Carbon nanotube laser polishing quality real-time monitoring system and method, electronic equipment and medium

Abstract

The embodiment of the invention provides a carbon nano tube laser polishing quality real-time monitoring system and method based on optical coherence tomography (OCT) and secondary ion mass spectrometer (SIMS), electronic equipment and a medium, and the system comprises an ultrafast laser polishing device for carrying out high-precision laser polishing on a carbon nano tube film according to laser parameters; the OCT optical monitoring system is used for monitoring the surface appearance of the carbon nanotube film in the polishing process of the ultrafast laser polishing device in real time to obtain OCT data; the SIMS chemical component analysis module is used for detecting surface element composition and impurity content of the carbon nanotube film before and after polishing to obtain SIMS data; the intelligent feedback control system is used for optimizing laser parameters of the ultrafast laser polishing device by utilizing a machine learning algorithm based on the OCT data and the SIMS data; and the data processing and storage module is used for storing and analyzing the OCT data and the SIMS data, generating a surface quality evaluation report and remotely adjusting laser parameters according to feedback of the intelligent feedback control system.

Description

Technical Field

[0001] This document relates to the technical field of nanomaterial processing and surface treatment in the manufacturing process of carbon-based integrated circuits, and in particular to a real-time monitoring system, method, electronic equipment and medium for carbon nanotube laser polishing quality. Background Art

[0002] Carbon nanotubes (CNTs) have been widely used in nanoelectronics, sensors, energy storage devices, and carbon-based integrated circuits due to their excellent electrical, mechanical, thermal, and chemical properties. As the application of CNT films in electronic devices continues to grow, the impact of their surface quality on device performance becomes increasingly important. Therefore, ensuring the uniformity and precision of the surface quality during the preparation of CNT films has become a key research and industrialization priority.

[0003] Traditional surface treatment methods for carbon nanotube films, such as chemical cleaning, mechanical polishing, and ultrasonic cleaning, suffer from the inability to precisely control surface morphology and treatment results. Chemical cleaning methods often involve toxic chemicals, which can easily introduce contaminants and potentially damage the material. Mechanical polishing and ultrasonic cleaning methods can lead to excessive surface roughness and even damage the material structure. Furthermore, existing technologies often rely on post-process quality inspections and lack real-time feedback and parameter adjustments during the process, resulting in low processing efficiency and inconsistent polishing results.

[0004] In recent years, laser polishing technology has been widely used as an efficient, non-contact surface treatment method. Laser polishing not only achieves high-precision surface treatment without the consumption of abrasives and tools, but also offers the advantage of precisely controlling surface quality by adjusting laser parameters (such as pulse width, wavelength, and energy density). However, a major problem with existing laser polishing processes is the lack of real-time quality monitoring and feedback mechanisms, making it impossible to effectively monitor surface changes during the polishing process, which in turn affects polishing accuracy and efficiency.

[0005] To address these issues, recent research has proposed real-time monitoring methods based on optical coherence tomography (OCT) and secondary ion mass spectrometry (SIMS). OCT technology, with its high-resolution imaging capabilities, can monitor changes in the surface morphology of carbon nanotube films in real time, accurately measuring surface roughness and microstructural features. SIMS, on the other hand, can analyze changes in the chemical composition of materials at the micron to nanometer scale, providing highly sensitive surface elemental analysis and composition distribution information. Combining these two technologies in a real-time monitoring system during laser polishing can provide highly accurate feedback during the process, guiding the optimization of laser parameters and thus improving the consistency and accuracy of the polishing effect. Summary of the Invention

[0006] The purpose of the present invention is to provide a real-time monitoring system, method, electronic equipment and medium for carbon nanotube laser polishing quality, aiming to solve the above-mentioned problems in the prior art.

