Vacuum plug valve and valve plate machining method

By designing the valve core plate, rolling elements, and valve plate structure, and utilizing point contact and continuously accelerated variable limit grooves, the vibration problem of vacuum slide gate valves during the opening and closing process was solved, improving sealing performance and system stability.

CN121382938BActive Publication Date: 2026-03-03JIHUA LAB
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Patent Information

Application Number
CN202511939302.X
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2025-12-22
Publication Date
2026-03-03
Estimated Expiration
2045-12-22

AI Technical Summary

Technical Problem

Vacuum slide gate valves are prone to vibration during opening and closing, which affects sealing performance and service life, and also has an adverse effect on system stability.

Method used

A vacuum slide gate valve was designed, which adopts a structure of valve core plate, rolling element and valve plate. The rolling element moves along the longitudinal section curve in the limiting groove to ensure continuous change of jerk. Sealing and locking are achieved through point contact to reduce vibration.

Benefits of technology

It effectively suppresses the vibration of the vacuum slide gate valve during the opening and closing process, improves sealing performance and service life, and enhances system stability.

✦ Generated by Eureka AI based on patent content.

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Abstract

This invention discloses a vacuum slide gate valve and a valve plate processing method, relating to the field of sealing valve technology. The vacuum slide gate valve includes a valve seat and a slide gate structure. A flow channel extending in a first direction is formed within the valve seat, and the valve seat has a side opening in a second direction that laterally connects to the flow channel. The slide gate structure includes a valve core plate, a rolling element, and a valve plate. The rolling element is rotatably mounted on the first end of the valve core plate and can protrude outward from the first end of the valve core plate. A limiting groove extending in the second direction is provided on the end face of the valve plate facing the valve core plate. The cross-sectional curve formed by the inner wall of the limiting groove is used to make point contact with the rolling element, and there are at least two contact points. The longitudinal cross-sectional curve formed by the inner wall of the limiting groove satisfies a continuous and smooth change in the rate of curvature change. In this solution, the limiting groove enables the rolling element to move smoothly and avoids sudden changes in jerk, thereby effectively reducing vibration when the vacuum slide gate valve is closed.
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Description

Technical Field

[0001] This invention relates to the field of sealing valve technology, and particularly to a vacuum slide gate valve and a valve plate processing method. Background Technology

[0002] Vacuum slide gate valves are prone to vibration during operation due to the rapid movement of the valve plate and changes in sealing pressure. This vibration not only affects the valve's sealing performance but may also adversely impact its service life and system stability. Therefore, effectively suppressing the vibration of vacuum slide gate valves during opening and closing has become a pressing issue in the field of technology. Summary of the Invention

[0003] The main objective of this invention is to provide a vacuum slide gate valve and a valve plate processing method, which aims to improve the vibration problem of the vacuum slide gate valve during the switching process.

[0004] To achieve the above objectives, the present invention proposes a vacuum slide gate valve, comprising a valve seat and a slide gate structure. A flow channel extending in a first direction is formed within the valve seat. The valve seat has a side opening in a second direction that laterally communicates with the flow channel. The slide gate structure includes a valve core plate, a rolling element, and a valve plate. The valve core plate has a first end in the first direction. The rolling element is rotatably mounted on the first end of the valve core plate and is capable of protruding outward from the first end of the valve core plate. The valve plate is disposed on one side of the first end of the valve core plate, and a limiting groove extending in a second direction is provided on the end face of the valve plate facing the valve core plate. The cross-sectional curve formed by the inner wall of the limiting groove is used to make point contact with the rolling element, and there are at least two contact points. The longitudinal cross-sectional curve formed by the inner wall of the limiting groove satisfies a continuous and smooth change in the rate of curvature change. The longitudinal cross-sectional curve has a sealing curve segment with gradually decreasing depth. During the movement of the valve core plate along the second direction, it drives the rolling element to move along the second direction. The rolling element moves along the longitudinal cross-sectional curve in the limiting groove. Corresponding to the sealing curve segment, the depth of the rolling element accommodated in the limiting groove gradually decreases, so that the valve plate gradually moves away from the valve core plate along the first direction to seal the flow channel.

[0005] In one embodiment, the cross-sectional curve is set as a parabola, and the formula corresponding to the cross-sectional curve is:

[0006] y=ax 2 +h;

[0007] Where 'a' is a constant coefficient controlling the width of the parabola's opening, and 'h' is a numerical value controlling the height of the parabola's arch.

[0008] In one embodiment, the cross-sectional curve of the limiting groove is set as a Gothic arch curve, which is formed by splicing two circular arc curves with the same radius. The formula corresponding to the cross-sectional curve is:

[0009] (x+b)²+y²=R², –L≤x≤0;

[0010] (xb)² + y² = R², 0 ≤ x ≤ L;

[0011] b² + h² = R²;

[0012] Where R is the radius of the circular arc, b is the value controlling the width of the opening of the Gothic arch, h is the value controlling the height of the arch top of the Gothic arch, and L is the length of the intersection of the Gothic arch with the horizontal axis from the origin of the coordinate axis.

[0013] In one embodiment, the longitudinal section curve is set as a third-order differentiable curve, and the formula corresponding to the third-order differentiable curve is:

[0014] y=cz 3 ;

[0015] Where c is a coefficient that controls the curvature of the third-order differentiable curve.

[0016] In one embodiment, the valve core plate further has a second end in a first direction;

[0017] Multiple rolling elements are provided and spaced apart along the circumference of the valve core plate. The multiple rolling elements are arranged into a rolling group. Two rolling groups are provided and are respectively protruding from the first end and the second end.

