Transfer method, transfer system and computer readable storage medium

Abstract

The embodiment of the invention relates to the technical field of photovoltaics, and provides a transfer method, a transfer system and a computer readable storage medium. The transferring method is used for transferring the workpiece between the first jig and the second jig by the transferring mechanism. The first jig and the second jig each comprise a plurality of groove positions, and each groove position is used for bearing a workpiece. The slot spacing between two adjacent slot positions in the first jig is dA, and the slide capacity of the first jig is y. The slot spacing between two adjacent slot positions in the second jig is dB, and the slide capacity of the second jig is N. Wherein n = dA / dB, and n is a positive integer greater than 1; m = N / n, m is a positive integer and m is less than y. The transferring method comprises the following steps that the transferring mechanism is controlled to execute the following transferring operation that m workpieces are picked up from the first jig at a time; and the m workpieces are placed in a second jig, and n-1 groove positions are arranged between any two adjacent workpieces at intervals.

Description

Technical Field

[0001] This application relates to the field of photovoltaic technology, and more specifically, to a transfer method, a transfer system, and a computer-readable storage medium. Background Technology

[0002] In the manufacturing process of photovoltaic cells, sheet-like workpieces (such as silicon wafers) need to be transferred between multiple processes. To accommodate different process equipment (such as wet process equipment or dry process equipment), different sizes of fixtures (such as baskets or wafer boats) are typically used to carry and transport the silicon wafers. These fixtures differ in physical specifications such as wafer load capacity and slot spacing.

[0003] The methods for achieving this type of transfer in related technologies have the following drawbacks: Firstly, the transfer efficiency is low: some traditional transfer equipment adopts piece-by-piece transfer or non-quantitative handling, which requires frequent adjustment of the position of the workpiece in the fixture. The high transfer frequency leads to a decrease in the overall efficiency of the production line and unnecessary stagnation.

[0004] Secondly, insufficient transfer accuracy leads to high yield risk: To accommodate fixtures with different slot spacings and improve production capacity, most transfer equipment uses a dual-insertion mechanism, where two sets of adsorption mechanisms pick up silicon wafers from the fixture in staggered slots and then place them together into the target fixture. However, due to inherent synchronization errors in the mechanical structure and control system, the two sets of adsorption mechanisms cannot maintain absolute consistency during movement, which can easily lead to collisions or positioning deviations of the silicon wafers during pickup or placement, affecting product yield.

[0005] Thirdly, the cost is high: The aforementioned dual-insertion mechanism, due to its complex structure, not only incurs high equipment and maintenance costs, but its inherent accuracy issues also lead to additional yield losses. As an alternative, if a simpler single-insertion mechanism is used to ensure accuracy, the single-transfer capacity will be significantly reduced when handling transfer tasks with different sized fixtures (e.g., only half or less of the silicon wafers can be transferred at a time), failing to meet the requirements of large-scale production. To compensate for insufficient capacity, the production line must invest in more equipment, thus increasing equipment investment costs.

[0006] In summary, traditional transfer methods are mostly designed for single fixture specifications and lack systematic optimization methods for differences in the number of wafers and slot spacing, thus failing to balance efficiency, accuracy, and cost. Summary of the Invention

[0007] Therefore, it is necessary to provide a transfer method, a transfer system, and a computer-readable storage medium to solve the technical problem that traditional transfer methods cannot balance efficiency, accuracy, and cost.

[0008] The first aspect of this application provides a transfer method for a transfer mechanism to transfer workpieces between a first fixture and a second fixture. Both the first and second fixtures include multiple slots, each slot for holding one workpiece. The slot spacing between two adjacent slots in the first fixture is dA, and the workpiece capacity of the first fixture is y. The slot spacing between two adjacent slots in the second fixture is dB, and the workpiece capacity of the second fixture is N. Wherein, n = dA / dB, n is a positive integer greater than 1; m = N / n, m is a positive integer and m < y. The transfer method includes controlling the transfer mechanism to perform the following transfer operations: picking up m workpieces from the first fixture in a single operation; and placing the m workpieces into the second fixture such that any adjacent workpieces are spaced apart by n-1 slots.

[0009] The transfer method of the first aspect of this application, based on the physical parameters of the first fixture (slot spacing dA, sheet quantity y) and the physical parameters of the second fixture (slot spacing dB, sheet quantity N), uses a mathematical proportional relationship (m=N / n) to transform the difference in fixture slot spacing and spatial geometric proportions into a quantitative rule for the number of transfers. This facilitates accurate and efficient transfer of workpieces between different fixtures, while fully utilizing fixture space, reducing the number of transfers, and improving production efficiency. The following is a detailed analysis: First, in the above transfer method, the mathematical relationship between the jig carrying capacity (y, N) and the slot spacing (dA, dB=dA / n) is transformed into the transfer quantity rule N / n=m, realizing standardized calculation of the transfer process and avoiding interference from human experience.

[0010] Furthermore, the aforementioned transfer method is scalable, as it can adapt to any slot spacing ratio and meet different process requirements by adjusting the variable spacing ratio (n is a positive integer greater than 1).

[0011] Furthermore, the above-mentioned transfer method is highly efficient. By using the optimal single transfer quantity m=N / n pieces and the staggered slotting method combined with the placement strategy of spacing n-1 slots, it is beneficial to solve the compatibility problem of different slot spacings. This allows the workpieces taken out from the first fixture (spacing dA) to be directly placed into the second fixture without the need for complex spacing changes during the transfer process. In the second fixture, the physical spacing of the workpieces remains at dA (a distance of n dB), thus keeping the space utilization rate of the second fixture at its optimal state (100% or an integer fraction thereof). This ensures the uniform distribution of workpieces in the second fixture and maximizes space utilization, avoiding space waste.

[0012] In some embodiments, picking up m workpieces from the first fixture in a single operation includes: picking up m workpieces from a single first fixture when the first fixture is fully loaded; and picking up m workpieces from at least two first fixtures together when the load on the first fixture is greater than 0 and less than m.