[0007] The present invention provides a real-time monitoring system for carbon nanotube laser polishing quality based on optical coherence tomography (OCT) and secondary ion mass spectrometry (SIMS), comprising:

[0008] Ultrafast laser polishing device, used for high-precision laser polishing of carbon nanotube films according to laser parameters;

[0009] An OCT optical monitoring system is used to monitor the surface morphology of the carbon nanotube film during the polishing process of the ultrafast laser polishing device in real time to obtain OCT data;

[0010] SIMS chemical composition analysis module, used to detect the surface element composition and impurity content of carbon nanotube films before and after polishing, and obtain SIMS data;

[0011] an intelligent feedback control system that optimizes laser parameters of the ultrafast laser polishing device using a machine learning algorithm based on the OCT data and the SIMS data;

[0012] A data processing and storage module is used to store and analyze the OCT data and the SIMS data, generate a surface quality assessment report, and remotely adjust the laser parameters according to the feedback of the intelligent feedback control system.

[0013] The present invention provides a real-time monitoring method for carbon nanotube laser polishing quality based on OCT and SIMS, and a real-time monitoring system for carbon nanotube laser polishing quality based on OCT and SIMS, comprising:

[0014] The carbon nanotube film is subjected to high-precision laser polishing according to laser parameters by an ultrafast laser polishing device;

[0015] The surface morphology of the carbon nanotube film during the polishing process of the ultrafast laser polishing device is monitored in real time by an OCT optical monitoring system to obtain OCT data;

[0016] The surface element composition and impurity content of the carbon nanotube film before and after polishing were detected by the SIMS chemical composition analysis module to obtain SIMS data;

[0017] The OCT data and the SIMS data of the system are controlled by an intelligent feedback system, and the laser parameters of the ultrafast laser polishing device are optimized using a machine learning algorithm;

[0018] The OCT data and the SIMS data are stored and analyzed by a data processing and storage module to generate a surface quality assessment report, and the laser parameters are remotely adjusted according to feedback from the intelligent feedback control system.

[0019] An embodiment of the present invention also provides an electronic device, comprising: a memory, a processor, and a computer program stored in the memory and executable on the processor. When the computer program is executed by the processor, the steps of the above-mentioned method for real-time monitoring of carbon nanotube laser polishing quality based on OCT and SIMS are implemented.

[0020] An embodiment of the present invention also provides a computer-readable storage medium, which stores an information transmission implementation program. When the program is executed by a processor, the steps of the above-mentioned real-time monitoring method of carbon nanotube laser polishing quality based on OCT and SIMS are implemented.

[0021] The embodiments of the present invention address the lack of real-time monitoring and feedback in traditional laser polishing technology. By integrating OCT and SIMS technologies, the surface morphology, compositional changes, and quality of carbon nanotube films can be monitored in real time during the laser polishing process, ensuring the stability and consistency of the polishing effect, thereby improving the quality and processing efficiency of carbon nanotube films. The technical solutions of the embodiments of the present invention not only provide a new solution for the efficient processing of carbon nanotube films, but are also widely applicable to the manufacture of carbon-based integrated circuits, nanoelectronic devices, and other high-precision materials. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate one or more embodiments of this specification or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments recorded in this specification. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0023] Figure 1 is a schematic diagram of a real-time monitoring system for carbon nanotube laser polishing quality based on OCT and SIMS according to an embodiment of the present invention;

[0024] Figure 2 Schematic diagram of the overall workflow of the system according to an embodiment of the present invention;

[0025] Figure 3 This is an OCT-measured comparison of the surface roughness of the carbon nanotube film before and after laser polishing according to an embodiment of the present invention;

[0026] Figure 4 This is a measured diagram of the SIMS analysis results of an embodiment of the present invention;

[0027] Figure 5 is a flow chart of a method for real-time monitoring of carbon nanotube laser polishing quality based on OCT and SIMS according to an embodiment of the present invention;

[0028] Figure 6 is a schematic diagram of an electronic device according to an embodiment of the present invention. DETAILED DESCRIPTION

[0029] In order to enable those skilled in the art to better understand the technical solutions in one or more embodiments of this specification, the technical solutions in one or more embodiments of this specification will be clearly and completely described below in conjunction with the drawings in one or more embodiments of this specification. Obviously, the described embodiments are only part of the embodiments of this specification, not all of the embodiments. Based on one or more embodiments of this specification, all other embodiments obtained by ordinary technicians in this field without making creative efforts should fall within the scope of protection of this document.

