High-conductivity nano coating and detection device thereof

By designing a multilayer film structure using magnetron sputtering ion plating, the problems of low reflectivity, high conductivity, and corrosion resistance that traditional coatings cannot meet were solved, achieving high durability and adhesion of the coating.

CN121592991APending Publication Date: 2026-03-03KUNSHAN ENIJOR ELECTRONICS CO LTD
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Patent Information

Application Number
CN202511945745.X
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-12-22
Publication Date
2026-03-03

AI Technical Summary

Technical Problem

Coatings prepared by traditional coating processes cannot meet the requirements of the 3C electronics and defense industries for low reflectivity, high conductivity and corrosion resistance. Conventional high-conductivity coating materials are insufficient in terms of cost, conductivity stability or reflectivity.

Method used

A multilayer film structure was designed using magnetron sputtering ion plating, including Ti, Cr or Ni as the base layer, TiSiC as a high-conductivity and corrosion-resistant layer, and MgF as a protective layer. By adjusting the ratio of Ti, Si and C in the TiSiC coating and combining it with a multilayer alternating sputtering process, the stress gradient within the coating was gradually controlled.

Benefits of technology

It improves the adhesion and durability of the coating, prevents damage caused by stress concentration during use, and meets the requirements for high electrical conductivity and corrosion resistance.

✦ Generated by Eureka AI based on patent content.

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Abstract

The invention relates to the technical field of nano-coatings, and particularly discloses a high-conductivity nano-coating and a detection device thereof, the high-conductivity nano-coating comprises a substrate material; a base layer, a transition layer, a high-conductivity corrosion-resistant layer and a protective layer are sequentially plated on the substrate material from bottom to top; the thickness of the bottom layer is 100 nm; the thickness of the transition layer ranges from 200 nm to 500 nm. The thickness of the high-conductivity corrosion-resistant layer ranges from 200 nm to 500 nm. The thickness of the protective layer is 20-30 nm; through reasonable design of a multilayer film structure of the base layer, the transition layer, the high-conductivity corrosion-resistant layer and the protective layer, gradient gradual regulation and control of internal stress of the coating are realized in combination with a multilayer alternate sputtering coating process, the purpose of high durability of the coating is realized, and coating damage caused by stress concentration in the use process is prevented.
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Description

Technical Field

[0001] This invention relates to the field of nanocoating technology, and in particular to a highly conductive nanocoating and its detection device. Background Technology

[0002] As the requirements for low reflectivity, high conductivity, and corrosion resistance of coatings in fields such as 3C electronics and defense industries continue to increase, coatings prepared by traditional coating processes can no longer meet these requirements. The market demand for low-cost, low-reflectivity, high-conductivity, and corrosion-resistant composite nano-coatings is growing.

[0003] The adhesion and density of coatings prepared by traditional magnetron sputtering or electroplating processes in the present technology can no longer meet the requirements. Conventional high-conductivity coating materials such as Au, Ag, CrN or TiN coatings cannot meet the application requirements to varying degrees in terms of material cost, conductivity stability or reflectivity. Summary of the Invention

[0004] This application provides a highly conductive nano-coating and its detection device, which enables progressive control of the stress gradient within the coating, achieving the goal of high coating durability and preventing coating damage caused by stress concentration during use.

[0005] This application provides a highly conductive nano-coating and its detection device, which adopts the following technical solution: A highly conductive nano-coating includes a substrate material; the substrate material is sequentially coated from bottom to top with an underlayer, a transition layer, a highly conductive and corrosion-resistant layer, and a protective layer; the thickness of the underlayer is 100 nm; the thickness of the transition layer is 200-500 nm; the thickness of the highly conductive and corrosion-resistant layer is 200-500 nm; and the thickness of the protective layer is 20-30 nm.

