Emergency standby device for converting CDA into N2

Abstract

The invention discloses an emergency standby device for converting CDA into N2, and belongs to the field of gas delivery, the emergency standby device comprises a main pipeline, a use end removal pipeline, a compressed air delivery pipeline and a nitrogen delivery pipeline, the use end removal pipeline is communicated with the main pipeline, and the compressed air delivery pipeline and the nitrogen delivery pipeline are respectively communicated with two ends of the main pipeline; a first ball valve, a first one-way valve, a second ball valve, a second one-way valve, a third one-way valve and a pressure regulating valve are sequentially arranged on the main pipeline in the direction from the compressed air conveying pipeline to the nitrogen conveying pipeline. When compressed air in the compressed air conveying pipeline is normally supplied, the compressed air in the compressed air conveying pipeline enters the use end pipeline through the first ball valve and the first one-way valve in sequence; when compressed air supply in the compressed air conveying pipeline fails, nitrogen in the nitrogen conveying pipeline sequentially passes through the pressure regulating valve, the third one-way valve, the second one-way valve and the second ball valve to enter the using end pipeline.

Description

Technical Field

[0001] This invention belongs to the field of gas delivery technology, specifically relating to an emergency backup device for converting CDA to N2. Background Technology

[0002] In pursuit of high reliability, traditional semiconductor factories design backup supply systems for core power sources such as CDA (dry compressed air) and N2 (nitrogen) to prevent supply interruptions caused by factors such as power fluctuations, misoperation, or automatic control malfunctions from affecting workshop production.

[0003] A CDA backup system typically includes a compressor, buffer pressure tank, purity analyzer, and pressure stabilization and delivery device. It is costly to build, has a short emergency supply time, is difficult to control gas quality, and carries a high operational risk. Smaller semiconductor plants, due to cost and space constraints, may even forgo building a CDA backup system altogether. However, semiconductor manufacturing equipment is precision equipment, and the cost of a single uncontrolled downtime is often extremely severe.

[0004] Research indicates that in the semiconductor manufacturing process, nitrogen can be used as a substitute for dry compressed air in most applications, and nitrogen performs better. Therefore, there is an urgent need for an emergency backup device for converting CDA to N2. Summary of the Invention

[0005] To address the aforementioned problems in the existing technology, this invention provides an emergency backup device for CDA to N2 conversion. The technical problem to be solved by this invention is achieved through the following technical solution: In a first aspect, the present invention provides an emergency backup device for CDA to N2 conversion, comprising a main pipeline, a terminal pipeline, a compressed air pipeline, and a nitrogen pipeline, wherein the terminal pipeline is connected to the main pipeline, and the compressed air pipeline and the nitrogen pipeline are respectively connected to both ends of the main pipeline. Along the direction from the compressed air pipeline to the nitrogen pipeline, the main pipeline is sequentially equipped with a first ball valve, a first check valve, a second ball valve, a second check valve, a third check valve, and a pressure regulating valve. The connection point between the end pipeline and the main pipeline is located between the first check valve and the second ball valve. When the compressed air in the compressed air pipeline is supplied normally, the compressed air in the compressed air pipeline enters the end pipeline of the user through the first ball valve and the first check valve in sequence. The second check valve, the third check valve and the pressure regulating valve are used to form a low-pressure zone to isolate the gas in the nitrogen pipeline and the compressed air pipeline. When the compressed air supply in the compressed air pipeline fails, the pressure in the compressed air pipeline gradually decreases. When the pressure in the compressed air pipeline is lower than the threshold, the nitrogen in the nitrogen pipeline enters the end pipeline via the pressure regulating valve, the third check valve, the second check valve, and the second ball valve in sequence. The first check valve is in a cut-off state under the pressure of the nitrogen in the main pipeline to cut off the output of compressed air in the compressed air pipeline.

[0006] In one embodiment of the present invention, a first safety valve assembly is also included; The first safety valve assembly includes a third ball valve and a first pilot safety valve. One end of the third ball valve is connected to the main pipeline, and the position where the third ball valve is connected to the main pipeline is between the second check valve and the third check valve. The other end of the third ball valve is connected to the first pilot safety valve.

