Multi-area lighting system and method and computing device

Abstract

The invention discloses a multi-area illumination system and method and computing equipment, and the system comprises a to-be-illuminated light source which is a parallel light source or a divergent light source; the light beam processing device is used for preprocessing a light beam emitted by the light source to be illuminated to obtain a dodging and shaping light beam; the beam splitting processing device is used for carrying out beam splitting processing on the uniform light shaping light beam based on the multiple to-be-illuminated areas to obtain a target illumination light beam for each to-be-illuminated area; and the relay transmission device is used for controlling the target illumination light beam to illuminate the corresponding to-be-illuminated area. The problem that single-area illumination cannot meet the multi-area measurement requirement is solved.

Description

Technical Field

[0001] This application relates to the field of lighting technology, and in particular to a multi-zone lighting system, method and computing device. Background Technology

[0002] Optical inspection and measurement are currently widely used in the production and application processes of semiconductors, panel manufacturing, consumer electronics, and automotive electronics. They typically employ infrared, visible, or ultraviolet light as the light source, combined with illumination and imaging systems, to detect defects, blemishes, and stains on the inspected object, and to measure critical dimensions, overlay accuracy, and thickness. These applications often require uniform illumination to provide optical resolution and detection accuracy. However, with increasing system functionality and complexity, uniform illumination of a single area is no longer sufficient for existing measurement equipment; that is, single-area illumination cannot meet the needs of multi-area measurement. Therefore, a multi-area illumination system is urgently needed to achieve simultaneous uniform illumination of multiple areas. Summary of the Invention

[0003] To overcome the problem that single-area lighting cannot meet the measurement needs of multiple areas, this application provides a multi-area lighting system, method, and computing device.

[0004] Firstly, in order to solve the above-mentioned technical problems, this application provides a multi-zone lighting system, comprising: The light source to be illuminated is either a parallel light source or a divergent light source; A beam processing device is used to preprocess the beam emitted by the light source to obtain a uniform and shaped beam. The beam splitting processing device is used to split the uniform beam shaping beam based on multiple areas to be illuminated, so as to obtain a target illumination beam for each area to be illuminated. A relay transmission device is used to control the target illumination beam to illuminate the corresponding area to be illuminated.

[0005] Furthermore, when the light source type is a parallel light source, the beam processing device includes: The first polarization controller is used to polarize the light beam emitted by the light source to obtain polarized light with different polarization states. A beam straightener is used to straighten polarized light to obtain a straightened beam. A beam homogenizer is used to homogenize and shape a beam to obtain a homogenized and shaped beam.

[0006] Furthermore, when the light source type is a divergent light source, the beam processing device includes: A beam homogenizer is used to collimate and homogenize the light beam emitted by the light source to obtain a uniform light beam. The second polarization controller is used to polarize the uniform beam to obtain uniformly shaped beams with different polarization states.

[0007] Furthermore, the homogenizer includes: A beam homogenizer is used to collimate and homogenize the light beam emitted by the light source to obtain an initial homogenized beam. A homogenizing plate is used to homogenize an initial homogenized beam to obtain a uniform beam. Furthermore, the beam splitting processing device includes: The first lens is used to process the homogenized and shaped beam to obtain a converged beam; A beam splitter is used to split a converging beam into multiple beams to be illuminated. Multiple second lenses are positioned one-to-one with multiple areas to be illuminated and with multiple beams to be illuminated. Each second lens is used to diverge the corresponding beam to be illuminated to obtain a target illumination beam for the corresponding area to be illuminated.

[0008] Furthermore, the relay transmission device includes a first relay mirror, an aperture stop, a second relay mirror, and a field stop; The target illumination beam passes sequentially through the first relay mirror, the aperture stop, the second relay mirror, and the field stop, and is transmitted to the corresponding area to be illuminated, so as to illuminate the area to be illuminated.

[0009] Secondly, this application also provides a multi-zone lighting method, including: The light beam emitted by the light source to be illuminated is preprocessed to obtain a uniform and shaped light beam; wherein the light source to be illuminated is either a parallel light source or a divergent light source. The uniform beam shaping beam is split based on multiple areas to be illuminated to obtain a target illumination beam for each area to be illuminated. Control the target illumination beam to illuminate the corresponding area to be illuminated.

[0010] Furthermore, the light beam emitted by the light source to be illuminated is preprocessed to obtain a uniformly shaped beam, including: Determine the light source processing strategy for the light source to be illuminated based on the light source type; The light beam emitted by the light source to be illuminated is preprocessed based on the light source processing strategy to obtain a uniform and shaped light beam.

