Reliability detection device and system
By monitoring light transmittance in real time on the nucleic acid synthesis chip and adjusting the deflection angle using a liquid crystal dimming material layer, the reliability detection problem of the nucleic acid synthesis chip was solved, the synthesis yield was improved, and the cost was reduced.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2026-01-14
- Publication Date
- 2026-04-07
AI Technical Summary
In existing technologies, the yield of nucleic acid synthesis chips is affected by a variety of factors, especially the unresolved issue of processing reliability in TFT-DNA synthesis chips, which makes it difficult to optimize synthesis efficiency and cost.
A reliability testing device is used to monitor the light transmittance of the nucleic acid synthesis chip in real time through the photoreaction module and the monitoring module. The deflection angle is adjusted by the liquid crystal dimming material layer to evaluate the reliability of the nucleic acid synthesis chip and optimize the synthesis process.
This improved the synthesis yield of nucleic acid synthesis chips, reduced costs, and achieved efficient optimization of nucleic acid production.
Smart Images
Figure CN121797221A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of semiconductor technology, and more specifically, to a reliability testing device and system. Background Technology
[0002] Nucleic acid chip technology plays a crucial role in molecular biology and genomics research, its core being the realization of parallel nucleic acid synthesis and detection through high-density array technology. Taking the in-situ synthesis technology based on the solid-phase chemical synthesis method of phosphite amide as an example, this synthesis method can achieve controllable base extension by cyclically performing four steps of deprotection, coupling, capping, and oxidation on a solid matrix.
[0003] In existing technologies, technicians often introduce thin-film transistor (TFT) technology to improve the synthesis efficiency of nucleic acid synthesis chips. This TFT-DNA technology precisely controls the reagent supply to synthesis sites through electrochemical means, enabling the synthesis of millions of customized oligonucleotide sequences on a single chip. However, the synthesis yield of nucleic acid using this TFT-DNA technology is affected by many factors, such as reaction conditions, reagent purity, and especially the fabrication reliability of the TFT-DNA synthesis chip.
[0004] Therefore, there is an urgent need for a reliability testing scheme for nucleic acid synthesis chips to improve the synthesis yield during the nucleic acid synthesis process. Summary of the Invention
[0005] In view of this, the purpose of the present invention is to provide a reliability testing device and system that can optimize the synthesis process, increase nucleic acid yield, reduce costs, and improve the reliability of nucleic acid synthesis chips by monitoring the yield of nucleic acid synthesis chips.
[0006] To achieve the above objectives, the technical solutions adopted in the embodiments of the present invention are as follows: This invention provides a reliability testing device for use in nucleic acid synthesis chips. The nucleic acid synthesis chip includes multiple synthesis driving pixel circuits, and the reliability testing device includes a photoreaction module and a monitoring module. The photoreaction module includes multiple functional units, which are arranged in an array and located on the functional surface of the nucleic acid synthesis chip; each functional unit corresponds to a synthesis driving pixel circuit. Wherein, for any one action unit, under the condition that the corresponding synthesis driving pixel circuit is working normally, the action unit is used to adjust its own deflection angle according to the driving voltage of the corresponding synthesis driving pixel circuit, so as to change the light transmittance of the preset area in the functional surface; the preset area is used to characterize the functional area corresponding to a preset number of action units. The monitoring module is used to acquire light transmittance in real time and determine whether the synthesis driving pixel circuit in the preset area is working properly based on the light transmittance under the preset time series, so as to evaluate the reliability of the nucleic acid synthesis chip.
[0007] Optionally, the reliability testing device further includes a common electrode. When the working unit includes a liquid crystal dimming material layer, each liquid crystal dimming material layer is disposed below the common electrode and above the anode in the corresponding synthesis driving pixel circuit.
[0008] Optionally, multiple functional units are disposed on the opposite side of the nucleic acid synthesis chip to form an integrated module with the nucleic acid synthesis chip.
[0009] Optionally, when the links between the row-arranged action units in the array are considered as row reaction components, and the links between the column-arranged action units in the array are considered as column reaction components, the monitoring module includes a control unit, a row selection unit, a column selection unit, and a column reading unit; the control unit is connected to the row selection unit and the column selection unit; the row selection unit is also connected to the control terminal of each action unit on each row reaction component; the column selection unit is also connected to the control terminal of each action unit on each column reaction component; and the column reading unit is also connected to the anode of each action unit on each column reaction component. The control unit is used to send control signals to the row selection unit and the column reading unit respectively, and adjust the working timing of the row selection unit and the column reading unit; The column selection unit is used to turn on or off the function units on each column reaction component according to the control signal. The row selection unit is used to turn on or off the function units on each row reaction component according to the control signal. The column reading unit is used to read the pixel array composed of the working units under the preset area according to the time sequence of the row selection unit and the column reading unit.
