Spray device and spray system for cleaning strip material

Abstract

The application provides a spraying device and a spraying system for cleaning strip material. The spraying device comprises: a first spraying device arranged above the strip material along the direction of gravity; and a second spraying device arranged below the strip material along the direction of gravity. The first spraying device and the second spraying device each comprise: a barrel portion having a liquid inlet and a liquid outlet, wherein the liquid inlet is used for entering cleaning liquid; a spraying head rotatably connected to the barrel portion, wherein the inlet of the spraying head is in communication with the liquid outlet, and the spraying head has a plurality of spraying ports; and a rotating assembly rotatably connected to the inner wall of the barrel portion at one end and facing the liquid inlet, and fixedly connected to the spraying head at the other end, wherein the rotating assembly is configured to rotate under the action of the cleaning liquid and drive the spraying head to rotate. The first design pressure of the cleaning liquid entering the first spraying device is less than the second design pressure of the cleaning liquid entering the second spraying device. The application can improve the consistency of the spraying range of the upper and lower sides of the strip material.

Description

Technical Field

[0001] This invention relates to the field of semiconductor device manufacturing technology, and more specifically, to a spraying device and spraying system for cleaning strips. Background Technology

[0002] In the field of semiconductor device manufacturing technology, metal masks are often used to manufacture various film layers. Metal masks are generally made from metal strips, and the metal strips need to be cleaned during the manufacturing process. Generally, the strip has a certain planar area, and the spraying device has a certain spraying range. By setting multiple spraying devices on both the top and bottom sides of the strip, both sides of the strip can be thoroughly cleaned.

[0003] Currently, the spraying devices installed on both the upper and lower sides of the strip are identical, meaning that the spraying range is fixed under the same environmental conditions and cannot be adjusted. However, due to the influence of gravity, the spraying range of the spraying devices on the upper and lower sides of the strip is not the same, resulting in uneven spraying coverage.

[0004] Specifically, the cleaning fluid (such as water or detergent) sprayed by the spraying device above the strip has a certain pressure to obtain a certain initial velocity. Then, under the influence of gravity, it gains kinetic energy, resulting in a faster spraying speed. It reaches the strip surface before it can spread out, resulting in a smaller spraying range and causing excessive impact on the strip. The spraying device below the strip, while having a certain initial velocity, is affected by anti-gravity, resulting in a slower spraying speed. This helps to expand the spraying range, leading to inconsistent spraying ranges between the upper and lower parts. This affects the cleaning effect of the strip and reduces the manufacturing efficiency of the metal mask. Summary of the Invention

[0005] This invention provides a spraying device and spraying system for cleaning strip materials, in order to solve the following technical problems existing in related technologies:

[0006] (1) Due to the influence of gravity, the spraying range of the spraying devices on the upper and lower sides of the strip is not the same. (2) The spraying range of the spraying device above the strip is smaller due to the influence of gravity, which causes excessive impact on the strip.

[0007] In a first aspect, embodiments of this application provide a spraying device for cleaning strip materials, comprising:

[0008] The first spraying device is used to be positioned above the strip along the direction of gravity;

[0009] The second spraying device is used to be positioned below the strip along the direction of gravity;

[0010] Both the first spray device and the second spray device include:

[0011] The cylindrical section has a liquid inlet and a liquid outlet, with the liquid inlet used to introduce cleaning solution.

[0012] The spray head is rotatably connected to the cylinder, and the inlet and outlet of the spray head are connected. The spray head has multiple spray nozzles.

[0013] The rotating component has one end rotatably connected to the inner wall of the cylinder and facing the liquid inlet, and the other end fixedly connected to the spray head. The rotating component is configured to rotate under the action of the cleaning liquid and drive the spray head to rotate.

[0014] The first design pressure of the cleaning fluid entering the first spray device is less than the second design pressure of the cleaning fluid entering the second spray device.

[0015] In some embodiments, the difference between the second design pressure and the first design pressure is not less than 0.5 bar and not more than 1.5 bar.

[0016] In some embodiments, the first spray device further includes: a guide vane;

[0017] In the first spraying device, the guide plate is rotatably installed at the liquid outlet of the cylinder;

[0018] One side of the baffle plate faces the liquid inlet, and the other side faces the spray nozzle;

[0019] The direction of rotation of the baffle is opposite to the direction of rotation of the spray head.

