Silicon particle drying equipment with moisture monitoring function

Abstract

The invention belongs to the technical field of silicon particle drying, and particularly relates to silicon particle drying equipment with a moisture monitoring function. The silicon particle drying equipment comprises a drying base, a drying cavity is formed in the drying base, a feeding base is installed on the upper end face of the drying base, and a material containing plate is installed on the cavity wall of the drying cavity; a material containing plate is arranged in the drying cavity, a horizontal carding frame is slidably arranged in the drying cavity, the horizontal carding frame is arranged above the material containing plate, the horizontal carding frame can move left and right above the material containing plate and scatter silicon particles above the material containing plate, and a plurality of moisture sensors are installed in the drying cavity; silicon particles are preliminarily dried in the process of falling from the feeding base to the surface of the material containing plate, then the horizontal carding frame is controlled to move left and right above the material containing plate, the silicon particles above the material containing plate can be dispersed in a reciprocating mode through the horizontal carding frame, the drying effect on the silicon particles is achieved, and compared with the drying effect in the prior art, flowing dead corners are easily formed; and subsequent use of silicon particles is facilitated.

Description

Technical Field

[0001] This invention belongs to the field of silicon particle drying technology, specifically a silicon particle drying device with moisture monitoring function. Background Technology

[0002] Polycrystalline silicon is a fundamental electronic information material for semiconductor devices. High-purity silicon grains are the cornerstone of the photovoltaic and semiconductor industries. The precise control of its moisture content is directly related to the success or failure of subsequent crystal pulling and the electrical performance of the product.

[0003] Existing technologies also offer some solutions, such as a Chinese patent application (publication number CN211199478U) that discloses a drying device for polycrystalline silicon wafers, belonging to the field of mechanical technology. It solves the technical problem of low drying efficiency in existing drying equipment. The device includes a base, on which a feeding structure, a drying chamber, and a cleaning structure are arranged sequentially. A conveying trough is also fixed on the base, passing through the drying chamber and the cleaning structure. The feeding structure includes a mounting frame, a lead screw, a slider, a stepper motor, a fixing plate, and several push plates. Several operating ports for the push plates are also provided on the conveying trough.

[0004] Although the above technical solution improves the drying efficiency of silicon wafers, there are still other problems during the drying process. For example, the accumulation of polycrystalline silicon particles in the drying chamber can cause the inner polycrystalline silicon particles to be incompletely dried, reducing the drying efficiency and uniformity of the polycrystalline silicon particles.

[0005] Therefore, the present invention provides a silicon particle drying device with moisture monitoring function. Summary of the Invention

[0006] In order to overcome the shortcomings of the prior art, at least one technical problem raised in the background art is solved.

[0007] The technical solution adopted by the present invention to solve its technical problem is as follows: The silicon particle drying equipment with moisture monitoring function of the present invention includes a drying base, a drying chamber is opened inside the drying base, a feeding seat is installed on the upper end face of the drying base, a material holding plate is installed on the cavity wall of the drying chamber, a horizontal combing frame is slidably arranged inside the drying chamber, the horizontal combing frame is arranged above the material holding plate, the horizontal combing frame can move left and right above the material holding plate and scatter the silicon particles above the material holding plate, and multiple moisture sensors are installed inside the drying chamber.

[0008] Preferably, a rectangular block is mounted on the lower end face of the material holding plate, and a deflector rod is rotatably mounted on the surface of the rectangular block. The end of the deflector rod is connected to the output end of the motor. A slide is slidably mounted on the side wall of the material holding plate, and the end of the slide away from the material holding plate is connected to the horizontal combing frame. A second deflector rod is rotatably mounted on the side wall of the slide, and the end of the second deflector rod is rotatably connected to the end of the first deflector rod. During operation, when it is necessary to control the left and right movement of the horizontal combing frame, the motor drives the first deflector rod to rotate. Since the end of the first deflector rod is connected to the end of the first deflector rod... The two ends are rotatably connected, so the first deflector rod will drive the second deflector rod to rotate. The second deflector rod will pull the slide and the horizontal combing frame to move. After the horizontal combing frame moves from the rightmost side of the material plate to the leftmost side, the crank-designed first deflector rod will move the second deflector rod in the opposite direction again. That is, the second deflector rod will drive the slide and the horizontal combing frame to move again. With the reciprocating movement of the horizontal combing frame, the accumulated silicon particles can be loosened, so that the hot air can fully contact the internal material and avoid the problem that the outer silicon particles may be over-dried while the inner layer still has residual moisture.

