Micro-electro-mechanical device controlled by single-path signal and control method thereof

Abstract

The invention provides a single-path signal controlled micro-electromechanical device and a control method thereof, the device comprises a base body, the base body is provided with first lower comb teeth and second lower comb teeth, the first lower comb teeth are electrically connected with a first driving electrode, and the second lower comb teeth are electrically connected with a second driving electrode; a substrate is arranged above the base body, upper comb teeth, a rotating mirror and a driving signal input electrode are arranged on the substrate, the driving signal input electrode is electrically connected with a driving signal input elastic piece, and the free end of the driving signal input elastic piece is selectively connected to the first driving electrode or the second driving electrode; the base body is further provided with a first control electrode, and the first control electrode is connected to the first control comb teeth. The invention also provides a control method of the micro-electro-mechanical device. According to the invention, the two lower comb teeth can be driven through one set of driving circuit, and the production cost of the micro-electro-mechanical device can be reduced.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of control of micro electro mechanical system, in particular to a single-path signal controlled micro electro mechanical system and a control method of the micro electro mechanical system. BACKGROUND

[0002] Micro electro mechanical system (MEMS) is widely used in optical devices. Currently, most commonly used micro electro mechanical systems are electrostatically driven micro electro mechanical systems. The micro electro mechanical system is provided with upper and lower comb teeth, and a substrate is arranged on the micro electro mechanical system, and a rotating mirror is arranged on the substrate. By changing the voltage applied to the upper or lower comb teeth, the electrostatic force between the upper and lower comb teeth is changed to drive the rotating mirror to rotate, so as to change the exit angle of the reflected light beam, thereby realizing the functions of optical path switching and the like. Therefore, the micro electro mechanical system is widely used in optical devices such as optical switches.

[0003] Some existing electrostatically driven micro electro mechanical systems are provided with multiple electrodes, and a corresponding driving circuit is arranged for each electrode. This results in the need for a large number of driving circuits in the existing micro electro mechanical system, which leads to a complex overall structure of the micro electro mechanical system and increases the production cost of the micro electro mechanical system.

[0004] The patent application with publication number CN119706734A discloses an electrostatically driven micro electro mechanical system. The micro electro mechanical system realizes the switching of input voltage by arranging a multi-path switching switch. The fixed end of the selection switch in the multi-path switching switch is connected to the driving circuit, the free end of the selection switch can be selectively connected to one of the two electrodes arranged in the same direction, and a controller is needed to control the action of the selection switch.

[0005] Although this micro electro mechanical system can reduce the number of driving circuits arranged, a large number of single-pole double-throw switches need to be arranged. When the micro electro mechanical system is applied in an optical switch array, a large number of single-pole double-throw switches need to be arranged due to the large number of micro electro mechanical systems required. Since the single-pole double-throw switch is usually arranged in the external driving module of the micro electro mechanical system, the production cost of the external driving module is increased, and the volume of the external driving module is also increased. SUMMARY

[0006] The first object of the present application is to provide a micro electro mechanical system which can reduce the number of driving circuits, has a small volume and is convenient for mass production.

[0007] The second object of the present application is to provide a control method of the single-path signal controlled micro electro mechanical system.

[0008] To achieve the first object of the present application, the micro-electro-mechanical device of single-path signal control comprises a substrate, the substrate is provided with a first lower comb and a second lower comb, the first lower comb is electrically connected with a first driving electrode, and the second lower comb is electrically connected with a second driving electrode; a substrate is arranged above the substrate, the substrate is provided with an upper comb and a rotating mirror, the rotating mirror is supported on the substrate through a pair of cantilever beams; the substrate is provided with a driving signal input electrode, the driving signal input electrode is electrically connected with a driving signal input spring, the driving signal input spring is located between the first driving electrode and the second driving electrode, and a free end of the driving signal input spring is selectively connected to the first driving electrode or the second driving electrode; the substrate is further provided with a first control electrode, the first control electrode is connected to a first control comb, and the driving signal input spring is provided with a switching comb.

[0009] A preferred scheme is that the substrate is further provided with a second control electrode, the second control electrode is connected to a second control comb, and the switching comb is located between the first control comb and the second control comb.

[0010] As can be seen from the above scheme, two control electrodes are arranged on the substrate, and the driving signal input spring is arranged, by applying appropriate voltage to the two control electrodes, the free end of the driving signal input spring can be connected to one of the control electrodes, so that after the driving signal is loaded to the driving signal input electrode, the driving signal can be output to the corresponding driving electrode through the driving signal input spring, and the driving signal is output to the corresponding lower comb, so as to change the voltage of one of the first lower comb and the second lower comb, and drive the rotation of the rotating mirror.

