Method for fast switching of laser light path and related device

Abstract

The present application relates to the technical field of laser processing, in particular to a laser light path quick switching method and related equipment. The steps of the laser light path quick switching method include: a single laser emits original laser, which enters a multi-mirror group through a laser collimator or directly to adjust the transmission path, selectively enables beam expansion by a beam expander according to processing requirements, forms a preliminary shaped beam, and constructs a basic light path to adapt to subsequent optical devices. The present application realizes the precise cutting of the target light spot element in the light path by integrating the quick switching device of the driving mechanism and the grating ruler full closed loop control, and driving the pre-installed multi-DOE mobile carrier to solve the problem of quick adaptation of multiple light spot patterns in a single laser system.

Description

Technical Field

[0001] This invention relates to the field of laser processing technology, specifically to a method and related equipment for rapid switching of laser optical paths. Background Technology

[0002] In the laser processing of solar cells, different laser spot patterns are required for different processing steps, such as edge cutting, electrode grooving, and microstructure etching, to match material properties and processing precision requirements. These patterns include Gaussian spots, flat-top spots, and lattice spots. Traditional solutions typically involve configuring multiple lasers to correspond to different spot generation paths, or manually changing optical components to achieve spot switching. However, multi-laser systems suffer from high equipment costs, complex optical path calibration, and redundant space requirements. Manual component replacement faces technical bottlenecks such as low switching efficiency, unstable positioning accuracy, and difficulty adapting to automated production processes. Especially in high-precision processing scenarios, positional deviations of optical components, accumulated thermal deformation of the drive mechanism, and collaborative errors between multiple optical paths can lead to fluctuations in processing quality, making it difficult to meet the stringent efficiency and yield requirements of large-scale solar cell production. Therefore, how to construct an optical path switching scheme with rapid switching capability, high-precision positioning characteristics, and long-term optical stability within a single laser architecture has become a problem restricting the development of laser processing technology. Summary of the Invention

[0003] This disclosure proposes a method and related equipment for rapid switching of laser optical paths, aiming to overcome at least one of the defects existing in the prior art.

[0004] To achieve the above objectives, the technical solution disclosed in this invention is as follows:

[0005] According to one aspect of this disclosure, a method for rapid switching of laser optical paths is provided, comprising the steps of:

[0006] A single laser emits raw laser light, which is then collimated by a laser collimator or directly enters a multi-channel mirror group to adjust the transmission path. Depending on the processing requirements, a beam expander is selectively activated to expand the beam and form a preliminary shaped beam, thus constructing a basic optical path that is compatible with subsequent optical devices.

[0007] A reference machining coordinate system is established by initial positioning using a high-speed galvanometer. At least two DOEs corresponding to the spot patterns are pre-installed on the mobile carrier of the fast switching device, providing a hardware foundation and position reference for switching.

[0008] When it is necessary to switch the light spot, the fast switching device drives the moving carrier to move along the linear guide rail, so that the target DOE enters the optical path. At the same time, the position data is collected in real time by the grating ruler and fed back to the control system until the target DOE reaches the preset optical reference position.

[0009] After the target DOE enters, the initial shaping beam is modulated to form a target spot. The target spot is driven by a high-speed galvanometer to process the surface of the solar cell. The laser output rhythm and processing trajectory are matched by controlling the laser on and off through an optical shutter, which is used for rapid adaptation of a single laser to multi-spot processing tasks.

[0010] Furthermore, the selective activation of the beam expander step is as follows: when the original laser divergence angle exceeds the preset processing accuracy threshold, the laser collimator is activated to collimate the laser beam; when the original laser divergence angle meets the processing requirements, the collimator is skipped and the beam directly enters the reflector group, thereby improving the flexibility of optical path construction through differentiated optical path configuration.

[0011] Furthermore, the mobile carrier is equipped with at least two DOE installation stations, each station corresponding to a DOE with a different spot pattern, and the distance between adjacent stations is equal to the single effective travel of the linear guide rail. The station-based design enables rapid positioning and switching of the DOE.

[0012] Furthermore, the control system compares the position data fed back by the grating ruler with the coordinate parameters of the preset optical reference position in real time, and dynamically adjusts the output power of the drive component through the PID algorithm to form a position error compensation mechanism, so that the positioning accuracy of repeated DOE is ≤±5μm.

[0013] Furthermore, the optical shutter is positioned on the transmission path of the initial shaping beam and is synchronously linked with the motion control signal of the high-speed galvanometer. When the high-speed galvanometer moves to the non-processing area, the optical shutter closes to cut off the laser output; when the high-speed galvanometer is positioned to the processing area, the optical shutter opens to conduct the laser, thereby reducing ineffective laser loss through timing coordination.

[0014] Furthermore, the process of establishing the reference machining coordinate system includes: selecting at least three positioning marker points on the surface of the solar cell through the calibration program of the high-speed galvanometer, fitting an XY plane machining coordinate system based on the positioning marker points, and determining the focal length compensation parameters through a Z-axis rangefinder to construct a three-dimensional machining reference system.

[0015] Furthermore, the target light spot pattern includes Gaussian light spot, flat-top light spot and dot matrix light spot. Different DOEs correspond to different light spot patterns. Through the optical path switching of the fast switching device, a single laser sequentially performs multiple processing steps such as edge cutting of solar cell, electrode grooving and microstructure etching.

[0016] Furthermore, the rapid switching device includes a drive mechanism and a fully closed-loop feedback assembly for the grating ruler. The drive mechanism is any one of a voice coil motor, a linear motor, a cylinder, or a hydraulic cylinder.

[0017] Furthermore, the rapid switching device also includes a water cooling system, which uses circulating coolant to control the temperature of the voice coil motor or linear motor in order to maintain the operating accuracy of the drive components during high-frequency switching.

[0018] Furthermore, before the target DOE enters the optical path, an optical sensor mounted on the mobile carrier detects the installation attitude of the target DOE in real time. When the DOE deflection angle is detected to exceed 0.1°, an attitude calibration program is triggered to adjust the DOE's pose to ensure optical modulation accuracy.

[0019] According to another aspect of this disclosure, a laser optical path fast switching system is provided for performing the laser optical path fast switching method as described above, the system comprising:

[0020] The laser shaping module is used to control the single laser to emit the original laser, and to collimate, adjust the path and expand the original laser by selectively activating the laser collimator, the reflector group and the beam expander to generate a preliminary shaped beam.

[0021] The spot configuration module is used to establish a reference processing coordinate system through a high-speed galvanometer, pre-install the DOE corresponding to the preset spot pattern on the moving carrier of the fast switching device, and determine the optical reference position of each DOE.

[0022] The switching execution module is used to drive the drive mechanism of the fast switching device to move the mobile carrier, and combined with the position feedback of the grating ruler, realize the full closed-loop precise positioning of the DOE and complete the optical path switching.

[0023] The processing activation module is used to modulate the initial shaped beam into a target spot using a target DOE, drive the spot processing through a high-speed galvanometer, and synchronously control the on / off switching of the optical shutter to match the processing rhythm in order to perform multi-spot processing tasks.

[0024] Furthermore, the switching execution module includes:

[0025] The drive control unit is used to control the start, stop and speed of the voice coil motor / linear motor, and integrates a water cooling system to dissipate heat from the drive components;

[0026] The position feedback unit is used to collect the position data of the moving carrier in real time through the grating ruler and transmit it to the control system;

[0027] The attitude calibration unit is used to detect the DOE mounting attitude through optical sensors and trigger the pose adjustment program to ensure optical modulation accuracy.

[0028] According to another aspect of this disclosure, a laser optical path fast switching device is provided, comprising the laser optical path fast switching system as described above, and further comprising:

[0029] The optical path assembly includes a single laser, an optical shutter, a laser collimator, a multi-channel mirror group, a beam expander, a high-speed galvanometer, and a fast switching device arranged along the optical path, arranged in sequence.

[0030] The fast switching device includes:

[0031] Linear guide rails are set in a direction perpendicular to the optical path;

[0032] The mobile carrier is slidably mounted on the linear guide rail and is provided with at least two DOE mounting stations.

[0033] A drive component is used to drive the mobile carrier to move along a linear guide rail;

[0034] A grating ruler, parallel to the linear guide rail, is used to collect the position data of the moving carrier in real time;

[0035] A water-cooling system is used to circulate and cool the drive components to maintain their operating temperature ≤40℃.

[0036] Furthermore, the laser collimator and beam expander are both connected to the optical path via detachable flanges. The multi-channel mirror group includes at least two mirrors. Adjusting the mirror angle changes the laser transmission path. The coaxiality between the optical axis of the initial shaped beam and the incident optical axis of the high-speed galvanometer is ≤±10μm.

[0037] According to another aspect of this disclosure, a computer-readable storage medium is provided having a computer program stored thereon, which, when executed by a processor, implements the steps of the laser optical path rapid switching method as described above.

[0038] The beneficial effects of this invention are:

[0039] This invention solves the problem of rapid adaptation of multiple spot patterns in a single laser system by using a fast switching device that integrates a drive mechanism and a fully closed-loop control of a grating ruler to drive a mobile carrier pre-installed with multiple DOEs.

[0040] Specifically, the workstation-based DOE installation design of the rapid switching device works in conjunction with the high-precision positioning mechanism of the linear guide rail, combined with real-time position feedback from the grating ruler and error compensation from the PID algorithm, to control the DOE repeatability within ±5μm, ensuring the consistency of the optical reference when switching between different light spots; the water-cooling system effectively suppresses the impact of thermal deformation on positioning accuracy during high-frequency switching, ensuring long-term processing stability.

[0041] Furthermore, by selectively activating the optical path shaping mechanism of the collimator, beam expander, and reflector group, and in conjunction with the three-dimensional reference processing coordinate system established by the high-speed galvanometer, end-to-end parameter matching from laser emission to beam modulation is achieved, avoiding the optical path calibration redundancy of traditional multi-laser systems.

