Conveying device

Abstract

The present invention provides a transport device comprising: a transport mechanism that transports an object to be transported to a container provided with a plurality of support parts arranged at predetermined intervals in the vertical direction; a detection unit that detects the position of the upper end of the object being conveyed by the conveyance mechanism; and a control unit that controls the conveyance mechanism, the upper support unit is provided as a first support unit, the lower support unit is provided as a second support unit, and the conveyance mechanism has a holding unit that holds the object to be conveyed and a drive unit that moves the holding unit in the horizontal direction and the vertical direction. The detection unit detects the distance from the lower surface of the holding unit in the vertical direction to the upper end of the conveyed object as the position of the upper end of the conveyed object in a state where the conveyed object is held by the holding unit. The control unit corrects the insertion height at which the holding unit is inserted into the container such that the upper end position of the object to be conveyed is located at a target position that is closer to the first support unit than the second support unit in the vertical direction.

Description

TECHNICAL FIELD

[0001] The present application relates to a conveyance device for conveying a conveyed object. BACKGROUND

[0002] In the past, in the manufacturing field of semiconductors and the like, there has been a conveyance technique of using an industrial conveyance robot provided to a conveyance device to convey a conveyed object between a load port where a container that houses the conveyed object as a substrate (for example, a wafer, a glass substrate, or the like) is placed and a processing device or a load lock chamber that processes the conveyed object. If described in detail, the conveyance robot as a conveyance mechanism provided to the conveyance device can take out the conveyed object from the container that houses the conveyed object, convey it to the processing device to process the conveyed object, and on the other hand, take out the conveyed object from the processing device that processes the conveyed object, and store it to the container that houses the conveyed object. Also, when the conveyed object is conveyed by the conveyance robot inside the conveyance device, the state (for example, the amount of warping or the like) of the conveyed object that is conveyed can be detected by a detection section of the conveyance device, and the conveyance operation of the conveyance robot can be controlled based on the detected state of the conveyed object.

[0003] Also, in recent years, as a packaging technique of a component having a high degree of integration, a method called panel level packaging (hereinafter referred to as PLP) is gradually becoming widespread. The PLP is a method of uniformly manufacturing a plurality of semiconductor packages by arranging a plurality of chips on a rectangular panel (for example, a glass substrate). In the PLP, a process of coating (sealing) the upper surface of the panel on which a plurality of chips are placed with a resin and the like are processed on a manufacturing line of the semiconductor package using the PLP, and the panel is easily subjected to a large warping (including upward warping, downward warping, and the like) in the up-down direction.

[0004] PRIOR ART DOCUMENTS

[0005] PATENT DOCUMENTS

[0006] Patent Document 1: Japanese Patent Application Laid-Open No. 2005-260010 SUMMARY

[0007] PROBLEMS TO BE SOLVED BY THE INVENTION

[0008] In a front opening unified pod (FOUP) which is a housing container of a conveyed object (hereinafter referred to as a substrate), substrate support portions are formed at equal intervals in the up-down direction. In order to improve the housing efficiency of the substrate, the interval of each support portion is gradually being narrowed. When a substrate is conveyed to the FOUP using a conveyance robot, a hand of the conveyance robot, which is a holding portion for holding the substrate, enters the inside of the FOUP above a specific support portion while holding the substrate, and then moves downward to support the substrate on the specific support portion and exits the FOUP. However, since the interval of the support portions in the up-down direction is narrow, the substrate can collide with the support portions of the FOUP when the hand is inserted.

[0009] According to the above, it is required to detect the state of a conveyed object (substrate) conveyed by a conveyance device through a detection portion of the conveyance device, and reflect it to the control of the conveyance operation of the conveyance device.

[0010] Therefore, the present application provides a conveyance device which controls a holding portion based on the state of a conveyed object (substrate) detected by a detection portion of the conveyance device, thereby preventing the conveyed object from colliding with a support portion provided in a container.

[0011] Technical means for solving the problem

[0012] In order to achieve the object, according to the present application, there is provided a conveyance device characterized by comprising: a conveyance mechanism which conveys a conveyed object to a container, the container being provided with a plurality of support portions arranged at a prescribed interval in an up-down direction; a detection portion which detects the upper end position of the conveyed object conveyed by the conveyance mechanism; and a control portion which controls the conveyance mechanism, an upper side support portion among the plurality of support portions being provided as a first support portion, a lower side support portion being provided as a second support portion, the conveyance mechanism having a holding portion which holds the conveyed object and a driving portion which moves the holding portion in a horizontal direction and the up-down direction, the detection portion detecting, in a state where the conveyed object is held by the holding portion, a distance from the lower surface of the holding portion in the up-down direction to the upper end of the conveyed object as the upper end position of the conveyed object, the control portion correcting the insertion height at which the holding portion is inserted into the container so that the upper end position of the conveyed object is located at a target position which is closer to the first support portion than the second support portion in the up-down direction.

[0013] Effects of the invention

[0014] According to the present application, it is possible to provide a conveyance device that corrects an insertion height at which a holding portion is inserted into a container in such a manner that an upper end position of a conveyed object is positioned at a target position based on a position of the conveyed object detected by a detection portion, thereby preventing the conveyed object from colliding with a support portion. BRIEF DESCRIPTION OF DRAWINGS

[0015] [ Figure 1 ] is a perspective view that explains an entire conveyance system to which the conveyance device according to an embodiment of the present application is applied.

[0016] [ Figure 2 ] is a block diagram of an electrical structure of the conveyance system illustrated in Figure 1

[0017] [ Figure 3 ] is a perspective view that explains a structure of the conveyance device in a state in which a portion of the conveyance device illustrated in Figure 1

[0018] [ Figure 4 ] is a perspective view that explains a structure of a load port used in the conveyance system illustrated in Figure 1

[0019] [ Figure 5 ] is a perspective view that explains an inside of a container placed in the load port illustrated in Figure 4

[0020] [ Figure 6 ] is a perspective view that explains a conveyance robot used as a conveyance mechanism in the conveyance device illustrated in Figure 1 Figure 3

[0021] [ Figure 7 ] is a schematic view that explains a case in which a conveyed object in a flat state is held by a holding portion of the conveyance mechanism illustrated in Figure 6

[0022] [ Figure 8 ] is a schematic view that explains a case in which a conveyed object in a warped state is held by a holding portion of the conveyance mechanism illustrated in Figure 6

[0023] [ Figure 9 ] is a schematic view that explains a case in which the holding portion of the conveyance mechanism illustrated in Figure 7

[0024] [ Figure 10 ] is a schematic view that explains a case in which the holding portion of the conveyance mechanism illustrated in Figure 8 ​​​​​​​​​​​​​​​​​​​A schematic view of a case where the holding portion of the conveyance mechanism is inserted between the first support portion and the second support portion of the container while holding the conveyed article in a warped state.

[0025] [ Figure 11 ] is a flowchart of a process of conveying the conveyed article to the container by the conveyance device in the conveyance system shown in Figure 2

[0026] [ Figure 12 ] is a schematic view of an example of a container error information table used in the conveyance system shown in Figure 2

[0027] [ Figure 13 ] is a schematic view of an example of a conveyed article error information table used in the conveyance system shown in Figure 2

[0028] [ Figure 14 ] is a schematic view of an example of a correction amount information table used in the conveyance system shown in Figure 2

[0029] [ Figure 15 ] is a schematic view of an example of a correction insertion position information table used in the conveyance system shown in Figure 2 DETAILED DESCRIPTION

[0030] Here, referring to the example of the exemplary embodiment of the present application in detail, the example of the exemplary embodiment will be illustrated in the accompanying drawings. Hereinafter, the specific structure of the conveyance device 100 and the conveyance system 50 to which the conveyance device 100 is applied and the conveyance components will be described by combining the space coordinate system XYZ with the left-right direction X, the front-rear direction Y, and the up-down direction Z, but this is only an example of the present application, and the present application is not limited thereto. Figures 1 to 15

