Ion swallowers and neutral beam injection systems
The ion swallower, with its multi-target block structure and independent cooling design, solves the problems of low absorption efficiency and ion escape in existing technologies, achieving efficient absorption of unneutralized ions, reducing the risk of damage to components inside the vacuum chamber, and extending the equipment's lifespan.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- 聚变新能(安徽)有限公司
- Filing Date
- 2026-03-17
- Publication Date
- 2026-05-26
AI Technical Summary
Existing ion swallowers have low absorption efficiency for unneutralized ions, which can easily lead to self-damage of the ion swallower. Furthermore, unabsorbed ions can escape into the vacuum chamber and damage other components.
An ion swallower with a multi-target block structure includes a first energy absorption target, a second energy absorption target, and a third energy absorption target, which absorb ions of different energy levels respectively and are independently cooled by a cooling mechanism to improve absorption efficiency and reduce ion escape.
This improves the absorption efficiency of the ion swallower for unneutralized ions, reduces the risk of damage to other components in the vacuum chamber caused by ions escaping, and extends the service life of the ion swallower.
Smart Images

Figure CN121862487B_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of nuclear fusion technology, and in particular to an ion swallower and a neutral beam injection system having the ion swallower. Background Technology
[0002] In related technologies, an ion swallower is set in the neutral beam system. However, the existing ion swallower is a single integral target block structure with water-cooling pipes embedded in the back. This results in low absorption efficiency of the existing ion swallower for unneutralized ions, which can easily lead to self-damage of the ion swallower. Furthermore, unabsorbed ions can escape into the vacuum chamber and damage other components inside the vacuum chamber. Summary of the Invention
[0003] The present invention aims to at least solve one of the technical problems existing in the prior art. Therefore, one object of the present invention is to provide an ion swallower that improves the absorption efficiency of unneutralized ions and reduces the risk of ions escaping into the vacuum chamber and causing damage to other components within the vacuum chamber.
[0004] The present invention further proposes a neutral beam injection system.
[0005] According to a first aspect of the present invention, an ion swallower is used for the absorption of high-energy ions. The ion swallower includes: a mounting frame; a first energy absorption target, a second energy absorption target, and a third energy absorption target, all fixed to the mounting frame. The first and third energy absorption targets are opposite to each other and spaced apart along a first direction. The second energy absorption target is disposed between the first and third energy absorption targets. The first energy absorption target is used to absorb first-energy ions, the second energy absorption target is used to absorb second-energy ions, and the third energy absorption target is used to absorb third-energy ions. The first energy ion is a half-energy hydrogen ion or deuterium ion and a one-third-energy hydrogen ion or deuterium ion, the second energy ion is a full-energy hydrogen ion or deuterium ion, and the third energy ion is a total-energy molecular ion and a stray molecular ion.
[0006] According to the first aspect of the present invention, the ion swallower, by setting a first energy absorption target, a second energy absorption target and a third energy absorption target, is beneficial to improving the absorption efficiency of the ion swallower for unneutralized ions and reducing the risk of ions escaping into the vacuum chamber and causing damage to other components in the vacuum chamber.
[0007] In some examples of the present invention, the ion swallower further includes a cooling mechanism, wherein a first energy absorption target, a second energy absorption target and a third energy absorption target are connected in parallel to the cooling mechanism.
[0008] In some examples of the present invention, the cooling mechanism includes a medium inflow buffer and a medium outflow buffer. The first energy absorption target includes a first manifold, a second manifold, and a plurality of first heat exchange plates. The plurality of first heat exchange plates are assembled to form a first plate-shaped structure. Each first heat exchange plate has a first heat exchange channel, a first medium inlet, and a first medium outlet. The first heat exchange channel connects to the corresponding first medium inlet and the first medium outlet. The first manifold connects to the medium inflow buffer and the plurality of first medium inlets. The second manifold connects to the medium outflow buffer and the plurality of first medium outlets.
[0009] In some examples of the present invention, the first energy absorption target further includes: a plurality of first connecting pipes, all of which are connected to a first manifold and are respectively connected to a plurality of first medium inlets; and / or the first energy absorption target further includes: a plurality of second connecting pipes, all of which are connected to a second manifold and are respectively connected to a plurality of first medium outlets.
[0010] In some examples of the present invention, a first shielding structure is provided between any two adjacent first heat exchange plates, and the first shielding structure is used to shield the gap between the corresponding two adjacent first heat exchange plates.
[0011] In some examples of the present invention, the second energy absorption target includes a heat exchange structure comprising two heat exchange plates that are opposite to each other and spaced apart along a second direction to form an ion ingestion space between the two heat exchange plates. The distance between the two heat exchange plates gradually decreases along a third direction from the first end to the second end of the heat exchange structure. An inlet for the ingestion space is formed at the first end of the heat exchange structure. The first direction, the second direction, and the third direction are perpendicular to each other.
[0012] In some examples of the present invention, the cooling mechanism includes: a medium inflow buffer section and a medium outflow buffer section; the heat exchange plate section includes a plurality of second heat exchange plates, and the plurality of second heat exchange plates of the heat exchange plate section are assembled to form a second plate-shaped structure; the second energy absorption target further includes: a third manifold and a fourth manifold; each second heat exchange plate has a second heat exchange channel, a second medium inlet and a second medium outlet; the second heat exchange channel is connected to the corresponding second medium inlet and the second medium outlet; the third manifold is connected to the medium inflow buffer section and the plurality of second medium inlets; and the fourth manifold is connected to the medium outflow buffer section and the plurality of second medium outlets.
[0013] In some examples of the present invention, the heat exchange plate section further includes a fifth manifold and a sixth manifold, the fifth manifold being connected to a third manifold and a plurality of second medium inlets, and the sixth manifold being connected to a fourth manifold and a plurality of second medium outlets.
[0014] In some examples of the present invention, a second shielding structure is provided between any two adjacent second heat exchange plates, and the second shielding structure is used to shield the gap between the corresponding two adjacent second heat exchange plates.
[0015] In some examples of the present invention, the second energy absorption target further includes: two scraped beam heat exchange plates, the two scraped beam heat exchange plates are located on the side of the first end away from the second end, the two scraped beam heat exchange plates are respectively disposed on the two heat exchange plate portions, and from the second end to the first end, the two scraped beam heat exchange plates are inclined in the direction away from each other.
[0016] In some examples of the present invention, the scraped heat exchange plate includes: a first plate body and a first heat exchange tube, at least a portion of the first heat exchange tube being embedded in the first plate body, and the cooling mechanism includes: a medium inflow buffer and a medium outflow buffer, the tube inlet end of the first heat exchange tube being connected to the medium inflow buffer, and the tube outlet end of the first heat exchange tube being connected to the medium outflow buffer.
[0017] In some examples of the present invention, the second energy absorption target further includes: a heat exchange baffle, wherein the ends of two heat exchange plates opposite to the first end are spaced apart to form an ion flow gap, the heat exchange baffle is located on the side of the second end opposite to the first end, and the heat exchange baffle blocks the ion flow gap.
[0018] In some examples of the present invention, the heat exchange baffle includes: a second plate body and a second heat exchange tube, at least a portion of the second heat exchange tube is embedded in the second plate body, and the cooling mechanism includes: a medium inflow buffer and a medium outflow buffer, the tube inlet end of the second heat exchange tube is connected to the medium inflow buffer, and the tube outlet end of the second heat exchange tube is connected to the medium outflow buffer.