[0009] Preferably, the side wall of the material holding plate is provided with a limiting groove, and the slide is slidably disposed inside the limiting groove, and the shape of the slide and the shape of the limiting groove are adapted to each other; during operation, the limiting groove is designed so that the slide can move under the limitation of the limiting groove, that is, the slide and the limiting groove limit each other, thereby improving the stability of the slide and the horizontal combing frame during the movement process, and making the operation more convenient.

[0010] Preferably, the lower end face of the horizontal combing frame is slidably provided with multiple combing shafts, which are arranged in an array on the lower end face of the horizontal combing frame. The lower end face of the horizontal combing frame has a groove adapted to the combing shafts, and a vibration spring is installed between adjacent combing shafts. The vibration spring is installed in the groove below the horizontal combing frame. During operation, as the horizontal combing frame moves left and right, it will simultaneously drive the combing shafts on its lower end face to move. Since the combing shafts are slidably provided on the lower end face of the horizontal combing frame, and a vibration spring is provided between adjacent combing shafts, the combing shafts will vibrate and shake to a certain extent during the movement when they come into contact with silicon particles. This design not only further improves the dispersion and drying effect of silicon particles, but also ensures that small particles or easily clumping damp particles encased inside receive uniform hot air contact.

[0011] Preferably, the inner wall of the drying chamber is provided with a vertical combing frame, and the interior of the drying chamber is provided with a linkage unit, which is used to drive the vertical combing frame to move up and down.

[0012] Preferably, the linkage unit includes a first rotating shaft, which is rotatably mounted on the lower end face of the material holding plate. A second rotating shaft is mounted on the surface of the first deflection rod. The first and second rotating shafts are connected by a belt. An incomplete helical gear is fixedly mounted at the bottom end of the first rotating shaft. A helical toothed plate is slidably mounted on the inner wall of the drying seat. The incomplete helical gear and the helical toothed plate are meshed together. A connecting frame is mounted on the side wall of the helical toothed plate. The side of the connecting frame away from the helical toothed plate is connected to a vertical combing frame. A spring is mounted at the bottom of the helical toothed plate. The other side of the spring is connected to the inner wall of the drying seat.

[0013] Preferably, the surface of the vertical combing frame is provided with a guide groove, and a rectangular slider is slidably disposed inside the guide groove. A support frame is installed on the upper end of the rectangular slider, and a shovel plate is rotatably disposed on the side wall of the support frame. During operation, when the vertical combing frame moves downward, it simultaneously drives the rectangular slider, the support frame, and the shovel plate downward. When the shovel plate moves to the surface of the material receiving plate, it can scoop up some of the silicon particles from the material receiving plate. When the vertical combing frame moves upward again, that is, when the shovel plate moves upward again, some silicon particles will be lifted up at the same time, and then slowly fall down from the height. In this way, the silicon particle layer can be continuously "shaken" and "thrown up", thereby maximizing the contact opportunity between each silicon particle and the hot air. Preferably, a wedge block is installed on the side wall of the rectangular slider away from the support frame, and a protrusion is installed on the inner wall of the drying seat. When the connecting frame drives the vertical combing frame, the rectangular slider and the wedge block to move up and down, the side wall of the wedge block will contact the protruding end of the protrusion.

[0014] Preferably, a tension spring is installed on the lower end face of the rectangular slider, and the side of the tension spring away from the rectangular slider is connected to the side wall of the vertical combing frame. During operation, when the protrusion squeezes the wedge block, the wedge block will drive the rectangular slider and the spade to move towards the silicon particles. The rectangular slider will cause the tension spring to deform. When the protrusion and the wedge block separate, under the elastic force of the tension spring, the rectangular slider will drive the spade to vibrate at a certain amplitude. In this way, the silicon particles on the surface of the spade will fall off as soon as possible, which is beneficial to drying them.

[0015] Preferably, the shovel plate is angular in shape, and the surface of the shovel plate has an array of material passage grooves. The surface of the support frame is provided with a rotating frame adapted to the shovel plate. The shovel plate is inclined relative to the horizontal plane, and the inclination angle is towards the side closer to the material receiving plate. During operation, the angular and inclined design of the shovel plate facilitates the picking up and dropping of silicon particles, making operation more convenient.