[0031] First, referring to Figures 1 to 4 ​​​​​​The conveyance device 100 of the present embodiment and a conveyance system 50 to which the conveyance device 100 is applied will be described. The conveyance device 100 of the present embodiment is applied to the conveyance system 50. The conveyance system 50 has the conveyance device 100, a load port 52 arranged on one side (e.g., the front side) of the conveyance device 100, and a processing device 54 arranged on the other side (e.g., the rear side) of the conveyance device 100. The conveyance device 100 is, for example, an Equipment Front End Module (EFEM). The load port 52 is a device for placing a container H (e.g., a FOUP) that houses a conveyed object W, and opening and closing a lid (not shown) of the container H. The processing device 54 is a device for processing the conveyed object W. The conveyance device 100 includes a frame 110, a conveyance mechanism 120 provided inside the frame 110 to convey the conveyed object W, a detection section 130 provided inside the frame 110 to detect a state of the conveyed object W conveyed by the conveyance mechanism 120, and a control section 140 that controls the conveyance mechanism 120. The frame 110 houses the conveyance mechanism 120 and the like, and communicates with the load port 52 and the processing device 54, respectively. The conveyance mechanism 120 is movably configured inside the frame 110. The conveyance mechanism 120 (e.g., a conveyance robot) provided to the conveyance device 100 conveys the conveyed object W taken out from the container H to the processing device 54 via the inside of the frame 110. The processing device 54 processes the conveyed object W conveyed by the conveyance mechanism 120. Alternatively, the conveyance mechanism 120 conveys the conveyed object W taken out from the processing device 54 to the container H via the inside of the frame 110. In the container H, the conveyed object W conveyed by the conveyance mechanism 120 is stored. The detection section 130 is provided inside the frame 110. The detection section 130 detects the state of the conveyed object W subjected to conveyance by the conveyance mechanism 120 when the conveyed object W is conveyed in the frame 110 by the conveyance mechanism 120. The control section 140 controls the conveyance action of the conveyance mechanism 120. The control section 140 controls the conveyance action of the conveyance mechanism 120 based on the state of the conveyed object W detected by the detection section 130.

[0032] The conveyed object W of the present embodiment is, for example, a glass substrate used for a PLP, which is housed in the container H (not limited thereto). As shown in FIG. 1, the container H that houses the conveyed object W such as a glass substrate used for a PLP is placed in the load port 52. In the container H, a plurality of support sections S are arranged at a predetermined interval in the vertical direction Z. For example, as shown in FIG. 1, the support sections S are arranged in the vertical direction Z in the container H. Figure 4 Figure 5 As shown in FIG. 1, the container H that houses the conveyed object W such as a glass substrate used for a PLP is placed in the load port 52. In the container H, a plurality of support sections S are arranged at a predetermined interval in the vertical direction Z. For example, as shown in FIG. 1, the support sections S are arranged in the vertical direction Z in the container H. Figure 5 ​As shown, the plurality of support portions S are provided protruding from the inner side surfaces of the opposite side portions of the container H toward the horizontal direction (e.g., the left-right direction X) and are capable of supporting the conveyed article W at opposite sides thereof. Further, the support portion S forms a space G in which the conveyed article W is stored, together with other support portions S adjacent thereto in the up-down direction Z. Thus, the container H supports the conveyed article W by each of the plurality of support portions S arranged at a prescribed interval (space G) in the up-down direction Z, and is capable of storing a plurality of conveyed articles W inside (in each space G). That is, the conveyed article W is supported by the left and right support portions S (e.g., the second support portion S from the top) and is stored in the space G above the support portions S (e.g., the space between the first and second support portions S from the top).

[0033] In detail, the support portions S and the spaces G are numbered from the top toward the bottom in the up-down direction Z. The support portion S of the plurality of support portions S that supports the conveyed article W conveyed to the container H by the conveying device 100 is referred to as a second support portion, and the support portion S above the second support portion is referred to as a first support portion. That is, the support portion S on the upper side of the plurality of support portions S that define the prescribed space G in which the conveyed article W conveyed by the conveying mechanism 120 is stored is the first support portion, and the support portion S on the lower side is the second support portion. Further, the first support portion and the second support portion are in an adjacent relationship to each other in the up-down direction Z without other support portions S therebetween. As shown in FIG. 1, the first support portion and the second support portion are arranged in the up-down direction Z in the order of the first support portion, the second support portion, the first support portion, and the second support portion. Figure 5As shown, the space G1 is divided by the support portion S1 and the support portion S2. At this time, the support portion S1 corresponds to the first support portion, and the support portion S2 corresponds to the second support portion. When the conveyed article W is housed in the space G1 while being supported by the support portion S2, the target position for correction is determined based on the first support portion and the second support portion described later. Also, the space G2 is divided by the support portion S2 and the support portion S3. At this time, the support portion S2 corresponds to the first support portion, and the support portion S3 corresponds to the second support portion. When the conveyed article W is housed in the space G2 while being supported by the support portion S3, the target position for correction is determined based on the first support portion and the second support portion described later. Further, since the support portion S1 does not have other support portions above, in the case where the conveyed article W is supported by the support portion S1, the position separated by a prescribed amount from the upper surface of the container H becomes the target position when the conveyed article W is stored in the uppermost support portion S1. Also, for the correction related to the target position determined based on the first support portion and the second support portion described later, the case where the conveyed article W is stored in the space G1 divided by the support portion S1 and the support portion S2 is exemplified and described. At this time, the support portion S1 corresponds to the first support portion, and the support portion S2 corresponds to the second support portion, so the support portion S1 and the support portion S2 are referred to in the description of the first support portion and the second support portion, but as described above, the first support portion and the second support portion change depending on which space G divided by which support portion S the conveyed article W is housed.

[0034] As Figure 2 and Figure 4As shown, the loading port 52 includes a port door 52a that engages with a lid (not shown) of the container H, a door drive section 52b that drives movement of the port door 52a in the vertical direction Z, a door control section 52c that controls driving of the door drive section 52b, a container detection section 52d provided at an upper end of the port door 52a, a placement table 52e that places the container H, and a support body 52f that supports the placement table 52e. The door drive section 52b is, for example, a unit including a motor and a ball screw (not shown), and a substantial structure thereof is housed inside the support body 52f, and a part of the structure protrudes toward the inside of the frame 110 of the conveyance device 100 in a manner linked to the port door 52a. When the conveyance mechanism 120 of the conveyance device 100 conveys the conveyed object W to the container H or conveys the conveyed object W from the container H using the conveyance mechanism 120 of the conveyance device 100, the door control section 52c controls driving of the door drive section 52b to move the port door 52a in the vertical direction Z. Thus, the loading port 52 can open the lid of the container H. By opening the lid of the container H, the conveyed object W stored in the container H will face the inside of the frame 110, and thus the conveyed object W can be conveyed from the container H to the inside of the frame 110 by the conveyance mechanism 120. Similarly, the conveyed object W can also be conveyed from the inside of the frame 110 to the container H by the conveyance mechanism 120. As an example, the container H is placed at the upper end of the loading port 52, and thus, as described with reference to Figure 4 and Figure 5 , the port door 52a is moved downward in a state of engaging with the lid of the container H, and the lid of the container H is opened downward to sequentially expose the plurality of support sections S provided inside the container H from the upper side to the lower side in a manner of directly facing the inside of the frame 110. That is, by movement of the port door 52a, the first support section S1 located at the upper side among the plurality of support sections S provided in the container H is exposed in a manner of directly facing the inside of the frame 110 before the second support section S2 located at the lower side.

[0035] Further, as described with reference to Figure 2 and Figure 4As shown, the container detection section 52d is, for example, a reflection-type sensor, provided at the edge portion of the upper end of the port door 52a, and faces the rear of the loading port 52 to face the container H. The container detection section 52d detects the height positions of the support portions S. In the present embodiment, the container detection section 52d detects the height positions of the respective support portions S (the height positions RS of the respective support portions S of the container H described later) with the placement table 52e as a reference. The container detection section 52d is movable in the vertical direction Z together with the port door 52a. Thus, by the movement of the port door 52a toward the lower side, the container detection section 52d is capable of moving from the upper side to the lower side in the vertical direction Z to sequentially detect the height positions of the support portions S of the container H from the upper side, while the lid of the container H is opened downward to expose the support portions S from the upper side to the lower side in order to directly face the inside of the frame 110. That is, by the movement of the port door 52a, the container detection section 52d is capable of moving from the upper side to the lower side in the vertical direction Z to detect the height position of the first support portion S1 on the upper side, and then detect the height position of the second support portion S2 on the lower side. In this way, the height positions of the support portions S of the container H are detected by the container detection section 52d, and the intervals (spaces G) of the respective support portions S can also be obtained based thereon. The detection process is preferably performed before the conveyance device 100 conveys the conveyed object W. Also, the height positions of the support portions S or the intervals of the respective support portions S can be obtained by other means. For example, they can be set based on the size information of the container H or the loading port 52. The height positions of the support portions S or the intervals of the support portions S can be input to the control section 140 as the container information, for example, as one of the control conditions of the conveyance components of the conveyance device 100.

