Monolithic diamond capacitor with conductive carbon electrode

Abstract

The invention provides a capacitor and a manufacturing method thereof. The capacitors may include a monolithic diamond body having conductive carbon electrodes therein. The conductive carbon electrodes may be separated by dielectric diamond layers of the monolithic diamond body. The electrodes may be formed by converting regions of the monolithic diamond body into conductive carbon using a laser.

Description

Technical Field

[0001] This disclosure relates generally to capacitors, and more specifically to diamond capacitors. Background Technology

[0002] Typically, capacitor technology capable of providing high voltage and high energy density is required. This capacitor technology can be used in a wide range of applications and fields, such as medical, industrial, and military applications, to name just a few. As another example, this capacitor technology can be used in implantable medical devices, such as cardiopulmonary bypass devices (CPADs).

[0003] Therapeutic electrical pulse delivery systems and devices typically use capacitors to store energy and deliver therapeutic pulses or shocks to patients. A capacitor stores energy in an electric field between two electrodes (e.g., a first electrode and a second electrode). Capacitors can charge and release stored energy much faster than batteries or other power sources. Additionally, capacitors can operate at higher voltages than batteries or other power sources of similar size. In other words, capacitors are often described as having a higher power density than other power sources. Therefore, capacitors can be used to deliver high-voltage pulses or shocks in therapeutic electrical pulse delivery systems and devices.

[0004] In a laboratory or hospital setting, the size, shape, weight, and durability of capacitors in a therapeutic electrical pulse delivery system may not be critical. However, these factors are important design considerations for therapeutic electrical pulse delivery systems designed for implantation or wear by a patient. Large or bulky capacitors and their housings can increase the size and weight of implantable and wearable devices. Furthermore, capacitors may be subject to mechanical or electromechanical deformation, which can affect the operation of the therapeutic electrical pulse delivery system and device over time. Therefore, capacitors and pulse generators that can deliver high-voltage, high-energy therapeutic pulses with small, lightweight form factors and high durability are desirable. Summary of the Invention

[0005] As described herein, by focusing electromagnetic radiation into a monolithic diamond body to convert diamond into conductive carbon, capacitors suitable for small, lightweight form factors and increased durability can be realized using monolithic diamond bodies in which capacitor units are formed. Such capacitors reduce the mass and volume required to achieve a given capacitance. Additionally, monolithic diamond capacitors can be designed with many different form factors and are less sensitive to electromechanical deformation and degradation.

[0006] The embodiments disclosed herein may include a capacitor having a monolithic diamond body comprising a first electrode region, a second electrode region, and a dielectric diamond layer. The first electrode region may have conductive carbon and extends from a first electrode contact region on the outer surface of the monolithic diamond body into the monolithic diamond body. The second electrode region may have conductive carbon and extends from a second electrode contact region on the outer surface of the monolithic diamond body into the monolithic diamond body. The dielectric diamond layer of the monolithic diamond body may separate the first electrode region and the second electrode region.

[0007] The capacitor may further include a third electrode region, a fourth electrode region, and a second dielectric diamond layer of the monolithic diamond body. The third electrode layer may extend from a third electrode contact region on the outer surface of the monolithic diamond body into the monolithic diamond body. The fourth electrode region may extend from a fourth electrode contact region on the outer surface of the monolithic diamond body into the monolithic diamond body. The second dielectric diamond layer may separate the third electrode region and the fourth electrode region. The first electrode region may define a first electrode plane, and the third electrode region may define a third electrode plane parallel to the first electrode plane.

[0008] One or both of the first electrode region and the second electrode region may each define a plane. The first electrode region may define a first electrode plane, and the second electrode region may define a second electrode plane parallel to the first electrode plane. The first electrode contact region may define a first electrode contact plane coplanar with the first electrode plane. One or both of the first electrode region and the second electrode region may each define a ring. The first electrode region may define a first electrode ring, and the second electrode region may define a second electrode ring concentric with the first electrode ring. One or both of the first electrode region and the second electrode region may each define an axis. The first electrode region may define a first electrode axis, and the second electrode region may define a second electrode axis parallel to the first electrode axis. The first electrode contact region may define a first electrode contact axis coaxial with the first electrode axis. The first electrode region and the second electrode region may have opposite polarities. The width of the first electrode region may be greater than or equal to the width of the first electrode contact region. The thickness of the dielectric diamond layer may be between 250 nanometers and 2 micrometers. The thickness of the first electrode region and the thickness of the second electrode region may each be between 250 nanometers and 2 micrometers. The width of the monolithic diamond body can be between 2 cm and 6 cm. The thickness of the monolithic diamond body can be between 0.1 cm and 0.5 cm.

[0009] The embodiments described herein may also include a capacitor having a monolithic diamond body and a plurality of capacitor unit cells. Each unit cell may include a first electrode region, a second electrode region, and a dielectric diamond layer of the monolithic diamond body. The first electrode region may contain conductive carbon and extends from a first electrode contact region at the outer surface of the monolithic diamond body into the monolithic diamond body. The second electrode region may contain conductive carbon and extends from a second electrode contact region at the outer surface of the monolithic diamond body into the monolithic diamond body. The dielectric diamond layer of the monolithic diamond body may separate the first electrode region and the second electrode region.

[0010] The first electrode region of at least one of the plurality of capacitor units may be the second electrode region of another capacitor unit among the plurality of capacitor units. The capacitor may also include a first electrode connector that electrically connects at least two first electrode regions of the plurality of capacitor units. The first electrode connector may be electrically connected to a first electrode connector of a second capacitor having a second integral diamond body. The first electrode connector may include a simple metal layer, sputtered metal, solder balls, or a combination of two or more of these. The first electrode connector may contain one or both of a metal and a conductive resin.

[0011] The embodiments described herein may also include a method for manufacturing a capacitor, the method comprising focusing electromagnetic radiation into a monolithic diamond body to convert a region of the monolithic diamond body into a conductive region comprising conductive carbon, thereby forming a first electrode region within the monolithic diamond body. The method may further include forming a second electrode region within the monolithic diamond body, the second electrode region being separated from the first electrode region by a dielectric diamond layer of the monolithic diamond body.

[0012] Forming a first electrode region and forming a second electrode region can establish a capacitor unit cell. The method may also include forming a plurality of capacitor unit cells within the monolithic diamond body. Focusing electromagnetic radiation into the monolithic diamond body includes shaping a laser beam to produce a Bezier focus. Focusing electromagnetic radiation into the monolithic diamond body may include shaping a laser beam to produce a Gaussian focus. Focusing electromagnetic radiation into the monolithic diamond body may include focusing pulsed electromagnetic radiation into the monolithic diamond body. Focusing electromagnetic radiation into the monolithic diamond body to convert a region of the monolithic diamond body into a conductive region, the conductive region possibly comprising conductive carbon, thereby forming a first electrode region within the monolithic diamond body may include forming a first electrode contact region at the surface of the monolithic diamond body, and the first electrode contact region being adjacent to and electrically connected to the first electrode region.

[0013] The method may further include forming an electrode connector electrically connected to the first electrode region. The electrode connector may comprise one or both of a metal and a conductive resin. Forming the electrode connector may include sputtering a metal. Forming the electrode connector may include applying a photomask to the surface of the monolithic diamond body.

[0014] Details of one or more aspects of this disclosure are set forth in the following drawings and description. Other features, objects, and advantages of the technology described in this disclosure will be apparent from the description, drawings, and claims. Attached Figure Description

[0015] FIG. 1 This is a cross-sectional side view of an exemplary capacitor having a single unit cell.