[0011] Furthermore, the beam splitting direction for the homogenizing and shaping beam is determined based on multiple regions to be illuminated, including: Obtain the positional relationship between multiple areas to be illuminated and the uniform beam shaping beam; The beam splitting direction for uniform light shaping beam is determined based on the positional relationship, and the beam splitting direction corresponds one-to-one with the position of the area to be illuminated; The uniform beam shaping beam is split based on the beam splitting direction to obtain the target illumination beam for each area to be illuminated.

[0012] Thirdly, this application also provides a computing device, including a memory, a processor, and a program stored in the memory and running on the processor, wherein the processor executes the program to implement the steps of the multi-area lighting method described above.

[0013] Fourthly, this application also provides a computer-readable storage medium storing instructions that, when executed on a terminal device, cause the terminal device to perform the steps of a multi-zone lighting method.

[0014] The beneficial effects of this application are as follows: the beam emitted by the light source to be illuminated is preprocessed by the beam processing device to obtain a uniform and shaped beam, and the uniform and shaped beam is split by the beam splitting device based on multiple areas to be illuminated to obtain a target illumination beam for each area to be illuminated. The target illumination beam is controlled by the relay transmission device to illuminate the corresponding area to be illuminated, so as to realize the simultaneous illumination of multiple areas by one light source, thereby meeting the measurement needs of multiple areas while saving energy. Attached Figure Description

[0015] Figure 1 This is a schematic diagram illustrating the structure of a multi-zone lighting system as an exemplary embodiment of this application; Figure 2 This is a schematic diagram of a multi-area lighting system for a parallel light source in an exemplary embodiment of this application; Figure 3 This is an exemplary embodiment of the present application, showing the cross-sectional light intensity distribution of a beam emitted from a parallel light source before and after beam processing; Figure 4 This is a schematic diagram of another structure for a multi-area lighting system for a parallel light source in an exemplary embodiment of this application; Figure 5 This is a schematic diagram of various geometric structures of the field-splitting plate in an exemplary embodiment of this application; Figure 6 This is a schematic diagram of the structure of a multi-area lighting system for emitting a diverging light source in an exemplary embodiment of this application. Figure 7 This is another structural schematic diagram of a multi-zone lighting system in an exemplary embodiment of this application; Figure 8 This is a flowchart illustrating a multi-zone lighting method as an exemplary embodiment of this application. Detailed Implementation

[0016] The following embodiments are further explanations and supplements to this application and do not constitute any limitation on this application.

[0017] The following description, in conjunction with the accompanying drawings, describes an embodiment of a multi-zone lighting system, method, and computing device of this application.

[0018] Please see Figure 1 , Figure 1 A multi-zone lighting system is illustrated in an exemplary embodiment of this application, such as Figure 1 As shown, this application provides a multi-zone lighting system, including: The light source to be illuminated 1 is either a parallel light source or a divergent light source; The beam processing device 2 is used to preprocess the beam emitted by the light source to obtain a uniform and shaped beam. The beam splitting processing device 5 is used to split the uniform beam shaping beam based on multiple areas to be illuminated, so as to obtain a target illumination beam for each area to be illuminated. The relay transmission device 6 is used to control the target illumination beam to illuminate the corresponding area to be illuminated.

[0019] The multi-area illumination system provided in this application preprocesses the light beam emitted by the illumination source 1 through the beam processing device 2 to obtain a uniform and shaped beam, and then uses the beam splitting device 5 to split the uniform and shaped beam based on multiple areas to be illuminated to obtain a target illumination beam for each area to be illuminated. The relay transmission device 6 controls the target illumination beam to illuminate the corresponding area to be illuminated, so as to realize the simultaneous illumination of multiple areas by a single light source, thereby meeting the multi-area measurement needs while saving energy.

[0020] In this embodiment, the light source 1 to be illuminated includes self-luminous and indirect light sources such as lasers, LEDs, and halogens. Among them, lasers are parallel light sources, while LEDs and halogens are divergent light sources.

[0021] Optionally, when the light source type is a parallel light source 11, the beam processing device 2 includes: The first polarization controller 21 is used to polarize the light beam emitted by the light source to obtain polarized light with different polarization states. A beam straightener is used to straighten polarized light to obtain a straightened beam. A beam homogenizer is used to homogenize and shape a beam to obtain a homogenized and shaped beam.

[0022] In the embodiment provided in this application, when the light source type is a parallel light source 11, firstly, the first polarization controller 21 is used to polarize the light beam emitted by the light source to be illuminated. This not only eliminates unnecessary reflected glare in the light beam but also achieves optical isolation, protecting the parallel light source, thereby obtaining polarized light with different polarization states. Secondly, a beam straightener is used to straighten the polarized light beam to control the beam directivity, beam spot size, beam divergence angle, and light coherence, resulting in a straightened beam. Then, a beam homogenizer is used to homogenize the straightened beam to flatten the beam cross-sectional intensity and control the beam cross-sectional shape, ensuring that the intensity and illumination direction of the homogenized beam meet the requirements, thus improving the quality of the homogenized beam. This improves the illumination effect on multiple areas to be illuminated after the homogenized beam is split, meeting the needs of multi-area measurement.

