Slicing device for silicon wafer separation and working method thereof

Abstract

The invention belongs to the technical field of photovoltaics, and discloses a wafer separating device for separating silicon wafers and a working method of the wafer separating device. Comprising a material receiving and conveying mechanism, a material distributing and conveying mechanism, a material support overturning mechanism, a silicon wafer side clamping and centering mechanism and a wafer separating side clamping and centering mechanism which are arranged in sequence, a wafer separating mechanism is further arranged on the silicon wafer side clamp centering mechanism and comprises a wafer separating driving assembly and a water spraying assembly B. The wafer separating driving assembly is arranged above the water spraying assembly B. The wafer separating driving assembly is arranged on a fixed bottom plate B. The wafer separating driving assembly comprises an air cylinder, and the front end of an air cylinder rod of the air cylinder is connected with an air cylinder connecting plate through an air cylinder connecting piece. The two ends of the bottom face of the air cylinder connecting plate are each connected with a guide shaft, the bottoms of the guide shafts extend out of the fixed bottom plate B, vertical rods are arranged on the inner sides of the bottoms of the two guide shafts, and a slicing line is arranged between the two vertical rods. Water spraying blocks A are arranged on the bottom surface of the fixed bottom plate B; the silicon wafer can be stably separated, the separation efficiency is high, and the separation is stable and accurate.

Description

Technical Field

[0001] The present invention belongs to the technical field of photovoltaics, and relates to a slicing device for separating silicon wafers and a working method thereof. Background Art

[0002] In the photovoltaic industry, stable separation of silicon wafers after debonding and removal is crucial for ensuring wafer quality and production efficiency. Current technologies have numerous shortcomings in achieving stable wafer separation. Currently, wafer separation faces numerous challenges. Traditional wafer separation processes often require significant manpower and time, increasing production costs and leading to inconsistent quality. For example, manual separation, due to the thin and brittle nature of silicon wafers (only 0.1-0.2mm thick), can easily lead to wafer breakage and high fragmentation rates. Furthermore, precise quality control during production is difficult. With rising labor costs, this method's cost disadvantages are becoming increasingly apparent. Furthermore, its high labor intensity makes it unsuitable for long-term, stable production. Furthermore, these operating conditions require frequent work cycles, preventing continuous operation of the entire production line. Mechanical separation, due to the typically 0.1-0.2mm thick, brittle nature, and delicate surface of silicon wafers, can easily lead to cracks, breakage, or even outright shattering due to uneven pressure or misaligned clamping positions. This not only wastes raw materials but often results in the inability to separate the silicon wafers. Production lines are also suspended for maintenance. Separation accuracy is also a major drawback of existing technologies. Silicon wafers may be tightly adhered to each other, making stable separation difficult with existing technology, resulting in incomplete separation. Summary of the Invention

[0003] The purpose of the present invention is to overcome the shortcomings of the above-mentioned background technology and provide a slicing device for separating silicon wafers and a working method thereof, which can stably separate silicon wafers with high separation efficiency, stable and accurate separation, less waste, stable circulation, greatly shortening the working cycle, and low cost.

[0004] The technical solution adopted by the present invention to solve its technical problem is: a slicing device for silicon wafer separation, comprising a material receiving and conveying mechanism and a material distributing and conveying mechanism arranged in sequence; the material receiving and conveying mechanism and the material distributing and conveying mechanism are arranged at the bottom, and the slicing device further comprises a silicon wafer side clamping and centering mechanism and a slicing side clamping and centering mechanism arranged in sequence at the upper portion; the material receiving and conveying mechanism and the material distributing and conveying mechanism are arranged crosswise, the silicon wafer side clamping and centering mechanism and the slicing side clamping and centering mechanism are arranged crosswise, a slicing mechanism is further arranged on the silicon wafer side clamping and centering mechanism, and the slicing mechanism is arranged on a side adjacent to the slicing side clamping and centering mechanism;

[0005] The slicing mechanism includes a slicing drive component and a water spray component B. The slicing drive component is arranged above the water spray component B and on the fixed base plate B. The slicing drive component includes a cylinder. The front end of the cylinder rod of the cylinder is connected to the cylinder connecting plate through a cylinder connecting piece. A guide shaft is connected to each end of the bottom surface of the cylinder connecting plate. The bottom of the guide shaft extends out of the fixed base plate B. A vertical pole is arranged on the inner side of the bottom of the two guide shafts, and a slicing component is arranged between the two vertical poles; a water spray block A is arranged on the bottom surface of the fixed base plate B.

[0006] The cylinder is fixed on the fixed base plate B through a fixed connecting plate. A mounting seat is provided on the fixed base plate B, and a cylinder limiting nail is provided on the mounting seat. The cylinder limiting nail is provided below the cylinder connecting plate.

[0007] The water spray block A is provided with a plurality of nozzles, which are equidistantly arranged and are commercially available products. The water spray block A is connected to a water inlet pipe via a quick connector, and a water pump is provided on the water inlet pipe.

[0008] The splitting element is a part that realizes the splitting action. The form of the part that realizes the splitting action is not particularly limited, as long as it can realize its working function. The splitting element preferably includes but is not limited to a splitting line or a splitting plate. The splitting line is preferably a fishing line. The splitting plate is preferably a plastic plate, a soft plate, or a metal plate. Preferably, two splitting elements are provided.

[0009] A linear bearing is provided at the connection between the guide shaft and the fixed base plate B.

[0010] The water spray assembly B includes two water spray groups arranged opposite to each other, and the water spray group includes a water spray support. The bottom of the water spray support is set on the box body, and a water spray block B is set on the upper part of the water spray support. The water spray block B is set at an angle, and a long water spray nozzle is set on the top surface of the water spray block B. The water spray nozzle is set inward. The water spray block B is connected to the water inlet pipe through a quick connector, and a water pump is set on the water inlet pipe.

[0011] An adjustment slot is provided on the upper part of the water spray support. The water spray block B is arranged on the water spray support through bolts and the adjustment slot, and the position of the water spray block B is adjusted through the adjustment slot and the bolts.

[0012] The distance between the two water spray groups is greater than the inner side distance between the two synchronous belts B. The heights of the two water spray groups are lower than the height of the synchronous belt B.

[0013] The conveying driven wheel B at the end of the material receiving conveying mechanism and the driven wheel C at the front end of the material dividing conveying mechanism are cross-arranged and their centers coincide. The side clamp conveying driving wheel at the front end of the cross-arranged side clamp centering mechanism and the driven wheel A at the end of the silicon wafer side clamp centering mechanism are cross-arranged up and down and their centers coincide. The conveying driven wheel B, driven wheel C, side clamp conveying driving wheel and driven wheel A fall on the same vertical line in the center.

[0014] The silicon wafer side clamping and centering mechanism is used to realize centering and clamping of the workpiece. The existing robot arm keeps the silicon wafer posture stable when extracting the debonding frame from the silicon wafer. At the same time, the workpiece silicon wafer keeps the posture stable and not deflected during the forward conveyance process.

[0015] The material receiving and conveying mechanism is used to receive the workpiece and then transfer it to the material distributing and conveying mechanism.

[0016] The slicing mechanism is used to stably separate the silicon wafers to be retrieved from the remaining silicon wafers.

[0017] The side clamp centering mechanism of the wafer separation is used to keep the separated silicon wafers in a stable and non-deflected posture during the forward conveyance until they are conveyed to the next process.

[0018] The material separation and conveying mechanism is used to convey the separated silicon wafers to the next process.

[0019] The workpieces are several silicon wafers.

[0020] The degumming rack can be an existing public degumming rack or a commercially available degumming rack. The degumming rack in the patent CN222705494U can also be implemented.