[0042] Furthermore, the coordinated control strategy of the optical shutter and high-speed galvanometer, by timing-coordinated cutoff of laser output in non-processed areas, improves material utilization while reducing equipment energy consumption. In addition, the real-time detection and automatic calibration function of the optical sensor for the DOE mounting posture further eliminates beam modulation errors caused by component mounting deviations, ensuring high-precision beam output in complex processing scenarios. This invention's technical solution, through the synergy of hardware structural innovation and control strategy optimization, constructs a rapid switching system for multiple beam patterns on a single laser platform. This not only overcomes the cost and space limitations of traditional technologies but also significantly improves switching efficiency and processing accuracy in automated processing, providing technical support for the large-scale, refined production of solar cells.

[0043] The above description is merely an overview of the technical solution of the present invention. In order to better understand the technical means of the present invention and to implement it in accordance with the contents of the specification, the following describes the preferred embodiments of the present invention in detail with reference to the accompanying drawings. Attached Figure Description

[0044] Figure 1 This is a flowchart of a method for rapid switching of laser optical paths in one embodiment of the present invention;

[0045] Figure 2 This is a simplified flowchart of a laser optical path rapid switching method in one embodiment of the present invention;

[0046] Figure 3 This is a schematic diagram of a rapid laser path switching process in one embodiment of the present invention;

[0047] Figure 4 This is a schematic diagram of a laser system structure in one embodiment of the present invention. Figure 1 ;

[0048] Figure 5 This is a schematic diagram of a laser system structure in one embodiment of the present invention. Figure 2 .

[0049] In the diagram: 1. Collimator; 2. Optical shutter; 3. Mirror group; 4. Beam expander; 5. DOE; 6. Quick switch; 7. Galvanometer. Detailed Implementation

[0050] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are some embodiments of the present invention, but not all embodiments.

[0051] like Figures 1 to 5 As shown, the present invention provides the following preferred embodiments:

[0052] Example 1: To address the issues of low switching efficiency and difficulty in ensuring optical reference consistency in multi-spot processing tasks using a single laser system, this example provides a method for rapid laser path switching. Through dynamic configuration of the laser transmission path, pre-installation layout of multiple diffractive optical elements (DOE5), and high-precision position feedback control, efficient collaborative processing of multiple spot spots from a single light source is achieved. Figure 1 and Figure 2 As shown, the steps for switching methods are as follows:

[0053] S100: A single laser emits raw laser light, which is then collimated by laser collimator 1 or directly enters multi-channel mirror group 3 to adjust the transmission path. Depending on the processing requirements, beam expander 4 is selectively activated to expand the beam and form a preliminary shaped beam to build a basic optical path suitable for subsequent optical devices.

[0054] S200: A reference machining coordinate system is established through initial positioning of the high-speed galvanometer 7, and DOE5 corresponding to at least two types of spot patterns are pre-installed on the moving carrier of the fast switching device 6 to provide a hardware foundation and position reference for switching.

[0055] S300: When it is necessary to switch the light spot, the fast switching device 6 drives the moving carrier to move along the linear guide rail, so that the target DOE5 enters the optical path. At the same time, the position data is collected in real time by the grating ruler and fed back to the control system until the target DOE5 reaches the preset optical reference position.

[0056] S400: After the target DOE5 enters, the initial shaping beam is modulated to form the target spot. The target spot is driven by the high-speed galvanometer 7 to process on the surface of the solar cell. The laser on / off is controlled by the optical shutter 2 to match the laser output rhythm and processing trajectory, which is used for the rapid adaptation of a single laser to multi-spot processing tasks.

[0057] Specifically, a configurable optical path shaping path is constructed for the raw laser emitted by a single laser. After the raw laser is emitted from the laser, it first faces selective configuration of collimation processing: when the system detects that the divergence angle of the raw laser exceeds the adaptation range of subsequent optical devices, the beam is guided into the laser collimator 1 for collimation to compress the divergence angle to within a preset accuracy threshold; if the divergence angle of the raw laser already meets the processing requirements, it directly bypasses the collimator 1, passes through the aperture for preliminary beam limiting, and enters the multi-channel mirror group 3. The multi-channel mirror group 3 contains at least two adjustable-angle mirrors. By adjusting the azimuth and elevation angles of the mirrors through a precision turntable, the three-dimensional spatial adjustment of the laser transmission path is realized, so that the beam direction is adapted to the incident angle requirements of subsequent optical devices. On this basis, the system selectively activates the beam expander 4 according to the size requirements of the target spot: when the required incident beam aperture of the target DOE5 is larger than the diameter of the raw laser, the beam expander 4 group is triggered to radially expand the beam, and the beam expansion ratio is preset by the processing parameters; if beam expansion is not required, the beam passes directly. After the above processing, the resulting preliminary shaped beam has a stable transmission direction, a controllable beam diameter, and a low divergence angle, providing standardized incident conditions for subsequent DOE5 modulation.

[0058] Furthermore, in the construction of the reference machining coordinate system and the pre-installation of DOE5, a global machining reference is first established through the initial positioning function of the high-speed galvanometer 7. The position sensor on the high-speed galvanometer 7 performs a spatial scan of the machining platform, selects at least three feature marker points on the surface of the solar cell, and constructs an XY plane coordinate system based on a three-point fitting algorithm. Its origin is usually set at the geometric center of the solar cell or the process reference point. At the same time, the height of the workpiece surface is measured by a Z-axis ranging module such as a laser displacement sensor to generate focal length compensation parameters and construct a three-dimensional machining reference system including Z-axis coordinates to ensure the accuracy of the subsequent spot focusing position. Meanwhile, the moving carrier of the rapid switching device 6 completes the pre-installation of DOE5: the moving carrier is a high-precision mechanical structural component with at least two optical mounting stations on its surface. Each station is equipped with precision positioning pins and clamping mechanisms to fix the DOE5 corresponding to different spot patterns. The workstation layout follows the principle of vertical alignment of the optical path, meaning that the optical center of each DOE5 is located on a straight line perpendicular to the laser transmission direction. The spacing between adjacent workstations is optimized based on the minimum stepping accuracy of the drive mechanism and the optical path switching time requirements, ensuring the uniqueness of the beam incident position during switching. After pre-installation, the optical reference position of each DOE5 is calibrated using a laser collimator, and its spatial coordinate parameters relative to the reference coordinate system are recorded, providing a positional reference for subsequent switching control.

[0059] Furthermore, when spot switching is required, the rapid switching device 6 enters the dynamic control process. The drive mechanism, such as a servo motor or pneumatic actuator, receives commands from the control system and drives the moving carrier to reciprocate along a linear guide rail. The linear guide rail employs a high-precision ball screw or air-bearing guide rail structure to ensure low friction and high rigidity during movement. During movement, a grating ruler mounted on one side of the guide rail collects the position data of the moving carrier in real time. This data is transmitted to the control system in the form of incremental pulse signals and compared in real time with the preset target DOE5 optical reference position. The control system generates a drive compensation signal based on the position deviation value and adjusts the output power of the drive mechanism through a closed-loop control algorithm until the optical center of the target DOE5 is precisely aligned with the optical path axis. It is worth noting that during the switching process, it is necessary to ensure that the movement trajectory of the moving carrier remains strictly perpendicular to the optical path axis to avoid angular displacement when the DOE5 enters. For this purpose, the guide rail mounting surface is precision ground, with flatness error controlled within the micrometer level. Once the target DOE5 reaches the preset position, the system triggers the position detection sensor, such as the fiber optic sensor, to lock the current position. At the same time, it starts the optical path connectivity confirmation program and verifies whether the light spot is correctly incident on the effective area of ​​DOE5 through the beam analyzer, ensuring the reliability of the switching action.

[0060] Furthermore, after the target DOE5 enters the optical path, the initially shaped beam is modulated by its surface microstructure to generate the desired target spot, such as a Gaussian spot or a flat-top spot. The high-speed galvanometer 7 drives the target spot to scan and process the surface of the solar cell according to the trajectory data planned by the reference processing coordinate system. During this process, the optical shutter 2, as a laser on / off control element, achieves time synchronization with the motion signal of the galvanometer 7: when the galvanometer 7 is in the idling stage outside the processing area, the optical shutter 2 receives a closing command to cut off the laser output, avoiding ineffective ablation; when the galvanometer 7 is positioned at the starting point of the processing trajectory and begins scanning, the optical shutter 2 opens synchronously, ensuring that the laser energy accurately matches the processing path. The response time of the optical shutter 2 and the positioning accuracy of the galvanometer 7 are calibrated at the system level, and the time synchronization error between the two is controlled at the microsecond level to eliminate energy fluctuations at the start and end positions of processing.

[0061] Furthermore, the mechanical mounting structures of all optical components in the optical path are made of thermally stable materials, such as Invar alloy, to reduce the impact of ambient temperature changes on the collimation of the optical path. The support of the multi-channel mirror group 3 is equipped with an angle fine-tuning mechanism, allowing the reflection angle to be adjusted within a sub-milliradian range to compensate for mechanical deformation errors during long-term use. The surface of the moving carrier of the fast switching device 6 is coated with an anti-fouling coating to prevent dust particles from affecting the optical performance of DOE5. At the same time, an air curtain is set at the front end of the optical path to create a positive pressure airflow environment, preventing external contaminants from entering the optical path.