[0030] System Example

[0031] According to an embodiment of the present invention, a real-time monitoring system for carbon nanotube laser polishing quality based on OCT and SIMS is provided. By integrating optical coherence tomography (OCT) and secondary ion mass spectrometry (SIMS) technology, the surface morphology changes and chemical composition distribution of carbon nanotube films during the laser polishing process are monitored in real time, feedback is provided, and laser parameters are optimized, thereby improving the accuracy and efficiency of the carbon nanotube film polishing process. Figure 1 FIG is a schematic diagram of a real-time monitoring system for carbon nanotube laser polishing quality based on optical coherence tomography (OCT) and secondary ion mass spectrometry (SIMS) according to an embodiment of the present invention. Figure 1 As shown, the carbon nanotube laser polishing quality real-time monitoring system based on optical coherence tomography (OCT) and secondary ion mass spectrometry (SIMS) according to an embodiment of the present invention specifically includes:

[0032] The ultrafast laser polishing device 10 is used to perform high-precision laser polishing on a carbon nanotube film according to laser parameters; the laser parameters specifically include: laser pulse width, laser wavelength, laser energy density and laser scanning rate.

[0033] The OCT optical monitoring system 12 is used to monitor the surface morphology of the carbon nanotube film during the polishing process of the ultrafast laser polishing device in real time to obtain OCT data; the OCT scanning depth of the OCT optical monitoring system reaches 50 μm, and the longitudinal resolution is ≤ 10 nm; the OCT optical monitoring system 12 is specifically used for:

[0034] Real-time surface roughness monitoring of carbon nanotube films during polishing, with a detection range of 0.1nm-50nm and a target surface roughness of ≤2nm;

[0035] Identify defects on the surface of the carbon nanotube film during the polishing process and automatically adjust the laser focus position after defect identification;

[0036] Combined with AI algorithm, the dynamic surface model of the surface of carbon nanotube film during the polishing process is reconstructed.

[0037] The SIMS chemical composition analysis module 14 is used to detect the surface element composition and impurity content of the carbon nanotube film before and after polishing to obtain SIMS data. The mass resolution of the SIMS chemical composition analysis module is ≥5000 and the depth resolution is ≤2nm. The SIMS chemical composition analysis module 14 is specifically used to:

[0038] Identify trace metal residues, oxides, and catalyst residues in carbon nanotube films;

[0039] Accurately analyze the chemical changes of materials before and after laser polishing;

[0040] Accurately distinguish isotopes and trace impurities.

[0041] The intelligent feedback control system 16 optimizes the laser parameters of the ultrafast laser polishing device using a machine learning algorithm based on the OCT data and the SIMS data; specifically, it is used to:

[0042] Optimize laser energy density and scan rate based on OCT data, and automatically reduce laser energy by 5%-10% when surface roughness is >2nm;

[0043] Adjust the laser pulse width based on SIMS data. When the surface oxide content increases by >5%, the pulse width is automatically adjusted to a lower value.

[0044] Enter defect repair mode: When OCT detects surface cracks or particle contamination, it intelligently adjusts the laser focus to perform local repairs.

[0045] The data processing and storage module 18 is used to store and analyze the OCT data and the SIMS data, generate a surface quality assessment report, and remotely adjust the laser parameters based on the feedback from the intelligent feedback control system. Specifically used for:

[0046] Long-term storage of historical data of carbon nanotube film polishing process;

[0047] Adjust laser parameters through cloud computing;

[0048] Automatically output a surface quality analysis report based on OCT data and SIMS data, wherein the surface quality analysis report specifically includes information on surface roughness, defect distribution, and elemental composition changes.

[0049] It should be noted that this system is suitable for the following carbon nanotube film processing applications:

[0050] (1) Single-walled carbon nanotube (SWCNT) films, suitable for transparent conductive films and flexible electronic devices, with a target surface roughness of ≤1.5 nm;

[0051] (2) Multi-walled carbon nanotube (MWCNT) films, suitable for high thermal conductivity heat dissipation materials, with a target surface roughness of ≤2nm and a thermal conductivity of ≥2000W / m·K;

[0052] (3) Carbon nanotube / metal composite film for field effect transistor (CNT-FET), with contact resistance value ≤10 -3 Ω·cm 2 ;

[0053] (4) Carbon nanotube / polymer composite films for flexible electronic devices, with a target mechanical stability of ≥95%.