[0006] By adopting the above technical solution and using magnetron sputtering ion plating process, a multi-layer film structure consisting of an underlayer, a transition layer, a highly conductive and corrosion-resistant layer, and a protective layer is rationally designed. Combined with a multi-layer alternating sputtering process, the stress gradient within the coating is gradually controlled, achieving the goal of high coating durability and preventing coating damage caused by stress concentration during use.

[0007] Preferably, the underlayer material is Ti, Cr, or Ni; the highly conductive and corrosion-resistant layer material is TiSiC; and the protective layer material is MgF.

[0008] By adopting the above technical solution, using Ti, Cr or Ni as the base layer, TiSiC as the high-conductivity and corrosion-resistant layer and MgF as the protective layer, the bonding force between the coating and the substrate material is improved. TiSiC material is used as the main material of the high-conductivity and corrosion-resistant composite nano-coating. The conductivity and reflectivity of the coating are controlled by adjusting the ratio of Ti, Si and C elements in the TiSiC coating.

[0009] A detection device for a highly conductive nano-coating, used for detecting the aforementioned highly conductive nano-coating, includes a test chamber; a connecting plate is rotatably connected to the inner wall of the test chamber via a rotating shaft; a storage cage for placing a test block is provided on one end face of the connecting plate; a ring is fixedly connected to the end of the storage cage away from the connecting plate; an end cap is threadedly connected to the inner wall of the ring; a driving assembly and a spraying mechanism are provided on the test chamber; the driving assembly can drive the rotating shaft to rotate; the spraying mechanism can spray a detection liquid into the test chamber.

[0010] By adopting the above technical solution, when conducting corrosion resistance testing on the test block, the test block is placed in a cage, and the end cap is screwed onto the inner wall of the ring to seal the end of the cage. Then, the test liquid is sprayed into the test chamber through a spraying mechanism, and the rotating shaft is driven by the drive component to rotate the cage, so that the test block can be evenly contacted with the test salt spray. After the salt spray has corroded the surface coating of the test block for a period of time, the test block is taken out and the corrosion condition of the surface of the test block is checked, thus completing the corrosion resistance test of the nano-coating on the surface of the test block.

[0011] Preferably, the drive assembly includes a drive motor; the drive motor is mounted on the outer wall of the test chamber, and a drive shaft is coaxially fixed to the output end of the drive motor; a first bevel gear is coaxially fixed to the end of the drive shaft; and a second bevel gear that meshes with the first bevel gear is coaxially fixed to the end of the rotating shaft near the drive shaft.

[0012] By adopting the above technical solution, the drive motor is started to drive the drive shaft to rotate. Under the meshing of the first bevel gear and the second bevel gear, the drive shaft drives the rotating shaft to rotate, so that the storage cage can drive the test block to rotate.

[0013] Preferably, a rotating shaft is coaxially rotatably arranged inside the rotating shaft; a plurality of stirring rods located in the storage cage are fixedly connected to the outer wall of one end of the rotating shaft, and a third bevel gear meshing with the first bevel gear is coaxially fixedly connected to the other end of the rotating shaft.

[0014] By adopting the above technical solution, under the meshing of the first bevel gear and the third bevel gear, the drive shaft will drive the rotating shaft to rotate during the rotation process, causing the stirring rod to push the test block in the cage to move, so as to make the test block move more disorderly in the cage, further ensuring that the salt spray and the coating on the surface of the test block are in uniform contact, thereby ensuring the accuracy of the test results and truly reflecting the corrosion resistance of the nano-coating.

[0015] Preferably, the spraying mechanism includes a spray pipe, a housing, and a pump body; the spray pipe is rotatably connected to the inner wall of the top of the test chamber via a connecting pipe, and multiple atomizing nozzles are provided on the outer wall of the spray pipe; the housing is located on the outer wall of one side of the test chamber, and multiple stock solution tanks that can communicate with the housing are provided on the top surface of the housing; the pump body is installed on the outer wall of the test chamber, and an inlet pipe communicating with the housing is provided at the pump body input end, and an outlet pipe communicating with the connecting pipe is provided at the pump body output end; a drain pipe communicating with the outside is provided on the inner wall of the bottom of the test chamber.

