Three-coordinate detector suitable for graphite carrying disc

Abstract

The invention relates to a three-coordinate detector suitable for a graphite carrying disc, and relates to the technical field. The three-coordinate detector comprises a device body, a detection table and a detection mechanism are further arranged on the device body, the detection mechanism is arranged over the detection table and used for detecting the graphite carrying disc placed on the detection table, a transposition mechanism is further arranged on the detection table, and the transposition mechanism is used for transferring the graphite carrying disc to the detection table. The transposition mechanism comprises a clamping assembly and a rotating assembly, the clamping assembly is used for clamping the graphite carrying disc on the detection table, and the rotating assembly is used for driving the clamping assembly to rotate relative to the detection table and driving the clamping assembly to return to the initial position after the clamping assembly cancels clamping of the graphite carrying disc. The graphite loading disc detection device has the effect of improving the detection efficiency of the graphite loading disc.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of detection equipment, and particularly relates to a three-coordinate detector suitable for graphite carrier plate. BACKGROUND

[0002] The graphite carrier plate, also known as graphite boat or graphite clamp, is a graphite material carrier device for epitaxial growth of semiconductors, which is a carrier tray precisely processed from high-purity and high-density graphite material, and can safely and accurately carry and transfer core materials such as silicon wafers in the manufacturing process of semiconductor, photovoltaic, LED and other products, and ensure the process quality, so it plays an important role. In the production process of the graphite carrier plate, a three-coordinate detector is usually used to detect the graphite carrier plate, so as to ensure the quality of the graphite carrier plate.

[0003] For the related technology in the above, since the three-coordinate detector in the prior art generally uses a clamp to clamp and fix the graphite carrier plate, and the clamp generally abuts against the side wall or the top wall of the graphite carrier plate after clamping, so that the clamping shields the top wall and the side wall of the graphite carrier plate, which makes it necessary for the detection personnel to cancel the clamping of the graphite carrier plate and reposition the graphite carrier plate when the shielded part of the graphite carrier plate needs to be detected, and the shielded part of the graphite carrier plate can be detected only after the graphite carrier plate is clamped again, which increases the workload of the detection personnel and reduces the detection efficiency of the graphite carrier plate, so it needs to be improved. SUMMARY

[0004] In order to improve the detection efficiency of the graphite carrier plate, the present application provides a three-coordinate detector suitable for graphite carrier plate.

[0005] The three-coordinate detector suitable for graphite carrier plate provided by the present application adopts the following technical scheme: The three-coordinate detector suitable for graphite carrier plate comprises a device body, a detection table and a detection mechanism are further arranged on the device body, the detection mechanism is arranged directly above the detection table and is used for detecting the graphite carrier plate placed on the detection table, a repositioning mechanism is further arranged on the detection table, the repositioning mechanism comprises a clamping assembly and a rotating assembly, the clamping assembly is used for clamping the graphite carrier plate on the detection table, and the rotating assembly is used for driving the clamping assembly to rotate relative to the detection table and driving the clamping assembly to return to the initial position after the clamping assembly cancels the clamping of the graphite carrier plate.

[0006] By adopting the above technical solution, compared with the prior art, which requires the inspection personnel to cancel the gripping of the graphite tray, reposition the graphite tray, and re-grip it before the obscured parts of the graphite tray can be inspected, this application improves the inspection efficiency of the graphite tray by setting up a repositioning mechanism. This allows the gripping component to grip the graphite tray on the inspection table. After gripping, the rotating component drives the gripping component to rotate, causing the gripping component to rotate the graphite tray. Afterward, the gripping component cancels the gripping of the graphite tray, and the rotating component drives the gripping component to return to its initial position. This allows the inspection mechanism to inspect the parts that were previously obscured by the gripping component, effectively providing manual repositioning for the inspection personnel and thus improving the inspection efficiency of the graphite tray.

[0007] Preferably, the clamping assembly includes a rotating frame and several clamping frames. The rotating disk is rotatably connected to the device body. The rotating assembly is used to drive the rotating frame to rotate. The several clamping frames are respectively located on different sides of the graphite carrier on the detection table and are all slidably connected to the rotating frame to clamp the graphite carrier on the detection table. Each clamping frame is provided with a driving assembly, which is used to drive the corresponding clamping frame to slide.