[0007] In one embodiment of the invention, a second safety valve assembly is also included; The second safety valve assembly includes a fourth ball valve and a second pilot safety valve. One end of the fourth ball valve is connected to the main pipeline, and the position where the fourth ball valve is connected to the main pipeline is between the third check valve and the pressure regulating valve. The other end of the fourth ball valve is connected to the second pilot safety valve.

[0008] In one embodiment of the present invention, a pressure transmitter is further included, the two ends of which are respectively connected to the two ends of the pressure regulating valve.

[0009] In one embodiment of the present invention, it further includes a fifth ball valve, a sixth ball valve, a first pressure gauge, a second pressure gauge, and a filter; The fifth ball valve is installed on the main pipeline and is located between the nitrogen gas transmission pipeline and the pressure regulating valve; One end of the sixth ball valve is connected to the main pipeline, and the connection point between the sixth ball valve and the main pipeline is between the nitrogen gas transmission pipeline and the fifth ball valve. The other end of the sixth ball valve is connected to the first pressure gauge. One end of the first pressure gauge is connected to the main pipeline, and the connection point between the first pressure gauge and the main pipeline is located between the pressure regulating valve and the third check valve. The filter is installed on the main pipeline, and is located between the fifth ball valve and the pressure regulating valve.

[0010] In one embodiment of the present invention, a seventh ball valve and a third pressure gauge are sequentially provided on the end pipe.

[0011] In one embodiment of the present invention, it further includes a first branch, a second branch, and a pressure regulating component; Both ends of the first branch are connected to the main pipeline, and one end of the first branch is located between the nitrogen gas transmission pipeline and the pressure regulating valve, while the other end of the first branch is located between the first check valve and the second ball valve. The first branch line is equipped with the eighth ball valve, the gas supply control valve, the fourth check valve and the ninth ball valve in sequence. The eighth ball valve is located near the nitrogen gas transmission pipeline. One end of the second branch is connected to the air intake control valve, and the other end is connected to the pressure regulating component. The pressure regulating component is connected to the main pipeline, and the position where the pressure regulating component is connected to the main pipeline is between the first ball valve and the first check valve. When the compressed air in the compressed air pipeline is supplied normally, the compressed air in the compressed air pipeline enters the second branch through the first ball valve and the pressure regulating component in sequence. At this time, the second branch gets air, and the air-getting-off control valve is closed, so the nitrogen in the nitrogen pipeline cannot be delivered to the end pipeline. When the compressed air supply in the compressed air pipeline fails, the pressure in the compressed air pipeline gradually decreases, the second branch loses air, the air supply shut-off control valve opens, and the nitrogen in the nitrogen pipeline enters the end pipeline for use in sequence through the eighth ball valve, the air supply shut-off control valve, the fourth check valve, and the ninth ball valve.

[0012] In one embodiment of the present invention, the pressure regulating assembly includes a first valve body, a second valve body, a tenth ball valve, an eleventh ball valve, a first connecting pipe, a second connecting pipe, and a third connecting pipe; The first valve body is provided with a sealing ball, and the first valve body is provided with a first air inlet and a first air outlet. The second valve body is provided with an airbag, a spring and a sealing cover. The second valve body is provided with an airbag opening, a second air inlet and a second air outlet. The airbag and the airbag opening are connected. The airbag and the sealing cover are respectively located at both ends of the spring. The sealing cover is used to seal the second air outlet under the action of the spring. One end of the first connecting tube is connected to the airbag opening, and the other end is connected to the first air outlet. The first air inlet is connected to the main pipeline. One end of the third connecting pipe is connected to the second branch, and the other end is connected to the second air inlet. The tenth ball valve and the eleventh ball valve are installed on the third connecting pipe. The first end of the second connecting pipe is connected to the first connecting pipe and is located between the first valve body and the second valve body. The second end of the second connecting pipe is connected to the third connecting pipe and is located between the tenth ball valve and the eleventh ball valve.

[0013] In one embodiment of the present invention, the system further includes an air separation nitrogen supply system and a liquid nitrogen vaporization backup supply system, both of which are connected to a nitrogen gas transmission pipeline.

[0014] In one embodiment of the present invention, a compressed air supply system is further included, which is connected to a compressed air pipeline and includes a compressor and a dryer.