[0023] In this embodiment, the beam sculptor can be a beam expander composed of an incident lens 31 and an exit lens 32. The beam homogenizer can be composed of a microlens array 41, a microlens array 42, and a condenser lens 43.

[0024] The various sub-devices described above in this embodiment can be freely combined and their order changed to form different schemes. That is, the order of the first polarization controller 21, the beam conditioner, and the beam homogenizer can be changed, or one, two, or three of them can be selected to form a beam processing device. For example, the beam emitted by the light source to be illuminated can be processed sequentially by the first polarization controller 21, the beam homogenizer, and the beam conditioner to obtain a uniformly shaped beam, or the beam emitted by the light source to be illuminated can be processed sequentially by the beam conditioner, the beam homogenizer, and the first polarization controller 21 to obtain a uniformly shaped beam, or the beam emitted by the light source to be illuminated can be processed sequentially by the beam conditioner, the first polarization controller 21, and the beam homogenizer to obtain a uniformly shaped beam, or the beam emitted by the light source to be illuminated can be processed sequentially by the beam conditioner, the beam conditioner, and the first polarization controller 21 to obtain a uniformly shaped beam, or the beam emitted by the light source to be illuminated can be processed sequentially by the beam conditioner, the first polarization controller 21, and the beam conditioner to obtain a uniformly shaped beam. For example, the light beam emitted by the light source to be illuminated can also be processed by only one of the first polarization controller 21, the beam shaper, and the beam conditioner, or by two of them in any order, to obtain a beam with uniform light shape.

[0025] Optionally, when the light source type is a divergent light source 101, the beam processing device 2 includes: A beam homogenizer is used to collimate and homogenize the light beam emitted by the light source to obtain a uniform light beam. The second polarization controller 201 is used to polarize the uniform beam to obtain uniform beams with different polarization states.

[0026] In the embodiment provided in this application, when the light source type is a divergent light source 101, a homogenizer is used to collimate and homogenize the light beam emitted by the light source to be illuminated, resulting in a uniform light beam. Then, a second polarization controller 201 is used to polarize the uniform light beam to eliminate unnecessary reflected glare in the uniform light beam, thereby obtaining homogenized and shaped light beams with different polarization states. This improves the quality of the homogenized and shaped light beam, which facilitates the improvement of the illumination effect on multiple areas to be illuminated after the homogenized and shaped light beam is split, thus meeting the needs of multi-area measurement.

[0027] The various sub-devices described above in this embodiment can be freely combined and their order changed to form different schemes. That is, the order of the homogenizer and the second polarization controller 201 can be changed, or either one can be selected to form a beam processing device. For example, the beam emitted by the light source to be illuminated can be processed sequentially by the second polarization controller 201 and the homogenizer to obtain a homogenized and shaped beam. Alternatively, the beam emitted by the light source to be illuminated can be processed by either the second polarization controller 201 or the homogenizer to obtain a homogenized and shaped beam.

[0028] Optionally, the homogenizer includes: The homogenizing rod 401 is used to collimate and homogenize the light beam emitted by the light source to obtain an initial homogenized light beam. The homogenizing plate 402 is used to homogenize the initial homogenized beam to obtain a uniform beam. In this embodiment provided in this application, a homogenizing rod 401 collimates and homogenizes the light beam emitted by the light source to make the uneven light distribution in the light beam uniform and soft, obtaining an initial homogenized beam. A homogenizing plate 402 then homogenizes the initial homogenized beam, further making the uneven light distribution in the initial homogenized beam more uniform and soft, resulting in a uniform beam. Thus, by performing double homogenization on the light beam emitted by the light source, the shape and intensity of the obtained uniform beam can be guaranteed to meet the requirements, thereby improving the subsequent illumination effect on multiple areas to be illuminated, and meeting the needs of multi-area measurement.

[0029] Optionally, the beam splitting processing device 5 includes: The first lens 51 is used to process the homogenized and shaped beam to obtain a converged beam; A beam splitter is used to split a converging beam into multiple beams to be illuminated. Multiple second lenses are positioned one-to-one with multiple areas to be illuminated and with multiple beams to be illuminated. Each second lens is used to diverge the corresponding beam to be illuminated to obtain a target illumination beam for the corresponding area to be illuminated.

