Microwave PFG detection device

Abstract

The invention discloses a microwave PFG detection device, which is used for detecting plasma chamber field distribution and electron cloud distribution of microwave PFG, and comprises a moving mechanism arranged on a microwave PFG body, the moving mechanism comprises: a connecting frame connected to the microwave PFG body; the sliding rail is arranged on the connecting frame, and the sliding rail is parallel to the graphite plate of the microwave PFG body; the mounting frame is in sliding connection with the sliding rail; the driving assembly is arranged on the mounting frame, is in driving connection with the sliding rail and is used for driving the mounting frame to slide along the sliding rail; and the detection assembly is arranged on the mounting frame. The microwave PFG detection device provided by the invention is used for detecting the plasma chamber field distribution of the microwave PFG and the electron cloud distribution condition at the slit, and is simple in structure, convenient to assemble and maintain, and high in universality due to the mounting of the connecting frame.

Description

Technical Field

[0001] The present invention relates to the technical field of ion detection equipment, and more specifically, to a microwave PFG detection device. Background Art

[0002] A microwave plasma flood gun (PFG), also known as a microwave plasma shower generator, is a neutralizing device designed to prevent electrostatic charge buildup on the silicon wafer surface during the ion implantation process, which can damage the wafer. Installed in front of the wafer, in the path of the ion beam, the electrons released by the microwave PFG migrate toward the wafer surface under the influence of the ion beam's spatial charge, effectively neutralizing any positive charge that accumulates on the surface. Compared to traditional filament PFGs, this device also offers the added benefit of suppressing metal contamination.

[0003] The microwave PFG is a key component of an ion implanter. The stability of this device and the uniformity of the electron cloud it produces directly impact the quality of ion implantation. This uneven electron cloud is primarily caused by uneven field and power distribution within the plasma chamber caused by microwaves. Therefore, it is crucial to be able to conveniently and effectively measure the electron cloud generated by the microwave PFG and the field distribution within the microwave plasma chamber at specific microwave frequencies.

[0004] Existing methods for measuring plasma uniformity primarily include optical diagnostics (such as laser-induced fluorescence and emission spectroscopy), electrical probes (Langmuir probes and dual-probe methods), microwave interferometry (microwave resonance and microwave reflectometry), and spectral analysis (such as OES and LIF). However, most of these methods are characterized by complex systems, expensive supporting equipment, and highly specialized operations. Summary of the Invention

[0005] In view of the shortcomings of the existing technology, the present invention innovatively provides a microwave PFG detection device, which can solve the technical problems of the existing technology in measuring plasma uniformity, such as complex system structure, high cost and high professional operation.

[0006] To achieve the above technical objectives, the present invention discloses a microwave PFG detection device for detecting the plasma chamber field distribution and electron cloud distribution of a microwave PFG, including a moving mechanism disposed on the microwave PFG body, the moving mechanism comprising:

[0007] A connecting frame connected to the microwave PFG body;

[0008] A slide rail is provided on the connecting frame, wherein the slide rail is parallel to the graphite plate of the microwave PFG body;

[0009] a mounting frame, the mounting frame being slidably connected to the slide rail;

[0010] A drive assembly is provided on the mounting frame, the drive assembly being drivingly connected to the slide rail and configured to drive the mounting frame to slide along the slide rail;

[0011] The detection component is arranged on the mounting frame.

[0012] Furthermore, the slide rail is a rack, and the driving assembly includes a motor and a gear. The gear is installed on the driving shaft of the motor and meshes with the rack.

[0013] Furthermore, the slide rail is provided with slide grooves on two surfaces perpendicular to the graphite plate.

[0014] The mounting frame includes a first frame body and a second frame body, the first frame body and the second frame body are fixedly connected, and sliding balls are provided on the first frame body and the second frame body, and the sliding balls are rollingly set in the sliding groove.

[0015] Furthermore, the detection assembly includes a needle holder and a probe, the needle holder is adjustably mounted on the first frame, and the probe is mounted on the needle holder.

[0016] Furthermore, a slit is formed on the graphite plate, the slide rail is parallel to the slit, and the probe is used to detect the electron cloud distribution at the slit.

[0017] Furthermore, a long hole is formed on the needle holder, and the long hole is connected to the first holder body via a bolt.