[0062] The advantages of this embodiment are that, through the selective configuration mechanism of optical path shaping, dynamic matching between the original laser parameters and subsequent optical devices is achieved, avoiding the limitations of fixed optical path structures. The pre-installed DOE5 workstation layout combined with high-precision position feedback control constructs a hardware foundation and control benchmark for rapid switching, ensuring consistency of optical benchmarks when switching between different light spots. The timing-coordinated control of the shutter 2 and galvanometer 7 improves processing accuracy while reducing energy loss, forming a complete control system from laser emission to light spot processing. This embodiment breaks through the cost bottleneck of traditional multi-laser systems, providing a systematic technical solution for multi-process integrated processing of solar cells through efficient switching of multiple light spots from a single source. It is particularly suitable for automated production line scenarios with stringent requirements for processing efficiency and equipment integration.

[0063] Example 2: To address the challenge of balancing positioning efficiency and accuracy during multi-DOE5 switching, this example optimizes the mobile carrier structure of the rapid switching device 6 with a workstation-based design. By standardizing the workstation layout and matching the guide rail travel, rapid positioning and reliable entry of the target DOE5 are achieved.

[0064] The mobile carrier is made of high-strength aluminum alloy and is precision-machined to form at least two DOE5 mounting stations arranged along the linear guide rail. The optical center line connecting each station is strictly perpendicular to the direction of guide rail movement and orthogonal to the laser transmission axis. Each station has an independent optical mounting interface, including high-precision positioning pin holes, an angle fine-tuning mechanism, and a vacuum adsorption device: the positioning pin holes cooperate with the positioning posts on the DOE5 substrate to achieve coarse positioning at the ±10μm level; the angle fine-tuning mechanism consists of a piezoelectric ceramic actuator and a flexible hinge, allowing adjustment of the DOE5 attitude within a range of ±0.05° to compensate for angle deviations during installation; the vacuum adsorption device generates negative pressure through a micro-pore array distributed on the surface of the station to firmly fix the DOE5 substrate to the carrier surface, avoiding vibration and displacement during high-speed movement.

[0065] The design of the spacing between adjacent workstations follows the principle of "matching the effective travel distance in a single operation," meaning that the spacing is equal to the maximum travel distance that the linear guide can accurately reach in a single drive cycle. This travel distance is determined by the stepping accuracy and acceleration characteristics of the drive mechanism. For example, when using a servo motor with a resolution of 1μm to drive a ball screw guide, the spacing between adjacent workstations is set to N times the screw pitch (N being an integer). This ensures that the moving carrier can move directly between workstations at a constant speed without intermediate deceleration or secondary positioning during switching, thus shortening the switching time. It's important to understand that the precise calibration of the workstation spacing is achieved using a laser interferometer. Before the equipment leaves the factory, the optical reference position of each workstation is mapped to coordinates, establishing a workstation coordinate database that includes position deviation compensation values ​​for the control system to access during switching.

[0066] The linear guide rail adopts a dual-rail parallel layout, coupled with four-way equal-load rolling bearings, to ensure the rigidity and straightness of the moving carrier during high-speed movement. The straightness error of the guide rail is controlled within ≤5μm / m. The drive mechanism and the carrier are connected by a flexible coupling to absorb minor vibrations in the transmission system and avoid mechanical impact affecting the DOE5 installation posture. Each station corresponds to a DOE5 with a different spot pattern. For example, station one installs a Gaussian spot DOE5, and station two installs a flat-top spot DOE5. The optical parameters of each DOE5 (such as focal length and diffraction efficiency) are pre-entered into the control system. When the target station enters the optical path, the system automatically retrieves the modulation parameters of the corresponding DOE5 to achieve seamless switching of spot type.

[0067] Furthermore, an optical path alignment mark is installed at the front end of the mobile carrier. This mark consists of high-precision scribed lines and a diffuse reflection prism. When the carrier moves, a vision sensor installed beside the optical path identifies the position of the scribed lines to help determine whether the station switch is in place, forming a redundant verification of the grating ruler's position feedback. The surface of the DOE5 installation station is optically coated to reduce the impact of stray light reflection on beam quality. At the same time, dustproof brushes are installed at the edge of the carrier to clean the guide rail surface as the carrier moves, preventing the accumulation of particles from affecting positioning accuracy.

[0068] The advantage of this embodiment lies in transforming the DOE5 switching process into a standardized station positioning action through precise matching of the workstation layout and guide rail travel, eliminating the time-consuming steps of repeated light adjustments in traditional discrete installation methods. The geometric relationships between workstations are solidified through mechanical design, combined with a high-precision positioning mechanism and a pre-calibrated coordinate database, ensuring that the optical center of the target DOE5 is accurately aligned with the optical path axis during each switch, avoiding reference deviations caused by manual adjustments or random positioning. This structured design significantly improves the efficiency and reliability of multi-spot switching, making it particularly suitable for automated production lines requiring frequent switching between different processing steps, and providing hardware architecture support for multi-task integrated processing of single laser systems.

[0069] Example 3: To solve the problem of balancing positioning efficiency and accuracy during multi-DOE5 switching, this example optimizes the mobile carrier structure of the fast switching device 6 by designing it in a workstation-based manner. Through standardized workstation layout and guide rail stroke matching, the target DOE5 can be quickly positioned and reliably engaged.

[0070] The mobile carrier is made of high-strength aluminum alloy and is precision-machined to form at least two DOE5 mounting stations arranged along the linear guide rail. The optical center line connecting each station is strictly perpendicular to the direction of guide rail movement and orthogonal to the laser transmission axis. Each station has an independent optical mounting interface, including high-precision positioning pin holes, an angle fine-tuning mechanism, and a vacuum adsorption device: the positioning pin holes cooperate with the positioning posts on the DOE5 substrate to achieve coarse positioning at the ±10μm level; the angle fine-tuning mechanism consists of a piezoelectric ceramic actuator and a flexible hinge, allowing adjustment of the DOE5 attitude within a range of ±0.05° to compensate for angle deviations during installation; the vacuum adsorption device generates negative pressure through a micro-pore array distributed on the surface of the station to firmly fix the DOE5 substrate to the carrier surface, avoiding vibration and displacement during high-speed movement.

[0071] The design of the spacing between adjacent workstations follows the principle of "matching the effective travel distance in a single operation," meaning that the spacing is equal to the maximum travel distance that the linear guide can accurately reach in a single drive cycle. This travel distance is determined by the stepping accuracy and acceleration characteristics of the drive mechanism. For example, when using a servo motor with a resolution of 1μm to drive a ball screw guide, the spacing between adjacent workstations is set to N times the screw pitch (N being an integer). This ensures that the moving carrier can move directly between workstations at a constant speed without intermediate deceleration or secondary positioning during switching, thus shortening the switching time. It's important to understand that the precise calibration of the workstation spacing is achieved using a laser interferometer. Before the equipment leaves the factory, the optical reference position of each workstation is mapped to coordinates, establishing a workstation coordinate database that includes position deviation compensation values ​​for the control system to access during switching.

[0072] The linear guide rail adopts a dual-rail parallel layout, coupled with four-way equal-load rolling bearings, to ensure the rigidity and straightness of the moving carrier during high-speed movement. The straightness error of the guide rail is controlled within ≤5μm / m. The drive mechanism and the carrier are connected by a flexible coupling to absorb minor vibrations in the transmission system and avoid mechanical impact affecting the DOE5 installation posture. Each station corresponds to a DOE5 with a different spot pattern. For example, station one installs a Gaussian spot DOE5, and station two installs a flat-top spot DOE5. The optical parameters of each DOE5 (such as focal length and diffraction efficiency) are pre-entered into the control system. When the target station enters the optical path, the system automatically retrieves the modulation parameters of the corresponding DOE5 to achieve seamless switching of spot type.

[0073] Furthermore, an optical path alignment mark is installed at the front end of the mobile carrier. This mark consists of high-precision scribed lines and a diffuse reflection prism. When the carrier moves, a vision sensor installed beside the optical path identifies the position of the scribed lines to help determine whether the station switch is in place, forming a redundant verification of the grating ruler's position feedback. The surface of the DOE5 installation station is optically coated to reduce the impact of stray light reflection on beam quality. At the same time, dustproof brushes are installed at the edge of the carrier to clean the guide rail surface as the carrier moves, preventing the accumulation of particles from affecting positioning accuracy.

[0074] The advantage of this embodiment lies in transforming the DOE5 switching process into a standardized station positioning action through precise matching of the workstation layout and guide rail travel, eliminating the time-consuming steps of repeated light adjustments in traditional discrete installation methods. The geometric relationships between workstations are solidified through mechanical design, combined with a high-precision positioning mechanism and a pre-calibrated coordinate database, ensuring that the optical center of the target DOE5 is accurately aligned with the optical path axis during each switch, avoiding reference deviations caused by manual adjustments or random positioning. This structured design significantly improves the efficiency and reliability of multi-spot switching, making it particularly suitable for automated production lines requiring frequent switching between different processing steps, and providing hardware architecture support for multi-task integrated processing of single laser systems.

[0075] Example 4: To solve the problem of inconsistent optical reference caused by the accumulation of position errors during rapid switching, this example constructs a dynamic error compensation mechanism based on the full closed-loop feedback of the grating ruler and the PID algorithm. Through real-time position comparison and drive parameter adjustment, it ensures that the repeatability of the DOE5 meets the requirements of high-precision machining.

[0076] Specifically, the control system adopts a distributed architecture, including a motion controller, servo driver, and data acquisition module. When the rapid switching device 6 receives a spot switching command, the motion controller first retrieves the preset optical reference position coordinates (X, Y, F, G, I) of the target DOE5 from the workstation coordinate database. ref Y ref This coordinate system establishes a local coordinate system with the intersection of the laser transmission axis and the moving plane of the mobile carrier as its origin. After the driving component (such as a linear motor) starts the mobile carrier, a grating ruler installed along the entire length of the guide rail collects the carrier's position data (X) in real time at nanometer-level resolution. real Y real The data is transmitted to the motion controller via a high-speed bus, and compared with the preset coordinates cycle by cycle to calculate the position deviation.

