Mounting structure, lighting system and exposure equipment

Abstract

The invention provides a mounting structure, a lighting system and exposure equipment, the mounting structure comprises a first mounting assembly fixed on a bottom plate, a second mounting assembly movably arranged on the bottom plate, and a flexible connecting piece connecting the first mounting assembly and the second mounting assembly, the first mounting assembly clamps one end of a dodging rod, and the second mounting assembly clamps the other end of the dodging rod. The second installation assembly clamps the other end of the light uniformizing rod, and the equivalent rigidity of the flexible connecting piece is smaller than the clamping rigidity of the first installation assembly and smaller than the clamping rigidity of the second installation assembly. Therefore, when the light homogenizing rod generates thermal deformation due to the change of the environment temperature caused by illumination in the illumination system, the light homogenizing rod can be ensured to generate thermal deformation only in the direction from the first mounting assembly to the second mounting assembly through the single-degree-of-freedom characteristic (namely, the flexible deformation in the axial direction of the light homogenizing rod) of the flexible connecting piece; the light-emitting surface on the light-homogenizing rod is prevented from deviating after thermal deformation, and the working index of the lighting system is ensured.

Description

Technical Field

[0001] This invention relates to the field of optical technology, and in particular to an installation structure, an illumination system, and an exposure device. Background Technology

[0002] In the lighting system of exposure equipment, a light-diffusing rod (such as a quartz rod) is often used as an optical element to uniform the light beam emitted from a high-power light source. The positional accuracy of the light-diffusing rod is required to be high, and the light-diffusing rod operates in a thermal environment with fluctuating ambient temperature. Therefore, during the exposure process, the light-diffusing rod is prone to thermal expansion and contraction due to temperature changes, which causes axial expansion and contraction of the light-diffusing rod. Over time, the light-diffusing rod is prone to creep and deviate from its original position, resulting in the entire optical path shift and seriously affecting the lighting effect of the lighting system. Summary of the Invention

[0003] The purpose of this invention is to provide an installation structure, a lighting system, and an exposure device to solve the problem that the position of the light-diffusing rod in the lighting system is easily deviated due to temperature changes, which leads to optical path deviation and ultimately affects the working performance of the lighting system.

[0004] To solve the above-mentioned technical problems, based on the first aspect of the present invention, the present invention provides an installation structure for mounting on a base plate, the installation structure comprising:

[0005] A first mounting assembly fixed to the base plate, the first mounting assembly being used to clamp one end of the light-diffusing rod;

[0006] A second mounting assembly is movably disposed on the base plate, the second mounting assembly being used to clamp the other end of the light-diffusing rod;

[0007] A flexible connector is provided, through which the first mounting assembly and the second mounting assembly are connected;

[0008] The equivalent stiffness of the flexible connector is less than the clamping stiffness of the first mounting component and less than the clamping stiffness of the second mounting component.

[0009] Optionally, the end of the first mounting component facing the second mounting component is connected to one end of the flexible connector, and the end of the second mounting component facing the first mounting component is connected to the other end of the flexible connector.

[0010] Optionally, the first mounting component includes a fixed base and a first clamping member disposed on the fixed base, and the second mounting component includes a movable base and a second clamping member disposed on the movable base. The movable base is movable relative to the fixed base, and the fixed base and the movable base are connected by the flexible connector. The first clamping member is used to clamp one end of the light-diffusing rod, and the second clamping member is used to clamp the other end of the light-diffusing rod.

[0011] Optionally, both the first clamping member and the second clamping member are flexible components.

[0012] Optionally, the first mounting component further includes a first position adjustment member, and the second mounting component further includes a second position adjustment member. The first clamping member is connected to the fixed base through the first position adjustment member, and the second clamping member is connected to the movable base through the second position adjustment member.

[0013] The first position adjustment member is configured to deform under pressure to adjust the tilting posture of the fixed base relative to the first direction, and the second position adjustment member is configured to deform under pressure to adjust the tilting posture of the movable base relative to the second direction; or, the first position adjustment member is configured to deform under pressure to adjust the tilting posture of the fixed base relative to the second direction, and the second position adjustment member is configured to deform under pressure to adjust the tilting posture of the movable base relative to the first direction.

