Aoi inspection equipment for copper clad ceramic substrate detection

Abstract

The application discloses a kind of AOI detection equipment for copper-clad ceramic substrate detection, belong to AOI detection equipment technical field, it includes basic pedestal, detection chamber is provided on the basic pedestal, the outer side of the basic pedestal is provided with multiple cover plates, and the cover plate is all opened with heat dissipation port.Through the setting of flap mechanism, linkage box is linked, after suction cup adsorbs copper-clad ceramic substrate, it can automatically lift copper-clad ceramic substrate and make it be in vertical state, so when optical detection is carried out to copper-clad ceramic substrate, realize double-sided synchronous detection, to improve its detection efficiency, in optical detection system, it is equipped with light supplement mechanism, by setting sunflower lamp group, realize multispectral illumination, sunflower lamp group integrates RGBW four color LED and ultraviolet, infrared special light source, realize multi-angle dynamic illumination under high-speed rotating state, when sunflower lamp group moves at high speed, multi-color light source cooperates with multi-angle illumination, compared with traditional white light, ultraviolet crack, infrared copper thickness can be more easily identified.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of AOI detection equipment, and specifically relates to an AOI detection equipment for detecting a copper-clad ceramic substrate. BACKGROUND

[0002] The AOI detection equipment for detecting a copper-clad ceramic substrate is an automatic detection system based on optical imaging and artificial intelligence algorithms, and is specially used for detecting surface defects of a copper-clad ceramic substrate (such as a DCB substrate and an AMB substrate), including copper layer scratches, cracks, uneven thickness, alignment deviation, ceramic cracks and contaminants. The core technologies include high-resolution optical imaging (such as a linear array CCD or multi-spectral imaging), a deep learning defect classification algorithm, a precise motion control system and a three-dimensional topography reconstruction technology. Compared with traditional manual visual inspection or two-dimensional AOI, the equipment can adapt to the high-reflective surface characteristics of the ceramic substrate, combines infrared or confocal sensing technology to enhance the defect recognition rate, the detection accuracy can reach the micron level, and is integrated with an SPC statistical analysis function, so that the high reliability quality inspection requirements before power semiconductor module packaging are met, and the equipment is widely applied to high-end electronic manufacturing fields such as new energy vehicles, photovoltaic inverters and IGBT modules.

[0003] The existing AOI detection technology for a copper-clad ceramic substrate mainly has the following technical defects:

[0004] The traditional horizontal placement detection method needs to be detected twice independently to complete double-sided detection, so that the detection efficiency is low, and the average time consumption is increased by more than 40%;

[0005] The fixed-angle white light illumination system has obvious detection blind spots, and the missing detection rate of microcracks (<10 mu m) is as high as 18%, and the quantitative detection of copper thickness and other key parameters cannot be realized;

[0006] The static illumination method causes the illumination attenuation of the edge region of the substrate to be 35%, which seriously affects the detection consistency;

[0007] The mechanical conveying system adopts a horizontal turning design, and the substrate breakage rate is generally more than 0.1%, and there is a cumulative positioning error. SUMMARY

[0008] In order to overcome the above defects, the application provides an AOI detection equipment for detecting a copper-clad ceramic substrate, which solves the problems in the prior art.

[0009] To achieve the above purpose, the application provides the following technical scheme: an AOI detection equipment for detecting a copper-clad ceramic substrate, comprising:

[0010] The utility model provides a foundation base, which is provided with a detection chamber, and a plurality of cover plates are arranged outside the foundation base, each of the cover plates is provided with a heat dissipation opening, a discharge cabinet door and an inlet cabinet door are arranged on the outer wall of the detection chamber, two groups of heat dissipation ports are arranged on the top of the detection chamber, an operation panel and a plurality of operation knobs are arranged on one side of the detection chamber, and a light-proof observation window is further arranged on the outer wall of the detection chamber; a flap mechanism and a light supplementing mechanism are arranged in the detection chamber.

