Vacuum penetration sealing structure of water-cooled electrode

Abstract

The invention belongs to the technical field of plasma discharge, and particularly discloses a vacuum penetration sealing structure of a water-cooled electrode, which comprises a mounting flange connected with a vacuum chamber; an electrode; the sealing unit comprises an insulating sleeve and a fixing flange, the insulating sleeve is mounted in the mounting flange, the fixing flange sleeves the upper part of the insulating sleeve and is detachably connected with the mounting flange, and the electrode penetrates through the insulating sleeve; and sealing rings are arranged between the insulating sleeve and the mounting flange and between the insulating sleeve and the fixing flange. The electrode is replaced, and the whole mounting flange does not need to be integrally replaced.

Description

Technical Field

[0001] The present invention relates to the field of plasma discharge technology, and in particular to a vacuum penetration sealing structure of a water-cooled electrode. Background Art

[0002] Plasma discharge technology is currently widely used across industrial sectors, such as microelectronics processing, material modification, and semiconductors, making it a crucial engineering application. Plasma discharge electrodes located within vacuum chambers, such as those used in plasma chemical vapor deposition (PCVD), operate at high temperatures. Continuous operation of these electrodes generates significant heat, which, if not dissipated promptly, can degrade electrode material performance and even cause equipment failure. Therefore, active cooling is essential.

[0003] The vacuum water-cooled electrode needs to pass through the wall of the vacuum chamber to connect the electrode to the external power supply, while ensuring that the high vacuum environment of the vacuum chamber is not destroyed, which requires it to have good sealing properties; the electrode works in a high voltage and strong electric field environment, and to prevent current leakage and short circuit, it must have reliable insulation performance; and the cooling water must circulate inside the electrode to take away heat, which poses higher challenges to the structural strength and sealing performance of the electrode. It is necessary to meet the ultra-high vacuum penetration, insulation and sealing requirements at the same time. Problems in any link will affect the normal progress of the entire process.

[0004] In the existing technology, the penetration of vacuum water-cooled electrodes usually adopts the ceramic brazing sealing flange connection form. Its processing process is complicated and involves two materials with very different properties, ceramic and metal. Ceramic materials are hard and brittle, and are prone to cracking and breakage during processing, which places extremely high demands on processing equipment and processes. During the brazing process, parameters such as temperature, pressure and time need to be precisely controlled to ensure a good connection structure between ceramic and metal. The slightest carelessness will lead to poor sealing, affecting the sealing and insulation performance of the electrode. Moreover, the process also requires a high level of technical skills from the operator, and professional training is required to master it, which undoubtedly increases the production cycle and manufacturing costs.

[0005] The complex structure and manufacturing difficulty of ceramic brazed flanges contribute to their high production costs. Furthermore, ceramic materials are brittle and can be damaged by minor impacts or thermal stresses during transportation, installation, and use. Once damaged, individual ceramic components cannot be replaced because they are brazed together with the metal flange. The entire flange must be replaced, which is not only costly but also results in extended equipment downtime, impacting production efficiency and increasing operating costs. Summary of the Invention

[0006] The present invention provides a vacuum penetration sealing structure for a water-cooled electrode, which aims to facilitate replacement of the electrode without having to replace the entire mounting flange as a whole.

[0007] The present invention is achieved through the following technical solution: a vacuum penetration sealing structure for a water-cooled electrode, comprising: a mounting flange, which is connected to a vacuum chamber; a sealing unit, which comprises an insulating sleeve and a fixed flange, the insulating sleeve being installed inside the mounting flange, the fixed flange being sleeved on the upper part of the insulating sleeve and detachably connected to the mounting flange, and the electrode passing through the insulating sleeve; sealing rings are provided between the insulating sleeve and the mounting flange and the fixed flange.

[0008] Compared with the existing technology, this solution has the following advantages and beneficial effects: In this solution, when the electrode needs to be replaced, it is only necessary to remove the fixing flange from the mounting flange, thereby removing the sealing unit as a whole from the mounting flange. Since the electrode passes through the insulating sleeve, when the sealing unit as a whole is removed from the mounting flange, the electrode can be removed from the mounting flange, thereby facilitating the replacement of the electrode without the need to replace the entire flange as a whole.