[0014] Wherein, the first direction is parallel to the relative movement direction between the second mounting component and the first mounting component, the second direction is perpendicular to the first direction, and the second direction is parallel to the base plate.

[0015] Optionally, the first position adjusting member has a first groove at both ends along the first direction, the recess direction of the first groove is along the first direction, and the first groove passes through the first position adjusting member along the second direction; the second position adjusting member has a second groove at both ends along the second direction, the recess direction of the second groove is along the second direction, and the second groove passes through the second position adjusting member along the first direction.

[0016] Alternatively, the first groove is recessed in the direction of the second direction, the first groove passes through the first position adjustment member in the first direction, the second groove is recessed in the direction of the first direction, and the second groove passes through the second position adjustment member in the second direction.

[0017] Optionally, the number of the first clamping members is one or more, and the number of the second clamping members is one or more.

[0018] Optionally, the flexible connector includes a cylindrical body and a connecting body housed within the cylindrical body. The two ends of the cylindrical body are respectively connected to the first mounting component and the second mounting component. The connecting body includes multiple elastic sheets connected in sequence.

[0019] Optionally, the number of light-gathering rods used for clamping is greater than or equal to two, and the mounting structure further includes a third mounting component, the third mounting component is fixed on the base plate, the number of the second mounting components is at least two, and the first mounting component, at least two second mounting components and the third mounting component are arranged sequentially along the moving direction of the second mounting components;

[0020] The two adjacent second mounting components are connected by the flexible connector. The second mounting component closest to the third mounting component is the remote mounting component. The remote mounting component and the third mounting component are connected by the flexible connector. The second mounting component between the remote mounting component and the first mounting component is used to clamp the two adjacent light-diffusing rods.

[0021] Optionally, along the direction from the third mounting component toward the first mounting component, the equivalent stiffness of each of the flexible connectors increases sequentially.

[0022] Based on a second aspect of the invention, the invention also provides a lighting system comprising:

[0023] Base plate;

[0024] As described above, the mounting structure is mounted on the base plate;

[0025] A light-diffusing rod, which is held by a first mounting component and a second mounting component of the mounting structure.

[0026] Optionally, the number of light-diffusing rods is at least two, and they are arranged sequentially along the axial direction. The mounting structure further includes a third mounting component, which is fixed on the base plate. The number of second mounting components is at least two, and the first mounting component, at least two second mounting components, and the third mounting component are arranged sequentially along the moving direction of the second mounting components.

[0027] Two adjacent second mounting components are connected by the flexible connector. The second mounting component closest to the third mounting component is the remote mounting component. The remote mounting component and the third mounting component are connected by the flexible connector. The second mounting component between the remote mounting component and the first mounting component clamps two adjacent light-diffusing rods.

[0028] Based on a third aspect of the invention, the invention also provides an exposure apparatus comprising the aforementioned illumination system.

[0029] With the above installation structure, when the ambient temperature changes due to illumination in the lighting system cause thermal deformation of the light-diffusing rod, the equivalent stiffness of the flexible connector is less than the clamping stiffness of the first mounting component and less than the clamping stiffness of the second mounting component. Based on the setting relationship between the first and second mounting components and the base plate, the single-degree-of-freedom characteristic of the flexible connector (i.e., flexible deformation in the axial direction of the light-diffusing rod) ensures that the light-diffusing rod will only undergo thermal deformation along the direction from the first mounting component to the second mounting component. This avoids the light-emitting surface of the light-diffusing rod shifting after thermal deformation, minimizes light path shift, ensures the working performance of the lighting system, and improves the stability of the lighting system.

[0030] It should be noted that since the exposure equipment and the lighting system include the mounting structure, they also have the technical effects brought about by the mounting structure, which will not be repeated here. Attached Figure Description

[0031] Those skilled in the art will understand that the accompanying drawings are provided to better understand the invention and do not constitute any limitation on the scope of the invention. Wherein:

[0032] Figure 1 This is a schematic diagram of an exposure apparatus according to an embodiment of the present invention;

[0033] Figure 2 This is a schematic diagram of a lighting system according to an embodiment of the present invention;

[0034] Figure 3 This is a schematic diagram of the installation structure according to an embodiment of the present invention;

[0035] Figure 4 This is a schematic diagram of a first mounting component (or a second mounting component) according to an embodiment of the present invention;

[0036] Figure 5 This is a schematic diagram of a flexible connector according to an embodiment of the present invention;

[0037] Figure 6 This is another schematic diagram of the installation structure according to an embodiment of the present invention.