[0011] The light supplementing mechanism comprises two vertical partitions fixedly connected in the detection chamber, a region between the two vertical partitions is used as an AOI detection operation area, a reciprocating threaded rod is rotatably connected to the vertical partition, a servo motor is built in the vertical partition and used for controlling and driving the reciprocating threaded rod, two matching slide rods are fixedly connected to the vertical partition, the two matching slide rods are distributed on the two sides of the reciprocating threaded rod and are symmetrical to the axis of the reciprocating threaded rod, a wing nut is threadedly connected to the reciprocating threaded rod, slide sleeves are welded at the two ends of the wing nut, the slide sleeves are slidably connected to the corresponding matching slide rods on one side, a high-speed motor is arranged on the wing nut, and a sunflower lamp set is arranged on the high-speed motor.

[0012] As a further scheme of the utility model, four LED light supplementing plates are arranged on the vertical partition, and the four LED light supplementing plates are located on the two sides of the reciprocating threaded rod and are deviated towards the two ends of the reciprocating threaded rod.

[0013] As a further scheme of the utility model, fixed tracks are arranged on the two sides of the vertical partition, light shielding plates are slidably connected in the fixed tracks, and three-stage electric telescopic rods are arranged in the detection chamber at positions corresponding to the light shielding plates, and output ends of the three-stage electric telescopic rods are fixedly connected with the light shielding plates.

[0014] As a further scheme of the utility model, the sunflower lamp set is integrated with multicolor LEDs on a rotating ring structure and is connected with the high-speed motor, the sunflower lamp set is powered through a slip ring to realize continuous rotation at any angle.

[0015] As a further scheme of the utility model, the flap mechanism comprises two slide clamping plates fixedly connected in the detection chamber, slide blocks are slidably connected in the slide clamping plates, linkage boxes are fixedly connected to the sides of the two slide blocks that are close to each other, fan-shaped plates are fixedly connected to the sides of the two linkage boxes that are close to each other, arc-shaped grooves are formed in the fan-shaped plates, swing arms are rotatably connected to the geometric centers of the fan-shaped plates, limit knobs are arranged on the swing arms and slidably connected in the arc-shaped grooves, a suction disc plate is fixedly connected between the two swing arms, and a plurality of suction discs are arranged on the bottom of the suction disc plate.

[0016] As a further scheme of the present application: one side of the linkage box is provided with a reversible synchronous motor, a worm gear is rotationally connected in the linkage box, an output end of the reversible synchronous motor penetrates through the linkage box and is coaxially fixedly connected with a worm, the worm is engaged with the worm gear, and a rotating shaft of the worm gear penetrates through the linkage box and the sector plate and is coaxially fixedly connected with the swing arm.

[0017] As a further scheme of the present application: the worm gear is coaxially fixedly connected with a driving bevel gear, a driven bevel gear is rotationally connected to the inner bottom of the linkage box, the driving bevel gear and the driven bevel gear are engaged with each other, a driving gear is rotationally connected to the bottom of the linkage box, the driven bevel gear is coaxially fixedly connected with the driving gear, and a matching toothed plate is arranged in the sliding clamping plate and engaged with the driving gear on the corresponding side.

[0018] Compared with the prior art, the present application has the beneficial effects that:

[0019] By arranging the turnover plate mechanism and utilizing linkage of the linkage box, the suction cup can automatically lift the copper-clad ceramic substrate to a vertical state after adsorbing the copper-clad ceramic substrate, so that double-side synchronous detection is realized when the copper-clad ceramic substrate is optically detected, thereby improving the detection efficiency. BRIEF DESCRIPTION OF DRAWINGS

[0020] Figure 1 is a schematic diagram of the three-dimensional structure of the present application;

[0021] Figure 2 is a schematic diagram of the three-dimensional internal structure of the detection chamber of the present application;

[0022] Figure 3 is a schematic diagram of the three-dimensional structure of the vertical partition of the present application;

[0023] Figure 4 is a schematic diagram of the three-dimensional structure of the turnover plate mechanism part of the present application;

[0024] Figure 5 is a schematic diagram of the three-dimensional structure of the turnover plate mechanism part of the present application from another angle;

[0025] Figure 6 is a schematic diagram of the three-dimensional structure of the sliding clamping plate part of the present application;

[0026] Figure 7 is a schematic diagram of the three-dimensional structure of the linkage box of the present application;

[0027] Figure 8 It is a schematic diagram of the three-dimensional internal structure of the linkage box of the present invention.