[0018] Two valve plates are provided, corresponding to the first end and the second end respectively.

[0019] In one embodiment, the insert structure further includes:

[0020] A leaf spring, used to elastically connect the valve plate and the valve core plate.

[0021] In one embodiment, the insert structure further includes a linear drive device, the linear moving part of which is connected to the valve core plate to drive the valve core plate and the rolling element to move.

[0022] A method for processing the valve plate of a vacuum slide gate valve, comprising the following steps:

[0023] The switching stroke of the plug is preset and divided into multiple variable speed motion stages and one constant speed motion stage;

[0024] The acceleration and duration of multiple variable speed motion stages and one uniform speed motion stage are preset, wherein the acceleration of the multiple variable speed motion stages is set to a constant value;

[0025] The relationships between jerk and duration and total travel, maximum acceleration, and maximum speed were obtained through calculation.

[0026] Preset at least two parameter values ​​among total stroke, maximum acceleration, and maximum speed, and obtain the relationship between jerk and time allocation coefficient, wherein the time allocation coefficient is the ratio of the duration corresponding to the uniform motion phase to the total duration of the switching stroke;

[0027] The jerk corresponding to the time allocation coefficient is adjusted during machining on the valve plate blank.

[0028] In one embodiment, the variable speed motion phase includes an acceleration increase phase, an acceleration constant phase, and an acceleration decrease phase, wherein the acceleration in the acceleration increase phase and the acceleration decrease phase is a constant value;

[0029] The switching stroke sequentially includes a first acceleration increasing stage, a first acceleration constant stage, a first acceleration decreasing stage, a uniform motion stage, a second acceleration decreasing stage, a second acceleration constant stage, and a second acceleration increasing stage;

[0030] The magnitude and direction of the acceleration are the same in the first acceleration increase phase and the second acceleration increase phase, and the magnitude and direction of the acceleration are the same in the first acceleration decrease phase and the second acceleration decrease phase;

[0031] The magnitudes of the accelerations in the first acceleration increase phase and the first acceleration decrease phase are the same but opposite in direction, and the magnitudes of the accelerations in the second acceleration increase phase and the second acceleration decrease phase are the same but opposite in direction.

[0032] In one embodiment, the formula for the duration corresponding to the switching stroke is:

[0033] t1=t3=t5=t7=τ, t2=t6=ατ, t4=βτ;

[0034] t1, t2, t3, t4, t5, t6, and t7 represent the durations of the first acceleration increase phase, the first acceleration constant phase, the first acceleration decrease phase, the uniform motion phase, the second acceleration decrease phase, the second acceleration constant phase, and the second acceleration increase phase, respectively. τ is the value of the control duration, α is the value of the control duration of the first acceleration constant phase and the second acceleration constant phase, and β is the value of the control duration of the uniform motion phase.

[0035] The relationship between the jerk, the duration, and the total stroke is as follows:

[0036] S=J m τ³(3α²+6α+2+3β),

[0037] Where S is the total distance, J m The absolute values ​​of the accelerations during the first acceleration increase phase, the second acceleration increase phase, the first acceleration decrease phase, and the second acceleration decrease phase;

[0038] The relationship between the acceleration, the duration, and the maximum acceleration is as follows:

[0039] A m =J m τ,

[0040] Among them, A m This is the maximum acceleration;

[0041] The relationship between the jerk, the duration, and the maximum speed is as follows:

[0042] V m =J m τ 2 (1+α),

[0043] Among them, V m Maximum speed;

[0044] The relationship between the jerk and the time allocation coefficient is as follows:

[0045] J m =(32 / (3λ 2 12λ+16))·S / T 3 , λ=βτ / T, T=(4+2α+β)τ;

[0046] Where T is the total duration of the switching stroke, and λ is the time allocation coefficient.

[0047] The technical solution of this invention, by setting a valve core plate, a valve plate, and rolling elements, allows the valve core plate to drive the valve plate to contact the valve seat via the rolling elements. After contact, the valve plate continues to move along a second direction, thereby pushing the rolling elements within a limiting groove on the valve plate towards the side where the groove depth gradually decreases. This compresses the limiting groove and pushes the valve plate away from the valve core plate, thus squeezing the valve seat or the sealing ring within it for sealing and locking. Simultaneously, the cross-sectional curve of the limiting groove in this solution allows for point contact with the rolling elements, enabling stable rolling and reducing the vibration problems caused by surface contact used in conventional technologies. Furthermore, the longitudinal cross-sectional curve of the limiting groove in this solution satisfies a continuous and smooth rate of change of curvature, ensuring a continuous change in the acceleration of the rolling elements as they move along the longitudinal cross-sectional curve of the limiting groove, avoiding abrupt changes in acceleration and effectively reducing vibration when the vacuum slide gate valve closes. Attached Figure Description

[0048] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on the structures shown in these drawings without creative effort.

[0049] Figure 1 A schematic diagram of a structure provided by an embodiment of the present invention;

[0050] Figure 2 For having Figure 1 A schematic diagram of the middle insert plate structure;

[0051] Figure 3 For having Figure 1 Cross-sectional view of the middle insert plate structure in its unsealed state;

[0052] Figure 4 For having Figure 1 Cross-sectional view of the sealed state of the middle insert plate structure;

[0053] Figure 5 A schematic diagram of another embodiment of the vacuum slide valve provided by the present invention;

[0054] Figure 6 A schematic diagram of another embodiment of the vacuum slide gate valve provided by the present invention;

[0055] Figure 7 This is a schematic flowchart illustrating the valve plate processing method for the vacuum slide valve provided by the present invention.

