Clean room temperature and humidity zoning intelligent control device and method

Abstract

The invention discloses a clean room temperature and humidity zoning intelligent control device and method, and belongs to the technical field of clean room air conditioning. The system comprises a clean room, an FFU unit and at least one air conditioning unit, the clean room comprises a clean area, a bottom plate air return interlayer and a vertical air return passageway, the FFU unit is composed of a plurality of FFU fans, the FFU unit is arranged in the clean area, the clean area is divided into a clean room technical interlayer and a plurality of clean room subareas, and the air conditioning unit is arranged in the clean room technical interlayer. Each clean room subarea corresponds to one FFU fan; the control system is suitable for regional air conditioner temperature and humidity control of the clean room, and can collect regional temperature and humidity parameters of the clean room through a communication protocol and output a control signal to an air conditioner unit to adjust air outlet temperature and humidity parameters, so that the control system adapts to different process equipment working conditions, and on-demand supply, energy consumption reduction, energy conservation and environmental protection are achieved; the air conditioning unit and the FFU fan are easy to connect and disassemble, and the maintenance efficiency is better.

Description

Technical Field

[0001] This invention belongs to the field of cleanroom air conditioning technology, and particularly relates to a cleanroom temperature and humidity zoned intelligent control device and method. Background Technology

[0002] Existing cleanroom air conditioning systems typically feature a suspended ceiling technical mezzanine, employing fresh air, FFUs, and dry coils. Fresh air is treated separately before being delivered into the technical mezzanine, while indoor return air is treated by the dry coils before being delivered into the technical mezzanine to mix with the fresh air. The FFUs are installed in the ceiling, drawing air from the technical mezzanine, filtering it through high-efficiency filters, and then delivering it into the room to control the cleanliness and temperature / humidity parameters of the room.

[0003] However, the process equipment placed in the clean room has different standard requirements for temperature and humidity. When planning the layout of process equipment, process equipment with different standard temperature and humidity requirements is usually placed separately to facilitate energy saving. However, for process equipment that must be placed in the same clean room, since the FFU draws the same air from the technical mezzanine and delivers it into the clean room, it is impossible to deliver air with different temperature and humidity parameters according to the location of process equipment with different standard requirements. This makes it necessary to determine the temperature and humidity control of the entire clean room according to the process equipment with the highest standard requirements, resulting in the clean air conditioning system consuming more energy. Summary of the Invention

[0004] The purpose of this invention is to address the problems existing in the prior art by providing a cleanroom temperature and humidity zoned intelligent control device and method.

[0005] To achieve the above objectives, the invention employs the following technical solution: a cleanroom temperature and humidity zoned intelligent control device, comprising: A cleanroom, comprising a clean area, a floor return air interlayer, and a vertical return air duct; The FFU unit consists of multiple FFU fans. The FFU unit is installed in the clean area, which divides the clean area into a cleanroom technical mezzanine and multiple cleanroom partitions. Each cleanroom partition corresponds to one FFU fan. At least one air conditioning unit, the outlet of which is connected to an air supply duct, the outlet of which is connected to an electric air volume regulating valve, and the outlet of which is connected to a magnetic connection pipe assembly. The outlet of the magnetic connecting pipe assembly is connected to the inlet of any of the FFU fans, and the air conditioning unit is used to control the temperature and humidity of the corresponding cleanroom zone via any of the FFU fans; Both the air conditioning unit and the FFU fan are equipped with wired control boxes. The inlet and outlet of the air conditioning unit are connected to an inlet pipe and an outlet pipe, respectively. An electric water valve is installed on the inlet pipe. The outlet of the air supply duct is connected to a differential pressure sensor, one end of which is connected to the magnetic connection pipe assembly. The wired control box, the electric air volume regulating valve, the electric water valve, and the differential pressure sensor are all electrically connected to an intelligent controller. The intelligent controller is also electrically connected to a pressure sensor, a temperature sensor, and a humidity sensor.

[0006] By adopting the above technical solution, using the air conditioning unit and FFU fan in combination, and controlling the air volume of the electric air volume regulating valve and the temperature and humidity of the fresh air output by the air conditioning unit through the communication protocol, the temperature and humidity parameters of the process equipment in the clean room are supplied on demand, thereby reducing energy consumption.

