Front open type interface mechanical unit device of semiconductor process equipment

Abstract

The invention relates to the technical field of semiconductor process equipment, and discloses a front opening type interface mechanical unit device of semiconductor process equipment, which comprises a door opening unit, the door opening unit comprises an outer frame and a fourth extraction opening connected to the outer frame, one side of the outer frame is connected with a fifth flexible sealing element, and the other side of the outer frame is connected with a second flexible sealing element. The other end of the fifth flexible sealing piece is connected with an inner frame, one end of the inner frame is connected with a first guide shaft and is slidably installed on the outer frame, the other end of the inner frame is connected with a frame driving mechanism and is fixedly installed on the outer frame, and the inner portion of the inner frame is connected with a sixth flexible sealing piece. The other end of the sixth flexible sealing piece is connected with an unlocking plate; the problems that in the prior art, particles generated in the working process of a front open type interface mechanical unit are difficult to effectively control, and an FOUP inner cavity and a process cavity can be polluted are solved.

Description

Technical Field

[0001] This invention relates to the field of semiconductor process equipment technology, and more specifically to a front-opening interface mechanical unit device for semiconductor process equipment. Background Technology

[0002] Front-opening interface mechanical standard (FIMS) is an important component of the transfer system in semiconductor process equipment and vertical thermal processing equipment. Currently, on 11-inch semiconductor production lines, front-opening wafer cassettes (FOUPs) are widely used as containers for wafer transfer and temporary storage. The role of FIMS is to open the FOUP, allowing wafers to be transferred between the FOUP and the process chamber of the semiconductor process equipment (usually a vertical furnace) under clean environmental control.

[0003] With the advancement of semiconductor manufacturing processes, the cleanliness requirements for the internal environment of process equipment are becoming increasingly stringent. The cleanliness of this internal environment is one of the core factors determining chip performance, yield, and reliability. Because chip manufacturing involves processes with nanometer-level precision, any tiny particulate contaminants can lead to decreased chip yield, reduced performance, or even render the chip unusable.

[0004] In current technologies, particle control in FIMS is difficult to meet the increasingly high cleanliness requirements of process equipment. How to effectively reduce particle contamination in FIMS is an urgent problem to be solved in the semiconductor industry.

[0005] During operation, the FIMS (Firmware Analyzer System) needs to fix, open, and close the FOUP (Front-End Unit) to ensure the cleanest possible transfer of the wafer between the FOUP and the process chamber. The interior of the FOUP and the process chamber are generally considered clean. Existing technologies or products typically contain moving parts such as cylinders, linear guides, and linear bearings. The combined movement of these moving parts and mechanical components enables the FIMS to unlock, open, traverse, and seal the FOUP. Inevitably, these moving parts generate tiny particles due to friction during operation, which gradually disperse into the surrounding gaseous environment.

[0006] When the FIMS unlocks or opens the FOUP, the particulate-rich gas environment within the FIMS becomes connected to the interior of the FOUP. This causes particles from the FIMS gas environment to diffuse into the FOUP, resulting in wafer contamination. Similarly, when the FIMS completes the unlocking and opening process and prepares to move laterally, the FIMS cavity and partitions need to separate by a certain distance. At this point, the particulate-rich gas environment can also connect with the process chamber of the equipment, causing particles to diffuse into the process chamber and again contaminating the wafer. Summary of the Invention

[0007] To address the problem that particles generated during operation by the front-opening interface mechanical unit in the prior art are difficult to control and will contaminate the FOUP cavity and process chamber, the present invention provides a front-opening interface mechanical unit device for semiconductor process equipment. The present invention is achieved through the following technical solution.

[0008] A front-opening interface mechanical unit device for semiconductor process equipment includes an opening unit. The opening unit includes an outer frame and a fifth flexible seal connected to one side of the outer frame. The other end of the fifth flexible seal is connected to an inner frame. One end of the inner frame is connected to a first guide shaft and is slidably mounted on the outer frame. The other end of the inner frame is connected to a frame drive mechanism and is fixedly mounted on the outer frame. A sixth flexible seal is connected inside the inner frame, and the other end of the sixth flexible seal is connected to an unlocking plate.