[0015] Compared with the prior art, the beneficial effects of the present invention are as follows: In the above-mentioned scheme of this application, the emergency backup device includes a main pipeline, a pipeline to the user end, a compressed air pipeline, and a nitrogen pipeline. The pipeline to the user end is connected to the main pipeline, and the compressed air pipeline and the nitrogen pipeline are respectively connected to both ends of the main pipeline. Along the direction from the compressed air pipeline to the nitrogen pipeline, the main pipeline is sequentially equipped with a first ball valve, a first check valve, a second ball valve, a second check valve, a third check valve, and a pressure regulating valve. The connection point between the pipeline to the user end and the main pipeline is between the first check valve and the second ball valve. When the compressed air in the compressed air pipeline is normally supplied, the compressed air in the compressed air pipeline sequentially passes through the first ball valve, the second ball valve, the third check valve, and the pressure regulating valve. A ball valve and a first check valve enter the pipeline to the user end. The second check valve, third check valve, and pressure regulating valve are used to create a low-pressure zone to isolate the nitrogen and compressed air supply lines. When the compressed air supply fails, the pressure in the compressed air supply line gradually decreases. When the pressure in the compressed air supply line falls below a threshold, nitrogen from the nitrogen supply line enters the pipeline to the user end via the pressure regulating valve, third check valve, second check valve, and second ball valve. The first check valve is in a cut-off state under the pressure of the nitrogen in the main pipeline, thus cutting off the output of compressed air from the compressed air supply line. With this structure, when the compressed air supply fails, nitrogen from the nitrogen supply line is input to the pipeline to the user end via the pressure regulating valve, third check valve, second check valve, and second ball valve, allowing nitrogen to be used as a backup gas supply to the equipment at the user end, preventing equipment malfunctions from affecting workshop production. Furthermore, this application effectively avoids the risk of dried compressed air mixing into the nitrogen pipeline through the coordinated operation of the first check valve, the second ball valve, the second check valve, the third check valve, and the pressure regulating valve. Compared with the CDA backup system in the prior art, this application has lower cost, stronger stability, and higher safety when using nitrogen for backup supply.

[0016] The present invention will be further described in detail below with reference to the accompanying drawings and embodiments. Attached Figure Description

[0017] Figure 1 This is an overall schematic diagram of the emergency backup device in an embodiment of the present invention; Figure 2 This is a schematic diagram of the main pipeline, the first branch pipeline, and the second branch pipeline of the emergency backup device according to an embodiment of the present invention. Detailed Implementation

[0018] The present invention will be further described in detail below with reference to specific embodiments, but the implementation of the present invention is not limited thereto.

[0019] Please see Figure 1 and Figure 2This invention provides an emergency backup device for CDA to N2 conversion, including a main pipeline, a user-end pipeline, a compressed air supply pipeline, and a nitrogen supply pipeline. The user-end pipeline is connected to the main pipeline, and the compressed air supply pipeline and the nitrogen supply pipeline are respectively connected to both ends of the main pipeline. Along the direction from the compressed air supply pipeline to the nitrogen supply pipeline, the main pipeline is sequentially equipped with a first ball valve V1, a first check valve V2, a second ball valve V3, a second check valve V4, a third check valve V5, and a pressure regulating valve V6. The user-end pipeline is connected to the main pipeline between the first check valve V2 and the second ball valve V3. When the compressed air in the compressed air supply pipeline is normally supplied, the compressed air in the compressed air supply pipeline... The gas flows sequentially through the first ball valve V1 and the first check valve V2 into the end-use pipeline. The second check valve V4, the third check valve V5, and the pressure regulating valve V6 are used to create a low-pressure zone to isolate the gas in the nitrogen supply pipeline and the compressed air supply pipeline. When the compressed air supply in the compressed air supply pipeline fails, the pressure in the compressed air supply pipeline gradually decreases. When the pressure in the compressed air supply pipeline is lower than the threshold, the nitrogen in the nitrogen supply pipeline flows sequentially through the pressure regulating valve V6, the third check valve V5, the second check valve V4, and the second ball valve V3 into the end-use pipeline. The first check valve V2 is in a cut-off state under the pressure of the nitrogen in the main pipeline to cut off the output of compressed air in the compressed air supply pipeline.

[0020] In some embodiments of this application, the output end of the end-to-use pipeline is connected to the equipment on the end-to-use machine. For example, the output end of the end-to-use pipeline can be connected to a cylinder on the end-to-use machine to achieve gas drive; or, the output end of the end-to-use pipeline can be connected to a fan-driven cooling device on the end-to-use machine to achieve equipment cooling.