[0028] In the figure: 1. Basic base; 2. Inspection chamber; 3. Cover plate; 4. Discharge cabinet door; 5. Feed cabinet door; 6. Heat dissipation port; 7. Operation panel; 8. Operation knob; 9. Light-proof observation window; 10. Vertical partition; 11. Reciprocating threaded rod; 12. Matching slide rod; 13. Wing nut; 14. High-speed motor; 15. Sunflower lamp group; 16. LED fill light board; 17. Fixed track; 18. Sunshade; 19. Three-stage electric telescopic rod; 20. Sliding card plate; 21. Sliding block; 22. Linkage box; 23. Fan plate; 24. Arc groove; 25. Swing arm; 26. Limit button; 27. Suction cup plate; 28. Suction cup; 29. ​​Reversible synchronous motor; 30. Worm gear; 31. Worm; 32. Driving bevel gear; 33. Driven bevel gear; 34. Driving gear; 35. Matching gear plate. DETAILED DESCRIPTION

[0029] The technical solution of this patent is further described in detail below in conjunction with specific implementation methods.

[0030] Example 1

[0031] like Figure 1 As shown, the first embodiment of the present invention provides an AOI inspection equipment for copper-clad ceramic substrate inspection, which can realize basic equipment monitoring, autonomous heat dissipation and substrate observation operations and other functions. It includes a basic base 1, on which a detection chamber 2 is arranged, and multiple cover plates 3 are arranged on the outside of the basic base 1, and each cover plate 3 is provided with a heat dissipation port, and a discharge cabinet door 4 and a feed cabinet door 5 are arranged on the outer wall of the detection chamber 2. Two groups of heat dissipation ports 6 are arranged on the top of the detection chamber 2, and an operation panel 7 and multiple groups of operation knobs 8 are arranged on one side of the detection chamber 2. A light-proof observation window 9 is also arranged on the outer wall of the detection chamber 2, and a flip mechanism and a fill light mechanism are arranged in the detection chamber 2.

[0032] Specifically, the basic base 1 provides overall support for the equipment, integrates the core transmission and control system, and ensures stability and accuracy during the inspection process. The inspection room 2 provides a closed optical inspection environment, integrates imaging, lighting and auxiliary mechanisms, and ensures inspection safety and consistency. The multiple cover plates 3 on the basic base 1 correspond to the positions of each transmission system and control system, and provide them with heat dissipation and inspection port positions. The heat dissipation port 6 at the top of the inspection room 2 mainly provides heat dissipation for the power supply components in the inspection room 2. The inspector can turn the equipment on and off and monitor parameters through the operation panel 7 and the operation knob 8. The light-proof observation window 9 is provided with optical glass and coated with infrared / ultraviolet cut-off film to prevent stray light from interfering with camera imaging. At the same time, a sliding sunshade 18 is provided, which is closed during inspection to avoid the influence of ambient light.

[0033] Example 2

[0034] like Figures 2-3 As shown, this is the second embodiment of the present invention. Different from the previous embodiment, this embodiment provides a fill light function for the AOI inspection equipment for copper-clad ceramic substrate inspection. The multi-angle dynamic lighting of the copper-clad ceramic substrate is achieved through the high-speed rotating and reciprocating sunflower lamp group 15. It includes two vertical partitions 10 fixedly connected to the inspection chamber 2. The area between the two vertical partitions 10 is used as the AOI inspection operation area. The vertical partition 10 is rotatably connected to a reciprocating threaded rod 11. The vertical partition 10 is provided with a plurality of reciprocating threaded rods. A servo motor is provided for controlling and driving the reciprocating threaded rod 11. Two mating slide rods 12 are also fixedly connected to the vertical partition 10. The two mating slide rods 12 are distributed on both sides of the reciprocating threaded rod 11 and are symmetrical with the axis of the reciprocating threaded rod 11. A wing nut 13 is threadedly connected to the reciprocating threaded rod 11. Both ends of the wing nut 13 are welded with a sliding sleeve, and the sliding sleeve is slidably connected to the mating slide rod 12 on the corresponding side. A high-speed motor 14 is provided on the wing nut 13, and a sunflower lamp group 15 is provided on the high-speed motor 14.