[0009] As a preferred embodiment of the present invention, it further includes a fully sealed transverse movement drive unit, the fully sealed transverse movement drive unit including a drive base and a drive connecting plate connected to the drive base, and a transverse movement guide mechanism is provided inside the drive base. The transverse movement drive mechanism is installed inside the drive base and is fixedly connected to the drive connecting plate. A first flexible seal is connected to one side of the drive connecting plate and a second flexible seal is fixedly connected to the other side of the drive connecting plate.

[0010] As a preferred embodiment of the present invention, it further includes a fully sealed transverse guide unit, which includes a guide base and a guide connecting plate connected to the guide base. An auxiliary guide mechanism is provided inside the guide base. A third flexible seal is fixedly connected to one end of the guide connecting plate, and a fourth flexible seal is fixedly connected to the other end of the guide connecting plate.

[0011] As a preferred embodiment of the present invention, a fourth air extraction port is fixedly provided on the outer frame to control the connection between the interior and exterior spaces of the outer frame.

[0012] As a preferred embodiment of the present invention, the fifth flexible seal is provided on both the upper and lower sides of the inner frame, and the outer frame, the inner frame and the fifth flexible seal cooperate to form the inner cavity of the door opening mechanism.

[0013] As a preferred embodiment of the present invention, the sixth flexible seal is provided on both the upper and lower sides of the unlocking plate, and the sixth flexible seal cooperates with the inner frame and the unlocking plate to form a sealed space.

[0014] As a preferred embodiment of the present invention, one end of the drive base is connected to a first air extraction port, which connects the interior of the drive base with the external space. One end of the guide base is connected to a second air extraction port, which connects the interior of the guide base with the external space.

[0015] As a preferred embodiment of the present invention, a ventilation hole is provided in the middle area of ​​the inner frame to ensure air communication between the left and right sides of the inner frame.

[0016] As a preferred embodiment of the present invention, the two ends of the drive connecting plate are respectively fixedly connected to a first flexible seal and a second flexible seal, and the other ends of the first flexible seal and the second flexible seal are both fixedly connected to the drive base. The guide connecting plate is fixedly connected to a third flexible seal and a fourth flexible seal at both ends, and the other ends of the third flexible seal and the fourth flexible seal are fixedly connected to the guide base.

[0017] As a preferred embodiment of the present invention, it further includes a substrate unit, the substrate unit including a mounting substrate, the mounting substrate having a central opening, a nitrogen gas filling port on one side of the central opening, and a third gas extraction port on the other side of the central opening.

[0018] The present invention has the following beneficial effects: 1. The fifth and sixth flexible seals in the door opening unit can extend and retract along the direction of movement, providing a seal without hindering the movement of the connected components at both ends. This creates a sealed space within the door opening unit, consisting of a cover plate, side frame, inner frame, fifth flexible seal, unlocking plate, and sixth flexible seal, preventing particles generated by internal moving components from spreading to the outside.

[0019] 2. A fourth air extraction port is provided on the door opening unit to extract air from the inner cavity of the door opening mechanism in the door opening unit, remove the internal particles, reduce the internal particle concentration, and further reduce the particle contamination of the FOUP inner cavity and process chamber by the door opening unit.

[0020] 3. By configuring the fully sealed transverse drive unit, the presence of the first and second flexible seals ensures that its inner cavity becomes a sealed space without affecting the transverse movement of the mechanism. This prevents particles generated during movement from spreading outside the inner cavity. Furthermore, the first vent in the fully sealed transverse drive unit evacuates the inner cavity, removing internal particles and further reducing contamination of the process chamber by particles generated within the fully sealed transverse drive unit.

[0021] 4. With the fully sealed transverse guide unit, the presence of the third and fourth flexible seals makes its inner cavity a sealed space and does not affect the transverse movement of the mechanism. In this way, the particles generated in the inner cavity during the movement will not diffuse to the outside of the inner cavity. At the same time, the second air extraction port can extract air from the inner cavity to remove the internal particles, further reducing the contamination of the process chamber by the particles generated inside the fully sealed transverse guide unit.