[0038] In the attached image:

[0039] IL - Illumination system; RS - Mask stage; WS - Workpiece stage; PO - Projection lens system; R - Mask plate;

[0040] 10-First mounting component; 11-Fixed base; 12-First clamping component; 13-First position adjusting component; 130-First groove;

[0041] 20 - Second mounting component; 21 - Movable base; 22 - Second clamping element; 200 - Remote mounting component;

[0042] 30 - Flexible connector; 31 - Cylinder body; 32 - Elastic sheet;

[0043] 40-Uniformity rod;

[0044] 50 - Third installation component. Detailed Implementation

[0045] To make the objectives, advantages, and features of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be noted that the drawings are all in a very simplified form and are not drawn to scale, and are only used to facilitate and clarify the explanation of the embodiments of this invention. Furthermore, the structures shown in the drawings are often part of the actual structures. In particular, different figures may emphasize different aspects and may sometimes use different scales.

[0046] As used in this invention, the singular forms “a,” “an,” and “the” include plural objects; the term “or” is generally used to mean “and / or”; the term “a number” is generally used to mean “at least one”; and the term “at least two” is generally used to mean “two or more”. Furthermore, the terms “first,” “second,” and “third” are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as “first,” “second,” or “third” may explicitly or implicitly include one or at least two of that feature. “One end” and “the other end,” as well as “proximal end” and “distal end,” generally refer to two corresponding parts, including not only endpoints. The terms “installed,” “connected,” and “joined” should be interpreted broadly, for example, as a fixed connection, a detachable connection, or an integral part; a mechanical connection or an electrical connection; a direct connection or an indirect connection through an intermediate medium; or a connection within two elements or an interaction between two elements. Furthermore, as used in this invention, the phrase "one element is disposed on another element" generally only indicates that there is a connection, coupling, cooperation, or transmission relationship between the two elements, and the connection, coupling, cooperation, or transmission between the two elements can be direct or indirect through an intermediate element. It should not be construed as indicating or implying a spatial positional relationship between the two elements, i.e., one element can be located arbitrarily inside, outside, above, below, or to one side of the other element, unless otherwise explicitly stated. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0047] Figure 1 This is a schematic diagram of an exposure apparatus according to an embodiment of the present invention. (See attached diagram.) Figure 1 The exposure equipment includes an illumination system IL, a mask stage RS, a workpiece stage WS, a projection lens system PO, and a mask R. Each part is described below.

[0048] The illumination system IL is used to adjust the light beam B to a suitable illumination beam onto the mask R. The illumination system IL includes various optical elements, optomechanical components, and adjustment and control mechanisms. The homogenizing rod 30 (e.g., a quartz rod) of the illumination system IL is used for homogenization. The light-emitting surface of the homogenizing rod 40 provides the object surface for illumination, significantly affecting the operating parameters of the illumination system (such as illuminance, uniformity, NA, and field of view). Therefore, the exposure equipment must ensure stable positional accuracy and reliability of the homogenizing rod 40 during the exposure process. However, the homogenizing rod 40 operates in a thermal environment with fluctuating ambient temperatures, making it prone to slight movements due to thermal expansion and contraction. Over time, this can lead to creep, compromising the positional stability of the homogenizing rod 40 and severely impacting the operating parameters of the illumination system. Therefore, the structure used to hold and mount the homogenizing rod 40 is particularly important.

[0049] The mask stage RS is used to support and clamp the fixed mask R, allowing the mask R to be precisely moved to the working position. The mask R is used to adjust the beam B to the desired pattern. The fixing and clamping method can be mechanical, vacuum adsorption, etc. Depending on the needs of the exposure process, the mask stage RS can be fixed or movable. For structures that support multiple mask Rs, their poses can be controlled independently.

[0050] The mask R can adjust the beam into the desired pattern. The mask R can be transmissive, reflective, or arranged in an array.