[0009] Once the ceramic components of the traditional ceramic brazed sealing flange structure are damaged, the expensive flange assembly must be replaced in its entirety, resulting in a huge waste of resources and a significant cost burden. In the present invention, the sealing structure forms a separable modular design between the electrode and the sealing unit (insulating sleeve, fixed flange). When the electrode fails or is damaged, the sealing unit can be removed together with the electrode by simply disassembling the fixed flange, enabling rapid replacement of the electrode. This "partial replacement" model significantly reduces the cost of spare parts while lowering the complexity and technical threshold of maintenance work. Ordinary maintenance personnel can operate it after simple training, effectively shortening equipment downtime and improving production continuity.

[0010] This solution's sealing unit and mounting flange feature a detachable connection design, allowing the same sealing unit to accommodate electrodes of different specifications and types, significantly improving the structural versatility. In industrial production, as processes upgrade or product iterations occur, companies no longer need to redesign or replace the entire flange system; they only need to replace the appropriate electrodes to meet new requirements, significantly reducing equipment modification costs and cycles. This design also allows companies to flexibly adjust electrode configurations based on different production scenarios, improving equipment efficiency and application range.

[0011] Sealing rings are installed between the insulating sleeve and both the mounting and fixing flanges, forming a multi-layered sealing protection system. Compared to traditional ceramic brazing structures, this sealing method is more effective in handling complex operating conditions such as temperature fluctuations and mechanical vibration, ensuring the long-term stability of the vacuum chamber's sealing and the insulation of the electrodes. Furthermore, the sealing ring material can be flexibly selected to suit different operating environments (such as high temperatures and severe corrosion), further enhancing the structure's environmental adaptability and reliability, and reducing the risk of equipment failure and production accidents due to sealing failure.

[0012] Traditional ceramic brazed sealing flanges are complex to manufacture, requiring extremely high standards in equipment, technology, and personnel, resulting in long production cycles and low yields. However, the sealing structure of the present invention utilizes a modular design, allowing each component (mounting flange, insulating sleeve, and fixed flange) to be independently manufactured, significantly reducing the processing complexity. Furthermore, the standardized, removable connection facilitates quality control and assembly and commissioning during production, improving production efficiency and product consistency, and providing strong support for large-scale production and cost control. Finally, by reducing the frequency of overall flange replacement, the present invention can effectively reduce resource consumption and waste generation.

[0013] Furthermore, the mounting flange includes a loop and a shoulder ring, the loop is annular, and the loop is provided with a plurality of loop flange holes along its circumferential direction; The shoulder ring is cylindrical, is located inside the loop and is coaxially embedded with the loop, and the sealing unit is mounted on the shoulder ring.

[0014] Beneficial effects: The mounting flange in this solution includes a slip-on sleeve and a shoulder ring, wherein the slip-on sleeve flange hole on the slip-on sleeve facilitates flange connection with the vacuum chamber, and the shoulder ring facilitates installation of the sealing unit.

[0015] The multiple flange holes along the circumference of the looper allow for quick bolt connection of the mounting flange to the vacuum chamber, while allowing for angle and position adjustment within a certain range, significantly reducing installation complexity. This flexible installation method, particularly in complex industrial equipment layouts, effectively avoids installation difficulties caused by space limitations or component misalignment, thereby improving equipment assembly efficiency. Furthermore, the removable looper design facilitates subsequent maintenance of other vacuum chamber components without disassembling the entire electrode seal structure, reducing maintenance workload and time costs.

[0016] The coaxial placement of the shoulder ring and looper provides a stable mounting foundation for the sealing unit. The cylindrical design of the shoulder ring evenly distributes stress generated during electrode operation, preventing structural deformation or damage caused by localized excessive stress, thereby ensuring the long-term stable operation of the vacuum water-cooled electrode. Furthermore, the coaxial placement of the shoulder ring and looper further enhances the sealing performance of the vacuum chamber, effectively preventing leaks or accidents such as external gas infiltration, and ensuring the safety and stability of the process.

[0017] The split structure of the looper and shoulder ring allows them to be produced, processed, and replaced independently. As a universal component, the looper can be adapted to a variety of shoulder ring and sealing unit specifications, reducing mold development costs and production complexity. The shoulder ring can be customized according to electrode size and usage requirements, improving product adaptability. If a component becomes damaged, only the corresponding module needs to be replaced, eliminating the need to replace the entire mounting flange, significantly reducing repair costs. Furthermore, this modular design facilitates inventory management, reduces spare parts backlogs, and improves capital efficiency.

