Special EP-grade pipeline for conveying photoetching machine gas

Abstract

The invention belongs to the field of semiconductor manufacturing, and particularly relates to a special EP-grade pipeline for conveying photoetching machine gas. The special EP-grade pipeline comprises a fixed seat, and a hydraulic disc is fixedly connected to the top end of the fixed seat; the top end of the hydraulic disc is fixedly connected with a fixed box; the top end of the fixed box is slidably connected with a first sliding block. The top end of the first sliding block is in threaded connection with a first bolt. The side wall of the first sliding block is in threaded connection with a second bolt. The bottom end of the first bolt is rotationally connected with a first clamp. The top end of the first clamp is fixedly connected with a pair of sliding rods. The sliding rod is in sliding connection with the middle of the first sliding block. The horizontal position of the air pipe can be adjusted by pushing the first sliding block, the overall height can be adjusted by pushing the hydraulic disc, the installation accuracy of the air pipe can be improved, the situation that due to fixed installation, the position deviation occurs, the pipeline connecting position is staggered, and the sealing effect is weakened is reduced, and stable conveying of photoetching gas is further improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of semiconductor manufacturing, in particular to the EP pipeline dedicated to conveying photoetching machine gas. BACKGROUND

[0002] Photoetching machine is the core equipment of chip manufacturing, which uses ultraviolet light to project micron or nanometer fine circuit pattern on the silicon wafer coated with photoresist through photoetching mask with circuit pattern, so as to carve the core circuit structure of chip on the silicon wafer. The technology is extremely complex, and the alignment and exposure of nanometer level precision need to be realized in super-clean environment.

[0003] EP pipeline is a precision pipeline for conveying ultra-high purity gas. The inner wall is treated by electrolytic polishing. Laser calibration and full-automatic welding are used to ensure no leakage and pollution. It is mainly used for conveying photoresist vapor and special etching gas in photoetching machine and other semiconductor equipment, and guarantees the purity and stability of gas, which is a key supporting component for chip manufacturing.

[0004] The existing EP pipeline is mostly fixed during installation. It is cumbersome to fine-tune the installation error, which leads to poor final installation effect. Therefore, the EP pipeline dedicated to conveying photoetching machine gas is proposed to solve the above problems. SUMMARY

[0005] In order to make up for the deficiencies of the prior art and solve at least one technical problem proposed in the background art.

[0006] The technical scheme adopted by the present application to solve its technical problems is: the conveying photolithography machine gas special EP-grade pipeline, including a fixed seat, the top end of the fixed seat is fixedly connected with a hydraulic disc; the top end of the hydraulic disc is fixedly connected with a fixed box; the top end of the fixed box is slidably connected with a first sliding block; the top end of the first sliding block is threadedly connected with a first bolt; the side wall of the first sliding block is threadedly connected with a second bolt; the bottom end of the first bolt is rotatably connected with a first clamp; a pair of slide rods are fixedly connected with the top end of the first clamp; the slide rods are slidably connected in the middle of the first sliding block; the side wall of the first sliding block is fixedly connected with a first support rod; the bottom end of the first support rod is fixedly connected with a second sliding block; the second sliding block is slidably connected at the bottom end of the fixed box; the top end of the second sliding block is fixedly connected with a second clamp; the top end of the first clamp and the second clamp is fixedly connected with a flexible pad; the middle of the first clamp and the second clamp is provided with an air pipe; the side wall of the second sliding block is fixedly connected with a pair of second support rods; the top end of the second support rods is fixedly connected with a flexible block; by rotating the first bolt to drive the first clamp to approach the top of the air pipe, and cooperating with the second clamp to fix the air pipe in the middle, the air pipe can be in a stable state during installation, the stability of the air pipe during conveying gas is increased, the horizontal position of the air pipe can be adjusted by pushing the first sliding block, the overall height can be adjusted by pushing the hydraulic disc, the accuracy of the air pipe during installation can be increased, the position deviation caused by fixed installation is reduced, the misalignment sealing effect of the pipeline connection is caused, the support of the flexible block on the air pipe can reduce the gravity, the gravity sag caused by the long length of the air pipe is reduced, and the stable conveying of the photolithography gas is further increased.

