Substrate flexible separation equipment for flexible substrate manufacturing

The flexible substrate winding device with rollers and vacuum pumps in conjunction with a rotating motor, combined with flexible adjustment of the scraper, achieves non-destructive peeling of the flexible substrate and the rigid substrate, solving the problem of damage to the flexible substrate during the peeling process and improving the peeling efficiency and the service life of the substrate.

CN120600668APending Publication Date: 2025-09-05GUOJING HECHUANG (QINGDAO) TECH CO LTD
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Patent Information

Application Number
CN202510774285.2
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-06-11
Publication Date
2025-09-05

AI Technical Summary

Technical Problem

Existing flexible substrates are easily damaged by scraper friction when peeling off rigid substrates, which affects the peeling effect and the normal use of the substrate.

Method used

The roller and vacuum pump are combined with a rotating motor to adsorb and reel in the flexible substrate. Combined with the flexible adjustment of the scraper, the precise position adjustment of the roller and scraper enables non-destructive peeling of the flexible substrate from the rigid substrate.

Benefits of technology

The stripping process of the flexible substrate is simplified, the damage to the flexible substrate is reduced, and the stripping efficiency and the service life of the substrate are improved.

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Abstract

The invention discloses substrate flexible separation equipment for flexible substrate manufacturing, and relates to the technical field of flexible substrate processing, in particular to a rigid substrate body, a flexible substrate body is bonded to the upper end of the rigid substrate body, and a roller is movably connected to the side, away from the rigid substrate body, of the flexible substrate body; a vacuum pump body is fixedly installed on the inner wall of the roller, and the rear end of the roller is fixedly connected with a rotating motor used for winding the flexible base material body. Through cooperation of the rigid base plate body, the flexible base material body, the roller, the vacuum pump body and the rotating motor, the flexible base material body is adsorbed to the roller through the vacuum pump, and meanwhile, the rotating motor drives the roller to rotate so that the flexible base material body can be wound; and the flexible substrate body is stripped from the rigid substrate body, so that the stripped flexible substrate body can be conveniently taken down from the rigid substrate body by the roller.
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Description

Technical Field

[0001] The present invention relates to the technical field of flexible substrate processing, in particular to a flexible substrate separation device for manufacturing a flexible substrate. Background Art

[0002] With the rise of flexible substrates, various flexible electronic devices based on flexible substrates (such as flexible AM-OLED, flexible TFT-LCD, flexible touch devices, etc.) have entered the sunrise and embryonic stages. Their booming development momentum will surely detonate the consumer electronics market and lead high-end consumer electronics into a new flexible and foldable era. Flexible electronic devices are made by using different processes on the flexible substrate of a flexible substrate, and then the flexible substrate is peeled off from the rigid substrate surface of the flexible substrate without damage by using a peeling method.

[0003] However, when the existing flexible substrate is separated from the rigid substrate and the flexible substrate by mechanical peeling, the flexible substrate will be separated from the rigid substrate as the scraper used for peeling the rigid substrate and the flexible substrate moves. The separated flexible substrate will continue to contact the scraper as the scraper moves. At this time, the flexible substrate will be worn due to friction with the scraper, and may even be damaged, thereby affecting the normal use of the rigid substrate and the flexible substrate after peeling. Summary of the Invention

[0004] In response to the shortcomings of the existing technology, the present invention provides a flexible substrate separation device for flexible substrate production, which has the advantages of simplifying the peeling steps of the flexible substrate, facilitating the storage of the flexible substrate body after peeling, and reducing damage to the flexible substrate during the peeling process, thereby solving the problems raised in the above-mentioned background technology.

