Vapor deposition furnace for producing silicon carbide coating graphite carrying disc

Abstract

The invention relates to the technical field of vapor deposition furnaces, in particular to a vapor deposition furnace for producing a silicon carbide coating graphite carrier disc, which comprises a furnace body, a mounting frame is arranged in the furnace body, a self-rotating frame is arranged on the mounting frame, a clamp is rotatably arranged on the self-rotating frame, the rotating axis of the clamp is horizontal, the clamp is used for loading the graphite carrier disc, and the graphite carrier disc is arranged on the mounting frame. And a turn-over mechanism for driving the clamp to intermittently rotate for half a circle is arranged on the autorotation frame. The method has the advantages that the consistency of the thickness and density of the SiC coatings on the upper and lower surfaces of the graphite carrier plate is improved, and the overall performance and the service life of the carrier plate are guaranteed.

Description

TECHNICAL FIELD

[0001] The application relates to the technical field of gas deposition furnaces, in particular to a gas deposition furnace for producing a silicon carbide coated graphite carrier plate. BACKGROUND

[0002] In the epitaxial process of silicon and silicon carbide, wafers are carried on graphite carrier plates, including barrel type, pancake type and single wafer graphite plates. The performance and quality of the graphite plate play a crucial role in the quality of the epitaxial layer of the wafer. The graphite plate is generally coated with silicon carbide, which is a coating with density, wear resistance, high corrosion resistance, heat resistance and excellent thermal conductivity. The silicon carbide coating is tightly combined with the graphite component, prolonging the service life of the graphite component and achieving the high-purity surface structure required for the production of semiconductor materials.

[0003] In a conventional gas deposition furnace, the inner flow field and temperature field are unevenly distributed, resulting in inconsistent thickness and density of the SiC coating on different positions of the graphite carrier plate, especially the upper and lower surfaces, affecting the overall performance and service life of the carrier plate. SUMMARY

[0004] In order to improve the consistency of the thickness and density of the SiC coating on the upper and lower surfaces of the graphite carrier plate, and thus ensure the overall performance and service life of the carrier plate, the application provides a gas deposition furnace for producing a silicon carbide coated graphite carrier plate.

[0005] The gas deposition furnace for producing a silicon carbide coated graphite carrier plate provided by the application adopts the following technical solution: A gas deposition furnace for producing a silicon carbide coated graphite carrier plate, comprising a furnace body, a mounting frame is arranged in the furnace body, a self-rotating frame is arranged on the mounting frame, a clamp is rotatably arranged on the self-rotating frame, the rotation axis of the clamp is horizontal, the clamp is used for loading the graphite carrier plate, and a surface turning mechanism for driving the clamp to rotate intermittently by half a circle is arranged on the self-rotating frame.

[0006] By adopting the above technical solution, the surface turning mechanism can drive the clamp with the graphite carrier plate to rotate intermittently by half a circle, realizing the alternate turning of the upper and lower surfaces of the graphite carrier plate. The surface originally on the lower side, which has a relatively thin coating or a relatively low density due to the difference in flow field and temperature field, is turned to the upper side to be in full contact with the deposition gas. In this way, the deposition conditions of the upper and lower surfaces are balanced, thereby improving the consistency of the thickness and density of the SiC coating on the upper and lower surfaces of the graphite carrier plate, and thus ensuring the overall performance and service life of the carrier plate.

[0007] As a preferred, the self-rotating frame is rotatably connected with the mounting frame, the rotation axis of the self-rotating frame is vertical, and a driving mechanism for driving the self-rotating frame to rotate is arranged on the mounting frame.

[0008] By adopting the technical scheme, when the driving mechanism drives the rotation frame to rotate around the vertical axis, the clamps and the graphite carrier plates are driven to rotate around the vertical axis synchronously, so that the graphite carrier plates rotate in the deposition process, and the uniformity of the SiC coating in the circumferential direction of the graphite carrier plates is improved.