[0021] The silicon wafer side clamp centering mechanism includes a side clamp centering transmission group A and a side clamp centering transmission group B arranged opposite to each other. The bottoms of the side clamp centering transmission group A and the side clamp centering transmission group B are connected by a synchronous belt B. The side clamp centering transmission group A and the side clamp centering transmission group B are fixed on the top surface of the box;

[0022] The side clamp centering transmission group A includes a fixed base plate A, on which a centering component for centering the workpiece and a side clamping component A for side clamping the workpiece are arranged. The centering component is connected to the side clamping component A through a support frame to drive the side clamping component A to move left and right; two side clamping components A are provided, each side clamping component A includes a clamping and conveying motor, the output end of the clamping and conveying motor is connected to the driving active wheel through a transmission rod A, the driving active wheel is connected to the driven wheel A through a synchronous belt B, a cross plate is provided between the driving active wheel and the driven wheel A, the top of the support frame is connected to the synchronous belt transmission block of the centering component, the clamping and conveying motor is connected to the upper part of the support frame through the motor connecting plate, and the top of the support frame is connected to the cross plate through the support A;

[0023] The side clamp centering transmission group B includes a fixed base plate B, on which a centering component for centering the workpiece and a side clamp component B for side clamping the workpiece are arranged. The centering component is connected to the side clamp component B through a support frame to drive the side clamp component B to move left and right; two side clamp components B are provided, each side clamp component B includes a support C, the top of the support frame is connected to the synchronous belt drive block of the centering component, and the top of the support frame is connected to the cross plate through the support A.

[0024] The centering assembly provided on the side clamp centering transmission group A has the same structure as the centering assembly provided on the side clamp centering transmission group B. The centering assembly provided on the side clamp centering transmission group A is described below.

[0025] The centering component arranged on the side clamp centering transmission group A includes a side clamp drive motor A, which is arranged at one end of the fixed base plate A, and a side clamp driven wheel is arranged at the other end of the fixed base plate A. The output end of the side clamp drive motor A is connected to the side clamp driving wheel, and the side clamp driving wheel and the side clamp driven wheel are connected through a synchronous belt A, and the synchronous belt A is connected to the support frame through a synchronous belt drive block.

[0026] The support frame is slidably connected to the fixed base plate A through a guide assembly. The guide assembly includes a linear guide rail C and a slider. The linear guide rail C is arranged on the fixed base plate A, and the slider is arranged on the bottom surface of the support frame. The linear guide rail C is slidably connected to the slider.

[0027] Two linear guide rails C are preferably provided.

[0028] A limit seat A is provided at the center of the fixed base plate A and adjacent to both ends of the linear guide rail C. A buffer block is provided on the limit seat A for limit buffer protection.

[0029] The upper synchronous belt A is connected to the support frame after being inserted through the synchronous belt transmission block A. The lower synchronous belt A is connected to another support frame after being inserted through the synchronous belt transmission block B. A rack A is provided on the outside of the synchronous belt A. A rack B is provided at the connection between the inner side of the synchronous belt transmission block A and the synchronous belt transmission block B and the synchronous belt A. The rack A and the rack B are meshed and connected.

[0030] Metal pads A and nylon limit plates A are also provided on both sides of the transverse plate to prevent the synchronous belt B from shifting and to support the synchronous belt B; the nylon limit plate A is provided on the outside.

[0031] The side clamp driving motor A is fixed on the fixed base plate A through the side clamp driving wheel bracket. The side clamp driven wheel is arranged on the fixed base plate A through the side clamp driven wheel bracket.

[0032] Side clamp centering transmission group A and side clamp centering transmission group B. Side clamp centering transmission group A is arranged at one end of the top surface of the box body, and is arranged on the top surface of the box body through the fixed bottom plate A. Side clamp centering transmission group B is arranged at one end adjacent to the slice side clamp centering mechanism, and is arranged on the top surface of the box body through the fixed bottom plate B.

[0033] The synchronous belt B is preferably a sponge belt.

[0034] The top ends of the two side clamp assemblies A are located on the same horizontal plane. The bottom ends of the two side clamp assemblies A are located on the same horizontal plane.

[0035] The clamping and conveying motor is connected to the transmission rod A in sequence through the reducer A and the coupling.

[0036] The driven wheel A is connected to the transverse plate through the driven wheel A fixing plate, and a through hole is provided on the transverse plate. The driving active wheel is connected to the transverse plate through the adjusting block A. An adjusting block is provided adjacent to the adjusting block A. The adjusting block is fixed on the transverse plate. Bolts are provided on the adjusting block. The tension of the synchronous belt B is adjusted by adjusting the adjusting block A by adjusting the position of the bolts.

[0037] The material receiving and conveying mechanism includes a conveyor belt A, a conveyor belt B, and a conveyor motor A; two conveyor belts B are provided, which are located at both ends of the end of the conveyor belt A, and the end of the conveyor belt A is arranged between the two conveyor belts B to form a cross arrangement. The output end of the conveyor motor A is connected to the synchronous driving wheel, and the synchronous driving wheel is respectively connected to two synchronous driven wheels through a synchronous belt C. The two synchronous driven wheels are respectively connected to the conveying wheel of the conveyor belt A and the conveying driving wheel of the conveyor belt B through a transmission shaft to realize conveying the workpiece.

[0038] Of the two synchronous driven wheels, one is connected to the conveying driving wheel of the conveying belt B through the transmission shaft A, and the other is connected to the conveying wheel of the conveying belt A through the transmission shaft B.

[0039] The transmission shaft A is connected to the conveying driving wheel of the conveyor belt B on the adjacent side, and the conveying wheel is connected to the conveying driving wheel of the other conveyor belt B through the transmission shaft C.

[0040] The conveying wheel of the conveying belt A is connected to the conveying driven wheel A through the conveying belt A, and a fixed frame plate is set between the conveying wheel and the conveying driven wheel A. The conveying wheel and the conveying driven wheel A are respectively connected to the conveying wheel fixing plate and the driven wheel fixing plate and the fixed frame plate, and a through hole is set on the fixed frame plate. After the transmission shaft C passes through the through hole, the two ends are respectively connected to the conveying driving wheel of the conveying belt B and the conveying driving wheel of another conveying belt B.

[0041] The driving pulley of each conveyor belt B is connected to the driven pulley B via the conveyor belt B. A fixed frame plate is provided between the driving pulley and the driven pulley B. The driving pulley and the driven pulley B are connected to the fixed frame plate via the conveyor pulley fixing plate and the driven pulley fixing plate, respectively. The fixed frame plate is provided with a tensioning block B for tensioning the conveyor belt B. Bolts are provided on the tensioning block B, and the tension of the conveyor belt B can be adjusted by adjusting the position of the bolts.

[0042] Preferably, a tensioning pulley A is further provided on the synchronous belt C connecting the synchronous driving wheel and the synchronous driven wheel. The tensioning pulley A is fixed to the box body via a tensioning bracket, and a tensioning block A for adjusting the tension is further provided on the tensioning pulley A. The tensioning block A is provided on the tensioning bracket, and the position of the tensioning block A on the tensioning bracket is preferably adjusted by bolts to adjust the position of the tensioning pulley A, thereby adjusting the tension of the synchronous belt C.

[0043] The conveying motor A is fixed on the top surface of the side of the box body, and is fixed by a conveying motor A fixing bracket.

[0044] A speed reducer B is further provided between the conveying motor A and the synchronous driving wheel.

[0045] The length of conveyor belt B is smaller than that of conveyor belt A. The width of conveyor belt B is smaller than that of conveyor belt A.

[0046] Conveyor belt A is connected to the fixed frame via a fixed frame plate and fixed connecting blocks, and is installed on the bottom surface of the box through the fixed frame and fixed base. Conveyor belt B is connected to the fixed frame via a fixed frame plate and fixed connecting blocks, and is installed on the bottom surface of the box through the fixed frame and fixed base. The distance between the two conveyor belts B is less than the width of the workpiece.

[0047] Conveyor belt A and conveyor belt B are both PU smooth surface synchronous belts.

[0048] The slice driving assembly of the slice mechanism is arranged on the fixed bottom plate B on the side clamp centering transmission group B. The water spraying assembly B of the slice mechanism is arranged on the bottom surface of the box body.