[0013] In some embodiments, the transfer mechanism includes a first transfer sub-mechanism and a second transfer sub-mechanism that work together. The transfer method also includes a fixture setting step. The fixture setting step includes: setting a first fixture at a first loading station and a second loading station respectively; and setting a second fixture at the first transfer station. The first fixtures located at the first loading station and the second loading station are defined as fixture A1 and fixture A2, respectively, and the second fixture located at the first transfer station is defined as fixture B1; when m < y < 2m, the transfer operation of the transfer mechanism includes the following first transfer stage and second transfer stage. The first transfer stage includes: both the first transfer sub-mechanism and the second transfer sub-mechanism pick up workpieces from the fully loaded fixture A1, wherein the first transfer sub-mechanism picks up ym workpieces, and the second transfer sub-mechanism picks up 2m-y workpieces, and the first transfer sub-mechanism and the second transfer sub-mechanism work together to place a total of m workpieces into the unloaded fixture B1. The second transfer stage includes: the first transfer submechanism picks up the remaining ym pieces of workpiece from fixture A1, making fixture A1 unloaded; the second transfer submechanism picks up 2m-y pieces of workpiece from the fully loaded fixture A2; and the first and second transfer submechanisms work together to place a total of m pieces of workpiece into fixture B1.

[0014] In some embodiments, the first transfer stage and the second transfer stage are performed alternately.

[0015] In some embodiments, the fixture setting step further includes: setting a first fixture at the first unloading station and a second unloading station respectively; and setting a second fixture at the second transfer station. The first fixtures located at the first unloading station and the second unloading station are defined as fixture A3 and fixture A4 respectively, and the second fixture located at the second transfer station is defined as fixture B2. When m < y < 2m, the transfer operation of the transfer mechanism further includes the following first reverse transfer stage and second reverse transfer stage. The first reverse transfer stage includes: both the first transfer sub-mechanism and the second transfer sub-mechanism pick up workpieces from the fully loaded fixture B2, wherein the first transfer sub-mechanism picks up ym workpieces, and the second transfer sub-mechanism picks up 2m-y workpieces; the first transfer sub-mechanism and the second transfer sub-mechanism cooperate to place a total of m workpieces into the unloaded fixture A3. The second reverse transfer stage includes: the first transfer submechanism picks up the remaining ym piece workpiece from fixture B2 and places it into fixture A3, making fixture A3 fully loaded; the second transfer submechanism picks up the 2m-y piece workpiece from fixture B2 and places it into the unloaded fixture A4.

[0016] In some embodiments, the first reverse transfer phase and the second reverse transfer phase are performed alternately.

[0017] In some embodiments, the fixture setting step further includes a fixture replacement step, which includes: replacing the empty fixture A1 or empty fixture A2 with a fully loaded first fixture; replacing the fully loaded fixture A3 or fully loaded fixture A4 with an empty first fixture; replacing the fully loaded fixture B1 with an empty second fixture; and replacing the empty fixture B2 with a fully loaded second fixture. The fixture replacement step is performed in parallel with or partially overlaps with the transfer operation of the transfer mechanism.

[0018] In some embodiments, when 2m-y=0.5y, the number of workpieces picked up by the second transfer submechanism each time is half the carrying capacity of the first fixture. The transfer operation of the transfer mechanism specifically includes: Step S0: In the initial state, jigs A1 and A2 are fully loaded, jigs A3 and A4 are unloaded, jig B1 is unloaded, and jig B2 is fully loaded; Step S1: Perform the first transfer stage; Step S2: Perform the second transfer stage, so that fixture A1 is unloaded, fixture A2 is half-loaded, and fixture B1 is fully loaded; Step S3: Perform the first reverse transfer phase; Step S4: Perform the second reverse transfer stage, so that fixture A3 is fully loaded, fixture A4 is half-loaded, and fixture B2 is unloaded; During the execution of steps S3 and S4, the unloaded fixture A1 is replaced with the fully loaded first fixture, and the fully loaded fixture B1 is replaced with the unloaded second fixture. Step S5: Perform the second transfer stage to make fixture A2 unloaded; Step S6: Perform the first transfer stage to make fixture A1 empty and fixture B1 fully loaded; During the execution of steps S5 and S6, the fully loaded jig A3 is replaced with an empty first jig, and the empty jig B2 is replaced with a fully loaded second jig. Step S7: Perform the second reverse transfer stage to fully load fixture A4; During the execution of steps S6 and S7, the unloaded fixture A2 is replaced with the fully loaded first fixture; Step S8: Perform the first reverse transfer stage to make fixture A3 fully loaded and fixture B2 unloaded; During the execution of steps S7 and S8, the unloaded fixture A1 is replaced with the fully loaded first fixture, and the fully loaded fixture B1 is replaced with the unloaded second fixture. Step S9: Perform the first transfer stage; During the execution of steps S8 and S9, fixture A4 is replaced with an unloaded first fixture; Step S10: Perform the second transfer stage to make fixture A1 empty and fixture B1 fully loaded; During the execution of steps S9 and S10, the fully loaded fixture A3 is replaced with the empty first fixture, and the process returns to the state of step S3. Steps S3 through S10 are executed at least once.

[0019] A second aspect of this application provides a transfer system. The transfer system includes a first fixture, a second fixture, a transfer mechanism, and a controller. Both the first and second fixtures include multiple slots, each slot for holding one workpiece. The slot spacing between adjacent slots in the first fixture is dA, and the workpiece capacity of the first fixture is y. The slot spacing between adjacent slots in the second fixture is dB, and the workpiece capacity of the second fixture is N. Wherein, n = dA / dB, n is a positive integer greater than 1; m = N / n, m is a positive integer, and m < y. The transfer mechanism is used to transfer workpieces between the first and second fixtures. The controller is configured to control the transfer mechanism to perform the transfer method provided in the first aspect of this application.

[0020] The transfer system of the second aspect of this application has at least the same advantages as the transfer method of the first aspect of this application, which will not be elaborated further.

[0021] In some embodiments, the transfer mechanism includes a first transfer sub-mechanism and a second transfer sub-mechanism that work together.

[0022] A third aspect of this application provides a computer-readable storage medium storing a computer program, which, when executed by a processor, implements the transfer method provided in the first aspect of this application.