[0030] In the embodiment provided in this application, a first lens 51 is used to process the uniformly shaped beam to obtain a converging beam, and a beam splitter is used to split the converging beam to obtain multiple beams to be illuminated. A second lens is then used to diverge the corresponding beams to be illuminated to obtain target illumination beams for the corresponding areas to be illuminated. Thus, by using the first lens 51, the beam splitter, and multiple second lenses, the uniformly shaped beam can be split, thereby meeting the illumination needs of multiple illumination areas and thus meeting the requirements of multi-area measurement. The beam splitter is a beam-splitting prism, or a field-splitting plate, or a combination of a beam-splitting prism and a field-splitting plate.

[0031] Optionally, the relay transmission device 6 includes a first relay mirror, an aperture stop, a second relay mirror, and a field stop; The target illumination beam passes sequentially through the first relay mirror, the aperture stop, the second relay mirror, and the field stop, and is transmitted to the corresponding area to be illuminated, so as to illuminate the area to be illuminated.

[0032] In the embodiment provided in this application, the target illumination beam passes sequentially through the first relay mirror, the aperture stop, the second relay mirror, and the field stop to achieve lossless transmission of the beam to the corresponding area to be illuminated. In this way, the beam used to illuminate the area to be illuminated is a lossless beam after beam splitting, thereby improving the illumination effect of the area to be illuminated and further meeting the needs of multi-area measurement.

[0033] Please see Figure 2 , Figure 2 This is a schematic diagram of a structure for a multi-area lighting system using a parallel light source, as shown in an exemplary embodiment of this application. Figure 2As shown, the multi-area illumination system includes a light source 1 to be illuminated, a beam processing device 2, a beam splitting device 5, and a relay transmission device. The light source 1 is a parallel light source 11. The beam processing device 2 consists of a first polarization controller 21, a beam conditioner, and a beam shaper. The first polarization controller 21 is a Pockels cell. The beam conditioner can be a beam expander composed of an incident lens 31 and an exit lens 32. The beam shaper can be composed of a microlens array 41, a microlens array 42, and a condenser lens 43. The number of areas to be illuminated is two. The beam splitting device 5 consists of a first lens 51, a beam splitter, and multiple second lenses. The beam splitter is a beam splitting prism 52, and the multiple second lenses include a first lens 53 and a second lens 53'. The relay transmission device 6 consists of a first relay lens 61, an aperture stop 62, a second relay lens 63, and a field stop 64. Based on this multi-area illumination system, uniform illumination is formed for the two areas to be illuminated.

[0034] When used in a multi-zone lighting system, the parallel light source 11 emits a collimated parallel beam with a small beam diameter and a small beam divergence angle. (See attached image) Figure 3 As shown in (a), the beam intensity of the parallel light source 11 exhibits a Gaussian distribution across its cross-section. The parallel beam passes through a Pockel cell 21; by changing the voltage across the Pockel cell 21, polarized light with different polarization states is formed. The linearly polarized light passes through a beam expander composed of an incident lens 31 and an exit lens 32, becoming a larger-diameter beam. The expanded beam is then incident on microlens arrays 41 and 42, and is homogenized by a condenser lens 43 to form a uniform, single-region homogenized beam 8. (See attached image.) Figure 3 As shown in (b), the beam cross-section of the uniformly shaped beam has a flat-top distribution of light intensity.

[0035] The uniform illumination beam is split into two uniform target illumination beams, 81 and 81', in space by the first lens 51, the beam splitter prism 52, the first lens 53, and the second lens 53'. The beam diameters and divergence angles of these two target illumination beams can be the same or different, mainly determined by the first lens 53 and the second lens 53'. When the parameters of the first lens 53 and the second lens 53' are the same, and their distances from the beam splitter prism 52 are the same, the beam diameters and divergence angles of the two target illumination beams are the same. When the parameters of the first lens 53 and the second lens 53' are different, and their distances from the beam splitter prism 52 are different, the beam diameters and divergence angles of the two target illumination beams are different. In addition, 81 and 81' are separated in space, and the light intensity and beam passivity of the two beams are determined by the beam splitter prism 52 and / or the Pockel cell 21. Considering that the subsequent optical path has specific requirements for the beam diameter and divergence angle of the target illumination beam, relay transmission processing is performed on 81 and 81' respectively to control the field of view and aperture angle of the two target illumination beams.

