first transmitter respectively, the second magnetic fixing block is closed, the limit base is separated from the workbench, the auxiliary calibration of the X-axis laser interferometer is completed, and then the optical calibration is started; During the Y-axis auxiliary calibration, the X / Y-axis auxiliary equipment is clamped to the edge of the workbench through the limit base, the position of the workbench is adjusted, the first receiver and the third magnetic block are moved to a position that coincides with the Y adsorption surface in the Y-axis direction, and the first receiver and the third magnetic block are lifted to the set position by the lifting action of the lifting drive device, ensuring that the third magnetic block is completely in contact with the Y adsorption surface, the third magnetic block is opened and adsorbed to the Y adsorption surface, and then the second magnetic block is closed and released to complete the installation of the first receiver; then the support frame is installed so that the first magnetic block is adsorbed on the support frame; the fourth magnetic block is closed, and the first transmitter is installed; then, the lifting drive device is retracted, the second magnetic block and the fourth magnetic block are separated from the first receiver and the first transmitter respectively, the second magnetic fixing block is closed, the limit base is separated from the workbench, the auxiliary calibration of the Y-axis laser interferometer is completed, and then the light calibration is started; During Z-axis assisted calibration, the Z-axis auxiliary equipment is fixed to the workbench through a magnetic connector, and then the first drive motor and the second drive motor drive the first motor fixing plate and the second motor fixing plate to move up and down, and the fifth magnetic block is fitted with the workbench, and then the fifth magnetic block is opened to fix the second launcher on the workbench; the seventh magnetic block is closed to install the second launcher; then the first drive motor is used to fit the sixth magnetic block with the Z adsorption surface, the eighth magnetic block and the magnetic connector are closed, and the second slide is separated from the workbench to complete the Z-axis laser interferometer assisted calibration.

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