Haze detection system and method

Abstract

The invention discloses a haze detection system and method, and belongs to the technical field of optics. The haze detection system comprises a light source used for generating incident light; the haze detection equipment is used for receiving transmitted light which is transmitted towards a plurality of directions after the incident light penetrates through an object to be detected, and the transmitted light comprises scattered light; detecting the light intensity of the transmitted light in each direction and the position of the transmitted light in the corresponding direction; determining the light intensity of scattered light based on the light intensity of the transmitted light in each direction and the position; and determining the haze of the object to be measured according to the light intensity of the scattered light and the total light intensity of the transmitted light. According to the invention, the haze detection accuracy of the to-be-detected object can be improved.

Description

Technical Field

[0001] The present application belongs to the field of optical technology, and in particular relates to a haze detection system and method. Background Art

[0002] Currently, haze detection systems use an integrating sphere to capture the intensity of light transmitted through the object under test. This intensity is used as the intensity of scattered light to calculate the haze of the object under test. However, an integrating sphere can only capture the total intensity of light transmitted outside a specific angle range of the incident light. If the transmitted light outside this angle range includes not only scattered light but also other beams (such as diffracted light), the light intensity captured by the integrating sphere will be used as the intensity of scattered light to calculate the haze of the object under test, reducing the accuracy of haze detection. Summary of the Invention

[0003] The present application aims to solve at least one of the technical problems existing in the prior art. To this end, the present application proposes a haze detection system and method, which can improve the accuracy of haze detection of an object to be measured.

[0004] In a first aspect, the present application provides a haze detection system, comprising:

[0005] a light source for generating incident light;

[0006] A haze detection device is used to receive transmitted light transmitted in multiple directions after the incident light passes through the object to be measured, wherein the transmitted light includes scattered light; detect the intensity of the transmitted light in each direction and the position of the transmitted light in the corresponding direction; determine the intensity of the scattered light based on the intensity of the transmitted light in each direction and the position; and determine the haze of the object to be measured based on the intensity of the scattered light and the total intensity of the transmitted light.

[0007] According to the haze detection system of the present application, the transmitted light transmitted in various directions after the incident light passes through the object to be measured, which includes scattered light, is received, and the intensity of the transmitted light in various directions and the position of the transmitted light in the corresponding direction are detected, so as to accurately determine the intensity of the scattered light based on the intensity of the transmitted light in various directions and the position, and thus determine the haze of the object to be measured based on the intensity of the scattered light and the total intensity of the transmitted light, thereby improving the detection accuracy of the haze of the object to be measured.

[0008] According to one embodiment of the present application, the haze detection device includes:

[0009] a scattering screen, configured to receive transmitted light that is transmitted in multiple directions after the incident light passes through the object to be measured;

[0010] an image acquisition and processing device for acquiring an image of the scattering screen after the scattering screen receives the transmitted light; performing image processing on the scattering screen image to obtain the intensity of the transmitted light in each direction and the position of the transmitted light in the corresponding direction; determining the intensity of the scattered light based on the intensity of the transmitted light in each direction and the position; and determining the haze of the object to be measured based on the intensity of the scattered light and the total intensity of the transmitted light.

[0011] According to one embodiment of the present application, the transmitted light further includes other light beams, and the image acquisition and processing device is further configured to:

[0012] determining the intensity of the other light beams according to the intensity of the transmitted light in various directions, the position and the angle of the other light beams relative to the incident light;

[0013] The intensity of the scattered light is determined according to the total intensity of the transmitted light and the intensities of the other light beams.

[0014] According to one embodiment of the present application, the other light beams include directly transmitted light;

[0015] The image acquisition and processing device is also used for:

[0016] The transmitted light having an angle with the incident light that is less than or equal to a preset angle is used as the directly transmitted light, and the position and intensity of the directly transmitted light on the scattering screen are determined.

[0017] According to one embodiment of the present application, the transmitted light further includes diffracted light;

[0018] The image acquisition and processing device is also used for:

[0019] determining a deviation angle of the diffracted light from the incident light;

[0020] The position and intensity of the diffracted light on the scattering screen are determined according to the deviation angle, the incident angle of the incident light, and the position of the directly transmitted light on the scattering screen.

[0021] According to one embodiment of the present application, the object to be measured includes a transmission grating;

[0022] The image acquisition and processing device is also used for:

[0023] The deviation angle of the diffracted light from the incident light is determined according to the grating period and the refractive index of the transmission grating and the wavelength of the incident light.

[0024] According to one embodiment of the present application, the image acquisition and processing device is further configured to:

[0025] Obtaining the distance between the object to be measured and the scattering screen;

[0026] determining the distance between the diffracted light and the directly transmitted light on the scattering screen according to the deviation angle, the incident angle of the incident light, and the distance between the object to be measured and the scattering screen;

[0027] The position of the diffracted light on the scattering screen is determined according to the distance between the diffracted light and the directly transmitted light on the scattering screen and the position of the directly transmitted light on the scattering screen.