[0051] The workpiece stage WS is used to support the substrate W and move the substrate W precisely to the corresponding working position. The workpiece stage WS can clamp and fix the substrate W by vacuum adsorption. The workpiece stage WS is usually movable and moves to the corresponding position to complete the loading / unloading of the substrate W, measurement and exposure processes.

[0052] The substrate W typically needs to be coated with a photosensitive material to chemically react with a light beam and distinguish between patterns that need to be retained or removed. The substrate W can be composed of silicon wafers or compound materials.

[0053] The projection lens system PO is used to project the pattern of beam B onto substrate W. The projection lens system PO may include various optical elements, optomechanical components, and adjustment control mechanisms for transferring a pattern from a mask R onto substrate W. The pattern on mask R may differ from the pattern on substrate W, and its size is typically reduced. The optical elements can project the pattern onto substrate W through transmission or reflection, and the medium between the optical elements can be air, water, or other light-transmitting media.

[0054] Furthermore, the exposure equipment can have two or more workpiece stages (WS) to simultaneously complete multiple exposure processes. Alternatively, the exposure equipment can have multiple illumination systems (IL), photomasks (R), and projection lens systems (PO), which are then stitched together to form a complete pattern.

[0055] The exposure equipment can have at least one of two working modes. One is the stepping mode, in which the mask R and the substrate W remain stationary during pattern projection, and the beam projects the pattern onto the substrate W in one go. The other is the scanning mode, in which the mask R and the substrate W are moved by the mask stage RS and the workpiece stage WS respectively during the pattern projection process. The pattern projected at each moment is a part of the complete pattern, and a complete scan forms a complete pattern.

[0056] Figure 2 This is a schematic diagram of a lighting system according to an embodiment of the present invention. (See attached diagram.) Figure 2 The illumination system IL comprises a light source unit, a coupling unit, a homogenizing unit, and a relay unit. The light source unit uses an ellipsoidal mirror and a plane mirror structure. The mercury lamp is placed at one focal point of the ellipsoidal mirror. Light emitted from the light source passes through the ellipsoidal and plane mirrors and converges at the other focal point of the ellipsoid, achieving light energy collection. The coupling unit's function is to ensure that as much light emitted from the light source as possible enters the homogenizing system and provides a certain range of illumination (NA) for subsequent optical paths. The homogenizing unit's function is to thoroughly and uniformly mix the beam provided by the focusing unit, resulting in a highly uniform light intensity distribution within the illumination field of view on the mask, thus providing a uniform object surface of suitable size for the relay lens group. The relay unit is a key component of the illumination system. It transmits the uniform object-side illumination surface with a certain field of view and NA obtained by VS cutting to the mask through a certain optical transformation, resulting in an image-side uniform illumination surface on the mask where both the field of view and NA meet the objective lens input conditions.

[0057] Figure 3 This is a schematic diagram of an installation structure according to an embodiment of the present invention. (See attached diagram.) Figure 3The lighting system IL also includes a mounting structure and a base plate (not shown). The mounting structure is mounted on the base plate and is used to assemble and disassemble the light-diffusing rod 40. The mounting structure includes a first mounting component 10, a second mounting component 20, and a flexible connector 30. The first mounting component 10 is fixed to the base plate and is used to clamp one end of the light-diffusing rod 40. The second mounting component 20 is movably mounted on the base plate, allowing movement relative to the first mounting component 10. The second mounting component 20 is used to clamp the other end of the light-diffusing rod 40. Understandably, the direction of movement of the second mounting component 20 is along the axial direction of the light-diffusing rod 40. In addition, a guide structure is provided on the base plate, and the second mounting component 20 is connected to the base plate through the guide structure. The guide structure can be, for example, a pulley and a slide rail. The slide rail is mounted on the base plate, and the pulley can slide on the slide rail. The pulley is connected to the second mounting component 20. The first mounting component 10 and the second mounting component 20 are connected by a flexible connector 30. For example, one end of the first mounting component 10 facing the second mounting component 20 can be connected to one end of the flexible connector 30, and the other end of the second mounting component 20 facing the first mounting component 10 can be connected to the other end of the flexible connector 30. It should be noted that the flexible connector 30 can undergo flexible deformation in the axial direction of the light-diffusing rod 40. The equivalent stiffness of the flexible connector 30 is less than the clamping stiffness of the first mounting component 10, and the equivalent stiffness of the flexible connector 30 is less than the clamping stiffness of the second mounting component 20.