[0009] Preferably, the rotation frames are uniformly and spacedly distributed along the circumferential direction of the mounting frame.

[0010] By adopting the technical scheme, multiple graphite carrier plates can be simultaneously loaded on the multiple uniformly distributed rotation frames for vapor deposition treatment, so that the number of carrier plates produced at one time is increased, and the production efficiency is improved. In addition, since each graphite carrier plate rotates in the deposition process, any point on the edge of the graphite carrier plate will intermittently approach or move away from the middle part of the mounting frame (i.e., the middle part of the furnace body) in the circumferential direction of the mounting frame, while the position of the middle part of the graphite carrier plate on the mounting frame changes little. Therefore, the uniformity of the SiC coating on the edge and the center of the graphite carrier plate is improved.

[0011] Preferably, the mounting frame is arranged to rotate in the furnace body, and the rotation axis of the mounting frame is vertical. The driving mechanism includes a motor, a first internal gear ring, and a first gear. The motor is fixedly connected to the furnace body. The driving shaft of the motor is coaxially fixed to the mounting frame. The first gear is coaxially fixed to the rotation frame. The first internal gear ring is fixedly connected to the furnace body and coincides with the axis of the mounting frame. All the first gears are in mesh with the first internal gear ring.

[0012] By adopting the technical scheme, when the motor drives the mounting frame to revolve around the vertical axis, the first gear fixed to the rotation frame will rotate due to the meshing with the fixed first internal gear ring, so as to drive the rotation frame to realize the combined motion of revolving around the mounting frame and rotating along the axis of the rotation frame, thereby improving the uniformity of the SiC coating deposited on each graphite carrier plate.

[0013] Preferably, the turnover mechanism includes a second gear, an incomplete gear, a pushing pawl, a ratchet wheel, an energy storage torsional spring, and a linkage assembly. The incomplete gear is rotationally connected to the rotation frame. The linkage assembly is used to drive the incomplete gear to rotate. The second gear is coaxial with and rotationally connected to the clamp. The ratchet wheel is coaxial with and fixedly connected to the clamp. The incomplete gear is intermittently meshed with the second gear. The pushing pawl is rotationally arranged on the end face of the second gear. The pushing pawl is used to drive the ratchet wheel to rotate in one direction. The energy storage torsional spring is arranged between the rotation frame and the second gear. The energy storage torsional spring is used to drive the second gear to rotate towards the direction of driving the pushing pawl to push the ratchet wheel.

[0014] By adopting the technical scheme, when the linkage assembly drives the incomplete gear to rotate, the incomplete gear will intermittently mesh with the second gear, when the incomplete gear meshes with the second gear, the incomplete gear drives the second gear to rotate for a half cycle, at this time, the second gear rotates and drives the torsion spring to rotate to store elastic potential energy; when the incomplete gear is disengaged from the second gear, the second gear loses the constraint, the torsion spring releases the elastic potential energy and drives the second gear to rotate reversely, so that the pushing pawl on the second gear abuts against the ratchet wheel to rotate, drives the ratchet wheel and the clamp to rotate for a half cycle, and the automatic turning of the graphite carrier tray is realized.

[0015] As a preferred, the turning mechanism further comprises a connecting frame and a check pawl, the connecting frame is fixedly connected with the rotation frame, and the check pawl is rotationally connected with the connecting frame, and the check pawl abuts against the ratchet teeth of the ratchet wheel.

[0016] By adopting the technical scheme, when the pushing pawl rotates with the second gear in the direction of not driving the ratchet wheel to rotate, the check pawl will abut against the ratchet teeth of the ratchet wheel to limit the reverse rotation of the ratchet wheel.

[0017] As a preferred, the linkage assembly comprises a second inner tooth ring, a third gear, a support, a worm and a worm wheel, the second inner tooth ring is fixedly connected with the mounting frame, the second inner tooth ring coincides with the rotation frame axis, the support is fixedly connected with the rotation frame, the worm is rotationally connected with the support, the third gear is coaxially fixed with the worm, the third gear meshes with the second inner tooth ring, the worm wheel is rotationally connected with the rotation frame, and the worm wheel meshes with the worm, and the worm wheel is used to drive the incomplete gear to rotate.