[0054] The system can be integrated into industrial carbon-based integrated circuit production lines to achieve online monitoring and automatic optimization of the laser polishing process, improving polishing efficiency by ≥30%.

[0055] like Figure 2 The figure shows the workflow of the entire carbon nanotube laser polishing system, including the complete process from film preparation, laser polishing, real-time monitoring, data feedback to the final surface quality assessment. The real-time monitoring system for carbon nanotube laser polishing quality based on OCT and SIMS of the present invention is realized through the following technical solutions:

[0056] Laser polishing device: This system uses ultrafast laser with a pulse width of 10fs-200fs, adjustable wavelengths of 355nm, 405nm, 427nm, 515nm, 800nm, and 1030nm, and a laser energy density of 0.1-10J / cm 2 The scanning rate is 1-500mm / s. This laser device is used to perform high-precision non-contact polishing of carbon nanotube films, ensuring high surface uniformity and low roughness.

[0057] OCT Optical Monitoring System: This system uses OCT technology to monitor the surface morphology of carbon nanotube films in real time during the polishing process. With a longitudinal resolution of ≤10nm and a scanning depth of up to 50μm, the OCT system can measure surface roughness, porosity, microcracks, and other defects in real time, and automatically adjust laser polishing parameters through a feedback control system.

[0058] SIMS Chemical Composition Analysis Module: The SIMS module analyzes changes in the chemical composition of carbon nanotube film surfaces during the polishing process, providing information such as surface elemental composition, impurity content, and surface oxides or catalyst residues. SIMS has a mass resolution of ≥5000 and a depth resolution of ≤2nm, with ppb-level sensitivity, enabling precise analysis of minute changes in the material before and after polishing.

[0059] Intelligent Feedback Control System: This system automatically optimizes laser parameters using machine learning algorithms based on OCT and SIMS data. When OCT detects surface roughness exceeding a preset threshold, the system automatically adjusts laser energy density and scan rate. When SIMS detects an increase in surface oxides or impurities, the system adjusts pulse width to ensure controllable surface quality and composition changes. The entire feedback control system has a response time of ≤0.1 seconds, ensuring real-time optimization of the polishing process.

[0060] Data Processing and Storage Module: This system boasts powerful data storage and processing capabilities, with a storage capacity of ≥10TB. It can store historical data from the carbon nanotube film polishing process and automatically generate surface quality analysis reports. Furthermore, the system supports remote control, allowing operators to remotely monitor and adjust the machining process via a cloud platform.

[0061] From the above technical aspects, it can be seen that the technical solution of the embodiment of the present invention combines OCT and SIMS for real-time monitoring of the laser polishing quality of carbon nanotube films, thereby improving processing accuracy and feedback speed; the intelligent feedback system combines OCT and SIMS data, automatically optimizes laser parameters through machine learning algorithms, and improves processing consistency; it has a high-resolution three-dimensional morphology reconstruction function, making the polishing process more controllable and optimizing the surface quality of the film. The technical solution of the embodiment of the present invention realizes polishing monitoring and adjustment with nanometer-level precision; the dual monitoring means of OCT and SIMS are used to analyze the surface morphology and monitor changes in material composition, thereby improving characterization accuracy; combined with real-time data transmission (≥1GHz) and remote control functions, it is suitable for industrial production lines and improves the level of automation. The technical solution of the embodiment of the present invention can be directly applied to high-end fields such as carbon-based integrated circuits, flexible electronic devices, sensors, supercapacitors, etc., to meet the needs of high-precision surface processing; it can improve the polishing efficiency of carbon nanotube films by ≥30%, and ensure that the surface roughness is ≤2nm, thereby improving the stability of material performance; it is compatible with a variety of carbon nanotube films and can be applied to the manufacture of different types of films such as single-walled carbon tubes, multi-walled carbon tubes, and carbon nanotube composites, and has a wide market demand.

[0062] The following demonstrates the application of a real-time monitoring system for laser polishing of carbon nanotubes based on OCT and SIMS in the processing of carbon nanotube films. This system enables real-time surface quality monitoring and laser parameter optimization for laser polishing of carbon nanotube films, improving surface finish and processing efficiency.