[0058] With the above installation structure, when the ambient temperature changes due to illumination in the lighting system cause thermal deformation of the light-diffusing rod 40, the equivalent stiffness of the flexible connector 30 is less than the clamping stiffness of the first mounting component 10 and less than the clamping stiffness of the second mounting component 20. Furthermore, based on the respective arrangement relationships between the first and second mounting components 10 and the base plate, the single-degree-of-freedom characteristic of the flexible connector 30 (i.e., flexible deformation along the axial direction of the light-diffusing rod) ensures that the light-diffusing rod 40 will only undergo thermal deformation along the direction from the first mounting component 10 to the second mounting component 20. This prevents the light-emitting surface of the light-diffusing rod 40 from shifting after thermal deformation, minimizing light path deviation, ensuring the operating performance of the lighting system, and improving its stability. Moreover, when the temperature within the lighting system decreases, the light-diffusing rod 40 contracts axially, and the flexible connector 30 can also apply force to pull the second mounting component 20 back.

[0059] Furthermore, the first mounting assembly 10 includes a fixed base 11 and a first clamping member 12 disposed on the fixed base 11, and the second mounting assembly 20 includes a movable base 21 and a second clamping member 22 disposed on the movable base 21. The movable base 21 is movably disposed on the base plate, and the fixed base 11 is fixed on the base plate, thereby enabling the movable base 21 to move relative to the fixed base 11. The fixed base 11 and the movable base 21 are connected by a flexible connector 30. The first clamping member 12 is used to clamp one end of the light-diffusing rod 40, and the second clamping member 22 is used to clamp the other end of the light-diffusing rod 40. Optionally, the number of first clamping members 12 and the number of second clamping members 22 can be one or more.

[0060] Preferably, both the first clamping member 12 and the second clamping member 22 are flexible components. That is, both the first clamping member 12 and the second clamping member 22 flexibly clamp the light-diffusing rod 40, which can effectively absorb the radial thermal deformation of the light-diffusing rod 40.

[0061] Figure 4 This is a schematic diagram of a first mounting component (or a second mounting component) according to an embodiment of the present invention. See also... Figure 4 Preferably, the first mounting assembly 10 further includes a first position adjustment member 13, and the second mounting assembly 20 further includes a second position adjustment member. The first clamping member 12 is connected to the fixed base 11 via the first position adjustment member 13, and the second clamping member 22 is connected to the movable base 21 via the second position adjustment member. The first position adjustment member 13 is configured to adjust the tilting posture of the fixed base 11 relative to a first direction by compressive deformation, and the second position adjustment member is configured to adjust the tilting posture of the movable base 21 relative to a second direction by compressive deformation. The first direction is parallel to the relative movement direction between the second mounting assembly 20 and the first mounting assembly 10 (i.e., the first direction is parallel to the axial direction of the light-diffusing rod 40), and the second direction is perpendicular to the first direction and parallel to the base plate. Alternatively, the first position adjustment member 13 can be configured to adjust the tilting posture of the fixed base 11 relative to the second direction by compressive deformation, and the second position adjustment member can be configured to adjust the tilting posture of the movable base 21 relative to the first direction by compressive deformation. Thus, when the orientation of the light-diffusing rod 40 relative to the base plate changes (e.g., tilting), including changes in orientation relative to the base plate in the first direction and changes in orientation relative to the base plate in the second direction, one of the two position adjustment members will be subjected to a further force applied by the light-diffusing rod 40 and will be deformed under pressure. This will reduce the tilting error between the first clamping member 12 and the second clamping member 22, ensuring that the two clamping members can always clamp the light-diffusing rod 40.

[0062] Regarding the structural configuration of the two position adjustment members, as an example, the first position adjustment member 13 has a first groove 130 at both ends along the first direction, the recess direction of the first groove 130 is along the first direction, and the first groove 130 penetrates the first position adjustment member 13 along the second direction; the second position adjustment member has a second groove at both ends along the second direction, the recess direction of the second groove is along the second direction, and the second groove penetrates the second position adjustment member along the first direction. Alternatively, the recess direction of the first groove 130 is along the second direction, the first groove 130 penetrates the first position adjustment member 13 along the first direction, the recess direction of the second groove is along the first direction, and the second groove penetrates the second position adjustment member along the second direction. That is, both the first groove 130 and the second groove are U-shaped, with the opening of one facing along the first direction and the opening of the other facing along the second direction.