[0020] In some embodiments, both the first spraying device and the second spraying device further include: a first limiting member;

[0021] The rotating assembly includes: a rotating shaft and rotating blades;

[0022] The edge of the first limiting member is fixed to the inner wall of the cylinder and has a through hole; the rotating shaft passes through the through hole, one end of the rotating shaft has a baffle plate, which is set on the side of the first limiting member away from the spray head, and the other end of the rotating shaft is fixedly connected to the inner wall of the spray head.

[0023] The rotating blades are fixed on the rotating shaft, with one side facing the liquid inlet and the other side facing the spray nozzle.

[0024] In some embodiments, in the first spray device, both the guide plate and the rotating blades of the rotating assembly are arranged perpendicular to the central axis of the cylinder, and the rotating blades are located between the liquid inlet and the guide plate.

[0025] In some embodiments, the cylinder is cylindrical, and the spray head has a first cylindrical part and a second conical part. The first part is rotatably sleeved on the outer periphery of the end of the cylinder with a liquid outlet. Along the radial direction of the cylinder, the second part has no overlapping area with the cylinder, and the side wall of the second part has multiple spray nozzles.

[0026] The spray head has a central axis that passes through the tip of the second part; the distribution density of the spray nozzles near the central axis of the spray head is less than the distribution density of the spray nozzles far from the central axis of the spray head.

[0027] In some embodiments, the cross-sectional area of ​​the second part of the first spray device is larger than the cross-sectional area of ​​the second part of the second spray device along the radial direction of the second part;

[0028] The angle between the sidewall of the second part and the radial direction of the second part shall not be less than 5 degrees and not greater than 10 degrees.

[0029] In some embodiments, the spray nozzle gradually expands from the inside of the spray head outwards.

[0030] In some embodiments, a plurality of first spray devices are evenly arranged, a plurality of second spray devices are evenly arranged, and the distance between adjacent first spray devices is smaller than the distance between adjacent second spray devices.

[0031] Secondly, embodiments of this application also provide a spraying system, including any of the spraying devices provided in the first aspect above, and a strip material;

[0032] The first spraying device of the spraying equipment is positioned above the strip along the direction of gravity;

[0033] The second spraying device of the spraying equipment is located below the strip along the direction of gravity;

[0034] The distance between the first spraying device and the strip is greater than the distance between the second spraying device and the strip.

[0035] The beneficial technical effects of the technical solutions provided in this application include:

[0036] This application embodiment adjusts the spray range by configuring rotating spray heads on the first and second spray devices and adjusting the design pressure of the cleaning fluid entering the first and second spray devices on both sides of the strip. This changes the spray range on both sides of the strip, thereby improving the consistency of the spray range on both sides, ensuring the cleaning effect of the strip, and thus ensuring the manufacturing efficiency of the metal mask. At the same time, it reduces the impact force of the cleaning fluid sprayed by the first and second spray devices on the surface of the strip, thereby reducing the risk of spray damage to the strip.

[0037] Specifically, firstly, in this embodiment, both the first and second spraying devices are equipped with rotating components. These components rotate under water pressure, causing the cleaning fluid to rotate within the cylinder. Under centrifugal force, the cleaning fluid retains radial kinetic energy upon reaching the spray nozzle, making it easier for the cleaning fluid to spread outwards and thus expanding the spray range. Simultaneously, this reduces the amount of cleaning fluid accumulating in the center, thereby reducing the impact on the strip surface and lowering the risk of spray damage to the strip.

[0038] Secondly, in this embodiment, the first and second spray devices are respectively positioned above and below the strip along the direction of gravity. The initial design pressure of the cleaning fluid entering the first spray device is relatively low, resulting in a lower initial velocity. Under the influence of gravity, the cleaning fluid has more time to travel through the air, allowing it to spread more widely and thus expanding the spray range. Therefore, the initial design pressure of the cleaning fluid entering the first spray device is lower than the second design pressure of the cleaning fluid entering the second spray device. This makes the spray range of the first spray device under the combined action of the first design pressure and gravity, and the second spray device under the combined action of the second design pressure and anti-gravity, similar or even identical, thereby improving the consistency of the spray range between the upper and lower spray devices. Simultaneously, it reduces the ejection pressure of the cleaning fluid sprayed from the center of the spray head of the first spray device, thereby reducing the impact force on the strip surface and minimizing the risk of the cleaning fluid damaging the strip. Attached Figure Description

[0039] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the embodiments of the present invention will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present invention and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0040] Figure 1 This is a schematic diagram of the structure of a spray system provided in an embodiment of this application;

[0041] Figure 2 This is a schematic diagram of the structure of a first spraying device of a spraying equipment provided in an embodiment of this application;

[0042] Figure 3 This is a schematic diagram of the structure of a second spraying device of a spraying equipment provided in an embodiment of this application.