[0023] The computer-readable storage medium of the third aspect of this application has at least the same advantages as the transfer method of the first aspect of this application, which will not be repeated here. Attached Figure Description

[0024] Figure 1 This is a logic diagram of a transfer method according to an embodiment of this application.

[0025] Figure 2 This is a timing diagram of a transfer method according to an embodiment of this application. Detailed Implementation

[0026] The first aspect of this application provides a transfer method. This transfer method is used for a transfer mechanism to transfer a workpiece between a first fixture and a second fixture. Depending on different requirements, the order of certain steps or sub-steps of the transfer method can be changed, and certain steps or sub-steps can be omitted or combined.

[0027] Both the first and second fixtures have multiple slots, each slot being used to hold one workpiece.

[0028] The spacing between two adjacent slots in the first fixture is dA, and the number of wafers carried by the first fixture is y. The spacing between two adjacent slots in the second fixture is dB, and the number of wafers carried by the second fixture is N. The ratio of the spacing between the first and second fixtures is n = dB / dB, where n is a positive integer greater than 1. The ratio of the number of wafers carried by the second fixture to the number of wafers carried by the first fixture is x = N / y.

[0029] The transfer method includes controlling the transfer mechanism to perform the following transfer operations: picking up m workpieces from the first fixture in a single operation, where m is the number of workpieces transferred in a single operation, m = N / n, m is a positive integer, and m < y; and placing the m workpieces into the second fixture such that any adjacent workpieces are spaced apart by n-1 slots.

[0030] It should be noted that since x = N / y, m = N / n, and m < y, we can conclude that x / n < 1. Furthermore, the carrying capacity of the first fixture refers to the maximum number of workpieces it can support. Since each slot in the first fixture is used to support one workpiece, the carrying capacity of the first fixture is equal to the total number of slots in the first fixture. Similarly, the carrying capacity of the second fixture refers to the maximum number of workpieces it can support. Since each slot in the second fixture is used to support one workpiece, the carrying capacity of the second fixture is equal to the total number of slots in the second fixture.

[0031] The transfer method of the first aspect of this application, based on the physical parameters of the first fixture (slot spacing dA, sheet quantity y) and the physical parameters of the second fixture (slot spacing dB, sheet quantity N), uses a mathematical proportional relationship (m=N / n) to transform the difference in fixture slot spacing and spatial geometric proportions into a quantitative rule for the number of transfers. This facilitates accurate and efficient transfer of workpieces between different fixtures, while fully utilizing fixture space, reducing the number of transfers, and improving production efficiency. The following is a detailed analysis: First, in the above transfer method, the mathematical relationship between the jig carrying capacity (y, N=x×y) and the slot spacing (dA, dB=dA / n) is transformed into the transfer quantity rule N / n=x×y / n=m, realizing standardized calculation of the transfer process and avoiding interference from human experience.

[0032] Furthermore, the aforementioned transfer method is scalable, as it can adapt to any slot spacing ratio and meet different process requirements by adjusting the variable spacing ratio (n is a positive integer greater than 1).

[0033] Furthermore, the above-mentioned transfer method is highly efficient. By using the optimal single transfer quantity m=N / n=x×y / n pieces, the "staggered slot method" combined with the "interval of n-1 slots" placement strategy helps to solve the compatibility problem of different slot spacings. This allows the workpieces taken from the first fixture (with a spacing of dA) to be directly placed into the second fixture without the need for complex spacing changes during the transfer process. In the second fixture, the physical spacing of the workpieces remains at dA (a distance of n dB), thus keeping the space utilization rate of the second fixture at its optimal state (100% or an integer fraction thereof). This ensures the uniform distribution of workpieces in the second fixture and maximizes space utilization, avoiding space waste.

[0034] In summary, the above-mentioned transfer methods can be widely applied to manufacturing scenarios that require cross-specification fixture transfer, providing a general mathematical model and engineering solution for the process integration of automated production lines.

[0035] The following details the rules for quantitative transfer in the above transfer method, or the derivation process of the quantity for a single transfer.

[0036] It should be noted that in the transfer method of this application embodiment, the goal of quantitative transfer is to efficiently and accurately transfer the workpiece between the first fixture and the second fixture, while making full use of the space of the fixture, reducing the number of transfers, and improving production efficiency.

[0037] For ease of description, the first jig will be referred to as jig A, and the second jig as jig B.

[0038] In some embodiments, fixture A may be a flower basket, and fixture B may be a carrier boat.

[0039] First, the relationship between the total length of fixture A and fixture B when fully loaded and their respective slot spacing is as follows: When fixture A is fully loaded, the total length LA of the y-piece workpiece in fixture A is LA = (y-1) × dA; When fixture B is fully loaded, the total length of the N = x × y workpieces in fixture B is LB = (x × y - 1) × dA / n.

[0040] Furthermore, the process of deriving the optimal single transfer quantity m based on spatial alignment is as follows: (1) From the perspective of space utilization and operational convenience, the number of workpieces transferred each time should be sufficient to ensure that fixture B is evenly filled.

[0041] Since the slot spacing of fixture B is dB=dA / n, when transferring from fixture A to fixture B, it is assumed that each transfer of m workpieces can occupy a continuous space in fixture B.

[0042] The ideal length occupied by m workpieces in fixture A is LAm = (m-1) × dA; it can be approximated as LAm ≈ m × dA (ignoring edge errors). The ideal length occupied by m workpieces in fixture B is LBm = (m-1) × dA / n, which can be approximated as LBm ≈ m × dA / n (ignoring edge errors).

[0043] (2) In order for the m pieces of workpieces to be transferred to be "seamlessly connected" in fixture B, the following must be satisfied: the ratio of the length of the m pieces of workpieces in fixture A to the length of the m pieces of workpieces in fixture B, and the ratio of the matching slot spacing. That is: LAm / LBm = dA / dB=n; that is, (m×dA) / (m×dB)=n.

[0044] Since the equation (m×dA) / (m×dB)=n always holds true, it means that any m satisfies the spatial ratio relationship. However, in practice, it is necessary to combine the wafer load factor x to optimize the transfer efficiency.

[0045] (3) The total number of pieces of fixture B is x×y. If it is divided into n segments, the number of pieces of workpiece in each segment is x×y / n.

