Electronic equipment, parameter calibration method and computer readable storage medium

Abstract

The invention discloses electronic equipment, a parameter calibration method and a computer readable storage medium. The electronic equipment comprises a shell, a transformer and a calibration module, wherein the transformer and the calibration module are arranged in the shell; the calibration module comprises a calibration load; and the controller is used for controlling the primary winding and the second secondary winding of the transformer and the calibration load to form an energy transmission path in a calibration mode and updating control parameters based on electrical operation parameters in the energy transmission path, and the control parameters are used for transmitting power to the plasma load. The calibration load arranged in the device and the winding corresponding to the transformer are controlled by the controller to form the energy transmission path, and the control parameters used for power transmission in the electronic device are updated through the electrical operation parameters on the energy transmission path, so that the calibration operation is completed, and the power transmission precision is improved. The calibration operation can be completed without disassembling equipment or returning to a factory, so that the calibration process is simplified, the calibration efficiency is improved, the maintenance cost is reduced, and the availability of the equipment is improved.

Description

Technical Field

[0001] This application relates to the field of plasma source technology, and in particular to an electronic device, a parameter calibration method, and a computer-readable storage medium. Background Technology

[0002] The remote plasma source is primarily composed of a highly integrated chamber, main transformer, and circuit control unit. After a period of operation, the device is prone to problems such as measurement errors in the sensing circuit or drift in the transformer model parameters, leading to a decrease in power transmission accuracy. Therefore, regular calibration is required to ensure stable performance. However, current calibration methods require transporting the entire unit back to the manufacturer. Calibration not only necessitates disassembling the casing but also connecting a bulky external load and specialized measuring tools. This process is cumbersome, time-consuming, and results in extremely inconvenient equipment maintenance, as well as high costs. Summary of the Invention

[0003] This application discloses an electronic device, a parameter calibration method, and a computer-readable storage medium that can realize automatic parameter calibration of a remote plasma source.

[0004] In a first aspect, this application provides an electronic device, including a housing, a transformer disposed within the housing, and a calibration module. The primary winding of the transformer is used to connect to a plasma load. The calibration module includes: a calibration load connected to the secondary winding of the transformer; and a controller, used in calibration mode to control the primary winding, the secondary winding, and the calibration load to form an energy transmission path, and to update control parameters based on electrical operating parameters in the energy transmission path, the control parameters being used to transmit power to the plasma load. By replacing the traditional external load and measuring tools with a calibration load built into the housing of the electronic device, and using the device's own controller to control the calibration load and the corresponding winding of the transformer to form an energy transmission path, and updating the control parameters for power transmission in the electronic device based on the electrical operating parameters on this energy transmission path, the calibration operation is completed. This corrects measurement errors in the sensing circuit and / or corrects drift in the transformer model parameters, thereby eliminating power transmission errors caused by the aforementioned deviations or drifts and improving power transmission accuracy. The above calibration operations can be completed without disassembling the equipment or returning it to the factory, which simplifies the calibration process, improves calibration efficiency, reduces maintenance costs, and enhances equipment availability.

[0005] In one possible implementation of the first aspect, the calibration module further includes: a switching switch connected in series between the calibration load and the secondary winding; the controller is further configured to control the switching switch to be turned on in the calibration mode to form the energy transmission path. By using a switching switch to achieve built-in integration and electrical isolation of the calibration load, the device can quickly and safely switch into calibration mode via internal control signals without disassembling the casing, thereby realizing online, real-time performance testing and calibration, and improving the maintainability and calibration efficiency of the device.

[0006] In one possible implementation of the first aspect, the electrical operating parameters include a first electrical operating parameter and a second electrical operating parameter. The calibration module further includes: a first detection unit for detecting the first electrical operating parameter on the primary winding side of the energy transmission path; a second detection unit for detecting the second electrical operating parameter on the secondary winding side of the energy transmission path; and a controller specifically configured to, in calibration mode, control the primary winding of the transformer, the secondary winding, and the calibration load to form an energy transmission path, and update the control parameters based on the first and second electrical operating parameters. By setting detection units on both the primary and secondary sides of the transformer and comparing and analyzing the electrical parameters on both sides, system losses can be accurately calculated and key parameters of the transformer model (such as magnetizing inductance and core loss resistance) can be identified, thereby effectively distinguishing error sources and significantly improving the accuracy of parameter calculation.

[0007] In one possible implementation of the first aspect, the transformer further includes a third-stage winding; specifically, the controller, in calibration mode, controls the primary winding, the second-stage winding, and the calibration load to form an energy transmission path, and updates the control parameters based on the electrical operating parameters and a third electrical operating parameter coupled to the third-stage winding via electromagnetic induction. The third-stage winding provides a clean reference signal unaffected by parasitic parameters in the power loop, thereby improving the reference accuracy of parameter calculations.

[0008] In one possible implementation of the first aspect, a heat dissipation channel communicating with an external heat dissipation environment is further included, and the calibration load is connected to the heat dissipation channel; the heat dissipation channel includes at least one of an air-cooled heat dissipation channel or a water-cooled heat dissipation channel. The calibration load exchanges heat with the external environment through the heat dissipation channel, ensuring the thermal stability of the calibration load during operation, preventing resistance drift caused by temperature rise, and ensuring the long-term reliability of the calibration reference.

[0009] In one possible implementation of the first aspect, the control parameters include model compensation parameters used to correct the given power of the plasma load in non-calibration mode; the controller is specifically configured to: in calibration mode, control the primary winding of the transformer, the secondary winding, and the calibration load to form an energy transmission path; calculate the actual magnetizing inductance and / or actual core loss of the transformer model based on the electrical operating parameters in the transmission path; update the model compensation parameters based on the actual magnetizing inductance and / or actual core loss, thereby achieving feedforward compensation for the given power and offsetting the influence of transformer model parameter drift from the source of the control command.

[0010] In one possible implementation of the first aspect, the controller is specifically configured to: in calibration mode, control the primary winding, the secondary winding, and the calibration load of the transformer to form an energy transmission path; calculate the actual magnetizing inductance and / or actual core loss of the transformer model based on the electrical operating parameters in the transmission path; determine a first deviation between the initial magnetizing inductance and the actual magnetizing inductance, and / or determine a second deviation between the initial core loss and the actual core loss; update the model compensation parameters using the first deviation and / or the second deviation. Updating the parameters using the parameter deviation eliminates the influence of the initial measurement error, making the calculation of the compensation amount more accurate and enhancing the adaptability of the calibration algorithm to different transformers.

[0011] In one possible implementation of the first aspect, the control parameters include a gain calibration coefficient and / or an offset calibration coefficient, which are used to correct the electrical operating parameters of the plasma load sampled in non-calibration mode; the controller is specifically configured to: in calibration mode, control the primary winding of the transformer, the secondary winding, and the calibration load to form an energy transmission path; based on the electrical operating parameters in the energy transmission path, determine the actual voltage parameters and actual current parameters of the secondary winding under a given calibration command; and update the gain calibration coefficient and / or the offset calibration coefficient based on the actual voltage parameters and the actual current parameters, thereby correcting the measurement error of the sensing circuit from the source of data sampling and ensuring the accuracy of the electrical parameters upon which subsequent power control is based.

[0012] In one possible implementation of the first aspect, the controller is specifically configured to: in calibration mode, control the primary winding of the transformer, the secondary winding, and the calibration load to form an energy transmission path; based on the electrical operating parameters in the energy transmission path, determine the actual voltage parameters and actual current parameters of the secondary winding under a given calibration command; determine a third deviation between the actual voltage parameters and the desired voltage parameters under the given calibration command, and / or determine a fourth deviation between the actual current parameters and the desired current parameters under the given calibration command; update the gain calibration coefficient and the offset calibration coefficient using the third deviation and / or the fourth deviation, thereby improving the accuracy and anti-interference capability of calibration by minimizing the deviation between the measured value and the desired value.