[0028] According to one embodiment of the present application, the object to be measured includes a thin film or a reflective grating.

[0029] According to an embodiment of the present application, the incident light is incident perpendicularly to the object to be measured, or the incident light is incident non-perpendicularly to the object to be measured.

[0030] In a second aspect, the present application provides a haze detection method, comprising:

[0031] receiving transmitted light generated by a light source and transmitted in multiple directions after the incident light passes through the object to be measured, wherein the transmitted light includes scattered light;

[0032] detecting the intensity of the transmitted light in each direction and the position of the transmitted light in the corresponding direction;

[0033] determining the intensity of the scattered light based on the intensity of the transmitted light in each direction and the position;

[0034] The haze of the object to be measured is determined according to the intensity of the scattered light and the total intensity of the transmitted light.

[0035] The above one or more technical solutions in the embodiments of the present application have at least one of the following technical effects:

[0036] By receiving the transmitted light transmitted in all directions after the incident light passes through the object to be measured, the transmitted light includes scattered light, and detecting the light intensity of the transmitted light in all directions and the position of the transmitted light in the corresponding direction, the intensity of the scattered light can be accurately determined according to the light intensity and position of the transmitted light in all directions, and the haze of the object to be measured can be determined according to the light intensity of the scattered light and the total light intensity of the transmitted light, thereby improving the detection accuracy of the haze of the object to be measured.

[0037] Additional aspects and advantages of the present application will be given in part in the description below, and in part will become obvious from the description below, or will be learned through practice of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] The above and / or additional aspects and advantages of the present application will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0039] Figure 1 This is one of the structural diagrams of the haze detection system provided in the embodiments of the present application;

[0040] Figure 2 This is the second structural diagram of the haze detection system provided in an embodiment of the present application;

[0041] Figure 3 This is the third structural diagram of the haze detection system provided in the embodiment of the present application;

[0042] Figure 4 This is the fourth structural diagram of the haze detection system provided in an embodiment of the present application;

[0043] Figure 5 Schematic diagram of light transmitted through a scattering screen in a haze detection system provided in an embodiment of the present application;

[0044] Figure 6 is a schematic diagram of a scattering screen image in a haze detection system provided in an embodiment of the present application;

[0045] Figure 7 Schematic diagram of the position of transmitted light in the haze detection system provided in an embodiment of the present application;

[0046] Figure 8 It is a flow chart of the haze detection method provided in the embodiment of the present application. DETAILED DESCRIPTION

[0047] The following will be combined with the accompanying drawings in the embodiments of the present application to clearly describe the technical solutions in the embodiments of the present application. Obviously, the embodiments described are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field are within the scope of protection of this application.

[0048] The terms "first," "second," and the like in the specification and claims of this application are used to distinguish similar objects, and are not used to describe a specific order or precedence. It should be understood that the terms used in this manner are interchangeable where appropriate, so that the embodiments of this application can be implemented in an order other than that illustrated or described herein, and that the objects distinguished by "first," "second," and the like are generally of the same type, and do not limit the number of objects; for example, the first object can be one or more. In addition, the term "and / or" in the specification and claims refers to at least one of the connected objects, and the character " / " generally indicates that the objects connected are in an "or" relationship.

[0049] The haze detection system and method provided in the embodiments of the present application are described in detail below with reference to specific embodiments and their application scenarios in conjunction with the accompanying drawings.

[0050] Figures 1 to 4 This is a schematic diagram of the structure of the haze detection system provided in an embodiment of the present application.

[0051] like Figure 1 As shown, the haze detection system includes a light source 1 and a haze detection device 2. When detecting the haze of an object 3 to be detected, the object 3 to be detected is located between the light source 1 and the haze detection device 2.

[0052] Light source 1 is used to generate incident light A. Incident light A is transmitted to and through object 3 to be tested. The light beam that passes through object 3 is called transmitted light. Transmitted light is transmitted in multiple directions, i.e., some transmitted light is transmitted along the incident direction of incident light A, while some transmitted light deviates from the incident direction of incident light A. In some embodiments, light source 1 is a "C" light source or an "A" light source as specified in the haze testing standard.

[0053] The haze detection device 2 is used to receive transmitted light transmitted in multiple directions after the incident light passes through the object to be measured, and the transmitted light includes scattered light; detect the light intensity of the transmitted light in each of the multiple directions and the position of the transmitted light in the corresponding direction; determine the intensity of the scattered light based on the light intensity and position of the transmitted light in each direction; and determine the haze of the object to be measured based on the light intensity of the scattered light and the total light intensity of the transmitted light.

