High efficiency stable heating solid precursor source bottle

Abstract

The application discloses a high-efficiency stable heating type solid-state precursor source bottle and relates to the technical field of semiconductor manufacturing. The high-efficiency stable heating type solid-state precursor source bottle comprises a cavity module, the cavity module is composed of a left cavity and a right cavity, and an exhaust module is arranged in the cavity module. The exhaust module can make the input carrier gas flow in a covering mode, thereby uniformly contacting the solid-state precursor in the left cavity. The left cavity is specially used for the storage and volatilization reaction of the solid-state precursor, can provide a suitable heating and volatilization space for the precursor, and reduces local accumulation caused by limited space. The right cavity is specially used for the pure transportation of gas. The inner wall of the right cavity is polished, which further reduces the adsorption and residue of the precursor gas on the cavity wall, avoids the concentration fluctuation caused by the mixture of the residual gas and the newly generated gas, and greatly reduces the residue of the solid source.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor manufacturing, in particular to a high-efficiency and stable heating type solid-state precursor source bottle. BACKGROUND

[0002] The high-efficiency and stable heating type solid-state precursor source bottle relates to the technical field of key components for atomic layer deposition (ALD) equipment, and is especially suitable for loading and transporting solid-state precursors such as dichlorodioxymolybdenum and trimethyl indium 3, and is widely used in the fields of semiconductors, optoelectronics and the like.

[0003] However, the prior art still has the following defects in specific use: 1. The traditional source bottle directly transports solid sources by using a single cavity, which leads to natural limitations in the contact mode of the carrier gas and the solid-state source material. A simple carrier gas inlet, outlet and basic storage area are usually arranged in the single cavity, and there is a lack of flow guide structure for guiding the uniform distribution of airflow. After the carrier gas enters the cavity, it is easy to directly discharge from the outlet along the shortest path, forming a "airflow short circuit" phenomenon. At the same time, the solid-state source material is directly stacked at the bottom of the cavity without layering or dispersion design. The carrier gas can only contact the surface layer of the material and cannot penetrate to the inside of the stack. This single space design greatly limits the effective contact area of the carrier gas and the source material, and the material stacking area is easy to be locally compacted due to uneven airflow scouring, further reducing the volatilization interface, ultimately leading to uneven volatilization of the source material, increased cavity residues and reduced transportation efficiency.

[0004] This design results in large fluctuations in the concentration of precursors carried by the carrier gas, making the supply of precursors in the reaction chamber unstable, and the deposited thin film is prone to problems such as uneven thickness and composition deviation, resulting in a decrease in product yield. In addition, a large amount of cavity residues are generated due to insufficient volatilization of the source material, and the actual utilization rate is only 60% to 70%, resulting in serious waste of precursors. The residual material needs to be frequently disassembled and cleaned, increasing the cost of manual maintenance and the downtime of the equipment.

[0005] 2. Although some source bottles in the prior art are equipped with a filter structure, the characteristics of solid-state precursors and the actual transportation scenario are not fully considered during the design stage, resulting in a disconnection between the pore size design and the actual demand. On the one hand, the size of the agglomerated particles that may be formed after the volatilization of the precursors is not accurately calculated during the design, and a single pore size is set only according to the size of conventional solid particles, without considering the size difference of the agglomerated particles that may be generated due to temperature fluctuations and changes in carrier gas flow rate during the heating and volatilization process of different precursors. On the other hand, in order to avoid the influence of the filter structure on the airflow velocity, excessive pursuit of "large pore size and low resistance" ignores the need for interception of agglomerated particles, and the filter structure cannot effectively play a role in the end.

[0006] Unreasonable filter structure pore size will have multiple negative effects on subsequent thin film deposition process and equipment operation: first, the solid particle agglomerates that are not intercepted will adhere to the surface of the deposited thin film and form impurity points or defect areas when entering the ALD reaction chamber with the carrier gas, resulting in a decrease in thin film purity and a significant reduction in product yield; second, the agglomerated particles are easy to accumulate at the gas inlet, pipeline valves and other parts of the reaction chamber, causing pipeline blockage, which not only increases maintenance time and cost due to frequent shutdown and disassembly for cleaning, but also may cause the gas tightness of the equipment to decrease due to particle abrasion of valve sealing elements, thereby causing the risk of precursor leakage.

[0007] 3. The existing source bottle is equipped with precursor particle materials inside, and the particle materials in the source bottle are reacted by the entering reaction gas flow. During the entire process, the reaction gas flow passes through the gaps of the precursor particle materials, and at the same time, the reaction gas flow and the precursor particle materials react to produce new gaseous materials which are output in the form of gas flow. In this process, the precursor particle materials are gradually reacted, so that the passing state of the precursor particle materials and the reaction gas flow changes constantly from the beginning of the reaction to the end of the reaction. Specifically, the particle layer is dense and the gaps are uniform at the beginning of the reaction, and the particle layer is loose and the gaps are irregular at the end of the reaction, so that the path, rate and contact area of the reaction gas flow passing through the precursor particle materials change constantly during the entire reaction period, and a stable passing state cannot be maintained, thus making the reaction process very uneven and the "thermal induced solid phase reaction" in the source bottle very uneven.

[0008] On the one hand, the unevenness of the thermal induced solid phase reaction directly leads to a dramatic fluctuation in the concentration of the generated gaseous products, and the purity and consistency of the products cannot be guaranteed, so the subsequent collection, metering and use of the products need to be frequently adjusted and adapted, which seriously affects the production efficiency and process stability. On the other hand, the contact state between the reaction gas flow and the precursor particle materials changes constantly, and local over-reaction or insufficient reaction may occur; the over-reaction area is easy to produce impurities, and the insufficient reaction area causes waste of precursor particles, and the particles that are not completely reacted may enter the subsequent pipeline with the gas flow, increasing the risk of pipeline blockage, which not only increases the equipment maintenance cost, but also may cause impurities to mix in, affecting the quality of the final product and causing adverse effects on the entire production process.