[0018] By adopting the technical scheme, when the rotation frame rotates on the mounting frame, the third gear rotates around the rotation frame axis and meshes with the second inner tooth ring to drive the worm to rotate, the worm drives the worm wheel to rotate, and then drives the incomplete gear to rotate, the cooperation of the worm wheel and the worm changes the axis direction of the rotation motion transmission and can provide a larger transmission ratio, so as to reduce the ratio of the turning frequency of the graphite carrier tray to the rotation frequency of the rotation frame, and reduce the demand for the power input, i.e. the strength of the rotation power of the rotation frame.

[0019] As a preferred, the linkage assembly further comprises a fourth gear and a fifth gear, the fifth gear is coaxially fixed with the worm wheel, and the fourth gear is coaxially fixed with the incomplete gear.

[0020] By adopting the technical scheme, when the worm wheel rotates, the coaxially fixed fifth gear will rotate, the fifth gear meshes with the fourth gear, and then drives the fourth gear and the coaxially fixed incomplete gear to rotate, and the fourth gear and the fifth gear are used to coordinate the transmission ratio of the worm wheel, the worm and the incomplete gear, and then control the rotation speed and the turning frequency of the graphite carrier tray.

[0021] Preferably, the fixture includes an end plate, a fixed clamping block, a movable clamping block, and a clamping member. A set of end plates are symmetrically and rotatably arranged on both sides of the rotating frame. The flipping mechanism is used to drive the end plates to rotate. The fixed clamping block is fixedly connected to one of the end plates. The movable clamping block is slidably connected to the other end plate along the direction close to or away from the fixed clamping block. The fixed clamping block and the movable clamping block are used to jointly clamp the graphite carrier disk. The clamping member is used to drive the movable clamping block to slide.

[0022] By adopting the above technical solution, the graphite carrier is placed between the fixed clamping block and the movable clamping block, and the movable clamping block is driven to slide closer to the fixed clamping block by the clamping component, so as to clamp and fix the graphite carrier.

[0023] Preferably, the clamping component includes a threaded sleeve, a screw, and a knob. The threaded sleeve is fixedly connected to the end plate corresponding to the movable clamping block. One end of the screw is rotatably connected to the movable clamping block, and the other end of the screw extends into the threaded sleeve and is threadedly connected to the threaded sleeve. The knob is coaxially fixed with the screw.

[0024] By adopting the above technical solution, rotating the knob drives the screw to rotate inside the screw sleeve. The screw and the screw sleeve are threadedly connected, and the screw sleeve is fixed. The rotation of the screw is converted into its own axial movement, which in turn pushes the movable clamping block to slide along the end plate. Moreover, the threaded transmission has self-locking properties, which keeps the movable clamping block stably in the clamping position and prevents the movable clamping block from loosening during the deposition process, thus avoiding displacement of the graphite carrier.

[0025] In summary, this application includes at least one of the following beneficial technical effects: 1. By setting up a mounting frame, a rotating frame, a clamp, a graphite carrier, and a flipping mechanism, the flipping mechanism can drive the clamp to rotate the graphite carrier intermittently by half a revolution to achieve alternating flipping, balancing the deposition conditions on the upper and lower surfaces. At the same time, the rotating frame drives the graphite carrier to rotate, improving the uniformity of the coating in the circumferential direction. Under the dual action, the thickness and density of the SiC coating on the upper and lower surfaces of the graphite carrier and in its own circumferential direction are effectively improved, ensuring the overall performance and service life of the carrier. 2. By setting up a motor, a first internal gear ring, and a first gear, when the motor drives the mounting frame to revolve, the first gear meshes with the fixed first internal gear ring to drive the rotating frame to synchronously achieve a composite motion of revolution and rotation, so that each point of the graphite carrier disk can be evenly contacted by the deposition gas and temperature field, further improving the overall uniformity of SiC coating deposition on the carrier disk surface. 3. By setting the second gear, the incomplete gear, the advancing pawl, the ratchet wheel, the energy storage torsional spring, the connecting frame, the non-return pawl, the second inner tooth ring, the third gear, the bracket, the worm, the worm wheel, using the rotation power of the rotation frame, driving the incomplete gear to rotate through the linkage assembly after transmission and adjusting the transmission ratio, cooperating with the one-way transmission of the energy storage torsional spring, the pawl and the ratchet wheel, realizing the intermittent automatic turning of the graphite carrier disc, ensuring the balance of the deposition conditions of the upper and lower surfaces, and helping to improve the coating consistency. BRIEF DESCRIPTION OF DRAWINGS