[0011] Since the two control electrodes, the driving signal input electrode and the driving signal input spring are arranged on the substrate of the micro-electro-mechanical device, and not arranged on the outside of the micro-electro-mechanical device, the external driving circuit only needs to provide the driving signal and output the control signal to the two control electrodes, therefore, the external driving circuit does not need to arrange a large number of single-pole double-throw switches, which can reduce the production cost of the driving circuit and reduce the size of the external driving circuit.

[0012] In addition, when the micro-electro-mechanical device is applied to an array optical switch, since the structures of the plurality of micro-electro-mechanical devices are the same, the same control electrode, driving signal input electrode and driving signal input spring can be arranged in each micro-electro-mechanical device, therefore, the micro-electro-mechanical device can be mass-produced, when the rotating mirrors of the plurality of micro-electro-mechanical devices need to be synchronously moved, only one driving circuit can be arranged and the driving signal can be output to the driving signal input electrodes of the plurality of micro-electro-mechanical devices at the same time, and the control signal can be output to the control electrodes of the plurality of micro-electro-mechanical devices, that is, the rotating mirrors of the plurality of micro-electro-mechanical devices can be driven to rotate.

[0013] A preferred scheme is that the first control comb teeth include a plurality of first control teeth, the second control comb teeth include a plurality of second control teeth; the switching comb teeth include a plurality of first switching teeth and a plurality of second switching teeth, the first switching teeth are arranged on the side close to the first control comb teeth, and the plurality of first switching teeth and the plurality of first control teeth are arranged alternately; the second switching teeth are arranged on the side close to the second control comb teeth, and the plurality of second switching teeth and the plurality of second control teeth are arranged alternately.

[0014] Therefore, by arranging the plurality of first switching teeth and the plurality of second switching teeth on the driving signal input spring, the voltage of the driving signal input spring changes after the corresponding control electrode is loaded with the control signal, and the free end of the driving signal input spring deflects, thereby changing the connection relationship between the driving signal input spring and the two driving electrodes, and achieving the purpose of applying the driving signal to different lower comb teeth.

[0015] A further scheme is that the switching comb teeth are arranged on the end of the driving signal input spring close to the driving signal input electrode.

[0016] Through the above arrangement, the free end of the driving signal input spring has a larger deflection space, and the deflection of the driving signal input spring is more flexible.

[0017] A further scheme is that the driving signal input spring includes an upper layer cantilever and a lower layer cantilever, an electrically insulating layer is formed between the upper layer cantilever and the lower layer cantilever, the upper layer cantilever is electrically connected to the driving signal input electrode, and the upper layer cantilever is selectively connected to the first driving electrode or the second driving electrode. Preferably, the switching comb teeth are arranged on the lower layer cantilever.

[0018] Therefore, the electrically insulating layer is formed between the upper layer cantilever and the lower layer cantilever, so that the driving signal of the driving signal input electrode is input to the first driving electrode or the second driving electrode through the upper layer cantilever, and the switching comb teeth arranged on the lower layer cantilever are used to drive the deflection of the driving signal input spring, avoiding the mutual interference of two different electric signals.

[0019] A further scheme is that the fixed end of the driving signal input spring is fixed on the sleeve ring, and the sleeve ring is sleeved on the outer periphery of the driving signal input electrode.

[0020] Therefore, by arranging the sleeve ring, the driving signal input spring can be reliably fixed on the driving signal input electrode.

[0021] A further scheme is that the lower end of the first control comb teeth is fixed on the base body, and the lower end of the second control comb teeth is fixed on the base body.

[0022] Therefore, the lower ends of the first control comb teeth and the second control comb teeth are fixed on the base body, which can avoid the first control comb teeth and the second control comb teeth from shaking relative to the base body, and ensure the stability of the control signal loading.

[0023] Further, the first control electrode has a first voltage applying part, and the second control electrode has a second voltage applying part; the base substrate is provided with a first through hole and a second through hole, the first voltage applying part is located in the first through hole, and the second voltage applying part is located in the second through hole.

[0024] Further, the upper end surface of the first voltage applying part is not higher than the upper surface of the base substrate; and the upper end surface of the second voltage applying part is not higher than the upper surface of the base substrate.

[0025] Therefore, the voltage applying parts of the two control electrodes do not protrude from the upper surface of the base substrate, which is beneficial to the packaging of the micro-electro-mechanical device.

[0026] Further, the minimum distance between the first driving electrode and the second driving electrode is smaller than the minimum distance between the first lower comb teeth and the second lower comb teeth.

