Dispersion gas assembly for semiconductors

Abstract

The application provides a kind of semiconductor dispersion gas assembly, belongs to the field of gas assembly connection, the assembly includes the first joint unit and the second joint unit that can be axially butted and separated, both symmetrical structures, both contain connecting sleeve and built-in sealing assembly;Connecting sleeve butting end is provided with air opening, circumferential inner wall is opened annular plugging groove, sealing assembly is composed of plugging support ring, plugging piston, pushing resistance rod, rear shift limiting ring and plugging spring, plugging piston slides in plugging groove to control air opening opening and closing, plugging spring provides reset elastic force.When butting, two sides pushing resistance rod extrude each other, drive plugging piston to remove after overcoming spring elastic force, make air opening and air hole communicate, realize gas passage opening.This assembly realizes reliable opening and high-efficiency sealing of gas passage when joint butting through the collaborative design of mechanical linkage and hydraulic sealing, effectively reduces the risk of gas leakage, meets the high-precision demand of semiconductor dispersion gas transmission.

Description

Technical Field

[0001] This invention belongs to the field of dispersed gas component technology, and specifically relates to a dispersed gas component for semiconductors. Background Technology

[0002] In existing technologies, the stable and clean delivery of high-purity gases is crucial for ensuring the quality of key processes such as wafer growth, etching, and deposition in semiconductor manufacturing. The delivery of these gases is highly dependent on the absolute sealing and operational reliability of all connection points within the piping system. Even the slightest leak can not only waste precious gases but also lead to backflow of external contaminants, polluting the entire gas supply system and causing batch-specific product quality issues.

[0003] Currently, the most commonly used gas pipeline connection components in this field are fixed joints using flanges and bolts, relying on compression gaskets for sealing. However, the aforementioned existing technologies have significant limitations. Flange-bolted connections are bulky, and the installation and disassembly process is cumbersome and time-consuming. Furthermore, their static sealing gaskets are prone to creep relaxation under long-term use, temperature fluctuations, or mechanical vibrations, leading to a decrease in sealing force and a risk of leakage. Summary of the Invention

[0004] The purpose of this invention is to provide a diffused gas assembly for semiconductors, which aims to solve the problem in the prior art that it is impossible to achieve automatic activation during connection and dynamically enhance the sealing mechanism according to the connection state.

[0005] To achieve the above objectives, the present invention provides the following technical solution:

[0006] A semiconductor diffused gas assembly includes a first connector unit and a second connector unit that can be axially connected and separated from each other, the first connector unit and the second connector unit being respectively used to connect to an external gas pipeline;

[0007] The first connector unit and the second connector unit are symmetrical in structure, and both include a connecting sleeve and a sealing component disposed inside the connecting sleeve;

[0008] The connecting sleeve has a vent opening at the mating end and an annular sealing groove on its inner circumference.

[0009] The sealing assembly comprises a blocking support ring, a blocking piston, a pushing resistance rod, a rear displacement limiting ring and a blocking spring; the blocking support ring is fixedly connected to the circumferential inner wall of the blocking groove, the blocking groove is communicated with the air vent hole; the blocking piston is slidingly connected in the blocking groove and is used for blocking or opening the air vent opening; the pushing resistance rod is fixedly connected to the axial inner side end of the blocking piston; the rear displacement limiting ring is fixedly connected to the blocking piston and is used for limiting the maximum rear displacement stroke of the blocking piston; the blocking spring is arranged between the blocking piston and the blocking support ring and provides elastic force for resetting the blocking piston to the butt joint end;

[0010] When the first joint unit and the second joint unit are axially inserted into each other, the ends of the pushing resistance rods on both sides are in contact and extruded with each other, jointly driving the blocking pistons on both sides to overcome the elastic force of the respective blocking springs and move backward until the rear displacement limiting rings abut against the blocking support rings, at which time the air vent opening is communicated with the air vent hole and the gas passage is opened;

[0011] The first joint unit and the second joint unit further comprise a hydraulic linkage sealing system for enhancing the sealing effect in the butt joint state, the hydraulic linkage sealing system comprising a hydraulic groove opened in the inner part of the connecting sleeve, hydraulic oil arranged in the hydraulic groove, and a pressurized sealing rubber arranged on the inner wall of the butt joint end of the connecting sleeve;

[0012] The circumferential outer surface of the blocking piston is fixedly connected with a sliding extrusion plate, and the connecting sleeve is slidingly connected with a hydraulic trigger mechanism linked with the sliding extrusion plate;

[0013] When the blocking piston moves backward due to butt joint, the hydraulic trigger mechanism is driven to act by the sliding extrusion plate to compress the hydraulic oil in the hydraulic groove, so that the pressurized sealing rubber is pressed to expand and tightly fit the butt joint interface.

[0014] As a preferred scheme of the present application, the hydraulic trigger mechanism comprises an inward sliding rod slidingly connected in the extrusion groove opened in the connecting sleeve, one end of the inward sliding rod is fixedly connected with an extrusion ring in contact with the sliding extrusion plate, and the other end of the inward sliding rod extends into the hydraulic groove and is fixedly connected with a pressurized plate; a first reset spring is further arranged in the hydraulic groove, one end of the first reset spring is connected with the pressurized plate, and the other end of the first reset spring is connected with the inner wall of the hydraulic groove.