[0018] Furthermore, the moving mechanism further includes a vacuum potentiometer, which is arranged on the second frame, and a rotating shaft of the vacuum potentiometer is connected to the gear.

[0019] Furthermore, the drive assembly further includes a mounting plate, and the motor is fixed on the mounting plate.

[0020] The mounting plate is located between the first frame and the second frame, and is fixed between the first frame and the second frame.

[0021] Furthermore, the microwave PFG detection device further includes a controller, and the controller is used to control the moving mechanism.

[0022] Furthermore, the controller includes a motor control circuit, a limit circuit, a potentiometer, a digital tube connection circuit and a power conversion circuit.

[0023] The beneficial effects of the present invention are:

[0024] The microwave PFG detection device provided by the present invention is used to detect the plasma chamber field distribution of the microwave PFG and the electron cloud distribution at the slit. It has a simple structure, is easy to assemble and maintain, and is installed through a connecting frame, with strong versatility. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 A schematic diagram showing the installation state of a microwave PFG detection device according to an embodiment of the present invention is shown;

[0026] Figure 2 A schematic diagram showing a portion of the structure of a drive assembly according to an embodiment of the present invention is shown;

[0027] Figure 3 Show Figure 1 Center left schematic view;

[0028] Figure 4 A schematic structural diagram of a mounting bracket according to an embodiment of the present invention is shown;

[0029] Figure 5 A schematic structural diagram of a moving mechanism according to an embodiment of the present invention is shown;

[0030] Figure 6 Shows a structural block diagram of a controller according to an embodiment of the present invention;

[0031] Figure 7 Shows the principle diagram of the connection circuit of the potentiometer and the digital tube according to the embodiment of the present invention;

[0032] Figure 8 Shows a schematic diagram of a motor drive circuit according to an embodiment of the present invention;

[0033] Figure 9 Shows a schematic diagram of a limit circuit according to an embodiment of the present invention;

[0034] Figure 10 Shows a schematic diagram of a forward and reverse control circuit according to an embodiment of the present invention;

[0035] Figure 11 Shows a schematic diagram of a power conversion circuit according to an embodiment of the present invention;

[0036] Figure 12 A one-dimensional distribution diagram of the microwave PFG electron cloud measured in accordance with an embodiment of the present invention is shown;

[0037] Figure 13 FIG. 1 shows a one-dimensional distribution diagram of the microwave PFG field measured according to an embodiment of the present invention.

[0038] In the figure,

[0039] 1. Microwave PFG body; 11. Plasma cavity; 12. Graphite plate; 121. Slit; 21. Connecting frame; 221. Vertical frame; 222. Tilting frame; 23. Slide rail; 231. Slide groove; 24. Mounting frame; 241. First frame; 242. Second frame; 243. Sliding ball; 2421. Potentiometer mounting hole; 251. Motor; 2511. Drive shaft; 2512. Mounting threaded hole; 252. Gear; 253. Mounting plate; 2531. First hole; 2532. Second hole; 2533. Third hole; 26. Vacuum potentiometer; 261. Rotating axis; 27. Needle holder; 271. Long hole; 28. Probe; 3. Controller. DETAILED DESCRIPTION

[0040] The microwave PFG detection device provided by the present invention is explained and illustrated in detail below with reference to the accompanying drawings.

[0041] The microwave PFG detection device provided by the present invention is used to detect the plasma chamber field distribution and electron cloud distribution at the slit of a microwave PFG. It has a simple structure, is easy to assemble and maintain, and is installed via a connecting frame, making it highly versatile. The present invention is described in detail below with reference to specific embodiments:

[0042] In some embodiments, the present invention provides a microwave PFG detection device for detecting the plasma chamber field distribution and electron cloud distribution of a microwave PFG, such as Figure 1 、 Figure 2 、 Figure 3 As shown, it includes a moving mechanism, a detection component and a controller. The detection component is arranged on the moving mechanism and can move with the moving mechanism. The detection component and the moving mechanism are arranged on the microwave PFG body 1 and are in a vacuum environment for detecting the field distribution of the plasma cavity 11. The controller 3 is located in the atmospheric environment and is connected to the moving mechanism and the detection component through a connecting line. Optionally, the controller 3 works in a microwave environment. The use of full analog circuit control can effectively improve the anti-interference ability of the control circuit board.

