Automatic sheet conveying MOCVD equipment

Abstract

The invention discloses automatic wafer conveying MOCVD equipment which comprises a reaction cavity and a graphite base arranged in the reaction cavity, a plurality of small graphite discs are evenly distributed on the graphite base, the small graphite discs are used for bearing wafers, the graphite base is connected with a rotation driving part outside the reaction cavity, and the rotation driving part is used for driving the reaction cavity to rotate. The graphite base drives the small graphite disc to rotate in the reaction cavity; a graphite ring is arranged between the reaction cavity and the graphite base, a wafer conveying opening assembly capable of being automatically opened and closed is arranged on the side portion of the graphite ring, and the side portion of the reaction cavity is communicated to an automatic wafer conveying mechanism through a conveying valve; when the wafer conveying port assembly and the conveying valve are both in an open state, the automatic wafer conveying mechanism carries the wafer to automatically enter and exit the reaction cavity, and the graphite base drives the small graphite disc to rotate to the wafer conveying port, so that the wafer is automatically taken and placed on the small graphite disc. The wafer taking and placing device has the characteristics of compact structure, convenience in operation, high reliability and the like, automatic wafer taking and placing are realized, and the production efficiency is remarkably improved.

Description

Technical Field

[0001] This invention relates to the field of semiconductor equipment technology, and more specifically to an automated wafer transfer MOCVD device. Background Technology

[0002] MOCVD equipment is mainly used to grow epitaxial wafers of compound semiconductors such as SiC, GaAs, and GaN. It typically employs a single-cavity, multi-wafer approach, where a graphite substrate is placed within a cavity, and multiple graphite disks are created on the substrate. Wafers are placed on these disks and then on the substrate. Currently, most MOCVD equipment uses manual placement of the disks and wafers, which is inefficient. Furthermore, the need to create cavities during placement and the inherent variability between wafers during manual placement negatively impact batch-to-batch consistency. Summary of the Invention

[0003] The technical problem to be solved by the present invention is to address the shortcomings of existing MOCVD equipment, which requires manual loading or unloading of wafers through a glove box, resulting in reduced efficiency and inconvenience. The invention provides an automatic wafer transfer MOCVD equipment that is compact, easy to operate, and stable and reliable.

[0004] To solve the above-mentioned technical problems, the technical solution adopted by the present invention is as follows: An automated wafer transfer MOCVD device includes: a reaction chamber and a graphite base disposed within the reaction chamber. Multiple graphite disks are evenly distributed on the graphite base, each disk carrying a wafer. The graphite base is connected to a rotation drive component outside the reaction chamber to enable the graphite base to drive the graphite disks to rotate within the reaction chamber. A graphite ring is disposed between the reaction chamber and the graphite base. An automatically opening and closing wafer transfer port assembly is located on the side of the graphite ring. The side of the reaction chamber is connected to an automated wafer transfer mechanism via a transfer valve. When both the wafer transfer port assembly and the transfer valve are open, the automated wafer transfer mechanism automatically carries the wafer into and out of the reaction chamber, and the graphite base drives the graphite disks to rotate to the wafer transfer port, thereby enabling automatic wafer loading and unloading on the graphite disks.

[0005] As a further improvement of the present invention, the transfer port assembly includes a drive cylinder, a transfer rod, a guide seat, and a graphite plate; one end of the transfer rod is connected to the output end of the drive cylinder, and the other end of the transfer rod passes through the guide seat and is connected to the graphite plate, so as to realize that the transfer rod drives the graphite plate to reciprocate up and down; the graphite plate matches the transfer port on the side of the graphite ring; one end of the guide seat is fixedly connected to the reaction chamber, and the other end of the guide seat is movably connected to the reaction chamber; when the drive cylinder drives the transfer rod to move up and down, the guide seat is used to assist the transfer rod in driving the graphite plate to move horizontally, so as to realize the automatic opening or closing of the transfer port on the side of the graphite ring.