[0008] By adopting the above technical solution and specifically configuring the gripping component, when the graphite carrier needs to be rotated, the driving component can drive the corresponding gripping frame to slide, thereby enabling the gripping frame to grip the graphite carrier. This allows the gripping frame to smoothly drive the gripping frame to rotate when the subsequent rotating component drives the rotating frame to rotate, thus achieving the driving of the graphite carrier rotation.

[0009] Preferably, the drive assembly includes a drive frame and an adapting rod. The drive frame is disposed on the device body and has a drive groove on its top. One side of the drive groove extends circumferentially along the graphite disk on the detection table. Both ends of the drive groove extend away from the detection table and are connected to each other. One end of the adapting rod extends into the drive groove and abuts against the inner wall of the drive groove, while the other end is used to connect with the corresponding gripper.

[0010] By adopting the above technical solution, the drive frame and the adapting rod are adapted so that during the sliding process of the rotating frame, the adapting rod can be displaced relative to the rotating frame under the action of the drive groove. This allows the gripping frame to grip or cancel the gripping of the graphite carrier during the sliding process, thereby realizing the control of whether the gripping frame grips or not. At the same time, there is no need to set up an active device to drive each gripping frame to slide, realizing the linkage between the gripping frame and the rotating frame.

[0011] Preferably, the drive groove includes a clamping part and a returning part. The clamping part is located on the side of the returning part near the detection stage and extends circumferentially along the graphite disk on the detection stage. The two ends of the returning part are respectively connected to different ends of the clamping part, and one end of the clamping part extends downward.

[0012] By adopting the above technical solution and specifically setting the drive groove, an inner sidewall can be formed between the clamping part and the reset part when one end of the clamping part extends downward, thereby limiting the sliding direction of the adapting rod. When the adapting rod slides to the downward-extending end of the clamping part, it can smoothly enter the part between the depth differences under the action of the elastic element. This inner sidewall can prevent the adapting rod from sliding back, so that the adapting rod drives the clamping frame to smoothly return to the initial position and clamp the graphite carrier.

[0013] Preferably, the side of the adapting rod away from the drive frame is slidably connected to the corresponding clamping frame, and the sliding direction is the height direction of the corresponding clamping frame. The adapting rod is also provided with an elastic element, which, through its own elastic force, allows the bottom of the adapting rod to continuously abut against the inner bottom wall of the drive groove.

[0014] By adopting the above technical solution, the adaptation rod and the elastic element are configured so that the adaptation rod can smoothly enter the part between the depth differences when it slides to the downward extension end of the clamping part under the elastic force of the elastic element. This allows the inner sidewall to prevent the adaptation rod from sliding back, so that the adaptation rod drives the clamping frame to smoothly return to the initial position and clamp the graphite carrier.

[0015] Preferably, the testing platform is slidably connected to the device body, and the sliding direction is the height direction of the device body. The device body is also provided with a lifting mechanism, which is used to drive the testing platform to slide.

[0016] By adopting the above technical solution and configuring the lifting mechanism, the lifting mechanism can drive the testing platform to slide downwards when the graphite carrier rotates driven by the switching mechanism, thereby detaching it from the graphite carrier. This reduces the probability of the graphite carrier being worn due to friction with the testing platform during rotation, effectively ensuring the graphite carrier is not damaged.

[0017] Preferably, the lifting mechanism includes a rotating cylinder and a lifting column. The rotating cylinder is rotatably connected to the device body and has an opening at the top. A lifting groove is provided on the inner side wall of the rotating cylinder. The bottom of the testing platform extends downward into the opening of the rotating cylinder. One end of the lifting column is connected to the side wall of the testing platform, and the other end extends into the lifting groove and abuts against the inner wall of the lifting groove.

[0018] By adopting the above technical solution and setting the lifting mechanism, when the rotating cylinder rotates, the inner wall of the lifting groove on the rotating cylinder can abut against the lifting column, thereby pushing the lifting column to move and thus driving the sliding of the testing table, which effectively facilitates the operation of the testing personnel.

