A flatness detection device for a semiconductor ceramic heating disc and a detection method thereof

Abstract

The application relates to the technical field of semiconductor processing equipment, in particular to a flatness detection device and detection method of a semiconductor ceramic heating disc, which comprises a lifting butt joint device, a rotating adjusting shaft, a fitting simulation board, a moving detection device, a moving adjusting table, a self-cleaning detection barrel, a limiting fixing device and a connecting seat. The lifting butt joint device is installed above a workbench. The rotating adjusting shaft is installed at the shaft center position of the lifting butt joint device. The fitting simulation board is installed at the bottom of the rotating adjusting shaft. The moving detection device is installed on the rotating adjusting shaft. The moving adjusting table is arranged below the fitting simulation board. The self-cleaning detection barrel is installed on the moving adjusting table. The limiting fixing device is installed in the self-cleaning detection barrel. The connecting seat is installed below the moving adjusting table, and the connecting seat is used for connecting the heating element of the ceramic heating disc, so that the accuracy and effectiveness of the detection result are effectively improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor processing equipment, in particular to a flatness detection device for a semiconductor ceramic heating disc and a detection method thereof. BACKGROUND

[0002] A ceramic heating disc is a heating element made of ceramic material, which has excellent high-temperature resistance, corrosion resistance and insulation performance. In semiconductor manufacturing, ceramic heating discs are often used to heat wafers in the reaction chamber. When the temperature in the reaction chamber changes, the ceramic heating disc itself is prone to deformation. In the conventional measurement means of the deformation amount of the ceramic heating disc, only the deformation state of the tray at room temperature can be measured. However, the deformation detection of the ceramic heating disc at high temperature has more practical production guiding significance in the semiconductor processing process.

[0003] Chinese patent CN118565422A discloses a wafer tray deformation detection device, method, and semiconductor processing device. The deformation detection device includes: a first sliding table arranged above the wafer tray; a second sliding table arranged on the first sliding table and rotating on the first sliding table along the circumference of the wafer tray; and a detection probe arranged on the second sliding table and rotating with the second sliding table, the detection probe translating on the second sliding table along the radial direction of the wafer tray to determine the height of multiple positions on the surface of the wafer tray to indicate the deformation of the surface of the wafer tray. Through the above wafer tray deformation detection device, the flatness of the wafer tray can be quickly detected in different temperature environments, especially in high temperature environments, which not only improves the detection efficiency, but also obtains accurate detection results.

[0004] The above device can detect the flatness of the ceramic heating disc in a high temperature environment, which meets the basic detection needs to some extent. However, in actual application, the working state of the ceramic heating disc is much more complex than a simple high temperature environment. In particular, when the ceramic heating disc is in use, its top will closely adhere to the semiconductor, forming a heat conduction interface. This adhesion state not only involves temperature conduction, but also may cause additional deformation of the ceramic heating disc under stress or thermal stress due to physical contact between the semiconductor and the ceramic heating disc, thereby affecting its flatness. The existing detection device often ignores the influence brought by the contact between the semiconductor and the ceramic heating disc in the simulation detection process, resulting in certain limitations of the detection results. Since the contact state between the semiconductor and the ceramic heating disc is not included in the detection category, the existing detection device cannot comprehensively and accurately evaluate the flatness of the ceramic heating disc under actual use conditions. The detection results in such a single simulation environment may not truly reflect the performance of the ceramic heating disc in the real working scene, thereby reducing the accuracy and effectiveness of the detection. SUMMARY

[0005] In order to solve the above problems, the application provides a flatness detection device for a semiconductor ceramic heating disc and a detection method thereof.

[0006] In order to solve the above problems, the application provides a flatness detection device for a semiconductor ceramic heating disc and a detection method thereof.

[0007] Preferably, the lifting docking device comprises a fixed mounting frame mounted on the workbench, and a first linear actuator is mounted on the fixed mounting frame, and an output end of the first linear actuator is provided with a docking abutment frame.

[0008] Preferably, the rotating adjusting shaft is provided with a first limiting sliding rail at the shaft center position, the first limiting sliding rail is used for slidingly mounting the moving detection device, a plurality of limiting mounting grooves are arranged on the outer side of the rotating adjusting shaft, a rotating slip ring is mounted on the limiting mounting groove, the rotating slip ring is in sliding connection with the limiting mounting groove, the rotating slip ring is in rotating connection with the docking abutment frame, a second linear actuator is mounted above the rotating adjusting shaft, the second linear actuator is in fixed connection with the docking abutment frame, an output end of the second linear actuator is in rotating connection with the rotating adjusting shaft, and the rotating adjusting shaft further comprises a first rotating driving device for driving the rotating slip ring to rotate.

[0009] Preferably, the bottom of the fitting simulation board is provided with a simulation fitting surface, a detection port is arranged on the fitting simulation board, a rotating shielding plate is mounted in the detection port, the rotating shielding plate is in rotating connection with the fitting simulation board, an elastic clamping spring is arranged between the rotating shielding plate and the fitting simulation board, and the fitting simulation board further comprises a trigger top rod mounted on the moving detection device.

[0010] Preferably, the movement detection device comprises a third linear driver mounted inside the first limiting slide rail, and a first ball screw sliding table mounted inside the first limiting slide rail and in sliding connection with the first limiting slide rail, the first ball screw sliding table being connected to the output end of the third linear driver, and the flatness detector being mounted on the movable end of the first ball screw sliding table and used for detecting the flatness of the ceramic heating disc.