[0018] Furthermore, the shoulder ring and the loop are coaxially pressed and fixed.

[0019] Beneficial effect: In this solution, the shoulder ring and the loop are assembled by coaxial compression and fixation, without the need for welding operation. The assembly method is simple and convenient for later disassembly.

[0020] In addition, coaxial compression fixation can ensure that the axes of the shoulder ring and the loop are strictly aligned through machining accuracy (such as fitting tolerance, positioning steps, etc.), thereby ensuring that the electrode passing through the inside of the shoulder ring is highly aligned with the central axis of the vacuum chamber, making the installation accuracy of the shoulder ring and the loop higher.

[0021] This characteristic is crucial to plasma discharge processes. For example, in plasma chemical vapor deposition, electrode coaxiality directly affects the uniformity of plasma distribution, avoiding problems such as uneven film deposition thickness and inconsistent etching rate due to offset, thereby improving process stability and product yield.

[0022] Furthermore, a shoulder ring mounting groove is provided on the inner side of the loop and along its bottom, the top of the shoulder ring mounting groove does not pass through the top surface of the loop, and the shoulder ring is a boss cylinder with a boss provided on the top; the shoulder ring is coaxially embedded in the shoulder ring mounting groove.

[0023] Beneficial effects: In this solution, the shoulder ring mounting groove and the boss cylinder on the top of the shoulder ring cooperate with each other to form a nested structure. The structural design of the slipcover and the shoulder ring makes the assembly process simpler, can provide positioning guidance for the installation of the shoulder ring, and improve the assembly accuracy of the shoulder ring and the slipcover. The assembler can complete the installation without complicated debugging, and the assembly efficiency is higher.

[0024] In this solution, the shoulder ring is coaxially pressed with the loop, and the step positioning design between the shoulder ring and the loop is combined with the shoulder ring mounting groove provided on the loop and the boss cylindrical structure design of the shoulder ring, so that the coaxial alignment of the shoulder ring and the loop can be quickly achieved through mechanical limiting when the two are assembled, reducing the time for manual centering and debugging, and is suitable for rapid assembly in large-scale production.

[0025] When the sealing unit needs to be repaired or replaced, simply loosen the retaining components (such as bolts and pressure rings) to remove the shoulder ring and sealing unit as a whole, while the slip-on sleeve remains fixed to the vacuum chamber. This "layered maintenance" approach avoids the disruption of other vacuum chamber components during traditional integral flange removal, shortening downtime and reducing maintenance costs.

[0026] Furthermore, the insulating sleeve comprises an upper insulating sleeve, a middle insulating sleeve and a lower insulating sleeve, and the electrode passes through the upper insulating sleeve, the middle insulating sleeve and the lower insulating sleeve in sequence; A sleeve mounting groove is provided on the shoulder ring, the lower insulating sleeve is embedded in the sleeve mounting groove, the middle insulating sleeve and the upper insulating sleeve are both located on the inner side of the fixed flange, and the middle insulating sleeve is located between the upper insulating sleeve and the lower insulating sleeve; the fixed flange presses the insulating sleeve downward and is connected to the shoulder ring; the sealing ring is provided between the lower insulating sleeve and the sleeve mounting groove, between the lower insulating sleeve and the middle insulating sleeve, and between the middle insulating sleeve and the upper insulating sleeve.

[0027] Beneficial effects: The insulating sleeves in this solution include upper, middle, and lower insulating sleeves, which can not only insulate the electrode but also seal in combination with the various sealing rings. In addition, the lower insulating sleeve in this application is embedded in the sleeve installation groove on the shoulder ring to play a role in preliminary positioning and installation, making the installation of the insulating sleeve more accurate. At the same time, the fixed flange in this solution can play a role in positioning and limiting the installation of the upper and middle insulating sleeves, and the fixed flange can improve the connection strength and sealing reliability by connecting to the shoulder ring while pressing the upper, middle, and lower insulating sleeves and the various sealing rings.