[0043] Figure label:

[0044] 100 - First spray device;

[0045] 200 - Second spray device;

[0046] 300-Strip;

[0047] 10-Cylinder section; 11-Inlet; 12-Outlet; 20-Spray head; 21-First part; 22-Second part; 221-Spray nozzle; 30-Rotating assembly; 31-Rotating shaft; 32-Rotating blade; 33-Baffle; 40-Guide plate; 50-First limiting component. Detailed Implementation

[0048] The embodiments of this application are described below with reference to the accompanying drawings. It should be understood that the embodiments described below with reference to the accompanying drawings are exemplary descriptions for explaining the technical solutions of the embodiments of this application, and do not constitute a limitation on the technical solutions of the embodiments of this application.

[0049] Those skilled in the art will understand that, unless specifically stated otherwise, the terms "described" and "the" as used herein may also include plural forms. It should be further understood that the term "comprising" as used in this application's specification means the presence of the described features, integers, and / or components, but does not exclude implementations of other features, data, elements, components, and / or combinations thereof supported by this art. It should be understood that when we say an element is "connected to" another element, the element may be directly connected or coupled to the other element, or it may mean that the element and the other element are connected through an intermediate element. The term "and / or" as used herein refers to at least one of the items defined by the term; for example, "A and / or B" can be implemented as "A," or as "B," or as "A and B."

[0050] To make the objectives, technical solutions, and advantages of this application clearer, the embodiments of this application will be described in further detail below with reference to the accompanying drawings.

[0051] This application provides a spraying device and spraying system for cleaning strip 300, in order to solve the above-mentioned technical problems of the prior art.

[0052] like Figures 1-3 As shown in the figure, this application provides a spraying device for cleaning strip 300, including: a first spraying device 100 and a second spraying device 200.

[0053] The first spraying device 100 is used to be positioned above the strip 300 along the direction of gravity.

[0054] The second spraying device 200 is used to be positioned below the strip 300 along the direction of gravity.

[0055] Both the first spray device 100 and the second spray device 200 include: a cylinder 10, a spray head 20, and a rotating assembly 30.

[0056] The cylindrical section 10 has a liquid inlet 11 and a liquid outlet 12, with the liquid inlet 11 used to introduce cleaning fluid.

[0057] The spray head 20 is rotatably connected to the cylinder 10, the inlet of the spray head 20 is connected to the liquid outlet 12, and the spray head 20 has multiple spray nozzles 221.

[0058] One end of the rotating assembly 30 is rotatably connected to the inner wall of the cylinder 10 and faces the liquid inlet 11, while the other end is fixedly connected to the spray head 20. The rotating assembly 30 is configured to rotate under the action of the cleaning liquid and drive the spray head 20 to rotate.

[0059] The first design pressure of the cleaning fluid entering the first spray device 100 is less than the second design pressure of the cleaning fluid entering the second spray device 200.

[0060] In this embodiment, by configuring rotating spray heads 20 on the first spray device 100 and the second spray device 200 to adjust the spray range and the design pressure of the cleaning fluid entering the first spray device 100 and the second spray device 200 on the upper and lower sides of the strip 300, the spray range on the upper and lower sides of the strip 300 is changed, thereby improving the consistency of the spray range on the upper and lower sides of the strip 300, ensuring the cleaning effect of the strip 300, and thus ensuring the manufacturing efficiency of the metal mask. At the same time, the impact force of the cleaning fluid sprayed by the first spray device 100 and the second spray device 200 on the surface of the strip 300 is reduced, thereby reducing the risk of spray damage to the strip 300.