[0022] 5. In critical states of the device, such as transitional positions during operation, the internal cleanliness can still be effectively maintained and particles can be prevented from leaking out through the continuous sealing of the flexible seal and the continuous action of the air extraction port. Attached Figure Description

[0023] To more clearly illustrate the technical solution of the present invention, the accompanying drawings used in the description of the specific embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0024] Figure 1 : A schematic diagram of the overall structure of this invention; Figure 2 : A schematic diagram of the structure in this invention where the door opening unit moves and opens; Figure 3 : A schematic diagram of the overall cross-sectional structure in this invention; Figure 4 : A cross-sectional structural diagram of the FOUP unit in this invention; Figure 5 : A cross-sectional structural diagram of the door opening unit in this invention; Figure 6 : A schematic diagram of the fully sealed transverse drive unit in this invention; Figure 7 : A schematic diagram of the structure of the fully sealed transverse guide unit in this invention; Figure 8 : A cross-sectional structural diagram of the first movement stage of the door opening unit in this invention; Figure 9 : A cross-sectional structural diagram of the second movement stage of the door opening unit in this invention; Figure 10 : A cross-sectional structural diagram of the third movement stage of the door opening unit in this invention; Figure 11 : A cross-sectional structural diagram of the fourth movement stage of the door opening unit in this invention.

[0025] The attached figures are labeled as follows: 10. FOUP unit; 11. FOUP outer shell; 12. FOUP inner cavity; 13. FOUP door panel; 20. Door opening unit; 21. Outer frame; 22. Fourth air extraction port; 23. Inner frame; 24. First guide shaft; 25. Frame drive mechanism; 26. Fifth flexible seal; 27. Unlock plate; 28. Sixth flexible seal; 29. ​​Second guide shaft; 210. Unlock drive mechanism; 211. Lock / unlock component; 212. Door opening mechanism inner cavity; 30. Fully sealed transverse drive unit; 31. Drive base; 32. Drive connecting plate; 33. Transverse guide mechanism; 34. Transverse drive mechanism; 35. First flexible seal; 36. Second flexible seal; 37. First air extraction port; 40. Fully sealed transverse guide unit; 41. Guide base; 42. Guide connecting plate; 43. Auxiliary guide mechanism; 44. Third flexible seal; 45. Fourth flexible seal; 46. Second air extraction port; 50. Base plate unit; 51. Mounting base plate; 52. Center opening; 53. Nitrogen filling port; 54. Third air extraction port. Detailed Implementation

[0026] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0027] Example 1 Reference Figure 1 - Figure 5 As shown, this is the first embodiment of the present invention, which provides a front-opening interface mechanical unit device for semiconductor process equipment, including a FOUP unit 10, a door opening unit 20, a fully sealed transverse drive unit 30, a fully sealed transverse guide unit 40, and a substrate unit 50. The FOUP unit 10 includes a FOUP outer shell 11 and a FOUP inner cavity 12 opened inside the FOUP outer shell 11. A FOUP door panel 13 is provided inside the FOUP inner cavity 12. The substrate unit 50 includes a mounting substrate 51. A central opening 52 is opened on the mounting substrate 51. A nitrogen gas filling port 53 is opened on one side of the central opening 52, and a third gas extraction port 54 is opened on the other side of the central opening 52. The door opening unit 20 includes an outer frame 21 and a fourth air extraction port 22 connected to the outer frame 21. A fifth flexible seal 26 is connected to one side of the outer frame 21, and an inner frame 23 is connected to the other end of the fifth flexible seal 26. A first guide shaft 24 is connected to one end of the inner frame 23 and is slidably installed on the outer frame 21. A frame drive mechanism 25 is connected to the other end of the inner frame 23 and is fixedly installed on the outer frame 21. A sixth flexible seal 28 is connected inside the inner frame 23, and an unlocking plate 27 is connected to the other end of the sixth flexible seal 28. A second guide shaft 29 is fixedly connected to the unlocking plate 27 and is slidably connected to the inner frame 23. The second guide shaft 29 is also provided on both the upper and lower sides of the unlocking plate 27. A switch lock component 211 is also fixedly connected to the middle position of the unlocking plate 27. The switch lock component 211 is used to cooperate with the FOUP door panel 13. An unlocking drive mechanism 210 is installed on the inner frame 23, and one end of the unlocking drive mechanism 210 is fixedly connected to the unlocking plate 27. The unlocking drive mechanism 210 can drive the unlocking plate 27 to move, thereby driving the switch lock component 211 to move and enabling the switch lock component 211 to cooperate with the FOUP door panel 13.