[0007] As a further technical solution, the cleanroom technical mezzanine is connected to an integrated fresh air system unit. The fresh air from the cleanroom is processed by the integrated fresh air system unit and then sent into the cleanroom technical mezzanine. The vertical return air duct is arranged around the clean area, and the bottom plate return air mezzanine is arranged at the bottom of the clean area. Dry coils connected to the vertical return air duct are arranged around the clean area. The bottom plate return air mezzanine is integrally connected to the vertical return air duct and to the clean area.

[0008] By adopting the above technical solution, the dry coil and the integrated fresh air system are used together to treat the air in the technical interlayer of the clean room to a lower standard of temperature and humidity to meet the requirements of most process equipment.

[0009] As a further technical solution, all FFU fans are fixed to the carrier frame with bolts. The carrier frame and the air conditioning unit are both suspended from the ceiling of the clean area by suspension screws. The outlet of the FFU fan is equipped with a high-efficiency filter, and the inlet of the FFU fan is equipped with filter cotton.

[0010] By adopting the above technical solutions, the FFU fan uses inlet filter cotton and outlet high-efficiency filter to purify the air again during use, thereby improving the cleanliness of the cleanroom partitions. The setting of suspension screws and carriers makes it easy to install the FFU fan and divide the cleanroom area into cleanroom technical mezzanine and multiple cleanroom partitions. This makes the cleanroom partitions aesthetically pleasing and facilitates subsequent maintenance and repair of the FFU fan.

[0011] As a further technical solution, the magnetic connecting pipe assembly includes two connecting pipes and a first flexible pipe. The first flexible pipe is fixed between the two connecting pipes by bolts. The inlet of one connecting pipe is connected to the outlet of the electric air volume regulating valve, and the outlet of the other connecting pipe is magnetically fixed and connected to the inlet of the FFU fan.

[0012] By adopting the above technical solution, the first flexible tube allows the connecting pipe connected to the FFU fan inlet to be easily fixed and disassembled by magnetic attraction, facilitating the replacement of the FFU fan inlet filter cotton and enabling corresponding adjustments and adaptations according to different process equipment, thereby improving the overall practicality of the device.

[0013] As a further technical solution, the intelligent controller is installed in the clean area, and the pressure sensor, the temperature sensor and the humidity sensor are all installed in the clean room partition controlled by the air conditioning unit.

[0014] By adopting the above technical solutions, pressure sensors, temperature sensors, and humidity sensors can be set in the corresponding cleanroom zones to accurately collect temperature, humidity, and pressure parameters, thereby improving the control accuracy of the intelligent controller.

[0015] As a further technical solution, the outlet of the air conditioning unit is connected to a second flexible pipe, and the outlet of the second flexible pipe is connected to the inlet of the air supply duct.

[0016] By adopting the above technical solution, the air supply duct is connected to the second flexible pipe, which makes the air supply duct, air conditioning unit and magnetic connection pipe group more flexible during the installation of FFU fan, and makes the installation more convenient.

[0017] As a further technical solution, the air conditioning unit is any one of fan coil unit, air conditioning unit, and direct expansion air conditioning unit.

[0018] By adopting the above technical solutions, equipment can be selected according to actual usage, enabling the supply of temperature and humidity parameters for process equipment in cleanroom zones to be low-energy and on demand.

[0019] A method for intelligent zoned control of cleanroom temperature and humidity, comprising the following steps: S1. Outdoor fresh air is processed by the integrated fresh air system and then sent into the technical interlayer of the clean room. The air in the clean room is cooled through the bottom return air interlayer and the vertical return air duct and then sent back to the technical interlayer of the clean room to mix with the fresh air. S2. The mixed air is sent into the corresponding cleanroom zone by the FFU fan so that the cleanroom zone meets the basic temperature and humidity parameter requirements of the process equipment. S3. The air conditioning unit on some FFU fans draws out the air mixed in the cleanroom technical interlayer and then enters the FFU fan through the air supply duct, electric air volume regulating valve and magnetic connection pipe assembly in sequence. S4 and FFU fans deliver the air regulated by the air conditioning unit into the corresponding cleanroom zones, so that the cleanroom zones meet the temperature and humidity parameters required by the process equipment. S5. Simultaneously, the intelligent controller collects the pressure difference, pressure, temperature, and humidity parameters in the corresponding cleanroom zone of the air conditioning unit. Through the communication protocol, it controls the air volume of the electric air volume regulating valve and the output air temperature and humidity parameters of the air conditioning unit to maintain the required temperature and humidity parameters of the process equipment in the corresponding cleanroom zone.