[0063] Taking the example where the first groove 130 is recessed along the first direction and the second groove is recessed along the second direction, when the light-diffusing rod 40 is tilted relative to the base plate in the first direction, the opening of the first groove 130 on one side will increase, and the opening of the first groove 130 on the other side will decrease, thereby absorbing the tilting error of the light-diffusing rod 40 in the first direction. When the light-diffusing rod 40 is tilted relative to the base plate in the second direction, the opening of the second groove on one side will increase, and the opening of the second groove on the other side will decrease, thereby absorbing the tilting error of the light-diffusing rod 40 in the second direction.

[0064] Figure 5 This is a schematic diagram of a flexible connector according to an embodiment of the present invention. (See attached diagram.) Figure 5 The flexible connector 30 includes a cylindrical body 31 and a connecting body housed within the cylindrical body 31. The two ends of the cylindrical body 31 are respectively connected to a first mounting component 10 and a second mounting component 20, specifically connecting a fixed base 11 and a movable base 21. The connecting body includes multiple elastic sheets 32 connected in sequence. The flexible connector 30 achieves its flexible function through the sequentially connected elastic sheets 32, thereby realizing its single-degree-of-freedom characteristic. The connecting body can be formed using a wire cutting process.

[0065] Figure 6 This is another schematic diagram of the installation structure according to an embodiment of the present invention. (See attached diagram.) Figure 6The mounting structure includes at least two light-diffusing rods 40, arranged sequentially along the axial direction, with a gap between adjacent light-diffusing rods 40. The mounting structure also includes a third mounting component 50, which is fixed to the base plate. At least two second mounting components 20 are also included, arranged sequentially along the moving direction of the first mounting component 10, i.e., along the axial direction of the light-diffusing rods 40. Adjacent second mounting components 20 are connected by flexible connectors 30. The second mounting component 20 closest to the third mounting component 50 is the distal mounting component 200, which is connected to the third mounting component 50 by the flexible connectors 30. The second mounting component 20 between the distal mounting component 200 and the first mounting component 10 clamps two adjacent light-diffusing rods 40, meaning that the ends of two adjacent light-diffusing rods 40 closest to each other are clamped by the same second mounting component 20, ensuring that the two adjacent light-diffusing rods 40 do not contact each other due to axial thermal deformation. Thus, for a beam-uniforming rod module formed by multiple beam-uniforming rods 40 connected in series axially, the axial thermal deformation of the beam-uniforming rod module can be absorbed by the aforementioned third mounting component 50, flexible connectors 30, and shared second mounting component 20. This ensures that the displacement of the ends and outlet positions of adjacent beam-uniforming rods 40 is close to zero, effectively preventing the beam-uniforming rod module from creeping. It should be noted that the light-emitting position of the beam-uniforming rod module is close to the first mounting component 10, and the equivalent stiffness of each flexible connector 30 increases sequentially along the direction from the third mounting component 50 towards the first mounting component 10. In practical applications, the total stiffness of the multiple flexible connectors 30 connected in series axially with the beam-uniforming rods 40 should not be set too low. The specific stiffness can be configured according to actual conditions to avoid insufficient transport and maintenance performance of the product.

[0066] While the present invention has been disclosed above with reference to preferred embodiments, these embodiments are not intended to limit the invention. For any person skilled in the art, many possible variations and modifications can be made to the technical solutions of the present invention based on the disclosed technical content, or equivalent embodiments can be modified accordingly, without departing from the scope of the present invention. Therefore, any simple modifications, equivalent changes, and modifications made to the above embodiments based on the technical essence of the present invention, without departing from the content of the present invention, shall still fall within the scope of protection of the present invention.

Claims

1. An mounting structure for mounting on a base plate, characterized in that, include: A first mounting assembly fixed to the base plate, the first mounting assembly being used to clamp one end of the light-diffusing rod; A second mounting assembly is movably disposed on the base plate, the second mounting assembly being used to clamp the other end of the light-diffusing rod; A flexible connector is provided, through which the first mounting assembly and the second mounting assembly are connected; The equivalent stiffness of the flexible connector is less than the clamping stiffness of the first mounting component and less than the clamping stiffness of the second mounting component.