[0028] The upper and lower ends of the outer frame 21 are fixed to the fully sealed transverse drive unit 30 and the fully sealed transverse guide unit 40 by bolts, thereby installing the door opening unit 20 as a whole on the mounting base plate 51 and located on one side of the central opening 52; in addition to bolt connection, other existing technologies can also be used to fix the outer frame 21. The inner frame 23 is fixedly installed on one side of the outer frame 21 and can move on one side of the outer frame 21. Meanwhile, the unlocking plate 27 is installed inside the inner frame 23 and can move within the inner frame 23. The inner cavity 212 of the door opening mechanism is formed between the outer frame 21 and the inner frame 23.

[0029] The fourth air extraction port 22 is fixedly connected to one side of the outer frame 21, which can connect the inner cavity 212 of the door opening mechanism with the outside.

[0030] A vent is provided in the middle area of ​​the inner frame 23 to ensure air communication between the left and right sides of the inner frame 23. The two ends of the fifth flexible seal 26 are fixedly connected to the outer frame 21 and the inner frame 23 respectively. At the same time, the frame drive mechanism 25 is fixedly connected to the outer frame 21 by bolts or other connection methods. The frame drive mechanism 25 is then fixedly connected to the inner frame 23 by bolts or other connection methods. On the other side of the inner frame 23, the first guide shaft 24 is fixedly connected by bolts or other connection methods, and the first guide shaft 24 is slidably connected to the outer frame 21. The outer frame 21 and the inner frame 23 are fixedly connected together through these structural arrangements.

[0031] Among them, the two ends of the sixth flexible seal 28 are fixedly connected to the inner frame 23 and the unlocking plate 27 respectively, the second guide shaft 29 is symmetrically arranged on the unlocking plate 27, and the second guide shaft 29 is limited to slide on the inner frame 23. Meanwhile, the second guide shaft 29 is fixedly connected to the unlocking plate 27 by bolts or other connection methods. The unlocking drive mechanism 210 is set on the inner frame 23, and one end of the unlocking drive mechanism 210 is fixedly connected to the unlocking plate 27 by bolts or other connection methods. The unlocking drive mechanism 210 can drive the unlocking plate 27 to move. The switch lock component 211 is fixedly set on the unlocking plate 27, and a connector head is provided at one end of the switch lock component 211 to be fixedly connected to the FOUP door panel 13. This facilitates the connection between the switch lock component 211 and the FOUP door panel 13 when the switch lock component 211 moves and comes into contact with the FOUP door panel 13. After that, the movement of the switch lock component 211 can drive the FOUP door panel 13 to move synchronously.