[0015] As a preferred scheme of the present application, the circumferential outer surface of the connecting sleeve is fixedly connected with a fixed inner flange, a fixed threaded hole is opened in the fixed inner flange; the butt joint end of the connecting sleeve is further fixedly connected with a fixed outer flange, a bolt through hole corresponding in position to the fixed threaded hole is opened in the fixed outer flange.

[0016] As a preferred scheme of the present application, the first joint unit and the second joint unit further comprise a secondary pressure boosting mechanism, the secondary pressure boosting mechanism comprises a hydraulic pressure boosting groove opened at the bottom of the fixing threaded hole and communicated with the hydraulic groove, a pressure boosting piston slidingly arranged in the hydraulic pressure boosting groove, and a second return spring arranged between the bottom of the pressure boosting piston and the bottom wall of the hydraulic pressure boosting groove.

[0017] When the fixing bolt passes through the bolt hole and is screwed into the fixing threaded hole, the end of the bolt presses the pressure boosting piston to move downward, compresses the second return spring, and further increases the oil pressure in the hydraulic groove.

[0018] As a preferred scheme of the present application, the plugging support ring is opened with a limiting sliding groove at the side end facing the plugging piston, and the corresponding end of the plugging piston is fixedly connected with a limiting sliding block which can slide in the limiting sliding groove.

[0019] As a preferred scheme of the present application, the cross sections of the limiting sliding block and the limiting sliding groove are both oval, for limiting the circumferential rotation of the plugging piston.

[0020] As a preferred scheme of the present application, the limiting sliding block is fixedly connected with a forward limiting plate after sliding through the limiting sliding groove, for limiting the maximum forward stroke of the plugging piston under the action of the plugging spring.

[0021] As a preferred scheme of the present application, the butt joint end of the connecting sleeve in the first joint unit is fixedly connected with a fixing threaded sleeve, and the inner wall of the butt joint end of the connecting sleeve in the second joint unit is opened with a fixing threaded groove matched with the fixing threaded sleeve, and the preliminary axial connection and pre-tightening of the first joint unit and the second joint unit are realized through the screwing of the fixing threaded sleeve and the fixing threaded groove.

[0022] As a preferred scheme of the present application, the fixing outer flanges of the two connecting sleeves are arranged in a staggered manner to ensure that they do not interfere with each other during the rotation butt joint process.

[0023] As a preferred scheme of the present application, the outer surfaces of the two connecting sleeves are both fixedly connected with a connecting rotation sleeve for screwing operation.

[0024] Compared with the prior art, the present application has the following beneficial effects:

[0025] 1. Through a symmetrically arranged sealing assembly driven by push rods and sealing springs, this invention achieves automatic opening of the gas path during connection and instantaneous self-closure during disconnection. When the connectors are joined, the push rods on both sides press against each other, simultaneously pushing open the sealing piston, allowing the gas path to open; when the connectors are separated, the sealing piston instantly resets under the action of the sealing spring, tightly sealing the gas opening. This "connect-and-open, disconnect-and-seal" mechanism avoids leakage of process gases and intrusion of external contaminants during insertion and removal operations, ensuring the ultra-high cleanliness requirements of the gas delivery system for semiconductor processes.

[0026] 2. A hydraulic booster linkage sealing mechanism is adopted. The sliding extrusion plate pushes the inward slide rod to compress the hydraulic oil, causing the booster sealing rubber to expand under pressure and tightly adhere to the inner wall. Combined with the secondary boost triggered by the bolt locking, a uniform and strong sealing force is automatically applied to the mating interface.

[0027] 3. An integrated mechanical double-locking structure is used. Axial connection is achieved through a fixed threaded sleeve and threaded groove, while radial reinforcement is achieved through bolt holes and fixed threaded holes between the outer and inner flanges, ensuring the mechanical strength and vibration resistance of the connection. The flange locking action can be linked with a secondary hydraulic booster mechanism. Tightening the bolts drives the booster piston, providing a secondary pressurization to the hydraulic system, further increasing the sealing force from its initial value. Attached Figure Description

[0028] The accompanying drawings are provided to further illustrate the invention and form part of the specification. They are used in conjunction with embodiments of the invention to explain the invention and do not constitute a limitation thereof. In the drawings:

[0029] Figure 1 This is a three-dimensional structural view of the present invention;

[0030] Figure 2 This is a cross-sectional view of the first connector unit and the second connector unit after separation in this invention;

[0031] Figure 3 This is a cross-sectional view of the first connector unit and the second connector unit after they are joined together in this invention;

[0032] Figure 4 This is a cross-sectional view of the first connector unit in this invention;

[0033] Figure 5 This is an exploded cross-sectional view of the first joint unit in this invention;

[0034] Figure 6 For the present invention Figure 5 Enlarged view of point A in the middle;

[0035] Figure 7 For the present invention Figure 5 Enlarged view of point B in the middle;

[0036] Figure 8 For the invention Figure 5 Enlarged view at C in the invention.