[0007] Preferably, the side wall of the fixed box is fixedly connected with a pair of clamping seats; the clamping seats are symmetrically arranged on the side wall of the fixed box; the top end of the clamping seat is fixedly connected with a top plate; the side wall of the fixed box is fixedly connected with a support seat; the bottom end of the support seat is fixedly connected with a damping spring telescopic rod; the bottom end of the damping spring telescopic rod is fixedly connected with a third sliding block; the third sliding block is slidably connected with the fixed box; the bottom end of the third sliding block is fixedly connected with a fixed pin; the side wall of the fixed box is fixedly connected with a plug rod; by inserting the plug rod into the clamping seat, the fixed pin is made to pop back to the fixed plug rod by the elastic force of the damping spring telescopic rod, the complex fixing operation is reduced, and the splicing of multiple fixed boxes can be completed by only inserting the plug rod into the clamping seat, the installation time is shortened when the air pipe needs to be extended for gas conveying, and the third sliding block in cooperation with the damping spring telescopic rod can further increase the speed of the fixed pin when inserted into the clamping seat, and the whole can be more stable.

[0008] Preferably, the inner side wall of the clamping seat is provided with a pair of protrusions; a pair of grooves are formed in the side wall of the plug rod; the side wall of the plug rod is fixedly connected with a rubber pad; the splicing of the protrusions and the grooves can more accurately fix the plug rod, reduce the shaking of the plug rod in the clamping seat, and the rubber pad can further increase the friction with the clamping seat to increase the connection effect between multiple fixed boxes.

[0009] Preferably, the bottom end of the fixing seat is threadedly connected with a plurality of fixing bolts; the top end of the fixing bolt is fixedly connected with a handle; by rotating the plurality of fixing bolts, the fixing seat can be fixed on the ground or wall surface or other different places, thereby further increasing the versatility of the fixing box during installation of the gas pipe, so that the gas conveying is stable after the fixing seat is fixed.

[0010] Preferably, the side wall of the fixing box is provided with a first magnetic plate; the side wall of the first magnetic plate is provided with a flexible cloth; the side wall of the flexible cloth is fixedly connected with a second magnetic plate; by wrapping and blocking the gap between the two spliced fixing boxes through the flexible cloth, the sealing performance of the spliced fixing box can be further improved, the installation steps can be reduced, and the splicing efficiency can be improved; the flexible cloth can also reduce the entry of impurities and moisture into the fixing box through the gap.

[0011] Preferably, the bottom end of the fixing box is fixedly connected with a gas detection module; the bottom end of the fixing box is fixedly connected with a sensing head; the sensing head is uniformly distributed at the bottom end of the fixing box; by detecting the gas environment in the fixing box through the gas detection module, the sensing head is uniformly distributed at the bottom end of the fixing box, so that the gas can be detected from multiple positions, the detection deviation caused by uneven gas distribution is reduced, and the safety during gas conveying is further increased.

[0012] Preferably, the top end of the fixing box is fixedly connected with a temperature control plate; a pair of sealing cloths are fixedly connected to the side wall of the fixing box; by controlling the temperature in the fixing box through the temperature control plate, the gas can always maintain a constant temperature during conveying in the gas pipe, and the abnormality of the gas caused by temperature change is reduced; the sealing cloth can block the temperature diffusion in the fixing box, and the interference of the temperature around the fixing box on the temperature in the fixing box can be further reduced.

[0013] Preferably, a plurality of third supporting rods are fixedly connected to the side wall of the fixing box; a shielding plate is fixedly connected to the top end of the third supporting rod; by the shielding plate, the heat source can be reflected, the heat transfer to the inside of the fixing box is blocked, the temperature in the fixing box is more uniform, and the stable operation of the temperature control plate in the fixing box is increased.