[0043] In some embodiments, as Figure 1 、 Figure 2 、 Figure 3As shown, a graphite plate 12 is mounted on the microwave PFG body 1 and connected to the microwave PFG via bolts. A slit 121 is formed along the length of the graphite plate 12. The moving mechanism includes a connecting frame 21, a slide rail 23, a mounting frame 24, and a drive assembly. The connecting frame 21 is bolted to the microwave PFG body 1. Optionally, two connecting frames 21 are provided, one connected to each end of the graphite plate 12. The slide rail 23 is mounted on the connecting frame 21, with the other ends of the slide rail 23 connected to two connecting frames 21. The slide rail 23 is parallel to the graphite plate 12 of the microwave PFG body 1. The mounting frame 24 is slidably connected to the slide rail 23 and can reciprocate along the slide rail 23. The drive assembly is mounted on the mounting frame 24 and is in driving connection with the slide rail 23 to drive the mounting frame 24 to slide along the slide rail 23. Optionally, a bracket is further provided on the connecting frame 21, and the bracket includes a vertical frame 221 perpendicular to the connecting frame 21 and an inclined frame 222 arranged at an angle to the connecting frame 21. The vertical frame 221 and the inclined frame 222 are connected to the slide rail 23 at the same time. On the one hand, the reliability of the fixation of the slide rail 23 can be improved. On the other hand, the slide rail 23 can be further away from the graphite plate 12, providing sufficient space for the installation and movement of the mounting frame 24, drive components, etc.

[0044] In some embodiments, the slide rail 23 is a rack, and the drive assembly includes a motor 251 and a gear 252. The gear 252 is mounted on a drive shaft 2511 of the motor 251 and meshes with the rack. Alternatively, in other embodiments, the slide rail 23 and the drive assembly may be replaced with a ball screw structure. This application describes the slide rail 23 as a rack structure.

[0045] The slide rail 23 is a rectangular strip structure, with a rack formed on its first surface facing away from 12, and slide grooves 231 formed on the two surfaces perpendicular to the first surface along the length direction, that is, perpendicular to the graphite plate 12. The inner wall of the slide groove 231 is an arc surface. Optionally, two slide grooves 231 parallel to each other are formed on each surface.

[0046] In some embodiments, as Figure 1 、 Figure 3 、 Figure 4As shown, the mounting frame 24 includes a first frame body 241 and a second frame body 242, and the first frame body 241 and the second frame body 242 are fixedly connected. The first frame body 241 and the second frame body 242 are both provided with sliding balls 243. For example, the sliding balls 243 can be 2mm steel balls. The sliding balls 243 are rollingly arranged in the slide groove 231. Optionally, the first frame body 241 and the second frame body 242 are split structures, and the first frame body 241 and the second frame body 242 are connected by bolts. The first frame body 241 includes a first connecting part and a second connecting part, and the second frame body 242 includes a third connecting part and a fourth connecting part, wherein the first connecting part and the third connecting part are connected, and a stepped surface is formed on the third connecting part. After the first connecting part and the third connecting part are connected, a groove is formed on the stepped surface for cooperating with the slide rail 23 for installation. Sliding balls 243 are arranged on the stepped surfaces of the first connecting part and the second connecting part, that is, sliding balls 243 are arranged on the two side walls of the groove. The slide rail 23 is located in the groove, and the sliding balls 243 are just embedded in the slide groove 231 on the slide rail 23. The sliding cooperation between the sliding balls 243 and the slide groove 231 allows the frame to slide along the slide rail 23.

[0047] In some embodiments, as Figure 1 、 Figure 3 、 Figure 5 The illustrated drive assembly also includes a mounting plate 253, to which a motor 251 is fixed. Motor 251 is a vacuum reduction motor with a mounting threaded hole 2512 provided at its end. Mounting plate 253 is provided with a first hole 2531, which is connected to the first hole 2531 via a bolt. Mounting plate 253 also has a through hole, through which the drive shaft 2511 of motor 251 passes. Gear 252 is connected to the drive shaft 2511 from the other side of mounting plate 253. Mounting plate 253 is provided with a second hole 2532 and a third hole 2533 for connecting to mounting bracket 24. The third hole 2533 is an arc-shaped hole, or both the second hole 2532 and the third hole 2533 are arc-shaped holes. The connection position of mounting plate 253 and mounting bracket 24 can be adjusted to adjust the position of gear 252 to ensure that it can effectively engage with the rack.

