A support device for a magnetron sputtering coating machine

Abstract

This invention provides a support device for a magnetron sputtering coating machine, belonging to the technical field of coating machines. It includes a housing with a rotary motor located at the bottom. A quick-change mechanism is located above the rotary motor. The quick-change mechanism includes a rotating shaft, a support spindle, and a connecting shaft. The lower end of the support spindle is connected to the rotating shaft via an annular sleeve and a first insertion block. The upper end of the support spindle is connected to the connecting shaft via a convex shaft and a second insertion block. A compensation mechanism is provided inside the rotating shaft. Through the quick-change mechanism, the support spindle and the support plate module mounted on it can be installed or disassembled simply by lifting-rotating-lifting-lateral movement or reversing operations, without any tools. This greatly shortens material change and maintenance time, reduces the labor intensity of operators, and is particularly suitable for flexible production modes with multiple varieties and small batches, significantly improving equipment utilization and production efficiency.

Description

Technical Field

[0001] This invention belongs to the field of coating machine technology, specifically a support device for a magnetron sputtering coating machine. Background Technology

[0002] Magnetron sputtering is one of the important methods of vacuum coating. It has the advantages of high film control precision, good coating uniformity and low film formation temperature. It is especially suitable for surface modification coating of metal products and non-metal products such as plastics and paper that are limited by temperature rise. The magnetron sputtering coating machine is a kind of equipment to realize vacuum coating.

[0003] Magnetron sputtering coating machines require materials to be placed on an internal carrier plate before subsequent coating operations can be performed. Traditional magnetron sputtering coating machines typically fix the carrier plate to the drive shaft with multiple bolts or complex mechanical structures. When changing coating workpieces or performing equipment maintenance, the disassembly and installation process is cumbersome, requiring the use of special tools, and alignment is difficult. This results in long downtime, especially in R&D and small-batch production scenarios that require frequent changes in workpiece or carrier plate specifications, severely restricting equipment utilization and production flexibility. Furthermore, traditional carrier plates are usually single-sized circular or rectangular plates with a fixed bearing area, making them inflexible in use. During the coating process, a large amount of heat is generated inside the device, causing the carrier plate and its spindle to heat up and expand. This axial elongation changes the distance between the workpiece and the target material. The "target-substrate distance" is a key process parameter affecting film thickness, uniformity, and stress, resulting in poor process consistency at different time points within the same batch and between different batches, making it difficult to guarantee product yield.

[0004] Therefore, we propose a support device for magnetron sputtering coating machines to solve the problems encountered above. Summary of the Invention

[0005] The purpose of this invention is to address the problem that the carrier plate of traditional magnetron sputtering coating machines is usually fixed to the drive shaft by multiple bolts or complex mechanical structures. This cumbersome disassembly and installation process, requiring specialized tools and difficult alignment during workpiece replacement or equipment maintenance, leads to prolonged equipment downtime. This is particularly problematic in R&D and small-batch production scenarios where frequent workpiece or carrier plate changes are necessary, severely restricting equipment utilization and production flexibility. Furthermore, traditional carrier plates are typically single-sized circular or rectangular plates with a fixed bearing area, lacking flexibility in use. During the coating process, a large amount of heat is generated inside the device, causing the carrier plate and its spindle to heat up and expand. This axial elongation alters the distance between the workpiece and the target material, and the "target-substrate distance" is a key process parameter affecting film thickness, uniformity, and stress. This results in poor process consistency at different time points within the same batch and between different batches, making it difficult to guarantee product yield. Therefore, this invention proposes a carrier device for magnetron sputtering coating machines.

[0006] The objective of this invention can be achieved through the following technical solution: It includes a housing, a rotary motor is provided at the bottom of the housing, a quick-change mechanism is provided above the rotary motor, the quick-change mechanism includes a rotating shaft, a bearing main shaft, and a connecting shaft, an annular sleeve is provided at the lower end of the bearing main shaft, the annular sleeve is inserted into the rotating shaft via a first insertion block, and a convex shaft is provided at the upper end of the bearing main shaft, the convex shaft is inserted into the connecting shaft via a second insertion block;

[0007] The connecting shaft is equipped with a compensation mechanism, which includes a sealed chamber, a flexible metal diaphragm, and a push rod. The sealed chamber is filled with a liquid working fluid with a thermal expansion coefficient much higher than that of metal. The sealed chamber is located inside the connecting shaft. The flexible metal diaphragm is located at the bottom of the sealed chamber. The push rod is located on the flexible metal diaphragm.