[0037] In the figure: 1, connecting sleeve; 2, support ring for plugging; 3, air hole; 4, limiting sliding groove; 5, limiting sliding block; 6, plugging groove; 7, air opening; 8, plugging piston; 9, pushing resistance rod; 10, rear limiting ring; 11, plugging spring; 12, forward limiting plate; 13, fixed threaded groove; 14, fixed threaded sleeve; 15, hydraulic groove; 16, extrusion groove; 17, inward sliding rod; 18, extrusion ring; 19, booster plate; 20, first return spring; 21, fixed inner flange; 22, fixed outer flange; 23, bolt hole; 24, fixed threaded hole; 25, hydraulic booster groove; 26, booster piston; 27, second return spring; 28, booster sealing rubber; 29, connecting rotating sleeve; 30, sliding extrusion plate; 31, spring groove. DETAILED DESCRIPTION

[0038] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work fall within the scope of protection of the present application.

[0039] Embodiment 1: please refer to Figures 1-8 The present application provides the following technical solutions:

[0040] A dispersion gas assembly for semiconductor includes:

[0041] The first joint unit and the second joint unit can be axially connected and separated from each other, and the first joint unit and the second joint unit are respectively used to communicate with external gas pipeline;

[0042] The first joint unit and the second joint unit are symmetrical in structure, and each includes a connecting sleeve 1 and a sealing assembly arranged inside the connecting sleeve 1;

[0043] The connecting sleeve 1 is provided with an air opening 7 at the end of the connecting end, and the circumferential inner wall is provided with an annular plugging groove 6;

[0044] The sealing assembly comprises a sealing support ring 2, a sealing piston 8, a pushing stopper 9, a rearward limit ring 10 and a sealing spring 11; the sealing support ring 2 is fixedly connected to the circumferential inner wall of the sealing groove 6, the sealing groove 6 is communicated with the vent hole 3; the sealing piston 8 is slidingly connected in the sealing groove 6, for sealing or opening the vent opening 7; the pushing stopper 9 is fixedly connected to the axial inner side end of the sealing piston 8; the rearward limit ring 10 is fixedly connected to the sealing piston 8, for limiting the maximum rearward stroke thereof; the sealing spring 11 is arranged between the sealing piston 8 and the sealing support ring 2, for providing the elastic force for resetting the sealing piston 8 to the abutting end;

[0045] When the first joint unit and the second joint unit are axially inserted into each other, the end portions of the pushing stoppers 9 on both sides are in contact and extruded with each other, jointly driving the sealing pistons 8 on both sides to overcome the elastic force of the respective sealing springs 11 and move rearward, until the rearward limit ring 10 abuts against the sealing support ring 2, at this time the vent opening 7 is communicated with the vent hole 3, and the gas passage is opened.

[0046] In the specific embodiments of the present application, a set of self-closing sealing assemblies are arranged inside each connecting sleeve 1 for realizing automatic opening and closing of the gas passage. One end of the connecting sleeve 1 is provided with a gas passage opening 7 for process gas flow, and the inner wall thereof is provided with an annular sealing groove 6. A sealing piston 8 is slidingly arranged in the sealing groove 6. The sealing piston 8 is tightly pressed against the inner side end face of the gas passage opening 7 under normal conditions by the elastic force of a sealing spring 11, thereby realizing complete sealing of the gas passage to prevent gas leakage or external air intrusion. One side of the sealing piston 8 is fixedly connected with a pushing abutting rod 9, and the other side is connected with a rear moving limiting ring 10. The two ends of the sealing spring 11 are respectively connected between the sealing piston 8 and the sealing support ring 2, thereby providing a reset elastic force. The sealing support ring 2 is fixed to the inner wall of the sealing groove 6, and the end face thereof is provided with a limiting sliding groove 4. A limiting sliding block 5 on the sealing piston 8 is embedded in the limiting sliding groove 4 and can slide along the limiting sliding groove 4, thereby ensuring axial stability of the sealing piston 8 during movement and preventing rotation or deviation. A gas passage hole 3 is arranged on the sealing support ring 2 and is in communication with the gas passage opening 7 when the sealing piston 8 moves rearward, thereby forming a gas flow path. When the two connecting sleeves 1 are abutted and closed, the end portions of the pushing abutting rods 9 on the two sides are in contact with each other and continuously apply pressure, thereby pushing the respective sealing pistons 8 to slide inward against the elastic force of the sealing spring 11, so that the gas passage opening 7 is aligned with the gas passage hole 3, and gas can enter the semiconductor process equipment through the communication passage between the two connecting sleeves. At this time, the rear moving limiting ring 10 abuts against the end face of the sealing support ring 2, thereby limiting the maximum stroke of the sealing piston 8 and preventing fatigue failure caused by excessive compression of the spring. When the connection is disconnected, the pressure between the pushing abutting rods 9 is released, the sealing spring 11 is reset, the sealing piston 8 is quickly bounced back to the initial position, the gas passage opening 7 is resealed, and the instantaneous self-closing function is realized. The assembly realizes automatic opening and closing without external control by using the mechanical abutting pushing and spring reset combination, effectively isolates the process gas from the external environment in the separated state, avoids process abnormalities caused by gas fluctuation, pollution or mixing, and is particularly suitable for semiconductor manufacturing gas delivery systems with high purity and high cleanliness requirements, thereby ensuring process stability and equipment safety.