[0028] Furthermore, the combined design of the upper, middle, and lower insulation sleeves significantly increases the insulation path length between the electrode, the mounting flange, and the vacuum chamber, resulting in highly efficient insulation performance. In high-voltage, high-field plasma discharge environments, this longer insulation path effectively prevents potential localized discharge along the surface, avoiding leakage or short circuits between the electrode and the vacuum chamber, and providing reliable protection for stable equipment operation. Furthermore, the sealing rings tightly connect the various insulation sleeve sections, further isolating them from external conductive media and preventing insulation degradation caused by moisture, dust, and other factors, significantly enhancing the overall reliability of the insulation system.

[0029] The multi-segmented insulating sleeve, combined with multiple sealing rings, creates a multi-layered sealing protection system. The lower insulating sleeve is embedded in the sleeve mounting groove of the shoulder ring, with the sealing ring providing a radial seal. Seals also provide axial seals between the middle and lower insulating sleeves, and between the middle and upper insulating sleeves, effectively preventing leakage or infiltration of gases, cooling water, or external impurities within the vacuum chamber. This multi-seal structure not only adapts to complex pressure and temperature fluctuations within the vacuum chamber, but also ensures long-term sealing stability in harsh environments such as high temperature, high humidity, and corrosive gases, safeguarding the plasma process.

[0030] The split insulating sleeve structure makes the installation process more flexible and convenient. During the equipment maintenance phase, if a section of the insulating sleeve is damaged or aged, it is only necessary to remove the corresponding fixing flange to replace the damaged insulating sleeve separately without dismantling the entire electrode sealing structure, which significantly shortens equipment downtime and reduces maintenance costs.

[0031] The three-section insulation sleeve design effectively disperses the stress generated during electrode operation. During water-cooled electrode operation, stress is generated in the electrode due to factors such as thermal expansion and mechanical vibration. The multi-section structure effectively buffers and disperses these stresses through flexible connections (i.e., sealing rings) between the various sections of insulation sleeve, preventing stress concentration that could lead to insulation sleeve cracking or deformation. Furthermore, the design of the fixed flange pressing down on the insulation sleeve tightly bonds the entire insulation sleeve assembly to the shoulder ring, enhancing the overall rigidity of the structure and ensuring the insulation sleeve system remains stable even under complex operating conditions, thereby extending the service life of the equipment.

[0032] Furthermore, the sleeve installation groove is a stepped groove, and the shape of the lower insulating sleeve matches the shape of the sleeve installation groove.

[0033] Beneficial effect: In this solution, the sleeve installation groove is a stepped groove, which can play a role in positioning and limiting the assembly of the lower insulating sleeve, so that the lower insulating sleeve can be smoothly embedded in the sleeve installation groove without falling, ensuring the stability of the installation of the lower insulating sleeve and ensuring that the lower insulating sleeve is installed in place, and ensuring the installation accuracy of the lower insulating sleeve, which facilitates further ensuring the installation accuracy of the middle insulating sleeve and the upper insulating sleeve behind.

[0034] In addition, the shape matching between the stepped groove and the lower insulating sleeve can achieve the function of guided installation. The assembler does not need additional measurement or adjustment, but only needs to embed the lower insulating sleeve into place along the stepped groove, which significantly reduces manual assembly errors and improves installation efficiency.

[0035] Furthermore, a sealing ring installation groove is provided at the transition between the large diameter section and the small diameter section of the sleeve installation groove, and a sealing ring is embedded in the sealing ring installation groove.

[0036] Beneficial Effects: Because the transition between the large and small diameter sections of the stepped groove creates a geometrically abrupt interface (i.e., the right-angled region of the step), if left untreated, gas could penetrate along the step gap or form a gas flow path at the right angle. The sealing ring mounting groove allows the sealing ring to tightly fill this transition area, forming an annular sealing boundary and effectively blocking gas leakage through the step gap. This design is particularly suitable for high-vacuum or high-pressure environments.

[0037] In this solution, the sealing ring installation groove is opened at the transition between the large diameter section and the small diameter section of the stepped sleeve installation groove, which makes it easier to improve the sealing between the lower insulating sleeve and the sleeve installation groove after the sealing ring is embedded in the sealing ring installation groove.

[0038] Additionally, the fixed and regularly shaped sealing ring mounting groove serves as a physical guide during assembly, helping operators quickly determine the insertion depth of the lower insulating sleeve. When the lower insulating sleeve is inserted to the transition point, and the sealing ring and the sleeve mounting groove are fully aligned, the lower insulating sleeve has reached the correct installation position. This eliminates the need for additional measuring tools, reduces assembly errors, and facilitates installation.