[0006] As a further improvement of the present invention, the guide seat includes a fixed block, a sliding block, and a convex shaft; a pulley is provided on the outer side of the fixed block, and a sliding groove is provided on the outer side of the sliding block. The pulley is slidably disposed in the sliding groove to achieve a sliding nesting fit between the fixed block and the sliding block; the fixed block is fixedly connected to the reaction chamber, and the sliding block is movably connected to the reaction chamber; the convex shaft is fixed on the transmission rod in the vertical direction; when the drive cylinder drives the transmission rod to descend, it drives the convex shaft to insert between the fixed block and the sliding block, causing the sliding block to drive the transmission rod to move backward, thereby opening the transfer port on the side of the graphite ring of the graphite plate; when the drive cylinder drives the transmission rod to rise, it drives the convex shaft to disengage from between the fixed block and the sliding block, causing the sliding block to drive the transmission rod to move forward, thereby closing the transfer port on the side of the graphite ring of the graphite plate.

[0007] As a further improvement of the present invention, a roller is provided on the inner side of the fixed block, a guide wheel is provided on the inner side of the sliding block, the guide wheel and the roller are arranged opposite to each other, and the transmission rod passes through the guide wheel and the roller.

[0008] As a further improvement of the present invention, the convex shaft has an inverted "L" shaped structure. The vertical section of the convex shaft is connected and fixed to the transmission rod, and the length of the vertical section of the convex shaft is greater than the height of the graphite plate. The horizontal section of the convex shaft faces the guide wheel. When the drive cylinder drives the transmission rod to descend, it drives the vertical section of the convex shaft to insert between the guide wheel and the roller, so that the sliding block drives the transmission rod to move backward, thereby realizing the opening of the transfer port on the side of the graphite ring by the graphite plate.

[0009] As a further improvement of the present invention, the end of the sliding block is provided with a first spring, which abuts against the reaction chamber to provide the clamping force required for the graphite plate to close the transfer port.

[0010] As a further improvement of the present invention, the transfer port assembly further includes a support base, the top of the transfer rod is connected to the support base, and the side of the support base is connected to the graphite plate.

[0011] As a further improvement of the present invention, the support base includes a support block and a connecting block. The support block is connected to the top of the transmission rod, one end of the connecting block is connected to the graphite plate, the other end of the connecting block is connected to the support block, and a second spring is provided between the support block and the connecting block.

[0012] As a further improvement of the present invention, the support block is also provided with an adjusting screw, which abuts against the top of the convex shaft; when the adjusting screw is turned, the pitch angle of the graphite plate can be adjusted.

[0013] As a further improvement of the present invention, a heat insulation ring is provided between the connecting block and the graphite plate.

[0014] Compared with the prior art, the advantages of the present invention are as follows: The automated wafer transfer MOCVD equipment of the present invention features a graphite ring between the reaction chamber and the graphite substrate. Process gases diffuse within the graphite ring, preventing them from contacting the reaction chamber and forming byproducts. An automatically opening and closing wafer transfer port assembly is located on the side of the graphite ring, and the side of the reaction chamber is connected to the automated wafer transfer mechanism via a transfer valve. When both the wafer transfer port assembly and the transfer valve are open, the automated wafer transfer mechanism can automatically carry wafers into and out of the reaction chamber. The graphite substrate then rotates a graphite disk to the wafer transfer port, achieving automatic wafer loading and unloading on the graphite disk. This ensures consistent wafer loading and unloading without affecting the overall flow field of the growth system within the reaction chamber, significantly improving the growth efficiency of epitaxial wafers. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the overall structure and principle of the automatic wafer transfer MOCVD equipment in a specific embodiment of the present invention; Figure 2 This is a schematic diagram illustrating the overall structural principle of the transfer window in a specific embodiment of the present invention; Figure 3 This is a schematic diagram of the overall structural principle of the guide seat in a specific embodiment of the present invention; Figure 4 This is a schematic diagram of the overall structural principle of the support base in a specific embodiment of the present invention; Figure 5 This is a side view schematic diagram of the support structure in a specific embodiment of the present invention; Figure 6 This is a schematic diagram of the overall structural principle of the transmission window being in the open state in a specific embodiment of the present invention; Figure 7 This is a schematic diagram of the cross-sectional structure in a specific embodiment of the present invention, showing the transmission window in the open state.

[0016] Legend: 1. Base plate; 2. Reaction chamber; 3. Graphite base; 4. Graphite disc; 5. Graphite ring; 6. Transfer port assembly; 61. Drive cylinder; 62. Connecting plate; 63. Guide plate; 64. Guide rod; 65. Adjusting nut; 66. Bellows; 67. Transfer rod; 68. Guide seat; 69. Support seat; 610. Graphite plate; 681. Fixing block; 682. Sliding block; 683. Protruding shaft; 684. First spring; 685. Guide wheel; 686. Roller; 687. Slide groove; 688. Pulley; 691. Support block; 692. Second spring; 693. Connecting block; 694. Adjusting screw; 695. Heat insulation ring; 7. Transfer valve; 8. Robotic arm; 9. Loading tray. Detailed Implementation

[0017] The present invention will be further described below with reference to the accompanying drawings and specific preferred embodiments, but this does not limit the scope of protection of the present invention.