[0048] The mounting plate 253 is connected to the mounting frame 24. Optionally, the mounting plate 253 is located between the first frame 241 and the second frame 242 and is fixed therebetween. In this embodiment, the mounting plate 253 is located between the second connecting portion and the fourth connecting portion, and the second connecting portion, the mounting plate 253, and the fourth connecting portion are integrally connected by bolts. Optionally, a receiving space is formed between the second connecting portion and the fourth connecting portion. The gear 252 is mounted on the drive shaft 2511 of the motor 251 and meshes with the rack. The rotation of the gear 252 drives the mounting frame 24 to slide on the slide rail 23.

[0049] In some embodiments, as Figure 1 、 Figure 3 、 Figure 5 The illustrated moving mechanism also includes a vacuum potentiometer 26, which is mounted on a second frame 242. A potentiometer mounting hole 2421 is provided on the second frame 242. The vacuum potentiometer 26 is mounted within the potentiometer mounting hole 2421. The rotating shaft 261 of the vacuum potentiometer 26 is connected to the gear 252. Optionally, the gear 252 has two sets of threaded holes for mounting screws, which are secured to the drive shaft 2511 of the motor 251 and the rotating shaft 261 of the vacuum potentiometer 26 via the screws, respectively. Optionally, the vacuum potentiometer 26 rotates a number of revolutions, and the ratio of the indexing circle circumference of the gear 252 to the available travel of the rack is 1:10, thereby adapting the gear 252 to the vacuum potentiometer 26 and achieving synchronous rotation of the motor 251 and the vacuum potentiometer 26.

[0050] In some embodiments, as Figure 1 、 Figure 3 、 Figure 4 The detection assembly shown includes a needle holder 27 and a probe 28. The needle holder 27 is adjustably mounted on the first frame 241, and the probe 28 is mounted on the needle holder 27. Optionally, the probe 28 is a Langmuir probe 28, which is used to detect the electron cloud distribution at the slit 121. In this embodiment, the slide rail 23 is parallel to the slit 121, so that the probe 28 moves along the extension direction of the slit 121. Optionally, an elongated hole 271 is formed on the needle holder 27, and the elongated hole 271 is connected to the first frame 241 by a bolt. The provision of the elongated hole 271 makes the position of the needle holder 27 adjustable.

[0051] In some embodiments, the controller 3 includes a motor control circuit, a limit circuit, a potentiometer, a digital tube connection circuit and a power conversion circuit. Figure 6 As shown, the controller 3 includes a control circuit board, which includes a left limit circuit, a right limit circuit, a forward control circuit, a reverse control circuit, a motor drive circuit, a rebound circuit and a positioner, a power conversion circuit and a digital tube connection circuit.

[0052] like Figure 7As shown, the potentiometer and digital tube connection circuit includes a vacuum potentiometer, operational amplifiers U1A and U1B; resistors R1, R2, R3, and R4; and capacitors C1, C2, and C3. The positive input of operational amplifier U1A is connected to the left end of resistor R4 and the right end of R3. The right end of R4 is grounded, and the left end of R3 is connected to the -12V external power supply. Capacitor C2 acts as a bypass capacitor, with its upper end connected to the left end of resistor R3 and its lower end grounded. The negative input of operational amplifier U1A is directly connected to the output as a voltage follower, and then connected to pin 3 of the vacuum potentiometer. The positive input of operational amplifier U1B is connected to the left end of resistor R2 and the right end of R1. The right end of R2 is grounded, and the left end of R1 is connected to the +12V external power supply. Capacitor C1 acts as a bypass capacitor, with its upper end connected to the left end of resistor R1 and its lower end grounded. The negative input of operational amplifier U1B is directly connected to the output as a voltage follower, and then connected to pin 2 of the vacuum potentiometer. The display module is a three-wire ultra-small DC voltage display digital tube. Pin 1 of the digital tube is connected to the +12V of the power supply, and pin 2 is connected to pin 2 of the vacuum potentiometer. That is, the potentiometer position voltage U P . The two ends of capacitor C3 are connected to pin 2 of the vacuum potentiometer and ground respectively. The display range of the vacuum potentiometer is 0V~5V. In order to avoid inaccurate readings of the vacuum potentiometer due to voltage fluctuations, 0V~5V cannot be included. Therefore, the voltage of about -0.2V is obtained by dividing -12V through resistors R3 and R4, and the voltage of about 5.4V is obtained by dividing +12V through resistors R1 and R2. This makes the power supply voltage of the potentiometer -0.2V~5.4V. Even if the power supply oscillates, the normal reading within 0V~5V can be guaranteed. When the vacuum potentiometer is working, it is located in a vacuum and accompanied by a slow-speed motor. The digital tube and voltage acquisition circuit work outside the vacuum, and the one-dimensional motion position of the probe 28 is represented by the voltage size.