[0009] Therefore, in view of the above, the present application proposes a high-efficiency and stable heating type solid precursor source bottle to make up for and improve the shortcomings of the prior art. SUMMARY

[0010] To solve the above technical problems, the present application provides a high-efficiency and stable heating type solid precursor source bottle to solve the technical problems raised in the background art.

[0011] To achieve the above object, the technical scheme adopted by the present application is: the high-efficiency and stable heating type solid precursor source bottle comprises a cavity module, the cavity module is composed of a left cavity and a right cavity, and an exhaust module is arranged inside the cavity module, the exhaust module can make the input carrier gas flow in a covering mode, thereby uniformly contacting the solid precursor inside the left cavity, and the separation type structure design of the left cavity for source storage reaction and the right cavity for pure transportation can effectively reduce the residual amount of the solid source, thereby ensuring the high efficiency and stability of the solid precursor source transportation.

[0012] Further, the left cavity is communicated with a carrier gas inlet at the top as a carrier gas input channel, the right cavity is communicated with an exhaust interface at the top for output of the precursor gas, and a receiving base is arranged below the two cavities, and a heating assembly is integrated inside the receiving base to provide a stable heating environment for the left cavity storage area and the right cavity transportation area through heat conduction.

[0013] Further, the left cavity and the right cavity are cylindrical structures with equal heights, and the radius size ratio of the two is three to one, the volume of the left cavity is adapted to the storage requirement of the solid precursor, and the solid precursor can be reasonably accommodated in the cavity; the inner wall of the right cavity is polished, which helps to reduce the resistance of the gas flowing in the cavity and reduce the adsorption and residue of the precursor gas on the cavity wall.

[0014] Further, the exhaust module comprises an output disc arranged inside the left cavity, the carrier gas inlet is located directly above the output disc, and a plurality of circular hole interface pipes are uniformly arranged on the surface of the output disc.

[0015] Further, the hole positions of the circular hole interface pipes are distributed in three concentric circles of inner, middle and outer layers with the center of the output disc as the reference, and the number of hole positions increases from the inner layer to the outer layer along the radial direction, that is, the number of hole positions in the outer layer is more than that in the middle layer, and the number of hole positions in the middle layer is more than that in the inner layer; the hole diameter size is inversely matched, that is, the hole diameter of the inner layer is larger than that of the middle layer, and the hole diameter of the middle layer is larger than that of the outer layer, and the radial gradient design of increasing number and decreasing hole diameter can ensure the uniformity of gas flow output through the hole channels of different levels, and avoid the problems of local gas flow concentration or weakness caused by single hole diameter or number distribution.

[0016] Further, the output disc adopts a recessed inclined surface structure with the center as the symmetry point, the profile of the output disc is gently concave from the edge area to the center axis, forming a symmetrical inclined surface layout, but the circular hole interface pipes are uniformly distributed in the three layers of inner, middle and outer layers, and the gas output end surfaces of the circular hole interface pipes are kept in the same horizontal plane, the coplanarity of the interface end surfaces ensures that the initial heights of the gas flows output by the circular holes in each layer are consistent, avoids the gas flow disturbance caused by the difference in output height, and further ensures the uniformity and stability of the carrier gas flow.

[0017] Further, the exhaust module further comprises a flow guide plate assembled in the left cavity, the outermost edge of the surface of the flow guide plate is uniformly provided with a through hole, and an annular wall cylinder is mounted in the left cavity.

[0018] Further, the outer edge of the raised flow guide surface is in a horizontal mesh structure, the middle part is in an inclined upward raised smooth structure, the annular wall cylinder corresponds to the boundary position of the horizontal surface and the inclined surface of the raised flow guide surface, the horizontal surface of the raised flow guide surface corresponds to the position of the through hole of the flow guide plate, and the outer wall of the annular wall cylinder and the inner wall of the left cavity form a carrier gas flow channel.

[0019] Further, a dispersion disc is fixedly connected to the central position in the left cavity, the dispersion disc is entirely made of a heat conductive material and is in thermal connection with the heating assembly through the side wall of the left cavity, the surface of the dispersion disc is uniformly provided with a through hole, and the edge of the dispersion disc is designed in an inwardly inclined chamfer, and an inclined flow guide surface is fixedly connected to the bottom wall in the left cavity to guide the solid precursor source to gather in the central direction and reduce the dead angle residues in the left cavity.

[0020] Further, a drainage module is mounted in the receiving base, the drainage module comprises a filter screen one mounted at the central position of the inclined flow guide surface, an inlet pipe is communicated below the filter screen one, a two-way butt joint pipe is communicated below the inlet pipe, an outlet pipe is communicated at the end of the two-way butt joint pipe away from the inlet pipe, a filter screen two is mounted above the outlet pipe, and the filter screen two is located at the central position of the bottom wall of the right cavity.

[0021] Further, the edges of the filter screen one and the filter screen two are chamfered to prevent solid particles from being stuck, the effective filtering area of the filter screen one accounts for one half of the cross-sectional area of the bottom of the left cavity, the effective filtering area of the filter screen two accounts for two-thirds of the cross-sectional area of the bottom wall of the right cavity, the pore size range of the filter screen one is 0.5-1 mm, and the pore size range of the filter screen two is less than 0.5 mm.

[0022] Further, the inlet pipe, the two-way butt joint pipe and the outlet pipe form a composite channel between the filter screen one and the filter screen two, specifically, the inlet pipe is a tapered contraction section, the two-way butt joint pipe is a cylindrical throat, and the outlet pipe is a tapered diffusion section.

[0023] Compared with the prior art, the beneficial effects of the present application are: (1) The cavity module adopts a separate design of left cavity storage reaction and right cavity pure transportation, which perfects the core defect of traditional single-cavity source bottle storage and transportation mixing. The left cavity is specially used for the storage and volatilization reaction of solid precursors, which can provide suitable heating and volatilization space for the precursors, and reduce the local accumulation caused by limited space. The right cavity is focused on the pure transportation of gas, and the inner wall polishing further reduces the adsorption and residue of precursor gas on the cavity wall, avoiding the concentration fluctuation caused by the mixing of residual gas and newly generated gas. This separation structure not only greatly reduces the residue of solid source, but also ensures the stability of the whole process from volatilization to transportation of precursor gas, effectively improves the utilization rate of solid precursors, and reduces the waste of valuable precursors.