[0011] Preferably, the movement adjustment platform comprises a guide adjustment frame mounted on the workbench and used for guiding the movement of the limiting and fixing device, and the guide adjustment frame is provided with a second ball screw sliding table, and the movable end of the second ball screw sliding table is provided with an annular mounting frame.

[0012] Preferably, the self-cleaning detection barrel is fixedly connected with the annular mounting frame, the inside of the self-cleaning detection barrel is provided with a plurality of arc-shaped air blowing pipes, the arc-shaped air blowing pipes are provided with a plurality of air outlet holes, the side of the self-cleaning detection barrel is provided with a suction port, and the outside of the self-cleaning detection barrel is further provided with a second limiting slide rail, and the self-cleaning detection barrel further comprises a dust collector connected with the suction port.

[0013] Preferably, the limiting and fixing device comprises a lifting push plate slidingly mounted on the third limiting slide rail, and the two sides of the lifting push plate are provided with guide wheels in abutment with the guide adjustment frame, the top of the lifting push plate is provided with a plurality of limiting suction cups and a plurality of third limiting slide rails, the bottom of the lifting push plate is provided with a synchronous adjustment disc, the synchronous adjustment disc is provided with a plurality of inclined slide rails, the inside of each of the plurality of third limiting slide rails is provided with a movable adjustment block, the top of the movable adjustment block is provided with a clamping shaft, the bottom of the movable adjustment block is provided with a sliding shaft in sliding connection with the inclined slide rail, and the limiting and fixing device further comprises a second rotary driving device for driving the synchronous adjustment disc to rotate.

[0014] Preferably, the connecting seat is arranged below the limiting and fixing device, the connecting seat is provided with an electrical connection port, the top of the connecting seat is provided with an inclined blocking plate, and the inclined blocking plate is provided with blocking teeth.

[0015] A flatness detection method of a semiconductor ceramic heating disc, comprising the following steps:

[0016] S1, the movement adjustment platform moves the semiconductor ceramic heating disc to be detected to be directly below the fitting simulation board, and ensures the relative position to be accurate.

[0017] S2, the lifting docking device is started to drive the rotary adjustment shaft, the fitting simulation board and the movement detection device to be synchronously lowered, and preliminary detection is prepared.

[0018] S3, the movement detection device cooperates with the rotary adjustment shaft to perform preliminary detection, and if the preliminary detection is unqualified, the detection is stopped, and if the preliminary detection is qualified, the test is continued.

[0019] S4, after the preliminary detection is qualified, the mobile detection device is reset, the rotary adjusting shaft drives the fitting simulation board to descend and fit the ceramic heating disc.

[0020] S5, the connecting seat transmits electric energy to start the ceramic heating disc to heat the simulation, and the temperature sensor on the fitting simulation board monitors the temperature change in real time until the specified detection temperature.

[0021] S6, after heating to the specified temperature, the rotary adjusting shaft drives the fitting simulation board to rise and separate from the ceramic heating disc, and the mobile detection device detects again, compares the two data, analyzes the flatness change of the ceramic heating disc, and judges whether it is qualified.

[0022] The beneficial effects of the present application compared with the prior art are:

[0023] 1, the combination design of the lifting docking device, the rotary adjusting shaft and the fitting simulation board can accurately simulate the close fitting state of the semiconductor and the ceramic heating disc in actual work. The temperature sensor arranged in the fitting simulation board can monitor the temperature change of the fitting interface in real time, so as to accurately reflect the deformation of the ceramic heating disc under the action of heating and stress. This design effectively overcomes the limitation of ignoring the contact influence of semiconductor and ceramic heating disc in the existing detection device, and improves the accuracy and effectiveness of the detection result.

[0024] 2, the present application adopts multi-functional integrated design, including two stages of preliminary detection and simulation detection. The preliminary detection stage can quickly screen out unqualified ceramic heating disc, avoiding unnecessary subsequent detection steps. The simulation detection stage can simulate the heating process under actual working conditions, and accurately judge the deformation of the ceramic heating disc by comparing the flatness data before and after heating. This multi-functional integrated design not only enhances the flexibility of detection, but also improves the comprehensiveness and accuracy of the detection result. At the same time, the design of the connecting seat makes the device can be conveniently connected with the heating element of the ceramic heating disc, and the heating simulation work is carried out, which further improves the practicality and applicability of the detection.

[0025] 3, the present application integrates lifting docking device, rotary adjusting shaft, fitting simulation board, mobile detection device, mobile adjusting table, self-cleaning detection barrel, limiting fixing device and connecting seat, realizes the automatic control of detection process. It can realize the comprehensive detection of different positions of the ceramic heating disc. The automatic dust removal function of the self-cleaning detection barrel ensures the cleanliness and stability of the detection environment, avoiding the influence of impurities on the detection result. This automatic detection process not only improves the detection efficiency, but also ensures the stability and reliability of the detection result. BRIEF DESCRIPTION OF DRAWINGS

[0026] Figure 1 is a perspective view schematic diagram of a flatness detection device for semiconductor ceramic heating disc of the present application.

[0027] Figure 2 is a front view of a flatness detection device of a semiconductor ceramic heating disc according to the present application.

[0028] Figure 3 is Figure 2 a sectional view along the plane A-A in the figure.

[0029] Figure 4 is a front view of a partial structure of a flatness detection device of a semiconductor ceramic heating disc according to the present application.

[0030] Figure 5 is Figure 4 a sectional view along the plane B-B in the figure.

[0031] Figure 6 is a perspective view of a fitting simulation board in a flatness detection device of a semiconductor ceramic heating disc according to the present application.