[0018] In the description of this invention, it should be understood that the terms "side", "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this invention and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this invention.

[0019] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this invention, "a plurality of" means two or more unless otherwise explicitly specified.

[0020] Example like Figure 1 and Figure 2 As shown, the automated wafer transfer MOCVD equipment of the present invention includes: a reaction chamber 2 disposed on a base plate 1 and a graphite base 3 disposed within the reaction chamber 2. Multiple graphite disks 4 are evenly distributed on the graphite base 3, and the graphite disks 4 are used to support wafers. The graphite base 3 is connected to a rotation drive component outside the reaction chamber 2 to enable the graphite base 3 to drive the graphite disks 4 to rotate within the reaction chamber 2. A graphite ring 5 is provided between the reaction chamber 2 and the graphite base 3. The process gas is contained within the graphite ring 5, which prevents the process gas from contacting the reaction chamber 2 and forming byproducts on the chamber. An automatically opening and closing wafer transfer port assembly 6 is provided on the side of the graphite ring 5, and when closed, the wafer transfer port assembly 6 adheres to the graphite ring 5 to ensure the uniformity of the flow field. The side of the reaction chamber 2 is connected to the automated wafer transfer mechanism via a transfer valve 7. When both the wafer transfer port assembly 6 and the transfer valve 7 are in the open state, the automatic wafer transfer mechanism carries the wafer to automatically enter and exit the reaction chamber 2, and the graphite base 3 drives the graphite disk 4 to rotate to the wafer transfer port, so as to realize the automatic picking and placing of wafers on the graphite disk 4.

[0021] Furthermore, the automated film transfer mechanism includes a robotic arm 8 and a loading tray 9. For example... Figure 1As shown, during wafer unloading, the transfer valve 7 and the wafer transfer port assembly 6 open. The graphite base 3 rotates at a certain angle so that the graphite disk 4 is located directly to the left of the wafer transfer port on the side of the graphite ring 5. The robot arm 8 removes the wafer or the graphite disk 4 and places it in the loading tray 9. The robot arm 8 returns to its original position, and the graphite base 3 and the loading tray 9 rotate simultaneously at a certain angle. The robot arm 8 repeats the action of picking up and placing the next wafer. After the picking and placing is completed, the transfer valve 7 and the wafer transfer port assembly 6 are closed. The wafer loading process is similar. like Figure 2 As shown, the transfer port assembly 6 includes a drive cylinder 61, a transfer rod 67, a guide seat 68, and a graphite plate 610. The bottom end of the transfer rod 67 is connected to the output end of the drive cylinder 61, and the top end of the transfer rod 67 passes through the guide seat 68 and connects to the graphite plate 610, so that the transfer rod 67 drives the graphite plate 610 to reciprocate up and down, and the graphite plate 610 matches the transfer port on the side of the graphite ring 5. One end of the guide seat 68 is fixedly connected to the reaction chamber 2, and the other end of the guide seat 68 is movably connected to the reaction chamber 2. When the drive cylinder 61 drives the transfer rod 67 to move up and down, the guide seat 68 is used to assist the transfer rod 67 in driving the graphite plate 610 to move horizontally, so as to automatically open or close the transfer port on the side of the graphite ring 5.

[0022] In this embodiment, a drive cylinder 61 is installed below the base plate 1 and connected to the bottom of a connecting plate 62. A bellows 66 is provided on the connecting plate 62, with its bottom sealed to the output end of the drive cylinder 61. The top of the bellows 66 is welded to the bottom of the base plate 1. A transmission rod 67 is disposed inside the bellows 66, with its top passing through the base plate 1 and the reaction chamber 2 to achieve a sealed connection between the transmission rod 67 and the reaction chamber 2. Furthermore, a guide plate 63 is provided at the bottom of the bellows 66, and a guide rod 64 is provided on the outside of the guide plate 63. The top of the guide rod 64 is fixedly connected to the top of the bellows 66, and its bottom passes through the guide plate 63 and the connecting plate 62. An adjusting nut 65 is provided at the lower part of the guide rod 64 to limit the minimum downward displacement of the guide plate 63 and the bellows 66, and an adjusting nut 65 is also provided at the upper part of the guide rod 64 to limit the maximum upward displacement of the guide plate 63 and the bellows 66.

