Vacuum swing valve

Abstract

The vacuum swing valve comprises a valve body component, a valve element component and a driving component, and the valve body component comprises a valve cavity and an opening; the valve element component is movably arranged in the valve cavity so as to adjust the overlapping degree of the valve element component and the opening. The driving component comprises a shaft rod and a driving end, the shaft rod is connected with the valve element component, the driving end is used for driving the shaft rod to ascend, descend and rotate, the driving component further comprises a spiral groove and a fixing pin, the spiral groove is formed in the shaft rod and comprises a starting end and a tail end, a port is formed in the tail end and extends in the axis direction of the shaft rod, and the fixing pin is arranged in the spiral groove. The fixing pin is used for being matched with the spiral groove so as to guide movement of the shaft rod. The vacuum swing valve has a better sealing effect.

Description

Technical Field

[0001] The present invention relates to the field of vacuum valves, in particular to the field of vacuum swing valves. Background Art

[0002] A valve is a component used to cut off or connect flowing media. A vacuum valve is a vacuum system component that changes the direction or flow of fluid or cuts or connects pipelines within a vacuum system. Swing valves are a common valve structure, and there is a need for a swing valve with a simple structure, low cost, quiet sealing, and excellent sealing performance. Summary of the Invention

[0003] An object of the present invention is to provide a vacuum swing valve.

[0004] To achieve the above-mentioned purpose, the vacuum swing valve includes a valve body component, a valve core component and a driving component, the valve body component includes a valve cavity and an opening; the valve core component is movably arranged in the valve cavity to control the opening and closing of the valve core component and the opening; the driving component includes a shaft rod and a driving end, the shaft rod is connected to the valve core component, and the driving end is used to drive the shaft rod to rise and fall and rotate, wherein the driving component also includes a spiral groove and a fixing pin, the spiral groove is arranged on the shaft rod, including a starting end and an end end, the end is provided with a port, the port extends along the axial direction of the shaft rod, and the fixing pin is used to cooperate with the spiral groove to limit the movement of the shaft rod.

[0005] In one or more embodiments, the driving component includes a cylinder body, a cylinder head, a piston and an air chamber, wherein the cylinder body and the cylinder head define the air chamber.

[0006] The piston is located in the air chamber, and the fixing pin is fixedly arranged on the inner wall of the air chamber or the cylinder body.

[0007] In one or more embodiments, the starting end is provided with a port extending along the axial direction of the shaft.

[0008] In one or more embodiments, the diameter of the fixing pin is greater than the width of the port.

[0009] In one or more embodiments, the valve core component includes a valve plate and a swing rod, the valve plate provides a first sealing surface, and the valve body component provides a second sealing surface surrounding the opening and corresponding to the first sealing surface.

[0010] Two ends of the swing rod are respectively connected to the valve plate and the shaft rod.

[0011] In one or more embodiments, the valve body component includes an upper valve body and a lower valve body facing each other, and the upper valve body and the lower valve body are further provided with a movable cavity for accommodating the shaft rod.

[0012] In one or more embodiments, a sealing ring is further provided at the fitting position between the movable cavity and the shaft rod.

[0013] In one or more embodiments, the length of the vacuum valve is 1.8 to 2.2 times the diameter of the opening.

[0014] In one or more embodiments, the driving component includes at least two spiral grooves and a fixing pin.

[0015] In one or more embodiments, the driving component uses compressed air as a driving source.

[0016] The above vacuum swing valve has the following advantages:

[0017] The cooperation between the fixed pin and the spiral groove guides and limits the movement of the shaft, providing a new opening and closing method. The spiral groove limits the rotation angle of the shaft, and the port extending along the shaft guides the shaft to make lifting movements, thus achieving the goal of using only a single drive component to guide the rotation and lifting of the valve core component at a specific position.