[0032] Example 2 Reference Figure 1 - Figure 2 and Figure 6 - Figure 7 As shown, this is the second embodiment of the present invention. Based on the first embodiment, the second embodiment is further improved in that: the fully sealed transverse drive unit 30 includes a drive base 31 and a drive connecting plate 32 connected to the drive base 31. The drive base 31 is provided with a transverse guide mechanism 33 and a transverse drive mechanism 34 is installed inside the drive base 31. The transverse drive mechanism 34 is fixedly connected to the drive connecting plate 32. A first flexible seal 35 is connected to one side of the drive connecting plate 32 and a second flexible seal 36 is fixedly connected to the other side of the drive connecting plate 32. A first air extraction port 37 is connected to one end of the drive base 31. The drive connecting plate 32 has a first flexible seal 35 and a second flexible seal 36 fixedly connected to both ends, and the other ends of the first flexible seal 35 and the second flexible seal 36 are fixedly connected to the drive base 31. The drive connecting plate 32 is fixedly connected to the transverse drive mechanism 34 by bolts or other connection methods. The movement of the transverse drive mechanism 34 can drive the drive connecting plate 32 to move. At the same time, the transverse drive mechanism 34 is limited to move on the transverse guide mechanism 33. The movement of the transverse drive mechanism 34 is restricted by the transverse guide mechanism 33. Meanwhile, one side of the drive connecting plate 32 is fixedly connected to the outer frame 21 by bolts or other connection methods. The door opening unit 20 is installed on the fully sealed transverse drive unit 30. The movement of the fully sealed transverse drive unit 30 can drive the door opening unit 20 to move. By utilizing the connection between the drive base 31, the drive connecting plate 32, the first flexible seal 35, and the second flexible seal 36, a sealed space is formed inside the drive base 31. At the same time, due to the arrangement of the first flexible seal 35 and the second flexible seal 36, the sealing effect in this space can be maintained when the drive connecting plate 32 moves.

[0033] The fully sealed transverse guide unit 40 includes a guide base 41 and a guide connecting plate 42 connected to the guide base 41. An auxiliary guide mechanism 43 is provided inside the guide base 41. A third flexible seal 44 is fixedly connected to one end of the guide connecting plate 42, and a fourth flexible seal 45 is fixedly connected to the other end of the guide connecting plate 42. A second air extraction port 46 is connected to one end of the guide base 41. The guide connecting plate 42 is fixedly connected to a third flexible seal 44 and a fourth flexible seal 45 at both ends, and the other ends of the third flexible seal 44 and the fourth flexible seal 45 are fixedly connected to the guide base 41. The guide connecting plate 42 is fixed to the auxiliary guide mechanism 43 by bolts or other connection methods, and the movement of the auxiliary guide mechanism 43 is used to restrict the movement of the guide connecting plate 42. At the same time, one side of the guide connecting plate 42 is fixedly connected to the outer frame 21 by bolts or other connection methods. With the connection between the fully sealed transverse drive unit 30 and the other side of the outer frame 21, the movement of the door opening unit 20 can be driven more smoothly. There is also a sealed space inside the guide base 41. The setting of the third flexible seal 44 and the fourth flexible seal 45 can ensure that the movement of the guide connecting plate 42 will not affect the sealing effect of the space.

[0034] Example 3 Reference Figure 3 and Figure 8 - Figure 11As shown, this is the third embodiment of the present invention. Based on embodiments 1 and 2, this embodiment provides the motion process of the device in its working state: as follows... Figure 8 As shown, the frame drive mechanism 25 pushes the inner frame 23 to move in the opposite direction to the unlocking direction until the inner frame 23 is in contact with the mounting base plate 51. At this time, the central opening 52 forms a sealed space. High-purity nitrogen is then introduced through the nitrogen filling port 53, while the third exhaust port 54 performs exhaust to remove particles present in the sealed space of the central opening 52. The area inside the central opening 52 can then be considered a clean area.

[0035] The nitrogen filling port 53 and the third exhaust port 54 are specifically located on the mounting base plate 51. This is just one example. Depending on the design, they can also be located on other parts. They serve the same purpose of filling the central opening 52 and the FOUP cavity 12 with high-purity nitrogen and removing particles.

[0036] The inner cavity 212 of the door opening mechanism is a sealed space surrounded by the outer frame 21, the inner frame 23, the fifth flexible seal 26, the unlocking plate 27, and the sixth flexible seal 28. Particles inside the inner cavity 212 will not diffuse to the outside. At the same time, the fourth exhaust port 22 evacuates air from the inner cavity 212 of the door opening mechanism, removing the tiny particles generated by the relative motion and friction of various driving and guiding components. At this time, the inner cavity 212 of the door opening mechanism can be considered a clean area, greatly reducing the contamination of the wafer by particles inside the inner cavity 212.