[0047] For details, please refer to Figure 4 and Figure 8 The cross sections of the limiting sliding block 5 and the limiting sliding groove 4 are both oval, for limiting circumferential rotation of the sealing piston 8. The limiting sliding block 5 is fixedly connected with a front moving limiting plate 12 after sliding through the limiting sliding groove 4, for limiting the maximum forward stroke of the sealing piston 8 under the action of the sealing spring 11.

[0048] In this embodiment: in order to further improve the stability of the plugging piston 8 during movement and prevent it from rotating in the circumferential direction during sliding, causing the air vent 3 to be misaligned, the limiting sliding block 5 and the limiting sliding groove 4 are designed as an elliptical structure. This shape has a direction limiting feature, limiting the degree of freedom in the circumferential direction, ensuring that the plugging piston 8 can only slide linearly in the axial direction and cannot rotate, thereby ensuring that the air vent 3 and the air vent opening 7 are precisely aligned when they are connected and opened, maintaining the smoothness of the gas flow channel. The long axis direction of the elliptical structure is consistent with the direction of piston movement, providing sufficient sliding stroke space, and the short axis direction forms a radial limit, enhancing the rigidity of the guide. The front limiting plate 12 is fixedly connected to the side end of the limiting sliding block 5 facing the opening of the plugging groove 6. When the front limiting plate 12 abuts against the outer end surface of the limiting sliding groove 4, it can effectively prevent the plugging piston 8 from moving excessively forward under the action of the plugging spring 11 and disengaging from the plugging groove 6, thereby serving as an axial limiting function. This ensures that the plugging piston 8 always stays within the pre-set working range, improving the operational reliability and service life of the assembly. This limiting structure keeps the plugging piston 8 stable when blocking the air vent opening 7 in the disconnected state of the connecting sleeve 1, and guides it to smoothly move backward during the connection process, achieving fast, precise, and reliable control of the air path on-off, and is suitable for high-frequency plugging and high-cleanliness semiconductor process environments.

[0049] For details, please refer to Figure 2 and Figure 4 The fixed threaded sleeve 14 is fixedly connected to the connecting sleeve 1 of the first joint unit at the connection end. The fixed threaded groove 13 is formed in the inner wall of the connecting sleeve 1 of the second joint unit at the connection end, matching the fixed threaded sleeve 14. By screwing the fixed threaded sleeve 14 and the fixed threaded groove 13, the preliminary axial connection and pre-tightening of the first joint unit and the second joint unit are achieved.

[0050] In this embodiment: in the above-mentioned semiconductor dispersion gas assembly, in order to realize reliable connection and sealing pre-tightening between the two connecting sleeves 1, one side end of one connecting sleeve 1 is fixedly connected with a fixed threaded sleeve 14, the outer periphery of the fixed threaded sleeve 14 is provided with external threads, and the inner wall around the air passage opening 7 of the other connecting sleeve 1 is provided with a fixed threaded groove 13 matched therewith. When the two connecting sleeves 1 are axially butted, the fixed threaded sleeve 14 is rotated and screwed into the fixed threaded groove 13, forming a threaded connection structure. This threaded connection method not only realizes mechanical locking between the two assemblies to prevent accidental separation due to vibration or air flow impact, but also continuously applies axial pressure during tightening, promotes the full contact and mutual extrusion of the two push-resistance rods 9, and makes the push-blocking piston 8 move backward against the elastic force of the blocking spring 11, thereby ensuring that the air passage hole 3 and the air passage opening 7 are completely aligned and stably connected, improving the reliability of gas flow. In addition, the progressive locking force provided by the threaded connection helps to uniformly compress the sealing area and enhance the sealing performance of the interface to prevent micro-leakage. The structure is simple to operate, firmly connected, and suitable for semiconductor equipment gas delivery systems that need to be frequently disassembled and have extremely high gas tightness requirements, ensuring the continuity and safety of gas transmission during the process.

[0051] For details, please refer to Figure 3 、 Figure 6 and Figure 7 , the first joint unit and the second joint unit further comprise a hydraulic linkage sealing system for enhancing the sealing effect in the butted state, the hydraulic linkage sealing system comprises a hydraulic groove 15 opened in the connecting sleeve 1, hydraulic oil arranged in the hydraulic groove 15, and a pressurized sealing rubber 28 arranged in the inner wall of the butted end of the connecting sleeve 1.

[0052] In the embodiment, in the dispersion gas assembly for semiconductor, in order to further improve the sealing reliability of the connecting interface, prevent high-purity process gas from leaking or being polluted during transmission, an annular hydraulic groove 15 is arranged in the two connecting sleeves 1, the hydraulic groove 15 is filled with incompressible hydraulic oil, and a closed hydraulic transmission system is formed. A pressurized sealing rubber 28 is arranged on the inner wall of the hydraulic groove 15 close to the connecting end face. The pressurized sealing rubber 28 is initially embedded in the groove. When the two connecting sleeves 1 are axially butted and threadedly locked, the connecting end faces are attached to each other. At this time, the end structure of the other connecting sleeve 1 presses the pressurized sealing rubber 28 on the side to make the pressurized sealing rubber 28 deformed and expand outwardly. Meanwhile, the pressure is uniformly transmitted through the hydraulic oil in the hydraulic groove 15, so that the pressurized sealing rubber 28 distributed in a ring shape is synchronously pressed and expanded, and is tightly attached between the inner wall of the connecting sleeve 1 and the butting end face, thereby forming an enhanced sealing barrier. The structure realizes uniform distribution of the sealing force by using the hydraulic transmission principle, effectively compensates for the machining error and assembly deviation, and ensures consistent and reliable air tightness in the entire circumferential direction. The pressurized sealing rubber 28 can still maintain good resilience and sealing performance under high-pressure working conditions, and is suitable for high-temperature and high-cleanliness semiconductor process environments. The design realizes a pressurized sealing mechanism when the connection is closed, significantly improves the interface sealing level, prevents gas leakage or external air intrusion due to a small gap, and ensures stable delivery of pure process gas.