[0049] The slice side clamp centering mechanism includes a fixed base plate C, on which a centering drive assembly for centering the workpiece and a side clamp conveying assembly for side clamping the workpiece are arranged. The centering drive assembly is connected to the side clamp conveying assembly through a support frame to drive the side clamp conveying assembly to move left and right; two side clamp conveying assemblies are arranged, each side clamp conveying assembly includes a conveying motor B, the output end of the conveying motor B is connected to the side clamp conveying active wheel through a transmission rod B, the side clamp conveying active wheel is connected to the side clamp conveying driven wheel through a side clamp conveying belt, a fixed frame plate is arranged between the side clamp conveying active wheel and the side clamp conveying driven wheel, the top of the support frame is connected to the synchronous belt drive block of the centering drive assembly, the conveying motor B is connected to the upper part of the support frame through the motor connecting plate, and the bottom of the support frame is connected to the fixed frame plate through a vertical rod.

[0050] The side clamp conveyor driven wheel is connected to the fixed frame plate through the side clamp conveyor driven wheel fixing plate, and a through hole is set on the fixed frame plate. The side clamp conveyor active wheel is connected to the fixed frame plate through the adjustment block B. A bolt adjustment block is set adjacent to the adjustment block B. The bolt adjustment block is fixed on the fixed frame plate. An adjusting bolt is set on the bolt adjustment block. The tension of the side clamp conveyor belt is adjusted by adjusting the adjustment block B by adjusting the position of the adjusting bolt.

[0051] The top ends of the two side clamp conveying assemblies are located on the same horizontal plane. The bottom ends of the two side clamp conveying assemblies are located on the same horizontal plane.

[0052] The centering drive assembly includes a slice side clamp drive motor, which is arranged at one end of the fixed base plate C, and a slice side clamp driven wheel is arranged at the other end of the fixed base plate C. The output end of the slice side clamp drive motor is connected to the slice side clamp active wheel, and the slice side clamp active wheel and the slice side clamp driven wheel are connected through a synchronous belt E, and the synchronous belt E is connected to the side clamp conveying assembly through a synchronous belt transmission block and a support frame respectively.

[0053] The support frame is slidably connected to the fixed base plate C through a guide assembly. The guide assembly includes a linear guide rail B and a slider. The linear guide rail B is arranged on the fixed base plate C, and the slider is arranged on the bottom surface of the support frame. The linear guide rail B is slidably connected to the slider.

[0054] Two linear guide rails B are preferably provided.

[0055] A limit seat C is provided at the center of the fixed base plate C and adjacent to both ends of the linear guide rail B, and a buffer block is provided on the limit seat C for limit buffer protection.

[0056] The upper synchronous belt E is connected to the support frame B after being inserted through the synchronous belt transmission block D. The lower synchronous belt E is connected to the support frame A after being inserted through the synchronous belt transmission block E. A rack A is provided on the outside of the synchronous belt E. A rack B is provided at the connection between the inner side of the synchronous belt transmission block D and the synchronous belt transmission block E and the synchronous belt E. The rack A and the rack B are meshed and connected.

[0057] The side-clamping conveyor belt is preferably a sponge belt.

[0058] A metal pad C and a nylon limit plate C are also provided on the side of the fixed frame plate to prevent the side clamp conveyor belt from shifting and to support the side clamp conveyor belt; the nylon limit plate C is provided on the outside.

[0059] The slice side clamp driving motor is fixed on the fixed base plate C through the slice side clamp driving motor fixing seat. The slice side clamp driven wheel is arranged on the fixed base plate C through the slice side clamp driven wheel bracket.

[0060] The slice side clamp centering mechanism is fixed to the top surface of the box body through the fixed bottom plate C.

[0061] The material distribution and conveying mechanism includes a synchronous belt F, a driving synchronous belt, and a material distribution and conveying motor; the output end of the material distribution and conveying motor is connected to the material distribution and conveying active wheel, the material distribution and conveying active wheel is connected to the driven wheel B through the synchronous belt F, the driven wheel B is connected to the belt driving wheel through the transmission shaft D, and the belt driving wheel is connected to the two driven wheels C respectively through the driving synchronous belt to realize the movement of the driving synchronous belt.

[0062] The transmission shaft D is fixed to the bottom surface of the box body through the support B. Two bearings are set on the transmission shaft D, and the two bearings are connected to the support B respectively.

[0063] A mounting plate is set between the two driven wheels C. One driven wheel C is connected to the mounting plate through the driven wheel B fixing plate, and a through hole is set on the mounting plate. The other driven wheel C is connected to the mounting plate through the driven wheel C adjustment plate. A tensioning block D is set adjacent to the driven wheel C adjustment plate. The tensioning block D is fixed on the mounting plate. Bolts are set on the tensioning block D. The tension of the drive synchronous belt can be adjusted by adjusting the position of the bolts.

[0064] A tensioning wheel B is also provided on the driving synchronous belt. The tensioning wheel B is provided below the mounting plate. The tensioning wheel B is movably connected to the mounting plate through bolts and a tensioning wheel fixing plate.

[0065] The driving synchronous belt is connected to the fixing frame through the mounting plate and the fixing connection block, and is arranged on the bottom surface of the box body through the fixing frame and the fixing base.

[0066] A speed reducer C is also installed between the feed conveyor motor and the feed conveyor driving wheel. The feed conveyor motor is fixed to the top side of the box via a motor mounting plate. A tensioning block C for tensioning the synchronous belt F is installed on the side of the motor mounting plate. The tensioning block C is fixed to the top side of the box. Two bolts are installed horizontally on the tensioning block C. The tension of the synchronous belt F can be adjusted by moving the two bolts back and forth.

[0067] The driving synchronous belt is a PU smooth synchronous belt.

[0068] Metal pads B and nylon limit plates B are also provided on the upper and lower top surfaces of the mounting plate to prevent the drive timing belt from shifting and to support the drive timing belt; the nylon limit plate B is provided on the outside.

[0069] Compared with the prior art, the present invention has the following beneficial effects:

[0070] The slicing device for separating silicon wafers provided by the present invention replaces manual slicing and can stably separate silicon wafers. It has high separation efficiency, stable and accurate separation, low waste, stable circulation, greatly shortened work cycle, and low cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0071] The present invention will be further described below with reference to the accompanying drawings and embodiments:

[0072] Figure 1 This is a front view of a slicing device for separating silicon wafers according to the present invention.

[0073] Figure 2 It is a three-dimensional diagram of a slicing device for separating silicon wafers according to the present invention.

[0074] Figure 3 This is a state diagram of a slicing device for separating silicon wafers according to the present invention being arranged in a box.

[0075] Figure 4The present invention is a front view of a wafer separation device for separating silicon wafers with the wafer side clamping and centering mechanism removed.

[0076] Figure 5 It is a schematic diagram of the silicon wafer side clamp centering mechanism and the wafer separation mechanism of the present invention installed on the box.

[0077] Figure 6 It is a top view of the silicon wafer side clamp centering mechanism and the wafer separation mechanism of the present invention.

[0078] Figure 7 It is a front view of the silicon wafer side clamp centering mechanism and the wafer separation mechanism of the present invention.

[0079] Figure 8 3D view A of the silicon wafer side clamp centering mechanism and the wafer separation mechanism of the present invention.

[0080] Figure 9 It is a side view of the silicon wafer side clamp centering mechanism and the wafer separation mechanism of the present invention.

[0081] Figure 10 It is a three-dimensional diagram of the slice mechanism of the present invention.

[0082] Figure 11 It is a rear view of the slice mechanism of the present invention.

[0083] Figure 12 It is a schematic diagram of the water spray assembly at the bottom of the slicing mechanism of the present invention.

[0084] Figure 13 It is a three-dimensional diagram of the silicon wafer side clamp centering mechanism and the wafer separation mechanism of the present invention.

[0085] Figure 14 It is a schematic diagram of the material receiving and conveying mechanism of the present invention installed on the box body.