[0016] FIG. 2 This is a cross-sectional side view of an exemplary capacitor having three capacitor units.

[0017] FIG. 3A This is a cross-sectional side view of an exemplary capacitor with multiple unit cells.

[0018] FIG. 3B yes FIG. 3A A perspective view of an exemplary capacitor.

[0019] FIG. 4A This is a top view of the cross-section of an illustrative cylindrical capacitor.

[0020] FIG. 4B yes FIG. 4A A cross-sectional side view of an exemplary cylindrical capacitor.

[0021] FIG. 5A This is a cross-sectional side view of an exemplary capacitor with wedge-shaped electrodes.

[0022] FIG. 5B yes FIG. 5A A top view of the cross-section of an exemplary capacitor.

[0023] FIG. 6A to FIG. 6C This is a top view of the cross-section of an illustrative toroidal capacitor.

[0024] FIG. 7A This is a cross-sectional side view of an exemplary capacitor with electrode contact areas, each electrode contact area having a width approximately equal to the width of the corresponding electrode area.

[0025] FIG. 7B to FIG. 7C yes FIG. 7A A front view of the cross-section of an exemplary capacitor.

[0026] FIG. 8A This is a cross-sectional side view of an exemplary capacitor with electrode contact areas, each electrode contact area having a width smaller than the width of the corresponding electrode area.

[0027] FIG. 8B to FIG. 8C yes FIG. 8A A front view of the cross-section of an exemplary capacitor.

[0028] FIG. 9A It is a cross-sectional side view of an exemplary capacitor having an electrode contact region that is not coplanar with the corresponding electrode region.

[0029] FIG. 9B yes FIG. 9A A top view of the cross-section of an exemplary capacitor.

[0030] FIG. 10 This is a cross-sectional side view of an exemplary capacitor with electrode connectors.

[0031] FIG. 11 It includes FIG. 10 A cross-sectional side view of an illustrative capacitor device, which is electrically connected to another capacitor via one of the electrode connectors.

[0032] FIG. 12A to FIG. 12B This is a flowchart illustrating an exemplary method for manufacturing a capacitor.

[0033] FIG. 13A to FIG. 13D and FIG. 14A to FIG. 14B This is an example FIG. 12A to FIG. 12B Illustrations of aspects of an illustrative method.

[0034] The accompanying drawings are presented primarily for clarity and are therefore not necessarily drawn to scale. Furthermore, various structures / components may be shown schematically or removed from some or all views to better illustrate aspects of the depicted embodiments, or their inclusion may not be necessary for understanding the various illustrative embodiments described herein. However, the absence of illustration / description of such structures / components in a particular figure should not be construed as limiting the scope of the various embodiments in any way. Detailed Implementation

[0035] Unless otherwise stated, all scientific and technical terms used herein have the meanings commonly used in the art. The definitions provided herein are intended to facilitate understanding of certain terms frequently used herein and are not intended to limit the scope of this disclosure.

[0036] Unless otherwise specified, the terms "polymer," "polymeric monomer," and "polymeric material" include, but are not limited to, organic homopolymers, copolymers (such as, for example, block, graft, random and alternating copolymers, terpolymers, etc.), and blends and modifications thereof. Furthermore, unless otherwise specifically defined, the term "polymer" shall include all possible geometric configurations of the material. These configurations include, but are not limited to, isotactic, syndiotactic, and atactic symmetries.

[0037] The term "generally" is modified by at least about 90%, at least about 95%, or at least about 98% of the terms that follow it. "Generally" includes "significantly," which refers to statistical significance.

[0038] The term “generally not” modifies the following terms with no more than 25%, no more than 10%, no more than 5%, or no more than 2%.

[0039] In this disclosure, it is assumed that all figures are modified by the term “about,” which encompasses the term “precisely.” As used herein in conjunction with the measured quantity, the term “about” refers to the variation in the measured quantity that would be expected by a person skilled in the art when performing the measurement and exercising a degree of care commensurate with the purpose of the measurement and the precision of the measuring equipment used.

[0040] As used in this specification and the appended claims, unless otherwise expressly indicated, the singular forms “a,” “an,” and “the” include multiple referents. It should also be noted that, unless otherwise expressly indicated, the term “or” is generally used to include the meaning of “and / or.” As used herein, the terms “and / or” and “any combination thereof,” and their grammatical equivalents, are used interchangeably. These terms can express any combination as specifically contemplated. For illustrative purposes only, the phrases “A, B, and / or C” or “A, B, C, or any combination thereof” can mean “A alone; B alone; C alone; A and B; B and C; A and C; and A, B, and C.” The term “or” can be used in combination or separately unless the context clearly indicates separate use.

[0041] A range of values ​​expressed by endpoints includes all values ​​contained within that range (e.g., 1 to 5 includes 1, 1.5, 2, 2.75, 3, 3.80, 4, 5, etc., or 10 or less includes 10, 9.4, 7.6, 5, 4.3, 2.9, 1.62, 0.3, etc.). Where the range of values ​​is “more than,” “at most,” or “at least” a specific value, that value is included within that range.

[0042] As used herein, "having," "comprising," "including," etc., are used in their open-ended sense and generally mean "including but not limited to." It will be understood that "consistently composed of," "comprises of," etc., are included within "comprising." As used herein, when referring to compositions, products, methods, etc., "consistently composed of" means that the components of the composition, product, method, etc., are limited to the enumerated components and any other components that do not materially affect the essential and novel characteristics of the composition, product, method, etc.

[0043] As used in this specification and claims, the terms “comprising” (and any form of “comprising” such as “comprise” or “comprises”), “having” (and any form of “having” such as “have” or “has”), “including” (and any form of “including” such as “includes” or “include”), or “containing” (and any form of “containing” such as “contains” or “contain”) are inclusive or open-ended and do not exclude additional, unlisted elements or method steps. It is contemplated that any embodiment discussed in this specification can be implemented with respect to any method or composition of this disclosure, and vice versa. Furthermore, the compositions of this disclosure can be used to implement the methods of this disclosure. Such inclusive or open-ended terms encompass more restrictive or closing terms or phrases such as “composes” or “substantially…composes”.

[0044] As used herein, “consistently composed of” means that an article or method consisting essentially of the listed elements may include additional elements that do not substantially affect the basic and novel characteristics of the article or method.

[0045] The terms "preferred" and "ideally" refer to embodiments that provide certain benefits in certain circumstances. However, other embodiments may also be preferred in the same or other circumstances. Furthermore, the description of one or more preferred embodiments does not imply that other embodiments are not applicable, and is not intended to exclude other embodiments from the scope of this disclosure (including the claims).

[0046] References to “some implementation schemes,” “implementation scheme,” “one implementation scheme,” “implementation scheme,” “one or more implementation schemes,” or “other implementation schemes” in the specification mean that a particular feature, structure, or characteristic described in connection with an implementation scheme is included in at least some, but not necessarily all, implementation schemes of this disclosure.

[0047] Any orientations, such as “top,” “bottom,” “left,” “right,” “upper,” “lower,” and other orientations and directions referenced herein, are used for clarity in the description with reference to the accompanying drawings and are not intended to limit the actual apparatus or system or its use. The apparatus or system described herein can be used in multiple orientations and directions.

[0048] Throughout the application, guidance is provided by way of examples, which (including specific aspects thereof) can be used in various combinations and are the subject of the claims. In each case, the enumerated list is intended only as a representative group and should not be construed as an exclusive list. It should be understood that particular examples, materials, quantities, and procedures are to be interpreted broadly in accordance with the scope and spirit of the invention set forth herein.