[0053] like Figure 8 As shown, the function of the motor drive circuit is to provide the power required for the normal operation of the motor. The selected power chip U2 is the LM1805 commonly used in industrial instruments. The power chip U2 is powered by ±12V, the positive input terminal is grounded, and the reverse input terminal is connected to the right end of R5, the cathode of diode D1, the anode of diode D2, the upper end of capacitor C4, and the left end of resistor R6. Capacitor C5 is connected in parallel at both ends of resistor R6, which plays the role of RC filtering to avoid high-frequency oscillation and excessive distortion. Diodes D1 and D2 are connected in reverse parallel to form a limiting diode. On the one hand, it is used to limit the input voltage of power chip U2 and protect power chip U2. On the other hand, it stops power output when the input voltage is less than 0.3V. The left end of R5 is connected to the output end of the forward and reverse control circuit, the anode of diode D1, the cathode of diode D2, and the lower end of capacitor C4 are all grounded, and the left end of resistor R6 is connected to the output of power chip U2 and then connected to the positive pole of the motor.

[0054] like Figure 9 As shown, the limit circuit consists of operational amplifiers U3A and U3B; NAND gates U4A and U4B; switch chips U5A and U5B; resistors R8, R9, R10, and R11; diodes D3, D4, D5, and D6; capacitors C7 and C8; the NAND gate chip U4 is SN74HC00, and the switch chip U5 is DG201. The position of the vacuum potentiometer will output its current position in the form of potentiometer voltage UP to the reverse input terminal of the operational amplifier U3A and the positive input terminal of the operational amplifier U3B respectively. Capacitors C7 and C8 are connected to the reverse input terminal of the operational amplifier U3A and the positive input terminal of the operational amplifier U3B as bypass capacitors, and the other ends are grounded; the positive input terminal of the operational amplifier U3A and the reverse input terminal of the operational amplifier U3B are connected to 5V and ground respectively; the output terminal of the operational amplifier U3A and the output terminal of the operational amplifier U3B are connected to the anodes of the diodes D3 and D6 respectively, and the cathodes of the two diodes D3 and D6 are connected to the upper end of the resistor R8 and the lower end of R10 respectively, and the lower end of the resistor R8 and R10 respectively. The upper end of 0 and the cathode of 5V voltage zener diodes D4 and D5 are connected to the two input ends of NAND gates U4A and U4B respectively. The anodes of 5V voltage zener diodes D4 and D5 are grounded. The output ends of NAND gates U4A and U4B are connected to the control ends of switch chips U5A and U5B respectively. The left end of switch chip U5A is connected to the right end of R9, and the left end of R9 is connected to +12V. The left end of switch chip U5B is connected to the right end of R11, and the left end of R11 is connected to -12V. The output ends of switch chips U5A and U5B are connected to the power input of the forward and reverse control circuits respectively. The limit circuit and the forward and reverse control circuit are connected in series. Only when the control signals are met at the same time will the ±12V voltage be transmitted to the input end of the motor drive circuit. When the position voltage U P When the voltage is greater than 0, operational amplifier U3B outputs its forward supply voltage. After passing through the voltage regulator, the voltage of 5V is input as a logic 1 to the two input terminals of NAND gate U4B. After the logic conversion, the NAND gate outputs a 0 to switch chip U5B, turning on the switch. -12V is supplied to the left end of R5 in the motor drive circuit 11, allowing the motor to rotate forward. Similarly, when the position voltage UP of the vacuum potentiometer is less than 5V, the logic execution causes switch chip U5A to turn on, and +12V is supplied to the left end of R5 in the motor drive circuit, allowing the motor to rotate forward.