[0018] With the help of the port extending in the axial direction at the end, the valve core can be forced to move in the axial straight line as much as possible after it swings into place, so that the force of the shaft rod is applied to the valve plate as much as possible, thereby improving the one-way sealing and closing effect of the valve. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The above and other features, properties and advantages of the present invention will become more apparent through the following description in conjunction with the accompanying drawings and embodiments, in which:

[0020] Figure 1A It is a top view when the valve core component and the opening are completely overlapped;

[0021] Figure 1B It is a top view of the valve core component and the opening in a separated state;

[0022] Figure 2 It is a cross-sectional view of the valve body component;

[0023] Figure 3 It is a schematic diagram of the valve core components;

[0024] Figure 4 It is a cross-sectional view of the drive component.

[0025] Symbol Marking Description

[0026] 1 Valve body parts

[0027] 2 valve core components

[0028] 3 drive components

[0029] 11 Lower valve body

[0030] 12 Upper valve body

[0031] 13 bushing

[0032] 14 sealing ring

[0033] 15 seals

[0034] 17 Active cavity

[0035] 18 openings

[0036] 19 valve chamber

[0037] 21 Swing Rod

[0038] 22 valve plate

[0039] 31 upper cylinder block

[0040] 32 upper cylinder head

[0041] 33 piston

[0042] 34 axis

[0043] 35 fixed pin

[0044] 36 lower cylinder

[0045] 37 lower cylinder head

[0046] 38 air chambers

[0047] 180 second sealing surface

[0048] 215 first connection end

[0049] 216 second connection end

[0050] 220 first sealing surface

[0051] 340 spiral groove

[0052] Port 341 DETAILED DESCRIPTION

[0053] The present invention is further described below with reference to specific embodiments and accompanying drawings. More details are set forth in the following description to facilitate a full understanding of the present invention. However, the present invention can obviously be implemented in a variety of other ways different from the description herein. Those skilled in the art can make similar generalizations and deductions based on actual application situations without violating the connotation of the present invention. Therefore, the scope of protection of the present invention should not be limited by the content of this specific embodiment.

[0054] It should be noted that these and other subsequent drawings are only examples and are not drawn to scale, and should not be used to limit the actual scope of protection required by the present invention.

[0055] For the convenience of description, it needs to be understood that the directions or positional relationships indicated by directional words such as "front, back, up, down, left, right", "horizontal, vertical, vertical, horizontal" and "top, bottom" are usually based on the directions or positional relationships shown in the drawings. They are only for the convenience of describing this application and simplifying the description. Unless otherwise specified, these directional words do not indicate or imply that the device or element referred to must have a specific direction or be constructed and operated in a specific direction. Therefore, they cannot be understood as limiting the scope of protection of this application; the directional words "inside and outside" refer to the inside and outside relative to the outline of each component itself.

[0056] Reference Figures 1A to 4 As shown, the vacuum swing valve of the present invention includes a valve body component 1, a valve core component 2 and a driving component 3.

[0057] The driving component 3 is the actuator of the valve gas power system, which performs automatic control of the switch and provides the driving force for opening and closing the valve.

[0058] The valve body component 1 serves as the main carrier of the valve, and the valve core component 2 is used to open and close the valve. It can rotate up and down to perform the opening and closing sealing action on the valve.

[0059] Specifically, the valve body component 1 adopts an upper and lower split structure, including a lower valve body 11, an upper valve body 12, and a valve cavity 19 defined by the lower valve body 11 and the upper valve body 12. The lower valve body 11 and the upper valve body 12 are provided with openings 18 and 18' facing each other, and the openings 18 and 18' are connected to the valve cavity 19 as an inlet and an outlet. Figure 2 In the embodiment shown, the butted lower valve body 11 and upper valve body 12 are fastened by a connector, and a sealing member 15 is provided between the two to seal the valve cavity 19. The valve core component 2 is loaded in the valve cavity 19.

[0060] The valve body 1 is a carrier, and the valve core 2 is housed in the cavity. The valve body 1 cooperates with the valve core 2 to play the role of opening and closing seal. The valve body 1 is also connected to the overall system, equipment, and pipelines as the main connecting part.