[0049] Reference will now be made in more detail to various embodiments of the subject matter of this disclosure, one or more of which are illustrated in the accompanying drawings. The same numbers used in the drawings refer to the same parts and steps. However, it should be understood that the use of numbers to refer to parts in a given drawing is not intended to limit parts labeled with the same numbers in another drawing. Furthermore, the use of different numbers to refer to parts in different drawings is not intended to indicate that parts with different numbers cannot be the same as or similar to parts with other numbers.

[0050] As described herein, by focusing electromagnetic radiation into a monolithic diamond body to convert diamond into conductive carbon, capacitors suitable for small, lightweight form factors and increased durability can be realized using monolithic diamond bodies in which capacitor units are formed. Such capacitors can reduce the mass and volume required to achieve a given capacitance. That is, such capacitors can have improved energy density, improved power density, or both. Additionally, monolithic diamond capacitors can be designed with many different form factors and are less sensitive to electromechanical deformation and degradation.

[0051] As described herein, a diamond substrate can be used to form a diamond capacitor by selectively converting regions of a monolithic diamond substrate into conductive carbon. Using focused electromagnetic radiation, conductive carbon regions can be formed within the diamond substrate to establish the electrodes of the diamond capacitor. The electrodes can be separated by layers of the unconverted diamond substrate to establish one or more dielectric layers of the diamond capacitor. Diamond can be described as having high dielectric strength, allowing energy to be stored in the capacitor at higher voltages, while reducing the dielectric volume compared to other dielectric materials (such as in electrolytic capacitors). Therefore, as an example, a single diamond capacitor can also be smaller than a single electrolytic capacitor and still operate at higher voltages than an electrolytic capacitor.

[0052] FIG. 1A cross-sectional side view of an exemplary capacitor 100 is shown. In one or more embodiments, the capacitor 100 includes an integral diamond body 110 having a surface 112. The capacitor 100 may also include a first electrode region 120. The first electrode region 120 may extend from a first electrode contact region 122 at the surface 112 of the integral diamond body 110 into the integral diamond body 110. The first electrode region 120 may define a plane or axis. The first electrode contact region may define a plane or axis that may be coplanar or coaxial with the plane or axis defined by the first electrode region. Additionally or alternatively, the plane or axis defined by the first electrode contact region may not be coplanar, non-coaxial, or neither coplanar nor non-coaxial with the plane defined by the first electrode region (e.g., see...). FIG. 9A to FIG. 9B The first electrode region 120 may have polarity, such as positive or negative polarity.

[0053] The exemplary capacitor 100 may further include a second electrode region 130. The second electrode region 130 may extend from a second electrode contact region 132 at the outer surface 112 of the integral diamond body 110 into the integral diamond body 110. The second electrode region 130 may define a plane or axis parallel to the plane or axis of the first electrode region 120. The second electrode region 130 may have polarity, such as negative or positive. The second electrode region 130 may have a polarity opposite to that of the first electrode region 120.

[0054] The dielectric diamond layer 114 of the monolithic diamond body 110 can separate the first electrode region 120 and the second electrode region 130. The dielectric diamond layer 114 can be described as separating the capacitive interface regions 124 and 134 of the first electrode region 120 and the second electrode region 130, respectively. The exemplary capacitor 100 can be described as having a single capacitor unit cell. That is, the exemplary capacitor 100 can be described as including a single dielectric diamond layer 114 separating the two electrode regions 120 and 130, thereby establishing a single capacitor unit cell.

[0055] In one or more embodiments, a capacitor may include a plurality of capacitor unit cells. FIG. 2 The diagram shows a cross-sectional side view of an exemplary capacitor 200 having three capacitor units. The capacitor 200 may include an integral diamond body 210 having a surface 212. The capacitor 200 may include a first electrode region 220 extending from a first electrode contact region 222 at the surface 212 into the integral diamond body 210. The first electrode region may define a plane or an axis.

[0056] The capacitor 200 may further include a second electrode region 230 extending from a second electrode contact region 232 at surface 212 into the integral diamond body 210. The second electrode region may define a plane or axis parallel to the plane or axis defined by the first electrode region. Each of the first electrode region 220 and the second electrode region 230 may have a polarity. The first electrode region 220 may have a polarity opposite to that of the second electrode region 230. A dielectric diamond layer 214 of the integral diamond body 210 may separate the first electrode region 220 and the second electrode region 230. The dielectric diamond layer 214 may be described as separating the capacitive interface regions 224 and 234 of the first electrode region 220 and the second electrode region 230, respectively.

[0057] The capacitor 200 may include a third electrode region 240 extending from a third electrode contact region 242 at surface 212 into the integral diamond body 210. The third electrode region 240 may define a plane or axis parallel to the plane or axis defined by the first electrode region 220. The plane or axis defined by the third electrode region 240 may additionally or alternatively be parallel to the plane or axis defined by the second electrode region 230. The third electrode region 240 may have a polarity. The third electrode region 240 may have a polarity opposite to that of the second electrode region 230. A second dielectric diamond layer 216 may separate the third electrode region 240 and the second electrode region 230. The second dielectric diamond layer 214 may be described as separating the capacitive interface regions 236 and 244 of the second electrode region 230 and the third electrode region 240, respectively. The second dielectric diamond layer may be described as forming a second capacitor unit cell.

[0058] The capacitor 200 may further include a fourth electrode region 250 extending from a fourth electrode contact region 252 at surface 212 into the integral diamond body 210. The fourth electrode region 250 may define a plane or axis parallel to the plane or axis defined by the third electrode region 240. The plane or axis defined by the fourth electrode region 250 may additionally or alternatively be parallel to each of the planes or axes defined by the first electrode region 220 and the second electrode region 230. The fourth electrode region 250 may have a polarity. The fourth electrode region 250 may have a polarity opposite to that of the third electrode region 240. A third dielectric diamond layer 218 separates the fourth electrode region 250 and the third electrode region 240. The third dielectric diamond layer 218 between the third electrode region 240 and the fourth electrode region 250 can be described as establishing a third capacitor unit cell. In one or more embodiments, capacitor 200 may be described as having interdigitated electrode regions 220, 230, 240, 250 with alternating polarities. Each pair of electrode regions with opposite polarities may be described as forming a capacitor unit cell.

[0059] FIG. 3A A cross-sectional side view and FIG. 3B The diagram shows an exemplary capacitor 300 having multiple unit cells. These multiple unit cells may be established by multiple dielectric diamond layers 314 extending from corresponding electrode contact areas at the surface 312 of the monolithic diamond body 310 to multiple interdigitated first electrode regions 320 and second electrode regions 330 within the monolithic diamond body 310.

[0060] Monolithic diamond bodies (e.g., such as monolithic diamond body 110) can be described as single-crystal diamond or bulk single-crystal diamond. Monolithic diamond bodies can be laboratory-grown. Additionally or alternatively, monolithic diamond bodies can be naturally formed.

[0061] The monolithic diamond body can have any suitable quality. Suitable quality can include, for example, industrial-grade diamond.

[0062] A monolithic diamond body can have any suitable form. Suitable forms may include, for example, a rectangular cross-section, such as... FIG. 1 As shown. Suitable forms may additionally or alternatively include complex surface cross-sections. FIG. 6A to FIG. 6CThe cross-sectional top views show exemplary capacitors 610, 620, and 630, each having a tortuous cross-section. Further examples of suitable forms may include, but are not limited to, cubic, rectangular prism, spherical, cylindrical, tortuous, toroidal, strip, rod-shaped, polygonal, or one or more combinations thereof. It will be understood from this disclosure that any suitable monolithic diamond body form may be used, and this disclosure is not limited in this respect.