[0035] The sunflower lamp group 15 in this device integrates RGBW four-color LEDs and ultraviolet and infrared special light sources. The traditional lighting method uses a static multi-angle light source, and the camera takes multiple photos to synthesize the image, which is time-consuming and the equipment imaging detection is complicated. The sunflower lamp group 15 is used to scan and take multiple photos at high speed. The high-speed rotation of the light source can cover all lighting angles in a single exposure cycle, greatly improving the efficiency.

[0036] The rotation speed of the sunflower lamp group 15 is limited to 1200RPM to 2400RPM. The encoder is used to trigger the camera exposure every 5°, that is, 72 times / revolution. Using the specified light source in the sunflower lamp group 15 at different angles, different types of surface defects of copper-clad ceramic substrates can be detected. For example, at 90°-180°, the light source mode is adjusted to infrared light and diffuse light to detect whether the thickness of the copper layer is uniform.

[0037] The servo motor in the vertical partition 10 drives the reciprocating threaded rod 11 to rotate, and the wing nut 13 on the reciprocating threaded rod 11 can move along the axial direction of the reciprocating threaded rod 11. Slide sleeves are provided on both sides of the wing nut 13. The purpose of providing the slide sleeve is to cooperate with the slide rod 12 to ensure the stability of the wing nut 13 during movement, and at the same time to alleviate the mechanical vibration of the sunflower lamp group 15 on the entire equipment when it rotates at high speed to a certain extent.

[0038] The rest of the structure is the same as that of Example 1.

[0039] Example 3

[0040] like Figures 2-3As shown, it is the third embodiment of the present application, unlike the last embodiment, the embodiment provides the main purpose of the light shield 18 of the AOI detection equipment for the detection of the copper clad ceramic substrate and the power supply mode of the sunflower lamp set 15, so that the sunflower lamp set 15 can still ensure stable power supply when rotating at high speed, and the light shield 18 can shield the ambient light when the sunflower lamp set 15 commutates, avoiding stray light pollution image, which comprises that the fixed track 17 is arranged on both sides of the vertical partition 10, the light shield 18 is slidably connected in the fixed track 17, the three-stage electric telescopic rod 19 is arranged in the detection chamber 2 corresponding to the position of the light shield 18, the output end of the three-stage electric telescopic rod 19 is fixedly connected with the light shield 18, the sunflower lamp set 15 is integrated with multi-color LED on a rotating ring structure and is connected with the high-speed motor 14, the sunflower lamp set 15 is powered through a slip ring to realize continuous rotation at any angle, in order to reduce the wear of parts caused by mechanical impact, the sunflower lamp set 15 needs to be decelerated when moving to the terminal point of the one-way stroke, in the deceleration process, the high-speed rotation of the sunflower lamp set 15 is paused, the local area of the substrate loses dynamic multi-angle illumination, at this time, the light shield 18 is quickly extended under the drive of the three-stage electric telescopic rod 19, and the LED lamp beads on the LED light compensation plate 16 are lit to compensate light for the substrate, preventing the interruption of crack detection.

[0041] The rest of the structure is the same as that of embodiment 2.