[0021] In some embodiments of this application, the compressed air pipeline is used to connect to the compressed air supply system, and the nitrogen pipeline is used to connect to the nitrogen supply system and the nitrogen backup system.

[0022] In some embodiments of this application, the first direction is the direction from the compressed air supply pipeline to the nitrogen supply pipeline, and the second direction is the direction from the nitrogen supply pipeline to the compressed air supply pipeline. Specifically, the first check valve V2 is open in the first direction and closed in the second direction. The second check valve V4 and the third check valve V5 are closed in the first direction and open in the second direction.

[0023] In some embodiments of this application, when the CDA supply fails, the pressure in the compressed air pipeline will gradually decrease. When it falls below a certain threshold (adjustable), the nitrogen in the nitrogen pipeline can instantly replace the original compressed air and supply it to the user end without human intervention through the pressure regulating valve V6, the third check valve V5, the second check valve V4, and the second ball valve V3, for use by related equipment. At the same time, the pressure of the nitrogen will block the first check valve V2 to interrupt the output of gas in the compressed air pipeline.

[0024] In some embodiments of this application, when CDA is supplied normally, a low-pressure zone can be formed through the pressure regulating valve V6, the third check valve V5, and the second check valve V4 to ensure effective isolation of the medium in the nitrogen gas pipeline and the compressed air gas pipeline, and to avoid cross-contamination of quality.

[0025] In some embodiments of this application, the pressure regulating valve V6 can be an integral pilot valve operated dome-loaded pressure reducing type pressure regulating valve V6, or it can be replaced with a mechanical PIC plus pneumatic regulating valve or a regular pressure regulating valve V6, depending on the application scenario.

[0026] In some embodiments of this application, the first one-way valve V2 may be additionally equipped with a set of safety valves depending on the application scenario to improve the stability of the device.

[0027] In some embodiments of this application, the device needs to undergo regular (recommended quarterly) effectiveness tests when it is put into operation and maintenance to ensure that it functions properly.

[0028] In the above-mentioned scheme of this application, the emergency backup device includes a main pipeline, a pipeline to the user end, a compressed air pipeline, and a nitrogen pipeline. The pipeline to the user end is connected to the main pipeline, and the compressed air pipeline and the nitrogen pipeline are respectively connected to both ends of the main pipeline. Along the direction from the compressed air pipeline to the nitrogen pipeline, the main pipeline is sequentially equipped with a first ball valve V1, a first check valve V2, a second ball valve V3, a second check valve V4, a third check valve V5, and a pressure regulating valve V6. The connection point between the pipeline to the user end and the main pipeline is between the first check valve V2 and the second ball valve V3. When the compressed air in the compressed air pipeline is normally supplied, the compressed air in the compressed air pipeline passes through the first ball valve V1, the first check valve V2, the second check valve V3, the third check valve V4, the third check valve V5, and the pressure regulating valve V6. Valve V1 and the first check valve V2 enter the pipeline to the user end. The second check valve V4, the third check valve V5, and the pressure regulating valve V6 are used to form a low-pressure zone to isolate the gas in the nitrogen supply pipeline and the compressed air supply pipeline. When the compressed air supply in the compressed air supply pipeline fails, the pressure in the compressed air supply pipeline gradually decreases. When the pressure in the compressed air supply pipeline is lower than the threshold, the nitrogen in the nitrogen supply pipeline enters the pipeline to the user end in sequence through the pressure regulating valve V6, the third check valve V5, the second check valve V4, and the second ball valve V3. The first check valve V2 is in a cut-off state under the pressure of the nitrogen in the main pipeline to cut off the output of compressed air in the compressed air supply pipeline. With this structure, when the compressed air supply in the compressed air pipeline fails, nitrogen in the nitrogen pipeline is sequentially fed into the user-end pipeline via pressure regulating valve V6, third one-way valve V5, second one-way valve V4, and second ball valve V3. This allows nitrogen to serve as a backup gas supply for the user-end equipment, preventing equipment malfunctions from affecting workshop production. Furthermore, this application effectively avoids the risk of dry compressed air mixing into the nitrogen pipeline through the coordinated operation of the first one-way valve V2, second ball valve V3, second one-way valve V4, third one-way valve V5, and pressure regulating valve V6. Compared to the existing CDA backup system, this application offers lower cost, greater stability, and higher safety when using nitrogen for backup supply.