[0005] The present invention provides the following technical solution: a flexible substrate separation device for producing a flexible substrate, comprising a rigid substrate body, a flexible substrate body bonded to the upper end of the rigid substrate body, a roller movably connected to the side of the flexible substrate body away from the rigid substrate body, a vacuum pump body fixedly installed on the inner wall of the roller, a rotating motor for winding up the flexible substrate body fixedly connected to the rear end of the roller, and a first reducer provided on the output shaft of the rotating motor, an extension rod fixedly connected to the outer wall of the rotating motor, a sleeve rod movably sleeved on the outer wall of the upper end of the extension rod, a movable component for adjusting the vertical height of the roller provided at the upper end of the extension rod, a scraper for peeling off the rigid substrate body and the flexible substrate body installed on the left side of the roller, and a threaded rod movably connected to the upper end of the scraper.

[0006] Preferably, a through hole located outside the vacuum pump body is opened through the roller, and support frames are fixedly installed on the inner walls of the front and rear ends of the roller respectively, and a rotating shaft is fixedly sleeved on the inner wall of the support frame at the rear end, and the rear end of the rotating shaft is fixedly connected to the front end of the rotating motor.

[0007] Preferably, the lower end of the extension rod is fixedly mounted with a disc located above the roller, the inner wall of the disc is fixedly sleeved with a reinforcement rod, the lower end of the reinforcement rod is fixedly mounted with a clamping ring, and the inner wall of the clamping ring is fixedly sleeved with the outer wall of the rotating motor, the upper end of the extension rod is fixedly mounted with an annular block located inside the sleeve rod, the outer wall of the annular block is evenly distributed with sliders, and the end of the slider away from the annular block is slidably connected to the inner wall of the sleeve rod.

[0008] Preferably, the upper end of the sleeve rod is fixedly installed with a chassis located outside the movable component, the back of the chassis is fixedly connected to a rectangular rod, an electric slide rail is provided at one end of the rectangular rod away from the chassis, vertical rods are fixedly installed on the left and right sides of the lower end surface of the electric slide rail, and one end of the vertical rod away from the electric slide rail is fixedly connected to a workbench located below the rigid base plate body, the lower end of the left side of the sleeve rod is fixedly connected to an outer rod body, the outer rod body is movably connected to the inner rod body through a connecting assembly, and the inner rod body is installed above the scraper.

[0009] Preferably, the movable component includes a ball nut, a ball screw and a short rod, the inner wall of the ball nut is threadedly connected to the outer wall of the ball screw, the outer wall of the ball nut is fixedly connected to the inner end of the short rod, the outer end of the short rod is fixedly connected to the inner wall of the extension rod, the upper end of the ball screw is fixedly mounted with a drive motor located inside the chassis, and a No. 2 reducer is provided on the output shaft of the drive motor.

[0010] Preferably, an air outlet pipe is fixedly installed at the front end of the vacuum pump body, an air inlet of the vacuum pump body is fixedly connected to an air inlet pipe, an end of the air inlet pipe away from the vacuum pump body is fixedly installed with an air suction hood located on the inner side of the through hole, and the outer side of the air suction hood is fixedly connected to the inner wall of the roller.

[0011] Preferably, the upper end surface of the scraper is fixedly mounted with guide rods located on the front and rear sides of the threaded rod, the outer wall of the guide rod is movably sleeved with a horizontal plate located on the left side of the sleeve rod, and the inner wall of the horizontal plate is threadedly sleeved with the outer wall of the threaded rod, the upper end of the guide rod is fixedly mounted with a limit plate located above the horizontal plate, and the inner side of the horizontal plate is fixedly connected to the outer end of the inner rod body.

[0012] Preferably, the connecting assembly includes a connecting rod, a spring and a pull ring, the outer walls of the connecting rod are movably connected to the inner walls of the outer rod body and the inner rod body, the outer wall of the connecting rod is movably connected to the inner wall of the spring, the upper end of the connecting rod is fixedly connected to the lower end of the pull ring, the lower end of the spring is fixedly connected to the upper end surface of the outer rod body, and the upper end of the spring is fixedly connected to the lower end of the pull ring.