[0027] Therefore, the distance between the first driving electrode and the second driving electrode is small, which is beneficial to the deflection of the free end of the driving signal input spring within a small distance range, so as to reduce the voltage of the applied control signal. The distance between the first lower comb teeth and the second lower comb teeth is large, which can avoid the contact between the two lower comb teeth and affect the rotation of the rotating mirror.

[0028] To achieve the second purpose, the micro-electro-mechanical device with single signal control provided by the application is used to provide a control method, which comprises the following steps: applying a driving signal to the driving signal input electrode, so that the free end of the driving signal input spring is connected with the first driving electrode; applying a driving signal to the driving signal input electrode, and the driving signal is output to the first lower comb teeth through the first driving electrode; or stopping applying a control signal to the first control electrode, so that the free end of the driving signal input spring is separated from the first driving electrode, and the free end of the driving signal input spring is connected with the second driving electrode; applying a driving signal to the driving signal input electrode, and the driving signal is output to the second lower comb teeth through the second driving electrode; and rotating the rotating mirror around the cantilever beam, so that the angle of the rotating mirror relative to the base substrate changes.

[0029] From the above scheme, it can be seen that the electrical connection relationship between the free end of the driving signal input spring and the two driving electrodes can be changed by applying or not applying a control signal to the first control electrode, so as to realize the switching of the lower comb teeth loaded with the driving signal. In this way, only one external driving circuit can meet the driving requirements of the two lower comb teeth.

[0030] Another control method for a single-channel signal-controlled micro-electromechanical device provided by the present invention includes: applying a control signal to a target control electrode, the target control electrode being one of a first control electrode and a second control electrode, so that the free end of a drive signal input spring is connected to the first drive electrode or the second drive electrode; applying a drive signal to a drive signal input electrode, the drive signal being output to the first lower comb tooth through the first drive electrode, or being output to the second lower comb tooth through the second drive electrode, so that a rotating mirror rotates around a cantilever beam, and the angle of the rotating mirror relative to a substrate changes.

[0031] As can be seen from the above scheme, by applying a control signal to the target control electrode, the electrical connection relationship between the free end of the drive signal input spring and the two drive electrodes can be changed, thereby switching the lower comb teeth to which the drive signal is applied. In this way, only a single external drive circuit is required to meet the driving requirements of the two lower comb teeth.

[0032] A preferred solution is to obtain the rotation direction and rotation angle of the rotating mirror before applying the control signal to the target control electrode, and determine the target control electrode according to the rotation direction and rotation angle. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] Figure 1 1 is a structural diagram of a first embodiment of a single-channel signal controlled micro-electromechanical device according to the present invention.

[0034] Figure 2 It is a structural exploded view of the first embodiment of the single-channel signal controlled micro-electromechanical device of the present invention.

[0035] Figure 3 1 is a structural diagram of a substrate from a first perspective in a first embodiment of a single-channel signal controlled micro-electromechanical system according to the present invention.

[0036] Figure 4 1 is a structural diagram of the substrate from a second perspective in the first embodiment of the single-channel signal controlled micro-electromechanical device of the present invention.

[0037] Figure 5 1 is a structural diagram of the base in the first embodiment of the single-channel signal controlled micro-electromechanical device of the present invention.

[0038] Figure 6 It is an enlarged view of the local structure of the base at a first viewing angle in the first embodiment of the single-channel signal controlled micro-electromechanical device of the present invention.

[0039] Figure 7 This is an enlarged view of the partial structure of the base from a second viewing angle in the first embodiment of the single-channel signal controlled micro-electromechanical device of the present invention.

[0040] Figure 8 This is an enlarged view of the partial structure of the base from a third viewing angle in the first embodiment of the single-channel signal controlled micro-electromechanical device of the present invention.

[0041] Figure 9 Figure 3 is a partial enlarged view of the fourth perspective view of the base of the single-channel signal controlled micro-electro-mechanical device according to the first embodiment of the present application.

[0042] Figure 10 Figure 4 is a partial enlarged view of the fifth perspective view of the base of the single-channel signal controlled micro-electro-mechanical device according to the first embodiment of the present application.

[0043] Figure 11 Figure 5 is a flow chart of the control method of the single-channel signal controlled micro-electro-mechanical device according to the first embodiment of the present application.

[0044] Figure 12 Figure 6 is a partial enlarged view of the base of the single-channel signal controlled micro-electro-mechanical device according to the second embodiment of the present application.

[0045] Figure 13 Figure 7 is a partial enlarged view of another perspective view of the base of the single-channel signal controlled micro-electro-mechanical device according to the second embodiment of the present application.