[0054] The haze detection device 2 is capable of receiving transmitted light transmitted in each of multiple directions and detecting the intensity of the transmitted light in each direction. Due to the influence of the structural properties of the object to be measured, the transmitted light after the incident light passes through the object to be measured can be divided into multiple types. The type of transmitted light may be different for different objects 3 to be measured. The transmitted light includes scattered light and other light beams, and other light beams refer to light beams other than scattered light. The type of other light beams is related to the material of the object to be measured, that is, the type of other light beams may be different depending on the material of the object to be measured. For example, if the object to be measured 3 is a thin film, the corresponding transmitted light includes direct transmitted light and scattered light, that is, the other light beams include direct transmitted light; if the object to be measured 3 is a transmission grating, the corresponding transmitted light includes direct transmitted light, scattered light and diffracted light, that is, the other light beams include direct transmitted light and diffracted light. Among them, direct transmitted light refers to transmitted light whose angle with the incident direction of the incident light is less than or equal to a preset angle (such as 2.5°). Scattered light refers to transmitted light generated by scattering inside and on the surface of the object to be measured. Scattered light represents the haze feeling of the object to be measured. Diffracted light refers to the transmitted light produced by the diffraction of incident light at the object to be measured.

[0055] The intensity of scattered light within the transmitted light can be determined based on the intensity of the transmitted light in each direction and the position of the transmitted light in that direction. The percentage of the scattered light intensity to the total intensity of the transmitted light is calculated, and this percentage represents the haze of the object under test. This embodiment accurately determines the intensity of scattered light within the transmitted light based on the intensity of the transmitted light in each direction and the position of the haze detection device 2 in that direction. The haze of the object under test is calculated based on the accurately determined scattered light intensity, thereby improving the accuracy of haze detection of the object under test.

[0056] In some embodiments, as Figure 1 As shown, the haze detection device 2 includes a scattering screen 21 and an image acquisition and processing device 22. When detecting the haze of an object 3, the object 3 is located between the light source 1 and the scattering screen 21, and the image acquisition and processing device 22 is located on the side of the scattering screen 21 away from the light source 1.

[0057] The diffuser screen 21 is used to receive incident light that is transmitted in multiple directions after passing through the object to be tested. The diffuser screen 21 is capable of receiving transmitted light B that is transmitted in each of multiple directions after incident light A passes through the object to be tested 3. The optical behavior of incident light A after passing through the object to be tested 3 is reflected on the diffuser screen 21. In some embodiments, the diffuser screen 21 may be a curtain.

[0058] The image acquisition and processing device 22 is used to capture an image of the scattering screen after the scattering screen 21 receives the transmitted light B. The image is processed to obtain the intensity of the transmitted light B in various directions. The positions of other light beams on the scattering screen 21 are determined. The intensity of the scattered light B2 is determined based on the intensity of the transmitted light B in various directions and the position of the transmitted light in the corresponding direction. The haze of the object 3 is determined based on the intensity of the scattered light B2 and the total intensity of the transmitted light B. The transmitted light in various directions is reflected at different positions on the scattering screen 21, resulting in different brightness at different positions on the scattering screen 21. The scattering screen image captured by the image acquisition and processing device 22 has different brightness at different positions. In some embodiments, the image acquisition and processing device 22 may be a camera.

[0059] After capturing the scattering screen image, the image acquisition and processing device 22 performs image processing on the scattering screen image to obtain the brightness at different locations on the scattering screen 21. Based on the brightness at different locations on the scattering screen 21, the intensity of the transmitted light B in various directions is determined. Based on the intensity of the transmitted light B in various directions and the position of the transmitted light B in the corresponding direction, the intensity of the scattered light B2 within the transmitted light B can be determined. The percentage of the intensity of the scattered light B2 to the total intensity of the transmitted light B is calculated, and this percentage is the haze of the object 3 to be measured.

[0060] There are multiple ways to determine the intensity of the scattered light B2.

[0061] In some embodiments, the intensity of scattered light B2 can be determined based on the position of scattered light B2 on the diffuser screen 21. The intensity of transmitted light B at various locations on the diffuser screen 21 can be determined based on the intensity of transmitted light B in various directions and the position of transmitted light B in the corresponding directions. The position of scattered light B2 on the diffuser screen 21 can be determined based on the angle between scattered light B2 and incident light A. The intensity of scattered light B2 can be determined based on the intensity of transmitted light B at various locations on the diffuser screen 21 and the position of scattered light B2 on the diffuser screen 21.

[0062] In some embodiments, the transmitted light also includes other light beams. The light intensities of the other light beams except the scattered light in the transmitted light can be determined first according to the positions of the other light beams in the transmitted light, and then the light intensity of the scattered light B2 can be determined.

[0063] The image acquisition and processing device 22 is further used for:

[0064] Determine the intensity of other light beams based on the intensity of the transmitted light in all directions, its position and the angle between the other light beams and the incident light;

[0065] The intensity of the scattered light is determined based on the total intensity of the transmitted light and the intensity of other light beams.

[0066] The intensity of transmitted light B at each location on the diffuser screen 21 can be determined based on the intensity of transmitted light B in each direction and the location of transmitted light B in the corresponding direction. The location of the other light beams on the diffuser screen 21 can be determined based on the angle of the other light beams relative to the incident light. The intensity of the other light beams can be determined based on the intensity of transmitted light B at each location on the diffuser screen 21 and the location of the other light beams on the diffuser screen 21. The intensity of scattered light B2 can be obtained by subtracting the intensity of the other light beams from the total intensity of transmitted light B.

