Single crystal furnace structure and method capable of continuously drawing multiple crystal bars
By designing a dual-chamber structure and rotating support components, the continuous pulling of multiple crystal rods in a single crystal furnace was achieved, solving the problems of cooling and loading waiting in existing technologies, improving production efficiency, reducing energy consumption, and minimizing crystal rod deformation.
Patent Information
- Application Number
- CN202511214401.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-08-28
- Publication Date
- 2025-11-21
AI Technical Summary
In existing single crystal furnaces, cooling and loading operations require waiting during the multi-strand pulling process, resulting in wasted time and energy, and making it impossible to achieve efficient continuous pulling.
The single crystal furnace with a dual-chamber structure is equipped with two control systems, which enable the cooling and loading processes to be carried out separately in the two chambers. The alternating position of the chambers is achieved by rotating the support components, ensuring seamless connection, shortening the overall drawing time and reducing energy consumption.
This technology enables the continuous pulling of multiple crystal rods, reducing waiting time and energy consumption, lowering production costs, and reducing residual stress in the crystal rods during the cooling process, thus reducing bending deformation.
Smart Images
Figure CN120989702A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of monocrystalline silicon production technology, and in particular to a monocrystalline furnace structure and method for continuously pulling multiple crystal rods. Background Technology
[0002] In existing technologies, silicon wafers used to produce semiconductor electronic components such as integrated circuits are mainly manufactured by slicing single-crystal silicon rods pulled using the Czochralski (CZ) method. The Czochralski method involves melting polycrystalline silicon in a quartz crucible to obtain a silicon melt, immersing a single-crystal seed crystal in the silicon melt, and continuously raising and moving the seed crystal away from the surface of the silicon melt, thereby growing a single-crystal silicon rod at the phase interface during the movement. A traditional Czochralski silicon single-crystal furnace includes a main furnace chamber and a secondary furnace chamber. After the crystal is pulled out of the melt in the main furnace chamber, it rises to the secondary furnace chamber for slow cooling until the crystal rod is cooled and removed.
[0003] To reduce costs and improve the efficiency of monocrystalline silicon pulling, many companies are now trying to pull multiple silicon rods in one furnace. Since the equipment adopts a single auxiliary chamber design, the cooling and rod removal of the previous rod and the loading of the next rod must be carried out in the auxiliary chamber. This means that the loading of the next rod can only be carried out after the previous rod has finished cooling and rod removal. During this period, the remaining silicon material in the main chamber needs to be heated to ensure that it is in a molten state. This not only wastes time but also wastes unnecessary energy supply. Summary of the Invention
[0004] In order to solve the technical problems existing in the above-mentioned technologies, it is necessary to provide a single crystal furnace structure that can continuously pull multiple crystal rods.
[0005] A single crystal furnace structure capable of continuously pulling multiple crystal rods includes a main furnace chamber, an auxiliary furnace chamber, and a furnace platform support structure; The furnace platform support structure includes a first support column, a second support column, and a third support column located on the same side of the main furnace chamber; the first support column and the second support column are symmetrically arranged on both sides of the main furnace chamber, and the third support column is arranged between the first support column and the second support column and located on the side of the first support column away from the main furnace chamber, so that the first support column, the second support column, and the third support column form an isosceles triangle distribution; The auxiliary furnace chamber includes a first auxiliary chamber and a second auxiliary chamber. The first auxiliary chamber and the second auxiliary chamber are rotatably mounted on the first support column and the second support column, respectively, so that the first auxiliary chamber and the second auxiliary chamber can be positioned alternately above the main furnace chamber after rotation, and communicate with the inner cavity of the main furnace chamber to form a crystal pulling chamber.
[0006] Preferably, both the first and second support columns are equipped with rotating support components for rotating the first and second auxiliary chambers.
[0007] Preferably, the rotating support component includes a rotating shaft and a swing arm; the rotating shaft is longitudinally rotatably mounted on the first support column or the second support column, one end of the swing arm is connected to the rotating shaft, and the other end of the swing arm is used to fix the first support column or the second support column, so that the swing arm moves in a fan-shaped trajectory around the rotating shaft as the center through the rotation of the rotating shaft, thereby realizing the alternating position change of the first auxiliary chamber and the second auxiliary chamber.
[0008] Preferably, a connecting arm is fixed to the upper part of the main furnace chamber, and one end of the connecting arm is rotatably connected to the rotating shaft.