[0036] Figure 1 and Figure 2 The processing device 54 shown includes at least one placement table (not shown) capable of supporting at least one conveyed object W during the processing procedure of the conveyed object W. The kind of the processing device 54 can be selected according to the content of the procedure of processing the conveyed object W (for example, processing required for a semiconductor manufacturing procedure such as ion implantation or etching). Also, by opening the door of the processing device 54, the conveyed object W located inside the processing device 54 will face the inside of the frame 110, so that the conveyed object W can be conveyed from the inside of the processing device 54 to the inside of the frame 110 by the conveyance mechanism 120. Similarly, the conveyed object W can also be conveyed from the inside of the frame 110 to the inside of the processing device 54 by the conveyance mechanism 120. In other embodiments not shown, a load lock chamber can also be further provided between the conveyance device 100 and the processing device 54.

[0037] As Figure 3 shown, the frame 110 of the conveyance device 100 includes a frame portion 112 (a frame portion 112a and a frame portion 112b) and a door portion 114 (a door portion 114a and a door portion 114b) as an example. Figure 3As shown), the wall portion 114 for covering the frame portion 112 ( Figure 1 As shown), a moving body 116 for moving the conveying mechanism 120, and a guide structure 118 for guiding the movement of the moving body 116. The frame portion 112 is provided as a frame of the frame body 110. The wall portion 114 is provided on the frame portion 112 to form an internal space of the frame body 110. The guide structure 118 is, for example, a slide rail structure, a conveyor drive device, etc., and is provided in the internal space of the frame body 110. The moving body 116 is provided on the guide structure 118 in the internal space of the frame body 110, and is provided so as to move freely in the frame body 110 through the guide structure 118. For example, the moving body 116 is installed on the guide structure 118 for guiding the movement in the left-right direction X, and can move in the left-right direction X in the frame body 110 through the guide structure 118. In addition, the wall portion 114 has an opening OP ( Figure 1 ), and an opening (not shown) for communicating with the processing device 54. When these openings are opened, the conveying mechanism 120 provided inside the frame 110 can convey the conveyed object W from the loading port 52 toward the processing device 54, or from the processing device 54 toward the loading port 52. That is, the conveying mechanism 120 moves to the position of the port door 52a of the loading port 52 by the movable body 116, and the conveyed object W is transferred between the container H and the interior of the frame 110. Similarly, the conveying mechanism 120 moves to the door position of the processing device 54 by the movable body 116, and the conveyed object W is transferred between the processing device 54 and the interior of the frame 110. Thus, the conveying device 100 can convey the conveyed object W between the container H placed on the loading port 52 and the processing device 54 inside the frame 110 through the conveying mechanism 120.

[0038] Furthermore, if Figure 3 and Figure 6As shown, the conveying mechanism 120 is, for example, a conveying robot and includes a main body 122, an arm 124 mounted on the upper end of the main body 122, a holding portion 126 mounted on the front end of the arm 124 to hold the conveyed object W, and a driving portion 128 that drives the arm 124 to move the holding portion 126 in the horizontal direction (left-right direction X and front-back direction Y) and the vertical direction Z. The main body 122 is mounted on a movable body 116 disposed within the housing 110 and is movably arranged by the movable body 116. For example, the main body 122 can be moved (slid) in the left-right direction X by the movable body 116. The arm 124 is mounted on the upper end of the main body 122 so that it can rotate within a horizontal plane (an imaginary horizontal plane defined by the left-right direction X and the front-back direction Y) relative to the main body 122 and can be raised and lowered in the vertical direction Z. The holding portion 126 is, for example, a robot arm, which is mounted at the front end of the arm 124 and can rotate within the horizontal plane of the arm 124 and move in the vertical direction Z along with the lifting. Furthermore, the driving portion 128 is, for example, a motor or a transmission mechanism built into the main body 122, which applies a driving force to the arm 124 to move the holding portion 126. Thus, the transport robot serving as the transport mechanism 120 is in a state where the transported object W is held by the holding portion 126 ( Figure 6 As shown in the figure, the mobile body 116 moves between the loading port 52 of the loading container H and the processing device 54, and the arm 124 is driven by the driving part 128, thereby making the holding part 126 move freely (lift, rotate, forward and backward), thereby transporting the transported object W through the holding part 126.

[0039] Furthermore, in this embodiment, while the object W is being conveyed by the conveying mechanism 120, the state of the object W is detected by the detection unit 130 provided inside the frame 110. The detection unit 130 detects the upper end position of the object W being conveyed by the conveying mechanism 120. Figure 3As shown, the detection unit 130 forms a detection area DR in the horizontal direction (for example, the front-to-back direction Y) and detects the upper end position of the conveyed object W passing through the detection area DR. As an example, the detection unit 130 is a line sensor, including a light-emitting unit 132 (light-emitting unit) that emits detection light forming the detection area DR and a light-receiving unit 134 (light-receiving unit) that receives the detection light. Inside the housing 110, the light-receiving unit 134 is arranged opposite to the light-emitting unit 132 at a position separated by a predetermined distance from the light-emitting unit 132. For example, the light-emitting unit 132 and the light-receiving unit 134 are fixed to the inner wall side of the wall portion 114 on both sides facing each other in the front-to-back direction Y of the housing 110. The light-emitting unit 132 emits detection light toward the light-receiving unit 134 provided on the inner wall side of the facing wall portion 114, and the light-receiving unit 134 receives the detection light emitted from the light-emitting unit 132 provided on the facing wall portion 114. Thus, the light emitting unit 132 and the light receiving unit 134 of the detection unit 130 form a detection region DR along the horizontal direction (e.g., the front-to-back direction Y) between the walls 114 on opposite sides of the housing 110 in the front-to-back direction Y. Thus, within the housing 110, the object W held by the holding unit 126 is conveyed by the conveying mechanism 120 along a conveying direction D (e.g., the left-to-right direction X) that intersects the direction in which the detection region DR extends (e.g., the front-to-back direction Y). As the object W passes through the detection region DR along the conveying direction D (e.g., the left-to-right direction X), the detection unit 130 detects the upper end position of the object W.

[0040] As an example, Figure 3 As shown, to improve detection accuracy of the detection unit 130, the horizontal dimension of the detection area DR (e.g., the front-to-back direction Y) is set larger than the horizontal dimension (e.g., the front-to-back direction Y) of the object W. In this manner, when the object W is conveyed along the conveying direction D (e.g., the left-to-right direction X), it can simultaneously pass through the detection area DR from one end to the other in the horizontal direction (e.g., the front-to-back direction Y), thereby enabling detection of the entire top surface of the object W.

[0041] Moreover, refer to Figure 3 、 Figure 7 、 Figure 8 The following describes a case where the upper end position P1 of the conveyed object W is detected by the detection unit 130. Figure 7 The transported object W shown is a flat substrate (hereinafter referred to as an ideal substrate) that does not warp in the vertical direction Z. Figure 8 The conveyed object W shown is a substrate that is warped in the vertical direction Z. Figure 7 、 Figure 8As shown, the light emitting portion 132 of the detection portion 130 emits a strip of detection light L having a predetermined size range in the vertical direction Z. The light receiving portion 134 of the detection portion 130 receives the light emitted by the light emitting portion 132 using a light receiving surface of a linear charge coupled device (CCD) sensor (not shown). The strip of detection light L extends from the light emitting portion 132 toward the light receiving portion 134, forming a strip of detection area DR. Moreover, the size of the strip of detection light L in the vertical direction is preferably greater than the distance from the lower surface 126a of the holding portion 126 of the conveying mechanism 120 to the upper end of the conveyed object W held by the holding portion 126. Inside the frame 110, the conveyed object W held by the holding portion 126 of the conveying mechanism 120 passes through the detection area DR as the conveying mechanism 120 moves in the conveying direction D (e.g., the left-right direction X). The holding portion 126 holding the conveyed object W passes within a range that blocks the strip-shaped detection light L (i.e., the detection area DR), whereby the detection portion 130 measures the amount of the strip-shaped detection light L in the vertical direction Z blocked by the conveyed object W and the holding portion 126.