[0010] Optionally, the monitoring module also includes a judgment unit, which is connected to the column reading unit and is used to acquire the pixel dot matrix; When the nucleic acid synthesis chip is cyclically written with the driving voltage, the judgment unit is also used to determine the detection data based on the pixel matrix and to determine whether the detection data is less than or equal to a preset threshold; if yes, the current nucleic acid synthesis chip is determined to be qualified; if no, the current nucleic acid synthesis chip is determined to be unqualified. The detection data includes the rate of change, uniformity, and cyclic change / recovery status of light transmittance in the pixel array frame by frame and / or row by row and / or column by column and / or pixel by pixel.
[0011] Optionally, when the current nucleic acid synthesis chip is determined to be unqualified, the judgment unit is used to traverse the deflection state of each functional unit under the current preset area according to the judgment result of the judgment unit, and filter out the functional units that are different from the liquid crystal deflection state of the undamaged pixels, so as to obtain the fault location information of the current nucleic acid synthesis chip.
[0012] Optionally, the action unit includes a driving transistor, an optical sensor, and a readout control transistor; the monitoring module also includes a bias voltage write signal line; The cathode of the optical sensor is connected to the bias voltage write signal line; the anode of the optical sensor is connected to the column readout unit, the drive transistor, and the readout control transistor; the control terminal of the drive transistor is also connected to the column select unit; and the readout control transistor is also connected to the row select unit.
[0013] Optionally, the reliability testing device also includes a background light source; The monitoring module is used to obtain in real time the light transmittance of the emitted light from the background light source through the functional unit in the preset area of the functional surface.
[0014] Optionally, the emitted light from the background light source is parallel to the normal vector of the plane containing the photoresponse module.
[0015] The present invention also provides a reliability testing system for use in nucleic acid synthesis chips, including the reliability testing device described in any of the first aspects above.
[0016] The reliability testing device and system provided in this invention have the following beneficial effects: This application provides a reliability detection device for a nucleic acid synthesis chip. The nucleic acid synthesis chip includes multiple synthesis driving pixel circuits. The reliability detection device includes a photoreaction module and a monitoring module. The photoreaction module includes multiple action units arranged in an array and disposed on the functional surface of the nucleic acid synthesis chip. Each action unit corresponds to one synthesis driving pixel circuit. For any action unit, under the condition that the corresponding synthesis driving pixel circuit is working normally, the action unit adjusts its deflection angle according to the driving voltage of the corresponding synthesis driving pixel circuit to change the light transmittance of a preset area in the functional surface. The preset area is used to characterize the functional area corresponding to a preset number of action units. The monitoring module is used to acquire the light transmittance in real time and determine whether the synthesis driving pixel circuit is working normally in the preset area based on the light transmittance under a preset time series, so as to evaluate the reliability of the nucleic acid synthesis chip. Based on this, this application adopts efficient in-situ real-time optical detection technology. Before the nucleic acid synthesis chip is synthesized, the integrity of the synthesis chip itself is evaluated by using "liquid crystal cell" optical transmittance detection, which can optimize the synthesis process, increase the yield of target nucleic acid, and reduce costs.
[0017] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, preferred embodiments are described below in detail with reference to the accompanying drawings. Attached Figure Description
[0018] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present invention and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.
[0019] Figure 1 This shows one of the structural schematic diagrams of the reliability testing device provided in an embodiment of the present invention; Figure 2 This shows one of the structural schematic diagrams of the nucleic acid synthesis chip provided in an embodiment of the present invention; Figure 3 This is a second schematic diagram of the structure of the nucleic acid synthesis chip provided in an embodiment of the present invention; Figure 4 A schematic diagram of the setup of the reliability testing device provided in an embodiment of the present invention is shown; Figure 5 This shows one of the structural schematic diagrams of the monitoring module provided in an embodiment of the present invention; Figure 6 This is a second schematic diagram of the structure of the monitoring module provided in an embodiment of the present invention; Figure 7 The third schematic diagram of the monitoring module provided in this embodiment of the invention is shown; Figure 8 A second schematic diagram of the reliability testing device provided in an embodiment of the present invention is shown; Figure 9 A schematic diagram of an embodiment of the reliability testing device provided in this invention is shown. Figure 10 The diagram shows the detection results of the monitoring module in an embodiment of the present invention.