[0055] When the position voltage U P When the voltage reaches 5V or 0V, the limit circuit will cut off the power supply of the vacuum reduction motor, and it will get stuck. Therefore, a rebound circuit needs to be designed to solve the problem of getting stuck. Figure 10As shown, the forward and reverse control circuit integrates a rebound circuit. The rebound function of the rebound circuit is mainly realized by a retriggered monostable multivibrator U6 with a reset function. Model CD74HC123E, it integrates two monostable multivibrators U6A and U6B. The position voltage UP of the vacuum potentiometer is connected to U6A pin 1, and the two ends of capacitor C9 are connected to U6A pins 14 and 15 respectively. The upper end of resistor R14 is connected to the right end of capacitor C9, and the lower end is connected to U6A pin 16, and is also connected to a 5V power supply. When the position voltage UP reaches 5V, pin 1 changes from high level to low level. U6A is triggered after detecting a falling edge signal of pin 1. Pin 4 will output a low level pulse to one input end of NAND gate U7A. The other input end of NAND gate U7A is connected to the right end of resistor R15, the left end of resistor R15 is connected to the right end of resistor R12, and the left end of the forward button is connected at the same time. The right end of the forward button is grounded, resistor R12 is connected to a 5V power supply, the left end of resistor R16 is connected to a 5V power supply, and the right end is connected to the right end of resistor R15 and the left end of capacitor C10. The right end of capacitor C10 is grounded, and the forward button loses control under the action of the limit circuit. At this time, one of the two inputs of U7A is high and the other is low, then U7A outputs a high level at the output end according to the internal logic, and the output end of U7A is connected to the gate of the field effect tube Q1. At this time, the gate is turned on, so that the switch chip U8A is turned on, and -12V is supplied to the left end of R5 in the motor drive circuit. The forward rebound of the motor makes the position voltage UP of the vacuum potentiometer return to between 0V and 5V; the position voltage UP of the vacuum potentiometer is connected to pin 9 of U6B, and the two ends of the capacitor C11 are respectively connected to pins 6 and 7 of U6B, the upper end of the resistor R20 is connected to the right end of the capacitor C11, and the lower end is connected to the 5V power supply, and pin 8 of U6B is grounded. When the position voltage UP reaches 0V, pin 9 will change from low level to high level. U6B will be triggered after detecting a falling edge signal of pin 9. Pin 12 will output a low level pulse to one input end of NAND gate U7B. The other input end of NAND gate U7B is connected to the right end of resistor R21, the left end of resistor R21 is connected to the right end of resistor R18, and the left end of the reverse button is connected at the same time. The right end of the reverse button is grounded, resistor R18 is connected to a 5V power supply, the left end of resistor R22 is connected to a 5V power supply, and the right end is grounded. The right end of the terminating resistor R21 and the left end of the capacitor C12 are connected to the ground. The right end of the capacitor C12 is grounded. The reverse button loses its control function under the action of the limit circuit. At this time, one of the two inputs of U7B is high and the other is low. Then U7B outputs a high level at the output end according to the internal logic. The output end of U7B is connected to the gate of the field effect tube Q2. At this time, the gate is turned on, so that the switch chip U8B is turned on, and +12V is supplied to the left end of R5 in the motor drive circuit. The motor reverses and rebounds to make the position voltage U P Returning to between 0V and 5V can effectively prevent the device from getting stuck.

[0056] like Figure 11 As shown, all chips and motors on the control circuit board require stable ±12V or 5V power supply. ±12V is powered by an external power supply, and 5V is converted from +12V through the power conversion circuit 12. The model selected for the power conversion chip U9 is MC7805. The VIN pin of the power conversion chip U9 is connected to +12V and the positive pole of the tantalum capacitor C13, and the negative pole is grounded. The VOUT pin of the power conversion chip U9 is connected to the positive pole of the tantalum capacitor C14, and the negative pole and the GND pin of the power conversion chip U9 are grounded. At this time, the VOUT pin of the power conversion chip U9 can output a stable 5V voltage.