[0026] Figure 1 is a structural schematic diagram of a silicon carbide coating graphite carrier disc production gas deposition furnace provided in the embodiment of the application.

[0027] Figure 2 is a structural schematic diagram of the inside of a silicon carbide coating graphite carrier disc production gas deposition furnace provided in the embodiment of the application.

[0028] Figure 3 is a structural schematic diagram of the driving mechanism in the embodiment of the application.

[0029] Figure 4 is a structural schematic diagram of the rotation frame in the embodiment of the application.

[0030] Figure 5 is Figure 4 is an enlarged view of part A in Figure 6 is Figure 4 is an enlarged view of part B in

[0031] BRIEF DESCRIPTION OF DRAWINGS: 1, furnace body; 11, mounting frame; 2, rotation frame; 3, clamp; 31, end plate; 311, fixed clamp block; 312, movable clamp block; 32, clamping piece; 321, screw sleeve; 322, screw rod; 323, knob; 4, graphite carrier disc; 5, turning mechanism; 51, second gear; 52, incomplete gear; 53, advancing pawl; 54, ratchet wheel; 55, energy storage torsional spring; 56, linkage assembly; 561, second inner tooth ring; 562, third gear; 563, bracket; 564, worm; 565, worm wheel; 566, fourth gear; 567, fifth gear; 57, connecting frame; 58, non-return pawl; 6, driving mechanism; 61, motor; 62, first inner tooth ring; 63, first gear. DETAILED DESCRIPTION

[0032] The following will be combined with the drawings Figures 1-6 The application will be further described in detail.

[0033] The embodiment of the application discloses a silicon carbide coating graphite carrier disc production gas deposition furnace. Referring to Figure 1 and Figure 2It comprises a furnace body 1, the inner cavity of which is a cylindrical opening with the axis vertical. A mounting frame 11 is arranged to rotate in the furnace body 1, and the rotating axis of the mounting frame 11 is vertical and coincides with the axis of the inner cavity of the furnace body 1. A plurality of self-rotating frames 2 are arranged to rotate on the mounting frame 11, and in this embodiment, three self-rotating frames 2 are arranged. The rotating axis of the self-rotating frame 2 is vertical, and all the self-rotating frames 2 are uniformly and spacedly distributed along the circumferential direction of the mounting frame 11. The mounting frame 11 is provided with a driving mechanism 6 for driving all the self-rotating frames 2 to rotate.

[0034] Referring to Figure 2 , a clamp 3 is arranged to rotate on the self-rotating frame 2, and the rotating axis of the clamp 3 is horizontal. The clamp 3 is used to load a graphite carrier disc 4. When the graphite carrier disc 4 is loaded on the clamp 3, the axis thereof coincides with the rotating axis of the self-rotating frame 2. The self-rotating frame 2 is provided with a turnover mechanism 5 for driving the clamp 3 to rotate intermittently by half a circle.