[0016] By adopting the above technical solution, different stock solution tanks contain different stock solution reagents. By controlling the proportion of stock solution entering the test chamber from different stock solution tanks, different test solutions can be prepared to simulate different corrosion environments. During the salt spray test, the pump is started to deliver the test solution in the test chamber to the spray pipe, and the test solution is sprayed out through the atomizing nozzle to simulate the corrosion environment in the test chamber so as to test the corrosion resistance of the coating on the surface of the test block.

[0017] Preferably, a first motor is installed on the top surface of the housing; a stirring shaft extending into the housing is coaxially fixed to the output end of the first motor; and a stirring plate is provided on the outer wall of the stirring shaft.

[0018] By adopting the above technical solution, when preparing the stock solution, the first motor can be started to drive the stirring shaft to rotate, causing the stirring plate to stir the stock solution in the tank, so that different stock solutions can be fully mixed when preparing the test solution.

[0019] Preferably, a water pump is installed on the top surface of the housing; the water pump input end is provided with an inlet pipe, and the water pump output end is provided with an outlet pipe; a tee pipe connected to a connecting pipe is provided on the top surface of the housing; the outlet end of the tee pipe extends into the connecting pipe and rotates with the inner wall of the connecting pipe, one inlet end of the tee pipe is connected to the liquid outlet pipe, and the other inlet end of the tee pipe is connected to the water outlet pipe, and a solenoid valve is provided on both inlet ends of the tee pipe.

[0020] By adopting the above technical solution, during the salt spray test, the test liquid enters the spray pipe from one inlet end of the three-way pipe. When the test chamber needs to be cleaned, the water pump can be started to transport external water from the other inlet end of the three-way pipe to the spray pipe to clean the test chamber. The three-way pipe allows for quick switching between test liquid delivery and test chamber cleaning.

[0021] Preferably, the test chamber has a drive shaft rotatably connected to the outer wall of the drive motor side, which is coaxial with the connecting pipe; a fourth bevel gear is coaxially fixed to the outer wall of the drive shaft; a fifth bevel gear meshing with the fourth bevel gear is coaxially fixed to the outer wall of the bottom end of the drive shaft; and a transmission component capable of driving the connecting pipe to rotate is provided at the top end of the drive shaft.

[0022] By adopting the above technical solution, under the meshing of the fourth and fifth bevel gears, the drive shaft will drive the transmission shaft to rotate during rotation. The transmission shaft will then drive the connecting pipe to rotate through the transmission assembly, thereby realizing the transfer of kinetic energy during the rotation of the drive shaft, causing the spray pipe to rotate so as to spray the test liquid evenly into the test chamber, creating a uniform test environment and improving the stability of the test results.

[0023] Preferably, the transmission assembly includes a first pulley, a second pulley, and a belt; the first pulley is coaxially fixed to the outer wall of the top end of the transmission shaft; the second pulley is coaxially fixed to the outer wall of the end of the connecting pipe; and the belt is sleeved on the outside of the first pulley and the second pulley.

[0024] By adopting the above technical solution, with the cooperation of the first pulley, the second pulley and the belt, the drive shaft will drive the connecting pipe to rotate during the rotation process, thereby realizing the transmission of kinetic energy during the rotation of the drive shaft.