[0024] Among them, the left cavity and the right cavity are cylindrical with equal height and a radius ratio of three to one. The volume of the left cavity is adapted to the storage of solid precursors. In actual use, the left cavity can maximize the storage amount of solid precursors in limited space, meet the long-time process requirement, and avoid frequent addition of precursors. At the same time, the smaller radius of the right cavity is matched with the inner wall polishing treatment, which can reduce the diffusion and vortex of airflow in the cavity, make the airflow flow more concentratedly along the vertical path, ensure the rapid and stable flow of precursor gas, avoid the influence of residual gas on the purity of subsequent transportation gas, and further improve the film deposition quality and process continuity.

[0025] (2) The exhaust module can make the input carrier gas uniformly contact the solid precursors inside the left cavity in a covering flow, which perfects the problem of "air flow short circuit" and uneven contact in the prior art. The output disc of the exhaust module is designed with three layers of gradient holes, matched with a recessed inclined surface structure and a co-planar interface end surface, which makes the carrier gas realize global covering distribution in the left cavity, avoiding local airflow concentration or weakness. At the same time, the carrier gas flows downward through the dispersion disc of heat-conducting material, which is heated to a temperature suitable for the volatilization of precursors, and can also scatter the precursor powder by the impact force of airflow, ensuring the full contact of carrier gas and precursors. This uniform airflow distribution and full contact make the volatilization rate of precursors more stable, and the concentration fluctuation of precursors carried by the carrier gas is greatly reduced, effectively avoiding the problems of uneven film thickness and composition deviation caused by concentration fluctuation in traditional devices, and improving the product yield.

[0026] The circular hole interface pipe is distributed in three concentric circles with the output disc center as the reference, and the number increases from inside to outside and the aperture decreases in the opposite direction. In the actual gas conveying process, after the carrier gas enters from directly above the output disc, it is easily guided to the center by the recessed slope. The inner layer adopts a large aperture to avoid excessive local pressure due to concentrated airflow, and the outer layer increases the number of holes to compensate for insufficient flow rate due to dispersed airflow. The two reverse matching lets the airflow output of each layer of holes tend to be balanced, avoiding local airflow that is too strong or too weak caused by a single aperture or number. At the same time, this gradient layout enables the carrier gas to form a global coverage airflow field after being output from the output disc, uniformly acting on the lower dispersion disc and the precursor, ensuring that the carrier gas and the precursor have no dead angle contact, further improving the volatility uniformity, and laying a foundation for subsequent stable transportation.

[0027] (3) The drainage module realizes efficient purification and stable transportation of mixed gas flow in the process of guiding gas flow, and improves the defects of poor interception effect and easy blockage of pipeline of the traditional source bottle filter structure. The two-stage filter screen of the drainage module forms a staged interception: the filter screen one first intercepts large particles that are not completely volatilized, and the filter screen two further filters small particles. The edge chamfering of the screen avoids particle jamming and greatly reduces the risk of pipeline blockage. At the same time, the composite channel composed of the inlet pipe, the bidirectional butt joint pipe and the outlet pipe can improve the airflow velocity to disperse small agglomerated particles and buffer the airflow impact to reduce turbulence disturbance, ensuring the stability of airflow pressure and velocity. This design not only improves the purity of the precursor gas and avoids the film defects caused by agglomerated particles entering the reaction chamber, but also ensures the stability of the gas flow transportation, reduces the frequency of equipment maintenance caused by pipeline blockage or airflow fluctuation, and further improves the reliability and continuity of the entire device operation.

[0028] The effective filtering area of the filter screen one occupies one-half of the cross-sectional area of the left cavity bottom, which not only avoids excessive airflow resistance caused by too small filtering area, affecting the carrier gas carrying efficiency, but also balances the filtering effect and airflow smoothness by reserving flow space for unfiltered gas flow. The effective filtering area of the filter screen two occupies two-thirds of the cross-sectional area of the right cavity bottom wall. Since the right cavity focuses on pure transportation and has a smaller radius, a larger filtering area ratio can maximize the interception of small particles and reduce impurities entering the subsequent pipeline. At the same time, it is adapted to the smaller space size of the right cavity to ensure that the airflow is fully filtered in a limited area, which not only improves the gas purity, but also avoids local blockage caused by insufficient filtering area, ensuring the stability of the transportation.

[0029] (4) For the design of the exhaust module in Example Two, the core is to realize the efficient adaptation of the solid precursor and the carrier gas through the synergistic structure of "material gravity guidance + carrier gas directional action". First, the containment effect of the annular wall cylinder limits the distribution range of the precursor, avoiding its scattering to the non-carrier gas action area. The inclined smooth surface of the convex flow guide surface guides the natural sliding of the precursor and converges to the horizontal mesh area, which not only reduces the residue of the precursor on the inclined surface, but also ensures that the material is concentrated in the core area where the carrier gas can directly act. Second, the precise alignment of the flow guide disc edge through hole and the horizontal mesh area allows the carrier gas to act on the material in a directional manner. The channel formed by the outer wall of the annular wall cylinder and the inner wall of the left cavity can also guide the dispersion of the gas flow, reducing the waste of carrier gas. At the same time, the carrier gas carries the volatile precursor molecules and fine particles during the carrying process, and the gas flow dispersion effect of the mesh structure further improves the carrying efficiency of the carrier gas. The overall structural design effectively improves the problems of material residue, uneven heating, and insufficient carrier gas action in the existing technology, ensuring the stability and efficiency of precursor transportation.

[0030] Especially important is the circumferential hollow structure at the contact position of the annular wall cylinder and the convex flow guide surface, which can keep the precursor particles at the outer edge of the convex flow guide surface at a uniform height through the dynamic balance mechanism of "supplement-stop-replenish". This design provides a stable and constant penetration path and contact interface for the reaction gas flow, ensuring that the contact area and penetration resistance of the gas flow and the precursor particles are always consistent, thereby ensuring uniform "heat-induced solid-phase reaction" throughout the process and avoiding fluctuations in reaction rate. At the same time, the stable particle layer thickness greatly reduces the difficulty of adjusting heat and gas flow, and the optimal reaction conditions can be maintained without frequent parameter adjustment, which not only improves the stability of the gaseous product concentration, but also reduces the waste of precursor, providing a stable guarantee for subsequent product collection and use.

