Vacuum gate valve with wedge-shaped gate plate

Abstract

The invention provides a vacuum gate valve with a wedge-shaped gate plate, and relates to the technical field of gate plates. Comprising a driving cavity and a sealing cavity which are connected; a driving body is arranged in the driving cavity, and one end of the driving body penetrates through the driving cavity and then is arranged in the sealing cavity; the flashboard is connected with one end of the driver; a sealing position is arranged in the sealing cavity, and in a sealing state, the gate plate is pushed by the driving body to be inserted into the sealing position; the plurality of spraying holes are formed in the gate plate, and the plurality of spraying holes are communicated through an annular channel arranged in the gate plate; the gas conveying device is arranged outside the sealing cavity and is communicated with one end of the annular channel through a conveying body; the conveying body is wound on the gas transmission device and changes the length along with the movement of the flashboard; according to the vacuum gate valve with the wedge-shaped gate plate, by-products in the sealing cavity are cleaned in a gas cleaning mode, the cleaning effect is improved, meanwhile, direct contact with the sealing face in the cleaning process is avoided, and then loss of the sealing face is avoided.

Description

Technical Field

[0001] This invention relates to the field of gate valve technology, and in particular to a vacuum gate valve with a wedge-shaped gate. Background Technology

[0002] High vacuum gate valves are mainly used to connect or stop the gas flow in high vacuum systems. They can be installed between the vacuum container (vacuum chamber) and the vacuum pump; or used on the feed and discharge containers in semi-continuous vacuum operations.

[0003] In processes such as dry etching and CVD, reaction byproducts (such as AlCl3 and SiCl4) tend to deposit on the valve seat sealing surface. In existing technologies, the deposited reaction byproducts are cleaned by a mechanical scraping structure on the gate valve. However, this mechanical scraping structure is not thorough for byproducts with small particle sizes. In addition, when using a scraping structure for cleaning, the sealing surface is repeatedly rubbed, which can lead to poor sealing after prolonged use. Summary of the Invention

[0004] The purpose of this invention is to provide a vacuum gate valve with a wedge-shaped gate, which can solve the above-mentioned technical problems. This invention provides a vacuum gate valve with a wedge-shaped gate, comprising: The driving cavity and the sealing cavity are connected; and a driving body is provided in the driving cavity, with one end of the driving body passing through the driving cavity and placed in the sealing cavity. A gate is connected to one end of a drive body and moves within the sealing cavity under the drive of the drive body; a sealing position is provided within the sealing cavity, and during the sealing process, the gate is inserted into the sealing position under the push of the drive body; Several injection holes are formed on the gate plate, and the injection holes are connected through an annular channel placed inside the gate plate; The gas delivery device is located outside the sealed cavity and is connected to one end of the annular channel through a conveyor body; the conveyor body is wound around the gas delivery device and changes length as it moves with the gate.

[0005] As a further technical solution, it also includes: The system comprises a repair layer and a protective layer. The repair layer is installed on the gate plate, and the protective layer is installed on the repair layer, with several repair holes provided on the protective layer.

[0006] As a further technical solution, the repair layer includes: Layers are installed on the gate plate; Several liquid outlet holes are formed on the layer; and these liquid outlet holes are connected by a transmission channel. The transmission channel is connected to the delivery body, and through the delivery body, it is connected to the infusion device installed on the sealed cavity.

[0007] As a further technical solution, the infusion device is equipped with a delivery pump and a storage tank; the storage tank is connected to the delivery body through the delivery pump; and the storage tank contains the repair medium.

[0008] As a further technical solution, the repair medium includes: A mixture of silane coupling agent, silica and platinum catalyst; wherein the proportions of silane coupling agent, silica and platinum catalyst are: 50 wt% silane coupling agent, 30 wt% silica and 20 wt% platinum catalyst.

[0009] As a further technical solution, the conveyor body includes: The protective layer contains a gas delivery pipe and an infusion pipe. One end of the gas delivery pipe is connected to the gas delivery device, and the other end is connected to the ring channel. One end of the infusion pipe is connected to the infusion device, and the other end is connected to the transmission channel.