[0046] The present application will be further described in conjunction with the accompanying drawings and embodiments. DETAILED DESCRIPTION

[0047] The single-channel signal controlled micro-electro-mechanical device of the present application is applied to optical devices such as optical switches, receives driving signals outputted by external driving circuits, and receives control signals to switch the lower comb teeth to which the driving signals are applied, so that two lower comb teeth of the same micro-electro-mechanical device can be applied with driving signals by using only one driving circuit.

[0048] Single-channel signal controlled micro-electro-mechanical device according to the first embodiment: Referring to Figure 1 and Figure 2 The single-channel signal controlled micro-electro-mechanical device according to the first embodiment of the present application has a base 10, and a substrate 50 is arranged on the base 10. The cross sections of the base 10 and the substrate 50 are both square, and the cross section area of the base 10 is equal to that of the substrate 50, so that the substrate 50 can completely cover the base 10. In addition, the thickness of the substrate 50 is small, and the thickness of the base 10 is greater than that of the substrate 50.

[0049] Referring to Figure 3 and Figure 4The substrate 50 is provided with an upper comb 51, preferably, the upper comb 51 comprises a first upper comb 61 and a second upper comb 62, and a substantially circular rotating mirror 52 is arranged at the middle of the substrate 50, and the first upper comb 61 and the second upper comb 62 are arranged at the left side and the right side of the rotating mirror 52 respectively. The first upper comb 61 has a plurality of first upper teeth, the plurality of first upper teeth are arranged in parallel to each other, and there is a gap between two adjacent first upper teeth. Similarly, the second upper comb 62 has a plurality of second upper teeth, the plurality of second upper teeth are arranged in parallel to each other, and there is a gap between two adjacent second upper teeth. In addition, the substrate 50, the upper comb 51 and the rotating mirror 52 are connected together, that is, the ground of the substrate 50, the upper comb 51 and the rotating mirror 52 are connected together.

[0050] The rotating mirror 52 is supported on the substrate 50 by a pair of cantilever beams 54, and the rotating mirror 52 can rotate around the cantilever beams 54, so that the rotating mirror 52 rotates relative to the substrate 50. In addition, a first through hole 55 and a second through hole 56 are arranged on the substrate 50, preferably, the first through hole 55 and the second through hole 56 are square through holes, and the first through hole 55 and the second through hole 56 penetrate the upper and lower surfaces of the substrate 50.

[0051] Referring to Figure 5 With Figure 6 The base 10 is provided with a first lower comb 11 and a second lower comb 12, a first pad plate 13 is arranged between the first lower comb 11 and the base 10, and a second pad plate 14 is arranged between the second lower comb 12 and the base 10. The base 10 is provided with a first driving electrode 15 and a second driving electrode 16, wherein the first driving electrode 15 is formed at one end of the first pad plate 13, and the first driving electrode 15 is electrically connected to the first lower comb 11 through the first pad plate 13; the second driving electrode 16 is formed at one end of the second pad plate 14, and the second driving electrode 16 is electrically connected to the second lower comb 12 through the second pad plate 14.

[0052] When it is needed to drive the rotating mirror 52 to rotate, it is needed to apply a driving voltage to the first lower comb 11 or the second lower comb 12, and since only one of the first lower comb 11 and the second lower comb 12 needs to be applied with the driving voltage, therefore, only one driving circuit can be arranged, and a switching device 20 is used to switch the connection relationship between the driving circuit and the first lower comb 11 and the second lower comb 12.

[0053] Referring to Figures 7 to 9The switching device 20 is arranged on the base 10, and the switching device 20 comprises a driving signal input electrode 46. In this embodiment, the driving signal input electrode 46 is a cylinder. A driving signal input spring 40 is arranged on one side of the driving signal input electrode 46. The fixed end 42 of the driving signal input spring 40 is fixed on a sleeve 45, the sleeve 45 is sleeved on the outer periphery of the driving signal input electrode 46, and the sleeve 45 is fixedly connected with the driving signal input electrode 46, for example, the sleeve 45 is in interference fit with the driving signal input electrode 46. In addition, the driving signal input electrode 46, the sleeve 45 and the driving signal input spring 40 are all made of conductive material, so that the driving signal input electrode 46 and the driving signal input spring 40 can be electrically connected through the sleeve 45.

[0054] The base 10 further comprises a first control electrode 21 and a second control electrode 31, which are arranged on both sides of the driving signal input electrode 46. The first control electrode 21 comprises a first connecting portion 22 and a first voltage applying portion 23. A first control comb 26 is arranged on the end of the first connecting portion 22 away from the first voltage applying portion 23. The first control comb 26 comprises a plurality of first control teeth 27, which are arranged in parallel with each other and have gaps between adjacent two first control teeth 27. The second control electrode 31 comprises a second connecting portion 32 and a second voltage applying portion 33. A second control comb 36 is arranged on the end of the second connecting portion 32 away from the second voltage applying portion 33. The second control comb 36 comprises a plurality of second control teeth 37, which are arranged in parallel with each other and have gaps between adjacent two second control teeth 37. In addition, the driving signal input spring 40 is located between the first control electrode 21 and the second control electrode 31, more specifically, the driving signal input spring 40 is located between the first control comb 26 and the second control comb 36.