[0063] 1. Experimental materials and equipment

[0064] Materials: Single-walled carbon nanotube (SWCNT) film with a thickness of 20nm, the substrate is a silicon (Si) wafer, and the initial surface roughness is 4nm.

[0065] Laser equipment: Ultrafast laser source with a pulse width of 50 fs, a wavelength of 800 nm, and an adjustable laser energy density of 0.1-10 J / cm 2 , the scanning rate is 100mm / s.

[0066] OCT system: with a resolution of 10 nm and a scanning depth of 50 μm, it is used to monitor the changes in the surface morphology of thin films in real time.

[0067] SIMS system: mass resolution 5000, depth resolution ≤ 2nm, used to analyze the chemical composition changes of thin films before and after polishing.

[0068] 2. Experimental steps (1) Laser polishing process

[0069] Place the carbon nanotube film in the laser polishing device and start adjusting the laser parameters. Initially set the laser energy density to 2J / cm 2 The laser pulses passed through the carbon nanotube film surface with a pulse width of 50 fs and a scanning rate of 100 mm / s. The surface morphology was monitored in real time using an OCT system, and changes in the surface elements of the material were analyzed using SIMS.

[0070] (2) Real-time monitoring and feedback adjustment

[0071] During the laser polishing process, the OCT optical monitoring system continuously captures changes in the film surface roughness. When the OCT system detects that the surface roughness exceeds 2nm, the system automatically adjusts the laser parameters through an intelligent feedback control mechanism:

[0072] Laser energy density: adjusted to 1.5J / cm 2 ;

[0073] Pulse width: shortened to 30fs to reduce the heat-affected zone and improve surface smoothness;

[0074] Scanning rate: adjusted to 120 mm / s to improve polishing efficiency.

[0075] The SIMS system simultaneously monitored the elemental composition of the film. Experimental data showed that the surface oxygen content gradually decreased during polishing, and the surface carbon oxide content dropped from 5% to 1%, indicating that the laser polishing process removed the oxide layer while maintaining the atomic structure of the carbon nanotubes.

[0076] 3. Quality Assessment

[0077] After polishing, the surface roughness of the film was measured using OCT. The results showed that the average surface roughness of the carbon nanotube film decreased from Ra 4nm to Ra 1.5nm, meeting the required surface quality standards. Figure 3 As shown, the surface morphology changes of the carbon nanotube film before and after polishing are demonstrated, and the difference in roughness before and after is compared using OCT data to demonstrate the effectiveness of the system in reducing surface roughness.

[0078] The experimental results show that the real-time monitoring and feedback system based on OCT and SIMS can effectively control the surface roughness of carbon nanotube films during laser polishing and ensure that the chemical composition of the film surface is precisely regulated. The system successfully reduced the surface roughness from 4nm to 1.5nm and removed surface impurities and oxides, significantly improving the quality and performance of the film. Taking the polishing removal of catalyst residues (such as PMMA residues and nitrogen-containing dopants) on the film surface as an example, Figure 4 As shown, the SIMS analysis results were used to compare the removal of catalyst residual impurities and the optimization of surface composition during the polishing process.

[0079] Focus on the changes of C, H, O, and N, because the catalyst mainly includes four elements: C, H, O, and N, and the carbon nanotube film is mainly composed of C element. The measured results of element changes are shown in Table 1.

[0080] Table 1 SIMS measurement results of C, H, O, and N elements in carbon nanotube films before and after laser polishing

[0081]

[0082] Combine Figure 4 From the SIMS results in Table 1, it can be found that the C content increased significantly, indicating that the surface polymer layer (containing H / N / O) was removed, exposing the high-purity CNT skeleton (sp 2 -C dominated). H, N, and O decreased synchronously, indicating that the polymer (such as PMMA residues and nitrogen-containing dopants) was selectively decomposed by the laser.