[0056] Explanation of icon numbers:

[0057] 100. Valve seat;

[0058] 200. Insert plate structure; 21. Valve core plate; 211. First end; 212. Second end; 22. Rolling element; 23. Valve plate; 231. Limiting groove; 232. Cross-sectional curve; 233. Longitudinal cross-sectional curve; 24. Leaf spring; 25. Linear drive device.

[0059] The realization of the objective, functional features and advantages of the present invention will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. Detailed Implementation

[0060] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present invention.

[0061] It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back, etc.), the directional indications are only used to explain the relative positional relationship and movement of the components in a specific posture. If the specific posture changes, the directional indications will also change accordingly.

[0062] Furthermore, if the embodiments of this invention involve descriptions such as "first" or "second," these descriptions are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined with "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, the use of "and / or" or "and / or" throughout the text includes three parallel solutions. For example, "A and / or B" includes solution A, solution B, or a solution where both A and B are satisfied simultaneously. Furthermore, the technical solutions of the various embodiments can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. When the combination of technical solutions is contradictory or impossible to implement, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed by this invention.

[0063] Vacuum slide gate valves are prone to vibration during operation due to the rapid movement of the valve plate and changes in sealing pressure. This vibration not only affects the valve's sealing performance but may also adversely impact its service life and system stability. Therefore, effectively suppressing the vibration of vacuum slide gate valves during opening and closing has become a pressing issue in the field of technology.

[0064] Therefore, this invention proposes a vacuum slide gate valve and a valve plate processing method.

[0065] Please see Figure 1 and Figure 2 In one embodiment of the present invention, the vacuum slide gate valve includes a valve seat 100 and a slide gate structure 200. A flow channel extending in a first direction is formed within the valve seat 100. The valve seat 100 has a side opening in a second direction that laterally communicates with the flow channel. The slide gate structure 200 includes a valve core plate 21, a rolling element 22, and a valve plate 23. The valve core plate 21 has a first end portion 211 in the first direction. The rolling element 22 is rotatably mounted on the first end portion 211 of the valve core plate 21 and is capable of protruding outward from the first end portion 211 of the valve core plate 21. The valve plate 23 is disposed on one side of the first end portion 211 of the valve core plate 21, and a limiting groove 231 extending in a second direction is provided on the end face of the valve plate 23 facing the valve core plate 21. The inner wall of the limiting groove 231 forms a cross-sectional curve 232 for point contact with the rolling element 22, and there are at least two contact points. The inner wall of the limiting groove 231 forms a longitudinal cross-sectional curve 233 that satisfies a continuous and smooth change in the rate of curvature. The longitudinal cross-sectional curve 233 has a sealing curve segment with gradually decreasing depth. During the movement of the valve core plate 21 in the second direction, it drives the rolling element 22 to move in the second direction. The rolling element 22 moves in the limiting groove 231 along the longitudinal cross-sectional curve 233. Corresponding to the sealing curve segment, the depth of the rolling element 22 accommodated in the limiting groove 231 gradually decreases, so that the valve plate 23 gradually moves away from the valve core plate 21 in the first direction to seal the flow channel.

[0066] See Figure 3 and Figure 4In this embodiment, by setting a valve core plate 21, a valve plate 23, and a rolling element 22, the valve core plate 21 can drive the valve plate 23 to contact the valve seat 100 through the rolling element 22. After the valve plate 23 contacts the valve seat 100, it continues to move along the second direction, thereby pushing the rolling element 22 to move within the limiting groove 231 on the valve plate 23 towards the side where the depth of the limiting groove 231 gradually decreases. This compresses the limiting groove 231 and pushes the valve plate 23 to move away from the valve core plate 21, thereby squeezing the valve seat 100 or the sealing ring within the valve seat 100 for sealing and locking, allowing the vacuum slide gate valve to enter a sealed state from a non-sealed state. Simultaneously, the cross-sectional curve 232 of the limiting groove 231 in this embodiment is used for point contact with the rolling element 22, thereby enabling stable rolling using point contact and reducing the vibration problem caused by surface contact used in conventional technologies during rolling. Furthermore, in this embodiment, the longitudinal section curve 233 of the limiting groove 231 satisfies the continuous and smooth change of the rate of curvature, so that the jerk of the rolling element 22 when moving along the longitudinal section curve 233 of the limiting groove 231 changes continuously, avoiding sudden changes in jerk, and thus effectively reducing the vibration when the vacuum gate valve is closed.

[0067] It is understood that the rolling element 22 in this embodiment can be a metal ball. Specifically, in this embodiment, it is a smooth and rollable steel ball, or it can be other rollable ball structures that meet the strength requirements.

[0068] It should be noted that the first direction is the thickness direction of the valve plate 23 and the valve core plate 21, and the second direction is the direction in which the depth in the limiting groove 231 gradually decreases. The valve seat 100 is provided with a slot that cooperates with the insert plate. A sealing ring is provided on the side of the valve plate 23 that contacts the slot. When the insert plate is closed, it is inserted into the slot, and the valve plate 23 is sealed and locked by the rolling of the rolling body 22.

[0069] See Figure 5 In one embodiment of the present invention, the cross-sectional curve 232 is set as a parabola, and the formula corresponding to the cross-sectional curve 232 is:

[0070] y=ax 2 +h;

[0071] Where 'a' is a value that controls the width of the parabola's opening, and 'h' is a value that controls the height of the parabola's arch.