[0025] In summary, this application has the following beneficial effects: 1. Using TiSiC material as the main material for a high-conductivity and corrosion-resistant composite nano-coating, the conductivity and reflectivity of the coating are controlled by adjusting the ratio of Ti, Si, and C elements in the TiSiC coating. A multi-layer film structure consisting of an underlayer, a transition layer, a high-conductivity and corrosion-resistant layer, and a protective layer is rationally designed. Combined with a multi-layer alternating sputtering process, the stress gradient within the coating is gradually controlled to achieve the goal of high coating durability and prevent coating damage caused by stress concentration during use. 2. When conducting corrosion resistance testing on the test block, the test block is placed in the cage and the end of the cage is sealed with an end cover plate. The spraying mechanism sprays the test liquid into the test chamber and drives the rotating shaft to rotate through the drive component, causing the cage to rotate so that the test block can be evenly contacted with the test salt spray. After the salt spray has corroded the coating on the surface of the test block for a period of time, the test block is taken out and the corrosion condition on the surface of the test block is checked, thus completing the corrosion resistance test of the nano-coating on the surface of the test block. 3. During the salt spray test, the test solution enters the spray pipe from one inlet end of the three-way pipe. When the test chamber needs to be cleaned, the water pump can be started to deliver external water from the other inlet end of the three-way pipe to the spray pipe to clean the test chamber. The three-way pipe allows for quick switching between test solution delivery and test chamber cleaning. Attached Figure Description

[0026] Figure 1 This is a schematic diagram of the structure of a highly conductive nano-coating in this application; Figure 2 This is a schematic diagram of the detection device for a highly conductive nano-coating according to this application; Figure 3 This is a schematic diagram of the internal structure of the test chamber in this application; Figure 4 This is a schematic diagram of the mating structure of the rotating shaft, the rotary shaft, and the drive assembly in this application; Figure 5 This is a schematic diagram of the mating structure of the connecting pipe and the tee pipe in this application; Figure 6 This is a schematic diagram of the internal structure of the box in this application; Figure 7 This is a schematic diagram of the transmission and engagement structure of the drive shaft, transmission shaft, and connecting pipe in this application; Explanation of reference numerals in the attached drawings: 1. Base material; 11. Underlayer; 12. Transition layer; 13. High conductivity and corrosion resistant layer; 14. Protective layer; 2. Test chamber; 21. Rotating shaft; 22. Connecting plate; 23. Rotating shaft; 24. Stirring rod; 25. Third bevel gear; 26. Drain pipe; 3. Storage cage; 31. Ring body; 32. End cover plate; 4. Drive assembly; 41. Drive motor; 42. Drive shaft; 43. First bevel gear; 44. Second bevel gear; 5. Spraying mechanism; 51 511. Spray pipe; 52. Atomizing nozzle; 53. Housing; 54. Raw material tank; 55. First motor; 56. Stirring shaft; 57. Stirring plate; 58. Pump body; 59. Inlet pipe; 50. Outlet pipe; 51. Connecting pipe; 52. T-connector; 53. Water pump; 60. Inlet pipe; 61. Outlet pipe; 72. Drive shaft; 73. Fourth bevel gear; 74. Fifth bevel gear; 75. Transmission assembly; 76. First pulley; 77. Second pulley; 78. Belt. Detailed Implementation

[0027] The present invention will be further described in detail below with reference to the accompanying drawings. Identical components are indicated by the same reference numerals. It should be noted that the terms "front," "rear," "left," "right," "upper," "lower," "bottom," and "top" used in the following description refer to directions in the drawings, while the terms "inner" and "outer" refer to directions toward or away from the geometric center of a specific component, respectively.

[0028] This invention discloses a highly conductive nano-coating, such as Figure 1 As shown, the structure includes a substrate material 1, a base layer 11, a transition layer 12, a highly conductive and corrosion-resistant layer 13, and a protective layer 14. The base layer 11 is deposited on the top surface of the substrate material 1, with a thickness of 100 nm, and the material is Ti, Cr, or Ni. The transition layer 12 is deposited on the top surface of the base layer 11, with a thickness of 350 nm. The highly conductive and corrosion-resistant layer 13 is deposited on the top surface of the transition layer 12, with a thickness of 350 nm, and the material is TiSiC. The protective layer 14 is deposited on the top surface of the highly conductive and corrosion-resistant layer 13, with a thickness of 25 nm, and the material is MgF.