[0042] Embodiment 4

[0043] As Figures 4-8As shown, it is the third embodiment of the present application, unlike the last embodiment, this embodiment provides the AOI detection equipment for the automatic turnover function of the copper clad ceramic substrate detection, can automatically turn over the copper clad ceramic substrate before AOI detection, make it in the vertical state, it includes, the turnover mechanism includes two fixedly connected in the detection chamber 2 sliding card 20, the sliding card 20 is slidably connected with slider 21, the two sliders 21 are fixedly connected with linkage box 22 on the side of each other, the two linkage boxes 22 are fixedly connected with sector plate 23 on the side of each other, the sector plate 23 is provided with arc slot 24, the sector plate 23 is rotatably connected with swing arm 25 at the geometric center of rotation, the swing arm 25 is provided with limit button 26, the limit button 26 is slidably connected in the arc slot 24, the two swing arms 25 are fixedly connected with suction plate 27, the bottom of suction plate 27 is provided with a plurality of suction cups 28, the linkage box 22 is provided with reversible synchronous motor 29, the linkage box 22 is rotatably connected with worm gear 30, the output end of reversible synchronous motor 29 penetrates linkage box 22 and is coaxially fixedly connected with worm 31, worm 31 is engaged with worm gear 30, the rotation shaft of worm gear 30 penetrates linkage box 22 and sector plate 23 and is coaxially fixedly connected with swing arm 25, worm gear 30 is coaxially fixedly connected with driving bevel gear 32, the inner bottom of linkage box 22 is rotatably connected with driven bevel gear 33, driving bevel gear 32 and driven bevel gear 33 are engaged with each other, the bottom of linkage box 22 is rotatably connected with driving gear 34, driven bevel gear 33 is coaxially fixedly connected with driving gear 34, the sliding card 20 is provided with matching toothed plate 35, the matching toothed plate 35 is engaged with the corresponding side driving gear 34.

[0044] In the initial state, the suction plate 27 and the swing arm 25 are in a horizontal state, the suction plate 27 provides stable suction force for the suction cup 28 through the connection with the internal negative pressure interface of the equipment, the suction cup 28 can stably adsorb the copper clad ceramic substrate, compared with the general clamping operation, the control mode of the suction cup 28 adsorption can avoid the copper clad ceramic substrate cracking caused by uneven clamping stress, after the suction cup 28 adsorption is completed, the reversible synchronous motor 29 drives the worm 31 to rotate, the worm gear 30 engaged with the worm 31 will rotate, when the worm gear 30 rotates, the swing arm 25 coaxially fixedly connected with the worm gear 30 will rotate, because the arc slot 24 is provided on the sector plate 23, the limit button 26 on the swing arm 25 is located in the arc slot 24, because the maximum angle of the arc slot 24 is 90°, so the maximum rotation angle of the swing arm 25 is also 90°, while the worm gear 30 rotates and makes the swing arm 25 and the suction plate 27 rotate, the copper clad ceramic substrate will be in a vertical state.

[0045] Since the driving bevel gear 32 is arranged at one end of the worm 31, the driving bevel gear 32 will rotate with the rotation of the worm 31, the driven bevel gear 33 engaged with the driving bevel gear 32 will rotate, the driving gear 34 at the bottom of the linkage box 22 is coaxially fixedly connected with the driven bevel gear 33, the driving gear 34 is synchronously driven, and since the driving gear 34 is engaged with the matching tooth plate 35 in the sliding clamping plate 20, then the linkage box 22 and the copper-clad ceramic substrate will move to the middle part of the sliding clamping plate 20, so as to ensure that the copper-clad ceramic substrate can move to the middle part of the sliding clamping plate 20 while rotating to the vertical state, and the purpose of this is to ensure that the copper-clad ceramic substrate has the same distance with the sunflower lamp groups 15 on both sides during detection.

[0046] The rest of the structure is the same as that of Embodiment 3.

[0047] In summary, the detection mode of arranging light sources in cooperation with cameras on both sides of the vertical substrate can complete double-side detection in a single clamping, and compared with the traditional detection mode, the detection efficiency is greatly improved.

[0048] The preferred embodiments of the application are described in detail above, but the application is not limited to the above embodiments, and various changes can be made within the knowledge of those skilled in the art without departing from the purpose of the application.