[0031] Wherein, corresponding to the circumferential hollow structure, the flow guide disc with only the edge of the through hole structure forces the carrier gas to diffuse along the fixed path to the edge and directional output, avoiding the local airflow concentration caused by the direct penetration of the center area, the channel formed by the outer wall of the annular wall cylinder further restricts the gas flow direction, reduces the airflow turbulence, and the mesh structure of the convex flow guide surface can disperse the gas twice, ensuring the uniform distribution of the gas in the horizontal mesh area, and there is no weak or concentrated area of airflow; and the convex flow guide surface guides the precursors to converge in the horizontal mesh area, so that the material is always in the range where the carrier gas can directly act. The carrier gas is directly acted on the material in the area after directional output through the through hole, not only drives the heated volatilized precursor molecules, but also continuously wraps the fine particles that have not completely volatilized, and cooperates with the auxiliary effect of the supplementary airflow, so that the gas and the material always maintain a close and continuous contact state, avoiding the problem that the gas and the material in the traditional device are intermittently or locally contacted. Contact, ensure that every part of the material can be fully carried by the gas, maximize the contact efficiency and carrying effect. BRIEF DESCRIPTION OF DRAWINGS

[0032] Figure 1 It is a front view of the structure of the application.

[0033] Figure 2 It is a front view of the structure of the application.

[0034] Figure 3 It is a front view of the structure of the application.

[0035] Figure 4 It is a front view of the structure of the application.

[0036] Figure 5 It is a front view of the structure of the application.

[0037] Figure 6 It is a front view of the structure of the application.

[0038] Figure 7 It is a front view of the structure of the application.

[0039] Figure 8 It is a front view of the structure of the application.

[0040] Figure 9 It is a front view of the structure of the application.

[0041] Figure 10 It is a front view of the structure of the application.

[0042] Figure 11 It is a front view of the structure of the application.

[0043] Figure 12 It is a schematic diagram of the spatial structure of the inlet pipe, the two-way docking pipe and the outlet pipe of the application.

[0044] Figure 13 It is a schematic diagram of the internal gas flow path of the drainage module.

[0045] The figure marks are: 1, cavity module; 11, left cavity; 12, receiving base; 13, right cavity.

[0046] 2, exhaust module; 21, output disc; 22, round hole interface pipe; 23, dispersion disc; 24, through round hole; 25, inclined flow guide surface; 26, flow guide disc; 27, annular wall cylinder; 28, protruding flow guide surface.

[0047] 3, drainage module; 31, filter screen one; 32, inlet pipe; 33, two-way docking pipe; 34, outlet pipe; 35, filter screen two.

[0048] 4, carrier gas inlet; 5, gas outlet. DETAILED DESCRIPTION

[0049] The technical solutions in the embodiments of the application will be clearly and completely described below with reference to the drawings in the embodiments of the application. Obviously, the described embodiments are only part of the embodiments of the application, rather than all the embodiments. Based on the embodiments in the application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the application.

[0050] Embodiment one: please refer to Figure 1 - Figure 3 As shown in the figure, the high-efficiency and stable heating type solid precursor source bottle comprises a cavity module 1, the cavity module 1 is composed of a left cavity 11 and a right cavity 13, and an exhaust module 2 is arranged inside the cavity module 1. The exhaust module 2 can make the input carrier gas flow in a covering mode, so as to uniformly contact with the solid precursor inside the left cavity 11. The separation type structure design of the left cavity 11 for source storage reaction and the right cavity 13 for pure transportation can effectively reduce the residual amount of the solid source, thereby ensuring the high efficiency and stability of the solid precursor source transportation.

[0051] It should be noted that the left cavity 11 is communicated with the carrier gas inlet 4 at the top, serving as a carrier gas input channel, the right cavity 13 is communicated with the gas outlet 5 at the top, serving as a precursor gas output channel, and the receiving base 12 is assembled below the two cavities, and the receiving base 12 is internally integrated with a heating assembly, which provides a stable heating environment for the source storage area of the left cavity 11 and the transportation area of the right cavity 13 through heat conduction.

[0052] It should be noted that the left cavity 11 and the right cavity 13 are highly equal cylindrical structures, and the radius size ratio is three to one. The volume of the left cavity 11 is suitable for the storage requirements of the solid precursor, which can ensure that the solid precursor is reasonably accommodated in the cavity. The inner wall of the right cavity 13 is polished, which helps to reduce the resistance of the gas flowing in the cavity, and at the same time reduces the adsorption and residue of the precursor gas on the cavity wall.

[0053] Please refer to Figure 1 - Figure 6 As shown in the figure, the exhaust module 2 includes an output disc 21 assembled in the left cavity 11, the carrier gas inlet 4 is located at the top of the output disc 21, and the surface of the output disc 21 is uniformly provided with a circular hole interface pipe 22. The center of the left cavity 11 is fixedly connected with a dispersion disc 23, the dispersion disc 23 is made of heat-conducting material, and is in thermal connection with the heating assembly through the side wall of the left cavity 11. The surface of the dispersion disc 23 is uniformly provided with a through hole 24, and the edge of the dispersion disc 23 is designed as an inwardly inclined chamfer. The bottom wall of the left cavity 11 is fixedly connected with an inclined flow guide surface 25, which guides the solid precursor source to gather in the center direction and reduces the dead angle residue in the left cavity 11.