[0013] Secondly, this application provides a parameter calibration method, comprising: in calibration mode, controlling the primary winding of a transformer of an electronic device, the secondary winding of the transformer, and the calibration load of the electronic device to form an energy transmission path; updating control parameters based on electrical operating parameters in the energy transmission path, the control parameters being used for power transmission to a plasma load, wherein the plasma load is connected to the primary winding of the transformer. By replacing the traditional external load and measuring tools with a calibration load built into the housing of the electronic device, the device's own controller controls the calibration load and the corresponding winding of the transformer to form an energy transmission path, and updates the control parameters for power transmission in the electronic device using the electrical operating parameters on this energy transmission path to complete the calibration operation. This corrects measurement errors in the sensing circuit and / or corrects drift in the transformer model parameters, thereby eliminating power transmission errors caused by the aforementioned deviations or drifts and improving power transmission accuracy. The above calibration operation can be completed without disassembling the device or returning it to the factory, simplifying the calibration process, improving calibration efficiency, reducing maintenance costs, and enhancing equipment availability.

[0014] In one possible implementation of the second aspect, it further includes: controlling a switching switch to be turned on in the calibration mode to form the energy transmission path; the switching switch is connected in series between the calibration load and the secondary winding. By using the switching switch to achieve built-in integration and electrical isolation of the calibration load, the device can quickly and safely switch into calibration mode via internal control signals without disassembling the casing, thereby realizing online, real-time performance testing and calibration, and improving the maintainability and calibration efficiency of the device.

[0015] In one possible implementation of the second aspect, the electrical operating parameters include a first electrical operating parameter on the primary winding side of the energy transmission path and a second electrical operating parameter on the secondary winding side of the energy transmission path. Updating the control parameters based on the electrical operating parameters in the energy transmission path includes updating the control parameters based on the first and second electrical operating parameters. By setting detection units on both the primary and secondary sides of the transformer and comparing and analyzing the electrical parameters on both sides, system losses can be accurately calculated and key parameters of the transformer model (such as magnetizing inductance and core loss resistance) can be identified, thereby effectively distinguishing error sources and significantly improving the accuracy of parameter calculation. The third-stage winding provides a pure reference signal unaffected by parasitic parameters in the power circuit, thereby improving the reference accuracy of parameter calculation.

[0016] In one possible implementation of the second aspect, the transformer further includes a third-stage winding; updating control parameters based on electrical operating parameters in the energy transmission path includes: updating the control parameters based on electrical operating parameters in the energy transmission path and third electrical operating parameters coupled to the third-stage winding from the energy transmission path via electromagnetic induction.

[0017] In one possible implementation of the second aspect, the control parameters include model compensation parameters used to correct the given power of the plasma load in uncalibrated mode; updating the control parameters based on electrical operating parameters in the energy transmission path includes: calculating the actual magnetizing inductance and / or actual core loss of the transformer model based on the electrical operating parameters in the transmission path; and updating the model compensation parameters based on the actual magnetizing inductance and / or actual core loss. By updating the model compensation parameters, feedforward compensation for the given power is achieved, offsetting the effects of transformer model parameter drift from the source of the control command.

[0018] In one possible implementation of the second aspect, the model compensation parameters are updated based on the actual magnetizing inductance and / or the actual core loss, including: determining a first deviation between the initial magnetizing inductance and the actual magnetizing inductance, and / or determining a second deviation between the initial core loss and the actual core loss; the model compensation parameters are updated using the first deviation and / or the second deviation. Updating the parameters using the parameter deviation eliminates the influence of the initial measurement error, making the calculation of the compensation amount more accurate and enhancing the adaptability of the calibration algorithm to different transformers.

[0019] In one possible implementation of the second aspect, the control parameters include a gain calibration coefficient and / or an offset calibration coefficient, which are used to correct the electrical operating parameters of the plasma load sampled in non-calibration mode. Updating the control parameters based on the electrical operating parameters in the energy transmission path includes: determining the actual voltage and current parameters of the second-stage winding under a given calibration command based on the electrical operating parameters in the energy transmission path; and updating the gain calibration coefficient and / or the offset calibration coefficient based on the actual voltage and current parameters. This corrects the measurement error of the sensing circuit from the source of data sampling, ensuring the accuracy of the electrical parameters upon which subsequent power control is based.

[0020] In one possible implementation of the second aspect, updating the gain calibration coefficient and / or the offset calibration coefficient based on the actual voltage parameter and the actual current parameter includes: determining a third deviation between the actual voltage parameter and the expected voltage parameter under the given calibration command, and / or determining a fourth deviation between the actual current parameter and the expected current parameter under the given calibration command; updating the gain calibration coefficient and the offset calibration coefficient using the third deviation and / or the fourth deviation, thereby improving the accuracy and anti-interference capability of calibration by minimizing the deviation between the measured value and the expected value.

[0021] Thirdly, this application provides a computer-readable storage medium storing a computer program that, when executed by a processor, implements the parameter calibration method as described in any of the above embodiments.

[0022] Fourthly, this application provides a computer program product that, when executed by a processor, implements the parameter calibration method as described in any of the above embodiments. Attached Figure Description

[0023] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0024] Figure 1 This is a schematic diagram of the structure of the first electronic device provided in the embodiments of this application;

[0025] Figure 2 This is a schematic diagram of the structure of the second electronic device provided in the embodiments of this application;

[0026] Figure 3 A control logic diagram for updating control parameters for power transfer to a plasma load, provided in an embodiment of this application;

[0027] Figure 4 Another updated control logic diagram for power transfer to a plasma load provided in this application embodiment;

[0028] Figure 5 This is a schematic diagram of the structure of the third electronic device provided in the embodiments of this application;

[0029] Figure 6 This is a schematic diagram of a parameter calibration method provided in an embodiment of this application;

[0030] Explanation of reference numerals in the attached figures:

[0031] 10-Transformer;

[0032] 101 - Primary winding; 102 - First-stage winding; 103 - Second-stage winding; 104 - Third-stage winding;

[0033] 20 - Calibration module;

[0034] 201 - Calibration load; 202 - Controller; 203 - Switch; 204 - First detection unit; 205 - Second detection unit; 206 - Third detection unit;

[0035] 30 - Shell. Detailed Implementation

[0036] This application provides an electronic device and a parameter calibration method, applicable to the parameter calibration of remote plasma sources. The electronic device provided integrates a calibration module within its housing. This module consists of a calibration load connected to the secondary winding of a transformer and a controller. The calibration load, built into the housing, replaces the traditional external load and measuring tools. The device's own controller controls the calibration load and the corresponding transformer winding to form an energy transmission path. The electrical operating parameters along this energy transmission path are used to update the control parameters for power transmission within the electronic device, completing the calibration operation. This corrects measurement errors in the sensing circuit and / or corrects drift in the transformer model parameters, thereby eliminating power transmission errors caused by the aforementioned deviations or drifts and improving power transmission accuracy. This allows the calibration operation to be completed without disassembling the device or returning it to the factory, achieving the technical effects of simplifying the calibration process, improving calibration efficiency, reducing maintenance costs, and enhancing equipment availability.

[0037] The embodiments of this application are described below with reference to the accompanying drawings.