[0077]

[0078] Furthermore, the PID algorithm module dynamically adjusts the drive voltage or current based on the real-time deviation value: the proportional (P) element quickly responds to the current deviation, providing immediate compensation force; the integral (I) element accumulates historical deviations, eliminating static positioning errors; and the derivative (D) element predicts the deviation change trend, suppressing system oscillations. It is important to note that the PID parameters are determined through offline identification methods. A dynamic model is established by combining the mechanical characteristics of the guide rail, such as mass and damping coefficients. The proportional, integral, and derivative coefficients are optimized through step response testing, ensuring the system maintains a fast response while avoiding overshoot. When the position deviation shrinks to a set threshold (e.g., ±10μm), the drive component switches to low-speed servo mode for fine positioning adjustments until both ΔX and ΔY converge to within ±5μm, triggering the positioning signal.

[0079] Furthermore, to enhance the anti-interference capability of the feedback system, the grating ruler adopts an absolute encoding scheme, avoiding the drawback of incremental encoding requiring resetting to zero after power failure. Simultaneously, an electromagnetic shielding layer is installed in the signal transmission line to reduce interference from high-frequency equipment such as frequency converters and lasers on the position data. The motion controller features feedforward compensation, pre-calculating the drive energy based on the target position and current speed to shorten the dynamic response time. Especially during rapid switching between adjacent workstations, pre-acceleration and pre-deceleration strategies control the average switching time to sub-second levels.

[0080] Furthermore, the system incorporates a temperature compensation mechanism. Thermocouples installed near the drive assembly and guide rail monitor the ambient temperature in real time. When temperature changes cause thermal expansion of the guide rail, resulting in pitch errors, the control system automatically corrects the position conversion coefficient of the grating ruler based on the material's thermal expansion coefficient, compensating for the impact of temperature drift on positioning accuracy. A periodic calibration procedure uses a laser tracker to remeasure the actual position of each station, updating the compensation parameters of the preset optical reference position and eliminating systematic deviations caused by mechanical wear during long-term use.

[0081] The advantage of this embodiment lies in the fact that, through the high-precision position feedback of the grating ruler and the dynamic compensation of the PID algorithm, a closed-loop control system with error self-correction capability is constructed. This improves the positioning accuracy of the DOE5 from ±50μm level in traditional open-loop control to ±5μm level, meeting the stringent requirements of high-precision machining for optical reference consistency. The control strategy of this embodiment not only effectively suppresses the influence of mechanical defects such as the backlash of the drive mechanism and the straightness error of the guide rail, but also ensures long-term operational stability through temperature compensation and periodic calibration mechanisms. This provides a reliable control basis for processes sensitive to light spot position, such as microstructure etching of solar cells and precision grooving of electrodes, ensuring consistent processing quality during multi-spot switching.

[0082] Example 5: To address the issues of material damage and device lifespan loss caused by ineffective energy output during laser processing, this example further optimizes the laser on / off control strategy. By linking the motion states of the optical shutter 2 and the high-speed galvanometer 7 in real time, a laser timing control mechanism based on processing area identification is constructed.

[0083] The shutter 2 assembly adopts an electromagnetically driven fast-switching structure, integrated into the transmission path of the initial shaping beam. Its aperture dynamically matches the beam diameter, ensuring energy cutoff efficiency during optical path switching. The high-speed galvanometer 7, acting as the beam deflection actuator, has X and Y axis servo motors equipped with absolute encoders to provide real-time feedback on the mirror's deflection angle. After kinematic conversion, the actual position coordinates of the current light spot on the processing plane are obtained. The control system pre-defines the coordinate boundaries between the effective processing area and the non-processing area by parsing the processing trajectory file. When the galvanometer 7 receives a positioning command, it synchronously sends a state pre-judgment signal to the shutter 2: if the target position is located in a non-processing area, such as a cross-area movement path or a positioning calibration area, the shutter 2 remains closed, cutting off laser output; if the target position falls within the processing area boundary, and the position error fed back by the galvanometer 7 converges to an allowable range (determined by processing accuracy requirements), then the shutter 2 is triggered to open, enabling laser transmission.

[0084] It should be noted that the timing logic of the linkage control is set with a dual confirmation mechanism: on the one hand, the position feedback signal of the galvanometer 7 must simultaneously meet the conditions that the coordinates are within the processing area and the speed is below the set threshold to avoid edge blurring caused by opening during movement; on the other hand, the opening response time of the optical shutter 2 must match the laser's output delay. By measuring the timing difference between the optical shutter 2's action delay and the laser's Q-switch trigger signal using an oscilloscope, a compensation delay is added to the control algorithm to ensure stable laser energy output when the light spot reaches the processing area. The mechanical structure of the optical shutter 2 is supported by an air bearing to reduce vibration interference during the switching process. Its light-transmitting surface is coated with a combination of a total reflection film and an anti-reflection film to reduce light energy loss and stray light reflection.

[0085] Furthermore, the system incorporates a dynamic safety boundary monitoring module: when the galvanometer 7's actual position exceeds the preset processing area due to mechanical failure or signal interference, the shutter 2 automatically closes and triggers an emergency stop procedure, regardless of whether it is in processing mode, to prevent workpiece damage caused by accidental laser irradiation. In multi-axis linkage processing scenarios, the shutter 2's opening and closing logic is not only related to the position of the galvanometer 7 but also synchronously acquires the workpiece stage's displacement signal. Through a coordinate system transformation algorithm, the galvanometer 7's spot position is mapped to the workpiece's actual processing coordinates, ensuring that the shutter 2 only opens when the spot covers the effective processing area during workpiece movement.

[0086] Furthermore, the linkage control parameters between the shutter 2 and the galvanometer 7 can be customized via a human-machine interface, allowing users to set safe distances and speed triggering conditions for non-processing areas based on the thermal damage thresholds of different processed materials. For example, for processing brittle materials, the boundary of the non-processing area can be extended to 500 μm outside the processing pattern, and the opening speed threshold can be reduced to 50 mm / s to avoid laser misoperation due to inertial overtravel during high-speed movement. This timing coordination mechanism based on position feedback and processing logic effectively avoids invalid laser output caused by positioning delays or trajectory planning errors in traditional independent control methods, improving the safety of the processing process and the accuracy of material handling from the perspective of energy control.

[0087] The advantage of this embodiment lies in the fact that, through the state linkage control of the optical shutter 2 and the high-speed galvanometer 7, a precise mapping relationship between energy output and the processing area is established. This reduces laser loss in unnecessary areas and avoids the thermal impact of ineffective irradiation on the workpiece surface. This timing coordination mechanism is not only applicable to planar processing scenarios but can also be extended to curved surface processing through three-dimensional coordinate mapping. It provides a reliable energy control solution for high-precision laser micromachining equipment, especially in the precision processing of brittle materials such as solar cells, effectively reducing the scrap rate caused by incorrect energy output.

[0088] Example 6: To solve the problem of insufficient positioning accuracy caused by the deviation of the reference coordinate system in the machining of complex curved surfaces, this example optimizes the construction method of the machining reference system. Through multi-sensor fusion calibration, a three-dimensional machining reference including planar coordinates and focal length compensation is established to ensure the consistency of machining under different work positions and workpiece postures.

[0089] Furthermore, the establishment of the reference machining coordinate system begins with the calibration procedure of the high-speed galvanometer 7: three non-collinear positioning markers with high-contrast graphics, such as circular targets with a diameter of 0.5 mm, are selected on the surface of the solar cell. The approximate positions of these markers in the workpiece coordinate system are initially determined using a vision camera. The galvanometer 7 drives the light spot to scan the center of each marker point sequentially, and a photodetector is used to detect the peak position of the light spot's reflected signal to obtain the coordinates (θ1, φ1), (θ2, φ2), and (θ3, φ3) of the marker points in the galvanometer 7 coordinate system. Based on the principle of spatial three-point coordinate transformation, an XY plane machining coordinate system is formed by fitting using the least squares method. The origin of this coordinate system is defined as the geometric centroid of the plane determined by the three points. The X-axis and Y-axis correspond to the two orthogonal principal directions of the fitted plane, respectively. The fitting error is evaluated using the root mean square deviation to ensure that the flatness error is ≤5 μm.

[0090] Furthermore, the Z-axis reference establishment relies on a laser rangefinder module. This module employs the triangulation principle, emitting an auxiliary beam with a wavelength different from the processing laser, such as 650nm red light, perpendicularly illuminating the workpiece surface. A CCD sensor receives the diffuse reflection spot, and the spot offset is calculated to determine the workpiece surface height Z. Considering potential bending deformation or thickness differences in the solar cells, the system simultaneously acquires the Z-coordinates of three points during the marking point calibration process. A height distribution model of the workpiece surface is generated through quadratic surface fitting, thereby determining the focal length compensation parameters for each processing area. It is important to understand that the calculation of the focal length compensation parameters combines the field lens focal length of the galvanometer 7 with the workpiece surface curvature. By adjusting the height of the Z-axis electric displacement stage, the focal plane of the focused spot is always in contact with the workpiece surface. The compensation formula is Δf = Z. 实测 -Z 基准 Z 基准 This represents the height of the ideal plane.

[0091] Furthermore, a temperature compensation mechanism is introduced into the calibration process: thermocouples installed on the workpiece stage monitor the ambient temperature in real time. When temperature changes cause thermal expansion of the workpiece material, the system automatically corrects the coordinate mapping relationship of the marker points according to the linear expansion coefficient of the material, avoiding the influence of temperature drift on the reference coordinate system. The calibration program supports manual re-checking, allowing operators to manually trigger marker point scanning to verify the validity of the current reference coordinate system. If a fitting deviation exceeding a preset threshold (e.g., ±10μm) is detected, the recalibration process is automatically initiated.