[0029] TiSiC material is used as the main material for high-conductivity and corrosion-resistant composite nano-coatings. By adjusting the ratio of Ti, Si, and C elements in the TiSiC coating, the conductivity and reflectivity of the coating can be controlled. A multi-layer film structure consisting of a base layer 11, a transition layer 12, a high-conductivity and corrosion-resistant layer 13, and a protective layer 14 is rationally designed. Combined with a multi-layer alternating sputtering process, the stress gradient within the coating is gradually controlled, achieving the goal of high coating durability and preventing coating damage caused by stress concentration during use.

[0030] A detection device for a highly conductive nano-coating, such as Figure 2 , Figure 3 and Figure 4 As shown, the test chamber includes a test chamber 2, a storage cage 3, and a spraying mechanism 5. A connecting plate 22 is rotatably connected to the inner wall of the test chamber 2 via a horizontally set rotating shaft 21. The storage cage 3 is coaxially fixed to one end face of the connecting plate 22. A ring 31 is fixed to the end face of the storage cage 3 away from the connecting plate 22. A detachable end cover plate 32 is threaded onto the inner wall of the ring 31. The spraying mechanism 5 is set on the test chamber 2 and can spray test liquid into the test chamber 2 to simulate a corrosive environment.

[0031] The test block is placed in the storage cage 3, and the end cap 32 is screwed onto the inner wall of the ring 31 to seal the end of the storage cage 3. When conducting corrosion resistance testing on the test block, the test liquid is sprayed into the test chamber 2 through the spraying mechanism 5 and comes into contact with the test block. After the salt spray has corroded the surface coating of the test block for a period of time, the test block is taken out and the corrosion condition of the test block surface is checked, thus completing the corrosion resistance test of the nano-coating on the surface of the test block. like Figure 2 , Figure 3 and Figure 5 As shown, the spraying mechanism 5 includes a spray pipe 51, a housing 52, and a pump body 53. The spray pipe 51 is rotatably connected to the top wall of the test chamber 2 via a vertical connecting pipe 54. The spray pipe 51 is connected to the connecting pipe 54. Multiple atomizing nozzles 511 inclined towards the storage cage 3 are provided on the outer wall of the spray pipe 51. The housing 52 is fixed to the outer wall of one side of the test chamber 2. Multiple raw liquid tanks 521 connected to the housing 52 are fixed to the top surface of the housing 52. Each raw liquid tank 521 is provided with a valve to control the connection between the raw liquid tank 521 and the housing 52. The pump body 53 is installed on the top surface of the test chamber 2. The pump body 53 has an inlet pipe 531 connected to the housing 52 at its input end and an outlet pipe 532 connected to the connecting pipe 54 at its output end. A drain pipe 26 connected to the outside is provided on the inner wall of the bottom of the test chamber 2.

[0032] During the salt spray test, the pump body 53 is started to deliver the test liquid in the chamber 52 to the spray pipe 51, and the test liquid is sprayed out through the atomizing nozzle 511 to simulate the corrosion environment in the test chamber 2 so as to test the corrosion resistance of the coating on the surface of the test block. By controlling the proportion of the original liquid in different original liquid tanks 521 entering the chamber 52, different test liquids can be prepared so as to simulate different corrosion environments according to the test requirements.

[0033] like Figure 2 and Figure 6 As shown, a first motor 522 is vertically mounted on the top surface of the housing 52. A stirring shaft 523 extending into the housing 52 is coaxially fixed to the output end of the first motor 522. Multiple stirring plates 524 are fixed to the outer wall of the stirring shaft 523.

[0034] Starting the first motor 522 can drive the stirring shaft 523 to rotate, causing the stirring plate 524 to stir the raw liquid in the tank 52, so that different raw liquids can be fully mixed when preparing the test solution.