[0023] When the drive cylinder 61 is activated, it drives the lower end of the bellows 66 to move, which in turn drives the guide plate 63 to move. The guide plate 63 moves up and down along the guide rod 64. The bellows 66 is mounted on the base plate 1 to transmit the movement of the cylinder, ensuring the sealing of the reaction chamber 2. Then, it drives the graphite plate 610 to move through the transmission rod 67, thereby opening or closing the plate transfer port.

[0024] In this embodiment, a magnetic switch can also be installed on the drive cylinder 61 to detect the position of the drive cylinder 61 and thus determine whether the plate transfer port is open. The cylinder drive air supply is connected to the exhaust throttle valve to adjust the movement speed of the cylinder.

[0025] like Figure 2 and Figure 6 As shown, in this embodiment, the opening or closing of the transfer port is achieved by the up-and-down movement of the drive cylinder 61, which drives the transmission rod 67 and the graphite plate 610 to move. To prevent friction between the graphite plate 610 and the graphite ring 5 during the opening and closing process, the graphite plate 610 needs to have the ability to move in both horizontal and vertical directions. When opening, the graphite plate 610 first moves horizontally to the right to disengage from the graphite ring 5, and then moves downward to complete the opening of the transfer port; conversely, it completes the closing action. In this embodiment, the horizontal movement of the graphite plate 610 driven by the transmission rod 67 is achieved through the setting of the guide seat 68.

[0026] like Figure 2 and Figure 3 As shown, the guide seat 68 includes a fixed block 681, a sliding block 682, and a convex shaft 683. The fixed block 681 is mounted on the reaction chamber 2 as a fixing component, and its horizontal position on the reaction chamber 2 is adjustable to facilitate adjusting the initial position of the graphite plate 610 from the graphite ring 5. The sliding block 682 is movably connected to the reaction chamber 2 and has a certain amount of space relative to the reaction chamber 2 to adjust the horizontal position of the graphite plate 610.

[0027] The fixed block 681 is provided with a pulley 688 on its outer side, and the sliding block 682 is provided with a sliding groove 687 on its outer side. The pulley 688 is slidably disposed in the sliding groove 687 so as to realize the sliding nesting cooperation between the fixed block 681 and the sliding block 682, and the sliding block 682 can slide back and forth along the sliding groove 687.

[0028] The convex shaft 683 has an inverted "L" shape. The vertical section of the convex shaft 683 is connected and fixed to the transmission rod 67. The end of the vertical section of the convex shaft 683 is chamfered to ensure smooth deformation of the transmission rod 67. Furthermore, the length of the vertical section of the convex shaft 683 is slightly greater than the height of the graphite plate 610 to ensure that the transmission rod 67 can fully open the transfer port of the graphite plate during its descent. Figure 6 and Figure 7 As shown. Figure 3 As shown, when the drive cylinder 61 drives the transmission rod 67 to descend, it causes the cam shaft 683 to insert between the fixed block 681 and the sliding block 682, causing the sliding block 682 to move the transmission rod 67 backward, thus opening the transfer port on the side of the graphite ring 5 of the graphite plate 610. When the drive cylinder 61 drives the transmission rod 67 to rise, it causes the cam shaft 683 to disengage from between the fixed block 681 and the sliding block 682, causing the sliding block 682 to move the transmission rod 67 forward, thus closing the transfer port on the side of the graphite ring 5 of the graphite plate 610.