[0008] An adjustment mechanism is provided on the bearing spindle. The adjustment mechanism includes an inner bearing disc, a helical gear ring, a threaded rod, and an outer bearing disc. There are two sets of both the inner and outer bearing discs. Each set of outer bearing discs has four discs arranged in a circumferential array. The inner bearing disc is located on the circumferential surface of the bearing spindle. The helical gear ring is rotatably mounted above the upper inner bearing disc via an annular rotating plate. A helical gear is meshed with the lower surface of the helical gear ring, and the helical gear is located on the circumferential surface of the threaded rod. The threaded rod is rotatably mounted inside the upper inner bearing disc. The upper outer bearing disc is screwed onto the circumferential surface of the threaded rod. A support rod is provided on the circumferential surface of the lower inner bearing disc, and the lower outer bearing disc is sleeved on the circumferential surface of the support rod.

[0009] In a preferred embodiment of the present invention, the circumferential surface of the upper end of the rotating shaft is provided with a vertical groove, an arc-shaped horizontal groove, and a slot from top to bottom, and the vertical groove, the arc-shaped horizontal groove, and the slot are connected to each other in pairs. The plug-in block is inserted into the inner bottom of the slot. The upper end of the push rod is located inside the lower end of the slot. The front of the lower end of the connecting shaft is provided with a front end through groove. The interior of the front end through groove is provided with a vertical groove, an arc-shaped horizontal groove, and a slot from top to bottom, and the vertical groove, the arc-shaped horizontal groove, and the slot are connected to each other in pairs. The plug-in block is inserted into the lower end of the slot.

[0010] In a preferred embodiment of the present invention, a lower pressure block is movably connected inside the rotating shaft via a compression spring, and the lower end of the lower pressure block abuts against the upper surface of the insertion block. A lower pressure block is movably connected inside the connecting shaft via a compression spring, and the lower end of the lower pressure block abuts against the upper surface of the insertion block. The ends of the lower pressure blocks one and two facing the vertical groove one and vertical groove two, respectively, are arc-shaped.

[0011] In a preferred embodiment of the present invention, a threaded rod II is rotatably mounted on the upper surface of the upper inner bearing plate, and a lifting block is threadedly connected to the circumferential surface of the threaded rod II. The upper and lower ends of one side of the lifting block are in contact with the upper and lower surfaces of the annular rotating plate through ball bearings. The upper surfaces of the annular rotating plate and the helical tooth ring are both located below the upper surface of the bearing spindle. A positioning rod is sleeved on the other side of the lifting block, and the positioning rod is fixedly mounted on the upper surface of the upper inner bearing plate.

[0012] In a preferred embodiment of the present invention, the inner bearing plate is designed to be in the shape of a steering wheel, and an L-shaped fixing plate is provided on a portion of its protruding part. The upper surface of the L-shaped fixing plate abuts against an L-shaped protrusion, and the L-shaped protrusion is fixedly installed on the inner edge of the outer bearing plate.

[0013] In a preferred embodiment of the present invention, the side wall of the protruding portion of the inner bearing disk is hinged to a supporting hinge rod via a hinge shaft, and the other end of the supporting hinge rod is hinged to a slider. The inner ring of the outer bearing disk is provided with a sliding groove, and the inner end of the slider is slidably installed inside the sliding groove.

[0014] In a preferred embodiment of the present invention, the outer ring of the outer bearing plate is fixedly mounted with a vertical rod by bolts, and the lower end of the vertical rod is fixedly mounted with an arc-shaped base plate by bolts, the lower surface of the arc-shaped base plate being located above the upper surface of the rotating shaft.

[0015] In a preferred embodiment of the present invention, the front of the box is hinged to a door, and both the box and the door are provided with mounting plates at their inner bottoms. The upper surface of the mounting plates is provided with ball bearings, and the lower surface of the arc-shaped bottom plate abuts against the ball bearings located above the mounting plates inside the box.

[0016] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0017] (1) By setting up a quick change mechanism, the main bearing shaft and the bearing plate module set on it can be installed or disassembled by simply lifting-turning-lifting-horizontal movement or reversing operation without any tools, which greatly shortens the material change and maintenance time, reduces the labor intensity of operators, and is particularly suitable for flexible production mode of multiple varieties and small batches, significantly improving the utilization rate and production efficiency of equipment.