[0063] The monolithic diamond body can be of any suitable size. As an example, a monolithic diamond body can be between 2 cm and 6 cm wide, and between 0.1 cm and 0.5 cm thick. In some embodiments, suitable dimensions of the monolithic diamond body may include width. For example, the width of the monolithic diamond body may be between 1 cm and 10 cm. In other examples, the width of the monolithic diamond body may be greater than 0.5 cm, greater than 1 cm, greater than 2 cm, greater than 5 cm, greater than 8 cm, or greater than 10 cm, and / or less than 15 cm, less than 12 cm, less than 10 cm, less than 8 cm, less than 5 cm, less than 3 cm, or less than 1 cm. The width of the monolithic diamond body may be approximately 4 cm. Embodiments may include the height of the monolithic diamond body. For example, the height of the monolithic diamond body may be between 0.05 cm and 1 cm. In other examples, the height of the monolithic diamond body may be greater than 0.05 cm, greater than 0.1 cm, greater than 0.2 cm, greater than 0.5 cm, greater than 0.8 cm, or greater than 1 cm, and / or less than 1.5 cm, less than 1.2 cm, less than 1 cm, less than 0.8 cm, less than 0.5 cm, less than 0.3 cm, or less than 0.1 cm. The height of the monolithic diamond body may be about 0.3 cm. One or more embodiments may include a depth of the monolithic diamond body. For example, the depth of the monolithic diamond body may be between 0.5 cm and 5 cm. In other examples, the depth of the monolithic diamond body may be greater than 0.5 cm, greater than 1 cm, greater than 2 cm, greater than 5 cm, or greater than 8 cm, and / or less than 10 cm, less than 7 cm, less than 5 cm, less than 3 cm, less than 2 cm, less than 1 cm, or less than 0.5 cm. The depth of the monolithic diamond body may be about 2 cm. It will be understood from this disclosure that any suitable size of monolithic diamond body may be used, and this disclosure is not limited in this respect.

[0064] The monolithic diamond body can be of any suitable volume. Suitable monolithic diamond body volumes may include, for example, between 0.1 cubic centimeters and 10 cubic centimeters. In other examples, the monolithic diamond body volume may be greater than 0.1 cubic centimeters, greater than 1 cubic centimeter, greater than 3 cubic centimeters, greater than 5 cubic centimeters, greater than 8 cubic centimeters, or greater than 10 cubic centimeters, and / or less than 15 cubic centimeters, less than 12 cubic centimeters, less than 8 cubic centimeters, less than 6 cubic centimeters, less than 3 cubic centimeters, less than 1 cubic centimeter, or less than 0.5 cubic centimeters. The monolithic diamond body volume may be about 2 cubic centimeters. As will be understood from this disclosure, any suitable monolithic diamond body volume can be used, and this disclosure is not limited in this respect.

[0065] In one or more embodiments, the electrode regions (such as electrode regions 120, 130, as examples) comprise conductive carbon. Any suitable form of conductive carbon can be used. As an example, a suitable form of conductive carbon may be described as a conductive carbon allotrope, such as a non-diamond carbon allotrope. As an example, a suitable form of conductive carbon may include those with sp 2 Carbon allotropes with hybrid orbitals. As another example, suitable forms of conductive carbon may include conductive allotropes of carbon formed by the pyrolysis of diamond. Further examples of conductive carbon may include graphene, graphite, carbon nanotubes, amorphous carbon, and combinations of two or more of them.

[0066] In one or more embodiments, the conductive carbon may be characterized based on resistivity. Conductive carbon can be characterized by any suitable resistivity. Suitable conductive carbon resistivity may include, for example, between 2 microohms / meter (µO / m) and 3,000 µO / m, between 500 µO / m and 800 µO / m, or between 2.5 µO / m and 5 µO / m. Suitable conductive carbon resistivity may additionally or alternatively include less than 5,000 µO / m, less than 500 µO / m, less than 50 µO / m, or less than 5 µO / m.

[0067] In some embodiments, the conductive carbon may additionally or alternatively be characterized based on conductivity. Conductive carbon can be characterized by any suitable conductivity. Suitable conductive carbon conductivity may include, for example, between 1 siemens / meter (S / m) and 300,000 S / m, between 200 S / m and 2,000 S / m, or between 2 S / m and 300,000 S / m. Suitable conductive carbon conductivity may additionally or alternatively include greater than 1 S / m, greater than 100 S / m, greater than 1,000 S / m, greater than 10,000 S / m, or greater than 100,000 S / m.

[0068] The electrode regions can have any suitable form. A suitable form can be characterized by having one or more capacitive interface regions (e.g., surfaces, faces, or axes) that are adapted to be separated from one or more opposing electrode regions by a dielectric diamond layer. For example, as FIG. 1 As shown, the cross-section of electrode region 120 defines a capacitive interface region 124 separated from the opposing electrode region (electrode region 130) by the dielectric diamond layer 114. Similarly, the cross-section of electrode region 130 defines a capacitive interface region 134 separated from the opposing electrode region (electrode region 120) by the dielectric diamond layer 114.

[0069] The capacitive interface regions of the electrode area (e.g., capacitive interface regions 124, 134) can have any suitable surface area. A suitable capacitive interface region surface area can be selected based on factors such as the desired energy density (e.g., an interface region with a larger surface area can provide a higher energy density) and the desired capacitance (which can also be improved with a larger surface area), the dielectric constant of the diamond dielectric, and the thickness of the dielectric diamond layer (in other words, the distance between the two capacitive interface regions). As another example, the capacitive interface region surface area can be selected based on the desired shape of the capacitor's form factor.

[0070] In some embodiments, a suitable electrode region form may include a plate, which may be described as defining a plane. Additionally or alternatively, a suitable electrode region form may include a rod-like form, a cylindrical form, a tubular form, a conical form, a truncated conical form, a prismatic form, a toroidal form, or one or more combinations thereof. A suitable electrode region form may additionally or alternatively include a cross-sectional profile, such as a planar profile, a non-planar profile, a geometric profile, a non-geometric profile, an undulating profile, a wavy profile, or a curved profile. It will be understood from this disclosure that any suitable electrode region form may be used, and this disclosure is not limited in this respect.

[0071] In one or more embodiments, as an example, the capacitor may include electrode regions having the form of plates (i.e., planes), such as FIG. 3B As shown. In a particular embodiment, a first electrode region (e.g., one or more of a plurality of first electrode regions 320) may define a first electrode plane parallel to a second electrode plane defined by a second electrode region (e.g., one or more of a plurality of corresponding second electrode regions 330). That is, the plane defined by the first electrode region may be parallel to the plane defined by the opposing (i.e., adjacent) second electrode regions. Additionally or alternatively, the first electrode plane defined by the first electrode region may not be parallel to the second electrode plane defined by the second electrode region (e.g., see [reference]).FIG. 6B ).

[0072] In some implementations, the first electrode region of one of the multiple unit cells may define a plane parallel to the plane defined by the first electrode region of another unit cell (see, for example). FIG. 6B and FIG. 6C ).