[0061] The valve core component 2 is movably arranged in the valve cavity 19. Figure 3 As shown, in one embodiment, the valve core component 2 includes a swing rod 21 and a valve plate 22, and the swing rod 21 and the valve plate 22 are both Figures 1A-1B Rotation in the plane shown.

[0062] The valve plate 22 provides a sealing surface and is connected to the driving component 3 via the swing rod 21. The swing rod 21 includes a first connecting end 215 and a second connecting end 216. The first connecting end 215 is connected to the valve plate 220 via a steel ball, and the second connecting end 216 is connected to the shaft 34 of the driving component 3.

[0063] The driving component 3 includes a shaft 34 and a driving end for driving the shaft 34 to move. The rotation plane of the swing arm 21 and the valve plate 22 is perpendicular to the axis direction S of the shaft 34.

[0064] In some embodiments, the driving component 3 is a cylinder, which uses compressed air as a driving source. The driving component also includes a cylinder body, a cylinder head, a piston 33 and an air chamber 38. Figure 4 In the illustrated embodiment, the cylinder body comprises an upper cylinder body 31 and a lower cylinder body 36, and the corresponding cylinder head comprises an upper cylinder head 32 and a lower cylinder head 37. The cylinder body and cylinder head define an air chamber 38, in which the piston 22 is located, dividing the air chamber into two parts. The driving end, which includes the piston and air chamber, moves the piston by changing the pressure of the compressed air in the air chamber, thereby driving the movement of the shaft 34. The movement of the shaft 34 includes both rotational motion and lifting motion.

[0065] The cylinder body and cylinder head are arranged outside the valve body component 1, and only the shaft rod 34 passes through the upper valve body 12 and the lower valve body 11. The upper valve body 12 and the lower valve body 11 are also provided with a movable cavity 17 for accommodating the shaft rod 34. The shaft rod 34 is arranged to move freely and without obstruction in the movable cavity 17 and the air chamber 38.

[0066] In addition, the cylinder body also includes sealing rings, clamping rings and other components to ensure sealing.

[0067] Continue to refer to Figure 2 and Figure 3 As shown, the valve plate 22 provides a first sealing surface 220, and the valve body component provides a second sealing surface 180 surrounding the opening 18 and corresponding to the first sealing surface 220. When the valve plate 22 is completely separated from the opening 18, as shown in FIG. Figure 1B As shown, the valve is in an open, fluid-connected state. When the valve plate 22 completely overlaps the opening 18, as shown in FIG. Figure 1A As shown, the second sealing surface 180 contacts the first sealing surface 220, so that the valve is in a closed state and the fluid is cut off.

[0068] Continue to refer to Figure 2 As shown, the upper valve body 12 and / or the lower valve body 11 are provided with a bushing 13 and a sealing ring 14 that wrap the shaft 34, thereby sealing the valve cavity 19. Figure 2As shown. During installation, the shaft 34 of the drive component 3 is passed through the lining ring 13 and sealing ring 14 of the valve body and secured to the upper valve body 12 using screws or other fasteners. After the seal 15 is installed in the sealing groove of the lower valve body 11, the upper valve body 12 is closed and secured with screws or other fasteners to complete the valve. The valve body adopts a split upper and lower structure, which is easy to disassemble and install, and facilitates installation and maintenance.

[0069] As previously mentioned, piston 33 uses air pressure to drive shaft 34 to open and close the valve. However, shaft 34 may produce unpredictable rotational motion, which in turn affects the movement of valve plate 22. Furthermore, when the valve is in the shutoff state, the valve plate must fit tightly against the valve body to ensure an adequate seal.

[0070] Therefore, the vacuum swing valve of the present invention is further provided with a spiral groove 340 and a fixing pin 35 on the shaft 34. The fixing pin 35 is fixedly arranged on the inner wall or cylinder body of the cylinder 38 to cooperate with the spiral groove 340 to guide the movement of the shaft 34 according to working requirements.

[0071] The two ends of the spiral groove 340 are a starting end and an ending end respectively.