[0019] In some examples of the present invention, the third energy absorption target includes a third heat exchange plate and a third heat exchange tube, at least a portion of the third heat exchange tube is embedded in the second plate and heat-exchanges with the third heat exchange plate, and the cooling mechanism includes a medium inflow buffer and a medium outflow buffer, the tube inlet end of the third heat exchange tube is connected to the medium inflow buffer, and the tube outlet end of the third heat exchange tube is connected to the medium outflow buffer.
[0020] In some examples of the present invention, the ion swallower further includes: a plurality of temperature detection elements, which are respectively used to detect the temperature of the first energy absorption target, the second energy absorption target and the third energy absorption target.
[0021] A neutral beam injection system according to a second aspect of the present invention includes the ion swallower described above.
[0022] Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description
[0023] The above and / or additional aspects and advantages of the present invention will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which:
[0024] Figure 1 This is a schematic diagram of the structure of an ion swallower according to an embodiment of the present invention;
[0025] Figure 2 This is a schematic diagram of the structure of the first energy absorption target according to an embodiment of the present invention;
[0026] Figure 3 This is a schematic diagram of the structure of the second energy absorption target according to an embodiment of the present invention;
[0027] Figure 4 This is a schematic diagram of the second plate-like structure according to an embodiment of the present invention;
[0028] Figure 5 yes Figure 4 Enlarged view of point A in the middle;
[0029] Figure 6 This is a cross-sectional view of the second heat exchange plate according to an embodiment of the present invention;
[0030] Figure 7 yes Figure 6 Enlarged view of section B in the middle.
[0031] Figure label:
[0032] Ion swallower 20;
[0033] Mounting bracket 40;
[0034] First energy absorption target 50; first manifold 51; second manifold 52; first heat exchange plate 53; first plate structure 531; first connecting pipe 54; second connecting pipe 55;
[0035] First mounting structure 60; first mounting part 61; first reinforcing rib 62; second reinforcing rib 63;
[0036] Second energy absorption target 80; heat exchange structure 81; heat exchange plate section 811; first end 812; inlet of ion swallowing space 813; second end 814; ion swallowing space 815; second heat exchange plate 816; second plate structure 817; second heat exchange channel 818; third manifold 82; fourth manifold 83; fifth manifold 84; sixth manifold 85; scraper heat exchange plate 87; first plate body 871; first heat exchange tube 872;
[0037] Heat exchange baffle 89; second plate 891; second heat exchange tube 892;
[0038] Second mounting structure 90;
[0039] Third energy absorption target 110; third heat exchange plate 111; third heat exchange tube 112;
[0040] Cooling mechanism 120; medium inflow buffer 121; medium outflow buffer 122; medium inflow pipe 123; medium outflow pipe 124;
[0041] Third mounting structure 130; Sixth mounting part 131; Seventh mounting part 132;
[0042] Second shielding structure 150; Third shielding part 151; Fourth shielding part 152;
[0043] Second thermal strain space 160;
[0044] Temperature sensing element 170;
[0045] Third plate wall 181; Third tooth structure 182; Fourth plate wall 183; Fourth tooth structure 184. Detailed Implementation
[0046] Embodiments of the present invention are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.
[0047] The following is for reference. Figures 1-7 An ion swallower 20 according to an embodiment of the present invention is described.
[0048] According to a first aspect of the present invention, an ion swallower 20 is used for the absorption of high-energy ions. The ion swallower 20 includes: a mounting frame 40; a first energy absorption target 50, a second energy absorption target 80, and a third energy absorption target 110. The first energy absorption target 50, the second energy absorption target 80, and the third energy absorption target 110 are all fixed to the mounting frame 40. The first energy absorption target 50 and the third energy absorption target 110 are opposite to each other and spaced apart along a first direction. The second energy absorption target 80 is disposed between the first energy absorption target 50 and the third energy absorption target 110. The first energy absorption target 50 is used to absorb first energy ions, the second energy absorption target 80 is used to absorb second energy ions, and the third energy absorption target 110 is used to absorb third energy ions.
[0049] Among them, such as Figure 1As shown, the first direction is defined as the X direction. The neutral beam injection system may include a beam source, a neutralizer, a deflecting magnet, an ionizer 20, a beam scraper, a power measurement target, a cryogenic pump, a vacuum chamber, etc. The deflecting magnet, ionizer 20, beam scraper, power measurement target, cryogenic pump, etc. can be arranged in the vacuum chamber along the beam transmission direction, while the ionizer 20 can be located downstream of the deflecting magnet.
[0050] The mounting frame 40 can be made of 304L stainless steel. The first energy absorption target 50, the second energy absorption target 80, and the third energy absorption target 110 can all be made of materials such as zirconium chromium copper. The first energy absorption target 50, the second energy absorption target 80, and the third energy absorption target 110 can all be fixed to the mounting frame 40 with bolts. The surface smoothness of all components of the ion swallowing device 20 of the present invention can reach the mirror level.
[0051] For example, the first energy ion absorbed by the first energy absorption target 50 can be a half-energy hydrogen ion or deuterium ion and a one-third-energy hydrogen ion or deuterium ion. The second energy ion absorbed by the second energy absorption target 80 can be a full-energy hydrogen ion or deuterium ion. The third energy ion absorbed by the third energy absorption target 110 can be a universal molecular ion and other stray molecular ions.
[0052] As one embodiment, the workflow of the neutral beam injection system of the present invention can be as follows: a liquid cooling medium is introduced into the ionizer 20. The liquid cooling medium can be pure water or a special coolant. The present invention does not limit the type of liquid cooling medium, as long as it meets the design requirements of the ionizer 20 and the heat dissipation performance and chemical stability requirements of the actual product.
[0053] When the neutral beam system is running, the high-energy particle beam drawn from the beam source contains neutral particles and unneutralized charged ions. Due to their charged characteristics, the unneutralized charged ions will change their trajectory under the Lorentz force of the deflecting magnet and bombard the corresponding energy absorption targets of the ion swallower 20.
[0054] When unneutralized charged particles pass through a deflecting magnet, their trajectories are deflected by the Lorentz force. Full-energy hydrogen or deuterium ions (i.e., second-energy ions) can bombard the second-energy absorption target 80, half-energy hydrogen or deuterium ions and one-third-energy hydrogen or deuterium ions (i.e., first-energy ions) can bombard the first-energy absorption target 50, and full-energy molecular ions and other stray molecular ions (i.e., third-energy ions) can bombard the third-energy absorption target 110.
[0055] High-energy charged ion beams of different energies can generate heat when bombarding the first energy absorption target 50, the second energy absorption target 80, and the third energy absorption target 110, respectively. The cooling medium can circulate within the first energy absorption target 50, the second energy absorption target 80, and the third energy absorption target 110, carrying away the heat generated by the first energy absorption target 50, the second energy absorption target 80, and the third energy absorption target 110 from the neutral beam injection system. This allows the ion swallower 20 to withstand high-energy, long-pulse ion bombardment, reducing the risk of the heated module melting or the cooling medium leaking.
[0056] For example, the relative positions and angles of the first energy absorption target 50, the second energy absorption target 80, and the third energy absorption target 110 can all be specific angles, which can be calculated and generated based on the differences in charge carried by high-energy ion beams of different energy levels. Figure 1 As shown, the lower end of the third energy absorption target 110 can overlap with the scraper, which helps reduce the risk of energy ion leakage, thereby reducing the risk of energy ions damaging other components in the vacuum chamber. The mounting frame 40 can be designed according to the position and angle of the first energy absorption target 50, the second energy absorption target 80, and the third energy absorption target 110, and all three targets can be fixed to the mounting frame 40.