[0042] Thus, the detection unit 130 detects the distance (for example, the distance between the lower surface 126a of the holding unit 126 and the upper end of the object W) in the vertical direction Z when the object W is held by the holding unit 126. Figure 7 The distance D1 shown or Figure 8 The distance D2 shown in the figure is taken as the upper end position P1 of the conveyed object W. Figure 7 In the case of the ideal substrate shown in FIG. 1 , the upper end position P1a of the conveyed object W is the upper surface of the conveyed object W. On the other hand, in the case of the conveyed object W as shown in FIG. Figure 8 In the case of a substrate warped in the vertical direction Z, as shown, the upper end position P1b of the conveyed object W is the uppermost surface of the warping (the portion with the greatest warpage) of the conveyed object W. However, regardless of whether the conveyed object W is warped in the vertical direction Z, the detection unit 130 can, as described above, detect the upper end position P1 of the conveyed object W as it is conveyed by the conveying mechanism 120. Here, the detection unit 130 is exemplified as a line sensor including a light emitting unit 132 and a light receiving unit 134, but detection components other than line sensors may also be used. Furthermore, the detection unit 130 forms a detection area DR along the horizontal front-to-back direction Y, but the detection area DR may also be formed along other horizontal directions (e.g., the left-to-right direction X), or along directions other than the horizontal direction. It suffices that the detection unit 130 forming the detection area DR detect the upper end position P1 of the conveyed object W held by the holding unit 126.

[0043] Moreover, if Figure 3 、Figure 7 、 Figure 8 As shown in FIG. 10, the conveyance mechanism 120 also has a support pin 129 that extends upward from the upper surface 126b of the holding section 126 (the robot hand). The conveyed article W is held by the holding section 126 in a state of being supported by the support pin 129. The support pin 129 is provided on the upper surface 126b of the holding section 126 and comes into contact with the lower surface of the conveyed article W that is conveyed, thereby holding the conveyed article W and improving the stability of the conveyed article W when it is conveyed. If described in detail, a region on the lower surface of the conveyed article W is predetermined in which contact with the holding section 126 (the robot hand) is permitted. In addition to this, for the holding section 126, it is required that even if the conveyed article W is warped or deflected, the conveyed article W is supported in such a manner that the lower surface of the conveyed article W does not come into contact with the surface of the holding section 126. Thus, for the holding section 126, in order to suppress the adhesion of particles toward the conveyed article W caused by the contact of the holding section 126 with the conveyed article W, it is required that the conveyed article W be supported using the support pin 129 that comes into contact within the region. Also, the support pin 129 supports the conveyed article W at a position spaced upward from the holding section 126, and thus the contact of the lower surface of the conveyed article W with the surface of the holding section 126 is suppressed.

[0044] Here, as an example, in the case where the conveyed article W supported by the support pin 129 is accommodated into the space G formed by the prescribed support section S inside the container H (FOUP), the conveyed article W is supported in such a manner that the lower surface of the conveyed article W does not come into contact with the surface of the holding section 126, and thus the possibility of the conveyed article W colliding with the upper support section S among the support sections S that form the space G as the conveyance destination is high. Also, in the case where the conveyed article W is held by the support pin 129 included in the holding section 126, the lower end of the conveyed article W can overlap the position of the support pin 129 in the vertical direction Z (see FIG. 10). Thus, instead of detecting the upper end position PI of the conveyed article W, it is required that a higher level of detection section 130 be used, and thus the cost of detection is increased. Thus, in the present embodiment, the detection section 130 detects the upper end position PI of the conveyed article W during the conveyance of the conveyed article W in a state of being held by a plurality of support pins 129. Thus, when the detection section 130 detects the state of the conveyed article W held by the holding section 126 by the support pin 129 (for example, the upper end position PI of the conveyed article W shown in FIG. 10), it is possible to measure the distance from the lower surface 126a of the holding section 126 to the uppermost surface of the conveyed article W including the support pin 129 (for example, the distance D1 shown in FIG. 10 or the distance D2 shown in FIG. 11). Figure 7 With Figure 8 ) the lower end of the conveyed article W can overlap the position of the support pin 129 in the vertical direction Z (see FIG. 10). Thus, instead of detecting the upper end position PI of the conveyed article W, it is required that a higher level of detection section 130 be used, and thus the cost of detection is increased. Thus, in the present embodiment, the detection section 130 detects the upper end position PI of the conveyed article W during the conveyance of the conveyed article W in a state of being held by a plurality of support pins 129. Thus, when the detection section 130 detects the state of the conveyed article W held by the holding section 126 by the support pin 129 (for example, the upper end position PI of the conveyed article W shown in FIG. 10), it is possible to measure the distance from the lower surface 126a of the holding section 126 to the uppermost surface of the conveyed article W including the support pin 129 (for example, the distance D1 shown in FIG. 10 or the distance D2 shown in FIG. 11). Figure 7 With Figure 8 ) the lower end of the conveyed article W can overlap the position of the support pin 129 in the vertical direction Z (see FIG. 10). Thus, instead of detecting the upper end position PI of the conveyed article W, it is required that a higher level of detection section 130 be used, and thus the cost of detection is increased. Thus, in the present embodiment, the detection section 130 detects the upper end position PI of the conveyed article W during the conveyance of the conveyed article W in a state of being held by a plurality of support pins 129. Thus, when the detection section 130 detects the state of the conveyed article W held by the holding section 126 by the support pin 129 (for example, the upper end position PI of the conveyed article W shown in FIG. 10), it is possible to measure the distance from the lower surface 126a of the holding section 126 to the uppermost surface of the conveyed article W including the support pin 129 (for example, the distance D1 shown in FIG. 10 or the distance D2 shown in FIG. 11). Figure 7 With Figure 8The distance D2 shown is equal to or greater than the distance D1 shown, and the upper end position P1 of the conveyed article W is detected on the basis of this. In the case where the holding portion 126 does not have the support pin 129, the holding portion 126 can also directly hold the conveyed article W by the upper surface 126b of the holding portion 126. In this aspect, the holding portion 126 functions as the support pin 129.

[0045] Referring to Figure 4 , Figure 5 , Figure 9 In the present embodiment, when the conveyed article W is conveyed to the container H by the conveying mechanism 120, the holding portion 126 (the robot hand) holding the conveyed article W enters the space G divided by two support portions S adjacent in the vertical direction among the plurality of support portions S of the container H in a state of holding the conveyed article W, and then moves downward to support the conveyed article W on the lower support portion S (the second support portion) among the two support portions S adjacent in the vertical direction and then leaves the container H. At this time, as described above, in addition to the narrow interval (pitch) of the plurality of support portions S in the container H, in the case where the conveyed article W is warped, the conveyed article W can also collide with the support portions S of the container H at the time of insertion of the holding portion 126. Therefore, the control portion 140 of the conveying device 100 is required to correct the insertion height of the holding portion 126 into the container H on the basis of the upper end position P1 of the conveyed article W detected by the detection portion 130 so that the conveyed article W does not collide with the support portions S of the container H, and to insert the holding portion 126 into the container H at the corrected insertion position (insertion height). Further, in the case where the size of the warping of the conveyed article W is estimated to be greater than the interval of the plurality of support portions S on the basis of the value detected by the detection portion 130 and the interval of the plurality of support portions S, an alarm can also be issued without insertion of the conveyed article W into the container H, and an irregular process can be performed. Figure 2