[0073] In one or more embodiments, one or both of the first electrode region and the second electrode region may each form a ring. In embodiments with ring-shaped electrode regions, the electrode regions may be concentric. FIG. 4A and FIG. 4B An exemplary embodiment of a capacitor 400 having a ring-shaped first electrode concentric with a cylindrical second electrode is shown. The capacitor 400 may include a first electrode region 420 having a cylindrical form and a second electrode region 430 having a tubular form. Such embodiments may include a tubular diamond dielectric region 414. In some embodiments, the first electrode region 420 may additionally or alternatively have a tubular form. In such embodiments, for example, the first and second electrodes may form concentric rings or concentric tubular elements.

[0074] FIG. 5A A cross-sectional side view and FIG. 5B Another exemplary embodiment of capacitor 500 is shown in a cross-sectional top view. Capacitor 500 includes a first electrode region 520 and a second electrode region 530, each electrode region having a wedge shape (i.e., a triangular prism shape or a cone shape). Embodiments including electrode regions with a wedge shape can be used, for example, to reduce resistance in the electrode regions.

[0075] The electrode regions can have any suitable thickness. As several examples, a suitable electrode region thickness can be selected based on factors such as desired electrical conductivity (e.g., a thicker electrode region provides higher conductivity than a thinner electrode region), the manufacturing rate of forming each electrode region, and mechanical stress (e.g., on the monolithic diamond substrate, the dielectric diamond layer, and adjacent electrode regions). Suitable electrode region thicknesses can include, for example, between 250 nanometers and 2 micrometers. In other examples, the electrode region thickness can be greater than 0.5 micrometers, greater than 0.8 micrometers, greater than 1 micrometer, greater than 1.5 micrometers, greater than 3 micrometers, or greater than 5 micrometers, and / or less than 10 micrometers, less than 7 micrometers, less than 5 micrometers, less than 3 micrometers, less than 1 micrometer, or less than 0.5 micrometers. The electrode region layer thickness can be about 1 micrometer. It will be understood from this disclosure that any suitable electrode region layer thickness can be used, and this disclosure is not limited in this respect.

[0076] Electrode contact regions (such as first electrode contact region 122 and second electrode contact region 132, as examples) can be described as providing an electrical connection between the electrode region and the environment outside the monolithic diamond body (e.g., monolithic diamond body 110). As an example, first electrode contact region 122 may provide an electrical connection between first electrode region 120 and the environment outside the monolithic diamond body 110. As another example, second electrode contact region 132 may provide an electrical connection between second electrode region 130 and the environment outside the monolithic diamond body 110. Electrode contact regions may additionally or alternatively be described as sub-regions of the electrode region on the surface of the monolithic diamond body.

[0077] The electrode contact area can have any suitable form. Suitable electrode contact area forms may include rectangular, rod-shaped, cylindrical, tubular, conical, truncated conical, prismatic, toroidal, or one or more combinations thereof. It will be understood from this disclosure that any suitable electrode contact area form can be used, and this disclosure is not limited in this respect.

[0078] In one or more embodiments, the electrode contact area may have a width that is less than or equal to the width of the corresponding electrode area. FIG. 7A The cross-sectional side view shows an exemplary capacitor 700 having an electrode contact region with a width equal to the width of the corresponding electrode region.

[0079] FIG. 7B The image shows a front view of capacitor 700, which illustrates a cross-section (along axis 7b) passing through the first electrode region 720. In conjunction with... FIG. 7B In a consistent implementation, the first electrode contact region 722 may have a width approximately equal to the width of the first electrode region 720.

[0080] FIG. 7C The image shows a front view of capacitor 700, which illustrates a cross-section (along axis 7c) through the second electrode region 730. In conjunction with... FIG. 7C In a consistent implementation, the second electrode contact region 732 may have a width approximately equal to the width of the second electrode region 730.

[0081] FIG. 8A Another example of a capacitor 800 is shown in a cross-sectional side view. The capacitor 800 has an electrode contact area with a width smaller than that of the corresponding electrode area.

[0082] FIG. 8B The image shows a front view of capacitor 800, which illustrates a cross-section (along axis 8b) through the first electrode region 820. In conjunction with... FIG. 8BIn a consistent implementation, the first electrode contact area 822 may have a width smaller than that of the first electrode area 820.

[0083] FIG. 8C The image shows a front view of capacitor 800, which illustrates a cross-section (along axis 8c) through the second electrode region 830. In conjunction with... FIG. 8C In a consistent implementation, the second electrode contact region 832 may have a width approximately equal to the width of the second electrode region 830.

[0084] The first electrode contact region and the second electrode contact region (e.g., electrode contact regions 122, 132) can be located on any suitable surface of the monolithic diamond body. As an example (e.g., FIG. 1 As shown, the first electrode contact area and the second electrode contact area may be located on the surface of the monolithic diamond body on opposite sides of the monolithic diamond body. As another example, the first electrode contact area and the second electrode contact area may be located on the surface of the monolithic diamond body on the same side of the monolithic diamond body. FIG. 9A A cross-sectional side view and FIG. 9B An exemplary capacitor 900 is shown in top view. The capacitor 900 may include a first electrode region 920 extending from a first electrode contact region 922 at a surface 912 of the integral body 910 into the integral body 910. In some embodiments, the capacitor 900 may include a second electrode region 930 extending from a second electrode contact region 932 at a surface 912 of the integral body 910 into the integral body 910. A dielectric diamond layer 914 of the integral diamond body separates the first electrode region 920 from the second electrode region 930. FIG. 9A and FIG. 9B In a consistent implementation scheme, one or both of the electrode contact areas 922 and 932 may be cylindrical.

[0085] As will be understood from this disclosure, the electrode contact area may be located on any suitable surface of the monolithic diamond body, and this disclosure is not limited in this respect.

[0086] The dielectric diamond layer (such as dielectric diamond layer 114, as an example) may have any suitable breakdown voltage. Suitable dielectric diamond layer breakdown voltages may include, for example, between 10 megavolts per centimeter (MV / cm) and 100 MV / cm. In other examples, the dielectric diamond layer breakdown voltage may be greater than 10 MV / cm, greater than 20 MV / cm, greater than 35 MV / cm, greater than 50 MV / cm, greater than 80 MV / cm, or greater than 100 MV / cm, and / or less than 120 MV / cm, less than 100 MV / cm, less than 80 MV / cm, less than 65 MV / cm, less than 50 MV / cm, or less than 140 MV / cm. The dielectric diamond layer breakdown voltage may be about 30 MV / cm. It will be understood from this disclosure that any suitable dielectric diamond layer breakdown voltage can be used, and this disclosure is not limited in this respect.

[0087] The dielectric diamond layer can have any suitable dielectric constant. Suitable dielectric diamond layer dielectric constants can include, for example, between 4 and 10. In other examples, the dielectric diamond layer dielectric constant can be greater than 4, greater than 5, greater than 6, greater than 7, greater than 8, or greater than 9 and / or less than 10, less than 9, less than 8, less than 7, less than 6, or less than 4. The dielectric diamond layer dielectric constant can be about 5.5. It will be understood from this disclosure that any suitable dielectric diamond layer dielectric constant can be used, and this disclosure is not limited in this respect.