[0057] The ion swallower 20 of the present invention is designed with different types of target blocks for the energy levels of high-energy ion beams of different energy levels. The first energy absorption target 50, the second energy absorption target 80 and the third energy absorption target 110 can respectively absorb the first energy ion, the second energy ion and the third energy ion. This is beneficial to enable different energy ions to bombard different target blocks under the action of the deflecting magnet, which helps to reduce the risk of overheating of a single target block due to different energy ions bombarding the same target block, and reduces the risk of damage to a single target block due to overheating. It also helps to extend the service life of the ion swallower 20.
[0058] The present invention adopts a modular structure design of a first energy absorption target 50, a second energy absorption target 80 and a third energy absorption target 110, and different target blocks can absorb ions of different energies, which is beneficial to enable the ion swallower 20 to withstand the energy generated by high-power neutral beam injection and to operate for a long time.
[0059] The first energy absorption target 50, the second energy absorption target 80, and the third energy absorption target 110 can respectively absorb first-energy ions, second-energy ions, and third-energy ions. Different target blocks can absorb different energy ions. Compared with a single target block structure, this is beneficial for the ion swallower 20 to absorb more different energy ions, which is beneficial for improving the absorption efficiency of the ion swallower 20 for unneutralized ions. This, in turn, helps to reduce the risk of ion escape from the ion swallower 20 and damage to other components in the vacuum chamber. At the same time, the first energy absorption target 50 and the third energy absorption target 110 are opposite to each other and spaced apart along the first direction, and the second energy absorption target 80 is located between the first energy absorption target 50 and the third energy absorption target 110. This is beneficial for matching the first energy absorption target 50, the second energy absorption target 80, and the third energy absorption target 110 with the movement trajectory of the corresponding absorbed ions, which is beneficial for further improving the absorption efficiency of the ion swallower 20 for unneutralized ions.
[0060] According to the first aspect of the present invention, the ion swallower 20, by providing a first energy absorption target 50, a second energy absorption target 80 and a third energy absorption target 110, is beneficial to improving the absorption efficiency of the ion swallower 20 for unneutralized ions and reducing the risk of damage to other components in the vacuum chamber caused by ion escape within the ion swallower 20.
[0061] In some examples of embodiments of the present invention, such as Figure 2 As shown, the ion swallower 20 also includes a cooling mechanism 120, and a first energy absorption target 50, a second energy absorption target 80 and a third energy absorption target 110 connected in parallel to the cooling mechanism 120.
[0062] The first energy absorption target 50, the second energy absorption target 80, and the third energy absorption target 110 are connected in parallel to the cooling mechanism 120. This allows the cooling mechanism 120 to allocate cooling medium flow rates to the first energy absorption target 50, the second energy absorption target 80, and the third energy absorption target 110 respectively, which can match the heat load of each target block. This helps to reduce insufficient heat dissipation caused by insufficient cooling medium flow rate of high-load target blocks and waste of cooling medium caused by excessive cooling medium flow rate of low-load target blocks, and helps to improve the heat dissipation efficiency of the ion swallower 20.
[0063] Meanwhile, the first energy absorption target 50, the second energy absorption target 80, and the third energy absorption target 110 are connected in parallel to the cooling mechanism 120. These three targets are independent of each other; if any one target fails, the others can still perform heat dissipation normally, which helps ensure the stable operation of the long pulse of the neutral beam injection system. The parallel connection of the three targets to the cooling mechanism 120 reduces the risk of heat conduction between any two adjacent targets, thereby extending the service life of the ionizer 20.
[0064] In some examples of embodiments of the present invention, such as Figure 1 , Figure 2 As shown, the cooling mechanism 120 includes a medium inflow buffer section 121 and a medium outflow buffer section 122. The first energy absorption target 50 includes a first manifold 51, a second manifold 52, and a plurality of first heat exchange plates 53. The plurality of first heat exchange plates 53 are assembled to form a first plate-shaped structure 531. Each first heat exchange plate 53 has a first heat exchange channel, a first medium inlet, and a first medium outlet. The first heat exchange channel connects the corresponding first medium inlet and the first medium outlet. The first manifold 51 connects the medium inflow buffer section 121 and the plurality of first medium inlets. The second manifold 52 connects the medium outflow buffer section 122 and the plurality of first medium outlets.
[0065] The first heat exchange plate 53 can be made of zirconium-chromium-copper material, which has excellent heat dissipation and ductility, and can withstand long-term bombardment by high-energy ion beams, avoiding thermal deformation failure. Exemplarily, the first energy absorption target 50 of the present invention can absorb half-energy hydrogen ions or deuterium ions and one-third-energy hydrogen ions or deuterium ions (i.e., the first energy ions). The first energy absorption target 50 can employ an enhanced heat exchange module. A first heat exchange channel can be formed inside the first heat exchange plate 53, and the first heat exchange channel can adopt a trapezoidal staggered channel design. The first heat exchange channel can be constructed as a comb-like structure, which is beneficial for enhancing the flow resistance of the cooling medium, thereby enhancing the heat dissipation capacity of the cooling medium.
[0066] As an example, the first heat exchange plate 53 has a first plate wall and a second plate wall that are opposite to and spaced apart. A plurality of first tooth structures are formed on the side of the first plate wall facing the second plate wall. The plurality of first tooth structures are arranged in sequence at intervals along the extension direction of the first heat exchange plate 53. A plurality of second tooth structures are formed on the side of the second plate wall facing the first plate wall. The plurality of second tooth structures are arranged in sequence at intervals along the extension direction of the first heat exchange plate 53. A second tooth structure extends between any two adjacent first tooth structures to form a first heat exchange channel in the first heat exchange plate 53.
[0067] As an example, such as Figure 1As shown, the cooling mechanism 120 may include a medium inflow buffer 121, a medium outflow buffer 122, a medium inflow pipe 123, and a medium outflow pipe 124. One end of the medium inflow pipe 123 may be connected to the cooling busbar of the neutral beam injection system, and the other end of the medium inflow pipe 123 may be connected to the medium inflow buffer 121. The medium inflow pipe 123 can introduce the cooling medium from the cooling busbar of the neutral beam injection system into the medium inflow buffer 121. One end of the medium outflow pipe 124 may be connected to the medium outflow buffer 122, and the other end of the medium outflow pipe 124 may be connected to the cooling busbar of the neutral beam injection system. The medium outflow pipe 124 can introduce the medium containing heat generated by the bombardment of first-energy ions from the medium outflow buffer 122 into the cooling busbar of the neutral beam injection system.
[0068] The first plate structure 531 may include two, three, four, five, six, or other numbers of first heat exchange plates 53, such as... Figure 2 As shown, the present invention is illustrated by taking the first plate-shaped structure 531, which includes six first heat exchange plates 53, as an example.
[0069] As an example, such as Figure 2 As shown, in this embodiment of the invention, the extending direction of the first plate-shaped structure 531 is defined as direction B, and the width direction of the first plate-shaped structure 531 is defined as direction C. The first energy absorption target 50 may include a first mounting structure 60, which may include a first mounting portion 61, a first reinforcing rib 62, and a second reinforcing rib 63. The first heat exchange plate 53 may be fixed to the first mounting portion 61 by bolts, and the first mounting portion 61 may be a plate-shaped structure.