[0020] Icons: 10-Reliability testing device; 20-Nucleic acid synthesis chip; 21-Synthesis driving pixel circuit; 11-Photoreaction module; 12-Monitoring module; 13-Common electrode; 14-Liquid crystal dimming material layer (before deflection); 14'-Liquid crystal dimming material layer (after deflection); 211-Synthesis anode; 212-Pixel physical spacing area; 213-Light shielding layer; 214-Capping layer; 22-Action unit; 30-Binding material area; 31-Control unit; 32-Row selection unit; 33-Column selection unit; 34-Column reading unit; 35-Judgment unit; 15-Background light source. Detailed Implementation
[0021] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. The components of the embodiments of the present invention described and shown in the accompanying drawings can generally be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.
[0022] As used herein, the following terms are intended to have the meanings set forth below. It should be understood that these definitions are provided to aid in understanding this application and are not intended to be limiting. Unless the context explicitly specifies otherwise, the singular forms “a,” “an,” and “the” include plural referents. It should be noted that relational terms such as “first” and “second” are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms “comprising,” “including,” or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitation, an element defined by the phrase “comprising a…” does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.
[0023] When a term is not specifically defined, it shall be given the common and customary meaning as understood by one of ordinary skill in the art at the time of filing of this application. In the event of any conflict between any generally accepted definition in the art and the definition provided herein, the definition provided herein shall prevail.
[0024] Various aspects of this application are presented in scope format. It should be understood that the scope format is merely for convenience and brevity and should not be construed as a rigid limitation on the scope of this application. Therefore, the scope description should be considered as having specifically disclosed all possible sub-scopes and common individual values within that scope.
[0025] Unless otherwise stated, implementation of this application may be carried out using conventional techniques of organic chemistry, polymer technology, molecular biology (including recombinant techniques), cell biology, biochemistry, and immunology, which are within the scope of the art. Such conventional techniques include polymer array synthesis, hybridization, ligation, and detection of hybridization using labels. Specific descriptions of suitable techniques can be obtained by referring to the examples below. However, other equivalent conventional procedures may of course be used. Such conventional techniques can be found in standard laboratory manuals.
[0026] The term "nucleic acid" can include any polymer or oligomer of pyrimidine and purine bases, preferably cytosine, thymine, and uracil, and adenine and guanine, respectively. In fact, this application considers any deoxyribonucleotide, ribonucleotide, or peptide nucleic acid component, and any chemical variants thereof, such as methylated, hydroxymethylated, or glycosylated forms of these bases. The polymer or oligomer can be heterogeneous or homogeneous in composition and can be isolated from naturally occurring sources or can be artificially or synthetically produced. Furthermore, nucleic acids can be DNA or RNA, or mixtures thereof, and can exist permanently or intermittently in single-stranded or double-stranded form, including homoduplex, heteroduplex, and hybrid states.
[0027] The term "synthetic chip" specifically refers to any solid, semi-solid, or composite substrate used for the parallel, site-specific synthesis of oligonucleotides or longer nucleic acid molecules. In fact, this application considers any form of substrate, whether its material is organic (such as various polymers, hydrogels) or inorganic (such as glass, quartz, silicon, ceramics, or metals), and its morphology can be rigid, flexible, porous, or three-dimensional. Furthermore, the substrate surface can be planar or contain microscopic or nanoscopic topologies formed by any means such as etching, molding, printing, or deposition, such as micropores, micropillars, nanopores, or microfluidic channels. The substrate can be made of various materials, such as traditional glass slides, glass plates, or silicon wafers that can be processed using semiconductor techniques. Its surface has multiple discrete reaction sites, which can be defined by physical structures (such as micropores or micropillars) directly formed on the substrate (e.g., on a silicon wafer with an etched structure); or, these reaction sites can be defined and independently addressed by functional regions, for example, on a glass or silicon wafer with electrodes, where each electrode can be precisely controlled by underlying CMOS or TFT semiconductor circuitry, thereby creating a highly localized chemical environment to trigger specific steps in the synthesis reaction. Furthermore, the nucleic acid molecules synthesized on this chip can be DNA, RNA, or any chemical variant or analogue thereof, and their synthesis process can be based on any iterative chemical, electrochemical, biochemical, photochemical, and enzymatic methods, ultimately forming a high-density, sequence-programmable oligonucleotide array on the chip.