[0055] The driving signal input spring 40 comprises a plurality of first switching teeth 47 and a plurality of second switching teeth 48. The first switching teeth 47 are arranged on the side close to the first control comb 26, and the plurality of first switching teeth 47 are arranged alternately with the plurality of first control teeth 27, that is, one first switching tooth 47 extends into the gap between adjacent two first control teeth 27, but each first switching tooth 47 does not contact any first control tooth 27. Figure 8 It can be seen that one first switching tooth 47 extends into the gap between adjacent two first control teeth 27, but each first switching tooth 47 does not contact any first control tooth 27. The second switching teeth 48 are arranged on the side close to the second control comb 36, and the plurality of second switching teeth 48 are arranged alternately with the plurality of second control teeth 37, that is, one second switching tooth 48 extends into the gap between adjacent two second control teeth 37, but each second switching tooth 48 does not contact any second control tooth 37.

[0056] From Figure 9 It can be seen that the lower end of the first control comb teeth 26 is fixed on the base 10, and the lower end of the second control comb teeth 36 is also fixed on the base 10, so that the first control comb teeth 26 and the second control comb teeth 36 can be firmly fixed on the base 10, and displacement of the first control comb teeth 26 and the second control comb teeth 36 on the base 10 can be avoided.

[0057] In addition, the free end 41 of the drive signal input spring 40 is arranged between the first drive electrode 15 and the second drive electrode 16. Moreover, the switching comb teeth 43 are arranged at one end of the drive signal input spring 40 close to the drive signal input electrode 46, that is, the switching comb teeth 43 are arranged at a position away from the free end 41 of the drive signal input spring 40, so that the free end 41 of the drive signal input spring 40 has a larger deflection space.

[0058] Referring to Figure 10 The drive signal input spring 40 includes an upper layer cantilever 71 and a lower layer cantilever 72, and an electrically insulating layer 73 is formed between the upper layer cantilever 71 and the lower layer cantilever 72, and the electrically insulating layer 73 realizes electrical insulation between the upper layer cantilever 71 and the lower layer cantilever 72. Moreover, the upper layer cantilever 71 is electrically connected with the drive signal input electrode 46, and the switching comb teeth 43 are arranged on the lower layer cantilever 72, that is, the plurality of first switching teeth 47 and the plurality of second switching teeth 48 are electrically connected with the lower layer cantilever 72. In the embodiment, the upper layer cantilever 71, the lower layer cantilever 72 and the electrically insulating layer 73 are an integral structure, the upper layer cantilever 71 and the lower layer cantilever 72 can be made of single crystal silicon or other materials having electrical conductivity, and the electrically insulating layer 73 is made of an oxidized insulating material. In addition, the lower layer cantilever 72 is in conduction with the base 10, and the lower layer cantilever 72 is in common with the base 10.

[0059] In addition, the first drive electrode 15 extends in the direction of the second drive electrode 16 to form a first overhanging portion 17, and the second drive electrode 16 extends in the direction of the first drive electrode 15 to form a second overhanging portion 18, and the upper layer cantilever 71 is selectively connected between the first overhanging portion 17 and the second overhanging portion 18, so that the drive signal input electrode 46 outputs the drive signal to the first drive electrode 15 or the second drive electrode 16.

[0060] Since the deflection distance of the free end 41 of the drive signal input spring 40 is limited, the distance between the first drive electrode 15 and the second drive electrode 16 is small, so that the drive signal input spring 40 can be deflected to a larger extent. Figure 7It can be seen that the minimum distance between the first driving electrode 15 and the second driving electrode 16 is smaller than the minimum distance between the first lower comb tooth 11 and the second lower comb tooth 12. On one hand, the smaller distance between the first driving electrode 15 and the second driving electrode 16 can enable the free end 41 of the driving signal input spring 40 to deflect to a position in contact with the first driving electrode 15 or the second driving electrode 16, and on the other hand, the larger distance between the first lower comb tooth 11 and the second lower comb tooth 12 can avoid the mutual interference between the first lower comb tooth 11 and the second lower comb tooth 12.