[0070] The first mounting structure 60 may be provided with a plurality of first reinforcing ribs 62, which extend along the width direction of the first plate-like structure 531 and are arranged at intervals along the extension direction of the first plate-like structure 531. The first mounting structure 60 may include a plurality of second reinforcing ribs 63, which extend along the extension direction of the first plate-like structure 531 and are arranged at intervals along the width direction of the first plate-like structure 531. The plurality of first reinforcing ribs 62 and the plurality of second reinforcing ribs 63 may be arranged perpendicular to each other. By providing the first mounting part 61, which is fixed to the mounting frame 40, the first energy absorption target 50 can be fixed to the mounting frame 40. Furthermore, by providing the first reinforcing ribs 62 and the second reinforcing ribs 63, the structural strength of the first mounting part 61 is improved, and the risk of deformation of the first mounting part 61 is reduced.
[0071] The medium flowing into the buffer section 121 can temporarily store the cooling medium. The first manifold 51 can distribute the cooling medium temporarily stored in the medium flowing into the buffer section 121 to multiple first medium inlets. The multiple first medium inlets introduce the cooling medium into multiple first heat exchange channels of multiple first heat exchange plates 53. After heat exchange through multiple first heat exchange channels, the cooling medium can flow out of the first heat exchange channels through multiple first medium outlets, and then be collected through the second manifold 52, and then flow out of the ion swallower 20 through the medium flowing out buffer section 122. Therefore, by setting multiple first heat exchange plates 53, each of which has a first heat exchange channel, a first medium inlet and a first medium outlet, the first energy absorption target 50 is equipped with multiple first heat exchange plates 53. Each first medium inlet is connected to a first manifold 51 and a corresponding first heat exchange channel, and each first medium outlet is connected to a second manifold 52 and a corresponding first heat exchange channel. This helps to reduce the risk of insufficient cooling medium flow in a single first heat exchange channel, helps to ensure that the heat exchange of each first heat exchange plate 53 can be carried out stably, and helps to ensure that the overall temperature of the first energy absorption target 50 is uniform. This makes it easier for the ion swallower 20 to adapt to high-power ion beam bombardment scenarios.
[0072] The first plate structure 531 includes multiple first heat exchange plates 53, which helps to increase the contact area between the first heat exchange plates 53 and the ion beam, helps the first energy absorption target 50 to absorb more first energy ions, helps to improve the heat exchange efficiency of the first energy absorption target 50, and helps to reduce the risk of melting or failure of the first energy absorption target 50 due to heat accumulation.
[0073] As an example, multiple first medium inlets can be connected in parallel to the first manifold 51, and multiple first medium outlets can be connected in parallel to the second manifold 52. This is beneficial to ensure that the first heat exchange channel of each first heat exchange plate 53 can receive an effective cooling medium, and to ensure that the first energy absorption target 50 can effectively transfer away the heat generated by ion beam energy deposition.
[0074] In some examples of embodiments of the present invention, such as Figure 2 As shown, the first energy absorption target 50 further includes: a plurality of first connecting pipes 54, all of which are connected to the first manifold 51, and the plurality of first connecting pipes 54 are respectively connected to a plurality of first medium inlets; and / or the first energy absorption target 50 further includes: a plurality of second connecting pipes 55, all of which are connected to the second manifold 52, and the plurality of second connecting pipes 55 are respectively connected to a plurality of first medium outlets.
[0075] In one embodiment, the first energy absorption target 50 may include a plurality of first connecting pipes 54, each of which is connected to a first manifold 51 and is respectively connected to a plurality of first medium inlets. In another embodiment, the first energy absorption target 50 may include a plurality of second connecting pipes 55, each of which is connected to a second manifold 52 and is respectively connected to a plurality of first medium outlets. In yet another embodiment, the first energy absorption target 50 may include a plurality of first connecting pipes 54 and a plurality of second connecting pipes 55. Figure 2 As shown, this application uses a first energy absorption target 50 comprising a plurality of first connecting tubes 54 and a plurality of second connecting tubes 55 as an example for illustration.
[0076] Multiple first connecting pipes 54 can be respectively configured to correspond one-to-one with multiple first medium inlets, and multiple second connecting pipes 55 can be respectively configured to correspond one-to-one with multiple first medium outlets. As an example, the first energy absorption target 50 may include a first manifold 51 and a second manifold 52. The first manifold 51 can connect multiple first connecting pipes 54 and the medium inflow buffer 121. After the cooling medium enters the first manifold 51 from the medium inflow buffer 121, it flows to the first manifold 51 for temporary storage, and then is evenly distributed to the first medium inlet of each first heat exchange plate 53 through multiple first connecting pipes 54. The second manifold 52 can connect multiple second connecting pipes 55 and the medium outflow buffer 122. After heat exchange in the first heat exchange channels of multiple first heat exchange plates 53, the cooling medium carrying heat flows out through the first medium outlet, converges into the second manifold 52 through multiple second connecting pipes 55, and finally flows to the medium outflow buffer 122.
[0077] Multiple first medium inlets can be connected to the first manifold 51 through multiple first connecting pipes 54. The length of the multiple first connecting pipes 54 can be the same, so that the flow path length of the cooling medium from the first manifold 51 to the multiple first medium inlets is the same. This can reduce the problem of uneven distribution of cooling medium flow caused by different flow path lengths when the cooling medium in the first manifold 51 flows to the multiple first medium inlets. This is beneficial to ensure that all first heat exchange plates 53 obtain a uniform and stable cooling medium flow, and to reduce the risk of heat accumulation in a certain first heat exchange plate 53 due to insufficient flow. This is also beneficial to further improve the heat exchange efficiency of the first energy absorption target 50.
[0078] In some examples of embodiments of the present invention, a first shielding structure is provided between any two adjacent first heat exchange plates 53, and the first shielding structure is used to shield the gap between the corresponding two adjacent first heat exchange plates 53.
[0079] In one embodiment, the first shielding structure may include a first shielding part and a second shielding part that are adapted to each other. The first shielding part may be integrally formed or fixed to one of any two adjacent first heat exchange plates 53 by means of welding or other methods. The second shielding part may be fixed to the other first heat exchange plate 53. The first shielding part is designed as a first protrusion structure extending outward, and the second shielding part is designed as a second protrusion structure that matches the first protrusion structure. The first shielding part may be higher than the second shielding part. The first shielding part and the second shielding part are stacked, and the first shielding part may be parallel to and attached to the second shielding part. This can shield the gap between two adjacent first heat exchange plates 53, which is beneficial to improving the sealing effect of the first shielding structure and reducing the risk of high-energy particles escaping from the gap between two adjacent first heat exchange plates 53. Meanwhile, the two adjacent first heat exchange plates 53 are spaced apart to form a first thermal strain space. The first thermal strain space can provide deformation space for the two adjacent first heat exchange plates 53 to undergo thermal deformation, which helps to reduce the risk of damage to the first heat exchange plates 53 caused by mutual compression due to thermal deformation of the two adjacent first heat exchange plates 53, which helps to extend the service life of the first heat exchange plates 53, and thus helps to extend the service life of the first energy absorption target 50, and helps to reduce the maintenance cost of the first energy absorption target 50.
[0080] As another embodiment, the first shielding structure may include a first protrusion and a first groove that are adapted to each other. The first protrusion may be fixedly connected to the edge of one of the two adjacent first heat exchange plates 53, and the first groove may be formed on the corresponding edge of the other first heat exchange plate 53. The first protrusion can be embedded into the first groove to achieve the effect of shielding the gap between the corresponding two adjacent first heat exchange plates 53.