[0032] Figure 7 is a perspective view of a partial structure of a flatness detection device of a semiconductor ceramic heating disc according to the present application. Figure 1

[0033] Figure 8 is Figure 7 a close-up view of C in the figure.

[0034] Figure 9 is a perspective view of a partial structure of a flatness detection device of a semiconductor ceramic heating disc according to the present application. Figure 2

[0035] Figure 10 is Figure 9 a close-up view of D in the figure.

[0036] Figure 11 is a perspective view of a connecting seat in a flatness detection device of a semiconductor ceramic heating disc according to the present application.

[0037] The figure is marked as:

[0038] ​​1, workbench; 11, ceramic heating disc; 2, lifting docking device; 21, fixed mounting frame; 22, first linear driver; 23, docking abutment frame; 3, rotating adjustment shaft; 31, first limiting slide rail; 32, limiting mounting groove; 33, first rotating drive device; 34, second linear driver; 35, rotating slip ring; 4, fitting simulation board; 41, detection port; 42, rotating shielding plate; 43, elastic clasp; 44, trigger jib; 5, moving detection device; 51, third linear driver; 52, first ball screw sliding table; 53, planar detector; 6, moving adjustment table; 61, second ball screw sliding table; 62, annular mounting frame; 63, guide adjustment frame; 631, detection plane; 632, blanking plane; 633, guide inclined plane; 7, self-cleaning detection barrel; 71, arc-shaped air blowing pipe; 72, suction port; 73, dust collector; 74, second limiting slide rail; 8, limiting fixing device; 81, lifting push plate; 811, guide wheel; 812, limiting suction disc; 813, third limiting slide rail; 82, synchronous adjustment disc; 83, inclined slide rail; 84, movable adjustment block; 841, clamping shaft; 842, sliding shaft; 85, second rotating drive device; 9, connecting seat; 91, inclined blocking plate; 92, blocking teeth; 93, electrical connection port. DETAILED DESCRIPTION

[0039] In order to further understand the features, technical means and specific purposes and functions achieved by the present application, the present application will be described in further detail below in conjunction with the drawings and specific embodiments.

[0040] Referring to Figures 1 to 11 As shown in the drawings, a flatness detection device for a semiconductor ceramic heating disc comprises a simulation detection device mounted on a workbench 1, and the simulation detection device comprises a lifting docking device 2, a rotating adjustment shaft 3, a fitting simulation board 4, a moving detection device 5, a moving adjustment table 6, a self-cleaning detection barrel 7, a limiting fixing device 8 and a connecting seat 9. The lifting docking device 2 is installed above the workbench 1, and the working end of the lifting docking device 2 extends vertically downward. The rotating adjustment shaft 3 is installed at the shaft center position of the lifting docking device 2. The fitting simulation board 4 is installed at the bottom of the rotating adjustment shaft 3, and the inside of the fitting simulation board 4 is provided with a temperature sensor. The moving detection device 5 is installed on the rotating adjustment shaft 3, and the detection end of the moving detection device 5 is vertically downward. The moving adjustment table 6 is arranged below the fitting simulation board 4, and the moving end of the moving adjustment table 6 slides horizontally. The self-cleaning detection barrel 7 is installed on the moving adjustment table 6. The limiting fixing device 8 is installed inside the self-cleaning detection barrel 7, the top of the limiting fixing device 8 is used to support the ceramic heating disc 11 to be detected, and the limiting fixing device 8 is in sliding connection with the self-cleaning detection barrel 7. The connecting seat 9 is installed below the moving adjustment table 6, and the connecting seat 9 is used to connect the heating element of the ceramic heating disc 11.

[0041] The lifting docking device 2 is located above the workbench 1, and its working end extends vertically downward to drive the rotating adjustment shaft 3, the fitting simulation board 4 and the movement detection device 5 to move synchronously. By precisely controlling the lifting height, the precise docking with the ceramic heating disc 11 is realized. The rotating adjustment shaft 3 is installed at the center of the lifting docking device 2, and is used to drive the fitting simulation board 4 and the movement detection device 5 to rotate and displace. Through the rotation adjustment, the movement detection device 5 can be moved to different detection positions to comprehensively detect the ceramic heating disc 11. The fitting simulation board 4 is installed at the bottom of the rotating adjustment shaft 3, and is internally provided with a temperature sensor, which is used to simulate the close fitting state of the semiconductor and the ceramic heating disc 11, and to monitor the temperature change of the fitting interface in real time. Through the fitting simulation board 4, the force and thermal stress suffered by the ceramic heating disc 11 under actual working conditions can be simulated, so as to detect the change of the flatness. The movement detection device 5 is installed on the rotating adjustment shaft 3, and the detection end is vertically downward, which is used to detect the flatness of the ceramic heating disc 11. The movement detection device 5 can be moved to different detection positions with the rotation of the rotating adjustment shaft 3, so as to comprehensively and accurately measure the ceramic heating disc 11.

[0042] The movement adjustment table 6 is arranged below the fitting simulation board 4, and the movement end of the movement adjustment table 6 horizontally slides to carry and move the self-cleaning detection barrel 7 and the limiting fixing device 8. Through the precise control of the movement adjustment table 6, the rapid positioning and movement of the ceramic heating disc 11 can be realized. The self-cleaning detection barrel 7 is installed on the movement adjustment table 6, and has an automatic dust cleaning function to ensure the cleanliness and stability of the detection environment. Through the automatic cleaning function, the influence of dust and other impurities on the detection result can be effectively avoided. The limiting fixing device 8 is installed in the self-cleaning detection barrel 7, and the top is used to support and fix the ceramic heating disc 11 to be detected. Through the limiting fixing device 8, the stability and accuracy of the ceramic heating disc 11 during the detection process can be ensured. The connecting seat 9 is installed below the movement adjustment table 6, and is used to connect the heating element of the ceramic heating disc 11. Through the connecting seat 9, the electric energy can be transmitted to the ceramic heating disc 11 to make it work in the heating simulation mode.