[0014] The present application has the advantages that: 1. The EP-grade pipeline for conveying photoetching machine gas disclosed in the present application can drive the first clamp to approach the top of the gas pipe by rotating the first bolt, fix the gas pipe in the middle by cooperating with the second clamp, keep the gas pipe in a stable state during installation, increase the stability of the gas pipe during conveying of the gas, adjust the horizontal position of the gas pipe by pushing the first sliding block, adjust the overall height by pushing the hydraulic disc, increase the accuracy during installation of the gas pipe, reduce the positional deviation caused by fixing and installation, weaken the sealing effect of the pipeline connection due to the positional deviation, and reduce the gravity of the gas pipe by the flexible block, further increase the stable conveying of the photoetching gas.

[0015] 2. The EP-grade pipeline for conveying lithography machine gas, by inserting the insertion rod into the card seat, the elastic force of the damping spring telescopic rod makes the fixing pin pop back to fix the insertion rod, reducing the complex fixing operation, only by inserting the insertion rod into the card seat can the splicing of multiple fixed boxes be completed, further increasing the length of the gas pipeline required for gas conveying, shortening the installation time, the third sliding block in sliding connection with the fixed box cooperates with the damping spring telescopic rod, which can further increase the speed of the fixing pin when inserted into the card seat, and also make the whole more stable. BRIEF DESCRIPTION OF DRAWINGS

[0016] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the drawings needed to be used in the embodiments or the prior art description will be briefly introduced below. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can also be obtained by those skilled in the art without creative labor.

[0017] Figure 1 is the schematic diagram of the main body of the present application; Figure 2 is the structural schematic diagram of the flexible cloth in the present application; Figure 3 is the structural schematic diagram of the hydraulic disc in the present application; Figure 4 is the structural schematic diagram of the card seat in the present application; Figure 5 is the structural schematic diagram of the second clamp in the present application; Figure 6 is the structural schematic diagram of the second supporting rod in the present application.

[0018] In the figure: 1, fixed seat; 11, hydraulic disc; 12, fixed box; 13, first sliding block; 14, first bolt; 15, second bolt; 16, first clamp; 17, sliding rod; 18, first supporting rod; 19, second sliding block; 110, second clamp; 111, flexible pad; 112, gas pipe; 113, second supporting rod; 114, flexible block; 2, card seat; 21, top plate; 22, supporting seat; 23, damping spring telescopic rod; 24, third sliding block; 25, fixing pin; 26, insertion rod; 3, protruding block; 31, recess; 32, rubber pad; 4, fixing bolt; 41, handle; 5, first magnetic plate; 51, flexible cloth; 52, second magnetic plate; 6, gas detection module; 61, inductive head; 7, temperature control plate; 71, sealing cloth; 8, third supporting rod; 81, shielding plate. DETAILED DESCRIPTION

[0019] Clearly, the described embodiments are only a part of the embodiments of the present application, but not all the embodiments. Based on the embodiments in the present application, all the other embodiments obtained by a person of ordinary skill in the art without creative effort should belong to the protection scope of the present application.

[0020] The specific embodiments are given below.