[0081] The first shielding structure shields the gap between two adjacent first heat exchange plates 53, which can reduce the leakage of first energy ions from the gap. This helps to reduce the risk of first energy ions directly impacting the internal components of the vacuum chamber, thereby damaging the internal components of the vacuum chamber and protecting them.
[0082] In some examples of embodiments of the present invention, such as Figure 3 As shown, the second energy absorption target 80 includes a heat exchange structure 81, which includes two heat exchange plates 811. The two heat exchange plates 811 are opposite to each other and spaced apart along a second direction to form an ion swallowing space 815 between the two heat exchange plates 811. Along a third direction, from the first end 812 to the second end 814 of the heat exchange structure 81, the distance between the two heat exchange plates 811 gradually decreases. The first end 812 of the heat exchange structure 81 has a swallowing space inlet 813. The first direction, the second direction and the third direction are perpendicular to each other.
[0083] Among them, such as Figure 3 As shown, this application defines the second direction as the Y direction and the third direction as the Z direction. As an embodiment, the full-energy hydrogen (deuterium) ions (i.e., the second-energy ions) after being deflected by the deflecting magnet can enter the ion ingestion space 815 through the ingestion space inlet 813. Since the distance between the two heat exchange plate portions 811 gradually decreases along the third direction from the first end 812 to the second end 814 of the heat exchange structure 81, the ions are gradually gathered and bombard the inner sidewalls of the two heat exchange plate portions 811.
[0084] According to the principle of neutral beam injection system, after being deflected by deflecting magnets, the trajectories of ions with different energies differ. Full-energy hydrogen (deuterium) ions can enter the ion swallowing space 815 through the swallowing space inlet 813 and bombard the second energy absorption target 80. In order to disperse and reduce the thermal shock of high-energy ion beams, this invention designs a structure in which the distance between the two heat exchange plate portions 811 gradually decreases along a third direction from the first end 812 to the second end 814 of the heat exchange structure 81. This can guide the ions to continuously adhere to the heat exchange plate portions 811, increase the beam bombardment bearing area of the heat exchange structure 81, and reduce the energy deposition per unit area of the heat exchange structure 81.
[0085] In some examples of embodiments of the present invention, such as Figure 1 , Figure 3 As shown, the cooling mechanism 120 includes: a medium inflow buffer section 121 and a medium outflow buffer section 122; the heat exchange plate section 811 includes a plurality of second heat exchange plates 816, and the plurality of second heat exchange plates 816 of the heat exchange plate section 811 are assembled to form a second plate structure 817; the second energy absorption target 80 also includes: a third manifold 82 and a fourth manifold 83; each second heat exchange plate 816 has a second heat exchange channel 818, a second medium inlet and a second medium outlet; the second heat exchange channel 818 is connected to the corresponding second medium inlet and the second medium outlet; the third manifold 82 is connected to the medium inflow buffer section 121 and the plurality of second medium inlets; and the fourth manifold 83 is connected to the medium outflow buffer section 122 and the plurality of second medium outlets.
[0086] The second heat exchange plate 816 can be made of zirconium-chromium-copper material. Zirconium-chromium-copper material possesses both excellent heat dissipation and ductility, which helps the second heat exchange plate 816 withstand bombardment by long-pulse high-energy ion beams, thereby reducing the risk of thermal deformation and failure of the second heat exchange plate 816. The heat exchange plate section 811 can include two, three, four, five, six, seven, eight, nine, or other numbers of second heat exchange plates 816, such as... Figure 3As shown, this application uses a heat exchange plate section 811 comprising nine second heat exchange plates 816 as an example for description. The nine second heat exchange plates 816 can be arranged sequentially along a third direction. A second heat exchange channel 818 can be formed inside the second heat exchange plate 816. Since the second energy absorption target 80 has a high energy deposition load, the formation of a second heat exchange channel 818 inside the second heat exchange plate 816 of the second energy absorption target 80 improves the heat exchange effect of the second heat exchange plate 816. The second heat exchange channel 818 can have the same structure as the first heat exchange channel. The second heat exchange channel 818 can be constructed as a comb-shaped channel, which helps to increase the flow resistance of the cooling medium in the second heat exchange channel 818, thereby helping to increase the heat dissipation capacity of the second energy absorption target 80.
[0087] As an example, such as Figure 6 and Figure 7 As shown, the second heat exchange plate 816 has a third plate wall 181 and a fourth plate wall 183. A plurality of third tooth structures 182 can be formed on the side of the third plate wall 181 facing the fourth plate wall 183. The plurality of third tooth structures 182 can be arranged sequentially at intervals along the extension direction of the second heat exchange plate 816. A plurality of fourth tooth structures 184 can be formed on the side of the fourth plate wall 183 facing the third plate wall 181. The plurality of fourth tooth structures 184 can be arranged sequentially at intervals along the extension direction of the second heat exchange plate 816. A fourth tooth structure 184 extends between any two adjacent third tooth structures 182 to form a second heat exchange channel 818 in the second heat exchange plate 816.
[0088] The heat exchange plate portion 811 of the second energy absorption target 80 is the main structure that primarily withstands the impact of the full-energy high-energy ion beam. The heat exchange plate portion 811 can disperse and reduce the thermal impact of the high-energy ion beam. In this invention, multiple second heat exchange plates 816 are assembled along the direction perpendicular to the deflection of the high-energy ion beam to form a second plate-shaped structure 817, such as... Figure 3 As shown, the two second plate-like structures 817 in this invention can be arranged in a "V" shape, which can increase the bearing area of ion beam bombardment, thereby helping to reduce energy deposition per unit area.
[0089] As one embodiment, the cooling medium in the cooling busbar of the neutral beam injection system can enter the medium inflow buffer 121 of the cooling mechanism 120 through the medium inflow pipe 123. The medium inflow buffer 121 can transport the cooling medium to the third manifold 82 of the second energy absorption target 80. The cooling medium can enter the second heat exchange channel 818 inside the second heat exchange plate 816 through the second medium inlet. The full-energy ions (i.e., second-energy ions) after being deflected by the deflecting magnet can bombard the second heat exchange plate 816. When the cooling medium flows in the second heat exchange channel 818, it can absorb the heat generated by the ions bombarding the second heat exchange plate 816, thereby achieving heat load transfer. The medium after absorbing heat can flow out of the second heat exchange plate 816 through the second medium outlet of the corresponding second heat exchange plate 816 and be collected into the fourth manifold 83. The fourth manifold 83 can collect all the return medium of the second heat exchange plate 816. The fourth manifold 83 can transport the collected heat-laden medium to the medium outflow buffer 122 of the cooling mechanism 120, and the medium outflow pipe 124 can send the heat-laden medium in the medium outflow buffer 122 back to the cooling busbar of the neutral beam injection system.
[0090] The heat exchange plate section 811 includes multiple second heat exchange plates 816. These multiple second heat exchange plates 816 are assembled to form a second plate-like structure 817. When a single second heat exchange plate 816 is damaged by ion bombardment, the remaining second heat exchange plates 816 can still perform heat exchange, which helps maintain the heat exchange stability of the ionizer 20. The multiple second heat exchange plates 816 assembled to form the second plate-like structure 817 can share the heat load from ion bombardment, which helps reduce the thermal stress borne by a single second heat exchange plate 816, reduces the risk of overheating failure of a single second heat exchange plate 816, and extends the service life of the second heat exchange plates 816.
[0091] The third manifold 82 connects the medium inflow buffer section 121 and multiple second medium inlets, and the fourth manifold 83 connects the medium outflow buffer section 122 and multiple second medium outlets. This can shorten the transmission path of the cooling medium, which is conducive to the cooling medium flowing into the second heat exchange channel 818 for heat exchange, and further improves the heat exchange efficiency of the second energy absorption target 80.