[0092] The construction of a three-dimensional reference system provides a unified coordinate transformation benchmark for multi-process machining: when the workpiece shifts position due to loading and unloading operations, there is no need to readjust the entire optical path system; only the position of the marker points needs to be re-acquired through the vision system to quickly update the coordinate transformation matrix and map the machining trajectory file to the current posture of the workpiece in real time. This calibration method based on marker point fitting and distance compensation effectively solves the problem that traditional single-plane calibration cannot cope with changes in surface height, ensuring machining accuracy on workpieces with complex shapes. It is especially suitable for scenarios where solar cells have chamfered edges or microstructures on their surfaces, providing a reliable benchmark positioning basis for high-precision machining.

[0093] The advantage of this embodiment lies in the fact that, through a calibration method that integrates multi-marker fitting and Z-axis ranging, a three-dimensional machining datum including planar coordinates and height compensation is constructed, thus resolving the impact of workpiece posture changes and surface topography differences on machining accuracy. This datum establishment mechanism not only improves the fitting accuracy of the coordinate system but also ensures the energy concentration of the focused spot through dynamic focal length compensation, providing a unified spatial datum for seamless switching between subsequent multi-type spot machining processes, effectively reducing positioning errors and focal length adjustment costs in the machining of complex workpieces.

[0094] Example 7: To address the problem of low switching efficiency of a single laser system in multiple processing tasks, this example optimizes the matching mechanism between the laser spot pattern and the processing procedure. Through the targeted design of DOE5 and rapid optical path switching, the compatibility of a single light source with multiple processing requirements is achieved.

[0095] The target laser spot patterns include Gaussian spots, flat-top spots, and lattice spots, each corresponding to different processing techniques: Gaussian spots have the characteristic of concentrated energy at the center, making them suitable for edge cutting processes of solar cells, utilizing their high energy density to achieve rapid material melting; flat-top spots have uniform energy distribution, suitable for electrode grooving, ensuring the consistency of groove edges and surface roughness; lattice spots consist of multiple sub-spot arrays, used for microstructure etching, forming periodically arranged micro-pits or protrusions in a single exposure. The design parameters of each type of DOE5 (such as diffraction order and microstructure period) are customized according to the energy distribution and size requirements of the target laser spot, and its optical surface undergoes ultra-precision machining, with surface shape error controlled within λ / 10 (λ is the processing laser wavelength).

[0096] The mobile carrier of the rapid switching device 6 integrates at least three DOE5 mounting stations, corresponding to three different DOE5 spot patterns. The station layout follows the optical path coaxiality design principle to ensure that the deviation between the spot transmission axis and the optical axis of the galvanometer 7 system during switching is ≤±5μm. When a single laser performs multi-process processing, the control system pre-plans the DOE5 switching path according to the process sequence of the processing order: First, the optical path is cut through the Gaussian spot DOE5 corresponding to the edge cutting process. The laser outputs a high repetition rate pulse laser, which is collimated and expanded before being incident on the DOE5 to generate a Gaussian distributed spot. The galvanometer 7 scans the edge contour of the battery cell to complete the cutting. After the cutting process is completed, the carrier moves to the flat-top spot DOE5 station. The system automatically adjusts the pulse energy and frequency of the laser to match the energy density required for electrode grooving. The flat-top spot avoids material overheating during scanning by uniform energy distribution. Finally, the system switches to the dot matrix spot DOE5 and controls the galvanometer 7 to perform array scanning according to the microstructure design file to complete the surface microstructure etching.

[0097] It's important to understand that parameter switching between different processes involves adjustments to both the optical path and the laser. Regarding the optical path, in addition to switching the DOE5, the beam expansion ratio of the beam expander 4 needs to be adjusted according to the spot size to ensure that the effective aperture of the DOE5 completely covers the incident beam. As for the laser parameters, the pulse width, repetition frequency, and power output are modified in real-time via a digital signal interface to match the energy characteristics to the processing requirements of each spot. During process transitions, the optical shutter 2 automatically executes a closing-switching-calibrating-opening process to prevent erroneous laser output during the changeover. Simultaneously, the vision inspection system verifies the spot morphology after switching in real-time to ensure that the DOE5 is installed correctly and without contamination.

[0098] Furthermore, the system supports customizable spot library expansion, allowing users to add new DOE5 types and corresponding processing steps via parameter input. Processing parameters for each spot pattern (such as scanning speed and energy threshold) are stored in the process database and automatically retrieved and loaded into the control system during switching. To address the bending deformation problem of solar cells, the three-dimensional reference coordinate system established in Example 6 is invoked in real-time during multi-process machining to dynamically compensate for focal length deviations caused by changes in workpiece height, ensuring processing consistency across different steps on complex surface morphologies.

[0099] The advantage of this embodiment lies in its ability to achieve multi-task processing capabilities for a single laser system through DOE5 station-based design and process matching with multi-spot patterns, avoiding the high cost and complex optical paths of traditional multi-source equipment. The targeted application of different spot types effectively ensures the fusing efficiency of edge cutting, the edge precision of electrode grooving, and the pattern uniformity of microstructure etching. This modular processing solution significantly improves the flexibility of the production line, making it particularly suitable for the integrated needs of multiple processing techniques in solar cell manufacturing, providing a feasible technical path to reduce equipment investment costs and improve production efficiency.

[0100] Example 8: To address the drive adaptability issue of the rapid switching device 6 under different load and precision requirements, this example optimizes the selection and configuration of the drive mechanism. Through modular design of various drive forms, it meets the speed, precision, and cost requirements of different processing scenarios.

[0101] Specifically, the drive mechanism of the rapid switching device 6 can be in the form of a voice coil motor, linear motor, pneumatic cylinder, or hydraulic cylinder, each with different technical characteristics and application scenarios. Voice coil motors, based on the Lorentz force principle, feature zero mechanical transmission backlash, fast response speed, and high positioning accuracy, making them suitable for precision switching scenarios requiring micron-level accuracy, such as high-frequency rapid positioning of dot matrix DOE5. Linear motors, driven by permanent magnet synchronous drive and combined with ball screws or linear guides, achieve ±5μm-level positioning accuracy while ensuring high speed, making them suitable for conventional switching with medium load and medium accuracy requirements. Pneumatic cylinder drives offer advantages such as low cost and simple maintenance; speed can be adjusted by controlling air pressure through a proportional valve. However, their positioning accuracy is affected by the stability of the air source and mechanical damping, and they are typically configured with magnetic switches for coarse positioning, making them suitable for economical equipment with low accuracy requirements. Hydraulic cylinders are suitable for heavy load conditions, utilizing the incompressibility of hydraulic oil to provide stable driving force. Combined with servo valves, they can achieve high-precision control and are commonly found in industrial-grade switching devices that need to support multiple heavy DOE5s.

[0102] Regardless of the drive method used, a closed-loop feedback component with a linear encoder is required to achieve position accuracy control. The resolution of the linear encoder is matched according to the type of drive mechanism: voice coil motor and linear motor systems are typically equipped with incremental or absolute linear encoders with a resolution ≤1μm. The feedback signal is processed in real time by a motion controller to form a closed-loop position control. Cylinder and hydraulic cylinder systems use high-precision linear encoders to compensate for the backlash defects in mechanical transmission, and combine PID algorithms to dynamically correct the drive output, improving the repeatability accuracy to within ±10μm. It is important to understand that the installation layout of the drive mechanism and the linear encoder must follow the collinearity principle to reduce the influence of Abbe error. The reading head of the linear encoder is rigidly connected to the moving carrier, and the scale grating is fixed to the base. The parallelism error between the two is controlled within ±0.1mm / m.

[0103] Furthermore, the selection of the drive mechanism needs to comprehensively consider the load mass, stroke, and environmental conditions. In high-dust or humid environments, linear motors or hydraulic cylinders with dustproof and waterproof designs should be given priority, along with protective covers to protect the grating ruler. In scenarios sensitive to electromagnetic interference, cylinder drives are more advantageous due to the absence of electromagnetic radiation, but their air source needs to be equipped with a drying and filtering device to prevent impurities from clogging the system. The control system integrates corresponding drive algorithms for different drive mechanisms: for voice coil motors and linear motors, a feedforward + PID composite control algorithm is used to suppress overshoot caused by inertial loads; for cylinders, a fuzzy control algorithm is used to compensate for positioning fluctuations caused by the compressibility of the gas.

[0104] Furthermore, the mechanical interface of the drive mechanism adopts a standardized design, allowing for quick replacement of different types of drivers without recalibrating the optical path, thus reducing equipment maintenance costs. For example, the mounting flanges of voice coil motors and linear motors have the same positioning hole spacing; replacement only requires disconnecting the electrical connection and removing the fixing bolts to switch the drive module. Simultaneously, the control system automatically identifies the drive type and loads the corresponding control parameters. This modular drive solution provides equipment manufacturers with flexible configuration options, allowing users to select the appropriate drive type based on specific processing needs, optimizing equipment costs while ensuring switching performance.

[0105] The advantage of this embodiment lies in its ability to construct a rapid switching solution adaptable to different precision, speed, and load requirements through a combination of various drive mechanisms and grating ruler feedback. Standardized mechanical interfaces and adaptive control algorithms enable the system to be flexibly applied in both precision and rough machining scenarios. It meets the high-precision positioning requirements of microstructure etching in solar cells while also being compatible with speed-critical processes such as edge cutting, effectively improving the engineering applicability of the optical path switching device and providing a scalable hardware architecture for the differentiated design of laser processing equipment.