[0029] Furthermore, a roller 686 is provided on the inner side of the fixed block 681. When the convex shaft 683 moves downward, it drives the roller 686 to rotate, preventing friction between the convex shaft 683 and the fixed block 681 from generating particles that would affect the process. A guide wheel 685 with a groove is provided on the inner side of the sliding block 682. The transmission rod 67 matches the groove of the guide wheel 685 to prevent the transmission rod 67 from wobbling left and right and affecting the transmission effect. The guide wheel 685 and the roller 686 are arranged opposite each other. The transmission rod 67 and the convex shaft 683 pass between the guide wheel 685 and the roller 686, with the horizontal section of the convex shaft 683 facing the guide wheel 685. When the graphite plate 610 is completely fitted and sealed to the side of the graphite ring 5, the bottom of the vertical section of the convex shaft 683 contacts the roller 686. When the transfer port needs to be opened, the drive cylinder 61 drives the transfer rod 67 to descend. The vertical section of the cam shaft 683 then inserts between the guide wheel 685 and the roller 686. At this time, the cam shaft 683 contacts the roller 686, and the transfer rod 67 contacts the groove of the guide wheel 685. This is equivalent to the cam shaft 683 providing a squeezing force, causing the transfer rod 67 and the sliding block 682 to move horizontally synchronously, thus opening the graphite plate 610 from the transfer port. Subsequently, the transfer rod 67 and the cam shaft 683 descend synchronously, thus lowering the graphite plate 610 until the horizontal section of the cam shaft 683 contacts the guide wheel 685, completing the process of the graphite plate 610 fully opening the transfer port. Figure 6 and Figure 7 As shown. Conversely, closing the transfer port completes the process.

[0030] like Figure 3 As shown, the sliding block 682 is provided with two first springs 684 at its end. The first springs 684 abut against the reaction chamber 2 to provide the clamping force required for the graphite plate 610 to close the transfer port, ensuring the effectiveness of the closure.

[0031] like Figure 2 and Figure 4 As shown, the transfer port assembly 6 also includes a support base 69, with the top of the transfer rod 67 connected to the support base 69 and the side of the support base 69 connected to the graphite plate 610. Further, the support base 69 includes a support block 691 and a connecting block 693. The support block 691 is connected to the top of the transfer rod 67, the front end of the connecting block 693 is connected to the graphite plate 610, and the rear end of the connecting block 693 is connected to the support block 691. A screw with a second spring 692 is also provided between the support block 691 and the connecting block 693 to provide a certain elastic preload, allowing the connecting block 693 to have horizontal adjustability within a certain range.

[0032] like Figure 5As shown, the rear end of the support block 691 is also provided with an adjusting screw 694, the lower end of which abuts against the top of the convex shaft 683. The angle of the graphite plate 610 can be adjusted by changing the screwing depth of the adjusting screw 694, so that the graphite plate 610 has the ability to adjust the pitch angle, so as to better fit the graphite ring 5.

[0033] like Figure 5 As shown, a heat insulation ring 695 is provided between the connecting block 693 and the graphite plate 610. The connecting block 693 is made of a metal with low thermal deformation, such as molybdenum or titanium alloy, and the heat insulation ring 695 can be made of quartz or carbon felt to reduce the temperature of the connecting block 693 during the process.

[0034] In this embodiment, the transfer port assembly 6 has multi-directional adjustment capability. By adjusting the vertical direction, horizontal direction and the pitch angle of the graphite plate 610, it can adapt to different reaction chambers, meet different process requirements, is simple and reliable, has strong versatility, and has low manufacturing cost.

[0035] The above description is merely a preferred embodiment of the present invention. The scope of protection of the present invention is not limited to the above embodiments. All technical solutions falling within the scope of the present invention's concept are within the scope of protection of the present invention. It should be noted that for those skilled in the art, any improvements and modifications made without departing from the principles of the present invention should also be considered within the scope of protection of the present invention.

Claims

1. An automated MOCVD equipment for wafer transfer, characterized in that, include: The reaction chamber (2) and the graphite base (3) disposed inside the reaction chamber (2) are provided with a plurality of graphite disks (4) evenly distributed on the graphite base (3). The graphite disks (4) are used to support the wafer. The graphite base (3) is connected to a rotation drive component outside the reaction chamber (2) to enable the graphite base (3) to drive the graphite disks (4) to rotate inside the reaction chamber (2). A graphite substrate is provided between the reaction chamber (2) and the graphite base (3). The graphite ring (5) has an automatically opening and closing wafer transfer port assembly (6) on its side. The reaction chamber (2) is connected to the automatic wafer transfer mechanism via a transfer valve (7). When both the wafer transfer port assembly (6) and the transfer valve (7) are in the open state, the automatic wafer transfer mechanism carries the wafer and automatically enters and exits the reaction chamber (2). The graphite base (3) drives the graphite disk (4) to rotate to the wafer transfer port so as to realize the automatic picking and placing of the wafer on the graphite disk (4).