[0083] based on Figure 4 From the results in Table 1, it can be concluded that the mechanism of polymer removal by laser polishing mainly includes two parts, as follows:

[0084] (1) Laser-polymer interaction

[0085] Photothermal dissociation: Ultrafast laser (10–200 fs) produces nonlinear absorption in the polymer, and the local temperature transiently exceeds 2000 K, resulting in: C-H bond rupture (bond energy ~ 413 kJ / mol), causing H2 volatilization (SIMS detects H - Decrease); CN / C=O bond breaks (bond energy ~305kJ / mol), resulting in the release of CO and N2 (O - 、N - reduce).

[0086] Selective removal: polymer thermal decomposition threshold (~0.2J / cm 2 ) is much lower than CNT (~0.8J / cm 2 ) to achieve surface cleaning.

[0087] Photochemical degradation: UV laser (such as 355nm) directly destroys the covalent bonds of the polymer chain (such as π→π* transition of C=O), generating small molecular fragments (SIMS detects CH - 、CN - peak weakening).

[0088] (2) Evolution of surface chemical state

[0089] C chemical state change (SIMS secondary ion characteristics): before polishing, C2 - / C - The ratio is low (~0.3), reflecting the sp 3 -C dominant; after polishing, C2 - / C - The ratio increases (~1.2), corresponding to the sp 2 -C characteristics (graphitization enhancement).

[0090] O / N residual analysis: The remaining O (~3.8At%) mainly comes from the CNT terminal carboxyl group (-COOH), and the N (~1.8At%) comes from a small amount of doped pyridinic nitrogen (CN detected by SIMS). - peak).

[0091] In summary, the embodiments of the present invention have the following beneficial effects:

[0092] 1. Improve processing efficiency: Through the real-time feedback mechanism, the automatic adjustment of laser parameters makes the polishing process more efficient, reducing unnecessary energy waste and over-polishing.

[0093] 2. Surface quality control: The combination of OCT and SIMS systems provides precise surface quality control, ensuring accurate regulation of the surface roughness of carbon nanotube films and effectively removing surface contaminants.

[0094] 3. Improve material properties: By removing oxides and impurities, the structure and properties of carbon nanotubes are maintained, thereby enhancing their application potential in carbon-based integrated circuits and nanoelectronic devices.

[0095] Method Example

[0096] According to an embodiment of the present invention, a method for real-time monitoring of carbon nanotube laser polishing quality based on OCT and SIMS is provided, which is used in a real-time monitoring system for carbon nanotube laser polishing quality based on OCT and SIMS. Figure 5 FIG. 1 is a flow chart of a method for real-time monitoring of carbon nanotube laser polishing quality based on OCT and SIMS according to an embodiment of the present invention. Figure 5 As shown, the real-time monitoring method for carbon nanotube laser polishing quality based on OCT and SIMS according to an embodiment of the present invention specifically includes:

[0097] Step S501, performing high-precision laser polishing on the carbon nanotube film using an ultrafast laser polishing device according to laser parameters; the laser parameters specifically include: laser pulse width, laser wavelength, laser energy density, and laser scanning rate;

[0098] Step S502, monitoring the surface morphology of the carbon nanotube film during the polishing process of the ultrafast laser polishing device in real time using an OCT optical monitoring system to obtain OCT data, specifically comprising:

[0099] Real-time surface roughness monitoring of carbon nanotube films during polishing, with a detection range of 0.1nm-50nm and a target surface roughness of ≤2nm;

[0100] Identify defects on the surface of the carbon nanotube film during the polishing process and automatically adjust the laser focus position after defect identification;

[0101] Combining AI algorithms to reconstruct a dynamic surface model of the surface of the carbon nanotube film during the polishing process; wherein the OCT optical monitoring system has an OCT scanning depth of 50 μm and a longitudinal resolution of ≤10 nm;

[0102] Step S503, using a SIMS chemical composition analysis module to detect the surface element composition and impurity content of the carbon nanotube film before and after polishing to obtain SIMS data, specifically including:

[0103] Identify trace metal residues, oxides, and catalyst residues in carbon nanotube films;

[0104] Accurately analyze the chemical changes of materials before and after laser polishing;

[0105] Accurately distinguish isotopes and trace impurity components; wherein the mass resolution of the SIMS chemical composition analysis module is ≥5000 and the depth resolution is ≤2nm;

[0106] Step S504, controlling the OCT data and the SIMS data through an intelligent feedback system and optimizing the laser parameters of the ultrafast laser polishing device using a machine learning algorithm, specifically comprising:

[0107] Optimize laser energy density and scan rate based on OCT data, and automatically reduce laser energy by 5%-10% when surface roughness is >2nm;

[0108] Adjust the laser pulse width based on SIMS data. When the surface oxide content increases by >5%, the pulse width is automatically adjusted to a lower value.