[0046] The length of each segment (number of workpiece pieces x × y / n) in fixture B is: (x × y / n - 1) × dA / n ≈ x × y × dA / n 2 ; The length of each segment (number of workpiece pieces x × y / n) in fixture A is: (x × y / n - 1) × dA ≈ x × y dA / n; It can be seen that the length of each segment in fixture A is n times the length of the corresponding segment in fixture B (x×y×dA / n) / (x×y×dA / n) 2 =n, which exactly matches the n-fold relationship of the slot spacing, ensuring uniform spatial distribution after transfer.

[0047] Therefore, consider ensuring that the number of workpieces, m, transferred in each operation satisfies the following condition: when these m workpieces are transferred from fixture A to fixture B, the space occupied by the m workpieces in fixture B is proportional to the total space of fixture B. Analysis shows that the reasonable number of workpieces per transfer is m = x × y / n pieces.

[0048] (4) From the single transfer quantity m = x × y / n pieces, we can obtain the number of transfers k = the total number of pieces in jig A divided by the single transfer quantity, and rounded up, that is... That is, if m = x × y / n pieces are transferred in a single operation, two transfers can turn a fully loaded fixture A into an unloaded state.

[0049] In some embodiments, when the first fixture is fully loaded, "picking m workpieces from the first fixture in a single operation" means picking m workpieces from a single first fixture; when the load of the first fixture is greater than 0 and less than m, "picking m workpieces from the first fixture in a single operation" means picking m workpieces from at least two first fixtures together.

[0050] In the above embodiments, the method of picking up m workpieces at a time according to the loading state of the first fixture solves the problem of transfer when the original fixture (first fixture) is not fully loaded. This ensures that even if a single original fixture cannot provide a sufficient number of workpieces, the requirement of a single transfer quantity of m can be met by combining multiple original fixtures. This ensures the continuity and flexibility of the transfer process, avoids transfer interruption or efficiency reduction due to insufficient workpieces in the original fixture, and improves the operational stability of the entire production line.

[0051] In some embodiments, the transfer mechanism includes a first transfer sub-mechanism and a second transfer sub-mechanism that work together. When m < y < 2m, the transfer operation of the transfer mechanism includes: controlling the first transfer sub-mechanism to pick up ym pieces of workpiece each time; controlling the second transfer sub-mechanism to pick up 2m-y pieces of workpiece each time; and the first transfer sub-mechanism and the second transfer sub-mechanism working together to place a total of m pieces of workpiece into the second fixture in a staggered manner.

[0052] In the above embodiments, the collaborative operation of two sub-mechanisms (i.e., the first transfer sub-mechanism and the second transfer sub-mechanism) facilitates the parallelization of workpiece picking and placement, thereby improving the efficiency of a single transfer. Furthermore, by decomposing the number of workpieces (m pieces) transferred in a single transaction into the fixed actions of the two sub-mechanisms, complex real-time calculations are eliminated, simplifying control.

[0053] Furthermore, the amount ym picked up by the first sub-mechanism is exactly the amount remaining after the first fully loaded fixture has undergone one transfer process. Therefore, after the first fully loaded fixture has undergone one transfer process, it will be emptied by the first transfer sub-mechanism during the second transfer process, and the second transfer sub-mechanism will pick up 2m-y from the next fully loaded first fixture. This division of labor is conducive to achieving continuous operation and reduces the waiting time of the transfer sub-mechanisms.

[0054] In other embodiments, the transfer mechanism may include three or more sub-mechanisms to further improve transfer efficiency and adapt to more complex transfer operations; or, the proportion of workpieces transferred by each sub-mechanism may be dynamically allocated according to the real-time status of the sub-mechanisms.

[0055] In some embodiments, the transfer method further includes a fixture setting step. The fixture setting step includes: setting a first fixture at a first loading station and a second loading station respectively, and setting a second fixture at the first transfer station.

[0056] In this article, a loading station refers to a station where workpieces are loaded onto fixtures. For example, at the first or second loading station, silicon wafers are loaded into baskets. A transfer station refers to an intermediate station where workpieces are transferred between different fixtures. For example, at the first transfer station, silicon wafers are transferred from one fixture (such as a basket) to another fixture (such as a wafer carrier boat).

[0057] For ease of description, the first fixture of the first loading station is defined as fixture A1, the first fixture of the second loading station is defined as fixture A2, and the second fixture of the first transfer station is defined as fixture B1.

[0058] When m < y < 2m, the transfer operation of the transfer mechanism includes the following first transfer stage and second transfer stage.

[0059] The first transfer stage includes: both the first transfer sub-mechanism and the second transfer sub-mechanism pick up workpieces from the fully loaded fixture A1 at the first loading station, wherein the first transfer sub-mechanism picks up ym workpieces and the second transfer sub-mechanism picks up 2m-y workpieces. The first transfer sub-mechanism and the second transfer sub-mechanism work together to place a total of m workpieces into fixture B1.

[0060] The second transfer stage includes: the first transfer submechanism picks up the remaining ym pieces of workpiece from fixture A1, making fixture A1 unloaded; the second transfer submechanism picks up 2m-y pieces of workpiece from the fully loaded fixture A2; and the first and second transfer submechanisms work together to place a total of m pieces of workpiece into fixture B1.

[0061] In some embodiments, the first transfer stage and the second transfer stage are performed alternately.

[0062] In the above embodiments, by rationally allocating the pick-up quantities from fixtures A1 and A2 through the first and second transfer stages, it is ensured that all workpieces in the fully loaded original fixture (i.e., fixture A1) are transferred to the target fixture (i.e., fixture B1) through two transfer processes. Moreover, in the second transfer stage, when fixture A1 at the first loading station is not completely emptied, the second transfer submechanism picks up workpieces from fixture A2 at the second loading station, thereby piecing together a complete m-piece transfer quantity. This avoids idle transfer equipment due to waiting for changes in the status of individual fixtures, thus improving the overall transfer efficiency.