[0010] As a further technical solution, a connector is provided at one end of the drive body, which is connected to the gate frame, and the gate plate is installed on the gate frame.

[0011] As a further technical solution, a number of sliders are provided inside the sealing cavity; during the sealing process, the gate contacts the number of sliders and moves inside the sealing cavity under the support of the number of sliders.

[0012] As a further technical solution, the gas transmission device includes: The gas transmission chamber is located outside the sealed cavity; The tensioning wheel is located inside the gas delivery chamber, and the delivery body is wound around the tensioning wheel.

[0013] As a further technical solution, it also includes: The collection device is located outside the sealed cavity and communicates with the inside of the sealed cavity.

[0014] The technical solution of the present invention provides a plurality of injection holes on the gate plate, and the injection holes are connected to the gas delivery device through an annular channel. The gas delivery device can deliver gas to the injection holes and spray it out. Compared with the existing mechanical scraping structure, this gas injection cleaning method can more effectively clean reaction byproducts with smaller particle size, avoid the problem of byproduct residue caused by incomplete scraping, ensure the cleanliness of the sealing surface, and help maintain the normal working condition of the vacuum gate valve. In addition, the use of gas jet cleaning eliminates the need for direct contact and friction with the sealing surface, further reducing wear on the sealing surface. Meanwhile, the repair layer and protective layer set on the gate plate provide further protection. The repair layer can deliver repair medium through the liquid outlet to repair any minor damage that may occur, while the protective layer can reduce the direct deposition of by-products on the gate plate and sealing surface, extending the service life of the sealing surface and ensuring the reliability of the seal. Compared with the prior art, the technical solution of this invention uses gas cleaning to clean the by-products in the sealed cavity, which improves the cleaning effect and avoids direct contact with the sealing surface during the cleaning process, thereby avoiding damage to the sealing surface. It is not only green, environmentally friendly, energy-saving and carbon-reducing, but also, as a basic technology and high-end equipment related to the semiconductor and chip industry, it helps to accelerate the breakthroughs in key technologies and basic products of the semiconductor and chip industry. Attached Figure Description

[0015] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0016] Figure 1 This is a perspective view of a vacuum gate valve with a wedge-shaped gate according to the present invention; Figure 2 This is a schematic diagram of the structure of a vacuum gate valve with a wedge-shaped gate according to the present invention; Figure 3 for Figure 2 A sectional view of section AA; Figure 4 This is a schematic diagram of the gate structure in this invention; Figure 5 This is a schematic diagram of the gate from another angle in the present invention; Figure 6 This is a schematic diagram of the repair layer in this invention; Figure 7 This is a cross-sectional view of the conveyor body in this invention.

[0017] Explanation of reference numerals in the attached figures: 101-Drive chamber; 102-Sealed chamber; 103-Drive body; 104-Sealing position; 105-Connector; 106-Slider; 201-Gate; 202-Repair layer; 221-Layer body; 222-Liquid outlet; 223-Transfer channel; 203-Protective layer; 301-Injection hole; 302-Annular channel; 401-Gas delivery device; 411-Gas delivery chamber; 412-Tightening wheel; 402-Conveying body; 421-Protective layer; 422-Gas delivery pipe; 423-Liquid delivery pipe; 500-Liquid delivery device; 501-Transfer pump; 502-Liquid storage chamber; 600-Collection device. Detailed Implementation

[0018] The technical solution of the present invention will be clearly and completely described below with reference to the embodiments. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0019] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," and "counterclockwise," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limiting this invention.