[0053] For details, please refer to Figures 1-8 The circumferential outer surface of the plugging piston 8 is fixedly connected with a sliding extrusion plate 30, and a hydraulic trigger mechanism linked with the sliding extrusion plate 30 is slidingly connected in the connecting sleeve 1. When the plugging piston 8 moves backward due to butt joint, the hydraulic trigger mechanism is driven to act by the sliding extrusion plate 30 to compress the hydraulic oil in the hydraulic groove 15, so that the pressurized sealing rubber 28 is pressed and expanded and tightly attached to the butt joint interface. The hydraulic trigger mechanism comprises an inward sliding rod 17 slidingly connected in an extrusion groove 16 arranged in the connecting sleeve 1. One end of the inward sliding rod 17 is fixedly connected with an extrusion ring 18 in contact with the sliding extrusion plate 30, and the other end of the inward sliding rod 17 extends into the hydraulic groove 15 and is fixedly connected with a pressurized plate 19. A first return spring 20 is further arranged in the hydraulic groove 15. One end of the first return spring 20 is connected with the pressurized plate 19, and the other end of the first return spring 20 is connected with the inner wall of the hydraulic groove 15.

[0054] In this embodiment: under normal circumstances, the first reset spring 20 is in a free state, and the outer end of the inward sliding rod 17 is located in the extrusion groove 16 close to the connecting end face. When the two connecting sleeves 1 are connected and the sealing piston 8 is pushed to move backward, the sliding extrusion plate 30 on the sealing piston 8 moves synchronously and presses the trigger component in the hydraulic system, or directly / indirectly acts on the outer end of the inward sliding rod 17, so that it slides to the inside of the hydraulic groove 15, drives the pressure plate 19 to compress the hydraulic oil, thereby increasing the pressure in the hydraulic groove 15. The pressure is uniformly transmitted to the pressure sealing rubber 28 through the hydraulic oil, so that the pressure sealing rubber 28 expands and tightly adheres to the connecting interface, realizing sealing enhancement. The first reset spring 20 is compressed and stores energy when the inward sliding rod 17 is pressed and moves inward, and restores to the original length when the connection is disconnected and the pressure is released, pushing the pressure plate 19 and the inward sliding rod 17 to reset, so that the hydraulic system returns to the initial state, preparing for the next connection. This structure converts the mechanical connection action into a hydraulic pressure signal, realizes dynamic self-adaptive improvement of sealing performance, and ensures the absolute sealing performance and long-term stability of the connection part during the transportation of high-purity gas. The sliding extrusion plate 30 is fixedly connected to the circumferential outer surface of the sealing piston 8, which is a ring-shaped boss structure. When the two connecting sleeves 1 are connected and closed, the push rod 9 is pressed to push the sealing piston 8 to move backward, and the sliding extrusion plate 30 moves synchronously and directly presses on the end face of the extrusion ring 18, applying axial pressure to force the inward sliding rod 17 to slide to the inside of the hydraulic groove 15 against the elastic force of the first reset spring 20, drive the pressure plate 19 to compress the hydraulic oil, and increase the oil pressure in the hydraulic groove 15. The pressure is transmitted to the pressure sealing rubber 28, prompting it to expand outward and tightly adhere to the connecting interface, forming a high-strength dynamic seal. This linkage structure directly converts the opening stroke of the sealing piston 8 into a hydraulic pressure action without the need for an additional driving source, with rapid response and reliable action. When the connection is disconnected, the sealing spring 11 pushes the sealing piston 8 to reset, the sliding extrusion plate 30 is separated from the extrusion ring 18, the first reset spring 20 releases the stored energy, and the pressure plate 19 and the inward sliding rod 17 are pushed back to position, the hydraulic pressure is released, and the pressure sealing rubber 28 returns to its original state, completing a sealing cycle.

[0055] For details, please refer to Figure 2 , Figure 3 and Figure 7 , the circumferential outer surface of the connecting sleeve 1 is fixedly connected with a fixed inner flange 21, and the fixed inner flange 21 is provided with a fixed threaded hole 24; the connecting end of the connecting sleeve 1 is also fixedly connected with a fixed outer flange 22, and the fixed outer flange 22 is provided with a bolt through hole 23 corresponding in position to the fixed threaded hole 24.