[0038] This application provides an electronic device, please refer to... Figure 1 The electronic device includes a housing 30, a transformer 10 disposed within the housing 30, and a calibration module 20. The primary winding 102 of the transformer 10 is used to connect to a plasma load. The calibration module 20 includes a calibration load 201 connected to the secondary winding 103 of the transformer 10; and a controller 202 used to control the primary winding 101, the secondary winding 103, and the calibration load 201 of the transformer 10 to form an energy transmission path in calibration mode, and to update control parameters based on the energy transmission path. The control parameters are used to transmit power to the plasma load. In this embodiment, the electronic device includes at least a housing 30 and a transformer 10. The transformer 10 is disposed within the housing 30 and includes a primary winding 101, a first-stage winding 102, and a second-stage winding 103. The first-stage winding 102 is used to connect to the plasma load. When the controller 202 determines that the electronic device is in non-calibration mode, the controller 202 controls the primary winding 101, the first-stage winding 102, and the plasma load of the transformer 10 to form the first energy transmission path #A of the electronic device, and in conjunction with the ignition circuit, provides the required power to the plasma load. Correspondingly, in non-calibration mode, the connection between the second-stage winding 103 and the calibration load 201 can be selectively disconnected to avoid unnecessary energy loss. The non-calibration mode refers to the mode in which the electronic device operates normally, and can also be called the operating mode or working mode. It can be understood that the electronic device in this embodiment can be a remote plasma source.

[0039] Considering that after the electronic device has been running for a period of time, measurement errors in the sensing circuit or drift in the transformer model parameters may occur, leading to a decrease in power transmission accuracy, regular calibration is required to ensure its stable performance. Therefore, the controller 202 can switch the electronic device from non-calibration mode to calibration mode to correct the measurement deviation of the sensing circuit and / or the drift of the transformer model parameters, thereby correcting the power transmission error caused by the above deviations or drifts and improving the power transmission accuracy.

[0040] In one embodiment, the two ends of the calibration load 201 are selectively connected to the two ends of the secondary winding 103 of the transformer 10. Specifically, selective connection means that the connection can be opened or closed by means of a switch or the like. For example, the calibration load 201 can be a single load unit with a fixed resistance value, or it can be a load array composed of load units with different resistance values. Correspondingly, the calibration module 20 also includes a multiplexer switch. The load array is connected to the secondary winding 103 through the multiplexer switch. The controller 202 can select and connect load units with different resistance values ​​in the load array according to different calibration requirements to obtain more comprehensive test data and improve calibration accuracy. For example, if the calibration load is a load array, it includes a first load unit and a second load unit with different resistance values. Both the first load unit and the second load unit are connected to the multiplexer switch. Under the first calibration requirement, the first load unit is connected to the secondary winding 103 through the multiplexer switch. Under the second calibration requirement, the second load unit is connected to the secondary winding 103 through the multiplexer switch. Specifically, the multiplexer can be directly controlled by the electrical signal emitted by the controller 202, or it can be controlled by the level or pulse signal generated by the trigger button on the housing 30. The signal generated by the trigger button can be forwarded by the controller 202 or directly applied to the multiplexer. In this embodiment, the controller 202 can reuse an existing controller in the electronic device, or a separately configured controller can be used. The controller 202 monitors the operating status of the electronic equipment. When it is determined that the current operating status of the electronic equipment meets the calibration conditions, such as during the equipment startup self-test phase, standby phase, or when an abnormal power output is detected, the controller 202 determines that the electronic equipment is currently in calibration mode. The controller 202 first ensures that the plasma load is in a safe disconnected state, and then outputs a control signal to establish a connection between the secondary winding 103 and the calibration load 201, so that the primary winding 101 of the transformer 10, the secondary winding 103, and the calibration load 201 together constitute the second energy transmission path #B of the electronic equipment. Then, the controller 202 controls the primary winding 101 of the transformer 10 to apply an excitation signal, generating an induced electromotive force in the secondary winding 103, thereby forming a calibration current in the established second energy transmission path #B, realizing energy transmission to the calibration load 201. Based on this, the controller 202 can obtain the electrical operating parameters in the energy transmission path #B for subsequent calibration calculations and parameter updates. In this embodiment, the energy transmission path refers to the sequence of all electrical connections and components that start from the power input terminal, pass through the transformer 10, and finally reach the load (such as the calibration load 201 in calibration mode and the plasma load in non-calibration mode) to form a closed loop, defining the power transmission direction and topology.

[0041] Furthermore, the controller 202 can acquire the electrical operating parameters in the energy transmission path #B. These electrical operating parameters include, but are not limited to, the actual voltage parameters and / or actual current parameters at the corresponding sampling points in the energy transmission path #B. The specific values ​​of the electrical operating parameters can be determined by the resistance value of the calibration load 201. Based on the electrical operating parameters of the energy transmission path #B, the controller 202 can determine whether there is a deviation in the control parameters for power transmission in the electronic device and the magnitude of the deviation. This allows the controller to update the control parameters used for power transmission to the plasma load. The control parameters for power transmission refer to the parameters that affect the accuracy of power transmission. The update process includes, but is not limited to, comparing the actual values ​​of the transformer model parameters and / or the actual values ​​of the sensing coefficients calculated based on the electrical operating parameters with the corresponding original reference values ​​stored in the controller 202, and iteratively correcting or directly replacing the control parameters based on the comparison results.

[0042] The solution in this embodiment integrates a calibration load 201 and a controller 202 within the electronic device. This allows for seamless switching to the built-in calibration load mode without disassembling the outer casing, facilitating parameter calibration, correction, and maintenance, and improving power calculation accuracy. The entire calibration process is automatically completed by the device's internal control logic, requiring no manual intervention, thus achieving online, non-destructive performance monitoring and correction. Through periodic or triggered self-calibration, parameter drift caused by component aging, temperature drift, and other factors is effectively compensated, significantly improving the long-term stability and reliability of the equipment.

[0043] Please refer to Figure 2 Based on the above embodiments:

[0044] In some embodiments, the calibration module 20 further includes a switching switch 203 connected in series between the calibration load 201 and the secondary winding 103; the controller 202 is also used to control the switching switch 203 to be turned on in calibration mode to form an energy transmission path.

[0045] Specifically, in this embodiment, the calibration load 201 and the secondary winding 103 are selectively connected, which can be achieved by a switch 203 connected in series in the circuit. The switch 203 is turned on by a calibration enable signal issued by the controller 202 and turned off when the calibration enable signal is not received. When the switch 203 is turned on, the secondary winding 103 and the calibration load 201 form a closed loop. At this time, the controller 202 controls the primary winding 101 to apply an excitation signal, which induces an electromotive force in the secondary winding 103 through the principle of electromagnetic induction, thereby forming a current in the closed loop and completing the establishment of the energy transmission path.

[0046] For example, the switch 203 can be implemented using a relay, whose coil is controlled by a calibration enable signal output by the controller 202, and whose contacts are connected in series between the secondary winding 103 and the calibration load 201. The switch 203 can also be implemented using a solid-state relay or a semiconductor switching circuit composed of a MOSFET (Metal-Oxide-Semiconductor Field-Effect Transistor) or an IGBT (Insulated Gate Bipolar Transistor). The controller 202 controls the on / off state of the semiconductor switch through a drive circuit, which may include electrical isolation components such as optocouplers or magnetic coupling devices. It can be understood that the solution using the switch 203 achieves physical isolation between the calibration load 201 and the energy transmission path #A of the electronic device in non-calibration mode, minimizing energy loss of the electronic device in non-calibration mode. The switch 203 enables the control system to precisely manage the start and stop of the calibration process. The controller 202 can only connect the calibration loop when the system safety is ensured (e.g., the plasma load has been confirmed to be disconnected), preventing the calibration signal from interfering with the normal operation and avoiding potential electrical faults caused by simultaneously connecting the calibration load and the plasma load. Considering that the calibration process is brief, but the calibration load 201 may bear a large amount of power during this period, the switch 203 can also limit the energizing time of the calibration load 201, effectively controlling its temperature rise, reducing the requirements for the heat dissipation system, and allowing for the use of a smaller and lower-cost calibration load 201 while ensuring that it operates within a safe temperature range and maintains parameter stability.