[0020] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the stated features. In the description of this invention, "a plurality of" means two or more, unless otherwise explicitly specified. Furthermore, the terms "installed," "connected," and "linked" should be interpreted broadly; for example, they may refer to a fixed connection, a detachable connection, or an integral connection; they may refer to a mechanical connection or an electrical connection; they may refer to a direct connection or an indirect connection through an intermediate medium; and they may refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0021] like Figure 1-7 As shown, the present invention proposes a vacuum gate valve with a wedge-shaped gate, comprising: The invention comprises a driving cavity 101 and a sealing cavity 102, with the driving cavity 101 connected to the sealing cavity 102. A driving body 103 is disposed within the driving cavity 101, with one end of the driving body 103 passing through the driving cavity 101 and positioned within the sealing cavity 102. Preferably, the driving body 103 is a cylinder, with one end of the cylinder rod passing through the driving cavity 101 and positioned within the sealing cavity 102. A gate 201 is connected to one end of the driving body 103, specifically, the gate 201 is connected to one end of the cylinder rod and moves within the sealing cavity 102 under the drive of the driving body 103. A sealing position 104 is provided within the sealing cavity 102. In the sealed state, the gate 201 is inserted into the sealing position 104 under the push of the drive body 103. During use, under the push of the cylinder, the cylinder rod moves inside the cylinder and pushes the gate 201 to move inside the sealing cavity 102. When sealing is required, the gate 201 is placed in the sealing position 104 under the drive of the cylinder rod. It should be noted that valve seats are provided on both sides of the sealing cavity 102. The valve seats are divided into sealing valve seats and connecting valve seats. The vacuum container and the vacuum pump are connected through the sealing valve seats and the connecting valve seats. When the gate 201 is placed in the sealing position 104, the flow is cut off by the sealing valve seats. A plurality of injection holes 301 are formed on the gate plate 201, and the plurality of injection holes 301 are connected through an annular channel 302 located inside the gate plate 201; a gas supply device 401 is disposed outside the sealing cavity 102 and is connected to one end of the annular channel 302 through a conveying body 402; the conveying body 402 is wound around the gas supply device 401 and moves with the gate plate 201 to change its length; when by-products are deposited in the valve seat, the gas supply device 401 supplies gas into the annular channel 302 through the conveying body 402, and the gas entering the annular channel 302 is transmitted to the plurality of injection holes 301, and the gas is injected into the sealing cavity 102 through the plurality of injection holes 301, and the by-products deposited on the valve seat are removed by the gas; in this invention, preferably The device is equipped with eight injection holes 301, and the air outlet direction of the injection holes 301 is tangent to the side of the gate 201. In this way, the gas discharged through the injection holes 301 can rotate within the sealed cavity 102, thereby increasing the removal effect of by-products. In addition, since the gate 201 is driven by the cylinder rod, the conveyor 402 can be moved telescopically within the gas delivery device 401 during the operation of the gate 201, so as to ensure that the conveyor 402 can move simultaneously with the gate 201 when the gate 201 is in motion. Furthermore, the gas delivery device 401 is connected to a gas source through a pipe, and the gas source delivers gas into the gas delivery device 401. In this invention, nitrogen is preferably delivered into the gas delivery device 401 by the gas source.

[0022] The technical solution of the present invention provides a plurality of injection holes 301 on the gate 201, and the injection holes 301 are connected to the gas delivery device 401 through the annular channel 302. The gas delivery device 401 can deliver gas to the injection holes 301 and spray it out. Compared with the existing mechanical scraping structure, this gas injection cleaning method can more effectively clean reaction byproducts with smaller particle size, avoid the problem of byproduct residue caused by incomplete scraping, ensure the cleanliness of the sealing surface, and help maintain the normal working condition of the vacuum gate valve. In addition, the use of gas jet cleaning eliminates the need for direct contact and friction with the sealing surface, further reducing wear on the sealing surface. Meanwhile, the repair layer 202 and protective layer 203 provided on the gate 201 provide further protection. The repair layer 202 can deliver repair medium through the liquid outlet 222 to repair any minor damage that may occur, while the protective layer 203 can reduce the direct deposition of by-products on the gate 201 and the sealing surface, extending the service life of the sealing surface and ensuring the reliability of the seal. Compared with the prior art, the technical solution of the present invention uses gas cleaning to clean the by-products in the sealing cavity 102, which improves the cleaning effect and avoids direct contact with the sealing surface during the cleaning process, thereby avoiding damage to the sealing surface.