[0092] In some examples of embodiments of the present invention, such as Figure 3 As shown, the heat exchange plate section 811 also includes a fifth manifold 84 and a sixth manifold 85. The fifth manifold 84 is connected to the third manifold 82 and a plurality of second medium inlets, and the sixth manifold 85 is connected to the fourth manifold 83 and a plurality of second medium outlets.
[0093] Both the fifth manifold 84 and the sixth manifold 85 can be fixed to the second plate-shaped structure 817. In one embodiment, the cooling medium in the cooling busbar of the neutral beam injection system can enter the medium inflow buffer 121 of the cooling mechanism 120 through the medium inflow pipe 123. The cooling medium in the medium inflow buffer 121 flows to the third manifold 82, which can then transport the medium to the fifth manifold 84. The fifth manifold 84 is connected to the second medium inlets of the multiple second heat exchange plates 816, allowing the cooling medium to enter the second heat exchange channel 818 inside the second heat exchange plate 816 through the second medium inlets. Full-energy ions (i.e., second-energy ions) can bombard the second heat exchange plate 816, and the medium can absorb heat while flowing within the second heat exchange channel 818. The heat-absorbed medium can flow to the sixth manifold 85 through the second medium outlet. The sixth manifold 85 can then transport the heated medium to the fourth manifold 83. The fourth manifold 83 can transport the hot medium to the medium outflow buffer 122 of the cooling mechanism 120, and the medium outflow pipe 124 can send the hot medium in the medium outflow buffer 122 back to the cooling busbar of the neutral beam injection system. The hot medium can be cooled down and then re-enter the next cycle.
[0094] The fifth manifold 84 connects the third manifold 82 and multiple second medium inlets. The fifth manifold 84 can evenly distribute the cooling medium to the multiple second medium inlets, which helps to ensure consistent medium flow rates across all second heat exchange plates 816 and reduces the risk of insufficient heat dissipation from a single second heat exchange plate 816 due to insufficient medium flow in its second heat exchange channel 818. The sixth manifold 85 connects the fourth manifold 83 and multiple second medium outlets. The sixth manifold 85 can collect the medium flowing out from the multiple second medium outlets, which helps to ensure the medium outflow velocity of each second heat exchange plate 816 and to ensure consistent heat exchange efficiency across all second heat exchange plates 816.
[0095] In some examples of embodiments of the present invention, such as Figure 4 , Figure 5 As shown, a second shielding structure 150 is provided between any two adjacent second heat exchange plates 816. The second shielding structure 150 is used to shield the gap between the corresponding two adjacent second heat exchange plates 816.
[0096] As one example, such as Figure 4 , Figure 5As shown, the second shielding structure 150 may include a third shielding part 151 and a fourth shielding part 152 that are adapted to each other. The third shielding part 151 may be integrally formed or fixed to one of any two adjacent second heat exchange plates 816 by means of welding or other methods. The fourth shielding part 152 may be fixed to the other second heat exchange plate 816. The third shielding part 151 may be designed as an outwardly extending third boss structure, and the fourth shielding part 152 may be designed as a fourth boss structure that matches the third boss structure. The third shielding part 151 and the fourth shielding part 152 may be overlapped and fitted together. This can shield the gap between two adjacent second heat exchange plates 816, which is beneficial to improving the sealing effect of the second shielding structure 150 and reducing the risk of high-energy particles escaping from the gap between two adjacent second heat exchange plates 816. Meanwhile, the two adjacent second heat exchange plates 816 are spaced apart to form a second thermal strain space 160. The second thermal strain space 160 can provide deformation space for the two adjacent second heat exchange plates 816 to undergo thermal deformation, which helps to reduce the risk of damage to the second heat exchange plates 816 caused by mutual compression due to thermal deformation. This helps to extend the service life of the second heat exchange plates 816, and in turn helps to extend the service life of the second energy absorption target 80, and helps to reduce the maintenance cost of the second energy absorption target 80.
[0097] As another embodiment, the second shielding structure 150 may include a second protrusion and a second groove that are adapted to each other. The second protrusion may be fixedly connected to one of any two adjacent second heat exchange plates 816, and the second groove may be formed on the other second heat exchange plate 816. The second protrusion may be embedded into the second groove to achieve the effect of shielding the gap between the corresponding two adjacent second heat exchange plates 816.
[0098] The second shielding structure 150 shields the gap between two adjacent second heat exchange plates 816, which can reduce the leakage of ions from the gap, thus reducing the risk of damage to the internal components of the vacuum chamber caused by ion escape and protecting the internal components of the vacuum chamber.
[0099] In some examples of embodiments of the present invention, such as Figure 3 As shown, the second energy absorption target 80 also includes two scraped beam heat exchange plates 87. The two scraped beam heat exchange plates 87 are located on the side of the first end 812 away from the second end 814. The two scraped beam heat exchange plates 87 are respectively disposed on the two heat exchange plate portions 811. From the second end 814 to the first end 812, the two scraped beam heat exchange plates 87 are inclined in the direction away from each other.
[0100] Two scraped heat exchange plates 87 are located on the side of the first end 812 away from the second end 814, and the two scraped heat exchange plates 87 are inclined in the direction away from each other. The coverage area of the two scraped heat exchange plates 87 is larger than the coverage area of the ion swallowing space inlet 813. The two scraped heat exchange plates 87 can intercept the second energy ions that deviate from the trajectory on the scraped heat exchange plates 87, which is conducive to allowing more ions to enter the ion swallowing space 815 to bombard the heat exchange structure 81. It is also conducive to reducing the problem of ion leakage caused by the narrow swallowing space inlet 813, thereby improving the heat exchange efficiency of the ion swallower 20. It is also conducive to reducing stray ions that escape into the vacuum chamber, and to reducing the risk of stray ions bombarding other components in the vacuum chamber.
[0101] In some examples of embodiments of the present invention, such as Figure 3 As shown, the scraper heat exchange plate 87 includes: a first plate body 871 and a first heat exchange tube 872, at least a portion of the first heat exchange tube 872 is embedded in the first plate body 871, and the cooling mechanism 120 includes: a medium inflow buffer section 121 and a medium outflow buffer section 122, the tube inlet end of the first heat exchange tube 872 is connected to the medium inflow buffer section 121, and the tube outlet end of the first heat exchange tube 872 is connected to the medium outflow buffer section 122.
[0102] Among them, the energy deposition load of the scraped heat exchange plate 87 is relatively small, and a labyrinth-type embedded tube heat exchange design can be adopted, in which the first heat exchange tube 872 can be embedded inside the first plate body 871. As an example, such as Figure 3 As shown, the inlet end of the first heat exchange tube 872 can be connected to the fifth manifold 84, and the outlet end of the first heat exchange tube 872 can be connected to the sixth manifold 85.
[0103] As an example, such as Figure 3 As shown, the heat exchange plate portion 811 may also include a second mounting structure 90, a second heat exchange plate 816 fixed to the second mounting structure 90, the second heat exchange plate 816 may be fixed to the second mounting structure 90 by bolts, and the scraper heat exchange plate 87 may also be fixed to the second mounting structure 90.
[0104] The first plate 871 of the scraped heat exchange plate 87 can directly withstand ion bombardment, and the heat from ion deposition can be concentrated in the first plate 871. At least part of the first heat exchange tube 872 is embedded in the first plate 871, which can shorten the contact distance between the cooling medium and the first plate 871, and also increase the contact area between the cooling medium and the first plate 871. This is beneficial to shortening the heat conduction path and improving the heat exchange efficiency of the cooling medium in the first heat exchange tube 872.