[0018] (2) By setting up a compensation mechanism, the liquid working fluid with a very high coefficient of thermal expansion expands in volume when heated. By pushing the flexible metal diaphragm and push rod, a downward force is actively and precisely applied to counteract the upward elongation displacement of the bearing spindle caused by thermal expansion. Without the need for external sensors and control systems, the working end face of the workpiece can be maintained in a stable axial position in real time and automatically, which effectively ensures the constant "target-base distance", thereby improving the uniformity of coating thickness and process repeatability, and improving product yield.

[0019] (3) By setting the adjustment mechanism, the effective area of ​​the bearing platform can be changed within a certain range to adapt to workpieces of different sizes, reducing the trouble of replacing the entire bearing plate for different workpieces and realizing "one machine for multiple uses". This not only saves the cost of purchasing bearing plates of various specifications, but also improves the space utilization of the vacuum chamber, enabling the equipment to better adapt to diverse production and R&D needs. Attached Figure Description

[0020] To facilitate understanding by those skilled in the art, the present invention will be further described below with reference to the accompanying drawings.

[0021] Figure 1 This is a three-dimensional structural diagram of the present invention;

[0022] Figure 2 This is a perspective view of the present invention.

[0023] Figure 3 This is a left sectional perspective view of the present invention;

[0024] Figure 4 This is a schematic diagram of the internal structure of the housing of the present invention;

[0025] Figure 5 This is a cross-sectional view of the driving component of the present invention;

[0026] Figure 6 This is an exploded view of the driving component of the present invention;

[0027] Figure 7 This is a bottom perspective view of the connecting shaft and the annular sleeve of the present invention;

[0028] Figure 8 This is a three-dimensional structural diagram of the rotating mechanism in this invention.

[0029] Figure 9 This is a three-dimensional structural diagram of the adjustment mechanism of the present invention;

[0030] Figure 10 This is a three-dimensional structural diagram of the bottom support plate of the present invention.

[0031] In the diagram: 1. Housing; 2. Rotary motor; 3. Shaft; 301. Vertical slot one; 302. Arc-shaped horizontal slot one; 303. Slot one; 4. Bearing main shaft; 5. Connecting shaft; 501. Front through slot; 502. Vertical slot two; 503. Arc-shaped horizontal slot two; 504. Slot two; 6. Sealed chamber; 7. Flexible metal diaphragm; 8. Push rod; 9. Annular sleeve; 10. Insertion block one; 11. Compression spring one; 12. Lower pressure block one; 13. Protruding shaft; 14. 15. Insertion block 2; 16. Compression spring 2; 17. Lower pressure block 2; 18. Inner bearing plate; 19. Annular rotating plate; 20. Helical gear ring; 21. Helical gear; 22. Threaded rod 1; 23. Threaded rod 2; 24. Lifting block; 25. Outer bearing plate; 26. Support hinge rod; 27. Slide groove; 28. L-shaped fixing plate; 29. ​​L-shaped protruding plate; 30. Vertical rod; 31. Support insertion rod; 32. Arc-shaped bottom plate; 33. Box door; 34. Mounting plate; 35. Slider. Detailed Implementation

[0032] The technical solution of the present invention will be clearly and completely described below with reference to the embodiments. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0033] Please see Figure 1 - Figure 10As shown, a support device for a magnetron sputtering coating machine includes a housing 1. A rotary motor 2 is installed at the bottom of the housing 1. A quick-change mechanism is installed above the rotary motor 2. The quick-change mechanism includes a rotating shaft 3, a main bearing shaft 4, and a connecting shaft 5. The upper end of the connecting shaft 5 is rotatably connected to the inner top wall of the housing 1 via a bearing. An annular sleeve 9 is installed at the lower end of the main bearing shaft 4. The annular sleeve 9 is inserted into the rotating shaft 3 via a first insertion block 10. A lower pressure block 12 is movably connected inside the rotating shaft 3 via a first compression spring 11. The lower end of the lower pressure block 12 abuts against the upper surface of the first insertion block 10. A convex shaft 13 is installed at the upper end of the main bearing shaft 4. The convex shaft 13 is inserted into the connecting shaft 5 via a second insertion block 14. Inside component 5, a lower pressure block 16 is movably connected via a compression spring 15. The lower end of the lower pressure block 16 abuts against the upper surface of the insertion block 14. Through the quick-change mechanism, the bearing spindle 4 only needs to move laterally to align with the circular shape of the rotating shaft 3 and the connecting shaft 5, and then move down – rotate laterally – move down to complete the snap-fit ​​installation operation. Disassembly is similar; the above steps are reversed. The steps are simple and quick, requiring no tools and resulting in high assembly and disassembly efficiency. After the rotating shaft 3, the bearing spindle 4, and the connecting shaft 5 are assembled together, the rotary motor 2 works, which drives the rotating shaft 3 to rotate. The rotation of the rotating shaft 3 drives the annular sleeve 9 and the bearing spindle 4 to rotate via the insertion block 10, thereby enabling the bearing spindle 4 to rotate smoothly.