[0035] Referring to Figure 2 and Figure 3 , when the graphite carrier disc 4 is subjected to vapor deposition, the mounting frame 11 is driven to rotate around the axis of the furnace body 1, and the self-rotating frame 2 and the graphite carrier disc 4 on the self-rotating frame 2 revolve around the mounting frame 11, so that all the graphite carrier discs 4 uniformly pass through different regions in the circumferential direction of the inner cavity of the furnace body 1, balancing the influence of the internal flow field and temperature field in the inner cavity of the furnace body 1 on each carrier disc. The driving mechanism 6 drives the self-rotating frame 2 to rotate around its own axis, realizing the self-rotation of the graphite carrier disc 4 around its own axis, so that each point in the circumferential direction of the carrier disc can alternately approach the axis of the furnace body 1, improving the uniformity of the coating in the circumferential direction of a single carrier disc. The turnover mechanism 5 drives the clamp 3 to rotate intermittently by half a circle, realizing the intermittent turnover of the graphite carrier disc 4, and improving the consistency of the thickness and density of the SiC coating on the upper and lower surfaces of the graphite carrier disc 4. Further, the overall performance and service life of the carrier disc are ensured.

[0036] In order to drive the mounting frame 11 to rotate, realize the revolution of all the graphite carrier discs 4 around the axis of the furnace body 1, referring to Figure 2 and Figure 3 , the driving mechanism 6 comprises a motor 61, which is located outside the furnace body 1 and is fixedly connected to the bottom of the furnace body 1 by bolts. The driving shaft of the motor 61 penetrates the bottom of the furnace body 1 and extends into the furnace body 1 to be coaxially fixed with the mounting frame 11. The motor 61 outputs torque to directly drive the mounting frame 11 to rotate around the axis of the inner cavity of the furnace body 1.

[0037] In order to drive the self-rotating frame 2 to rotate, realize the self-rotation of the graphite carrier disc 4 around its own axis, referring to Figure 1 and Figure 3The drive mechanism 6 also includes a first internal gear ring 62 and a first gear 63. The first gear 63 is coaxially fixed to the rotating frame 2, and the first internal gear ring 62 is fixedly connected to the side wall of the inner cavity of the furnace body 1. The first internal gear ring 62 coincides with the axis of the mounting frame 11, and all the first gears 63 mesh with the first internal gear ring 62. When the motor 61 drives the mounting frame 11 to revolve around the axis of the inner cavity of the furnace body 1, the first gear 63, which is coaxially fixed to the rotating frame 2, rotates due to meshing with the first internal gear ring 62 fixed inside the furnace body 1, thereby driving the rotating frame 2 and the graphite carrier 4 on the rotating frame 2 to rotate.

[0038] To drive the clamp 3 to rotate intermittently and achieve the intermittent flipping action of the graphite carrier 4, refer to Figures 3 to 5 The flipping mechanism 5 includes a second gear 51, an incomplete gear 52, a propulsion pawl 53, a ratchet 54, an energy storage torsion spring 55, a linkage assembly 56, a connecting frame 57, and a check pawl 58. The incomplete gear 52 is rotatably connected to the rotating frame 2 via bearings, and the rotation axis of the incomplete gear 52 is parallel to the rotation axis of the clamp 3. The linkage assembly 56 is used to drive the incomplete gear 52 to rotate. The second gear 51 is coaxial with the rotation axis of the clamp 3 and is rotatably connected via bearings. The ratchet 54 is coaxial with the rotation axis of the clamp 3 and is fixedly connected. The ratchet 54 is located on the side of the second gear 51 away from the clamp 3. The incomplete gear 52 and the second gear 51 mesh intermittently.

[0039] Reference Figures 3 to 5 A pawl 53 is rotatably mounted on the end face of the second gear 51, and is used to drive the ratchet 54 to rotate in one direction. An energy storage torsion spring 55 is disposed between the rotating frame 2 and the second gear 51. One end of the energy storage torsion spring 55 is fixedly connected to the second gear 51, and the other end is fixedly connected to the side wall of the rotating frame 2. The energy storage torsion spring 55 is used to drive the second gear 51 to rotate in the direction that drives the pawl 53 to push the ratchet 54. A connecting frame 57 is fixedly connected to the rotating frame 2, and a check pawl 58 is rotatably connected to the connecting frame 57, abutting against the ratchet teeth of the ratchet 54.