[0072] In this embodiment, the cross-sectional curve 232 is set as a parabola, so that the rolling element 22 can make two-point contact with the limiting groove 231, which can maintain the smooth rolling of the rolling element 22, ensure the stability of the rolling element 22, and thus effectively reduce the vibration of the valve plate 23.

[0073] The standard form of a parabola is a conic section with its vertex at the origin and its opening downwards:

[0074] y = –ax² + h, where a > 0 and h is the height of the vault.

[0075] The first derivative of the parabola is continuous: y′ = –2ax;

[0076] The second derivative of the parabola is continuous: y″ = –2a;

[0077] The radius of curvature R of the parabola varies linearly with x:

[0078] R(x)=[1+(y′)²]^(3 / 2) / |y″|=(1+4a²x²)^(3 / 2) / (2a);

[0079] In this model, 'a' is set to a numerical value. The curvature of the parabola changes continuously, without any cusps or tangents. The parabola minimizes the rate of change of the contact force between the steel ball and valve plate 23, thereby suppressing high-frequency vibration modes.

[0080] It is understood that the parabolic curve in this embodiment can also be set to any parabola that meets the following requirement: the radius of its arc at the contact point with the rolling element 22 is greater than the minimum value of the ball radius.

[0081] Specifically, it can be set up in the following form:

[0082] y=dx²+ex+f

[0083] Wherein, d is a value that controls the width of the parabola's opening, e is a value that controls the position of the parabola's axis of symmetry, and f is a value that controls the height of the parabola's arch. At the same time, the value of d ensures that the radius of curvature at the contact point with the rolling element 22 is greater than the minimum radius of the ball.

[0084] See Figure 6 In one embodiment of the present invention, the cross-sectional curve 232 of the limiting groove 231 is set as a Gothic arch curve, which is formed by splicing two circular arc curves with the same radius. The formula corresponding to the cross-sectional curve 232 is:

[0085] (x+b)²+y²=R², –L≤x≤0;

[0086] (xb)² + y² = R², 0 ≤ x ≤ L;

[0087] b² + h² = R²;

[0088] Where R is the radius of the circular arc, b is the value controlling the width of the opening of the Gothic arch, h is the value controlling the height of the arch top of the Gothic arch, and L is the length of the intersection of the Gothic arch with the horizontal axis from the origin of the coordinate axis.

[0089] Specifically, a typical Gothic arch curve is constructed of two circles of equal radius R, centered at (±b,0) respectively. The two circles are tangent at the crown (0,h), and their bases are perpendicular to the supports. The intersection at L,0) is given by the formula for the left arc:

[0090] (x+b)²+y²=R², –L≤x≤0;

[0091] The formula for the right-side arc is:

[0092] (x–b)²+y²=R², 0≤x≤L;

[0093] To ensure that the vertices are tangent, the geometric relationship is as follows:

[0094] b² + h² = R²;

[0095] At x=0:

[0096] Left circle y′=–b / h, right circle y′=b / h;

[0097] It can be seen that the first derivative of the Gothic arch curve changes abruptly, and the curvature jumps from +1 / R to -1 / R, forming a "peak" that is visible to the naked eye;

[0098] The second derivative of the Gothic arch curve does not exist, and a delta function appears, where the delta function is a function whose function value is zero at all points except zero, and whose integral over the entire domain is equal to 1.

[0099] In this embodiment, the cross-sectional curve 232 is set as a Gothic arch curve, so that the rolling element 22 can make two-point contact with the limiting groove 231, which can maintain the smooth rolling of the rolling element 22, ensure the stability of the rolling element 22, and thus effectively reduce the vibration of the valve plate 23.

[0100] It is understood that the Gothic arch curve in this embodiment includes two circular arc curves, which are set to be arbitrary circular arc curves that meet the following requirements: the radius of curvature of the circular arc curve is greater than the minimum radius of the rolling element 22, and the curvature corresponding to any one of the circular arc curves is less than 90 degrees. This allows the rolling element 22 to make contact with the Gothic arch curve at two points.

[0101] Therefore, by setting the cross-section of the limiting groove 231 as a parabola or Gothic arch curve, two-point contact is formed with the rolling element 22, and a stable three-point or multi-point fastening contact is formed with the support above the rolling element 22. The test results show that it has a good vibration absorption effect.

[0102] In one embodiment of the present invention, the longitudinal section curve 233 is set as a third-order differentiable curve, and the formula corresponding to the third-order differentiable curve is:

[0103] y=cz 3 ;

[0104] Where c is a coefficient that controls the curvature of the third-order differentiable curve.

[0105] In this embodiment, the longitudinal section curve 233 of the limiting groove 231 is set as a third-order differentiable curve, and combined with the cross-sectional curve 232 set as a parabola or Gothic arch curve, so that the rolling body 22 is in contact with the limiting groove 231 at two points. As a result, when the rolling body 22 rolls along the limiting groove 231, the longitudinal section curve 233 is third-order differentiable, and the longitudinal section curve 233 itself is continuous. Moreover, the first, second and third derivatives of the longitudinal section curve 233 are all continuous. Therefore, when rolling in the limiting groove 231: the position change curve of the rolling body 22 is a cubic integral curve, and the position change of the rolling body 22 is continuous; the velocity change curve of the rolling body 22 is a quadratic integral curve, and the velocity change of the rolling body 22 is continuous; the acceleration change curve of the rolling body 22 is a first integral curve, and the acceleration change of the rolling body 22 is continuous; the jerk change curve is a zero-order integral, and the jerk change of the rolling body 22 is continuous.