[0057] The present invention can be used in conjunction with a DC voltage source and an ammeter to measure the electron cloud distribution at the slit 121 on the graphite plate 12. At this time, the microwave PFG body 1 and the moving mechanism in the vacuum cavity 11 need to be installed in the corresponding vacuum cavity, and the controller is placed in the atmospheric environment. The connecting wires between the two parts are all wires suitable for use in a vacuum. The present invention can be used in conjunction with a vector network analyzer to measure the field distribution of the plasma cavity 11 of the microwave PFG body 1. At this time, the moving mechanism in the vacuum and the controller can both be placed in the atmospheric environment and do not need to be installed in the vacuum cavity.

[0058] like Figure 12 As shown, the extraction current curve of the slit 121 of the graphite plate 12 is measured as a function of position under the conditions of microwave power 4 dBm, frequency 3368 MHz, extraction voltage -5 V, and air flow 3 sccm; Figure 13 These are the field distribution curves measured with a vector network analyzer at a frequency of 3368 MHz. From these two figures, it can be seen that the present invention can achieve the design goal.

[0059] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like to indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0060] In the present invention, unless otherwise specified or limited, the terms "installed," "connected," "connect," "fixed," etc. should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integration; mechanical connection, electrical connection; direct connection, or indirect connection through an intermediate medium; internal communication between two components, or interaction between two components, unless otherwise specified. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on specific circumstances.

[0061] In the description of this specification, the reference terms "this embodiment", "one embodiment", "some embodiments", "example", "specific example", or "some examples" mean that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic expressions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in an appropriate manner in any at least one embodiment or example. In addition, those skilled in the art can combine and combine different embodiments or examples described in this specification and the features of different embodiments or examples, unless they are contradictory.

[0062] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "plurality" means at least two, such as two, three, etc., unless otherwise specifically defined.

[0063] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent replacements, and simple improvements made to the essential contents of the present invention should be included in the scope of protection of the present invention.

Claims

1. A microwave PFG detection device for detecting the plasma chamber field distribution and electron cloud distribution of a microwave PFG, characterized in that: The mobile mechanism is provided on the microwave PFG body, and the mobile mechanism includes: A connecting frame connected to the microwave PFG body; A slide rail is provided on the connecting frame, wherein the slide rail is parallel to the graphite plate of the microwave PFG body; a mounting frame, the mounting frame being slidably connected to the slide rail; A drive assembly is provided on the mounting frame, the drive assembly being drivingly connected to the slide rail and configured to drive the mounting frame to slide along the slide rail; The detection component is arranged on the mounting frame.

2. The microwave PFG detection device according to claim 1, characterized in that: The slide rail is a rack, and the driving assembly includes a motor and a gear. The gear is installed on the driving shaft of the motor and meshes with the rack.

3. The microwave PFG detection device according to claim 2, characterized in that: The slide rail is provided with slide grooves on two surfaces perpendicular to the graphite plate. The mounting frame includes a first frame body and a second frame body, the first frame body and the second frame body are fixedly connected, and sliding balls are provided on the first frame body and the second frame body, and the sliding balls are rollingly set in the sliding groove.

4. The microwave PFG detection device according to claim 3, characterized in that: The detection assembly includes a needle holder and a probe. The needle holder is adjustably mounted on the first frame, and the probe is mounted on the needle holder.

5. The microwave PFG detection device according to claim 4, characterized in that: A slit is formed on the graphite plate, the slide rail is parallel to the slit, and the probe is used to detect the electron cloud distribution at the slit.

6. The microwave PFG detection device according to claim 4, characterized in that: A long hole is formed on the needle holder, and the long hole is connected to the first holder body through a bolt.

7. The microwave PFG detection device according to claim 3, characterized in that: The moving mechanism further includes a vacuum potentiometer, which is arranged on the second frame, and a rotating shaft of the vacuum potentiometer is connected to the gear.

8. The microwave PFG detection device according to claim 3, characterized in that: The drive assembly further includes a mounting plate, and the motor is fixed on the mounting plate. The mounting plate is located between the first frame and the second frame, and is fixed between the first frame and the second frame.

9. The microwave PFG detection device according to claim 9, characterized in that: The microwave PFG detection device further includes a controller, which is used to control the moving mechanism.

10. The microwave PFG detection device according to claim 1, characterized in that: The controller includes a motor control circuit, a limit circuit, a potentiometer, a digital tube connection circuit and a power conversion circuit.

Images