[0028] Please refer to Figure 1 , Figure 1 A schematic diagram of a reliability testing device is provided. The reliability testing device 10 provided in this application is applied to a nucleic acid synthesis chip 20. The nucleic acid synthesis chip 20 includes multiple synthesis driving pixel circuits 21. The reliability testing device 10 includes a photoreaction module 11 and a monitoring module 12.
[0029] The photoreaction module 11 includes multiple action units 22, which are arranged in an array and located on the functional surface of the nucleic acid synthesis chip 20; each action unit 22 corresponds to a synthesis driving pixel circuit 21. In this embodiment, for any action unit 22, under the condition that the corresponding synthesis driving pixel circuit 21 is working normally, the action unit 22 is used to adjust its own deflection angle according to the driving voltage of the corresponding synthesis driving pixel circuit 21, so as to change the light transmittance of a preset area in the functional surface; the preset area is used to characterize the functional area corresponding to a preset number of action units 22.
[0030] The monitoring module 12 is used to acquire light transmittance in real time and determine whether the synthesis driving pixel circuit 21 in the preset area is working properly based on the light transmittance under the preset time series, so as to evaluate the reliability of the nucleic acid synthesis chip 20.
[0031] This embodiment sets up a photoreaction module 11 composed of multiple action units 22, which adjusts its deflection angle according to the driving voltage of the corresponding synthesis driving pixel circuit 21. This allows the monitoring module 12 to monitor the light transmittance of the preset area in the functional surface in real time as the deflection angle changes. Then, by using the light transmittance under a preset time series, it can determine whether the synthesis driving pixel circuit 21 is working properly in the preset area, thereby evaluating the reliability of the nucleic acid synthesis chip 20. Based on this, this application can optimize the synthesis process, increase the target nucleic acid yield, and reduce costs by monitoring the yield of the TFT-DNA nucleic acid synthesis chip 20.
[0032] It should be noted that the normal operating conditions of the synthesis driving pixel circuit in this embodiment are used to characterize the state in which the synthesis driving pixel circuit can receive normal write voltage and enter the synthesis operation.
[0033] Please refer to Figure 2 , Figure 2 A schematic diagram of the nucleic acid synthesis chip in this embodiment is provided; the nucleic acid synthesis chip 20 includes a plurality of synthesis driving pixel circuits 21, which are arranged in a matrix. The matrix can be represented as S*M, where S is the number of rows of the matrix and M is the number of columns of the matrix. Based on this, the first synthesis pixel circuit in the first row can be represented as pixel circuit 1-1, and the Mth synthesis pixel circuit in the Sth row can be represented as pixel circuit SM.
[0034] Please Figure 2 Based on, refer to Figure 3 , Figure 3 Another structural schematic diagram of the nucleic acid synthesis chip in this embodiment is provided; the synthesis driving pixel circuit 21 is disposed on the carrier substrate and includes a synthesis anode 211, a pixel physical spacing region 212, and a light-shielding layer 213; wherein, the light-shielding layer 213 covers the pixel physical spacing region 212, and the height of the component formed between the light-shielding layer 213 and the pixel physical spacing region 212 is equal to the height of the synthesis anode 211.
[0035] Based on this, the nucleic acid synthesis chip can write voltage to the target pixel (site) under a preset time sequence to generate electro-acid (or base). After the "deblocking" is completed, the "activation coupling-capping-oxidation" reaction is completed. The new base is attached to the 5' end of the previous base, and the target single-stranded nucleic acid is correctly extended.
[0036] In one possible implementation, multiple functional units 22 are positioned opposite the nucleic acid synthesis chip 20 to form an integrated module with the nucleic acid synthesis chip 20. Based on this, please... Figure 3 Based on, refer to Figure 4 , Figure 4 Another structural schematic diagram of the reliability detection device in this embodiment is provided; the reliability detection device 10 further includes a common electrode 13. When the action unit 22 includes a liquid crystal dimming material layer, each liquid crystal dimming material layer is disposed below the common electrode 13 and above the synthesis anode 211 in the corresponding synthesis driving pixel circuit 21. In this embodiment, the liquid crystal dimming material layer 14 covers the synthesis pixel circuit. In one possible implementation, each liquid crystal dimming material layer corresponding to the same row of synthesis pixel circuits can be composed of liquid crystal dimming material of the same material. Correspondingly, the length of the liquid crystal dimming material layer can be equal to the length of the synthesis pixel circuits constituting the whole in the corresponding row, so as to cover all the synthesis pixel circuits in the same row.