[0061] Specifically, firstly, in this embodiment, both the first spraying device 100 and the second spraying device 200 are equipped with a rotating component 30. The rotating component 30 can rotate under water pressure, thereby driving the cleaning fluid to rotate inside the cylinder 10. Under the action of centrifugal force, the cleaning fluid also has a certain radial kinetic energy when it reaches the spray nozzle 221, making it easier for the cleaning fluid to spread out when it is sprayed from the spray nozzle 221, thereby expanding the spray range. At the same time, it can reduce the cleaning fluid that accumulates in the center, thereby reducing the impact force on the surface of the strip 300, and thus reducing the risk of spray damage to the strip 300.

[0062] Secondly, in this embodiment, the first spray device 100 and the second spray device 200 are respectively positioned above and below the strip 300 along the direction of gravity. The first design pressure of the cleaning fluid entering the first spray device 100 is relatively low, resulting in a lower initial velocity. Under the influence of gravity, the cleaning fluid has more time to travel through the air, allowing it to spread more widely and thus expanding the spray range. Therefore, the first design pressure of the cleaning fluid entering the first spray device 100 is lower than the second design pressure of the cleaning fluid entering the second spray device 200. This makes the spray ranges of the first spray device 100 under the combined action of the first design pressure and gravity, and the second spray device 200 under the combined action of the second design pressure and anti-gravity, similar or even identical, thereby improving the consistency of the spray ranges of the upper and lower spray devices. Simultaneously, it reduces the ejection pressure of the cleaning fluid sprayed from the center of the spray head 20 of the first spray device 100, thereby reducing the impact force on the surface of the strip 300 and lowering the risk of the cleaning fluid damaging the strip 300.

[0063] It should be noted that the cleaning solution may include liquids such as water or detergents.

[0064] In some embodiments, the difference between the second design pressure and the first design pressure is not less than 0.5 bar and not more than 1.5 bar.

[0065] In this embodiment, each spraying device satisfies the law of conservation of energy. The difference between the second design pressure of the cleaning fluid entering the second spraying device 200 and the first design pressure of the cleaning fluid entering the first spraying device 100 is not less than 0.5 bar and not more than 1.5 bar. This provides pressure compensation for the second spraying device 200, ensuring that the impact force of the cleaning fluid sprayed from the first spraying device 100 on the strip 300 is within a reasonable range. Furthermore, the spraying range of the cleaning fluid sprayed from the second spraying device 200 on the strip 300 is close to or even the same as the spraying range of the cleaning fluid sprayed from the first spraying device 100. This value can be obtained through experimental calculation or as an empirical value obtained from multiple implementation schemes.

[0066] In some embodiments, such as Figure 2 As shown, the first spray device 100 also includes a guide plate 40.

[0067] In the first spraying device 100, the guide plate 40 is rotatably disposed at the liquid outlet 12 of the cylinder 10.

[0068] One side of the guide plate 40 faces the liquid inlet 11, and the other side faces the spray nozzle 221.

[0069] The direction of rotation of the baffle plate 40 is opposite to the direction of rotation of the spray head 20.

[0070] In this embodiment, when the cleaning fluid reaches the guide plate 40, the guide plate 40 disperses the cleaning fluid and then sprays it out from the spray nozzle 221 of the rotating spray head 20. Since the rotation direction of the guide plate 40 is opposite to the rotation direction of the spray head 20, the cleaning fluid encounters a certain resistance in the process from the guide plate 40 to the spray nozzle 221, thereby reducing the pressure of the cleaning fluid sprayed out from the spray nozzle 221, which in turn reduces the impact force on the strip 300 and increases the spraying range.

[0071] In some embodiments, such as Figures 2-3 As shown, both the first spraying device 100 and the second spraying device 200 further include a first limiting member 50.

[0072] The rotating assembly 30 includes a rotating shaft 31 and a rotating blade 32.

[0073] The edge of the first limiting member 50 is fixed to the inner wall of the cylinder 10 and has a through hole; the rotating shaft 31 passes through the through hole, one end of the rotating shaft 31 has a baffle 33, which is located on the side of the first limiting member 50 away from the spray head 20, and the other end of the rotating shaft 31 is fixedly connected to the inner wall of the spray head 20.

[0074] The rotating blade 32 is fixed on the rotating shaft 31, with one side facing the liquid inlet 11 and the other side facing the spray nozzle 221.