[0043] The detection process includes two stages: preliminary detection and simulation detection.

[0044] Preliminary detection: the movement adjustment table 6 drives the ceramic heating disc 11 to move to the position directly below the fitting simulation board 4, the lifting docking device 2 drives the rotating adjustment shaft 3, the fitting simulation board 4 and the movement detection device 5 to descend, and the movement detection device 5 cooperates with the rotating adjustment shaft 3 to detect the flatness of the ceramic heating disc 11 for the first time. If the preliminary detection is unqualified, subsequent detection is not needed; if the preliminary detection is qualified, simulation detection is performed.

[0045] Simulation detection: after the preliminary detection is qualified, the moving detection device 5 is reset and separated from the detection area, and the rotary adjusting shaft 3 drives the fitting simulation board 4 to descend and fit the top of the ceramic heating disc 11. The connecting seat 9 supplies electric energy to the ceramic heating disc 11 to heat and simulate the work, and the temperature sensor monitors the temperature change in real time. When the ceramic heating disc 11 is heated to the specified detection temperature, the rotary adjusting shaft 3 drives the fitting simulation board 4 to rise and separate from the ceramic heating disc 11, and the moving detection device 5 is moved to the detection position in cooperation with the rotary adjusting shaft 3 to perform secondary detection. By comparing the detection data of the first and second times, it can be judged whether the ceramic heating disc 11 deforms after heating and use. After the detection is completed, the worker separates the heating element from the connecting seat 9, resets each component, and moves the ceramic heating disc 11 to the placement position by the moving adjusting table 6, so as to replace the ceramic heating disc 11 to be detected for the next detection. Through the simulation detection device, the flatness of the ceramic heating disc 11 under high temperature and stress conditions can be comprehensively and accurately detected, and the accuracy and effectiveness of the detection are effectively improved.

[0046] Referring to Figures 2 to 5 As shown, the lifting docking device 2 comprises a fixed mounting frame 21 mounted on the workbench 1, and a first linear actuator 22 is mounted on the fixed mounting frame 21. The output end of the first linear actuator 22 is provided with a docking abutting frame 23.

[0047] The fixed mounting frame 21 is provided with the first linear actuator 22. The output end of the first linear actuator 22 is connected to the docking abutting frame 23. When the moving adjusting table 6 has accurately moved the ceramic heating disc 11 to be detected to the position directly below the fitting simulation board 4, then the fitting simulation board 4, the rotary adjusting shaft 3 and the moving detection device 5 need to be pressed down during detection, and the first linear actuator 22 is started and drives the docking abutting frame 23 to move linearly vertically downward. The downward movement of the docking abutting frame 23 will synchronously drive the rotary adjusting shaft 3, the fitting simulation board 4 and the moving detection device 5 to move downward as a whole. During this process, the docking abutting frame 23 not only provides the necessary driving force, but also ensures the accurate docking with the self-cleaning detection barrel 7, thereby ensuring the accuracy and stability of the movement of the fitting simulation board 4, the rotary adjusting shaft 3 and the moving detection device 5. By accurately controlling the stroke of the first linear actuator 22, the lifting height can be accurately controlled to meet the requirement of accurate docking with the ceramic heating disc 11.

[0048] Referring to Figures 2 to 5As shown, the shaft center position of the rotation adjusting shaft 3 is provided with a first limiting sliding rail 31, which is used for slidingly installing the movement detection device 5. The outer side of the rotation adjusting shaft 3 is provided with a plurality of limiting installation grooves 32, and a rotating slip ring 35 is installed on the limiting installation grooves 32. The rotating slip ring 35 is in sliding connection with the limiting installation grooves 32, and is in rotating connection with the butt-joint abutting frame 23. A second linear driver 34 is installed above the rotation adjusting shaft 3, and is fixedly connected with the butt-joint abutting frame 23. The output end of the second linear driver 34 is in rotating connection with the rotation adjusting shaft 3. The rotation adjusting shaft 3 further comprises a first rotating driving device 33 for driving the rotating slip ring 35 to rotate.

[0049] The first limiting sliding rail 31 allows the movement detection device 5 to be smoothly and accurately installed. It ensures that the movement detection device 5 can be quickly and accurately positioned to different detection positions as needed. The outer side of the rotation adjusting shaft 3 is equipped with a plurality of limiting installation grooves 32, and a rotating slip ring 35 is installed on the limiting installation grooves 32. The rotating slip ring 35 is in sliding connection with the limiting installation grooves 32, which not only enhances the stability of the rotation adjusting shaft 3, but also allows the rotation adjusting shaft 3 to be flexibly adjusted in a certain range.

[0050] In order to realize accurate control of the rotation adjusting shaft 3, the output end of the second linear driver 34 is in rotating connection with the rotation adjusting shaft 3. Through the extension and retraction movement of the second linear driver 34, the accurate movement of the rotation adjusting shaft 3 in the vertical direction can be realized. This allows the rotation adjusting shaft 3 to perform necessary lifting operations during the preliminary detection and simulation detection stages.