[0106] In summary, this solution controls the longitudinal section curve 233 of the limiting groove 231 to be a third-order differentiable curve. Compared with the prior art, the acceleration and jerk of the rolling element 22 change continuously and smoothly without jumps during movement, thus reliably suppressing vibration. Furthermore, the third-order differentiable curve can also be set to other forms of third-order differentiable curves according to actual working needs, such as setting it to include trigonometric functions, logarithmic functions, or other forms of third-order differentiable curves. This invention does not limit this.

[0107] In one embodiment of the present invention, the valve core plate 21 further has a second end portion 212 in a first direction; a plurality of rolling elements 22 are provided and are spaced apart along the circumference of the valve core plate 21, and the plurality of rolling elements 22 are arranged into a rolling group, and two rolling groups are provided and are respectively protruding from the first end portion 211 and the second end portion 212; two valve plates 23 are provided and are respectively arranged corresponding to the first end portion 211 and the second end portion 212.

[0108] In this embodiment, there are two valve plates 23 and two rolling elements 22, which are respectively arranged at the first end 211 and the second end 212 on both sides of the valve core plate 21. Thus, the rolling elements 22 and the valve plates 23 on the opposite side can be used for support and compression. When the rolling elements 22 roll, they can also simultaneously compress, push and lock the limiting grooves 231 on the valve plates 23 on both sides, thereby improving reliability.

[0109] In one embodiment of the present invention, the insert plate structure 200 further includes a leaf spring 24, which elastically connects the valve plate 23 and the valve core plate 21. The leaf spring 24 provides a pulling force on the valve plates 23 on both sides toward the valve core plate 21, ensuring that when not fully pushed to the closed state and fully connected to the valve seat 100, it is in a retracted state and can enter the slot of the valve seat 100, so as to further push the rolling element 22 to unfold and lock the valve plates 23 on both sides. At the same time, the leaf spring 24 can provide a pulling force on the valve plate 23 toward the valve core plate 21 when the insert plate separates from the valve seat 100, so that when the rolling element 22 rolls toward the depth lifting direction of the limiting groove 231, it can pull the valve plate 23 to retract, thereby separating the valve plate 23 from the slot of the valve seat 100.

[0110] It is understood that the leaf spring 24 in this embodiment can be set as a spring or any structure that can achieve elastic connection between valve plate 23 and valve core plate 21, such as a spring or an elastic metal sheet. This invention does not limit it. Specifically, in this embodiment, it is set as an elastic metal sheet.

[0111] In one embodiment of the present invention, the insert structure 200 further includes a linear drive device 25, the linear moving part of the linear drive device 25 being connected to the valve core plate 21 to drive the valve core plate 21 and the rolling element 22 to move.

[0112] In this embodiment, the linear drive device 25 can push the valve core plate 21, which in turn drives the valve plate 23 to contact the valve seat 100 through the rolling element 22, and further pushes the valve core plate 21 and the rolling element 22 installed on the valve core plate 21, so that the rolling element 22 moves along the direction of decreasing depth of the limiting groove 231, thereby squeezing the valve plate 23 for sealing.

[0113] It is understood that the linear drive device 25 in this embodiment can be configured as a drive motor, drive cylinder, or other drive mechanism capable of linear motion, and the present invention is not limited thereto. See also Figure 7The present invention also proposes a method for processing the valve plate of a vacuum slide gate valve, for manufacturing the valve plate of the vacuum slide gate valve. The specific structure of the vacuum slide gate valve is as described in the above embodiments. Since the valve plate processing method of this vacuum slide gate valve adopts all the technical solutions of all the above embodiments, it has at least all the beneficial effects brought about by the technical solutions of the above embodiments, which will not be elaborated here. The valve plate processing method of the vacuum slide gate valve includes the following steps:

[0114] S10: Presets the switching stroke of the plug-in board and divides it into multiple variable speed motion stages and one constant speed motion stage;

[0115] It should be noted that the switching stroke is the complete rolling process of the rolling element rolling relative to the limiting groove until the valve plate moves and connects with the valve seat to complete the sealing and locking. The variable speed motion stage is the motion stage in which the speed of the rolling element changes during its movement, and the uniform speed motion stage is the stage in which the speed of the rolling element changes during its movement.

[0116] S20: Preset the acceleration and duration of multiple variable speed motion stages and one uniform speed motion stage, wherein the acceleration of the multiple variable speed motion stages is set to a constant value;

[0117] It should be noted that jerk is the rate of change of acceleration, and the duration and jerk of multiple variable speed motion stages and one uniform speed motion stage are all preset to constant values.

[0118] S30: The relationships between jerk and duration and total stroke, maximum acceleration, and maximum speed are obtained through calculation;

[0119] It should be noted that the total stroke is the total stroke of the rolling element during one switching stroke, the maximum acceleration is the maximum acceleration of the rolling element during one switching stroke, and the maximum speed is the maximum speed of the rolling element during one switching stroke.

[0120] S40: Preset at least two parameter values ​​among total stroke, maximum acceleration, and maximum speed, and obtain the relationship between jerk and time allocation coefficient, wherein the time allocation coefficient is the ratio of the duration corresponding to the uniform motion phase to the total duration of the switching stroke;

[0121] It should be noted that this parameter value is a definite numerical value, and the relationship between jerk and time distribution coefficient can be calculated using two definite parameter values.

[0122] S50: The valve plate blank is machined by adjusting the jerk corresponding to the time allocation coefficient.