[0040] Reference Figure 4 and Figure 5The linkage assembly 56 includes a second internal gear ring 561, a third gear 562, a bracket 563, a worm 564, a worm wheel 565, a fourth gear 566, and a fifth gear 567. The second internal gear ring 561 is fixedly connected to the mounting bracket 11, and its axis coincides with that of the rotating frame 2. The bracket 563 is fixed to the rotating frame 2 by welding, and the worm 564 is rotatably connected to the bracket 563, with its axis vertical. The third gear 562 is coaxially fixed to the worm 564 and meshes with the second internal gear ring 561. The worm wheel 565 is rotatably connected to the rotating frame 2 and meshes with the worm 564. The fifth gear 567 is coaxially fixed to the worm wheel 565, and the fourth gear 566 is coaxially fixed to the incomplete gear 52, meshing with the fourth gear 566. The worm gear 565 drives the incomplete gear 52 to rotate through the fourth gear 566 and the fifth gear 567.

[0041] Reference Figure 4 and Figure 5 When the rotating frame 2 rotates on the mounting frame 11, the third gear 562 rotates around the axis of the rotating frame 2 and meshes with the second internal gear ring 561. This causes the third gear 562 to rotate and drive the worm 564 to rotate. The worm 564 then drives the worm wheel 565 to rotate. The worm wheel 565, through the meshing of the fourth gear 566 and the fifth gear 567, drives the incomplete gear 52 to rotate. When the incomplete gear 52 rotates, it intermittently meshes with the second gear 51. When the incomplete gear 52 meshes with the second gear 51, it drives the second gear 51 to rotate half a revolution. At this time, the second gear 51 rotates, driving the torsion spring to rotate and store elastic potential energy. When the incomplete gear 52 disengages from the second gear 51, the second gear 51 loses its constraint, the torsion spring releases its elastic potential energy, and drives the second gear 51 to rotate in the opposite direction, so that the push pawl 53 on the second gear 51 abuts against the ratchet 54 and rotates, driving the ratchet 54 and the clamp 3 to rotate half a turn, thereby realizing the automatic flipping of the graphite carrier 4.

[0042] To achieve clamping and fixing of the graphite carrier disk 4, refer to Figure 4 and Figure 6The clamp 3 comprises end plates 31, fixed clamping blocks 311, movable clamping blocks 312 and clamping members 32. The end plates 31 are symmetrically arranged on both sides of the rotating frame 2 and are rotatably arranged. The turnover mechanism 5 is used to drive the end plates 31 to rotate, and the fixed clamping blocks 311 are fixedly connected with one of the end plates 31. The movable clamping blocks 312 are slidably connected with the other end plate 31 in the direction of approaching or moving away from the fixed clamping blocks 311. In this embodiment, a plurality of slide rods are arranged through and slidably on the other end plate 31, and the slide rods are fixedly connected with the movable clamping blocks 312 to provide guidance for the movable clamping blocks 312. The fixed clamping blocks 311 and the movable clamping blocks 312 are used to jointly clamp the graphite carrier disc 4, and the clamping members 32 are used to drive the movable clamping blocks 312 to slide. The clamping member 32 comprises a sleeve 321, a screw rod 322 and a knob 323. The sleeve 321 is fixedly connected with the end plate 31 corresponding to the movable clamping block 312, one end of the screw rod 322 is rotatably connected with the movable clamping block 312 through a bearing, the other end of the screw rod 322 extends into the sleeve 321 and is threadedly connected with the sleeve 321, and the knob 323 is coaxially fixed with the screw rod 322.

[0043] With reference to Figure 4 And Figure 6 When the graphite carrier disc 4 is installed, the graphite carrier disc 4 is placed between the fixed clamping blocks 311 and the movable clamping blocks 312, the knob 323 is rotated to drive the screw rod 322 to rotate in the sleeve 321, thereby pushing the movable clamping blocks 312 to slide along the end plate 31, and the fixed clamping blocks 311 and the movable clamping blocks 312 jointly abut against the side edges of the graphite carrier disc 4.