[0016] The beneficial effects of this invention are as follows: 1. The silicon particle drying equipment with moisture monitoring function described in this invention features a combing shaft that is slidably mounted on the lower end face of a horizontal combing frame, and a vibration spring is installed between adjacent combing shafts. Therefore, the combing shaft will vibrate and shake to a certain extent during its movement when it comes into contact with silicon particles. This design not only further improves the dispersion and drying effect of silicon particles, but also ensures that small particles or easily clumping damp particles encased inside receive uniform hot air contact.

[0017] 2. The silicon particle drying equipment with moisture monitoring function described in this invention, when the vertical combing frame moves downward, simultaneously drives the rectangular slider, support frame and shovel plate to move downward. When the shovel plate moves to the surface of the material plate, it can scoop up some of the silicon particles on the material plate. When the vertical combing frame moves upward again, that is, when the shovel plate moves upward again, some of the silicon particles will be lifted at the same time and then slowly fall down from the height. In this way, the silicon particle layer can be continuously "shaken" and "thrown up", thereby maximizing the contact opportunity between each silicon particle and the hot air. Attached Figure Description

[0018] The invention will now be further described with reference to the accompanying drawings.

[0019] Figure 1 This is a perspective view of the present invention; Figure 2 This is a schematic diagram of the drying chamber in this invention; Figure 3 This is a schematic diagram of the deflection rod one in this invention; Figure 4 This is a schematic diagram of the vertical combing frame in this invention; Figure 5 This is a schematic diagram of the material holding plate in this invention; Figure 6 This is a schematic diagram of the combing shaft in this invention; Figure 7 This is a schematic diagram of the structure of the incomplete helical gear in this invention; Figure 8 This is a schematic diagram of the shovel plate in this invention; Figure 9 This is a schematic diagram of the tension spring in this invention; Figure 10 This is a schematic diagram of the protrusion structure in this invention.

[0020] In the diagram: 1. Drying seat; 101. Feeding seat; 102. Moisture sensor; 2. Drying chamber; 3. Feeding plate; 301. Limiting groove; 4. Horizontal carding frame; 5. Rectangular block; 501. Deflection rod one; 6. Slide; 7. Deflection rod two; 8. Carding shaft; 801. Vibration spring; 9. Vertical carding frame; 901. Guide groove; 10. Rotating shaft one; 11. Rotating shaft two; 12. Belt; 13. Incomplete helical gear; 14. Helical tooth plate; 15. Connecting frame; 16. Rectangular slider; 17. Support frame; 18. Shovel plate; 19. Wedge block; 20. Protrusion; 21. Tension spring; 22. Through groove. Detailed Implementation

[0021] To make the technical means, creative features, objectives and effects of this invention easier to understand, the invention will be further described below in conjunction with specific embodiments.

[0022] like Figures 1 to 10 As shown in the figure, a silicon particle drying device with moisture monitoring function according to an embodiment of the present invention includes a drying base 1, a drying chamber 2 is provided inside the drying base 1, a feeding seat 101 is installed on the upper end surface of the drying base 1, a material holding plate 3 is installed on the cavity wall of the drying chamber 2, a horizontal combing frame 4 is slidably arranged inside the drying chamber 2, the horizontal combing frame 4 is arranged above the material holding plate 3, the horizontal combing frame 4 can move left and right above the material holding plate 3 and scatter the silicon particles above the material holding plate 3, and a plurality of moisture sensors 102 are installed inside the drying chamber 2; During operation, the silicon granules to be dried are conveyed from the external conveying equipment to the drying chamber 2 through the feeding seat 101 and fall onto the holding plate 3. At this time, the external controller controls the heating system inside the drying seat 1 to start heating, so that the silicon granules are initially dried as they fall from the feeding seat 101 onto the surface of the holding plate 3. Then, the horizontal combing frame 4 is controlled to move left and right above the holding plate 3. The horizontal combing frame 4 will reciprocate to disperse the silicon granules above the holding plate 3, thereby achieving the drying effect. Compared with the drying effect of the prior art, it can disperse the silicon granules and dry them gradually, without causing the silicon granules to accumulate and form a stable material layer, which hinders the full contact between the hot air and the internal material, resulting in the problem that the outer layer of silicon granules may be over-dried while the inner layer still has residual moisture. It should be noted that the heating system mentioned in the embodiments of the present invention is a hot air blower, that is, the hot air blower can blow hot air from top to bottom and from bottom to top, which is convenient for drying silicon particles. It should also be noted that multiple moisture sensors 102 are installed inside the drying chamber 2, which can detect the moisture content inside the drying chamber 2 in real time, thereby facilitating the drying of silicon particles.