[0039] Furthermore, a socket is provided on the top of the fixing flange, and the upper insulating sleeve is a boss cylinder with a boss provided on the top, and the boss on the top of the upper insulating sleeve passes through the socket.

[0040] Beneficial Effects: This solution provides a socket at the top of the fixed flange, allowing the boss on the top of the upper insulating sleeve to pass through the socket. This further improves the insulation between the electrode and the fixed flange. Furthermore, the top of the upper insulating sleeve is a cylindrical structure with a boss, which improves the assembly accuracy between the upper insulating sleeve and the fixed flange.

[0041] Furthermore, in this solution, the top boss of the upper insulating sleeve, after protruding from the socket of the fixed flange, forms a mechanical stop, limiting the upward displacement of the upper, middle, and lower insulating sleeves. Even if vibration or shock loads are encountered during equipment operation, the combination of the boss and the socket prevents the entire insulating sleeve assembly from failing, thus avoiding the risk of electrode short circuits or gas leaks caused by loosening of the insulating sleeve.

[0042] In addition, the mating surface of the boss and socket provides radial support, reducing horizontal shaking of the upper insulating sleeve. Especially when the electrode is subjected to lateral force, the boss and socket structure can transfer the load to the fixing flange, preventing the insulating sleeve from bending and deformation due to cantilever force, thereby extending its mechanical life.

[0043] Furthermore, the sealing ring is an O-ring.

[0044] Beneficial effect: The sealing ring in this solution adopts an O-ring, which has a flexible installation method and good sealing performance.

[0045] Furthermore, the electrodes and the sealing units are provided in two groups.

[0046] Beneficial effects: Two sets of electrodes and sealing units are set up in this solution, which can simultaneously meet the installation requirements of the water-cooled electrode inlet and outlet. The two sets of electrodes and the sealing unit correspond to the inlet and outlet of the water-cooling channel respectively, forming a complete water circulation heat dissipation path. Cooling water flows in from the inlet of one set of electrodes, flows through the internal channels of the electrodes to take away the heat generated during work, and then flows out from the outlet of the other set of electrodes. This design ensures that the electrodes always remain within the appropriate operating temperature range during high-power plasma discharge processes (such as semiconductor etching, material surface treatment, etc.), avoiding degradation of electrode material performance, insulation failure, or unstable plasma parameters due to overheating, effectively improving process stability and equipment service life. BRIEF DESCRIPTION OF THE DRAWINGS

[0047] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for use in the embodiments. It should be understood that the following drawings only illustrate certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying any creative work.

[0048] Figure 1 This is a schematic diagram of the three-dimensional structure of an embodiment of a vacuum penetrating sealing structure of a water-cooled electrode according to the present invention; Figure 2 This is a front view of an embodiment of a vacuum penetrating sealing structure for a water-cooled electrode according to the present invention; Figure 3 An exploded schematic diagram of a vacuum penetrating sealing structure of a water-cooled electrode according to an embodiment of the present invention from one perspective; Figure 4 An exploded schematic diagram of another perspective of an embodiment of a vacuum penetrating seal structure for a water-cooled motor according to the present invention; Figure 5 A top view of an embodiment of a vacuum penetration sealing structure for a water-cooled motor according to the present invention; Figure 6 A longitudinal cross-sectional view of an embodiment of a vacuum penetration sealing structure of a water-cooled motor according to the present invention; Figure 7 This is a longitudinal cross-sectional view of a mounting flange in an embodiment of a vacuum penetrating sealing structure of a water-cooled motor according to the present invention.

[0049] Markings and corresponding parts names in the accompanying drawings: Looper 1, shoulder ring mounting groove 101, looper flange hole 102; Shoulder ring 2, sleeve mounting groove 201, sealing ring mounting groove 202, shoulder ring flange hole 203; Sealing unit 3, fixed flange 301, lower insulating sleeve 302, middle insulating sleeve 303, upper insulating sleeve 304, lower sealing ring 305, middle sealing ring 306, upper sealing ring 307, fixed flange hole 308; Electrode 4. DETAILED DESCRIPTION

[0050] To make the objectives, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions of the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings herein can be arranged and designed in various different configurations.

[0051] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the invention as claimed, but rather merely represents selected embodiments of the present invention. All other embodiments derived by persons of ordinary skill in the art based on the embodiments of the present invention without creative effort shall fall within the scope of protection of the present invention.