[0029] In some embodiments of this application, the emergency backup device further includes a first safety valve assembly; the first safety valve assembly includes a third ball valve V7 and a first pilot safety valve V8, one end of the third ball valve V7 is connected to the main pipeline, and the connection point between the third ball valve V7 and the main pipeline is between the second check valve V4 and the third check valve V5, and the other end of the third ball valve V7 is connected to the first pilot safety valve V8. With this structure, when the pressure regulating valve V6 or any one of the check valves fails, the first safety valve assembly can effectively release excess pressure (gas) outside the system, ensuring that the pressure in the low-pressure zone formed by the pressure regulating valve V6, the third check valve V5, and the second check valve V4 is always lower than the pressure in the nitrogen and compressed air source pipelines, thereby effectively isolating the two gas sources and preventing cross-contamination of gas quality.

[0030] In some embodiments of this application, the emergency backup device further includes a second safety valve assembly. The second safety valve assembly includes a fourth ball valve V9 and a second pilot safety valve V10. One end of the fourth ball valve V9 is connected to the main pipeline, and the connection point between the fourth ball valve V9 and the main pipeline is between the third check valve V5 and the pressure regulating valve V6. The other end of the fourth ball valve V9 is connected to the second pilot safety valve V10. With this structure, when the pressure regulating valve V6 or any one of the check valves fails, the second safety valve assembly can effectively release excess pressure (gas) outside the system, ensuring that the pressure in the low-pressure zone formed by the pressure regulating valve V6, the third check valve V5, and the second check valve V4 is always lower than the pressure of the nitrogen and compressed air source pipelines. This effectively isolates the two gas sources, preventing cross-contamination and quality contamination. Furthermore, through the coordinated operation of the first and second safety valve assemblies, this application can significantly improve the safety of the emergency backup device, preventing cross-contamination between the nitrogen and compressed air pipelines.

[0031] In some embodiments of this application, the set pressure of the safety valve, the pipe (valve) diameter, the pressure regulating valve V6, etc. need to be selected according to actual needs, and the set pressure and pressure regulating pressure are selected according to the application scenario.

[0032] In some embodiments of this application, the pilot safety valve described above can be replaced with a pressure-adjustable back pressure valve or a general safety valve, depending on the application scenario.

[0033] In some embodiments of this application, the emergency backup device further includes a pressure transmitter I1, with its two ends connected to the two ends of the pressure regulating valve V6, respectively. With this structure, the differential pressure transmitter can remotely detect abnormalities in the pressure regulating valve V6 or simultaneous abnormalities in both check valves and issue an early warning for replacement parts. Even without the optional device, routine inspections can also determine if the device is malfunctioning by observing the pressure displayed on the local pressure gauge and the status of the safety valve.

[0034] In some embodiments of this application, the emergency backup device further includes a fifth ball valve V11, a sixth ball valve V12, a first pressure gauge, a second pressure gauge, and a filter E1; the fifth ball valve V11 is disposed on the main pipeline and is located between the nitrogen gas supply pipeline and the pressure regulating valve V6; one end of the sixth ball valve V12 is connected to the main pipeline, and the connection position of the sixth ball valve V12 with the main pipeline is between the nitrogen gas supply pipeline and the fifth ball valve V11, and the other end of the sixth ball valve V12 is connected to the first pressure gauge; one end of the first pressure gauge is connected to the main pipeline, and the connection position of the first pressure gauge with the main pipeline is between the pressure regulating valve V6 and the third check valve V5; the filter E1 is disposed on the main pipeline and is located between the fifth ball valve V11 and the pressure regulating valve V6. With this structure, the pressure after being regulated by the pressure regulating valve V6 can be measured by the first pressure gauge, the pressure at the main pipeline inlet can be measured by the second pressure gauge, the fifth ball valve V11 and the sixth ball valve V12 can improve the overall reliability of the pipeline and facilitate the control of gas flow, and the filter E1 can filter impurities in nitrogen and improve the purity of nitrogen.

[0035] In some embodiments of this application, the emergency backup device further includes two ball valves, one of which is connected to the main pipeline and its connection to the main pipeline is located between the second ball valve V3 and the second check valve V4; the other ball valve is connected to the main pipeline and its connection to the main pipeline is located between the third check valve V5 and the second safety valve assembly.