[0075] In this embodiment, the rotating assembly 30 is disposed within the cylindrical portion 10. One end of the rotating shaft 31 has a baffle 33, and a first limiting member 50 is movably connected to the baffle 33, allowing the baffle 33 to rotate relative to the first limiting member 50. A rotating blade 32 is disposed on the rotating shaft 31, laterally positioned within the cylindrical portion 10. When the cleaning fluid impacts the rotating blade 32, the blade rotates, causing the rotating shaft 31 to rotate, which in turn causes the spray head 20, fixedly connected to the rotating shaft 31, to rotate. The rotating blade 32 has a hollowed-out area, allowing the cleaning fluid to leak out and reach the spray head 20 for spraying.

[0076] This embodiment cleverly utilizes the water pressure of the cleaning fluid to drive the rotating blades 32 to rotate, thereby driving the spray head 20 to rotate. There is no need to provide additional driving force to the spray head 20, which can save costs.

[0077] Optionally, the first spraying device 100 is configured to operate in accordance with gravity. The first limiting member 50 is a plate-like structure with a through hole through which the rotating shaft 31 passes. The baffle 33 rests on the first limiting member 50. Under the action of the rotating blade 32, the baffle 33 rotates relative to the first limiting member 50, but the baffle 33 will not detach from the first limiting member 50 under the action of gravity. The second spraying device 200 is configured to operate against gravity. The first limiting member 50 can be two plate-like structures that clamp the baffle 33 inside, thereby restricting the position of the baffle 33. This allows the baffle 33 to rotate relative to the first limiting member 50 while preventing it from detaching from the first limiting member 50.

[0078] In some embodiments, such as Figure 2 As shown, in the first spraying device 100, the guide plate 40 and the rotating blades 32 of the rotating assembly 30 are both arranged perpendicular to the central axis of the cylinder 10, and the rotating blades 32 are located between the liquid inlet 11 and the guide plate 40.

[0079] In this embodiment, the central axis of the cylinder 10 is parallel to the liquid inlet direction, and the rotating blades 32 of the rotating assembly 30 are arranged perpendicular to the central axis of the cylinder 10. This maximizes the utilization of water pressure converted into the kinetic energy of the rotating blades 32, thereby improving efficiency. The guide plate 40 is perpendicular to the central axis of the cylinder 10, allowing the cleaning liquid to be sprayed directly onto the surface of the guide plate 40 and evenly dispersed radially along the guide plate 40. This makes it easier for the liquid to be sprayed from the spray nozzle 221, which is far from the center of the spray head 20, thereby increasing the spray range.

[0080] In some embodiments, such as Figures 2-3 As shown, the cylindrical part 10 is columnar, and the spray head 20 has a columnar first part 21 and a conical second part 22. The first part 21 is rotatably sleeved on the outer periphery of the end of the cylindrical part 10 that has a liquid outlet 12. Along the radial direction of the cylindrical part 10, the second part 22 has no overlapping area with the cylindrical part 10, and multiple spray nozzles 221 are opened on the side wall of the second part 22.

[0081] The spray head 20 has a central axis that passes through the tip of the second part 22; the distribution density of the spray nozzles 221 near the central axis of the spray head 20 is less than the distribution density of the spray nozzles 221 away from the central axis of the spray head 20.

[0082] In this embodiment, the cylindrical portion 10 is columnar, and the first part 21 of the spray head 20 is also columnar. The first part 21 is sleeved outside the end of the cylindrical portion 10, realizing the movable connection between the cylindrical portion 10 and the spray head 20, thereby enabling the spray head 20 to rotate relative to the fixed cylindrical portion 10. In addition, the structure of the spray head 20 for discharging liquid is the second part 22, which is a regular cone shape. The central axis passes through the tip of the cone, and multiple spray nozzles 221 are opened on the side of the cone for discharging liquid. The distribution density of the spray nozzles 221 near the central axis of the spray head 20 is less than that of the spray nozzles 221 far from the central axis of the spray head 20, which can further avoid the cleaning liquid from excessively impacting the central area of ​​the strip 300 directly opposite the spray head 20 and expand the spray range.

[0083] Optionally, the cylinder 10 has openings at both ends, with one end being a liquid inlet 11 and the other end being a liquid outlet 12.