[0105] At least a portion of the first heat exchange tube 872 is embedded within the first plate 871, which helps to make the structure of the ionizer 20 more compact and improves the space utilization of the ionizer 20. The inlet end of the first heat exchange tube 872 is connected to the medium inflow buffer section 121, and the outlet end of the first heat exchange tube 872 is connected to the medium outflow buffer section 122. This helps to ensure that the temperature of the cooling medium flowing into the scraped heat exchange plate 87 is consistent with the temperature of the cooling medium flowing into other heat exchange components, and helps to maintain the stability of the heat exchange efficiency of the scraped heat exchange plate 87.
[0106] In some examples of embodiments of the present invention, such as Figure 3 As shown, the second energy absorption target 80 further includes a heat exchange baffle 89, with the ends of the two heat exchange plates 811 separated from the first end 812 to form an ion flow gap, the heat exchange baffle 89 being located on the side of the second end 814 away from the first end 812, and the heat exchange baffle 89 blocking the ion flow gap.
[0107] The heat exchange baffle 89 blocks the ion flow gap, which helps reduce the risk of ions escaping through the ion flow gap into the vacuum chamber and bombarding other components inside the vacuum chamber. The heat exchange baffle 89 is located on the side of the second end 814 away from the first end 812 and blocks the ion flow gap, which helps the heat exchange baffle 89 to receive ions that are not absorbed by the heat exchange plate part 811.
[0108] In some examples of embodiments of the present invention, such as Figure 3 As shown, the heat exchange baffle 89 includes a second plate 891 and a second heat exchange tube 892. At least a portion of the second heat exchange tube 892 is embedded in the second plate 891. The cooling mechanism 120 includes a medium inflow buffer section 121 and a medium outflow buffer section 122. The inlet end of the second heat exchange tube 892 is connected to the medium inflow buffer section 121, and the outlet end of the second heat exchange tube is connected to the medium outflow buffer section 122.
[0109] The second plate 891 and the second heat exchange tube 892 are heat exchanged together. Part of the structure of the second heat exchange tube 892 can be embedded in the second plate 891, or the second heat exchange tube 892 can be completely embedded in the second plate 891. The inlet end of the second heat exchange tube 892 can be connected to the third manifold 82, and the outlet end of the second heat exchange tube 892 can be connected to the fourth manifold 83.
[0110] The second heat exchange tube 892 is at least partially embedded within the second plate 891, which shortens the heat conduction path between the cooling medium and the second plate 891 and further improves the structural compactness of the ion swallower 20. The heat exchange baffle 89 blocks the ion flow gap, and the inlet end of the second heat exchange tube 892 is connected to the medium inflow buffer section 121, while the outlet end of the second heat exchange tube 892 is connected to the medium outflow buffer section 122. This allows the cooling medium to circulate within the second heat exchange tube 892 and absorb the heat generated by ions bombarding the second plate 891 of the heat exchange baffle 89, which helps reduce the heat load on the heat exchange baffle 89 and reduces the risk of heat accumulation on the second plate 891 causing damage to the second plate 891.
[0111] In some examples of embodiments of the present invention, such as Figure 2 As shown, the third energy absorption target 110 includes a third heat exchange plate 111 and a third heat exchange tube 112. At least a portion of the third heat exchange tube 112 is embedded in the third heat exchange plate 111 and heats exchanged with the third heat exchange plate 111. The cooling mechanism 120 includes a medium inflow buffer section 121 and a medium outflow buffer section 122. The inlet end of the third heat exchange tube 112 is connected to the medium inflow buffer section 121, and the outlet end of the third heat exchange tube 112 is connected to the medium outflow buffer section 122.
[0112] The third energy absorption target 110 can absorb omnipotent molecular ions and other stray molecular ions (i.e., third energy ions). The third heat exchange tube 112 can adopt a labyrinth structure and can be welded to the third heat exchange plate 111.
[0113] As an example, such as Figure 1 As shown, the third energy absorption target 110 may include a third mounting structure 130, which may include a sixth mounting part 131 and a seventh mounting part 132. The sixth mounting part 131 may be fixedly connected to the mounting bracket 40 by bolts, and the seventh mounting part 132 may be fixedly connected to the third heat exchange plate 111 of the third energy absorption target 110 by bolts.
[0114] The inlet end of the third heat exchange tube 112 is connected to the medium inflow buffer section 121, and the outlet end of the third heat exchange tube 112 is connected to the medium outflow buffer section 122. Thus, the cooling medium can circulate within the third heat exchange tube 112, absorbing the heat generated by ion bombardment of the third heat exchange plate 111, which helps ensure the stable operation of the third energy absorption target 110. At least a portion of the third heat exchange tube 112 is embedded within the third heat exchange plate 111, further improving the structural compactness of the ion swallower 20, shortening the contact distance between the cooling medium and the third heat exchange plate 111, and increasing the contact area between the cooling medium and the third heat exchange plate 111. This shortens the heat conduction path and improves the heat exchange efficiency of the cooling medium within the third heat exchange tube 112.
[0115] In some examples of embodiments of the present invention, such as Figure 1 As shown, the ion swallower 20 also includes multiple temperature detection elements 170, which are used to detect the temperatures of the first energy absorption target 50, the second energy absorption target 80 and the third energy absorption target 110, respectively.
[0116] The temperature detection element 170 can be a thermocouple temperature sensor, and temperature detection elements 170 can be provided on the first heat exchange plate 53, the second heat exchange plate 816, and the third heat exchange tube 112. As an embodiment, the ion swallowing device 20 can include a control system, and the temperature detection element 170 can be communicatively connected to the control system. The temperature detection element 170 on the first heat exchange plate 53 is used to detect the temperature of the first energy absorption target 50, the temperature detection element 170 on the second heat exchange plate 816 is used to detect the temperature of the second energy absorption target 80, and the temperature detection element 170 on the third heat exchange tube 112 is used to detect the temperature of the third energy absorption target 110. When the temperature of any one of the first energy absorption target 50, the second energy absorption target 80, and the third energy absorption target 110 exceeds a preset temperature value, the control system controls the neutral beam injection system to stop working, and the control system can also control the neutral beam injection system to issue an alarm message.
[0117] As an example, the working process of the ion swallower 20 can be as follows: the beam source can generate a particle beam containing hydrogen ions, deuterium ions and stray molecular ions of different energy levels. The particle beam can be drawn out by high voltage and passed through a neutralizer. Some particles can form neutral particles, while the unneutralized charged ions are retained.
[0118] Neutral particles can pass through a deflecting magnet. Unneutralized charged ions can change their trajectory under the Lorentz force of the deflecting magnet. Full-energy hydrogen or deuterium ions (i.e., second-energy ions) can be deflected toward the second-energy absorption target 80. Half-energy hydrogen or deuterium ions and one-third-energy hydrogen or deuterium ions (i.e., first-energy ions) can be deflected toward the first-energy absorption target 50. All-energy molecular ions and other stray molecular ions (i.e., third-energy ions) can be deflected toward the third-energy absorption target 110.
[0119] Second-energy ions can enter the ion-absorbing space 815 of the second-energy absorption target 80 through the inlet 813 and bombard the heat exchange plate section 811. First-energy ions can bombard the first-energy absorption target 50. Third-energy ions can bombard the third-energy absorption target 110. The scraping heat exchange plate 87 can intercept ions that deviate from their trajectory, and the heat exchange baffle 89 can prevent ions from escaping from the ion flow gap.