[0047] As an alternative implementation, the calibration load 201 can also be fixedly connected to the secondary winding 103. In this case, the switching from non-calibration mode to calibration mode can be achieved by the controller 202 changing the excitation signal of the primary winding 101. Specifically, in non-calibration mode, the parameters of the excitation signal (such as frequency) make the energy induced on the calibration load 201 negligible. In calibration mode, a specific excitation signal is applied so that the energy transmission path #B formed by the primary winding 101, the secondary winding 103, and the calibration load 201 of the transformer 10 generates an electrical signal sufficient for accurate measurement. The fixed connection combined with excitation control further simplifies the hardware structure and improves the system integration.

[0048] In some embodiments, the electrical operating parameters include a first electrical operating parameter and a second electrical operating parameter. The calibration module 20 further includes: a first detection unit 204 for detecting the first electrical operating parameter on the primary winding 101 side of the energy transmission path; a second detection unit 205 for detecting the second electrical operating parameter on the secondary winding 103 side of the energy transmission path; and a controller 202 specifically used, in calibration mode, to control the primary winding 101, the secondary winding 103, and the calibration load 201 of the transformer 10 to form an energy transmission path, and to update the control parameters based on the first electrical operating parameter and the second electrical operating parameter.

[0049] In one example, both the first detection unit 204 and the second detection unit 205 include voltage and current sensors to sample the electrical operating parameters of corresponding sampling points in the energy transmission path. The first detection unit 204 can be located on the primary winding side of the transformer 10 to sample first electrical operating parameters flowing through the primary winding 101, such as voltage and current parameters. The second detection unit 205 can be located on the secondary winding side of the transformer 10 to sample second electrical operating parameters flowing through the secondary winding 103, such as voltage and current parameters. By setting detection units on both the primary and secondary winding sides of the transformer 10, input and output power data can be acquired independently. This configuration allows the controller 202 to accurately calculate the total power loss of the transformer 10 and the transmission path. Given the known resistance value of the calibration load 201, the total loss can be further decomposed to more accurately identify key transformer model parameters, such as magnetizing inductance and core loss. This method, based on separate measurements of the primary and secondary windings of the transformer, significantly improves the accuracy of parameter calculation compared to methods relying solely on single-sided measurements. It is understood that the sampling data from the primary and secondary sides provide two independent observation points. By comparing and analyzing the measurement results at both ends, the controller 202 can effectively distinguish the source of error. For example, it can determine whether the overall power transmission deviation of the electronic equipment stems from drift in the transformer model parameters of the transformer 10 itself (such as changes in core loss and magnetizing inductance) or from measurement errors in the sensing circuit (such as gain or offset errors (such as temperature drift of the sampling resistor)). The sensing circuit can include, but is not limited to, sensors and their signal conditioning circuits, used to sample the electrical operating parameters of the electronic equipment in non-calibration mode. This ability to differentiate makes subsequent parameter updates more targeted, such as updating model compensation parameters or updating sensing coefficients. For example, when transformer model parameters drift (such as the actual value of the magnetizing inductance deviating significantly from the reference value), the controller 202 can superimpose a model compensation parameter onto the output given command to adjust the set target. The W command is adjusted to W, To compensate for power transmission deviations caused by parameter drift, the actual transmitted power can reach the set target. Similarly, the calibration coefficients of the sensing circuit can be updated to correct measurement errors; or both can be updated simultaneously to achieve finer and more effective calibration. Considering the measurement requirements at different locations, the current / voltage sensors installed on the primary winding side and the secondary winding side of transformer 10 can be of the same type or different types, depending on the actual engineering needs. This embodiment does not impose any limitations on this. For example, taking the current sensor as an example, a Hall effect-based sensor can be used on the primary winding side of transformer 10 to provide good electrical isolation, while a current detection scheme based on sampling resistors can be used on the secondary winding side of transformer 10 to obtain higher accuracy.

[0050] As an optional implementation, the first detection unit 204 and the second detection unit 205 can use a synchronized clock signal to ensure that the sampling times of the voltage and current parameters on the primary and secondary sides are aligned. This synchronized sampling mechanism effectively eliminates phase measurement errors caused by sampling time differences, providing a guarantee for subsequent accurate parameter calculations. Furthermore, the analog signals sampled by the voltage and current sensors are filtered and amplified by the signal conditioning circuit, and then converted into digital signals by the ADC (Analog-to-Digital Converter) module for reading and processing by the controller 202. The signal conditioning circuit includes, but is not limited to, a low-pass filter and a programmable gain amplifier; the former is used to suppress high-frequency noise interference, and the latter is used to optimize the range utilization of the ADC.

[0051] As an alternative implementation, the controller 202 can also sample and store multiple first electrical operating parameters and multiple second electrical operating parameters within a preset time period during the calibration process. To suppress random noise and transient interference and improve the accuracy and reliability of the calibration, the controller 202 can perform statistical processing on the sampled multiple first electrical operating parameters and multiple second electrical operating parameters. For example, it can use algorithms such as moving average and digital filtering to calculate representative statistical values ​​(such as average or median) of voltage and current parameters, and update the control parameters used for power transfer to the plasma load based on the calculated statistical values. This method can maintain good real-time performance while ensuring calibration accuracy.

[0052] In some embodiments, the transformer 10 further includes a third winding 104; the controller 202 is specifically used to control the primary winding 101, the second winding 103, and the calibration load 201 of the transformer 10 to form an energy transmission path in calibration mode, and to update the control parameters based on electrical operating parameters and third electrical operating parameters coupled from the energy transmission path to the third winding 104 through electromagnetic induction.

[0053] In this embodiment, in addition to the primary winding 101, the first-stage winding 102, and the second-stage winding 103 for energy transmission, the transformer 10 also includes a third-stage winding 104. Structurally, this third-stage winding 104 is wound on the same magnetic core as the other windings and is associated with the primary winding 101 and the second-stage winding 103 via electromagnetic coupling. However, it is completely independent in electrical connection and does not undertake the main power transmission task; instead, it is specifically used for signal detection. During calibration, when the controller 202 controls the primary winding 101, the second-stage winding 103, and the calibration load 201 to form an energy transmission path #B, the changing magnetic field simultaneously induces a corresponding potential in the third-stage winding 104. It is understood that the current flowing through the energy transmission path #B is relatively large, and its voltage and current signals are affected by parasitic parameters such as line impedance and contact resistance, as well as the nonlinear characteristics of devices such as the on-state voltage drop of switching devices, and cannot completely and accurately reflect the ideal output characteristics of the transformer 10. Since the third winding 104 is in a near-no-load state, its induced voltage is almost unaffected by these parasitic parameters and device nonlinearity, and can provide a purer and more accurate reference signal, thereby providing a more accurate data source for the calibration process. Correspondingly, a third detection unit 206 can also be provided to detect the third electrical operating parameters of the third winding 104.

[0054] There are several ways to acquire and utilize the electrical operating parameters of the third-stage winding 104. One specific implementation is to detect only its open-circuit voltage, which is proportional to the rate of change of the main magnetic flux and can be used to accurately calculate the turns ratio and excitation characteristics of the transformer 10. Another implementation is to connect a known, high-precision, small load (such as a high-resistance resistor) to the winding and simultaneously detect its voltage and a small current to obtain its output impedance characteristics, which helps in further analyzing the frequency response of the transformer 10. Furthermore, the third-stage winding 104 can be designed with multiple taps, providing detection signals of different ranges by switching different turns ratios, thus enhancing the dynamic range of the system.