[0054] It should be noted that the hole layout of the circular hole interface pipe 22 is based on the center of the output disc 21, which is distributed in three concentric circles, and the number of holes increases from the inside to the outside along the radial direction, that is, the number of holes in the outer layer is more than that in the middle layer, and the number of holes in the middle layer is more than that in the inner layer. The hole diameter size is inversely matched, which decreases from the inside to the outside along the radial direction, that is, the hole diameter of the inner layer is larger than that of the middle layer, and the hole diameter of the middle layer is larger than that of the outer layer. By means of the radial gradient design of increasing number and decreasing hole diameter, the uniformity of gas flow output can be ensured through different levels of holes, and the problems of local gas flow concentration or weakness caused by single hole diameter or number layout can be avoided. The output disc 21 adopts a recessed inclined surface structure with the center as the symmetry point, and the profile from the edge area to the center axis is gently concave, forming a symmetrical inclined surface layout. However, the circular hole interface pipes 22 uniformly distributed in the inner, middle and outer three layers keep the gas output end face at the same horizontal plane, and the coplanarity of the interface end face ensures that the initial height of the gas flow output by each layer of holes is consistent, avoiding the disturbance of gas flow caused by the difference in output height, and further ensuring the uniformity and stability of the carrier gas flow.

[0055] Please refer to Figure 1 、 Figure 10 - Figure 13As shown, the inside of the receiving base 12 is provided with a drainage module 3, which includes a filter screen I 31 installed at the center of the inclined flow guide surface 25, below which is communicated with an inlet pipe 32, below the inlet pipe 32 is communicated with a two-way butt joint pipe 33, the end of the two-way butt joint pipe 33 away from the inlet pipe 32 is communicated with an outlet pipe 34, above the outlet pipe 34 is installed a filter screen II 35, which is located at the center of the bottom wall of the right cavity 13.

[0056] It should be noted that the edges of the filter screen I 31 and the filter screen II 35 are chamfered to prevent solid particles from being stuck, the effective filtering area of the filter screen I 31 accounts for one-half of the cross-sectional area of the bottom of the left cavity 11, while the effective filtering area of the filter screen II 35 accounts for two-thirds of the cross-sectional area of the bottom wall of the right cavity 13, and the pore size range of the filter screen I 31 is 0.5-1mm, while the pore size range of the filter screen II 35 is within 0.5mm, the inlet pipe 32, the two-way butt joint pipe 33 and the outlet pipe 34 form a composite channel between the filter screen I 31 and the filter screen II 35, specifically: the inlet pipe 32 is a tapered contraction section, the two-way butt joint pipe 33 is a cylindrical throat, and the outlet pipe 34 is a tapered expansion section.

[0057] Specifically, first, the pretreatment operation before the device is started is performed: open the top cover of the left cavity 11, pour solid precursors such as 50g trimethyl indium into the inside of the left cavity 11, since the center of the left cavity 11 is fixed with a dispersion disc 23 with a through hole 24, part of the poured precursor directly falls on the surface of the dispersion disc 23, and the other part falls on the inclined flow guide surface 25 of the bottom wall of the left cavity 11 through the through hole 24 of the dispersion disc 23; the precursor falling on the flow guide surface naturally gathers to the center area of the cavity under the action of the inclined surface, and the precursor falling on the dispersion disc 23 will not accumulate at the edge of the disc body due to the inwardly inclined chamfer design of the edge of the dispersion disc 23, forming a double distribution state of "dispersion disc 23 support + bottom flow guide surface source gathering", effectively avoiding the accumulation of a large amount of precursors.

[0058] Then, the top cover of the left cavity 11 is closed and sealed to ensure the airtightness of the cavity, and the heating assembly inside the receiving base 12 is started at the same time, the heating assembly conducts heat to the dispersion disc 23 through the side wall of the left cavity 11, so that the dispersion disc 23, the inside space of the left cavity 11 and the precursor on the bottom flow guide surface are synchronously heated, gradually reaching a temperature suitable for the volatilization of the precursor, preparing for the subsequent carrier gas to carry the precursor gas, this process, through the shunting action of the dispersion disc 23 and the source gathering action of the inclined flow guide surface 25, in cooperation with the uniform heat conduction of the heating assembly, not only avoids uneven heating caused by local accumulation of the precursor, but also preliminarily improves the utilization rate of the precursor, laying a foundation for subsequent stable volatilization.

[0059] After the pretreatment is completed, the carrier gas is turned on and enters through the carrier gas inlet 4 at the top of the left cavity 11. Since the carrier gas inlet 4 is located directly above the output disc 21 in the exhaust module 2, the carrier gas directly acts on the output disc 21. The output disc 21 is a symmetrically inclined surface structure with a center recessed edge, and the surface is distributed with circular hole interface pipes 22 in the form of concentric circles with the center as the reference point. The inner layer has the largest hole diameter and the fewest number of holes, the outer layer has the smallest hole diameter and the most number of holes, and the carrier gas is first concentrated to the center under the guidance of the recessed inclined surface and then uniformly output through the three-layer circular hole interface pipes 22. The output ends of each circular hole interface pipe 22 maintain the same horizontal plane, ensuring that the initial height of the carrier gas output from each hole is consistent and there is no local airflow disturbance, achieving global coverage distribution of the carrier gas inside the left cavity 11.

[0060] When the uniformly output carrier gas flows downward, it first contacts and passes through the through circular holes 24 on the surface of the dispersion disc 23. The dispersion disc 23 is made of a heat-conducting material and is in thermal connection with the heating assembly, continuously releasing stable heat. During the process of passing through the through circular holes 24, on the one hand, the carrier gas is heated by the dispersion disc 23 to near the volatilization temperature of the precursor, and on the other hand, the precursor powder accumulated below the dispersion disc 23 is blown away by the airflow impact force, so that the precursor is uniformly distributed in the left cavity 11 source area. At the same time, the carrier gas and the heated and volatilized precursor molecules are in full contact and mixing, forming a stable precursor-carrier gas mixed gas flow. This process realizes the uniform distribution of the carrier gas, the uniform dispersion and heating of the precursor through the gradient hole design of the output disc 21 and the heat conduction and shunting effect of the dispersion disc 23, and ultimately ensures the consistency of the precursor concentration in the mixed gas flow, laying a foundation for subsequent transportation.