[0037] In this embodiment, the reliability detection device 10 can refresh and read the pixel array of the optical sensor (i.e., the action unit 22 described in this embodiment) in real time under a preset time sequence. It can detect the color change of the decapping reaction on the opposite micro-region (pixel) on the nucleic acid synthesis chip 20. Then, based on the intensity, distribution, uniformity, and rate of change of the obtained optical signal, it can determine the design and processing reliability (yield) of all or part of the sites, as well as the real-time working status of the nucleic acid synthesis chip 20.
[0038] Please continue to refer to this. Figure 4In this embodiment, the liquid crystal dimming material layer is disposed above the anode (separated) of the synthesis driving pixel circuit 21 in the nucleic acid synthesis chip 20 and below the common electrode 13, forming a "box"-shaped structure with a thin layer of liquid crystal sandwiched between two electrodes. This embodiment can write voltage to each synthesis driving pixel circuit 21 at a corresponding position in the nucleic acid synthesis chip 20 under a preset area. Based on the state of the corresponding synthesis driving pixel circuit 21, i.e., different defect states, different flip states (or different deflection angles) will be exhibited on the corresponding liquid crystal dimming material layer (or under the corresponding area of the liquid crystal dimming material layer), and the light transmittance obtained by the monitoring module 12 will also be different. Based on this, the monitoring module 12 can determine the defect rate and defect distribution during the backplane processing based on the difference rate and the distribution of different signal points, thereby evaluating the reliability of the nucleic acid synthesis chip 20.
[0039] Please refer to Figure 5 , Figure 5 A schematic diagram of the monitoring module in this embodiment is provided. When the links between the functional units arranged in rows in the array are considered as row reaction components, and the links between the functional units arranged in columns in the array are considered as column reaction components, the monitoring module 12 includes a control unit 31, a row selection unit 32, a column selection unit 33, and a column reading unit 34. The control unit 31 is connected to the row selection unit 32 and the column selection unit 33. The row selection unit 32 is also connected to the control terminal of each functional unit 22 on each row reaction component. The column selection unit 33 is also connected to the control terminal of each functional unit 22 on each column reaction component. The column reading unit 34 is also connected to the anode of each functional unit 22 on each column reaction component.
[0040] In this embodiment, the control unit 31 sends control signals to the row selection unit 32 and the column reading unit 34 respectively to adjust the working timing of the row selection unit 32 and the column reading unit 34.
[0041] Specifically, in this embodiment, the column selection unit 33 turns on or off the action unit 22 on each column reaction component according to the control signal.
[0042] The row selection unit 32 turns on or off the action unit 22 on each row reaction component according to the control signal.
[0043] The column reading unit 34 is used to read the pixel array formed by the action unit 22 under the preset area according to the time sequence of the row selection unit 32 and the column reading unit 34.
[0044] In this embodiment, the monitoring module 12 is used to acquire information such as the intensity, distribution, uniformity, and rate of change of the optical signal fed back by the action unit 22. In one possible implementation, the control unit 31 can sequentially turn on the action units 22 arranged in an array in a row-by-column manner, and complete the traversal of the action units 22 under a preset time sequence. Based on this, the monitoring module 12 can perform rapid and sequential scanning under the preset time sequence to obtain the light transmittance of a preset area in the functional surface.
[0045] It should be noted that this embodiment does not limit the specific method by which the control unit 31 performs the scanning, as long as it can turn each action unit 22 on or off under a preset time sequence to complete the traversal and obtain the test sample parameters. For example, in this embodiment, the control unit 31 only needs to perform unified logic control and time sequence control on each action unit 22 so that the monitoring module 12 can obtain the light transmittance of the action unit 22 in the corresponding area. The above description is only one possible implementation method.
[0046] Please refer to Figure 6 , Figure 6 Another structural schematic diagram of the monitoring module in this embodiment is provided; the monitoring module 12 in this embodiment also includes a judgment unit 35, which is connected to the column reading unit 34 and is used to obtain the pixel dot matrix.