[0055] Because the third electrical operating parameter provided by the third winding 104 is unaffected by parasitic parameters and device nonlinearities caused by large currents, it provides a reliable internal standard voltage source. This allows the controller 202 to use this as a reference to more accurately evaluate and correct the gain and offset errors of the voltage and current sensing circuits in the first energy transmission path #A of the electronic device. It can be understood that the voltage sensing circuit includes, but is not limited to, voltage divider sampling circuits, signal conditioning circuits, and analog-to-digital converters; the current sensing circuit includes, but is not limited to, sampling resistors (or current transformers, Hall sensors), signal conditioning circuits, and analog-to-digital converters. Secondly, it enhances the reliability of parameter identification. When calculating transformer model parameters (such as magnetizing inductance and core loss), introducing this independent third electrical operating parameter provides redundant constraints for the parameter estimation algorithm, making the solved parameter values ​​more accurate and reliable, and effectively avoiding the problem of multiple solutions. By continuously monitoring the stability of the signal in the third winding 104, the working state of the transformer core (such as whether it is close to saturation) can be indirectly determined. This not only enables the calibration of the voltage, current and other sensing circuits in the first energy transmission path #A of the electronic equipment, but also monitors the health status of the transformer itself, thus providing data support for preventive maintenance. Ultimately, this ensures the long-term accuracy and stability of the power transmission system built by the power supply, transformer and sensing circuit in the electronic equipment.

[0056] In some embodiments, a heat dissipation channel communicating with an external heat dissipation environment is also included, and the calibration load 201 is connected to the heat dissipation channel; the heat dissipation channel includes at least one of an air-cooled heat dissipation channel or a water-cooled heat dissipation channel.

[0057] In this embodiment, the calibration load 201 can be a small-sized load, installed in a well-ventilated location within the system with air cooling and / or water cooling. The size of the calibration load 201 is determined based on the product dimensions, internal installation space, and the heat dissipation requirements during the final test. The resistance of the calibration load 201 can be... arrive Within this reference range. Specifically, the electronic device also includes a preset heat dissipation channel. The calibration load 201 is thermally connected to the preset heat dissipation channel through a thermally conductive structure, so as to effectively transfer the heat generated during the calibration process to the external environment and ensure that the temperature of the calibration load 201 remains within the allowable range during operation.

[0058] The pre-designed heat dissipation channels can be implemented in various ways. For air-cooled channels, they typically include heat sinks and fans that drive the airflow. The heat sinks are in close contact with the calibration load 201 using thermal grease or thermal pads to reduce thermal resistance, while the fans provide forced convection to enhance heat dissipation efficiency. For water-cooled channels, the core component is a water-cooled plate with internal cooling channels that fit tightly against the surface of the calibration load 201. Circulating coolant carries heat to an external heat exchanger for dissipation. In some applications, a hybrid cooling solution combining air and water cooling can be used, such as adding an auxiliary fan to the water-cooled plate to meet the cooling demands under extreme conditions. Furthermore, the design of the heat dissipation channels fully considers the internal space layout of the equipment. Typically, the calibration load 201 and the heat sink are placed together near the air outlet of the equipment's air duct or on the main channel of the water-cooling circuit to maximize the system's heat dissipation capacity.

[0059] By setting up a preset heat dissipation channel, the thermal stability of the calibration load 201 is ensured. Effective heat dissipation prevents resistance drift caused by overheating of the calibration load 201, improving the measurement reference accuracy and the accuracy of the calibration results. The excellent heat dissipation design allows the calibration load 201 to withstand brief, large power surges during calibration, avoiding the risk of damage due to overheating and thus extending the lifespan of the calibration module 20. By integrating the heat dissipation channel with the original heat dissipation system of the device, hardware resources are shared, avoiding structural complexity and a significant increase in cost.

[0060] In some implementations, the control parameters include model compensation parameters, which are used to correct the given power of the plasma load in the non-calibration mode; the controller 202 is specifically used to: in the calibration mode, control the primary winding 101, the secondary winding 103, and the calibration load 201 of the transformer 10 to form an energy transmission path; calculate the actual magnetizing inductance and / or actual core loss of the transformer model based on the electrical operating parameters in the transmission path; and update the model compensation parameters based on the actual magnetizing inductance and / or actual core loss.

[0061] In this embodiment, when performing the calibration operation, the controller 202 first controls the primary winding 101, the secondary winding 103, and the calibration load of the transformer 10 to form an energy transmission path #B, and samples the electrical operating parameters in this energy transmission path #B. Based on these electrical operating parameters, the controller 202 calculates the current actual magnetizing inductance (Lm) and actual core loss (Rcore) of the transformer 10 using a parameter identification algorithm through the established equivalent circuit model of the transformer 10. It can be understood that the magnetizing inductance (Lm) is the reactive power required to establish the working magnetic field of the transformer 10, while the core loss (Rcore) reflects the active power loss generated by the core of the transformer 10 during alternating magnetization. Any change in either of them will directly lead to a deviation between the actual output power of the system and the theoretical calculated value. Therefore, in this embodiment, these two transformer model parameters are used to update the model compensation parameters in the control parameters used for power transmission to the plasma load. The model compensation parameter is a command compensation amount used to correct the given power of the plasma load in the non-calibration mode.

[0062] Specifically, in non-calibration mode, the algorithm used by controller 202 to calculate output power relies on preset transformer model parameters. When the actual magnetizing inductance (Lm) and actual core loss (Rcore) deviate from their initial values ​​due to device aging, temperature changes, or other reasons, controller 202 pre-corrects the initial given power command, including the user-set desired power, based on updated model compensation parameters. This pre-correction can be achieved through a compensation algorithm that establishes a mapping relationship, or compensation mapping relationship, between the parameter deviation between the actual and reference values ​​of the transformer model parameters of transformer 10 and the power compensation amount. For example, when an increase in core loss is detected, the specific amount of increase in loss can be mapped to a specific value of the power compensation amount, i.e., the given power value is increased accordingly to compensate for this additional loss.

[0063] In this embodiment, instead of adjusting the power output only after an error occurs, the system pre-corrects the transformer model parameters based on the latest parameters after receiving the initial power command set by the user. The controller 202 responds to the corrected power command and controls the transformer to operate, so as to more quickly and directly offset the effects of transformer 10 parameter drift. By periodically updating the model compensation parameters, the system can adaptively track changes in transformer 10 characteristics, ensuring accurate and stable power output to the plasma load throughout the entire electronic device lifecycle, thus improving the long-term operational reliability of the equipment.

[0064] In some implementations, the controller 202 is specifically configured to: in calibration mode, control the primary winding 101, the secondary winding 103, and the calibration load 201 of the transformer 10 to form an energy transmission path; calculate the actual magnetizing inductance and / or actual core loss of the transformer model based on the electrical operating parameters in the transmission path; determine a first deviation between the initial magnetizing inductance and the actual magnetizing inductance, and / or determine a second deviation between the initial core loss and the actual core loss; and update the model compensation parameters using the first deviation and / or the second deviation.

[0065] In this embodiment, the initial excitation inductance and initial core loss can be collectively referred to as initial parameter values, and the actual excitation inductance and actual core loss can be collectively referred to as actual parameter values. The initial parameter values ​​can be reference parameter values ​​calibrated at the time of manufacture of transformer 10, or parameter values ​​stored during the previous calibration process. The controller 202 calculates the first deviation by performing operations on the calculated actual parameter values ​​and the stored initial parameter values. ) and second deviation ( These two deviations precisely characterize the degree of parameter drift that has occurred in transformer 10 since its initial state. (Refer to...) Figure 3 , Figure 3 In the diagram, P(s) represents the transfer function model of the power circuit (including at least transformer 10). C(s) represents the transfer function model of the parameter compensation link of controller 202, C(s) represents the transfer function model of the control link of controller 202, and Calculation represents the transfer function model of the power calculation link of controller 202. When the controller controls the switching switch 203 to close, the built-in calibration load 201 is connected to the control loop. At this time, the first electrical operating parameter, the second electrical operating parameter, and the third electrical operating parameter in the energy transmission path #B formed under the given power are obtained through the first detection unit 204, the second detection unit 205, and the third detection unit 206. The first electrical operating parameter, the second electrical operating parameter, and the third electrical operating parameter are sent to Calculation. Calculation calculates the actual excitation inductance and the actual core loss based on the first electrical operating parameter, the second electrical operating parameter, and the third electrical operating parameter. Then, it is calculated with the initial parameter values ​​received by Calculation, including the initial excitation inductance Lm0 and the initial core loss Rcore0, to obtain the first deviation ( ) and second deviation ( ), will the first deviation ( ) and second deviation ( ) Send in , The deviation is processed according to the preset compensation strategy, and the final model compensation parameters are output.