[0067] In some embodiments, as Figure 1 As shown, the other light beams include the directly transmitted light B1, that is, the transmitted light B includes the scattered light B2 and the directly transmitted light B1. The image acquisition and processing device 22 is further used for:

[0068] The transmitted light having an angle with the incident light that is less than or equal to a preset angle is regarded as the directly transmitted light, and the position and light intensity of the directly transmitted light on the scattering screen are determined.

[0069] like Figures 1 to 3 As shown, the position of the direct transmitted light B1 on the scattering screen 21 can be determined based on the incident direction of the incident light A. The transmitted light whose angle with the incident light A is less than or equal to a preset angle (such as 2.5°) is regarded as the direct transmitted light B1, and the position of the direct transmitted light B1 on the scattering screen 21 can be determined. Figure 1 and Figure 3 As shown, the incident light A can be incident vertically onto the object to be measured 3. Figure 2As shown, the incident light A may also be incident on the object to be measured 3 in a non-vertical manner.

[0070] The intensity of transmitted light B at each location on diffuser screen 21 can be determined based on the intensity of transmitted light B in various directions. The intensity of direct transmitted light B1 can be determined based on the location of direct transmitted light B1 on diffuser screen 21 and the intensity of transmitted light B at each location on diffuser screen 21. The intensity of scattered light B2 can be obtained by subtracting the intensity of direct transmitted light B1 from the total intensity of transmitted light B.

[0071] The object to be measured 3 may include a reflective grating, or a transparent or semi-transparent film, sheet or plate.

[0072] like Figure 1 As shown, the object 3 to be measured is a thin film, and the incident light A generated by the light source 1 is incident perpendicularly to the object 3. After the incident light A passes through the object 3, the transmitted light B is reflected on the diffuser screen 21. The transmitted light B on the diffuser screen 21 is identified as comprising direct transmitted light B1 and scattered light B2. The image acquisition and processing device 22 captures and processes an image of the diffuser screen, detecting the intensity of the transmitted light B in various directions and determining the position of the direct transmitted light B1 on the diffuser screen 21. It should be noted that the light source 1 can be positioned relative to the center of the diffuser screen 21. When the incident light A generated by the light source 1 is incident perpendicularly to the object 3, the position of the direct transmitted light B1 on the diffuser screen 21 is the center of the diffuser screen 21.

[0073] The intensity of the directly transmitted light B1 is determined based on its position on the diffuser screen 21 and the intensity of the transmitted light B in all directions. The intensity of the scattered light B2 is obtained by subtracting the intensity of the directly transmitted light B1 from the total intensity of the transmitted light B. The haze of the object 3 to be measured is calculated as the percentage of the intensity of the scattered light B2 to the total intensity of the transmitted light B, which is:

[0074]

[0075] Wherein, Haze is the haze of the object 3 to be measured, T 总透过光 is the total intensity of the transmitted light B, T 直透射光 is the intensity of the directly transmitted light B1.

[0076] like Figure 2As shown, the object 3 to be measured is a thin film, and the incident light A generated by the light source 1 is incident at a non-perpendicular direction to the object 3. The incident light A generates reflected light C at the object 3. However, the reflected light C and the incident light A are located on the same side of the object 3. That is, the reflected light C and the transmitted light B are located on opposite sides of the object 3, and the reflected light C is not counted as the transmitted light B. The transmitted light B includes directly transmitted light B1 and scattered light B2. The image acquisition and processing device 22 captures an image of the scattering screen and performs image processing on the scattering screen image to detect the intensity of the transmitted light B in various directions and determine the position of the directly transmitted light B1 on the scattering screen 21. It should be noted that when the incident light A is incident at a non-perpendicular direction to the object 3, the position of the directly transmitted light B1 on the scattering screen 21 is not at the center of the scattering screen 21. When the incident angle of the incident light A is θ1, assuming that the distance between the scattering screen 21 and the object to be measured 3 is D, the distance between the directly transmitted light B1 and the center position of the scattering screen 21 is d1 = D·tanθ1.

[0077] After determining the position of the direct transmitted light B1 on the diffuser screen 21, determine the intensity of the direct transmitted light B1 based on its position on the diffuser screen 21 and the intensity of the transmitted light B in all directions. Subtract the intensity of the direct transmitted light B1 from the total intensity of the transmitted light B to obtain the intensity of the scattered light B2. Calculate the percentage of the intensity of the scattered light B2 to the total intensity of the transmitted light B to obtain the haze of the object to be measured, that is:

[0078]

[0079] Wherein, Haze is the haze of the object 3 to be measured, T 总透射光 is the total intensity of the transmitted light B, T 直透射光 is the intensity of the directly transmitted light B1.