[0035] like Figure 3 and Figure 4As shown, a drive assembly 4 that can drive the rotating shaft 21 to rotate is provided on the outer wall of the test chamber 2. The drive assembly 4 includes a drive motor 41, a first bevel gear 43 and a second bevel gear 44. The drive motor 41 is horizontally mounted on the outer wall of the test chamber 2 on the side where the rotating shaft 21 is located. The output end of the drive motor 41 is coaxially fixed to the drive shaft 42. The first bevel gear 43 is coaxially fixed to the outer wall of the end of the drive shaft 42. The second bevel gear 44 is coaxially fixed to the outer wall of the end of the rotating shaft 21 away from the connecting plate 22. The second bevel gear 44 is linked with the first bevel gear 43. The rotating shaft 21 is coaxially rotatably provided inside the rotating shaft 21, and a plurality of stirring rods 24 located in the storage cage 3 are fixedly connected to the outer wall of one end of the rotating shaft 23. The other end of the rotating shaft 23 is coaxially fixedly connected to a third bevel gear 25 that meshes with the first bevel gear 43.

[0036] During the salt spray test, the drive motor 41 is started to drive the drive shaft 42 to rotate. Under the meshing of the first bevel gear 43 and the second bevel gear 44, the drive shaft 42 will drive the rotating shaft 21 to rotate, causing the cage 3 to rotate. Under the meshing of the first bevel gear 43 and the third bevel gear 25, the drive shaft 42 will drive the rotating shaft 23 to rotate, causing the stirring rod 24 to stir the test block, making the movement of the test block more disordered, so that the salt spray can make uniform contact with the coating on the surface of the test block, ensuring the accuracy of the test results and truly reflecting the corrosion resistance of the nano-coating.

[0037] like Figure 3 and Figure 7 As shown, a transmission shaft 7 is vertically rotatably connected to the outer wall of the test chamber 2 on the side where the drive motor 41 is located. The transmission shaft 7 is coaxial with the connecting pipe 54. A fourth bevel gear 71 is coaxially fixed to the outer wall of the drive shaft 42. A fifth bevel gear 72 that meshes with the fourth bevel gear 71 is coaxially fixed to the bottom end of the transmission shaft 7. A transmission assembly 73 that can drive the connecting pipe 54 to rotate is provided at the top end of the transmission shaft 7. The transmission assembly 73 includes a first pulley 731, a second pulley 732, and a belt 733. The first pulley 731 is coaxially fixed to the outer wall of the top end of the transmission shaft 7, and the second pulley 732 is coaxially fixed to the outer wall of the top end of the connecting pipe 54. The belt 733 is tensioned and sleeved on the outside of the first pulley 731 and the second pulley 732, and the belt 733 drives the first pulley 731 and the second pulley 732 to move together.

[0038] During rotation, the drive shaft 42 drives the transmission shaft 7 to rotate through the meshing of the fourth bevel gear 71 and the fifth bevel gear 72. The transmission shaft 7 then drives the connecting pipe 54 to rotate through the cooperation of the first pulley 731, the second pulley 732 and the belt 733, which in turn causes the spray pipe 51 to rotate so that the test liquid can be sprayed evenly. This simulates a uniform test environment for the reagent in the test chamber 2, thereby improving the stability of the test results.

[0039] like Figure 3 and Figure 5 As shown, a three-way pipe 55 is installed on the top surface of the housing 52 and inserted into the connecting pipe 54. The outlet end of the three-way pipe 55 is rotatably fitted with the inner wall of the connecting pipe 54. The end of the outlet pipe 532 away from the pump body 53 is fixed to the inlet end of the three-way pipe 55. A water pump 6 is installed on the top surface of the housing 52. The inlet pipe 61 is fixed to the input end of the water pump 6, and the outlet pipe 62 is fixed to the output end of the water pump 6. The end of the outlet pipe 62 away from the water pump 6 is fixed to the other inlet end of the three-way pipe 55 away from the inlet pipe 531. Solenoid valves for controlling the opening and closing state are installed on both inlet ends of the three-way pipe 55.