[0084] In some embodiments, the cross-sectional area of ​​the second part 22 of the first spray device 100 is greater than the cross-sectional area of ​​the second part 22 of the second spray device 200 along the radial direction of the second part 22.

[0085] The angle between the side wall of the second part 22 and the radial direction of the second part 22 shall not be less than 5 degrees and not more than 10 degrees.

[0086] In this embodiment, the cross-sectional area of ​​the second part 22 of the first spraying device 100 is larger than the cross-sectional area of ​​the second part 22 of the second spraying device 200. This can further solve the technical problem that the spraying area of ​​the first spraying device 100 is small and the spraying area of ​​the first spraying device 100 is large due to the influence of gravity, so that the actual spraying range of the first spraying device 100 is close to the actual spraying range of the second spraying device 200.

[0087] In some embodiments, the spray nozzle 221 gradually expands from the inside of the spray head 20 outwards.

[0088] In this embodiment, the spray nozzle 221 gradually expands from the inside of the spray head 20 outward, which is manifested as the spray nozzle 221 expanding outward in a funnel shape, thereby further preventing the cleaning fluid from excessively impacting the central area of ​​the strip 300 directly opposite the spray head 20.

[0089] In some embodiments, such as Figure 1 As shown, multiple first spray devices 100 are evenly arranged, and multiple second spray devices 200 are evenly arranged. The distance between adjacent first spray devices 100 is smaller than the distance between adjacent second spray devices 200.

[0090] In this embodiment, the first spraying device 100 and the second spraying device 200 are evenly arranged on the upper and lower sides of the strip 300, respectively. The distance between adjacent first spraying devices 100 is smaller than the distance between adjacent second spraying devices 200. This can further solve the technical problem that the spraying area of ​​the first spraying device 100 is small or large due to the influence of gravity, so that the overall spraying range of the first spraying device 100 is close to the overall spraying range of the second spraying device 200.

[0091] Based on the same inventive concept, such as Figure 1 As shown, this application embodiment also provides a spraying system, including a spraying device for cleaning strip 300 as provided in any of the above embodiments, and strip 300.

[0092] The first spraying device 100 of the spraying equipment is positioned above the strip 300 along the direction of gravity.

[0093] The second spraying device 200 of the spraying equipment is located below the strip 300 along the direction of gravity.

[0094] The distance between the first spraying device 100 and the strip 300 is greater than the distance between the second spraying device 200 and the strip 300.

[0095] This embodiment employs the spraying equipment provided in any of the foregoing embodiments, and its principle and technical effects are similar, so they will not be repeated here. Furthermore, this embodiment adjusts the positions of the first spraying device 100 and the second spraying device 200 so that the distance between the first spraying device 100 and the strip 300 is greater than the distance between the second spraying device 200 and the strip 300. This solves the technical problem of reduced spraying range and excessive impact force of the first spraying device 100 due to gravity, making the overall spraying range of the first spraying device 100 close to that of the second spraying device 200. The impact of the first spraying device 100 on the strip 300 is also appropriately reduced, decreasing the impact of the cleaning fluid on the strip 300.

[0096] By applying the embodiments of this application, at least the following beneficial effects can be achieved:

[0097] (1) By configuring rotating spray heads 20 on the first spray device 100 and the second spray device 200 to adjust the spray range and the design pressure of the cleaning fluid entering the first spray device 100 and the second spray device 200 on the upper and lower sides of the strip 300, the spray range on the upper and lower sides of the strip 300 is changed, thereby improving the consistency of the spray range on the upper and lower sides, ensuring the cleaning effect of the strip 300, thereby ensuring the manufacturing efficiency of the metal mask plate, and at the same time reducing the impact force of the cleaning fluid sprayed by the first spray device 100 and the second spray device 200 on the surface of the strip 300, thereby reducing the risk of spray damage to the strip 300.

[0098] (2) When the cleaning fluid reaches the guide plate 40, the guide plate 40 disperses the cleaning fluid and sprays it out from the spray nozzle 221 of the rotating spray head 20. Since the rotation direction of the guide plate 40 is opposite to the rotation direction of the spray head 20, the cleaning fluid is subjected to a certain resistance in the process from the guide plate 40 to the spray nozzle 221, thereby reducing the pressure of the cleaning fluid sprayed out from the spray nozzle 221, which can reduce the impact force on the strip 300 and increase the spray range.