[0086] Figure 15 It is a top view of the material receiving and conveying mechanism of the present invention.

[0087] Figure 16 It is a front view of the material receiving and conveying mechanism of the present invention.

[0088] Figure 17 It is a three-dimensional diagram A of the material receiving and conveying mechanism of the present invention.

[0089] Figure 18 It is a three-dimensional diagram B of the material receiving and conveying mechanism of the present invention.

[0090] Figure 19 It is a three-dimensional diagram of the slice side clamp centering mechanism of the present invention.

[0091] Figure 20 It is a top view of the slice side clamp centering mechanism of the present invention.

[0092] Figure 21It is a side view of the slice side clamp centering mechanism of the present invention.

[0093] Figure 22 It is a schematic diagram of the material distribution and conveying mechanism of the present invention installed on the box body.

[0094] Figure 23 It is a three-dimensional diagram A of the material distribution and conveying mechanism of the present invention.

[0095] Figure 24 It is a three-dimensional diagram B of the material distribution and conveying mechanism of the present invention.

[0096] In the figure, 1. Box, 2. Silicon wafer side clamp centering mechanism, 3. Material receiving and conveying mechanism, 4. Slicing mechanism, 5. Slicing side clamp centering mechanism, 6. Material dividing and conveying mechanism, 7. Workpiece, 8. Degumming rack, 201. Fixed base plate A, 202. Side clamp drive motor A, 203. Synchronous belt A, 204. Synchronous belt transmission block A, 205. Synchronous belt B, 206. Cross plate, 207. Limit seat A, 208. Clamping and conveying motor, 209. Support A, 210. Transmission rod A, 211. Driving active pulley, 212. Coupling, 213. Metal pad A, 214. Nylon limit plate A, 215. Side clamp driven pulley, 216. Side clamp driving pulley, 217. Synchronous belt transmission block B, 218. Reducer A, 219. Side clamp driven pulley Wheel bracket, 220. Side clamp driving wheel bracket, 221. Adjustment block A, 222. Adjustment block, 301. Conveyor belt A, 302. Conveyor motor A, 303. Conveyor belt B, 304. Drive shaft A, 305. Drive shaft B, 306. Fixed bracket, 307. Reducer B, 308. Tensioning block A, 309. Tensioning pulley A, 310. Synchronous belt C, 311. Drive shaft C, 312. Conveyor driven pulley A, 313. Conveyor driving pulley, 314. Tensioning block B, 315. Driven pulley fixing plate, 316. Conveyor driven pulley B, 401. Slicing drive assembly, 402. Water spray assembly B, 403. Fixed base plate B, 404. Side clamp drive motor B, 405. Synchronous belt D, 406. Synchronous belt drive block C, 407. Limit seat B, 408. Driven pulley A, 409. Limit buffer block A, 410. Linear guide rail A, 501. Fixed base plate C, 502. Slicer side clamp drive motor, 503. Synchronous belt E, 504. Slicer side clamp active pulley, 505. Slicer side clamp driven pulley, 506. Synchronous belt drive block D, 507. Support frame A, 508. Support frame B, 509. Conveyor motor B, 510. Drive rod B, 511. Side clamp conveyor active pulley, 512. Side clamp conveyor belt, 513. Adjustment block B, 514. Adjustment bolt, 515. Side clamp conveyor driven pulley, 516. Limit seat C, 517. Vertical rod, 601. Slicer conveyor motor, 602. Synchronous belt F, 603. Drive shaft D, 604. Drive synchronous Step belt, 605. Reducer C, 606. Motor mounting plate, 607. Material distribution conveyor driving pulley, 608. Tensioning block C, 609. Driven pulley B, 610. Support B, 611. Tensioning pulley B, 612. Driven pulley C, 613. Driven pulley C fixing plate, 614. Mounting plate, 615. Metal backing plate B, 616. Nylon limit plate B, 617. Tensioning block D, 818. Belt drive pulley, 40101. Cylinder, 40102. Guide shaft, 40103. Vertical rod, 40104. Splitting member, 40105. Cylinder connecting plate, 40106. Fixed connecting plate, 40107. Spray block A, 40108. Mounting seat, 40109. Linear bearing, 40110. Cylinder limit pin, 40201.Water spray support, 40202. Water spray block B, 40203. Adjustment groove, 40204. Water spray nozzle. DETAILED DESCRIPTION

[0097] The present invention will be further described below with reference to the accompanying drawings, but the present invention is not limited to the following embodiments.

[0098] The working method of the slicing device for silicon wafer separation of the present invention:

[0099] S1. Place the degumming frame or workpiece onto the material conveying mechanism manually or automatically;

[0100] S2. The existing debonding frame is separated so that the workpiece silicon wafer is placed on the material conveying mechanism;

[0101] S3. The wafer side clamping mechanism clamps the workpiece in the center;

[0102] S4. The conveyor belt A of the receiving material conveyor mechanism, the conveyor belt of the wafer side clamp centering mechanism, and the synchronous belt B simultaneously convey the workpiece silicon wafer forward, and the workpiece silicon wafer to be separated is transported to the material separation conveyor mechanism and the wafer side clamp centering mechanism. The material separation conveyor mechanism assists the wafer side clamp centering mechanism to clamp the workpiece silicon wafer;

[0103] S5. The slicing mechanism begins slicing the workpiece silicon wafers. The bottom water spray assembly B and the upper water spray block in the slicing mechanism are turned on, and water at the set pressure of the water pump is sprayed on the silicon wafers. The silicon wafers are separated under the water pressure at the spraying point. At the same time, the upper cylinder drives the slicing line or slicing plate to separate the separated silicon wafers, preventing the front and back silicon wafers from sticking together and separating the silicon wafers to be separated from the remaining silicon wafers. The water spraying and the cylinder are synchronized to achieve stable separation of the workpiece silicon wafers.

[0104] S6. The receiving conveying mechanism and the silicon wafer side clamp centering mechanism stop conveying, the separating conveying mechanism and the wafer side clamp centering mechanism convey, the remaining silicon wafers remain stationary, and the separated silicon wafers are conveyed to the next process.

[0105] Example 1

[0106] A slicing device for separating silicon wafers, such as Figure 1-24As shown, it is arranged as a whole in the box body 1 of the water tank, including a material receiving and conveying mechanism 3 and a material dividing and conveying mechanism 6 which are arranged in sequence at the lower part; the material receiving and conveying mechanism 3 and the material dividing and conveying mechanism 6 are arranged at the bottom of the box body 1, and the wafer separation device for wafer separation also includes a wafer side clamp centering mechanism 2 and a wafer side clamp centering mechanism 5 which are arranged in sequence at the upper part of the box body 1; the material receiving and conveying mechanism 3 and the material dividing and conveying mechanism 6 are arranged crosswise, and the conveying driven wheel B316 at the end of the material receiving and conveying mechanism 3 and the driven wheel C612 at the front end of the material dividing and conveying mechanism 6 are arranged crosswise. The wafer side clamp centering mechanism 2 and the slicing side clamp centering mechanism 5 are cross-arranged, and the side clamp conveying active wheel 511 at the front end of the cross-arranged slicing side clamp centering mechanism 5 and the driven wheel A408 at the end of the wafer side clamp centering mechanism 2 are cross-arranged up and down and their centers coincide, and the conveying driven wheel B316, the driven wheel C612, the side clamp conveying active wheel 511, and the driven wheel A408 fall on the same vertical line in the center, and a slicing mechanism 4 is also arranged on the wafer side clamp centering mechanism 2, and the slicing mechanism 4 is arranged on the side adjacent to the slicing side clamp centering mechanism 5.

[0107] The slice driving assembly 401 of the slice mechanism 4 is arranged on the fixed bottom plate B403 on the side clamp centering transmission group B. The water spraying assembly B402 of the slice mechanism 4 is arranged on the bottom surface of the box body 1.