[0023] In addition, the present invention also includes a collection device 600, which is located outside the sealing cavity 102 and communicates with the inside of the sealing cavity 102. When the gas ejected from the several injection holes 301 cleans the by-products on the valve seat, the cleaned by-products enter the collection device 600 for collection. In the present invention, the preferred collection device 600 is a cyclone separator. At the same time, the outer shell at the bottom of the cyclone separator can be separated. After the by-products are separated by the cyclone separator, they are deposited at the bottom of the outer shell. When the by-products reach a certain amount, the outer shell is separated to clean the deposited by-products. It should be noted that a transparent observation window is also provided on the outer shell. The condition of the by-products inside the outer shell can be obtained through the observation window, and the outer shell can be separated and the by-products cleaned according to the actual situation. In addition, the gas separated by the collection device 600 can be collected and used for other purposes.

[0024] During the sealing process of the valve body by the gate 201, repeated contact between the gate 201 and the sealing position 104 can cause wear to the gate 201. Therefore, in this invention, a repair layer 202 and a protective layer 203 are also provided. The repair layer 202 is disposed on the gate 201; the protective layer 203 is disposed on the repair layer 202, and the protective layer 203 has several repair holes. The protective layer 203 can increase the wear resistance of the gate 201; however, with the increase of usage time, the protective layer 203 will also wear. When the protective layer 203 wears, a repair medium is released through the repair layer 202 to repair the protective layer 203. Specifically, after the repair layer 202 releases the repair medium, it will be discharged through several repair holes on the protective layer 203 and placed on the surface of the protective layer 203 to repair the surface of the protective layer 203. The number of repair holes is set according to actual needs, and this invention does not further limit it. like Figure 5 and 6 As shown, the repair layer 202 includes a layer body 221 and a plurality of liquid outlet holes 222. The layer body 221 is disposed on the gate plate 201; the plurality of liquid outlet holes 222 are formed on the layer body 221; and the plurality of liquid outlet holes 222 are connected through a transmission channel 223; the transmission channel 223 is connected to the conveying body 402, and is connected to the infusion device 500 disposed on the sealing cavity 102 through the conveying body 402; when the protective layer 203 needs to be repaired, the repair medium is conveyed to the transmission channel 222 through the infusion device 500 via the conveying body. Within 3, the repair medium is conveyed through the transmission channel 223 to several outlet holes 222. After being discharged through the outlet holes 222, the repair medium enters several repair holes and is placed on the surface of the protective layer 203 after passing through the repair holes, thus repairing the protective layer 203. The outlet holes 222 are arranged opposite to the repair holes to ensure that the repair medium discharged through the outlet holes 222 can enter the repair holes. The number of outlet holes 222 is determined according to actual needs, and the present invention does not further limit it. It should be noted that in this invention, an image sensor can be installed inside the sealed cavity to obtain the wear condition of the protective layer 203, and the repair frequency can be calculated based on the material of the protective layer 203 and the material of the sealed cavity 102; for example, the protective layer 203 is repaired after the gate 201 is opened and closed 10 times.

[0025] like Figure 3As shown, the infusion device 500 is equipped with a delivery pump 501 and a storage tank 502; the storage tank 502 is connected to the delivery body 402 through the delivery pump 501; the storage tank 502 contains the repair medium; when repairing the protective layer 203, the delivery pump 501 delivers the repair medium in the storage tank 502 to the delivery body 402, and the delivery body 402 transmits the repair medium to the transmission channel 223, and the transmission channel 223 conducts the repair medium to several outlet holes 222, and discharges it through the outlet holes 222 to several repair holes, and the repair medium is discharged to the surface of the protective layer 203 through several repair holes; The repair medium includes a mixture of silane coupling agent, silica, and platinum catalyst; wherein the proportions of silane coupling agent, silica, and platinum catalyst are: 50 wt% silane coupling agent, 30 wt% silica, and 20 wt% platinum catalyst; after the repair medium is discharged into the protective layer 203, the scratched parts on the protective layer 203 are repaired.