[0036] In some embodiments of this application, a seventh ball valve V13 and a third pressure gauge are sequentially installed on the end-use pipeline. With this structure, the pressure in the end-use pipeline can be detected by the third pressure gauge, and the flow of gas in the pipeline can be controlled by the seventh ball valve V13.

[0037] In some embodiments of this application, the emergency backup device further includes a first branch, a second branch, and a pressure regulating component; both ends of the first branch are connected to the main pipeline, and one end of the first branch is located between the nitrogen gas supply pipeline and the pressure regulating valve V6, while the other end of the first branch is located between the first check valve V2 and the second ball valve V3; the first branch is sequentially equipped with an eighth ball valve V14, a gas supply control valve V15, a fourth check valve V16, and a ninth ball valve V17, with the eighth ball valve V14 located close to the nitrogen gas supply pipeline; one end of the second branch is connected to the gas supply control valve V15, and the other end is connected to the pressure regulating component, which is connected to the main pipeline, and the position where the pressure regulating component is connected to the main pipeline is at the first... Between ball valve V1 and first check valve V2; when the compressed air supply in the compressed air pipeline is normal, the compressed air in the compressed air pipeline enters the second branch through the first ball valve V1 and the pressure regulating component in sequence. At this time, the second branch receives air, and the air supply control valve V15 is closed, so the nitrogen in the nitrogen pipeline cannot be delivered to the end-use pipeline; when the compressed air supply in the compressed air pipeline fails, the pressure in the compressed air pipeline gradually decreases, the second branch loses air, the air supply control valve V15 is opened, and the nitrogen in the nitrogen pipeline enters the end-use pipeline through the eighth ball valve V14, the air supply control valve V15, the fourth check valve V16, and the ninth ball valve V17 in sequence. With this structure, the main pipeline can form a first control loop, and the first branch, the second branch, and the pressure regulating component can form a second control loop. When multiple devices on the first control loop fail, causing the first control loop to fail, nitrogen can be delivered through the second control loop to replace compressed air. In this way, the main pipeline, the first branch, and the second branch can form multiple protection pipelines, thereby further improving the overall reliability of the device.

[0038] In some embodiments of this application, the pressure regulating assembly includes a first valve body X1, a second valve body X2, a tenth ball valve V18, an eleventh ball valve V19, a first connecting pipe, a second connecting pipe, and a third connecting pipe; the first valve body X1 has a sealing ball inside, and a first air inlet and a first air outlet on the first valve body X1; the second valve body X2 has an air bladder, a spring, and a sealing cover inside, and has an air bladder opening, a second air inlet, and a second air outlet on the second valve body X2; the air bladder and the air bladder opening are connected; the air bladder and the sealing cover are respectively disposed at both ends of the spring, and the sealing cover is used to withstand the action of the spring. The lower seal is the second air outlet; one end of the first connecting pipe is connected to the airbag opening, and the other end is connected to the first air outlet; the first air inlet is connected to the main pipeline; one end of the third connecting pipe is connected to the second branch pipeline, and the other end is connected to the second air inlet; the tenth ball valve V18 and the eleventh ball valve V19 are installed on the third connecting pipe; the first end of the second connecting pipe is connected to the first connecting pipe, and the first end is located between the first valve body X1 and the second valve body X2; the second end of the second connecting pipe is connected to the third connecting pipe, and the second end is located between the tenth ball valve V18 and the eleventh ball valve V19.

[0039] Understandably, when CDA is supplied normally, compressed air enters the air bladder of the second valve body X2 through the first valve body X1. The air bladder inflates and drives the spring upwards. The spring's movement causes the sealing cover to move upwards and seal the second outlet. At this time, compressed air can enter the second branch through the tenth ball valve V18. The second branch receives air, and the air-receiving control valve V15 closes, preventing nitrogen from being delivered to the usage end pipeline. When CDA supply fails, the pressure in the compressed air pipeline gradually decreases. The air bladder in the second valve body X2 deflates and contracts, and the spring causes the sealing cover to separate from the second outlet. Residual compressed air enters the second valve body X2 through the eleventh ball valve V19 and is released through the second outlet. At this point, the second branch loses pressure, and the gas supply control valve V15 opens. Nitrogen from the nitrogen supply line flows sequentially through the eighth ball valve V14, the gas supply control valve V15, the fourth check valve V16, and the ninth ball valve V17 into the end-use line. When there is a large amount of residual compressed air in the compressed air supply line, the small ball in the first valve body X1 is blown to the first outlet and blocks it, preventing excessive gas release at this point from causing noise pollution, until the compressed air supply line is completely depressurized. When the compressed air supply is restored, briefly closing the eleventh ball valve V19 will reset the first control circuit.