[0047] When the nucleic acid synthesis chip 20 is cyclically written with the driving voltage, the judgment unit 35 is also used to determine the detection data based on the pixel dot matrix and to determine whether the detection data is less than or equal to a preset threshold; if yes, the current nucleic acid synthesis chip 20 is determined to be qualified; if no, the current nucleic acid synthesis chip 20 is determined to be unqualified.
[0048] The detection data includes the rate of change, uniformity, and cyclic change / recovery status of light transmittance in the pixel array frame by frame and / or row by row and / or column by column and / or pixel by pixel.
[0049] Please continue to refer to this. Figure 6 When the current nucleic acid synthesis chip 20 is determined to be unqualified, in this embodiment, the judgment unit 35 is also used to traverse the deflection state of each action unit 22 under the current preset area according to the judgment result, and filter out the action unit 22 that is different from the liquid crystal deflection state of the undamaged pixel, so as to obtain the fault location information of the current nucleic acid synthesis chip 20.
[0050] Please refer to Figure 7 , Figure 7 Another structural schematic diagram of the monitoring module in this embodiment is provided; in this embodiment, the functional unit 22 includes a driving transistor, an optical sensor, and a readout control transistor; the monitoring module 12 also includes a bias voltage write signal line.
[0051] Specifically, the cathode of the optical sensor (i.e., the PD cathode in the figure) is connected to the bias voltage write signal line; the anode of the optical sensor (i.e., the PD anode in the figure) is connected to the column read unit 34, the driving transistor, and the read control transistor; the control terminal of the driving transistor is also connected to the column selection unit 33; and the read control transistor is also connected to the row selection unit 32.
[0052] Please continue to refer to this. Figure 7 In this embodiment, the monitoring module 12 also includes a power signal line, a column read signal line, a column control signal line, and multiple optical detection row control signal lines. The driving transistor and other devices under the monitoring module 12 are powered through the power signal line. The anode of the optical sensor (i.e., the PD anode in the figure) is connected to the column read unit 34 through the column read signal line. The control terminal of the driving transistor is connected to the column selection unit 33 through the column control signal line. The read control transistor is connected to the row selection unit 32 through the optical detection row control signal line.
[0053] In this embodiment, the reliability detection device also includes a background light source; the background light source is used to provide light to the set area so that the monitoring module can obtain the light transmittance of the emitted light from the background light source through the working unit in the preset area of the functional surface in real time.
[0054] In one possible implementation method, please refer to Figure 8 , Figure 8 Another structural schematic diagram of the reliability detection device in this embodiment is provided, wherein the emitted light of the background light surface light source 15 is parallel to the normal vector of the plane where the light reaction module 11 is located.
[0055] Please refer to Figure 9 , Figure 9 A schematic diagram of the reliability testing device in this embodiment is provided. In one possible implementation, to improve the accuracy of the reliability testing device 10, a capping layer 214 and an adhesive material area 30 can be provided to fix the reliability testing device 10 and the nucleic acid synthesis chip 20 together. Specifically, the capping layer 214 covers the surface of the nucleic acid synthesis chip 20 and the adhesive material area 30 is filled with adhesive material to fix the reliability testing device 10 and the nucleic acid synthesis chip 20 together. Figure 9 The schematic diagram of the structure of the liquid crystal dimming material layer 14 under region A is a schematic diagram of the liquid crystal dimming material layer before deflection; the schematic diagram of the structure of the liquid crystal dimming material layer 14' under region D is a schematic diagram of the liquid crystal dimming material layer after deflection; specifically, when a part of the pixel region is written at the current synthesis cycle voltage, the liquid crystal dimming material layer of the opposite region is caused to change from the original initial deflection angle to a specific "vertical" deflection angle. At this time, the background light transmittance increases, and the absolute value of the light intensity detected by the corresponding monitoring module 12 is higher or the rate of change is more significant.
[0056] Based on this, the monitoring module 12 can detect the uniformity of modulation and distribution of background light by the "liquid crystal cell" of macro-regions, micro-regions (down to a single pixel) frame by frame, row by row, column by column, pixel by pixel or synchronously, and compare and analyze two sets of data (or images) to determine whether there are missing pixels (electrodes) in sheets / lines, complete / partial missing pixels (electrodes) of a single pixel (electrode), unevenness, horizontal / vertical breaks, or single pixel breaks.