[0023] A rectangular block 5 is installed on the lower end face of the material holding plate 3. A deflection rod 501 is rotatably arranged on the surface of the rectangular block 5. The end of the deflection rod 501 is connected to the output end of the motor. A slide 6 is slidably arranged on the side wall of the material holding plate 3. The end of the slide 6 away from the material holding plate 3 is connected to the horizontal combing frame 4. A deflection rod 7 is rotatably installed on the side wall of the slide 6. The end of the deflection rod 7 is rotatably connected to the end of the deflection rod 501. During operation, when it is necessary to control the left and right movement of the horizontal combing frame 4, the motor drives the deflection rod 501 to rotate. Since the end of the deflection rod 501 is rotatably connected to the end of the deflection rod 7, the deflection rod 501 will drive the deflection rod 7 to rotate. The deflection rod 7 will pull the slide 6 and the horizontal combing frame 4 to move. After the horizontal combing frame 4 moves from the rightmost side of the material plate 3 to the leftmost side, the crank-designed deflection rod 501 will move the deflection rod 7 in the opposite direction again. That is, the deflection rod 7 will drive the slide 6 and the horizontal combing frame 4 to move again. With the reciprocating movement of the horizontal combing frame 4, the accumulated silicon particles can be loosened, so that the hot air can fully contact the internal material, avoiding the problem that the outer silicon particles may be over-dried while the inner layer still has residual moisture.

[0024] The side wall of the material holding plate 3 is provided with a limiting groove 301. The slide 6 is slidably disposed inside the limiting groove 301, and the shape of the slide 6 is adapted to the shape of the limiting groove 301. During operation, the limiting groove 301 is designed so that the slide 6 can move under the limitation of the limiting groove 301. That is, the slide 6 and the limiting groove 301 limit each other, which improves the stability of the slide 6 and the horizontal combing frame 4 during the movement process, and makes the operation more convenient.

[0025] Multiple combing shafts 8 are slidably arranged on the lower end face of the horizontal combing frame 4. The multiple combing shafts 8 are arranged in an array on the lower end face of the horizontal combing frame 4. The lower end face of the horizontal combing frame 4 has a sliding groove adapted to the combing shafts 8. A vibration spring 801 is installed between adjacent combing shafts 8. The vibration spring 801 is installed in the sliding groove below the horizontal combing frame 4. During operation, as the horizontal combing frame 4 moves left and right, the horizontal combing frame 4 will simultaneously drive the combing shafts 8 on its lower end face to move. Since the combing shafts 8 are slidably arranged on the lower end face of the horizontal combing frame 4, and a vibration spring 801 is set between adjacent combing shafts 8, the combing shafts 8 will vibrate and shake to a certain extent during the movement when they come into contact with silicon particles. This design can not only further improve the dispersion and drying effect of silicon particles, but also ensure that small particles or easily clumping damp particles wrapped inside receive uniform hot air contact.

[0026] The drying chamber 2 has a vertical combing frame 9 installed on its inner wall. A linkage unit is installed inside the drying chamber 2 to drive the vertical combing frame 9 to move up and down. The linkage unit includes a rotating shaft 10, which is rotatably mounted on the lower end face of the material holding plate 3. A rotating shaft 11 is mounted on the surface of the deflection rod 501. The rotating shaft 10 and the rotating shaft 11 are connected by a belt 12. An incomplete helical gear 13 is fixedly mounted at the bottom end of the rotating shaft 10. A helical tooth plate 14 is slidably installed on the inner wall of the drying seat 1. The incomplete helical gear 13 and the helical tooth plate 14 are meshed together. A connecting frame 15 is installed on the side wall of the helical tooth plate 14. The side of the connecting frame 15 away from the helical tooth plate 14 is connected to the vertical combing frame 9. A spring is installed at the bottom of the helical tooth plate 14, and the other side of the spring is connected to the inner wall of the drying seat 1. During operation, as the deflector rod 501 rotates, it simultaneously drives the shaft 11 to rotate. The shaft 11 then drives the shaft 10 to rotate via the belt 12. The shaft 10 drives the incomplete helical gear 13 at its bottom to rotate. Since the incomplete helical gear 13 and the helical tooth plate 14 are meshed, the incomplete helical gear 13 drives the helical tooth plate 14 to move. The helical tooth plate 14 drives the connecting frame 15 and the vertical combing frame 9 to move. That is, the vertical combing frame 9 moves closer to the material holding plate 3. Then, the vertical combing frame 9 scoops up the silicon particles on the surface of the material holding plate 3, which facilitates further loosening and drying of the silicon particles.