[0046] More specifically, Figure 9 With Figure 10 This indicates the action of correcting the insertion height of the holding portion 126 into the container H so that the upper end of the conveyed article W does not collide with the support portion S1 when the holding portion 126 is inserted into the space G1 between the support portion S1 and the support portion S2. Further, in the explanation using the Figure 9 With Figure 10 The support portion S1 corresponds to the first support portion, and the support portion S2 corresponds to the second support portion, and therefore the first support portion S1 and the second support portion S2 are referred to. That is, Figure 9 With Figure 10 ​In the example, the insertion height of the holding unit 126 into the container H is adjusted so that the upper end position P1 of the object W is located at a target position P2, which is pre-set between the first support portion S1 and the second support portion S2. This ensures that the upper end of the object W does not collide with the first support portion S1 when the holding unit 126 is inserted into the space G1 between the first and second support portions S1 and S2. Specifically, the target position P2 is the target position at which the upper end P1 of the object W should be when the holding unit 126 is inserted into the container H in order to place the object W on a specific support portion S. This target position P2 is set for each support portion S. The target position P2 is a predetermined distance below the position (height) of the first support portion S1. The predetermined distance is set based on, for example, the amplitude of vibration generated in the holding unit 126 (manipulator) during transport of the object W. Furthermore, the target position P2 is located closer to the first support portion S1 than to the second support portion S2 in the vertical direction Z. Furthermore, the target position P2 is set for each support portion S (or each space G). The control unit 140 further sets the target position P2 so that the lower end of the object W is located above the upper surface of the second support portion S2 in the vertical direction Z. In other words, the target position P2 is preferably offset from the first support portion S1 so that the lower end of the object W does not collide with the second support portion S2.

[0047] For example, the control unit 140 obtains the intervals (spaces G) between the plurality of support portions S of the container H in advance, and sets the position close to the first support portion S1 as the target position P2 based on the middle position between the first support portion S1 and the second support portion S2. Alternatively, the port door 52a ( Figure 4 The conveying mechanism 120 lowers the first support member S1 while detecting the lower surface position of the first support member S1 using the container detection unit 52d provided on the upper portion of the port door 52a (the lowering operation may not be stopped at this point). The target position P2 is then set as a position a predetermined distance below the lower surface position of the first support member S1. For subsequent support members S, the target position P2 can be calculated based on the intervals between the multiple support members S, or the port door 52a can be allowed to continue descending while detecting the lower surface position of each support member S to set the target position of the next support member S. Preferably, after the target positions P2 of the multiple support members S are set, regardless of the state of the conveyed object W being conveyed by the conveying mechanism 120 (whether warping occurs in the vertical direction Z), the retaining unit 126 is inserted to the insertion height of the container H so that the detected upper end position P1 of the conveyed object W is at the target position P2. However, adjustment of the target position P2 during the conveyance of the conveyed object W is not excluded.

[0048] Before the conveyance of the conveyed article W by the conveyance device 100, the control section 140 preliminarily acquires, for the conveyed article W as the ideal substrate, a reference insertion position (for example, the insertion position P3a shown in FIG. 6) in which the holding section 126 is inserted into the container H in such a manner that the upper end position Pl of the conveyed article W is located at the target position P2. The reference insertion position (the insertion position P3a) is set in accordance with a reference set value (distance Dl) from the lower surface 126a of the holding section 126 to the upper end of the conveyed article W as the ideal substrate when the holding section 126 holds the conveyed article W as the ideal substrate. The reference insertion position is set for each support section S. The reference set value is acquired by the detection section 130 by moving the conveyance mechanism 120 so that the conveyed article W and the holding section 126 pass through the detection region DR in a state in which the holding section 126 holds the conveyed article W as the ideal substrate. Further, the reference set value can also be a value calculated in accordance with the dimensions of the holding section 126 and the conveyed article W. Figure 9 The reference insertion position (the insertion position P3a) is set in accordance with a reference set value (distance Dl) from the lower surface 126a of the holding section 126 to the upper end of the conveyed article W as the ideal substrate when the holding section 126 holds the conveyed article W as the ideal substrate. The reference insertion position is set for each support section S. The reference set value is acquired by the detection section 130 by moving the conveyance mechanism 120 so that the conveyed article W and the holding section 126 pass through the detection region DR in a state in which the holding section 126 holds the conveyed article W as the ideal substrate. Further, the reference set value can also be a value calculated in accordance with the dimensions of the holding section 126 and the conveyed article W.

[0049] Reference is made to Figure 7 With Figure 9 , the process of inserting the holding section 126 holding the conveyed article W as the ideal substrate into the container H is described. Figure 7 With Figure 9 , the conveyed article W is the same size and posture as the ideal substrate. Thus, the distance Dl of the conveyed article W is equal to the reference set value of the ideal substrate. When the conveyed article W is actually conveyed, the detection section 130 detects the distance Dl from the lower surface 126a of the holding section 126 to the upper end of the conveyed article W as the upper end position Pla of the conveyed article W. The control section 140 compares the detection value (distance Dl) of the detection section 130 with the reference set value preliminarily acquired in correspondence with the reference insertion position of the holding section 126. As described above, since the distance Dl of the conveyed article W is equal to the reference set value of the ideal substrate, the control section 140 calculates that the correction amount of the insertion height of the holding section 126 is 0. The control section 140 corrects the reference insertion position of the holding section 126 and derives the corrected insertion position (the insertion position P3a) on the basis of the calculation result. The control section 140 drives the drive section 128 of the conveyance mechanism 120 to insert the holding section 126 into the container H at the position of the insertion position P3a. Further, in this example, since the correction amount of the insertion height of the holding section 126 is 0, the correction of the insertion height of the holding section 126 is not performed in appearance. That is, Figure 9 In this example, the reference insertion position can be referred to as the insertion position P3a.

[0050] On the other hand, with reference to Figure 8 With Figure 10 , the process of inserting the holding section 126 holding the conveyed article W as the ideal substrate into the container H is described.Figure 8 and Figure 10 The conveyed object W shown is different from an ideal substrate and exhibits warpage in the vertical direction Z. The conveyed object W includes warpage where its top surface is separated from the holder 126. Therefore, the distance D2 of the conveyed object W is greater than the reference set value for an ideal substrate (equivalent to distance D1). When the conveyed object W is actually conveyed, the detection unit 130 detects the distance D2 from the lower surface 126a of the holder 126 to the top of the conveyed object W as the top end position P1b of the conveyed object W. The control unit 140 compares the detection value (distance D2) of the detection unit 130 with a previously acquired reference set value corresponding to the reference insertion position of the holder 126. Specifically, the detection unit 130 calculates the difference between the distance D2 and the reference set value as a correction for the insertion height of the holder 126. Based on this calculation, the control unit 140 corrects the reference insertion position of the holder 126 (insertion position P3a) and derives the corrected insertion position (insertion position P3b). The control unit 140 drives the driving unit 128 of the conveying mechanism 120 so that the holding unit 126 is inserted into the container H at the insertion position P3 b.

[0051] As can be seen from the above, in this embodiment, the control unit 140 corrects the insertion height of the holding unit 126 into the container H so that the upper end position P1 of the conveyed object W is located at the target position P2. Figure 10 As shown in FIG. 1 , for an object W that has warped upward, in order to position the upper end position P1 of the object W at the target position P2, the object W is moved to the target position P2. Figure 9The insertion position P3a of the holding portion 126 of the ideal substrate is shown. The insertion position P3b of the holding portion 126 is corrected downward (the correction amount a is the difference between the distance D2 and the distance Dl). Thus, regardless of the state of the conveyed article W (whether or not the conveyed article W has been warped in the up-down direction Z), the conveying device 100 can detect the state of the conveyed article W (for example, the upper end position Pl) during conveyance of the conveyed article W and correct the insertion height of the holding portion 126 into the container H so that the upper end position Pl of the conveyed article W is at the target position P2, control the insertion position of the holding portion 126 to reduce the condition in which the conveyed article W collides with the support portion S, and improve the control stability. That is, the insertion position (for example, the insertion position P3a, the insertion position P3b) of the holding portion 126 is controlled by the control portion 140 of the conveying device 100 so that the upper end position Pl of the conveyed article W is at the target position P2, whereby the upper end of the conveyed article W can be prevented from colliding with the upper first support portion Sl. Furthermore, the holding portion 126 is inserted into the container H so that the conveyed article W is in a state of being as much as possible biased toward the upper first support portion Sl on the premise that the upper end of the conveyed article W does not collide with the upper first support portion Sl, whereby a space with respect to the lower second support portion S2 is obtained. Thus, even in the case where the conveyed article W has been warped downward, the possibility of the conveyed article W colliding with the lower second support portion S2 is small.