[0061] When the substrate 50 is mounted to the base 10, the first voltage applying part 23 of the first control electrode 21 is located in the first through hole 55, and the second voltage applying part 33 of the second control electrode 31 is located in the second through hole 56. In addition, the first upper end surface 25 of the first voltage applying part 23 is not higher than the upper surface of the substrate 10, and the second upper end surface 35 of the second voltage applying part 33 is also not higher than the upper surface of the substrate 10. In this way, the first voltage applying part 23 and the second voltage applying part 33 do not protrude from the upper surface of the substrate 10, which is beneficial to the packaging of the micro-electro-mechanical device.

[0062] The control method of the single-channel signal controlled micro-electro-mechanical device The control method of the single-channel signal controlled micro-electro-mechanical device will be described below. Figure 11 In the initial state, neither the first control electrode nor the second control electrode is loaded with a control signal, at this time, the driving signal input spring is located at the initial position, that is, the free end of the driving signal input spring is not in contact with the first driving electrode nor the second driving electrode, the driving signal input electrode is not electrically connected with the first lower comb tooth, and the driving signal input electrode is also not electrically connected with the second lower comb tooth. Usually, in this state, the rotating mirror and the substrate are kept parallel.

[0063] When it is needed to control the rotation of the rotating mirror, first, step S1 is performed to obtain the rotation direction and the rotation angle of the rotating mirror. When it is needed to control the rotation of the rotating mirror, it is needed to determine the direction in which the rotating mirror rotates and the angle of rotation. Then, step S2 is performed to determine the target control electrode to which the control signal needs to be applied according to the rotation direction and the rotation angle, wherein the target control electrode is one of the first control electrode and the second control electrode.

[0064] Then, step S3 is performed to apply a control signal to the target control electrode, for example, to apply a control signal to the first control electrode, and the control signal can be a voltage of +5V. After the control signal is applied to the first control electrode, the voltage between the first control electrode and the switching comb teeth changes, so that the voltage difference between the first control electrode and the switching comb teeth is not equal to the voltage difference between the second control electrode and the switching comb teeth. At this time, the free end of the drive signal input spring deflects under the action of the electrostatic attraction force, specifically, deflects toward the first drive electrode and contacts the first drive electrode.

[0065] Then, step S4 is performed to apply a drive signal to the drive signal input electrode. At this time, since the upper layer cantilever of the drive signal input spring contacts the first drive electrode, the drive signal is output to the first lower comb teeth through the first drive electrode, that is, step S5 is performed. Since the second lower comb teeth are not loaded with the drive signal, the voltage difference between the upper comb teeth and the first lower comb teeth is not equal to the voltage difference between the upper comb teeth and the second lower comb teeth. At this time, the rotating mirror rotates around the cantilever beam, that is, step S6 is performed, so as to change the angle of the rotating mirror relative to the substrate and realize the optical path conversion of the optical signal.

[0066] Of course, if the target control electrode is the second control electrode, the free end of the upper layer cantilever of the drive signal input spring will deflect toward the second drive electrode and contact the second drive electrode, so that the drive signal is loaded to the second drive electrode and can drive the rotating mirror to rotate in another direction.

[0067] When it is necessary to restore the rotating mirror to the initial position, it is only necessary to stop applying the control signal to the target control electrode, and the free end of the drive signal input spring will restore to the initial position and will not contact the first drive electrode or the second drive electrode.

[0068] It can be seen that, by applying the control signal to the target control electrode, the present application can change the electrical connection relationship between the free end of the drive signal input spring and the two drive electrodes, so as to realize the switching of the lower comb teeth loaded with the drive signal. In this way, only one external drive circuit can meet the driving requirements of the two lower comb teeth. When the micro-electro-mechanical device of the present application is applied to an array optical switch, since the structures of the plurality of micro-electro-mechanical devices are the same, the same control electrode, drive signal input electrode and drive signal input spring can be arranged for each micro-electro-mechanical device. Therefore, the micro-electro-mechanical device can be mass-produced. When the rotating mirrors of the plurality of micro-electro-mechanical devices need to move synchronously, only one drive circuit can be arranged and drive signals can be output to the drive signal input electrodes of the plurality of micro-electro-mechanical devices at the same time, and control signals can be output to the control electrodes of the plurality of micro-electro-mechanical devices, that is, the rotating mirrors of the plurality of micro-electro-mechanical devices can be driven to rotate.

[0069] Single-channel signal control micro-electro-mechanical device second embodiment The single-channel signal control micro-electro-mechanical device of the embodiment has a base, a substrate is arranged on the base, a first upper comb and a second upper comb are arranged on the substrate, a substantially circular rotating mirror is arranged at the middle of the substrate, and the first upper comb and the second upper comb are arranged at the left side and the right side of the rotating mirror respectively. The rotating mirror is supported on the substrate through a pair of cantilever beams, and the rotating mirror can rotate around the cantilever beams, so that the rotating mirror rotates relative to the substrate.

