An ultrasonic scanning gantry conveying mechanism for sheet substrates

Abstract

This application relates to the technical field of transportation equipment, and in particular to an ultrasonic scanning gantry conveying mechanism for sheet substrates. The mechanism includes a gantry frame with grippers for holding the substrate. Each gripper includes a gripper frame, on which a suction cup for adsorbing the upper surface of the substrate is vertically mounted. Side grippers for holding the sides of the substrate are horizontally slidably connected to the gripper frame. A vertically arranged micro-motion track is located on the side of the side gripper facing the substrate. The outer wall of the micro-motion track has several grooves for holding the sides of the substrate, and these grooves are horizontally and evenly distributed on the outer wall of the micro-motion track. This application's solution, through the arrangement of the micro-motion track and the combination of the side grippers and suction cups, can ensure the accuracy and stability of the sheet substrate during transportation, and also protect the substrate from damage.

Description

Technical Field

[0001] This application relates to the technical field of transportation equipment, and in particular to an ultrasonic scanning gantry conveying mechanism for sheet substrates. Background Technology

[0002] Ultrasonic scanning microscopy (SAT) is a machine that uses pure water as a medium to transmit ultrasonic signals and detects materials of different densities by utilizing the different reflection rates and energies of high-frequency ultrasonic waves.

[0003] Ultrasonic scanning microscopes have a wide range of applications and can scan and analyze various materials, such as chips, profiles, and plates. Currently, sample handling typically involves using robotic arms to hold and transport the samples.

[0004] Currently, there are two common types of robotic arms for material handling: gripper type and suction cup type. Gripper type robotic arms grasp and transport samples along their sides, and are generally suitable for thicker samples. The lateral movement distance of the grippers on the sides of a gripper type robotic arm is usually fixed. After gripping the sample, regardless of the initial position of the sample, the sample and the robotic arm are always coaxially aligned. However, when gripper type robotic arms grasp thinner samples, the contact area is smaller, resulting in poorer gripping stability.

[0005] Suction cup robotic arms use suction cups to adhere and hold samples to their surfaces, typically suitable for samples with large surface areas and thin thicknesses. The suction cups increase the contact area with the sample, increasing the gripping force and ensuring stability during transport. However, suction cup robotic arms require high precision in the initial position of the sample. If the sample's initial position is not directly aligned with the suction cup robotic arm, the suction cup can still pick it up due to its large surface area. In other words, even with a slight positional offset, the suction cup robotic arm can still grasp the sample, but it will not be directly aligned with it. This means that when the suction cup robotic arm lowers the sample to another station, different samples will be in different positions, hindering the subsequent processing steps.

[0006] When combining gripper-type and suction cup-type robotic arms to transport sheet-like samples, there must be a specific order of their actions. If the suction cup first adsorbs the sample, the sample is already fixed, and the gripper's adjustment of the sample's position by holding its sides can easily damage the sample's sides. If the gripper first adjusts the sample's position by holding its sides before adsorbing it with the suction cup, the center of the substrate will arch upwards when the gripper holds it around the perimeter, causing deformation and affecting the substrate's quality. Alternatively, the substrate may move upwards as a whole, with its sides constantly rubbing against the grippers, easily damaging the substrate's edges. Summary of the Invention

[0007] To address the aforementioned issues, this application provides an ultrasonic scanning gantry conveying mechanism for sheet-like substrates.

[0008] The ultrasonic scanning gantry conveying mechanism for sheet substrates provided in this application adopts the following technical solution:

[0009] An ultrasonic scanning gantry conveying mechanism for sheet substrates includes a gantry frame with grippers for holding the substrate. Each gripper includes a gripper frame with a vertically mounted suction cup for adsorbing the upper surface of the substrate. Side grippers for holding the sides of the substrate are slidably connected to the gripper frame. A vertically positioned micro-motion track is provided on the side of the side grippers facing the substrate. The outer wall of the micro-motion track has a plurality of grooves for holding the sides of the substrate, and the grooves are horizontally and evenly distributed on the outer wall of the micro-motion track.