[0052] In the embodiment described thus far, the following is described: the control portion 140 acquires the error between the upper end position of the conveyed article W detected by the detection portion 130 (for example, the upper end position Plb of the conveyed article W that is a substrate that has been warped in the up-down direction Z) and the upper end position of the conveyed article W that becomes a reference when the holding portion 126 is inserted into the container H (for example, the upper end position Pla of the conveyed article W that is an ideal substrate that becomes a reference) as the conveyed article error information AP, and calculates the correction amount a of the insertion height of the holding portion 126 toward the container H on the basis of the conveyed article error information AP. In another embodiment, it is preferable that the control portion 140 further acquires the error between the height position RS of each of the plurality of support portions S of the container H and the height position BS of each of the plurality of support portions S of the container H that becomes a reference as the container error information AS, and calculates the correction amount a of the insertion height of the holding portion 126 toward the container H on the basis of at least one of the conveyed article error information AP and the container error information AS (as the correction amount information RC). Hereinafter, the process of conveying the conveyed article W toward the container H by the conveying device 100 of the present embodiment and the case where the correction amount a of the insertion height of the holding portion 126 toward the container H is calculated on the basis of the conveyed article error information AP and the container error information AS as the correction amount information RC will be described with reference to Figs. 12A to 12C. Figure 10 Figure 2 Figures 11 to 15 ​​​

[0053] As an example, Figure 11 As shown, the process of conveying the conveyed object W to the container H of the conveying device 100 includes the following steps. First, in the preliminary processing step S00, the control unit 140 obtains the error between the height position RS of each of the multiple support parts S of the container H and the height position BS of each of the multiple support parts S of the container H serving as the reference as container error information AS. Moreover, in the storage start step S01, the control unit 140 receives the storage start instruction and starts to convey the conveyed object W to the container H through the conveying mechanism 120. Moreover, in the upper end position measurement step S02, in a state where the conveyed object W is held by the holding portion 126 (and further supported by the support pin 129), the upper end position P1 ( Figure 7 and Figure 8 In addition, in the correction amount calculation step S03, the control unit 140 calculates the correction amount a ( ) for inserting the holding unit 126 into the container H so that the upper end position P1 of the conveyed object W is located at the preset target position P2. Figure 10 (as shown) as correction amount information RC. The correction amount a here can be calculated using both the object error information AP, the error between the upper end position P1b of the object W detected in the upper end position measurement step S02 and the reference upper end position P1a of the object W, and the container error information AS acquired in the preliminary processing step S00, or it can be calculated based solely on the object error information AP. If the correction amount a is calculated based solely on the object error information AP, the preliminary processing step S00 can be omitted.

[0054] Then, in the insertion position correction step S04, the control unit 140 corrects the insertion height ( ) of the holding unit 126 into the container H based on the calculated correction amount a. Figure 10). Specifically, the control unit 140 calculates the corrected insertion position (e.g., insertion position P3b) of the holding unit 126 toward the container H as corrected insertion position information PR based on previously acquired reference insertion position information TR, which serves as reference insertion position information P3a, and correction amount information RC, which serves as correction amount a. The reference insertion position information TR refers to information for inserting the holding unit 126 into the container H at the reference insertion position P3a, such that the upper end position P1a of the object W, serving as a reference, is located at the target position P2. Furthermore, in the object storage step S05, the control unit 140 inserts the holding unit 126, which has been positioned at the insertion height, into the container H, thereby conveying the object W into the container H. Specifically, the control unit 140 moves (raises and lowers) the holding unit 126 to the calculated corrected insertion position (e.g., insertion position P3b), inserts the holding unit 126, which has been positioned at the corrected insertion position (insertion position P3b), into the container H, and conveys the object W into the container H. After the above steps, the conveyance of one conveyed object W is completed. Subsequently, in the conveyed object remaining quantity confirmation step S06, the remaining quantity of conveyed objects W scheduled to be conveyed is confirmed. If it is confirmed in the conveyed object remaining quantity confirmation step S06 that there are conveyed objects W to be conveyed to the container H, the upper end position measurement step S02, the correction amount calculation step S03, the insertion position correction step S04, and the conveyed object storage step S05 are performed again for the next conveyed object W, and the next conveyed object W is conveyed. If it is confirmed in the conveyed object remaining quantity confirmation step S06 that there are no conveyed objects W to be conveyed to the container H, the process proceeds to the storage end step S07. In the storage end step S07, the control unit 140 receives the storage end instruction and ends the conveyance of the conveyed objects W to the container H by the conveying mechanism 120. In addition, there is no need to repeat the preliminary processing step S00.

[0055] like Figure 2 As shown, the control unit 140 includes a calculation unit 142, a processing unit 144, and a storage unit 146. The calculation unit 142 calculates the correction amount a ( Figure 10). The processing unit 144 corrects the insertion height of the holding unit 126 into the container H based on the correction amount a, inserting the holding unit 126 positioned at the insertion height (located at the insertion position P3b) into the container H, and conveying the object W into the container H. That is, the control unit 140 corrects the insertion height of the holding unit 126 into the container H based on the correction amount a, inserting the holding unit 126 positioned at the corrected insertion height into the container H, and conveying the object W into the container H. Furthermore, the storage unit 146 stores the aforementioned container error information AS in the container error information table 146a, stores the aforementioned object error information AP in the object error information table 146b, stores the aforementioned correction amount information RC in the correction amount information table 146c, and stores the aforementioned corrected insertion position information PR in the corrected insertion position information table 146d. The functions of the calculation unit 142 and the processing unit 144 may be performed by, for example, a central processing unit (processor), and the function of the storage unit 146 may be performed by, for example, a storage device (memory). Figures 12 to 15 Various types of information stored in the container error information table 146a, the conveyed object error information table 146b, the correction amount information table 146c, and the correction insertion position information table 146d will be described.

[0056] To describe in detail, in this embodiment, before the conveying mechanism 120 starts conveying the conveyed object W to the container H (in the preliminary processing step S00), the control unit 140 obtains in advance the error between the height position RS of each of the multiple support parts S of the container H and the height position BS of each of the multiple support parts S of the container H serving as a reference, as container error information AS. Figure 12As shown, the container error information table 146a stores the height positions RS1, RS2,... of the respective support portions S of the container H in association with the height positions BS1, BS2,... of the respective support portions S of the container H serving as a reference. Also, the container error information table 146a stores the errors of the container H calculated by the calculation section 142 (i.e., the difference between the height position RS and the height position BS) as the container error information AS1, AS2,.... That is, the container error information AS1 is the difference between the actual height position RS1 of the first support portion S1 and the reference height position BS1, and the container error information AS2 is the difference between the actual height position RS2 of the second support portion S2 and the reference height position BS2. The height positions BS of the respective support portions S of the container H serving as a reference are acquired in advance. In contrast, the height positions RS of the respective support portions S of the container H are acquired when the conveying device 100 conveys the conveyed object W to the container H (e.g., in the preliminary process S00). Thus, the container error information AS of the respective support portions S of the container H can be acquired during the conveying of the conveyed object W, but the present application is not limited thereto.