[0080] like Figure 3 As shown, the object 3 to be measured is a reflective grating. The incident light A generated by the light source 1 is incident perpendicularly to the object 3. The incident light A generates diffracted light D at the object 3. However, the diffracted light D and the incident light A are located on the same side of the object 3. That is, the diffracted light D and the transmitted light B are located on opposite sides of the object 3. Therefore, the diffracted light D is not counted as the transmitted light B. The transmitted light B includes directly transmitted light B1 and scattered light B2. The image acquisition and processing device 22 captures and processes the diffuser screen image, detects the intensity of the transmitted light B in various directions, and determines the position of the directly transmitted light B1 on the diffuser screen 21. It should be noted that the light source 1 can be positioned relative to the center of the diffuser screen 21. When the incident light A generated by the light source 1 is incident perpendicularly to the object 3, the position of the directly transmitted light B1 on the diffuser screen 21 is the center of the diffuser screen 21.

[0081] The intensity of the directly transmitted light B1 is determined based on its position on the diffuser screen 21 and the intensity of the transmitted light B in all directions. The intensity of the scattered light B2 is obtained by subtracting the intensity of the directly transmitted light B1 from the total intensity of the transmitted light B. The haze of the object to be measured is calculated as the percentage of the intensity of the scattered light B2 to the total intensity of the transmitted light B:

[0082]

[0083] Wherein, Haze is the haze of the object 3 to be measured, T 总透过光 is the total intensity of the transmitted light B, T 直透射光 is the intensity of the directly transmitted light B1.

[0084] In some embodiments, as Figure 4 As shown, the other light beams also include diffracted light B3, that is, the transmitted light B includes scattered light B2, directly transmitted light B1 and diffracted light B3. The image acquisition and processing device 22 is also used for:

[0085] Determine the deviation angle of the diffracted light from the incident light;

[0086] The position and intensity of the diffracted light on the scattering screen are determined based on the deviation angle, the incident angle of the incident light, and the position of the directly transmitted light on the scattering screen.

[0087] like Figure 4 As shown, the incident light A passes through the object 3 and the transmitted light B is reflected on the scattering screen 21, as shown in FIG. Figure 5 As shown. The scattering screen image is collected by the image acquisition device 22, as shown Figure 6 As shown. The image acquisition and processing device 22 processes the scattering screen image and detects the intensity of the transmitted light B in various directions, that is, the intensity of the light at various positions on the scattering screen 21. It is identified that the transmitted light B on the scattering screen 21 includes direct transmitted light B1, scattered light B2, and diffracted light B3. The position of the direct transmitted light B1 on the scattering screen 21 and the position of the diffracted light B3 on the scattering screen 21 are determined, as shown in FIG. Figure 7 Except for the directly transmitted light B1 and the diffracted light B3, all other light beams on the scattering screen 21 are scattered light B2.

[0088] After determining the position of the directly transmitted light B1 on the diffuser screen 21 based on the incident direction of the incident light A, the position of the diffracted light B3 on the diffuser screen 21 can be determined based on the deviation angle of the diffracted light B3 from the incident light A, the incident angle of the incident light A, and the position of the directly transmitted light B1 on the diffuser screen 21. The intensity of the transmitted light B at each position on the diffuser screen 21 can be determined based on the intensity of the transmitted light B in each direction. The intensity of the directly transmitted light B1 can be determined based on the position of the directly transmitted light B1 on the diffuser screen 21 and the intensity of the transmitted light at each position on the diffuser screen 21. The intensity of the diffracted light B3 can be determined based on the position of the diffracted light B3 on the diffuser screen 21 and the intensity of the transmitted light at each position on the diffuser screen 21. The intensity of the scattered light B2 can be obtained by subtracting the intensity of the directly transmitted light B1 and the intensity of the diffracted light B3 from the total intensity of the transmitted light B.

[0089] The object to be measured may include a transmissive grating. The transmissive grating can be applied to an augmented reality (AR) near-eye display device using a volume holographic grating diffraction waveguide. The haze of the volume holographic grating (i.e., transmissive grating) affects the perception of the human eye when observing external objects through the AR device. The smaller the haze, the less the volume holographic grating (i.e., transmissive grating) scatters the incident light, and the clearer the perception of the human eye when observing external objects through the grating.

[0090] Volume holographic grating diffraction waveguide is the most promising optical technology in AR display devices. This is because the volume holographic grating (i.e., transmission grating) made of photopolymer can be used as a coupler, and its diffraction efficiency can theoretically reach 100%. In AR technology based on volume holographic grating diffraction waveguide, the field of view and display brightness are mainly determined by the angular bandwidth and diffraction efficiency of the volume holographic grating (i.e., transmission grating) when it produces a diffraction effect. Improving the angular bandwidth and diffraction efficiency helps to improve the field of view and display brightness. Therefore, volume holographic gratings (i.e., transmission gratings) suitable for AR display devices need to have a strong diffraction effect. Figure 1 As shown, a volume holographic grating (i.e., a transmission grating) diffracts the incident light A from behind. Diffracted light B3 and directly transmitted light B1 are located on the same side. The angle between directly transmitted light B1 and diffracted light B3 is determined by the angle at which the volume holographic grating (i.e., transmission grating) is exposed. AR displays seamlessly integrate virtual objects with the real world, allowing users to interact with virtual objects in real time without affecting their observation of the real world. Therefore, transmissive gratings suitable for AR displays are required to have a haze of less than 2%.