[0019] Preferably, the rotating cylinder is connected to the rotating frame, and the rotating assembly is used to drive the rotating cylinder to rotate.

[0020] By adopting the above technical solution and configuring the connection between the rotating cylinder and the rotating frame, the rotating cylinder can drive the rotating frame to rotate together when it rotates. This allows the rotating cylinder to drive both the rotating frame and the testing table simultaneously, effectively realizing the linkage between the rotating frame and the testing table, and thus saving the active components for driving the rotating cylinder.

[0021] Preferably, the lifting groove includes a parallel part and a distance part, the parallel part is located above the distance part and extends horizontally, both ends of the distance part are connected to the bottom of the parallel part, and the middle part extends downward.

[0022] By adopting the above technical solution and setting the lifting groove, the lifting column can slide downward when it moves to the section far away from the part, thereby driving the displacement of the lifting column and enabling the lifting column to rise and fall. It can also be adapted to the rotating frame and the clamping frame, thereby achieving synchronous displacement between the rotating frame, the clamping frame and the testing table, which is convenient for the testing personnel to drive.

[0023] Preferably, one end of the lifting column is slidably connected to the rotating cylinder, and the sliding direction is horizontal. The lifting column is also provided with a reset member, which, through its own elasticity, allows the bottom of the lifting column to continuously abut against the inner wall of the lifting groove.

[0024] By adopting the above technical solution, the lifting column and the reset component are configured so that the lifting column can continuously abut against the inner wall of the lifting groove under the elastic force of the reset component. This allows the lifting column to slide to the end where the far part and the parallel part are connected, and then be inserted into the deeper part at the depth intersection under the elastic force of the reset component. This reduces the probability of the lifting column moving back and ensures the driving effect of the lifting column.

[0025] In summary, this application includes at least one of the following beneficial technical effects: The positioning mechanism enables the gripping component to grip the graphite tray on the testing table. After gripping, the rotating component drives the gripping component to rotate, causing the graphite tray to rotate. Afterward, the gripping component releases its grip on the graphite tray, and the rotating component drives the gripping component back to its initial position. This allows the testing mechanism to test the parts that were previously covered by the gripping component, effectively providing manual adjustment for the testing personnel and thus improving the testing efficiency of the graphite tray. The drive assembly is designed so that during the sliding of the rotating frame, the adapting rod can be displaced relative to the rotating frame under the action of the drive groove. This allows the gripper to grip or cancel the gripping of the graphite disk during the sliding process, thereby controlling whether the gripper grips. At the same time, there is no need to set an active device to drive each gripper to slide, realizing the linkage between the gripper and the rotating frame. The lifting mechanism is designed so that when the rotating cylinder rotates, the inner wall of the lifting groove on the rotating cylinder can abut against the lifting column, thereby pushing the lifting column to move and driving the sliding of the testing table. It can also drive the rotating frame to rotate together, so that the rotating cylinder can drive the rotating frame and the testing table at the same time. This effectively realizes the linkage between the rotating frame and the testing table, thus saving the active device for driving the rotating cylinder and effectively facilitating the operation of the testing personnel. Attached Figure Description

[0026] Figure 1 This is a schematic diagram illustrating the overall three-coordinate measuring instrument applicable to graphite carrier disks in the embodiments of this application.

[0027] Figure 2 This is a schematic diagram illustrating the structure of the gripping component in the embodiments of this application.

[0028] Figure 3 This is a structural schematic diagram used to illustrate the rising column in the embodiments of this application.

[0029] Figure 4 This is a schematic diagram illustrating the structure of the rotating cylinder in the embodiments of this application.

[0030] Explanation of reference numerals in the attached drawings: 1. Device body; 2. Detection table; 3. Detection mechanism; 4. Positioning mechanism; 41. Clamping assembly; 411. Rotating frame; 412. Clamping frame; 42. Rotating assembly; 43. Drive assembly; 431. Drive frame; 432. Adapting rod; 5. Lifting mechanism; 51. Rotating cylinder; 511. Lifting groove; 5111. Parallel part; 5112. Removing part; 52. Lifting column; 53. Reset part; 6. Drive groove; 61. Clamping part; 62. Returning part; 7. Elastic element; 8. Abutment spring. Detailed Implementation

[0031] The following is in conjunction with the appendix Figures 1-4 This application will be described in further detail.