[0109] Enter defect repair mode: When OCT detects surface cracks or particle contamination, it intelligently adjusts the laser focus to perform local repairs;

[0110] Step S505: storing and analyzing the OCT data and the SIMS data through a data processing and storage module, generating a surface quality assessment report, and remotely adjusting the laser parameters based on feedback from the intelligent feedback control system. Specifically, the steps include:

[0111] Long-term storage of historical data of carbon nanotube film polishing process;

[0112] Adjust laser parameters through cloud computing;

[0113] Automatically output a surface quality analysis report based on OCT data and SIMS data, wherein the surface quality analysis report specifically includes information on surface roughness, defect distribution, and elemental composition changes.

[0114] Device Example 1

[0115] An embodiment of the present invention provides an electronic device, such as Figure 6 As shown, it includes: a memory 60, a processor 62 and a computer program stored in the memory 60 and capable of running on the processor 62, and when the computer program is executed by the processor 62, the steps described in the method embodiment are implemented.

[0116] Device Example 2

[0117] An embodiment of the present invention provides a computer-readable storage medium, on which a program for implementing information transmission is stored. When the program is executed by the processor 62, the steps described in the method embodiment are implemented.

[0118] The computer-readable storage medium in this embodiment includes, but is not limited to, ROM, RAM, magnetic disk, or optical disk.

[0119] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the above embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the above embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A real-time monitoring system for carbon nanotube laser polishing quality based on optical coherence tomography (OCT) and secondary ion mass spectrometry (SIMS), characterized in that: include: Ultrafast laser polishing device, used for high-precision laser polishing of carbon nanotube films according to laser parameters; An OCT optical monitoring system is used to monitor the surface morphology of the carbon nanotube film during the polishing process of the ultrafast laser polishing device in real time to obtain OCT data; SIMS chemical composition analysis module, used to detect the surface element composition and impurity content of carbon nanotube films before and after polishing, and obtain SIMS data; an intelligent feedback control system that optimizes laser parameters of the ultrafast laser polishing device using a machine learning algorithm based on the OCT data and the SIMS data; A data processing and storage module is used to store and analyze the OCT data and the SIMS data, generate a surface quality assessment report, and remotely adjust the laser parameters according to the feedback of the intelligent feedback control system.

2. The system according to claim 1, wherein: The laser parameters specifically include: Laser pulse width, laser wavelength, laser energy density, and laser scanning rate.

3. The system according to claim 1, wherein: The OCT optical monitoring system has an OCT scanning depth of 50 μm and a longitudinal resolution of ≤10 nm. The OCT optical monitoring system is specifically used for: Real-time surface roughness monitoring of carbon nanotube films during polishing, with a detection range of 0.1nm-50nm and a target surface roughness of ≤2nm; Identify defects on the surface of the carbon nanotube film during the polishing process and automatically adjust the laser focus position after defect identification; The AI ​​algorithm is used to reconstruct the dynamic surface model of the carbon nanotube film during the polishing process.

4. The system according to claim 1, wherein: The mass resolution of the SIMS chemical composition analysis module is ≥5000 and the depth resolution is ≤2nm. The SIMS chemical composition analysis module is specifically used for: Identify trace metal residues, oxides, and catalyst residues in carbon nanotube films; Accurately analyze the chemical changes of materials before and after laser polishing; Accurately distinguish isotopes and trace impurities.

5. The system according to claim 1, wherein: The intelligent feedback control system is specifically used for: Optimize laser energy density and scan rate based on OCT data, and automatically reduce laser energy by 5%-10% when surface roughness is >2nm; Adjust the laser pulse width based on SIMS data. When the surface oxide content increases by >5%, the pulse width is automatically adjusted to a lower value. Enter defect repair mode: When OCT detects surface cracks or particle contamination, it intelligently adjusts the laser focus to perform local repairs.