[0013] Compared with the prior art, the present invention has the following beneficial effects: 1. The present invention cooperates between a rigid substrate body, a flexible substrate body, a roller, a vacuum pump body and a rotating motor. The vacuum pump is used to adsorb the flexible substrate body on the roller. At the same time, the rotating motor is used to drive the roller to rotate to reel up the flexible substrate body. After the flexible substrate body and the rigid substrate body are peeled off, the roller can be used to easily remove the peeled flexible substrate body from the rigid substrate body.

[0014] 2. The present invention cooperates among the roller, movable component, electric slide rail, scraper, threaded rod and connecting component. The movable component can be used to adjust the vertical use position of the roller, and the electric slide rail can be used to adjust the lateral use position of the roller. Combined with the use of the threaded rod to adjust the vertical use position of the scraper and the use of the connecting component to adjust the lateral use position of the scraper, the use position of the scraper and the roller can be adjusted according to actual processing needs, thereby improving the flexibility of the scraper and the roller. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic diagram of the structure of the present invention; Figure 2 is a side view of the scraper of the present invention; Figure 3 It is a front view of the vacuum pump body of the present invention; Figure 4 It is a rear view of the snap ring of the present invention; Figure 5 A side view of the roller of the present invention; Figure 6 For the present invention Figure 5 A magnified view of point A; Figure 7 is a side view of the threaded rod of the present invention; Figure 8 It is a side view of the connection assembly of the present invention.

[0016] In the figure: 1. Rigid substrate body; 2. Flexible substrate body; 3. Roller; 4. Vacuum pump body; 5. Rotating motor; 6. Extension rod; 7. Sleeve rod; 8. Movable assembly; 801. Ball nut; 802. Ball screw; 803. Short rod; 9. Threaded rod; 10. Scraper; 11. Through hole; 12. Support frame; 13. Rotating shaft; 14. Reinforcement rod; 15. Snap ring; 16. Chassis; 17 , rectangular rod; 18, electric slide rail; 19, vertical rod; 20, workbench; 21, drive motor; 22, outer rod body; 23, connecting assembly; 231, connecting rod; 232, spring; 233, pull ring; 24, inner rod body; 25, horizontal plate; 26, guide rod; 27, limit plate; 28, slider; 29, ring block; 30, suction hood; 31, air outlet pipe; 32, air inlet pipe; 33, disc. DETAILED DESCRIPTION

[0017] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0018] See also Figure 1 、 Figure 4 and Figure 5, a flexible substrate separation device for manufacturing a flexible substrate, comprising a rigid substrate body 1, a flexible substrate body 2 bonded to the upper end of the rigid substrate body 1, a roller 3 movably connected to the side of the flexible substrate body 2 away from the rigid substrate body 1, the rotation of the roller 3 can be used to reel up the flexible substrate body 2 after peeling, a vacuum pump body 4 is fixedly installed on the inner wall of the roller 3, the installation of the vacuum pump body 4 can adsorb the flexible substrate body 2 on the outer wall of the roller 3, thereby facilitating the peeling of the flexible substrate body 2 and the rigid substrate body 1, the rear end of the roller 3 is fixedly connected to a rotating motor 5 for rewinding the flexible substrate body 2, and a first reducer is provided on the output shaft of the rotating motor 5, the setting of the first reducer plays a role in adjusting the speed of the output shaft of the rotating motor 5, and at the same time, the installation of the rotating motor 5 is for the flexible substrate body The winding is provided with power, and the outer wall of the rotating motor 5 is fixedly connected to the extension rod 6. The lifting movement of the extension rod 6 provides power for the lifting movement of the roller 3 in the vertical direction through the rotating motor 5. The outer wall of the upper end of the extension rod 6 is movably sleeved with a sleeve rod 7. The installation of the sleeve rod 7 provides space for the telescopic movement of the extension rod 6. The upper end of the extension rod 6 is provided with a movable component 8 for adjusting the vertical height of the roller 3. The movable component 8 is set to provide power for the lifting movement of the extension rod 6 in the sleeve rod 7. A scraper 10 for peeling off the rigid substrate body 1 and the flexible substrate body 2 is installed on the left side of the roller 3. The scraper 10 is set to provide a tool for peeling the flexible substrate body 2 and the rigid substrate body 1. The upper end of the scraper 10 is movably connected to the threaded rod 9. The setting and movement of the threaded rod 9 provide power for the lifting movement of the scraper 10.