[0036] The relay transmission control method is similar to that for illumination beams 81 and 81'. Taking one of the beams 81 as an example, the first relay mirror 61 and the second relay mirror 63 form a 4f system: that is, the focal length parameters of the first relay mirror 61 and the second relay mirror 63 are the same, the distance between the first relay mirror 61 and 81 is equal to the focal length of the second relay mirror 61, and the distance between the first relay mirror 61 and the second relay mirror 63 is twice the focal length of the first relay mirror 61. The aperture stop 62 is located between the two relay mirrors, at a distance of one focal length from the first relay mirror 61. The aperture stop 62 is used to control the numerical aperture of the illumination beam that finally reaches the area to be illuminated, thereby controlling the aperture angle of the beam in the frequency domain. A field stop 64 is placed one focal length behind the second relay mirror 63 to control the beam diameter of the illumination beam that finally reaches the area to be illuminated, thereby controlling the beam size in the spatial domain. Alternatively, the first relay mirror 61 and the second relay mirror 63 can also form a non-4f system, such as a beam expander or beam reducer system. Alternatively, there can be more than two repeaters; multiple repeaters can form a repeater group, or there can be multiple repeater groups.

[0037] The intensity and on / off state of the two beams are determined by the beam splitter prism 52 or the Pockel cell 21. Specific control methods include: Method 1: The Pockel cell 21 and beam splitter prism 52 are controlled together. Specifically, the Pockel cell 21 outputs polarized light with different polarization states through voltage control, with different ratios of P and S polarization, such as 60%P + 40%S. The beam splitter prism 52 is a polarizing beam splitter prism PBS, which transmits P light and reflects S light. Therefore, the Pockel cell controls the intensity ratio of the two beams: 60% for beam 81 and 40% for beam 81'. On / off state: When all the light from the Pockel cell is P light, all the light goes to the illumination beam 81, while the illumination beam 81' is zero, i.e., 81 is on and 81' is off. The Pockel cell can be considered a special type of polarizer. Control method two: The beam splitter prism 52 is independent of the polarization state. The beam splitter prism 52 is a beam splitter BS. The coating in the middle has different ratios of transmission and reflection, thereby controlling the ratio of light intensity between beam 81 and beam 81'.

[0038] Please see Figure 4 , Figure 4 This is a schematic diagram of another structure for a multi-area lighting system using a parallel light source, as shown in an exemplary embodiment of this application. Figure 4 As shown, in Figure 2Based on the corresponding embodiment, after the target illumination beam lens 53, a new field-splitting lens 54, a beam splitter, a field-splitting lens 56, and a field-splitting lens 56' are added. The new beam splitter is a field-splitting plate 55, thus forming three uniform target illumination beams 81, 81', and 81'". Each of 81, 81', and 81' can be followed by its own relay transmission device (field of view and aperture angle control system): a first relay mirror 61, an aperture stop 62, a second relay mirror 63, and a field of view stop 64, to complete the field of view and aperture angle control of the beam.

[0039] The field-splitting plate 55 can be a beam-splitting plate, a specially designed geometric field-splitting plate, or a diffractive optical element (DOE) and a spatial light modulator (SLM), etc. Figure 5 These are several examples of specially designed geometric field dividers. (See attached image.) Figure 5 (a) The geometric field-splitting plate is divided into two regions, 5501 and 5502. The outer ring 5501 is coated with an anti-reflective coating, and the inner ring 5502 is coated with an anti-reflective coating. When a uniform illumination beam is converted into angular space by the field-splitting lens 54 and obliquely incident on the geometric field-splitting plate 55, it is reflected when it encounters 5501 and transmitted when it encounters 5502, thus splitting into two fields. These fields are then converted back into position space by the field-splitting lenses 56 and 56', forming two uniform illumination beams. Figure 5 In (b), the field-specific coating is the opposite: the outer ring is coated with an antireflective film, and the inner ring with an antireflective film. The remaining... Figure 5 (c)-(h) show the different distribution positions of 5501 and 5502, both of which can achieve uniform lighting in two directions.

[0040] In this embodiment, the newly added field-splitting lens 54, field-splitting plate 55, field-splitting lens 56, and field-splitting lens 56' can also be replaced in sequence with the aforementioned first lens 51, beam-splitting prism 52, lens one 53, and lens two 53'.

[0041] Please see Figure 6 , Figure 6 This is a schematic diagram of the structure of a multi-area lighting system for emitting a diverging light source in an exemplary embodiment of this application, as shown below. Figure 6 As shown, when the light source to be illuminated 1 is a divergent light source 101, the processing methods of the corresponding beam splitting device 5 and relay transmission device 6 are the same as those of the light source 101. Figure 2 and Figure 4 The processing method is the same, but the processing method in beam processing device 2 is different. Figure 6 In this design, the diverging light source 101 can be an LED light source, and the beam processing device 2 consists of a homogenizing rod 401, a homogenizing plate 402, and a second polarization controller 201. The homogenizing plate 402 can be a frosted glass diffuser, an engineered diffuser, a holographic homogenizing plate, etc.