[0070] Referring to Figure 12 With Figure 13 The base 10 is provided with a first lower comb 11 and a second lower comb 12, and the base 10 is provided with a first driving electrode 15 and a second driving electrode 16. When the rotating mirror needs to be driven to rotate, a driving voltage needs to be applied to the first lower comb 11 or the second lower comb 12. Since only one of the first lower comb 11 and the second lower comb 12 needs to be applied with the driving voltage, only one driving circuit can be arranged, and a switching device is used to switch the connection relationship between the driving circuit and the first lower comb 11 and the second lower comb 12.

[0071] The switching device of the embodiment includes a driving signal input electrode 46, a driving signal input spring 40 is arranged on one side of the driving signal input electrode 46, the fixed end 42 of the driving signal input spring 40 is fixed on a sleeve 45, the sleeve 45 is sleeved on the outer periphery of the driving signal input electrode 46, and the sleeve 45 is fixedly connected with the driving signal input electrode 46. In addition, the driving signal input spring 40 is also fixedly connected with the sleeve 45, so that the driving signal input spring 40, the sleeve 45 and the driving signal input electrode 46 are an integral component.

[0072] Different from the first embodiment, the base 10 of the embodiment is provided with only one control electrode, i.e., only the first control electrode 21 is arranged, and the second control electrode is not arranged. The first control electrode 21 has a first connecting portion 22 and a first voltage applying portion 23, the first control comb 26 is arranged at the end of the first connecting portion 22 away from the first voltage applying portion 23, the first control comb 26 has a plurality of first control teeth 27, the plurality of first control teeth 27 are arranged in parallel with each other, and a gap is formed between the two adjacent first control teeth 27. In addition, the driving signal input spring 40 is located on one side of the first control electrode 21.

[0073] The switching comb 43 is arranged on the driving signal input spring 40, the switching comb 43 includes a plurality of first switching teeth 47, the first switching teeth 47 are arranged on the side close to the first control comb 26, and the plurality of first switching teeth 47 are arranged alternately with the plurality of first control teeth 27. In addition, the lower end of the first control comb 26 is fixed on the base 10 to avoid displacement of the first control comb 26 on the base 10.

[0074] In addition, the free end 41 of the driving signal input spring 40 is arranged at one side of the first driving electrode 15, the driving signal input spring 40 comprises an upper cantilever 71 and a lower cantilever 72, and an electrically insulating layer is formed between the upper cantilever 71 and the lower cantilever 72, and the electrically insulating layer realizes the electrical insulation between the upper cantilever 71 and the lower cantilever 72. In addition, the upper cantilever 71 is electrically connected with the driving signal input electrode 46, and the switching comb teeth 43 are arranged on the lower cantilever 72.

[0075] In addition, the first driving electrode 15 extends to the direction of the second driving electrode 16 to form a first overhanging part 17, and the second driving electrode 16 extends to the direction of the first driving electrode 15 to form a second overhanging part 18, and the upper cantilever 71 is selectively connected between the first overhanging part 17 and the second overhanging part 18, so that the driving signal input electrode 46 outputs the driving signal to the first driving electrode 15 or the second driving electrode 16.

[0076] The control method of the single-channel signal controlled micro-electro-mechanical device according to the second embodiment: The control method of the single-channel signal controlled micro-electro-mechanical device according to the second embodiment is described below. In the initial state, the first control electrode is not loaded with the control signal, and the free end of the driving signal input spring is separated from the first driving electrode. At this time, the free end of the driving signal input spring is connected with the second driving electrode, that is, abuts on the second driving electrode. At this time, the driving signal input electrode can be applied with the driving signal meeting the requirement according to the rotation angle requirement of the rotating mirror, and the driving signal is output to the second lower comb teeth through the second driving electrode, so that the rotating mirror rotates around the cantilever beam, and the angle of the rotating mirror relative to the substrate changes.

[0077] When the rotating mirror needs to rotate to the other direction, the first control electrode is loaded with the control signal, so that the free end of the driving signal input spring deflects to the direction of the first driving electrode under the action of the electrostatic force, thereby realizing the connection with the first driving electrode and abutting on the first driving electrode. At this time, the free end of the driving signal input spring is separated from the second driving electrode. At this time, the driving signal input electrode can be applied with the driving signal meeting the requirement according to the rotation angle requirement of the rotating mirror, and the driving signal is output to the first lower comb teeth through the first driving electrode, so that the rotating mirror rotates around the cantilever beam, and the angle of the rotating mirror relative to the substrate changes.