[0052] like Figure 1-Figure 2 As shown, as an embodiment of the present application, a vacuum penetration sealing structure of a water-cooled electrode is provided, comprising: The mounting flange and the sealing unit 3 are connected to the vacuum chamber. In this embodiment, the mounting flange includes a loop 1 and a shoulder ring 2. The loop 1 is annular and has a plurality of loop flange holes 102 along its circumference. The loop flange holes 102 facilitate connection with the vacuum chamber by bolts. The shoulder ring 2 is cylindrical, and the shoulder ring 2 is located inside the looper 1 and is coaxially embedded with the looper 1. There are two groups of sealing units 3. A through hole is coaxially opened on the sealing unit, which is convenient for passing the electrode 4. The electrode 4 can be wound into different shapes or structures using a hollow water-cooling pipe according to actual needs, and the electrode 4 needs to extend to the inside of the vacuum chamber. The electrode 4 is installed on the sealing unit 3 to form a whole group. The two groups of electrodes 4 and the sealing unit 3 are both installed on the shoulder ring 2, so that the installation of the inlet and outlet of the water-cooled electrode 4 can be met at the same time. The two groups of sealing units 3 are installed parallel to each other and are located on the same center line of the shoulder ring 2.

[0053] In one embodiment, the shoulder ring 2 is coaxially pressed and fixed with the loop 1. Figure 3 As shown, a shoulder ring mounting groove 101 is provided on the inner side of the looper 1 and along its bottom, that is, the shoulder ring mounting groove 101 is provided along the annular inner wall of the looper 1, and the groove top of the shoulder ring mounting groove 101 does not pass through the top surface of the looper 1, so that the inner side wall of the looper 1 forms a stepped groove structure, as shown in FIG. Figure 4 As shown, the shoulder ring 2 is a boss cylinder with a boss on the top; Figure 5 and Figure 6 As shown, the shoulder ring 2 is coaxially embedded in the shoulder ring mounting groove 101. When assembling the shoulder ring 2 and the loop 1, the shoulder ring 2 is pressed into the shoulder ring mounting groove 101 from the bottom of the loop 1, so that the shoulder ring 2 is coaxially embedded in the inner side of the loop 1. This assembly process does not require welding and fixing. The shoulder ring 2 can be installed and fixed on the inner side of the loop 1 by mechanical pressing to form a complete mounting flange structure. The assembly is simple and the assembly accuracy is high.

[0054] The structural design of the loop 1 and the shoulder ring 2 makes the assembly process simpler, can provide a positioning guide for the installation of the shoulder ring 2, and improve the assembly accuracy of the shoulder ring 2 and the loop 1. The shoulder ring mounting groove 101 set on the loop 1 and the boss cylindrical structure of the shoulder ring 2 make it possible to quickly achieve coaxial alignment of the shoulder ring 2 and the loop 1 through mechanical limiting when the two are assembled, reducing the time for manual centering and debugging. The assembler can complete the installation without complicated debugging, and the assembly efficiency is higher.

[0055] In one embodiment, combined Figure 5 and Figure 6 As shown, the sealing unit 3 includes an insulating sleeve and a fixed flange 301. The insulating sleeve is installed inside the mounting flange. The fixed flange 301 is sleeved on the upper part of the insulating sleeve and is detachably connected to the mounting flange. The electrode 4 passes through the insulating sleeve; sealing rings are provided between the insulating sleeve and the mounting flange and the fixed flange 301. Specifically: In one embodiment, Figure 6 As shown, the insulating sleeve includes an upper insulating sleeve 304, a middle insulating sleeve 303 and a lower insulating sleeve 302. Coaxial through holes are provided on the upper insulating sleeve 304, the middle insulating sleeve 303 and the lower insulating sleeve 302, and the electrode 4 passes through the upper insulating sleeve 304, the middle insulating sleeve 303 and the lower insulating sleeve 302 in sequence.