[0088] The dielectric diamond layer can have any suitable thickness. As several examples, a suitable dielectric diamond layer thickness can be selected based on the desired energy density (which can be improved, for example, by minimizing the thickness of the dielectric diamond layer), the desired durability (which can decrease, for example, as the thickness of the dielectric diamond layer decreases), and the dielectric constant of the dielectric diamond layer. Suitable dielectric diamond layer thicknesses can include, for example, between 250 nanometers and 2 micrometers. In other examples, the dielectric diamond layer thickness can be greater than 0.25 micrometers, greater than 0.5 micrometers, greater than 0.8 micrometers, greater than 1 micrometer, greater than 1.5 micrometers, greater than 3 micrometers, or greater than 5 micrometers and / or less than 10 micrometers, less than 7 micrometers, less than 5 micrometers, less than 3 micrometers, less than 1 micrometer, or less than 0.5 micrometers. The dielectric diamond layer thickness can be about 1 micrometer. It will be understood from this disclosure that any suitable dielectric diamond layer thickness can be used, and this disclosure is not limited in this respect.

[0089] In some implementations, the dielectric diamond layer may have a uniform thickness across the surface region of the dielectric diamond layer (e.g., see...). FIG. 3B and FIG. 5A to FIG. 5B Additionally or alternatively, the dielectric diamond layer may have a non-uniform (e.g., tapered) thickness across a surface region of the dielectric diamond layer (e.g., see [reference needed]).FIG. 6B ).

[0090] In one or more embodiments, the capacitor may include a first electrode connector that electrically connects at least two first electrode regions of a plurality of capacitor unit cells. Additionally or alternatively, the capacitor may include a second electrode connector that electrically connects at least two second electrode regions of a plurality of capacitor unit cells. The first or second electrode connector may each be electrically connected to a power source (such as a battery or another capacitor, just two examples) for transferring energy from the power source to the capacitor. Additionally or alternatively, the first or second electrode connector may each be electrically connected to a device (e.g., leads such as those in a medical device) for transferring energy from the capacitor to the leads.

[0091] Electrode connectors may comprise any suitable material. As several examples, a suitable electrode connector material may be selected based on the material's electrical conductivity, desired assembly method, and material compatibility (such as between the electrode connector and the electrode region or between the electrode connector and the monolithic diamond substrate). As another example, a suitable material may be selected based on the compatibility of the material with the conductive carbon of the electrode region. Compatibility may include factors such as the contact resistance between the electrode connector material and the conductive carbon or the adhesion between the electrode connector material and the conductive carbon. Suitable electrode connector materials may include, for example, metals, conductive resins, conductive epoxy resins (such as silver-impregnated epoxy resins), conductive polymers, or combinations of two or more of these. As yet another example, suitable electrode connector materials may include aluminum, copper, silver, gold, platinum, or combinations of two or more of these. As yet another example, suitable electrode connector materials may include simple metal layers, sputtered metal, solder balls, or combinations of two or more of these. It will be understood from this disclosure that any suitable electrode connector material may be used, and this disclosure is not limited in this respect.

[0092] FIG. 10A cross-sectional side view of an exemplary capacitor 1000 with electrode connectors is shown. The capacitor 1000 may include a plurality of first electrode regions 1020, each extending from one of a plurality of first electrode contact regions 1022 at a surface 1012 of the integral diamond body 1010 into the integral diamond body 1010. The capacitor 1000 may also include a plurality of second electrode regions 1030, each extending from one of a plurality of second electrode contact regions 1032 at a surface 1012 of the integral diamond body 1010 into the integral diamond body 1010. Embodiments consistent with aspects of the capacitor 1000 may include a first electrode connector 1060 and a second electrode connector 1070. The first electrode connector 1060 may be electrically connected to at least one of the plurality of first electrode regions 1020 via a first electrode contact region 1022 of a corresponding first electrode region 1020. The second electrode connector 1070 can be electrically connected to at least one of the plurality of second electrode regions 1030 via the second electrode contact region 1032 of the respective second electrode region 1030.

[0093] In one or more embodiments, a first electrode connector may be electrically connected to the first electrode connector of another capacitor. Similarly, a second electrode connector may be electrically connected to the second electrode connector of another capacitor. That is, two or more capacitors may be electrically connected via their respective first and second electrode connectors. For example, multiple capacitors may be electrically connected in parallel, in series, or in a combination thereof.

[0094] FIG. 11 A cross-sectional side view of an exemplary assembly 1100 of two capacitors is shown. Assembly 1100 may include a first capacitor 1110 and a second capacitor 1120. The first capacitor 1110 may have one or both of a first electrode connector 1112 and a second electrode connector 1114. Similarly, the second capacitor 1120 may have one or both of a first electrode connector 1122 and a second electrode connector 1124. The first electrode connector 1112 of the first capacitor 1110 may be electrically connected, for example, via an optional bridge 1130 to the first electrode connector 1122 of the second capacitor 1120. The bridge 1130 may comprise any suitable material. Suitable bridge materials may include one or more of the suitable electrode connector materials discussed in this disclosure. It will be understood from this disclosure that any suitable bridging material may be used, and this disclosure is not limited in this respect.

[0095] FIG. 12A The diagram shows a flowchart illustrating a method 1200 for manufacturing a capacitor according to this disclosure. It should be noted that the operations associated with the methods disclosed herein are not particularly limited to...FIG. 12A The order reflected in the text.

[0096] Method 1200 may include focusing electromagnetic radiation 1220 onto a monolithic diamond body, thereby converting a region of the monolithic diamond body 1230 into a conductive region comprising conductive carbon. Focusing the electromagnetic radiation 1220 may include focusing a pulsed laser (e.g., an ultrafast pulsed laser) onto the monolithic diamond body to convert a target region of the diamond into a conductive region of conductive carbon. Converting a region of the monolithic diamond body 1230 into a conductive region may include forming a conductive first electrode region within the monolithic diamond body.

[0097] Focusing on 1220 electromagnetic radiation may include forming a first electrode contact region on the surface of the monolithic diamond body. The first electrode contact region may be adjacent to, electrically connected to, or a combination thereof, a first electrode region.

[0098] Focusing electromagnetic radiation 1220 may include shaping 1210 the electromagnetic radiation (such as a laser beam) to produce a Gaussian focus. For example, a Gaussian laser pulse may be focused within a monolithic diamond body. A Gaussian focus can be described as exhibiting a relatively shallow axial depth of focus, which may be approximately the same size as the lateral extent of the focus. In other words, a Gaussian focus can be described as having a low aspect ratio.

[0099] Focusing 1220 on the electromagnetic radiation may additionally or alternatively include shaping 1210 the electromagnetic radiation (such as a laser beam) to produce a Bessel focus. For example, a Bessel laser pulse may be focused within the monolithic diamond body. The Bessel focus can be described as exhibiting a relatively deep axial depth of focus, which may be hundreds of times longer than the lateral extent of the focus. In other words, the Bessel focus can be described as forming a cylindrical focal region conceptually similar to a pencil. In other words, the Bessel focus can be described as having a low aspect ratio. Although the beam of the Bessel laser can be described as converging across a wide lateral extent, the energy intensity can be described as reaching a threshold for converting the monolithic diamond body only within the very center of the overlapping region, within 1 to 2 micrometers.

[0100] In some embodiments, method 1200 may include forming a conductive second electrode region 1240 within a monolithic diamond body. The second electrode region may be formed, for example, by focusing electromagnetic radiation 1220 into the monolithic diamond body. The second electrode region may contain conductive carbon formed by diamond pyrolysis. As described herein, the second electrode region may be separated from the first electrode region by a dielectric diamond layer.

[0101] In one or more embodiments, method 1200 may include establishing a 1250 capacitor unit cell, the capacitor unit cell including a dielectric diamond layer separating a first electrode region and a second electrode region.

[0102] In some embodiments, method 1200 may include forming a plurality of capacitor unit cells within a monolithic diamond body. Forming a plurality of capacitor unit cells within a monolithic diamond body may include forming interdigitated first electrode regions and second electrode regions.

