Coating tool with built-in winding and unwinding device
By using a coating fixture with a built-in unwinding and winding device, the problems of large size and high energy consumption of existing coating equipment are solved, enabling efficient continuous coating of large-area flexible substrates and supporting equipment upgrades and stable mass production of multi-layer films.
Patent Information
- Application Number
- CN202511139579.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-08-14
- Publication Date
- 2025-12-05
AI Technical Summary
Existing coating equipment and processes are bulky and complex, have low processing efficiency and high energy consumption when processing large-area flexible substrates, and are difficult to achieve continuous mass production of precision functional films with multi-layered structures.
Design a coating fixture with built-in winding and unwinding device. The film material is clamped in a vacuum chamber to achieve continuous coating of the film material. The process is simplified and the built-in winding and unwinding device avoids the vacuuming and heating process each time the substrate is clamped.
It improves coating efficiency, reduces energy consumption, simplifies equipment structure, enables large-area continuous coating, supports the upgrading and transformation of existing equipment, and can process films with larger size and area.
Smart Images
Figure CN121065656A_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The present application relates to the field of coating equipment and coating process, in particular to a coating tool with built-in winding and unwinding device. BACKGROUND
[0002] The preparation of optical, optoelectronic or semiconductor functional thin films by physical or physical-chemical vapor deposition technology plays an increasingly important role in modern scientific and technological innovation activities and the promotion of industrial development. The application of vacuum coating deposition technologies represented by PVD technology and PECVD technology is becoming more and more widespread. Among them, the development of In-line magnetron sputtering multi-chamber continuous coating equipment, LOAD-LOCK type multi-chamber high-efficiency sputtering coating equipment, Roll to Roll roll-to-roll continuous coating equipment and processing technology is particularly prominent, and has become the mainstream technology in the optical, optoelectronic and new solar cell industries. In recent years, the demand for functional thin films on flexible substrates using the above technologies has been increasing, and the research on related equipment and processing technology for large-area continuous and efficient deposition of functional thin films on flexible substrates has been very active. The research results and application technology have promoted the development of flexible functional thin film coating equipment and processing technology, and significant progress has been made.
[0003] Although the coating of flexible substrates using the above equipment and process technology has been successful, the common problem of existing technology and equipment is that whether using a magnetron sputtering single-chamber coating equipment or using a magnetron sputtering In-line multi-chamber continuous coating equipment, a LOAD-LOCK type multi-chamber high-efficiency sputtering coating equipment and its processing technology, not only the effective area of the coating is determined by the size of the coating chamber of the coating equipment and the coating tool for carrying the substrate, but also the main process flow of the existing technology is: the substrate is clamped in the tool at room temperature in an atmospheric environment, then input into the vacuum chamber, the vacuum chamber is evacuated to high vacuum, the substrate needs to be heated at the same time, the required vacuum degree and temperature are met, then the multi-layer film is coated according to the film system structure, the coating is completed, the vacuum chamber is vented and output to the room temperature atmospheric environment for the next processing procedure. Therefore, when the area of the coated substrate is large, a larger vacuum coating chamber matching the substrate is needed to realize the coating, and each piece of coated substrate needs to go through the process flow of evacuating and heating at the same time, then coating, and venting and outputting to the room temperature atmospheric environment. Not only does the coating equipment become large and complex, the floor area and production line investment increase, but also the processing efficiency is low, the energy consumption is high, and the manufacturing cost is high.
[0004] Although the Roll to Roll continuous coating equipment and processing technology can realize large-area continuous coating, the winding and unwinding device is isolated from the vacuum chamber and set outside. Limited by the structure of the equipment and the processing technology, the existing technology and equipment can only process and manufacture functional thin films with relatively simple film layer structure, relatively small number of film layers and relatively low film thickness control precision. It is still difficult to realize stable and continuous mass production of precise functional thin films with multiple layer structures. SUMMARY
[0005] To solve the above problems existing in the prior art, the purpose of the present application is to provide a coating tool with built-in winding and unwinding device, which can realize large-area continuous coating by feeding the film material into the vacuum chamber once.