[0099] (3) By cleverly utilizing the water pressure of the cleaning fluid, the rotating blade 32 is driven to rotate, which in turn drives the spray head 20 to rotate. There is no need to provide additional driving force to the spray head 20, which can save costs.

[0100] (4) The distribution density of the spray nozzles 221 near the central axis of the spray head 20 is less than that of the spray nozzles 221 far from the central axis of the spray head 20, which can further prevent the cleaning liquid from excessively impacting the central area of ​​the strip 300 directly opposite the spray head 20 and expand the spray range.

[0101] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A spraying device for cleaning strip materials, characterized in that, include: The first spraying device is used to be positioned above the strip along the direction of gravity; The second spraying device is used to be positioned below the strip along the direction of gravity; Both the first spray device and the second spray device include: The cylindrical section has a liquid inlet and a liquid outlet, wherein the liquid inlet is used to introduce cleaning fluid; A spray head is rotatably connected to the cylindrical part, the inlet of the spray head is connected to the liquid outlet, and the spray head has multiple spray nozzles; A rotating assembly has one end rotatably connected to the inner wall of the cylinder and facing the liquid inlet, and the other end fixedly connected to the spray head. The rotating assembly is configured to rotate under the action of the cleaning liquid and drive the spray head to rotate. The first design pressure of the cleaning fluid entering the first spray device is less than the second design pressure of the cleaning fluid entering the second spray device; The first spraying device further includes: a guide plate; in the first spraying device, the guide plate is rotatably disposed at the liquid outlet of the cylinder; one side of the guide plate faces the liquid inlet and the other side faces the spray nozzle; the rotation direction of the guide plate is opposite to the rotation direction of the spray head.

2. The spraying equipment according to claim 1, characterized in that, The difference between the second design pressure and the first design pressure shall be no less than 0.5 bar and no more than 1.5 bar.

3. The spraying equipment according to claim 1, characterized in that, Both the first spraying device and the second spraying device further include: a first limiting member; The rotating assembly includes: a rotating shaft and rotating blades; The edge of the first limiting member is fixed to the inner wall of the cylinder and has a through hole; the rotating shaft passes through the through hole, one end of the rotating shaft has a baffle plate, which is located on the side of the first limiting member away from the spray head, and the other end of the rotating shaft is fixedly connected to the inner wall of the spray head. The rotating blades are fixed on the rotating shaft, with one side facing the liquid inlet and the other side facing the spray nozzle.

4. The spraying equipment according to claim 1, characterized in that, In the first spraying device, the guide plate and the rotating blades of the rotating assembly are both arranged perpendicular to the central axis of the cylinder, and the rotating blades are located between the liquid inlet and the guide plate.

5. The spraying equipment according to claim 1, characterized in that, The cylindrical part is columnar, and the spray head has a first cylindrical part and a second conical part. The first part is rotatably sleeved on the outer periphery of the end of the cylindrical part that has a liquid outlet. Along the radial direction of the cylindrical part, the second part has no overlapping area with the cylindrical part, and the sidewall of the second part has multiple spray outlets. The spray head has a central axis passing through the tip of the second part; the distribution density of the spray nozzles near the central axis of the spray head is less than the distribution density of the spray nozzles away from the central axis of the spray head.

6. The spraying equipment according to claim 5, characterized in that, Along the radial direction of the second part, the cross-sectional area of ​​the second part of the first spray device is larger than the cross-sectional area of ​​the second part of the second spray device; The angle between the sidewall of the second part and the radial direction of the second part is not less than 5 degrees and not more than 10 degrees.

7. The spraying equipment according to claim 1, characterized in that, The spray nozzle gradually expands from the inside of the spray head outwards.

8. The spraying equipment according to claim 1, characterized in that, Multiple first spray devices are evenly arranged, and multiple second spray devices are evenly arranged. The distance between adjacent first spray devices is less than the distance between adjacent second spray devices.

9. A sprinkler system, characterized in that, Includes the spraying equipment as described in any one of claims 1-8, and the strip material; The first spraying device of the spraying equipment is positioned above the strip along the direction of gravity; The second spraying device of the spraying equipment is located below the strip along the direction of gravity; The distance between the first spraying device and the strip is greater than the distance between the second spraying device and the strip.

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