[0106] Example 9: To solve the problem of drift in operating accuracy caused by heat generation of the drive components during high-frequency switching, this example further refines the temperature control scheme of the fast switching device 6. By integrating a water cooling system, thermal management of the voice coil motor or linear motor is achieved, ensuring the stability of the drive mechanism during continuous high-load operation.

[0107] Specifically, the water-cooling system employs a spiral channel design closely aligned with the motor housing. The coolant is a mixture of deionized water and ethylene glycol, whose specific heat capacity and thermal conductivity meet the requirements for efficient heat dissipation while avoiding the risks of electrical conductivity and scaling. A miniature centrifugal pump and a plate heat exchanger are configured in the circulation loop. The centrifugal pump provides stable fluid flow, and the heat exchanger achieves coolant temperature regulation via an external constant-temperature water source or refrigeration unit, keeping the motor surface temperature fluctuation within ±1℃. It is important to understand that a temperature sensor is embedded in the motor housing surface to collect real-time temperature rise data of the drive components. A PID control algorithm dynamically adjusts the pump flow rate and the heat exchanger's heat exchange power, forming a closed-loop temperature control mechanism.

[0108] Furthermore, the piping material of the water cooling system is made of stainless steel corrugated pipe, which combines flexibility and corrosion resistance. The connections use metal sealing joints to prevent coolant leakage from contaminating the optical components. The mounting base of the drive mechanism has a pre-set guide channel to direct condensate or accidentally leaked liquid to the recovery device at the bottom of the equipment, preventing liquid stagnation from affecting the stability of the mechanical structure.

[0109] Furthermore, the water cooling system is integrated with the control system. When the motor temperature rise rate is detected to exceed the preset threshold, the switching frequency is automatically adjusted or a short-term shutdown for heat dissipation is triggered, achieving a balance between the continuity of processing tasks and the reliability of equipment.

[0110] Furthermore, considering the impact of different ambient temperatures on heat dissipation efficiency, the water-cooling system supports manual or automatic mode switching: in a cleanroom environment with a constant room temperature, the system can operate in automatic mode, adaptively adjusting through a preset temperature-flow mapping table; in industrial sites with large ambient temperature fluctuations, operators can manually set the target temperature of the coolant through a human-machine interface to ensure that the heat dissipation system is always in optimal working condition. It is important to understand that the design of the water-cooling system follows the principle of energy conservation. While meeting heat dissipation requirements, the flow resistance of the coolant is controlled within a reasonable range by optimizing the cross-sectional area of ​​the pipes and the number of channels, avoiding increased pump power consumption due to excessive pressure drop.

[0111] The advantage of this embodiment lies in the precise temperature control of the drive components achieved through a specially designed water-cooling system. This suppresses mechanical deformation and positioning errors caused by motor heating during high-frequency switching, providing a stable thermodynamic environment for the high-precision operation of the voice coil motor or linear motor. This thermal management solution is deeply integrated with the mechanical structure of the drive mechanism, ensuring both the dynamic response performance of the rapid switching device 6 and extending the service life of core components. It provides a reliable solution for maintaining the precision of laser processing equipment during long-term continuous operation.

[0112] Example 10: To address the issue of decreased optical modulation accuracy caused by installation attitude deviation when the target DOE5 enters the optical path, this example adds an optical sensor to the moving carrier of the fast switching device 6 to construct a real-time detection and calibration mechanism for the DOE5's pose, ensuring the coaxiality requirements of its optical reference and the optical path system.

[0113] The optical sensor employs a composite detection scheme combining a dual-axis tilt sensor and a machine vision camera. The dual-axis tilt sensor is directly fixed to the surface of the DOE5 mounting base, monitoring the pitch and yaw angles of the base in real time with a resolution of ±0.01°. When any angular deviation exceeds 0.1°, a coarse adjustment signal is triggered. The machine vision camera is aligned with the edge markers of the DOE5, and image processing algorithms calculate the positional offset of the markers relative to the reference coordinate system, achieving sub-pixel-level precision attitude fine-tuning. It's important to understand that the DOE5 mounting base is designed as a three-dimensional adjustable structure, integrating X and Y-axis micro-screws and a Z-axis elastic support, allowing for six-degree-of-freedom adjustment of the DOE5's pose via a servo motor-driven screw.

[0114] Furthermore, the execution logic of the attitude calibration procedure is divided into three stages: detection, calculation, and adjustment. Before the target DOE5 enters the optical path, the dual-axis tilt sensor is first activated for rapid coarse detection. If the angle deviation exceeds the limit, the micro-screw is driven to perform preliminary angle correction. Then, the machine vision camera is activated to take pictures of the feature marks (such as orthogonal crosshairs) on the surface of the DOE5. The difference between the actual attitude and the theoretical benchmark is calculated through the coordinate transformation algorithm, and adjustment instructions containing translation and rotation components are generated. Finally, the control system synchronously drives multiple micro-motors to precisely calibrate the DOE5 pose according to the calculated adjustment amount until both the sensor detection value and the visual measurement value meet the preset accuracy requirements.

[0115] Furthermore, to avoid the impact of mechanical vibration on detection accuracy during calibration, an air-bearing vibration isolation device is installed between the moving carrier and the base to isolate high-frequency vibrations from the drive mechanism. The DOE5's mounting interface uses a combination of high-precision positioning pins and magnetic attraction to ensure a rigid connection between the base and the carrier during switching, reducing attitude drift caused by mechanical clearances. It is important to understand that the detection data from the optical sensor and the position feedback signal from the drive mechanism are linked. After the DOE5 completes attitude calibration, the system automatically updates its optical reference position in the optical path, avoiding spot offset errors caused by pose changes.

[0116] The advantage of this embodiment lies in the fact that, through the synergistic effect of composite detection methods and precision adjustment mechanisms, high-precision calibration of the target DOE5 mounting attitude is achieved, ensuring that its optical modulation characteristics are consistent with the design parameters. The pre-detection and dynamic calibration mechanism of this embodiment effectively solves the attitude deviation problems caused by mechanical installation errors and vibrations during switching, providing stable reference conditions for different types of optical modulation such as Gaussian spots and flat-top spots, thus guaranteeing the accuracy of the spot shape during laser processing from a hardware perspective.

[0117] Example 11: To solve the problem of coordinated control of a single laser system in multi-spot processing tasks, this example constructs a laser optical path rapid switching system including laser shaping, spot configuration, switching execution and processing activation functional modules. Through modular design, efficient coordination and precise control of each functional unit are achieved.

[0118] like Figures 3 to 5 As shown, the laser shaping module is integrated into the laser output end, and its internal components are arranged sequentially as a laser collimator 1, a reflector group 3, and a replaceable beam expander 4. After the original laser beam has its divergence angle eliminated by the collimator 1, the reflector group 3 refracts the optical path. Depending on the processing requirements, different magnification beam expanders 4 are selectively activated to adjust the beam diameter to match the effective aperture of the subsequent DOE5. It is important to understand that the switching of the beam expander 4 is achieved through an electrically driven clamping mechanism, with the mechanical positioning accuracy of the clamping position controlled within ±5μm to ensure the coaxiality requirement of the beam transmission axis.

[0119] Furthermore, the spot configuration module establishes a reference machining coordinate system with the high-speed galvanometer 7 as its core. The process includes: first, pre-setting an optical target on the workpiece surface; then, driving the spot to scan the target center using the galvanometer 7; and finally, determining the transformation relationship between the galvanometer 7 coordinate system and the workpiece coordinate system based on signal feedback from the photodetector. Subsequently, various types of DOE5s are pre-installed on the moving carrier of the rapid switching device 6. The optical reference position of each DOE5 is measured using a laser tracker, generating a configuration file containing position and attitude parameters, which is stored in the system database. It is important to understand that the establishment of the reference coordinate system incorporates temperature compensation parameters. The coordinate system transformation matrix is ​​corrected in real time based on ambient temperature sensor data to avoid the impact of material thermal expansion on machining accuracy.

[0120] Furthermore, the switching execution module constructs a fully closed-loop positioning system based on the drive mechanism and the grating ruler, driving the moving carrier to move rapidly between each DOE5 station. When a process switching command is received, the control system retrieves the reference position data of the target DOE5, combines it with the real-time position feedback of the grating ruler, and drives the voice coil motor or linear motor through a feedforward-feedback composite control algorithm to achieve positioning control with an accuracy of ±1μm. It is important to understand that this module shares the reference coordinate system data with the spot configuration module to ensure that the optical reference after DOE5 switching is strictly aligned with the machining coordinate system.

[0121] Furthermore, the core function of the processing activation module lies in achieving coordinated control of beam modulation and processing rhythm. When the target DOE5 enters the optical path, the initially shaped beam is modulated to form a target spot with a specific energy distribution, which is then guided to the workpiece processing area by the high-speed galvanometer 7. Simultaneously, the optical shutter 2 control system controls the opening and closing of the optical shutter 2 in real time based on the position feedback of the galvanometer 7 and the boundary conditions of the processing area, ensuring that laser energy is output only within the effective processing area. It is important to understand that this module integrates a laser parameter adjustment interface, which can automatically adjust the laser pulse width, repetition frequency, and output power according to the processing technology corresponding to different DOE5s, achieving optimized matching of energy characteristics and spot shape.

[0122] The advantage of this embodiment lies in the fact that, through modular functional design and system-level collaborative control, a complete technical solution covering beam preprocessing, spot configuration, optical path switching, and processing execution is constructed. The modules interact with each other through a unified reference coordinate system and data interface, ensuring both the accuracy requirements of single-process machining and supporting seamless switching between multi-spot processes. This provides a clearly structured and precisely controlled system architecture for the application of laser processing equipment in complex technological scenarios.

[0123] Example 12: To address the issue of coordinated accuracy in drive control, position feedback, and attitude calibration during the switching process, this example refines the hardware architecture and control logic of the switching execution module. By integrating the drive control unit, position feedback unit, and attitude calibration unit, multi-dimensional precise control is achieved.