[0026] like Figure 7 As shown, the conveying body 402 includes a protective layer 421, and a gas delivery pipe 422 and a liquid delivery pipe 423 are installed inside the protective layer 421. One end of the gas delivery pipe 422 is connected to the gas delivery device 401, and the other end is connected to the annular channel 302. One end of the liquid delivery pipe 423 is connected to the liquid delivery device 500, and the other end is connected to the transmission channel 223. During use, the gas delivered by the gas delivery device 401 is transferred to the annular channel 302 through the gas delivery pipe 422, and the repair medium delivered by the liquid delivery device 500 is transferred to the transmission channel 223 through the liquid delivery pipe 423. The gas delivery device 401 or the liquid delivery device 500 can be activated as needed to clean the by-products in the sealed cavity 102 or to repair the gate 201. It should be noted that a connector is provided at the connection position between the conveyor 402 and the gate 201, and is connected to the protective layer 421 through the connector. In this way, when the gate 201 is activated, the connector pulls the protective layer 421 to activate, preventing the gas delivery tube 422 and the infusion tube 423 from being pulled by the gate 201. In use, the protective layer 421 drives the gas delivery tube 422 and the infusion tube 423 to activate simultaneously, thereby making the gas delivery tube 422 and the infusion tube 423 follow the gate 201 to activate simultaneously. In addition, a filling layer is provided inside the protective layer 421. The filling layer fills the periphery of the gas delivery tube 422 and the infusion tube 423, preventing the gas delivery tube 422 and the infusion tube 423 from shifting within the protective layer 421 and improving the stability of the gas delivery tube 422 and the infusion tube 423. The preferred filling layer is bisphenol A type epoxy resin.

[0027] like Figure 3As shown, a connecting body 105 is provided at one end of the drive body 103, and the connecting body 105 is connected to the gate frame. The gate plate 201 is provided on the gate frame. Specifically, the cylinder rod is connected to one end of the connecting body 105, and the gate frame is connected to the other end of the connecting body 105. The connecting body 105 realizes the movable connection between the cylinder rod and the gate frame, thus preventing the connection between the cylinder rod and the gate frame from breaking during operation. In this invention, the gate plate 201 is inclinedly disposed on the gate frame. When there is a small amount of by-product on the valve seat, it can still be placed in the sealing position 104 under the push of the cylinder rod to seal the valve seat. When the cylinder rod pushes the gate frame to move, in order to ensure the stability of the gate frame movement, a number of sliders 106 are preferably provided, and the number of sliders 106 are disposed in the sealing cavity 102. During the sealing process, the gate frame contacts the number of sliders 106 and moves in the sealing cavity 102 under the support of the number of sliders 106. Specifically, when the gate frame is pushed to move by the cylinder rod, after the gate frame is pushed to the position of the number of sliders 106, the number of sliders 106 contact the gate frame and support the gate frame to ensure that the gate plate 201 on the gate frame can stably enter the sealing position 104.

[0028] like Figure 3 As shown, the gas conveying device 401 includes a gas conveying chamber 411 and a tightening wheel 412. The gas conveying chamber 411 is located outside the sealing cavity 102; the tightening wheel 412 is located inside the gas conveying chamber 411, and the conveying body 402 is wound around the tightening wheel 412; under the action of the tightening wheel 412, the conveying body 402 is always wound around the tightening wheel 412; during sealing, as the gate 201 moves, it drives one end of the conveying body 402 to move, and pulls the tightening wheel 412 to rotate through the conveying body 402, releasing the conveying body 402 on the tightening wheel 412; When the gate 201 is opened, the gate 201 moves in the opposite direction, and the conveyor 402 is wound around the tensioning wheel 412 under the action of the tensioning wheel 412, thus completing the storage of the conveyor 402. It should be noted that a coil spring is provided on the tensioning wheel 412, and the coil spring is engaged with the air supply chamber 411. When the conveyor 402 and the gate 201 move at the same time, the coil spring on the tensioning wheel 412 is compressed. When the gate 201 is opened, the force applied to the coil spring disappears, and the tensioning wheel 412 is reset under the drive of the coil spring, causing the conveyor 402 to be wound around the tensioning wheel 412. In addition, an air pump is installed outside the gas delivery device 401. The air pump adjusts the air pressure entering the gas delivery device 401, thereby adjusting the gas pressure entering the delivery body 402. The air pump is connected to an external air source.