[0034] The connecting shaft 5 is internally equipped with a compensation mechanism, which includes a sealed chamber 6, a flexible metal diaphragm 7, and a push rod 8. The flexible metal diaphragm 7 is manufactured from Hastelloy using a hydroforming process and is laser-welded to the sealed chamber 6 to achieve a seal, preventing leakage within the sealed chamber 6 and ensuring the compensation effect. Alternatively, the flexible metal diaphragm 7 can be replaced with a bellows. The sealed chamber 6 is filled with a liquid working fluid whose coefficient of thermal expansion is much higher than that of metal. Silicone oil can be used as the liquid working fluid. The sealed chamber 6 is located inside the connecting shaft 5, and the flexible metal diaphragm 7 is positioned within it. At the bottom, a lower pressure block 16 is movably connected to the inside of the connecting shaft 5 via a compression spring 15. The lower end of the lower pressure block 16 abuts against the upper surface of the insertion block 14. The push rod 8 is positioned on the flexible metal diaphragm 7, above the lower pressure block 16 but not in contact with it. This ensures that when the device is not in operation, the lower pressure block 16 will not collide with the push rod 8 when the insertion block 14 is inserted into or removed from the connecting shaft 5, preventing the lower pressure block 16 from pushing the push rod 8 in the opposite direction and causing it to crush and damage the flexible metal diaphragm 7. The compensation mechanism ensures that the heat absorbed by the bearing plate during operation is dissipated through the bearing main shaft 4. The heat is conducted to the interior of the connecting shaft 5, thereby heating the liquid working medium in the sealed chamber 6. The liquid working medium in the sealed chamber 6 will expand rapidly due to heat, and the resulting pressure will push the flexible metal diaphragm 7 and the push rod 8 downwards. This causes the push rod 8 to press down on the lower pressure block 16, and then on the insertion block 14 and the bearing main shaft 4. The heat absorbed by the bearing plate will cause it and the bearing main shaft 4 to expand upwards. At the same time, the heat is conducted through the bearing main shaft 4 to the sealed chamber 6 in the connecting shaft 5, causing the liquid working medium inside to expand due to heat. This causes the bearing main shaft 4 to elongate axially due to thermal expansion. At this time, the push rod 8 presses down on the lower pressure block 16. 6. Applying a downward force will counteract the axial elongation displacement of the bearing spindle 4 caused by thermal expansion, maintaining the axial position stability of its working end face. The upward and downward forces cancel each other out, achieving the stability of the working plane. Moreover, since the bearing spindle 4 and the bearing plate are a module, when different sizes or models of bearing spindle 4 and bearing plate are replaced, the mass, heat capacity and thermal conductivity of different bearing spindle 4 and bearing plate are completely different, and the amount of thermal deformation generated under the same process is also completely different. Through the compensation mechanism, the total thermal deformation of different bearing plates can be compensated, ensuring the realization of the plug-and-play performance consistency of the quick-change mechanism.

[0035] It should be noted that, in the installed state, there is an initial gap between the upper end face of the push rod 8 and the lower end face of the lower pressure block 16. This gap value is precisely calculated to ensure that, under normal operating temperature, the distance that the push rod 8 moves downward due to its own thermal expansion and the pressure of the liquid working medium can just eliminate this gap and make contact with the lower pressure block 16, while continuing to provide sufficient compensation force. Because the push rod 8 needs to extend downward a considerable distance during expansion, the push rod 8 can be made of materials with extremely high coefficients of thermal expansion, such as high-temperature alloys or ceramic materials. This ensures that during installation, the endpoint of the upward movement of the lower pressure block 16 is still lower than the upper end face of the push rod 8, meaning that the two will never collide. It also ensures that during the coating process, after the push rod 8 expands and contacts the upper surface of the lower pressure block 16, it can continue to apply a downward pressure to counteract the axial elongation of the bearing spindle 4 caused by thermal expansion, maintaining the axial position stability of its working end face.