[0091] In related technologies, an integrating sphere is used to capture the total intensity of transmitted light that deviates from the incident light by a specific angle (e.g., 2.5°). This intensity is used as the scattered light intensity. This means that all beams of transmitted light other than the directly transmitted light are considered scattered light. If the object to be measured is a transmission grating, which has a very high diffraction efficiency, the incident light passing through the transmission grating will generate extremely strong, large-angle diffracted light. This diffracted light is then counted as scattered light, resulting in a mismatch between the measured haze and the actual scattering performance of the transmission grating.

[0092] This embodiment detects the intensity of the transmitted light in all directions, and determines the intensity of the direct transmitted light and the intensity of the diffracted light based on the position of the direct transmitted light on the scattering screen, the position of the diffracted light on the scattering screen, and the intensity of the transmitted light in all directions. The intensity of the scattered light is accurately determined based on the total intensity of the transmitted light, the intensity of the direct transmitted light, and the intensity of the diffracted light, avoiding counting the intensity of the diffracted light as the intensity of the scattered light, thereby accurately calculating the percentage of the intensity of the scattered light to the total intensity of the transmitted light, that is, accurately detecting the haze of the object to be measured.

[0093] In some embodiments, when the object to be measured 3 includes a transmissive grating, the deviation angle of the diffracted light from the incident light is related to the grating period, the refractive index and the wavelength of the incident light. The image acquisition and processing device 22 is further configured to:

[0094] The deviation angle of the diffracted light from the incident light is determined by the grating period and refractive index of the transmission grating and the wavelength of the incident light.

[0095] Where, the deviation angle of the diffracted light B3 from the incident light A is θ2, the grating period of the transmission grating is Λ, the refractive index of the transmission grating is η, and the wavelength of the incident light A is λ, then:

[0096]

[0097] According to the grating period Λ and the refractive index η of the transmission grating and the wavelength λ of the incident light A, the deviation angle θ2 of the diffracted light B3 from the incident light A can be determined.

[0098] After determining the deviation angle θ2 of the diffracted light B3 from the incident light A, the position of the diffracted light B3 on the scattering screen 21 can be determined based on the deviation angle θ2, the incident angle θ1 of the incident light A, and the position of the directly transmitted light B1 on the scattering screen 21. The image acquisition and processing device 22 is further configured to:

[0099] Obtain the distance between the object to be measured and the scattering screen;

[0100] Determine the distance between the diffracted light and the directly transmitted light on the scattering screen based on the deviation angle, the incident angle of the incident light, and the distance between the object to be measured and the scattering screen;

[0101] The position of the diffracted light on the scattering screen is determined based on the distance between the diffracted light and the directly transmitted light on the scattering screen and the position of the directly transmitted light on the scattering screen.

[0102] The position of the diffracted light B3 on the scattering screen 21 is also related to the distance between the object to be measured 3 and the scattering screen 21. Assuming that the distance between the object to be measured 3 and the scattering screen 21 is D, based on the deviation angle θ2, the incident angle θ1 of the incident light A, and the distance D between the object to be measured 3 and the scattering screen 21, the distance d2 between the diffracted light B3 and the directly transmitted light B1 can be determined as D*tan(θ1+θ2)-D*tanθ1. Among them, the incident light A can be incident on the object to be measured 3 vertically or non-vertically, that is, 0°≤θ1<90°. Figure 4 As shown, when incident light A strikes the object 3 perpendicularly, i.e., when θ1 = 0°, the distance d2 between diffracted light B3 and directly transmitted light B1 is D*tanθ2. Furthermore, the direction of diffracted light B3 relative to directly transmitted light B1 can also be determined. The position of diffracted light B3 on the scattering screen 21 can be determined based on the distance d2 between diffracted light B3 and directly transmitted light B1, the position of directly transmitted light B1 on the scattering screen 21, and the direction of diffracted light B3 relative to directly transmitted light B1.

[0103] The intensity of the direct transmitted light B1 and the diffracted light B3 are determined based on the positions of the direct transmitted light B1 and the diffracted light B3 on the diffuser screen 21, as well as the intensity of the transmitted light B in all directions. The intensity of the scattered light B2 is obtained by subtracting the intensity of the direct transmitted light B1 from the total intensity of the transmitted light B, and then by subtracting the intensity of the diffracted light B3 from the total intensity of the transmitted light B. The haze of the object to be measured is calculated as the percentage of the intensity of the scattered light B2 to the total intensity of the transmitted light B:

[0104]

[0105] Wherein, Haze is the haze of the object 3 to be measured, T 总透过光 is the total intensity of the transmitted light B, T 直投射光 is the intensity of the direct transmitted light B1, T 衍射光 is the intensity of the diffracted light B3.