[0123] It should be noted that the jerk corresponding to this time allocation coefficient is derived from the above-mentioned relationship between jerk and time allocation coefficient.

[0124] In one embodiment of the present invention, the variable speed motion stage includes an acceleration increase stage, an acceleration constant stage, and an acceleration decrease stage, wherein the acceleration in the acceleration increase stage and the acceleration decrease stage is a constant value;

[0125] The switching stroke sequentially includes a first acceleration increasing stage, a first acceleration constant stage, a first acceleration decreasing stage, a uniform motion stage, a second acceleration decreasing stage, a second acceleration constant stage, and a second acceleration increasing stage;

[0126] The magnitude and direction of the acceleration in the first acceleration increase phase and the second acceleration increase phase are the same, and the magnitude and direction of the acceleration in the first acceleration decrease phase and the second acceleration decrease phase are the same; the magnitude and direction of the acceleration in the first acceleration increase phase and the first acceleration decrease phase are the same but opposite, and the magnitude and direction of the acceleration in the second acceleration increase phase and the second acceleration decrease phase are the same but opposite.

[0127] In this embodiment, by setting the period before the uniform motion phase as the first acceleration increase phase, the first acceleration constant phase, and the first acceleration decrease phase, and setting the period after the uniform motion phase as the second acceleration decrease phase, the second acceleration constant phase, and the second acceleration increase phase, the acceleration and jerk change smoothly during the process of entering and leaving the uniform motion phase.

[0128] In one embodiment of the present invention, the formula for the duration corresponding to the switching stroke is:

[0129] t1=t3=t5=t7=τ, t2=t6=ατ, t4=βτ;

[0130] t1, t2, t3, t4, t5, t6, and t7 represent the durations of the first acceleration increase phase, the first acceleration constant phase, the first acceleration decrease phase, the uniform motion phase, the second acceleration decrease phase, the second acceleration constant phase, and the second acceleration increase phase, respectively. τ is the value of the control duration, α is the value of the control duration of the first acceleration constant phase and the second acceleration constant phase, and β is the value of the control duration of the uniform motion phase.

[0131] It should be noted that τ, α, and β are all preset parameter values;

[0132] The relationship between the jerk, the duration, and the total stroke is as follows:

[0133] S=J m τ³(3α²+6α+2+3β),

[0134] Where S is the total distance, J m The absolute values ​​of the accelerations during the first acceleration increase phase, the second acceleration increase phase, the first acceleration decrease phase, and the second acceleration decrease phase;

[0135] It should be noted that J m It is a preset accelerometer value and represents a constant value.

[0136] The relationship between the acceleration, the duration, and the maximum acceleration is as follows:

[0137] A m =J m τ,

[0138] Among them, A m This is the maximum acceleration;

[0139] It should be noted that acceleration is obtained by multiplying the corresponding jerk by the corresponding duration, and in this embodiment, the jerk J... m Since it is a constant value, the maximum acceleration A can be obtained. m ;

[0140] The relationship between the jerk, the duration, and the maximum speed is as follows:

[0141] V m =J m τ²(1+α),

[0142] Among them, V m Maximum speed;

[0143] It should be noted that the velocity is obtained by multiplying the corresponding acceleration by the corresponding duration, and the acceleration J in this embodiment is... m Given a constant value, the acceleration values ​​for each duration can be derived from it, thus allowing us to obtain the maximum velocity V. m ;

[0144] The relationship between the jerk and the time allocation coefficient is as follows:

[0145] J m =(32 / (3λ 2 12λ+16))·S / T 3 , λ=βτ / T, T=(4+2α+β)τ;

[0146] Where T is the total duration of the switching stroke, and λ is the time allocation coefficient;

[0147] It should be noted that T is the total duration of the switching stroke, that is, T is the sum of t1, t2, t3, t4, t5, t6, and t7, and λ is the ratio of the duration corresponding to the uniform motion phase to the total duration corresponding to the switching stroke. In this embodiment, λ is set to be greater than or equal to 0.1 and less than or equal to 0.9. Therefore, the machine tool side only needs to change the time allocation coefficient λ to adjust J. m The adjustment can be continuously adjusted within the range of 1 to 10 times without recalculating the entire curve. The machine tool can be a CNC machine tool with the ability to process valve plate limit grooves. Specifically, in this embodiment, it can be set as a five-axis CNC machine tool.

[0148] It should be understood that the execution subject of this embodiment can be an operator directly performing related calculation operations, or an operator operating a computing service device with data processing, network communication and program running functions, such as a tablet computer, personal computer, mobile phone, etc., to perform calculation operations and control the machine tool side according to the accelerometer and time allocation coefficient.

[0149] The following embodiment illustrates a valve plate processing method for a vacuum slide gate valve according to the present invention:

[0150] A single switching stroke is preset and divided into a first acceleration increase stage, a first acceleration constant stage, a first acceleration decrease stage, a uniform motion stage, a second acceleration decrease stage, a second acceleration constant stage, and a second acceleration increase stage.

[0151] Based on the actual required vacuum valve specifications, the total stroke S and maximum speed V are selected. m and maximum acceleration A m At least two of the values ​​are known, and the value of the time allocation coefficient λ is selected. From this, the values ​​of τ, α, and β are calculated, and the valve plate is then processed. The specific steps are as follows:

[0152] First, based on the design requirements of the vacuum slide gate valve, the processing objectives are clearly defined: the limiting grooves on the valve plate must ensure that the jerk of the rolling elements changes continuously during movement to reduce vibration. Operators need to prepare a valve plate blank (e.g., made of titanium alloy) and set key parameters:

[0153] The preset total travel distance S of the switch is set to 20mm.