[0103] FIG. 12B The flowchart illustrating a method 1200 for manufacturing a capacitor according to this disclosure continues to be shown. It should be noted that the operations associated with the methods disclosed herein are not particularly limited to… FIG. 12B The order reflected in the text.

[0104] In some embodiments, method 1200 may include an electrode connector forming a first electrode region 1270 electrically connectable to at least one of a plurality of capacitor unit cells. Forming the electrode connector 1270 electrically connectable to the first electrode region of at least one of the plurality of capacitor unit cells may include forming an electrode connector electrically connectable to the first electrode region of at least one of the plurality of capacitor unit cells. For example, forming the electrode connector 1270 may include applying a photolithographic mask to the surface of a monolithic diamond body.

[0105] In one or more embodiments, method 1200 may include electrically connecting the electrode connector of the capacitor 1280 to the second electrode connector of the second capacitor.

[0106] FIG. 13A to FIG. 13D The diagram illustrates various aspects of a method 1200 for fabricating a capacitor 1300 according to the present disclosure. As described herein, method 1200 may include focusing electromagnetic radiation 1220 onto a monolithic diamond body 1310, thereby converting a region of the monolithic diamond body 1310 1230 into a conductive region comprising conductive carbon. Converting a region of the monolithic diamond body 1310 1230 into a conductive region may include forming a first electrode region 1320 within the monolithic diamond body 1310. In some embodiments, as described herein, method 1200 may include forming a second electrode region 1330 1240 within the monolithic diamond body 1310. In one or more embodiments, method 1200 may include establishing a capacitor unit cell 1250, the capacitor unit cell including a dielectric diamond layer 1312 separating the first electrode region 1320 and the second electrode region 1330.

[0107] FIG. 14A to FIG. 14BThe diagram illustrates aspects of a method 1200 for manufacturing a capacitor assembly 1400 according to the present disclosure. As described herein, method 1200 may include forming an electrode connector 1460 1270 electrically connectable to at least one of a plurality of capacitor unit cells. Method 1200 may also include forming a second electrode connector 1470 electrically connectable to a second electrode region electrically connectable to at least one of the plurality of capacitor unit cells. As described herein, method 1200 may also include electrically connecting the electrode connector 1460 of capacitor 1300 1280 to a second electrode connector of a second capacitor, thereby forming capacitor assembly 1400.

[0108] Exemplary Aspects

[0109] The following are exemplary embodiments based on this disclosure.

[0110] Aspect 1 is a capacitor comprising:

[0111] A monolithic diamond body, comprising:

[0112] A first electrode region comprising conductive carbon extends from a first electrode contact region on the outer surface of the monolithic diamond body into the monolithic diamond body.

[0113] A second electrode region, comprising conductive carbon, extends from a second electrode contact region on the outer surface of the monolithic diamond body into the monolithic diamond body; and

[0114] The monolithic diamond body has a dielectric diamond layer that separates the first electrode region from the second electrode region.

[0115] Aspect 2 is a capacitor according to any one of Aspects 1 and 3 to 16, wherein one or both of the first electrode region and the second electrode region each define a plane.

[0116] Aspect 3 is a capacitor according to any one of aspects 1 to 2 and 4 to 16, wherein the first electrode region defines a first electrode plane and the second electrode region defines a second electrode plane parallel to the first electrode plane.

[0117] Aspect 4 is a capacitor according to aspect 3, wherein the first electrode contact region defines a first electrode contact plane coplanar with the first electrode plane.

[0118] Aspect 5 is a capacitor according to any one of aspects 1 to 4 and 6 to 16, wherein one or both of the first electrode region and the second electrode region each define a ring.

[0119] Aspect 6 is a capacitor according to any one of aspects 1 to 5 and 7 to 16, wherein the first electrode region defines a first electrode ring, and the second electrode region defines a second electrode ring concentric with the first electrode ring.

[0120] Aspect 7 is a capacitor according to any one of aspects 1 to 6 and 8 to 16, wherein one or both of the first electrode region and the second electrode region each define an axis.

[0121] Aspect 8 is a capacitor according to any one of aspects 1 to 7 and 9 to 16, wherein the first electrode region defines a first electrode axis and the second electrode region defines a second electrode axis parallel to the first electrode axis.

[0122] Aspect 9 is a capacitor according to aspect 8, wherein the first electrode contact region defines a first electrode contact axis coaxial with the first electrode axis.

[0123] Aspect 10 is a capacitor according to any one of aspects 1 to 8 and 10 to 16, the capacitor further comprising:

[0124] The third electrode region extends from the third electrode contact region on the outer surface of the monolithic diamond body into the monolithic diamond body.

[0125] A fourth electrode region extends from the fourth electrode contact region on the outer surface of the monolithic diamond body into the monolithic diamond body; and

[0126] The monolithic diamond body has a second dielectric diamond layer that separates the third electrode region from the fourth electrode region.

[0127] Aspect 11 is a capacitor according to aspect 10, wherein the first electrode region defines a first electrode plane and the third electrode region defines a third electrode plane parallel to the first electrode plane.

[0128] Aspect 12 is a capacitor according to any one of aspects 1 to 11 and 13 to 16, wherein the first electrode region and the second electrode region have opposite polarities.

[0129] Aspect 13 is a capacitor according to any one of aspects 1 to 12 and 14 to 16, wherein the width of the first electrode region is greater than or equal to the width of the first electrode contact region.

[0130] Aspect 14 is a capacitor according to any one of aspects 1 to 13 and 15 to 16, wherein the thickness of the dielectric diamond layer is between 250 nanometers and 2 micrometers.

[0131] Aspect 15 is a capacitor according to any one of aspects 1 to 14 and 16, wherein the thickness of the first electrode region and the thickness of the second electrode region are each between 250 nanometers and 2 micrometers.

[0132] Aspect 16 is a capacitor according to any one of aspects 1 to 15, wherein the width of the integral diamond body is between 2 cm and 6 cm, and wherein the thickness of the integral diamond body is between 0.1 cm and 0.5 cm.

[0133] Aspect 17 is a capacitor comprising:

[0134] Integral diamond body; and

[0135] Multiple capacitor unit cells, each unit cell comprising:

[0136] A first electrode region comprising conductive carbon extends from a first electrode contact region on the outer surface of the monolithic diamond body into the monolithic diamond body.

[0137] A second electrode region, comprising conductive carbon, extends from a second electrode contact region on the outer surface of the monolithic diamond body into the monolithic diamond body; and

[0138] The monolithic diamond body has a dielectric diamond layer that separates the first electrode region from the second electrode region.

[0139] Aspect 18 is a capacitor according to any one of aspects 17 and 19 to 22, wherein the first electrode region of at least one of the plurality of capacitor unit cells is the second electrode region of another capacitor unit cell among the plurality of capacitor unit cells.

[0140] Aspect 19 is a capacitor according to any one of aspects 17 to 18 and 20 to 22, the capacitor further comprising a first electrode connector electrically connecting at least two first electrode regions of the plurality of capacitor unit cells.

[0141] Aspect 20 is a capacitor according to aspect 19, wherein the first electrode connector is electrically connected to the first electrode connector of a second capacitor including a second integral diamond body.

[0142] Aspect 21 is a capacitor according to any one of aspects 17 to 20 and 22, wherein the first electrode connector comprises a simple metal layer, sputtered metal, solder balls, or a combination of two or more of the above.