[0019] A through hole 11 is provided on the roller 3 and is located outside the vacuum pump body 4. The roller 3 provides a platform for the opening of the through hole 11. Support frames 12 are fixedly installed on the inner walls of the front and rear ends of the roller 3. The installation of the support frame 12 serves to connect the roller 3 and the rotating shaft 13. The inner wall of the rear end support frame 12 is fixedly sleeved with the rotating shaft 13, and the rear end of the rotating shaft 13 is fixedly connected to the front end of the rotating motor 5. The setting of the rotating shaft 13 serves to connect the support frame 12 and the rotating motor 5.

[0020] See also Figure 2 、 Figure 4 and Figure 6The lower end of the extension rod 6 is fixedly installed with a disc 33 located above the roller 3. The installation of the disc 33 serves to connect the reinforcement rod 14 with the extension rod 6. The inner wall of the disc 33 is fixedly sleeved with the reinforcement rod 14. The setting of the reinforcement rod 14 serves to connect the extension rod 6 with the clamping ring 15. The lower end of the reinforcement rod 14 is fixedly installed with a clamping ring 15, and the inner wall of the clamping ring 15 is fixedly sleeved with the outer wall of the rotating motor 5. The installation of the clamping ring 15 serves to connect the rotating motor 5 with the reinforcement rod 14. The upper end of the extension rod 6 is fixedly installed with an annular block 29 located inside the sleeve rod 7. The setting of the annular block 29 serves to connect the extension rod 6 with the slider 28. The outer wall of the annular block 29 is evenly distributed with sliders 28, and the end of the slider 28 away from the annular block 29 is slidably connected to the inner wall of the sleeve rod 7. The sliding of the slider 28 on the inner wall of the sleeve rod 7 reinforces the stability of the telescopic movement of the extension rod 6 inside the sleeve rod 7.

[0021] The upper end of the sleeve rod 7 is fixedly mounted with a chassis 16 located outside the movable component 8, and the back of the chassis 16 is fixedly connected to a rectangular rod 17. An electric slide 18 is provided at one end of the rectangular rod 17 away from the chassis 16. The electric slide 18 is provided to provide power for the horizontal movement of the roller 3. Vertical rods 19 are fixedly mounted on the left and right sides of the lower end surface of the electric slide 18. The installation of the vertical rod 19 serves to connect the electric slide 18 with the workbench 20. The end of the vertical rod 19 away from the electric slide 18 is fixedly connected A workbench 20 is connected to the bottom of the rigid base body 1, and the lower end of the left side of the sleeve rod 7 is fixedly connected to the outer rod body 22. The installation of the outer rod body 22 provides space and a platform for the movement of the inner rod body 24. The outer rod body 22 is movably connected to the inner rod body 24 through a connecting component 23, and the inner rod body 24 is installed above the scraper 10. The setting of the connecting component 23 serves to connect the inner rod body 24 and the outer rod body 22. According to the telescopic movement of the inner rod body 24, the horizontal use position of the scraper 10 can be adjusted.