[0057] Also, in the present embodiment, after the upper end position measurement process S02, the control section 140 acquires the error of the upper end position P1b of the conveyed object W detected by the detection section 130 from the upper end position P1a of the conveyed object W serving as a reference as the conveyed object error information AP when the holding section 126 is inserted into the container H. As shown in FIG. 6, the upper end position P1b of the conveyed object W detected by the detection section 130 is the position of the upper end of the conveyed object W when the holding section 126 is inserted into the container H. In contrast, the upper end position P1a of the conveyed object W serving as a reference is the position of the upper end of the conveyed object W when the holding section 126 is inserted into the container H in the state where the conveyed object W is not present in the container H. Thus, the control section 140 can acquire the error of the upper end position P1b of the conveyed object W from the upper end position P1a of the conveyed object W serving as a reference as the conveyed object error information AP when the holding section 126 is inserted into the container H. Figure 13The illustrated conveyance object error information table 146b stores the detected upper end positions P1b1, P1b2,... of the conveyance objects W (described by numbering from top to bottom) scheduled to be inserted into each of the plurality of support portions S of the container H in association with the upper end positions P1a1, P1a2,... of the conveyance objects W serving as a reference for insertion into each of the plurality of support portions S of the container H. Also, the conveyance object error information table 146b stores the error of the upper end position P1 of the conveyance object W calculated by the calculation portion 142 (i.e., the difference between the upper end position P1b and the upper end position P1a) as the conveyance object error information AP1, AP2,.... That is, the conveyance object error information AP1 is the difference between the detected upper end position P1b1 of the first conveyance object W1 and the upper end position P1a1 of the conveyance object W serving as a reference, and the conveyance object error information AP2 is the difference between the detected upper end position P1b2 of the second conveyance object W2 and the upper end position P1a2 of the conveyance object W serving as a reference. Further, the upper end position P1a is acquired in advance, and a common value is stored for the upper end positions P1a1, P1a2,.... In contrast, the upper end position P1b is acquired when the conveyance of the conveyance object W by the conveyance device 100 is performed (e.g., in the upper end position measurement process S02). Thus, it is possible to acquire the conveyance object error information AP of the conveyance object W scheduled to be inserted into each of the plurality of support portions S of the container H during the conveyance of the conveyance object W, but the present application is not limited thereto. Also, in the following description, the first conveyance object W1 is described as a conveyance object scheduled to be supported above the second support portion S2 in the container error information table 146a, and the second conveyance object W2 is described as a conveyance object scheduled to be supported above the third support portion S3 in the container error information table 146a, but the combination of the conveyance object W and the support portion S supporting the conveyance object W is not limited thereto. For example, the first conveyance object W1 can be a conveyance object scheduled to be supported by the third support portion S3.

[0058] Next, in the present embodiment, in the correction amount calculation process S03, the control portion 140 further calculates a correction amount a (illustrated in the drawing) of the insertion height of the holding portion 126 into the container H in such a manner that the upper end position P1a of the conveyance object W is located at the target position P2 set in advance as the correction amount information RC. Here, a case in which the control portion 140 calculates the correction amount a of the insertion height of the holding portion 126 into the container H using both the conveyance object error information AP and the container error information AS as the correction amount information RC is described, but as long as the correction amount a of the insertion height of the holding portion 126 into the container H is calculated based on at least one of the conveyance object error information AP and the container error information AS as the correction amount information RC. As described above, the control portion 140 can calculate the correction amount a of the insertion height of the holding portion 126 into the container H using only the conveyance object error information AP as the correction amount information RC, or using only the container error information AS as the correction amount information RC. Figure 10 Here, a case in which the control portion 140 calculates the correction amount a of the insertion height of the holding portion 126 into the container H using both the conveyance object error information AP and the container error information AS as the correction amount information RC is described, but as long as the correction amount a of the insertion height of the holding portion 126 into the container H is calculated based on at least one of the conveyance object error information AP and the container error information AS as the correction amount information RC. As described above, the control portion 140 can calculate the correction amount a of the insertion height of the holding portion 126 into the container H using only the conveyance object error information AP as the correction amount information RC, or using only the container error information AS as the correction amount information RC.Figure 14 As shown, the correction amount information table 146c stores the conveyance object error information AP1, AP2,... detected in the upper end position measurement process S02 in association with the container error information AS1, AS2,... acquired in the preliminary process S00. Also, the correction amount information table 146c stores the sum of the correction amounts calculated by the calculation section 142 (i.e., the sum of the conveyance object error information AP and the container error information AS) as the correction amount information RC1, RC2,.... That is, the correction amount information RC1 is the correction amount information used when the first conveyance object W1 is placed on the support section S2 (i.e., the support section S2 is the second support section), and is the sum of the conveyance object error information AP1 of the first conveyance object W1 and the container error information AS1 of the first support section S1 (i.e., the first support section), and the correction amount information RC2 is the correction amount information used when the second conveyance object W2 is placed on the support section S3 (i.e., the support section S3 is the second support section), and is the sum of the conveyance object error information AP2 of the second conveyance object W2 and the container error information AS2 of the second support section S2 (i.e., the first support section). Thus, it is possible to acquire the correction amount information RC of the insertion height of the holding section 126 toward the container H at the time of insertion into each of the plurality of support sections S of the container H during the conveyance of the conveyance object W. Further, as described above, the first conveyance object W1 can also be a conveyance object scheduled to be supported by the third support section S3. At this time, the correction amount information RC2 is the sum of the conveyance object error information AP1 of the first conveyance object W1 and the container error information AS2 of the second support section S2. Also, although the case where the control section 140 calculates the correction amount a (correction amount information RC) based on the conveyance object error information AP and the container error information AS is described, the correction amount a (correction amount information RC) can also be calculated based on at least one of the conveyance object error information AP and the container error information AS. For example, in the case where the correction amount a (correction amount information RC) is calculated based on only the conveyance object error information AP, the conveyance object error information AP is directly used as the correction amount information RC.

[0059] Then, in the present embodiment, in the insertion position correction process S04, the control unit 140 corrects the insertion height of the holding unit 126 into the container H based on the calculated correction amount a. Here, the control unit 140 further obtains in advance the reference insertion position information TR as the reference insertion position P3a, which is a position at which the holding unit 126 is inserted into the container H in such a manner that the upper end position P1a of the conveyed object W, which serves as a reference when the holding unit 126 is inserted into the container H, is located at the target position P2, and calculates the corrected insertion position (for example, insertion position P3b) of the holding unit 126 toward the container H based on the reference insertion position information TR as the reference insertion position P3a and the correction amount information RC as the correction amount a as the corrected insertion position information PR. As Figure 15 As shown, the correction insertion position information table 146d stores reference insertion position information TR1, reference insertion position information TR2, ..., of the holding unit 126 for conveying the object W toward the container H, in association with the correction amount information RC1, correction amount information RC2, ..., calculated in the correction amount calculation step S03. Furthermore, the correction insertion position information table 146d stores the total value of the reference insertion position information TR and the correction amount information RC calculated by the calculation unit 142 as correction insertion position information PR1, correction insertion position information PR2, .... That is, the corrected insertion position information PR1 is the insertion position information used when the first conveyed object W1 is placed on the support part S2 (i.e., the support part S2 is the second support part), and is the sum of the reference insertion position information TR1 when the conveyed object W, which will serve as the reference, is conveyed to the second support part S2 (space G1) and the correction amount information RC1 when the first conveyed object W1 is conveyed to the second support part S2 (space G1). The corrected insertion position information PR2 is the insertion position information used when the second conveyed object W2 is placed on the support part S3 (i.e., the support part S3 is the second support part), and is the sum of the reference insertion position information TR2 when the conveyed object W, which will serve as the reference, is conveyed to the third support part S3 (space G2) and the correction amount information RC2 when the second conveyed object W2 is conveyed to the third support part S3 (space G2). Thus, the corrected insertion position information PR of the holding portion 126 relative to the container H when inserting the object W into each of the plurality of supports S of the container H can be acquired during the conveyance of the object W, but the present invention is not limited thereto.

[0060] Then, in the present embodiment, in the conveyed object storage process S05, the control unit 140 further positions the holding unit 126 at the corrected insertion position (insertion position P3b) based on the corrected insertion position information PR as the corrected insertion position (for example, insertion position P3b) and inserts the holding unit 126 into the container H to convey the conveyed object W to the container H. That is, when executing the conveyed object storage process S05, the processing unit 144 of the control unit 140 obtains the corrected insertion position information PR (corrected insertion position information PR1, corrected insertion position information PR2, ...) from the corrected insertion position information table 146d for the support unit S (support unit S1, support unit S2, ...) on which the conveyed object W currently being conveyed is scheduled to be placed. Furthermore, the control unit 140 moves (raises and lowers) the holding unit 126 to the corrected insertion position (for example, Figure 10 The holding portion 126 positioned at the corrected insertion position (insertion position P3b) is inserted into the container H to transport the object W to the container H. At this time, the arm portion 124 ( Figure 6 The holder 126 is moved in the vertical direction Z (as shown) to locate the holding portion 126 at the corrected insertion position (insertion position P3b). The holding portion 126, now located at the corrected insertion position (insertion position P3b), is then controlled to convey the object W to the container H. Subsequently, the holding portion 126 is moved downward in the vertical direction Z to place the object W on the corresponding support portion S. In this manner, the holding portion 126, inserted at the corrected insertion position calculated based on the target position P2, and the object W held by the holding portion 126 are prevented from colliding with the first support portion S1 and the second support portion S2.