[0040] After the test is completed, the water pump 6 can be started to transport external water from the inlet end of the three-way pipe 55 to the spray pipe 51, and then spray clean water through the atomizing nozzle 511 to conveniently achieve the cleaning of the test chamber 2.

[0041] Working principle: When testing the corrosion resistance of the nano-coating, the coated test block is placed in the storage cage 3 and the end of the storage cage 3 is sealed by the end cover plate 32. Different test solutions are prepared by controlling the flow of raw liquid from different raw liquid tanks 521 into the chamber 52 to simulate different corrosion environments. During the salt spray test, the pump body 53 is started to deliver the test solution in the chamber 52 to the spray pipe 51, and the test solution is sprayed out through the atomizing nozzle 511 to simulate the corrosion environment in the test chamber 2. Then, the drive motor 41 is started to drive the drive shaft 42 to rotate, and the first bevel gear 43... With the meshing of the second bevel gear 44, the drive shaft 42 will drive the rotating shaft 21 to rotate, causing the cage 3 to rotate. With the meshing of the first bevel gear 43 and the third bevel gear 25, the drive shaft 42 will drive the rotating shaft 23 to rotate, causing the stirring rod 24 to stir the test block, making the test block move more randomly in the cage 3, so that the salt spray can make uniform contact with the coating on the surface of the test block. After the salt spray has corroded the coating on the surface of the test block for a period of time, the test block can be taken out and the corrosion condition of the surface of the test block can be checked, thus completing the corrosion resistance test of the nano-coating on the surface of the test block. During rotation, the drive shaft 42 drives the transmission shaft 7 to rotate through the meshing of the fourth bevel gear 71 and the fifth bevel gear 72. The transmission shaft 7 then drives the connecting pipe 54 to rotate through the cooperation of the first pulley 731, the second pulley 732 and the belt 733, which in turn causes the spray pipe 51 to rotate so that the test liquid can be sprayed evenly. This simulates a uniform test environment for the reagent in the test chamber 2, thereby improving the stability of the test results. After the test is completed, the water pump 6 can be started to transport external water from the inlet end of the three-way pipe 55 to the spray pipe 51, and then spray clean water through the atomizing nozzle 511 to conveniently achieve the cleaning of the test chamber 2.

[0042] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A highly conductive nano-coating, characterized in that: The substrate includes a base material (1); the base material (1) is coated with a base layer (11), a transition layer (12), a highly conductive and corrosion-resistant layer (13), and a protective layer (14) from bottom to top; the thickness of the base layer (11) is 100 nm; the thickness of the transition layer (12) is 200-500 nm; the thickness of the highly conductive and corrosion-resistant layer (13) is (200)-(500) nm; and the thickness of the protective layer (14) is 20-30 nm.

2. The highly conductive nano-coating according to claim 1, characterized in that: The base layer (11) is made of Ti, Cr or Ni; the high conductivity and corrosion resistant layer (13) is made of TiSiC; and the protective layer (14) is made of MgF.

3. A detection device for a highly conductive nano-coating, used for detecting a highly conductive nano-coating as described in any one of claims 1-2, characterized in that: The test chamber (2) includes a test chamber (2); a connecting plate (22) is rotatably connected to the inner wall of the test chamber (2) via a rotating shaft (21); a storage cage (3) for placing test blocks is provided on one end face of the connecting plate (22); a ring (31) is fixedly connected to the end of the storage cage (3) away from the connecting plate (22); an end cover plate (32) is threadedly connected to the inner wall of the ring (31); a driving assembly (4) and a spraying mechanism (5) are provided on the test chamber (2); the driving assembly (4) can drive the rotating shaft (21) to rotate; the spraying mechanism (5) can spray test liquid into the test chamber (2).