[0051] In addition, the rotation adjusting shaft 3 is also equipped with a first rotating driving device 33, which is fixedly installed on the butt-joint abutting frame 23 and connected with the rotating slip ring 35 through the output end. During the preliminary detection stage, the first rotating driving device 33 is started and drives the rotating slip ring 35 to rotate, thereby driving the rotation adjusting shaft 3 and the movement detection device 5 to rotate synchronously. This rotation adjusting mechanism ensures that the movement detection device 5 can perform comprehensive and uniform flatness detection on the ceramic heating disc 11.

[0052] During the simulation detection stage, the second linear driver 34 is started to drive the rotation adjusting shaft 3 and the fitting simulation plate 4 to move downward until they tightly abut against the ceramic heating disc 11. This simulation abutting pressure design can simulate the force and thermal stress suffered by the ceramic heating disc 11 under actual working conditions, thereby more accurately evaluating the change of the flatness thereof. After heating is completed, the second linear driver 34 is started again to drive the fitting simulation plate 4 to rise, and then the rotation adjusting shaft 3 cooperates with the movement detection device 5 to perform the second flatness detection.

[0053] The first rotating driving device 33 is a prior art which will not be described here.

[0054] Referring to Figures 2 to 6 As shown, the bottom of the lamination simulation board 4 is provided with a simulation lamination surface, and the lamination simulation board 4 is provided with a detection opening 41, and a rotating shielding plate 42 is installed inside the detection opening 41, the rotating shielding plate 42 is rotationally connected with the lamination simulation board 4, and an elastic clamping spring 43 is installed between the rotating shielding plate 42 and the lamination simulation board 4, and the lamination simulation board 4 further comprises a trigger top rod 44 installed on the movement detection device 5.

[0055] The bottom of the lamination simulation board 4 is provided with a simulation lamination surface, and the lamination simulation board 4 is provided with a detection opening 41, and a rotating shielding plate 42 is installed inside the detection opening 41, the rotating shielding plate 42 is rotationally connected with the lamination simulation board 4, and an elastic clamping spring 43 is installed between the rotating shielding plate 42 and the lamination simulation board 4, and the lamination simulation board 4 further comprises a trigger top rod 44 installed on the movement detection device 5.

[0056] During the detection process, when the movement detection device 5 detects the flatness of the ceramic heating disc 11, the rotating adjustment shaft 3 will first drive the lamination simulation board 4 to rise, so that it is separated from the ceramic heating disc 11. Subsequently, the movement detection device 5 will be adjusted to an appropriate detection position along the preset first limiting slide rail 31. In this process, the trigger top rod 44 installed on the movement detection device 5 will be in contact with the rotating shielding plate 42, and this contact action will overcome the elastic force of the elastic clamping spring 43, so that the rotating shielding plate 42 rotates to open the detection opening 41. The opening of the detection opening 41 provides an unobstructed channel for the detection end of the movement detection device 5, so that it can accurately and comprehensively detect the flatness of the ceramic heating disc 11.

[0057] When the movement detection device 5 completes the detection and resets, the contact state of the trigger top rod 44 and the rotating shielding plate 42 is released, and at this time the elastic clamping spring 43 will use its elastic force to push the rotating shielding plate 42 to rotate in the opposite direction around the rotating shaft, until it is completely reset and re-shields the detection opening 41.

[0058] Referring to Figures 2 to 5As shown, the movement detection device 5 includes a third linear actuator 51 mounted inside the first limit slide rail 31, and a first ball screw sliding table 52 mounted inside the first limit slide rail 31 and in sliding connection with the first limit slide rail 31, the first ball screw sliding table 52 being connected to the output end of the third linear actuator 51, and a flatness detector 53 mounted at the movable end of the first ball screw sliding table 52, the flatness detector 53 being used to detect the flatness of the ceramic heating disc 11.

[0059] The first ball screw sliding table 52 can be adjusted in sliding along the first limit slide rail 31 by driving of the third linear actuator 51, so as to realize accurate control of the position of the flatness detector 53. The flatness detector 53 is mounted at the movable end of the first ball screw sliding table 52. The flatness detector 53 has high-precision measurement capability and can accurately detect the flatness of the ceramic heating disc 11, and the first ball screw sliding table 52 can drive the movement detection device 5 to move horizontally.

[0060] When the rotation adjustment shaft 3 rotates, the movement detection device 5 is mounted on the rotation adjustment shaft 3, so that the flatness detector 53 rotates synchronously, so that the flatness detector 53 can comprehensively detect different positions of the ceramic heating disc 11.

[0061] The first ball screw sliding table 52 is adjusted in sliding along the first limit slide rail 31 by driving of the third linear actuator 51, and the flatness detector 53 is accurately measured, so as to realize comprehensive and accurate detection of the flatness of the ceramic heating disc 11, and improve the detection efficiency and accuracy.

[0062] Referring to Figure 2 , Figure 7 and Figure 9 As shown, the movement adjustment table 6 includes a guide adjustment frame 63 mounted on the workbench 1, the guide adjustment frame 63 being used to guide movement of the limit fixing device 8, the guide adjustment frame 63 being provided with a second ball screw sliding table 61, and a ring-shaped mounting frame 62 being mounted at the movable end of the second ball screw sliding table 61.

[0063] The guide adjustment frame 63 is provided with a movement path for accurately guiding the limit fixing device 8. The guide adjustment frame 63 is integrated with the second ball screw sliding table 61, and the ring-shaped mounting frame 62 is connected to the movable end of the second ball screw sliding table 61, so as to stably bear the self-cleaning detection barrel 7.