[0061] In summary, the conveyance device of the present application includes a conveyance mechanism that conveys a conveyed object to a container provided with a plurality of support portions arranged at a prescribed interval in the up-down direction, a detection portion that detects the upper end position of the conveyed object conveyed by the conveyance mechanism, and a control portion that controls the conveyance mechanism, and the control portion corrects the insertion height at which the holding portion of the conveyance mechanism is inserted into the container so that the upper end position of the conveyed object is at a target position. Also, the target position, which is a condition for correcting the insertion height at which the holding portion is inserted into the container, is set to a position of a first support portion that is closer to the upper side than a second support portion that is on the lower side in the up-down direction. In this way, regardless of the state of the conveyed object (whether or not the conveyed object is warped in the up-down direction), the conveyance device can detect the state (for example, the upper end position) of the conveyed object during conveyance of the conveyed object, and correct the insertion height at which the holding portion is inserted into the container so that the upper end position of the conveyed object is at the target position, control the insertion position of the holding portion so as to reduce the situation in which the conveyed object collides with the support portion, and improve control stability. That is, the insertion position of the holding portion can be controlled so that the upper end position of the conveyed object is always at the target position, and the conveyed object is prevented from colliding with the support portion.

[0062] Finally, it should be noted that the above embodiments are merely illustrative of the technical solutions of the present application and do not limit the same. The present application is described in detail with reference to the above embodiments, but it is of course understood by those skilled in the art that the technical solutions described in the above embodiments can still be modified or equally replaced for some or all of the technical features, but these modifications or replacements do not cause the corresponding technical solutions to deviate from the technical solutions of the embodiments of the present application.

[0063] Industrial applicability

[0064] The present application provides a conveyance device that can detect the state of a conveyed object during conveyance of the conveyed object and control a holding portion so as to reduce the situation in which the conveyed object collides with a support portion provided in a container, and improve control stability.

[0065] Explanation of reference numerals

[0066] 50: conveyance system

[0067] 52: load port

[0068] 52a: port door

[0069] 52b: door drive portion

[0070] 52c: door control portion

[0071] 52d: container detection portion

[0072] 52e: placement table

[0073] 52f: support body

[0074] 54: processing device

[0075] 100: conveyance device

[0076] 110: frame

[0077] 112: frame portion

[0078] 114: wall portion

[0079] 116: moving body

[0080] 118: guide structure

[0081] 120: conveyance mechanism

[0082] 122: body portion

[0083] 124: arm portion

[0084] 126: holding portion

[0085] 126a: lower surface

[0086] 126b: upper surface

[0087] 128: drive portion

[0088] 129: support pin

[0089] 130: detection portion

[0090] 132: light emitting portion

[0091] 134: light receiving portion

[0092] 140: control portion

[0093] 142: calculation portion

[0094] 144: processing portion

[0095] 146: storage portion

[0096] 146a: container error information table

[0097] 146b: conveyed article error information table

[0098] 146c: correction amount information table

[0099] 146d: correction insertion position information table

[0100] a: correction amount

[0101] AP, AP1, AP2: conveyed article error information AS, AS1, AS2: container error information BS, BS1, BS2, RS, RS1, RS2: height position

[0102] D: conveyance direction

[0103] D1, D2: distance

[0104] DR: detection region

[0105] G, G1, G2: space

[0106] H: container

[0107] L: detection light

[0108] P1, P1a, P1a1, P1a2, P1b, P1b1, P1b2: upper end position

[0109] P2: target position

[0110] P3a, P3b: insertion position

[0111] PR, PR1, PR2: correction insertion position information

[0112] RC, RC1, RC2: correction amount information

[0113] S: support portion

[0114] S1: first support portion

[0115] S2: second support portion

[0116] S00: preliminary processing step

[0117] S01: storage start step

[0118] S02: upper end position measurement step

[0119] S03: correction amount calculation step

[0120] S04: insertion position correction step

[0121] S05: conveyed article storage step

[0122] S06: conveyed article remaining number confirmation step

[0123] S07: storage end step

[0124] TR, TR1, TR2: reference insertion position information

[0125] W: conveyed article

[0126] X: left-right direction

[0127] Y: front-rear direction

[0128] Z: up-down direction

Claims

1. A conveyance device characterized by comprising: including: a conveyance mechanism that conveys a conveyed object to a container that is provided with a plurality of support portions arranged at a prescribed interval in an up-down direction; a detection portion that detects an upper end position of the conveyed object conveyed by the conveyance mechanism; and a control portion that controls the conveyance mechanism, of the plurality of support portions, an upper side support portion is provided as a first support portion, and a lower side support portion is provided as a second support portion, the conveyance mechanism has a holding portion that holds the conveyed object and a drive portion that moves the holding portion in a horizontal direction and the up-down direction, the detection portion detects, in a state in which the conveyed object is held by the holding portion, a distance from a lower surface of the holding portion in the up-down direction to an upper end of the conveyed object as the upper end position of the conveyed object, the control portion corrects an insertion height at which the holding portion is inserted into the container in such a way that the upper end position of the conveyed object is at a target position, the target position is a position closer to the first support portion than the second support portion in the up-down direction.

2. The conveyance device according to claim 1, wherein the control portion calculates a correction amount of the insertion height at which the holding portion is inserted into the container in such a way that the upper end position is at the target position, corrects the insertion height at which the holding portion is inserted into the container based on the correction amount, and inserts the holding portion positioned at the insertion height into the container to convey the conveyed object to the container.

3. The conveyance device according to claim 1, wherein the conveyed object is a substrate that has been warped in the up-down direction, the control portion further sets the target position in such a way that a lower end of the conveyed object is positioned at a position higher than an upper surface of the second support portion in the up-down direction.

4. The conveyance device according to claim 1, wherein the conveyance mechanism further has a support pin that extends upward from the holding portion, the conveyed object is held by the holding portion in a state in which the conveyed object is supported by the support pin.

5. The conveyance device according to claim 1, wherein the detection portion forms a detection region in the horizontal direction and detects the upper end position of the conveyed object that passes through the detection region.

6. The conveyance device according to claim 1, wherein the control portion acquires an error between the upper end position of the conveyed object detected by the detection portion and an upper end position of a conveyed object that becomes a reference when the holding portion is inserted into the container as conveyed object error information.

7. The conveyance device according to claim 6, wherein the control portion further acquires an error between a height position of each of the plurality of support portions of the container and a height position of each of the plurality of support portions of a container that becomes a reference as container error information.

8. The conveyance device according to claim 7, wherein The control section further calculates the correction amount of the insertion height of the holding section toward the container based on at least one of the conveyed article error information and the container error information as correction amount information.

9. The conveyance device according to claim 8, wherein The control section further acquires, in advance, reference insertion position information as a reference insertion position that is a position at which the holding section is inserted into the container in such a manner that an upper end position of a conveyed article that becomes a reference when the holding section is inserted into the container is located at a target position, and A corrected insertion position of the holding section toward the container is calculated based on the reference insertion position information and the correction amount information as the correction amount, as corrected insertion position information.

10. The conveyance device according to claim 9, wherein The control section further causes the holding section to be inserted into the container at the corrected insertion position based on the corrected insertion position information as the corrected insertion position, thereby conveying the conveyed article to the container.

11. The conveyance device according to claim 1, wherein The detection section includes a light emitting section that emits detection light that forms the detection region and a light receiving section that receives the detection light, and The conveyed article is detected by the detection section by causing the conveyed article to pass through the detection region along a conveyance direction that intersects with an extension direction of the detection region, thereby detecting the upper end position of the conveyed article.

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