[0120] The cooling medium can be distributed from the medium inlet buffer 121 to the manifold of each target block, and then flow into the heat exchange channel of the heat exchange plate of each target block. The cooling medium can absorb the heat generated after ions bombard the heat exchange plate of each target block. The cooling medium can also flow back to the cooling busbar of the neutral beam injection system through the medium outlet buffer 122. Multiple temperature sensors 170 can monitor the temperature of each target block in real time.
[0121] It should be noted that the first heat exchange plate 53 and the second heat exchange plate 816 can have the same structure, which facilitates the production and manufacturing of the ion swallower 20.
[0122] According to a second aspect of the present invention, a neutral beam injection system includes the ion swallower 20 described in the above embodiments. By placing the ion swallower 20 in the neutral beam injection system, it is beneficial to improve the absorption efficiency of the ion swallower 20 for unneutralized ions and to reduce the risk of ions escaping from the ion swallower 20 into the vacuum chamber and causing damage to other components within the vacuum chamber.
[0123] Other configurations and operations of the ion swallower 20 and the neutral beam injection system according to embodiments of the present invention are known to those skilled in the art and will not be described in detail here.
[0124] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.
[0125] Although embodiments of the invention have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.
Claims
1. An ion swallowing device, characterized in that, The ion swallower is used for the absorption of high-energy ions, and the ion swallower includes: Mounting rack; A first energy absorption target, a second energy absorption target, and a third energy absorption target are provided. All three energy absorption targets are fixed to the mounting frame. The first and third energy absorption targets are opposite to each other and spaced apart along a first direction. The second energy absorption target is disposed between the first and third energy absorption targets. The first energy absorption target is used to absorb first energy ions, the second energy absorption target is used to absorb second energy ions, and the third energy absorption target is used to absorb third energy ions. The first energy ion is a half-energy hydrogen ion or deuterium ion and a one-third-energy hydrogen ion or deuterium ion, the second energy ion is a full-energy hydrogen ion or deuterium ion, and the third energy ion is a total-energy molecular ion and a stray molecular ion.
2. The ion swallowing device according to claim 1, characterized in that, The ion swallower further includes a cooling mechanism, wherein the first energy absorption target, the second energy absorption target, and the third energy absorption target are connected in parallel to the cooling mechanism.
3. The ion swallowing device according to claim 2, characterized in that, The cooling mechanism includes a medium inflow buffer and a medium outflow buffer. The first energy absorption target includes a first manifold, a second manifold, and a plurality of first heat exchange plates. The plurality of first heat exchange plates are assembled to form a first plate-shaped structure. Each first heat exchange plate has a first heat exchange channel, a first medium inlet, and a first medium outlet. The first heat exchange channel connects the corresponding first medium inlet and the first medium outlet. The first manifold connects the medium inflow buffer and the plurality of first medium inlets. The second manifold connects the medium outflow buffer and the plurality of first medium outlets.
4. The ion swallowing device according to claim 3, characterized in that, The first energy absorption target further includes: a plurality of first connecting pipes, each of which is connected to the first manifold, and the plurality of first connecting pipes are respectively connected to a plurality of first medium inlets; and / or The first energy absorption target further includes: a plurality of second connecting pipes, each of which is connected to the second manifold, and the plurality of second connecting pipes are respectively connected to a plurality of the first medium outlets.
5. The ion swallowing device according to claim 3, characterized in that, A first shielding structure is provided between any two adjacent first heat exchange plates, and the first shielding structure is used to shield the gap between the corresponding two adjacent first heat exchange plates.
6. The ion swallowing device according to claim 2, characterized in that, The second energy absorption target includes a heat exchange structure comprising two heat exchange plates. The two heat exchange plates are opposite to each other and spaced apart along a second direction to form an ion ingestion space between the two heat exchange plates. Along a third direction, from the first end to the second end of the heat exchange structure, the distance between the two heat exchange plates gradually decreases. The first end of the heat exchange structure has an inlet for the ingestion space. The first direction, the second direction, and the third direction are perpendicular to each other.
7. The ion swallowing device according to claim 6, characterized in that, The cooling mechanism includes: a medium inflow buffer section and a medium outflow buffer section, and the heat exchange plate section includes a plurality of second heat exchange plates, which are assembled to form a second plate-shaped structure. The second energy absorption target further includes a third manifold and a fourth manifold. Each of the second heat exchange plates has a second heat exchange channel, a second medium inlet, and a second medium outlet. The second heat exchange channel connects the corresponding second medium inlet and the second medium outlet. The third manifold connects the medium inflow buffer and a plurality of second medium inlets. The fourth manifold connects the medium outflow buffer and a plurality of second medium outlets.
8. The ion swallowing device according to claim 7, characterized in that, The heat exchange plate section further includes a fifth manifold and a sixth manifold, wherein the fifth manifold is connected to the third manifold and a plurality of second medium inlets, and the sixth manifold is connected to the fourth manifold and a plurality of second medium outlets.
9. The ion swallowing device according to claim 7, characterized in that, A second shielding structure is provided between any two adjacent second heat exchange plates, and the second shielding structure is used to shield the gap between the corresponding two adjacent second heat exchange plates.
10. The ion swallowing device according to claim 6, characterized in that, The second energy absorption target further includes: two scraped beam heat exchange plates, the two scraped beam heat exchange plates are located on the side of the first end away from the second end, the two scraped beam heat exchange plates are respectively disposed on the two heat exchange plate portions, and from the second end to the first end, the two scraped beam heat exchange plates are inclined in the direction away from each other.
11. The ion swallowing device according to claim 10, characterized in that, The scraper heat exchange plate includes a first plate body and a first heat exchange tube, at least a portion of which is embedded in the first plate body. The cooling mechanism includes a medium inflow buffer section and a medium outflow buffer section. The inlet end of the first heat exchange tube is connected to the medium inflow buffer section, and the outlet end of the first heat exchange tube is connected to the medium outflow buffer section.
12. The ion swallowing device according to claim 6, characterized in that, The second energy absorption target further includes a heat exchange baffle, wherein the ends of the two heat exchange plates opposite to the first end are spaced apart to form an ion flow gap, the heat exchange baffle is located on the side of the second end opposite to the first end, and the heat exchange baffle blocks the ion flow gap.
13. The ion swallowing device according to claim 12, characterized in that, The heat exchange baffle includes a second plate and a second heat exchange tube, at least a portion of which is embedded in the second plate. The cooling mechanism includes a medium inflow buffer and a medium outflow buffer. The inlet end of the second heat exchange tube is connected to the medium inflow buffer, and the outlet end of the second heat exchange tube is connected to the medium outflow buffer.
14. The ion swallowing device according to claim 13, characterized in that, The third energy absorption target includes a third heat exchange plate and a third heat exchange tube. At least a portion of the third heat exchange tube is embedded in the second plate and heats the third heat exchange plate. The cooling mechanism includes a medium inflow buffer and a medium outflow buffer. The inlet end of the third heat exchange tube is connected to the medium inflow buffer, and the outlet end of the third heat exchange tube is connected to the medium outflow buffer.
15. The ion swallowing device according to any one of claims 1-14, characterized in that, The ion swallowing device further includes: multiple temperature detection elements, which are used to detect the temperatures of the first energy absorption target, the second energy absorption target, and the third energy absorption target, respectively.
16. A neutral beam injection system, characterized in that, Includes the ion swallowing device according to any one of claims 1-15.