[0021] Please refer to Figures 1 to 5As shown, the special EP pipeline for conveying photoetching machine gas provided by the embodiment of the present application comprises a fixing base 1, a hydraulic disc 11 is fixedly connected to the top end of the fixing base 1, a fixing box 12 is fixedly connected to the top end of the hydraulic disc 11, a first sliding block 13 is slidingly connected to the top end of the fixing box 12, a first bolt 14 is threadedly connected to the top end of the first sliding block 13, a second bolt 15 is threadedly connected to the side wall of the first sliding block 13, a first clamp 16 is rotatably connected to the bottom end of the first bolt 14, a pair of sliding rods 17 are fixedly connected to the top end of the first clamp 16, the sliding rods 17 are slidingly connected in the middle part of the first sliding block 13, a first supporting rod 18 is fixedly connected to the side wall of the first sliding block 13, a second sliding block 19 is fixedly connected to the bottom end of the first supporting rod 18, the second sliding block 19 is slidingly connected to the bottom end of the fixing box 12, a second clamp 110 is fixedly connected to the top end of the second sliding block 19, a flexible pad 111 is fixedly connected to the top end of the first clamp 16 and the second clamp 110, a gas pipe 112 is arranged in the middle part of the first clamp 16 and the second clamp 110, a pair of second supporting rods 113 are fixedly connected to the side wall of the second sliding block 19, a flexible block 114 is fixedly connected to the top end of the second supporting rods 113. During work, the gas pipe 112 to be installed is placed in the middle part of the first clamp 16 and the second clamp 110, then the first bolt 14 is rotated to drive the sliding rods 17 to slide in the middle part of the first sliding block 13, the first clamp 16 approaches the top of the gas pipe 112 due to the rotation of the first bolt 14, then the gas pipe 112 is fixed in the middle part of the first clamp 16 and the second clamp 110, after the second clamp 110 is fixed, when the top end of the gas pipe 112 needs to be connected with other pipelines, the first sliding block 13 can be pushed to slide in the middle part of the fixing box 12, the first sliding block 13 and the second sliding block 19 are connected through the first supporting rod 18, when the first sliding block 13 is pushed, the second sliding block 19 moves along with it, the gas pipe 112 is adjusted to be flush with the pipeline to be connected, the first sliding block 13 is fixed as a whole by rotating the second bolt 15, then the height of the fixing box 12 as a whole is adjusted by pushing the hydraulic disc 11, the gas pipe 112 can be finely adjusted when it is connected with other pipelines, the flexible block 114 at the top end of the second supporting rods 113 can support the gas pipe 112, so that the gravity of the gas pipe 112 due to the long length is reduced.

[0022] Please refer toFigure 1 and Figure 4 As shown, the side walls of the fixed box 12 are fixed with a pair of card seats 2; the card seats 2 are symmetrically arranged on the side walls of the fixed box 12; the top of the card seat 2 is fixed with a top plate 21; the side walls of the fixed box 12 are fixed with a support seat 22; the bottom end of the support seat 22 is fixed with a damping spring telescopic rod 23; the bottom end of the damping spring telescopic rod 23 is fixed with a third slider 24; the third slider 24 is slidably connected to the fixed box 12; the bottom end of the third slider 24 is fixed with a fixing pin 25; the side walls of the fixed box 12 are fixed with an insertion rod 26; when working, when the air pipe 112 is connected to other pipelines, the remaining insertion rods 26 on the sides of the fixed box 12 can be inserted into the inside of the card seat 2, and then a pulling force is applied to the third slider 24 to pull the fixing pin 25 out of the middle of the card seat 2 and insert it. The rod 26 stops after touching the top plate 21. By loosening the third slider 24, the fixing pin 25 can be rebounded into the interior of the card holder 2 due to the elastic force of the damping spring telescopic rod 23 to fix the insertion rod 26, so that multiple groups of fixed boxes 12 can be spliced; by inserting the insertion rod 26 into the card holder 2, the elastic force of the damping spring telescopic rod 23 is used to make the fixing pin 25 rebound to fix the insertion rod 26, reducing complex fixing operations. It is only necessary to insert the insertion rod 26 into the card holder 2 to complete the splicing of multiple groups of fixed boxes 12. When the air pipe 112 needs to be extended to transport gas, the installation time can be shortened. The third slider 24 is slidably connected to the fixed box 12 and cooperates with the damping spring telescopic rod 23 to further increase the speed of the fixing pin 25 when inserted into the card holder 2, and also make the whole more stable.