[0143] Aspect 22 is a capacitor according to any one of aspects 17 to 21, wherein the first electrode connector comprises one or both of a metal and a conductive resin.

[0144] Aspect 23 is a method for manufacturing a capacitor, the method comprising:

[0145] Electromagnetic radiation is focused onto a monolithic diamond body to transform a region of the monolithic diamond body into a conductive region containing conductive carbon, thereby forming a first electrode region within the monolithic diamond body; and

[0146] A second electrode region is formed within the monolithic diamond body, the second electrode region being separated from the first electrode region by the dielectric diamond layer of the monolithic diamond body.

[0147] Aspect 24 is the method according to any one of aspects 23 and 25 to 32, wherein forming a first electrode region and forming a second electrode region establishes a capacitor unit cell, and the method further includes forming a plurality of capacitor unit cells within the monolithic diamond body.

[0148] Aspect 25 is the method according to any one of aspects 23 to 24 and 26 to 32, wherein focusing electromagnetic radiation into the monolithic diamond body includes shaping the laser beam to produce a Bessel focus.

[0149] Aspect 26 is the method according to any one of aspects 23 to 25 and 27 to 32, wherein focusing electromagnetic radiation into the monolithic diamond body includes shaping the laser beam to produce a Gaussian focus.

[0150] Aspect 27 is the method according to any one of aspects 23 to 26 and 28 to 32, wherein focusing electromagnetic radiation into the monolithic diamond body includes focusing pulsed electromagnetic radiation into the monolithic diamond body.

[0151] Aspect 28 is a method according to any one of aspects 23 to 27 and 29 to 32, wherein electromagnetic radiation is focused into a monolithic diamond body to convert a region of the monolithic diamond body into a conductive region containing conductive carbon, thereby forming a first electrode region in the monolithic diamond body including forming a first electrode contact region at the surface of the monolithic diamond body, the first electrode contact region being adjacent to and electrically connected to the first electrode region.

[0152] Aspect 29 is the method according to any one of aspects 23 to 28 and 30 to 32, the method further comprising forming an electrode connector electrically connected to the first electrode region.

[0153] Aspect 30 is the method according to any one of aspects 29 and 31 to 32, wherein the electrode connector comprises one or both of a metal and a conductive resin.

[0154] Aspect 31 is the method according to any one of aspects 29 to 30 and 32, wherein forming the electrode connector includes sputtering metal.

[0155] Aspect 32 is the method according to any one of aspects 29 to 31, wherein forming the electrode connector includes applying a photolithographic mask to the surface of the integral diamond body.

[0156] It should also be noted that, as used in this specification and the appended claims, the phrase "configured" describes a system, device, or other structure constructed to perform a particular task or employ a particular configuration. The term "configured" may be used interchangeably with similar terms such as "arranged," "constructed," or "manufactured."

[0157] All disclosures and patent applications in this specification are indicative of the level of a person skilled in the art to which this technology pertains. All disclosures and patent applications are incorporated herein by reference to the extent that each individual disclosure or patent application is specifically and individually indicated to be incorporated herein by reference. In the event of any inconsistency between the disclosure of this application and the disclosure of any document incorporated herein by reference, the disclosure of this application shall prevail.

[0158] This application is intended to cover adaptations or variations of the subject matter. It should be understood that the above description is intended to be illustrative and not restrictive, and the claims are not limited to the exemplary embodiments listed herein.

Claims

1. A capacitor, the capacitor comprising: A monolithic diamond body, the monolithic diamond body comprising: A first electrode region comprising conductive carbon extends from a first electrode contact region on the outer surface of the monolithic diamond body into the monolithic diamond body. A second electrode region, comprising conductive carbon, extends from a second electrode contact region at the outer surface of the monolithic diamond body into the monolithic diamond body; and The integral diamond body has a dielectric diamond layer that separates the first electrode region and the second electrode region.

2. The capacitor of claim 1, wherein one or both of the first electrode region and the second electrode region each define a plane.

3. The capacitor according to claim 1 or 2, wherein the first electrode region defines a first electrode plane, and the second electrode region defines a second electrode plane parallel to the first electrode plane.

4. The capacitor of claim 3, wherein the first electrode contact region defines a first electrode contact plane coplanar with the first electrode plane.

5. The capacitor according to any of the preceding claims, wherein one or both of the first electrode region and the second electrode region each define a ring.

6. The capacitor according to any of the preceding claims, wherein the first electrode region defines a first electrode ring, and the second electrode region defines a second electrode ring concentric with the first electrode ring.

7. The capacitor according to any of the preceding claims, wherein the first electrode region defines a first electrode axis, and the second electrode region defines a second electrode axis parallel to the first electrode axis.

8. The capacitor of claim 7, wherein the first electrode contact region defines a first electrode contact axis coaxial with the first electrode axis.

9. The capacitor according to any of the preceding claims, wherein the capacitor further comprises: The third electrode region extends from the third electrode contact region at the outer surface of the monolithic diamond body into the monolithic diamond body; A fourth electrode region extends from a fourth electrode contact region on the outer surface of the monolithic diamond body into the monolithic diamond body. and The second dielectric diamond layer of the integral diamond body separates the third electrode region and the fourth electrode region.

10. The capacitor of claim 10, wherein the first electrode region defines a first electrode plane, and the third electrode region defines a third electrode plane parallel to the first electrode plane.

11. The capacitor according to any of the preceding claims, wherein the thickness of the dielectric diamond layer is between 250 nanometers and 2 micrometers, and wherein the thickness of the first electrode region and the thickness of the second electrode region are each between 250 nanometers and 2 micrometers.

12. The capacitor according to any of the preceding claims, wherein the width of the integral diamond body is between 2 cm and 6 cm, and wherein the thickness of the integral diamond body is between 0.1 cm and 0.5 cm.

13. A capacitor, said capacitor comprising: Integral diamond body; and Multiple capacitor unit cells, each unit cell comprising: A first electrode region comprising conductive carbon extends from a first electrode contact region on the outer surface of the monolithic diamond body into the monolithic diamond body. A second electrode region, comprising conductive carbon, extends from a second electrode contact region at the outer surface of the monolithic diamond body into the monolithic diamond body; and The integral diamond body has a dielectric diamond layer that separates the first electrode region and the second electrode region.

14. The capacitor of claim 13, wherein the first electrode region of at least one of the plurality of capacitor unit cells is the second electrode region of another capacitor unit cell of the plurality of capacitor unit cells.

15. A method for manufacturing a capacitor, the method comprising: Electromagnetic radiation is focused onto the monolithic diamond body to transform a region of the monolithic diamond body into a conductive region containing conductive carbon, thereby forming a first electrode region within the monolithic diamond body. as well as A second electrode region is formed within the monolithic diamond body, the second electrode region being separated from the first electrode region by the dielectric diamond layer of the monolithic diamond body.

16. The method of claim 15, wherein forming a first electrode region and forming a second electrode region establishes a capacitor unit cell, the method further comprising forming a plurality of capacitor unit cells within the monolithic diamond body.

17. The method according to any one of claims 15 or 16, wherein focusing electromagnetic radiation onto the monolithic diamond body comprises: The laser beam is shaped to produce a Bezier focus.

18. The method according to any one of claims 15 to 17, wherein focusing electromagnetic radiation onto the monolithic diamond body comprises: The laser beam is shaped to produce a Gaussian focus.

19. The method according to any one of claims 15 to 18, wherein focusing electromagnetic radiation onto the monolithic diamond body comprises: The pulsed electromagnetic radiation is focused onto the monolithic diamond body.

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