[0042] The light beam emitted by the LED light source is collimated and homogenized by the homogenizing rod 401 into a uniformly collimated initial homogenized beam. The initial homogenized beam is then homogenized by the homogenizing plate 402 into a more uniform beam. The uniform beam is then controlled by the second polarization controller 201 to obtain a homogenized and shaped beam.

[0043] Please see Figure 7 , Figure 7 This is another structural schematic diagram of a multi-zone lighting system in an exemplary embodiment of this application, as shown below. Figure 7 As shown, the multi-zone lighting system includes: Light source module 71: The light source type of the light source to be illuminated is obtained as a parallel light source; Polarization control module 72: According to the requirements of the subsequent optical path, different first polarization controllers are used to polarize the light beam emitted by the light source to be illuminated, so as to convert the polarization state and purify the polarization purity of the light beam to obtain polarized light; wherein, the first polarization controller and the second polarization controller corresponding to the light source type of divergent light source can include: half-wave plate, quarter-wave plate, polarizer, depolarizer, polarizing prism, purification prism, Pockels cell, etc. Beam processing module 73: Using a beam straightener, polarized light is straightened to control the beam directivity, beam spot size, beam divergence angle, and light coherence to obtain a straightened beam; wherein, the beam straightener includes a beam stabilizer, a beam expander, a collimator, a speckle suppressor, etc. Beam homogenization and shaping module 74: Using a beam homogenizer, the beam is homogenized and shaped to flatten the cross-sectional intensity and control the cross-sectional shape of the beam, thereby obtaining a beam homogenized and shaped; wherein, the beam homogenizer includes a beam homogenizer, a microlens array, a homogenizer plate, a diffractive optical element, a spatial light modulator, etc. Beam splitting module 75: Using a beam splitting processing device, the homogenized and shaped beam is split based on multiple areas to be illuminated, so as to spatially separate the homogenized and shaped beam to form multiple channels and obtain a target illumination beam for each area to be illuminated; wherein, the beam splitting processing device includes a beam splitting prism, a field splitting plate, a dichroic mirror, a beam splitting fiber, etc. Relay control module 76: Utilizes a relay transmission device to relay and control the target illumination beam, relaying the target illumination beam to different spatial locations to form uniform target illumination beams located in different areas, thus enabling the target illumination beams to be transmitted to the corresponding areas to be illuminated; simultaneously, during the relay process, the field of view and aperture angle of the target illumination beam are independently controlled for subsequent optical path applications. The relay transmission device includes a relay lens, etc. Uniform illumination module 77: After passing through the relay control module, it forms a uniform illumination beam with a specific field of view and aperture angle at different spatial positions, so as to uniformly illuminate the area to be illuminated by the target illumination beam transmitted to the area to be illuminated.

[0044] The modules described above in this embodiment can be freely combined and their order changed to form different schemes. For example, module 75 and module 74 can be interchanged, with beam splitting performed first, followed by individual beam homogenization and shaping.

[0045] In summary, the multi-zone illumination system of this application can quickly and efficiently generate uniform illumination in multiple zones with different fields of view and aperture angles. The uniform illumination in multiple zones is independent, with each zone's field of view, aperture angle, and brightness adjustable independently via a relay control module. Furthermore, the uniform illumination in each zone is also coordinated, allowing for temporal and spatial synchronization through a polarization control module and a beam splitting module.

[0046] The multi-area lighting method provided in this application embodiment can be specifically executed by a server. It should be noted that the server can be an independent server, or it can be a cloud server that provides basic cloud computing services such as cloud services, cloud databases, cloud computing, cloud functions, cloud storage, network services, cloud communication, middleware services, domain name services, security services, content delivery networks (CDN), and big data and artificial intelligence platforms. No limitation is imposed here.

[0047] Please see Figure 8 , Figure 8 A multi-zone lighting method is illustrated in an exemplary embodiment of this application, such as... Figure 8 As shown, this application provides a multi-zone lighting method, including: S81, preprocess the light beam emitted by the light source to be illuminated to obtain a uniform and shaped light beam; wherein, the light source to be illuminated is a parallel light source or a divergent light source. S82, based on multiple areas to be illuminated, the uniform beam shaping beam is split to obtain a target illumination beam for each area to be illuminated; S83 controls the target illumination beam to illuminate the corresponding area to be illuminated.

[0048] The multi-area illumination method provided in this application preprocesses the light beam emitted by the light source to obtain a uniformly shaped beam, and then splits the uniformly shaped beam based on multiple areas to be illuminated to obtain a target illumination beam for each area to be illuminated. The target illumination beam is controlled to illuminate the corresponding area to be illuminated, so as to realize the simultaneous illumination of multiple areas by one light source, thereby meeting the multi-area measurement needs while saving energy.