[0056] Combine Figure 7 As shown, a sleeve mounting groove 201 is provided on the shoulder ring 2, and the lower insulating sleeve 302 is embedded in the sleeve mounting groove 201. The middle insulating sleeve 303 and the upper insulating sleeve 304 are both located on the inner side of the fixed flange 301, and the middle insulating sleeve 303 is located between the upper insulating sleeve 304 and the lower insulating sleeve 302; the fixed flange 301 presses the insulating sleeve downward and is connected to the shoulder ring 2. In this embodiment, the fixed flange 301 has an integrally formed cylindrical structure and a flat plate structure. The middle insulating sleeve 303 and the upper insulating sleeve 304 are both located inside the cylindrical structure of the fixed flange 301, as shown in FIG. Figure 6 As shown, the flat plate structure of the fixed flange 301 is provided with a plurality of circumferentially distributed fixed flange holes 308, combined with Figure 4As shown, the shoulder ring 2 is provided with a plurality of circumferentially distributed shoulder ring flange holes 203, and the plurality of shoulder ring flange holes 203 are located outside the shoulder ring mounting groove 101. The fixing flange holes 308 on the fixing flange 301 are aligned with the shoulder ring flange holes 203 on the shoulder ring 2 and then fixed by bolts, thereby realizing a detachable connection between the sealing unit 3 and the mounting flange, which is convenient for later disassembly and replacement; Sealing rings are provided between the lower insulating sleeve 302 and the sleeve mounting groove 201, between the lower insulating sleeve 302 and the middle insulating sleeve 303, and between the middle insulating sleeve 303 and the upper insulating sleeve 304, and are respectively a lower sealing ring 305, a middle sealing ring 306 and an upper sealing ring 307, and the upper sealing ring 307, the middle sealing ring 306 and the lower sealing ring 305 are all O-rings.

[0057] The lower insulating sleeve 302 and the shoulder ring 2 of the mounting flange are sealed by the lower sealing ring 305, the electrode 4 and the lower insulating sleeve 302 are insulated and sealed by the middle sealing ring 306, the upper insulating sleeve 304 and the fixed flange 301 are insulated and sealed by the upper sealing ring 307, and the fixed flange 301 and the shoulder ring 2 of the mounting flange are detachably connected by bolts.

[0058] Adding a middle sealing ring 306 and a middle insulating sleeve 303 between the lower insulating sleeve 302 and the upper sealing ring 307 can further improve the sealing reliability and installation flexibility of the structure.

[0059] In one embodiment, Figure 7 As shown, the sleeve mounting groove 201 is a stepped groove and has a one-level stepped structure, that is, there is only one step, so that the sleeve mounting groove 201 has a large diameter section and a small diameter section, and the shape of the lower insulating sleeve 302 matches the shape of the sleeve mounting groove 201, so that the lower insulating sleeve can be inserted into the sleeve mounting groove 201 and adapt to the sleeve mounting groove 201.

[0060] In one embodiment, Figure 6 and Figure 7 As shown, a sealing ring installation groove 202 is opened at the transition between the large diameter section and the small diameter section of the sleeve installation groove 201, and a lower sealing ring 305 is embedded in the sealing ring installation groove 202, which can improve the sealing between the sleeve installation groove 201 and the lower insulating sleeve 302.

[0061] In one embodiment, combined Figure 6As shown, a socket is provided at the top of the fixed flange 301, and the upper insulating sleeve 304 is a cylindrical boss with a boss provided on the top. The boss at the top of the upper insulating sleeve 304 extends through the socket, so that the portion of the electrode 4 located outside the fixed flange 301 can be supported and insulated by the upper insulating sleeve 304, which can further improve the insulation seal. In addition, after the boss at the top of the upper insulating sleeve 304 extends through the socket of the fixed flange 301, a mechanical stop structure is formed, which can limit the upward displacement of the upper insulating sleeve 304, the middle insulating sleeve 303, and the lower insulating sleeve 302. Even if vibration or impact loads occur during equipment operation, the combination of the boss and the socket can prevent the entire insulating sleeve assembly from detaching from the fixed flange, avoiding the risk of electrode short circuit or gas leakage caused by loosening of the insulating sleeve.

[0062] The lower portion of the lower insulating sleeve 302 also extends out of the sleeve mounting groove 201 , thereby further improving support and insulation for the electrode 4 , facilitating improved insulation, and facilitating operations such as connection with other equipment in the vacuum chamber.

[0063] In one embodiment, the upper insulating sleeve 304 , the middle insulating sleeve 303 and the lower insulating sleeve 302 are all made of polytetrafluoroethylene.