[0037] The fifth flexible seal 26 and the sixth flexible seal 28 are flexible components that can extend and retract along the direction of movement, providing a seal without hindering the movement of the components connected to their ends. Flexible components include bellows seals or other parts with similar functions.

[0038] The fourth air extraction port 22 is located on the outer frame 21, and is only one example. Depending on the design, it can also be located on other parts to serve the same purpose of removing particles from the inner cavity 212 of the door opening mechanism.

[0039] like Figure 9 As shown, the unlocking drive mechanism 210 pushes the unlocking plate 27 to move in the opposite direction of the unlocking direction until the unlocking plate 27 is in contact with the FOUP door panel 13, and the lock and unlock component 211 opens the FOUP door panel 13.

[0040] like Figure 10 As shown, the unlocking drive mechanism 210 pulls the unlocking plate 27 to move along the unlocking direction, and the unlocking plate 27 pulls open the FOUP door panel 13. At this time, the central opening 52 is connected to the FOUP inner cavity 12. Since the central opening 52 has been filled with nitrogen and then evacuated, it is considered a clean area and will not cause particulate contamination to the FOUP inner cavity 12.

[0041] like Figure 11 As shown, the unlocking drive mechanism 210 continues to pull the unlocking plate 27 along the unlocking direction until the lock / unlock component 211 is in contact with the inner frame 23, and the FOUP door panel 13 is fully opened. At this time, high-purity nitrogen is injected through the nitrogen filling port 53, and at the same time, the third exhaust port 54 evacuates the air, removing any particles that may be present in the central opening 52 and the FOUP inner cavity 12. The FOUP inner cavity 12 is then filled with high-purity nitrogen, and the area formed by the FOUP inner cavity 12 and the central opening 52 can be considered a clean area.

[0042] The inner cavity of the fully sealed transverse drive unit 30 is a closed space, and the particles generated during the movement of the transverse guide mechanism 33 and the transverse drive mechanism 34 will not diffuse to the outside of the inner cavity. At the same time, the first air extraction port 37 extracts air from the inner cavity to remove internal particles, further reducing the contamination of the process chamber by particles generated inside the fully sealed transverse drive unit 30.

[0043] The function of the fully sealed transverse drive unit 30 is to drive the door opening unit 20 to move laterally, so that the FOUP door panel 13 is fully opened, making room for wafer transfer. In this embodiment, a transverse guide mechanism 33 is provided. If the transverse drive mechanism 34 also serves as a guide, the transverse drive mechanism 34 can be omitted.

[0044] The inner cavity of the fully sealed transverse guide unit 40 is a closed space, so particles generated during the movement of the auxiliary guide mechanism 43 will not diffuse to the outside of the inner cavity. At the same time, the second air extraction port 46 extracts air from the inner cavity to remove internal particles, further reducing the contamination of the process chamber by particles generated inside the fully sealed transverse guide unit 40.

[0045] The fully sealed lateral guide unit 40 drags the door opening unit 20 along the lateral direction. At this time, the FOUP door panel 13 is fully opened, and the FOUP inner cavity 12 is connected to the process chamber. This achieves the state where the wafer can be transported to the process chamber. The process chamber is a clean area. This process will not cause particulate contamination of the wafer.

[0046] In this embodiment, the lateral movement direction of the door opening unit 20 is horizontal. When the door opening unit 20 moves laterally in other directions, it can still provide clearance space for the wafer to be transferred from the FOUP cavity 12 to the process chamber. When the door opening unit 20 moves laterally in other directions, it still falls within the protection scope of this embodiment.

[0047] Finally, the closing process is the reverse of the process described above. Its sealing state and particle control remain unchanged, and it will not cause particle contamination to the wafer and process chamber.

[0048] The preferred embodiments of the present invention disclosed above are merely illustrative of the invention. These preferred embodiments do not exhaustively describe all details, nor do they limit the invention to any specific implementation. Clearly, many modifications and variations can be made based on the content of this specification. This specification selects and specifically describes these embodiments to better explain the principles and practical applications of the invention, thereby enabling those skilled in the art to better understand and utilize the invention. The invention is limited only by the claims and their full scope and equivalents.