[0036] An adjustment mechanism is provided on the main bearing shaft 4. The adjustment mechanism includes an inner bearing plate 17, a helical gear ring 19, a threaded rod 21, and an outer bearing plate 24. The threaded rod 21 is rotatably connected to the inner bearing plate 17 via a bearing. There are two sets of both the inner bearing plate 17 and the outer bearing plate 24. Each set of outer bearing plates 24 has four plates arranged in a circumferential array. Each set of inner and outer bearing plates 17 forms a bearing base. The two sets of bearing bases cooperate with each other, with the space in between serving as the material placement area. The inner bearing plate 17 is positioned on the circumferential surface of the main bearing shaft 4, allowing the main bearing shaft 4 to rotate, thereby driving the inner bearing plate 17 to rotate. The helical gear ring 19 is rotatably mounted above the upper inner bearing plate 17 via an annular rotating plate 18. The lower surface of the ring 19 is meshed with a helical gear 20, which is located on the circumferential surface of the threaded rod 21. The threaded rod 21 is rotatably mounted inside the upper inner bearing plate 17, and the upper outer bearing plate 24 is screwed onto the circumferential surface of the threaded rod 21. When the annular rotating plate 18 rotates, the helical gear 20 and the threaded rod 21 are driven to rotate through the helical gear ring 19, which in turn drives the outer bearing plate 24 away from the inner bearing plate 17, thereby providing more space to place larger objects. A support rod 30 is provided on the circumferential surface of the lower inner bearing plate 17, and the lower outer bearing plate 24 is sleeved on the circumferential surface of the support rod 30. The support rod 30 provides support and guidance for the lower outer bearing plate 24, so that when the upper outer bearing plate 24 moves, it drives the inner bearing plate 24 to rotate. The lower outer bearing plate 24 moves synchronously. A threaded rod 22 is rotatably mounted on the upper surface of the upper inner bearing plate 17 via a bearing. A lifting block 23 is threadedly connected to the circumferential surface of the threaded rod 22. Both the upper and lower ends of one side of the lifting block 23 are in contact with the upper and lower surfaces of the annular rotating plate 18 via ball bearings. The ball bearings allow the lifting block 23 to drive the annular rotating plate 18 to move vertically without affecting its lateral rotation. The upper surfaces of the annular rotating plate 18 and the helical gear ring 19 are lower than the upper surface of the bearing spindle 4. Therefore, the upper surfaces of the annular rotating plate 18 and the helical gear ring 19 are much lower than the lower surface of the connecting shaft 5, ensuring that the annular rotating plate 18 does not move laterally when the bearing spindle 4 drives it to move laterally. The lifting block 23 will collide with the lower end of the connecting shaft 5. A positioning rod is sleeved on the other side of the lifting block 23, and the positioning rod is fixedly installed on the upper surface of the upper inner bearing plate 17. The positioning rod limits the lifting block 23, so that when the threaded rod 22 rotates, the lifting block 23 can move vertically on the threaded rod 22. When it is necessary to adjust the outer bearing plate 24, the threaded rod 22 is rotated, so that the lifting block 23 drives the annular rotating plate 18 and the helical gear ring 19 to move downward, so that the lower surface of the helical gear ring 19 meshes with the helical gear 20. At this time, manually rotating the annular rotating plate 18 can drive the threaded rod 21 to rotate through the helical gear ring 19 and the helical gear 20, thereby adjusting the position of the outer bearing plate 24. After the adjustment is completed, the threaded rod 22 needs to be rotated in the opposite direction.This causes the helical gear ring 19 to move upwards and disengage from the helical gear 20, preventing the helical gear ring 19 from rotating due to inertia and other forces during rotation, which would cause unnecessary rotation of the helical gear 20.

[0037] It should be noted that an annular rotating groove is provided inside the upper end of the upper inner bearing plate 17, and an annular connecting plate is provided at the lower end of the annular rotating plate 18. The annular connecting plate is inserted into the annular rotating groove, so that the annular rotating plate 18 can be limited while not affecting the axial rotation and vertical movement of the annular rotating plate 18.