[0063] The following details the transfer logic based on wafer load and single transfer quantity in the embodiments of this application: If the number of pieces transferred each time is m = x × y / n, then after one transfer process, the number of remaining workpieces in the fully loaded fixture A is Y1 = ym pieces. The sum of the number of pieces transferred each time by the first transfer submechanism and the second transfer submechanism is m pieces. The number of pieces transferred each time by the first transfer submechanism is Y1 = ym, and the number of pieces transferred each time by the second transfer submechanism is Y2 = m - Y1 = 2m - y pieces.

[0064] The first and second transfer submechanisms transfer m pieces from a fully loaded fixture A1. At this point, fixture A1 has Y1 = ym pieces remaining. The first transfer submechanism can then take the remaining Y1 = ym pieces from fixture A1, and the second transfer submechanism can take pieces Y2 = m - Y1 = 2m - y from fixture A2 and transfer them to fixture B. Then, fixture A1 is replaced, and the transfer mechanism can transfer the workpieces from fixture B to fixture A, following the same logic. This transfer logic ensures that the transfer mechanism is always in a continuous cyclic operation mode, resulting in high-efficiency output from the transfer system.

[0065] In some embodiments, the fixture setting step further includes setting a first fixture at the first unloading station and a second unloading station respectively; and setting a second fixture at the second transfer station.

[0066] In this article, the unloading station refers to the station where workpieces are unloaded from fixtures. For example, at the first or second unloading station, silicon wafers are unloaded from a wafer carrier boat. Furthermore, at the second transfer station, silicon wafers are transferred from one type of fixture (such as a wafer carrier boat) to another (such as a basket).

[0067] For ease of description, the first fixtures located at the first unloading station and the second unloading station are defined as fixture A3 and fixture A4, respectively, and the second fixture located at the second transfer station is defined as fixture B2.

[0068] When m < y < 2m, the transfer operation of the transfer mechanism also includes the following first reverse transfer stage and second reverse transfer stage.

[0069] The first reverse transfer stage includes: both the first transfer sub-mechanism and the second transfer sub-mechanism pick up workpieces from fixture B2. The first transfer sub-mechanism picks up ym workpieces, and the second transfer sub-mechanism picks up 2m-y workpieces. The first transfer sub-mechanism and the second transfer sub-mechanism work together to place a total of m workpieces into the unloaded fixture A3.

[0070] The second reverse transfer stage includes: the first transfer submechanism picks up the remaining ym piece workpiece from fixture B2 and places it into fixture A3, making fixture A3 fully loaded; the second transfer submechanism picks up the 2m-y piece workpiece from fixture B2 and places it into the unloaded fixture A4.

[0071] In some embodiments, the first reverse transfer phase and the second reverse transfer phase are performed alternately.

[0072] In the above embodiments, not only can workpieces be transferred forward from the first fixture to the second fixture, but also reversely from the second fixture to the first fixture, adapting to different process production flows. Furthermore, when m < y < 2m, a workpiece in a fully loaded first fixture is transferred to the same second fixture through two transfer processes, and a workpiece in a fully loaded second fixture is distributed to two first fixtures through two transfer processes, optimizing the number of transfers and achieving high transfer efficiency.

[0073] In some embodiments, the forward transfer process from the first fixture to the second fixture is alternated with the reverse transfer process from the second fixture to the first fixture.

[0074] In the above embodiments, alternating between forward and reverse transfer processes helps to achieve high-efficiency operation of the transfer system and increase production capacity.

[0075] In some embodiments, the fixture setting step further includes a fixture replacement step. The fixture replacement step includes: replacing an empty fixture A1 or an empty fixture A2 with a fully loaded first fixture; replacing a fully loaded fixture A3 or a fully loaded fixture A4 with an empty first fixture; replacing a fully loaded fixture B1 with an empty second fixture; and replacing an empty fixture B2 with a fully loaded second fixture.

[0076] In some embodiments, the above-mentioned fixture replacement operation is performed by a transport robot, but it is not limited to this.

[0077] In some embodiments, the fixture replacement step is performed in parallel or partially overlaps with the transfer operation of the transfer mechanism.

[0078] In the above embodiments, by executing the fixture replacement operation and the transfer operation in parallel or overlapping, the waiting time of the transfer mechanism caused by the fixture replacement is eliminated, and the seamless connection of the production process is achieved.

[0079] In some embodiments, when 2m-y=0.5y and n / x=4 / 3, that is, the number of workpieces picked up by the second sub-transfer mechanism each time is half of the carrying capacity of the first fixture. In this case, the transfer operation of the transfer mechanism specifically includes the following steps S0 to S10.

[0080] Step S0: In the initial state, jigs A1 and A2 are fully loaded, jigs A3 and A4 are unloaded, jig B1 is unloaded, and jig B2 is fully loaded.

[0081] Step S1: Perform the first transfer stage, transferring m workpieces from fixture A1 to fixture B1.

[0082] Step S2: Perform the second transfer stage, transfer m pieces of workpieces from fixture A1 and fixture A2 to fixture B1 together, so that fixture A1 is unloaded, fixture A2 is half-loaded, and fixture B1 is fully loaded.

[0083] Step S3: Perform the first reverse transfer stage, transferring m workpieces from fixture B2 to fixture A3.

[0084] Step S4: Perform the second reverse transfer stage, transfer m pieces of workpieces from fixture B2 to fixtures A3 and A4 together, so that fixture A3 is fully loaded, fixture A4 is half-loaded, and fixture B2 is unloaded.

[0085] During the execution of steps S3 and S4, the unloaded jig A1 is replaced with the fully loaded first jig, and the fully loaded jig B1 is replaced with the unloaded second jig.

[0086] Step S5: Perform the second transfer stage, transfer m pieces of workpieces from fixture A1 and fixture A2 to fixture B1 together, so that fixture A2 is unloaded.

[0087] Step S6: Perform the first transfer stage, transfer m pieces of workpieces from fixture A1 to fixture B1, so that fixture A1 is unloaded and fixture B1 is fully loaded.

[0088] During the execution of steps S5 and S6, the fully loaded jig A3 is replaced with an empty first jig, and the empty jig B2 is replaced with a fully loaded second jig.

[0089] Step S7: Perform the second reverse transfer stage, transfer m pieces of workpieces from fixture B2 to fixtures A3 and A4 together, so that fixture A4 is fully loaded.