[0154] Motion phases are divided into seven stages: a first acceleration increase stage, a first acceleration constant stage, a first acceleration decrease stage, a uniform motion stage, a second acceleration decrease stage, a second acceleration constant stage, and a second acceleration increase stage. The jerk during the variable acceleration stage is preset to a constant value, while the jerk is zero during the uniform motion stage.

[0155] Preset basic parameters: Based on actual needs, preset the total stroke S and maximum acceleration A. m Maximum speed V m At least two parameter values ​​are specified. Simultaneously, a time allocation coefficient λ (the ratio of the duration of the uniform velocity phase to the total duration, typically adjusted between 0.1 and 0.9 to optimize vibration control) is set.

[0156] Parameter Calculation and Relationship Derivation: Operators need to determine the specific parameters of the motion curve through calculation to ensure smooth changes in jerk. This step involves the derivation of mathematical relationships, and key points include:

[0157] Calculation of time parameters: based on preset S and A m V m Using relational expressions (such as A) m =J m ·τ、V m =J m ·τ²·(1+α), S=J m Solve for the fundamental time constant τ, the constant acceleration stage coefficient α, and the uniform velocity stage coefficient β using the formula τ³(3α²+6α+2+3β).

[0158] Determine the jerk J m According to the relationship between jerk and time distribution coefficient J m =[32 / (3λ²-12λ+16)]·S / T³ (where T is the total duration), adjusting the value of λ can directly control J. m For example, in field tests and experiments, it was found that when λ increases from 0.2 to 0.9, J m Available from 1.8×10 4 The m / s³ was changed to 1.2×10³m / s³ to balance processing efficiency and vibration suppression effect.

[0159] Verify data consistency: After calculation, the parameters (such as the duration of each stage t1~t7) need to be checked to ensure that they match the preset itinerary.

[0160] After the parameters are calculated, the operator imports the results into the CNC machine tool system (such as a five-axis CNC milling machine) for programming and settings.

[0161] Generating motion curves: based on calculated J m Write an accelerator control program based on the duration of each stage (e.g., t1=t3=t5=t7=τ, t2=t6=ατ, t4=βτ) to ensure that the toolpath conforms to the requirements of a third-order differentiable curve (e.g., y=cz³).

[0162] Machine tool configuration: Clamp the valve plate blank, select appropriate cutting tools (such as ball end mills), set the feed rate, spindle speed and other machining parameters to ensure that the cross-sectional curve (such as parabola or Gothic arch curve) of the limiting groove reaches the micron level accuracy.

[0163] Finally, perform the processing and monitor the quality in real time:

[0164] Layered machining: The CNC machine tool mills the limiting groove layer by layer according to the programmed path, focusing on controlling the sealing curve section (groove depth gradually changes from 4mm to 1mm) to ensure that the jerk does not change abruptly when the rolling element moves.

[0165] Online monitoring: During the manufacturing process, sensor feedback verifies the consistency between the actual motion curve and the design, and fine-tunes the λ value to optimize J when necessary. m .

[0166] Through calculation and experimentation, it can be determined that when the total stroke is 20mm, by adjusting λ, J... m The changes in valve plate amplitude and sealing ring life after the changes are as follows:

[0167] When λ=0.2, J m =1.8×10 4 m / s³, total stroke duration T=60ms, corresponding to valve plate amplitude of 38μm, and sealing ring life of 800,000 cycles;

[0168] When λ=0.5, J m =4.5×10³m / s³, the total stroke duration T=80ms, corresponding to a valve plate amplitude of 11μm, and a sealing ring life of 1.5 million cycles;

[0169] When λ=0.9, J m =1.2×10³m / s³, the total stroke duration T=120ms, corresponding to a valve plate amplitude of 4.5μm, and a sealing ring life of 2.2 million cycles.

[0170] Post-processing inspection: After machining, a coordinate measuring machine is used to check the dimensions and curve continuity of the limiting groove to ensure that it meets the vibration suppression standard (e.g., valve plate amplitude is less than 5μm).

[0171] In summary, this method integrates accelerometer control into practical operation through systematic parameter calculation and CNC machining. The key lies in accurately setting λ and J. m Furthermore, CNC technology enables highly repeatable machining, thereby improving the sealing performance and lifespan of the valve plate.

Claims

1. A vacuum slide gate valve, characterized in that, The vacuum slide gate valve includes a valve seat and a slide gate structure. A flow channel extending in a first direction is formed within the valve seat, and the valve seat has a side opening in a second direction that laterally communicates with the flow channel. The slide gate structure includes: The valve core plate has a first end in a first direction; A rolling element, rotatably mounted on the first end of the valve core plate, and capable of protruding outward from the first end of the valve core plate; and, A valve plate is disposed on one side of the first end of the valve core plate. A limiting groove extending in a second direction is provided on the end face of the valve plate facing the valve core plate. The cross-sectional curve formed by the inner wall of the limiting groove is used to make point contact with the rolling element, and there are at least two contact points. The longitudinal cross-sectional curve formed by the inner wall of the limiting groove satisfies the continuous and smooth change of the rate of curvature. The longitudinal cross-sectional curve has a sealing curve segment with gradually decreasing depth. During the movement of the valve core plate in the second direction, the rolling element is driven to move in the second direction. The rolling element moves along the longitudinal section curve in the limiting groove. Corresponding to the sealing curve segment, the depth of the rolling element in the limiting groove gradually decreases, so that the valve plate gradually moves away from the valve core plate in the first direction to seal the flow channel.