[0056] In this embodiment: the circumferential outer surface of each connecting sleeve 1 is fixedly connected with a fixed inner flange 21, the upper end surface of the fixed inner flange 21 is uniformly provided with a plurality of fixed threaded holes 24; meanwhile, the side end of each connecting sleeve 1 is fixedly connected with a fixed outer flange 22, the two fixed outer flanges 22 are arranged in staggered positions in the initial installation state, to ensure that no interference collision occurs during the rotary butt joint process, the end surface of the fixed outer flange 22 is provided with a bolt through hole 23 corresponding in position to the fixed threaded hole 24, when the two connecting sleeves 1 are axially butted through threaded connection, one of the components or the overall structure is rotated, so that the bolt through hole 23 on the fixed outer flange 22 on one side is accurately aligned with the fixed threaded hole 24 on the corresponding side of the fixed inner flange 21, then the fixed bolt is passed through the bolt through hole 23 and screwed into the fixed threaded hole 24, to realize the rigid locking between the flanges, the double-flange structure avoids assembly conflicts through circumferential staggered design, realizes secondary mechanical reinforcement through the cooperation of the bolt through hole 23 and the threaded hole, effectively prevents connection loosening under the conditions of vibration, thermal expansion and contraction or high pressure, and significantly improves the reliability of the overall connection and the maintaining ability of the sealing pre-tightening force.

[0057] For details, please refer to Figure 4 and Figure 7 , the first joint unit and the second joint unit further include a secondary supercharging mechanism, the secondary supercharging mechanism includes a hydraulic supercharging groove 25 which is opened at the bottom of the fixed threaded hole 24 and is in communication with the hydraulic groove 15, a supercharging piston 26 which is slidingly arranged in the hydraulic supercharging groove 25, and a second return spring 27 which is arranged between the bottom of the supercharging piston 26 and the bottom wall of the hydraulic supercharging groove 25.

[0058] In this embodiment: the inner wall below the fixing screw hole 24 of the fixed inner flange 21 is provided with a hydraulic pressure boosting groove 25, which extends downward and communicates with the hydraulic groove 15 inside the connecting sleeve 1, forming a pressure transmission channel; a pressure boosting piston 26 is slidably installed in the hydraulic pressure boosting groove 25, the outer periphery of which is in sealing cooperation with the groove wall, the lower end of the pressure boosting piston 26 is connected to the bottom inner wall of the hydraulic pressure boosting groove 25 through a second return spring 27, under normal circumstances, the second return spring 27 pushes the pressure boosting piston 26 to the upper position, closing or partially closing the communication path between the hydraulic pressure boosting groove 25 and the hydraulic groove 15, preventing hydraulic oil leakage or pressure loss, when the two connecting sleeves 1 are butt-jointed and rotationally locked and fixed, during the process of the fixing bolt passing through the bolt perforation 23 and being screwed into the fixing screw hole 24, the bolt end continuously presses down the pressure boosting piston 26, making it move downward against the elastic force of the second return spring 27, completely opening the hydraulic pressure boosting groove 25 channel, at the same time further compressing the hydraulic system, prompting the hydraulic oil pressure to rise, this pressure is superimposed with the hydraulic pressure generated by the sliding extrusion plate 30 pushing the extrusion ring 18, jointly acting on the pressure boosting sealing rubber 28, making it fully expand and tightly adhere to the connection interface, realizing double pressure boosting sealing, the second return spring 27 releases the elastic force after the bolt is disassembled, pushing the pressure boosting piston 26 to reset, closing the hydraulic channel and preparing for the next sealing.

[0059] For details, please refer to Figure 2 、 Figure 4 and Figure 7 When the fixing bolt passes through the bolt perforation 23 and is screwed into the fixing screw hole 24, the bolt end presses the pressure boosting piston 26 to move downward, compressing the second return spring 27, thereby further increasing the oil pressure in the hydraulic groove 15, and the pressure boosting sealing rubber 28 abuts against the inner wall of one side of the connecting sleeve 1.

[0060] In this embodiment: when the two connecting sleeves 1 are completed and locked, the pressure in the hydraulic groove 15 is synchronously raised by a double linkage mechanism: on the one hand, the blocking piston 8 moves backward to drive the sliding extrusion plate 30 to press the extrusion ring 18, and the inward sliding rod 17 and the booster plate 19 are compressed to compress the hydraulic oil; on the other hand, when the fixed bolt is screwed into the fixed threaded hole 24, the booster piston 26 is pressed down to overcome the elastic force of the second return spring 27, open the hydraulic booster groove 25 channel, make the hydraulic groove 15 and the hydraulic booster groove 25 communicate, and continue to apply pressure, under the joint action of the axial advancement of the booster plate 19 and the downward pressure of the booster piston 26, the hydraulic oil pressure in the hydraulic groove 15 is significantly increased, the pressure is uniformly transmitted to the annular booster sealing rubber 28 through the closed oil way, the booster sealing rubber 28 is elastically deformed after being pressed, and expands outward along the radial direction, the outer edge tightly abuts against the inner wall of one side of the connecting sleeve 1, and the end face tightly abuts against the butt joint end face, forming a multi-stage sealing barrier, the expansion action effectively fills the small gap of the connecting position, compensates the processing and assembly error, significantly improves the air tightness of the interface, and prevents high-purity process gas leakage or external pollutants from entering.

[0061] For details, please refer to Figure 1 The outer surfaces of the two connecting sleeves 1 are fixedly connected with the connecting rotating sleeves 29 which are operated by screwing.