[0106] According to the haze detection system provided in the embodiment of the present application, the transmitted light transmitted in various directions after the incident light passes through the object to be measured, which includes scattered light, is received, and the intensity of the transmitted light in various directions and the position of the transmitted light in the corresponding direction are detected, so as to accurately determine the intensity of the scattered light based on the intensity of the transmitted light in various directions and the position, and thus determine the haze of the object to be measured based on the intensity of the scattered light and the total intensity of the transmitted light, thereby improving the detection accuracy of the haze of the object to be measured.

[0107] Correspondingly, the present application also provides a haze detection method that can be applied to the above-mentioned haze detection system.

[0108] Figure 8 A schematic flow chart of the haze detection method provided in an embodiment of the present application.

[0109] like Figure 8 As shown, the haze detection method includes: step 110, step 120, step 130 and step 140.

[0110] Step 110 : receiving transmitted light generated by a light source and transmitted in multiple directions after the incident light passes through the object to be measured, where the transmitted light includes scattered light.

[0111] Step 120 : Detect the intensity of the transmitted light in each direction and the position of the transmitted light in the corresponding direction.

[0112] Step 130: Determine the intensity of the scattered light based on the intensity of the transmitted light in various directions and the position of the transmitted light;

[0113] Step 140: Determine the haze of the object to be measured according to the intensity of the scattered light and the total intensity of the transmitted light.

[0114] According to the haze detection method provided in the embodiment of the present application, the transmitted light transmitted in various directions after the incident light passes through the object to be measured is received, and the transmitted light includes scattered light. The intensity of the transmitted light in various directions and the position of the transmitted light in the corresponding direction are detected, so as to accurately determine the intensity of the scattered light based on the intensity of the transmitted light in various directions and the position, and thus determine the haze of the object to be measured based on the intensity of the scattered light and the total intensity of the transmitted light, thereby improving the detection accuracy of the haze of the object to be measured.

[0115] In some embodiments, the transmitted light in step 110 is received by a scattering screen, and the detection of the intensity of the transmitted light in various directions in step 120 includes:

[0116] The image of the scattering screen after the scattering screen receives the transmitted light is collected; the image of the scattering screen is processed to obtain the intensity of the transmitted light in all directions.

[0117] In some embodiments, determining the intensity of the scattered light based on the intensity of the transmitted light in various directions and the position of the transmitted light in step 130 includes:

[0118] The intensity of the scattered light is determined based on the intensity of the transmitted light in each direction, the position of the transmitted light, and the angle between the scattered light and the incident light.

[0119] In some embodiments, the transmitted light also includes other light beams. Determining the intensity of the scattered light based on the intensity and position of the transmitted light in various directions in step 130 includes:

[0120] Determine the intensity of other light beams based on the intensity of the transmitted light in all directions, its position and the angle between the other light beams and the incident light;

[0121] The intensity of the scattered light is determined based on the total intensity of the transmitted light and the intensity of other light beams.

[0122] In some embodiments, the other light beams include directly projected light, and the step of determining the positions of the other light beams in the transmitted light except the scattered light on the diffuser screen includes:

[0123] The transmitted light having an angle with the incident light that is less than or equal to a preset angle is regarded as the directly transmitted light, and the position and light intensity of the directly transmitted light on the scattering screen are determined.

[0124] In some embodiments, the object to be measured includes a thin film or a reflective grating.

[0125] In some embodiments, the other light beams further include diffracted light, and the step of determining the positions of the other light beams in the transmitted light except the scattered light on the scattering screen further includes:

[0126] Determine the deviation angle of the diffracted light from the incident light;

[0127] The position and intensity of the diffracted light on the scattering screen are determined based on the deviation angle, the incident angle of the incident light, and the position of the directly transmitted light on the scattering screen.

[0128] In some embodiments, the object to be measured includes a transmissive grating, and the step of determining a deviation angle of the diffracted light from the incident light includes:

[0129] The deviation angle of the diffracted light from the incident light is determined by the grating period and refractive index of the transmission grating and the wavelength of the incident light.

[0130] In some embodiments, the step of determining the position of the diffracted light on the scattering screen according to the deviation angle and the position of the directly transmitted light on the scattering screen further includes:

[0131] Obtain the distance between the object to be measured and the scattering screen;

[0132] Determine the distance between the diffracted light and the directly transmitted light based on the deviation angle, the incident angle of the incident light, and the distance between the object to be measured and the scattering screen;

[0133] The position of the diffracted light on the scattering screen is determined based on the distance between the diffracted light and the directly transmitted light and the position of the directly transmitted light on the scattering screen.

[0134] In some embodiments, the incident light is incident perpendicularly to the object to be measured, or the incident light is incident non-perpendicularly to the object to be measured.

[0135] It should be noted that, in this article, the terms "comprise", "include" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device comprising a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, an element defined by the statement "comprises a ..." does not exclude the presence of other identical elements in the process, method, article or device comprising the element. In addition, it should be noted that the scope of the methods and devices in the embodiments of the present application is not limited to performing functions in the order shown or discussed, and may also include performing functions in a substantially simultaneous manner or in the opposite order according to the functions involved. For example, the described method may be performed in an order different from that described, and various steps may also be added, omitted, or combined. In addition, the features described with reference to certain examples may be combined in other examples.