[0009] Preferably, the upper and lower ends of the rotating shaft are provided with limiting parts that can limit the rotation angle of the rotating shaft to prevent collisions from occurring during the operation of the first auxiliary chamber and the second auxiliary chamber.
[0010] Preferably, the first support column, the second support column, and the third support column are fixed to each other by connecting rods.
[0011] Preferably, isolation valves are provided at the lower ends of both the first and second auxiliary chambers.
[0012] It is also necessary to provide a method for continuously pulling multiple crystal rods.
[0013] A method for continuously pulling multiple crystal rods, using the single crystal furnace structure described above, includes the following steps: Step S1: When the main furnace chamber meets the process requirements and the first auxiliary chamber is loaded, rotate the first auxiliary chamber above the main furnace chamber so that the first auxiliary chamber is connected to the main furnace chamber to pull the first crystal rod, while the second auxiliary chamber is loaded with the second crystal rod. Step S2: After the first crystal rod is pulled, the second auxiliary chamber has been loaded. Separate the first auxiliary chamber from the main furnace chamber, close the isolation valve on the first auxiliary chamber, and the first crystal rod enters the cooling stage. Rotate the second auxiliary chamber above the main furnace chamber so that the second auxiliary chamber is connected to the main furnace chamber to pull the second crystal rod. Step S3: During the pulling of the second crystal rod, the first auxiliary chamber sequentially completes the cooling, rod removal, and loading of the third crystal rod. Step S4: After the second crystal rod is pulled, the second auxiliary chamber is separated from the main furnace chamber, the isolation valve on the second auxiliary chamber is closed, the second crystal rod enters the cooling stage, the first auxiliary chamber is rotated to the top of the main furnace chamber, so that the first auxiliary chamber is connected to the main furnace chamber, and the third crystal rod is pulled. Step S5: Repeat steps S1 to S4 above to achieve alternating operation of the first and second auxiliary chambers and continuous pulling of multiple crystal rods.
[0014] Preferably, the isolation valves in the first and second auxiliary chambers are closed during cooling, allowing the crystal rods to cool naturally and stably to room temperature with the furnace.
[0015] Preferably, after the crystal rod is pulled, it is cooled to below 200°C under argon protection using gradient cooling, and then naturally cooled.
[0016] Compared with existing technologies, the single crystal furnace structure and method for continuously pulling multiple crystal rods provided by this invention adopts a dual-chamber structure. The cooling and rod removal processes of the already pulled crystal rods, as well as the loading process for the next pulling cycle, are performed separately in two chambers. Equipped with two separate control systems, each operates independently without interference, achieving seamless time integration, shortening the overall pulling time, avoiding unnecessary power consumption during waiting periods, and significantly reducing the cost of pulling multiple crystal rods. Each chamber is equipped with an isolation valve. Closing the isolation valve during crystal rod cooling ensures stable cooling of the crystal rods within the furnace, reducing residual stress caused by excessive cooling and minimizing bending deformation caused by excessive stress release during subsequent slicing. Considering the increased weight due to the dual-chamber structure, the furnace support structure uses three columns arranged in an isosceles triangle, providing high stability and structural strength. Attached Figure Description
[0017] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0018] Figure 1 This is a schematic diagram of the structure of the present invention.
[0019] Figure 2 For the present invention Figure 1 A top-view structural diagram.
[0020] Figure 3 For the present invention Figure 1 A structural diagram from another angle.
[0021] Figure 4 This is a schematic diagram of the limiting part of the present invention.
[0022] In the figure: Main furnace chamber 01, connecting arm 11, auxiliary furnace chamber 02, first auxiliary chamber 21, second auxiliary chamber 22, furnace platform support structure 03, first support column 31, second support column 32, third support column 33, connecting rod 34, rotating support component 04, rotating shaft 41, swing arm 42, limiting part 05, pressure rod 51, pressure spring 52, arc-shaped guide tube 53, connecting piece 54, sliding end 55, rocker arm 56, guide hole 57, isolation valve 06. Detailed Implementation
[0023] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.
[0024] In the description of this invention, it should be understood that the terms "upper", "middle", "outer", "inner", "lower", etc., which indicate orientation or positional relationship, are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the components or elements referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as limiting this invention.