[0044] The implementation principle of the gas deposition furnace for producing the silicon carbide coated graphite carrier disc 4 is as follows: when the graphite carrier disc 4 is subjected to gas deposition, the motor 61 drives the mounting frame 11 to rotate around the axis of the inner cavity of the furnace body 1, and the rotating frame 2 and the graphite carrier disc 4 on the rotating frame 2 revolve around the mounting frame 11, so that all the graphite carrier discs 4 uniformly pass through different regions in the circumferential direction of the inner cavity of the furnace body 1, thereby balancing the influence of the internal flow field and the temperature field in the inner cavity of the furnace body 1 on each carrier disc.

[0045] When the motor 61 drives the mounting frame 11 to revolve around the axis of the inner cavity of the furnace body 1, the first gear 63 fixedly arranged coaxially with the rotating frame 2 rotates due to meshing with the first internal gear ring 62 fixed in the furnace body 1, thereby driving the rotating frame 2 and the graphite carrier disc 4 on the rotating frame 2 to rotate. This enables the points in the circumferential direction of the carrier disc to alternately approach the axis of the furnace body 1, thereby improving the uniformity of the coating in the circumferential direction of a single carrier disc.

[0046] When the rotation frame 2 rotates on the mounting frame 11, the third gear 562 rotates around the rotation frame 2 axis and meshes with the second inner tooth ring 561, and then the third gear 562 rotates and drives the worm 564 to rotate, the worm 564 drives the worm wheel 565 to rotate, the worm wheel 565 drives the incomplete gear 52 to rotate through the meshing of the fourth gear 566 and the fifth gear 567. When the incomplete gear 52 rotates, the incomplete gear 52 intermittently meshes with the second gear 51, when the incomplete gear 52 meshes with the second gear 51, the incomplete gear 52 drives the second gear 51 to rotate half a circle, at this time the second gear 51 rotates and drives the torsion spring to store elastic potential energy. When the incomplete gear 52 is disengaged from the second gear 51, the second gear 51 loses constraint, the torsion spring releases elastic potential energy and drives the second gear 51 to rotate in the opposite direction, so that the advancing pawl 53 on the second gear 51 abuts against the ratchet wheel 54 to rotate, drives the ratchet wheel 54 and the clamp 3 to rotate half a circle, and realizes the automatic turning of the graphite carrier disc 4. The thickness and density consistency of the SiC coating on the upper and lower surfaces of the graphite carrier disc 4 is improved. Then the overall performance and service life of the carrier disc are ensured.

[0047] The above are preferred embodiments of the present application, which do not limit the protection scope of the present application, therefore: any equivalent changes made on the structure, shape, principle of the present application should be covered within the protection scope of the present application.

Claims

1. A vapor deposition furnace for producing silicon carbide coated graphite susceptor, comprising a furnace body (1), characterized in that: The mounting frame (11) is rotationally arranged in the furnace body (1), and the rotation axis of the mounting frame (11) is vertical, the driving mechanism (6) comprises a motor (61), a first internal tooth ring (62) and a first gear (63), the motor (61) is fixedly connected with the furnace body (1), the driving shaft of the motor (61) is coaxially fixed with the mounting frame (11), the first gear (63) is coaxially fixed with the self-rotating frame (2), the first internal tooth ring (62) is fixedly connected with the furnace body (1) and coincides with the axis of the mounting frame (11), and all the first gears (63) are in mesh with the first internal tooth ring (62).