[0032] This application discloses a three-coordinate measuring instrument suitable for graphite disks. (Refer to...) Figure 1 and Figure 2 The coordinate measuring machine for graphite carrier disks includes a device body 1, on which a detection stage 2 and a detection mechanism 3 are also provided. The detection mechanism 3 is located directly above the detection stage 2 and is used to detect the graphite carrier disks placed on the detection stage 2. The detection stage 2 is also provided with a shifting mechanism 4, which includes a clamping component 41 and a rotating component 42. The clamping component 41 is used to clamp the graphite carrier disks on the detection stage 2, and the rotating component 42 is used to drive the clamping component 41 to rotate relative to the detection stage 2, and to drive the clamping component 41 to return to its initial position after the clamping component 41 releases its grip on the graphite carrier disk.

[0033] Reference Figure 1 In this embodiment, the detection mechanism 3 is configured as a combination of two linear modules, two sliding frames, and a detection head. One linear module is mounted on the device body 1 and is used to drive one of its sliding frames to slide along the length of the device body 1. The other sliding frame is located above and is slidably connected to the first sliding frame via a slide rail, and its sliding direction is the length of the device body 1. The sliding frame is also equipped with a lifting module, which is used for mounting the detection head and for driving the detection head to rise and fall.

[0034] Reference Figure 1 , Figure 2 and Figure 3 The testing platform 2 is located on top of the device body 1, and its bottom extends downwards and is slidably connected to the device body 1 via a sliding groove, with the sliding direction set to the height direction of the device body 1. The device body 1 is also equipped with a lifting mechanism 5, which includes a rotating cylinder 51 and a lifting column 52. The rotating cylinder 51 has openings at both its top and bottom, allowing it to be fitted onto the bottom of the testing platform 2 and rotatably connected to it.

[0035] Reference Figure 1 and Figure 2 In this embodiment, the rotating component 42 is configured as a combination of a servo motor and a gear set. The servo motor is fixedly mounted on the device body 1 and is used to drive one of its gear sets to rotate. The other gear is fixedly sleeved on the rotating cylinder 51, and the two gears mesh with each other so that the servo motor can drive the rotating cylinder 51 to rotate through the gear set.

[0036] Reference Figure 3 and Figure 4Two lifting grooves 511 are formed on the inner wall of the rotating cylinder 51, and the two lifting grooves 511 are located on opposite sides of the rotating cylinder 51. Each lifting groove 511 includes a parallel portion 5111 and a distance portion 5112. The parallel portion 5111 is located above the distance portion 5112 and extends horizontally. One end of the distance portion 5112 is connected to the bottom of one end of the parallel portion 5111, and the other end extends downward and then upward near the other end of the parallel portion 5111, and is connected to the other end of the parallel portion 5111.

[0037] Reference Figure 3 and Figure 4 The opening depth of the parallel portion 5111 is greater than the opening depth of the remote portion 5112, and the depth of the end where the parallel portion 5111 connects with the remote portion 5112 is greater than the depth of the rest of the parallel portion 5111. Correspondingly, the depth of the end where the remote portion 5112 connects with this end is also greater than the depth of the rest of itself, so that this end intersects with the inner wall between the parallel portion 5111 and the parallel portion 5111, thereby allowing the lifting column 52 to move smoothly from this end of the parallel portion 5111 into the remote portion 5112.

[0038] Reference Figure 3 and Figure 4 The number of lifting columns 52 is also set to two, and they are arranged one-to-one with the drive slots 6. One end of each lifting column 52 extends into the detection table 2 and is slidably connected to the detection table 2, with the sliding direction being the direction of its own axis. The other end of each lifting column 52 is inserted into the remote part 5112 of the corresponding drive slot 6 and abuts against the inner side wall of the remote part 5112.