[0072] like Figure 4 As shown, a represents the end, and the valve is in a closed state; b represents the beginning, and the valve is in an open state.

[0073] At least at the end a, a port 341 is provided, which extends along the axial direction S of the shaft 34. Thus, when the port 341 extending along the axial direction S of the shaft 34 cooperates with the fixing pin 35, the shaft 34 is restricted to be lifted and lowered but not rotated.

[0074] Specifically, when the cylinder uses piston motion to drive the shaft 34, the spiral groove 340 on the shaft 34 will rotate accordingly, and the fixing pin 35 will always be located in the spiral groove 340. After the fixing pin 35 extends into the port 341, it will limit the rotation of the shaft 34 and guide the shaft 34 to move axially up and down, thereby limiting the rotation of the valve core component 2 and guiding its up and down movement.

[0075] Thus, once the valve is swung into position, it can achieve axial lifting and lowering motion, particularly upward motion, through the cooperation of the axial port 341 and the fixing pin 35, concentrating the pressure in the axial direction. Because the force exerted by the air pressure on the shaft 34 is directly reflected on the sealing surface between the valve plate 22 and the opening 18, the valve plate 22, once raised into position, comes into close contact with the valve body, thereby cutting off the medium and improving the effectiveness of the valve's one-way sealing structure.

[0076] Preferably, the diameter of the fixing pin is larger than the width of the port, so that the port 314 and the fixing pin 35 are kept in a certain degree of engagement state, which can delay the reverse rotation and descent of the shaft 34, prolong the current state, further maintain the close contact state of the sealing surface of the valve plate 22 and the opening 18, and also improve the one-way sealing effect.

[0077] The axial length of the port 341 is determined based on actual needs. In one embodiment, it is generally 5 to 10 mm. It should be understood that the numbers used in the description of the embodiments are modified by the modifiers "approximately," "approximately," "generally," or "substantially" in some examples. These values ​​may vary depending on the desired characteristics of individual embodiments and do not limit the embodiments.

[0078] In some embodiments, the starting end b may also be provided with an axially extending port 341. For example, when the valve needs to be closed, the shaft 34 may be guided to rise rapidly from the lower end.

[0079] When the valve needs to be opened, reverse ventilation is performed through the solenoid valve, the shaft 34 rotates in the opposite direction and descends, and the fixing pin 35 is always matched with the spiral groove 340 on the shaft 34 until the fixing pin 35 moves to the starting end b of the spiral groove 340, so that the valve is opened.

[0080] Preferably, at least two spiral grooves 340 are provided on the shaft 34 , and the number of the fixing pins 35 is the same as the number of the spiral grooves 340 .

[0081] In this way, the shaft 34 drives the swing rod 21 and the valve plate 22 to achieve lifting and / or rotational movement at a specific position. By applying force to the valve plate 22 through a single shaft 34 of a single driving component, it is possible to complete both the rotation and downward pressing of the valve core using only a single cylinder driving component, thereby realizing the opening or closing of the swing valve.

[0082] The length of the vacuum swing valve of the present invention is set to 1.8 to 2.2 times the opening diameter, preferably 2 times, to achieve a simple and compact structure. The length of the vacuum swing valve refers to the length of the vacuum swing valve along the longest dimension, such as the vertical dimension of the vacuum swing valve along the axial direction of the shaft 34, or the horizontal dimension of the upper valve body or lower valve body.

[0083] The debugging process of the vacuum swing valve described in the present invention is as follows.

[0084] After the valve is assembled, open and close it 50 times; loosen all the external fixing screws of the valve and then tighten them step by step; test the minimum air source pressure for valve opening and closing; test relevant data such as overall leakage rate, valve opening leakage rate and valve test life.

[0085] Use a throttle valve to test the minimum air pressure for valve opening and closing. Increase the air pressure from 0, adjust to the minimum air pressure that causes the valve core to rotate and rise, and then slowly increase the air pressure to open and close the valve.