[0027] The vertical combing frame 9 has a guide groove 901 on its surface. A rectangular slider 16 is slidably arranged inside the guide groove 901. A support frame 17 is installed on the upper end of the rectangular slider 16. A shovel plate 18 is rotatably arranged on the side wall of the support frame 17. During operation, when the vertical combing frame 9 moves downward, it will simultaneously drive the rectangular slider 16, the support frame 17, and the shovel plate 18 to move downward. When the shovel plate 18 moves to the surface of the material holding plate 3, it can scoop up some of the silicon particles from the material holding plate 3. When the vertical combing frame 9 moves upward again, that is, when the shovel plate 18 moves upward again, some silicon particles will be lifted up at the same time and then slowly fall down from the height. In this way, the silicon particle layer can be continuously "shaken" and "thrown up", thereby maximizing the contact opportunity between each silicon particle and the hot air.

[0028] A wedge block 19 is installed on the side wall of the rectangular slider 16 away from the support frame 17, and a protrusion 20 is installed on the inner wall of the drying seat 1. When the connecting frame 15 drives the vertical combing frame 9, the rectangular slider 16 and the wedge block 19 to move up and down, the side wall of the wedge block 19 will contact the protruding end of the protrusion 20. During operation, when the vertical combing frame 9 moves downward, it will drive the rectangular slider 16 and the wedge block 19 to move. When the shovel plate 18 moves to be flush with the silicon particles, the side wall of the wedge block 19 will contact the protruding end of the protrusion 20. That is, the protrusion 20 will squeeze the wedge block 19, and the wedge block 19 will drive the rectangular slider 16 and the shovel plate 18 to move towards the side of the silicon particles. That is, the shovel plate 18 can shovel up some of the silicon particles on the surface of the material plate 3. Moreover, due to the design of the incomplete helical gear 13, the incomplete helical gear 13 will also rotate to a state where it is not meshed with the helical tooth plate 14. Therefore, under the action of the spring force at the bottom of the helical tooth plate 14, the helical tooth plate 14 will drive the connecting frame 15 to move in the opposite direction. That is, the shovel plate 18 will move upward. During its upward movement, it will slowly shake off the silicon particles on its surface. In this way, the silicon particle layer is continuously "shaken" and "thrown up". The small particles or easily clumping moist particles wrapped inside get uniform hot air contact. It should be noted that when the horizontal combing frame 4 moves from right to left, the vertical combing frame 9 is also moving downwards. That is, the vertical combing frame 9 will not come into contact with the horizontal combing frame 4 when it moves up and down. The two moves at different positions, so that the silicon grain layer can be continuously "shaken apart" and "thrown up".

[0029] A tension spring 21 is installed on the lower end face of the rectangular slider 16. The side of the tension spring 21 away from the rectangular slider 16 is connected to the side wall of the vertical combing frame 9. During operation, when the protrusion 20 squeezes the wedge block 19, the wedge block 19 will drive the rectangular slider 16 and the spade plate 18 to move towards the silicon particles. The rectangular slider 16 will cause the tension spring 21 to deform. When the protrusion 20 separates from the wedge block 19, under the elastic force of the tension spring 21, the rectangular slider 16 will drive the spade plate 18 to vibrate at a certain amplitude. In this way, the silicon particles on the surface of the spade plate 18 will fall off as soon as possible, which is beneficial to drying them.

[0030] The shovel plate 18 is angular in shape, and the surface of the shovel plate 18 is provided with an array of material passage grooves 22. The surface of the support frame 17 is provided with a rotating frame that is adapted to the shovel plate 18. The shovel plate 18 is inclined relative to the horizontal plane, and the inclination angle is towards the side closer to the material holding plate 3. When working, the shovel plate 18 is designed to be angular and inclined, which facilitates the picking up and dropping of silicon particles, making the operation more convenient.