2. The automated wafer transfer MOCVD equipment according to claim 1, characterized in that, The transfer port assembly (6) includes a drive cylinder (61), a transfer rod (67), a guide seat (68), and a graphite plate (610). One end of the transfer rod (67) is connected to the output end of the drive cylinder (61), and the other end of the transfer rod (67) passes through the guide seat (68) and is connected to the graphite plate (610) so that the transfer rod (67) drives the graphite plate (610) to move up and down. The graphite plate (610) matches the transfer port on the side of the graphite ring (5). One end of the guide seat (68) is fixedly connected to the reaction chamber (2), and the other end of the guide seat (68) is movably connected to the reaction chamber (2). When the drive cylinder (61) drives the transfer rod (67) to move up and down, the guide seat (68) is used to assist the transfer rod (67) in driving the graphite plate (610) to move horizontally so as to automatically open or close the transfer port on the side of the graphite ring (5).

3. The automatic wafer transfer MOCVD equipment according to claim 2, characterized in that, The guide seat (68) includes a fixed block (681), a sliding block (682), and a convex shaft (683). A pulley (688) is provided on the outer side of the fixed block (681), and a groove (687) is provided on the outer side of the sliding block (682). The pulley (688) is slidably disposed within the groove (687) to achieve a sliding nested fit between the fixed block (681) and the sliding block (682). The fixed block (681) is fixedly connected to the reaction chamber (2), and the sliding block (682) is movably connected to the reaction chamber (2). The convex shaft (683) is fixed vertically on the transmission rod (67). When the drive cylinder (61) drives the transmission rod (67) to descend, it drives the cam shaft (683) to insert between the fixed block (681) and the sliding block (682), so that the sliding block (682) drives the transmission rod (67) to move backward, thereby opening the transfer port on the side of the graphite ring (5) of the graphite plate (610); when the drive cylinder (61) drives the transmission rod (67) to rise, it drives the cam shaft (683) to disengage from between the fixed block (681) and the sliding block (682), so that the sliding block (682) drives the transmission rod (67) to move forward, thereby closing the transfer port on the side of the graphite ring (5) of the graphite plate (610).

4. The automatic wafer transfer MOCVD equipment according to claim 3, characterized in that, The fixed block (681) is provided with a roller (686) on its inner side, and the sliding block (682) is provided with a guide wheel (685) on its inner side. The guide wheel (685) and the roller (686) are arranged opposite to each other, and the transmission rod (67) passes between the guide wheel (685) and the roller (686).

5. The automatic wafer transfer MOCVD equipment according to claim 4, characterized in that, The convex shaft (683) has an inverted "L" shape. The vertical section of the convex shaft (683) is connected and fixed to the transmission rod (67), and the length of the vertical section of the convex shaft (683) is greater than the height of the graphite plate (610). The horizontal section of the convex shaft (683) faces the guide wheel (685). When the driving cylinder (61) drives the transmission rod (67) to descend, it drives the vertical section of the convex shaft (683) to insert between the guide wheel (685) and the roller (686), so that the sliding block (682) drives the transmission rod (67) to move backward, thereby realizing the opening of the transfer port on the side of the graphite ring (5) of the graphite plate (610).

6. The automated wafer transfer MOCVD equipment according to claim 3, characterized in that, The sliding block (682) is provided with a first spring (684) at its end. The first spring (684) abuts against the reaction chamber (2) to provide the clamping force required for the graphite plate (610) to close the transfer port.

7. The automated wafer transfer MOCVD equipment according to any one of claims 3 to 6, characterized in that, The transfer port assembly (6) also includes a support base (69), the top of the transfer rod (67) is connected to the support base (69), and the side of the support base (69) is connected to the graphite plate (610).

8. The automated wafer transfer MOCVD equipment according to claim 7, characterized in that, The support base (69) includes a support block (691) and a connecting block (693). The support block (691) is connected to the top of the transmission rod (67). One end of the connecting block (693) is connected to the graphite plate (610), and the other end of the connecting block (693) is connected to the support block (691). A second spring (692) is also provided between the support block (691) and the connecting block (693).

9. The automated wafer transfer MOCVD equipment according to claim 8, characterized in that, The support block (691) is also provided with an adjusting screw (694), which abuts against the top of the convex shaft (683); when the adjusting screw (694) is turned, the pitch angle of the graphite plate (610) is adjusted.

10. The automated wafer transfer MOCVD equipment according to claim 8, characterized in that, A heat insulation ring (695) is provided between the connecting block (693) and the graphite plate (610).

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