[0090] During the execution of steps S6 and S7, the unloaded fixture A2 is replaced with the fully loaded first fixture.

[0091] Step S8: Perform the first reverse transfer stage, transfer m pieces of workpieces from fixture B2 to fixture A3, so that fixture A3 is fully loaded and fixture B2 is unloaded.

[0092] During the execution of steps S7 and S8, the unloaded jig A1 is replaced with the fully loaded first jig, and the fully loaded jig B1 is replaced with the unloaded second jig.

[0093] Step S9: Perform the first transfer stage, transferring m pieces of workpieces from fixture A1 to fixture B1.

[0094] During the execution of steps S8 and S9, fixture A4 is replaced with an unloaded first fixture.

[0095] Step S10: Perform the second transfer stage, transfer m pieces of workpieces from fixture A1 and fixture A2 to fixture B1 together, so that fixture A1 is unloaded and fixture B1 is fully loaded.

[0096] During the execution of steps S9 and S10, the fully loaded fixture A3 is replaced with the empty first fixture, and the process returns to the state of step S3.

[0097] In some embodiments, the transfer method further includes: performing steps S3 to S10 at least once in a loop.

[0098] In the above embodiments, an optimized and directly implementable detailed operation procedure is provided for a specific and common parameter combination (n / x=4 / 3), which greatly reduces the complexity of actual operation and is conducive to achieving efficient and continuous transfer process.

[0099] In one specific embodiment, taking an atomic layer deposition apparatus as an example, the wafer load of fixture A is y=100 wafers and the slot spacing is dA=4.76mm; the wafer load of fixture B is N=150 wafers (that is, the wafer load of fixture B is 1.5 times that of fixture A, x=1.5), and the slot spacing is dB=2.38mm (that is, n=2).

[0100] Calculations show that the optimal number of pieces per transfer is m = N / n = 75 pieces. Therefore, the number of pieces transferred by the first transfer sub-mechanism per transfer is Y1 = ym = 25 pieces, and the number of pieces transferred by the second transfer sub-mechanism per transfer is Y2 = 2m - y = 50 pieces.

[0101] In other embodiments, the values ​​of wafer quantity y, wafer quantity N, slot pitch dA, and slot pitch dB are not limited to those described above.

[0102] The transfer process from fixture A to fixture B includes: In the first transfer stage, the first transfer sub-mechanism and the second transfer sub-mechanism in the transfer mechanism jointly remove 75 workpieces (such as silicon wafers) from fixture A1 and insert them into fixture B1, so that fixture B1 is half-loaded. The first transfer sub-mechanism places 25 pieces from fixture A1 into fixture B1, and the second transfer sub-mechanism places 50 pieces from fixture A1 into fixture B1.

[0103] In the second transfer stage, the remaining 25 slotted pieces in the slotted jig A1 of the first transfer submechanism are inserted into jig B1, making jig A1 unloaded, and the 50 slotted pieces in the slotted jig A2 of the second transfer submechanism are inserted into jig B1, making jig B1 fully loaded.

[0104] The transfer process from fixture B to fixture A includes: In the first reverse transfer stage, the first transfer sub-mechanism and the second transfer sub-mechanism in the transfer mechanism jointly remove 75 workpieces (such as silicon wafers) from fixture B2 and insert them into fixture A3. Specifically, the first transfer sub-mechanism places 25 pieces from fixture B2 into fixture A3, and the second transfer sub-mechanism places 50 pieces from fixture B2 into fixture A3.

[0105] In the second reverse transfer stage, the transfer mechanism removes the remaining half (75 pieces) of workpieces from fixture B2. The first transfer sub-mechanism inserts 25 pieces from fixture B2 into fixture A3, making fixture A3 fully loaded. The second transfer sub-mechanism inserts 50 pieces from fixture B2 into the empty fixture A4, making fixture A4 half-loaded.

[0106] During the transfer of workpieces from fixture A to fixture B, fixtures A1 and A2 are handled by a transport robot, which performs actions such as exiting, changing fixtures, entering, and positioning. During the transfer of workpieces from fixture B to fixture A, fixtures A3 and A4 are handled by a transport robot, which performs actions such as exiting, changing fixtures, entering, and positioning. This cycle repeats continuously, ensuring the transport mechanism operates in a continuous loop, thus optimizing the transport system's efficiency.

[0107] The transfer logic of the above transfer method is as follows: Figure 1 As shown, the transport timing diagram is as follows: Figure 2 As shown. Figure 1 In the process, the state of the sheet carrier in each first fixture is represented by a rectangle. When the rectangle is blank and there is no number filling it, it indicates that it is unloaded. When the rectangle is filled with numbers, it indicates that the sheet is loaded. Figure 2 In this process, every four time intervals correspond to one step from S0 to S10. Each time interval corresponds to a preset time. In some embodiments, the preset time for each time interval is 4 minutes, but it is not limited to this. For example... Figure 2 Step S0 includes four time intervals, each lasting four minutes. In step S0, "4" in the time row indicates that the time has elapsed since the start of the transfer, and the total time for the entire transfer method is 4 minutes; "8" in the time row indicates that the time has elapsed since the start of the transfer, and the total time for the entire transfer method is 8 minutes; "12" in the time row indicates that the time has elapsed since the start of the transfer, and the total time for the transfer method is 12 minutes; "16" in the time row indicates that the time has elapsed since the start of the transfer, and the total time for the transfer method is 16 minutes; and so on.

[0108] Please refer to the references. Figure 1 and Figure 2 It should be noted that, Figure 1 and Figure 2 The state of fixture B is omitted.

[0109] In step S0, the initial state is that both fixture A1 and fixture A2 are fully loaded and each carries 100 workpieces.

[0110] In step S1, the transfer mechanism takes 75 pieces from fixture A1 and transfers them to fixture B.

[0111] In step S2, the first transfer sub-mechanism in the transfer mechanism takes the remaining 25 pieces from fixture A1, and the second transfer sub-mechanism takes 50 pieces from fixture A2. At this time, fixture A1 is empty, and fixture A2 is half-loaded. That is, after these two transfers in steps S1 and S2, fixture A1 is emptied.