Claims

1. An AOI inspection device for copper-clad ceramic substrate inspection, characterized in that: include: A basic base (1), a detection chamber (2) is provided on the basic base (1), a plurality of cover plates (3) are provided on the outside of the basic base (1), and a heat dissipation port is provided on each of the cover plates (3), a discharge cabinet door (4) and a feed cabinet door (5) are provided on the outer wall of the detection chamber (2), two groups of heat dissipation ports (6) are provided on the top of the detection chamber (2), an operation panel (7) and a plurality of groups of operation knobs (8) are provided on one side of the detection chamber (2), a light-proof observation window (9) is also provided on the outer wall of the detection chamber (2), and a flap mechanism and a light-filling mechanism are provided inside the detection chamber (2); The fill light mechanism includes two vertical partitions (10) fixedly connected to the detection room (2), and the area between the two vertical partitions (10) is used as the AOI detection operation area. A reciprocating threaded rod (11) is rotatably connected to the vertical partition (10), and a servo motor is built into the vertical partition (10) for controlling and driving the reciprocating threaded rod (11). Two matching slide rods (12) are also fixedly connected to the vertical partition (10), and the two matching slide rods (12) are distributed on both sides of the reciprocating threaded rod (11) and are symmetrical with the axis of the reciprocating threaded rod (11). A wing nut (13) is threadedly connected to the reciprocating threaded rod (11), and a sliding sleeve is welded at both ends of the wing nut (13). The sliding sleeve is slidably connected to the matching slide rod (12) on the corresponding side. A high-speed motor (14) is provided on the wing nut (13), and a sunflower lamp group (15) is provided on the high-speed motor (14); The flip mechanism comprises two sliding cards (20) fixedly connected to the detection chamber (2), a slider (21) is slidably connected to the sliding card (20), a linkage box (22) is fixedly connected to the side of the two sliders (21) close to each other, a fan-shaped plate (23) is fixedly connected to the side of the two linkage boxes (22) close to each other, an arc groove (24) is provided on the fan-shaped plate (23), a swing arm (25) is rotatably connected at the geometric rotation center of the fan-shaped plate (23), a limit button (26) is provided on the swing arm (25), the limit button (26) is slidably connected to the arc groove (24), a suction cup plate (27) is fixedly connected between the two swing arms (25), a plurality of suction cups (28) are provided at the bottom of the suction cup plate (27), a reversible synchronous motor (29) is provided on one side of the linkage box (22), and the linkage box (22) A worm gear (30) is rotatably connected to the inside, and the output end of the reversible synchronous motor (29) passes through the linkage box (22) and is coaxially fixedly connected to a worm (31), the worm (31) meshes with the worm gear (30), the rotating shaft of the worm gear (30) passes through the linkage box (22) and the sector plate (23) and is coaxially fixedly connected to the swing arm (25), the worm gear (30) is coaxially fixedly connected to a driving bevel gear (32), the inner bottom of the linkage box (22) is rotatably connected to a driven bevel gear (33), the driving bevel gear (32) and the driven bevel gear (33) are meshed with each other, the bottom of the linkage box (22) is rotatably connected to a driving gear (34), the driven bevel gear (33) and the driving gear (34) are coaxially fixedly connected, and a matching tooth plate (35) is provided in the sliding card plate (20), and the matching tooth plate (35) is meshed with the driving gear (34) on the corresponding side.

2. The AOI inspection equipment for copper-clad ceramic substrate inspection according to claim 1, characterized in that: Four LED light-filling panels (16) are provided on the vertical partition (10), and the four LED light-filling panels (16) are located on both sides of the reciprocating threaded rod (11) and are biased towards the two ends of the reciprocating threaded rod (11).

3. The AOI inspection equipment for copper-clad ceramic substrate inspection according to claim 2, characterized in that: Fixed rails (17) are provided on both sides of the vertical partition (10), and a light shielding plate (18) is slidably connected in the fixed rails (17). A three-stage electric telescopic rod (19) is provided in the detection chamber (2) at a position corresponding to the light shielding plate (18), and an output end of the three-stage electric telescopic rod (19) is fixedly connected to the light shielding plate (18).

4. The AOI inspection equipment for copper-clad ceramic substrate inspection according to claim 3, characterized in that: The sunflower light group (15) is composed of multi-color LEDs integrated on a rotating ring structure and connected to a high-speed motor (14). The sunflower light group (15) is powered by a slip ring to achieve continuous rotation at any angle.

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