[0023] See also Figure 4 As shown, a pair of protrusions 3 are provided on the inner side wall of the card seat 2; a pair of grooves 31 are opened on the side wall of the insertion rod 26; a rubber pad 32 is fixed to the side wall of the insertion rod 26; during operation, when the insertion rod 26 is inserted into the interior of the card seat 2, the groove 31 can be spliced ​​with the protrusion 3, and the rubber pad 32 can fill the gap between the insertion rod 26 and the card seat 2, so that the insertion rod 26 is stable when fixed inside the card seat 2; the splicing of the protrusion 3 and the groove 31 can more accurately fix the insertion rod 26, reduce the shaking of the insertion rod 26 inside the card seat 2, and the rubber pad 32 can further increase the friction with the card seat 2, thereby increasing the connection effect between multiple groups of fixed boxes 12.

[0024] See also Figures 1 to 3As shown, the fixed seat 1 bottom end is threadedly connected with multiple groups of fixed bolts 4; the fixed bolts 4 top end is fixedly connected with a handle 41; during work, multiple groups of fixed bolts 4 can be rotated to fix the fixed seat 1 as a whole on the ground or wall surface, and the handle 41 can increase the gripping force when the fixed bolts 4 are rotated, so that the fixed seat 1 as a whole can be installed at any position when installing the gas pipe 112; by rotating multiple groups of fixed bolts 4, the fixed seat 1 as a whole can be fixed on the ground or wall surface and other different places, which can further increase the versatility of the fixed box 12 as a whole when installing the gas pipe 112, so that after the fixed seat 1 as a whole is fixed, the gas conveying remains stable.

[0025] Please refer to Figures 1 to 2 As shown, the fixed box 12 side wall is provided with a first magnetic plate 5; the first magnetic plate 5 side wall is provided with a flexible cloth 51; the flexible cloth 51 side wall is fixedly connected with a second magnetic plate 52; during work, when multiple groups of fixed boxes 12 are spliced, the first magnetic plate 5 can be adsorbed on the side of the fixed box 12, and then the second magnetic plate 52 is adsorbed on the side of another group of fixed boxes 12, and the flexible cloth 51 can wrap and block the gap between the two spliced fixed boxes 12; by wrapping and blocking the gap between the two spliced fixed boxes 12 with the flexible cloth 51, the sealing performance of the fixed box 12 as a whole can be further enhanced, the installation steps can be reduced, and the splicing efficiency can be improved, and the flexible cloth 51 blocking the gap can also reduce impurities and moisture entering the inside of the fixed box 12 through the gap.

[0026] Please refer to Figures 5 to 6 As shown, the fixed box 12 bottom end is fixedly connected with a gas detection module 6; the fixed box 12 bottom end is fixedly connected with a sensing head 61; the sensing head 61 is uniformly distributed at the fixed box 12 bottom end; during work, when the gas pipe 112 conveys gas, the gas detection module 6 can continuously detect the gas environment inside the fixed box 12, and the sensing head 61 is distributed at multiple positions at the bottom of the fixed box 12, so that the gas is more easily captured; by detecting the gas environment inside the fixed box 12 with the gas detection module 6, and uniformly distributing the sensing head 61 at the fixed box 12 bottom end, the gas can be detected from multiple positions, the detection deviation caused by uneven gas distribution is reduced, and the safety during gas conveying is further increased.

[0027] Please refer to Figure 1 and Figure 6As shown, the fixed box 12 top end fixed with temperature control plate 7; The fixed box 12 side wall is fixed with a pair of sealing cloth 71; When working, the gas transported in the trachea 112 needs to be under certain temperature conditions, at which time the temperature control plate 7 can be started, the temperature inside the fixed box 12 is controlled, so that the temperature inside the fixed box 12 is in a constant temperature state, and the sealing cloth 71 can block the temperature diffusion inside the fixed box 12; By controlling the temperature inside the fixed box 12 through the temperature control plate 7, the gas can always keep constant temperature during the transportation in the trachea 112, reducing the abnormality of the gas caused by temperature change, and the sealing cloth 71 can block the temperature diffusion inside the fixed box 12, further reducing the interference of the temperature around the fixed box 12 on the temperature inside the fixed box 12.