[0062] In this embodiment: in order to facilitate the operator or automatic equipment to align, screw and disassemble the two connecting sleeves 1, the connecting rotating sleeves 29 are fixedly connected to the outer surfaces of the two connecting sleeves 1, the connecting rotating sleeves 29 are annular sleeve structures, are fixed to the outer periphery of the connecting sleeve 1, and are provided with anti-skid lines or concave-convex structures on the outer surfaces to increase the friction force, so as to be convenient for manual holding or using tools to clamp.

[0063] Embodiment 2: another aspect of the present application also provides a use method of the dispersion gas assembly for semiconductors, comprising:

[0064] S1, the butt joint ends of the first joint unit and the second joint unit are axially aligned, the fixed threaded sleeve 14 is inserted into the fixed threaded groove 13 on the opposite side, the connecting rotating sleeve 29 is rotated, and the threads are gradually screwed. This process completes the preliminary axial alignment of the two assemblies.

[0065] S2, during the process of screwing, the end faces of the two push-resistance rods 9 contact and extrude each other, jointly pushing the two blocking pistons 8 to compress the respective blocking springs 11 and slide backward. When the rear limiting ring 10 abuts against the blocking support ring 2, the piston stops moving backward, at this time, the ventilation opening 7 is completely aligned with the ventilation hole 3, and the gas passage is opened. At the same time, the backward movement of the blocking piston 8 drives the synchronous movement of the sliding extrusion plate 30 thereon. The sliding extrusion plate 30 presses the extrusion ring 18, pushes the inward sliding rod 17 and the booster plate 19 to move into the hydraulic tank 15, compresses the first reset spring 20 and extrudes the hydraulic oil. The pressure of the hydraulic oil rises suddenly, forcing the booster sealing rubber 28 to expand outward, tightly adhering to the inner wall of the butt joint interface and the second joint unit, forming the first dynamic and adaptive strong seal.

[0066] S3, after the initial connection is completed, the rotating assembly is rotated, so that the bolt through hole 23 on the fixed outer flange 22 of the two joint units is aligned with the fixed threaded hole 24 on the fixed inner flange 21 on the opposite side. The fixed bolt is inserted and tightened. During this process, when the bolt is screwed into the fixed threaded hole 24, the end of the bolt presses downward on the booster piston 26, causing it to move downward against the elastic force of the second reset spring 27. The downward movement of the booster piston 26 further compresses the oil in the hydraulic system, causing the pressure in the hydraulic tank 15 to increase significantly for the second time. This pressure is transmitted to the booster sealing rubber 28 through the hydraulic oil, causing the sealing force of the booster sealing rubber 28 to be enhanced twice based on the initial expansion, forming a reliable final sealing state.

[0067] S4, when the first joint unit and the second joint unit need to be disconnected, a tool is used to remove the fixed bolt connecting the two fixed outer flanges 22. As the bolt is withdrawn, the pressure on the booster piston 26 is removed, the second reset spring 27 pushes it to reset, and the second pressure boosting effect of the hydraulic system is removed, and the sealing force falls to the first level of sealing.

[0068] S5, the connecting rotating sleeve 29 is rotated in reverse, so that the fixed threaded sleeve 14 is rotated out of the fixed threaded groove 13. The two connecting sleeves 1 begin to separate axially. At the moment when the axial pressure between the push-resistance rods 9 is removed, the blocking springs 11 on both sides quickly release energy, pushing the respective blocking pistons 8 to reset forward at high speed, and the front end face of the blocking piston 8 re-tightly blocks the ventilation opening 7, realizing the instantaneous and automatic closing of the gas passage, effectively preventing gas leakage. Synchronously, the reset of the blocking piston 8 drives the sliding extrusion plate 30 to disengage the pressure on the extrusion ring 18. The first reset spring 20 then pushes the booster plate 19 and the inward sliding rod 17 to reset, and the pressure in the hydraulic system is quickly released. The booster sealing rubber 28 shrinks under its own elastic force, returns to its original state, and detaches from the tight contact with the butt joint interface.

[0069] Finally, it should be noted that the above is only the preferred embodiment of the present application, and is not intended to limit the present application, although the foregoing embodiments of the present application are described in detail, for those skilled in the art, it still can be modified to the technical solution recorded in the foregoing embodiments, or equivalent replacement of some technical features. Any modification, equivalent replacement, improvement, etc. within the spirit and principles of the present application shall be included in the protection scope of the present application.