[0040] In some embodiments of this application, the emergency backup device further includes an air separation nitrogen supply system and a liquid nitrogen vaporization backup supply system, both of which are connected to a nitrogen transmission pipeline. With this structure, nitrogen can be supplied to the nitrogen transmission pipeline through the air separation nitrogen supply system and the liquid nitrogen vaporization backup supply system.

[0041] In some embodiments of this application, a flow controller and a pneumatic regulating valve are provided on the nitrogen transmission pipeline between the air separation nitrogen supply system and the main pipeline, and an air temperature vaporizer and a pneumatic regulating valve are provided on the nitrogen transmission pipeline between the nitrogen vaporization backup supply system and the main pipeline.

[0042] In some embodiments of this application, the emergency backup device further includes a compressed air supply system connected to a compressed air pipeline. The compressed air supply system includes a compressor and a dryer. With this structure, compressed air can be generated by the compressor, and the compressed air can be dried by the dryer to form dry compressed air.

[0043] In some embodiments of this application, there are multiple compressors, and each compressor has a corresponding pneumatic regulating valve on its pipe. There are multiple dryers, and the pipes on both sides of the dryer are equipped with air supply and shut-off control valves.

[0044] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," and "counterclockwise," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0045] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this invention, "a plurality of" means two or more, unless otherwise explicitly specified.

[0046] In this invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0047] The above description, in conjunction with specific preferred embodiments, provides a further detailed explanation of the present invention. It should not be construed that the specific implementation of the present invention is limited to these descriptions. For those skilled in the art, various simple deductions or substitutions can be made without departing from the concept of the present invention, and all such modifications and substitutions should be considered within the scope of protection of the present invention.

Claims

1. An emergency backup device for CDA to N2 conversion, characterized in that, It includes a main pipeline, a terminal pipeline, a compressed air pipeline, and a nitrogen pipeline. The terminal pipeline is connected to the main pipeline, and the compressed air pipeline and the nitrogen pipeline are respectively connected to both ends of the main pipeline. Along the direction from the compressed air pipeline to the nitrogen pipeline, the main pipeline is sequentially provided with a first ball valve, a first check valve, a second ball valve, a second check valve, a third check valve, and a pressure regulating valve. The connection point between the end-use pipeline and the main pipeline is located between the first check valve and the second ball valve. When the compressed air in the compressed air supply line is supplied normally, the compressed air in the compressed air supply line enters the end-to-use line in sequence through the first ball valve and the first check valve. The second check valve, the third check valve and the pressure regulating valve are used to form a low-pressure zone to isolate the gas in the nitrogen supply line and the compressed air supply line. When the compressed air supply in the compressed air pipeline fails, the pressure in the compressed air pipeline gradually decreases. When the pressure in the compressed air pipeline is lower than the threshold, the nitrogen in the nitrogen pipeline enters the end-use pipeline in sequence through the pressure regulating valve, the third check valve, the second check valve, and the second ball valve. The first check valve is in a cut-off state under the pressure of the nitrogen in the main pipeline to cut off the output of compressed air in the compressed air pipeline.

2. The emergency backup device for CDA to N2 conversion according to claim 1, characterized in that, It also includes the first safety valve assembly; The first safety valve assembly includes a third ball valve and a first pilot safety valve. One end of the third ball valve is connected to the main pipeline, and the position where the third ball valve is connected to the main pipeline is between the second check valve and the third check valve. The other end of the third ball valve is connected to the first pilot safety valve.

3. The emergency backup device for CDA to N2 conversion according to claim 1, characterized in that, It also includes a second safety valve assembly; The second safety valve assembly includes a fourth ball valve and a second pilot safety valve. One end of the fourth ball valve is connected to the main pipeline, and the position where the fourth ball valve is connected to the main pipeline is between the third check valve and the pressure regulating valve. The other end of the fourth ball valve is connected to the second pilot safety valve.