[0049] Optionally, the light beam emitted by the light source to be illuminated is preprocessed to obtain a uniformly shaped light beam, including: Determine the light source processing strategy for the light source to be illuminated based on the light source type; The light beam emitted by the light source to be illuminated is preprocessed based on the light source processing strategy to obtain a uniform and shaped light beam.

[0050] In the embodiment provided in this application, a light source processing strategy is determined based on the light source type of the light source to be illuminated, and the light beam emitted by the light source to be illuminated is preprocessed based on the light source processing strategy to obtain a uniformly shaped light beam. In this way, targeted preprocessing of the light beam emitted by the light source to be illuminated based on the light source type can obtain a uniformly shaped light beam that meets the illumination quality requirements of multiple areas, thereby improving the illumination effect of subsequent beam splitting illumination of multiple areas to be illuminated, and thus meeting the needs of multi-area measurement.

[0051] In this embodiment, when the light source type of the light source to be illuminated is a parallel light source, the light source processing strategy can be as follows: polarize the light beam emitted by the light source to be illuminated to obtain polarized light with different polarization states; tidy up the polarized light to obtain a tidyed light beam; and homogenize and shape the tidyed light to obtain a homogenized and shaped light beam.

[0052] When the light source to be illuminated is a divergent light source, the light source processing strategy can be as follows: collimate and homogenize the light beam emitted by the light source to obtain a uniform light beam; then polarize the uniform light beam to obtain homogenized and shaped light beams with different polarization states. Specifically, the steps for collimating and homogenizing the light beam emitted by the light source to obtain a uniform light beam are: collimate and homogenize the light beam emitted by the light source to obtain an initial homogenized light beam; then homogenize the initial homogenized light beam to obtain a uniform light beam.

[0053] Optionally, the beam splitting direction for the homogenizing and shaping beam is determined based on multiple areas to be illuminated, including: Obtain the positional relationship between multiple areas to be illuminated and the uniform beam shaping beam; The beam splitting direction for uniform light shaping beam is determined based on the positional relationship, and the beam splitting direction corresponds one-to-one with the position of the area to be illuminated; The uniform beam shaping beam is split based on the beam splitting direction to obtain the target illumination beam for each area to be illuminated.

[0054] In the embodiment provided in this application, based on the positional relationship between multiple areas to be illuminated and the homogenizing and shaping beam, the beam splitting direction of the homogenizing and shaping beam can be directly determined. Based on the beam splitting direction, the homogenizing and shaping beam is split to obtain a target illumination beam for each area to be illuminated. This achieves high-quality uniform illumination of different areas simultaneously by the same light source, thereby improving the illumination effect and meeting the needs of multi-area measurement. The target illumination beam is directed towards one area to be illuminated.

[0055] It should be noted that the multi-zone lighting system provided in the above embodiments and the multi-zone lighting method provided in the above embodiments belong to the same concept. The specific ways in which each module and unit performs its operation have been described in detail in the method embodiments, and will not be repeated here. In practical applications, the multi-zone lighting system provided in the above embodiments can be assigned to different functional modules as needed, that is, the internal structure of the system can be divided into different functional modules to complete all or part of the functions described above, and this is not a limitation.

[0056] A computing device according to an embodiment of this application includes a memory, a processor, and a program stored in the memory and running on the processor. When the processor executes the program, it implements some or all of the steps of the multi-area lighting method described above.

[0057] The computing device can be a computer, and the corresponding program is computer software. The parameters and steps of the computing device described above can be referred to the parameters and steps in the embodiment of the multi-area lighting method above, and will not be repeated here.

[0058] This application embodiment provides a computer-readable storage medium storing instructions that, when executed, perform the steps of the aforementioned multi-area lighting method.

[0059] The computer-readable storage medium may be a transient computer-readable storage medium or a non-transitory computer-readable storage medium.

[0060] The technical solutions of this disclosure can be embodied in the form of a software product. This computer software product is stored in a storage medium and includes one or more instructions to cause a computer device (which may be a personal computer, server, or network device, etc.) to execute all or part of the steps of the methods of this disclosure. The aforementioned computer-readable storage medium can be a non-transitory computer-readable storage medium, including: USB flash drives, portable hard drives, read-only memory (ROM), random access memory (RAM), magnetic disks, or optical disks, and other media capable of storing program code; it can also be a transient computer-readable storage medium.

[0061] The flowcharts and block diagrams in the accompanying drawings illustrate the architecture, functionality, and operation of possible implementations of systems, methods, and computer program products according to various embodiments of this application. Each block in a flowchart or block diagram may represent a module, segment, or portion of code, which contains one or more executable instructions for implementing a specified logical function. It should also be noted that in some alternative implementations, the functions indicated in the blocks may occur in a different order than those indicated in the drawings. For example, two consecutively indicated blocks may actually be executed substantially in parallel, and they may sometimes be executed in reverse order, depending on the functions involved. It should also be noted that each block in a block diagram or flowchart, and combinations of blocks in a block diagram or flowchart, may be implemented using a dedicated hardware-based system that performs the specified function or operation, or using a combination of dedicated hardware and computer instructions.