Claims

1. A semiconductor diffused gas assembly, characterized in that: The first joint unit and the second joint unit, which can be axially connected and separated from each other, are used for connecting external gas pipelines; The first joint unit and the second joint unit are symmetrical in structure and each comprises a connecting sleeve (1) and a sealing assembly arranged inside the connecting sleeve (1); The connecting sleeve (1) is provided with a ventilation opening (7) at the end of the connecting end, and the circumferential inner wall of the ventilation opening (7) is provided with an annular sealing groove (6); The sealing assembly comprises a sealing support ring (2), a sealing piston (8), a pushing rod (9), a rear displacement limiting ring (10) and a sealing spring (11); the sealing support ring (2) is fixedly connected to the circumferential inner wall of the sealing groove (6), and the sealing groove (6) is in communication with the ventilation hole (3); the sealing piston (8) is slidingly connected in the sealing groove (6) and is used for sealing or opening the ventilation opening (7); the pushing rod (9) is fixedly connected to the inner side of the sealing piston (8); the rear displacement limiting ring (10) is fixedly connected to the sealing piston (8) and is used for limiting the maximum rear displacement stroke of the sealing piston (8); the sealing spring (11) is arranged between the sealing piston (8) and the sealing support ring (2) and provides an elastic force for returning the sealing piston (8) to the connecting end; When the first joint unit and the second joint unit are axially inserted into each other, the ends of the pushing rods (9) on both sides are in contact and are extruded, which drives the sealing pistons (8) on both sides to move backward against the elastic force of the sealing springs (11) until the rear displacement limiting rings (10) abut against the sealing support rings (2), at which time the ventilation openings (7) are in communication with the ventilation holes (3) and the gas passage is opened; The first joint unit and the second joint unit further comprise a hydraulic linkage sealing system for enhancing the sealing effect in the connected state, and the hydraulic linkage sealing system comprises a hydraulic groove (15) arranged inside the connecting sleeve (1), hydraulic oil arranged in the hydraulic groove (15) and a pressurized sealing rubber (28) arranged on the inner wall of the connecting end of the connecting sleeve (1); The circumferential outer surface of the plugging piston (8) is fixedly connected with a sliding extrusion plate (30), and a hydraulic trigger mechanism linked with the sliding extrusion plate (30) is slidingly connected in the connecting sleeve (1); when the plugging piston (8) moves backward due to butt joint, the hydraulic trigger mechanism is driven to act by the sliding extrusion plate (30) to compress the hydraulic oil in the hydraulic groove (15), so that the pressure expansion of the pressure sealing rubber (28) is pressed and tightly adheres to the butt joint interface; the hydraulic trigger mechanism comprises an inward sliding rod (17) slidingly connected in an extrusion groove (16) formed in the connecting sleeve (1), one end of the inward sliding rod (17) is fixedly connected with an extrusion ring (18) in contact with the sliding extrusion plate (30), and the other end of the inward sliding rod (17) extends into the hydraulic groove (15) and is fixedly connected with a pressure plate (19); a first return spring (20) is further arranged in the hydraulic groove (15), one end of the first return spring (20) is connected with the pressure plate (19), and the other end of the first return spring (20) is connected with the inner wall of the hydraulic groove (15).

2. A diffused gas assembly for a semiconductor as defined in claim 1, wherein: The circumferential outer surface of the connecting sleeve (1) is fixedly connected with a fixed inner flange (21), and a fixed threaded hole (24) is formed in the fixed inner flange (21); the butt joint end of the connecting sleeve (1) is further fixedly connected with a fixed outer flange (22), and a bolt through hole (23) corresponding in position to the fixed threaded hole (24) is formed in the fixed outer flange (22).

3. A diffused gas assembly for a semiconductor as defined in claim 2, wherein: The first joint unit and the second joint unit further comprise a secondary pressure boosting mechanism, the secondary pressure boosting mechanism comprises a hydraulic pressure boosting groove (25) formed at the bottom of the fixed threaded hole (24) and communicating with the hydraulic groove (15), a pressure boosting piston (26) slidingly arranged in the hydraulic pressure boosting groove (25), and a second return spring (27) arranged between the bottom of the pressure boosting piston (26) and the bottom wall of the hydraulic pressure boosting groove (25); When the fixed bolt passes through the bolt through hole (23) and is screwed into the fixed threaded hole (24), the end of the bolt presses the pressure boosting piston (26) to move downward, compresses the second return spring (27), and thus continues to increase the oil pressure in the hydraulic groove (15).

4. A diffused gas assembly for a semiconductor as defined in claim 1, wherein: The plugging support ring (2) is provided with a limiting sliding groove (4) at one side end facing the plugging piston (8), and the corresponding end of the plugging piston (8) is fixedly connected with a limiting sliding block (5) which can slide in the limiting sliding groove (4).

5. A diffused gas assembly for a semiconductor as defined in claim 4, wherein: The cross sections of the limiting sliding block (5) and the limiting sliding groove (4) are both oval, for limiting the circumferential rotation of the plugging piston (8).

6. A diffused gas assembly for a semiconductor as defined in claim 5, wherein: After the limiting sliding block (5) slides through the limiting sliding groove (4), a forward limiting plate (12) is fixedly connected, for limiting the maximum forward stroke of the plugging piston (8) under the action of the plugging spring (11).

7. A diffused gas assembly for a semiconductor as defined in claim 1, wherein: The butt joint end of the connecting sleeve (1) in the first joint unit is fixedly connected with a fixed threaded sleeve (14), and the inner wall of the butt joint end of the connecting sleeve (1) in the second joint unit is provided with a fixed threaded groove (13) matched with the fixed threaded sleeve (14), and the initial axial connection and pre-tightening of the first joint unit and the second joint unit are realized through the screwing of the fixed threaded sleeve (14) and the fixed threaded groove (13).

8. A diffused gas assembly for a semiconductor as defined in claim 4, wherein: The fixed outer flanges (22) of the two connecting sleeves (1) are arranged in a staggered manner to ensure that they do not interfere with each other during the rotating butt joint process.

9. The diffused gas package for a semiconductor as defined in Claim 1 wherein: The outer surfaces of the two connecting sleeves (1) are fixedly connected with connecting rotating sleeves (29) for screwing operation.

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