[0057] For details, please refer to Figure 10 , Figure 10 The diagram shows the detection results of the monitoring module in this embodiment. In the diagram, area 8001 represents the current area with a strong electrical signal output, corresponding to a completely normal site (pixel); area 8002 represents the current area with a weak electrical signal output, corresponding to a partially normal site (pixel); area 8003 represents the current area with no electrical signal output, corresponding to a partially damaged site (pixel); and area 8004 represents the current area with no electrical signal output, corresponding to a completely damaged site (pixel).
[0058] This embodiment can use the detection result image obtained by the monitoring module 12, i.e., the electrical signal output intensity of the corresponding area, and then determine the corresponding light transmittance based on the corresponding output intensity to identify the circuit to be detected. Specifically, for each synthesis driving pixel circuit 21, if the synthesis driving pixel circuit 21 in the preset area under the nucleic acid synthesis chip 20 is in a defect-free state, then the light transmittance in the preset area is the same as the preset value, and the liquid crystal deflection state is the same among the synthesis driving pixel circuits 21 in the defect-free state, and the corresponding electrical signal output intensity obtained by the monitoring module 12 is also the same.
[0059] Conversely, if all or part of the transistors, capacitors, signal lines, electrodes, and other components in a single composite driving pixel circuit 21 are missing or uneven, the liquid crystal deflection state on the corresponding composite driving pixel circuit 21 will deviate from the preset state, and the liquid crystal deflection state will also be different from that of an undamaged composite driving pixel circuit 21.
[0060] Similarly, if the transistors, capacitors, signal lines, electrodes, and other components of the composite driving pixel circuit 21 in a certain row, several rows, a certain column, several columns, or a certain area (area) are all or partially missing or uneven, then the liquid crystal deflection state in that row, several rows, that column, and several columns will be biased from the preset state, and the liquid crystal deflection state will also be different from that of the undamaged composite driving pixel circuit 21.
[0061] In addition, this embodiment can also use this detection principle to determine the corresponding abnormality of the synthetic driving pixel circuit 21.
[0062] Based on this, the active optical detection and control array-reliability detection device, composed of devices such as the action unit 22, utilizes efficient in-situ real-time optical detection technology to perform optical transmittance detection using "liquid crystal cell assembly" before nucleic acid synthesis chip synthesis. It can refresh and read the pixel array of the nucleic acid synthesis chip in real time within a preset time sequence, detecting differences in the transmitted area and transmittance of the background light source caused by "liquid crystal deflection." Furthermore, based on the intensity, distribution, uniformity, and rate of change of the obtained optical signals, the design and processing reliability (yield) of all or part of the sites, as well as the real-time operating status of the "nucleic acid synthesis chip," can be determined.
[0063] Following the same approach as the previous embodiment, the present invention also provides a reliability testing system for use in nucleic acid synthesis chips, including the reliability testing device described in any of the first aspects above.
[0064] In summary, this application provides a reliability detection device for a nucleic acid synthesis chip. The nucleic acid synthesis chip includes multiple synthesis driving pixel circuits. The reliability detection device includes a photoreaction module and a monitoring module. The photoreaction module includes multiple action units arranged in an array and disposed on the functional surface of the nucleic acid synthesis chip. Each action unit corresponds to one synthesis driving pixel circuit. For any action unit, under the condition that the corresponding synthesis driving pixel circuit is operating normally, the action unit adjusts its deflection angle according to the driving voltage of the corresponding synthesis driving pixel circuit to change the light transmittance of a preset region in the functional surface. The preset region is used to characterize the functional region corresponding to a preset number of action units. The monitoring module is used to acquire the light transmittance in real time and determine whether the synthesis driving pixel circuit is operating normally in the preset region based on the light transmittance under a preset time series, thereby evaluating the reliability of the nucleic acid synthesis chip. Based on this, this application employs efficient in-situ real-time optical detection technology. Before the synthesis of the nucleic acid synthesis chip, especially for TFT-DNA chips, the integrity of the nucleic acid synthesis chip itself is evaluated using "liquid crystal cell" optical transmittance detection. This can optimize the synthesis process, increase the yield of the target nucleic acid, and reduce costs.
[0065] The above description is merely a preferred embodiment of the present invention and is not intended to limit the invention. Various modifications and variations can be made to the present invention by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.