[0020] As a further technical solution, the intelligent controller collects the pressure difference, pressure, temperature and humidity parameters of the air conditioning unit in the clean room zone through the differential pressure sensor, the pressure sensor, the temperature sensor and the humidity sensor respectively.

[0021] As a further technical solution, the communication protocol controls the air volume of the electric air volume regulating valve and the output fresh air temperature and humidity parameters of the air conditioning unit in the following way: The intelligent controller receives the pressure difference parameters at the inlet and outlet of the electric air volume regulating valve from the differential pressure sensor. Pressure, temperature, and humidity sensors respectively collect pressure, temperature, and humidity parameters for their respective cleanroom zones. Then, the intelligent controller's internal program uses a PID closed-loop control algorithm. ; This provides the control command data needed to eliminate or reduce deviations, and transmits it to the electric air volume regulating valve to control the air supply volume, and to the wired control box of the air conditioning unit and the electric water valve on the air conditioning unit to control the output air temperature and humidity. Where u(t) is the output value, e(t) is the difference between the set value and the measured value, and K P K is the proportional control coefficient. I K is the integral control coefficient. D These are the differential control coefficients. This represents the integral of the error signal from time 0 to time t. This represents the derivative of the error signal at time t, where t is the time variable. Let dt represent the differential of the difference e(t), where dt is the small change in the time variable t.

[0022] By adopting the above technical solution, the PID closed-loop control algorithm calculates the control command data required to eliminate or reduce deviations by real-time monitoring of pressure difference, pressure, temperature and humidity parameters, and transmits it to the electric air volume regulating valve to control the air supply volume, and to the wired control box of the air conditioning unit and the electric water valve on the air conditioning unit to control the output air temperature and humidity, so as to achieve the target values ​​of temperature and humidity parameters required by the process equipment in the clean room zoning.

[0023] Compared with the prior art, the beneficial effects of the present invention are: 1. The intelligent control device and method for cleanroom temperature and humidity zones adopts a design that combines air conditioning units and FFU fans. It collects parameters such as pressure difference, pressure, temperature and humidity, and controls the air volume of electric air volume regulating valves and the temperature and humidity of fresh air output by air conditioning units through communication protocols. This ensures that the cleanroom zones meet the temperature and humidity parameter requirements of the process equipment, thereby avoiding the need for the integrated fresh air system to operate at the highest standard of process equipment requirements. It also ensures that the temperature and humidity parameters of the process equipment in the cleanroom zones are supplied on demand, reducing energy consumption. 2. The cleanroom temperature and humidity zone intelligent control device and method uses magnetic connection between the magnetic connecting pipe group and the FFU fan inlet, which makes it easy to install and remove the air conditioning unit from the FFU fan, and facilitates corresponding adjustment and adaptation according to different process equipment, thereby improving the overall practicality of the device. Attached Figure Description

[0024] Figure 1 This is a schematic diagram of the structure of the present invention; Figure 2 This is a schematic diagram of the air conditioning unit and FFU fan of the present invention and their corresponding structures.

[0025] In the diagram: 1. Cleanroom partition; 2. Base return air interlayer; 3. Vertical return air duct; 4. Carrier frame; 5. FFU fan; 6. HEPA filter; 7. Intelligent controller; 8. Air conditioning unit; 9. Supply air duct; 10. Electric air volume regulating valve; 11. Magnetic connecting pipe assembly; 12. Suspension screw; 13. Water inlet pipe; 14. Water outlet pipe; 15. Electric water valve; 16. Integrated fresh air system unit; 17. Wired control box; 18. Cleanroom technical interlayer; 19. Dry coil; 20. Temperature sensor; 21. Pressure sensor; 22. Differential pressure sensor; 23. Humidity sensor. Detailed Implementation