[0061] The carrier gas carrying the precursor gas continues to flow downward, first reaching the filter screen one 31 at the center of the bottom of the left cavity 11, the effective filtering area of the filter screen one 31 accounting for one half of the cross-sectional area of the bottom of the left cavity 11, the aperture being 0.5-1 mm, and the edge being chamfered, so that when the mixed gas flow passes through the screen, the large particles of the precursor that have not been completely volatilized are intercepted to avoid entering the subsequent pipeline to cause blockage, and the chamfered design prevents the particles from being stuck at the edge of the screen; then the mixed gas flow enters the inlet through pipe 32 below the filter screen one 31, the inlet through pipe 32 being a tapered contraction section at the end, and the flow rate of the gas flow in the contraction section being increased due to the reduced cross-section to form a high-speed gas flow; then the gas flow enters the bidirectional butt joint pipe 33, i.e., the middle cylindrical throat, the high-speed gas flow forming a strong shear force in the throat to further disperse the possible small agglomerated particles, and the stable cross-section of the throat ensuring the smooth pressure of the gas flow; then the gas flow enters the outlet through pipe 34, i.e., the tapered diffusion section at the end, the slow expansion of the diffusion section gradually reducing the flow rate of the gas flow to avoid the direct impact of the high-speed gas flow on the inside of the right cavity 13 to reduce the turbulent disturbance; finally, the gas flow passes through the filter screen two 35 above the outlet through pipe 34, the filter screen two 35 being located at the center of the bottom wall of the right cavity 13, the effective filtering area of the filter screen two 35 accounting for two-thirds of the cross-sectional area of the bottom wall of the right cavity 13, the aperture being less than 0.5 mm, and the edge also being chamfered, so that the gas flow is finely filtered for the second time to intercept the small particles; the pure precursor-carrier gas mixture after filtration is stably maintained in the right cavity 13 for a short time, and finally output at a stable flow rate to the ALD reaction cavity through the gas outlet interface 5 at the top of the right cavity 13.

[0062] This process realizes the purification and stable transportation of the mixed gas flow through the hierarchical interception of the two-stage filter screens and the flow rate and pressure regulation of the composite channel, and further reduces the residues by the polished inner wall of the right cavity 13 to ensure the purity of the gas entering the reaction cavity and the stability of the flow rate.

[0063] Embodiment Two: Please refer to Figure 7 Figure 9 As shown in the figure, the exhaust module 2 further comprises a flow guide disc 26 assembled in the inside of the left cavity 11, the outermost edge of the surface of the flow guide disc 26 being uniformly provided with through holes, and the inside of the left cavity 11 being provided with an annular wall cylinder 27, the lower part of the annular wall cylinder 27 being provided with a raised flow guide surface 28, and the bottom of the annular wall cylinder 27 and the contact position of the raised flow guide surface 28 being designed with a circumferentially-through hollow structure to facilitate the precursor particles in the inside of the annular wall cylinder 27 to flow to the outer edge of the raised flow guide surface 28.

[0064] It should be noted that the outer edge of the raised flow guide surface 28 is in a horizontal mesh structure, the middle being in an inclined upward convex smooth structure, the annular wall cylinder 27 corresponding to the boundary position between the horizontal plane and the inclined plane of the raised flow guide surface 28, ensuring that the horizontal plane of the raised flow guide surface 28 corresponds to the through hole position of the flow guide disc 26, and the outer wall of the annular wall cylinder 27 and the inner wall of the left cavity 11 forming a carrier gas flow channel.​

[0065] Specifically, the pre-treatment operation before the device is enabled is basically the same as that of Embodiment I. The solid precursor is poured into the left cavity 11, and the precursor can only fall into the annular wall cylinder 27 and contact the inclined and smooth area of the convex flow guide surface 28 under the blocking effect of the annular wall cylinder 27. Under the influence of gravity, the solid precursor continuously slides down along the inclined and smooth surface, and finally converges to the horizontal mesh area of the convex flow guide surface 28, forming a concentrated and uniform material distribution, avoiding the accumulation or scattering of the precursor on the inclined surface to the non-carrier gas action area. Then the top cover of the left cavity 11 is closed and sealed to ensure airtightness, and the heating assembly inside the receiving base 12 is started. The heat is conducted to the annular wall cylinder 27 and the convex flow guide surface 28 through the side wall of the left cavity 11, so that the precursor in the horizontal mesh area is heated synchronously, and gradually reaches the temperature suitable for volatilization, preparing for the carrier gas to carry the precursor gas. The heat conductivity of the convex flow guide surface 28 ensures that the precursor is evenly heated, and the inclined and smooth surface reduces material residues and improves the initial material utilization rate.

[0066] After the pre-treatment is completed, the carrier gas is turned on, and the carrier gas enters through the carrier gas inlet 4 at the top of the left cavity 11 and acts on the flow guide disc 26. Because the flow guide disc 26 only has uniform through holes at the outermost edge, the carrier gas cannot penetrate the central area and can only diffuse along the lower surface of the flow guide disc 26 to the edge, and finally be output directionally through the edge through hole.

[0067] Notably, the contact position of the annular wall cylinder 27 and the convex flow guide surface 28 is provided with a circumferentially through hollow structure, which provides a channel for the precursor particles in the annular wall cylinder 27 to flow to the outer edge of the convex flow guide surface 28: when the precursor particles in the annular wall cylinder 27 move to the hollow structure under the action of gravity, if the height of the precursor particles at the outer edge of the convex flow guide surface 28 does not exceed the upper edge of the hollow structure, the particles can flow smoothly through the hollow structure into the outer edge area; once the height of the particles at the outer edge reaches or exceeds the upper edge of the hollow structure, the flow resistance of the particles will increase significantly, and then stop flowing out; when the precursor particles at the outer edge are consumed due to carrier gas carrying, volatilization, etc., and the height of the particles is lower than the upper edge of the hollow structure, the hollow structure will be reopened, and the precursor particles in the annular wall cylinder 27 will be supplemented to the outer edge area of the convex flow guide surface 28 under the action of gravity. Through this dynamic balance of "supplement-stop-re-supplement", the height of the precursor particles at the outer edge of the convex flow guide surface 28 can be kept relatively uniform, and then the carrier gas can maintain uniform reaction when passing through this position, so as to finally uniformly output the reaction product.