4. The emergency backup device for CDA to N2 conversion according to claim 1, characterized in that, It also includes a pressure transmitter, the two ends of which are respectively connected to the two ends of the pressure regulating valve.

5. The emergency backup device for CDA to N2 conversion according to claim 1, characterized in that, It also includes a fifth ball valve, a sixth ball valve, a first pressure gauge, a second pressure gauge, and a filter; The fifth ball valve is installed on the main pipeline, and the fifth ball valve is located between the nitrogen gas transmission pipeline and the pressure regulating valve; One end of the sixth ball valve is connected to the main pipeline, and the connection position between the sixth ball valve and the main pipeline is between the nitrogen gas transmission pipeline and the fifth ball valve. The other end of the sixth ball valve is connected to the first pressure gauge. One end of the first pressure gauge is connected to the main pipeline, and the connection point between the first pressure gauge and the main pipeline is located between the pressure regulating valve and the third check valve. The filter is installed on the main pipeline and is located between the fifth ball valve and the pressure regulating valve.

6. The emergency backup device for CDA to N2 conversion according to claim 1, characterized in that, The pipeline to the user end is equipped with a seventh ball valve and a third pressure gauge in sequence.

7. The emergency backup device for CDA to N2 conversion according to claim 1, characterized in that, It also includes the first branch, the second branch, and a pressure regulating component; Both ends of the first branch are connected to the main pipeline, and one end of the first branch is located between the nitrogen gas transmission pipeline and the pressure regulating valve, while the other end of the first branch is located between the first check valve and the second ball valve. The first branch is sequentially equipped with an eighth ball valve, a gas supply control valve, a fourth check valve, and a ninth ball valve, with the eighth ball valve located near the nitrogen gas transmission pipeline. One end of the second branch is connected to the air supply control valve, and the other end is connected to the pressure regulating component. The pressure regulating component is connected to the main pipeline, and the position where the pressure regulating component is connected to the main pipeline is between the first ball valve and the first check valve. When the compressed air in the compressed air supply pipeline is supplied normally, the compressed air in the compressed air supply pipeline enters the second branch through the first ball valve and the pressure regulating component in sequence. At this time, the second branch gets air, the air-getting-off control valve is closed, and the nitrogen in the nitrogen supply pipeline cannot be delivered to the end-of-use pipeline. When the compressed air supply in the compressed air pipeline fails, the pressure in the compressed air pipeline gradually decreases, the second branch loses air, the air supply control valve opens, and the nitrogen in the nitrogen pipeline enters the pipeline to the user end in sequence through the eighth ball valve, the air supply control valve, the fourth check valve and the ninth ball valve.

8. The emergency backup device for CDA to N2 conversion according to claim 7, characterized in that, The pressure regulating assembly includes a first valve body, a second valve body, a tenth ball valve, an eleventh ball valve, a first connecting pipe, a second connecting pipe, and a third connecting pipe; The first valve body is provided with a sealing ball, and the first valve body is provided with a first air inlet and a first air outlet. The second valve body is provided with an airbag, a spring and a sealing cover. The second valve body is provided with an airbag opening, a second air inlet and a second air outlet. The airbag and the airbag opening are connected. The airbag and the sealing cover are respectively disposed at both ends of the spring. The sealing cover is used to seal the second air outlet under the action of the spring. One end of the first connecting tube is connected to the airbag opening, and the other end is connected to the first air outlet. The first air inlet is connected to the main pipeline. One end of the third connecting pipe is connected to the second branch, and the other end is connected to the second air inlet. The tenth ball valve and the eleventh ball valve are disposed on the third connecting pipe. The first end of the second connecting pipe is connected to the first connecting pipe and is located between the first valve body and the second valve body. The second end of the second connecting pipe is connected to the third connecting pipe and is located between the tenth ball valve and the eleventh ball valve.

9. The emergency backup device for CDA to N2 conversion according to claim 1, characterized in that, It also includes an air separation nitrogen supply system and a liquid nitrogen vaporization backup supply system, both of which are connected to the nitrogen gas transmission pipeline.

10. The emergency backup device for CDA to N2 conversion according to claim 1, characterized in that, It also includes a compressed air supply system, which is connected to the compressed air pipeline, and the compressed air supply system includes a compressor and a dryer.

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