[0006] In order to achieve the above purpose, the technical scheme adopted by the present application is: A coating tool with built-in winding and unwinding device, the coating tool is internally provided with a winding and unwinding device for unwinding and winding the film material, the winding and unwinding device comprises an unwinding roller, a winding roller and guide rollers A and B matched with the unwinding roller and the winding roller respectively; the coating surface of the substrate carried by the coating tool can be a cylindrical surface or a curved surface or a plane.
[0007] Further, the coating tool is a cylindrical coating cylinder with a diameter equal to D and a height equal to H, the outer diameter of the central shaft for driving the coating cylinder to rotate is d, the winding and unwinding device of the film material is located in the internal space between the inner wall of the coating cylinder and the outer circle of the central shaft, the outer wall of the coating cylinder supports the coating substrate, and a slit matched with the winding and unwinding device of the film material is formed on the coating cylinder.
[0008] The coating tool is a rectangular cuboid type planar coating tool, the coating surface is a plane with a length equal to L and a width equal to W, the thickness of the coating tool is t, the winding and unwinding device of the film material is located in the interior of the coating tool, the outer surface of the coating tool supports the coating substrate, and a slit matched with the unwinding and winding of the film material is respectively formed at both ends of the coating tool; the winding and unwinding device is installed in left and right end winding mode or in upper and lower end winding mode.
[0009] The coating tool is vertically installed and used, or horizontally installed and used.
[0010] Compared with the prior art, the present application has the following advantages: 1) The present application solves the process problem that the existing technology must clamp the base material in the room temperature atmosphere environment by clamping the film-coated base material in the vacuum chamber, without the need to deflate and vacuum every time the base material is clamped to perform the film-coating process, achieving the purpose of one-time entry of the film material into the vacuum chamber for large-area continuous film-coating. Not only does it shorten the process flow, improve the film-coating efficiency, and reduce the processing energy consumption, but it also solves the problem of large-size base material and large-area film-coating requiring larger chamber film-coating equipment, providing a simple and easy-to-implement solution for large-area continuous film-coating of flexible base material.
[0011] 2) The present application only needs to change the film-coating tool without changing the film-coating equipment cavity to complete the upgrading of the existing technology production line, which can greatly improve the film-coating efficiency and reduce the energy consumption while achieving larger size and larger effective area continuous film-coating that cannot be achieved by the existing film-coating equipment.
[0012] 3) The present application can form a strong synergistic innovation effect with the development of new film-coating technology and new generation of film-coating equipment, such as changing the design concept of existing magnetron sputtering single-chamber film-coating equipment, magnetron sputtering In-line multi-chamber continuous film-coating equipment, LOAD-LOCK type multi-chamber high-efficiency sputtering film-coating equipment, simplifying the equipment structure and processing technology, and promoting the development and progress of film-coating equipment and film-coating process technology. BRIEF DESCRIPTION OF DRAWINGS
[0013] Figure 1 is a structural schematic diagram of the cylindrical film-coating tool described in the present application; Figure 2 is a structural schematic diagram of the rectangular cuboid type planar film-coating tool. DETAILED DESCRIPTION
[0014] The present application will be described in detail below in conjunction with the drawings and examples.