[0029] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A vacuum gate valve with a wedge-shaped gate, characterized in that, include: A driving cavity (101) and a sealing cavity (102) are provided, wherein the driving cavity (101) is connected to the sealing cavity (102); and a driving body (103) is provided in the driving cavity (101), wherein one end of the driving body (103) passes through the driving cavity (101) and is placed in the sealing cavity (102); A gate (201) is connected to one end of the drive body (103) and moves within the sealing cavity (102) under the drive of the drive body (103); and a sealing position (104) is provided within the sealing cavity (102). In the sealed state, the gate (201) is inserted into the sealing position (104) under the push of the drive body (103). A plurality of injection holes (301) are provided on the gate plate (201), and the plurality of injection holes (301) are connected by an annular channel (302) placed inside the gate plate (201); The gas delivery device (401) is located outside the sealed cavity (102) and is connected to one end of the annular channel (302) through the conveyor body (402); the conveyor body (402) is wrapped around the gas delivery device (401) and moves with the gate (201) to change its length.

2. The vacuum gate valve with a wedge-shaped gate (201) according to claim 1, characterized in that, Also includes: The repair layer (202) and the protective layer (203) are provided on the gate (201). The repair layer (202) is provided on the gate (201), and the protective layer (203) is provided on the repair layer (202), and the protective layer (203) has a plurality of repair holes.

3. The vacuum gate valve with a wedge-shaped gate (201) according to claim 2, characterized in that, The repair layer (202) includes: A layer (221) is disposed on the gate (201); A plurality of liquid outlet holes (222) are formed on the layer (221); and the plurality of liquid outlet holes (222) are connected through a transmission channel (223); The transmission channel (223) is connected to the delivery body (402) and is connected to the infusion device (500) disposed on the sealed cavity (102) through the delivery body (402).

4. The vacuum gate valve with a wedge-shaped gate (201) according to claim 3, characterized in that, The infusion device (500) is equipped with a delivery pump (501) and a storage tank (502); the storage tank (502) is connected to the delivery body (402) through the delivery pump (501); the storage tank (502) contains a repair medium.

5. The vacuum gate valve with a wedge-shaped gate (201) according to claim 4, characterized in that, The repair medium includes: A mixture of silane coupling agent, silica and platinum catalyst; wherein the proportions of silane coupling agent, silica and platinum catalyst are: 50 wt% silane coupling agent, 30 wt% silica and 20 wt% platinum catalyst.

6. The vacuum gate valve with a wedge-shaped gate (201) according to claim 3, characterized in that, The conveyor (402) includes: A protective layer (421) is provided, and an air supply pipe (422) and an infusion pipe (423) are provided inside the protective layer (421). One end of the air supply pipe (422) is connected to the air supply device (401), and the other end is connected to the annular channel (302). One end of the infusion pipe (423) is connected to the infusion device (500), and the other end is connected to the transmission channel (223).

7. The vacuum gate valve with a wedge-shaped gate (201) according to claim 1, characterized in that, One end of the drive body (103) is provided with a connector (105), which is connected to the gate frame, and the gate plate (201) is provided on the gate frame.

8. The vacuum gate valve with a wedge-shaped gate (201) according to claim 7, characterized in that, The sealing cavity (102) is provided with a plurality of sliders (106); during the sealing process, the gate contacts the plurality of sliders (106) and moves within the sealing cavity (102) under the support of the plurality of sliders (106).

9. The vacuum gate valve with a wedge-shaped gate (201) according to claim 1, characterized in that, The gas delivery device (401) includes: The gas delivery chamber (411) is located outside the sealed cavity (102); A tightening wheel (412) is disposed inside the gas delivery chamber (411), and the conveying body (402) is wound around the tightening wheel (412).

10. The vacuum gate valve with a wedge-shaped gate (201) according to claim 1, characterized in that, Also includes: A collection device (600) is disposed outside the sealed cavity (102) and communicates with the interior of the sealed cavity (102).

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