[0064] The guide adjustment frame 63 is structurally divided into a detection plane 631 and a discharge plane 632, which are smoothly transitioned by a guide ramp 633. The detection plane 631 supports and abuts the limiting and fixing device 8 during the detection process, ensuring it is in the correct detection position. The discharge plane 632 supports the limiting and fixing device 8 to enter the discharge state after the detection is completed. The guide ramp 633 enables a smooth transition and position switching of the limiting and fixing device 8 between the detection plane 631 and the discharge plane 632.

[0065] When it is necessary to move the self-cleaning test bucket 7 and its supporting limiting and fixing device 8, the second ball screw slide 61 is activated. Through its precisely controlled movement function, in conjunction with the annular mounting bracket 62, the self-cleaning test bucket 7 is moved stably in the horizontal direction. During the movement, the limiting and fixing device 8 slides along the preset path of the guide adjustment bracket 63, ensuring the accuracy and stability of the movement.

[0066] The coordinated action of the second ball screw slide 61 and the guide adjustment frame 63 enables the movable adjustment table 6 to efficiently adjust the position of the self-cleaning test barrel 7 and the limiting fixing device 8, meeting the positioning requirements at different stages of the test process, thereby ensuring the smooth progress of the entire test process.

[0067] See Figure 3 , Figure 7 and Figure 9 As shown, the self-cleaning detection bucket 7 is fixedly connected to the annular mounting bracket 62. The self-cleaning detection bucket 7 has multiple arc-shaped air blowing pipes 71 inside, and the arc-shaped air blowing pipes 71 are covered with air outlets. The side of the self-cleaning detection bucket 7 is provided with a suction port 72. The outer side of the self-cleaning detection bucket 7 is also provided with a second limiting slide rail 74. The self-cleaning detection bucket 7 also includes a vacuum cleaner 73 connected to the suction port 72.

[0068] The self-cleaning test chamber 7 is fixedly connected to the movable end of the second ball screw slide 61 via an annular mounting bracket 62, enabling stable horizontal movement. The self-cleaning test chamber 7 is internally equipped with multiple arc-shaped air pipes 71, each with evenly distributed air outlets for blowing gas into the chamber. Simultaneously, a suction port 72 is located on the side of the self-cleaning test chamber 7, which connects to a vacuum cleaner 73, forming a gas circulation path.

[0069] During the detection process, the arc-shaped blowing pipe 71 is started to blow gas to the inside of the self-cleaning detection barrel 7 through the air outlet, forming an internal airflow. At the same time, the dust collector 73 sucks the gas in the self-cleaning detection barrel 7 through the suction port 72, so that the airflow circulates in the self-cleaning detection barrel 7. The circulating airflow can effectively carry and roll up the dust and impurities in the self-cleaning detection barrel 7, and then be sucked into the dust collector 73, thereby realizing the automatic dust removal function of the self-cleaning detection barrel 7.

[0070] The outer side of the self-cleaning detection barrel 7 is also provided with a second limiting slide rail 74, which is used to install the limiting and fixing device 8.

[0071] The dust collector 73 is a prior art and will not be described here.

[0072] Referring to Figure 3 、 Figure 7 、 Figure 8 、 Figure 9 and Figure 10 , the limiting and fixing device 8 includes a lifting push plate 81 slidably installed on the third limiting slide rail 813. The lifting push plate 81 is provided with a plurality of limiting suction cups 812 and a plurality of third limiting slide rails 813 on the top thereof. The lifting push plate 81 is provided with a synchronous adjusting disc 82 on the bottom thereof. The synchronous adjusting disc 82 is provided with a plurality of inclined slide rails 83. The third limiting slide rail 813 is provided with a movable adjusting block 84 in the inside thereof. The movable adjusting block 84 is provided with a clamping shaft 841 on the top thereof and a sliding shaft 842 on the bottom thereof. The sliding shaft 842 is slidably connected with the inclined slide rail 83. The limiting and fixing device 8 further includes a second rotary driving device 85 for driving the synchronous adjusting disc 82 to rotate.

[0073] The guide wheel 811 is in close contact with the guide adjusting frame 63, which ensures accurate guidance along the preset path during movement. The lifting push plate 81 moves synchronously with the horizontal movement of the self-cleaning detection barrel 7 and can also be adjusted in height under the guidance of the guide adjusting frame 63 to meet the needs of different detection stages.

[0074] The top of the lifting push plate 81 is equipped with a plurality of limiting suction cups 812. The limiting suction cups 812 can generate an adsorption force after being started, which is used to stably adsorb the ceramic heating disc 11 on the lifting push plate 81. At the same time, the lifting push plate 81 is also provided with a plurality of third limiting slide rails 813, which provide sliding tracks for the movable adjusting block 84.

[0075] The movable adjusting block 84 is equipped with a clamping shaft 841 at its top and a sliding shaft 842 at its bottom. The sliding shaft 842 is slidably connected to the inclined slide rail 83 on the synchronous adjusting disk 82. When the second rotary drive device 85 is activated, it drives the synchronous adjusting disk 82 to rotate. The inclined slide rail 83 pushes the sliding shaft 842 to move as the synchronous adjusting disk 82 rotates, thereby causing the movable adjusting block 84 to move linearly along the third limit slide rail 813. Since multiple movable adjusting blocks 84 are pushed simultaneously, their respective clamping shafts 841 will retract synchronously, achieving effective clamping and positioning of the ceramic heating disk 11.

[0076] While the clamping shaft 841 retracts to clamp the ceramic heating plate 11, the limiting suction cup 812 also starts working, further enhancing the adsorption and limiting effect on the ceramic heating plate 11, ensuring that the ceramic heating plate 11 remains stable during the testing process, thereby improving the accuracy and reliability of the testing.