[0066] In practical implementation, the controller 202 takes the first deviation and the second deviation as inputs and calculates the corresponding power compensation amount through a pre-stored compensation mapping relationship. The compensation mapping relationship can be a two-dimensional lookup table, which stores different (…). , The power compensation value can be either a combination of the two deviations or a functional relationship, such as a linear combination or an experimentally calibrated nonlinear function. The controller 202 writes the calculated power compensation amount into the model compensation parameter storage area, completing the parameter update.

[0067] This parameter deviation-based update method enables precise quantitative compensation for performance variations in transformer 10. Compared to controlling directly using absolute parameter values, calculations based on parameter deviations effectively eliminate the impact of initial measurement errors, resulting in more accurate compensation. Furthermore, this method of calculating deviations and mapping between excitation inductance and core loss separately allows the controller to flexibly adapt to different types of transformer 10 characteristics, enhancing the versatility and robustness of the calibration algorithm. In addition, by establishing a precise mapping relationship between parameter deviations and power compensation amounts, the impact of transformer 10 parameter drift on output power can be eliminated during the pre-calibration stage, improving the system's dynamic response characteristics. This ensures that even under large-scale parameter drift, the system can quickly converge and stabilize at the target power value through calibration, thereby improving the adaptability and long-term stability of power control.

[0068] In some implementations, the control parameters include gain calibration coefficients and / or offset calibration coefficients, which are used to correct the electrical operating parameters of the plasma load sampled in non-calibration mode. Specifically, the controller 202 is configured to: in calibration mode, control the primary winding 101, secondary winding 103, and calibration load 201 of the transformer 10 to form an energy transmission path; determine the actual voltage and current parameters of the secondary winding 103 under a given calibration command based on the electrical operating parameters in the energy transmission path; and update the gain calibration coefficients and / or offset calibration coefficients based on the actual voltage and current parameters.

[0069] In this embodiment, when the controller 202 performs the calibration operation, it first controls the primary winding 101 and secondary winding 103 of the transformer 10 to form an energy transmission path #B with the calibration load 201. After receiving a given calibration command including the calibration voltage and calibration current values ​​set by the user, the controller can determine the expected voltage and expected current values ​​of the energy transmission path #B under the given calibration command based on the known resistance value of the calibration load 201. It samples the actual electrical operating parameters (including the actual current and actual voltage values) in the energy transmission path #B. By comparing the actual current and actual voltage values ​​with the expected voltage and expected current values ​​theoretically calculated based on the calibration load 201, the controller 202 can accurately quantify the measurement error of the current voltage and current sensing circuit. Based on these error data, the controller 202 can automatically calculate and update the gain calibration coefficient and offset calibration coefficient, and establish an accurate conversion relationship from the sampled voltage and sampled current values ​​of the sensing circuit to the actual voltage and actual current values.

[0070] In this embodiment, by utilizing the built-in calibration load 201 with known characteristics as a reference, the accuracy calibration of the voltage and current sensing circuits can be completed autonomously without any external testing equipment. The updated gain calibration coefficient and offset calibration coefficient will be directly applied to the data sampling stage in non-calibration mode, ensuring the authenticity and accuracy of the plasma load electrical operating parameters acquired by the system, and guaranteeing the precision of power control from the data source. This effectively overcomes the problem of measurement error accumulation caused by factors such as sensor aging and temperature drift, and significantly improves the long-term stability and reliability of the equipment.

[0071] In some embodiments, the controller 202 is specifically configured to: in calibration mode, control the primary winding 101, secondary winding 103, and calibration load 201 of the transformer 10 to form an energy transmission path; based on the electrical operating parameters in the energy transmission path, determine the actual voltage parameters and actual current parameters of the secondary winding 103 under a given calibration command; determine a third deviation between the actual voltage parameters and the desired voltage parameters under the given calibration command, and / or determine a fourth deviation between the actual current parameters and the desired current parameters under the given calibration command; and update the gain calibration coefficient and offset calibration coefficient using the third deviation and / or the fourth deviation. Specifically, the gain calibration coefficient and offset calibration coefficient can be updated independently using the third deviation, or independently using the fourth deviation, or jointly using the third and fourth deviations.

[0072] In this embodiment, the controller 202 calculates the desired voltage and current parameters based on the resistance value of the calibration load 201 and a given calibration command. Then, it compares the actual sampled voltage and current parameters with the desired voltage and current parameters to obtain the corresponding deviations. These deviations comprehensively reflect the gain error and zero-point drift of the sensing circuit under the current operating state. (Refer to...) Figure 4 P(s) represents the transfer function model of the power circuit (including at least transformer 10). C(s) represents the transfer function model of the coefficient compensation link of controller 202, and C(s) represents the transfer function model of the control link of controller 202. When the controller controls the switching switch 203 to close, the built-in calibration load 201 is connected to the control loop and the transformer. At this time, the electrical operating parameters of the energy transmission path #B are obtained through the first detection unit 204, the second detection unit 205 and the third detection unit 206, and the obtained electrical operating parameters are sent to... , Based on the third deviation between the expected voltage parameter and the actual voltage parameter, and the fourth deviation between the expected current parameter and the actual current parameter, the parameters are dynamically adjusted through the built-in compensation algorithm, and the final gain calibration coefficient and offset calibration coefficient are output, thereby realizing the real-time identification and compensation of the measurement error of the voltage and current sensing circuit.

[0073] In practical implementation, the controller 202 selects the optimal gain calibration coefficient and offset calibration coefficient from the gain calibration coefficient and offset calibration coefficient calculated based on multiple sets of deviation data sampled under different calibration commands. By applying a given calibration command at multiple different power levels, more comprehensive data on the correspondence between the expected parameters (including expected voltage and current parameters) and actual parameters (including actual voltage and current parameters) of the sensing circuit can be obtained, thereby establishing an accurate mathematical model of the sensing circuit. For example, for a voltage sensing circuit... By performing linear regression analysis on multiple sets of actual voltage parameters and desired voltage parameters, the gain calibration coefficient and offset calibration coefficient that minimize the overall error can be determined. This method effectively eliminates the influence of random measurement noise and improves the accuracy and reliability of calibration results. Furthermore, as an optional implementation, trend analysis can be performed on historical calibration data to predict the changing trends of sensor circuit characteristics, enabling preventative calibration. These sensor circuit characteristics include, but are not limited to, gain error, offset error, linearity, and temperature drift.

[0074] The above-described calibration method based on deviation analysis enables the updated gain and offset calibration coefficients to accurately compensate for the non-ideal characteristics of the sensing circuit, including but not limited to operational amplifier gain errors, ADC quantization errors, and sampling resistor temperature drift. This ensures high accuracy and stability of the electrical operating parameters of the plasma load sampled in non-calibration mode. Consequently, it reduces measurement errors caused by temperature variations and component aging, providing a reliable guarantee for the long-term stable operation of the power control system. Simultaneously, it reduces reliance on external calibration equipment, improving equipment maintenance efficiency and availability.