6. The system according to claim 1, wherein: The data processing and storage module is specifically used for: Long-term storage of historical data of carbon nanotube film polishing process; Adjust laser parameters through cloud computing; Automatically output a surface quality analysis report based on OCT data and SIMS data, wherein the surface quality analysis report specifically includes information on surface roughness, defect distribution, and elemental composition changes.

7. A real-time monitoring method for carbon nanotube laser polishing quality based on OCT and SIMS, characterized in that: A real-time monitoring system for carbon nanotube laser polishing quality based on OCT and SIMS, the method specifically comprising: The carbon nanotube film is subjected to high-precision laser polishing according to laser parameters by an ultrafast laser polishing device; The surface morphology of the carbon nanotube film during the polishing process of the ultrafast laser polishing device is monitored in real time by an OCT optical monitoring system to obtain OCT data; The surface element composition and impurity content of the carbon nanotube film before and after polishing were detected by the SIMS chemical composition analysis module to obtain SIMS data; The OCT data and the SIMS data of the system are controlled by an intelligent feedback system, and the laser parameters of the ultrafast laser polishing device are optimized using a machine learning algorithm; The OCT data and the SIMS data are stored and analyzed by a data processing and storage module to generate a surface quality assessment report, and the laser parameters are remotely adjusted according to feedback from the intelligent feedback control system.

8. The method according to claim 7, wherein The laser parameters specifically include: laser pulse width, laser wavelength, laser energy density and laser scanning rate; The surface morphology of the carbon nanotube film during the polishing process of the ultrafast laser polishing device is monitored in real time by an OCT optical monitoring system, and the OCT data obtained specifically include: Real-time surface roughness monitoring of carbon nanotube films during polishing, with a detection range of 0.1nm-50nm and a target surface roughness of ≤2nm; Identify defects on the surface of the carbon nanotube film during the polishing process and automatically adjust the laser focus position after defect identification; Combining AI algorithms to reconstruct a dynamic surface model of the surface of the carbon nanotube film during the polishing process; wherein the OCT optical monitoring system has an OCT scanning depth of 50 μm and a longitudinal resolution of ≤10 nm; The surface elemental composition and impurity content of the carbon nanotube film before and after polishing were detected by the SIMS chemical composition analysis module. The SIMS data obtained specifically include: Identify trace metal residues, oxides, and catalyst residues in carbon nanotube films; Accurately analyze the chemical changes of materials before and after laser polishing; Accurately distinguish isotopes and trace impurity components; wherein the mass resolution of the SIMS chemical composition analysis module is ≥5000 and the depth resolution is ≤2nm; Optimizing the laser parameters of the ultrafast laser polishing device by using the OCT data and the SIMS data of the intelligent feedback control system and the machine learning algorithm specifically includes: Optimize laser energy density and scan rate based on OCT data, and automatically reduce laser energy by 5%-10% when surface roughness is >2nm; Adjust the laser pulse width based on SIMS data. When the surface oxide content increases by >5%, the pulse width is automatically adjusted to a lower value. Enter defect repair mode: When OCT detects surface cracks or particle contamination, it intelligently adjusts the laser focus to perform local repairs; Storing and analyzing the OCT data and the SIMS data through a data processing and storage module, generating a surface quality assessment report, and remotely adjusting the laser parameters based on feedback from the intelligent feedback control system specifically include: Long-term storage of historical data of carbon nanotube film polishing process; Adjust laser parameters through cloud computing; Automatically output a surface quality analysis report based on OCT data and SIMS data, wherein the surface quality analysis report specifically includes information on surface roughness, defect distribution, and elemental composition changes.

9. An electronic device, characterized in that: include: A memory, a processor, and a computer program stored in the memory and executable on the processor, wherein when the computer program is executed by the processor, the steps of the method for real-time monitoring of carbon nanotube laser polishing quality based on OCT and SIMS as described in any one of claims 7 to 8 are implemented.

10. A computer-readable storage medium, characterized in that The computer-readable storage medium stores an information transmission implementation program, which, when executed by a processor, implements the steps of the real-time monitoring method for carbon nanotube laser polishing quality based on OCT and SIMS according to any one of claims 7 to 8.

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