[0026] The technical solution of the present invention will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are merely some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0027] In the description of this invention, it should be noted that the terms "middle", "upper", "lower", "left", "right", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0028] like Figure 1As shown in Figure 2, the specific scheme of the embodiment is as follows: A cleanroom temperature and humidity zoned intelligent control device includes a cleanroom, an FFU unit, and at least one air conditioning unit 8. The cleanroom includes a clean area, a bottom return air interlayer 2, and a vertical return air duct 3. The FFU unit consists of multiple FFU fans 5. The FFU unit is installed in the clean area, dividing the clean area into a cleanroom technical interlayer 18 and multiple cleanroom zones 1. Each cleanroom zone corresponds to one FFU fan 5. The outlet of the air conditioning unit 8 is connected to an air supply duct 9, the outlet of the air supply duct 9 is connected to an electric air volume regulating valve 10, and the outlet of the electric air volume regulating valve 10 is connected to a magnetic connection pipe assembly 11. The outlet of the air conditioning unit 8 is connected to the inlet of any FFU fan 5. The air conditioning unit 8 is used to control the temperature and humidity of the corresponding cleanroom zone 1 via any FFU fan 5. Both the air conditioning unit 8 and the FFU fan 5 are equipped with wired control boxes 17. The inlet and outlet of the air conditioning unit 8 are connected to the inlet pipe 13 and the outlet pipe 14, respectively. An electric water valve 15 is installed on the inlet pipe 13. The outlet of the air supply duct 9 is connected to a differential pressure sensor 22, one end of which is connected to the magnetic connection pipe group 11. The wired control box 17, the electric air volume regulating valve 10, the electric water valve 15 and the differential pressure sensor 22 are all electrically connected to the intelligent controller 7. The intelligent controller 7 is also electrically connected to the pressure sensor 21, the temperature sensor 20 and the humidity sensor 23.

[0029] Among them, the air conditioning unit 8 can be any of the fan coil unit, air conditioning unit and direct expansion air conditioning unit. The equipment can be selected according to the actual use, so as to achieve the supply of temperature and humidity parameters of process equipment in clean room zone 1 on demand with low energy consumption.

[0030] Specifically, outdoor fresh air is processed by the integrated fresh air system unit 16 and then sent into the cleanroom technical interlayer 18. It is then returned to the cleanroom technical interlayer 18 through the bottom return air interlayer 2 and the vertical return air duct 3 to mix with the fresh air, and then sent to the corresponding cleanroom zone 1 to ensure that the cleanroom zone 1 meets the basic temperature and humidity parameter requirements of the process equipment. The mixed air then returns to the cleanroom technical interlayer 18 through the bottom return air interlayer 2 and the vertical return air duct 3 to mix with the fresh air. The air conditioning units 8 on some of the FFU fans 5 extract the mixed air and sequentially send it through the air supply duct 9, the electric air volume regulating valve 10, and the magnetic connection pipe assembly 11 into the FFU fan 5, thus sending the fresh air regulated by the air conditioning units 8 into the corresponding cleanroom zone. In cleanroom zone 1, the system ensures that the cleanroom zone 1 meets the temperature and humidity parameters required by the process equipment. At the same time, the intelligent controller 7 collects the pressure difference, pressure, temperature, and humidity parameters of the air conditioning unit 8 in the cleanroom zone 1 through differential pressure sensor 22, pressure sensor 21, temperature sensor 20, and humidity sensor 23, respectively. Through the communication protocol, the controller controls the air volume of the electric air volume regulating valve 10 and the temperature and humidity of the fresh air output by the air conditioning unit 8 via the wired control box 17, maintaining the temperature and humidity parameters required by the process equipment in the cleanroom zone 1. This avoids the fresh air system integrated unit 16 operating at the highest standard of process equipment requirements, ensuring that the temperature and humidity parameters of the process equipment in the cleanroom zone 1 are supplied on demand, thus reducing energy consumption.

[0031] In addition, the intelligent controller 7 is set in the clean area, and the pressure sensor 21, temperature sensor 20 and humidity sensor 23 are all set in the clean room partition 1 controlled by the corresponding air conditioning unit 8; the outlet of the air conditioning unit 8 is connected to a second flexible pipe, and the outlet of the second flexible pipe is connected to the inlet of the air supply duct 9.