[0038] Specifically, the upper circumferential surface of the rotating shaft 3 is provided with a vertical groove 301, an arc-shaped horizontal groove 302, and a slot 303 sequentially from top to bottom, and the vertical groove 301, the arc-shaped horizontal groove 302, and the slot 303 are interconnected in pairs. The insertion block 10 is inserted into the inner bottom of the slot 303, and the upper end of the push rod 8 is located inside the lower end of the slot 303. Inside the rotating shaft 3, a lower pressure block 12 is movably connected to the rotating shaft 3 via a compression spring 11, and the lower end of the lower pressure block 12 is connected to the upper surface of the insertion block 10. The contact surface, the compression spring 11, and the lower pressure block 12 are designed to apply a downward force to the insertion block 10, which is engaged inside the slot 10, thereby improving the engagement and limiting effect of the insertion block 10. A front through groove 501 is provided on the lower front of the connecting shaft 5. The front through groove 501 allows the convex shaft 13 to move horizontally back and forth into or out of the connecting shaft 5. Inside the front through groove 501, from top to bottom, are sequentially formed a vertical groove 502, an arc-shaped horizontal groove 503, and a slot 504. 04, and vertical groove 2 502, arc-shaped horizontal groove 2 503, and slot 2 504 are interconnected in pairs. Insertion block 2 14 is inserted into the lower end of slot 2 504. Lowering block 1 12 and lowering block 2 16 have arc-shaped designs facing vertical groove 1 301 and vertical groove 2 502 respectively. The arc-shaped design on one side of lowering block 1 12 and lowering block 2 16 allows insertion block 1 10 and insertion block 2 14 to move laterally to abut lowering block 1 12 and lowering block 2 16 respectively. At this point, the movement of insertion block 1 10 continues. 0 and plug-in block 2 14 can push the lower pressure block 1 12 and lower pressure block 2 16 upward, so that the plug-in block 1 10 and plug-in block 2 14 can be smoothly inserted into the corresponding slot 1 303 and slot 2 504. The downward pressure generated by the compression spring 1 11 and compression spring 2 15 will cancel out the machine vibration during the operation, preventing the vibration from shaking the main bearing spindle 4 upward and causing the main bearing spindle 4 to separate from the rotating shaft 3, thereby improving the connection strength between the rotating shaft 3, the main bearing spindle 4 and the connecting shaft 5.

[0039] Specifically, the inner bearing plate 17 is designed in the shape of a steering wheel, with an L-shaped fixing plate 27 on its protruding part. The upper surface of the L-shaped fixing plate 27 abuts against an L-shaped protrusion 28, and the L-shaped protrusion 28 is fixedly installed on the inner edge of the outer bearing plate 24. The L-shaped fixing plate 27 and the L-shaped protrusion 28 can limit and support the end of the outer bearing plate 24, improving the support effect of the outer bearing plate 24. Although the L-shaped protrusion 28 moves obliquely away from the L-shaped fixing plate 27, before the outer bearing plate 24 moves away to its maximum distance, part of the L-shaped protrusion 28 will abut against the L-shaped fixing plate 27, so that the L-shaped fixing plate 27 always abuts against the L-shaped protrusion 28. 8. Apply support force to improve the stability of the outer bearing plate 24. The side wall of the protruding part of the inner bearing plate 17 is hinged to a support hinge rod 25 through a hinge shaft, and the other end of the support hinge rod 25 is hinged to a slider 34. The inner ring of the outer bearing plate 24 is provided with a sliding groove 26. The inner end of the slider 34 is slidably installed inside the sliding groove 26. The setting of the sliding groove 26 provides the slider 34 with a space for movement, so that when the outer bearing plate 24 moves outward, the support hinge rod 25 can drive the slider 34 to move, so that the support hinge rod 25 will not detach from the outer bearing plate 24, so that the support hinge rod 25 can continuously support the outer bearing plate 24, further improving the stability of the outer bearing plate 24.

[0040] Specifically, a vertical rod 29 is bolted to the outer ring of the outer bearing plate 24, and an arc-shaped base plate 31 is bolted to the lower end of the vertical rod 29. This allows the uppermost outer bearing plate 24 to move horizontally, which in turn drives the lower outer bearing plate 24 and the arc-shaped base plate 31 to move horizontally via the vertical rod 29. The lower surface of the arc-shaped base plate 31 is located above the upper surface of the rotating shaft 3, preventing the arc-shaped base plate 31 from colliding with the upper end of the rotating shaft 3 during the lateral disassembly and assembly of the bearing spindle 4 and the bearing plate. The impact affects the disassembly and assembly work. The front of the box body 1 is hinged with a door 32. The bottom of both the box body 1 and the door 32 are provided with mounting plates 33, and the upper surface of the mounting plates 33 is provided with ball bearings. The lower surface of the arc-shaped bottom plate 31 abuts against the ball bearings located above the mounting plates 33 inside the box body 1. The mounting plates 33 and the ball bearings provide additional support for the arc-shaped bottom plate 31, thereby improving the stability and pressure resistance of the arc-shaped bottom plate 31, while not affecting the rotation of the arc-shaped bottom plate 31.