[0039] Reference Figure 3 Each lifting column 52 is provided with a reset member 53 on the side away from the drive groove 6. Each reset member 53 is located inside the detection table 2 and is configured as a pressure spring. One end of each pressure spring abuts against the inner wall of the detection table 2, and the other end abuts against the side of the lifting column 52 away from the drive groove 6. Thus, through its own elasticity, the end of the lifting column 52 continuously abuts against the inner wall of the drive groove 6.

[0040] Reference Figure 3 and Figure 4 In the initial state, the detection stage 2 is located at the top of its sliding path, thus supporting the graphite carrier. At this time, the lifting column 52 is located inside one end of the remote part 5112. When it is necessary to drive the detection stage 2 to descend, the rotating assembly 42 drives the rotating cylinder 51 to rotate. At this time, the lifting column 52, under the contact with the inner wall of the remote part 5112, is displaced within the remote part 5112 and gradually moves closer to the other end of the remote part 5112.

[0041] Reference Figure 3 and Figure 4At this point, the testing platform 2 gradually descends, releasing support for the graphite disk, and gradually returns to its initial height upon reaching its lowest position. When the lifting column 52 moves to the other end of the distance portion 5112, the rotating cylinder 51 continues to rotate, causing the lifting column 52 to disengage from the distance portion 5112 and, under the elastic force of the reset member 53, insert into the parallel portion 5111, thus restoring the testing platform 2 to its initial height and continuing to support the graphite disk. Subsequently, the rotating cylinder 51 continues to rotate in the same direction, causing the lifting column 52 to reach the end of the parallel portion 5111.

[0042] Reference Figure 3 and Figure 4 Subsequently, the rotating assembly 42 drives the rotating cylinder 51 to rotate back. At this time, the lifting column 52 slides within the parallel section 5111 and gradually moves to the end of the other end of the parallel section 5111. During this process, the detection table 2 maintains its own height. When the lifting column 52 moves to the end of the other part of the parallel section 5111, the lifting column 52 is inserted deeper into that end under the elastic action of the elastic member 7. This causes the inner wall between the height difference between the ends of the parallel section 5111 (i.e., the intersection of the parallel section 5111 and the distant section 5112) to obstruct the lifting column 52, thereby allowing the lifting column 52 to return to its initial position, i.e., the end of the distant section 5112.

[0043] Reference Figure 2 and Figure 3 The clamping assembly 41 includes a rotating frame 411 and several clamping frames 412. The rotating frame 411 is sleeved on the outer wall of the rotating cylinder 51 and is fixedly connected to the rotating cylinder 51 by welding. The clamping frames 412 are located on different sides of the rotating frame 411 and are all slidably connected to the rotating frame 411 by slide rails, and the sliding direction of all of them passes through the rotation axis of the detection table 2.

[0044] Reference Figure 1 and Figure 2 Each gripper 412 extends upward at its top to abut against the graphite tray on the testing table 2, thereby gripping and securing the graphite tray. Each gripper 412 is equipped with a drive assembly 43, which includes a drive frame 431 and an adapting rod 432. Each drive frame 431 is located below the corresponding gripper 412 and is fixedly mounted to the device body 1 by bolts.

[0045] Reference Figure 2 and Figure 3Each drive frame 431 has a drive groove 6 on its top, and each drive groove 6 includes a gripping part 61 and a return part 62. Each gripping part 61 is arc-shaped, and the axis of the arc is the axis of the detection table 2. One end of each gripping part 61 extends away from the detection table 2. Each return part 62 is located on the side of the gripping part 61 away from the detection table 2, and both ends are connected to the two ends of the gripping part 61.

[0046] Reference Figure 3 Each return section 62 and the end of the gripping section 61 that does not extend away from the detection stage 2 are both provided to extend downwards, so that the depth of this part is greater than the depth of the rest, thereby forming an inner wall to limit the displacement of the adapting rod 432. The end of each gripping section 61 that does not extend away from the detection stage 2 gradually returns to the height of the rest, so as to reset the adapting rod 432.