[0010] By adopting the above technical solution, when the gripper holds the substrate, the side grippers hold the sides of the substrate. Since the movement stroke of the side grippers is fixed, even if the initial position of the substrate is deviated when the side grippers grasp it, the substrate can be aligned with the grippers after gripping, thus correcting the position of the grippers. After the side grippers hold the substrate, the suction cups adhere to the upper surface of the substrate, thereby improving the gripping force and ensuring stability during transportation. However, when the suction cups adhere to the substrate, the substrate itself is thin and lightweight. When the substrate is subjected to the suction force of the suction cups, if ordinary grippers hold the substrate from all sides, the center of the substrate will arch upwards, causing deformation of the substrate and affecting its quality. Alternatively, the substrate may move upwards as a whole, and the sides of the substrate will rub against the side grippers continuously, easily causing damage to the edges of the substrate.

[0011] Therefore, conventional combinations of suction cups and grippers can easily damage the substrate, affecting its quality. In this application, the side grippers hold the substrate while the micro-motion track contacts the side edge of the substrate, and the groove defines the side edge. When the suction cup adsorbs the substrate, the side edge moves upwards under force, and the micro-motion track rotates under the influence of the substrate, thus keeping the micro-motion track and the side edge of the substrate relatively stationary, thereby protecting the side edge of the substrate. This application's solution, through the micro-motion track and the combination of side grippers and suction cups, ensures the accuracy and stability of the sheet substrate during transportation while also protecting the substrate from damage.

[0012] Preferably, the side claw has a horizontal buffer groove on the side facing the substrate, a buffer block is horizontally slidably connected in the buffer groove, the micro-motion track is installed on the buffer block and one side of the micro-motion track extends out from the opening of the buffer groove, and a buffer spring is provided between the buffer block and the buffer groove.

[0013] By adopting the above technical solution, when the side claws clamp the substrate, the buffer block squeezes the buffer spring, and the buffer spring provides buffer protection for the substrate, preventing damage to the side of the substrate.

[0014] Preferably, the buffer block has a vertical mounting groove, and mounting blocks are slidably connected to both ends of the mounting groove. The mounting blocks are connected to the ends of the mounting groove by mounting springs. Mounting wheels are rotatably connected to the mounting blocks, and the micro-motion track is wound around the two mounting wheels.

[0015] By adopting the above technical solution, both ends of the micro-track are connected to the mounting wheels, and the mounting wheels are movably connected to the buffer block through the mounting block. When the side of the substrate contacts the micro-track and squeezes the micro-track, the micro-track deforms, the tension changes, and the pressure is transmitted to the mounting wheel. The mounting wheel transmits the pressure to the mounting spring through the mounting block, thereby balancing the tension of the micro-track.

[0016] Preferably, the outer wall of the micro-motion track is fixed with several strip-shaped protrusions, and grooves are formed between the protrusions.

[0017] By adopting the above technical solution, when the side of the substrate comes into contact with the micro-motion track, the protrusion clamps the substrate and supports the bottom of the substrate, thereby improving the stability of the substrate when it slides up and down.

[0018] Preferably, the protrusion includes an upper surface and a lower guide surface. The upper surface includes a horizontal support surface and an inclined upper guide surface. One end of the support surface is fixedly connected to the micro-motion track, and the other end is connected to the upper guide surface. The end of the upper guide surface away from the support surface is inclined downward and connected to the end of the lower guide surface. The lower guide surface is inclined, and the end of the lower guide surface near the micro-motion track is located below the other end and is fixedly connected to the micro-motion track.

[0019] By adopting the above technical solution, when the micro-motion track contacts the substrate, if the substrate is directly opposite the end of the protrusion, the substrate contacts the upper or lower guide surface, the inclined upper or lower guide surface guides the substrate and introduces it into the groove, and the support surface supports the bottom of the substrate, thereby improving the stability of the substrate clamping.

[0020] Preferably, the connection between the support surface and the upper guide surface is rounded.

[0021] By adopting the above technical solution, rounded corners protect the substrate.