[0041] In use, before placing materials on the bearing plate, the threaded rod 22 is rotated to make the lifting block 23 drive the annular rotating plate 18 and the helical gear ring 19 to move vertically downward. The movement stops when the teeth on the lower surface of the helical gear ring 19 mesh with the helical gear 20. Then, the annular rotating plate 18 is rotated to make it drive the helical gear 20 to rotate through the helical gear ring 19. The rotation of the helical gear 20 drives the threaded rod 21 to rotate, which in turn drives the outer bearing plate 24 away from the inner bearing plate 17, increasing the placement space between the outer bearing plate 24 and the inner bearing plate 17, thus allowing more or larger materials to be placed. After adjusting the outer bearing plate 24, the threaded rod 22 is rotated in the opposite direction to make the lifting block 23 drive the annular rotating plate 18 and the helical gear ring 19 to move upward until they disengage from the helical gear 20. At this point, the adjustment of the outer bearing plate 24 is completed. After the materials are placed in, the box door 32 is closed to perform the coating work.

[0042] When the coating is complete and the carrier plate needs cleaning, or when it needs to be replaced with a carrier plate of a different specification, simply lift the carrier spindle 4 vertically upward a short distance, causing the first insertion block 10 and the second insertion block 14 to move upward and out of the slots 1 and 2 respectively, and move into the arc-shaped horizontal grooves 1 and 2 respectively. Then, rotate the carrier spindle 4 axially a short distance, causing the first insertion block 10 and the second insertion block 14 to move laterally to the bottom of the vertical groove 1 301 and the bottom of the vertical groove 2 504 respectively. At the bottom of 02, lift the main bearing shaft 4 upwards, so that the insertion block 10 disengages from the vertical groove 301 and the lower surface of the annular sleeve 9 is above the rotating shaft 3. At the same time, the insertion block 14 moves to the upper end of the vertical groove 502. Finally, move the main bearing shaft 4 and the integral bearing disk module fixedly connected to it horizontally out of the housing 1 to complete the disassembly. In the subsequent assembly, reverse the above operation to complete the snap-fit ​​assembly of the main bearing shaft 4, and then the subsequent coating work can be carried out.

[0043] The preferred embodiments of the present invention disclosed above are merely illustrative of the invention. These preferred embodiments do not exhaustively describe all details, nor do they limit the invention to any specific implementation. Clearly, many modifications and variations can be made based on the content of this specification. This specification selects and specifically describes these embodiments to better explain the principles and practical applications of the invention, thereby enabling those skilled in the art to better understand and utilize the invention. The invention is limited only by the claims and their full scope and equivalents.