Claims
1. A reliability testing device applied to a nucleic acid synthesis chip, the nucleic acid synthesis chip comprising multiple synthesis driving pixel circuits, characterized in that, The reliability testing device includes a photoreaction module and a monitoring module; The photoreaction module includes multiple functional units, which are arranged in an array and disposed on the functional surface of the nucleic acid synthesis chip; each functional unit corresponds to a synthesis driving pixel circuit. Wherein, for any one of the action units, under the condition that the corresponding synthesis driving pixel circuit is working normally, the action unit is used to adjust its own deflection angle according to the driving voltage of the corresponding synthesis driving pixel circuit, so as to change the light transmittance of the preset area in the functional surface; the preset area is used to characterize the functional area corresponding to a preset number of action units. The monitoring module is used to acquire the light transmittance in real time and determine whether the synthesis driving pixel circuit in the preset area is working properly based on the light transmittance under the preset time series, so as to evaluate the reliability of the nucleic acid synthesis chip.
2. The reliability testing device according to claim 1, characterized in that, The reliability testing device further includes a common electrode. When the function unit includes a liquid crystal dimming material layer, each liquid crystal dimming material layer is disposed below the common electrode and above the synthesis anode in the corresponding synthesis driving pixel circuit.
3. The reliability testing device according to claim 1, characterized in that, The plurality of functional units are disposed on the opposite side of the nucleic acid synthesis chip to form an integrated module with the nucleic acid synthesis chip.
4. The reliability testing device according to claim 1, characterized in that, When the links between the row-arranged action units in the array are considered as row reaction components, and the links between the column-arranged action units in the array are considered as column reaction components, the monitoring module includes a control unit, a row selection unit, a column selection unit, and a column reading unit; the control unit is connected to the row selection unit and the column selection unit; the row selection unit is also connected to the control terminal of each action unit on each row reaction component; the column selection unit is also connected to the control terminal of each action unit on each column reaction component; the column reading unit is also connected to the anode of each action unit on each column reaction component. The control unit is used to send control signals to the row selection unit and the column reading unit respectively, and adjust the working timing of the row selection unit and the column reading unit; The column selection unit is used to turn on or off the function units on each of the column reaction components according to the control signal. The row selection unit is used to turn on or off the function units on each row reaction component according to the control signal. The column reading unit is used to read the pixel array formed by the function units in the preset area according to the time sequence of the row selection unit and the column reading unit.
5. The reliability testing device according to claim 4, characterized in that, The monitoring module further includes a judgment unit, which is connected to the column reading unit and is used to acquire the pixel matrix; When the nucleic acid synthesis chip is cyclically written with the driving voltage, the judgment unit is also used to determine the detection data based on the pixel dot matrix and to determine whether the detection data is less than or equal to a preset threshold. If so, the current nucleic acid synthesis chip is deemed qualified; If not, the current nucleic acid synthesis chip is deemed unqualified; The detection data includes the rate of change, uniformity, and cyclic change / recovery status of light transmittance of the pixel array frame by frame and / or row by row and / or column by column and / or pixel by pixel.
6. The reliability testing device according to claim 5, characterized in that, When the current nucleic acid synthesis chip is determined to be unqualified, the judgment unit is used to traverse the deflection state of each functional unit in the current preset area according to the judgment result of the judgment unit, and filter out the functional units that are different from the liquid crystal deflection state of the undamaged pixels, so as to obtain the fault location information of the current nucleic acid synthesis chip.
7. The reliability testing device according to claim 4, characterized in that, The functional unit includes a driving transistor, an optical sensor, and a readout control transistor; the monitoring module also includes a bias voltage write signal line. The cathode of the optical sensor is connected to the bias voltage write signal line; the anode of the optical sensor is connected to the column read unit, the driving transistor, and the read control transistor; the control terminal of the driving transistor is also connected to the column select unit; and the read control transistor is also connected to the row select unit.
8. The reliability testing device according to claim 1, characterized in that, The reliability testing device also includes a background light source; The monitoring module is used to acquire in real time the light transmittance of the emitted light from the background light source through the lower action unit in the preset area of the functional surface.
9. The reliability testing device according to claim 8, characterized in that, The emitted light from the background light source is parallel to the normal vector of the plane containing the photoresponse module.
10. A reliability testing system applied to nucleic acid synthesis chips, characterized in that, Includes the reliability testing device as described in any one of claims 1 to 9.