[0068] Due to the precise correspondence between the edge through hole of the flow guide disc 26 and the horizontal mesh hole area of the convex flow guide surface 28, the carrier gas directly acts on this area: on the one hand, it drives the heated and volatilized precursor molecules to form a mixed gas flow, and on the other hand, it entrains part of the fine precursor particles that have not completely volatilized by means of the impact force of the gas flow, and they flow downward together along the horizontal mesh hole surface; at the same time, the mesh structure of the convex flow guide surface 28 further disperses the gas flow, avoiding the problem of material blowing or insufficient contact caused by local gas flow concentration; in addition, the carrier gas flow channel formed by the outer wall of the annular wall cylinder 27 and the inner wall of the left cavity 11 can guide a small amount of dispersed gas flow to flow downward along the channel, further strengthening the carrying effect of the material in the horizontal mesh hole area; and the uniform height of the precursor particles at the outer edge of the convex flow guide surface 28 can ensure that the carrier gas is always in contact with the precursor particles of consistent thickness when flowing through this area, avoiding local overcontact or undercontact caused by uneven particle height, and finally forming a precursor-carrier gas mixed gas flow with stable composition and concentration.

[0069] The subsequent flow process of the carrier gas carrying the precursor gas is consistent with that of Example One: the mixed gas flow first reaches the filter screen one 31 at the bottom center of the left cavity 11, which has a pore size of 0.5-1 mm and an effective filtering area occupying one-half of the cross-sectional area of the bottom of the left cavity 11, and intercepts large particles that have not completely volatilized, with the edge chamfer design preventing particle jamming; then the gas flow enters the tapered contraction section of the inlet through pipe 32, and the reduced cross-section causes the flow rate to increase, forming a high-speed gas flow; then it enters the cylindrical throat of the bidirectional butt joint pipe 33, and the strong shear force generated by the high-speed gas flow disperses the residual fine agglomerated particles, and the stable cross-section ensures smooth gas flow pressure; then it enters the tapered diffusion section of the outlet through pipe 34, and the flow rate is slowly reduced to avoid impacting the right cavity 13; finally, it passes through the filter screen two 35, which has a pore size of less than 0.5 mm and an effective filtering area occupying two-thirds of the cross-sectional area of the bottom wall of the right cavity 13, to complete the second fine filtering, and the pure mixed gas flow is output at a stable flow rate to the ALD reaction chamber through the top gas outlet interface 5 after being temporarily stabilized in the right cavity 13.

[0070] The core of the structural design of the exhaust module 2 in Example Two is to fit the synergistic logic of "material gravity flow + carrier gas directional carrying": the inclined smooth surface of the convex flow guide surface 28 uses gravity to guide the natural convergence of the precursor to the horizontal mesh hole area, ensuring that the material is precisely within the range of the carrier gas; the precise alignment of the edge through hole of the flow guide disc 26 and the horizontal mesh hole area allows the carrier gas to directly act on the converged material, maximizing the carrier gas carrying efficiency; at the same time, the inclined smooth surface reduces material residue, and the horizontal mesh hole surface assists in gas flow dispersion, in cooperation with the blocking effect of the annular wall cylinder 27, effectively preventing material scattering and gas flow disorder, ultimately achieving the orderly flow of solid-state precursor and the efficient carrying of carrier gas, ensuring the stability and utilization rate of precursor transportation.

[0071] While embodiments of the application have been shown and described, it is to be understood that the embodiments described are merely exemplary of the principles and application of the present application. Numerous modifications and adaptions can be effected without departing from the spirit and scope of the present application, which is not limited to the exact construction and arrangement described. It is intended, therefore, to cover all modifications and adaptions that fall within the scope of the claims and their equivalents.

Claims

1. A high-efficiency stable heating solid precursor source bottle, comprising a cavity module (1), characterized in that: The cavity module (1) is composed of a left cavity (11) and a right cavity (13), and is internally provided with an exhaust module (2) which can make the input carrier gas flow in a covering mode to form a separate structure design of the left cavity (11) for source reaction and the right cavity (13) for pure transport; the left cavity (11) is communicated with a carrier gas inlet (4) at the top as a carrier gas input channel, the exhaust module (2) comprises an output disc (21) arranged in the left cavity (11), the carrier gas inlet (4) is located directly above the output disc (21), and the surface of the output disc (21) is uniformly provided with a plurality of circular hole interface pipes (22), the hole positions of the circular hole interface pipes (22) are distributed in three concentric circles of inner, middle and outer layers with the center of the output disc (21) as a reference, and the number of hole positions increases from the inner layer to the outer layer in the radial direction, that is, the number of hole positions of the outer layer is more than that of the middle layer, and the number of hole positions of the middle layer is more than that of the inner layer; the hole diameters are inversely matched, that is, the hole diameters of the inner layer are larger than those of the middle layer, and the hole diameters of the middle layer are larger than those of the outer layer; the output disc (21) adopts a recessed inclined surface structure with the center as a symmetric point, and the profile is gently concave from the edge region to the center axis, forming a symmetric inclined surface layout, but the circular hole interface pipes (22) are uniformly distributed in the three concentric layers, the gas output end surfaces are kept in the same horizontal plane, and the coplanarity of the interface end surfaces ensures that the initial heights of the gas flows of the circular holes of the layers are consistent; a dispersion disc (23) is fixedly connected to the center position in the left cavity (11), the dispersion disc (23) is integrally formed of a heat-conducting material and is in thermal connection with a heating assembly through the side wall of the left cavity (11), the surface of the dispersion disc (23) is uniformly provided with a plurality of through holes (24), and the edge of the dispersion disc (23) is designed as an inwardly inclined chamfer.

2. The high-efficiency, stably heated solid precursor source bottle of claim 1, wherein: The right cavity (13) is communicated with an exhaust interface (5) at the top for output of the precursor gas, and a receiving base (12) is arranged below the two cavities, and a heating assembly is integrated in the receiving base (12) to provide a stable heating environment for the source area of the left cavity (11) and the transport area of the right cavity (13) through heat conduction, the left cavity (11) and the right cavity (13) are cylindrical structures with equal heights, and the radius size ratio of the two is three to one, the volume of the left cavity (11) is adapted to the storage requirement of the solid precursor to provide a reasonable accommodation space for the solid precursor, and the inner wall of the right cavity (13) is polished to constrain the adsorption of the precursor gas to the cavity wall.