[0022] The movable component 8 includes a ball nut 801, a ball screw 802 and a short rod 803. The inner wall of the ball nut 801 is threadedly connected to the outer wall of the ball screw 802. The threaded connection method enables the circumferential rotation of the ball screw 802 to provide power for the vertical lifting movement of the ball nut 801. The outer wall of the ball nut 801 is fixedly connected to the inner end of the short rod 803. The setting of the short rod 803 serves to connect the ball nut 801 and the extension rod 6. The outer end of the short rod 803 is fixedly connected to the inner wall of the extension rod 6. The setting of the short rod 803 provides power for the simultaneous movement of the extension rod 6 through the movement of the ball nut 801. The upper end of the ball screw 802 is fixedly installed with a drive motor 21 located inside the chassis 16, and a second reducer is provided on the output shaft of the drive motor 21. The installation of the drive motor 21 provides power for the circumferential rotation of the ball screw 802. At the same time, the setting of the second reducer serves to regulate the speed of the output shaft of the drive motor 21.

[0023] See also Figure 8 、 Figure 7 and Figure 3 An air outlet pipe 31 is fixedly installed at the front end of the vacuum pump body 4, and an air inlet pipe 32 is fixedly connected to the air inlet of the vacuum pump body 4. The installation of the air inlet pipe 32 serves to connect the vacuum pump body 4 and the air suction hood 30. The end of the air inlet pipe 32 away from the vacuum pump body 4 is fixedly installed with the air suction hood 30 located on the inner side of the through hole 11, and the outer side of the air suction hood 30 is fixedly connected to the inner wall of the roller 3. The through hole 11, the air suction hood 30 and the air inlet pipe 32 are interconnected, so that the flexible substrate body 2 is adsorbed on the roller 3.

[0024] The upper end surface of the scraper 10 is fixedly mounted with a guide rod 26 located on the front and rear sides of the threaded rod 9. The movement of the guide rod 26 in the horizontal plate 25 limits the moving position of the scraper 10. The outer wall of the guide rod 26 is movably sleeved with the horizontal plate 25 located on the left side of the sleeve rod 7, and the inner wall of the horizontal plate 25 is threadedly sleeved with the outer wall of the threaded rod 9. The threaded sleeve connection method allows the threaded rod 9 to rotate in a circular direction while also realizing its vertical lifting movement, thereby providing power for the vertical movement of the scraper 10. The upper end of the guide rod 26 is fixedly mounted with a limit plate 27 located above the horizontal plate 25. The limit plate 27 limits the moving path of the guide rod 26 on the horizontal plate 25. The inner side of the horizontal plate 25 is fixedly connected to the outer end of the inner rod body 24. The setting of the inner rod body 24 is connected with the outer rod body 22 through the horizontal plate 25.

[0025] When the connecting rod 231 is pulled out from the outer rod body 22 and the inner rod body 24, the spring 232 is in a stretched state. When the connecting rod 231 plays the role of plugging the outer rod body 22 and the inner rod body 24, the spring 232 rebounds to its original position, and the upper end of the connecting rod 231 is fixedly connected to the lower end of the pull ring 233, and the lower end of the spring 232 is fixedly connected to the upper end surface of the outer rod body 22. The setting of the spring 232 serves to connect the outer rod body 22 and the pull ring 233, and the upper end of the spring 232 is fixedly connected to the lower end of the pull ring 233. The setting of the pull ring 233 provides power for the movement of the connecting rod 231.