[0031] During operation, the silicon granules to be dried are conveyed from an external conveying device to the drying chamber 2 via the feed seat 101 and fall onto the receiving plate 3. At this time, the external controller controls the heating system inside the drying seat 1 to start heating, so that the silicon granules are initially dried as they fall from the feed seat 101 onto the surface of the receiving plate 3. Then, the horizontal combing frame 4 is controlled to move left and right above the receiving plate 3. The horizontal combing frame 4 will reciprocate to disperse the silicon granules above the receiving plate 3, achieving the drying effect. When it is necessary to control the horizontal combing frame 4 to move left and right, the motor drives the deflection rod 501 to rotate. Due to the deflection rod 501... The end is rotatably connected to the end of the deflection rod 7, so the deflection rod 501 will drive the deflection rod 7 to rotate. The deflection rod 7 will pull the slide 6 and the horizontal combing frame 4 to move. After the horizontal combing frame 4 moves from the rightmost side of the material plate 3 to the leftmost side, the crank-designed deflection rod 501 will move the deflection rod 7 in the opposite direction again. That is, the deflection rod 7 will drive the slide 6 and the horizontal combing frame 4 to move again. With the reciprocating movement of the horizontal combing frame 4, the accumulated silicon particles can be loosened, so that the hot air can fully contact the internal material and avoid the problem that the outer silicon particles may be over-dried while the inner layer still has residual moisture. During the left and right movement of the horizontal combing frame 4, the horizontal combing frame 4 will simultaneously drive the combing shaft 8 on its lower end face to move. Since the combing shaft 8 is slidably set on the lower end face of the horizontal combing frame 4, and a vibration spring 801 is set between adjacent combing shafts 8, the combing shaft 8 will vibrate and shake to a certain extent during the movement when it comes into contact with silicon particles. This design can not only further improve the dispersion and drying effect of silicon particles, but also ensure that small particles or easily clumping damp particles wrapped inside receive uniform hot air contact. During the rotation of deflector rod 501, deflector rod 501 simultaneously drives shaft 2 11 to rotate. Shaft 2 11 drives shaft 10 to rotate via belt 12. Shaft 10 drives the incomplete helical gear 13 at its bottom to rotate. Since the incomplete helical gear 13 and the helical tooth plate 14 are meshed, the incomplete helical gear 13 drives the helical tooth plate 14 to move. The helical tooth plate 14 drives the connecting frame 15 and the vertical combing frame 9 to move. That is, the vertical combing frame 9 moves closer to the material receiving plate 3. Then, the vertical combing frame 9 will scrape up the silicon particles on the surface of the material receiving plate 3. This facilitates further loosening and drying of silicon particles. When the vertical combing frame 9 moves downward, it simultaneously drives the rectangular slider 16, support frame 17, and shovel plate 18 downward. When the shovel plate 18 moves to the surface of the material holding plate 3, it can scoop up some of the silicon particles from the material holding plate 3. When the vertical combing frame 9 moves upward again, that is, when the shovel plate 18 moves upward again, some silicon particles will be lifted at the same time and then slowly fall down from the height. In this way, the silicon particle layer can be continuously "shaken" and "thrown up", thereby maximizing the contact opportunity between each silicon particle and the hot air. When the vertical combing frame 9 moves downward, it will drive the rectangular slider 16 and the wedge block 19 to move. When the shovel plate 18 moves to be flush with the silicon particles, the side wall of the wedge block 19 will contact the protruding end of the protrusion 20. That is, the protrusion 20 will squeeze the wedge block 19, and the wedge block 19 will drive the rectangular slider 16 and the shovel plate 18 to move towards the side of the silicon particles. That is, the shovel plate 18 can shovel up some of the silicon particles on the surface of the material plate 3. Moreover, due to the design of the incomplete helical gear 13, the incomplete helical gear 13 will rotate to a state where it is not meshed with the helical tooth plate 14. Therefore, under the action of the spring force at the bottom of the helical tooth plate 14, the helical tooth plate 14 will drive the connecting frame 15 to move in the opposite direction. That is, the shovel plate 18 will move upward. During its upward movement, it will slowly shake off the silicon particles on its surface. In this way, the silicon particle layer is continuously "shaken" and "thrown up". The small particles or easily clumping moist particles wrapped inside get uniform hot air contact. When the bump 20 presses against the wedge block 19, the wedge block 19 will cause the rectangular slider 16 and the spade 18 to move towards one side of the silicon grain. The rectangular slider 16 will cause the tension spring 21 to deform. When the bump 20 separates from the wedge block 19, under the elastic force of the tension spring 21, the rectangular slider 16 will cause the spade 18 to vibrate at a certain amplitude. In this way, the silicon grain on the surface of the spade 18 will fall off as soon as possible, which is beneficial to drying it.