[0108] The slicing mechanism 4 includes a slicing drive component 401 and a water spray component B402. The slicing drive component 401 is arranged above the water spray component B402, and the slicing drive component 401 is arranged on the fixed base plate B403. The slicing drive component 401 includes a cylinder 40101. The front end of the cylinder rod of the cylinder 40101 is connected to the cylinder connecting plate 40105 through a cylinder connecting piece. A guide shaft 40102 is connected to both ends of the bottom surface of the cylinder connecting plate 40105. The bottom of the guide shaft 40102 extends out of the fixed base plate B403. A vertical pole 40103 is arranged on the inner side of the bottom of the two guide shafts 40102, and a slicing component 40104 is arranged between the two vertical poles 40103; a water spray block A40107 is arranged on the bottom surface of the fixed base plate B403.

[0109] The cylinder 40101 is fixed to the fixed base plate B403 via a fixed connecting plate 40106. The fixed base plate B403 is provided with a mounting seat 40108, and the mounting seat 40108 is provided with a cylinder limiting nail 40110, which is arranged below the cylinder connecting plate 40105.

[0110] The water spray block A40107 is provided with a plurality of nozzles, which are equidistantly arranged and are commercially available. The water spray block A40107 is connected to a water inlet pipe via a quick connector, and a water pump is provided on the water inlet pipe.

[0111] The segmented piece 40104 is preferably a fishing line. Two segmented pieces 40104 are preferably provided.

[0112] A linear bearing 40109 is provided at the connection between the guide shaft 40102 and the fixed base plate B403.

[0113] The water spray assembly B402 includes two water spray groups arranged opposite to each other, and the water spray group includes a water spray support 40201. The bottom of the water spray support 40201 is set on the box body 1, and a water spray block B40202 is set on the upper part of the water spray support 40201. The water spray block B40202 is set at an angle. A long water spray nozzle 40204 is set on the top surface of the water spray block B40202, and the water spray nozzle 40204 is set inward. The water spray block B40202 is connected to the water inlet pipe through a quick connector, and a water pump is set on the water inlet pipe.

[0114] An adjusting groove 40203 is provided on the upper portion of the water spray support 40201, and the water spray block B40202 is set on the water spray support 40201 through bolts and the adjusting groove 40203, and the position of the water spray block B40202 is adjusted through the adjusting groove 40203 and the bolts.

[0115] The distance between the two water spray groups is greater than the inner side distance between the two synchronous belts B205. The heights of the two water spray groups are both lower than the height of the synchronous belt B205.

[0116] The workpiece 7 is a plurality of silicon wafers.

[0117] The degumming rack 8 is an existing public degumming rack 8 or a commercially available degumming rack 8. The degumming rack 8 in the patent CN222705494U can also be implemented.

[0118] The silicon wafer side clamp centering mechanism 2 includes a side clamp centering transmission group A and a side clamp centering transmission group B arranged opposite to each other. The bottoms of the side clamp centering transmission group A and the side clamp centering transmission group B are connected by a synchronous belt B205. The side clamp centering transmission group A and the side clamp centering transmission group B are fixed on the top surface of the box 1;

[0119] The side clamp centering transmission group A includes a fixed base plate A201, on which a centering component for centering the workpiece 7 and a side clamping component A for side clamping the workpiece 7 are provided. The centering component is connected to the side clamping component A through a support frame to drive the side clamping component A to move left and right; two side clamping components A are provided, each side clamping component A includes a clamping and conveying motor 208, the output end of the clamping and conveying motor 208 is connected to a driving active wheel 211 through a transmission rod A210, the driving active wheel 211 is connected to a driven wheel A408 through a synchronous belt B205, a cross plate 206 is provided between the driving active wheel 211 and the driven wheel A408, the top of the support frame is connected to the synchronous belt transmission block of the centering component, the clamping and conveying motor 208 is connected to the upper part of the support frame through a motor connecting plate, and the top of the support frame is connected to the cross plate 206 through a support A209;

[0120] The side clamp centering transmission group B includes a fixed base plate B403, on which a centering component for centering the workpiece 7 and a side clamp component B for side clamping the workpiece 7 are arranged. The centering component is connected to the side clamp component B through a support frame to drive the side clamp component B to move left and right; two side clamp components B are provided, each side clamp component B includes a support C, the top of the support frame is connected to the synchronous belt drive block of the centering component, and the top of the support frame is connected to the cross plate 206 through the support A209.

[0121] The centering assembly provided on the side clamp centering transmission group A has the same structure as the centering assembly provided on the side clamp centering transmission group B. The centering assembly provided on the side clamp centering transmission group A is described below.

[0122] The centering component arranged on the side clamp centering transmission group A includes a side clamp drive motor A202, which is arranged at one end of the fixed base plate A201, and a side clamp driven wheel 215 is arranged at the other end of the fixed base plate A201. The output end of the side clamp drive motor A202 is connected to the side clamp active wheel 216, and the side clamp active wheel 216 is connected to the side clamp driven wheel 215 through a synchronous belt A203, and the synchronous belt A203 is connected to the support frame through a synchronous belt transmission block.

[0123] The support frame is slidably connected to the fixed base plate A201 through a guide assembly. The guide assembly includes a linear guide rail C and a slider. The linear guide rail C is arranged on the fixed base plate A201, and the slider is arranged on the bottom surface of the support frame. The linear guide rail C is slidably connected to the slider.

[0124] Two linear guide rails C are preferably provided.

[0125] A limit seat A207 is set at the center of the fixed base plate A201 and adjacent to the two ends of the linear guide C. A buffer block is set on the limit seat A207 for limit buffer protection.

[0126] The upper synchronous belt A203 is connected to the support frame after passing through the synchronous belt transmission block A204, and the lower synchronous belt A203 is connected to another support frame after passing through the synchronous belt transmission block B217. A rack A is provided on the outside of the synchronous belt A203, and a rack B is provided at the connection between the inner side of the synchronous belt transmission block A204 and the synchronous belt transmission block B217 and the synchronous belt A203. The rack A and the rack B are meshed and connected.

[0127] Metal pads A213 and nylon limit plates A214 are also provided on both sides of the transverse plate 206 to prevent the synchronous belt B205 from shifting and to support the synchronous belt B205; the nylon limit plates A214 are provided on the outside.

[0128] The side clamp driving motor A202 is fixed on the fixed base plate A201 through the side clamp driving wheel bracket 220. The side clamp driven wheel 215 is arranged on the fixed base plate A201 through the side clamp driven wheel bracket 219.

[0129] Side clamp centering transmission group A and side clamp centering transmission group B, side clamp centering transmission group A is arranged at one end of the top surface of the box body 1, and is arranged on the top surface of the box body 1 through the fixed bottom plate A201, and side clamp centering transmission group B is arranged at one end adjacent to the slice side clamp centering mechanism 5, and is arranged on the top surface of the box body 1 through the fixed bottom plate B403.

[0130] The synchronous belt B205 is preferably a sponge belt.

[0131] The top ends of the two side clamp assemblies A are located on the same horizontal plane. The bottom ends of the two side clamp assemblies A are located on the same horizontal plane.

[0132] The clamping and conveying motor 208 is connected to the transmission rod A210 in sequence through the reducer A218 and the coupling 212.

[0133] The driven wheel A408 is connected to the transverse plate 206 through the driven wheel A fixing plate, and a through hole is set on the transverse plate 206. The driving active wheel 211 is connected to the transverse plate 206 through the adjustment block A221. The adjustment block 222 is set adjacent to the adjustment block A221. The adjustment block 222 is fixed on the transverse plate 206. Bolts are set on the adjustment block 222. The tension of the synchronous belt B205 is adjusted by adjusting the adjustment block A221 by adjusting the bolt position.