[0077] See Figure 3 and Figure 11 As shown, the connecting seat 9 is located below the limiting and fixing device 8. The connecting seat 9 is provided with an electrical connection port 93. The top of the connecting seat 9 is provided with an inclined blocking plate 91, and the inclined blocking plate 91 is provided with blocking teeth 92.

[0078] The connector 9 is positioned below the limiting and fixing device 8, ensuring that when the ceramic heating plate 11 is accurately placed on the limiting and fixing device 8, the heating element connection wire at its bottom can naturally droop down to the position of the connector 9. The connector 9 is specially designed with an electrical connection port 93, which allows the operator to quickly and accurately insert the heating element connection wire of the ceramic heating plate 11 into place, thereby establishing a stable electrical connection.

[0079] To ensure that the connecting wires do not come off due to movement or vibration during the testing process, an inclined baffle plate 91 is added to the connecting seat 9, and baffle teeth 92 are set on the baffle plate. The geometry and arrangement of these baffle teeth 92 have been carefully calculated to ensure that they can effectively hold the connecting wires in place and prevent them from accidentally coming off during the testing process.

[0080] During the testing process, when the movable adjustment platform 6 moves the self-cleaning testing bucket 7 and the limiting and fixing device 8 to the material discharge area, the operator can easily place the ceramic heating plate 11 onto the limiting and fixing device 8. At this time, the connecting wire at the bottom of the ceramic heating plate 11 will naturally droop down to the connecting seat 9 area. Subsequently, when the movable adjustment platform 6 moves the entire device back to its original position, the blocking teeth 92 on the inclined blocking plate 91 will immediately take effect, effectively blocking the connecting wire and ensuring that it remains firmly connected during subsequent testing.

[0081] Once the connecting line is firmly blocked on the connecting seat 9, the worker can easily insert the connecting line into the electric connecting port 93, thereby establishing the electric connection between the ceramic heating disc 11 and the detection device.

[0082] A flatness detection method of a semiconductor ceramic heating disc, comprising the following steps:

[0083] S1, the moving adjusting table 6 moves the semiconductor ceramic heating disc 11 to be detected to be directly below the fitting simulation board 4, and ensures the accurate relative position.

[0084] S2, the lifting docking device 2 is started, the rotating adjusting shaft 3, the fitting simulation board 4 and the moving detection device 5 are driven to synchronously descend, and the preliminary detection is prepared.

[0085] S3, the moving detection device 5 cooperates with the rotating adjusting shaft 3 to perform the preliminary detection, if unqualified, the detection is stopped, and if qualified, the test is continued.

[0086] S4, after the preliminary detection is qualified, the moving detection device 5 is reset, and the rotating adjusting shaft 3 drives the fitting simulation board 4 to descend and fit the ceramic heating disc 11.

[0087] S5, the connecting seat 9 supplies electric energy to start the ceramic heating disc 11 to heat the simulation, and the temperature sensor on the fitting simulation board 4 monitors the temperature change in real time until the specified detection temperature.

[0088] S6, after heating to the specified temperature, the rotating adjusting shaft 3 drives the fitting simulation board 4 to ascend and separate from the ceramic heating disc 11, and the moving detection device 5 detects again, compares the two data, analyzes the flatness change of the ceramic heating disc 11, and judges whether it is qualified.

[0089] The above embodiment only expresses one or several embodiments of the present application, and the description is more specific and detailed, but it cannot be understood as the limitation of the protection scope of the present application. It should be pointed out that, for ordinary skilled in the art, without departing from the concept of the present application, several modifications and improvements can be made, which belong to the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the appended claims.

Claims

1. A flatness detection device for a semiconductor ceramic heating disc, comprising a simulation detection device mounted on a workbench (1), characterized in that, The simulation detection device comprises a lifting docking device (2), a rotating adjusting shaft (3), a fitting simulation plate (4), a moving detection device (5), a moving adjusting table (6), a self-cleaning detection barrel (7), a limiting fixing device (8) and a connecting seat (9). The lifting docking device (2) is installed above the workbench (1). The rotating adjusting shaft (3) is installed at the shaft position of the lifting docking device (2). The fitting simulation plate (4) is installed at the bottom of the rotating adjusting shaft (3), the inside of the fitting simulation plate (4) is provided with a temperature sensor, the bottom of the fitting simulation plate (4) is provided with a simulation fitting surface, the simulation fitting surface is used for closely abutting with the detection surface of the ceramic heating disc (11) to be detected, so as to simulate the fitting state of the semiconductor and the ceramic heating disc (11) under the actual working condition, and the fitting simulation plate (4) is provided with a detection port (41). The moving detection device (5) is installed on the rotating adjusting shaft (3), and the detection end of the moving detection device (5) is vertically downward. The moving adjusting table (6) is arranged below the fitting simulation plate (4), and the moving end of the moving adjusting table (6) horizontally slides. The self-cleaning detection barrel (7) is installed on the moving adjusting table (6). The limiting fixing device (8) is installed in the self-cleaning detection barrel (7), the top of the limiting fixing device (8) is used for supporting the ceramic heating disc (11) to be detected, and the limiting fixing device (8) is in sliding connection with the self-cleaning detection barrel (7). The connecting seat (9) is installed below the moving adjusting table (6), and the connecting seat (9) is used for connecting the heating element of the ceramic heating disc (11).