[0032] In this embodiment, the cleanroom technical interlayer 18 of the cleanroom is connected to a fresh air system integrated unit 16. The fresh air of the cleanroom is processed by the fresh air system integrated unit 16 and then sent into the cleanroom technical interlayer 18. The vertical return air duct 3 is set around the clean area, and the bottom plate return air interlayer 2 is set at the bottom of the clean area. Dry coils 19 connected to the vertical return air duct 3 are set around the clean area. The bottom plate return air interlayer 2 is connected to the vertical return air duct 3 as a whole, and the bottom plate return air interlayer 2 is connected to the clean area.

[0033] The dry coil 19 is used in conjunction with the integrated fresh air system 16 to treat the air in the cleanroom technical interlayer 18 to a lower standard of temperature and humidity to meet the needs of most process equipment.

[0034] In this embodiment, the FFU fans 5 are all fixed to the carrier frame 4 by bolts. The carrier frame 4 and the air conditioning unit 8 are both suspended on the ceiling of the clean area by suspension screws 12. The outlet of the FFU fan 5 is equipped with a high-efficiency filter 6, and the inlet of the FFU fan 5 is equipped with filter cotton.

[0035] It should be noted that during use, the FFU fan 5 uses inlet filter cotton and outlet high-efficiency filter 6 to purify the air again, thereby improving the cleanliness of cleanroom zone 1. The installation of the suspension screw 12 and the carrier 4 facilitates the installation of the FFU fan 5, dividing the clean area into a cleanroom technical mezzanine 18 and multiple cleanroom partitions 1. This not only makes the cleanroom partitions 1 aesthetically pleasing but also facilitates the subsequent maintenance and repair of the FFU fan 5. It also makes full use of vertical space, creating more clean working areas within a limited area, while reducing construction costs and operating energy consumption.

[0036] In this embodiment, the magnetic connecting pipe assembly 11 includes two connecting pipes and a first flexible pipe. The first flexible pipe is fixed between the two connecting pipes by bolts. The inlet of one connecting pipe is connected to the outlet of the electric air volume regulating valve 10, and the outlet of the other connecting pipe is magnetically fixed and connected to the inlet of the FFU fan 5.

[0037] Specifically, the outlet of the magnetically fixed connecting pipe of the FFU fan 5 is fixed with a metal frame, and a high-attraction neodymium iron boron magnet is embedded in it, so that bolts are not required for fixing, which facilitates the replacement of the filter cotton at the inlet of the FFU fan 5. At the same time, it makes it easy to install and remove the air conditioning unit 8 from the FFU fan 5, and facilitates corresponding adjustments and adaptations according to different process equipment, thereby improving the overall practicality of the device.

[0038] Based on the apparatus in the above embodiments, such as Figure 1-2 As shown in this embodiment, a cleanroom temperature and humidity zoned intelligent control method includes the following steps: S1. Outdoor fresh air is processed by the integrated fresh air system 16 and then sent into the clean room technical interlayer 18. The clean room air is cooled by the bottom plate return air interlayer 2 and the vertical return air duct 3 through the dry coil 19 and sent back to the clean room technical interlayer 18 to mix with the fresh air. S2. The mixed air is sent into the corresponding cleanroom zone 1 by the FFU fan 5, so that the cleanroom zone 1 meets the basic temperature and humidity parameter requirements of the process equipment. S3. The air conditioning unit 8 on some FFU fans 5 draws out the air mixed in the cleanroom technical interlayer 18 and enters the FFU fan 5 through the air supply duct 9, electric air volume regulating valve 10 and magnetic connection pipe group 11 in sequence. S4 and FFU fan 5 deliver the fresh air regulated by air conditioning unit 8 into the corresponding clean room zone 1, so that clean room zone 1 meets the temperature and humidity parameter requirements of the process equipment. S5. At the same time, the intelligent controller 7 collects the pressure difference, pressure, temperature and humidity parameters in the cleanroom partition 1 corresponding to the air conditioning unit 8 through the differential pressure sensor 22, pressure sensor 21, temperature sensor 20 and humidity sensor 23 respectively. It controls the air volume of the electric air volume regulating valve 10 and controls the output air temperature and humidity of the air conditioning unit 8 through the communication protocol to maintain the required temperature and humidity parameters of the process equipment in the corresponding cleanroom partition 1.