[0047] Reference Figure 3 Each adapting rod 432 has its top inserted into the bottom of the corresponding gripper 412 and is slidably connected to the gripper 412 in a vertical direction. Each adapting rod 432 is equipped with an elastic element 7, which is a pressure spring. Each pressure spring is sleeved on the corresponding adapting rod 432, with its top end abutting against the bottom of the corresponding gripper 412 and its other end abutting against the top of the adapting rod 432. The bottom end of each adapting rod 432 is inserted into the corresponding driving groove 6 and abuts against the inner bottom wall of the corresponding driving groove 6.

[0048] Reference Figure 3 Each gripper 412 is fitted with an abutment spring 8. Each abutment spring 8 is a pressure spring, with one end abutting against the gripper 412 and the other end abutting against the rotating frame 411, so that the gripper 412 can move from the gripping part 61 to the return part 62 by its own elastic force.

[0049] Reference Figure 2 and Figure 3 In the initial state, the testing stage 2 is located at the top of its sliding path, thus supporting the graphite carrier. The adapting rod 432 is located at the end where the inner bottom wall between the gripping part 61 and the return part 62 changes significantly. The gripping frame 412 then grips the graphite carrier. When it is necessary to grip the graphite carrier and drive it to rotate, the rotating assembly 42 drives the rotating cylinder 51 to rotate, which in turn drives the gripping frame 412 to rotate. At this point, the testing stage 2 slides downwards.

[0050] Reference Figure 2 and Figure 3When the adapting rod 432 on the gripper 412 moves to the other end of the gripping part 61, the adapting rod 432 slides under the abutment of the inner wall of the gripping part 61, thus gradually moving away from the graphite carrier. At this time, the detection stage 2 returns to its initial height, supporting the graphite carrier and thus realizing the rotation of the graphite carrier. Afterward, the adapting rod 432 moves into the return part 62, and the rotating assembly 42 drives the rotating cylinder 51 to flip and reset.

[0051] Reference Figure 2 and Figure 3 During this process, the adapting rod 432 slides under the abutment of the inner wall of the return section 62, thus gradually approaching the graphite carrier. When the adapting rod 432 moves to the junction between the return section 62 and the clamping section 61, the height of the inner bottom wall at the junction of the return section 62 and the clamping section 61 changes abruptly downwards. This causes the adapting rod 432 to move downwards under the action of the elastic member 7 and abut against the inner bottom wall of the return section 62. As a result, the inner wall between the return section 62 and the clamping section 61, caused by the change in height, limits the adapting rod 432, reducing the probability of the adapting rod 432 sliding back.

[0052] The implementation principle of a coordinate measuring machine for graphite carrier disks in this application embodiment is as follows: when it is necessary to clamp the graphite carrier disk to drive it to rotate, the rotating component 42 drives the rotating cylinder 51 to rotate, thereby causing the rotating cylinder 51 to drive the clamping frame 412 to rotate, and at this time the detection stage 2 slides downward.

[0053] When the adapting rod 432 on the gripper 412 moves to the other end of the gripping part 61, the adapting rod 432 slides under the abutment of the inner wall of the gripping part 61, thus gradually moving away from the graphite carrier. At this time, the detection stage 2 returns to its initial height, supporting the graphite carrier and thus realizing the rotation of the graphite carrier. Afterward, the adapting rod 432 moves into the return part 62, and the rotating assembly 42 drives the rotating cylinder 51 to flip and reset.

[0054] During this process, the adapting rod 432 slides under the abutment of the inner wall of the return section 62, thus gradually approaching the graphite carrier. When the adapting rod 432 moves to the junction between the return section 62 and the gripping section 61, the height of the inner bottom wall at the junction of the return section 62 and the gripping section 61 changes abruptly downwards, causing the adapting rod 432 to move downwards under the action of the elastic member 7 and abut against the inner bottom wall of the return section 62, thus moving back to the initial position for the next round of gripping and rotation drive.

[0055] The above are all preferred embodiments of this application and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A three-coordinate measuring instrument for graphite carrier disks, comprising a device body (1), wherein a measuring platform (2) and a measuring mechanism (3) are further provided on the device body (1), the measuring mechanism (3) being disposed directly above the measuring platform (2) and used for measuring the graphite carrier disk placed on the measuring platform (2), characterized in that: The testing stage (2) is also provided with a shifting mechanism (4), which includes a clamping component (41) and a rotating component (42). The clamping component (41) is used to clamp the graphite carrier on the testing stage (2), and the rotating component (42) is used to drive the clamping component (41) to rotate relative to the testing stage (2). After the clamping component (41) cancels the clamping of the graphite carrier, it drives the clamping component (41) to return to the initial position.