2. The vacuum slide gate valve as described in claim 1, characterized in that, The cross-sectional curve is set as a parabola, and the formula corresponding to the cross-sectional curve is: y=ax 2 +h; Where 'a' is a constant coefficient controlling the width of the parabola's opening, and 'h' is a numerical value controlling the height of the parabola's arch.

3. The vacuum slide gate valve as described in claim 1, characterized in that, The cross-sectional curve of the limiting groove is set as a Gothic arch curve, which is formed by splicing two circular arc curves with the same radius. The formula corresponding to the cross-sectional curve is: (x+b)²+y²=R², –L≤x≤0; (xb)² + y² = R², 0 ≤ x ≤ L; b² + h² = R²; Where R is the radius of the circular arc, b is the value controlling the width of the opening of the Gothic arch, h is the value controlling the height of the arch top of the Gothic arch, and L is the length of the intersection of the Gothic arch with the horizontal axis from the origin of the coordinate axis.

4. The vacuum slide gate valve as described in claim 1, characterized in that, The longitudinal section curve is set as a third-order differentiable curve, and the formula corresponding to the third-order differentiable curve is: y=cz 3 ; Where c is a coefficient that controls the curvature of the third-order differentiable curve.

5. The vacuum slide gate valve as described in claim 1, characterized in that, The valve core plate also has a second end in the first direction; Multiple rolling elements are provided and spaced apart along the circumference of the valve core plate. The multiple rolling elements are arranged into a rolling group. Two rolling groups are provided and are respectively protruding from the first end and the second end. Two valve plates are provided, corresponding to the first end and the second end respectively.

6. The vacuum slide gate valve as described in claim 1, characterized in that, The insert structure also includes: A leaf spring, used to elastically connect the valve plate and the valve core plate.

7. The vacuum slide gate valve as described in claim 1, characterized in that, The insert plate structure also includes a linear drive device, the linear moving part of which is connected to the valve core plate to drive the valve core plate and the rolling element to move.

8. A method for processing a valve plate of a vacuum slide gate valve, for manufacturing the valve plate of the vacuum slide gate valve as described in claim 4, characterized in that, The valve plate processing method of the vacuum slide gate valve includes the following steps: The switching stroke of the plug is preset and divided into multiple variable speed motion stages and one constant speed motion stage; The acceleration and duration of multiple variable speed motion stages and one uniform speed motion stage are preset, wherein the acceleration of the multiple variable speed motion stages is set to a constant value; The relationships between jerk and duration and total travel, maximum acceleration, and maximum speed were obtained through calculation. Preset at least two parameter values ​​among total stroke, maximum acceleration, and maximum speed, and obtain the relationship between jerk and time allocation coefficient, wherein the time allocation coefficient is the ratio of the duration corresponding to the uniform motion phase to the total duration of the switching stroke; The jerk corresponding to the time allocation coefficient is adjusted during machining on the valve plate blank.

9. The valve plate processing method for the vacuum slide gate valve as described in claim 8, characterized in that, The variable speed motion phase includes an acceleration increase phase, an acceleration constant phase, and an acceleration decrease phase, wherein the acceleration in the acceleration increase phase and the acceleration decrease phase is a constant value; The switching stroke sequentially includes a first acceleration increasing stage, a first acceleration constant stage, a first acceleration decreasing stage, a uniform motion stage, a second acceleration decreasing stage, a second acceleration constant stage, and a second acceleration increasing stage; The magnitude and direction of the acceleration are the same in the first acceleration increase phase and the second acceleration increase phase, and the magnitude and direction of the acceleration are the same in the first acceleration decrease phase and the second acceleration decrease phase; The magnitudes of the accelerations in the first acceleration increase phase and the first acceleration decrease phase are the same but opposite in direction, and the magnitudes of the accelerations in the second acceleration increase phase and the second acceleration decrease phase are the same but opposite in direction.

10. The valve plate processing method of the vacuum slide gate valve as described in claim 9, characterized in that, The formula for the duration corresponding to the switching stroke is: t1=t3=t5=t7=τ, t2=t6=ατ, t4=βτ; t1, t2, t3, t4, t5, t6, and t7 represent the durations of the first acceleration increase phase, the first acceleration constant phase, the first acceleration decrease phase, the uniform motion phase, the second acceleration decrease phase, the second acceleration constant phase, and the second acceleration increase phase, respectively. τ is the value of the control duration, α is the value of the control duration of the first acceleration constant phase and the second acceleration constant phase, and β is the value of the control duration of the uniform motion phase. The relationship between the jerk, the duration, and the total stroke is as follows: S=J m τ³(3α²+6α+2+3β), Where S is the total distance, J m The absolute values ​​of the accelerations during the first acceleration increase phase, the second acceleration increase phase, the first acceleration decrease phase, and the second acceleration decrease phase; The relationship between the acceleration, the duration, and the maximum acceleration is as follows: A m =J m t, Among them, A m This is the maximum acceleration; The relationship between the jerk, the duration, and the maximum speed is as follows: V m =J m t 2 (1+a), Among them, V m Maximum speed; The relationship between the jerk and the time allocation coefficient is as follows: J m =(32 / (3λ 2 12λ+16))·S / T 3 ,λ=βτ / T,T=(4+2α+β)τ; Where T is the total duration of the switching stroke, and λ is the time allocation coefficient.

Citation Information

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