[0039] In this embodiment, the communication protocol controls the air volume of the electric air volume regulating valve 10 and the output fresh air temperature and humidity of the air conditioning unit 8 in the following way: The intelligent controller 7 receives the pressure difference parameters at the inlet and outlet of the electric air volume regulating valve 10 from the differential pressure sensor 22. The pressure sensor 21, temperature sensor 20, and humidity sensor 23 respectively collect the pressure, temperature, and humidity parameters in the corresponding cleanroom zone 1. Then, the internal program of the intelligent controller 7 uses a PID closed-loop control algorithm: ; This provides the control command data required to eliminate or reduce deviations, and transmits it to the electric air volume regulating valve 10 to control the air supply volume, and to the wired control box 17 of the air conditioning unit 8 and the electric water valve 15 on the air conditioning unit 8 to control the output air temperature and humidity. Where u(t) is the output value, e(t) is the difference between the set value and the measured value, and K P K is the proportional control coefficient. I K is the integral control coefficient. D These are the differential control coefficients. This represents the integral of the error signal from time 0 to time t. This represents the derivative of the error signal at time t, where t is a time variable, a continuous time variable during the operation of the intelligent controller. Let dt represent the differential of the difference e(t), where dt is the small change in the time variable t.

[0040] Specifically, the PID closed-loop control algorithm calculates the control command data required to eliminate or reduce deviations by real-time monitoring of pressure difference, pressure, temperature and humidity parameters, and transmits it to the electric air volume regulating valve 10 to control the air supply volume, and to the wired control box 17 of the air conditioning unit 8 and the electric water valve 15 on the air conditioning unit 8 to control the output air temperature and humidity, so as to achieve the target values ​​of temperature and humidity parameters required by the process equipment in the clean room partition 1.

[0041] It should be noted that the PID closed-loop control algorithm corrects the output value based on the feedback from the controlled object. It obtains the e(t) value by comparing the target value with the feedback values ​​u(t) from multiple sensors in the previous time period, and then adjusts the proportional controller K. P The value (output u(t) is proportional to the input deviation e(t), quickly reflecting and reducing the deviation), integral controller KI Value (integral element eliminates steady-state error and improves the system's accuracy) and differential controller K D The value (the differential element reflects the changing trend of the deviation signal, and the introduction of a correction value reduces the adjustment time) is used to obtain new multiple sensor output values ​​u(t).

[0042] in addition, Used to eliminate steady-state error Used to predict the future trend of error signals and correct them in advance, t is a time variable, which is a continuous time variable during the operation of the intelligent controller 7.

[0043] The working principle of the above embodiments is as follows: Outdoor fresh air is processed by the integrated fresh air system unit 16 and then delivered into the cleanroom technical interlayer 18. It is then cooled via the bottom return air interlayer 2 and vertical return air duct 3 through the dry coil 19 before being returned to the cleanroom technical interlayer 18 to mix with the fresh air. The mixed air is then delivered to the corresponding cleanroom zone 1 to ensure that the cleanroom zone 1 meets the basic temperature and humidity parameter requirements of the process equipment. The mixed air is then cooled again via the bottom return air interlayer 2 and vertical return air duct 3 through the dry coil 19 before returning to the cleanroom technical interlayer 18 to mix with the fresh air. The air conditioning units 8 on some of the FFU fans 5 extract the mixed air, which then passes sequentially through the air supply duct 9, the electric air volume regulating valve 10, and the magnetic... The suction connection pipe assembly 11 enters the FFU fan 5. The FFU fan 5 delivers the fresh air regulated by the air conditioning unit 8 into the corresponding clean room zone 1, so that the clean room zone 1 meets the temperature and humidity parameter requirements of the process equipment. At the same time, the intelligent controller 7 collects the pressure difference, pressure, temperature and humidity parameters of the clean room zone 1 corresponding to the air conditioning unit 8 through the differential pressure sensor 22, pressure sensor 21, temperature sensor 20 and humidity sensor 23, respectively. Through the communication protocol, it controls the air volume of the electric air volume regulating valve 10 and the temperature and humidity of the fresh air output by the air conditioning unit 8 via the wired control box 17 to maintain the temperature and humidity parameter requirements of the process equipment in the corresponding clean room zone 1.