4. The detection device for a highly conductive nano-coating according to claim 3, characterized in that: The drive assembly (4) includes a drive motor (41); the drive motor (41) is mounted on the outer wall of the test chamber (2), and the output end of the drive motor (41) is coaxially fixed to a drive shaft (42); the end of the drive shaft (42) is coaxially fixed to a first bevel gear (43); the end of the rotating shaft (21) near the drive shaft (42) is coaxially fixed to a second bevel gear (44) that meshes with the first bevel gear (43).

5. The detection device for a highly conductive nano-coating according to claim 4, characterized in that: A rotating shaft (23) is coaxially arranged inside the rotating shaft (21) and passes through the rotating shaft (21); a plurality of stirring rods (24) located in the storage cage (3) are fixedly connected to the outer wall of one end of the rotating shaft (21), and a third bevel gear (25) that meshes with the first bevel gear (43) is coaxially fixed to the other end of the rotating shaft (23).

6. The detection device for a highly conductive nano-coating according to claim 4, characterized in that: The spraying mechanism (5) includes a spray pipe (51), a housing (52), and a pump body (53); the spray pipe (51) is rotatably connected to the inner wall of the top of the test chamber (2) through a connecting pipe (54), and multiple atomizing nozzles (511) are provided on the outer wall of the spray pipe (51); the housing (52) is located on the outer wall of one side of the test chamber (2), and multiple raw liquid tanks (521) that can communicate with the housing (52) are provided on the top surface of the housing (52); the pump body (53) is installed on the outer wall of the test chamber (2), and an inlet pipe (531) that communicates with the housing (52) is provided at the input end of the pump body (53), and an outlet pipe (532) that communicates with the connecting pipe (54) is provided at the output end of the pump body (53); a drain pipe (26) that can communicate with the outside is provided on the inner wall of the bottom end of the test chamber (2).

7. The detection device for a highly conductive nano-coating according to claim 6, characterized in that: A first motor (522) is installed on the top surface of the box (52); a stirring shaft (523) extending into the box (52) is coaxially fixed to the output end of the first motor (522); a stirring plate (524) is provided on the outer wall of the stirring shaft (523).

8. The detection device for a highly conductive nano-coating according to claim 6, characterized in that: A water pump (6) is installed on the top surface of the housing (52); the water pump (6) has an inlet pipe (61) at its input end and an outlet pipe (62) at its output end; a three-way pipe (55) connected to the connecting pipe (54) is installed on the top surface of the housing (52); the outlet end of the three-way pipe (55) extends into the connecting pipe (54) and rotates with the inner wall of the connecting pipe (54); one inlet end of the three-way pipe (55) is connected to the liquid outlet pipe (532), and the other inlet end of the three-way pipe (55) is connected to the water outlet pipe (62); a solenoid valve is installed on both inlet ends of the three-way pipe (55).

9. The detection device for a highly conductive nano-coating according to claim 6, characterized in that: The test chamber (2) has a drive shaft (7) rotatably connected to the outer wall of the drive motor (41) on the side coaxial with the connecting pipe (54); a fourth bevel gear (71) is coaxially fixed to the outer wall of the drive shaft (42); a fifth bevel gear (72) meshing with the fourth bevel gear (71) is coaxially fixed to the outer wall of the bottom end of the drive shaft (7); and a transmission assembly (73) that can drive the connecting pipe (54) to rotate is provided at the top end of the drive shaft (7).

10. The detection device for a highly conductive nano-coating according to claim 9, characterized in that: The transmission assembly (73) includes a first pulley (731), a second pulley (732), and a belt (733); the first pulley (731) is coaxially fixed to the outer wall of the top end of the transmission shaft (7); the second pulley (732) is coaxially fixed to the outer wall of the end of the connecting pipe (54); the belt (733) is sleeved on the outside of the first pulley (731) and the second pulley (732).