[0026] Working principle: When in use, first, place the rigid substrate body 1 and the flexible substrate body 2 to be peeled on the workbench 20, adjust the use height of the roller 3 according to the actual processing conditions, turn on the power of the drive motor 21, and after the drive motor 21 is turned on, it drives the rotation of the ball screw 802. Due to the threaded connection between the ball screw 802 and the ball nut 801, the ball screw 802 can rotate in a circular direction while also realizing the vertical lifting movement of the ball nut 801. When the ball nut 801 moves toward the roller 3, the ball nut 801 is connected to the inner wall of the extension rod 6 through the short rod 803. When the ball nut 801 moves, it drives the extension rod 6 to extend downward from the inside of the sleeve rod 7. At this time, the movement of the sleeve rod 7 drives the slider 28 to slide on the inner wall of the sleeve rod 7 through the connection of the annular block 29, thereby reinforcing the stability of the extension rod 6 in the telescopic movement of the sleeve rod 7. The movement of the extension rod 6 drives the roller 3 to move in the same direction until the outer wall of the roller 3 contacts the upper end surface of the flexible substrate body 2. Then, when it is necessary to adjust the horizontal position of the scraper 10, the outer rod body 22 and the inner rod body 24 are separated after pulling the connecting rod 231 through the setting of the pull ring 233. At this time, the movement of the connecting rod 231 stretches the spring 232 The inner rod 24 moves in the outer rod 22, and then uses the rebound of the spring 232 to insert the connecting rod 231 from the top of the outer rod 22 into the inside of the inner rod 24 and then extend it to the bottom of the outer rod 22. At this time, the connecting assembly 23 plays the role of connecting and limiting the outer rod 22 and the inner rod 24, so that the horizontal use position of the scraper 10 can be adjusted. Subsequently, when the vertical use position of the scraper 10 needs to be adjusted, due to the threaded connection between the threaded rod 9 and the cross plate 25, the threaded rod 9 rotates in a circular motion while driving its vertical lifting movement, and the threaded rod 9 moves while driving the scraper 10 vertically. The height of the scraper 10 is adjusted in the vertical direction. At this time, the rigid substrate body 1 and the flexible substrate body 2 are peeled off. Finally, the power of the vacuum pump body 4 is turned on. After the vacuum pump body 4 is turned on, the peeled flexible substrate body 2 is connected through the air inlet pipe 32, the air suction cover 30 and the interior of the through hole 11, so that the flexible substrate body 2 can be adsorbed on the surface of the roller 3. The peeled flexible substrate body 2 can be adsorbed on the surface of the roller 3. The power of the rotating motor 5 is turned on. After the rotating motor 5 is turned on, the rotating shaft 13 and the support frame 12 are connected to make the roller 3 rotate while driving the flexible substrate body 2 to be rolled up.

[0027] It should be noted that, in this document, relational terms such as first and second, etc., are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "include," "comprise," or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article, or device that includes a series of elements includes not only those elements, but also other elements not explicitly listed, or elements inherent to such process, method, article, or device. At the same time, in the drawings of the present invention, fill patterns are only used to distinguish layers and do not make any other limitations.

[0028] While embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions, and variations may be made to these embodiments without departing from the principles and spirit of the invention, and that the scope of the invention is defined by the appended claims and their equivalents.

Claims

1. A flexible substrate separation device for manufacturing a flexible substrate, comprising a rigid substrate body (1), characterized in that: The upper end of the rigid substrate body (1) is bonded with a flexible substrate body (2), and a roller (3) is movably connected to the side of the flexible substrate body (2) away from the rigid substrate body (1). A vacuum pump body (4) is fixedly installed on the inner wall of the roller (3). The rear end of the roller (3) is fixedly connected to a rotating motor (5) for winding the flexible substrate body (2), and a first reducer is provided on the output shaft of the rotating motor (5). The outer wall of the rotating motor (5) is fixedly connected to an extension rod (6), and the outer wall of the upper end of the extension rod (6) is movably sleeved with a sleeve rod (7). The upper end of the extension rod (6) is provided with a movable component (8) for adjusting the vertical height of the roller (3). A scraper (10) for peeling the rigid substrate body (1) and the flexible substrate body (2) is installed on the left side of the roller (3), and the upper end of the scraper (10) is movably connected to a threaded rod (9).

2. The flexible substrate separation device for manufacturing a flexible substrate according to claim 1, characterized in that: The roller (3) is provided with a through hole (11) located outside the vacuum pump body (4), and support frames (12) are fixedly mounted on the inner walls of the front and rear ends of the roller (3), respectively. A rotating shaft (13) is fixedly sleeved on the inner wall of the support frame (12) at the rear end, and the rear end of the rotating shaft (13) is fixedly connected to the front end of the rotating motor (5).