[0044] Experimental examples of the above embodiments: The inner exposure room cleanroom on the third floor of an electronics PCB factory (ISO Class 6, area 1050 square meters, total air supply volume 182700 m³ / h) 3 Taking an example (where the area of ​​a different demand zone is 110 square meters) as an example, the following analysis is conducted: The formula for calculating the cooling capacity of air handling units is: Q = L × Δi × q; The formula for calculating power consumption is: P = Q / cop; The formula for calculating the energy saving rate is: η = ΔP / P; Where Q is the cooling capacity (kW) and L is the air volume flow rate (m³ / s). 3 / h), Δi is the air enthalpy difference (kJ / kg), and q is the air volume density (kg / m³). 3 P is the power consumption (KW), cop is the energy efficiency ratio, η is the energy saving rate, and ΔP is the power consumption difference. Therefore, if the original design temperature and humidity parameters of the cleanroom (23℃, 55%) can meet the needs of most process production equipment, and the temperature parameters of the remaining parts are (21℃, 50%), then if a non-zoning control method is adopted, the temperature and humidity parameters of the entire cleanroom need to be adjusted to (21℃, 50%). The calculation results of the increased cooling capacity and power consumption are as follows (COP value is calculated as 5.8): Q=426.3KW, P=73.5KW; Using the same cleanroom zoning control method, the temperature and humidity in a 110-square-meter area were adjusted from (23℃, 55%) to (21℃, 50%), while the remaining areas remained unchanged. The calculation results are as follows: (air supply volume for the 110-square-meter area: 19140 m³ / h). 3 / h): Q1=44.66KW, P1=7.7KW Based on the above, the power consumption of the air conditioning unit 8 (10 sets) of this invention is P2 = (0.275 + 0.23) × 10 = 5.05 KW. Therefore, the total power consumption is P3 = P + P2 = 12.75 KW. Therefore, the energy saving rate is η=ΔP / P=(73.5-12.75) / 73.5=82.65%. It can be seen that by adopting the design of using air conditioning unit 8 and FFU fan 5 together, the temperature and humidity parameters of the process equipment in clean room zone 1 are supplied on demand, which greatly reduces energy consumption and saves costs.

[0045] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A cleanroom temperature and humidity zoned intelligent control device, characterized in that, include: A cleanroom, comprising a clean area, a floor return air interlayer, and a vertical return air duct; The FFU unit consists of multiple FFU fans. The FFU unit is installed in the clean area, which divides the clean area into a cleanroom technical mezzanine and multiple cleanroom partitions. Each cleanroom partition corresponds to one FFU fan. At least one air conditioning unit, the outlet of which is connected to an air supply duct, the outlet of which is connected to an electric air volume regulating valve, and the outlet of which is connected to a magnetic connection pipe assembly. The outlet of the magnetic connecting pipe assembly is connected to the inlet of any of the FFU fans, and the air conditioning unit is used to control the temperature and humidity of the corresponding cleanroom zone via any of the FFU fans; Both the air conditioning unit and the FFU fan are equipped with wired control boxes. The inlet and outlet of the air conditioning unit are connected to an inlet pipe and an outlet pipe, respectively. An electric water valve is installed on the inlet pipe. The outlet of the air supply duct is connected to a differential pressure sensor, one end of which is connected to the magnetic connection pipe assembly. The wired control box, the electric air volume regulating valve, the electric water valve, and the differential pressure sensor are all electrically connected to an intelligent controller. The intelligent controller is also electrically connected to a pressure sensor, a temperature sensor, and a humidity sensor.

2. The cleanroom temperature and humidity zoned intelligent control device according to claim 1, characterized in that: The cleanroom's technical mezzanine is connected to an integrated fresh air system unit. The fresh air from the cleanroom is processed by the integrated fresh air system unit and then sent into the cleanroom's technical mezzanine. The vertical return air duct is arranged around the clean area, and the bottom plate return air mezzanine is arranged at the bottom of the clean area. Dry coils connected to the vertical return air duct are arranged around the clean area. The bottom plate return air mezzanine is integrally connected to the vertical return air duct and to the clean area.