[0028] Please refer to Figures 1 to 2 As shown, the fixed box 12 side wall is fixed with a plurality of third support rods 8; The top end of the third support rod 8 is fixed with a shielding plate 81; When working, the shielding plate 81 can block the heat source near the fixed box 12, and the heat source will be reflected when touching the shielding plate 81; Through the shielding plate 81, the heat source can be reflected, and the heat transfer to the inside of the fixed box 12 is blocked, further making the temperature inside the fixed box 12 more uniform, and increasing the stable operation of the temperature control plate 7 inside the fixed box 12.

[0029] Working principle: the need to install the air pipe 112 is placed in the first clamp 16 and the second clamp 110 in the middle position, then rotate the first bolt 14 to drive the slide rod 17 in the middle of the first slide block 13, the first clamp 16 will be close to the top of the air pipe 112 due to the rotation of the first bolt 14, then the air pipe 112 is fixed in the middle of the first clamp 16 and the second clamp 110, after fixing the second clamp 110, the top of the air pipe 112 needs to be connected with the rest of the pipeline, the first slide block 13 can be pushed to slide in the middle of the fixed box 12, the first slide block 13 and the second slide block 19 are connected by the first support rod 18, when the first slide block 13 is pushed, the second slide block 19 will move with it, adjust the air pipe 112 to the same level as the pipeline that needs to be connected, rotate the second bolt 15 to fix the first slide block 13 as a whole, then push the hydraulic disc 11 to adjust the height of the fixed box 12 as a whole, which can be fine-tuned when the air pipe 112 is connected with other pipelines, the flexible block 114 at the top of the second support rod 113 can also support the air pipe 112, so that the air pipe 112 reduces the gravitational subsidence caused by its length, when the air pipe 112 is connected with other pipelines, the rest of the fixed box 12 can be inserted into the clamping seat 2, then pull the third slide block 24 to pull the fixed pin 25 out of the middle of the clamping seat 2, the insertion rod 26 stops after touching the top plate 21, and the insertion rod 26 is fixed by releasing the third slide block 24 due to the elastic force of the damping spring extension rod 23, so that multiple fixed boxes 12 can be spliced, when the insertion rod 26 is inserted into the clamping seat 2, the recess 31 can be spliced with the protrusion 3, the rubber pad 32 can fill the gap between the insertion rod 26 and the clamping seat 2, so that the insertion rod 26 is fixed in the clamping seat 2, the fixed seat 1 can be rotated as a whole to be fixed on the ground or wall, the handle 41 can increase the holding force when the fixed screw 4 is rotated, so that the fixed seat 1 can be installed at any position when installing the air pipe 112, when multiple fixed boxes 12 are spliced, the first magnetic plate 5 can be attracted to the side of the fixed box 12, then the second magnetic plate 52 is attracted to the side of another fixed box 12, the flexible cloth 51 can wrap and block the gap between the two spliced fixed boxes 12, when the air pipe 112 transports gas, the gas detection module 6 can continuously detect the gas environment in the fixed box 12, the inductive head 61 is distributed in multiple positions at the bottom of the fixed box 12, so that the gas is more easily captured, the gas transported in the air pipe 112 needs to be in a certain temperature condition, at this time the temperature control plate 7 can be started to control the temperature in the fixed box 12, so that the temperature in the fixed box 12 is in a constant temperature state, the sealing cloth 71 can block the temperature diffusion in the fixed box 12, and the shielding plate 81 can block the heat source near the fixed box 12, which will be reflected when the heat source touches the shielding plate 81.

[0030] The above shows and describes the basic principles, main features and advantages of the present application. Those skilled in the art should understand that the present application is not limited to the above-mentioned embodiments, and the above-mentioned embodiments and descriptions in the specification are only to illustrate the principles of the present application. Without departing from the spirit and scope of the present application, various changes and improvements can be made to the present application, and these changes and improvements all fall within the scope of the claimed present application.