[0064] The penetration structure of the vacuum water-cooled electrode 4 of the present invention is simple, and the entire penetration sealing structure is compact and easy to install. The sealing member used is an O-ring, and the insulating material is polytetrafluoroethylene, which is low in cost.

[0065] In addition, the present invention adopts three-level sealing, namely the upper insulating sleeve 304, the middle insulating sleeve 303 and the lower insulating sleeve 302 and the upper sealing ring 307, the middle sealing ring 306 and the lower sealing ring 305, which form a three-level sealing structure with good sealing performance and a safe and reliable structure.

[0066] Finally, the electrode 4 of the present invention is easy and flexible to replace. For electrodes 4 of different sizes, only insulating sleeves and sealing rings of matching sizes need to be selected for quick replacement without replacing the mounting flange and the fixing flange 301.

[0067] It should be noted that the above description of the disclosed embodiments is intended to enable one skilled in the art to implement or use the present application. Various modifications to these embodiments will be readily apparent to one skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the scope of the present application. Therefore, the present application is not limited to the embodiments shown herein, but is intended to conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A vacuum penetration sealing structure for a water-cooled electrode, characterized in that: include: a mounting flange connected to the vacuum chamber; The sealing unit includes an insulating sleeve and a fixed flange. The insulating sleeve is installed inside the mounting flange. The fixed flange is sleeved on the upper part of the insulating sleeve and is detachably connected to the mounting flange. The electrode passes through the insulating sleeve. A sealing ring is provided between the insulating sleeve and the mounting flange and the fixed flange.

2. The vacuum penetration sealing structure of a water-cooled electrode according to claim 1, characterized in that: The mounting flange includes a loop and a shoulder ring, the loop is annular, and the loop is provided with a plurality of loop flange holes along its circumferential direction; The shoulder ring is cylindrical, is located inside the loop and is coaxially embedded with the loop, and the sealing unit is mounted on the shoulder ring.

3. The vacuum penetration sealing structure of a water-cooled electrode according to claim 2, characterized in that: The shoulder ring and the loop are coaxially pressed and fixed.

4. The vacuum penetration sealing structure of a water-cooled electrode according to claim 3, characterized in that: A shoulder ring mounting groove is provided on the inner side of the loop and along its bottom. The top of the shoulder ring mounting groove does not penetrate the top surface of the loop. The shoulder ring is a boss cylinder with a boss on the top. The shoulder ring is coaxially embedded in the shoulder ring mounting groove.

5. A vacuum penetration sealing structure for a water-cooled electrode according to any one of claims 2 to 4, characterized in that: The insulating sleeve comprises an upper insulating sleeve, a middle insulating sleeve and a lower insulating sleeve, and the electrode passes through the upper insulating sleeve, the middle insulating sleeve and the lower insulating sleeve in sequence; The shoulder ring is provided with a sleeve mounting groove, the lower insulating sleeve is embedded in the sleeve mounting groove, the middle insulating sleeve and the upper insulating sleeve are both located on the inner side of the fixed flange, and the middle insulating sleeve is located between the upper insulating sleeve and the lower insulating sleeve; the fixed flange presses the insulating sleeve downward and is connected to the shoulder ring; The sealing rings are arranged between the lower insulating sleeve and the sleeve installation groove, between the lower insulating sleeve and the middle insulating sleeve, and between the middle insulating sleeve and the upper insulating sleeve.

6. The vacuum penetration sealing structure of a water-cooled electrode according to claim 5, characterized in that: The sleeve installation groove is a stepped groove, and the shape of the lower insulating sleeve matches the shape of the sleeve installation groove.

7. The vacuum penetration sealing structure of a water-cooled electrode according to claim 6, characterized in that: A sealing ring installation groove is provided at a transition between the large diameter section and the small diameter section of the sleeve installation groove, and a sealing ring is embedded in the sealing ring installation groove.

8. The vacuum penetration sealing structure of a water-cooled electrode according to claim 5, characterized in that: The top of the fixing flange is provided with an insertion hole, and the upper insulating sleeve is a boss cylinder with a boss on the top, and the boss on the top of the upper insulating sleeve passes through the insertion hole.

9. The vacuum penetration sealing structure of a water-cooled electrode according to claim 1, characterized in that: The sealing ring is an O-type sealing ring.

10. The vacuum penetration sealing structure of a water-cooled electrode according to claim 1, characterized in that: There are two sets of electrodes and the sealing unit.

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