3. The cleanroom temperature and humidity zoned intelligent control device according to claim 1, characterized in that: The FFU fans are all fixed to the carrier frame with bolts. The carrier frame and the air conditioning unit are both suspended from the ceiling of the clean area by suspension screws. The FFU fan outlet is equipped with a high-efficiency filter and the FFU fan inlet is equipped with filter cotton.

4. The cleanroom temperature and humidity zoned intelligent control device according to claim 1, characterized in that: The magnetic connecting pipe assembly includes two connecting pipes and a first flexible pipe. The first flexible pipe is fixed between the two connecting pipes by bolts. The inlet of one connecting pipe is connected to the outlet of the electric air volume regulating valve, and the outlet of the other connecting pipe is magnetically fixed and connected to the inlet of the FFU fan.

5. The cleanroom temperature and humidity zoned intelligent control device according to claim 1, characterized in that: The intelligent controller is located in the clean area, and the pressure sensor, temperature sensor and humidity sensor are all located in the clean room partition controlled by the air conditioning unit.

6. The cleanroom temperature and humidity zoned intelligent control device according to claim 1, characterized in that: The air conditioning unit outlet is connected to a second flexible pipe, and the outlet of the second flexible pipe is connected to the inlet of the air supply duct.

7. The cleanroom temperature and humidity zoned intelligent control device according to claim 1, characterized in that: The air conditioning unit can be any one of a fan coil unit, an air handling unit, or a direct expansion air conditioning unit.

8. The method of a cleanroom temperature and humidity zoned intelligent control device according to any one of claims 1-7, characterized in that, The control method includes the following steps: S1. Outdoor fresh air is processed by the integrated fresh air system and then sent into the technical interlayer of the clean room. The air in the clean room is cooled through the bottom return air interlayer and the vertical return air duct and then sent back to the technical interlayer of the clean room to mix with the fresh air. S2. The mixed air is sent into the corresponding cleanroom zone by the FFU fan so that the cleanroom zone meets the basic temperature and humidity parameter requirements of the process equipment. S3. The air conditioning unit on some FFU fans draws out the air mixed in the cleanroom technical interlayer and then enters the FFU fan through the air supply duct, electric air volume regulating valve and magnetic connection pipe assembly in sequence. S4 and FFU fans deliver the air regulated by the air conditioning unit into the corresponding cleanroom zones, so that the cleanroom zones meet the temperature and humidity parameters required by the process equipment. S5. Simultaneously, the intelligent controller collects the pressure difference, pressure, temperature, and humidity parameters in the corresponding cleanroom zone of the air conditioning unit, and controls the air volume of the electric air volume regulating valve and the output air temperature and humidity parameters of the air conditioning unit through the communication protocol to maintain the required temperature and humidity parameters of the process equipment in the corresponding cleanroom zone.

9. The method of a cleanroom temperature and humidity zoned intelligent control device according to claim 8, characterized in that: The intelligent controller collects the pressure difference, pressure, temperature, and humidity parameters of the air conditioning unit in the cleanroom zone through the differential pressure sensor, the pressure sensor, the temperature sensor, and the humidity sensor, respectively.

10. The method of a cleanroom temperature and humidity zoned intelligent device according to claim 8, characterized in that: The communication protocol controls the air volume of the electric air volume regulating valve and the temperature and humidity of the fresh air output from the air conditioning unit in the following ways: The intelligent controller receives the pressure difference parameters at the inlet and outlet of the electric air volume regulating valve from the differential pressure sensor. Pressure, temperature, and humidity sensors respectively collect pressure, temperature, and humidity parameters for their respective cleanroom zones. Then, the intelligent controller's internal program uses a PID closed-loop control algorithm. ； This provides the control command data needed to eliminate or reduce deviations, and transmits it to the electric air volume regulating valve to control the air supply volume, and to the wired control box of the air conditioning unit and the electric water valve on the air conditioning unit to control the output air temperature and humidity. Where u(t) is the output value, e(t) is the difference between the set value and the measured value, and K P K is the proportional control coefficient. I K is the integral control coefficient. D These are the differential control coefficients. This represents the integral of the error signal from time 0 to time t. This represents the derivative of the error signal at time t, where t is the time variable. Let dt represent the differential of the difference e(t), where dt is the small change in the time variable t.

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