[0078] Compared with the first embodiment, the control method of the present embodiment is simpler. After the rotation direction of the rotating mirror is determined, it is only needed to control whether the first driving electrode needs to be loaded or not loaded with the driving signal, without considering the second driving electrode, so that the control difficulty is reduced, and the structure of the single-channel signal controlled micro-electro-mechanical device is simpler, and the production cost is lower.

[0079] Finally, it should be noted that the above merely represents the preferred embodiments of the present application and is not intended to limit the present application, and the present application can have various changes and modifications for those skilled in the art, and any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. Single-channel signal controlled micro-electromechanical devices, including; a base body, on which first lower comb teeth and second lower comb teeth are provided, wherein the first lower comb teeth are electrically connected to the first driving electrode, and the second lower comb teeth are electrically connected to the second driving electrode; A substrate is provided above the base, and upper comb teeth and a rotating mirror are provided on the substrate, and the rotating mirror is supported on the substrate by a pair of cantilever beams; Its characteristics are: A driving signal input electrode is provided on the substrate, the driving signal input electrode is electrically connected to the driving signal input spring, the driving signal input spring is located between the first driving electrode and the second driving electrode, and the free end of the driving signal input spring can be selectively connected to the first driving electrode or the second driving electrode; A first control electrode is further provided on the substrate, the first control electrode is connected to a first control comb tooth, and a switching comb tooth is provided on the driving signal input spring.

2. The single-signal controlled MEMS device according to claim 1, wherein: A second control electrode is further provided on the substrate, and the second control electrode is connected to a second control comb tooth. The switching comb tooth is located between the first control comb tooth and the second control comb tooth.

3. The single-signal controlled MEMS device according to claim 2, wherein: The first control comb teeth include a plurality of first control teeth, and the second control comb teeth include a plurality of second control teeth; The switching comb teeth include multiple first switching teeth and multiple second switching teeth. The first switching teeth are arranged on a side close to the first control comb teeth, and the multiple first switching teeth are arranged alternately with the multiple first control teeth; the second switching teeth are arranged on a side close to the second control comb teeth, and the multiple second switching teeth are arranged alternately with the multiple second control teeth.

4. The single-signal controlled MEMS device according to claim 3, wherein: The switching comb teeth are arranged at one end of the driving signal input spring close to the driving signal input electrode.

5. The single-channel signal controlled micro-electromechanical device according to any one of claims 1 to 4, characterized in that: The fixed end of the driving signal input spring is fixed on a collar, and the collar is sleeved on the outer periphery of the driving signal input electrode.

6. The single-channel signal controlled micro-electromechanical device according to any one of claims 1 to 4, characterized in that: The drive signal input spring includes an upper cantilever and a lower cantilever, an electrical insulation layer is formed between the upper cantilever and the lower cantilever, the upper cantilever is electrically connected to the drive signal input electrode, and the upper cantilever can be selectively connected to the first drive electrode or the second drive electrode.

7. The single-signal controlled MEMS device according to claim 6, wherein: The switching comb teeth are arranged on the lower cantilever.

8. The single-signal controlled MEMS device according to any one of claims 2 to 4, characterized in that: The first control electrode has a first voltage applying portion, and the second control electrode has a second voltage applying portion; A first through hole and a second through hole are provided on the substrate. The first voltage applying part is located in the first through hole, and the second voltage applying part is located in the second through hole.

9. A control method for a single-signal controlled micro-electromechanical device, applied to the single-signal controlled micro-electromechanical device according to claim 1, characterized in that: The method includes: Applying a driving signal to the driving signal input electrode so that the free end of the driving signal input spring is connected to the first driving electrode, applying a driving signal to the driving signal input electrode, and outputting the driving signal to the first lower comb tooth through the first driving electrode; Alternatively, the application of the control signal to the first control electrode is stopped, so that the free end of the drive signal input spring is separated from the first drive electrode, and the free end of the drive signal input spring is connected to the second drive electrode; a drive signal is applied to the drive signal input electrode, and the drive signal is output to the second lower comb teeth through the second drive electrode; The rotating mirror is caused to rotate around the cantilever beam, and the angle of the rotating mirror relative to the substrate changes.

10. A control method for a single-signal controlled micro-electromechanical device, applied to the single-signal controlled micro-electromechanical device according to any one of claims 2 to 8, characterized in that: The method includes: Applying a control signal to a target control electrode, the target control electrode being one of the first control electrode and the second control electrode, so that the free end of the drive signal input spring is connected to the first drive electrode or the second drive electrode; A driving signal is applied to the driving signal input electrode, and the driving signal is output to the first lower comb tooth through the first driving electrode, or is output to the second lower comb tooth through the second driving electrode, so that the rotating mirror rotates around the cantilever beam, and the angle of the rotating mirror relative to the substrate changes.

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