[0134] The material receiving and conveying mechanism 3 includes a conveying belt A301, a conveying belt B303, and a conveying motor A302; two conveying belts B303 are provided, which are located at both ends of the end of the conveying belt A301, and the end of the conveying belt A301 is arranged between the two conveying belts B303 to form a cross setting. The output end of the conveying motor A302 is connected to the synchronous driving wheel, and the synchronous driving wheel is respectively connected to two synchronous driven wheels through a synchronous belt C310. The two synchronous driven wheels are respectively connected to the conveying wheel of the conveying belt A301 and the conveying driving wheel 313 of the conveying belt B303 through a transmission shaft to realize the conveying of the workpiece 7.

[0135] Of the two synchronous driven wheels, one is connected to the conveying driving wheel 313 of the conveying belt B303 through the transmission shaft A304, and the other is connected to the conveying wheel of the conveying belt A301 through the transmission shaft B305.

[0136] The transmission shaft A304 is connected to the driving conveyor wheel 313 of the adjacent conveyor belt B303, and the conveyor wheel is connected to the driving conveyor wheel 313 of the other conveyor belt B303 via the transmission shaft C311.

[0137] The conveying wheel of the conveying belt A301 is connected to the conveying driven wheel A312 through the conveying belt A301, and a fixed frame plate is set between the conveying wheel and the conveying driven wheel A312. The conveying wheel and the conveying driven wheel A312 are respectively connected to the fixed frame plate through the conveying wheel fixing plate and the driven wheel fixing plate 315, and a through hole is set on the fixed frame plate. After the transmission shaft C311 passes through the through hole, the two ends are respectively connected to the conveying driving wheel 313 of the conveying belt B303 and the conveying driving wheel 313 of another conveying belt B303.

[0138] The driving pulley 313 of each conveyor belt B303 is connected to a driven pulley B316 via the conveyor belt B303. A fixed frame plate is provided between the driving pulley 313 and the driven pulley B316. The driving pulley 313 and the driven pulley B316 are connected to the fixed frame plate via a conveyor pulley fixing plate and a driven pulley fixing plate 315, respectively. A tensioning block B314 for tensioning the conveyor belt B303 is provided on the fixed frame plate. Bolts are provided on the tensioning block B314, and the tension of the conveyor belt B303 can be adjusted by adjusting the position of the bolts.

[0139] Preferably, a tensioning pulley A309 is further provided on the synchronous belt C310 connecting the synchronous driving wheel and the synchronous driven wheel. The tensioning pulley A309 is fixed to the housing 1 via a tensioning bracket, and a tensioning block A308 for adjusting the tension is further provided on the tensioning pulley A309. The tensioning block A308 is preferably positioned on the tensioning bracket, and the position of the tensioning block A308 on the tensioning bracket is preferably adjusted using bolts to adjust the position of the tensioning pulley A309, thereby adjusting the tension of the synchronous belt C310.

[0140] The conveying motor A302 is fixed on the top side surface of the top of the box body 1, and the conveying motor A302 is fixed by the conveying motor A fixing frame.

[0141] A speed reducer B307 is further provided between the conveying motor A302 and the synchronous driving wheel.

[0142] The length of the conveyor belt B303 is smaller than that of the conveyor belt A301. The width of the conveyor belt B303 is smaller than that of the conveyor belt A301.

[0143] Conveyor belt A301 is connected to fixed frame 306 via a fixed frame plate and fixed connecting blocks, and is installed on the bottom surface of box 1 via fixed frame 306 and a fixed base. Conveyor belt B303 is connected to fixed frame 306 via a fixed frame plate and fixed connecting blocks, and is installed on the bottom surface of box 1 via fixed frame 306 and a fixed base. The distance between the two conveyor belts B303 is less than the width of workpiece 7.

[0144] Conveyor belt A301 and conveyor belt B303 are both PU smooth surface synchronous belts.

[0145] The slice side clamp centering mechanism 5 includes a fixed base plate C501, on which a centering drive assembly for centering the workpiece 7 and a side clamp conveying assembly for side clamping the workpiece 7 are arranged. The centering drive assembly is connected to the side clamp conveying assembly through a support frame to drive the side clamp conveying assembly to move left and right; two side clamp conveying assemblies are arranged, each side clamp conveying assembly includes a conveying motor B509, and the output end of the conveying motor B509 is connected to the side clamp conveying active wheel 511 through a transmission rod B510, and the side clamp conveying active wheel 511 is connected to the side clamp conveying driven wheel 515 through a side clamp conveying belt 512, and a fixed frame plate is arranged between the side clamp conveying active wheel 511 and the side clamp conveying driven wheel 515, the top of the support frame is connected to the synchronous belt drive block of the centering drive assembly, the conveying motor B509 is connected to the upper part of the support frame through the motor connecting plate, and the bottom of the support frame is connected to the fixed frame plate through a vertical rod 517.

[0146] The side clamp conveying driven wheel 515 is connected to the fixed frame plate through the side clamp conveying driven wheel fixing plate, and a through hole is set on the fixed frame plate. The side clamp conveying active wheel 511 is connected to the fixed frame plate through the adjustment block B513. A bolt adjustment block is set adjacent to the adjustment block B513, and the bolt adjustment block is fixed on the fixed frame plate. An adjustment bolt 514 is set on the bolt adjustment block. The tension of the side clamp conveying belt 512 is adjusted by adjusting the position of the adjustment bolt 514 and adjusting the adjustment block B513.

[0147] The top ends of the two side clamp conveying assemblies are located on the same horizontal plane. The bottom ends of the two side clamp conveying assemblies are located on the same horizontal plane.

[0148] The centering drive assembly includes a slice side clamp drive motor 502, which is arranged at one end of the fixed base plate C501, and a slice side clamp driven wheel 505 is arranged at the other end of the fixed base plate C501. The output end of the slice side clamp drive motor 502 is connected to the slice side clamp active wheel 504, and the slice side clamp active wheel 504 is connected to the slice side clamp driven wheel 505 through a synchronous belt E503. The synchronous belt E503 is connected to the side clamp conveying assembly through a synchronous belt transmission block and a support frame respectively.

[0149] The support frame is slidably connected to the fixed base plate C501 through a guide assembly. The guide assembly includes a linear guide rail B and a slider. The linear guide rail B is set on the fixed base plate C501, and the slider is set on the bottom surface of the support frame. The linear guide rail B is slidably connected to the slider.

[0150] Two linear guide rails B are preferably provided.

[0151] A limit seat C516 is provided at the center of the fixed base plate C501 and adjacent to both ends of the linear guide rail B, and a buffer block is provided on the limit seat C516 for limit buffer protection.

[0152] The upper synchronous belt E503 is connected to the support frame B508 after passing through the synchronous belt transmission block D506. The lower synchronous belt E503 is connected to the support frame A507 after passing through the synchronous belt transmission block E. A rack A is provided on the outside of the synchronous belt E503, and a rack B is provided at the connection between the inner side of the synchronous belt transmission block D506 and the synchronous belt transmission block E and the synchronous belt E503. The rack A and the rack B are meshed and connected.

[0153] The side clamp conveyor belt 512 is preferably a sponge belt.

[0154] A metal pad C and a nylon limiting plate C are also provided on the side of the fixed frame plate to prevent the side clamping conveying belt 512 from shifting and to support the side clamping conveying belt 512; the nylon limiting plate C is provided on the outside.

[0155] The slice side clamp driving motor 502 is fixed on the fixed base plate C501 through the slice side clamp driving motor fixing seat. The slice side clamp driven wheel 505 is arranged on the fixed base plate C501 through the slice side clamp driven wheel bracket.

[0156] The slice side clamp centering mechanism 5 is fixed on the top surface of the box body 1 through the fixed bottom plate C501.

[0157] The material distribution and conveying mechanism 6 includes a synchronous belt F602, a driving synchronous belt 604, and a material distribution and conveying motor 601; the output end of the material distribution and conveying motor 601 is connected to the material distribution and conveying active wheel 607, and the material distribution and conveying active wheel 607 is connected to the driven wheel B609 through the synchronous belt F602, and the driven wheel B609 is connected to the belt driving wheel 818 through the transmission shaft D603, and the belt driving wheel 818 is connected to the two driven wheels C612 respectively through the driving synchronous belt 604 to realize the movement of the driving synchronous belt 604.