[0086] The vacuum swing valve achieves rotation and lifting motion by driving the valve core via a single shaft. The shaft's movement is controlled by a spiral groove, starting and ending points, and a fixed pin. After the valve swings into position, it then moves linearly. This allows the valve to swing and lift as needed, preventing unexpected movement. This allows for precise opening and closing of the valve as required, while ensuring a tight seal. The valve boasts a simple, lightweight overall structure, small size, low cost, an attractive appearance, and easy operation and maintenance.

[0087] The vacuum swing valve described in the present invention is small in size and quiet, and there is no sound or vibration when opening and closing. It can be used in vacuum systems such as semiconductors, vacuum coating, metallurgical machinery, etc. to cut off or connect the flowing medium under vacuum state.

[0088] It should be noted that the above content uses words such as "first" and "second" to limit components, which is only for the convenience of distinguishing the corresponding components. Unless otherwise stated, the above words have no special meaning and therefore cannot be understood as limiting the scope of protection of this application.

[0089] At the same time, this application uses specific terms to describe the embodiments of this application. For example, "one embodiment," "an embodiment," and / or "some embodiments" refer to a certain feature, structure, or characteristic related to at least one embodiment of this application. Therefore, it should be emphasized and noted that "one embodiment," "an embodiment," or "an alternative embodiment" mentioned twice or multiple times in different locations in this specification does not necessarily refer to the same embodiment. In addition, certain features, structures, or characteristics in one or more embodiments of this application may be appropriately combined.

[0090] Although the present invention is disclosed above with reference to preferred embodiments, this is not intended to limit the present invention. Any person skilled in the art may make possible changes and modifications without departing from the spirit and scope of the present invention. Therefore, any modifications, equivalent variations, and modifications made to the above embodiments in accordance with the technical essence of the present invention without departing from the content of the technical solution of the present invention shall fall within the scope of protection defined by the claims of the present invention.

Claims

1. Vacuum swing valve, characterized in that, include: a valve body component, including a valve cavity and an opening; a valve core component movably disposed in the valve cavity to control the opening and closing of the valve core component and the opening; as well as A driving component, comprising a shaft and a driving end, wherein the shaft is connected to the valve core component, and the driving end is used to drive the shaft to move; In which, the driving component also includes a spiral groove and a fixing pin. The spiral groove is arranged on the shaft rod, including a starting end and an end end. The end end is provided with a port, and the port extends along the axial direction of the shaft rod. The fixing pin is used to cooperate with the spiral groove to guide the movement of the shaft rod.

2. The vacuum swing valve according to claim 1, characterized in that: The driving component includes a cylinder body, a cylinder head, a piston and an air chamber. The cylinder body and the cylinder head define the air chamber. The piston is located in the air chamber. The fixing pin is fixedly arranged on the inner wall of the air chamber or the cylinder body.

3. The vacuum swing valve according to claim 1, wherein: The starting end is provided with a port extending along the axial direction of the shaft.

4. The vacuum swing valve according to claim 1, wherein: The diameter of the fixing pin is greater than the width of the port.

5. The vacuum swing valve according to claim 1, wherein: The valve core component includes a valve plate and a swing rod, the valve plate provides a first sealing surface, the valve body component provides a second sealing surface surrounding the opening and corresponding to the first sealing surface, and both ends of the swing rod are respectively connected to the valve plate and the shaft rod.

6. The vacuum swing valve according to claim 1, wherein: The valve body component comprises an upper valve body and a lower valve body facing each other, and an active cavity for accommodating the shaft rod is further provided on the upper valve body and the lower valve body.

7. The vacuum swing valve according to claim 6, characterized in that: A sealing ring is also provided at the matching position between the movable cavity and the shaft rod.

8. The vacuum swing valve according to claim 1, wherein: The length of the vacuum valve is 1.8 to 2.2 times the diameter of the opening.

9. The vacuum swing valve according to claim 1, wherein: The driving component includes at least two spiral grooves and a fixing pin.

10. The vacuum swing valve according to claim 1, wherein: The driving component uses compressed air as a driving source.

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