Claims

1. A front-opening interface mechanical unit device for semiconductor process equipment, characterized in that: The device includes a door opening unit (20), which includes an outer frame (21) and a fifth flexible seal (26) connected to one side of the outer frame (21). The other end of the fifth flexible seal (26) is connected to an inner frame (23). One end of the inner frame (23) is connected to a first guide shaft (24) and is slidably mounted on the outer frame (21). The other end of the inner frame (23) is connected to a frame drive mechanism (25) and is fixedly mounted on the outer frame (21). The interior of the inner frame (23) is connected to a sixth flexible seal (28), and the other end of the sixth flexible seal (28) is connected to an unlocking plate (27).

2. The front-opening interface mechanical unit device for semiconductor process equipment according to claim 1, characterized in that: It also includes a fully sealed transverse drive unit (30), which includes a drive base (31) and a drive connecting plate (32) connected to the drive base (31). The drive base (31) is provided with a transverse guide mechanism (33). The drive base (31) is installed with a transverse drive mechanism (34), and the transverse drive mechanism (34) is fixedly connected to the drive connecting plate (32). A first flexible seal (35) is connected to one side of the drive connecting plate (32), and a second flexible seal (36) is fixedly connected to the other side of the drive connecting plate (32).

3. The front-opening interface mechanical unit device for semiconductor process equipment according to claim 1, characterized in that: It also includes a fully sealed transverse guide unit (40), which includes a guide base (41) and a guide connecting plate (42) connected to the guide base (41). An auxiliary guide mechanism (43) is provided inside the guide base (41). A third flexible seal (44) is fixedly connected to one end of the guide connecting plate (42), and a fourth flexible seal (45) is fixedly connected to the other end of the guide connecting plate (42).

4. The front-opening interface mechanical unit device for semiconductor process equipment according to claim 1, characterized in that: A fourth air extraction port (22) is fixedly installed on the outer frame (21) to control the connection between the interior and exterior spaces of the outer frame (21).

5. The front-opening interface mechanical unit device for semiconductor process equipment according to claim 1, characterized in that: The fifth flexible seal (26) is provided on both the upper and lower sides of the inner frame (23), and the outer frame (21) cooperates with the inner frame (23) and the fifth flexible seal (26) to form the inner cavity (212) of the door opening mechanism.

6. The front-opening interface mechanical unit device for semiconductor process equipment according to claim 1, characterized in that: The sixth flexible seal (28) is provided on both the upper and lower sides of the unlocking plate (27), and the sixth flexible seal (28) cooperates with the inner frame (23) and the unlocking plate (27) to form a sealed space.

7. The front-opening interface mechanical unit device for semiconductor process equipment according to claim 2 or 3, characterized in that: One end of the drive base (31) is connected to a first air extraction port (37), which connects the interior of the drive base (31) with the external space; One end of the guide base (41) is connected to a second air extraction port (46), which connects the interior of the guide base (41) with the external space.

8. The front-opening interface mechanical unit device for semiconductor process equipment according to claim 1, characterized in that: The inner frame (23) has ventilation holes in the middle area to ensure air communication between the left and right sides of the inner frame (23).

9. The front-opening interface mechanical unit device for semiconductor process equipment according to claim 2 or 3, characterized in that: The two ends of the drive connecting plate (32) are respectively fixedly connected to a first flexible seal (35) and a second flexible seal (36), and the other ends of the first flexible seal (35) and the second flexible seal (36) are fixedly connected to the drive base (31). The guide connecting plate (42) is fixedly connected to a third flexible seal (44) and a fourth flexible seal (45) at both ends, and the other ends of the third flexible seal (44) and the fourth flexible seal (45) are fixedly connected to the guide base (41).

10. The front-opening interface mechanical unit device for semiconductor process equipment according to claim 1, characterized in that: It also includes a substrate unit (50), which includes a mounting substrate (51), a central opening (52) is provided on the mounting substrate (51), a nitrogen gas filling port (53) is provided on one side of the central opening (52), and a third gas extraction port (54) is provided on the other side of the central opening (52).

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