[0032] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of the invention. Various changes and modifications can be made to the invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the present invention as claimed. The scope of protection of the present invention is defined by the appended claims and their equivalents.

Claims

1. A silicon particle drying device with moisture monitoring function, characterized in that: The device includes a drying base with a drying chamber inside. A feeding seat is installed on the upper surface of the drying base. A material holding plate is installed on the cavity wall of the drying chamber. A horizontal combing frame is slidably arranged inside the drying chamber and is positioned above the material holding plate. The horizontal combing frame can move left and right above the material holding plate and scatter silicon particles above the material holding plate. Multiple moisture sensors are installed inside the drying chamber.

2. The silicon particle drying equipment with moisture monitoring function according to claim 1, characterized in that: A rectangular block is installed on the lower end face of the material holding plate. A deflection rod is rotatably mounted on the surface of the rectangular block. The end of the deflection rod is connected to the output end of the motor. A slide is slidably mounted on the side wall of the material holding plate. The end of the slide away from the material holding plate is connected to the horizontal combing frame. A deflection rod is rotatably mounted on the side wall of the slide. The end of the deflection rod is rotatably connected to the end of the deflection rod.

3. A silicon particle drying device with moisture monitoring function according to claim 2, characterized in that: The side wall of the material holding plate is provided with a limiting groove, and the slide is slidably disposed inside the limiting groove, and the shape of the slide is adapted to the shape of the limiting groove.

4. A silicon particle drying device with moisture monitoring function according to claim 2, characterized in that: Multiple combing shafts are slidably arranged on the lower end face of the horizontal combing frame. The multiple combing shafts are arranged in an array on the lower end face of the horizontal combing frame. The lower end face of the horizontal combing frame has a groove adapted to the combing shaft. A vibration spring is installed between adjacent combing shafts. The vibration spring is installed in the groove below the horizontal combing frame.

5. A silicon particle drying device with moisture monitoring function according to claim 4, characterized in that: The drying chamber has a vertical combing frame on its inner wall and a linkage unit inside the drying chamber for moving the vertical combing frame up and down.

6. A silicon particle drying device with moisture monitoring function according to claim 5, characterized in that: The linkage unit includes a first rotating shaft, which is rotatably mounted on the lower end face of the material holding plate. A second rotating shaft is mounted on the surface of the first deflection rod. The first and second rotating shafts are connected by a belt. An incomplete helical gear is fixedly mounted at the bottom end of the first rotating shaft. A helical toothed plate is slidably mounted on the inner wall of the drying seat. The incomplete helical gear and the helical toothed plate are meshed together. A connecting frame is mounted on the side wall of the helical toothed plate. The side of the connecting frame away from the helical toothed plate is connected to a vertical combing frame. A spring is mounted at the bottom of the helical toothed plate. The other side of the spring is connected to the inner wall of the drying seat.

7. A silicon particle drying device with moisture monitoring function according to claim 6, characterized in that: The surface of the vertical combing frame is provided with a guide groove, and a rectangular slider is slidably arranged inside the guide groove. A support frame is installed on the upper end of the rectangular slider, and a shovel plate is rotatably arranged on the side wall of the support frame.

8. A silicon particle drying device with moisture monitoring function according to claim 7, characterized in that: A wedge block is installed on the side wall of the rectangular slider away from the support frame, and a protrusion is installed on the inner wall of the drying seat. When the connecting frame drives the vertical combing frame, the rectangular slider and the wedge block to move up and down, the side wall of the wedge block will contact the protruding end of the protrusion.

9. A silicon particle drying device with moisture monitoring function according to claim 8, characterized in that: A tension spring is installed on the lower end face of the rectangular slider, and the side of the tension spring away from the rectangular slider is connected to the side wall of the vertical combing frame.

10. A silicon particle drying device with moisture monitoring function according to claim 8, characterized in that: The shovel plate is angular in shape, and the surface of the shovel plate has an array of material passage slots. The surface of the support frame is equipped with a rotating frame that is adapted to the shovel plate. The shovel plate is inclined relative to the horizontal plane, and the inclination angle is towards the side closer to the material holding plate.

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