Claims

1. A dedicated EP-grade pipeline for transporting gases for a photolithography machine, comprising a fixing seat (1), characterized in that: The top of the fixing seat (1) is fixedly connected to a hydraulic disc (11); the top of the hydraulic disc (11) is fixedly connected to a fixing box (12); the top of the fixing box (12) is slidably connected to a first slider (13); the top of the first slider (13) is threadedly connected to a first bolt (14); the side wall of the first slider (13) is threadedly connected to a second bolt (15); the bottom end of the first bolt (14) is rotatably connected to a first clamp (16); the top of the first clamp (16) is fixedly connected to a pair of sliding rods (17); the sliding rods (17) are slidably connected to the middle of the first slider (13); the side wall of the first slider (13) is fixedly connected to a first clamp (16). A first support rod (18) is connected; the bottom end of the first support rod (18) is fixedly connected to a second slider (19); the second slider (19) is slidably connected to the bottom end of the fixed box (12); the top end of the second slider (19) is fixedly connected to a second clamp (110); the top ends of the first clamp (16) and the second clamp (110) are fixedly connected to a flexible pad (111); an air pipe (112) is provided in the middle of the first clamp (16) and the second clamp (110); a pair of second support rods (113) are fixedly connected to the side wall of the second slider (19); the top ends of the second support rods (113) are fixedly connected to a flexible block (114).

2. The EP-grade pipeline for transporting gases for photolithography machines according to claim 1, characterized in that: A pair of card seats (2) are fixedly connected to the side walls of the fixed box (12); the card seats (2) are symmetrically arranged on the side walls of the fixed box (12); a top plate (21) is fixedly connected to the top of the card seat (2); a support seat (22) is fixedly connected to the side walls of the fixed box (12); a damping spring telescopic rod (23) is fixedly connected to the bottom end of the support seat (22); a third slider (24) is fixedly connected to the bottom end of the damping spring telescopic rod (23); the third slider (24) is slidably connected to the fixed box (12); a fixing pin (25) is fixedly connected to the bottom end of the third slider (24); and an insertion rod (26) is fixedly connected to the side walls of the fixed box (12).

3. The EP-grade pipeline for transporting gases for a photolithography machine according to claim 2, characterized in that: A pair of protrusions (3) are provided on the inner side wall of the card seat (2); a pair of grooves (31) are provided on the side wall of the insertion rod (26); and a rubber pad (32) is fixed to the side wall of the insertion rod (26).

4. The EP-grade pipeline for transporting gases for a photolithography machine according to claim 3, characterized in that: The bottom end of the fixing seat (1) is threadedly connected to a plurality of sets of fixing bolts (4); the top end of the fixing bolts (4) is fixedly connected to a handle (41).

5. The EP-grade pipeline for transporting gases for a photolithography machine according to claim 4, characterized in that: The side wall of the fixed box (12) is provided with a first magnetic plate (5); the side wall of the first magnetic plate (5) is provided with a flexible cloth (51); and the side wall of the flexible cloth (51) is fixedly connected with a second magnetic plate (52).

6. The EP-grade pipeline for transporting gases for a photolithography machine according to claim 5, characterized in that: A gas detection module (6) is fixedly connected to the bottom end of the fixed box (12); a sensing head (61) is fixedly connected to the bottom end of the fixed box (12); and the sensing heads (61) are evenly distributed at the bottom end of the fixed box (12).

7. The EP-grade pipeline for transporting gases for a photolithography machine according to claim 6, characterized in that: A temperature control plate (7) is fixedly connected to the top of the fixed box (12); and a pair of sealing cloths (71) are fixedly connected to the side walls of the fixed box (12).

8. The EP-grade pipeline for transporting gases for a photolithography machine according to claim 7, characterized in that: The side walls of the fixed box (12) are fixedly connected to a plurality of sets of third support rods (8); the top ends of the third support rods (8) are fixedly connected to shielding plates (81).

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