2. The installation structure according to claim 1, characterized in that, The first mounting component includes a fixed base and a first clamping member disposed on the fixed base. The second mounting component includes a movable base and a second clamping member disposed on the movable base. The movable base is movable relative to the fixed base. The fixed base and the movable base are connected by the flexible connector. The first clamping member is used to clamp one end of the light-diffusing rod, and the second clamping member is used to clamp the other end of the light-diffusing rod. Both the first clamping member and the second clamping member are flexible components.

3. The installation structure according to claim 2, characterized in that, The first mounting assembly further includes a first position adjustment member, and the second mounting assembly further includes a second position adjustment member. The first clamping member is connected to the fixed base through the first position adjustment member, and the second clamping member is connected to the movable base through the second position adjustment member. The first position adjustment member is configured to deform under pressure to adjust the tilting posture of the fixed base relative to the first direction, and the second position adjustment member is configured to deform under pressure to adjust the tilting posture of the movable base relative to the second direction; or, the first position adjustment member is configured to deform under pressure to adjust the tilting posture of the fixed base relative to the second direction, and the second position adjustment member is configured to deform under pressure to adjust the tilting posture of the movable base relative to the first direction. Wherein, the first direction is parallel to the relative movement direction between the second mounting component and the first mounting component, the second direction is perpendicular to the first direction, and the second direction is parallel to the base plate.

4. The installation structure according to claim 3, characterized in that, The first position adjusting member has a first groove at both ends along the first direction, the recess direction of the first groove is along the first direction, and the first groove passes through the first position adjusting member along the second direction; the second position adjusting member has a second groove at both ends along the second direction, the recess direction of the second groove is along the second direction, and the second groove passes through the second position adjusting member along the first direction. Alternatively, the first groove is recessed in the direction of the second direction, the first groove passes through the first position adjustment member in the first direction, the second groove is recessed in the direction of the first direction, and the second groove passes through the second position adjustment member in the second direction.

5. The installation structure according to claim 2, characterized in that, The number of the first clamping members is one or more, and the number of the second clamping members is one or more.

6. The installation structure according to claim 1, characterized in that, The flexible connector includes a cylindrical body and a connecting body housed within the cylindrical body. The two ends of the cylindrical body are respectively connected to the first mounting component and the second mounting component. The connecting body includes multiple elastic sheets connected in sequence.

7. The installation structure according to claim 1, characterized in that, The number of clamping rods is greater than or equal to two, and the mounting structure further includes a third mounting component. The third mounting component is fixed on the base plate. The number of the second mounting components is at least two, and the first mounting component, at least two second mounting components, and the third mounting component are arranged sequentially along the moving direction of the second mounting components. The two adjacent second mounting components are connected by the flexible connector. The second mounting component closest to the third mounting component is the remote mounting component. The remote mounting component and the third mounting component are connected by the flexible connector. The second mounting component between the remote mounting component and the first mounting component is used to clamp the two adjacent light-diffusing rods.

8. The installation structure according to claim 7, characterized in that, Along the direction from the third mounting component toward the first mounting component, the equivalent stiffness of each of the flexible connectors increases sequentially.

9. A lighting system, characterized in that, It includes a base plate, a light-diffusing rod, and the mounting structure according to any one of claims 1-8.

10. The lighting system according to claim 11, characterized in that, The number of light-diffusing rods is at least two, and they are arranged sequentially along the axis. The mounting structure also includes a third mounting component, which is fixed on the base plate. The number of second mounting components is at least two, and the first mounting component, at least two second mounting components, and the third mounting component are arranged sequentially along the moving direction of the second mounting components. Two adjacent second mounting components are connected by the flexible connector. The second mounting component closest to the third mounting component is the remote mounting component. The remote mounting component and the third mounting component are connected by the flexible connector. The second mounting component between the remote mounting component and the first mounting component clamps two adjacent light-diffusing rods.

11. An exposure apparatus, characterized in that, Includes the lighting system described in claim 9 or 10.

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