2. A coordinate measuring machine suitable for graphite disks according to claim 1, characterized in that: The clamping assembly (41) includes a rotating frame (411) and several clamping frames (412). The rotating disk is rotatably connected to the device body (1). The rotating assembly (42) is used to drive the rotating frame (411) to rotate. The several clamping frames (412) are located on different sides of the graphite carrier on the detection table (2) and are all slidably connected to the rotating frame (411) to clamp the graphite carrier on the detection table (2). Each clamping frame (412) is provided with a driving assembly (43). The driving assembly (43) is used to drive the corresponding clamping frame (412) to slide.

3. A coordinate measuring machine suitable for graphite disks according to claim 2, characterized in that: The drive assembly (43) includes a drive frame (431) and an adapting rod (432). The drive frame (431) is disposed on the device body (1) and has a drive groove (6) on its top. One side of the drive groove (6) extends circumferentially along the graphite carrier on the detection table (2). Both ends of the drive groove (6) extend away from the detection table (2) and are connected. One end of the adapting rod (432) extends into the drive groove (6) and abuts against the inner wall of the drive groove (6). The other end is used to connect with the corresponding clamping frame (412).

4. A coordinate measuring machine suitable for graphite disks according to claim 3, characterized in that: The drive groove (6) includes a clamping part (61) and a return part (62). The clamping part (61) is located on the side of the return part (62) near the detection stage (2) and extends circumferentially along the graphite carrier on the detection stage (2). The two ends of the return part (62) are respectively connected to different ends of the clamping part (61), and one end of the clamping part (61) extends downward.

5. A coordinate measuring machine suitable for graphite disks according to claim 3, characterized in that: The side of the adapting rod (432) away from the drive frame (431) is slidably connected to the corresponding clamping frame (412), and the sliding direction is the height direction of the corresponding clamping frame (412). An elastic element (7) is also provided on the adapting rod (432). The elastic element (7) is used to allow the bottom of the adapting rod (432) to continuously abut against the inner bottom wall of the drive groove (6) through its own elastic force.

6. A coordinate measuring machine suitable for graphite disks according to claim 2, characterized in that: The testing platform (2) is slidably connected to the device body (1), and the sliding direction is the height direction of the device body (1). The device body (1) is also provided with a lifting mechanism (5), which is used to drive the testing platform (2) to slide.

7. A coordinate measuring machine suitable for graphite disks according to claim 6, characterized in that: The lifting mechanism (5) includes a rotating cylinder (51) and a lifting column (52). The rotating cylinder (51) is rotatably connected to the device body (1) and has an opening at the top. A lifting groove (511) is provided on the inner side wall of the rotating cylinder (51). The bottom of the detection platform (2) extends downward into the opening of the rotating cylinder (51). One end of the lifting column (52) is connected to the side wall of the detection platform (2), and the other end extends into the lifting groove (511) and abuts against the inner wall of the lifting groove (511).

8. A coordinate measuring machine suitable for graphite disks according to claim 7, characterized in that: The rotating cylinder (51) is connected to the rotating frame (411), and the rotating assembly (42) is used to drive the rotating cylinder (51) to rotate.

9. A coordinate measuring machine suitable for graphite disks according to claim 7, characterized in that: The lifting groove (511) includes a parallel part (5111) and a remote part (5112). The parallel part (5111) is located above the remote part (5112) and extends in the horizontal direction. Both ends of the remote part (5112) are connected to the bottom of the parallel part (5111), and the middle part extends downward.

10. A coordinate measuring machine suitable for graphite disks according to claim 7, characterized in that: One end of the lifting column (52) is slidably connected to the rotating cylinder (51), and the sliding direction is horizontal. The lifting column (52) is also provided with a reset member (53). The reset member (53) is used to ensure that the bottom of the lifting column (52) continuously abuts against the inner wall of the lifting groove (511) through its own elasticity.

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