3. The flexible substrate separation device for manufacturing a flexible substrate according to claim 1, characterized in that: The lower end of the extension rod (6) is fixedly mounted with a disk (33) located above the roller (3), the inner wall of the disk (33) is fixedly sleeved with a reinforcement rod (14), the lower end of the reinforcement rod (14) is fixedly mounted with a clamping ring (15), and the inner wall of the clamping ring (15) is fixedly sleeved with the outer wall of the rotating motor (5), the upper end of the extension rod (6) is fixedly mounted with an annular block (29) located inside the sleeve rod (7), the outer wall of the annular block (29) is evenly distributed with sliders (28), and the end of the slider (28) away from the annular block (29) is slidably connected to the inner wall of the sleeve rod (7).

4. The flexible substrate separation device for manufacturing a flexible substrate according to claim 1, characterized in that: The upper end of the sleeve rod (7) is fixedly mounted with a chassis (16) located outside the movable component (8), the back of the chassis (16) is fixedly connected with a rectangular rod (17), the end of the rectangular rod (17) away from the chassis (16) is provided with an electric slide rail (18), the left and right sides of the lower end surface of the electric slide rail (18) are respectively fixedly mounted with vertical rods (19), the end of the vertical rod (19) away from the electric slide rail (18) is fixedly connected to a workbench (20) located below the rigid base plate body (1), the lower end of the left side of the sleeve rod (7) is fixedly connected with an outer rod body (22), the outer rod body (22) is movably sleeved with an inner rod body (24) through a connecting component (23), and the inner rod body (24) is mounted above the scraper (10).

5. The flexible substrate separation device for manufacturing a flexible substrate according to claim 4, characterized in that: The movable assembly (8) includes a ball nut (801), a ball screw (802) and a short rod (803), wherein the inner wall of the ball nut (801) is threadedly sleeved with the outer wall of the ball screw (802), the outer wall of the ball nut (801) is fixedly connected to the inner end of the short rod (803), and the outer end of the short rod (803) is fixedly connected to the inner wall of the extension rod (6), and the upper end of the ball screw (802) is fixedly mounted with a drive motor (21) located inside the chassis (16), and a second reducer is provided on the output shaft of the drive motor (21).

6. The flexible substrate separation device for manufacturing a flexible substrate according to claim 2, characterized in that: An air outlet pipe (31) is fixedly mounted on the front end of the vacuum pump body (4), an air inlet of the vacuum pump body (4) is fixedly connected to an air inlet pipe (32), an end of the air inlet pipe (32) away from the vacuum pump body (4) is fixedly mounted with an air suction hood (30) located inside the through hole (11), and the outer side of the air suction hood (30) is fixedly connected to the inner wall of the roller (3).

7. The flexible substrate separation device for manufacturing a flexible substrate according to claim 4, characterized in that: The upper end surface of the scraper (10) is fixedly mounted with a guide rod (26) located at the front and rear sides of the threaded rod (9); the outer wall of the guide rod (26) is movably sleeved with a transverse plate (25) located on the left side of the sleeve rod (7); and the inner wall of the transverse plate (25) is threadedly sleeved with the outer wall of the threaded rod (9); the upper end of the guide rod (26) is fixedly mounted with a limit plate (27) located above the transverse plate (25); and the inner side of the transverse plate (25) is fixedly connected to the outer end of the inner rod body (24).

8. The flexible substrate separation device for manufacturing a flexible substrate according to claim 4, characterized in that: The connecting assembly (23) comprises a connecting rod (231), a spring (232) and a pull ring (233); the outer wall of the connecting rod (231) is movably connected to the inner wall of the outer rod body (22) and the inner rod body (24); the outer wall of the connecting rod (231) is movably connected to the inner wall of the spring (232); the upper end of the connecting rod (231) is fixedly connected to the lower end of the pull ring (233); the lower end of the spring (232) is fixedly connected to the upper end surface of the outer rod body (22); and the upper end of the spring (232) is fixedly connected to the lower end of the pull ring (233).