[0158] The transmission shaft D603 is fixed to the bottom surface of the box body 1 through the support B610. Two bearings are set on the transmission shaft D603, and the two bearings are respectively connected to the support B610.

[0159] A mounting plate 614 is set between the two driven wheels C612. One driven wheel C612 is connected to the mounting plate 614 through the driven wheel B fixing plate 613, and a through hole is set on the mounting plate 614. The other driven wheel C612 is connected to the mounting plate 614 through the driven wheel C adjustment plate. A tensioning block D617 is set adjacent to the driven wheel C adjustment plate. The tensioning block D617 is fixed on the mounting plate 614. Bolts are set on the tensioning block D617. The tension of the drive synchronous belt 604 is adjusted by adjusting the position of the bolts.

[0160] A tensioning wheel B611 is also provided on the driving synchronous belt 604. The tensioning wheel B611 is provided below the mounting plate 614. The tensioning wheel B611 is movably connected to the mounting plate 614 through bolts and a tensioning wheel fixing plate.

[0161] The driving synchronous belt 604 is connected to the fixing frame through the mounting plate 614 and the fixing connection block, and is arranged on the bottom surface of the box body 1 through the fixing frame and the fixing base.

[0162] A speed reducer C605 is also installed between the feed conveying motor 601 and the feed conveying driving wheel 607. The feed conveying motor 601 is fixed to the top side surface of the box body 1 via a motor mounting plate 606. A tensioning block C608 for tensioning the synchronous belt F602 is installed on the side of the motor mounting plate 606. The tensioning block C608 is fixed to the top side surface of the box body 1. Two bolts are installed horizontally on the tensioning block C608. The two bolts are moved back and forth to adjust the tension of the synchronous belt F602.

[0163] The driving synchronous belt 604 is a PU smooth synchronous belt.

[0164] Metal pads B615 and nylon limit plates B616 are also provided on the upper and lower top surfaces of the mounting plate 614 to prevent the drive timing belt 604 from shifting and to support the drive timing belt 604; the nylon limit plates B616 are provided on the outside.

[0165] When the slicing device for separating silicon wafers is used, the slicing device for separating silicon wafers is arranged as a whole in the box body 1 of the water tank. The process of fishing out the wafers is carried out in the water. The degumming frame (existing technology) containing the silicon wafers after degumming is taken out from the water tank truck (existing equipment) by a cantilever crane or an automatic truss manipulator (both are existing equipment, which have nothing to do with the structure of the present invention and are not described. It is sufficient to realize their functions). The conveyor belt A301 of the material receiving and conveying mechanism 3 is placed on the conveyor belt A301 of the material receiving and conveying mechanism 3. The silicon wafer pressing device presses the silicon wafer from top to bottom, the bottom rod of the degumming frame automatically opens, and the degumming frame is lifted up (this part is not included in the technical solution of the present invention). The synchronous belt B of the silicon wafer side clamping and centering mechanism 2 is made of sponge material to clamp the silicon wafer and convey it forward. The silicon wafers are transported to the slicing position of the slicing mechanism 4, the bottom water spray assembly B and the upper water spray block A are opened, and the water at the set pressure of the water pump is sprayed on the silicon wafers. The silicon wafers are separated under the pressure of the water at the spraying point. At this time, the upper cylinder 40101 drives the slicing piece 40104 to separate the separated silicon wafers to prevent the front and back silicon wafers from sticking together. The receiving conveyor mechanism 3 and the wafer side clamp centering mechanism 2 stop rotating, while the material separation conveyor mechanism 6 and the wafer separation side clamp centering mechanism 5 start to transport the separated wafers to the next process. When the wafer side clamp centering mechanism 2 works, the side clamp centering transmission group A and the side clamp centering transmission group B start working at the same time. The side clamp driving motors on the two centering components start working. The side clamp driving motor drives the side clamp active pulley 216, which in turn drives the side clamp driven pulley 215 to move through the synchronous belt A203, thereby enabling the synchronous belt A203 to drive the synchronous belt transmission block to move. The linear guide rail and slider provided in the guide component drive the support frame to slide on the fixed bottom plate, thereby enabling the two centering components to respectively drive the two support frames on the same side to move, thereby driving the cross plate 206 provided at the bottom of the support frame to move, and enabling the two parallel synchronous belts B205 to start moving toward or away from each other. This achieves the clamping of the workpiece and ensures the workpiece is stably placed on the conveyor belt A301. At the same time, side clamp assemblies A and B also begin to operate. The clamping and conveying motor 208 drives the transmission rod A210, which in turn drives the driving pulley 211 to rotate. This in turn drives the synchronous belt B205, which, in conjunction with the driven pulley A408, moves the synchronous belt B205 to achieve transmission. This ensures that the silicon wafer side clamp centering mechanism 2 can stably clamp and convey multiple silicon wafers without the need for other fixed equipment. The nylon limit plates A and 214 and metal pad A213 ensure that the synchronous belt B205 can operate stably in water without scratching the workpiece, resulting in stable working time, low maintenance rate, and minimal wear and tear.

[0166] When the material receiving and conveying mechanism 3 is working specifically: several silicon wafers are placed on the conveying belt A301 of the material receiving and conveying mechanism 3 through the previous process, and the conveying motor A302 works, and then the power transmission is realized through the synchronous belt C310, the synchronous driven wheel, the transmission shaft B305, and the conveying wheel of the conveying belt A301, and with the cooperation of the conveying driven wheel A, it drives the conveying belt A301 to move and realize the transfer of the workpiece. Synchronously, the conveying motor A302 works, and then the power transmission is realized through the synchronous belt C310, the synchronous driven wheel, the transmission shaft A304, and the conveying active wheel 313 of the conveying belt B303, and with the cooperation of the conveying driven wheel B316, it drives the conveying belt B303 to move and realize the transfer of the workpiece, realizing stable synchronous transportation, and then the conveying belt A301 stably conveys the workpiece to the two conveying belts B303.

[0167] During operation, the wafers are transported to the wafer separation position. The bottom water spray assembly B402 and the upper water spray block A40107 are activated, and water at the set pressure of the water pump is sprayed onto the silicon wafers. The water pressure separates the wafers at the spray point. The upper cylinder 40101 then drives the wafer separation element 40104 to separate the separated wafers, preventing the front and back wafers from sticking together. The specially defined position and structure of the water spray assembly B402, combined with the position of the wafer separation element 40104, ensures stable wafer separation. This ensures stable wafer separation, stable operation, and a low failure rate.

[0168] When the slice side clamp centering mechanism 5 is working, the slice side clamp drive motor 502 on the centering drive assembly starts working, and the slice side clamp drive motor 502 drives the slice side clamp driving wheel 504 to transmit power, and then transmits power to the slice side clamp driven wheel 505 through the synchronous belt E503, thereby driving the synchronous belt E503 to move. The synchronous belt E503 is engaged and connected through the synchronous belt transmission block, thereby driving the two support frames to move, and then the vertical rod 517 at the bottom of the support frame drives the two fixed frame plates to move, thereby causing the two parallel side clamp conveyor belts 512 to start moving towards or away from each other. The workpiece is clamped and moved stably on the conveyor belt. The support frame slides through the guide assembly provided at the bottom. At the same time, the side clamp conveyor assembly also works synchronously. The conveying motor B509 drives the transmission rod B510 to drive the side clamp conveyor active wheel 511 to rotate, and then drives the side clamp conveyor belt 512 to move with the cooperation of the side clamp conveyor driven wheel 515 to achieve transmission, thereby realizing the stable clamping and conveying of the multiple silicon wafers after slicing by the slicing side clamp centering mechanism 5, without the need for other fixed equipment. The metal pad C and nylon limit plate C can ensure the stable operation of the side clamp conveyor belt 512 in water without scratching the workpiece, and the working time is also stable, the maintenance rate is low, and the loss is small.