[0022] Preferably, the system also includes a conveyor belt for conveying the substrate, the conveyor belt comprising two parallel belt bodies with a clamping gap between the two belt bodies for accommodating side claws, and an adjustment seat at the end of the conveyor belt, on which adjustment plates located on both sides of the conveyor belt are horizontally slidably connected, the sliding direction of the adjustment plates being perpendicular to the sliding direction of the side claws.

[0023] By adopting the above technical solution, the conveyor belt transports the substrate. When the substrate is transported to the end of the conveyor belt, two adjusting plates move towards each other to adjust and correct the lateral position of the substrate. The side claws are located in the clamping gap to clamp the substrate, thereby adjusting and correcting the longitudinal position of the substrate. The two work together to correct the horizontal position of the substrate, ensuring the accuracy of the substrate.

[0024] Preferably, the claw frame is provided with a vertical air pipe, the lower end of which is provided with an elastic corrugated tube, and the suction cup is installed at the lower end of the corrugated tube.

[0025] By adopting the above technical solution, the suction cup adsorbs the substrate, the substrate moves upward, and the corrugated tube shrinks, which buffers the movement distance of the substrate and ensures the stability of the substrate transportation.

[0026] In summary, this application includes the following beneficial technical effects:

[0027] The micro-motion track clamps the side of the substrate, which can not only adjust the horizontal position of the substrate, but also move up and down synchronously with the substrate, thereby protecting the side of the substrate and preventing damage. Attached Figure Description

[0028] Figure 1 This is a schematic diagram of the overall structure of the embodiment;

[0029] Figure 2 This is a schematic diagram of the gripper structure in the embodiment;

[0030] Figure 3 This is a schematic diagram of the side claw structure in the embodiment;

[0031] Figure 4 This is a schematic diagram of the micro-motion track in the embodiment.

[0032] Explanation of reference numerals in the attached figures:

[0033] 1. Gantry frame; 11. Clamping rod; 2. Gripper; 3. Gripper frame; 31. Vent pipe; 32. Corrugated pipe; 4. Suction cup; 5. Side gripper; 51. Buffer groove; 52. Buffer block; 521. Mounting groove; 522. Mounting block; 523. Mounting spring; 524. Mounting wheel; 53. Buffer spring; 6. Micro-motion track; 61. Groove; 62. Protrusion; 621. Support surface; 622. Upper guide surface; 623. Lower guide surface; 7. Conveyor belt; 71. Belt body; 72. Clamping gap; 73. Adjusting seat; 74. Adjusting plate. Detailed Implementation

[0034] The present application will be further described in detail below with reference to all the accompanying drawings.

[0035] Example

[0036] This application discloses an ultrasonic scanning gantry conveying mechanism for sheet-like substrates, referring to... Figure 1 It includes a gantry frame 1 and a conveyor belt 7. The gantry frame 1 is horizontally slidably connected to a vertically arranged clamping rod 11, and the clamping rod 11 is vertically slidably connected to a gripper 2 for clamping the substrate.

[0037] Reference Figure 1 The conveyor belt 7 is used to transport the substrate. The conveyor belt 7 includes two parallel belt bodies 71, with a clamping gap 72 formed between the two belt bodies 71 to accommodate the side claws 5. The width of the substrate is greater than the width of the clamping gap 72. An adjusting seat 73 is provided at the end of the conveyor belt 7. Adjusting plates 74 located on both sides of the conveyor belt 7 are horizontally slidably connected to the adjusting seat 73. The adjusting plates 74 are connected to drive cylinders, and the sliding direction of the adjusting plates 74 is perpendicular to the conveying direction of the conveyor belt 7. When the output shafts of both drive cylinders are fully extended simultaneously, the distance between the two adjusting plates 74 is equal to the width of the substrate.

[0038] Reference Figure 1 The substrate is conveyed to the end via conveyor belt 7. Two adjusting plates 74 extend under the action of the drive cylinder to push the substrate on both sides, thereby adjusting the horizontal position of the substrate. After adjustment, the drive cylinder retracts, and the adjusting plates 74 release the substrate. Then, the gripper 2 removes the substrate.