3. The high-efficiency, stably heated solid precursor source bottle of claim 1, wherein: The bottom wall in the left cavity (11) is fixedly connected with an inclined flow guide surface (25) for guiding the solid precursor source to gather towards the center of the bottom of the left cavity (11).

4. The high-efficiency, stably heated solid precursor source bottle of claim 2, wherein: The receiving base (12) is equipped with a flow guiding module (3). The flow guiding module (3) includes a filter screen (31) installed at the center of the inclined flow guiding surface (25). The filter screen (31) is connected to an inlet pipe (32) below it. The inlet pipe (32) is connected to a bidirectional connecting pipe (33) below it. The bidirectional connecting pipe (33) is connected to an outlet pipe (34) at the end away from the inlet pipe (32). The outlet pipe (34) is equipped with a filter screen (35) above it. The filter screen (35) is located at the center of the bottom wall of the right cavity (13).

5. The high-efficiency, stably heated solid precursor source bottle of claim 4, wherein: The edges of both the first filter screen (31) and the second filter screen (35) are chamfered to prevent solid particles from getting stuck. The effective filtration area of ​​the first filter screen (31) accounts for half of the cross-sectional area of ​​the bottom of the left cavity (11), while the effective filtration area of ​​the second filter screen (35) accounts for two-thirds of the cross-sectional area of ​​the bottom wall of the right cavity (13). The aperture range of the first filter screen (31) is 0.5 to 1 mm, while the aperture range of the second filter screen (35) is less than 0.5 mm.

6. The high-efficiency, stably heated solid precursor source bottle of claim 4, wherein: The inlet pipe (32), the bidirectional connecting pipe (33), and the outlet pipe (34) form a composite channel between the filter screen one (31) and the filter screen two (35). Specifically, the inlet pipe (32) is a tapered constriction section at the end, the bidirectional connecting pipe (33) is a cylindrical throat in the middle, and the outlet pipe (34) is a tapered diffusion section at the end.

7. A high-efficiency stable heating solid precursor source bottle, comprising a cavity module (1), characterized in that: The cavity module (1) consists of a left cavity (11) and a right cavity (13), and the cavity module (1) is equipped with an exhaust module (2). The exhaust module (2) allows the input carrier gas to flow in a covered manner, forming a separate structure design in which the left cavity (11) performs source storage reaction and the right cavity (13) performs pure transportation. The exhaust module (2) includes a guide plate (26) assembled inside the left cavity (11). The outermost edge of the guide plate (26) is uniformly perforated with through holes. An annular wall cylinder (27) is installed inside the left cavity (11). A raised guide surface (28) is assembled below the annular wall cylinder (27). The bottom of the annular wall cylinder (27) and the contact position of the raised guide surface (28) are designed with a circumferential through-hole structure to facilitate the flow of precursor particles inside the annular wall cylinder (27) into the outer edge of the raised guide surface (28). The outer edge of the raised guide surface (28) has a horizontal mesh structure and the middle has an upward sloping smooth structure. The annular wall cylinder (27) corresponds to the boundary position between the horizontal plane and the inclined plane of the raised guide surface (28), ensuring that the horizontal plane of the raised guide surface (28) corresponds to the through hole position of the guide plate (26). The outer wall of the annular wall cylinder (27) and the inner wall of the left cavity (11) form a carrier gas flow channel.

8. The high-efficiency, stably heated solid precursor source bottle of claim 7, wherein: The left cavity (11) top communicates with carrier gas inlet (4), as carrier gas input channel, right cavity (13) top communicates with gas outlet (5), for precursor gas output, both sides cavity below common assembly receiving base (12), and receiving base (12) inside integrated heating assembly, through heat conduction for left cavity (11) storage area and right cavity (13) transport area provides stable heating environment, the left cavity (11) and right cavity (13) are equal height cylindrical structure, the radius size ratio of two is three to one, the volume of the left cavity (11) is adapted to the storage requirement of solid precursor, which provides reasonable accommodation space for solid precursor; the inner wall of right cavity (13) is polished, which forms a constraint on the adsorption of precursor gas cavity wall.

9. The high-efficiency, stably heated solid precursor source bottle of claim 7, wherein: The bottom wall of the left cavity (11) is fixedly connected with an inclined flow guide surface (25), which guides the solid precursor source to the center of the bottom of the left cavity (11).

10. The high-efficiency, stably heated solid precursor source bottle of claim 8, wherein: The receiving base (12) is internally provided with a drainage module (3), the drainage module (3) includes a filter screen one (31) installed at the center of the inclined flow guide surface (25), the lower portion of the filter screen one (31) is communicated with an inlet pipe (32), the lower portion of the inlet pipe (32) is communicated with a bidirectional docking pipe (33), the end of the bidirectional docking pipe (33) away from the inlet pipe (32) is communicated with an outlet pipe (34), the upper portion of the outlet pipe (34) is provided with a filter screen two (35), and the filter screen two (35) is located at the center of the bottom wall of the right cavity (13).

11. The high-efficiency, stably heated solid precursor source bottle of claim 10, wherein: The edges of the filter screen one (31) and the filter screen two (35) are chamfered to prevent solid particles from being stuck, the effective filtering area of the filter screen one (31) accounts for one-half of the cross-sectional area of the bottom of the left cavity (11), the effective filtering area of the filter screen two (35) accounts for two-thirds of the cross-sectional area of the bottom wall of the right cavity (13), and the pore size range of the filter screen one (31) is 0.5-1mm, and the pore size range of the filter screen two (35) is less than 0.5mm.

12. The high-efficiency, stably heated solid precursor source bottle of claim 10, wherein: The inlet pipe (32), the bidirectional docking pipe (33) and the outlet pipe (34) form a composite channel between the filter screen one (31) and the filter screen two (35), specifically: the inlet pipe (32) is a tapered end contraction section, the bidirectional docking pipe (33) is a middle cylindrical throat, and the outlet pipe (34) is a tapered end expansion section.

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