[0025] Please refer to Figures 1 to 3 In one embodiment, the present invention provides a single crystal furnace structure capable of continuously pulling multiple crystal rods, including a main furnace chamber 01, an auxiliary furnace chamber 02, and a furnace platform support structure 03. The furnace platform support structure 03 includes a first support column 31, a second support column 32, and a third support column 33 located on the same side of the main furnace chamber 01. The first support column 31 and the second support column 32 are symmetrically arranged on both sides of the main furnace chamber 01, and the third support column 33 is located between the first support column 31 and the second support column 32 and on the side of the first support column 31 away from the main furnace chamber 01, so that the first support column 31, the second support column 32, and the third support column 33 form an isosceles triangle distribution; ensuring that the weight borne by both sides of the furnace platform is more balanced, so that the furnace platform has higher stability and structural strength.
[0026] The auxiliary furnace chamber 02 includes a first auxiliary chamber 21 and a second auxiliary chamber 22. The first auxiliary chamber 21 and the second auxiliary chamber 22 are rotatably mounted on the first support column 31 and the second support column 32, respectively, so that the first auxiliary chamber 21 and the second auxiliary chamber 22 can be positioned alternately above the main furnace chamber 01 after rotation, and communicate with the inner cavity of the main furnace chamber 01 to form a crystal pulling chamber. This dual-chamber structure allows the cooling and rod removal processes of the pulled crystal rods, as well as the loading process for the next pulling cycle, to be carried out separately in the two auxiliary chambers. Two separate control systems are provided, each controlling the other without interference, while achieving seamless time integration, shortening the overall pulling time, avoiding unnecessary power consumption during waiting periods, and significantly reducing the cost of pulling multiple crystal rods.
[0027] In one embodiment, both the first support column 31 and the second support column 32 are equipped with rotating support components 04 for rotating the first auxiliary chamber 21 and the second auxiliary chamber 22.
[0028] Specifically, the rotating support component 04 includes a rotating shaft 41 and a swing arm 42. The rotating shaft 41 is longitudinally rotatably mounted on the first support column 31 or the second support column 32. One end of the swing arm 42 is connected to the rotating shaft 41, and the other end of the swing arm 42 is used to fix the first support column 31 or the second support column 32. The rotation of the rotating shaft 41 drives the swing arm 42 to move in a fan-shaped trajectory around the rotating shaft 41, realizing the alternating position change of the first auxiliary chamber 21 and the second auxiliary chamber 22. When the rotating shaft 41 rotates and drives the swing arm 42 to swing, the swing angle is shorter and the rotation angle is smaller compared to the circumferential rotation, saving more energy for the power unit driving the rotating shaft 41. Secondly, due to the smaller swing amplitude, it requires less space. Of course, the rotating shaft 41 can be driven by a drive motor.
[0029] Specifically, a connecting arm 11 is fixed to the upper part of the main furnace chamber 01, and one end of the connecting arm 11 is rotatably connected to the rotating shaft 41. The connecting arm 11 ensures a stable connection between the rotating shaft 41 and the main furnace chamber 01, and also ensures that the rotating shaft 41 and the main furnace chamber 01 have a precise and stable concentric distance, so as to ensure that the load-bearing capacity on both sides of the main furnace chamber 01 is the same.
[0030] Please refer to Figure 4 Specifically, both the upper and lower ends of the rotating shaft 41 are equipped with limiting parts 05 to restrict the rotation angle of the rotating shaft 41, so as to prevent collisions between the first auxiliary chamber 21 and the second auxiliary chamber 22 during operation; at the same time, the weight is distributed to avoid deformation. The two auxiliary chambers have their own bar picking and loading operation areas, which do not affect each other.