[0112] In step S3, the transfer mechanism transfers 75 workpieces from fixture B to fixture A3.

[0113] In step S4, the transfer mechanism transfers 25 pieces from fixture B to fixture A3 and 50 pieces to fixture A4, making fixture A3 fully loaded and fixture A4 half-loaded.

[0114] During steps S3 and S4, the unloaded fixture A1 is replaced with the fully loaded first fixture.

[0115] In step S5, the transfer mechanism takes 25 pieces from fixture A1 and 50 pieces from fixture A2, and transfers them together to fixture B, leaving fixture A2 unloaded.

[0116] In step S6, the transfer mechanism transfers 75 workpieces from fixture A1 to fixture B, leaving fixture A1 unloaded.

[0117] During the execution of steps S5 and S6, the fully loaded jig A3 is replaced with an empty first jig.

[0118] In step S7, the transfer mechanism transfers 25 pieces from fixture B to fixture A3 and 50 pieces to fixture A4, making fixture A4 fully loaded.

[0119] During the execution of steps S6 and S7, the unloaded fixture A2 is replaced with the fully loaded first fixture.

[0120] In step S8, the transfer mechanism transfers 75 workpieces from fixture B to fixture A3, so that fixture A3 is fully loaded.

[0121] During the execution of steps S7 and S8, the unloaded fixture A1 is replaced with the fully loaded first fixture.

[0122] In step S9, the transfer mechanism transfers 75 workpieces from fixture A1 to fixture B.

[0123] During the execution of steps S8 and S9, fixture A4 is replaced with an unloaded first fixture.

[0124] In step S10, the transfer mechanism takes 25 pieces from fixture A1 and 50 pieces from fixture A2 and transfers them together to fixture B.

[0125] During the execution of steps S9 and S10, the fully loaded jig A3 is replaced with an empty first jig, returning to the state of step S3. Afterwards, the transfer method may include multiple cycles from step S3 to S10.

[0126] A second aspect of this application also provides a transfer system. The transfer system includes a first fixture, a second fixture, a transfer mechanism, and a controller.

[0127] Both the first and second fixtures include multiple slots, each slot being used to hold one workpiece.

[0128] The distance between two adjacent slots in the first fixture is dA, and the number of wafers carried by the first fixture is y.

[0129] The spacing between two adjacent slots in the second fixture is dB, and the number of wafers carried by the second fixture is N.

[0130] Where n = dA / dB, n is a positive integer greater than 1; m = N / n, m is a positive integer and m < y.

[0131] The transfer mechanism is used to transfer workpieces between a first fixture and a second fixture. The controller is configured to execute the transfer method provided in the first aspect of this application.

[0132] In the aforementioned transfer system, the design of the transfer mechanism and controller helps to balance the efficiency, accuracy, and cost of transfer between fixtures with different slot spacings and different load capacities.

[0133] In some embodiments, the transfer mechanism includes a first transfer sub-mechanism and a second transfer sub-mechanism that work together.

[0134] In the above embodiments, the first transfer submechanism and the second transfer submechanism can work independently or collaboratively, increasing the flexibility and adaptability of the transfer operation and providing a hardware foundation for improving transfer efficiency.

[0135] In some embodiments, the controller is also configured to: calculate the number of transfers m in a single operation based on externally input fixture parameters, and adjust the motion program of the transfer mechanism based on the number of transfers m in a single operation.

[0136] In some embodiments, the externally input fixture parameters include the slot pitch dA of the first fixture, the slot pitch dB of the second fixture, the wafer load y of the first fixture, and the wafer load N of the second fixture.

[0137] In some embodiments, the externally input fixture parameters include the ratio x of the number of wafers carried by the second fixture to that of the first fixture, the number of wafers carried by the first fixture y, and the ratio n of the slot spacing between the first fixture and the second fixture.

[0138] In the above embodiments, the controller can automatically calculate the optimal transfer quantity m based on the externally input fixture parameters and adjust the motion program of the transfer mechanism accordingly without manual intervention or reprogramming. This improves the system's configuration flexibility and adaptability to different production tasks, facilitates rapid switching between transfer tasks of different fixture specifications, and shortens production preparation time.

[0139] A third aspect of this application also provides a computer-readable storage medium. The computer-readable storage medium stores a computer program. When executed by a processor, the computer program implements the transfer method of the first aspect of this application.

[0140] In some embodiments, the computer-readable storage medium can be any medium capable of storing program code. The computer-readable storage medium can be, but is not limited to, read-only memory (ROM), random access memory (RAM), hard disk, optical disk, flash memory, solid-state drive, etc.

[0141] The above embodiments are only used to illustrate the technical solutions of this application and are not intended to limit it. Although this application has been described in detail with reference to the above preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions to the technical solutions of this application should not depart from the spirit and scope of the technical solutions of this application.

Claims

1. A transfer method for a transfer mechanism to transfer a workpiece between a first fixture and a second fixture, wherein both the first fixture and the second fixture include a plurality of slots, each slot being used to hold one piece of the workpiece; characterized in that, The spacing between two adjacent slots in the first fixture is dA, and the number of pieces carried by the first fixture is y. The spacing between two adjacent slots in the second fixture is dB, and the number of wafers carried by the second fixture is N. Where n = dA / dB, n is a positive integer greater than 1; m = N / n, m is a positive integer and m < y; The transfer method includes controlling the transfer mechanism to perform the following transfer operations: Pick up m pieces of the workpiece in a single operation from the first fixture; and Place the m pieces of workpiece into the second fixture, such that there are n-1 slots between any two adjacent workpieces.

2. The transfer method according to claim 1, characterized in that, Picking m pieces of the workpieces in a single operation from the first fixture includes: When the first fixture is fully loaded, m workpieces are picked up from a single first fixture; and When the loading quantity of the first fixture is greater than 0 and less than m, m workpieces are picked up from at least two of the first fixtures.