[0124] The drive control unit, as the core power module, is equipped with a dedicated driver tailored to the characteristics of voice coil motors or linear motors, and integrates a temperature control interface for the water-cooling system. The driver incorporates a three-loop control algorithm: current loop, speed loop, and position loop. The current loop uses PID control to suppress torque fluctuations caused by electromagnetic interference, the speed loop combines feedforward compensation to improve dynamic response speed, and the position loop achieves full closed-loop correction through grating ruler feedback. It's important to understand that the coolant flow rate of the water-cooling system is correlated with the motor drive power in real time. When the driver detects that the motor temperature rise exceeds a set threshold, it automatically increases the coolant flow rate to ensure that the drive components are always in thermal equilibrium.

[0125] The position feedback unit uses a high-precision grating ruler as its core. The grating ruler is fixed to the base of the switching device, and the reading head is rigidly connected to the moving carrier, acquiring the carrier's position data in real time and transmitting it to the control system. The resolution of the grating ruler is configured according to the machining accuracy requirements. For precision machining scenarios, an absolute grating ruler with a resolution ≤1μm is used to ensure the real-time performance and reliability of the position feedback. It is important to understand that the position data processing incorporates a digital filtering algorithm to filter out high-frequency noise interference. Simultaneously, coordinate system transformation converts the physical coordinates of the grating ruler into the optical coordinates of the optical path system, providing a unified spatial reference for the DOE5's positioning control.

[0126] The attitude calibration unit integrates optical sensors and a micro-adjustment mechanism to achieve dynamic monitoring and correction of the DOE5 mounting attitude. This unit first performs a coarse attitude check using a dual-axis tilt sensor. When the detected angle deviation exceeds the allowable range, a micro-motor is triggered to drive the DOE5 mounting base to adjust the angle. Subsequently, a machine vision system is used to perform sub-pixel precision measurements on the feature marks on the DOE5 surface, generating fine-tuning commands for secondary attitude calibration. It is important to understand that the adjustment mechanism uses a combination of flexible hinges and piezoelectric ceramic micro-actuators, achieving an angle adjustment accuracy of ±0.01°, meeting the stringent requirements of high-precision optical modulation for the DOE5 attitude.

[0127] The three functional units achieve data interaction and synchronous control via industrial Ethernet: the drive control unit receives positioning commands from the control system and generates drive signals by combining real-time data from the position feedback unit; the attitude calibration unit automatically starts the detection program after positioning is completed, feeding back the attitude adjustment amount to the drive control unit to correct the carrier position. This distributed control architecture not only ensures the rapid response capability of the drive system, but also compensates for the reference deviations that may occur during mechanical installation and switching through the attitude calibration mechanism, forming a full-process accuracy assurance system from position positioning to attitude calibration.

[0128] The advantage of this embodiment lies in the fact that, through the functional decomposition and unit integration of the switching execution module, a collaborative control architecture integrating drive control, position feedback, and attitude calibration is constructed. The specialized design and precise coordination of each unit effectively solves the positioning errors, thermal drift, and attitude deviation problems that may occur during high-speed switching, providing multi-layered hardware and software guarantees for the high-precision positioning and optical modulation of DOE5, and further improving the engineering practicality and processing stability of the laser optical path rapid switching system.

[0129] Example 13: To address the issues of optical path stability and drive reliability during rapid switching of multiple types of DOE5 in laser processing equipment, this example further refines the hardware architecture of the laser optical path rapid switching device 6. By integrating the optical path components and the rapid switching device 6, a hardware system that meets the requirements of high-precision processing is constructed.

[0130] Specifically, the optical path assembly is arranged sequentially along the laser transmission direction, consisting of a single laser, an optical shutter 2, a laser collimator 1, a multi-channel mirror group 3, a beam expander 4, and a high-speed galvanometer 7, forming a complete beam transmission link. The raw laser output from the single laser first passes through the optical shutter 2, which controls the beam's on / off state according to the processing rhythm. It then enters the laser collimator 1, where the collimating lens group eliminates the beam divergence angle, ensuring the beam parallelism meets the incident requirements of subsequent optical components. The multi-channel mirror group 3 contains at least two high-reflectivity coated mirrors. By adjusting the pitch and yaw angles of the mirrors, the laser transmission path is deflected and optimized, ensuring the beam can accurately enter the subsequent optical components. The beam expander 4 is positioned after the mirror group 3. Different magnifications of the beam expander 4 are selected according to processing requirements to adjust the beam diameter to match the effective aperture of the high-speed galvanometer 7 and the DOE 5, avoiding energy loss or modulation deviation due to beam diameter mismatch.

[0131] Furthermore, the rapid switching device 6 includes a linear guide rail arranged perpendicular to the optical path direction, a movable carrier slidably mounted on the guide rail, a drive assembly, a grating ruler, and a water cooling system. The linear guide rail is a rolling guide rail, and its mounting reference surface is precision ground to ensure that the perpendicularity error between the guide rail axis and the optical path direction is ≤±0.01°, providing a stable mechanical reference for the linear movement of the movable carrier. The surface of the movable carrier is provided with at least two DOE5 mounting stations, each station using a unified positioning interface (such as a high-precision positioning pin and magnetic attraction combination structure) to ensure the installation consistency of different DOE5s; the spacing between the stations is precisely machined according to the optical design requirements to ensure that the coincidence of the optical center of the target DOE5 with the optical path axis meets the accuracy requirement of ±5μm after switching.

[0132] Furthermore, the drive component preferably uses a voice coil motor or a linear motor, directly coupled to the moving carrier, and achieves high-speed, high-precision linear motion control through a servo driver. A grating ruler is mounted parallel to the linear guide rail, and a reading head is fixed to the moving carrier, collecting carrier position data in real time and feeding it back to the control system to form a control loop, achieving a positioning accuracy of ±1μm. To address the heat generation issue of the drive component during high-frequency switching, the water-cooling system employs an embedded circulating cooling scheme: the drive motor housing integrates a spiral coolant channel, which removes heat through the circulating flow of a mixture of deionized water and ethylene glycol, maintaining the motor operating temperature ≤40℃; the water-cooling circuit is equipped with a temperature sensor and a flow monitoring device. When abnormal coolant temperature or insufficient flow is detected, the system alarm is triggered and the switching operation is paused to prevent a decrease in drive accuracy due to overheating.

[0133] Furthermore, the optical path assembly and the mechanical structure of the rapid switching device 6 are integrated into a single design, sharing the same rigid base. The mechanical support structure of the base is optimized through finite element analysis to suppress the impact of external vibrations on the optical path stability. A dustproof air curtain is installed on the surface of the DOE5 mounting station, spraying clean, dry gas during switching to prevent dust particles from adhering to the DOE5 surface and affecting the optical modulation effect. It is important to understand that a preloaded slider is installed between the guide surface of the moving carrier and the linear guide rail. Adjusting the preload of the slider eliminates movement gaps, and in conjunction with the position feedback of the grating ruler, achieves gapless, low-vibration, and smooth movement.

[0134] The advantage of this embodiment lies in the fact that, through the systematic integration of the optical path components and the fast switching device 6, a hardware platform that combines optical path stability and switching accuracy is constructed. The cooperation between the linear guide rail and the grating ruler enables high-precision positioning of the moving carrier, and the water-cooling system effectively controls the temperature rise of the drive components, ensuring operational reliability under high-frequency switching. The multi-station DOE5 installation design supports the rapid replacement of different types of optical components, meeting the spot modulation requirements of various process scenarios, and providing a solid hardware foundation for the multi-functionality and precision of laser processing equipment.

[0135] Example 14: To solve the coaxiality error problem caused by the installation deviation of optical components during the transmission of laser beam, this example further optimizes the connection structure and adjustment mechanism of laser collimator 1, beam expander 4 and multi-channel mirror group 3 to ensure that the coaxiality of the optical axis of the initial shaped beam and the incident optical axis of high-speed galvanometer 7 is ≤±10μm.

[0136] The laser collimator 1 and beam expander 4 are connected to the optical path via detachable flange structures. The flange interfaces employ high-precision mechanical positioning surfaces and optical-grade sealing designs. Three evenly distributed positioning pins are provided on the positioning end face of the collimator 1 flange, engaging with positioning holes on the optical path base to achieve rapid installation and repeated positioning of the collimator 1. The optical axis offset after a single installation is ≤±5μm. The beam expander 4 flange integrates an electric adjustment mechanism, allowing for fine-tuning of the axial position and tilt angle of the beam expander 4 via a servo motor to compensate for optical axis offset caused by lens processing errors or temperature changes. It is important to understand that the connection surfaces of the detachable flanges are hard chrome plated, providing both wear resistance and corrosion resistance, ensuring connection stability during long-term use.

[0137] Furthermore, the multi-channel mirror assembly 3 includes at least two mirrors, each mounted on an independent five-dimensional adjustment frame. The adjustment frame supports pitch, yaw, translation, rotation, and axial fine-tuning of the mirrors. The mirror angle adjustment is achieved through a high-precision worm gear mechanism with an angle resolution of ±0.001°. Combined with real-time monitoring by a laser collimator, the direction of the reflected beam can be precisely controlled. When the laser transmission path needs to be changed, the reflection angle parameters of the target path are first calculated by software. Then, the adjustment frame is driven to adjust the mirror attitude according to preset parameters until the coaxiality of the optical axis of the beam after passing through mirror assembly 3 and the incident optical axis of the high-speed galvanometer 7 meets the design requirements.