[0031] Taking the rotating support component 04 installed on the first column as an example, the limiting part 05 includes a pressure rod 51, a pressure spring 52, and an arc-shaped guide tube 53; the arc-shaped guide tube 53 is fixed on the first column and is concentrically installed with the rotating shaft 41. One end of the arc-shaped guide tube 53 has a guide hole 57, and the other end is closed; the pressure spring 52 is built into the arc-shaped guide tube 53, and one end of the pressure spring 52 is fixed with a connecting piece 54 that can slide back and forth along the inside of the arc-shaped guide tube 53. The connecting piece 54 does not contact the inner wall of the arc-shaped conduit 53; the other end of the compression spring 52 is fixed with a sliding end 55 that can adapt to the inner wall of the arc-shaped conduit 53, and the side wall of the sliding end 55 contacts the inner wall of the arc-shaped conduit 53, so that the sliding end 55 can slide back and forth along the inside of the arc-shaped conduit 53. The pressure rod 51 has an arc-shaped structure and is concentric with the arc-shaped conduit 53. One end of the pressure rod 51 extends into the arc-shaped conduit 53 through the guide hole 57 and is fixedly connected to the connecting piece 54. Correspondingly, a rocker arm 56 is fixed in the radial direction of the rotating shaft 41, and the end of the rocker arm 56 is fixedly connected to the end of the pressure rod 51. When the rotating shaft 41 rotates, it causes the rocker arm 56 to drive the pressure rod 51 to compress the pressure spring 52, causing the sliding end 55 to press the arc-shaped conduit 53 toward the closed end of the arc-shaped conduit 53. During this process, the pressure spring 52 can buffer the inertial movement impact of the entire first auxiliary chamber 21. When it moves to the limit position, the sliding end 55 will contact the closed end of the arc-shaped conduit 53. At this time, the pressure spring 52 will further buffer the inertial impact of the first auxiliary chamber 21, forming a gradual buffer and achieving a limiting effect. When the rotating shaft 41 reverses, the pressure rod 51 will pull the pressure spring 52, causing the sliding end 55 to move along the inner wall of the arc-shaped conduit 53 toward the guide hole 57. During this process, the pressure spring 52 will have a certain stretch, which can effectively buffer the inertial movement impact of the first auxiliary chamber 21.
[0032] In one embodiment, the first support column 31, the second support column 32, and the third support column 33 are fixed to each other by connecting rods 34.
[0033] In one embodiment, isolation valves are provided at the lower ends of both the first sub-chamber 21 and the second sub-chamber 22. Each sub-chamber is equipped with an isolation valve. Closing the isolation valves during crystal ingot cooling can achieve stable cooling of the crystal ingot in the furnace, reduce residual stress caused by excessive cooling, and reduce bending deformation caused by excessive stress release during subsequent slicing.
[0034] In one embodiment, the present invention provides a method for continuously pulling multiple crystal rods, using a single crystal furnace structure capable of continuously pulling multiple crystal rods, comprising the following steps: Step S1: When the main furnace chamber 01 meets the process requirements and the first auxiliary chamber 21 is loaded, rotate the first auxiliary chamber 21 above the main furnace chamber 01 so that the first auxiliary chamber 21 is connected to the main furnace chamber 01 to pull the first crystal rod, while the second auxiliary chamber 22 is loaded with the second crystal rod. Step S2: After the first crystal rod is pulled, the second auxiliary chamber 22 has been loaded. The first auxiliary chamber 21 is separated from the main furnace chamber 01, the isolation valve on the first auxiliary chamber 21 is closed, the first crystal rod enters the cooling stage, the second auxiliary chamber 22 is rotated to the top of the main furnace chamber 01, so that the second auxiliary chamber 22 is connected to the main furnace chamber 01, and the second crystal rod is pulled. Step S3: During the pulling of the second crystal rod, the first auxiliary chamber 21 sequentially completes the cooling, rod removal, and loading of the third crystal rod. Step S4: After the second crystal rod is pulled, the second auxiliary chamber 22 is separated from the main furnace chamber 01, the isolation valve on the second auxiliary chamber 22 is closed, the second crystal rod enters the cooling stage, the first auxiliary chamber 21 is rotated to the top of the main furnace chamber 01, so that the first auxiliary chamber 21 is connected to the main furnace chamber 01, and the third crystal rod is pulled. Step S5: Repeat steps S1 to S4 above to achieve alternating operation of the first auxiliary chamber 21 and the second auxiliary chamber 22, thereby realizing the continuous pulling of multiple crystal rods.
[0035] Preferably, the isolation valves in the first auxiliary chamber 21 and the second auxiliary chamber 22 are closed during cooling, allowing the crystal rods to cool naturally and stably to room temperature with the furnace.
[0036] Preferably, after the crystal rod is pulled, it is cooled to below 200°C under argon protection using gradient cooling, and then naturally cooled.
[0037] The above-disclosed embodiments are merely preferred embodiments of the present invention and should not be construed as limiting the scope of the invention. Those skilled in the art will understand that implementing all or part of the above-described embodiments and making equivalent changes in accordance with the claims of the present invention are still within the scope of the invention.