Claims

1. A support device for a magnetron sputtering coating machine, comprising a housing (1), wherein a rotary motor (2) is disposed at the inner bottom of the housing (1), characterized in that, A quick-change mechanism is provided above the rotary motor (2). The quick-change mechanism includes a rotating shaft (3), a bearing main shaft (4), and a connecting shaft (5). An annular sleeve (9) is provided at the lower end of the bearing main shaft (4). The annular sleeve (9) is inserted into the rotating shaft (3) through a first insertion block (10). A convex shaft (13) is provided at the upper end of the bearing main shaft (4). The convex shaft (13) is inserted into the connecting shaft (5) through a second insertion block (14). The connecting shaft (5) is provided with a compensation mechanism, which includes a sealed chamber (6), a flexible metal diaphragm (7) and a push rod (8). The sealed chamber (6) is located inside the connecting shaft (5). An adjustment mechanism is provided on the bearing spindle (4). The adjustment mechanism includes an inner bearing disc (17), a helical gear ring (19), a threaded rod (21), and an outer bearing disc (24). Both the inner bearing disc (17) and the outer bearing disc (24) are provided in two sets. The inner bearing disc (17) is provided on the circumferential surface of the bearing spindle (4). The helical gear ring (19) is rotatably mounted above the upper inner bearing disc (17) via an annular rotating plate (18). The lower surface of the helical gear ring (19) is meshed with a helical gear (20). The threaded rod (21) is rotatably mounted inside the upper inner bearing disc (17). The upper outer bearing disc (24) is screwed onto the circumferential surface of the threaded rod (21). The circumferential surface of the lower inner bearing disc (17) is provided with a support rod (30). The lower outer bearing disc (24) is sleeved on the circumferential surface of the support rod (30). The upper circumferential surface of the rotating shaft (3) is provided with a vertical groove 1 (301), an arc-shaped horizontal groove 1 (302) and a slot 1 (303) from top to bottom, and the vertical groove 1 (301), the arc-shaped horizontal groove 1 (302) and the slot 1 (303) are connected to each other in pairs. The plug block 1 (10) is inserted into the inner bottom of the slot 1 (303). The upper end of the push rod (8) is located inside the lower end of the slot 1 (303). The front end of the lower end of the connecting shaft (5) is provided with a front end through groove (501). The interior of the front end through groove (501) is provided with a vertical groove 2 (502), an arc-shaped horizontal groove 2 (503) and a slot 2 (504) from top to bottom, and the vertical groove 2 (502), the arc-shaped horizontal groove 2 (503) and the slot 2 (504) are connected to each other in pairs. The plug block 2 (14) is inserted into the lower end of the slot 2 (504). The rotating shaft (3) is movably connected to the lower pressure block (12) through the compression spring (11), and the lower end of the lower pressure block (12) abuts against the upper surface of the plug-in block (10). The connecting shaft (5) is movably connected to the lower pressure block (16) through the compression spring (15), and the lower end of the lower pressure block (16) abuts against the upper surface of the plug-in block (14). The lower pressure block (12) and the lower pressure block (16) are respectively designed with an arc shape at one end facing the vertical groove (301) and the vertical groove (502). A threaded rod (22) is rotatably mounted on the upper surface of the inner bearing plate (17) at the upper end. A lifting block (23) is threadedly connected to the circumferential surface of the threaded rod (22). The upper and lower ends of one side of the lifting block (23) are in contact with the upper and lower surfaces of the annular rotating plate (18) through ball bearings. The upper surfaces of the annular rotating plate (18) and the helical tooth ring (19) are located below the upper surface of the bearing spindle (4). A positioning rod is sleeved on the other side of the lifting block (23), and the positioning rod is fixedly installed on the upper surface of the inner bearing plate (17) at the upper end. The sealed chamber (6) is filled with a liquid working fluid with a thermal expansion coefficient much higher than that of metal. The flexible metal diaphragm (7) is located at the bottom of the sealed chamber (6). The push rod (8) is located on the flexible metal diaphragm (7). Each set of outer bearing plates (24) is arranged in a circumferential array of four. The helical gear (20) is located on the circumferential surface of the threaded rod (21).

2. The support device for a magnetron sputtering coating machine according to claim 1, characterized in that, The inner bearing plate (17) is designed in the shape of a steering wheel, and an L-shaped fixing plate (27) is provided on its protruding part. The upper surface of the L-shaped fixing plate (27) abuts against an L-shaped protrusion plate (28), and the L-shaped protrusion plate (28) is fixedly installed on the inner edge of the outer bearing plate (24).

3. The support device for a magnetron sputtering coating machine according to claim 2, characterized in that, The inner bearing plate (17) has a supporting hinge rod (25) hinged to the side wall of the protruding part by a hinge shaft, and a slider (34) is hinged to the other end of the supporting hinge rod (25). The inner ring of the outer bearing plate (24) has a sliding groove (26), and the inner end of the slider (34) is slidably installed inside the sliding groove (26).

4. The support device for a magnetron sputtering coating machine according to claim 1, characterized in that, The outer ring of the outer bearing plate (24) is fixedly mounted with a vertical rod (29) by bolts, and the lower end of the vertical rod (29) is fixedly mounted with an arc-shaped base plate (31) by bolts. The lower surface of the arc-shaped base plate (31) is located above the upper surface of the rotating shaft (3).

5. A support device for a magnetron sputtering coating machine according to claim 4, characterized in that, The front of the box (1) is hinged with a door (32). The bottom of both the box (1) and the door (32) is provided with a mounting plate (33), and the upper surface of the mounting plate (33) is provided with ball bearings. The lower surface of the arc-shaped bottom plate (31) abuts against the ball bearings located above the mounting plate (33) inside the box (1).

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