[0138] To ensure the optical axis consistency of each optical component, the assembly process of the optical path system follows a strict calibration procedure: First, using the incident optical axis of the high-speed galvanometer 7 as a reference, a three-dimensional coordinate system is established using a laser tracker; then, the reflector group 3, beam expander 4, and laser collimator 1 are installed sequentially. For each component installed, its optical axis deviation is detected using a reference laser beam and corrected using an adjusting flange or adjustment frame. It is important to understand that a temperature compensation mechanism is introduced during the calibration process, dynamically correcting the installation parameters of the optical components based on ambient temperature sensor data to avoid coaxiality drift caused by material thermal expansion.

[0139] Furthermore, the surface of the reflector adopts a high-reflectivity all-dielectric coating, ensuring a reflectivity of ≥99.5% while reducing energy loss and phase distortion during beam reflection. The laser collimator 1 internally employs an aspherical lens group, and through aberration correction design, the parallelism error of the beam is controlled within ±0.1 mrad, providing a high-quality incident beam for subsequent angle adjustment of the reflector group 3. The detachable flange design allows for the replacement of collimator 1 or beam expander 4 without damaging the overall optical path reference, improving equipment maintenance convenience and component compatibility.

[0140] The advantage of this embodiment lies in its effective solution to the optical axis coaxiality problem during the installation and adjustment of optical components through precise positioning of the detachable flange, five-dimensional adjustment of the reflector group 3, and a systematic calibration mechanism. This design not only ensures the flexibility of the beam transmission path but also provides stable incident conditions for the optical modulation of the high-speed galvanometer 7 and DOE5 through hardware-level precision control, fundamentally suppressing the problems of beam spot shift and uneven energy distribution caused by optical path deviation, and improving the accuracy of the laser processing process.

[0141] Example 15: To address the engineering implementation and system compatibility issues of the laser optical path rapid switching method, this example provides a computer-readable storage medium on which a computer program stored can be executed by a processor to implement each step of the laser optical path rapid switching method and construct a hardware and software collaborative control system.

[0142] It's important to understand that the computer program uses a cross-platform development language, supporting operation in industrial control systems such as Windows Embedded and Linux, and possesses excellent compatibility and portability. The program code has undergone rigorous code review and testing, includes exception handling mechanisms, and can cope with failure scenarios such as sudden power outages and communication interruptions, ensuring the system's security and recoverability under abnormal conditions. Furthermore, the storage medium uses industrial-grade solid-state storage devices (such as SSDs), which are shock-resistant and high-temperature resistant, suitable for stable operation in complex industrial environments.

[0143] The advantage of this embodiment lies in the fact that, through the modular design and standardized interface of the computer program, the rapid switching method for laser optical paths has been digitally implemented, allowing the control logic of the hardware system to be flexibly configured and updated via software. This hardware-software separation architecture not only reduces the difficulty of equipment debugging and maintenance but also provides an open software platform for subsequent functional expansion.

[0144] Although the present invention has been specifically described above with reference to preferred embodiments, it should be understood that the present invention is not limited to the embodiments described above. Various modifications and variations can be made by those skilled in the art without departing from the spirit of the present invention, and such modifications and variations should fall within the scope defined by the appended claims and their equivalents.

Claims

1. A method for rapid switching of laser optical paths, characterized in that the steps include... include: A single laser emits raw laser light, which is then collimated by a laser collimator or directly enters a multi-channel mirror group to adjust the transmission path. Depending on the processing requirements, a beam expander is selectively activated to expand the beam and form a preliminary shaped beam, thus constructing a basic optical path that is compatible with subsequent optical devices. A reference machining coordinate system is established by initial positioning using a high-speed galvanometer. At least two DOEs corresponding to the spot patterns are pre-installed on the mobile carrier of the fast switching device, providing a hardware foundation and position reference for switching. When it is necessary to switch the light spot, the fast switching device drives the moving carrier to move along the linear guide rail, so that the target DOE enters the optical path. At the same time, the position data is collected in real time by the grating ruler and fed back to the control system until the target DOE reaches the preset optical reference position. After the target DOE is inserted, the initial shaping beam is modulated to form the target spot. The target spot is driven by a high-speed galvanometer to process on the surface of the battery cell. The laser output rhythm and processing trajectory are matched by controlling the laser on and off through an optical shutter, which is used for rapid adaptation of a single laser to multi-spot processing tasks. The control system compares the position data fed back by the grating ruler with the coordinate parameters of the preset optical reference position in real time, and dynamically adjusts the output power of the drive component through the PID algorithm to form a position error compensation mechanism, so that the positioning accuracy of repeated DOE is ≤±5μm. The optical shutter is positioned on the transmission path of the initial shaping beam and is synchronously linked with the motion control signal of the high-speed galvanometer. When the high-speed galvanometer moves to the non-processing area, the optical shutter closes to cut off the laser output; when the high-speed galvanometer is positioned to the processing area, the optical shutter opens to conduct the laser. This timing coordination reduces ineffective laser loss. The target light spot pattern includes Gaussian light spot, flat-top light spot and dot matrix light spot. Different DOEs correspond to different light spot patterns. Through the optical path switching of the fast switching device, a single laser sequentially performs multiple processing steps such as edge cutting of solar cell, electrode grooving and microstructure etching.

2. The method for rapid switching of laser optical paths as described in claim 1, characterized in that, The selective activation of the beam expander is as follows: when the original laser divergence angle exceeds the preset processing accuracy threshold, the laser collimator is activated to collimate the laser beam; when the original laser divergence angle meets the processing requirements, the collimator is skipped and the beam directly enters the mirror group, thereby improving the flexibility of optical path construction through differentiated optical path configuration.

3. The method for rapid switching of laser optical paths as described in claim 1, characterized in that, The mobile carrier is equipped with at least two DOE installation stations, each station corresponding to a DOE with a different spot pattern, and the distance between adjacent stations is equal to the single effective movement stroke of the linear guide rail. The station-based design enables rapid positioning and switching of the DOE.

4. The method for rapid switching of laser optical paths as described in claim 1, characterized in that, The process of establishing the reference machining coordinate system includes: selecting at least three positioning marker points on the surface of the solar cell through the calibration program of the high-speed galvanometer, fitting an XY plane machining coordinate system based on the positioning marker points, and determining the focal length compensation parameters through a Z-axis rangefinder to construct a three-dimensional machining reference system.

5. The method for rapid switching of laser optical paths as described in claim 1, characterized in that, The rapid switching device includes a drive mechanism and a closed-loop feedback component for the grating ruler. The drive mechanism is any one of a voice coil motor, a linear motor, a cylinder, or a hydraulic cylinder.

6. The method for rapid switching of laser optical paths as described in claim 5, characterized in that, The rapid switching device also includes a water cooling system, which uses circulating coolant to control the temperature of the voice coil motor or linear motor in order to maintain the operating accuracy of the drive components during high-frequency switching.

7. The method for rapid switching of laser optical paths as described in claim 1, characterized in that, Before the target DOE enters the optical path, an optical sensor mounted on the mobile carrier detects the installation attitude of the target DOE in real time. When the DOE deflection angle is detected to exceed 0.1°, an attitude calibration program is triggered to adjust the DOE's pose to ensure optical modulation accuracy.

8. A laser optical path rapid switching system, used to execute the laser optical path rapid switching method as described in any one of claims 1-7, characterized in that, The system includes: The laser shaping module is used to control the single laser to emit the original laser, and to collimate, adjust the path and expand the original laser by selectively activating the laser collimator, the reflector group and the beam expander to generate a preliminary shaped beam. The spot configuration module is used to establish a reference processing coordinate system through a high-speed galvanometer, pre-install the DOE corresponding to the preset spot pattern on the moving carrier of the fast switching device, and determine the optical reference position of each DOE. The switching execution module is used to drive the drive mechanism of the fast switching device to move the mobile carrier, and combined with the position feedback of the grating ruler, realize the full closed-loop precise positioning of the DOE and complete the optical path switching. The processing activation module is used to modulate the initial shaped beam into a target spot using a target DOE, drive the spot processing through a high-speed galvanometer, and synchronously control the on / off switching of the optical shutter to match the processing rhythm in order to perform multi-spot processing tasks.

9. The laser optical path rapid switching system as described in claim 8, characterized in that, The switching execution module includes: The drive control unit is used to control the start, stop and speed of the voice coil motor / linear motor, and integrates a water cooling system to dissipate heat from the drive components; The position feedback unit is used to collect the position data of the moving carrier in real time through the grating ruler and transmit it to the control system; The attitude calibration unit is used to detect the DOE mounting attitude through optical sensors and trigger the pose adjustment program to ensure optical modulation accuracy.

10. A laser optical path rapid switching device, comprising the laser optical path rapid switching system as described in any one of claims 8-9, characterized in that, Also includes: The optical path assembly includes a single laser, an optical shutter, a laser collimator, a multi-channel mirror group, a beam expander, a high-speed galvanometer, and a fast switching device arranged along the optical path, arranged in sequence. The fast switching device includes: Linear guide rails are set in a direction perpendicular to the optical path; The mobile carrier is slidably mounted on the linear guide rail and is provided with at least two DOE mounting stations. A drive component is used to drive the mobile carrier to move along a linear guide rail; A grating ruler, parallel to the linear guide rail, is used to collect the position data of the moving carrier in real time; A water-cooling system is used to circulate and cool the drive components to maintain their operating temperature ≤40℃.

11. The laser optical path rapid switching device as described in claim 10, characterized in that, The laser collimator and beam expander are both connected to the optical path via detachable flanges. The multi-channel mirror group includes at least two mirrors. Adjusting the mirror angle changes the laser transmission path. The coaxiality between the optical axis of the initial shaped beam and the incident optical axis of the high-speed galvanometer is ≤ ±10μm.

12. A computer-readable storage medium having a computer program stored thereon, characterized in that, When the computer program is executed by the processor, it implements the steps of the laser optical path fast switching method as described in any one of claims 1-7.

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