[0039] Reference Figure 1 and Figure 2 The gripper 2 includes a gripper frame 3, on which a vent pipe 31 is vertically mounted. A flexible corrugated pipe 32 is mounted at the lower end of the vent pipe 31, and a suction cup 4 for adsorbing the upper surface of the substrate is installed at the lower end of the corrugated pipe 32. The suction cup 4 adsorbs the upper surface of the substrate, ensuring the adsorption force of the suction cup 4 on the substrate, thereby improving the stability of the gripper 2 in transporting the substrate.

[0040] Reference Figure 2 and Figure 3A vertically arranged side claw 5 is horizontally slidably connected to the claw holder 3, and the side claws 5 are arranged in pairs on both sides of the claw holder 3. The two side claws 5 are controlled by two cylinders respectively, and the two side claws 5 move synchronously towards or away from each other. The movement direction of the side claws 5 is perpendicular to the movement direction of the adjustment plate 74.

[0041] Reference Figure 2 and Figure 3 The side claws 5 extend into the clamping gap 72 to clamp the two sides of the substrate and adjust the longitudinal position of the substrate in the horizontal direction to ensure that the substrate and the claw holder 3 are aligned. The side claws 5 and the adjustment plate 74 cooperate with each other to ensure the positional accuracy of the substrate and the claw holder 3.

[0042] Reference Figure 2 and Figure 3 A horizontal buffer groove 51 is provided on the side of the side claw 5 facing the substrate. A buffer block 52 is horizontally slidably connected in the buffer groove 51, and a buffer spring 53 is connected between the buffer block 52 and the buffer groove 51. A vertical mounting groove 521 is provided on the buffer block 52, and mounting blocks 522 are slidably connected to both ends of the mounting groove 521. The mounting blocks 522 are connected to the ends of the mounting groove 521 by mounting springs 523. Mounting wheels 524 are rotatably connected to the mounting blocks 522, and a micro-motion track 6 is wound between the two mounting wheels 524. The micro-motion track 6 extends from the opening of the buffer groove 51 to contact the side of the substrate.

[0043] Reference Figure 3 and Figure 4 Several horizontally arranged strip-shaped protrusions 62 are fixed on the micro-motion track 6, and grooves 61 for clamping the side of the substrate are formed between the protrusions 62.

[0044] Reference Figure 3 and Figure 4 When the side claw 5 clamps the substrate, the micro-motion track 6 contacts the side of the substrate, and the side of the substrate is embedded in the groove 61. The buffer spring 53 provides buffer protection for the substrate. When the substrate squeezes the micro-motion track 6, the micro-motion track 6 transmits the pressure to the mounting spring 523, thereby adjusting its own tension.

[0045] Reference Figures 2 to 4 The side claws 5 clamp the sides of the substrate and adjust its position. Then, the suction cups 4 adsorb and fix the upper surface of the substrate. The substrate moves upward under suction, and the substrate simultaneously drives the micro-motion tracks 6 on both sides to move upward. The micro-motion tracks 6 are fixed relative to the sides of the substrate, thereby protecting the substrate and preventing damage.

[0046] Reference Figures 2 to 4The protrusion 62 includes an upper surface and a lower guide surface 623. The upper surface includes a horizontal support surface 621 and an inclined upper guide surface 622. One end of the support surface 621 is fixedly connected to the micro-motion track 6, and the other end is connected to the upper guide surface 622. The connection between the support surface 621 and the upper guide surface 622 is rounded.

[0047] Reference Figures 2 to 4 The upper guide surface 622 is inclined downward at one end away from the support surface 621 and connected to the end of the lower guide surface 623. The lower guide surface 623 is inclined, and the end of the lower guide surface 623 near the micro track 6 is located below the other end and is fixedly connected to the micro track 6.

[0048] Reference Figures 2 to 4 When the micro-motion track 6 contacts the substrate, if the substrate is directly opposite the end of the protrusion 62, the substrate contacts the upper guide surface 622 or the lower guide surface 623. The inclined upper guide surface 622 or the lower guide surface 623 guides the substrate and introduces it into the groove 61. The support surface 621 supports the bottom of the substrate, improving the stability of the substrate clamping.