[0015] As Figure 1The image shows an embodiment of a cylindrical coating fixture with a built-in unwinding and winding device according to the present invention. An unwinding and winding device for unwinding and winding the film material is provided in the internal space between a cylindrical coating cylinder 010 with diameter D and height H and a central axis 011 with an outer diameter d that drives the coating cylinder to rotate. The unwinding and winding device includes an unwinding roller 012, a winding roller 016, and guide rollers A 013 and B 015 that cooperate with the unwinding roller and winding roller, respectively. The substrate output from the unwinding roller 012 is wound around the outer surface of the cylindrical cylinder once through the guide roller A 013 and the slit 014 on the coating cylinder, and then passes through the slit 014 and the guide roller B 015. From roll 015 to roll 016, the substrate wound around the outer surface of the cylindrical tube enters the coating process. Once the coating of one film system is complete, roll 016 winds up the coated portion, while unwind roll 012 simultaneously outputs a new substrate to be coated. After the substrate is wound around the outer surface of the coating cylinder 010 once, it re-enters the coating process. This cycle repeats to achieve automatic clamping and continuous coating of the film material within the vacuum chamber until the substrate loaded on unwind roll 012 is used up. The substrate supported by the above coating fixture has a cylindrical coating surface.
[0016] like Figure 2 The diagram illustrates an embodiment of a rectangular planar coating fixture according to the present invention. The outer surface 020 of the coating fixture is a plane with a length equal to L and a width equal to W. An unwinding / winding device is provided within an internal space of thickness t for unwinding and rewinding the film material. The unwinding / winding device includes an unwinding roller 021, a rewinding roller 026, and guide rollers A022 and B025, which respectively cooperate with the unwinding roller and the rewinding roller. The unwinding roller 021 and guide roller A022 are positioned at the left and right ends of the internal space, respectively, as are the rewinding roller 026 and guide roller B025. The substrate output from the unwinding roller 021 passes through the guide roller A 022 and the slit 023 on the coating fixture to cover the outer surface 020. Then it passes through the slit 024 and the guide roller B 025 to the winding roller 026. The substrate covering the outer surface 020 enters the coating process. When the film layer structure of a film system is coated, the winding roller 026 winds up the coated part. At the same time, the unwinding roller 021 outputs a new coated substrate to cover the outer surface 020 of the fixture and enters the above coating process again. This cycle is repeated to realize the automatic clamping and continuous coating of film materials in the vacuum chamber until the substrate loaded on the unwinding roller 021 is used up.
[0017] The above-described rectangular planar coating fixture embodiment features winding and unwinding devices installed at both ends of the fixture. Alternatively, depending on the requirements of the area or width of the coating substrate, the winding and unwinding devices can be installed at the top and bottom ends. The coating surface of the substrate supported by the above-described coating fixture can be flat or curved.
[0018] The above embodiments and accompanying drawings describe in detail the application of the coating fixture constructed by the present invention when it is installed vertically, and it is also suitable for coating equipment installed horizontally.
Claims
1. A coating fixture with a built-in unwinding and rewinding device, characterized in that: The coating fixture is equipped with a winding and unwinding device for unwinding and rewinding the film material. The winding and unwinding device includes an unwinding roller, a winding roller, and guide rollers A and B that cooperate with the unwinding roller and the winding roller, respectively. The substrate carried by the coating fixture has a cylindrical, curved, or flat coating surface.
2. The coating fixture with a built-in winding and unwinding device according to claim 1, characterized in that: The coating fixture is a cylindrical coating tube with a diameter of D and a height of H. The outer diameter of the central shaft that drives the coating tube to rotate is d. The film winding and unwinding device is located in the internal space between the inner wall of the coating tube and the outer diameter of the central shaft. The outer wall of the coating tube supports the coating substrate. A slit is opened on the coating tube to cooperate with the film winding and unwinding device.
3. The coating fixture with a built-in unwinding and rewinding device according to claim 1, characterized in that: The coating fixture is a rectangular planar coating fixture with a coating surface of length L and width W. The coating fixture has a thickness of t. The film material unwinding and winding device is located inside the coating fixture. The coating substrate is supported on the outer surface of the coating fixture. Slits that cooperate with the unwinding and winding of the film material are opened at both ends of the coating fixture. The unwinding and winding device is installed in a left-right winding manner or in a top-bottom winding manner.
4. The coating fixture with a built-in unwinding and rewinding device according to claim 1, characterized in that: The coating fixture can be installed vertically or horizontally.