3. The transfer method according to claim 2, characterized in that, The transfer mechanism includes a first transfer sub-mechanism and a second transfer sub-mechanism that work together. The transfer method further includes a fixture setting step, which includes: First fixtures are respectively installed at the first loading station and the second loading station; and A second fixture is installed at the first transfer station; The first fixtures located at the first loading station and the second loading station are defined as fixture A1 and fixture A2, respectively, and the second fixture located at the first transfer station is defined as fixture B1; when m < y < 2m, the transfer operation of the transfer mechanism includes the following first transfer stage and second transfer stage; The first transfer stage includes: both the first transfer sub-mechanism and the second transfer sub-mechanism pick up workpieces from the fully loaded fixture A1, wherein the first transfer sub-mechanism picks up ym workpieces and the second transfer sub-mechanism picks up 2m-y workpieces, and the first transfer sub-mechanism and the second transfer sub-mechanism cooperate to place a total of m workpieces into the unloaded fixture B1; The second transfer stage includes: the first transfer sub-mechanism picking up the remaining ym pieces of workpiece from the fixture A1, making the fixture A1 unloaded; the second transfer sub-mechanism picking up 2m-y pieces of workpiece from the fully loaded fixture A2; and the first transfer sub-mechanism and the second transfer sub-mechanism working together to place a total of m pieces of workpiece into the fixture B1.

4. The transfer method according to claim 3, characterized in that, The first transfer stage and the second transfer stage are performed alternately.

5. The transfer method according to claim 3, characterized in that, The fixture setting step also includes: The first fixture is respectively installed at the first unloading station and the second unloading station; and The second fixture is installed at the second transfer station; The first fixtures located at the first unloading station and the second unloading station are defined as fixture A3 and fixture A4, respectively, and the second fixture located at the second transfer station is defined as fixture B2; when m < y < 2m, the transfer operation of the transfer mechanism also includes the following first reverse transfer stage and second reverse transfer stage; The first reverse transfer stage includes: both the first transfer sub-mechanism and the second transfer sub-mechanism pick up workpieces from the fully loaded fixture B2, wherein the first transfer sub-mechanism picks up ym workpieces and the second transfer sub-mechanism picks up 2m-y workpieces, and the first transfer sub-mechanism and the second transfer sub-mechanism cooperate to place a total of m workpieces into the unloaded fixture A3; The second reverse transfer stage includes: the first transfer sub-mechanism picking up the remaining ym piece workpiece from the fixture B2 and placing it into the fixture A3, making the fixture A3 fully loaded; and the second transfer sub-mechanism picking up the 2m-y piece workpiece from the fixture B2 and placing it into the unloaded fixture A4.

6. The transfer method according to claim 5, characterized in that, The first reverse transfer phase and the second reverse transfer phase are performed alternately.

7. The transfer method according to claim 5 or 6, characterized in that, The fixture setting step further includes a fixture replacement step, which includes: Replace the unloaded fixture A1 or the unloaded fixture A2 with the fully loaded first fixture; Replace the fully loaded fixture A3 or the fully loaded fixture A4 with the unloaded first fixture; Replace the fully loaded fixture B1 with the unloaded second fixture; Replace the unloaded fixture B2 with the fully loaded second fixture; The fixture replacement step is performed in parallel or partially overlaps with the transfer operation of the transfer mechanism.

8. The transfer method according to claim 7, characterized in that, When 2m-y=0.5y, the number of workpieces picked up by the second transfer submechanism each time is half the carrying capacity of the first fixture. The transfer operation of the transfer mechanism specifically includes: Step S0: In the initial state, fixture A1 and fixture A2 are fully loaded, fixture A3 and fixture A4 are unloaded, fixture B1 is unloaded, and fixture B2 is fully loaded; Step S1: Perform the first transfer stage; Step S2: Perform the second transfer stage, so that fixture A1 is unloaded, fixture A2 is half-loaded, and fixture B1 is fully loaded; Step S3: Perform the first reverse transfer phase; Step S4: Execute the second reverse transfer stage, so that fixture A3 is fully loaded, fixture A4 is half-loaded, and fixture B2 is unloaded; During the execution of steps S3 and S4, the unloaded fixture A1 is replaced with a fully loaded first fixture, and the fully loaded fixture B1 is replaced with an unloaded second fixture. Step S5: Perform the second transfer stage to make the fixture A2 unloaded; Step S6: Perform the first transfer stage, so that fixture A1 is unloaded and fixture B1 is fully loaded; During the execution of steps S5 and S6, the fully loaded fixture A3 is replaced with an empty first fixture, and the empty fixture B2 is replaced with a fully loaded second fixture. Step S7: Perform the second reverse transfer stage to fully load the fixture A4; During the execution of steps S6 and S7, the unloaded fixture A2 is replaced with a fully loaded first fixture; Step S8: Perform the first reverse transfer stage to make fixture A3 fully loaded and fixture B2 unloaded; During the execution of steps S7 and S8, the unloaded fixture A1 is replaced with a fully loaded first fixture, and the fully loaded fixture B1 is replaced with an unloaded second fixture. Step S9: Perform the first transfer stage; During the execution of steps S8 and S9, the fixture A4 is replaced with an unloaded first fixture; Step S10: Perform the second transfer stage, so that fixture A1 is unloaded and fixture B1 is fully loaded; During the execution of steps S9 and S10, the fully loaded fixture A3 is replaced with an empty first fixture, and the process returns to the state of step S3. The steps S3 through S10 are executed at least once.

9. A transfer system, characterized in that, include: The first fixture; The second fixture, both the first fixture and the second fixture include a plurality of slots, each of the slots being used to hold one of the workpieces; The spacing between two adjacent slots in the first fixture is dA, and the number of wafers carried by the first fixture is y; the spacing between two adjacent slots in the second fixture is dB, and the number of wafers carried by the second fixture is N; where n = dA / dB, n is a positive integer greater than 1; m = N / n, m is a positive integer and m < y. A transfer mechanism for transferring workpieces between the first fixture and the second fixture; as well as The controller is configured to control the transfer mechanism to perform the transfer method as described in any one of claims 1 to 8.

10. The transfer system according to claim 9, characterized in that, The transfer mechanism includes a first transfer sub-mechanism and a second transfer sub-mechanism that work together.

11. A computer-readable storage medium storing a computer program, characterized in that, When the computer program is executed by the processor, it implements the transfer method as described in any one of claims 1 to 8.

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