[0062] Those skilled in the art will recognize that this application can be implemented as a system, method, or computer program product. Therefore, this disclosure can be implemented in the following forms: it can be entirely hardware, entirely software (including firmware, resident software, microcode, etc.), or a combination of hardware and software, generally referred to herein as a "module" or "system." Furthermore, in some embodiments, this application can also be implemented as a computer program product contained in one or more computer-readable media, which contains computer-readable program code. Computer-readable storage media can be, for example, but not limited to—electrical, magnetic, optical, electromagnetic, infrared, or semiconductor systems, apparatuses, or devices, or any combination thereof.

[0063] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0064] Although embodiments of this application have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting this application. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of this application.

Claims

1. A multi-zone lighting system, characterized in that, include: The light source to be illuminated is either a parallel light source or a divergent light source. A beam processing device is used to preprocess the beam emitted by the light source to be illuminated to obtain a uniform and shaped beam. A beam splitting processing device is used to split the uniform beam shaping beam based on multiple areas to be illuminated, so as to obtain a target illumination beam for each area to be illuminated. A relay transmission device is used to control the target illumination beam to illuminate the corresponding area to be illuminated.

2. The system according to claim 1, characterized in that, When the light source type is a parallel light source, the beam processing device includes: A first polarization controller is used to polarize the light beam emitted by the light source to be illuminated, so as to obtain polarized light with different polarization states. A beam straightener is used to straighten the polarized light to obtain a straightened beam. A beam homogenizer is used to homogenize and shape the sorted beam to obtain a homogenized and shaped beam.

3. The system according to claim 1, characterized in that, When the light source type is a divergent light source, the beam processing device includes: A beam homogenizer is used to collimate and homogenize the light beam emitted by the light source to be illuminated, so as to obtain a uniform light beam. The second polarization controller is used to polarize the uniform beam to obtain uniformly shaped beams with different polarization states.

4. The system according to claim 3, characterized in that, The homogenizer includes: A beam homogenizer is used to collimate and homogenize the light beam emitted by the light source to be illuminated, so as to obtain an initial homogenized beam. A homogenizing plate is used to homogenize the initial homogenized beam to obtain a uniform beam.

5. The system according to claim 1, characterized in that, The beam splitting processing device includes: The first lens is used to process the homogenized and shaped beam to obtain a converged beam; A beam splitter is used to split the converging beam into multiple beams to be illuminated. Multiple second lenses are positioned one-to-one with multiple areas to be illuminated and one-to-one with multiple beams to be illuminated. Each second lens is used to diverge the corresponding beam to be illuminated to obtain a target illumination beam for the corresponding area to be illuminated.

6. The system according to any one of claims 1 to 5, characterized in that, The relay transmission device includes a first relay mirror, an aperture stop, a second relay mirror, and a field stop; The target illumination beam passes sequentially through the first relay mirror, the aperture stop, the second relay mirror, and the field stop, and is transmitted to the corresponding area to be illuminated, so as to illuminate the area to be illuminated.

7. A multi-zone lighting method, characterized in that, include: The light beam emitted by the light source to be illuminated is preprocessed to obtain a uniform and shaped light beam; wherein the light source to be illuminated is a parallel light source or a divergent light source. The uniform beam shaping beam is split based on multiple areas to be illuminated to obtain a target illumination beam for each area to be illuminated. The target illumination beam is controlled to illuminate the corresponding area to be illuminated.

8. The method according to claim 7, characterized in that, The preprocessing of the light beam emitted by the light source to obtain a uniform and shaped light beam includes: A light source processing strategy is determined based on the light source type for the light source to be illuminated; The light beam emitted by the light source to be illuminated is preprocessed based on the light source processing strategy to obtain a uniform and shaped light beam.

9. The method according to claim 7, characterized in that, Determining the beam splitting direction for the homogenizing and shaping beam based on multiple regions to be illuminated includes: Obtain the positional relationship between multiple areas to be illuminated and the uniform light shaping beam; The beam splitting direction for the uniform light shaping beam is determined based on the positional relationship, and the beam splitting direction corresponds one-to-one with the position of the area to be illuminated; The uniform beam shaping beam is split based on the beam splitting direction to obtain a target illumination beam for each area to be illuminated.

10. A computing device comprising a memory, a processor, and a program stored in the memory and running on the processor, characterized in that, When the processor executes the program, it implements the steps of a multi-area lighting method as described in any one of claims 7 to 9.

Images