Claims
1. A single crystal furnace structure capable of continuously pulling multiple crystal rods, characterized in that: Including the main furnace chamber, auxiliary furnace chamber, and furnace platform support structure; The furnace platform support structure includes a first support column, a second support column, and a third support column located on the same side of the main furnace chamber; the first support column and the second support column are symmetrically arranged on both sides of the main furnace chamber, and the third support column is arranged between the first support column and the second support column and located on the side of the first support column away from the main furnace chamber, so that the first support column, the second support column, and the third support column form an isosceles triangle distribution; The auxiliary furnace chamber includes a first auxiliary chamber and a second auxiliary chamber. The first auxiliary chamber and the second auxiliary chamber are rotatably mounted on the first support column and the second support column, respectively, so that the first auxiliary chamber and the second auxiliary chamber can be positioned alternately above the main furnace chamber after rotation, and communicate with the inner cavity of the main furnace chamber to form a crystal pulling chamber.
2. The single crystal furnace structure capable of continuously pulling multiple crystal rods according to claim 1, characterized in that: Both the first and second support columns are equipped with rotating support components that allow the first and second auxiliary chambers to rotate.
3. The single crystal furnace structure capable of continuously pulling multiple crystal rods according to claim 2, characterized in that: The rotating support component includes a rotating shaft and a swing arm; the rotating shaft is longitudinally rotatably mounted on the first support column or the second support column, one end of the swing arm is connected to the rotating shaft, and the other end of the swing arm is used to fix the first support column or the second support column, so that the swing arm can move in a fan-shaped trajectory around the rotating shaft as the center through the rotation of the rotating shaft, thereby realizing the alternating position change of the first auxiliary chamber and the second auxiliary chamber.
4. The single crystal furnace structure capable of continuously pulling multiple crystal rods according to claim 3, characterized in that: A connecting arm is fixed to the upper part of the main furnace chamber, and one end of the connecting arm is rotatably connected to the rotating shaft.
5. The single crystal furnace structure capable of continuously pulling multiple crystal rods according to claim 3 or 4, characterized in that: Both the upper and lower ends of the rotating shaft are provided with limiting parts that can restrict the rotation angle of the rotating shaft to prevent collisions from occurring during the operation of the first and second auxiliary chambers.
6. The single crystal furnace structure capable of continuously pulling multiple crystal rods according to claim 1, characterized in that: The first support column, the second support column, and the third support column are fixed to each other by connecting rods.
7. The single crystal furnace structure capable of continuously pulling multiple crystal rods according to claim 1, characterized in that: Isolation valves are installed at the lower ends of both the first and second auxiliary chambers.
8. A method for continuously pulling multiple crystal rods, comprising pulling crystal rods using the single crystal furnace structure for continuously pulling multiple crystal rods as described in any one of claims 1-7, characterized in that: Includes the following steps, Step S1: When the main furnace chamber meets the process requirements and the first auxiliary chamber is loaded, rotate the first auxiliary chamber above the main furnace chamber so that the first auxiliary chamber is connected to the main furnace chamber to pull the first crystal rod, while the second auxiliary chamber is loaded with the second crystal rod. Step S2: After the first crystal rod is pulled, the second auxiliary chamber has been loaded. Separate the first auxiliary chamber from the main furnace chamber, close the isolation valve on the first auxiliary chamber, and the first crystal rod enters the cooling stage. Rotate the second auxiliary chamber above the main furnace chamber so that the second auxiliary chamber is connected to the main furnace chamber to pull the second crystal rod. Step S3: During the pulling of the second crystal rod, the first auxiliary chamber sequentially completes the cooling, rod removal, and loading of the third crystal rod. Step S4: After the second crystal rod is pulled, the second auxiliary chamber is separated from the main furnace chamber, the isolation valve on the second auxiliary chamber is closed, the second crystal rod enters the cooling stage, the first auxiliary chamber is rotated to the top of the main furnace chamber, so that the first auxiliary chamber is connected to the main furnace chamber, and the third crystal rod is pulled. Step S5: Repeat steps S1 to S4 above to achieve alternating operation of the first and second auxiliary chambers and continuous pulling of multiple crystal rods.
9. The method for continuously pulling multiple crystal rods according to claim 8, characterized in that: During the cooling process, the isolation valves in the first and second auxiliary chambers are closed, allowing the crystal rods to cool naturally and stably to room temperature with the furnace.
10. The method for continuously pulling multiple crystal rods according to claim 9, characterized in that: After the crystal rod is pulled, it is cooled to below 200°C under argon protection using gradient cooling, and then allowed to cool naturally.