[0075] Based on the above embodiments, referring to Figure 5 The electronic device specifically includes a power circuit, an ignition circuit, and a calibration module 20 integrated within the housing 30. When the electronic device is in non-calibration mode, the power circuit constitutes the energy transmission path for powering the plasma load. When the electronic device is in calibration mode, the power circuit constitutes the energy transmission path for powering the calibration load 201. The power circuit sequentially includes: an AC input EMC (Electromagnetic Compatibility) unit, a rectifier unit, a DC / AC (Direct Current / Alternating Current) inverter circuit, a filter unit, and a transformer 10.

[0076] The AC input EMC unit, acting as a front-end electromagnetic compatibility circuit, filters and suppresses surges in the AC voltage input from the power grid. The rectifier unit rectifies the AC voltage processed by the AC input EMC unit into a smooth DC voltage. The DC / AC inverter circuit inverts the DC voltage into a high-frequency AC voltage. The filter unit filters and shapes the high-frequency AC voltage. The primary winding 101 of the transformer 10 receives the high-frequency AC voltage filtered by the filter unit and couples energy to the plasma load through the primary winding 102 in non-calibration mode, thus forming the first energy transmission path #A. Alternatively, in calibration mode, it couples energy to the calibration load 201 through the secondary winding 103, thus forming the second energy transmission path #B. This allows the controller 202 to perform calibration operations based on the electrical operating parameters on the second energy transmission path #B in calibration mode.

[0077] Furthermore, the ignition circuit is connected to a dedicated winding of the transformer 10 or associated with the primary winding 101 via coupling. This ignition circuit is used to generate a transient high-voltage pulse to break down the working gas and ignite the plasma load during the startup phase of the electronic device in uncalibrated mode, thereby establishing initial conditions for subsequent stable energy transfer to the power circuit.

[0078] Each of the above modules or units can be implemented through software, hardware, or a combination of both. In this application, "implemented through software" means that the processor reads and executes program instructions stored in memory to implement the functions corresponding to the above modules or units. Here, the processor refers to a processing circuit capable of executing program instructions, including but not limited to at least one of the following: a Central Processing Unit (CPU), a microprocessor, a Digital Signal Processor (DSP), a Micro Controller Unit (MCU), or an artificial intelligence processor, or other processing circuits capable of running program instructions. In some embodiments, the processor may also include circuits with other processing functions (such as hardware circuits for hardware acceleration, bus and interface circuits, etc.). Processors can be presented as integrated chips, for example, as integrated chips whose processing functions only include executing software instructions, or as SoCs (System on a Chip), which are chips that include not only processing circuits (usually called "cores") that can run program instructions, but also other hardware circuits for implementing specific functions (of course, these hardware circuits can also be implemented separately based on ASICs or FPGAs). Correspondingly, in addition to executing software instructions, the processing functions can also include various hardware acceleration functions (such as AI calculations, encoding and decoding, compression and decompression, etc.).

[0079] In this application, "implemented in hardware" means that the functions of the above-mentioned modules or units are implemented through hardware processing circuits that do not have program instruction processing capabilities. These hardware processing circuits can be composed of discrete hardware components or integrated circuits. To reduce power consumption and size, integrated circuits are typically used. Hardware processing circuits can include ASICs (Application-Specific Integrated Circuits) or PLDs (Programmable Logic Devices); PLDs can include FPGAs (Field-Programmable Gate Arrays), CPLDs (Complex Programmable Logic Devices), and so on. These hardware processing circuits can be a single packaged semiconductor chip (e.g., packaged as an ASIC); or they can be integrated with other circuits (e.g., CPUs, DSPs) and packaged into a single semiconductor chip. For example, multiple hardware circuits and a CPU can be formed on a silicon substrate and packaged into a single chip, also known as a SoC. Alternatively, circuits for implementing FPGA functions and a CPU can be formed on a silicon substrate and packaged into a single chip, also known as a SoPC (System on a Programmable Chip).

[0080] It should be noted that when this application is implemented through software, hardware, or a combination of both, different software or hardware can be used, and it is not limited to using only one type of software or hardware. For example, one module or unit can be implemented using a CPU, while another module or unit can be implemented using a DSP. Similarly, when implemented using hardware, one module or unit can be implemented using an ASIC, while another module or unit can be implemented using an FPGA. Of course, it is not limited to using the same software (e.g., all through a CPU) or the same hardware (e.g., all through an ASIC) to implement some or all modules or units. Furthermore, those skilled in the art will understand that software is generally more flexible but less performant than hardware, while hardware is the opposite. Therefore, those skilled in the art can choose software, hardware, or a combination of both based on actual needs.

[0081] Please refer to Figure 6 This embodiment provides a parameter calibration method, which can be applied to, for example... Figure 1 , Figure 2 or Figure 5 The described electronic device, wherein the parameter calibration method includes:

[0082] S101: In calibration mode, the primary winding of the transformer controlling the electronic equipment, the secondary winding of the transformer, and the calibration load of the electronic equipment form an energy transmission path.

[0083] S102: Update control parameters based on electrical operating parameters in the energy transmission path. The control parameters are used to transmit power to the plasma load, which is connected to the primary winding of the transformer.

[0084] In some implementations, the parameter calibration method further includes:

[0085] In calibration mode, the switching switch is turned on to form an energy transmission path; the switching switch is connected in series between the calibration load and the secondary winding.

[0086] In some implementations, the electrical operating parameters include first electrical operating parameters on the primary winding side of the energy transmission path and second electrical operating parameters on the secondary winding side of the energy transmission path.

[0087] Based on the electrical operating parameters in the energy transmission path, update the control parameters, including:

[0088] The control parameters are updated based on the first and second electrical operating parameters.

[0089] In some implementations, the transformer also includes a third-stage winding;

[0090] Based on the electrical operating parameters in the energy transmission path, update the control parameters, including:

[0091] The control parameters are updated based on the electrical operating parameters in the energy transmission path and the third electrical operating parameters coupled from the energy transmission path to the third winding via electromagnetic induction.

[0092] In some implementations, the control parameters include model compensation parameters, which are used to correct the given power of the plasma load in the uncalibrated mode.

[0093] Based on the electrical operating parameters in the energy transmission path, update the control parameters, including:

[0094] Calculate the actual excitation inductance and / or actual core loss of the transformer model based on the electrical operating parameters in the transmission path;

[0095] Update the model compensation parameters based on the actual excitation inductance and / or actual core loss.

[0096] In some implementations, the model compensation parameters are updated based on the actual magnetizing inductance and / or the actual core loss, including:

[0097] Determine the first deviation between the initial magnetizing inductance and the actual magnetizing inductance, and / or, determine the second deviation between the initial core loss and the actual core loss;

[0098] Update the model compensation parameters using the first and / or second biases.

[0099] In some implementations, the control parameters include gain calibration coefficients and / or offset calibration coefficients, which are used to correct the electrical operating parameters of the plasma load sampled in non-calibration mode.

[0100] Based on the electrical operating parameters in the energy transmission path, update the control parameters, including:

[0101] Based on the electrical operating parameters in the energy transmission path, determine the actual voltage and current parameters of the secondary winding under a given calibration command.

[0102] Update the gain calibration coefficients and / or offset calibration coefficients based on the actual voltage and current parameters.

[0103] In some implementations, the gain calibration coefficients and / or offset calibration coefficients are updated based on the actual voltage and current parameters, including:

[0104] Determine the third deviation between the actual voltage parameter and the expected voltage parameter under the given calibration instruction, and / or, determine the fourth deviation between the actual current parameter and the expected current parameter under the given calibration instruction;

[0105] Update the gain calibration coefficient and offset calibration coefficient using the third and / or fourth deviations.

[0106] The specific features of the implementation method corresponding to this parameter calibration method can be found in the foregoing. Figures 1 to 5 The relevant descriptions of the corresponding electronic device implementation methods will not be repeated here. As an optional implementation method, this parameter calibration method can be specifically executed by the controller 202 in the aforementioned electronic device.