[0136] Through the description of the above implementation methods, those skilled in the art can clearly understand that the above-mentioned embodiment methods can be implemented by means of software plus the necessary general hardware platform, and of course can also be implemented by hardware, but in many cases the former is a better implementation method. Based on this understanding, the technical solution of the present application is essentially or the part that contributes to the prior art can be embodied in the form of a computer software product, which is stored in a storage medium (such as ROM / RAM, magnetic disk, optical disk), including a number of instructions for enabling a terminal (which can be a mobile phone, computer, server, or network device, etc.) to execute the methods described in each embodiment of the present application.

[0137] The embodiments of the present application are described above in conjunction with the accompanying drawings, but the present application is not limited to the above-mentioned specific implementation methods. The above-mentioned specific implementation methods are merely illustrative and not restrictive. Under the guidance of this application, ordinary technicians in this field can also make many forms without departing from the purpose of this application and the scope of protection of the claims, all of which are within the protection of this application.

[0138] Throughout this specification, reference to terms such as "one embodiment," "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples" means that the specific features, structures, materials, or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

[0139] Although the embodiments of the present application have been shown and described, those skilled in the art will appreciate that various changes, modifications, substitutions, and variations may be made to the embodiments without departing from the principles and intent of the present application, and that the scope of the present application is defined by the claims and their equivalents.

Claims

1. A haze detection system, characterized in that: include: a light source for generating incident light; A haze detection device is used to receive transmitted light transmitted in multiple directions after the incident light passes through the object to be measured, wherein the transmitted light includes scattered light; and detect the intensity of the transmitted light in each direction and the position of the transmitted light in the corresponding direction; Determining the intensity of the scattered light based on the intensity of the transmitted light in each direction and the position; And the haze of the object to be measured is determined according to the light intensity of the scattered light and the total light intensity of the transmitted light.

2. The haze detection system according to claim 1, wherein: The haze detection device comprises: a scattering screen, configured to receive transmitted light that is transmitted in multiple directions after the incident light passes through the object to be measured; an image acquisition and processing device for acquiring an image of the scattering screen after the scattering screen receives the transmitted light; performing image processing on the scattering screen image to obtain the intensity of the transmitted light in each direction and the position of the transmitted light in the corresponding direction; determining the intensity of the scattered light based on the intensity of the transmitted light in each direction and the position; and determining the haze of the object to be measured based on the intensity of the scattered light and the total intensity of the transmitted light.

3. The haze detection system according to claim 2, characterized in that: The transmitted light also includes other light beams, and the image acquisition and processing device is further used for: determining the intensity of the other light beams according to the intensity of the transmitted light in various directions, the position and the angle of the other light beams relative to the incident light; The intensity of the scattered light is determined according to the total intensity of the transmitted light and the intensities of the other light beams.

4. The haze detection system according to claim 3, characterized in that: The other light beams include direct transmitted light; The image acquisition and processing device is also used for: The transmitted light having an angle with the incident light that is less than or equal to a preset angle is used as the directly transmitted light, and the position and intensity of the directly transmitted light on the scattering screen are determined.

5. The haze detection system according to claim 4, characterized in that: The transmitted light also includes diffracted light; The image acquisition and processing device is also used for: determining a deviation angle of the diffracted light from the incident light; The position and intensity of the diffracted light on the scattering screen are determined according to the deviation angle, the incident angle of the incident light, and the position of the directly transmitted light on the scattering screen.

6. The haze detection system according to claim 5, characterized in that: The object to be measured includes a transmission grating; The image acquisition and processing device is also used for: The deviation angle of the diffracted light from the incident light is determined according to the grating period and the refractive index of the transmission grating and the wavelength of the incident light.

7. The haze detection system according to claim 5, characterized in that: The image acquisition and processing device is also used for: Obtaining the distance between the object to be measured and the scattering screen; determining the distance between the diffracted light and the directly transmitted light on the scattering screen according to the deviation angle, the incident angle of the incident light, and the distance between the object to be measured and the scattering screen; The position of the diffracted light on the scattering screen is determined according to the distance between the diffracted light and the directly transmitted light on the scattering screen and the position of the directly transmitted light on the scattering screen.

8. The haze detection system according to claim 4, characterized in that: The object to be measured includes a thin film or a reflective grating.

9. The haze detection system according to any one of claims 1 to 8, characterized in that: The incident light is incident perpendicularly to the object to be measured, or the incident light is incident non-perpendicularly to the object to be measured.

10. A haze detection method, characterized in that: include: receiving transmitted light generated by a light source and transmitted in multiple directions after the incident light passes through the object to be measured, wherein the transmitted light includes scattered light; detecting the intensity of the transmitted light in each direction and the position of the transmitted light in the corresponding direction; determining the intensity of the scattered light based on the intensity of the transmitted light in each direction and the position; The haze of the object to be measured is determined according to the intensity of the scattered light and the total intensity of the transmitted light.

Images