2. The device for detecting the flatness of a semiconductor ceramic heating disc according to claim 1, wherein, The lifting docking device (2) comprises a fixed mounting frame (21) installed on the workbench (1), and a first linear driver (22) is installed on the fixed mounting frame (21).

3. The device for detecting the flatness of a semiconductor ceramic heating disc according to claim 2, characterized in that, The shaft position of the rotating adjusting shaft (3) is provided with a first limiting sliding rail (31), the outer side of the rotating adjusting shaft (3) is provided with a plurality of limiting installation grooves (32), a rotating slip ring (35) is installed on the limiting installation groove (32), the rotating slip ring (35) is in rotating connection with the docking abutting frame (23), and a second linear driver (34) is installed above the rotating adjusting shaft (3).

4. The device for detecting the flatness of a semiconductor ceramic heating disc according to claim 1, wherein, The inside of the detection port (41) is provided with a rotating shielding plate (42), the rotating shielding plate (42) is in rotating connection with the fitting simulation plate (4), an elastic clamping spring (43) is installed between the rotating shielding plate (42) and the fitting simulation plate (4), and the fitting simulation plate (4) further comprises a trigger top rod (44) installed on the moving detection device (5).

5. The device for detecting the flatness of a semiconductor ceramic heating disc according to claim 3, characterized in that, The movement detection device (5) comprises a third linear driver (51) mounted in the interior of the first limiting slide rail (31), and further comprises a first ball screw sliding table (52) mounted in the interior of the first limiting slide rail (31), wherein the first ball screw sliding table (52) is in sliding connection with the first limiting slide rail (31), the first ball screw sliding table (52) is connected with the output end of the third linear driver (51), and a plane detector (53) is mounted at the movable end of the first ball screw sliding table (52), and the plane detector (53) is used for detecting the flatness of the ceramic heating disc (11).

6. The device for detecting the flatness of a semiconductor ceramic heater disc according to claim 1, wherein The movement adjusting table (6) comprises a guide adjusting frame (63) mounted on the workbench (1), and the guide adjusting frame (63) is used for guiding the movement of the limiting and fixing device (8), wherein a second ball screw sliding table (61) is mounted on the guide adjusting frame (63), and a ring-shaped mounting frame (62) is mounted at the movable end of the second ball screw sliding table (61).

7. The device for detecting the flatness of a semiconductor ceramic heater disc according to claim 6, wherein The self-cleaning detection barrel (7) is fixedly connected with the ring-shaped mounting frame (62), a plurality of arc-shaped air blowing pipes (71) are arranged in the interior of the self-cleaning detection barrel (7), the arc-shaped air blowing pipes (71) are provided with a plurality of air outlet holes, a suction port (72) is arranged at the side of the self-cleaning detection barrel (7), and a second limiting slide rail (74) is further arranged outside the self-cleaning detection barrel (7), and the self-cleaning detection barrel (7) further comprises a dust collector (73) connected with the suction port (72).

8. The device for detecting the flatness of a semiconductor ceramic heating disc according to claim 7, characterized in that, The limiting and fixing device (8) comprises a lifting push plate (81) slidably mounted on the third limiting slide rail (813), guide wheels (811) are mounted on the two sides of the lifting push plate (81) and abut against the guide adjusting frame (63), a plurality of limiting suction cups (812) and a plurality of third limiting slide rails (813) are arranged on the top of the lifting push plate (81), a synchronous adjusting disc (82) is mounted on the bottom of the lifting push plate (81), a plurality of inclined slide rails (83) are arranged on the synchronous adjusting disc (82), an active adjusting block (84) is mounted in each third limiting slide rail (813), a clamping shaft (841) is arranged on the top of the active adjusting block (84), a sliding shaft (842) is mounted on the bottom of the active adjusting block (84), and the sliding shaft (842) is in sliding connection with the inclined slide rail (83).

9. The device for detecting the flatness of a semiconductor ceramic heater disc according to claim 1, wherein The connecting seat (9) is arranged below the limiting and fixing device (8), the connecting seat (9) is provided with an electrical connection port (93), and an inclined blocking plate (91) is arranged on the top of the connecting seat (9), and the inclined blocking plate (91) is provided with blocking teeth (92).

10. A method for detecting the flatness of a semiconductor ceramic heating disc, using the flatness detecting device for a semiconductor ceramic heating disc according to any one of claims 1-9, characterized in that, The method comprises the following steps: S1, the movement adjusting table (6) moves the semiconductor ceramic heating disc (11) to be detected to be positioned directly below the fitting simulation board (4), so as to ensure the relative position accuracy; S2, the lifting butt joint device (2) is started, the rotating adjusting shaft (3), the fitting simulation board (4) and the movement detection device (5) are driven to be lowered synchronously, and preliminary detection is prepared; S3, the movement detection device (5) cooperates with the rotating adjusting shaft (3) to perform preliminary detection, and if the preliminary detection is unqualified, the detection is stopped, and if the preliminary detection is qualified, the test is continued; S4, after the preliminary detection is qualified, the mobile detection device (5) resets, the rotary adjusting shaft (3) drives the fitting simulation board (4) to descend and fit the ceramic heating disc (11); S5: the connecting seat (9) transmits electric energy to start the ceramic heating disc (11) to heat the simulation, and the temperature sensor on the fitting simulation board (4) monitors the temperature change in real time to the specified detection temperature; S6, after heating to the specified temperature, the rotary adjusting shaft (3) drives the fitting simulation board (4) to rise and separate from the ceramic heating disc (11), and the mobile detection device (5) detects again, compares the data of two times, analyzes the flatness change of the ceramic heating disc (11), and judges whether it is qualified.

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