2. The vapor deposition furnace for producing silicon carbide coated graphite susceptor according to claim 1, characterized in that: The turning mechanism (5) comprises a second gear (51), an incomplete gear (52), a propelling pawl (53), a ratchet wheel (54), an energy storage torsional spring (55) and a linkage assembly (56), the incomplete gear (52) is rotationally connected with the self-rotating frame (2), the linkage assembly (56) is used for driving the incomplete gear (52) to rotate, the second gear (51) is coaxial and rotationally connected with the clamp (3), the ratchet wheel (54) is coaxial and fixedly connected with the clamp (3), the incomplete gear (52) is intermittently meshed with the second gear (51), the propelling pawl (53) is rotationally arranged on the end face of the second gear (51), the propelling pawl (53) is used for driving the ratchet wheel (54) to rotate in one direction, the energy storage torsional spring (55) is arranged between the self-rotating frame (2) and the second gear (51), and the energy storage torsional spring (55) is used for driving the second gear (51) to rotate towards the direction of driving the propelling pawl (53) to drive the ratchet wheel (54).

3. The vapor deposition furnace for producing silicon carbide coated graphite trays according to claim 2, characterized in that: The turning mechanism (5) further comprises a connecting frame (57) and a non-return pawl (58), the connecting frame (57) is fixedly connected with the self-rotating frame (2), the non-return pawl (58) is rotationally connected with the connecting frame (57), and the non-return pawl (58) abuts against the ratchet teeth of the ratchet wheel (54).

4. The vapor deposition furnace for producing silicon carbide coated graphite susceptor according to claim 3, characterized in that: ​ 5. The vapor deposition furnace for producing silicon carbide coated graphite susceptor according to claim 2, characterized in that: ​ 6. The vapor deposition furnace for producing silicon carbide coated graphite trays according to claim 5, characterized in that: ​ 7. The vapor deposition furnace for producing silicon carbide coated graphite susceptor according to claim 5, wherein: The linkage assembly (56) comprises a second internal gear ring (561), a third gear (562), a bracket (563), a worm (564), and a worm wheel (565), the second internal gear ring (561) is fixedly connected with the mounting frame (11), the second internal gear ring (561) coincides with the axis of the rotation frame (2), the bracket (563) is fixedly connected with the rotation frame (2), the worm (564) is rotatably connected with the bracket (563), the third gear (562) is coaxially fixed with the worm (564), the third gear (562) is engaged with the second internal gear ring (561), the worm wheel (565) is rotatably connected with the rotation frame (2), the worm wheel (565) is engaged with the worm (564), and the worm wheel (565) is used to drive the incomplete gear (52) to rotate.

8. The vapor deposition furnace for producing silicon carbide coated graphite susceptor according to claim 7, characterized in that: The linkage assembly (56) further comprises a fourth gear (566) and a fifth gear (567), the fifth gear (567) is coaxially fixed with the worm wheel (565), the fourth gear (566) is coaxially fixed with the incomplete gear (52), and the fifth gear (567) is engaged with the fourth gear (566).

9. The vapor deposition furnace for producing silicon carbide coated graphite susceptor according to claim 1, characterized in that: The clamp (3) comprises end plates (31), fixed clamping blocks (311), movable clamping blocks (312), and clamping members (32), the end plates (31) are symmetrically arranged on both sides of the rotation frame (2) and rotatably arranged in a group, the turnover mechanism (5) is used to drive the end plates (31) to rotate, the fixed clamping block (311) is fixedly connected with one of the end plates (31), the movable clamping block (312) is slidably connected with the other end plate (31) in the direction of approaching or moving away from the fixed clamping block (311), the fixed clamping block (311) and the movable clamping block (312) are used to jointly clamp the graphite carrier disc (4), and the clamping member (32) is used to drive the movable clamping block (312) to slide.

10. The vapor deposition furnace for producing silicon carbide coated graphite susceptor according to claim 9, characterized in that: The clamping member (32) comprises a threaded sleeve (321), a screw rod (322), and a knob (323), the threaded sleeve (321) is fixedly connected with the end plate (31) corresponding to the movable clamping block (312), one end of the screw rod (322) is rotatably connected with the movable clamping block (312), the other end of the screw rod (322) extends into the threaded sleeve (321) and is threadedly connected with the threaded sleeve (321), and the knob (323) is coaxially fixed with the screw rod (322).

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