[0107] This application also provides a computer-readable storage medium storing a computer program that, when executed by a processor, implements the parameter calibration method as described in any of the above embodiments.

[0108] Those skilled in the art will understand that all or part of the processes in the above embodiments can be implemented by a computer program instructing related hardware. The program can be stored in a computer-readable storage medium, and when executed, it can include the processes of the embodiments of the above methods. The storage medium can be a magnetic disk, optical disk, read-only memory (ROM), or random access memory (RAM), etc.

Claims

1. An electronic device, characterized in that, The system includes a housing, a transformer housed within the housing, and a calibration module. The primary winding of the transformer is used to connect to a plasma load. The calibration module includes: The calibration load is connected to the second winding of the transformer; The controller is configured to, in calibration mode, control the primary winding of the transformer, the secondary winding, and the calibration load to form an energy transmission path, and to update control parameters based on electrical operating parameters in the energy transmission path, the control parameters being used to transmit power to the plasma load.

2. The electronic device according to claim 1, characterized in that, The calibration module also includes: A switching switch is connected in series between the calibration load and the secondary winding; The controller is also used to control the switching switch to be turned on in the calibration mode to form the energy transmission path.

3. The electronic device according to claim 1, characterized in that, The electrical operating parameters include a first electrical operating parameter and a second electrical operating parameter, and the calibration module further includes: The first detection unit is used to detect the first electrical operating parameter on the primary winding side of the energy transmission path; The second detection unit is used to detect the second electrical operating parameter on the second stage winding side in the energy transmission path; Specifically, in calibration mode, the controller controls the primary winding, the secondary winding, and the calibration load of the transformer to form an energy transmission path, and updates the control parameters based on the first electrical operating parameters and the second electrical operating parameters.

4. The electronic device according to claim 1, characterized in that, The transformer also includes a third-stage winding; Specifically, in calibration mode, the controller controls the primary winding, the secondary winding, and the calibration load of the transformer to form an energy transmission path, and updates the control parameters based on the electrical operating parameters and the third electrical operating parameters coupled from the energy transmission path to the tertiary winding through electromagnetic induction.

5. The electronic device according to claim 1, characterized in that, It also includes a heat dissipation channel that communicates with the external heat dissipation environment, and the calibration load is connected to the heat dissipation channel; The heat dissipation channel includes at least one of air-cooled heat dissipation channel or water-cooled heat dissipation channel.

6. The electronic device according to any one of claims 1-5, characterized in that, The control parameters include model compensation parameters, which are used to correct the given power of the plasma load in the non-calibration mode; The controller is specifically used for: In calibration mode, the primary winding of the transformer, the secondary winding, and the calibration load are controlled to form an energy transmission path; Calculate the actual excitation inductance and / or actual core loss of the transformer model based on the electrical operating parameters in the transmission path. The model compensation parameters are updated based on the actual excitation inductance and / or actual core loss.

7. The electronic device according to claim 6, characterized in that, The controller is specifically used for: In calibration mode, the primary winding of the transformer, the secondary winding, and the calibration load are controlled to form an energy transmission path; Calculate the actual excitation inductance and / or actual core loss of the transformer model based on the electrical operating parameters in the transmission path. Determine a first deviation between the initial magnetizing inductance and the actual magnetizing inductance, and / or determine a second deviation between the initial core loss and the actual core loss; The model compensation parameters are updated using the first deviation and / or the second deviation.

8. The electronic device according to any one of claims 1-5, characterized in that, The control parameters include a gain calibration coefficient and / or an offset calibration coefficient, which are used to correct the electrical operating parameters of the plasma load sampled in non-calibration mode. The controller is specifically used for: In calibration mode, the primary winding of the transformer, the secondary winding, and the calibration load are controlled to form an energy transmission path; Based on the electrical operating parameters in the energy transmission path, determine the actual voltage and actual current parameters of the secondary winding under a given calibration command; Update the gain calibration coefficient and / or the offset calibration coefficient based on the actual voltage parameters and the actual current parameters.

9. The electronic device according to claim 8, characterized in that, The controller is specifically used for: In calibration mode, the primary winding of the transformer, the secondary winding, and the calibration load are controlled to form an energy transmission path; Based on the electrical operating parameters in the energy transmission path, determine the actual voltage and actual current parameters of the secondary winding under a given calibration command; Determine the third deviation between the actual voltage parameter and the expected voltage parameter under the given calibration command, and / or determine the fourth deviation between the actual current parameter and the expected current parameter under the given calibration command; The gain calibration coefficient and the offset calibration coefficient are updated using the third deviation and / or the fourth deviation.

10. A parameter calibration method, characterized in that, include: In calibration mode, the primary winding of the transformer controlling the electronic device, the secondary winding of the transformer, and the calibration load of the electronic device form an energy transmission path. Based on the electrical operating parameters in the energy transmission path, the control parameters are updated. These control parameters are used to transmit power to the plasma load, which is connected to the primary winding of the transformer.

11. The parameter calibration method according to claim 10, characterized in that, Also includes: In the calibration mode, the switching switch is turned on to form the energy transmission path; The switching switch is connected in series between the calibration load and the secondary winding.

12. The parameter calibration method according to claim 10, characterized in that, The electrical operating parameters include the first electrical operating parameters on the primary winding side of the energy transmission path, and the second electrical operating parameters on the secondary winding side of the energy transmission path. Based on the electrical operating parameters in the energy transmission path, update the control parameters, including: The control parameters are updated based on the first electrical operating parameters and the second electrical operating parameters.

13. The parameter calibration method according to claim 10, characterized in that, The transformer also includes a third-stage winding; Based on the electrical operating parameters in the energy transmission path, update the control parameters, including: The control parameters are updated based on the electrical operating parameters in the energy transmission path and the third electrical operating parameters coupled from the energy transmission path to the third winding via electromagnetic induction.

14. The parameter calibration method according to any one of claims 10-13, characterized in that, The control parameters include model compensation parameters, which are used to correct the given power of the plasma load in the non-calibration mode; Based on the electrical operating parameters in the energy transmission path, update the control parameters, including: Calculate the actual excitation inductance and / or actual core loss of the transformer model based on the electrical operating parameters in the transmission path. The model compensation parameters are updated based on the actual excitation inductance and / or actual core loss.

15. The parameter calibration method according to claim 14, characterized in that, Based on the actual magnetizing inductance and / or actual core loss, the model compensation parameters are updated, including: Determine a first deviation between the initial magnetizing inductance and the actual magnetizing inductance, and / or determine a second deviation between the initial core loss and the actual core loss; The model compensation parameters are updated using the first deviation and / or the second deviation.

16. The parameter calibration method according to any one of claims 10-13, characterized in that, The control parameters include a gain calibration coefficient and / or an offset calibration coefficient, which are used to correct the electrical operating parameters of the plasma load sampled in non-calibration mode. Based on the electrical operating parameters in the energy transmission path, update the control parameters, including: Based on the electrical operating parameters in the energy transmission path, determine the actual voltage and actual current parameters of the secondary winding under a given calibration command; Update the gain calibration coefficient and / or the offset calibration coefficient based on the actual voltage parameters and the actual current parameters.

17. The parameter calibration method according to claim 16, characterized in that, Based on the actual voltage parameters and the actual current parameters, update the gain calibration coefficient and / or the offset calibration coefficient, including: Determine the third deviation between the actual voltage parameter and the expected voltage parameter under the given calibration command, and / or determine the fourth deviation between the actual current parameter and the expected current parameter under the given calibration command; The gain calibration coefficient and the offset calibration coefficient are updated using the third deviation and / or the fourth deviation.

18. A computer-readable storage medium, characterized in that, The computer-readable storage medium stores a computer program that, when executed by a processor, implements the parameter calibration method as described in any one of claims 10-17.

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