[0169] When the material distribution and conveying mechanism 6 is in operation, the material distribution and conveying motor 601 starts working, and then drives the material distribution and conveying driving wheel 607, which drives the synchronous belt F602 to drive the driven wheel B609. The driven wheel B609 drives the belt drive wheel 818 through the transmission shaft D603. The belt drive wheel 818 drives the two driven wheels C612 through the driving synchronous belt 604 to achieve power transmission, and drives the synchronous belt 604 to move and transfer the workpiece, achieving stable and synchronous transportation. The workpiece is then transferred to the next process.

[0170] Although the present invention has been described in detail above using general descriptions and specific embodiments, it will be apparent to those skilled in the art that modifications and improvements may be made thereto. Therefore, such modifications and improvements, without departing from the spirit of the present invention, are intended to be within the scope of protection claimed herein.

Claims

1. A slicing device for separating silicon wafers, characterized in that: The invention comprises a silicon wafer side clamp centering mechanism (2) and a slicing side clamp centering mechanism (5) which are sequentially arranged at the upper part; a slicing mechanism (4) is further arranged on the silicon wafer side clamp centering mechanism (2), and the slicing mechanism (4) is arranged on a side adjacent to the slicing side clamp centering mechanism (5); the slicing device for silicon wafer separation further comprises a material receiving and conveying mechanism (3) and a material separating and conveying mechanism (6) which are sequentially arranged at the lower part; the slicing mechanism (4) comprises a slicing drive component (401) and a water spray component B (402), the slicing drive component (401) is arranged above the water spray component B (402), and the slicing drive component (401) is arranged on the fixed On the fixed base plate B (403), a slicing drive assembly (401) includes a cylinder (40101), the front end of the cylinder rod of the cylinder (40101) is connected to the cylinder connecting plate (40105) through a cylinder connecting piece, and two ends of the bottom surface of the cylinder connecting plate (40105) are respectively connected to a guide shaft (40102), the bottom of the guide shaft (40102) extends out of the fixed base plate B (403), and a vertical rod (40103) is set on the inner side of the bottom of the two guide shafts (40102), and a slicing line (40104) is set between the two vertical rods (40103); and a water spray block A (40107) is set on the bottom surface of the fixed base plate B (403).

2. A slicing device for separating silicon wafers according to claim 1, characterized in that: The receiving and conveying mechanism (3) and the distributing and conveying mechanism (6) are arranged crosswise, and the conveying driven wheel B (316) at the end of the receiving and conveying mechanism (3) and the driven wheel C (612) at the front end of the distributing and conveying mechanism (6) are arranged crosswise and their centers coincide.

3. The slicing device for separating silicon wafers according to claim 1, wherein: The wafer side clamp centering mechanism (2) and the wafer splitting side clamp centering mechanism (5) are arranged crosswise, the side clamp conveying active wheel (511) at the front end of the crosswise arranged wafer splitting side clamp centering mechanism (5) and the driven wheel A (408) at the end of the wafer side clamp centering mechanism (2) are arranged crosswise up and down and their centers coincide, and the conveying driven wheel B (316), the driven wheel C (612), the side clamp conveying active wheel (511), and the driven wheel A (408) fall on the same vertical line at the center.

4. The slicing device for separating silicon wafers according to claim 1, wherein: The silicon wafer side clamp centering mechanism (2) comprises a side clamp centering transmission group A and a side clamp centering transmission group B arranged in opposite directions, and the bottoms of the side clamp centering transmission group A and the side clamp centering transmission group B are connected by a synchronous belt B (205); The silicon wafer side clamp centering mechanism (2) is used to realize centering and clamping of a workpiece.

5. The slicing device for separating silicon wafers according to claim 1, wherein: The material receiving and conveying mechanism (3) comprises a conveying belt A (301), a conveying belt B (303), and a conveying motor A (302); two conveying belts B (303) are provided, and are provided at both ends of the end of the conveying belt A (301); the end of the conveying belt A (301) is provided between the two conveying belts B (303) to form a cross arrangement; the output end of the conveying motor A (302) is connected to a synchronous driving wheel, and the synchronous driving wheel is respectively connected to two synchronous driven wheels through a synchronous belt C (310); the two synchronous driven wheels are respectively connected to the conveying wheel of the conveying belt A (301) and the conveying driving wheel (313) of the conveying belt B (303) through a transmission shaft to realize conveying a workpiece (7); one of the two synchronous driven wheels is connected to the conveying driving wheel (313) of the conveying belt B (303) through a transmission shaft A (304), and the other is connected to the conveying wheel of the conveying belt A (301) through a transmission shaft B (305). The transmission shaft A (304) is connected to the driving conveyor wheel (313) of the adjacent conveyor belt B (303), and the conveyor wheel is connected to the driving conveyor wheel (313) of the other conveyor belt B (303) through the transmission shaft C (311).

6. A slicing device for separating silicon wafers according to claim 4, characterized in that: The side clamp centering transmission group B comprises a fixed base plate B (403), on which a centering component for centering a workpiece (7) and a side clamping component B for side clamping the workpiece (7) are arranged. The centering component is connected to the side clamping component B via a support frame to drive the side clamping component B to move left and right. Two side clamping components B are provided, each of which comprises a support C, the top of the support frame is connected to the synchronous belt transmission block of the centering component, and the top of the support frame is connected to the transverse plate (206) via a support A (209).

7. The slicing device for separating silicon wafers according to claim 4, wherein: The side clamp centering transmission group A comprises a fixed base plate A (201), a centering component for centering a workpiece (7) and a side clamping component A for side clamping the workpiece (7) are arranged on the fixed base plate A (201), the centering component is connected to the side clamping component A through a support frame to drive the side clamping component A to move left and right; two side clamping components A are provided, each side clamping component A comprises a clamping and conveying motor (208), the output end of the clamping and conveying motor (208) is connected to a driving active wheel (211) through a transmission rod A (210), and the driving active wheel (211) is connected to a driven wheel A (408) through a synchronous belt B (205). ), a transverse plate (206) is arranged between the driving active wheel (211) and the driven wheel A (408), the top of the support frame is connected to the synchronous belt transmission block of the centering component, the clamping conveying motor (208) is connected to the upper part of the support frame through the motor connecting plate, and the top of the support frame is connected to the transverse plate (206) through the support A (209); the support frame is slidably connected to the fixed base plate A (201) through the guide assembly, and the guide assembly includes a linear guide rail C and a slider, the linear guide rail C is arranged on the fixed base plate A (201), the slider is arranged on the bottom surface of the support frame, and the linear guide rail C is slidably connected to the slider.

8. The slicing device for separating silicon wafers according to claim 4, wherein: The centering assembly provided on the side clamp centering transmission group A has the same structure as the centering assembly provided on the side clamp centering transmission group B.

9. A slicing device for separating silicon wafers according to claim 8, characterized in that: The centering assembly arranged on the side clamp centering transmission group A comprises a side clamp driving motor A (202), the side clamp driving motor A (202) being arranged at one end of a fixed base plate A (201), a side clamp driven wheel (215) being arranged at the other end of the fixed base plate A (201), an output end of the side clamp driving motor A (202) being connected to a side clamp driving wheel (216), the side clamp driving wheel (216) being connected to the side clamp driven wheel (215) via a synchronous belt A (203), and the synchronous belt A (203) being connected to a support frame via a synchronous belt transmission block.

10. The slicing device for separating silicon wafers according to claim 8, wherein: The synchronous belt A (203) at the upper part is connected to the support frame after being inserted through the synchronous belt transmission block A (204), and the synchronous belt A (203) at the lower part is connected to another support frame after being inserted through the synchronous belt transmission block B (217). A rack A is provided on the outer side of the synchronous belt A (203), and a rack B is provided at the connection between the inner side of the synchronous belt transmission block A (204) and the synchronous belt transmission block B (217) and the synchronous belt A (203). The rack A and the rack B are meshed and connected.

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