[0049] The implementation principle of the ultrasonic scanning gantry conveying mechanism for sheet substrates in this application embodiment is as follows: The conveyor belt 7 transports the substrate to the end, the adjusting plate 74 clamps and adjusts the substrate and then releases it, the gripper 2 moves to the substrate under the adjustment of the gantry frame 1, the gripper 2 is lowered, the side gripper 5 clamps the substrate, the micro-motion track 6 contacts the side of the substrate, and the suction cup 4 adsorbs and fixes the substrate. The gripper 2 descends under the adjustment of the gantry frame 1 and the substrate is transported to the next station.

[0050] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A sheet substrate ultrasonic scanning gantry conveying mechanism, comprising a gantry frame (1), wherein the gantry frame (1) is provided with grippers (2) for clamping the substrate, characterized in that: The gripper (2) includes a gripper frame (3), on which a suction cup (4) for adsorbing the upper surface of the substrate is vertically provided. A side gripper (5) for clamping the side of the substrate is horizontally slidably connected to the gripper frame (3). A vertically arranged micro-movement track (6) is provided on the side of the side gripper (5) facing the substrate. The outer wall of the micro-movement track (6) is provided with a plurality of grooves (61) for clamping the side of the substrate. The grooves (61) are horizontally and evenly opened on the outer wall of the micro-movement track (6).

2. The ultrasonic scanning gantry conveying mechanism for sheet substrates according to claim 1, characterized in that: The side claw (5) has a horizontal buffer groove (51) on the side facing the substrate. A buffer block (52) is horizontally slidably connected in the buffer groove (51). The micro-motion track (6) is installed on the buffer block (52) and one side of the micro-motion track (6) extends out from the opening of the buffer groove (51). A buffer spring (53) is provided between the buffer block (52) and the buffer groove (51).

3. The ultrasonic scanning gantry conveying mechanism for sheet substrates according to claim 2, characterized in that: The buffer block (52) has a vertical mounting groove (521) and mounting blocks (522) are slidably connected to both ends of the mounting groove (521). The mounting blocks (522) and the ends of the mounting groove (521) are connected by mounting springs (523). Mounting wheels (524) are rotatably connected to the mounting blocks (522) and the micro-motion track (6) is wound around the two mounting wheels (524).

4. The ultrasonic scanning gantry conveying mechanism for sheet substrates according to claim 1, characterized in that: The outer wall of the micro-motion track (6) is fixed with a number of strip-shaped protrusions (62), and a groove (61) is formed between the protrusions (62).

5. The ultrasonic scanning gantry conveying mechanism for sheet substrates according to claim 4, characterized in that: The protrusion (62) includes an upper surface and a lower guide surface (623). The upper surface includes a horizontal support surface (621) and an inclined upper guide surface (622). One end of the support surface (621) is fixedly connected to the micro-motion track (6), and the other end is connected to the upper guide surface (622). The end of the upper guide surface (622) away from the support surface (621) is inclined downward and connected to the end of the lower guide surface (623). The lower guide surface (623) is inclined. The end of the lower guide surface (623) near the micro-motion track (6) is located below the other end and is fixedly connected to the micro-motion track (6).

6. The ultrasonic scanning gantry conveying mechanism for sheet substrates according to claim 5, characterized in that: The connection between the support surface (621) and the upper guide surface (622) is rounded.

7. The ultrasonic scanning gantry conveying mechanism for sheet substrates according to claim 1, characterized in that: It also includes a conveyor belt (7) for conveying substrates, the conveyor belt (7) comprising two parallel belt bodies (71) forming a clamping gap (72) between the two belt bodies (71) for accommodating the side claws (5), and an adjustment seat (73) provided at the end of the conveyor belt (7), on which adjustment plates (74) located on both sides of the conveyor belt (7) are horizontally slidably connected, the sliding direction of the adjustment plates (74) being perpendicular to the sliding direction of the side claws (5).

8. The ultrasonic scanning gantry conveying mechanism for sheet substrates according to claim 1, characterized in that: The claw frame (3) is provided with a vertical air pipe (31), and the lower end of the air pipe (31) is provided with an elastic corrugated pipe (32). The suction cup (4) is installed at the lower end of the corrugated pipe (32).

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